Apparatus for manufacturing display device and method of manufacturing display device

Abstract

Provided are an apparatus for manufacturing a display device including a mask assembly and a method of manufacturing a display device, the mask assembly including: a mask frame, comprising a pair of first side portions arranged in a first direction, a pair of second side portions arranged in a second direction intersecting with the first direction, and an opening portion defined by the first side portions and the second side portions; a mask sheet disposed on the opening portion of the mask frame, fixed to the mask frame, and including a plurality of openings; and a support member attached to at least one of the first side portion and the second side portion of the mask frame by an applied tensile force.

Description

[0001] This application is a divisional application of a patent application with an application date of January 21, 2020, application number 202010070772.8, and invention name “Mask assembly and apparatus for manufacturing a display device including a mask assembly”. Technical Field

[0002] Exemplary embodiments of the invention generally relate to a mask assembly apparatus, and more particularly, to a mask assembly for a display device and an apparatus for manufacturing a display device including the mask assembly. Background Art

[0003] Mobile electronic devices are widely used. As for mobile electronic devices, not only small electronic devices such as mobile phones have been widely used, but also tablet personal computers (PCs) have been widely used recently.

[0004] In order to support various functions, mobile electronic devices include display devices to provide visual information such as images to users. Recently, as components for driving display devices have been miniaturized, the portion of electronic devices occupied by display devices has gradually increased, and a bendable structure that allows the display device to have a predetermined angle in a flat state is being developed. The display device can be manufactured by a mask assembly having a fine pattern, through which a deposition material is applied to a substrate to produce the display device.

[0005] The above information disclosed in this Background section is only for understanding the background of the inventive concept and therefore it may contain information that does not constitute the prior art. Summary of the invention

[0006] The applicant has found that during the process of manufacturing a mask assembly for a display device, the mask frame may be deformed after the mask sheet is attached to the mask frame. As a result, because the deformed mask has a pattern different from the pattern designed for the display substrate, defects may occur in the display device manufactured by depositing a deposition material using the deformed mask assembly.

[0007] Since the mask assembly for a display device constructed according to the principles and exemplary embodiments of the invention can maintain an initially designed shape of a mask frame, the mask assembly can manufacture a display device having a fine deposition pattern.

[0008] For example, one or more support members for a mask assembly constructed according to the principles and exemplary embodiments of the invention can be selectively attached to or removed from a mask frame by applying a tensile force, thereby correcting deformation of the mask assembly through a simple structure without compromising the integrity of the mask assembly.

[0009] An apparatus for manufacturing a display device including a mask assembly constructed according to the principles and exemplary embodiments of the invention and a method for manufacturing a display device according to the principles of the invention can simply and quickly correct deformation of a mask frame occurring during a deposition process, thereby reducing the manufacturing time and manufacturing cost of the display device.

[0010] An apparatus for manufacturing a display device and a method for manufacturing a display device according to the principles of the invention and exemplary embodiments manufacture a display device including a precise pattern by using a mask assembly with minimized deformation and minimize a defect rate when manufacturing the display device.

[0011] Additional features of the inventive concepts will be set forth in the description which follows, and in part will be apparent from the description, or may be learned by practice of the inventive concepts.

[0012] According to aspects of the invention, a mask assembly for manufacturing a display device includes: a mask frame, including a pair of first side portions arranged along a first direction, a pair of second side portions arranged along a second direction intersecting the first direction, and an opening portion defined by the first side portions and the second side portions; a mask sheet, arranged on the opening portion of the mask frame, fixed on the mask frame, and including a plurality of openings; and a supporting member, attached to at least one of the first side portion and the second side portion of the mask frame by utilizing an applied tensile force.

[0013] The at least one of the first side portion and the second side portion of the mask frame may include a groove, and the supporting member may include a supporting rod disposed across the groove.

[0014] The length of the groove may be smaller than the length of one side of the opening portion of the mask frame.

[0015] The width of the groove may be about 1 / 2 or less of the width of the at least one side portion in which the groove is formed.

[0016] The support rod may be disposed across the slot in at least one of a length direction of the slot and a width direction of the slot.

[0017] The supporting member may include a supporting rod detachably attached to the mask frame to be detachable from the mask frame without damaging integrity of the mask frame according to deformation of the mask frame.

[0018] The support member may include a plurality of first support rods and a plurality of second support rods, and at least one of the first support rods may be attached to one of the first side portions of the mask frame, and at least one of the second support rods may be attached to another of the first side portions of the mask frame.

[0019] The number of the first support rods and the number of the second support rods may be different from each other.

[0020] According to another aspect of the invention, an apparatus for manufacturing a display device includes: a chamber in which a display substrate is arranged; a mask assembly arranged inside the chamber to face the display substrate; and a deposition source arranged inside the chamber to face the mask assembly, wherein the mask assembly includes a mask frame, a mask sheet and a supporting member, the mask frame includes a pair of first side portions arranged along a first direction, a pair of second side portions arranged along a second direction, and an opening portion defined by the first side portions and the second side portions, the mask sheet is arranged on the mask frame, fixed on the opening portion of the mask frame, and includes a plurality of openings, and the supporting member is attached to at least one of the first side portions and the second side portions of the mask frame by means of an applied tensile force.

[0021] The at least one of the first side portion and the second side portion of the mask frame may include a groove, and the supporting member may include a supporting rod disposed across the groove.

[0022] The support rod may be disposed across the slot in at least one of a length direction of the slot and a width direction of the slot.

[0023] The length of the groove may be smaller than the length of one side of the opening portion of the mask frame, or the width of the groove may be about 1 / 2 or less of the width of the at least one side portion in which the groove is formed.

[0024] The supporting member may include a supporting rod detachably attached to the mask frame so as to be detachable from the mask frame according to deformation of the mask frame without damaging integrity of the mask assembly.

[0025] The support rods may include a plurality of first support rods and a plurality of second support rods, at least one of the first support rods may be attached to one of the first side portions of the mask frame, and at least one of the second support rods may be attached to another of the first side portions of the mask frame.

[0026] The number of the first support rods and the number of the second support rods may be different from each other.

[0027] According to another aspect of the invention, a method for manufacturing a display device includes the following steps: sensing deformation of a mask frame; correcting the deformation of the mask frame by selectively attaching support rods to the mask frame or removing support rods from the mask frame; and arranging a mask assembly including the mask frame whose deformation has been corrected inside a deposition chamber, and then supplying and depositing a deposition material on a display substrate by using a deposition source.

[0028] The step of attaching the support member to the mask frame may include arranging and fixing the support rods on the mask frame with a tension force applied thereto.

[0029] The supporting member may include a plurality of first supporting rods and a plurality of second supporting rods, and the method may further include the following steps: arranging the first supporting rods and the second supporting rods on a plurality of parts of the mask frame according to deformation of the mask frame, and the plurality of parts of the mask frame are different from each other relative to the center of the mask frame.

[0030] The number of the first support rods and the number of the second support rods may be different from each other.

[0031] A groove may be provided in the mask frame, and the support member may span the groove in a width direction or a length direction of the groove.

[0032] It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The accompanying drawings illustrate exemplary embodiments of the invention and together with the description serve to explain the inventive concept. The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification.

[0034] Figure 1 is a cross-sectional view of an exemplary embodiment of an apparatus for manufacturing a display device constructed according to the principles of the invention.

[0035] Figure 2 yes Figure 1 A perspective view of the mask assembly shown in FIG.

[0036] Figure 3 yes Figure 2 0026] FIG. 1 is a plan view of an exemplary embodiment of a first deformed shape of a mask frame shown in FIG.

[0037] Figure 4 yes Figure 3 The mask frame shown in FIG. 1 is a plan view after the deformation has been corrected.

[0038] Figure 5 yes Figure 2 0026] FIG. 1 is a plan view of an exemplary embodiment of a second deformed shape of a mask frame shown in FIG.

[0039] Figure 6 yes Figure 5 The mask frame shown in FIG. 1 is a plan view after the deformation has been corrected.

[0040] Figure 7 is a perspective view of another exemplary embodiment of a mask assembly constructed according to the principles of the invention.

[0041] Figure 8 yes Figure 72 is a plan view of an exemplary embodiment of a third deformed shape of a mask frame shown in FIG.

[0042] Fig. 9 yes Figure 8 The mask frame shown in FIG. 1 is a plan view after the deformation has been corrected.

[0043] Fig.10 yes Figure 7 2 is a plan view of an exemplary embodiment of a fourth modified shape of a mask frame shown in FIG.

[0044] Fig.11 yes Fig.10 The mask frame shown in FIG. 1 is a plan view after the deformation has been corrected.

[0045] Fig.12 is a perspective view of yet another exemplary embodiment of a mask assembly constructed according to the principles of the invention.

[0046] Fig.13 It consists of Figure 2 , Figure 7 or Fig.12 0 is a plan view of an exemplary embodiment of a display device manufactured by an apparatus for manufacturing a display device using a mask assembly shown in FIG.

[0047] Fig.14 is along Fig.13 A cross-sectional view taken along line AA. DETAILED DESCRIPTION

[0048] In the following description, for the purpose of explanation, many specific details are set forth to provide a thorough understanding of various exemplary embodiments or implementations of the invention. As used herein, "embodiment" and "implementation" are interchangeable words as non-limiting examples of devices or methods using one or more inventive concepts disclosed herein. However, it is apparent that various exemplary embodiments may be practiced without these specific details or with one or more equivalent arrangements. In other cases, in order to avoid making various exemplary embodiments unnecessarily obscure, known structures and devices are shown in block diagram form. In addition, various exemplary embodiments may be different, but need not be exclusive. For example, without departing from the inventive concept, the specific shape, construction and characteristics of an exemplary embodiment may be used or implemented in another exemplary embodiment.

[0049] Unless otherwise specified, the illustrated exemplary embodiments will be understood as providing exemplary features of details of variations in some ways in which the inventive concept can be implemented in practice. Therefore, unless otherwise specified, the features, components, modules, layers, films, panels, regions and / or aspects, etc. (hereinafter individually or collectively referred to as "elements") of the various embodiments may be further combined, separated, interchanged and / or rearranged without departing from the inventive concept.

[0050] The use of cross hatching and / or shadows is usually provided in the drawings to make the boundaries between adjacent elements clear. Thus, unless otherwise specified, the presence or absence of cross hatching or shadows does not express or indicate any preference or requirement for the specific material, material properties, size, ratio, commonality between the elements shown and / or any other characteristics, attributes, properties, etc. of the elements. In addition, in the drawings, the size and relative size of the elements can be exaggerated for clarity and / or descriptive purposes. When the exemplary embodiment can be implemented differently, the specific process sequence can be performed differently from the described order. For example, two processes described in succession can be performed substantially simultaneously or in an order opposite to the described order. In addition, the same reference numerals represent the same elements.

[0051] When an element or layer is referred to as being "on" another element or layer, "connected to" or "bonded to" another element or layer, the element or layer may be directly on, directly connected to or directly bonded to the other element or layer, or there may be an intermediate element or intermediate layer. However, when an element or layer is referred to as being "directly on" another element or layer, "directly connected to" or "directly bonded to" another element or layer, there is no intermediate element or intermediate layer. For this reason, the term "connection" may refer to a physical connection, an electrical connection and / or a fluid connection with or without an intermediate element. In addition, the D1 axis, the D2 axis and the D3 axis are not limited to three axes such as the x-axis, the y-axis and the z-axis of a rectangular coordinate system, but may be interpreted in a broader sense. For example, the D1 axis, the D2 axis and the D3 axis may be perpendicular to each other, or may represent different directions that are not perpendicular to each other. For the purpose of this disclosure, "at least one of X, Y, and Z" and "at least one selected from the group consisting of X, Y, and Z" may be interpreted as any combination of only X, only Y, only Z, or two or more of X, Y, and Z, such as XYZ, XYY, YZ, and ZZ. As used herein, the term "and / or" includes any and all combinations of one or more of the relevant listed items.

[0052] Although the terms "first", "second", etc. may be used herein to describe various types of elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another element. Therefore, the first element discussed below may be named as the second element without departing from the disclosed teachings.

[0053] For descriptive purposes, spatially relative terms such as "under," "below," "under," "down," "above," "up," "above," "higher," "side" (e.g., as in "sidewall"), etc., may be used herein to describe the relationship of one element to another (other) element as shown in the accompanying drawings. In addition to the orientation depicted in the accompanying drawings, the spatially relative terms are intended to include different orientations of the device in use, operation, and / or manufacture. For example, if the device in the accompanying drawings is turned over, an element described as "under" or "beneath" other elements or features will subsequently be positioned "above" the other elements or features. Thus, the exemplary term "under" can include both above and below orientations. In addition, the device can be positioned otherwise (e.g., rotated 90 degrees or at other orientations), so the spatially relative descriptors used herein are interpreted accordingly.

[0054] The terms used herein are for the purpose of describing specific embodiments, and are not intended to be limited. As used herein, unless the context clearly indicates otherwise, the singular forms "one (kind / person)" and "said (the)" are also intended to include plural forms. In addition, when the terms "include" and / or "comprise" and their variations are used in this specification, it is explained that there are stated features, integral bodies, steps, operations, elements, components and / or their groups, but one or more other features, integral bodies, steps, operations, elements, components and / or their groups are not excluded from existence or addition. It should also be noted that, as used herein, the terms "substantially", "approximately" and other similar terms are used as approximate terms and are not used as terms of degree, so that they are used to explain the inherent deviations of measured values, calculated values ​​and / or provided values ​​that will be recognized by those of ordinary skill in the art.

[0055] Various exemplary embodiments are described herein with reference to cross-sectional views and / or exploded views as schematic diagrams of idealized exemplary embodiments and / or intermediate structures. As such, variations in the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are expected. Therefore, the exemplary embodiments disclosed herein should not necessarily be interpreted as being limited to the shapes of the specifically illustrated regions, but will include deviations in shape due to, for example, manufacturing. In this manner, the regions shown in the drawings may be schematic in nature, and the shapes of these regions may not reflect the actual shapes of the regions of the device, and as such, no limitation is necessarily intended.

[0056] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure is a part. Terms (such as those defined in general dictionaries) should be interpreted as having a meaning consistent with their meaning in the context of the relevant art and should not be interpreted in an ideal or overly formal sense unless expressly so defined herein.

[0057] Figure 1 is a cross-sectional view of an exemplary embodiment of an apparatus 100 for manufacturing a display device constructed according to the principles of the invention, Figure 2 yes Figure 1 A perspective view of the mask assembly 1 shown in FIG. Figure 3 yes Figure 2 A plan view of an exemplary embodiment of a first deformed shape of the mask frame 30 shown in FIG. Figure 4 yes Figure 3 The mask frame 30 shown in FIG. 1 is a plan view after the deformation has been corrected.

[0058] Reference Figures 1 to 4 , an apparatus 100 for manufacturing a display device may include a chamber 110 , a first support 120 , a second support 130 , a vision unit (such as a camera) 140 , a mask assembly 1 , a deposition source 160 , and a pressure regulator 170 .

[0059] A space may be formed inside the chamber 110 . A portion of the chamber 110 may be opened. A gate valve 110A may be installed in the open portion of the chamber 110 to selectively open / close the open portion of the chamber 110 .

[0060] The first support member 120 may support the display substrate D. In this case, the first support member 120 may support the display substrate D in various ways. For example, the first support member 120 may include an electrostatic chuck or an adhesive chuck. In another exemplary embodiment, the first support member 120 may include: a frame configured to place a portion of the display substrate D thereon and support the display substrate D; a clamp configured to clamp and fix a portion of the display substrate D. The first support member 120 is not limited thereto, but may include any device that can support the display substrate D. Hereinafter, for the convenience of description, the case where the first support member 120 includes an electrostatic chuck or an adhesive chuck is mainly described in detail.

[0061] The first support member 120 may include at least one of a permanent magnet and an electromagnet so that the mask assembly 1 and the display substrate D are closely attached to each other. In another exemplary embodiment, in the case where the first support member 120 includes a frame or a clamp, in order to enable the display substrate D and the mask assembly 1 to be more closely attached, a support member having a fixed shape and a fixed shape may be provided. Figure 1The shape of the first support member 120 shown in FIG. 1 is similar to that of at least one of a permanent magnet and an electromagnet.

[0062] The second support member 130 may seat the mask assembly 1 thereon. The second support member 130 may finely adjust the mask assembly 1 in at least two different directions.

[0063] The vision unit 140 may capture the positions of the display substrate D and the mask assembly 1. By moving at least one of the display substrate D and the mask assembly 1 based on the image captured by the vision unit 140, the display substrate D and the mask assembly 1 may be aligned.

[0064] The mask assembly 1 may include a mask frame 30 , a mask sheet 10 , a support frame 40 , and support members (which may be in the form of support rods 52 , 54 ).

[0065] The mask frame 30 may include a plurality of frames. In this case, the plurality of frames may have a lattice shape or a quadrilateral shape, and a space may be formed in the mask frame 30. In another exemplary embodiment, one opening 31 may be formed in a central portion of the mask frame 30. Hereinafter, for ease of description, a case where the mask frame 30 includes one opening 31 is mainly described in detail.

[0066] The mask frame 30 may define an area through which the deposition material passes. In this case, the opening 31 may have a quadrilateral shape. For example, the opening 31 may have a rectangular shape or a square shape. The edge of the mask frame 30 may have a quadrilateral shape. The mask frame 30 may have a pair of first side portions (i.e., long sides) and a pair of second side portions (i.e., short sides). For example, the long sides of the mask frame 30 may be arranged at Figure 2 In the Y direction, the short side of the mask frame 30 may be arranged at Figure 2 Therefore, the opening 31 of the mask frame 30 may be formed as an opening area defined by the long sides and the short sides of the mask frame 30 .

[0067] The deformation preventing grooves 51, 53 may be arranged in the short sides of the mask frame 30. The deformation preventing grooves 51, 53 may reduce or prevent deformation of the mask frame 30 due to force or stress applied thereto. In addition, the deformation preventing grooves 51, 53 may be arranged in the opposite side of the mask frame 30, that is, not on the side of the mask frame 30 facing the deposition source 160, and therefore, the deposition material does not accumulate in the deformation preventing grooves 51, 53.

[0068] The deformation preventing grooves 51, 53 may have a quadrilateral shape in a plan view. In this case, the planar shape of the deformation preventing grooves 51, 53 may include a rectangle. Specifically, the long sides of the deformation preventing grooves 51, 53 may be arranged in the same direction as the direction along which the short sides of the mask frame 30 are arranged.

[0069] Reference Figure 3 , the length S2 of the deformation preventing grooves 51 and 53 may be smaller than the length S1 of the short side of the opening 31. In the case where the length S2 of the deformation preventing grooves 51 and 53 exceeds the length S1 of the short side of the opening 31, the deformation of the deformation preventing grooves 51 and 53 becomes excessive, so the degree of distortion of the mask frame 30 becomes serious, and the strength of the short side of the mask frame 30 is impaired.

[0070] In addition, the width W2 of the deformation preventing grooves 51, 53 may be smaller than the width W1 of the short side of the mask frame 30. For example, the width W2 of the deformation preventing grooves 51, 53 may be about 1 / 2 or less of the width W1 of the short side of the mask frame 30. In the case where the width W2 of the deformation preventing grooves 51, 53 exceeds about 1 / 2 of the width W1 of the short side of the mask frame 30, the strength of the short side of the mask frame 30 is reduced, and thus the mask frame 30 may be damaged or easily deformed due to heat or the like.

[0071] The depth of the deformation preventing grooves 51, 53 may be smaller than the maximum thickness of the short sides of the mask frame 30. In this case, when the depth of the deformation preventing grooves 51, 53 is too large, the durability of the mask frame 30 may be reduced.

[0072] The deformation preventing grooves 51 , 53 may include a first deformation preventing groove 51 disposed in one of the short sides of the mask frame 30 , and a second deformation preventing groove 53 disposed in the other of the short sides of the mask frame 30 .

[0073] The mask sheet 10 may be arranged and fixed on the top surface of the mask frame 30. Specifically, the mask sheet 10 may be fixed on the mask frame 30 using an applied tension.

[0074] The mask sheet 10 may be provided in a rod shape. For example, the mask sheet 10 may include a plurality of mask sheets 10. Each of the mask sheets 10 may be arranged so that the short side direction of the mask frame 30 (ie, Figure 2 The X direction of the mask sheet 10 is the same as the length direction of the mask sheet 10. In addition, the plurality of mask sheets 10 may be arranged in the long side direction of the mask frame 30 (ie, Figure 2 The plurality of openings are spaced apart from each other in the mask sheet 10, and each opening may be uniformly arranged in the entire surface of the mask sheet 10.

[0075] The support frame 40 may be mounted on the mask frame 30 to support the mask sheet 10. In this case, the support frame 40 may be mounted on the mask frame 30 so that the support frame 40 is parallel to at least one of the long side and the short side of the mask frame 30. In addition, the support frame 40 may be arranged in the inner space of the mask frame 30. Specifically, a portion of the support frame 40 may be arranged in the length direction of the mask sheet 10 (e.g., the short side of the mask frame 30), and thus arranged between the mask sheets 10 adjacent to each other to prevent the deposition material from leaking between the mask sheets 10. In addition, another portion of the support frame 40 may be arranged to form a predetermined angle with respect to the length direction of the mask sheet 10. Specifically, the support frame 40 may be perpendicular to the length direction of the mask sheet 10. For example, the support frame 40 may be parallel to the long side of the mask frame 30. In this case, the support frame 40 may support the mask sheet 10.

[0076] The support rods 52, 54 may be arranged on the mask frame 30 to correct deformation of the mask frame 30. For example, the support rods 52, 54 may correct deformation of the mask frame 30 by being attached to the mask frame 30 or being removed from the mask frame 30 to which the support rods 52, 54 are attached. As discussed herein, attaching the support rods 52, 54 to the mask frame 30 or removing the support rods 52, 54 from the mask frame 30 changes the force acting on the mask frame 30.

[0077] The support bars 52, 54 may be formed in a thin plate shape. In this case, the support bars 52, 54 may be formed of a material substantially the same as that of the mask sheet 10 or the mask frame 30. Specifically, the support bars 52, 54 may include a material that is not easily corroded.

[0078] In an exemplary embodiment, the support rods 52 and 54 may be arranged in a length direction (eg, Figure 2 The support rods 52 and 54 may extend across the deformation prevention grooves 51 and 53 in the X direction and may be longer than the length of the deformation prevention grooves 51 and 53. For example, the length of the support rods 52 and 54 may be longer than the length of the long side of the deformation prevention grooves 51 and 53 ( Figure 3 In another exemplary embodiment, the support rods 52 and 54 may be arranged in the width direction of the deformation prevention grooves 51 and 53 (for example, Figure 2 In this case, the length of the support rods 52 and 54 may be greater than the width of the deformation prevention grooves 51 and 53 ( Figure 3 W2) is large.

[0079] The support bars 52 and 54 may be fixed to the mask frame 30 by welding using a tensile force (or using an applied tensile force). For example, the support bars 52 and 54 may be fixed to the mask frame 30 by arc welding or laser welding.

[0080] The support rod may include a first support rod 52 arranged on the first deformation prevention groove 51 and a second support rod 54 arranged on the second deformation prevention groove 53. At least one of the first support rod 52 and the second support rod 54 may include a plurality of support rods. For example, the first support rod 52 may be set to a plurality of support rods, and the second support rod 54 may be set to a single support rod. In another exemplary embodiment, the first support rod 52 may be set to a single support rod, and the second support rod 54 may be set to a plurality of support rods. In another exemplary embodiment, both the first support rod 52 and the second support rod 54 may be set to a plurality of support rods. Hereinafter, for ease of description, the case where the first support rod 52 and the second support rod 54 are set to a plurality of support rods is mainly described in detail.

[0081] In an exemplary embodiment, the same number of the first support rods 52 and the second support rods 54 may be initially arranged, and then the number of the first support rods 52 and the number of the second support rods 54 may be changed to be different from each other while correcting the deformation of the mask frame 30. In addition, in another exemplary embodiment, the first support rods 52 and the second support rods 54 may not be initially arranged on the mask frame 30, and then may be arranged on the mask frame 30 to correct the deformation of the mask frame 30. In another exemplary embodiment, after initially arranging different numbers of the first support rods 52 and the second support rods 54 on the mask frame 30, the number of the first support rods 52 and the number of the second support rods 54 may be adjusted to the same number or different numbers while correcting the deformation of the mask frame 30. However, hereinafter, for the convenience of description, the following case is mainly described in detail: after initially arranging the same number of the first support rods 52 and the second support rods 54 on the mask frame 30, the number of the first support rods 52 and the number of the second support rods 54 are adjusted to correct the deformation of the mask frame 30.

[0082] As described above, the support rods 52, 54 may be arranged on the short sides of the mask frame 30. In this case, the support rods 52, 54 may be fixed to the mask frame 30 using the tension applied thereto. Specifically, after the tension is applied to the support rods 52, 54, the support rods 52, 54 may be fixed to the mask frame 30 by welding. Thereafter, when a clamp or the like that applies the tension is removed from the support rods 52, 54, the support rods 52, 54 may spontaneously return to their initial state while the tension that has been applied is removed. In this case, since the support rods 52, 54 are fixed to the mask frame 30, the restoring force of the support rods 52, 54 themselves may provide a compressive force to the mask frame 30.

[0083] The mask assembly 1 may be manufactured by fixing the mask sheet 10 on the mask frame 30 with applied tension. In this case, the support frame 40 may be arranged and fixed on the mask frame 30. Thereafter, the mask sheet 10 is arranged on the mask frame 30 with applied tension, and the mask sheet 10 may be fixed on the mask frame 30 by welding.

[0084] The support bars 52 and 54 may be attached to the mask frame 30 after the mask frame 30 is manufactured, or in the case where the support frame 40 is arranged on the mask frame 30, the support bars 52 and 54 may be attached to the mask frame 30. In another exemplary embodiment, the support bars 52 and 54 may be fixed to the mask frame 30 after the mask sheet 10 is fixed to the mask frame 30. Hereinafter, for the convenience of description, the case where the support bars 52 and 54 are simultaneously arranged on the mask frame 30 when the support frame 40 is arranged on the mask frame 30 is mainly described in detail.

[0085] After a plurality of mask sheets 10 are arranged on the mask frame 30, the mask frame 30 may not maintain its original shape and may be deformed. In this case, since the mask sheet 10 may be deformed and / or arranged at a position different from the designed position, the openings of the mask sheet 10 may not form a designed pattern.

[0086] In this case, the pattern of the deposition material passing through the mask frame 30 and deposited on the display substrate D may be different from the designed pattern. To solve this problem, in the case where the mask frame 30 is deformed, the deformation of the mask frame 30 can be corrected by removing the support rods 52, 54 or further adding support rods 52, 54 to the mask frame 30.

[0087] The deposition material may be placed inside the deposition source 160 and then may be evaporated. In this case, the deposition source 160 may include a heater 160A, and the deposition material may be evaporated by heat applied from the heater 160A.

[0088] The deposition source 160 may be formed in various shapes. For example, the deposition source 160 may have a point deposition source form in which an inlet portion of the deposition source 160 from which the deposition material is discharged is circular. In addition, the deposition source 160 may have a line deposition source form in which the inlet portion of the deposition source 160 is provided in a plurality of inlet portions or an elongated hole form in an elongated manner. Hereinafter, for the convenience of description, the case where the deposition source 160 is arranged to face one point of the mask assembly 1 and has a point deposition source form is mainly described in detail.

[0089] The pressure regulator 170 may be connected to the chamber 110 to adjust the internal pressure of the chamber 110 so that the internal pressure of the chamber 110 is similar to atmospheric pressure or vacuum. In this case, the pressure regulator 170 may include a connecting pipe 171 connected to the chamber 110 and a pressure regulating pump 172 arranged on the connecting pipe 171.

[0090] Now, a method of manufacturing a display device by using the apparatus 100 for manufacturing a display device is described. A display substrate D may be manufactured and prepared. In addition, a mask assembly 1 may be manufactured and prepared. For example, two first support bars 52 and two second support bars 54 may be attached to the mask frame 30.

[0091] After the mask assembly 1 is completely manufactured, it may be determined whether the mask assembly 1 has been deformed. Specifically, it may be determined whether the mask frame 30 has been deformed. In this case, it may be measured in various methods whether the mask frame 30 has been deformed. For example, in an exemplary embodiment, it may be determined whether the mask frame 30 has been deformed by capturing an image of the mask frame 30 and comparing the captured image of the mask frame 30 with a preset image. In another exemplary embodiment, it may be determined whether the mask frame 30 has been deformed by capturing an X-ray image of the mask frame 30 and comparing the captured X-ray image of the mask frame 30 with a preset image. In another exemplary embodiment, the shape of the mask frame 30 may be learned by sensing the mask frame 30 using a laser sensor or the like, and then the shape of the mask frame 30 may be compared with a preset image. In this case, the method of sensing whether the mask frame 30 has been deformed is not limited to the above method. The method of sensing whether the mask frame 30 has been deformed may include any device and method of obtaining the shape of the mask frame 30 and comparing the obtained shape with a shape preset by using a device and method for sensing the shape of the mask frame 30. However, hereinafter, for convenience of description, a case of determining whether the mask frame 30 has been deformed by capturing an image of the mask frame 30 and comparing the captured image of the mask frame 30 with a preset image is mainly described in detail.

[0092] If it is determined as described above that the manufactured mask frame 30 has been deformed, the deformation of the mask frame 30 can be corrected by removing one or more support bars from / adding one or more support bars to the mask frame 30. The support bars 52, 54 may be detachably attached to the mask frame 30 so as to be detachable from the mask frame 30 according to the deformation of the mask frame 30 without damaging the integrity of the mask assembly 1. For example, the support bars 52, 54 may be fixed to the mask frame 30 by welding and may be removed from the mask frame 30 by laser cutting. In an exemplary embodiment, some of one of the first support bars 52 and the second support bars 54 may be removed from the mask frame 30. In another exemplary embodiment, one of the first support bars 52 and the second support bars 54 may be added to the mask frame 30. In another exemplary embodiment, the first support bars 52 and the second support bars 54 may be removed from or added to the mask frame 30. In another exemplary embodiment, one of the first support rod 52 and the second support rod 54 may be removed from the mask frame 30 , and the other of the first support rod 52 and the second support rod 54 may be added to the mask frame 30 .

[0093] The plane area of ​​the first support rod 52 may be the same as the plane area of ​​the second support rod 54. For example, the length, width, and thickness of the first support rod 52 may be the same as the length, width, and thickness of the second support rod 54.

[0094] The pressure regulator 170 can keep the inside of the chamber 110 at atmospheric pressure, and after the gate valve 110A is opened, the display substrate D and the deformation-corrected mask assembly 1 can be placed inside the chamber 110. In this case, a separate robot arm, shuttle, etc. can be provided inside or outside the chamber 110 to transfer the display substrate D and the mask assembly 1.

[0095] When the above process is completed, the pressure regulator 170 can keep the interior of the chamber 110 almost vacuum. In addition, the vision unit 140 can capture images of the display substrate D and the mask assembly 1, and finely drive the first support member 120 and the second support member 130 to finely adjust at least one of the display substrate D and the mask assembly 1, so that the display substrate D is aligned with the mask assembly 1.

[0096] The heater 160A may operate to supply the deposition material from the deposition source 160 to the mask assembly 1. The deposition material having passed through the mask assembly 1 may be deposited on the display substrate D in a predetermined pattern.

[0097] While the above process is performed, at least one of the deposition source 160 and the display substrate D may perform linear motion. In another exemplary embodiment, deposition may be performed with both the deposition source 160 and the display substrate D stopped. Hereinafter, for ease of description, a case where deposition is performed with both the deposition source 160 and the display substrate D stopped is mainly described in detail.

[0098] Therefore, since the apparatus 100 for manufacturing a display device and the method of manufacturing a display device may perform deposition with minimal deformation of the mask sheet 10 , deposition of a deposition material may be precisely and accurately performed.

[0099] Hereinafter, a method of correcting deformation of the mask frame 30 according to the deformed shape of the mask frame 30 is described in detail.

[0100] Reference Figure 3 , due to the applied tension on the mask sheet ( Figure 2 10) Due to various reasons such as the difference in tension of each mask sheet when fixed on the mask frame 30, the presence of external force, the external temperature, etc., a portion of the long side of the mask frame 30 (for example, the central portion of the long side of the mask frame 30) may be deformed inward toward the inside of the opening 31 compared to another portion of the long side of the mask frame 30 (for example, the two opposite ends of the long side of the mask frame 30).

[0101] In order to correct the deformation, for example, at least one first support rod 52 and at least one second support rod 54 may be further added to the mask frame 30. In this case, in an exemplary embodiment, the number of the first support rods 52 newly added to the mask frame 30 may be the same as the number of the second support rods 54 newly added to the mask frame 30. In this case, the central portion of the long side of the mask frame 30 has been deformed in advance. In another exemplary embodiment, the number of the first support rods 52 newly added to the mask frame 30 and the number of the second support rods 54 newly added to the mask frame 30 may be different from each other. In this case, the deformed portion of the mask frame 30 may be arranged between the center of the long side of the mask frame 30 and the two opposite ends of the long side of the mask frame 30. In this case, when the deformed portion of the mask frame 30 is more adjacent to the first deformation preventing groove 51 than to the second deformation preventing groove 53, the number of the first support rods 52 added to the mask frame 30 may be greater than the number of the second support rods 54 added to the mask frame 30. In contrast, when the deformed portion of the mask frame 30 is closer to the second deformation preventing groove 53 than to the first deformation preventing groove 51 , the number of first supporting bars 52 added to the mask frame 30 may be smaller than the number of second supporting bars 54 added to the mask frame 30 .

[0102] Hereinafter, for convenience of description, a case in which the central portion of the long side of the mask frame 30 has been deformed is mainly described in detail.

[0103] For example, Figure 3 As shown in , initially, two first support bars 52 and two second support bars 54 may be arranged on the mask frame 30. In the case where the central portion of the long side of the mask frame 30 is deformed inwardly toward the inside of the opening 31 compared to the other portion of the long side of the mask frame 30, two new first support bars 52 and two new second support bars 54 may be arranged as shown in . Figure 4 As shown in FIG, the mask frame 30 is attached to the mask frame 30 by applying a tensile force to the mask frame 30. In other words, two new first support bars 52 may be arranged to cross the first deformation prevention groove 51 and be fixed to the mask frame 30. In addition, two new second support bars 54 may be arranged to cross the second deformation prevention groove 53 and be fixed to the mask frame 30.

[0104] When the new first support rods 52 and the new second support rods 54 are arranged on the mask frame 30 as described above, the new first support rods 52 and the new second support rods 54 may provide a compressive force to the short sides of the mask frame 30. In this case, the compressive force applied to the short sides of the mask frame 30 may be increased with the addition of the additional first support rods 52 and the second support rods 54. The increased compressive force at the short sides of the mask frame 30 may make each long side of the mask frame 30 substantially straight by applying a force on both opposite ends of each long side of the mask frame 30 in the center direction of each short side of the mask frame 30.

[0105] Therefore, in the case where the mask frame 30 is deformed, the shape of the opening 31 may be maintained in a substantially rectangular shape by adding the first and second support bars 52 and 54 and thereby correcting the deformation of the mask frame 30 .

[0106] Specifically, in this case, since the shape of the mask frame 30 maintains the same shape or a shape substantially similar to the initial shape, the shape of the mask assembly 1 may be maintained in the same shape or a shape substantially similar to the designed shape.

[0107] Figure 5 yes Figure 2 A plan view of an exemplary embodiment of a second deformed shape of the mask frame 30 shown in FIG. Figure 6 yes Figure 5 The mask frame 30 shown in FIG. 1 is a plan view after the deformation has been corrected.

[0108] Reference Figure 5 and Figure 6 , a portion of the long side of the mask frame 30 (eg, a central portion of the long side of the mask frame 30) may be as shown Figure 530 further outwardly than another portion of the long side of the mask frame 30 (eg, two opposite ends of the long side of the mask frame 30). For example, at least a portion of the long side of the mask frame 30 may protrude in an outer direction of the mask frame 30 in a convex shape.

[0109] In order to correct this type of deformation of the mask frame 30, some of the first support bars 52 and the second support bars 54 that have been pre-attached to the mask frame 30 may be removed. For example, one or two of the two first support bars 52 that have been pre-attached to the mask frame 30 may be removed from the mask frame 30. In addition, one or two of the two second support bars 54 that have been pre-attached to the mask frame 30 may be removed from the mask frame 30. In an exemplary embodiment, the number of the first support bars 52 removed from the mask frame 30 may be the same as the number of the second support bars 54 removed from the mask frame 30. In this case, the center portion of the long side of the mask frame 30 may be in a state that has been deformed. In another exemplary embodiment, the number of the first support bars 52 removed from the mask frame 30 and the number of the second support bars 54 removed from the mask frame 30 may be different from each other. In this case, the deformed portion of the long side of the mask frame 30 may be arranged between the center portion of the long side of the mask frame 30 and the two opposite ends of the long side of the mask frame 30. Specifically, in a case where the deformed portion of the long side of the mask frame 30 is closer to the first deformation preventing groove 51 than to the second deformation preventing groove 53, the number of the first support bars 52 removed from the mask frame 30 may be smaller than the number of the second support bars 54 removed from the mask frame 30. Conversely, in a case where the deformed portion of the long side of the mask frame 30 is closer to the second deformation preventing groove 53 than to the first deformation preventing groove 51, the number of the first support bars 52 removed from the mask frame 30 may be greater than the number of the second support bars 54 removed from the mask frame 30.

[0110] Hereinafter, for convenience of description, a case in which the central portion of the long side of the mask frame 30 has been deformed outward in a convex shape is mainly described in detail.

[0111] like Figure 5 As shown in FIG. , in the case where the central portion of the long side of the mask frame 30 protrudes in the outer direction of the mask frame 30 (eg, the direction away from the opening 31) compared with the other portions of the long side of the mask frame 30, it is possible to Figure 6 , one first support rod 52 and one second support rod 54 are removed from the mask frame 30 .

[0112] Since the magnitude of the compressive force applied to the two opposite ends of the long sides of the mask frame 30 is reduced compared to the initial state, the two opposite ends of the long sides of the mask frame 30 may protrude more in the outer direction of the mask frame 30 than the initial state.

[0113] Therefore, in the case where the mask frame 30 is deformed, the shape of the opening 31 may be maintained as a rectangle by removing the first and second support bars 52 and 54 from the mask frame 30 and thus correcting the deformation of the mask frame 30 .

[0114] Specifically, since the mask frame 30 maintains a shape that is the same as or substantially similar to an initial shape, it may allow the shape of the mask assembly 1 to be maintained in a shape that is the same as or substantially similar to a designed shape.

[0115] Figure 7 is a perspective view of another exemplary embodiment of a mask assembly 1 - 1 constructed according to the principles of the invention.

[0116] Reference Figure 7 , since the equipment used to manufacture the display device is Figure 1 The devices shown in FIG. 1 are the same or substantially similar, and thus their detailed descriptions are omitted to avoid redundancy.

[0117] The mask assembly 1-1 may include a mask frame 30-1, a mask sheet 10-1, a support frame 40-1, and support rods 55-1 and 56-1. Figure 2 Those described are the same or substantially similar, and thus detailed descriptions thereof are omitted to avoid redundancy.

[0118] The support bars 55-1, 56-1 may be arranged on the short sides of the mask frame 30-1 along the long sides of the mask frame 30-1. The support bars 55-1, 56-1 may be fixed to the mask frame 30-1 by welding or the like using a tensile force applied thereto.

[0119] The support rod may include a third support rod 55-1 arranged to span the first deformation prevention groove 51-1 and a fourth support rod 56-1 arranged to span the second deformation prevention groove 53-1. In this case, the third support rod 55-1 may have a substantially identical shape to the fourth support rod 56-1. For example, the length, width, and thickness of the third support rod 55-1 may be identical to the length, width, and thickness of the fourth support rod 56-1.

[0120] Each of the third support rod 55-1 and the fourth support rod 56-1 may be provided as at least one support rod. In the case where each of the third support rod 55-1 and the fourth support rod 56-1 is provided as a plurality of support rods, the plurality of third support rods 55-1 may be spaced apart from each other in the length direction (e.g., X direction) of the first deformation preventing groove 51-1, and the plurality of fourth support rods 56-1 may be spaced apart from each other in the length direction (e.g., X direction) of the second deformation preventing groove 53-1.

[0121] The third support rod 55-1 and the fourth support rod 56-1 may not be initially arranged on the mask frame 30-1, or may be initially arranged and fixed on the mask frame 30-1. Hereinafter, for the convenience of description, the case where the third support rod 55-1 and the fourth support rod 56-1 are initially arranged on the mask frame 30-1 is mainly described in detail.

[0122] In an exemplary embodiment, the same number of third support rods 55-1 and the same number of fourth support rods 56-1 may be arranged on the mask frame 30-1. In another exemplary embodiment, when the mask assembly 1-1 is manufactured (initial state), the number of third support rods 55-1 and the number of fourth support rods 56-1 arranged on the mask frame 30-1 may be different from each other. Hereinafter, for the convenience of description, the case where the same number of third support rods 55-1 and the same number of fourth support rods 56-1 are arranged and fixed on the mask frame 30-1 is mainly described in detail.

[0123] To correct deformation of the mask frame 30-1, the third and fourth support bars 55-1 and 56-1 may be removed from the mask frame 30-1 or added and attached to the mask frame 30-1 according to the deformation of the mask frame 30-1.

[0124] Therefore, after the mask assembly 1-1 is manufactured, in the event that deformation of the mask frame 30-1 occurs while the mask assembly 1-1 is being used or after the mask assembly 1-1 is used, the deformation of the mask frame 30-1 can be corrected by adding or removing the third support rods 55-1 and the fourth support rods 56-1.

[0125] Hereinafter, a method of correcting deformation of the mask frame 30 - 1 when deformation of the mask frame 30 - 1 occurs is described in detail.

[0126] Figure 8 yes Figure 7 A plan view of an exemplary embodiment of a third deformed shape of the mask frame 30 - 1 shown in FIG. Fig. 9 yes Figure 8 The mask frame 30 - 1 shown in FIG. 1 is a plan view after deformation has been corrected.

[0127] Reference Figure 8 and Fig. 9 , when manufacturing the mask assembly, after the mask frame 30-1 is manufactured, when the mask frame 30-1 is used in an apparatus for manufacturing a display device, or after the mask frame 30-1 is used in an apparatus for manufacturing a display device, the mask frame 30-1 may be deformed from an initial state when the mask frame 30-1 is just manufactured, or may be deformed from a state of the mask frame 30-1 having the designed shape of the mask assembly.

[0128] For example, as shown in FIG. 8 , due to various reasons, one of the long sides (eg, the upper long side) of the mask frame 30 - 1 may move to Figure 8 , and another of the long sides of the mask frame 30 - 1 (eg, the bottom long side) may be moved to the right side. Figure 8 , and thus the shape of the mask frame 30 - 1 may vary.

[0129] In this case, deformation of the mask frame 30-1 may be corrected by additionally attaching or removing at least one of the third and fourth support bars 55-1 and 56-1 to or from the mask frame 30-1.

[0130] In an exemplary embodiment, the mask frame 30-1 is Figure 8 In the case of deformation, in addition to the third support rod 55-1 pre-arranged on the mask frame 30-1, at least one new third support rod 55-1 may be added on the upper portion of the first deformation prevention groove 51-1 and fixed to the mask frame 30-1, such as Fig. 9 In another exemplary embodiment, it is possible to Figure 8 The mask frame 30-1 in the embodiment of the present invention removes at least one of the third support bars 55-1 pre-arranged on the lower portion of the first deformation prevention groove 51-1. In another exemplary embodiment, in addition to the third support bars 55-1 pre-arranged on the lower portion of the first deformation prevention groove 51-1, Figure 8 In addition to the fourth support rod 56-1 on the mask frame 30-1 in the embodiment, at least one new fourth support rod 56-1 may be added to the lower portion of the second deformation prevention groove 53-1 and fixed to the mask frame 30-1. Figure 8 In another exemplary embodiment, at least one of the fourth support bars 56-1 pre-arranged on the upper portion of the second deformation prevention groove 53-1 may be removed from the mask frame 30-1. Figure 8 The first deformation prevention groove 51-1 is fixed to the mask frame 30-1 and can be Figure 8 In another exemplary embodiment, at least one of the fourth support bars 56-1 pre-arranged on the upper portion of the second deformation preventing groove 53-1 may be removed from the mask frame 30-1. Figure 8 The mask frame 30-1 in the embodiment of the present invention removes at least one of the third support bars 55-1 pre-arranged on the lower portion of the first deformation preventing groove 51-1, and the mask frame 30-1 in the embodiment of the present invention can be removed. Figure 8In another exemplary embodiment, the mask frame 30-1 in the embodiment of the present invention removes at least one of the fourth support bars 56-1 pre-arranged on the upper portion of the second deformation preventing groove 53-1. Figure 8 In the embodiment, in addition to the pre-arranged third support rod 55-1, at least one new third support rod 55-1 may be added on the upper portion of the first deformation prevention groove 51-1 and fixed to the mask frame 30-1, and in addition to the pre-arranged fourth support rod 56-1, at least one new fourth support rod 56-1 may be added on the lower portion of the second deformation prevention groove 53-1 and fixed to the mask frame 30-1. In another exemplary embodiment, in Figure 8 In the embodiment, at least one of the third support rods 55-1 pre-arranged on the upper portion of the first deformation prevention groove 51-1 can be removed from the mask frame 30-1, and at least one of the fourth support rods 56-1 pre-arranged on the lower portion of the second deformation prevention groove 53-1 can be removed from the mask frame 30-1. In this example, when the support rods are added, the compressive force applied to the portion of the mask frame 30-1 to which the support rods have been added is further increased beyond the initial state, and the compressive force initially applied to the portion of the mask frame 30-1 from which the support rods have been removed can be reduced. In the following, for the convenience of description, the following description is mainly described in detail. Fig. 9 1 is a case where only at least one new third support rod 55-1 is added to the upper portion of the first deformation preventing groove 51-1. In this case, the upper and lower portions of the first deformation preventing groove 51-1 can be determined based on a line segment passing through the center of the first deformation preventing groove 51-1 and parallel to the mask frame 30-1. In addition, the upper and lower portions of the second deformation preventing groove 53-1 can be determined based on a line segment passing through the center of the second deformation preventing groove 53-1 and parallel to the mask frame 30-1.

[0131] In the case where two new third support bars 55-1 are further added on the upper portion of the first deformation preventing groove 51-1, since the tension has been applied to the new third support bars 55-1, the new third support bars 55-1 can further provide compression force only to a portion of the short side of the mask frame 30-1. Fig. 9 In the case where a new third support rod 55-1 is further added to the mask frame 30-1, a compressive force may be further applied only to the upper portion of the short side of the mask frame 30-1 compared to the initial state. In the case where the new third support rod 55-1 is arranged and fixed on the mask frame 30-1, the compressive force applied to the mask frame 30-1 may be changed due to the new third support rod 55-1. Specifically, in the case where the new third support rod 55-1 is Fig. 9In the case where the mask frame 30-1 is arranged and fixed thereto, the compressive force applied to the left side of the long side of the mask frame 30-1 may be greater than the compressive force applied to the right side of the long side of the mask frame 30-1. Fig. 9 As shown in FIG. 1 , this difference in compression force can cause the mask frame 30 - 1 to be arranged in Fig. 9 Move one end of the long side on the upper part to Fig. 9 on the left side.

[0132] Since the mask frame 30 - 1 becomes the same or substantially the same shape as the initial shape of the mask frame 30 - 1 , deformation of the mask frame 30 - 1 may be corrected.

[0133] Therefore, since the mask assembly can maintain the initially designed shape, a display device having a precise deposition pattern can be manufactured through this deformation correction technology.

[0134] Furthermore, deformation of the mask assembly can be corrected by using a simple structure without damaging the integrity of the already deformed mask assembly.

[0135] Furthermore, since the mask assembly may simply and quickly correct deformation of the mask frame 30 - 1 occurring during a deposition process, manufacturing time and manufacturing costs of the display device may be reduced.

[0136] Fig.10 yes Figure 7 A plan view of an exemplary embodiment of a fourth modified shape of a mask frame 30 - 1 shown in FIG. Fig.11 yes Fig.10 The mask frame 30 - 1 shown in FIG. 1 is a plan view after deformation has been corrected.

[0137] Reference Fig.10 and Fig.11 , when manufacturing the mask assembly, after the mask frame 30-1 is manufactured, when the mask frame 30-1 is used in an apparatus for manufacturing a display device, or after the mask frame 30-1 is used in an apparatus for manufacturing a display device, the mask frame 30-1 may be deformed from an initial state when the mask frame 30-1 is just manufactured, or may be deformed from a state of the mask frame 30-1 having the designed shape of the mask assembly.

[0138] For example, Fig.10 As shown in FIG. 1 , compared with the initial state, due to various reasons, one of the long sides (eg, the upper long side) of the mask frame 30 - 1 may move to Fig.10 , and another of the long sides of the mask frame 30-1 (eg, the bottom long side) may be moved to the left side. Fig.10 Therefore, the shape of the mask frame 30 - 1 may vary.

[0139] The deformation of the mask frame 30-1 may be corrected by additionally attaching at least one of the third support rod 55-1 and the fourth support rod 56-1 to the mask frame 30-1 or removing at least one of the third support rod 55-1 and the fourth support rod 56-1 from the mask frame 30-1. In this case, the method of additionally attaching at least one of the third support rod 55-1 and the fourth support rod 56-1 to the mask frame 30-1 or removing at least one of the third support rod 55-1 and the fourth support rod 56-1 from the mask frame 30-1 may be the same as that described with reference to FIG. Figure 8 and Fig. 9 The methods described are essentially similar.

[0140] In an exemplary embodiment, the mask frame 30-1 is Fig.10 In the case of deformation, in addition to the third support rod 55-1 pre-arranged on the mask frame 30-1, at least one new third support rod 55-1 may be added to the lower portion of the first deformation prevention groove 51-1 and fixed to the mask frame 30-1, as shown in FIG. Fig.11 In another exemplary embodiment, it is possible to Fig.10 The mask frame 30-1 in the embodiment of the present invention removes at least one of the third support bars 55-1 pre-arranged on the upper portion of the first deformation prevention groove 51-1. In another exemplary embodiment, in addition to the third support bars 55-1 pre-arranged on the upper portion of the first deformation prevention groove 51-1, Fig.10 In addition to the fourth support rod 56-1 on the mask frame 30-1 in the embodiment, at least one new fourth support rod 56-1 may be added to the upper portion of the second deformation prevention groove 53-1 and fixed to the mask frame 30-1. Fig.10 In another exemplary embodiment, at least one of the fourth support bars 56-1 pre-arranged on the lower portion of the second deformation prevention groove 53-1 may be removed from the mask frame 30-1. Fig.10 The first deformation prevention groove 51-1 is fixed to the mask frame 30-1 and can be Fig.10 In another exemplary embodiment, at least one of the fourth support bars 56-1 pre-arranged on the lower portion of the second deformation preventing groove 53-1 may be removed from the mask frame 30-1. Fig.10 The mask frame 30-1 in the embodiment of the present invention removes at least one of the third support bars 55-1 pre-arranged on the upper portion of the first deformation preventing groove 51-1, and the mask frame 30-1 in the embodiment of the present invention can be removed. Fig.10 In another exemplary embodiment, the mask frame 30-1 in the embodiment removes at least one of the fourth support bars 56-1 pre-arranged on the lower portion of the second deformation preventing groove 53-1. Fig.10In the embodiment, in addition to the pre-arranged third support rod 55-1, at least one new third support rod 55-1 may be added on the lower portion of the first deformation prevention groove 51-1 and fixed to the mask frame 30-1, and in addition to the pre-arranged fourth support rod 56-1, at least one new fourth support rod 56-1 may be added on the upper portion of the second deformation prevention groove 53-1 and fixed to the mask frame 30-1. In another exemplary embodiment, in Fig.10 In the embodiment, at least one of the third support rods 55-1 pre-arranged on the lower portion of the first deformation prevention groove 51-1 may be removed from the mask frame 30-1, and at least one of the fourth support rods 56-1 pre-arranged on the upper portion of the second deformation prevention groove 53-1 may be removed from the mask frame 30-1. In this case, when the support rods are added, the compressive force applied to the portion of the mask frame 30-1 to which the support rods have been added further increases beyond the initial state, and the compressive force initially applied to the portion of the mask frame 30-1 from which the support rods have been removed may be reduced. In the following, for ease of description, the following description is mainly described in detail. Fig.11 In the case where at least one new third support rod 55-1 is arranged on the lower part of the first deformation prevention groove 51-1 and added to the mask frame 30-1, and at least one of the fourth support rods 56-1 pre-arranged on the lower part of the second deformation prevention groove 53-1 is removed from the mask frame 30-1. In this case, the upper and lower parts of the first deformation prevention groove 51-1 can be determined based on a line segment passing through the center of the first deformation prevention groove 51-1 and parallel to the mask frame 30-1. In addition, the upper and lower parts of the second deformation prevention groove 53-1 can be determined based on a line segment passing through the center of the second deformation prevention groove 53-1 and parallel to the mask frame 30-1.

[0141] In the case where the new third support rod 55-1 is added to the mask frame 30-1, since the tension is applied to the new third support rod 55-1, the compressive force can be further provided to only a portion of the short side of the mask frame 30-1 compared to the initial state. In addition, in the case where at least one of the pre-arranged fourth support rods 56-1 is removed from the mask frame 30-1, since a portion of the compressive force pre-applied to the mask frame 30-1 is removed, the compressive force that has been pre-applied to the mask frame 30-1 can be reduced. Specifically, as Fig.11 As shown in FIG. 5 , in the case where the third support rod 55 - 1 is further added, the compressive force can be further applied only to the lower portion of the short side of the mask frame 30 - 1 compared to the initial state. Fig.11 As shown in FIG. 1 , this compressive force can place the mask frame 30 - 1 in the Fig.11 Pull one end of the long side of the lower part to Fig.11In this case, the arrangement applied to the mask frame 30-1 is Fig.11 In the compression force on the two opposite ends of the long side of the lower part of the mask frame 30-1, the compression force on the left side of the two opposite ends of the mask frame 30-1 may be greater than the compression force on the right side of the two opposite ends of the mask frame 30-1. In this case, the long side of the mask frame 30-1 may be as Fig.11 In addition, Fig.11 As shown in , in the case where at least one of the fourth support bars 56-1 pre-arranged on the lower portion of the second deformation preventing groove 53-1 is removed, the compressive force applied to the mask frame 30-1 may be reduced compared to the initial state. Fig.11 Of the compressive forces applied to the two opposite ends of the long side of the mask frame 30-1 arranged on the lower portion, the compressive forces on the left sides of the two opposite ends of the mask frame 30-1 may be greater than the compressive forces on the right sides of the two opposite ends of the mask frame 30-1. In this case, Fig.11 The long side of the mask frame 30 - 1 disposed on the lower portion may be moved to the left side.

[0142] In this case, since the mask frame 30 - 1 becomes a shape that is the same as or substantially similar to that of the initial mask frame 30 - 1 , deformation of the mask frame 30 - 1 may be corrected.

[0143] Therefore, since the mask assembly (not shown) can maintain an initially designed shape, a display device (not shown) having a precise deposition pattern can be manufactured through this technology.

[0144] Furthermore, deformation of the mask assembly can be corrected by using a simple structure without damaging the integrity of the already deformed mask assembly.

[0145] Furthermore, since the mask assembly may simply and quickly correct deformation of the mask frame 30 - 1 occurring during a deposition process, manufacturing time and manufacturing costs of the display device may be reduced.

[0146] Fig.12 is a perspective view of yet another exemplary embodiment of a mask assembly 1 - 2 constructed according to the principles of the invention.

[0147] Reference Fig.12 , since the equipment used to manufacture the display device is Figure 1 The devices shown in FIG. 1 are the same or substantially similar, and thus their detailed descriptions are omitted to avoid redundancy.

[0148] The mask assembly 1-2 may include a mask frame 30-2, a mask sheet 10-2, a support frame 40-2, support rods 52-2, 54-2, 55-2, 56-2, and alignment sheets 70A-2, 70B-2. Since the mask frame 30-2, the mask sheet 10-2, and the support frame 40-2 are the same or substantially similar to those described above, their detailed descriptions are omitted to avoid redundancy.

[0149] The support rods may include a first support rod 52-2 and a third support rod 55-2 arranged on the first deformation prevention groove 51-2 and a second support rod 54-2 and a fourth support rod 56-2 arranged on the second deformation prevention groove 53-2. In this case, since the first support rod 52-2 to the fourth support rod 56-2 are the same or substantially similar to those described above, their detailed descriptions are omitted to avoid redundancy.

[0150] The support rods may include a fifth support rod 57-2 and a sixth support rod 58-2 arranged on the alignment sheets 70A-2, 70B-2 in addition to the first support rod 52-2 to the fourth support rod 56-2. In this case, the fifth support rod 57-2 and the sixth support rod 58-2 may be arranged on the alignment sheets 70A-2, 70B-2 to correct the deformation of the mask frame 30-2. The fifth support rod 57-2 and the sixth support rod 58-2 may be formed to be the same or substantially similar to the first support rod 52-2 and the second support rod 54-2.

[0151] The alignment sheets 70A-2, 70B-2 may be disposed on the mask frame 30-2 and may be used to align the alignment sheets with the display substrate ( Figure 1 D) The alignment sheet 71A-2 and 71B-2 are aligned to determine the position relative to the mask assembly 1-2 and the display substrate. In this case, the alignment sheet 71A-2 and 71B-2 may include alignment holes.

[0152] The alignment sheets 70A-2 and 70B-2 can be arranged on the mask frame 30-2 using the applied pulling force. In this case, in an exemplary embodiment, the alignment sheets 70A-2 and 70B-2 can be arranged on the outermost part of the opening 31-2 of the mask frame 30-2. In another exemplary embodiment, the alignment sheets 70A-2 and 70B-2 can be arranged so that at least a portion of the alignment sheet overlaps with the short side of the mask frame 30-2. In this case, a separate opening can be formed in the short side of the mask frame 30-2 to correspond to the alignment holes 71A-2 and 71B-2. Hereinafter, for the convenience of description, the alignment sheets 70A-2 and 70B-2 are arranged on the outermost part of the opening 31-2 and the alignment sheets 70A-2 and 70B-2 are arranged on the mask frame 30-2 so that the alignment holes 71A-2 and 71B-2 of the alignment sheets 70A-2 and 70B-2 completely overlap with the opening 31-2.

[0153] The alignment pieces 70A-2 and 70B-2 may be provided as at least one alignment piece. In this case, one alignment piece may be provided on two opposite sides of the opening 31-2 of the mask frame 30-2. For example, the alignment piece may include a first alignment piece 70A-2 in which a first alignment hole 71A-2 is formed and a second alignment piece 70B-2 in which a second alignment hole 71B-2 is formed. The first alignment piece 70A-2 and the second alignment piece 70B-2 may be spaced apart from each other and may be formed to be identical or substantially similar to each other. In this case, the fifth support bar 57-2 may be arranged on the first alignment piece 70A-2, and the sixth support bar 58-2 may be arranged on the second alignment piece 70B-2.

[0154] The mask assembly 1-2 can be as shown in FIG. Figure 2 The mask frame 30-2 is assembled and manufactured as described. In this case, deformation of the mask frame 30-2 may occur due to various reasons. The deformation of the mask frame 30-2 may not only change the position of the mask sheet 10-2, but also change the shape of the opening 31-2. Specifically, such deformation may deform the pattern of the deposition material that passes through the mask assembly 1-2 and is deposited on the display substrate, and may cause defects in the manufactured display device including the display substrate due to the change in the deposition position of the deposition material.

[0155] In order to correct deformation of the mask frame 30 - 2 , at least one of the first to sixth support bars 52 - 2 to 58 - 2 may be disposed on or removed from the mask assembly 1 - 2 .

[0156] For example, in the mask frame 30-2, Figure 3 and Figure 5In the case of the deformation shown in , in an exemplary embodiment, at least one of the first support rod 52-2 and the second support rod 54-2 can be removed from the mask frame 30-2, or at least one of the first support rod 52-2 and the second support rod 54-2 can be added to the mask frame 30-2. In another exemplary embodiment, at least one of the fifth support rod 57-2 and the sixth support rod 58-2 can be removed from the alignment sheet 70A-2, 70B-2, or at least one of the fifth support rod 57-2 and the sixth support rod 58-2 can be added to the alignment sheet 70A-2, 70B-2. In another exemplary embodiment, at least one of the fifth support rod 57-2 and the sixth support rod 58-2 may be removed from the alignment sheet 70A-2, 70B-2 while at least one of the first support rod 52-2 and the second support rod 54-2 may be removed from the mask frame 30-2, or at least one of the fifth support rod 57-2 and the sixth support rod 58-2 may be added to the alignment sheet 70A-2, 70B-2 while at least one of the first support rod 52-2 and the second support rod 54-2 may be added to the mask frame 30-2. In this case, the effects and operations when at least one of the fifth support rod 57-2 and the sixth support rod 58-2 is removed from the alignment sheet 70A-2, 70B-2 or at least one of the fifth support rod 57-2 and the sixth support rod 58-2 is added to the alignment sheet 70A-2, 70B-2 may be the same as those described in reference to FIG. Figure 3 and Figure 5 The effects and operations described when at least one of the first support rod 52 - 2 and the second support rod 54 - 2 is removed from the mask frame 30 - 2 or at least one of the first support rod 52 - 2 and the second support rod 54 - 2 is added to the mask frame 30 - 2 are the same.

[0157] In addition to the above, the mask frame 30-2 may be Figure 8 and Fig.10 In this case, it can be deformed as shown in Fig. 9 and Fig.11 As shown in FIG. 4 , deformation of the mask frame 30 - 2 is corrected by arranging the third supporting rod 55 - 2 and the fourth supporting rod 56 - 2 equally or similarly on the mask frame 30 - 2 .

[0158] In addition, the mask frame 30-2 occurs Figure 3 , Figure 5 , Figure 8 and Fig.10In the case of a combination of the deformations shown in , or in the case where a new deformation of the mask frame 30-2 occurs after one deformation of the mask frame 30-2 is corrected, the deformation of the mask frame 30-2 can be corrected by combining the above situations to add at least one of the first support rod 52-2 to the sixth support rod 58-2 to the mask assembly 1-2 or remove at least one of the first support rod 52-2 to the sixth support rod 58-2 from the mask assembly 1-2.

[0159] Therefore, since the mask assembly 1 - 2 can maintain an initially designed shape, a display device having a precise deposition pattern can be manufactured through this technology.

[0160] Furthermore, deformation of the mask assembly 1 - 2 can be corrected by using a simple structure without damaging the integrity of the mask assembly 1 - 2 that has been deformed.

[0161] Furthermore, since the mask assembly 1 - 2 may simply and quickly correct deformation of the mask frame 30 - 2 that occurs during a deposition process, manufacturing time and manufacturing costs of the display device may be reduced.

[0162] Fig.13 It consists of Figure 2 , Figure 7 or Fig.12 A plan view of an exemplary embodiment of a display device 20 manufactured by an apparatus for manufacturing a display device using a mask assembly shown in FIG. Fig.14 is along Fig.13 A cross-sectional view taken along line AA.

[0163] Reference Fig.13 and Fig.14 , the display device 20 may define a display area DA and a non-display area NDA outside the display area DA in the substrate 21. The emission unit may be arranged in the display area DA and power wiring (not shown) and the like may be arranged in the non-display area NDA. In addition, a pad unit C may be arranged in the non-display area NDA.

[0164] The display device 20 may include a display substrate D and a thin film encapsulation layer E. In this case, the display substrate D may include a substrate 21, a thin film transistor TFT, a passivation layer 27, and a pixel electrode 28-1. In another exemplary embodiment, the display substrate D may include a substrate 21, a thin film transistor TFT, a passivation layer 27, a pixel electrode 28-1, and a portion of an intermediate layer 28-2. In another exemplary embodiment, the display substrate D may include a substrate 21, a thin film transistor TFT, a passivation layer 27, a pixel electrode 28-1, and an intermediate layer 28-2. Hereinafter, for ease of description, the case where the display substrate D includes a substrate 21, a thin film transistor TFT, a passivation layer 27, and a pixel electrode 28-1 is mainly described in detail.

[0165] The substrate 21 may include a plastic material, and may include a metal material such as SUS and Ti. In addition, the substrate 21 may include polyimide (PI). Hereinafter, for convenience of description, a case where the substrate 21 includes PI is mainly described in detail.

[0166] The thin film transistor TFT is disposed on the substrate 21 , and the passivation layer 27 covers the thin film transistor TFT. The organic light emitting diode 28 may be disposed on the passivation layer 27 .

[0167] A buffer layer 22 may also be disposed on the top surface of the substrate 21. The buffer layer 22 may include an organic compound and / or an inorganic compound (SiO x (x>1) and SiN x (x>1)).

[0168] After forming the active layer 23 on the buffer layer 22 in a predetermined pattern, the active layer 23 is buried by the gate insulating layer 24. The active layer 23 includes a source region 23-1 and a drain region 23-3, and also includes a channel region 23-2 therebetween.

[0169] The active layer 23 may include various materials. For example, the active layer 23 may include an inorganic semiconductor material such as amorphous silicon or crystalline silicon. In another exemplary embodiment, the active layer 23 may include an oxide semiconductor. In another exemplary embodiment, the active layer 23 may include an organic semiconductor material. However, hereinafter, for ease of description, the case where the active layer 23 includes amorphous silicon is mainly described in detail.

[0170] The active layer 23 may be formed by forming an amorphous silicon layer on the buffer layer 22, crystallizing the amorphous silicon layer into a polysilicon layer, and patterning the polysilicon layer. The source region 23-1 and the drain region 23-3 of the active layer 23 are doped with impurities according to the type of TFT such as a driving TFT (not shown), a switching TFT (not shown), etc.

[0171] A gate electrode 25 corresponding to the active layer 23 and an interlayer insulating layer 26 burying the gate electrode 25 are formed on a top surface of the gate insulating layer 24 .

[0172] Furthermore, after forming contact holes H1 in interlayer insulating layer 26 and gate insulating layer 24 , source electrode 27A and drain electrode 27B are formed on interlayer insulating layer 26 such that source electrode 27A and drain electrode 27B contact source region 23 - 1 and drain region 23 - 3 , respectively.

[0173] A passivation layer 27 is formed on the thin film transistor TFT formed in this manner, and a pixel electrode 28-1 of an organic light emitting diode 28 is formed on the passivation layer 27. The pixel electrode 28-1 contacts the source electrode 27A of the thin film transistor TFT through a through hole H2 formed in the passivation layer 27. The passivation layer 27 may include an inorganic material and / or an organic material, and may include a single layer or two or more layers. The passivation layer 27 may be configured as a planarization layer so that its top surface is planar regardless of the curvature of the layer below it, or may be configured so that its top surface is uneven along the curvature of the layer below it. In addition, preferably, the passivation layer 27 includes a transparent insulator to achieve a resonance effect.

[0174] After forming the pixel electrode 28-1 on the passivation layer 27, the pixel defining layer 29 including an organic material and / or an inorganic material covers the pixel electrode 28-1 and the passivation layer 27. A portion of the pixel electrode 28-1 is exposed.

[0175] In addition, the intermediate layer 28-2 and the counter electrode 28-3 are formed at least on the pixel electrode 28-1. In another exemplary embodiment, the counter electrode 28-3 may be formed on the entire surface of the display substrate D. In this case, the counter electrode 28-3 may be formed on the intermediate layer 28-2 and the pixel defining layer 29. Hereinafter, for the convenience of description, the case where the counter electrode 28-3 is formed on the intermediate layer 28-2 and the pixel defining layer 29 is mainly described in detail.

[0176] The pixel electrode 28-1 functions as an anode electrode, and the counter electrode 28-3 functions as a cathode electrode. The polarities of the pixel electrode 28-1 and the counter electrode 28-3 may be reversed.

[0177] The pixel electrode 28-1 and the counter electrode 28-3 are insulated from each other by the intermediate layer 28-2. The organic emission layer can emit light by applying voltages having different polarities to the intermediate layer 28-2.

[0178] The intermediate layer 28-2 may include an organic emission layer. In an exemplary embodiment, the intermediate layer 28-2 may include an organic emission layer, and may further include at least one of a hole injection layer (HIL), a hole transport layer, an electron transport layer, and an electron injection layer. The illustrated exemplary embodiment is not limited thereto, and the intermediate layer 28-2 may include an organic emission layer, and may further include other various functional layers (not shown).

[0179] The intermediate layer 28-2 may be provided as a plurality of intermediate layers. The plurality of intermediate layers 28-2 may constitute the display area DA. In this case, the plurality of intermediate layers 28-2 may be spaced apart from each other within the display area DA.

[0180] Each unit pixel may include a plurality of sub-pixels, and the plurality of sub-pixels may emit light of various colors. For example, the plurality of sub-pixels may each include a sub-pixel that emits red light, green light, and blue light, or each include a sub-pixel that emits red light, green light, blue light, and white light (not shown).

[0181] Equipment for manufacturing a display device ( Figure 1 1) Various layers may be formed on the display substrate D. For example, the apparatus for manufacturing a display device may form at least one of at least one layer of the intermediate layer 28-2. For example, the apparatus for manufacturing a display device may form at least one of an organic emission layer, a hole injection layer, a hole transport layer, an electron injection layer, an electron transport layer, and a functional layer of the intermediate layer 28-2.

[0182] The thin film encapsulation layer E may include a plurality of inorganic layers or may include an inorganic layer and an organic layer.

[0183] The organic layer of the thin film encapsulation layer E may include a polymer, and may include polyethylene terephthalate, polyethylene naphthalate, polycarbonate, polyimide, polyvinyl sulfonate, polyoxymethylene, polyarylate, hexamethyldisiloxane, acrylic resin (eg, polymethyl methacrylate, polyacrylic acid), or any combination thereof.

[0184] The inorganic layer of the thin film encapsulation layer E may include a single layer or a stacked layer including a metal oxide or a metal nitride. Specifically, the inorganic layer may include SiN x 、Al 2 O 3 、SiO 2 and TiO 2 One of them.

[0185] The uppermost layer of the thin film encapsulation layer E exposed to the outside may include an inorganic layer to prevent moisture from being transmitted to the organic light emitting diode.

[0186] The thin film encapsulation layer E may include at least one sandwich structure in which at least one organic layer is disposed between at least two inorganic layers. In another exemplary embodiment, the thin film encapsulation layer E may include at least one sandwich structure in which at least one inorganic layer is disposed between at least two organic layers. In another exemplary embodiment, the thin film encapsulation layer E may include a sandwich structure in which at least one organic layer is disposed between at least two inorganic layers and a sandwich structure in which at least one inorganic layer is disposed between at least two organic layers.

[0187] The thin film encapsulation layer E may sequentially include a first inorganic layer, a first organic layer, and a second inorganic layer over the organic light emitting diode OLED.

[0188] In another exemplary embodiment, the thin film encapsulation layer E may sequentially include a first inorganic layer, a first organic layer, a second inorganic layer, a second organic layer, and a third inorganic layer over the organic light emitting diode OLED.

[0189] In another exemplary embodiment, the thin film encapsulation layer E may sequentially include a first inorganic layer, a first organic layer, a second inorganic layer, a second organic layer, a third inorganic layer, a third organic layer, and a fourth inorganic layer over the organic light emitting diode OLED.

[0190] A metal halogenide layer including LiF may be additionally included between the organic light emitting diode OLED and the first inorganic layer. The metal halogenide layer may prevent the organic light emitting diode OLED from being damaged when the first inorganic layer is formed by sputtering.

[0191] An area of ​​the first organic layer may be smaller than an area of ​​the second inorganic layer, and an area of ​​the second organic layer may be smaller than an area of ​​the third inorganic layer.

[0192] In the case where a plurality of inorganic layers are provided as described above, the inorganic layers may be deposited such that the inorganic layers directly contact each other at the edge region of the display device 20 , and the organic layer may be prevented from being exposed to the outside.

[0193] Therefore, the display device 20 can produce a fine image.

[0194] In the mask assembly according to the exemplary embodiment, in the event of deformation of the mask frame, the deformation can be easily and quickly corrected. The apparatus for manufacturing a display device and the method for manufacturing a display device according to the exemplary embodiment can manufacture a display device including a precise pattern by using a mask assembly with minimal deformation. In addition, the apparatus for manufacturing a display device and the method for manufacturing a display device according to the exemplary embodiment can minimize the defect rate when manufacturing a display device.

[0195] Although some exemplary embodiments and implementations have been described herein, other embodiments and modifications will be apparent from this description. Therefore, the inventive concept is not limited to such embodiments, but is limited to the broader scope of the claims and various obvious modifications and equivalent arrangements that will be apparent to those of ordinary skill in the art.

Claims

1. An apparatus for manufacturing a display device, the apparatus comprising: a chamber in which a display substrate is disposed; a mask assembly arranged inside the chamber to face the display substrate; as well as a deposition source arranged inside the chamber to face the mask assembly, The mask assembly includes: a mask frame including a pair of first side portions arranged along a first direction, a pair of second side portions arranged along a second direction, and an opening portion defined by the first side portions and the second side portions; a mask sheet arranged on the opening portion of the mask frame, fixed on the mask frame, and including a plurality of openings; and a supporting member attached to at least one of the first side portion and the second side portion of the mask frame by means of an applied tensile force, wherein at least one of the first side portion and the second side portion of the mask frame comprises a groove, and the supporting member comprises a supporting rod arranged across the groove, and Wherein, the support rod is arranged across the slot in at least one direction of the length direction of the slot and the width direction of the slot.

2. The device according to claim 1, wherein: The length of the groove is smaller than the length of one side of the opening of the mask frame, or the width of the groove is 1 / 2 or less of the width of the at least one side portion in which the groove is formed.

3. An apparatus for manufacturing a display device, the apparatus comprising: a chamber in which a display substrate is disposed; a mask assembly arranged inside the chamber to face the display substrate; as well as a deposition source arranged inside the chamber to face the mask assembly, The mask assembly includes: a mask frame including a pair of first side portions arranged along a first direction, a pair of second side portions arranged along a second direction, and an opening portion defined by the first side portions and the second side portions; a mask sheet arranged on the opening portion of the mask frame, fixed on the mask frame, and including a plurality of openings; and a supporting member attached to at least one of the first side portion and the second side portion of the mask frame by means of an applied tensile force, Wherein, the support member includes a support rod, which is detachably attached to the mask frame so as to be detachable from the mask frame according to a variation of the mask frame without compromising the integrity of the mask assembly.

4. An apparatus for manufacturing a display device, the apparatus comprising: a chamber in which a display substrate is disposed; a mask assembly arranged inside the chamber to face the display substrate; as well as a deposition source arranged inside the chamber to face the mask assembly, The mask assembly includes: a mask frame including a pair of first side portions arranged along a first direction, a pair of second side portions arranged along a second direction, and an opening portion defined by the first side portions and the second side portions; a mask sheet arranged on the opening portion of the mask frame, fixed on the mask frame, and including a plurality of openings; and a supporting member attached to at least one of the first side portion and the second side portion of the mask frame by means of an applied tensile force, Wherein, the supporting member includes a plurality of first supporting rods and a plurality of second supporting rods, and at least one of the first supporting rods is attached to one of the first side portions of the mask frame, and at least one of the second supporting rods is attached to another of the first side portions of the mask frame.

5. The device according to claim 4, wherein: The number of the first support rods and the number of the second support rods are different from each other.

6. A method for manufacturing a display device, the method comprising: sensing deformation of the mask frame; correcting the deformation of the mask frame by selectively attaching or removing a supporting member to or from the mask frame according to a shape of the mask frame; and A mask assembly including the mask frame in which the deformation has been corrected is arranged inside a deposition chamber, and then a deposition material is supplied and deposited on a display substrate of the display device by using a deposition source.

7. The method according to claim 6, wherein: The step of attaching the support member to the mask frame includes arranging and fixing the support member on the mask frame using an applied tension force.

8. The method according to claim 6, wherein: The support member includes a plurality of first support rods and a plurality of second support rods, and the method further includes: According to the deformation of the mask frame, the first supporting rod and the second supporting rod are arranged on portions of the mask frame, the portions of the mask frame being different from each other with respect to a center of the mask frame.

9. The method according to claim 8, wherein: The number of the first support rods and the number of the second support rods are different from each other.

10. The method according to claim 6, wherein: A groove is provided in the mask frame, and the supporting member spans the groove in a width direction or a length direction of the groove.

Images