Anti-pollution vacuum ultraviolet ionization coating method

Abstract

The invention discloses an anti-pollution vacuum ultraviolet ionization coating method and device, and the method comprises the following steps: installing a target material and a reflector column in a cavity, and adjusting the size of a slit of a slit baffle plate between the reflector column and a part rack; according to the method, the cavity is vacuumized, an ultraviolet light source is turned on, gas-phase particles in the vacuum coating cavity are guided into the vacuum coating cavity through a specific light path, and the gas-phase particles in the vacuum coating cavity are subjected to photoionization to form ions, so that the ionization rate is increased, and the vacuum coating process with the adjustable ionization rate is realized; according to the invention, the ultraviolet light is reflected into the cavity of the vacuum coating through the reflector, and the ultraviolet light source is isolated from the working area of the vacuum coating, so that the problem that the reflection efficiency of the ultraviolet light is reduced due to the fact that light path assemblies such as the ultraviolet reflector are polluted by the vacuum coating in the working process is effectively solved; and meanwhile, the bombardment area of the ultraviolet light beam on the surface of the gas-phase particles or the solid-phase target material is increased through convex surface reflection, and the photoelectric ionization and vacuum coating efficiency is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor devices, relates to vacuum plating of metal materials, and specifically relates to a pollution-proof vacuum ultraviolet ionization plating method and device. Background Art

[0002] In the process of preparing thin films by vapor deposition, a high ionization rate is an important prerequisite for achieving effective control over the energy, direction, density, and distribution state of the ion beam. Furthermore, achieving relatively independent control over the ionization rates of different particles is an extremely difficult but extremely important technical requirement in the process of preparing thin films by vapor deposition. All currently used technical means to increase the ionization rate of particles in vapor deposition are to indiscriminately increase the ionization rate of all gas phase particles by introducing high energy. It is impossible to adjust the ionization rate ratio for different structures and optimize the control scheme, thus failing to achieve more precise targeted control, which greatly limits the development of a new generation of thin films with increasingly complex structures and compositions.

[0003] The vacuum ultraviolet ionization device is based on the principle of photoelectric effect. It selects a vacuum ultraviolet light source with a certain wavelength of light to selectively ionize gas phase particles with specific ionization energy or atoms on the surface of solid target materials during vapor deposition, thereby selectively improving the ionization rate of a certain gas phase / solid phase particle. However, in the process of using vacuum ultraviolet light to photoionize different gas phase particles or solid surface atoms, the surface of the vacuum ultraviolet ionization device will be contaminated. Long-term accumulation will affect the emission of vacuum ultraviolet light, and then affect the particle ionization rate. The vacuum ultraviolet ionization device is expensive and difficult to replace later, which has a great impact on the efficiency and cost of vacuum ultraviolet ionization coating. Summary of the invention

[0004] The purpose of the present invention is to solve the problem of how to reduce the pollution of vacuum coating equipment by ultraviolet light, and to provide a pollution-proof vacuum ultraviolet ionization coating method and device.

[0005] The purpose of the present invention can be achieved by the following technical solutions:

[0006] A pollution-proof vacuum ultraviolet ionization coating method comprises the following steps:

[0007] Step 1: Place the parts rack into the chamber of the vacuum coating equipment, install the target material at the front of the chamber, install the ion source on the left, install the reflector column on the right, and adjust the slit size of the slit baffle between the reflector column and the parts rack according to the size of the parts on the parts rack.

[0008] Step 2: evacuate the cavity, turn on the ion source and introduce rare gas, turn on the magnetic motor to rotate the parts rack, set the wavelength of the ultraviolet light source according to the ionization energy of different target elements, turn on the ultraviolet light source to allow the ultraviolet light to pass through the transparent glass to irradiate the reflector on the reflector column, and the ultraviolet light reflected by the reflector diffuses into the cavity through the slit of the slit baffle.

[0009] Step 3: Open the cathode plate and anode plate in the vacuum coating equipment. Under the action of the electric field, the gas phase particles sputtered from the target material are introduced into the cavity through the ion source. After being photoionized by ultraviolet light, they are bombarded onto the surface of the parts on the parts rack to deposit into a film, thereby performing vacuum coating on the parts.

[0010] Step 4: When the reflector in the reflector column is about to fail due to reduced reflectivity caused by vacuum coating, the reflector column is rotated to rotate the new reflector area to the position of the failed reflector, so that the vacuum coating equipment continues to coat until the coating is completed.

[0011] Furthermore, the light path of the ultraviolet light emitted by the ultraviolet light source after the reflector column totally reflects the ultraviolet light passes through the slit of the slit baffle.

[0012] Furthermore, the rare gas is one of argon, neon and krypton.

[0013] A pollution-proof vacuum ultraviolet ionization coating device comprises a cavity, a parts rack, an ultraviolet light source, an ion source and a target material, and also comprises a reflector column and a slit baffle.

[0014] A parts rack is rotatably arranged in the center of the cavity, a target material is arranged at the front side of the cavity, an ion source is arranged on the left side, a reflector column is arranged on the right side, and a slit baffle is slidably arranged on the inner wall of the cavity on one side of the reflector column.

[0015] An ultraviolet light source is arranged on one side of the reflector column, the ultraviolet light source is arranged outside the cavity, a light-transmitting glass is arranged on the cavity between the ultraviolet light source and the reflector column, a rotating device is fixedly connected below the reflector column, and a moving rod is arranged below the slit baffle.

[0016] Furthermore, the reflector column is semicircular, and rectangular reflectors are distributed at equal angles on the arc surface of the reflector column, and an anti-ultraviolet film is provided on the reflectors.

[0017] Furthermore, a baffle slider is provided on the slit baffle, and a slide groove is provided on the outer side wall of the cavity, and the baffle slider is slidably engaged in the slide groove.

[0018] Furthermore, the included angle between the ultraviolet light emitted by the ultraviolet light source and the reflector on the reflector column is the same as the included angle between the slit of the slit baffle and the reflector.

[0019] Furthermore, a moving gear is arranged at a position below the slit baffle plate that contacts the moving rod, and a tooth pattern is arranged at the lower end of the slit baffle plate, and the tooth pattern matches the moving gear.

[0020] Furthermore, the gear turntable of the rotating device is rotatably arranged in the vacuum coating equipment, a card pin is clamped in the tooth pattern of the gear turntable, the card pin is slidably arranged in the U-shaped groove, a spring is arranged at the tail end of the card pin, a fixed clamping plate is rotatably arranged at the tail end of the card pin, and a fixed groove is arranged on the side wall of the U-shaped groove.

[0021] Furthermore, the included angle between adjacent teeth of the gear rotating disk is the same as the included angle between adjacent reflectors of the reflector column.

[0022] Beneficial effects of the present invention:

[0023] (1) The vacuum coating method of the present invention reflects ultraviolet light into the vacuum coating cavity through a reflector, thereby isolating the ultraviolet light source from the vacuum coating working area, effectively solving the problem of reduced ultraviolet light reflection efficiency caused by the ultraviolet light source being contaminated by the vacuum coating during operation, maintaining the emission intensity of the ultraviolet light, and dispersing the refracted ultraviolet light through a slit baffle, thereby increasing the photoionization area of ​​the target gas phase ions by the ultraviolet light beam, and improving the efficiency of photoionization and vacuum coating.

[0024] (2) The vacuum coating device of the present invention adjusts the size and position of the slit to adapt to parts of different sizes and ultraviolet light of different wavelengths; by arranging a rotating device under the reflector column and fixing the rotating angle, a new reflector can be replaced to the position of the old reflector. It is only necessary to remove the anti-ultraviolet film on the surface of the new reflector so that the new reflector can continue to work, thereby reducing the time for manual mirror replacement. When all the reflectors on the reflector column fail, the new reflector column can be replaced together with the gear turntable, which greatly improves work efficiency and saves manpower. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The present invention will be further described below in conjunction with the accompanying drawings.

[0026] Figure 1 It is a schematic diagram of the structure of the present invention;

[0027] Figure 2 is a top view of the present invention;

[0028] Figure 3 It is a schematic diagram of the slit baffle and the moving rod structure of the present invention;

[0029] Figure 4 It is a schematic diagram of the structure of the rotating device of the present invention;

[0030] In the figure: 1. cavity; 101. slide; 102. light-transmitting glass; 2. parts rack; 3. target material; 4. ultraviolet light source; 5. reflector column; 6. slit baffle; 601. baffle slider; 7. moving rod; 701. moving gear; 8. rotating device; 801. gear turntable; 802. clamping pin; 803. fixed clamping plate; 804. spring; 805. U-shaped groove; 806. fixed groove; 9. ion source. DETAILED DESCRIPTION

[0031] The following will be combined with the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] A pollution-proof vacuum ultraviolet ionization coating method, characterized in that it comprises the following steps:

[0033] Step 1: Place the parts rack 2 into the chamber 1 of the vacuum coating equipment, install the target material 3 on the front side of the chamber 1, install the ion source 9 on the left side, install the reflector column 5 on the right side, and adjust the slit size of the slit baffle 6 between the reflector column 5 and the parts rack 2 according to the volume of the parts on the parts rack 2.

[0034] Step 2: evacuate the cavity 1, turn on the ion source 9 and introduce rare gas, turn on the magnetic motor to rotate the parts rack 2, set the wavelength of the ultraviolet light source 4 according to the ionization energy of different target elements, turn on the ultraviolet light source 4 to allow the ultraviolet light to pass through the transparent glass 102 to irradiate the reflector on the reflector column 5, remove the anti-ultraviolet film on the irradiated reflector, and the ultraviolet light reflected by the reflector diffuses into the cavity 1 through the slit of the slit baffle 6.

[0035] Step 3: Open the cathode plate and anode plate in the vacuum coating equipment. Under the action of the electric field, the gas phase particles sputtered from the target material 3 are introduced into the cavity 1 through the ion source 9. After being photoionized by ultraviolet light, they are bombarded onto the surface of the parts on the part rack 2 to deposit into a film, thereby coating the parts.

[0036] Step 4: When the reflector in the reflector column 5 is about to fail due to reduced reflectivity caused by vacuum coating, the reflector column 5 is rotated to rotate the new reflector area to the position of the failed reflector, so that the vacuum coating equipment continues to coat until the coating is completed.

[0037] A pollution-proof vacuum ultraviolet ionization coating device comprises a cavity 1, an ultraviolet light source 4, an ion source 9 and a target material 3.

[0038] See also Figure 1-Figure 2As shown, a parts rack 2 is rotatably arranged in the center of the cavity 1, a target material 3 is arranged on the front side of the cavity 1, an ion source 9 is arranged on the left side, a reflector column 5 is arranged on the right side, a slit baffle 6 is slidably arranged on the inner wall of the cavity 1 on one side of the reflector column 5, a baffle slider 601 is arranged on the slit baffle 6, a slide groove 101 is arranged on the outer side wall of the cavity 1, and the baffle slider 601 is slidably engaged in the slide groove 101.

[0039] The reflector column 5 is semicircular, and rectangular reflectors are distributed at equal angles on the arc surface of the reflector column 5. An anti-ultraviolet film is provided on the reflectors.

[0040] An ultraviolet light source 4 is arranged on one side of the reflector column 5, and the ultraviolet light source 4 is arranged on the outside of the cavity 1. A transparent glass 102 is arranged on the cavity 1 between the ultraviolet light source 4 and the reflector column 5, so that the ultraviolet light emitted by the ultraviolet light source 4 passes through the transparent glass 102 and irradiates the reflector column 5. The reflector on the reflector column 5 reflects the ultraviolet light emitted by the ultraviolet light source 4, so that the reflected ultraviolet light enters the cavity 1 after the slit of the slit baffle 6 enlarges the irradiation area. A rotating device 8 is fixedly connected below the reflector column 5, and a moving rod 7 is arranged below the slit baffle 6.

[0041] The light-transmitting glass 102 is fluoride glass.

[0042] See also Figure 3 As shown, a moving gear 701 is set at the position below the slit baffle 6 that contacts the moving rod 7. The lower end of the slit baffle 6 is provided with teeth, and the teeth match the moving gear 701. The position and size of the slit baffle 6 are adjusted by rotating the moving rod 7. The base of the moving rod 7 is rotatably connected to the moving rod 7, and a rotation damping is set at the connection to stabilize the adjusted slit baffle.

[0043] See also Figure 4 As shown, the gear turntable 801 of the rotating device 8 is rotatably set in the vacuum coating equipment, a clamping pin 802 is clamped in the tooth pattern of the gear turntable 801, the clamping pin 802 is slidably set in the U-shaped groove 805, a fixed clamping plate 803 is rotatably set at the tail end of the clamping pin 802, a spring 804 is set at the tail end of the fixed clamping plate 803, and a fixed groove 806 is set on the side wall of the U-shaped groove 805.

[0044] The included angle between adjacent teeth of the gear rotating disk 801 is the same as the included angle between adjacent reflectors of the reflector column 5 .

[0045] Principle of the invention:

[0046] The present invention reflects the ultraviolet light emitted by the ultraviolet light source 4 into the cavity 1 through the reflector of the reflector column 5, and a transparent glass 102 is arranged between the reflector column 5 and the ultraviolet light source 4 to isolate the ultraviolet light source 4 from the vacuum coating working area, thereby effectively solving the problem of reduced ultraviolet light emission intensity caused by the ultraviolet light source 4 being vacuum coated by the ion source 9 during operation, and the refracted ultraviolet light is dispersed by the slit baffle 6, thereby increasing the light divergence angle of the ultraviolet light beam to the gas phase particles (from the solid phase target material 3) in the coating chamber, thereby improving the efficiency of photoelectric ionization; the size and position of the slit are adjusted by the moving rod 7 arranged below the slit baffle 6 to adapt to parts of different volumes and ultraviolet light of different wavelengths; and a rotating shaft 7 is arranged below the reflector column 5 to adjust the size and position of the slit to adapt to parts of different volumes and ultraviolet light of different wavelengths. The device 8 is moved to pull the fixed card plate 803 at the tail of the card pin 802 to the fixed groove 806 and rotate the fixed card plate 803 into the fixed groove 806 to fix the card pin 802. At this time, the gear turntable 801 can be rotated to drive the reflector column 5 to rotate, and the rotation angle is fixed, so that the new reflector is replaced to the position of the old reflector. Then the fixed card plate 803 is rotated to make the card pin 802 engage in the tooth pattern of the gear turntable 801 under the action of the spring 804, and fix the reflector column 5, so that the device continues to work, reducing the time of manual mirror replacement. When all the reflectors on the reflector column 5 fail, it is only necessary to replace the new reflector column 5 together with the gear turntable 801, which greatly improves work efficiency and saves manpower.

[0047] It should be noted that, in this article, the terms "comprises", "includes" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or apparatus that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or apparatus.

[0048] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A pollution-proof vacuum ultraviolet ionization coating method, characterized in that: The steps include: Step 1: Place the parts rack (2) into the chamber (1) of the vacuum coating equipment, install the target material (3) on the front side of the chamber (1), install the ion source (9) on the left side, install the reflector column (5) on the right side, and adjust the slit size of the slit baffle (6) between the reflector column (5) and the parts rack (2) according to the volume of the parts on the parts rack (2); Step 2: evacuate the cavity (1), turn on the ion source (9) and introduce a rare gas, turn on the magnetic motor to rotate the parts rack (2), set the wavelength of the ultraviolet light source (4) according to the ionization energy of different target material (3) elements, turn on the ultraviolet light source (4) to allow the ultraviolet light to pass through the light-transmitting glass (102) and irradiate the reflector on the reflector column (5), remove the anti-ultraviolet film on the irradiated reflector, and the ultraviolet light reflected by the reflector passes through the slit of the slit baffle (6) and diffuses into the cavity (1); Step 3: Open the cathode plate and the anode plate in the vacuum coating equipment, and under the action of the electric field, pass the gas phase particles sputtered from the target material (3) into the cavity (1) through the ion source (9), bombard the surface of the parts on the part rack (2) after being photoionized by ultraviolet light and deposited into a film, thereby performing vacuum coating on the parts; Step 4: When the reflector in the reflector column (5) is about to fail due to reduced reflectivity caused by vacuum coating, the reflector column (5) is rotated to rotate the new reflector area to the position of the failed reflector, so that the vacuum coating equipment continues coating until the coating is completed.

2. The anti-pollution vacuum ultraviolet ionization coating method according to claim 1, characterized in that: The light path after the reflector column (5) totally reflects the ultraviolet light emitted by the ultraviolet light source (4) passes through the slit of the slit baffle (6).

3. The anti-pollution vacuum ultraviolet ionization coating method according to claim 1, characterized in that: The rare gas is one of argon, neon and krypton.

4. A pollution-proof vacuum ultraviolet ionization coating device, comprising a chamber (1), a parts rack (2), an ultraviolet light source (4), an ion source (9) and a target material (3), characterized in that: It also includes a reflector column (5) and a slit baffle (6); A parts rack (2) is rotatably arranged in the center of the cavity (1), a target material (3) is arranged at the front side of the cavity (1), an ion source (9) is arranged on the left side, a reflector column (5) is arranged on the right side, and a slit baffle (6) is slidably arranged on the inner wall of the cavity (1) on one side of the reflector column (5); An ultraviolet light source (4) is arranged on one side of the reflector column (5), and the ultraviolet light source (4) is arranged outside the cavity (1). A light-transmitting glass (102) is arranged on the cavity (1) between the ultraviolet light source (4) and the reflector column (5). A rotating device (8) is fixedly connected below the reflector column (5), and a moving rod (7) is arranged below the slit baffle (6).

5. The anti-pollution vacuum ultraviolet ionization coating device according to claim 4, characterized in that: The reflector column (5) is semicircular, and rectangular reflectors are distributed at equal angles on the arc surface of the reflector column (5), and an anti-ultraviolet film is provided on the reflectors.

6. The anti-pollution vacuum ultraviolet ionization coating device according to claim 4, characterized in that: The slit baffle (6) is provided with a baffle slider (601), the outer wall of the cavity (1) is provided with a slide groove (101), and the baffle slider (601) is slidably engaged in the slide groove (101).

7. The anti-pollution vacuum ultraviolet ionization coating device according to claim 4, characterized in that: The included angle between the ultraviolet light emitted by the ultraviolet light source (4) and the reflector on the reflector column (5) is the same as the included angle between the slit of the slit baffle and the reflector.

8. The anti-pollution vacuum ultraviolet ionization coating device according to claim 4, characterized in that: A moving gear (701) is arranged at a position below the slit baffle (6) that contacts the moving rod (7), and a tooth pattern is arranged at the lower end of the slit baffle (6), and the tooth pattern matches the moving gear (701).

9. The anti-pollution vacuum ultraviolet ionization coating device according to claim 4, characterized in that: The gear turntable (801) of the rotating device (8) is rotatably arranged in the vacuum coating device, a clamping pin (802) is clamped in the tooth pattern of the gear turntable (801), the clamping pin (802) is slidably arranged in the U-shaped groove (805), and a spring (804) is arranged at the tail end of the clamping pin (802); The tail end of the clamping pin (802) is rotatably provided with a fixed clamping plate (803), and the side wall of the U-shaped groove (805) is provided with a fixed groove (806).

10. The anti-pollution vacuum ultraviolet ionization coating device according to claim 9, characterized in that: The included angle between adjacent teeth of the gear rotating disk (801) is the same as the included angle between adjacent reflectors of the reflector column (5).

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