A fast steering mirror device

Abstract

The present invention belongs to the field of optical instruments, and particularly relates to a fast steering mirror device. The device includes a base, N flexible lever amplification mechanisms, N piezoelectric ceramic drivers, a flexible support platform, a mirror, and N displacement detectors; the fixed ends of the N flexible lever amplification mechanisms are respectively connected to the same side of the base; the N piezoelectric ceramic drivers are respectively installed in the installation spaces of the N flexible lever amplification mechanisms, their installation ends are connected to the fixed ends of the flexible lever amplification mechanisms, and the driving ends are connected to the amplification ends of the flexible lever amplification mechanisms; the N displacement detectors are respectively installed at the free ends of the N flexible lever amplification mechanisms; the flexible support platform is provided with one connection surface and N connection ends, and the N connection ends are respectively connected to the free ends of the N flexible lever amplification mechanisms; the mirror is connected to the connection surface. The present invention can effectively increase the deflection range of the mirror.

Description

Technical Field

[0001] The present invention relates to an optical instrument, and particularly to a fast steering mirror device. Background Art

[0002] A fast steering mirror (FSM) is an important component of a secondary stabilization and aiming system, with advantages such as fast response, high precision, and high resolution. Its structure mainly includes the following components: a mirror, a driver, a flexible support structure, and a base. The fast steering mirror is widely used in fields such as space laser communication and laser weapons, and is a core component in the acquisition, tracking, and aiming system, which can perform precise pointing and acquisition on the tracking object.

[0003] According to different driving methods, fast steering mirrors are usually divided into piezoelectric fast steering mirrors and voice coil fast steering mirrors. The difference between the two is that the piezoelectric fast steering mirror is driven by a piezoelectric ceramic driver, with a faster response but a smaller stroke; the voice coil fast steering mirror is driven by a voice coil motor, which can meet the need for large-range deflection, but due to electromagnetic interference, it is vulnerable to external disturbances.

[0004] The piezoelectric ceramic driver has characteristics such as large output force and high precision. Using it as the driver of the fast steering mirror can achieve high positioning precision. However, the elongation of the piezoelectric ceramic driver greatly restricts the deflection range of the mirror. Therefore, an amplification mechanism must be used to amplify the displacement output of the piezoelectric ceramic driver.

[0005] However, the amplification ratio of the existing amplification mechanism is small, which greatly restricts the deflection range of the mirror and is difficult to meet the need for large-range deflection. Summary of the Invention

[0006] The purpose of the present invention is to solve the technical problem that the amplification ratio of the existing amplification mechanism is small, which greatly restricts the deflection range of the mirror and is difficult to meet the need for large-range deflection, and to provide a fast steering mirror device.

[0007] To achieve the above purpose, the technical solution adopted by the present invention is as follows:

[0008] A fast steering mirror device, which is characterized in that it includes a base, a flexible lever amplification mechanism, a piezoelectric ceramic driver, a flexible support platform, a mirror, and a displacement detector;

[0009] The number of the flexible lever amplification mechanisms, piezoelectric ceramic drivers, and displacement detectors is N, where N≥4 and N is an even number;

[0010] The N flexible lever amplification mechanisms are evenly distributed circumferentially, and their fixed ends are respectively connected to the same side of the base;

[0011] Each of the N flexible lever amplification mechanisms is provided with an installation space for installing a piezoelectric ceramic actuator. The N piezoelectric ceramic actuators are respectively installed in the installation spaces of the N flexible lever amplification mechanisms. Their installation ends are connected to the fixed ends of the flexible lever amplification mechanisms, and the driving ends are connected to the amplification ends of the flexible lever amplification mechanisms, for transmitting the output of the piezoelectric ceramic actuators to the free ends; the control ends of the N piezoelectric ceramic actuators are respectively electrically connected to the control ends of an external controller;

[0012] The N displacement detectors are respectively installed on the N flexible lever amplification mechanisms. Their output ends are respectively electrically connected to the external controller. The N displacement detectors are respectively used to obtain the displacement amounts of the N flexible lever amplification mechanisms and send them to the external controller, so that the external controller controls the N piezoelectric ceramic actuators to respectively elongate or contract according to the displacement amounts of the N flexible lever amplification mechanisms;

[0013] The flexible support platform is provided with 1 connection surface and N connection ends. The N connection ends are respectively connected to the free ends of the N flexible lever amplification mechanisms;

[0014] The back surface of the mirror is connected to the connection surface of the flexible support platform.

[0015] Furthermore, the flexible lever amplification mechanism includes a first connecting arm, a second connecting arm, a third connecting arm, a fourth connecting arm, a fifth connecting arm and a connecting seat;

[0016] One side of the first connecting arm is connected to the base; one ends of the second connecting arm and the third connecting arm are respectively connected to both ends of the other side of the first connecting arm; the other end of the second connecting arm is connected to one end of the fourth connecting arm through a flexible hinge, and the other end of the third connecting arm is connected to one end of the fifth connecting arm through a flexible hinge; the other end of the fourth connecting arm is connected to the fifth connecting arm on the side close to the first connecting arm through a flexible hinge, and there is a spacing between this connection point and the end of one end of the fifth connecting arm;

[0017] One side of the connecting seat is connected to the middle part of the fourth connecting arm on the side close to the first connecting arm through a flexible hinge;

[0018] The first connecting arm, the second connecting arm, the third connecting arm and the fourth connecting arm enclose an installation space; the other side of the first connecting arm is used as the fixed end of the flexible lever amplification mechanism and is connected to the installation end of the piezoelectric ceramic actuator; the other side of the connecting seat is used as the amplification end of the flexible lever amplification mechanism and is connected to the driving end of the piezoelectric ceramic actuator;

[0019] The other end of the fifth connecting arm is used as the free end of the flexible lever amplification mechanism and is connected to one connection end of the flexible support platform;

[0020] The displacement detector is arranged outside the flexible hinge at the joint of the third connecting arm and the fifth connecting arm, and is used to detect the deformation amount of the flexible hinge so as to obtain the displacement amount of the flexible lever amplification mechanism.

[0021] Further, the first connecting arm, the fourth connecting arm, and the fifth connecting arm are arranged in parallel with each other and are all arranged parallel to the connecting surface of the flexible support platform. The output directions of the second connecting arm, the third connecting arm, and the piezoelectric ceramic driver are arranged in parallel with each other and are all arranged perpendicular to the connecting surface of the flexible support platform;

[0022] A connecting platform adapted to the first connecting arm is arranged on the base, and one side of the first connecting arm is connected to the base through the connecting platform.

[0023] Further, a ball head locking bolt is arranged at a position on the other side of the base corresponding to the connecting platform. The ball head end of the ball head locking bolt sequentially passes through the base, the connecting platform, and the first connecting arm and abuts against the mounting end of the piezoelectric ceramic driver.

[0024] Further, a gasket is arranged at the abutting position between the mounting end of the piezoelectric ceramic driver and the ball head end of the ball head locking bolt.

[0025] Further, the displacement detector is a strain gauge.

[0026] Further, the flexible support platform includes a first support platform, a second support platform, and N leaf spring type flexible bearings; the N leaf spring type flexible bearings are evenly divided into N / 2 groups. The two leaf spring type flexible bearings in the same group are arranged coaxially, and there is a gap at one end where the two leaf spring type flexible bearings in the same group are close to each other; the N groups of leaf spring type flexible bearings are evenly distributed in the circumferential direction;

[0027] The outer ends of the N leaf spring type flexible bearings are N connecting ends, which are respectively connected to the free ends of the N flexible lever amplification mechanisms;

[0028] The first support platform and the second support platform are fixedly connected, and mounting grooves adapted to the inner ends of the N leaf spring type flexible bearings are respectively arranged on the sides close to each other. The inner ends of the N leaf spring type flexible bearings are respectively arranged in the mounting grooves of the first support platform and the second support platform;

[0029] One side of the first support platform away from the second support platform is a connecting surface, which is connected to the mirror.

[0030] Further, the leaf spring type flexible bearing includes a first cylindrical shell, a second cylindrical shell, and M flexible plates; M≥3 and M is an odd number;

[0031] Arc-shaped plates extending along the circumferential direction and the axial direction are respectively arranged on the inner circumferential surfaces of the first cylindrical shell and the second cylindrical shell. One end of the arc-shaped plate is flush with one end of the first cylindrical shell and the second cylindrical shell, and the other end extends beyond the other end of the first cylindrical shell and the second cylindrical shell correspondingly;

[0032] The other ends of the first cylindrical shell and the second cylindrical shell are arranged facing each other. The arc-shaped plate extending from the first cylindrical shell is placed inside the second cylindrical shell, and the arc-shaped plate of the second cylindrical shell is placed inside the first cylindrical shell. The arc-shaped plates extending from the first cylindrical shell and the second cylindrical shell are symmetrically arranged in the circumferential direction, and there is a gap in the circumferential direction at the ends where the two arc-shaped plates are close to each other.

[0033] M flexible plates are respectively arranged axially in the space formed by the arc-shaped plates of the first cylindrical shell and the second cylindrical shell. Both ends of the M flexible plates are respectively connected to the inner walls of the arc-shaped plates of the first cylindrical shell and the second cylindrical shell, and the M flexible plates are arranged crosswise in the radial plane projection of the first cylindrical shell.

[0034] One end of the first cylindrical shell serves as a connection end and is connected to the free end of the flexible lever amplification mechanism; one end of the second cylindrical shell is correspondingly and cooperatively installed with the first support platform and the second support platform through the installation groove.

[0035] Furthermore, N = 4; the 4 leaf spring type flexible bearings are divided into 2 groups, and the axes of the 2 groups of leaf spring type flexible bearings are perpendicular to each other and intersect; the N connection ends are respectively connected to the free ends of the N flexible lever amplification mechanisms through clamps.

[0036] Furthermore, the clamp includes a connecting plate and an L-shaped plate connected to one side of the connecting plate; the connecting plate is connected to one end of the first cylindrical shell, and the L-shaped plate is connected to the free end of the flexible lever amplification mechanism through bolts.

[0037] Round holes are provided at the central positions on the sides where the first support platform and the second support platform are away from each other.

[0038] The beneficial effects of the present invention are as follows:

[0039] 1. Through the mutual cooperation of the piezoelectric ceramic driver and the flexible lever amplification mechanism provided in the present invention, the amplification of the displacement output of the piezoelectric ceramic driver can be realized, effectively solving the problem of the small elongation of the piezoelectric ceramic driver, and improving the deflection range of the mirror, which can reach 20 mrad .

[0040] 2. In the leaf spring type flexible bearing in the flexible support platform of the present invention, since the internal flexible plates are crosswise arranged in the first cylindrical shell and the second cylindrical shell, when the mirror deflects, the torsional cylindrical hollow structure makes the axial drift of the internal flexible plates complementary, effectively avoiding the axial drift phenomenon.

[0041] 3. The present invention adopts a flexible lever amplification mechanism, which can effectively solve the technical problems that the traditional rigid support components cannot meet the requirements of zero friction and zero clearance and need lubrication to maintain a high service life. Description of the Drawings

[0042] Figure 1 is a schematic structural diagram of an embodiment of the present invention;

[0043] Figure 2 is Figure 1 the front view of

[0044] Figure 3 is a schematic structural diagram of the flexible support platform in the embodiment of the present invention;

[0045] Figure 4 is Figure 3 the exploded view of

[0046] Figure 5 is a schematic structural diagram of the leaf spring type flexible bearing in the embodiment of the present invention;

[0047] Figure 6 is Figure 5 the exploded view of

[0048] In the figure: 1 - base; 2 - flexible lever amplification mechanism, 21 - first connecting arm, 22 - second connecting arm, 23 - third connecting arm, 24 - fourth connecting arm, 25 - fifth connecting arm, 26 - connecting seat; 3 - piezoelectric ceramic driver, 4 - fixture, 41 - connecting plate, 42 - L-shaped plate; 5 - flexible support platform, 51 - first support platform, 52 - second support platform, 53 - leaf spring type flexible bearing, 531 - first cylindrical shell, 532 - second cylindrical shell, 533 - flexible plate, 534 - arc plate, 54 - round hole; 6 - mirror, 7 - connecting platform, 8 - ball head locking bolt, 9 - gasket, 10 - strain gauge. Specific Embodiments

[0049] To make the objectives, advantages, and features of the present invention clearer, the following further details a fast steering mirror device proposed by the present invention in conjunction with the accompanying drawings and specific embodiments. According to the following specific embodiments, the advantages and features of the present invention will be clearer. It should be noted that: the drawings are all in a very simplified form and use non-precise scales, only for conveniently and clearly assisting in explaining the objectives of the embodiments of the present invention; secondly, the structures shown in the drawings are often part of the actual structures.

[0050] Refer to Figure 1 and Figure 2 , a fast steering mirror device in this embodiment mainly includes a base 1, a flexible lever amplification mechanism 2, a piezoelectric ceramic driver 3, a fixture 4, a flexible support platform 5, a mirror 6, a displacement detector, etc.; among them, the numbers of the flexible lever amplification mechanism 2, the piezoelectric ceramic driver 3, the fixture 4, and the displacement detector are all 4.

[0051] In other embodiments of the present invention, if more angular deflections of the mirror 6 are required, six, eight or more even numbers of flexible lever amplification mechanisms 2, piezoelectric ceramic drivers 3, fixtures 4 and displacement detectors can be set according to actual needs. However, the increase in the number will lead to a more complex structure and higher cost.

[0052] The flexible lever amplification mechanism 2 is a two-stage lever amplification mechanism, which is used to realize the displacement output amplification function of the piezoelectric ceramic driver 3. The maximum length of the flexible lever amplification mechanism 2 is 17 mm , the maximum width is 5 mm , and the maximum height is 37.6 mm . The size of the flexible lever amplification mechanism 2 is related to the displacement output amplification ratio. In this embodiment, the amplification ratio can reach 8.55.

[0053] Four flexible lever amplification mechanisms 2 are evenly distributed along the circumference, so that the included angle between two adjacent flexible lever amplification mechanisms 2 along the circumferential direction is 90°.

[0054] Specifically, the flexible lever amplification mechanism 2 includes a first connecting arm 21, a second connecting arm 22, a third connecting arm 23, a fourth connecting arm 24, a fifth connecting arm 25 and a connecting seat 26. Taking the "up" and "down" directions in Figure 1 as a reference, on the upper side of the base 1, there are four connecting platforms 7 corresponding to and adapted to the four first connecting arms 21. The four connecting platforms 7 are used to determine the installation positions of the four first connecting arms 21. The lower side of the first connecting arm 21 is connected to the upper side of the corresponding connecting platform 7 on the base 1; the lower ends of the second connecting arm 22 and the third connecting arm 23 are respectively connected to both ends of the upper side of the first connecting arm 21, and the second connecting arm 22 and the third connecting arm 23 are arranged in parallel; the upper end of the second connecting arm 22 is connected to one end of the fourth connecting arm 24 through a flexible hinge, and the thickness of this flexible hinge is 0.6 mm ; the upper end of the third connecting arm 23 is connected to one end of the fifth connecting arm 25 through a flexible hinge, and the thickness of this flexible hinge is 0.6 mm . Through the setting of the above two relatively thick flexible hinges, the structural stability of the flexible lever amplification mechanism 2 can be ensured; the fourth connecting arm 24 and the fifth connecting arm 25 are both arranged in parallel with the first connecting arm 21, and the length of the third connecting arm 23 is greater than the length of the second connecting arm 22; the other end of the fourth connecting arm 24 is connected to the lower side of the fifth connecting arm 25 through a flexible hinge, and the thickness of this flexible hinge is 0.5 mm , 0.5 mm The flexible hinge at this position is relative to 0.6 mmThe size of the flexible hinge at this position is smaller and the flexibility is greater to ensure the rotation effect. There is a distance between the connection of the fourth connecting arm 24 and the fifth connecting arm 25 and one end of the fifth connecting arm 25; the length of the fifth connecting arm 25 is greater than that of the fourth connecting arm 24. The upper side of the connecting seat 26 is connected to the middle part of the lower side of the fourth connecting arm 24 through a flexible hinge, and the thickness of this flexible hinge is 0.4 mm , 0.4 mm The flexible hinge at this position serves as the input point of the piezoelectric ceramic actuator 3 and has the thinnest thickness to ensure that the force and displacement input of the piezoelectric ceramic actuator 3 are concentrated at one point as much as possible and reduce displacement loss.

[0055] The aforementioned first connecting arm 21, second connecting arm 22, third connecting arm 23 and fourth connecting arm 24 enclose an installation space for installing the piezoelectric ceramic actuator 3. The piezoelectric ceramic actuator 3 is arranged in this installation space, and the size of the piezoelectric ceramic actuator 3 is 5 mm ×5 mm ×26 mm ; the nominal stroke of the piezoelectric ceramic actuator 3 is 39.6 , indicating that the maximum elongation of this actuator is 39.6 . The output direction of the piezoelectric ceramic actuator 3 is parallel to the length direction of the second connecting arm 22; the lower side of the first connecting arm 21 serves as the fixed end of the flexible lever amplification mechanism 2 and is connected to the installation end of the piezoelectric ceramic actuator 3. The control end of the piezoelectric ceramic actuator 3 is electrically connected to the control end of an external controller, so as to extend or contract under the control of the external controller.

[0056] Specifically, a ball head locking bolt 8 is arranged at the position corresponding to the connecting platform 7 on the lower side of the base 1. The ball head end of the ball head locking bolt 8 sequentially passes through the base 1, the connecting platform 7 and the first connecting arm 21, and abuts against the installation end of the piezoelectric ceramic actuator 3. A gasket 9 is arranged at the abutting position between the installation end of the piezoelectric ceramic actuator 3 and the ball head locking bolt 8, and the size of the gasket 9 is 5 mm ×5 mm , and the thickness is 0.5 mm . The setting of the gasket 9 is beneficial to reducing the extrusion damage of the head of the ball head locking bolt 8 to the installation end of the piezoelectric ceramic actuator 3 and improving the service life of the piezoelectric ceramic actuator 3.

[0057] The lower side of the connecting seat 26 serves as the amplification end of the flexible lever amplification mechanism 2 and is adhesively connected to the driving end of the piezoelectric ceramic actuator 3 with glue; the other end of the fifth connecting arm 25 serves as the free end of the flexible lever amplification mechanism 2 and is connected to the fixture 4.

[0058] In this embodiment, the displacement detector is preferably a strain gauge 10. The four strain gauges 10 are respectively arranged on the outer sides of the flexible hinges at the joints of the third connecting arm 23 and the fifth connecting arm 25 in the four flexible lever amplification mechanisms 2. The width of the strain gauge 10 is 3.5 mm , and the length is 4.3 mm , and the short side is parallel to the upper surface of the fifth connecting arm 25, and the pasting position is 1.3 away from the upper surface of the fifth connecting arm 25 mm , and the long side is 0.7 away from the two corresponding side edges of the flexible hinge mm . The four strain gauges 10 are respectively electrically connected to an external controller. By measuring the deformation of the flexible hinge at the joint of the third connecting arm 23 and the fifth connecting arm 25 in the flexible lever amplification mechanism 2 by the strain gauges 10, the displacement of the flexible lever amplification mechanism 2 is obtained, and the displacement is converted into the deflection angle of the mirror 6 by using an existing conversion formula, and then the deflection angle is sent to the external controller, which can be used for real-time feedback in the control, so as to control the elongation or expansion of the corresponding piezoelectric ceramic driver 3, forming a closed-loop system. For example, the target angle of the device is to deflect 18 mrad to the right, and it is detected that the deflection angle of the mirror 6 is 16 mrad to the right, then the external controller will continue to control the elongation of the piezoelectric ceramic driver 3 on the right side to make the mirror 6 continue to deflect to the right until the deflection angle reaches 18 mrad .

[0059] See Figure 3 and Figure 4 , the flexible support platform 5 includes a first support platform 51, a second support platform 52 and four leaf spring type flexible bearings 53; the four leaf spring type flexible bearings 53 are divided into two groups, and the two leaf spring type flexible bearings 53 in the same group are coaxially arranged, and there is a gap at one end where the two leaf spring type flexible bearings 53 in the same group are close to each other; the axes of the two groups of leaf spring type flexible bearings 53 intersect at right angles; the outer ends of the four leaf spring type flexible bearings 53 are four connecting ends, which are respectively connected to the four jigs 4; the first support platform 51 and the second support platform 52 are buckled and connected, and installation grooves adapted to the inner ends of the four leaf spring type flexible bearings 53 are respectively arranged on the sides of the first support platform 51 and the second support platform 52 close to each other, and the inner ends of the four leaf spring type flexible bearings 53 are respectively installed in the installation grooves of the first support platform 51 and the second support platform 52, so as to fix the four leaf spring type flexible bearings 53 on the first support platform 51 and the second support platform 52. One side of the first support platform 51 away from the second support platform 52 is a connecting surface, which is adhesively connected coaxially with the mirror 6; and, the aforementioned connecting surface is arranged parallel to the first connecting arm 21 and perpendicular to the second connecting arm 22.

[0060] Preferably, circular holes 54 are provided at the central positions on the sides of the first support platform 51 and the second support platform 52 away from each other, which can prevent the phenomenon that the initial position of the mirror 6 is not in the horizontal position due to excessive requirements for flatness when adhering the mirror 6.

[0061] See Figure 5 and Figure 6 , and with Figure 6 the "up", "down", "left", and "right" orientations in

[0062] as a reference, the leaf spring type flexible bearing 53 includes a first cylindrical shell 531, a second cylindrical shell 532, and three flexible plates 533; arc-shaped plates 534 extending in the circumferential and axial directions are respectively provided on the inner circumferential surfaces of the first cylindrical shell 531 and the second cylindrical shell 532. The left end of the arc-shaped plate 534 on the first cylindrical shell 531 is flush with its left end, and the right end extends beyond its right end. At the same time, the arc-shaped plate 534 on the first cylindrical shell 531 is located in the upper half of its inner circumferential surface; the right end of the arc-shaped plate 534 on the second cylindrical shell 532 is flush with its right end, and the left end extends beyond its left end. At the same time, the arc-shaped plate 534 on the second cylindrical shell 532 is located in the lower half of its inner circumferential surface.

[0063] It should be noted that the specific number of the above flexible plates 533 is only a preferred embodiment of the present invention. In other embodiments of the present invention, those skilled in the art can reasonably select the number M of the flexible plates 533 according to actual needs, as long as the requirements of M≥3 and M is an odd number are satisfied.

[0064] Specifically, the fixture 4 includes a connecting plate 41 and an L-shaped plate 42 connected to one side of the connecting plate 41. The connecting plate 41 is connected to the left end of the first cylindrical shell 531, and the L-shaped plate 42 is connected to the other end of the fifth connecting arm 25 by bolts.

[0065] This device is driven by 4 piezoelectric ceramic drivers 3. Utilizing the inverse piezoelectric effect, that is, when a certain voltage is applied across the piezoelectric ceramic driver 3, the piezoelectric ceramic driver 3 can elongate and achieve displacement output.

[0066] Since the piezoelectric ceramic driver 3 can only elongate but not contract when a pre-applied voltage is applied, when realizing the uniaxial deflection of the mirror 6 surface, it is necessary to first apply voltage to the 2 piezoelectric ceramic drivers 3 on the same deflection axis simultaneously to elongate by 1 / 2 of the nominal stroke, that is, 19.8 Then, continue to apply voltage to one of the piezoelectric ceramic drivers 3 to elongate it. At the same time, decrease the voltage of the other piezoelectric ceramic driver 3 to make it contract. At this time, due to the upward displacement input received by the flexible lever amplification mechanism 2 connected to the elongating-end piezoelectric ceramic driver 3, the flexible hinge of the flexible lever amplification mechanism 2 will bend and deform. Utilizing the lever principle, the free end at the top of the flexible lever amplification mechanism 2, that is, the end where the fifth connecting arm 25 is connected to the fixture 4, will have an upward output displacement. The magnitude of the output displacement is: the elongation of the piezoelectric ceramic driver × the amplification ratio of the flexible lever amplification mechanism. Similarly, it can be known that the flexible lever amplification mechanism 2 connected to the contracting piezoelectric ceramic driver 3 will generate a downward displacement output at the top free end. The magnitude of the output displacement is: the contraction amount of the piezoelectric ceramic driver after elongating by 1 / 2 of the nominal stroke × the amplification ratio of the flexible lever amplification mechanism.

[0067] Since the flexible lever amplification mechanism 2 is connected to the flexible support platform 5 through the fixture 4, both ends of the flexible support platform 5 along the deflection axis direction receive two forces and displacements in opposite directions of pushing and pulling. At this time, the 2 leaf spring type flexible bearings 53 perpendicular to the deflection axis, as Figure 5 shown, will rotate due to the drive of the flexible support platform 5. It should be noted that sufficient clearance allowance needs to be left between the arc-shaped plate 534 of the first cylindrical shell 531 and the second cylindrical shell 532. When rotating to the maximum angle that this device can reach, no interference phenomenon will occur. At this time, the flexible support platform 5 deflects, driving the mirror 6 to deflect.

[0068] If biaxial deflection is to be performed, it is necessary to control the 4 piezoelectric ceramic drivers 3 to elongate and contract by referring to the above method.

Claims

1. A fast reflector device, characterized in that: It comprises a base (1), a flexible lever amplifying mechanism (2), a piezoelectric ceramic driver (3), a flexible support platform (5), a reflector (6) and a displacement detector; The number of the flexible lever amplifying mechanism (2), the piezoelectric ceramic driver (3) and the displacement detector is N, N≥4, and N is an even number; The N flexible lever amplifying mechanisms (2) are evenly distributed along the circumference, and their fixed ends are respectively connected to the same side of the base (1); the N flexible lever amplifying mechanisms (2) are each provided with an installation space for installing a piezoelectric ceramic driver (3), and the N piezoelectric ceramic drivers (3) are respectively installed in the installation space of the N flexible lever amplifying mechanisms (2), and their installation ends are connected to the fixed ends of the flexible lever amplifying mechanisms (2), and their driving ends are connected to the amplifying ends of the flexible lever amplifying mechanisms (2), and are used to transmit the output of the piezoelectric ceramic driver (3) to the free end; the control ends of the N piezoelectric ceramic drivers (3) are respectively electrically connected to an external controller; N displacement detectors are respectively mounted on N flexible lever amplifying mechanisms (2), and their output ends are respectively electrically connected to an external controller. The N displacement detectors are respectively used to obtain the displacement amounts of the N flexible lever amplifying mechanisms (2) and send them to the external controller, so that the external controller controls the N piezoelectric ceramic drivers (3) to extend or contract respectively according to the displacement amounts of the N flexible lever amplifying mechanisms (2); The flexible support platform (5) is provided with a connection surface and N connection ends, and the N connection ends are respectively connected to the free ends of the N flexible lever amplification mechanisms (2); The back surface of the reflector (6) is connected to the connection surface of the flexible support platform (5).

2. A fast reflector device according to claim 1, characterized in that: The flexible lever amplifying mechanism (2) comprises a first connecting arm (21), a second connecting arm (22), a third connecting arm (23), a fourth connecting arm (24), a fifth connecting arm (25) and a connecting seat (26); One side of the first connecting arm (21) is connected to the base (1); one end of the second connecting arm (22) and the third connecting arm (23) are respectively connected to the two ends of the other side of the first connecting arm (21); the other end of the second connecting arm (22) is connected to one end of the fourth connecting arm (24) through a flexible hinge, and the other end of the third connecting arm (23) is connected to one end of the fifth connecting arm (25) through a flexible hinge; the other end of the fourth connecting arm (24) is connected to the side of the fifth connecting arm (25) close to the first connecting arm (21) through a flexible hinge, and a distance is provided between the connection point and one end of the fifth connecting arm (25); One side of the connecting seat (26) is connected to the middle portion of one side of the fourth connecting arm (24) close to the first connecting arm (21) through a flexible hinge; The first connecting arm (21), the second connecting arm (22), the third connecting arm (23) and the fourth connecting arm (24) enclose the installation space; the other side of the first connecting arm (21) serves as the fixed end of the flexible lever amplifying mechanism (2) and is connected to the installation end of the piezoelectric ceramic driver (3); the other side of the connecting seat (26) serves as the amplifying end of the flexible lever amplifying mechanism (2) and is connected to the driving end of the piezoelectric ceramic driver (3); The other end of the fifth connecting arm (25) serves as the free end of the flexible lever amplifying mechanism (2) and is connected to a connecting end of the flexible support platform (5); The displacement detector is arranged outside the flexible hinge at the connection between the third connecting arm (23) and the fifth connecting arm (25) and is used to detect the deformation of the flexible hinge to obtain the displacement of the flexible lever amplification mechanism (2).

3. A fast reflector device according to claim 2, characterized in that: The first connecting arm (21), the fourth connecting arm (24), and the fifth connecting arm (25) are arranged parallel to each other and are all arranged parallel to the connection surface of the flexible support platform (5); the second connecting arm (22), the third connecting arm (23), and the output direction of the piezoelectric ceramic driver (3) are arranged parallel to each other and are all arranged perpendicular to the connection surface of the flexible support platform (5); A connecting platform (7) adapted to the first connecting arm (21) is provided on the base (1), and one side of the first connecting arm (21) is connected to the base (1) via the connecting platform (7).

4. A fast reflector device according to claim 3, characterized in that: A ball head locking bolt (8) is provided at a position corresponding to the connecting platform (7) on the other side of the base (1); the ball head end of the ball head locking bolt (8) passes through the base (1), the connecting platform (7) and the first connecting arm (21) in sequence, and abuts against the mounting end of the piezoelectric ceramic driver (3).

5. A fast reflector device according to claim 4, characterized in that: A gasket (9) is provided at the abutment point between the mounting end of the piezoelectric ceramic driver (3) and the ball end of the ball locking bolt (8).

6. A fast reflector device according to any one of claims 1 to 5, characterized in that: The displacement detector is a strain gauge (10).

7. A fast reflector device according to any one of claims 1 to 5, characterized in that: The flexible support platform (5) comprises a first support platform (51), a second support platform (52) and N reed-type flexible bearings (53); The N leaf-type flexible bearings (53) are evenly divided into N / 2 groups, and the two leaf-type flexible bearings (53) in the same group are coaxially arranged, and the two leaf-type flexible bearings (53) in the same group are spaced apart from each other at one end; the N groups of leaf-type flexible bearings (53) are evenly distributed along the circumferential direction; The outer ends of the N reed-type flexible bearings (53) are the N connecting ends, which are respectively connected to the free ends of the N flexible lever amplifying mechanisms (2); The first support platform (51) and the second support platform (52) are fixedly connected, and a mounting groove adapted to the inner ends of N leaf spring flexible bearings (53) is respectively provided on one side close to each other, and the inner ends of the N leaf spring flexible bearings (53) are respectively provided in the mounting grooves of the first support platform (51) and the second support platform (52); The side of the first supporting platform (51) away from the second supporting platform (52) is the connecting surface, which is connected to the reflector (6).

8. A fast reflector device according to claim 7, characterized in that: The leaf spring flexible bearing (53) comprises a first cylindrical shell (531), a second cylindrical shell (532) and M flexible plates (533); M≥3, and M is an odd number; An arc-shaped plate (534) extending in the circumferential direction and the axial direction is respectively provided on the inner circumferential surface of the first cylindrical shell (531) and the second cylindrical shell (532); one end of the arc-shaped plate (534) is flush with one end of the first cylindrical shell (531) and the second cylindrical shell (532), and the other end extends to the outside of the other end of the first cylindrical shell (531) and the second cylindrical shell (532); The other ends of the first cylindrical shell (531) and the second cylindrical shell (532) are arranged facing each other, the arc-shaped plate (534) extending from the first cylindrical shell (531) is placed in the second cylindrical shell (532), and the arc-shaped plate (534) extending from the second cylindrical shell (532) is placed in the first cylindrical shell (531), the arc-shaped plates (534) of the first cylindrical shell (531) and the second cylindrical shell (532) are symmetrically arranged in the circumferential direction, and a gap is provided in the circumferential direction between the arc-shaped plates (534) of the two cylindrical shells close to one end; The M flexible plates (533) are respectively arranged in the axial direction in the space formed by the arc-shaped plates (534) of the first cylindrical shell (531) and the second cylindrical shell (532), and the two ends of the M flexible plates (533) are respectively connected to the inner walls of the arc-shaped plates (534) of the first cylindrical shell (531) and the second cylindrical shell (532), and the M flexible plates (533) are arranged to cross each other on the radial plane projection of the first cylindrical shell (531); One end of the first cylindrical shell (531) serves as a connecting end and is connected to the free end of the flexible lever amplifying mechanism (2); one end of the second cylindrical shell (532) is correspondingly mounted with the first support platform (51) and the second support platform (52) through a mounting groove.

9. A fast reflector device according to claim 8, characterized in that: Said N=4; The four leaf spring flexible bearings (53) are divided into two groups, and the axes of the two groups of leaf spring flexible bearings (53) intersect vertically; The four connecting ends are respectively connected to the free ends of the four flexible lever amplifying mechanisms (2) through clamps (4).

10. The fast reflector device according to claim 9, characterized in that: The clamp (4) comprises a connecting plate (41) and an L-shaped plate (42) connected to one side of the connecting plate (41); The connecting plate (41) is connected to one end of the first cylindrical shell (531), and the L-shaped plate (42) is connected to the free end of the flexible lever amplification mechanism (2) through bolts; A circular hole (54) is provided at the center of each of the first supporting platform (51) and the second supporting platform (52) on a side away from each other.

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