Double-layer sleeve type gas injection pipe for 8-inch vertical furnace

Abstract

A double-layer sleeve type gas injection pipe for an 8-inch vertical furnace comprises a connector and a gas injection pipe body with the base portion connected to the connector, the periphery of the gas injection pipe body is sleeved with a protection pipe, the inner side of the protection pipe is in clearance fit with the outer side of the gas injection pipe body, and the base portion of the protection pipe is connected with the connector. The service life of the gas injection pipe is greatly prolonged.

Description

Technical Field

[0001] The invention relates to the technical field of precious polishing sheet processing, in particular to a double-layer sleeve-type gas injection tube for an 8-inch vertical furnace. Background Art

[0002] The quartz gas injection tube inside the vertical furnace tube is currently usually a single-layer transparent tube made of quartz. Silane is ejected from the gas injection tube under high temperature conditions to react and generate silicon. During the above process, a layer of silicon film is easily attached to the inner and outer surfaces of the gas injection tube. On the one hand, stress is generated on the inner and outer surfaces of the gas injection tube. Due to the non-directional characteristics of stress, the tube wall of the quartz tube is subjected to pressure from the inside and outside; on the other hand, due to the different materials and expansion coefficients of silicon and quartz tube, the expansion / contraction amount of the two during the heating and cooling process in the vertical furnace is different, resulting in the tube wall of the quartz tube being subjected to tearing forces from the inside and outside during the thermal expansion and contraction process. As the silicon film produced by the reaction thickens, the gas injection tube is subject to increased internal and external pressure and tearing force, and it is easy to break. After the break, it is necessary to cool down, dismantle the furnace and replace it before heating reaction. However, the heating and cooling process will increase the stress of the vertical furnace tube, affecting the life of the vertical furnace tube.

[0003] In addition, some broken gas injection pipes will fall to the adjacent gas injection pipes on the side and get stuck between the gas injection pipes and the furnace pipes. When the furnace is dismantled, these broken gas injection pipes will fall and hit the operators and facilities under the furnace pipes as the adjacent gas injection pipes are dismantled, causing safety accidents. Summary of the invention

[0004] The present invention aims to provide a double-layer sleeve type gas injection pipe for an 8-inch vertical furnace to extend the service life of the gas injection pipe.

[0005] In order to solve the above technical problems, the specific solution adopted by the present invention is: a double-layer sleeve gas injection pipe for an 8-inch vertical furnace, including a joint and a gas injection pipe with a base connected to the joint, a protective pipe is sleeved on the outer periphery of the gas injection pipe, the inner side of the protective pipe is gap-matched with the outer side of the gas injection pipe, and the base of the protective pipe is connected to the joint.

[0006] Preferably, the gap between the inner side of the protection tube and the outer side of the gas injection tube is no greater than 0.5 mm.

[0007] Preferably, the base of the protection tube is a flared section, and the flared section is nested on the joint.

[0008] Preferably, the gas injection tube and the protection tube are both made of quartz.

[0009] Preferably, a positioning groove is provided on the outer periphery of the base of the gas jet tube, and a mounting opening is provided on the joint for exposing the positioning groove. A clamp and a clamp for fixing the base of the gas jet tube to the joint are provided at the mounting opening. The clamp can pass through the mounting opening and be inserted into the positioning groove. One end of the clamp is provided with a hook body that can be hooked into a hook hole provided at the outer periphery of the clamp, and the other end of the clamp is used to clamp on the outer periphery of the joint to position the clamp.

[0010] Preferably, the end of the clamp away from the hook body is provided with a flange for a person to pull.

[0011] Preferably, the angle of the clamp is 185-190°.

[0012] Preferably, the material of the clamp block and the clamp is 316L stainless steel.

[0013] The present invention adds a protective tube with an inner diameter slightly larger than that of the gas injection tube to the outside of the single-layer gas injection tube. On the one hand, the gas injection tube and the protective tube are completely non-contacting. On the other hand, the silicon produced in the reaction is attached to the inner wall of the gas injection tube and the outer wall of the protective tube, so that the gas injection tube is only subjected to the stress and tearing force from the silicon thin film on the inner tube wall, thereby greatly reducing the easy breakage caused by the silicon thin film attached to both the inner and outer walls of the gas injection tube. On this basis, the service life of the gas injection tube and the entire vertical furnace is extended, and the probability of the broken gas injection tube falling and injuring people is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural schematic diagram of a double-layer sleeve-type gas injection pipe for an 8-inch vertical furnace of the present invention;

[0015] Figure 2 It is a schematic structural diagram of the matching part between the base of the gas injection pipe and the joint;

[0016] Figure 3 It is a schematic diagram of the transverse cross-sectional structure after the base of the gas injection pipe is positioned and installed into the joint;

[0017] Figure 4 This is a photo of one side of the gas jet pipe base and the joint connection location;

[0018] Figure 5 This is a photo of the other side of the gas jet tube base where it connects to the joint;

[0019] Markings in the figure: 1. protective tube, 2. gas injection tube, 3. flared section, 4. joint, 5. positioning groove, 6. mounting opening, 7. clamp, 8. block, 9. hook body, 10. hook hole, 11. flange. DETAILED DESCRIPTION

[0020] like Figure 1As shown, the double-layer sleeve-type gas injection tube for an 8-inch vertical furnace of the present invention is the same as the prior art in that it includes a joint 4 made of 316L stainless steel and a gas injection tube 2 made of quartz. The joint 4 and the gas injection tube 2 are both straight tubes, and the base of the gas injection tube 2 is plugged into the joint 4. During the implementation process, silane is introduced into the gas injection tube 2 from the tail of the joint 4, and then from the gas injection tube 2 to the furnace tube of the vertical furnace, and silicon is prepared at a high temperature of 650°C.

[0021] In order to prevent the generated silicon single substance from being attached to the inner and outer walls of the gas injection tube 2 at the same time, the present invention sets a protective tube 1 made of quartz material on the outer periphery of the gas injection tube 2. One end of the protective tube 1 is a flared section 3, which is embedded in the end of the joint 4; the other end is flush with the gas injection tube 2. The protective tube 1 and the gas injection tube 2 are both circular tubes, and the two are concentrically or nearly concentrically distributed, so that there is a gap of no more than 0.5 mm between the outer wall of the gas injection tube 2 and the inner wall of the protective tube 1, and the gas injection tube 2 and the protective tube 1 are completely non-contact. Therefore, during the production process, the generated silicon single substance is mainly attached to the inner wall of the gas injection tube 2 and the outer wall of the protective tube 1, and it is not easy to enter through the narrow gap between the gas injection tube 2 and the end of the protective tube 1, thereby reducing the easy breakage caused by the silicon single substance film attached to the inner and outer walls of the gas injection tube 2. In actual production, even if part of the silicon element can enter the end gap between the gas injection tube 2 and the protective tube 1, it is only easy to adhere to the inner side of the end of the protective tube 1 and the outer side of the end of the gas injection tube 2, so that the two are only easy to break at the end position. However, the break near the end position does not affect the normal production process in the vertical furnace. Furthermore, even if the gas injection tube 2 is broken due to excessive silicon element film attached to the inner tube wall and the stress and tearing force generated by the silicon element film on one side, the protective tube 1 located on the outside still has a limiting protection effect on the gas injection tube 2, so that the gas injection tube 2 is not easy to fall off or produce a large displacement, so that the silane gas can still perform a normal gas injection process for a period of time, reducing the need for temporary shutdown and maintenance due to direct breakage or bending of the gas injection tube 2.

[0022] On the basis of the above technical solution, the present invention further provides a quick connection structure between the joint 4 and the gas injection pipe 2, so as to quickly and safely replace the gas injection pipe 2 after the gas injection pipe 2 reaches the end of its service life. Specifically:

[0023] like Figure 2 and Figure 3As shown, a rectangular positioning groove 5 is provided at the base of the gas injection tube 2, and the positioning groove 5 is distributed along the circumference of the gas injection tube 2, and the positioning groove 5 does not penetrate the gas injection tube 2 to avoid leakage; a corresponding installation opening 6 is opened on the joint 4, and the installation opening 6 is also rectangular, distributed along the circumference of the joint 4, and penetrates the radial direction of the joint 4, so that the positioning groove 5 can be exposed from the installation opening 6, and the base of the gas injection tube 2 is positioned and installed on the joint 4 through a clamp block 8 and a clamp 7 both made of 316L stainless steel.

[0024] Combination Figure 3-5 As shown, the outer circumference of the clamping block 8 is arc-shaped and corresponds to the outer diameter of the joint 4, and the length corresponds to the installation opening 6, so that it can be just inserted into the installation opening 6 to fill the position of the installation opening 6 of the joint 4. The inner side of the clamping block 8 has a protrusion that can be inserted into the positioning groove 5, and the thickness of the protrusion corresponds to the width of the positioning groove 5, so as to prevent the gas injection pipe 2 from moving in the longitudinal direction. The clamping hoop 7 is an arc-shaped with an angle greater than 180, and the inner side of its left end has a hook body 9, which can be hooked and matched with the hook hole 10 opened on the outer side of the left end of the clamping block 8; the right end can be clamped on the joint 4 under the action of external force to position the clamping block 8 and prevent the clamping block 8 from falling off from the installation opening 6. In addition, in order to facilitate removal, the right end of the clamping hoop 7 is a flange 11 turned outward, so that the personnel can pull the clamping hoop 7 outward to remove the clamping hoop 7 and the clamping block 8, or pull the clamping hoop 7 inward to install the clamping hoop 7 and the clamping block 8.

Claims

1. A double-layer sleeve-type gas injection pipe for an 8-inch vertical furnace, comprising a joint (4) and a gas injection pipe (2) whose base is connected to the joint (4), characterized in that: A protective tube (1) is sleeved on the outer periphery of the gas injection tube (2), the inner side of the protective tube (1) is clearance-matched with the outer side of the gas injection tube (2), and the base of the protective tube (1) is connected to a joint (4).

2. The double-layer sleeve-type gas injection pipe for an 8-inch vertical furnace as claimed in claim 1, characterized in that: The gap between the inner side of the protection tube (1) and the outer side of the gas injection tube (2) is no greater than 0.5 mm.

3. The double-layer sleeve-type gas injection pipe for an 8-inch vertical furnace as claimed in claim 1, characterized in that: The base of the protection tube (1) is a flared section (3), and the flared section (3) is nested on the joint (4).

4. The double-layer sleeve-type gas injection pipe for an 8-inch vertical furnace as claimed in claim 1, characterized in that: The gas injection tube (2) and the protection tube (1) are both made of quartz.

5. The double-layer sleeve-type gas injection pipe for an 8-inch vertical furnace as claimed in claim 1, characterized in that: A positioning groove (5) is provided on the outer periphery of the base of the gas injection tube (2); a mounting opening (6) for exposing the positioning groove (5) is provided on the joint (4); a clamping block (8) and a clamping hoop (7) for fixing the base of the gas injection tube (2) and the joint (4) are provided at the mounting opening (6); the clamping block (8) can pass through the mounting opening (6) and be inserted into the positioning groove (5); one end of the clamping hoop (7) is provided with a hook body (9) that can be hooked to a hook hole (10) provided at the outer periphery of the clamping block (8); and the other end of the clamping hoop (7) is used to clamp on the outer periphery of the joint (4) to position the clamping block (8).

6. The double-layer sleeve-type gas injection pipe for an 8-inch vertical furnace as claimed in claim 5, characterized in that: The end of the hoop (7) away from the hook body (9) is provided with a flange (11) for a person to pull.

7. The double-layer sleeve-type gas injection pipe for an 8-inch vertical furnace as claimed in claim 5, characterized in that: The angle of the hoop (7) is 185-190°.

8. The double-layer sleeve-type gas injection pipe for an 8-inch vertical furnace as claimed in claim 5, characterized in that: The materials of the clamping block (8) and the clamping hoop (7) are both 316L stainless steel.

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