Gas distributor and application thereof

Abstract

The invention provides a gas distributor and application thereof.The gas distributor comprises a distributor body, the distributor body is provided with a concave curved surface, a second airflow opening is formed in the center of the curved surface, a first airflow opening is formed in the outer side of the second airflow opening, the second airflow opening is arranged in the radial direction of the distributor body, and the first airflow opening is formed in the outer side of the first airflow opening. The airflow opening I and the curved surface are arranged in a corner cut manner; rotatable paddles are arranged in the curved surfaces, and gaps are formed between the paddles and the curved surfaces. The gas distributor can help a vertical chemical vapor deposition reactor to treat microporous carbon support particles with the particle size of 50 nanometers to 30 micrometers or other similar microparticles of carbon or non-carbon materials in a chemical vapor deposition (CVD) mode. Silicon or other elementary substances or ceramic or metal or non-metal materials are deposited on the surfaces of the microparticles and the inner surfaces of the micropores; the microporous inner diameter of such microporous-containing stent particles can be less than 2 nanometers.

Description

Technical Field

[0001] The invention belongs to the technical field of chemical vapor permeation, and in particular relates to a gas distributor and application thereof. Background Art

[0002] The reaction gas injection method of the vertical reaction chamber can significantly affect the fluidization degree between the gas and micro-solid particles in the reaction chamber, and the effect of the reaction / surface treatment to be carried out. The airflow blown by the commonly used porous straight perforated gas permeable plate gas distributor is an upward jet, forming an unstable large bubble turbulence, which in turn generates a channel flow, and even causes an airway bypass flow, which is not easy to form and maintain a long and large area of ​​gas-micro-solid fluidization, and cannot be chemically reacted for a long time and stably to treat nano or submicro particles. Therefore, bubble caps and other gas distributors in various forms (such as nozzle head distributors, inclined injection distributors, inclined plate ring distributors, helix tube with nozzles, etc.) came into being in order to improve the fluidization performance and operation between gas and micro-solid particles in the vertical gas phase chemical reaction chamber.

[0003] Although they have some or partial improvements, they are often limited to processing coarser particles. Generally speaking, they can only process batches of particles with a size of 30 microns. It is still inconvenient to use them for industrial-scale production processing for solid particles of nanometers or sizes below about 30 microns. Summary of the invention

[0004] In view of the above technical problems, this application proposes a gas distributor and its application. The specific technical solutions are as follows:

[0005] First of all, it needs to be emphasized that the contents recorded in the background technology do not completely belong to the scope of the prior art, but are selectively recorded in the background technology by the inventor in order to better explain the technical improvement basis of the present application and the relationship between the present application and the prior art content. The contents recorded therein that are closely related to the present application will also be recorded or explained in the subsequent contents of the present application. In particular, the contents recorded in this part that are closely related to the present case should not be deemed as prior art and thus generate technical inspiration for the present application.

[0006] The gas distributor of the present application comprises a distributor body, the distributor body has an inwardly concave curved surface, a second airflow opening is arranged at the center of the curved surface, a first airflow opening is arranged outside the second airflow opening, the second airflow opening is arranged in the radial direction of the distributor body, and the first airflow opening is arranged at an angle to the curved surface;

[0007] A rotatable blade is arranged in the curved surface, and a gap is provided between the blade and the curved surface.

[0008] In an embodiment, the curved surface is a surface of revolution having an axis of revolution.

[0009] In a preferred embodiment, the opening direction of the airflow opening 1 on the reference plane 1 is located between the tangent direction and the radial direction passing through the airflow opening 1, and the reference plane 1 is perpendicular to the axial direction of the distributor body;

[0010] On reference plane 2, the opening direction of the airflow opening 1 is located between the tangent direction and the axial direction passing through the airflow opening 1, and reference plane 2 is parallel to the axial direction of the distributor body and the opening direction of the airflow opening 1.

[0011] In the embodiment, the number of the airflow opening 1 is set to one, and the number of the airflow opening 2 is set to one;

[0012] Or the number of the airflow opening 1 is one, and the number of the airflow opening 2 is multiple;

[0013] Or the number of airflow openings 1 is set to be multiple, and the number of airflow openings 2 is set to be one;

[0014] Or the number of the airflow openings 1 is set to be plural, and the number of the airflow openings 2 is set to be plural.

[0015] In the implementation scheme, a through hole is provided on the distributor body, the through hole is sealed and connected to the first sleeve, and the second air flow opening is provided on the first sleeve.

[0016] In a preferred solution, an air gap adjustment sleeve is provided on the first sleeve, the air gap adjustment sleeve shields the outside of the second air flow opening, and there is a gap between the air gap adjustment sleeve and the first sleeve.

[0017] In a preferred solution, the air gap adjustment sleeve is threadedly connected to the sleeve, and the gap height between the air gap adjustment sleeve and the curved surface can be adjusted when the air gap adjustment sleeve is rotated.

[0018] In the implementation scheme, the blade is fixed to the shaft rod, the shaft rod passes through the center of the sleeve one and maintains a gap with the inner wall of the sleeve one, and a sealing sleeve is arranged between the shaft rod and the sleeve one for axial sealing.

[0019] In the implementation scheme, the rotation direction of the blades when working is the same as the opening direction of the air flow opening 1.

[0020] In an embodiment, the vertical gap between the blade and the curved surface is greater than or equal to 1 mm.

[0021] According to a preferred solution, a sleeve 2 is further provided outside the shaft rod, and the sleeve 2 is sealingly connected to the sleeve 1. A cavity for cooling water circulation is provided between the sleeve 2 and the shaft rod, and sealing sleeves are provided at both ends of the cavity for axial sealing. The sleeve 2 is provided with an interface 2 and an interface 3 which are connected to the cavity.

[0022] In the implementation scheme, a gas input interface 1 is provided on the casing 1, or a gas input interface 1 is provided on the casing 2.

[0023] In an embodiment, a discharge port is provided on the distributor body.

[0024] The gas distributor of the present application is applied to chemical vapor infiltration / deposition reaction, and the gas distributor is installed at the lower end of a vertical reactor.

[0025] In a preferred solution, the gas distributor is installed at the small opening end of the cone at the lower end of the vertical reactor, and the angle between the generatrix of the cone and the central axis is 15 to 30 degrees.

[0026] The beneficial effects of the present invention are as follows: the gas distributor of the present application can help the vertical chemical vapor deposition reactor to process microporous carbon support particles with a particle size of 50 nanometers to 30 micrometers, or other similar carbon or non-carbon material microparticles by chemical vapor deposition (CVD), and deposit silicon or other single substances or ceramics or metal or non-metal materials on the surface of such microparticles and the inner surface of micropores; the inner diameter of the micropores of such microporous support particles can be less than 2 nanometers;

[0027] At the same time, it can improve the long-term stability of fluidization between gas and micro-solid particles in the vertical chemical vapor deposition reactor, thereby facilitating the large-scale processing and production of chemical vapor deposition of uniform amorphous and / or microcrystalline carbon-coated silicon on nano- to submicron-sized porous carbon support solid particles, thereby solving the industry's mass production problem of CVI silicon deposition on submicron / nano-sized porous carbon support solid particles, and further assisting the lithium battery industry in developing and supplying a key raw material for the negative electrode required. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 Shown is a schematic structural diagram of a vertical reactor;

[0029] Figure 2 Shown is a schematic diagram of the structure of a gas distributor;

[0030] Figure 3 What is shown is a schematic diagram of the top surface state of the gas distributor;

[0031] Figure 4 It is shown that Figure 3 Cross-sectional view of CC;

[0032] Figure 5 What is shown is the structural schematic diagram of casing 1;

[0033] Figure 6 It shows Figure 3 Cross-sectional view of the middle DD;

[0034] Figure 7 What is shown is the structural schematic diagram of casing 2. DETAILED DESCRIPTION

[0035] In the following description, certain specific details are set forth in order to provide a thorough understanding of various embodiments. However, it will be appreciated by those skilled in the art that the present invention may be practiced without these details. In other cases, well-known structures are not shown or described in detail to avoid unnecessarily obscuring the description of the embodiments. Unless the context otherwise requires, throughout the specification and the appended claims, the word "comprising" shall be interpreted in an open, inclusive sense, i.e., as "including but not limited to".

[0036] "One embodiment" or "embodiment" mentioned throughout this specification means that in at least one embodiment, specific features, structures or characteristics related to the embodiment are included. Therefore, the phrases "in one embodiment" or "in an embodiment" appearing in various places throughout this specification do not necessarily all refer to the same embodiment. In addition, specific features, structures or characteristics can be combined in any suitable manner in one or more embodiments. In addition, as used in this specification and the appended claims, the singular forms "one / kind" and "the" include plural indicators unless the context clearly dictates otherwise. It should also be noted that the term "or" is generally used in its meaning that includes "and / or" unless the context clearly dictates otherwise.

[0037] For the purpose of illustration and explanation, the gas distributor described in the present application is for a vertical reactor, and the vertical reactor can be used to prepare composite materials by chemical vapor infiltration and chemical vapor deposition. By introducing substrate particles and reaction gases into the interior of the vertical reactor and controlling the internal conditions of the vertical reactor, the reaction gases react and are deposited on the surface of the substrate particles or penetrate into the internal micropores of the substrate particles.

[0038] The vertical reactor that has made technical contributions to the prior art has been approved for relevant patent applications. Figure 1 The reactor is described by way of example. Figure 1The reactor includes a shell 100, the top of the shell 100 is provided with a raw material inlet 101, an exhaust port 102 and a pressure sensor 103, the bottom of the shell 100 is provided with an input interface 1 104 and an input interface 2 105, wherein the input interface 1 104 is arranged on the central axis straight line of the shell, the input interface 2 105 is arranged on the outside of the input interface 1 104, and the input interface 2 105 is arranged in an oblique insertion state, the middle of the shell 100 is provided with an input interface 3 106, and three thermocouple sensors 107 are arranged inside the shell 100.

[0039] A heating zone 1 210 and a heating zone 2 220 are arranged outside the shell 100. The heating zone 1 210 is located at the top. Three groups of parallel electric heating wires 1 211 are arranged in the heating zone 1 210. Three independent groups of electric heating wires 2 221, electric heating wires 3 222 and electric heating wires 4 223 are arranged in the heating zone 2 220.

[0040] The shell 100 is made of high temperature resistant and corrosion resistant stainless steel material, with an inner diameter of about 43 cm and a length of 368 cm. The manufactured reactor can be loaded with 30 kg to 150 kg of granular porous carbon supports, which is much higher than the single batch processing capacity of 20 kg of the current horizontal CVI reactor in the industry.

[0041] The outside of the electric heating wire 1 211, the electric heating wire 221, the electric heating wire 3 222 and the electric heating wire 4 223 are all provided with insulation materials to form an insulation layer to ensure that heat loss is reduced, the furnace heating efficiency is increased, and the furnace temperature and the temperature inside the reaction chamber and the temperature gradient are kept stable.

[0042] The bottom thermocouple sensor 107 and the temperature monitoring thermocouple of the electric heating wire 223 can be shared to simplify the complexity of the equipment component installation.

[0043] A cone 108 is also provided at the bottom of the shell 100 , and the included angle between the generatrix of the cone 108 and the central axis of the shell 100 is set to 15° to prevent material from piling up at the bottom of the shell 100 .

[0044] The present application is based on the reactor described above, and further makes a technical contribution in that a gas distributor 300 is provided, which is arranged at the small opening end of the cone 108, so that the contact between the nano-scale / micro-scale particles in the reactor and the reaction gas and the fluidization behavior between the gas-micro-solid particles after mixing are more stable and uniform with the assistance of the gas distributor 300, and the dead material area at the bottom of the reactor is eliminated, so that the chemical vapor infiltration reaction can be evenly completed on each nano-scale / or submicron particle. Figure 2 Shown is a schematic diagram of an exemplary structure of a gas distributor 300 .

[0045] In the embodiment, the gas distributor 300 uses two gas flows in the radial direction of the gas distributor 300. The two gas flows are input into the reactor at the bottom of the reactor in a mutually perpendicular direction. The vortex gas flow formed by the mixing between them drives the materials in the reaction chamber and blows them from bottom to top along the axial direction of the reactor. In actual operation, the vortex gas flow formed by the mixed gas can not only effectively mix the nano-scale and / or submicron-scale micro-solid particles with the reaction gas and the carrier gas in the reaction chamber and form fluidization to perform flow elutriation, but also maintain the fluidization stability between the gas and the micro-solid particles for a long time, and make the temperature and chemical reaction between the gas and the micro-solid particles in the entire reactor tend to be uniform.

[0046] In the implementation scheme, the gas distributor 300 has a distributor body 310, which is directly or indirectly connected to the reactor. The distributor body 310 has a concave curved surface 311, which is arranged inside the reactor, and a gas flow opening 312 is arranged on the curved surface 311, and the other end opening of the gas flow opening 312 is arranged outside the reactor, so that the carrier gas is transported to the inside of the reactor through the gas flow opening 312 to form one of the two gas flows.

[0047] In the implementation scheme, the curved surface 311 formed on the distributor body 310 should be set as a rotation surface, that is, a surface formed by intersecting and cutting on the distributor body 310 after a curve is rotated around a rotation axis; in some implementation schemes, the curved surface 311 is a rotation surface formed by an arc; in some implementation schemes, the curved surface 311 is a rotation surface formed by an elliptical arc; in some implementation schemes, the curved surface 311 is a rotation surface formed by a polyline, and the polyline is a circular arc and a straight line connected to each other, and the circular arc and the straight line are tangent; in some implementation schemes, the curved surface 311 is a rotation surface formed by an irregular curve.

[0048] In the implementation scheme, see Figure 3 The air flow opening 312 disposed on the curved surface 311 has an opening direction P arranged at an angle, and a reference plane (i.e. Figure 3 The reference plane is any plane perpendicular to the axis of rotation of the curved surface 311. On the projection of the reference plane, the air flow opening 1 312 has a tangent direction A and a radial direction B on the curved surface 311. The opening direction P of the air flow opening 1 312 is located between the tangent direction A and the radial direction B.

[0049] In some embodiments, the angle between the opening direction P of the airflow opening 312 and the radial direction B is between 45 and 90°, for example, 45°, for example, 55°, for example, 65°, for example, 75°, for example, 85°, for example, 90°; in some embodiments, the angle between the opening direction P of the airflow opening 312 and the radial direction B is 90°, which has the best effect in forming a vortex airflow, and the swirl effect outside the range of 45-90° will gradually weaken or disappear.

[0050] In the embodiment, the number of airflow openings 1 312 is not limited to one. In some embodiments, the number of airflow openings 1 312 is one; in some embodiments, the number of airflow openings 1 312 is one; in some embodiments, the number of airflow openings 1 312 is two; in some embodiments, the number of airflow openings 1 312 is three; in some embodiments, the number of airflow openings 1 312 is four.

[0051] In some embodiments, the number of air flow openings 312 is set to be large, for example, four, for example, five, for example, six, for example, seven, for example, eight. These air flow openings 312 are symmetrically distributed about the center of rotation of the curved surface 311, which can evenly stabilize the air flow direction and is conducive to long-term stable air-particle fluidization.

[0052] In some embodiments, the heights of the air flow openings 312 on the curved surface 311 are set to be the same, that is, there is a reference plane perpendicular to the rotation axis of the curved surface 311, and the reference plane intersects with all the air flow openings 312; in some embodiments, the heights of the air flow openings 312 on the curved surface 311 are not set to be exactly the same, that is, with the rotation axis of the curved surface 311 as a reference, the air flow openings 312 are staggered in the direction of the rotation axis of the curved surface 311, that is, it is impossible to set a reference plane perpendicular to the rotation axis of the curved surface 311, and the reference plane intersects with all the air flow openings 312.

[0053] In some embodiments, the number of airflow openings 312 is set to be multiple, and the spacing between any two adjacent airflow openings 312 is the same, that is, the airflow openings 312 are evenly distributed on the curved surface 311 at equal intervals; in some embodiments, the number of airflow openings 312 is set to be multiple, and the spacing between adjacent airflow openings 312 is a non-fixed value, that is, among three consecutive adjacent airflow openings 312, the spacing between the middle airflow opening 312 and the airflow openings 312 on both sides thereof will be different.

[0054] In an implementation scheme, Figure 4 It shows Figure 3The cross-sectional view of CC in FIG. 1 mainly shows a schematic diagram of the state of the air flow opening 1 312, and a reference plane (i.e. Figure 4 The reference plane is a rotation axis passing through the air flow opening 1 312 and parallel to the curved surface 311. In the projection of the reference plane, the air flow opening 1 312 has a tangent direction M on the curved surface 311, and an axial direction N of the air flow opening 1 312. The opening direction P of the air flow opening 1 312 is located between the tangent direction M and the axial direction N.

[0055] In some embodiments, the angle between the opening direction P of the airflow opening 312 and the axial direction N is 5 to 60°, for example 5°, for example 10°, for example 20°, for example 30°, for example 40°, for example 50°, for example 60°; in some embodiments, the angle between the opening direction P of the airflow opening 312 and the axial direction N is 45 to 90°, for example 45°, for example 55°, for example 65°, for example 75°, for example 85°, for example 90°; in some embodiments, the angle between the opening direction P of the airflow opening 312 and the axial direction N is 70 to 100°, for example 70°, for example 80°, for example 90°, for example 100°.

[0056] In the above-mentioned setting of the angle between the opening direction P of the airflow opening 1 312 and the axial direction N, 40° to 50° is a better choice.

[0057] In some embodiments, the number of air flow openings 312 is set to be large, for example, four, for example, five, for example, six, for example, seven, for example, eight. These air flow openings 312 are symmetrically distributed about the center of rotation of the curved surface 311, which can evenly stabilize the air flow direction and is conducive to long-term stable air-particle fluidization.

[0058] In the embodiment, the cross-sectional shape of the airflow opening 1 312 may not be limited, such as a circle, a square, a triangle, or other polygonal or other regular or irregular shapes, among which a circle is the best choice.

[0059] In the implementation scheme, a through hole is provided on the distributor body 310, and the through hole is arranged to be coaxial with the rotation axis of the curved surface 311. A sleeve 320 is fixed in the through hole, and one end of the sleeve 320 extends into the curved surface 311 (that is, the interior of the reactor), and one end of the sleeve 320 extending into the curved surface 311 is provided with a radially arranged airflow opening 2 321, through which the carrier gas is transported from the outside to the inside of the reactor, forming the other of the two airflows.

[0060] The reaction gas formed by the mixture of the reaction precursor and the carrier gas is input through the bottom of the sleeve 1 320 and then blown into the distributor body 310 from the air flow opening 2 321 in the radial direction, while the carrier gas is blown into the distributor body 310 from the air flow opening 1 312 in a tangential direction. The reaction gas injected into the distributor body 310 merges with the carrier gas injected into the distributor body 310 to form a vortex airflow, which then rises along the long axis of the reactor and is blown into the gas-micro-solid fluidized fluid suspended above the reactor for washing, heat exchange, pyrolysis and deposition of the reaction precursor gas. The residual gas and carrier gas after the reaction are then gradually moved to the exhaust port 102 at the top of the reactor for discharge.

[0061] In some embodiments, the heights of the second air flow openings 321 in the axial direction of the sleeve 320 are set to be the same, that is, there is a reference plane perpendicular to the axial direction of the sleeve 320, and the reference plane intersects with all the air flow openings 312; in some embodiments, the heights of the second air flow openings 321 in the axial direction of the sleeve 320 are not completely the same.

[0062] In some embodiments, when the number of airflow openings 321 is set to more than one, these airflow openings 321 are arranged in an equidistant and uniform manner in the axial direction of the sleeve 320, that is, the distances between adjacent airflow openings 321 are equal, and this arrangement is the optimal choice, which is conducive to long-term stable gas-particle fluidization; in some embodiments, when the number of airflow openings 321 is set to more than one, these airflow openings 321 are arranged in an unequal and uniform manner in the axial direction of the sleeve 320.

[0063] In the embodiment, the cross-sectional shape of the second air flow opening 321 may not be limited, such as a circle, a square, a triangle, or other polygonal or other regular or irregular shapes, among which a circle is the best choice.

[0064] In the implementation scheme, an air gap adjustment sleeve 340 is also provided on the sleeve 1 320. The air gap adjustment sleeve 340 is adjustably connected to the sleeve 1 320 by means of a threaded connection. By rotating the degree of screwing of the air gap adjustment sleeve 340 and the sleeve 1 320, the gap height between the air gap adjustment sleeve 340 and the curved surface 311 is adjusted to adjust the input reaction gas flow rate.

[0065] There is no other contact between the air gap adjustment sleeve 340 and the sleeve 1 320 except the threaded connection, and there is a gap between the main part of the air gap adjustment sleeve 340 and the sleeve 1 320, which can guide the gas output from the air flow opening 2 321 to change its direction vertically downward, and then through the gap between the air gap adjustment sleeve 340 and the curved surface 311, the downward airflow is changed again into a radial airflow to be radially blown toward the surface of the curved surface 311 and mixed with the cyclone to form an ascending vortex.

[0066] In the embodiment, a discharge port 313 is provided on the distributor body 310, and the discharge port 313 is connected to a discharge valve. The discharge valve can be controlled to open and close, and the granular material inside the reactor is discharged through the discharge port 313 after the reaction is completed.

[0067] In the implementation scheme, a paddle 330 is further disposed in the curved surface 311 of the distributor body 310 . The paddle 330 has a rotation axis, and the rotation axis coincides with the rotation axis of the curved surface 311 , so that the paddle 330 can rotate in the curved surface 311 .

[0068] When the reactor is carrying out chemical vapor deposition / infiltration reaction, some micro-solid particles occasionally settle to the bottom of the reactor due to the slow flow rate of the rising vortex airflow near the inner wall of the reactor, and then flow into the curved surface 311 of the distributor body 310 and accumulate. At this time, through the rotation, sweeping and stirring of the impeller 330, these micro-solid particles are mixed with the rising vortex airflow formed in the distributor body 310 and move upward, and are blown into the gas-micro-solid particle fluidized body suspended above again, and the above-mentioned reaction treatment procedure is repeated, whereby the gas distributor 300 can recover the blown and deposited solid micro-particles.

[0069] On the other hand, by adjusting the rotation speed of the impeller 330, the flow rate or velocity of the rising vortex airflow, and the flow ratio of the carrier gas to the reaction gas, the continuous airways and grooves formed by the airflow in the material and near the inner wall of the reactor are cut off from time to time, thereby eliminating the phenomenon of airflow short-circuiting. The flow rate and bubble size of the gas when entering the gas-micro-solid particle fluidization body can be properly adjusted, thereby helping to stabilize the fluid of the gas-micro-solid particle fluidization and thereby eliminating or reducing the formation of unstable short-circuited airways.

[0070] On the other hand, the blades 330 can also help to discharge the material.

[0071] In the embodiment, the blade 330 has an edge shape that matches the curved surface 311, so that when the blade 330 rotates around its rotation axis, the edge of the blade 330 maintains a vertical gap of 1 mm or more with the curved surface 311. Rotating the blade 330 under this gap is sufficient to cause the air flow to stir and lift nanometer / submicron particles, reducing the wear and pollution caused by the contact between the blade and the particles. At the same time, the blade can be economically manufactured without expensive precision mechanical manufacturing processes. The vertical gap between any point on the blade 330 and the curved surface 311 can be equal or unequal; the top of the blade 330 can exceed the edge of the curved surface 311 or not.

[0072] In some embodiments, the paddle 330 is provided as one piece; in some embodiments, the paddle 330 is provided as a plurality of pieces, and the plurality of paddles 330 are arranged in a manner symmetrical about the center of their rotation axis, that is, the angles between adjacent paddles 330 are the same, and when the number of paddles 330 is provided between 3 and 6 pieces, the efficiency of recovering accumulated particles can be maximized; in some embodiments, the paddle 330 is provided as a plurality of pieces, and the plurality of paddles 330 are arranged in a manner asymmetrical about the center of their rotation axis, that is, the angles between any two adjacent paddles 330 are not exactly the same.

[0073] In the embodiment, the blade 330 should be driven to rotate in the same direction as the opening direction of the air flow opening 312 to Figure 3 For example, when the opening direction of the air flow opening 1 312 is clockwise, the blade 330 should also be driven to rotate in the clockwise direction.

[0074] In the embodiment, the blade 330 is fixedly connected by the shaft 331 and has the function of rotating in the curved surface 311. The shaft 331 is arranged at the center of the sleeve 320 and maintains a gap with the inner wall of the sleeve 320 for inputting gas. The connection state can be referred to Figure 6 , Figure 6 It shows Figure 3 In the cross-sectional view of middle DD, the paddle 330 is connected to the end of the shaft 331 through a nut 332, and the other end of the shaft 331 is connected to an external driving device through a coupling, and the shaft 331 is driven by the external driving device to drive the paddle 330 to rotate.

[0075] In the embodiment, the tightening direction of the blade 330 and the shaft 331 when the threaded connection is adopted is opposite to the rotation working direction of the blade 330. Figure 3 For example, when the paddle 330 is driven to rotate in a clockwise direction, the paddle 330 needs to be rotated in a counterclockwise direction to be tightened with the shaft 331 .

[0076] Of course, the blades 330 and the shaft 331 may also be connected in other forms, such as welding, bolt-assisted fixation, or a combination of these forms of fixed connection.

[0077] In the implementation scheme, a matching sleeve 2 333 is also provided on the portion of the shaft rod 331 exposed outside the distributor body 310, and the shaft rod 331 is also arranged inside the sleeve 2 333, and a bearing seal and a bearing sleeve are arranged inside the sleeve 2 333 to achieve the purpose of positioning and sealing the shaft rod 331; the sleeve 2 333 should also be directly or indirectly sealed and connected to the sleeve 1 320, and its connection form is not limited to welding, threaded connection, flange connection, etc.

[0078] In the implementation scheme, a high temperature resistant sealing sleeve is also provided between the shaft 331 and the sleeve 1 320 and the sleeve 2 333 to meet the high temperature sealing performance requirements under the reaction conditions.

[0079] In some embodiments, the air inlet of the air flow opening 321 is set on the sleeve 1 320, and accordingly, the sleeve 1 320 should have at least a portion exposed outside the distributor body 310; in some embodiments, the air inlet of the air flow opening 321 is set on the sleeve 2 333, and in this case, there is no restriction that the sleeve 1 320 must have a portion exposed outside the distributor body 310.

[0080] Taking the air inlet of the second air flow opening 321 as an example, which is arranged on the second sleeve 333, Figure 7 FIG. 3 shows an interface 1 333 a provided on the second sleeve 333 , wherein the interface 1 333 a is connected to the gap between the first sleeve 320 and the shaft rod 331 .

[0081] In an embodiment, the heat gained by the shaft 331 due to contact with the relatively high temperature reactor can be taken away by cooling water, and the cooling water can be circulated and replenished through the casing 2 333 to Figure 7 As an exemplary explanation of the structure, the second sleeve 333 is provided with a second interface 333b and a third interface 333c, and the second interface 333b and the third interface 333c are respectively used for the introduction and discharge of cooling water. The cooling water flows into the space between the second sleeve 333 and the shaft 331, and the cooling water exchanges heat with the shaft 331 to cool it down, while also protecting the sealing ring matched with the shaft 331 from being damaged prematurely due to excessively high temperature.

[0082] Combination Figure 6 The circulation space of cooling water and the input space of reaction gas should be isolated from each other, so at least one high temperature resistant sealing sleeve should be arranged in the second sleeve 333, and the high temperature resistant sealing sleeve is also arranged between the first interface 333a and the second interface 333b accordingly.

[0083] Combined with the above, in the embodiment, the gas distributor 300 is connected to the small opening end of the cone 108, and the cone 108 is used for transition connection. The cone 108 can provide a suitable pressure drop to help ease the rising vortex airflow and stabilize the gas-micro-solid particle fluidization state in the reactor. In addition, when the cone 108 is set so that the angle between the generatrix and its central axis is between 15 and 30 degrees, it can help the porous carbon support particles settle back from the reactor into the gas distributor 300, and reduce the accumulation of the porous carbon support on the inverted cone slope to form dead material.

[0084] The gas distributor 300 of the present application can help the upright chemical vapor deposition reactor to process microporous carbon support particles with a particle size of 50 nanometers to 30 microns, or other similar carbon or non-carbon material particles, by chemical vapor deposition (CVD), and deposit silicon or other single substances or ceramics or metals or non-metallic materials on the surface of such microparticles and the inner surface of the micropores; the inner diameter of the micropores of such microporous support particles can be less than 2 nanometers.

[0085] The gas distributor 300 of the present application can improve the long-term stability of fluidization between gas and micro-solid particles in a vertical chemical vapor deposition reactor, thereby facilitating large-scale processing and production of chemical vapor deposition of uniform amorphous and / or microcrystalline carbon-coated silicon on nano- to submicron-sized porous carbon support solid particles, thereby solving the industry's mass production problem of CVI silicon deposition of submicron / nano-sized porous carbon support solid particles, and further assisting the lithium battery industry in developing and supplying a key raw material for the negative electrode required.

[0086] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them.

Claims

1. A gas distributor, characterized in that: The distributor comprises a main body, wherein the main body has an inwardly concave curved surface, a second air flow opening is arranged at the center of the curved surface, a first air flow opening is arranged outside the second air flow opening, the second air flow opening is arranged in the radial direction of the main body, and the first air flow opening is arranged at an angle to the curved surface; A rotatable blade is arranged in the curved surface, and there is a gap between the blade and the curved surface.

2. The gas distributor according to claim 1, characterized in that On the reference plane 1, the opening direction of the airflow opening 1 is located between the tangent direction and the radial direction passing through the airflow opening 1, and the reference plane 1 is perpendicular to the axial direction of the distributor body; On reference plane 2, the opening direction of the airflow opening 1 is located between the tangent direction and the axial direction passing through the airflow opening 1, and reference plane 2 is parallel to the axial direction of the distributor body and the opening direction of the airflow opening 1.

3. The gas distributor according to claim 1, characterized in that: On the reference plane 1, the angle between the opening direction of the airflow opening 1 and the radial direction is 90°.

4. The gas distributor according to claim 1, characterized in that The number of the airflow opening 1 is set to one, and the number of the airflow opening 2 is set to one; Or the number of the airflow opening 1 is one, and the number of the airflow opening 2 is multiple; Or the number of airflow openings 1 is set to be multiple, and the number of airflow openings 2 is set to be one; Or the number of the airflow openings 1 is set to be plural, and the number of the airflow openings 2 is set to be plural.

5. The gas distributor according to claim 1, characterized in that: The distributor body is provided with a through hole, the through hole is sealed and connected to the first sleeve, and the second air flow opening is provided on the first sleeve.

6. The gas distributor according to claim 5, characterized in that: An air gap adjustment sleeve is arranged on the first sleeve, the air gap adjustment sleeve shields the outside of the second air flow opening, and there is a gap between the air gap adjustment sleeve and the first sleeve.

7. The gas distributor according to claim 6, characterized in that: The air gap adjustment sleeve is threadedly connected to the sleeve, and the gap height between the air gap adjustment sleeve and the curved surface can be adjusted when the air gap adjustment sleeve is rotated.

8. The gas distributor according to claim 7, characterized in that: The blade is fixed to the shaft rod, the shaft rod passes through the center of the sleeve one and maintains a gap with the inner wall of the sleeve one, and a sealing sleeve is arranged between the shaft rod and the sleeve one for axial sealing.

9. The gas distributor according to claim 8, characterized in that: A second sleeve is also provided outside the shaft rod, and the second sleeve is sealed and connected to the first sleeve. A cavity for cooling water circulation is provided between the second sleeve and the shaft rod, and sealing sleeves are provided at both ends of the cavity for axial sealing. The second sleeve is provided with a second interface and a third interface communicating with the cavity; The first sleeve is provided with a gas input interface, or the second sleeve is provided with a gas input interface.

10. The gas distributor according to claim 1, characterized in that: The distributor body is provided with a discharge port.

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