Distance measuring system

Abstract

The invention discloses a distance measuring system which is used for installation between a laser distance measuring instrument and a crystal pulling furnace and measurement of the liquid level in the crystal pulling furnace. The distance measuring system comprises a mounting frame and a light path assembly, the mounting frame is used for mounting the laser range finder and fixedly mounted with the crystal pulling furnace, one end of the light path assembly is mounted on the mounting frame, the other end of the light path assembly extends into the crystal pulling furnace, and the light path assembly is used for reflecting laser emitted by the laser range finder into the crystal pulling furnace. According to the distance measuring system, the laser is reflected to the liquid level to be measured through the light path assembly, turning of a measuring light path is achieved, and therefore the problem that the installation position of a laser distance measuring instrument is limited by the structure of the crystal pulling furnace and is difficult to directly irradiate the liquid level to be measured is solved. In addition, the telescopic support is arranged, so that the position of the light path assembly in the crystal pulling furnace is convenient to adjust. And by arranging the elastic assembly, the reflection tube can be prevented from colliding with and damaging the generated monocrystalline silicon rod. And by arranging the glass lens, a light filtering effect on a light path can be achieved.

Description

Technical Field

[0001] The invention belongs to the technical field of non-contact measurement, and in particular relates to a distance measurement system. Background Art

[0002] Traditionally, the liquid level of the crystal in a semiconductor crystal pulling furnace is measured by a visual sensor, namely CCD. The disadvantages of the visual sensor are low measurement accuracy, great temperature influence, and high cost.

[0003] Due to the limitations of the furnace structure, high temperature and vacuum environment requirements, and insufficient space in the furnace, existing liquid level measurement equipment is difficult to be used in the crystal liquid level measurement of the crystal pulling furnace.

[0004] The information disclosed in this background technology section is only intended to enhance the understanding of the overall background of the invention and should not be regarded as an acknowledgment or any form of suggestion that the information constitutes the prior art already known to a person skilled in the art. Summary of the invention

[0005] An object of the present invention is to provide a distance measurement system, which can adapt a laser distance meter to a crystal pulling furnace and provide a suitable measurement optical path.

[0006] In order to achieve the above object, a technical solution provided by a specific embodiment of the present invention is as follows:

[0007] A distance measuring system is used for installing a laser rangefinder between a crystal pulling furnace and measuring the liquid level in the crystal pulling furnace. The distance measuring system comprises a mounting frame and an optical path component. The mounting frame is used to install the laser rangefinder and is fixedly installed with the crystal pulling furnace. One end of the optical path component is installed on the mounting frame and the other end extends to the interior of the crystal pulling furnace. The optical path component is used to reflect the laser emitted by the laser rangefinder to the interior of the crystal pulling furnace.

[0008] In one or more embodiments of the present invention, the distance measuring system further comprises a mobile platform fixedly mounted to the mounting frame, wherein the mobile platform is used to install the laser distance meter and adjust the position and / or angle of the laser distance meter.

[0009] In one or more embodiments of the present invention, the mounting frame includes a retractable bracket and a mounting seat, one end of the retractable bracket is fixedly mounted on the crystal pulling furnace, and the other end is fixedly mounted on the mounting seat, the mounting seat is used to install a laser rangefinder, one end of the optical path assembly is fixedly mounted on the mounting seat, and the other end extends to the interior of the crystal pulling furnace and adjusts its own position based on the extension and retraction of the retractable bracket.

[0010] In one or more embodiments of the present invention, the retractable bracket includes a bellows and a first mounting member, the first end of the bellows is fixedly mounted on the first mounting member, the second end of the bellows is fixedly mounted on the crystal pulling furnace, the first mounting member is fixedly mounted on the mounting seat, one end of the optical path component is arranged inside the bellows, and the other end passes through the second end of the bellows and extends to the inside of the crystal pulling furnace; or the retractable bracket includes a bellows, a first mounting member and a second mounting member, the first end of the bellows is fixedly mounted on the first mounting member, the second end of the bellows is fixedly mounted on the crystal pulling furnace through the second mounting member, the first mounting member is fixedly mounted on the mounting seat, one end of the optical path component is arranged inside the bellows, and the other end passes through the second end of the bellows and extends to the inside of the crystal pulling furnace.

[0011] In one or more embodiments of the present invention, the retractable support also includes a guide rod, which is fixedly mounted on the outside of the crystal pulling furnace, and the first mounting member is sleeved on the guide rod; and / or the retractable support also includes an adjusting rod and an adjusting member, which is fixedly mounted on the outside of the crystal pulling furnace, and the adjusting member and the first mounting member are both sleeved on the adjusting rod, and the adjusting member is used to adjust the position of the first mounting member.

[0012] In one or more embodiments of the present invention, the optical path assembly includes a connecting tube and a reflector, one end of the connecting tube is mounted on the mounting frame, the other end of the connecting tube extends to the interior of the crystal pulling furnace, and the reflector is disposed inside the connecting tube.

[0013] In one or more embodiments of the present invention, the distance measuring system further comprises an elastic component, and the optical path component is mounted on the mounting frame via the elastic component.

[0014] In one or more embodiments of the present invention, the elastic component includes a spring, a first end of the spring is fixedly mounted on the mounting frame, and a second end of the spring is fixedly mounted on the optical path component; or the elastic component includes a telescopic tube, a first end of the telescopic tube is fixedly mounted on the mounting frame, and a second end of the telescopic tube is fixedly mounted on the optical path component; or the elastic component includes a telescopic tube and a spring sleeved on the telescopic tube, a first end of the telescopic tube and a first end of the spring are fixedly mounted on the mounting frame, and a second end of the telescopic tube and a second end of the spring are fixedly mounted on the optical path component.

[0015] In one or more embodiments of the present invention, the distance measurement system further includes a glass lens, and the glass lens is arranged between the laser rangefinder and the optical path component.

[0016] In one or more embodiments of the present invention, an inclination angle is set between the glass lens and the laser emitted by the laser rangefinder.

[0017] Compared with the prior art, in the distance measurement system of the present invention, the laser is reflected onto the liquid surface to be measured by the optical path component, so as to realize the turning of the measurement optical path, thereby solving the problem that the installation position of the laser rangefinder is limited by the structure of the crystal pulling furnace and it is difficult to directly irradiate the liquid surface to be measured. In addition, by providing a retractable bracket, it is convenient to adjust the position of the optical path component in the crystal pulling furnace. By providing an elastic component, it is possible to prevent the reflector tube from hitting and damaging the generated single crystal silicon rod. By providing a glass lens, the optical path can be filtered. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 Schematic diagram of the installation structure of a distance measurement system in one embodiment of the present invention.

[0020] Figure 2 Schematic diagram of the structure of a mobile platform in one embodiment of the present invention.

[0021] Figure 3 It is a schematic structural diagram of an optical path component and a mounting base in one embodiment of the present invention.

[0022] Figure 4 Schematic diagram of the structure of a retractable bracket in one embodiment of the present invention. DETAILED DESCRIPTION

[0023] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0024] In addition, in the invention, words such as "first" and "second" are mainly used to distinguish one technical feature from another technical feature, and do not necessarily require or imply that there is a certain actual relationship, quantity or order between these technical features.

[0025] In the detailed description of the specification, reference is made to the accompanying drawings forming a part thereof, wherein like reference numerals refer to like parts throughout, and wherein are shown by way of exemplary embodiments that may be implemented. It should be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present application. Therefore, the following detailed description should not be considered in a limiting sense.

[0026] The various operations in the specification may be described in turn as multiple discrete actions or operations in a manner that is most helpful in understanding the claimed subject matter. However, the order of description should not be interpreted as implying that these operations must be order-dependent. Specifically, these operations may not be performed in the order presented. The described operations may be performed in an order different from the described embodiments. Various additional operations may be performed and / or the described operations may be omitted in additional embodiments.

[0027] For purposes of this application, the phrase "A and / or B" means (A), (B), or (A and B). For purposes of this application, the phrase "A, B and / or C" means (A), (B), (C), (A and B), (A and C), (B and C), or (A, B and C).

[0028] Various components and devices may be referred to or shown herein in the singular, but this is only for ease of discussion, and any element referred to in the singular may include a plurality of such elements in accordance with the teachings herein.

[0029] The specification describes the use of the phrases "in one embodiment" or "in other embodiments" or "in some embodiments", which may each refer to one or more of the same or different embodiments. In addition, the terms "including", "comprising", "having", etc. used in relation to the embodiments of the present application are synonymous.

[0030] like Figure 1 As shown, the distance measuring system in one embodiment of the present invention is used for the installation between the laser distance measuring device 10 and the crystal pulling furnace 11 and for measuring the liquid level in the crystal pulling furnace 11. The distance measuring system includes a mounting frame 20 and an optical path component 30.

[0031] Among them, the mounting frame 20 is used to install the laser rangefinder 10 and is fixedly installed with the crystal pulling furnace 11. One end of the optical path component 30 is installed on the mounting frame 20 and the other end extends to the interior of the crystal pulling furnace 11. The optical path component 30 is used to reflect the laser emitted by the laser rangefinder 10 to the interior of the crystal pulling furnace 11.

[0032] In one embodiment, the existing crystal pulling furnace 11 uses CCD measurement, and is not equipped with a laser rangefinder 10, so no suitable mounting hole is reserved. Without changing the original structure of the crystal pulling furnace 11, the laser rangefinder 10 can be installed by means of the mounting hole 12 of the glass window of the rotating table of the crystal pulling furnace 11. The mounting hole 12 is located on the side wall of the crystal pulling furnace 11 and is perpendicular to the furnace body.

[0033] like Figure 1 As shown, in the crystal pulling furnace 11, there is only a 20 mm gap between the single crystal silicon rod and the furnace wall, and the liquid level to be measured is located at the bottom of the crystal pulling furnace 11. By providing the mounting frame 20 and the optical path component 30, the laser emitted by the laser rangefinder 10 can be reflected so that it can pass through the narrow 20 mm gap to reach the liquid level to be measured, thereby realizing liquid level measurement.

[0034] like Figure 1 and Figure 2 As shown, the distance measuring system may further include a mobile platform 40 fixedly mounted on the mounting frame 20 , and the mobile platform 40 is used to install the laser distance meter 10 and adjust the position and angle of the laser distance meter 10 .

[0035] like Figure 2 As shown, the mobile platform 40 may include a displacement mobile platform 41 and an angle mobile platform 42. The displacement mobile platform 41 is fixedly mounted on the mounting frame 20, the angle mobile platform 42 is fixedly mounted on the displacement mobile platform 41, and the laser rangefinder 10 is mounted on the angle mobile platform 42. The displacement mobile platform 41 is used to adjust the position of the angle mobile platform 42, and then adjust the position of the laser rangefinder 10. The angle mobile platform 42 is used to adjust the angle of the laser rangefinder 10. By fine-tuning the displacement mobile platform 41 in the front, back, left, right, up and down directions, and adjusting the angle by the angle mobile platform 42, the laser rangefinder 10 can be effectively calibrated so that the light spot reaches the most ideal state.

[0036] The displacement mobile platform 41 and the angle mobile platform 42 can be implemented by existing technology. In other embodiments, the displacement mobile platform 41, the angle mobile platform 42, the laser rangefinder 10 and the mounting frame 20 can be installed in other matching ways. It is also possible to set only the displacement mobile platform 41 or the angle mobile platform 42, and the mobile platform 40 is only used to adjust the position or angle of the laser rangefinder 10. It is also possible not to set the mobile platform 40, and the laser rangefinder 10 is directly fixedly installed with the mounting frame 20.

[0037] Combination Figure 1 , Figure 3 and Figure 4As shown, the mounting frame 20 includes a retractable bracket 21 and a mounting seat 22. One end of the retractable bracket 21 is fixedly mounted to the crystal pulling furnace 11, and the other end is fixedly mounted to the mounting seat 22. The mounting seat 22 is used to mount the laser rangefinder 10, and one end of the optical path component 30 is fixedly mounted to the mounting seat 22, and the other end extends to the interior of the crystal pulling furnace 11 and adjusts its position based on the extension and retraction of the retractable bracket 21.

[0038] like Figure 3 As shown, the optical path assembly 30 includes a connecting tube 31 and a reflector 32. One end of the connecting tube 31 is mounted on the mounting seat 22, and the other end of the connecting tube 31 extends to the inside of the crystal pulling furnace 11. The reflector 32 is arranged inside the connecting tube 31.

[0039] Preferably, the distance measuring system may further include an elastic component 33 , and one end of the connecting tube in the optical path component 30 is mounted on the mounting seat 22 via the elastic component 33 .

[0040] Specifically, a reflector bracket 311 for mounting the reflector 32 is disposed inside the connecting tube 31, and a light-transmitting hole 312 is also provided on the connecting tube 31. The reflector bracket 311 and the light-transmitting hole 312 are both disposed at one end of the connecting tube 31 extending into the crystal pulling furnace 11.

[0041] In other embodiments, the light-transmitting hole 312 may not be provided, and a transparent connecting tube 31 may be used, or a piece of transparent glass may be sealed in the light-transmitting hole 312 to achieve sealing in the connecting tube 31 .

[0042] like Figure 3 As shown, the elastic component 33 includes a telescopic tube 331 and a spring 332 sleeved on the telescopic tube 331, the first end of the telescopic tube 331 and the first end of the spring 332 are fixedly mounted on the mounting seat 22, and the second end of the telescopic tube 331 and the second end of the spring 332 are fixedly mounted on the connecting tube 31.

[0043] When the single crystal silicon rod touches the connecting tube 31 , the spring 332 and the telescopic tube 331 can play a buffering role to prevent the single crystal silicon rod from being damaged due to a hard collision with the connecting tube 31 .

[0044] In other embodiments, only the spring 332 or the telescopic tube 331 may be provided, and the elastic component 33 may not be provided, and the connecting tube 31 is directly fixedly installed on the mounting seat 22 .

[0045] like Figure 3 As shown, the mounting base 22 includes a connecting flange 221 and a connecting bracket 222. One side of the connecting flange 221 is fixedly mounted to the first end of the telescopic tube 331 and the first end of the spring 332, and the other side is fixedly mounted to the connecting bracket 222. The connecting bracket 222 is fixedly mounted to the displacement moving platform 41 in the moving platform 40.

[0046] In one embodiment, the distance measuring system may further include a glass lens 50, and the glass lens 50 is disposed between the laser distance meter 10 and the optical path component 30. The glass lens 50 is preferably a high temperature resistant quartz glass lens 50.

[0047] Specifically, the mounting seat 22 may further include a glass mounting seat 223 . The glass mounting seat 223 is fixedly mounted between the connecting bracket 222 and the connecting flange 221 . The glass lens 50 is mounted inside the glass mounting seat 223 .

[0048] Furthermore, an inclination angle is set between the glass lens 50 and the laser emitted by the laser rangefinder 10. By setting the inclination angle, the laser will not vertically enter the glass lens 50, which helps to reduce mirror reflection and filter out interfering light.

[0049] In this embodiment, the laser emitted by the laser rangefinder 10 is emitted horizontally, and the laser light path is vertically downward after being reflected by the reflector 32. The laser emission direction is the x-axis and the direction after reflection is the y-axis. Preferably, the glass lens 50 is perpendicular to the xy plane and the angle between the glass lens 50 and the y-axis is 10°.

[0050] In other embodiments, the specific size and direction of the inclination angle may also be adjusted according to the thickness and material of the glass lens 50 .

[0051] In other embodiments, the glass lens 50 may also be made of gold-plated glass or other materials.

[0052] Combination Figure 1 and Figure 4 As shown, the retractable bracket 21 includes a bellows 211, a first mounting member 222, a second mounting member 223, a guide rod 224, an adjustment rod 225 and an adjustment member 226. The first end of the bellows 211 is fixedly mounted to the first mounting member 222, the second end of the bellows 211 is fixedly mounted to the crystal pulling furnace 11 through the second mounting member 223, and the first mounting member 222 is fixedly mounted to the connecting flange 221 in the mounting seat 22. One end of the optical path assembly 30 is disposed inside the bellows 211, and the other end passes through the second end of the bellows 211 and extends to the inside of the crystal pulling furnace 11.

[0053] The guide rod 224 is fixedly mounted on the outer side of the crystal pulling furnace 11, and the first mounting member 222 is sleeved on the guide rod 224. The adjusting rod 225 is fixedly mounted on the outer side of the crystal pulling furnace 11, and the adjusting member 226 and the first mounting member 222 are sleeved on the adjusting rod 225, and the adjusting member 226 is used to adjust the position of the first mounting member 222.

[0054] In one embodiment, the bellows 211 is compressed by 50 mm and stretched by 80 mm, thereby having a 130 mm telescopic function. In other embodiments, the bellows 211 of other sizes may also be used.

[0055] Specifically, a first through hole is formed on the first mounting member 222, and a second through hole matching the mounting hole 12 on the crystal pulling furnace 11 is formed on the second mounting member 223. The second mounting member 223 can directly connect to the mounting hole 12 and be fixedly mounted to the crystal pulling furnace 11. The optical path assembly 30 can sequentially pass through the first through hole, the second through hole and the mounting hole 12 and extend into the crystal pulling furnace 11.

[0056] A guide hole may also be provided on the first mounting member 222, and the first mounting member 222 is sleeved on the guide rod 224 through the guide hole. The guide rod 224 provides a guide for the movement of the first mounting member 222. Preferably, a brass sleeve is provided in the guide hole to reduce the friction on the guide rod 224.

[0057] The first mounting member 222 may also be provided with a third through hole, and the first mounting member 222 is sleeved on the adjusting rod 225 through the third through hole. The adjusting member 226 may include two bolts, which are respectively provided on both sides of the first mounting member 222, and the adjusting rod 225 may be provided with an external thread that matches the internal thread of the bolt. The position of the first mounting member 222 may be adjusted by screwing the bolts, and the depth of the optical path assembly 30 entering the crystal pulling furnace 11 may be adjusted.

[0058] In other embodiments, the adjusting member 226 can also cooperate with the adjusting rod 225 to adjust the position of the first mounting member 222 by other means such as buckle, damping, etc. The number of guide rods 224, the number of adjusting rods 225, and the number of adjusting members 226 can all be multiple. It is also possible not to set the guide rod 224, or not to set the adjusting rod 225 and the adjusting member 226, or not to set the guide rod 224, the adjusting rod 225, and the adjusting member 226.

[0059] In one embodiment, the guide rod 224 and the adjusting rod 225 are both fixedly mounted to the second mounting member 223 . In other embodiments, the guide rod 224 and / or the adjusting rod 225 may also be directly fixedly mounted to the crystal pulling furnace 11 .

[0060] In other embodiments, the second mounting member 223 may not be provided, and the second end of the bellows 211 may be fixedly mounted to the crystal pulling furnace 11 by welding or other methods.

[0061] In one embodiment, the glass lens 50 and the glass mounting seat 223, and the glass mounting seat 223 and the connecting flange 221 can be sealed by a high-temperature resistant sealing ring, and the telescopic tube 331 and the connecting flange 221 can be sealed by welding, so that complete sealing can be achieved between the telescopic tube 331 and the glass mounting seat 223.

[0062] The bellows 211 can be sealed and installed with the first mounting member 222 and the second mounting member 223 by welding. The second mounting member 223 and the crystal pulling furnace 11 can be sealed and butted, and the first mounting member 222 and the connecting flange 221 can be sealed and installed by a high temperature resistant sealing ring.

[0063] It can be seen that at this time, the interior of the crystal pulling furnace 11 and the interior of the bellows 211 form a closed space, so that after the installation system is installed in the crystal pulling furnace 11, the crystal pulling furnace 11 can still meet the high-temperature and sealed crystal pulling conditions.

[0064] By setting up a retractable bellows 211 and placing the optical path component 30 inside the bellows 211, all seals between the entire ranging system and the crystal pulling furnace 11 can be achieved by static sealing. In particular, there is no need for dynamic sealing between the movable connecting tube 31 and the crystal pulling furnace 11, which reduces the difficulty of sealing and improves the sealing performance and stability.

[0065] In other embodiments, sealing can be performed in other ways or at other locations. For example, the light-transmitting hole 312 on the connecting tube 31 is sealed with transparent glass, and the connecting tube 31 and the telescopic tube 331 are sealed, so that the sealing work between the glass lens 50 and the glass mounting seat 223 and between the glass mounting seat 223 and the connecting flange 221 can be omitted. In addition, there are many ways to achieve static sealing, which will not be described in detail here.

[0066] In actual operation, the first mounting member 222 can be pulled to drive the bellows 211 to expand and contract, thereby adjusting the depth of the optical path component 30 entering the crystal pulling furnace 11, and then adjusting the position of the reflector 32 reflecting the light path to prevent the optical path component 30 from touching the crystal rod. The optical path component 30 can also be pulled out of the crystal pulling furnace 11 when feeding the crystal pulling furnace 11 to avoid contaminating the optical path component 30.

[0067] After adjusting the position of the first mounting member 222, the laser rangefinder 10 can be fine-tuned by the mobile platform 40 to effectively calibrate the laser rangefinder 10 so that the laser spot reaches the most ideal state.

[0068] By setting up the optical path component 30, the laser can be reflected and vertically illuminate the liquid surface to be measured, thereby solving the problem that the laser rangefinder 10 cannot be normally installed due to the influence of the space of the crystal pulling furnace 11, and the optical path cannot be perpendicular to the liquid surface or normally oblique to the liquid surface due to the influence of the internal structure of the furnace.

[0069] During the growth of single crystal silicon, if the optical path component 30 is touched, the spring 332 and the telescopic tube 331 can play a buffering role to avoid damaging the generated single crystal silicon rod.

[0070] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0071] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A distance measuring system, used for installation between a laser distance meter and a crystal pulling furnace and for measuring the liquid level in the crystal pulling furnace, characterized in that: The distance measuring system includes a mounting frame and an optical path component. The mounting frame is used to install the laser rangefinder and is fixedly installed with the crystal pulling furnace. One end of the optical path component is installed on the mounting frame and the other end extends to the interior of the crystal pulling furnace. The optical path component is used to reflect the laser emitted by the laser rangefinder to the interior of the crystal pulling furnace.

2. The distance measurement system according to claim 1, characterized in that: The distance measuring system further comprises a mobile platform fixedly mounted on the mounting frame, wherein the mobile platform is used to mount the laser distance meter and adjust the position and / or angle of the laser distance meter.

3. The distance measurement system according to claim 1, characterized in that: The mounting frame includes a retractable bracket and a mounting seat, one end of the retractable bracket is fixedly mounted on the crystal pulling furnace, and the other end is fixedly mounted on the mounting seat, the mounting seat is used to install a laser rangefinder, one end of the optical path component is fixedly mounted on the mounting seat, and the other end extends to the interior of the crystal pulling furnace and adjusts its own position based on the extension and retraction of the retractable bracket.

4. The distance measurement system according to claim 3, characterized in that: The retractable bracket comprises a bellows and a first mounting member, the first end of the bellows is fixedly mounted to the first mounting member, the second end of the bellows is fixedly mounted to the crystal pulling furnace, the first mounting member is fixedly mounted to the mounting seat, one end of the optical path component is arranged inside the bellows, and the other end passes through the second end of the bellows and extends to the inside of the crystal pulling furnace; or The retractable bracket includes a bellows, a first mounting member and a second mounting member, the first end of the bellows is fixedly mounted to the first mounting member, the second end of the bellows is fixedly mounted to the crystal pulling furnace via the second mounting member, the first mounting member is fixedly mounted to the mounting seat, one end of the optical path assembly is arranged inside the bellows, and the other end passes through the second end of the bellows and extends to the inside of the crystal pulling furnace.

5. The distance measurement system according to claim 4, characterized in that: The retractable support further comprises a guide rod, the guide rod is fixedly mounted on the outer side of the crystal pulling furnace, and the first mounting member is sleeved on the guide rod; and / or The retractable bracket also includes an adjusting rod and an adjusting member. The adjusting rod is fixedly mounted on the outer side of the crystal pulling furnace. The adjusting member and the first mounting member are both sleeved on the adjusting rod. The adjusting member is used to adjust the position of the first mounting member.

6. The distance measurement system according to claim 1, characterized in that: The optical path component includes a connecting tube and a reflector, one end of the connecting tube is mounted on the mounting frame, the other end of the connecting tube extends to the interior of the crystal pulling furnace, and the reflector is arranged inside the connecting tube.

7. The distance measurement system according to claim 1, characterized in that: The distance measuring system further comprises an elastic component, and the optical path component is mounted on the mounting frame via the elastic component.

8. The distance measurement system according to claim 7, characterized in that: The elastic component comprises a spring, a first end of the spring is fixedly mounted on the mounting frame, and a second end of the spring is fixedly mounted on the optical path component; or The elastic component includes a telescopic tube, a first end of the telescopic tube is fixedly mounted on the mounting frame, and a second end of the telescopic tube is fixedly mounted on the optical path component; or The elastic component includes a telescopic tube and a spring sleeved on the telescopic tube, the first end of the telescopic tube and the first end of the spring are fixedly mounted on the mounting frame, and the second end of the telescopic tube and the second end of the spring are fixedly mounted on the optical path component.

9. The distance measurement system according to claim 1, characterized in that: The distance measuring system also includes a glass lens, which is arranged between the laser distance meter and the optical path component.

10. The distance measurement system according to claim 9, characterized in that: An inclination angle is set between the glass lens and the laser emitted by the laser rangefinder.

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