Thermal-optical characteristic comprehensive measurement system and method for high-power laser optical lens

By combining the switching between low-power and high-power lasers, and using a comprehensive measurement system that integrates a laser focus analyzer and a Shaker-Hartmann wavefront sensor, the limitations and accuracy issues in measuring the thermo-optical properties of high-power laser systems have been resolved. This enables comprehensive measurement and mutual inspection of large-spot-size optical systems, improving the accuracy and reliability of the measurements.

CN119935503BActive Publication Date: 2025-11-21XIAN INST OF OPTICS & PRECISION MECHANICS CHINESE ACAD OF SCI
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Patent Information

Application Number
CN202510020244.4
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-01-06
Publication Date
2025-11-21
Estimated Expiration
2045-01-06

AI Technical Summary

Technical Problem

Existing technologies for measuring the thermo-optical characteristics of high-power laser systems suffer from limitations in measurement scenarios, limited information acquisition, and a lack of mutual inspection methods, resulting in insufficient measurement accuracy and reliability.

Method used

An integrated measurement system, comprising a laser source, a first rotating high-reflection mirror, a second rotating high-reflection mirror, and a control computer, is used to achieve comprehensive measurement of the reference focal position, focal position, reference wavefront phase distribution, and post-irradiation wavefront phase distribution of a high-power laser optical lens by switching between low-power and high-power lasers, combined with a laser focus analyzer and a Shaker-Hartmann wavefront sensor, and to perform mutual inspection.

Benefits of technology

This technology enables the measurement of the thermo-optical characteristics of large-spot-size optical systems, reduces measurement errors, expands the measurement range, allows for mutual inspection of optical performance, and improves the accuracy and reliability of measurements.

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Abstract

The present application relates to a thermal-optical characteristic measurement system and method, in particular to a thermal-optical characteristic comprehensive measurement system and method of a high-power laser optical lens, which is used to solve the problems of scene limitation, single information acquisition and lack of mutual inspection means in the measurement of the thermal-optical characteristic of a high-power laser system by using a laser focal point analyzer. The thermal-optical characteristic comprehensive measurement system of the high-power laser optical lens comprises a laser light source, a first rotating high-reflection mirror, a second rotating high-reflection mirror and a control computer, wherein the laser light source comprises a high-power laser light source and a low-power laser light source, which are perpendicular to each other and intersect. The present application realizes the consistency of the optical paths of the high-power laser and the low-power laser in the lens measurement area by using the first rotating high-reflection mirror and the second rotating high-reflection mirror, realizes the common optical axis of the two optical paths in the measurement process, and reduces the error of the measurement system.
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Description

Technical Field

[0001] This invention relates to a thermo-optical property measurement system and method, specifically to a comprehensive thermo-optical property measurement system and method for high-power laser optical lenses. Background Technology

[0002] The thermo-optical characteristics of high-power laser optical systems refer to the temperature changes caused by energy absorption by optical components under the influence of high-power lasers, leading to thermal expansion, stress changes, wavefront distortion, and changes in optical path length. These changes directly affect the focal intensity distribution and processing effect of the laser system; therefore, accurate measurement and analysis are crucial. With the widespread application of kilowatt-level multimode fiber laser sources, the requirements for the optical characteristics of laser processing lenses are constantly increasing. Accurate measurement of their thermo-optical characteristics is essential to ensuring the stability and performance of the optical system.

[0003] The current mainstream measurement method is to use a laser focus analyzer, but it has several limitations in measuring the thermo-optical properties of high-power laser systems:

[0004] (1) Limitations of measurement scenarios: The laser focus analyzer has a narrow range of applications and is only applicable to focusing optical systems with a spot size of less than 8 mm. It is difficult to measure systems with larger spots.

[0005] (2) Limited information acquisition: Laser focus analyzers mainly obtain relative focus position information by scanning along the optical axis, which makes it difficult to fully reflect the overall thermo-optical characteristics of the optical system, especially the impact of temperature changes on wavefront distortion.

[0006] (3) Lack of mutual verification methods: When deviations occur in the measurement results, there is a lack of other verification methods to conduct closed-loop mutual verification of the measurement results, resulting in insufficient accuracy and reliability of the measurement. Summary of the Invention

[0007] The purpose of this invention is to address the shortcomings of using a laser focus analyzer to measure the thermo-optical characteristics of a high-power laser system, such as limitations in measurement scenarios, limited information acquisition, and lack of mutual inspection methods. Instead, this invention provides a comprehensive measurement system and method for the thermo-optical characteristics of a high-power laser optical lens.

[0008] To address the shortcomings of the existing technology, the present invention provides the following technical solution:

[0009] A comprehensive measurement system for the thermo-optical properties of a high-power laser optical lens, characterized in that it includes a laser source, a first rotating high-reflection mirror, a second rotating high-reflection mirror, and a control computer;

[0010] The laser light source has X and Y points arranged sequentially along its transmission direction on its optical path. At point Y, the optical path of the laser light source is divided into a first detection optical path and a second detection optical path. The first detection optical path and the second detection optical path are respectively equipped with a first measuring device and a second measuring device. The high-power laser optical lens to be tested is arranged on the optical path of the laser light source and is located between points X and Y. The first rotating high-reflection mirror is arranged at point X, and the second rotating high-reflection mirror is arranged at point Y.

[0011] The laser source includes two types of light sources: a high-power laser source and a low-power laser source whose output light paths are perpendicular to each other and intersect at point X. The high-power laser source and the low-power laser source are used to output high-power laser and low-power laser, respectively.

[0012] The first measuring device is used to measure the reference focal position and focal position of a high-power laser optical lens, or to absorb high-power laser light; the second measuring device is used to measure the reference wavefront phase distribution and the wavefront phase distribution after irradiation of a high-power laser optical lens.

[0013] The first rotating high-reflection mirror has two working positions: position 1A and position 1B, and the second rotating high-reflection mirror has corresponding positions 2A and 2B.

[0014] When the first rotating high-reflection mirror is in position 1A, the low-power laser source is turned on and the high-power laser source is turned off. The first rotating high-reflection mirror is used to guide the low-power laser through the high-power laser optical lens to point Y. When the second rotating high-reflection mirror is in position 2A, it is used to guide the laser at point Y to the second measuring device on the second detection optical path. Alternatively, when the second rotating high-reflection mirror is in position 2B, it is used to transmit the laser at point Y to the first measuring device on the first detection optical path.

[0015] When the first rotating high-reflection mirror is in position 1B, the high-power laser source is turned on and the low-power laser source is turned off. The first rotating high-reflection mirror is used to allow the high-power laser to pass through point X and then through the high-power laser optical lens to be tested to point Y. When the second rotating high-reflection mirror is in position 2B, it is used to allow the laser at point Y to be transmitted to the first measuring device on the first detection optical path.

[0016] The control computer is connected to a high-power laser source, a low-power laser source, a first rotating high-reflection mirror, a second rotating high-reflection mirror, a first measuring device, and a second measuring device. It is used to control the switching of the high-power laser source and the low-power laser source, the position switching of the first rotating high-reflection mirror and the second rotating high-reflection mirror, and to control the first measuring device and the second measuring device, and to acquire the measured data in real time.

[0017] Furthermore, the first measuring device is a laser focus analyzer and a beam absorber that can be switched between each other. The laser focus analyzer is used to measure the reference focus position and focus position of the high-power laser optical lens, and the beam absorber is used to absorb the high-power laser. The laser focus analyzer and the beam absorber are respectively connected to the control computer, which is used to control the measurement process of the laser focus analyzer and the beam absorber, and to acquire the measured data in real time.

[0018] Furthermore, both the first and second rotating high-reflection mirrors are equipped with a rotation drive mechanism, and the input end of each rotation drive mechanism is connected to the control computer.

[0019] Position sensors are installed at positions 1A, 1B, 2A, and 2B, and the output of each position sensor is connected to the control computer.

[0020] Both the high-power laser source and the low-power laser source are equipped with electric control devices, and the input terminal of each electric control device is connected to the control computer.

[0021] Furthermore, positioning devices are provided at both positions 1A and 2A.

[0022] Furthermore, the high-power laser source and the low-power laser source are collimated laser sources of the same wavelength; the second measuring device adopts a Shaker-Hartmann wavefront sensor.

[0023] A comprehensive measurement method for the thermo-optical properties of a high-power laser optical lens, characterized by employing the aforementioned comprehensive measurement system for the thermo-optical properties of a high-power laser optical lens, comprising the following steps:

[0024] Step 1: If the high-power laser optical lens to be tested is a focusing optical lens, proceed to step 2; if the high-power laser optical lens to be tested is a beam expanding collimating lens or a beam shrinking collimating lens, proceed to step 3.

[0025] Step 2: After the control computer positions the first rotating high-reflection mirror at position 1A and the second rotating high-reflection mirror at position 2B, the low-power laser source is turned on simultaneously. The first measuring device measures the reference focal position of the high-power laser optical lens. After the measurement is completed, the low-power laser source is turned off.

[0026] Step 3: After the control computer positions the first rotating high-reflection mirror at position 1A and the second rotating high-reflection mirror at position 2A, the low-power laser source is simultaneously turned on. The control computer then measures the reference wavefront phase distribution of the high-power laser optical lens through the second measuring device. After the measurement is completed, the low-power laser source is turned off, and the control computer switches the first rotating high-reflection mirror and the second rotating high-reflection mirror to positions 1B and 2B, respectively.

[0027] Step 4: The control computer turns on the high-power laser source and provides light for at least half an hour. During this period, the first measuring device measures the focal position of the high-power laser optical lens. The measurement is repeated multiple times and the results are recorded. The average value of the multiple measurements is taken as the final focal position, or the first measuring device absorbs the high-power laser.

[0028] Step 5: After the measurement is completed, quickly turn off the high-power laser source by controlling the computer, and quickly switch the first rotating high-reflection mirror and the second rotating high-reflection mirror to position 1A and position 2A respectively. Simultaneously turn on the low-power laser source, and the control computer measures the wavefront phase distribution of the high-power laser optical lens after irradiation through the second measuring device to complete the comprehensive measurement of the thermo-optical characteristics of the high-power laser optical lens.

[0029] Further, step 1 specifically includes:

[0030] If the high-power laser optical lens is a focusing optical lens, then switch the first measuring device to a laser focus analyzer and then execute step 2; if the high-power laser optical lens is a beam expanding collimating lens or a beam shrinking collimating lens, then switch the first measuring device to a beam absorber and then execute step 3.

[0031] Furthermore, in step 1, if the high-power laser optical lens to be tested is a focusing optical lens, then step 6 is included after step 5:

[0032] The expected focal position change Δz is calculated based on the difference between the post-irradiation wavefront phase distribution obtained in step 5 and the reference wavefront phase distribution obtained in step 3, and then compared with the difference between the reference focal position obtained in step 2 and the focal position obtained in step 4.

[0033] Furthermore, step 6 specifically includes:

[0034] Step 6.1: Subtract the post-irradiation wavefront phase distribution obtained in Step 5 from the reference wavefront phase distribution obtained in Step 3 to obtain the total wavefront phase change δw(r). Then, calculate the expected focal position change Δz based on the total wavefront phase change δw(r).

[0035]

[0036] Where λ is the wavelength of the high-power laser;

[0037] Step 6.2: Subtract the reference focal position obtained in Step 2 from the focal position obtained in Step 4 to obtain the actual focal position change Δz′. Then, use the root mean square error or percentage error to evaluate the matching degree between the expected focal position change Δz and the actual focal position change Δz′, and complete the comprehensive measurement of the thermo-optical characteristics of the high-power laser optical lens.

[0038] Compared with the prior art, the beneficial effects of the present invention are:

[0039] (1) The thermo-optical characteristic comprehensive measurement system of the high-power laser optical lens of the present invention includes a laser source, a first rotating high-reflection mirror, a second rotating high-reflection mirror and a control computer. The laser source includes a high-power laser source and a low-power laser source whose output light paths are perpendicular and intersecting. The present invention achieves the consistency of the light paths of the high-power laser and the low-power laser in the lens measurement area through the first rotating high-reflection mirror and the second rotating high-reflection mirror, realizes the common optical axis of the two light paths in the measurement process, and reduces the error of the measurement system.

[0040] (2) In this invention, the first rotating high-reflection mirror and the second rotating high-reflection mirror will only enter the optical path when using low-power laser; when high-power laser is working, they will turn out of the optical path, which can avoid the high-power laser causing thermal deformation to the mirror.

[0041] (3) The second measuring device in this invention uses a Shaker-Hartmann wavefront sensor. The focusing optical lens measurement mode can realize the measurement of the thermo-optical characteristics of a focusing optical system with a spot size greater than 8mm, and the beam expander / contractor collimating lens measurement mode can realize the measurement of the thermo-optical characteristics of a collimating optical system with a beam diameter ≤13mm.

[0042] (4) The comprehensive measurement method of the thermo-optical characteristics of the high-power laser optical lens of the present invention can calculate the expected focal position change based on the difference between the measured wavefront phase distribution after irradiation and the reference wavefront phase distribution, and realize mutual inspection with the actual focal position change measured by the first measuring device (laser focal analysis instrument). Attached Figure Description

[0043] Figure 1 This is a schematic diagram of the optical paths of the high-power laser and the low-power laser in an embodiment of the comprehensive measurement system for the thermo-optical characteristics of the high-power laser optical lens of the present invention;

[0044] Figure 2 This is a schematic diagram of the structure of an embodiment of the present invention.

[0045] The following are explanations of the reference numerals in the attached diagram: 01, High-power laser optical lens;

[0046] 1. High-power laser source; 2. Low-power laser source; 3. First rotating high-reflection mirror; 4. Second rotating high-reflection mirror; 5. First measuring device; 51. Laser focus analyzer; 52. Beam absorber; 6. Second measuring device. Detailed Implementation

[0047] The present invention will be further described below with reference to the accompanying drawings and exemplary embodiments.

[0048] Reference Figure 1 , Figure 2 A comprehensive measurement system for the thermo-optical properties of a high-power laser optical lens includes a laser source, a first rotating high-reflection mirror 3, a second rotating high-reflection mirror 4, a first measuring device 5, a second measuring device 6, and a control computer.

[0049] Reference Figure 1 The laser light source has X and Y points arranged sequentially along its transmission direction on its optical path. The optical path of the laser light source is divided into a first detection optical path and a second detection optical path at point Y. The first detection optical path and the second detection optical path are respectively equipped with a first measuring device 5 and a second measuring device 6. The high-power laser optical lens 01 to be tested is arranged on the optical path of the laser light source and is located between points X and Y. A first rotating high-reflection mirror 3 is arranged at point X, and a second rotating high-reflection mirror 4 is arranged at point Y.

[0050] The laser source includes a high-power laser source 1 and a low-power laser source 2 whose output optical paths are perpendicular to each other and intersect at point X. The high-power laser source 1 and the low-power laser source 2 are used to output high-power laser and low-power laser, respectively. The high-power laser source 1 and the low-power laser source 2 are collimated laser sources of the same wavelength. The purpose is to ensure the consistency of wavefront distortion, optical element material response, focal position, and the synchronization and accuracy of system measurements.

[0051] The first measuring device 5 is used to measure the reference focal position and focal position of the high-power laser optical lens 01, or to absorb high-power laser; the second measuring device 6 is used to measure the reference wavefront phase distribution and the wavefront phase distribution after irradiation of the high-power laser optical lens 01.

[0052] The first measuring device 5 consists of a laser focus analyzer 51 and a beam absorber 52 that can be switched between each other. The laser focus analyzer 51 and the beam absorber 52 are respectively connected to a control computer, which controls the laser focus analyzer 51 and the beam absorber 52 and acquires the measured data in real time. The second measuring device 6 is a Shaker-Hartmann wavefront sensor, but phase measuring instruments such as a four-wave shearing interferometer or a four-step phase shift measuring instrument can also be used.

[0053] The first rotating high-reflection mirror 3 is provided with position 1A and position 1B, and the second rotating high-reflection mirror 4 is provided with position 2A and position 2B.

[0054] When the first rotating high-reflection mirror 3 is in position 1A, the low-power laser source 2 is turned on and the high-power laser source 1 is turned off. The first rotating high-reflection mirror 3 is used to guide the low-power laser through the high-power laser optical lens 01 to point Y. When the second rotating high-reflection mirror 4 is in position 2A, it is used to guide the laser at point Y to the second measuring device 6 on the second detection optical path. Alternatively, when the second rotating high-reflection mirror 4 is in position 2B, it is used to transmit the laser at point Y to the first measuring device 5 on the first detection optical path.

[0055] When the first rotating high-reflection mirror 3 is in position 1B, the high-power laser source 1 is turned on and the low-power laser source 2 is turned off. The first rotating high-reflection mirror 3 is used to allow the high-power laser to pass through the high-power laser optical lens 01 to be tested after passing through point X to point Y. When the second rotating high-reflection mirror 4 is in position 2B, it is used to allow the laser at point Y to be transmitted to the first measuring device 5 on the first detection optical path.

[0056] Both the first rotating high-reflection mirror 3 and the second rotating high-reflection mirror 4 are equipped with a rotation drive mechanism. The input end of each rotation drive mechanism is connected to a control computer to achieve fast and stable switching.

[0057] Position sensors are installed at positions 1A, 1B, 2A, and 2B, with the output of each sensor connected to the control computer. Both the high-power laser source 1 and the low-power laser source 2 are equipped with electric control devices, with the input of each device connected to the control computer. The signals from the position sensors are transmitted to the control system to ensure that the control computer sends a signal to the corresponding electric control device allowing the high-power laser source 1 or the low-power laser source 2 to turn on only after the first rotating high-reflection mirror 3 and / or the second rotating high-reflection mirror 4 are fully in position.

[0058] Positioning devices are provided at positions 1A and 2A to ensure the accuracy and consistency of the first rotating high-reflection mirror 3 when it is reset to position 1A and the second rotating high-reflection mirror 4 when it is reset to position 2A.

[0059] The comprehensive thermo-optical characteristic measurement system for the high-power laser optical lens 01 of this invention includes a focusing optical lens measurement mode and a beam expander / contractor collimator lens measurement mode. In the focusing optical lens measurement mode, the high-power laser optical lens 01 under test is a focusing lens, and the first measuring device 5 is switched to a laser focus analyzer 51 to measure the reference focus position and focus position of the high-power laser optical lens 01. In the beam expander / contractor collimator lens measurement mode, the high-power laser optical lens 01 under test is either a beam expander collimator lens or a beam contractor collimator lens, and the first measuring device 5 is switched to a beam absorber 52 to absorb the high-power laser.

[0060] The computer can control the following functions:

[0061] (1) By rotating the drive mechanism, the first rotating high-reflection mirror 3 and the second rotating high-reflection mirror 4 can be quickly switched between different positions (1A, 1B, 2A, 2B); and by reading the signal of the position sensor, it is ensured that the first rotating high-reflection mirror 3 and the second rotating high-reflection mirror 4 have reached the target position, and the electric control device of the corresponding light source is triggered to send a signal.

[0062] (2) Used to control the switching of high-power laser source 1 and low-power laser source 2, and only after confirming that the corresponding high-reflection mirror is switched in place, to send an on signal to the corresponding light source to ensure the synchronization and safety of the measurement.

[0063] (3) According to the measurement mode, control the start and switch of the first measuring device 5 (laser focus analyzer 51 or beam absorber 52), collect focus position data in real time, and synchronously control the start and data acquisition of the second measuring device 6 to obtain the data of the reference wavefront phase distribution and the wavefront phase distribution after irradiation.

[0064] The thermo-optical characteristics of high-power laser optical lenses refer to the changes in the lens's optical performance due to thermal effects under high-power laser irradiation. These mainly include thermally induced wavefront distortion, thermal lensing effect, thermal drift, thermal radiation loss, thermal stress effect, transmittance variation, material refractive index variation, and focal point drift. The purpose of measuring the thermo-optical characteristics of high-power laser optical lenses is to:

[0065] (1) Evaluate thermally induced wavefront distortion: Understand how the wavefront phase of a high-power laser optical lens changes under high-power laser irradiation;

[0066] (2) Measure the drift of the focal position: evaluate the changes in the focal position of the high-power laser optical lens in the axial and lateral directions after high-power laser irradiation;

[0067] (3) Analyze optical path change: Based on the change in wavefront phase distribution, calculate the difference in optical path and further check it against focus drift.

[0068] (4) Ensure the thermal stability of the lens: Verify whether the optical performance of the lens is stable under high-power laser conditions by measuring its thermo-optical properties.

[0069] A comprehensive measurement method for the thermo-optical properties of high-power laser optical lenses, employing the aforementioned comprehensive measurement system for the thermo-optical properties of high-power laser optical lenses, includes the following steps:

[0070] Step 1: If the high-power laser optical lens 01 to be tested is a focusing optical lens, then the control computer switches the first measuring device 5 to the laser focus analyzer 51, and then executes steps 2 to 6 in sequence.

[0071] If the high-power laser optical lens 01 to be tested is a beam expanding collimating lens or a beam shrinking collimating lens, then after the control computer switches the first measuring device 5 to the beam absorber 52, steps 3 to 5 are executed in sequence, and then the comprehensive measurement of the thermo-optical characteristics of the high-power laser optical lens 01 is directly completed.

[0072] Step 2: After the control computer controls the two rotating drive mechanisms to put the first rotating high-reflection mirror 3 at position 1A and the second rotating high-reflection mirror 4 at position 2B respectively, the control computer receives the position signals from the position sensors at positions 1A and 2B, and then sends an start signal to the electric control device of the low-power laser source 2 to simultaneously turn on the low-power laser source 2.

[0073] The control computer controls the laser focus analyzer 51 to measure the reference focus position of the high-power laser optical lens 01. After the measurement is completed, the control computer turns off the low-power laser source 2.

[0074] Step 3: After the control computer controls the first rotating high-reflection mirror 3 to position 1A and the second rotating high-reflection mirror 4 to position 2A, the control computer receives the position signal from the position sensor at position 2A and then sends an start signal to the electric control device of the low-power laser source 2 to simultaneously turn on the low-power laser source 2.

[0075] The control computer measures the reference wavefront phase distribution of the high-power laser optical lens 01 through the second measuring device 6 (Shack-Hartmann wavefront sensor);

[0076] After the measurement is completed, the control computer turns off the low-power laser source 2 and controls the two rotation drive mechanisms to switch the first rotating high-reflection mirror 3 and the second rotating high-reflection mirror 4 to positions 1B and 2B respectively.

[0077] Step 4: The control computer receives the position signals from the position sensors at positions 1B and 2B, and then sends an activation signal to the electric control device of the high-power laser source 1 to activate the high-power laser source 1. The light is transmitted for at least half an hour. During this period, the control computer controls the laser focus analyzer 51 to measure the focal position of the high-power laser optical lens 01. The measurement is performed multiple times and the measurement results are recorded. The average value of the multiple measurements is taken as the final focal position, or the beam absorber 52 is controlled to absorb the high-power laser.

[0078] Step 5: After the measurement is completed, the high-power laser source 1 is quickly shut down by the control computer, and the two rotating drive mechanisms are controlled to quickly switch the first rotating high-reflection mirror 3 and the second rotating high-reflection mirror 4 to position 1A and position 2A respectively. The control computer receives the position signals from the position sensors at positions 1A and 2A, and then sends an opening signal to the electric control device of the low-power laser source 2 to simultaneously turn on the low-power laser source 2. The control computer then measures the wavefront phase distribution of the high-power laser optical lens 01 after irradiation through the second measuring device 6.

[0079] Step 6: The total wavefront phase change δw(r) will cause the total optical path change Λ(r) of the high-power laser during focusing, thereby causing a change in the focal position. In wavefront phase measurement, the focal position change can be quantitatively predicted by converting the phase change into optical path difference. This method can be cross-checked with the measurement results of the laser focus analyzer to verify the accuracy and reliability of the wavefront measurement.

[0080] The total optical path change Λ(r) of an optical system caused by a high-power laser is:

[0081] Λ(r)=n0L+[Δn f (r)]L+[Δn S (r)]L+n0[ΔL(r)]

[0082] In the above formula, n0 is the refractive index of the material at a constant temperature, L is the length of the optical element, and Δn T (r) is the thermal shift of the refractive index, Δn S (r) represents the displacement of the refractive index caused by stress, and ΔL(r) represents the displacement of the optical element length caused by thermal expansion.

[0083] The total wavefront phase change δw(r) of an optical system caused by a high-power laser is:

[0084]

[0085] Using the correspondence between the total wavefront phase change δw(r) and the total optical path change Λ(r), the expected focal position change Δz is calculated:

[0086]

[0087] Based on the above formula, the expected focal position change Δz is calculated according to the difference between the post-irradiation wavefront phase distribution obtained in step 5 and the reference wavefront phase distribution obtained in step 3, and compared with the difference between the reference focal position obtained in step 2 and the focal position obtained in step 4 to complete the comprehensive measurement of the thermo-optical characteristics of the high-power laser optical lens 01.

[0088] Specifically:

[0089] Step 6.1: Subtract the post-irradiation wavefront phase distribution obtained in Step 5 from the reference wavefront phase distribution obtained in Step 3 to obtain the total wavefront phase change δw(r). Then, calculate the expected focal position change Δz based on the total wavefront phase change δw(r).

[0090]

[0091] λ is the wavelength of a high-power laser;

[0092] Step 6.2: Subtract the reference focal position obtained in Step 2 from the focal position obtained in Step 4 to obtain the actual focal position change Δz′. Then, use the root mean square error (RMSE) or percentage error to evaluate the matching degree between the expected focal position change Δz and the actual focal position change Δz′, and complete the comprehensive measurement of the thermo-optical characteristics of the high-power laser optical lens 01.

Claims

1. A comprehensive measurement system for the thermo-optical properties of a high-power laser optical lens, characterized in that: It includes a laser source, a first rotating high-reflection mirror (3), a second rotating high-reflection mirror (4), and a control computer; The laser light source has X and Y points arranged sequentially along its transmission direction on its optical path. The optical path of the laser light source is divided into a first detection optical path and a second detection optical path at point Y. The first detection optical path and the second detection optical path are respectively equipped with a first measuring device (5) and a second measuring device (6). The high-power laser optical lens (01) to be tested is arranged on the optical path of the laser light source and is located between point X and point Y. The first rotating high-reflection mirror (3) is arranged at point X, and the second rotating high-reflection mirror (4) is arranged at point Y. The laser source includes a high-power laser source (1) and a low-power laser source (2) whose output optical paths are perpendicular to each other and intersect at point X. The high-power laser source (1) and the low-power laser source (2) are used to output high-power laser and low-power laser, respectively. The first measuring device (5) is used to measure the reference focal position and focal position of the high-power laser optical lens (01), or to absorb high-power laser; the second measuring device (6) is used to measure the reference wavefront phase distribution and the irradiated wavefront phase distribution of the high-power laser optical lens (01); The first rotating high-reflection mirror (3) is provided with position 1A and position 1B, and the second rotating high-reflection mirror (4) is provided with position 2A and position 2B; When the first rotating high-reflection mirror (3) is in position 1A, the low-power laser source (2) is turned on and the high-power laser source (1) is turned off. The first rotating high-reflection mirror (3) is used to guide the low-power laser through the high-power laser optical lens (01) to point Y. When the second rotating high-reflection mirror (4) is in position 2A, it is used to guide the laser at point Y to the second measuring device (6) on the second detection optical path. Alternatively, when the second rotating high-reflection mirror (4) is in position 2B, it is used to transmit the laser at point Y to the first measuring device (5) on the first detection optical path. When the first rotating high-reflection mirror (3) is in position 1B, the high-power laser source (1) is turned on and the low-power laser source (2) is turned off. The first rotating high-reflection mirror (3) is used to make the high-power laser pass through point X and then through the high-power laser optical lens (01) to be tested to point Y. The second rotating high-reflection mirror (4) is in position 2B and is used to make the laser at point Y transmit to the first measuring device (5) on the first detection optical path. The control computer is connected to a high-power laser source (1), a low-power laser source (2), a first rotating high-reflection mirror (3), a second rotating high-reflection mirror (4), a first measuring device (5), and a second measuring device (6), respectively. It is used to control the switching of the high-power laser source (1) and the low-power laser source (2), the position switching of the first rotating high-reflection mirror (3) and the second rotating high-reflection mirror (4), and to control the first measuring device (5) and the second measuring device (6), and to acquire the measured data in real time.

2. The comprehensive measurement system for the thermo-optical characteristics of a high-power laser optical lens according to claim 1, characterized in that: The first measuring device (5) consists of a laser focus analyzer (51) and a beam absorber (52) that can be switched between each other. The laser focus analyzer (51) is used to measure the reference focus position and focus position of the high-power laser optical lens (01), and the beam absorber (52) is used to absorb high-power laser. The laser focus analyzer (51) and the beam absorber (52) are respectively connected to the control computer. The control computer is used to control the measurement process of the laser focus analyzer (51) and the beam absorber (52) and to acquire the measured data in real time.

3. The comprehensive measurement system for the thermo-optical characteristics of a high-power laser optical lens according to claim 1, characterized in that: The first rotating high-reflection mirror (3) and the second rotating high-reflection mirror (4) are both provided with a rotation drive mechanism, and the input end of each rotation drive mechanism is connected to the control computer; Position sensors are installed at positions 1A, 1B, 2A, and 2B, and the output of each position sensor is connected to the control computer. Both the high-power laser source (1) and the low-power laser source (2) are equipped with electric control devices, and the input terminal of each electric control device is connected to the control computer.

4. The comprehensive measurement system for the thermo-optical characteristics of a high-power laser optical lens according to claim 2, characterized in that: Positioning devices are installed at both positions 1A and 2A.

5. The comprehensive measurement system for the thermo-optical characteristics of a high-power laser optical lens according to claim 1, characterized in that: The high-power laser source (1) and the low-power laser source (2) are collimated laser sources of the same wavelength; the second measuring device (6) adopts a Shaker-Hartmann wavefront sensor.

6. A method for comprehensively measuring the thermo-optical properties of a high-power laser optical lens, characterized in that, The comprehensive measurement system for the thermo-optical properties of the high-power laser optical lens as described in claim 1 includes the following steps: Step 1: If the high-power laser optical lens (01) to be tested is a focusing optical lens, then proceed to step 2; if the high-power laser optical lens (01) to be tested is a beam expanding collimating lens or a beam shrinking collimating lens, then proceed to step 3. Step 2: After the control computer puts the first rotating high-reflection mirror (3) in position 1A and the second rotating high-reflection mirror (4) in position 2B, the low-power laser source (2) is turned on simultaneously. The first measuring device (5) measures the reference focal position of the high-power laser optical lens (01). After the measurement is completed, the low-power laser source (2) is turned off. Step 3: After the control computer positions the first rotating high-reflection mirror (3) at position 1A and the second rotating high-reflection mirror (4) at position 2A, the low-power laser source (2) is turned on simultaneously. The control computer then measures the reference wavefront phase distribution of the high-power laser optical lens (01) through the second measuring device (6). After the measurement is completed, the low-power laser source (2) is turned off, and the control computer switches the first rotating high-reflection mirror (3) and the second rotating high-reflection mirror (4) to positions 1B and 2B, respectively. Step 4: The high-power laser source (1) is turned on by the control computer and the light is transmitted for at least half an hour. During this period, the focal position of the high-power laser optical lens (01) is measured by the first measuring device (5). The measurement is repeated multiple times and the measurement results are recorded. The average value of the multiple measurements is taken as the final focal position, or the high-power laser is absorbed by the first measuring device (5). Step 5: After the measurement is completed, the high-power laser source (1) is quickly turned off by the control computer, and the first rotating high-reflection mirror (3) and the second rotating high-reflection mirror (4) are quickly switched to position 1A and position 2A respectively. The low-power laser source (2) is turned on simultaneously, and the control computer measures the wavefront phase distribution of the high-power laser optical lens (01) after irradiation through the second measuring device (6) to complete the comprehensive measurement of the thermo-optical characteristics of the high-power laser optical lens (01).

7. The method for comprehensively measuring the thermo-optical characteristics of a high-power laser optical lens according to claim 6, characterized in that, Step 1 specifically involves: If the high-power laser optical lens (01) is a focusing optical lens, then switch the first measuring device (5) to a laser focus analyzer (51) and then execute step 2; if the high-power laser optical lens (01) is a beam expanding collimating lens or a beam shrinking collimating lens, then switch the first measuring device (5) to a beam absorber (52) and then execute step 3.

8. The method for comprehensively measuring the thermo-optical characteristics of a high-power laser optical lens according to claim 6 or 7, characterized in that, In step 1, if the high-power laser optical lens (01) to be tested is a focusing optical lens, then step 6 is included after step 5: The expected focal position change Δz is calculated based on the difference between the post-irradiation wavefront phase distribution obtained in step 5 and the reference wavefront phase distribution obtained in step 3, and then compared with the difference between the reference focal position obtained in step 2 and the focal position obtained in step 4.

9. The method for comprehensively measuring the thermo-optical characteristics of a high-power laser optical lens according to claim 8, characterized in that, Step 6 specifically involves: Step 6.1: Subtract the post-irradiation wavefront phase distribution obtained in Step 5 from the reference wavefront phase distribution obtained in Step 3 to obtain the total wavefront phase change δw(r). Then, calculate the expected focal position change Δz based on the total wavefront phase change δw(r). Where λ is the wavelength of the high-power laser; Step 6.2: Subtract the reference focal position obtained in step 2 from the focal position obtained in step 4 to obtain the actual focal position change Δz′. Then, use root mean square error or percentage error to evaluate the matching degree between the expected focal position change Δz and the actual focal position change Δz′, and complete the comprehensive measurement of the thermo-optical characteristics of the high-power laser optical lens (01).

Citation Information

Patent Citations

  • Device for testing heat effect of optical element under continuous action

    CN118706408A

  • Novel thermal energy digital display thermometer

    CN207231642U