Display method and substrate processing system

Abstract

The invention relates to a display method and a substrate processing system. A control unit of the film forming apparatus creates a processing content log comprising substrate processing information at a point in time at which film forming processing ends, assigns a time counted at the point in time at which the processing content log is created to the processing content log as a first time, and transmits the processing content log to a management server according to a first time interval. In addition, the control unit transmits a second time counted by the control device to the management server in accordance with a second time interval that is shorter than the first time interval. The management server receives the moving image file from the camera, and assigns to the moving image file the latest second time received from the control unit at the time when the reception of the moving image file has been completed. The information processing apparatus simultaneously displays substrate processing information of a processing content log managed by a management server and a moving image file to which a second timing closest to a first timing to which the processing content log is assigned.

Description

Technical Field

[0001] The invention relates to a display method and a substrate processing system. Background Art

[0002] A plasma processing device is known that performs plasma processing on a substrate placed on a mounting table. In the plasma processing device, a camera is used to capture the internal conditions of the plasma processing device (for example, refer to Patent Document 1). The camera captures the internal conditions of the plasma processing device, for example, from the start to the end of the plasma processing. The motion image file generated by the capture is stored in a management server different from the plasma processing device, and when the camera does not have a timing function, the generation time of the motion image file is assigned by the management server with a timing function. On the other hand, the plasma processing device generates a log file containing substrate processing information, which is obtained by recording parameters related to the plasma processing. The log file is also stored in the management server, but the generation time of the log file is assigned by the plasma processing device with a timing function.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2020-95379 Summary of the invention

[0006] Problem that the invention aims to solve

[0007] The technology disclosed herein enables corresponding moving image files and substrate processing information to be displayed on the same screen.

[0008] Solutions for solving problems

[0009] One mode of the technology involved in the present disclosure is a display method, which simultaneously displays information recorded accompanying processing of a substrate in a substrate processing system and a moving image obtained by photographing the processing from the beginning to the end of the processing, wherein the substrate processing system comprises: a substrate processing device, which has a control device and a processing container for performing the processing on the substrate inside; a photographing device, which photographs the interior of the processing container from an observation window of the processing container; a management server, which manages the moving image photographed and sent by the photographing device and the information sent from the substrate processing device; and a display device, wherein the control device performs the following processing: timing; performing the processing on the substrate based on a predetermined process recipe and acquiring processing status information of the interior of the processing container as the processing progresses along the timed moment; and A log file consisting of substrate processing information including at least the process flow and the processing status information is created at the time point of processing completion, and the moment counted at the time point of creating the log file is assigned to the log file as a first moment; the log file is sent to the management server according to a first time interval; and the moment counted in the control device is sent to the management server as a second moment according to a second time interval shorter than the first time interval, the management server receives the motion image from the photographic device, the management server assigns the latest second moment received from the control device at the time point of completing the reception of the motion image to the motion image, and the display device simultaneously displays the substrate processing information of the log file managed by the management server and the motion image assigned the second moment closest to the first moment assigned to the log file.

[0010] Effects of the Invention

[0011] According to the technology involved in the present disclosure, it is possible to display the corresponding moving image file and substrate processing information on the same screen. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a block diagram schematically showing the configuration of a substrate processing system according to one embodiment of the technology according to the present disclosure.

[0013] Figure 2 It is a schematic representation Figure 1 A cross-sectional view of the structure of a film-forming device.

[0014] Figure 3 This is a diagram for explaining the structure of the photographing device of this embodiment.

[0015] Figure 4 Is used to illustrate the Figure 3 FIG. 1 is an image of the interior of a processing container captured by a camera.

[0016] Figure 5 It is a schematic representation Figure 1 Block diagram of the hardware structure of the management server.

[0017] Figure 6 It is a schematic representation Figure 1 A block diagram of the hardware structure of an information processing device.

[0018] Figure 7 It is shown in Figure 1 A diagram of a process for a synthetic display control process performed in a substrate processing system.

[0019] Figure 8 It is shown in Figure 6 A diagram showing an example of a confirmation screen of a display unit.

[0020] Fig. 9 It is used to illustrate Figure 8 A diagram showing the linkage between the drag bar and the slider.

[0021] Fig.10 It is used to illustrate the Figure 8 This is a diagram showing the actions of the drag bar and the slider in the step selection section.

[0022] Fig.11 It is used to illustrate the composition Figure 8 A diagram of the functions of the toolbar's action buttons. DETAILED DESCRIPTION

[0023] The motion image file stored in the management server and the substrate processing information included in the log file are used, for example, when analyzing an abnormality generated in plasma processing. When performing such analysis, a structure that can easily perform the confirmation operation of the motion image file and the substrate processing information is required. As such a structure, it is discussed to display the corresponding motion image file and the substrate processing information on the same screen. In order to perform such display control, it is necessary to correspond the motion image files received from different devices and the substrate processing information in the management server, and it is discussed to use their generation time to perform the correspondence.

[0024] However, in the case where the device that assigns the generation time of the motion image file and the device that assigns the generation time of the log file are different, when the times of these devices are inconsistent with each other, the correspondence between the motion image file and the log file is not properly performed. As a result, the corresponding motion image file and the substrate processing information included in the log file cannot be displayed on the same screen.

[0025] In this regard, the technology involved in the present disclosure makes the corresponding moving image file and log file share the time measured by the control device of the substrate processing device as a reference, and uses the reference time to establish association between the corresponding moving image file and log file.

[0026] Hereinafter, one embodiment of the technology according to the present disclosure will be described with reference to the drawings.

[0027] Figure 1 1 is a block diagram schematically showing the structure of a substrate processing system 1 according to an embodiment of the technology involved in the present disclosure. Figure 1 In the embodiment, the substrate processing system 1 is composed of a film forming apparatus 10, a photographing device 22, a management server 50, and an information processing device 60. In the substrate processing system 1, the management server 50 stores and manages a log file composed of substrate processing information including parameters related to the film forming process performed on the substrate G inside the processing container 11 described later of the film forming apparatus 10. In addition, the management server 50 stores and manages a motion image file for reproducing a motion image obtained by photographing the inside of the processing container 11 of the film forming apparatus 10 by the photographing device 22. Furthermore, the information processing device 60 displays the motion image file and the log file managed by the management server 50 on a display unit 67 described later of the information processing device 60.

[0028] Figure 2 It is a schematic representation Figure 1 sectional view of the structure of the film forming device 10. Figure 2 The film forming device 10 is an inductively coupled plasma processing device (substrate processing device). The film forming device 10 uses plasma generated from a processing gas to perform a film forming process such as forming a protective film on a substrate, for example, a rectangular glass substrate G (hereinafter referred to as "substrate G") for FPD (Flat Panel Display).

[0029] The film forming apparatus 10 includes a processing container 11 in a square cylindrical shape made of a conductive material, and the processing container 11 accommodates a substrate G. In addition, in the present embodiment, for ease of description, the structure in which the film forming apparatus 10 includes one processing container 11 is described, but the film forming apparatus 10 may also be a structure including a plurality of other processing containers with the same structure as the processing container 11. The upper portion of the processing container 11 is airtightly blocked by a window member 12. Inside the processing container 11, a mounting table 13 for mounting the substrate G is arranged at the lower portion, and the mounting table 13 and the window member 12 face each other. In addition, in the processing container 11, a processing space U is formed between the mounting table 13 and the window member 12. In the processing space U, as described later, plasma is generated from a processing gas.

[0030] An electrostatic holding disk (not shown) is provided on the upper surface of the mounting table 13. The substrate G mounted on the mounting table 13 is held on the mounting table 13 by adsorption by the electrostatic holding disk. In addition, a temperature control mechanism such as a cooler and a heat transfer gas supply mechanism (both not shown) are provided inside the mounting table 13 to control the temperature of the mounted substrate G. In addition, the mounting table 13 is provided on the bottom surface of the processing container 11 via an insulating frame 14.

[0031] A metal frame 15 is provided at the upper end of the side wall of the processing container 11, and a side wall portion 16 is provided on the upper surface of the metal frame 15. The side wall portion 16 supports a top plate 17, and the top plate 17 covers the window member 12 from above. A sealing member 18 such as an O-ring is provided between the side wall of the processing container 11 and the metal frame 15 to keep the processing space U airtight.

[0032] A loading / unloading port 19 for loading / unloading the substrate G into and out of the processing space U and a gate valve 20 for opening and closing the loading / unloading port 19 are provided on one side wall of the processing container 11. In addition, a monitoring window 21 (observation window) formed by airtightly embedding an optically transparent member is provided on the other side wall of the processing container 11, and a photographing device 22 for monitoring the interior of the processing container 11 through the monitoring window 21 is provided outside the processing container 11. In addition, the photographing device 22 can be composed of a plurality of cameras. In this embodiment, as an example, Figure 3 As shown in the figure, it is assumed that the imaging device 22 is composed of two cameras 22a and 22b for imaging the interior of the processing container 11 from different angles.

[0033] The camera 22a photographs the interior of the processing container 11 through the monitoring window 21a, and the camera 22b photographs the interior of the processing container 11 through the monitoring window 21b set at a position different from the monitoring window 21a. In the present embodiment, the images photographed by the cameras 22a and 22b are not still images, but moving images. For example, the moving images photographed by the cameras 22a and 22b both contain information related to the state of the interior of the processing container 11 when the substrate G placed on the mounting table 13 is subjected to film forming processing. The cameras 22a and 22b respectively send a moving image file for reproducing the moving image of the interior of the processing container 11 photographed to the management server 50. In addition, in the present embodiment, the cameras 22a and 22b do not have a timing function and a time assigning function. Therefore, for the moving image files generated by the cameras 22a and 22b, their generation time is assigned by the management server 50 having the time assigning function, not by the cameras 22a and 22b that generate them.

[0034] The window member 12 is made of a conductor such as metal, has a rectangular shape, and is divided into a plurality of divided pieces 23. A partition member 24 made of an insulator is disposed between adjacent divided pieces 23. The partition member 24 partitions adjacent divided pieces 23 to electrically insulate them from each other.

[0035] In the film forming apparatus 10, the space surrounded by the window member 12, the side wall portion 16, and the top plate 17 constitutes an antenna chamber 25. In the antenna chamber 25, an inductive coupling antenna 26 is arranged so as to face the substrate G of the mounting table 13 across the window member 12. In addition, the inductive coupling antenna 26 is arranged as a whole across the region facing each of the divided pieces 23, and is formed in a spiral shape in a manner of surrounding along the circumferential direction of the window member 12, but the shape of the inductive coupling antenna 26 is not limited to the spiral shape.

[0036] A large number of gas holes 27 opening toward the processing space U are formed in each of the partition pieces 23. A gas supply pipe 28 is connected to each of the partition pieces 23, and the gas supply pipe 28 is connected to a gas supply device 29. In addition, a gas diffusion chamber 30 is formed inside each of the partition pieces 23, and the gas supply device 29 introduces a processing gas into the gas diffusion chamber 30 via the gas supply pipe 28. The processing gas introduced into the gas diffusion chamber 30 is supplied to the processing space U from each of the gas holes 27.

[0037] In addition, in the film forming device 10, the inductive coupling antenna 26 is connected to the high-frequency power supply 32 via the matching device 31. The high-frequency power supply 32 supplies the inductive coupling antenna 26 with a high-frequency power of, for example, 13.56 MHz for plasma generation. As a result, in each segment 23d constituting the window member 12, a surrounding eddy current is induced from the upper surface (the inductive coupling antenna 26 side) to the lower surface (the processing space U side), and an induced electric field is formed in the processing space U due to the eddy current. Moreover, the induced electric field excites the processing gas supplied to the processing space U to generate plasma. In addition, in the above-mentioned embodiment, the case where the window member 12 is composed of a conductor such as metal is described, but the window member 12 can also be composed of a dielectric. In this case, the electric field formed by the inductive coupling antenna 26 passes through the window member 12 and directly acts on the processing gas to generate plasma.

[0038] Furthermore, the stage 13 is connected to a high-frequency power source 34 via a matching device 33. The high-frequency power source 34 supplies, for example, 3.2 MHz high-frequency power for bias to the stage 13. Thus, it is possible to implement a film forming process in which various ions in the plasma of the processing space U are introduced into the substrate G to form various films on the substrate G. In addition, in the film forming apparatus 10, it is also possible to implement an etching process on the substrate G by introducing various ions into the substrate G. In this case, the film forming apparatus 10 functions as an etching apparatus.

[0039] Furthermore, in the film forming apparatus 10, an exhaust port 35 is formed on the bottom surface of the processing container 11. The exhaust port 35 is connected to an exhaust device 36 such as a turbomolecular pump or a dry pump. When performing the film forming process, the exhaust device 36 maintains the processing space U at a predetermined pressure lower than the atmospheric pressure. In addition, a control unit 37 is provided in the film forming apparatus 10. The control unit 37 is composed of a computer having at least a CPU and a memory, and a predetermined process procedure (program) for performing the film forming process is recorded in the memory. The process procedure is composed of a plurality of steps, and the process procedure, for example, includes information indicating the type of one or more processing gases supplied to the processing container 11 and information indicating the flow rate of the processing gas, information indicating one or two high-frequency powers supplied to the processing container 11, and information indicating the DC voltage applied to the electrostatic holding disk that holds the substrate G inside the processing container 11.

[0040] In addition, the control unit 37 has a clock function for generating a time and a timing function for timing a time. The control unit 37 obtains the processing state information inside the processing container 11 along with the progress of the film forming process along the timed time. The processing state information includes, for example, information indicating the pressure and temperature inside the processing container 11. In addition, the control unit 37 generates a log file consisting of substrate processing information, i.e., a processing content log, at the time point when the film forming process ends. The substrate processing information includes a process recipe, processing state information, and substrate identification information. The substrate identification information includes a substrate ID (identification code) for identifying the substrate G on which the film forming process is performed in the film forming device 10 and a PC (Process Chamber) number indicating the processing container 11 used to perform the film forming process. The control unit 37 assigns the time counted at the time point of generating the processing content log, i.e., the first time, to the processing content log, and sends the processing content log to the management server 50 at a predetermined first time interval. The first time interval is, for example, about 5 minutes to 1 hour. In addition, when the film forming apparatus 10 includes only one processing container 11 as in the present embodiment, the substrate identification information may include only the substrate ID without including the PC number.

[0041] In addition, the control unit 37 sends the time counted in the control unit 37 as the second time to the management server 50 according to the second time interval shorter than the first time interval. The second time interval is, for example, about 0.5 seconds to 1 second. The first time and the second time are both times generated by the clock of the control unit 37, but the first time has meaning by being assigned to the processing content log, and the second time has meaning by being sent to the management server 50.

[0042] Figure 4 (A) is used to illustrate the Figure 3FIG. 2 is an image of the interior of the processing container 11 captured by the camera 22a. Figure 4 (B) is used to illustrate the Figure 3 FIG. 2 is an image of the interior of the processing container 11 captured by the camera 22b. Figure 4 (A) Figure 4 (B) shows a captured image of one frame among a plurality of frames constituting a moving image captured by each of the cameras 22a and 22b.

[0043] As described above, the camera 22a captures the situation inside the processing container 11 through the monitoring window 21a, and specifically captures the situation of the film forming process performed on the substrate G from the start to the end thereof, thereby obtaining a video including the following: Figure 4 In addition, the camera 22b takes a picture of the interior of the processing container 11 through the monitoring window 21b set at a position different from the monitoring window 21a, and obtains a moving image of the photographic image (A). Figure 4 (B) The moving image of the photographic image. Figure 4 (A) photographic image and Figure 4 The photographic images of (B) respectively include the structural members inside the processing container 11, for example, the mounting table 13, and the substrate G mounted on the mounting table 13. Furthermore, the cameras 22a and 22b respectively send the moving image files for reproducing the moving images to the management server 50. The management server 50 stores the received moving image files and provides the moving image files to the information processing device 60 according to the request received from the information processing device 60.

[0044] Figure 5 It is a schematic representation Figure 1 A block diagram of the hardware structure of the management server 50. Figure 5 In the embodiment, the management server 50 includes a CPU 51 , a ROM 52 , a RAM 53 , a HDD 54 , a communication I / F 55 , and an input / output I / F 56 , which are connected via a system bus 57 so as to be able to communicate with each other.

[0045] The CPU 51 is a microprocessor that performs overall control of the management server 50. Specifically, the CPU 51 reads out programs stored in the ROM 52 and the HDD 54, and executes programs expanded on the RAM 53. The ROM 52 stores programs executed by the CPU 51. The RAM 53 is used as a main memory of the CPU 51, and is also used as an area for temporarily storing programs and data.

[0046] The HDD 54 stores programs and various data executed by the CPU 51. For example, the HDD 54 stores moving image files received from the camera 22a and the camera 22b, and processing content logs received from the control unit 37. In addition, in the present embodiment, the management server 50 is described as having a HDD as an example of a storage device, but the management server 50 may also have a storage device other than the HDD, such as an SSD.

[0047] The communication I / F 55 is an interface for the management server 50 to communicate with external devices. For example, the communication I / F 55 receives a moving image file from the imaging device 22. In addition, the communication I / F 55 receives the second time, the processing content log, etc. from the control unit 37. In addition, the communication performed by the communication I / F 55 is realized by various communication technologies regardless of wireless or wired. The input / output I / F 56 is connected to an output device such as a display that displays various information, and an input device for users such as a mouse and a keyboard.

[0048] Figure 6 It is a schematic representation Figure 1 The information processing device 60 is a block diagram of a hardware structure of an information processing device 60. The information processing device 60 is, for example, a personal computer. The information processing device 60 includes a CPU 61, a ROM 62, a RAM 63, a HDD 64, a communication I / F 65, and an input / output I / F 66, which are connected via a system bus 69 so as to be able to communicate with each other.

[0049] The CPU 61 is a microprocessor that controls the information processing device 60 in a unified manner. Specifically, the CPU 61 reads out programs stored in the ROM 62 and the HDD 64, and executes programs expanded on the RAM 63. The ROM 62 stores programs executed by the CPU 61. The RAM 63 is used as a main memory of the CPU 61, and is also used as an area for temporarily storing programs and data.

[0050] The HDD 64 stores programs and various data executed by the CPU 61. In the present embodiment, the information processing device 60 is described as including an HDD as an example of a storage device, but the information processing device 60 may include a storage device other than the HDD, such as an SSD.

[0051] The communication I / F 65 is an interface for the information processing device 60 to communicate with an external device. For example, the communication I / F 65 receives a moving image file and a processing content log from the management server 50. In addition, the communication performed by the communication I / F 65 is realized by various communication technologies regardless of wireless or wired. The input / output I / F 66 is connected to a display unit 67 such as a display that displays various information, and an operation unit 68 such as a mouse and a keyboard for users to use.

[0052] Next, description will be given of a combined display control process in which the management server 50 stores a moving image file and a process content log in the substrate processing system 1 and the information processing device 60 displays the moving image file and the process content log stored in the management server 50 on the display unit 67 .

[0053] Figure 7 It is shown in Figure 1 FIG. 1 is a diagram showing a process of a synthetic display control process performed in the substrate processing system 1 .

[0054] In the synthetic display control process, first, when the control unit 37 of the film forming device 10 receives a start instruction for the film forming process of the substrate G from the user, it sets the number of executions of the process recipe to "1" and issues a start instruction for the cameras 22a and 22b to start shooting. In addition, the control unit 37 starts the film forming process of the substrate G placed on the mounting table 13 of the processing container 11 based on the process recipe recorded in the memory of the control unit 37. When the film forming process starts, the control unit 37 starts to obtain the processing status information inside the processing container 11 along with the progress of the film forming process at the timed moment. The processing status information is obtained at a predetermined cycle, for example, a cycle of 100 msec. In addition, the control unit 37 sends the number of executions of the process recipe, the above-mentioned substrate identification information, and the second time of the timed moment to the management server 50 at a second time interval (S71). The second time received by the management server 50 is updated to the latest time. The management server 50 stores the received number of executions of the process recipe in correspondence with the substrate identification information. Furthermore, as described above, the second time interval is approximately 0.5 seconds to 1 second.

[0055] On the other hand, the cameras 22a and 22b that have received the shooting start instruction shoot the interior of the processing container 11 through the monitoring windows 21a and 21b, respectively (S72). The cameras 22a and 22b shoot moving images at a frame rate of, for example, 25 fps, and continue shooting until they receive the shooting end instruction sent from the control unit 37 when the film forming process is finished. That is, the cameras 22a and 22b shoot the interior of the processing container 11 from the start to the end of the film forming process.

[0056] When receiving the shooting end instruction from the control unit 37, the cameras 22a and 22b generate a moving image file for reproducing the captured moving image, and send the generated moving image file to the management server 50 (S73). In addition, as described above, the cameras 22a and 22b do not have a timing function, so the cameras 22a and 22b do not assign their generation time to these moving image files. In addition, during the creation and transmission of the moving image file, the second time is also sent from the control unit 37 to the management server 50 at the second time interval and updated.

[0057] When the management server 50 completes receiving the motion image file, it assigns the generation time to the received motion image file and stores it in the HDD 54. For example, the management server 50 assigns the latest second time received from the control unit 37 at the time when the reception of the motion image file sent from the camera 22a is completed to the motion image file as the generation time of the motion image file and stores it in the HDD 54 (S74). The motion image file sent from the camera 22b is also assigned the generation time and stored in the HDD 54. In this way, in this embodiment, the management server 50 assigns the generation time to the motion image files generated by the cameras 22a and 22b. And, the generation time assigned to them is not the time counted by the management server 50, but the time (second time) counted by the control unit 37 of the film forming device 10. In addition, even if the cameras 22a and 22b have their own timing functions, from the perspective of time deviation, it is preferable to re-assign the latest second time to the motion image file at the time when the motion image file is received in the management server 50.

[0058] On the other hand, when the film forming process is finished, the control unit 37 of the film forming device 10 generates a process content log consisting of substrate process information (S75). As described above, the control unit 37 assigns the first time counted at the time of generating the process content log to the process content log as the generation time of the process content log. The control unit 37 saves the generated process content log in, for example, the memory of the control unit 37. Thereafter, the control unit 37 performs the processes of S71 to S75 on the next substrate. In this way, a plurality of process content logs are saved in the memory of the control unit 37.

[0059] Next, the control unit 37 transmits the processing content log stored in the memory of the control unit 37 to the management server 50 at the first time interval (S76). As described above, the first time interval is about 5 minutes to 1 hour.

[0060] The management server 50 stores the received processing content log in the HDD 54 (S77). In addition, the number of executions of the process recipe and the substrate identification information sent from the control unit 37 in S71 are stored in correspondence in the HDD 54 of the management server 50. The management server 50 uses the substrate identification information and the substrate identification information included in the processing content log stored in S77 to correspond the number of executions of the process recipe and the processing content log.

[0061] After that, the management server 50 provides the motion image file and the processing content log corresponding to the request to the information processing device 60 according to the request received from the information processing device 60 (S78). For example, when the management server 50 receives a request for specifying a substrate ID representing the substrate G, it obtains from the HDD 54 two motion image files with different shooting angles and assigned a time (second time) closest to the generation time (first time) of the processing content log containing the substrate processing information containing the substrate ID. In addition, the management server 50 obtains from the HDD 54 the processing content log containing the substrate processing information containing the specified substrate ID. Then, the management server 50 provides the obtained processing content log and the two motion image files to the information processing device 60. That is, the management server 50 provides the processing content log containing the substrate processing information containing the specified substrate ID and the two motion image files assigned a time closest to the generation time of the processing content log as the generation time.

[0062] Afterwards, the information processing device 60 converts the received processing content log and the two moving image files into Figure 8 The confirmation screen 80 is displayed on the display unit 67 (S79).

[0063] Figure 8 It is shown in Figure 6 67. The confirmation screen 80 includes a first moving image display area 81, a second moving image display area 83, a substrate processing information display area 85, a substrate identification information display area 88, and a tool bar 89.

[0064] The first moving image display area 81 displays a moving image file received in S79, such as a moving image file created by the camera 22a, and a slide bar 82 for displaying the time of the frame displayed in the moving image file. The second moving image display area 83 displays a moving image file received in S79, such as a moving image file created by the camera 22b, and a slide bar 84 for displaying the time of the frame displayed in the moving image file. It can be set that a frame at any time is displayed in the first moving image display area 81 and the second moving image display area 83 by moving the slide bar 82 or the slide bar 84. For the movement of the slide bar 82 and the slide bar 84, a generally used method such as dragging and moving these slide bars on a touch panel or moving these slide bars by keyboard operation can be used. In addition, the time of the frame displayed in the first moving image display area 81 and the time of the frame displayed in the second moving image display area 83 are calculated based on the second time.

[0065] In the substrate processing information display area 85, at least a part of the data of the substrate processing information included in the processing content log received in S79 is displayed in the form of a time sequence diagram, and an indicator indicating the time of the displayed substrate processing information is provided in the time sequence diagram. Thus, the user can confirm the data included in the substrate processing information together with the moving image file for each time. In addition, the time of the substrate processing information is calculated based on the first time.

[0066] As an indicator indicating the time of the substrate processing information, for example, a drag bar 86 that can select an arbitrary time in the timing chart is displayed in the substrate processing information display area 85. Since the first time and the second time are both based on the time generated by the clock function of the control unit 37, the drag bar 86 based on the first time is linked to the slide bar 82 and the slide bar 84 based on the second time. The drag bar 86 is an example of a time selection unit.

[0067] For example, Fig. 9 As shown in (A), when the user moves the drag bar 86 to the position of 400 msec, the slide bar 82 and the slide bar 84 also move to the position of 400 msec in conjunction therewith. As a result, the first moving image display area 81 and the second moving image display area 83 respectively reproduce the moving image from the frame corresponding to 400 msec based on the moving image file received in S79.

[0068] In addition, if Fig. 9As shown in (B), when the user moves the drag bar 86 to the position of 700msec, the slide bar 82 and the slide bar 84 also move to the position of 700msec in conjunction therewith. In addition, in the present embodiment, the cameras 22a and 22b shoot at 25fps (40msec period), so the first motion image display area 81 and the second motion image display area 83 respectively reproduce the motion image from the frame corresponding to 680msec closest to 700msec based on the motion image file received in S79. By providing such a drag bar 86, the user can check the data of the desired moment in the substrate processing information together with the image of the desired moment in the motion image file. In addition, for the movement of the drag bar 86, a generally used method such as dragging the drag bar 86 on the touch panel or moving the drag bar 86 by keyboard operation can be used.

[0069] In addition, a step selection section 87 for selecting any one of the multiple steps in the process is displayed in the substrate processing information display area 85. For example, when the user selects "Step-2" in the step selection section 87, Fig.10 As shown, the drag bar 86 moves to the position of 12 seconds, which is the start time of "Step-2". In addition, the slide bar 82 and the slide bar 84 are linked with the drag bar 86 and also move to the position of 12 seconds. As a result, the first moving image display area 81 and the second moving image display area 83 respectively reproduce the moving image from the frame corresponding to 12 seconds based on the moving image file received in S79. By providing such a step selection unit 87, the user can confirm the data contained in the processing content log together with the moving image file for each step. The step selection unit 87 is an example of a time selection unit.

[0070] The substrate identification information display area 88 displays the substrate identification information included in the processing content log received in S79. The tool bar 89 has Fig.11 The one-step-backward button 90 and the one-step-forward button 91 shown in (A) Fig.11 The reverse 10 sec button 92 and the forward 10 sec button 93 shown in (B) Fig.11 (C) shows a plurality of operation buttons such as a repeat start button 94 and a repeat end button 95. The one-step backward button 90 and the one-step forward button 91, the 10-second backward button 92 and the 10-second forward button 93, the repeat start button 94 and the repeat end button 95 are examples of time selection means.

[0071] For example, when the user presses the stop button 96 to stop the moving image and sets it to a still image, and selects the one-frame rewind button 90, a frame one frame rewinding from the stopped still image is displayed in the first moving image display area 81 and the second moving image display area 83. In addition, when the user selects the one-frame forward button 91, a frame one frame forward from the stopped still image is displayed in the first moving image display area 81 and the second moving image display area 83.

[0072] In addition, when the user selects the rewind 10 sec button 92, the first moving image display area 81 and the second moving image display area 83 respectively reproduce the moving image from the frame rewinding 10 sec based on the moving image file received in S79. In addition, when the user selects the forward 10 sec button 93, the first moving image display area 81 and the second moving image display area 83 respectively reproduce the moving image from the frame forwarding 10 sec based on the moving image file received in S79. In addition, when the rewind 10 sec button 92 or the forward 10 sec button 93 is selected after the stop button 96 is pressed to set the still image, the frame rewinding 10 sec or the frame forwarding 10 sec from the stopped still image is displayed respectively.

[0073] In addition, when the user specifies a time range using the repeat start button 94 and the repeat end button 95, the first moving image display area 81 and the second moving image display area 83 respectively repeatedly reproduce the moving image in the specified time range based on the moving image file received in S79. By providing such a repeat start button 94 and a repeat end button 95, the user can easily identify the time when a specific phenomenon occurs.

[0074] As described above, according to the present embodiment, the control unit 37 creates a processing content log consisting of substrate processing information including process steps and processing status information at the time point when the film forming process is completed, and assigns the first moment counted at the time point when the processing content log is created to the processing content log, and sends the processing content log to the management server 50 according to the first time interval. In addition, the control unit 37 sends the second moment counted to the management server 50 at a second time interval shorter than the first time interval. The management server 50 receives the motion image file from the cameras 22a and 22b, respectively, and assigns the latest second moment received from the control unit 37 at the time point when the reception of the motion image file is completed to the motion image file. The information processing device 60 simultaneously displays the substrate processing information of the processing content log managed by the management server 50 and the motion image file assigned the second moment closest to the first moment assigned to the processing content log. That is, the substrate processing information and the motion image file are both associated using the first moment and the second moment counted by the control unit 37. Thus, even if the reference times of the film forming apparatus 10 and the management server 50 do not coincide, the moving image file and the processing content log can be accurately associated with each other, so that the corresponding moving image file and substrate processing information can be displayed on the same screen.

[0075] In addition, in the present embodiment, the processing state information includes at least information indicating the pressure inside the processing container 11, and the process recipe includes at least information indicating the type of one or more processing gases supplied to the processing container 11 and information indicating the flow rate of the processing gases, information indicating one or two high-frequency powers supplied to the processing container 11, and information indicating the DC voltage applied to the electrostatic holding disk holding the substrate G inside the processing container 11. Thus, the moving image file and these information can be displayed on the same screen, so that the user can easily check the processing state by combining the moving image file with these information.

[0076] In addition, in this embodiment, the motion image files received by the management server 50 from the cameras 22a and 22b are motion image files created by the cameras 22a and 22b through shooting from the start to the end of the processing. Thus, the motion image files created by the cameras 22a and 22b can be displayed on the same screen in correspondence with the processing content log.

[0077] In this embodiment, the imaging device 22 is composed of at least a camera 22a for imaging the interior of the processing container 11 and a camera 22b for imaging the interior of the processing container 11 from an angle different from that of the camera 22a. Thus, the user can check the interior of the processing container 11 from multiple viewpoints.

[0078] In addition, in the present embodiment, substrate processing information and a motion image file are displayed simultaneously. The substrate processing information is information in a processing content log managed by the management server 50 and includes a substrate ID specified by a user. The motion image file is assigned a second time closest to a first time assigned to the processing content log including the substrate processing information. Thus, the user can easily understand which substrate the displayed motion image file and substrate processing information are associated with.

[0079] As mentioned above, although the preferred embodiment of this disclosure was described, this disclosure is not limited to the above-mentioned embodiment, and various deformation|transformation and changes are possible within the range of the summary.

[0080] For example, the management server 50 may not be a physical server, but may be a cloud server that can utilize one or more virtualized servers via the Internet.

[0081] In addition, the management server 50 may also be composed of a first server for storing motion image files and a second server for managing information indicating a storage destination of the motion image files. Even in such a configuration where motion image files are managed by a plurality of servers, the corresponding motion image files and substrate processing information can be displayed on the same screen.

[0082] In addition, in the above-mentioned embodiment, the structure in which the photographing device 22 generates a motion image file and sends the motion image file to the management server 50 is described, but it is not limited to this structure. For example, it can also be the following structure: the photographing device 22 sends the captured motion image to the management server 50 in real time, and the management server 50 generates a motion image file for reproducing the received motion image. Even in such a structure, the management server 50 will assign the latest second moment received from the control unit 37 at the time point when the reception of the motion image is completed to the motion image file for reproducing the motion image. That is, even in this case, the substrate processing information and the motion image file can be associated with each other using the first moment and the second moment timed by the control unit 37. Therefore, even in the structure in which the motion image file is generated by the management server 50, the corresponding motion image file and the substrate processing information can be displayed on the same screen.

[0083] In addition, in the above-mentioned embodiment, a processing device for performing film forming processing on a rectangular substrate, especially a glass substrate, is described, but it is not limited to this. In addition to being rectangular, the substrate may also be in other shapes such as a circle. In addition, in addition to being a glass substrate, it may also be a substrate of other materials such as a silicon (Si) wafer and a silicon carbide (SiC) wafer. In accordance with this, in addition to being set to the above-mentioned square cylindrical shape, the processing container can also be set to a cylindrical shape or other shapes corresponding to the substrate to be processed. The processing device is not limited to a film forming device, and may also be an etching device, an ashing device, or other device that performs other processing on the substrate. In addition, in addition to the above-mentioned inductively coupled plasma device, the processing device may also be a plasma processing device based on other methods such as a capacitively coupled plasma device and a microwave plasma device, and may also be a device that does not use plasma.

[0084] Description of Reference Numerals

[0085] 1: substrate processing system; 10: film forming device; 22: photographing device; 22a: camera; 22b: camera; 37: control unit; 50: management server; 51: CPU; 54: HDD; 60: information processing device; 61: CPU; 67: display unit; 80: confirmation screen; 81: first motion image display area; 83: second motion image display area; 85: substrate processing information display area; 86: drag bar; 87: step selection unit; 88: substrate identification information display area; 94: repeat start button; 95: repeat end button.

Claims

1. A display method for simultaneously displaying information recorded accompanying processing of a substrate in a substrate processing system and a moving image obtained by photographing the processing from the start to the end of the processing, wherein: The substrate processing system comprises: A substrate processing device including a control device and a processing container for performing the processing on the substrate; A photographing device for photographing the interior of the processing container from an observation window of the processing container; a management server that manages the moving image captured and transmitted by the imaging device and the information transmitted from the substrate processing device; and display device, The control device performs the following processing: To time the moments; performing the processing on the substrate based on a predetermined process recipe, and acquiring processing state information inside the processing container along with the progress of the processing along the timed moments; Creating a log file including substrate processing information including at least the process recipe and the processing status information at a time point when the processing is finished, and assigning a time counted at the time point when the log file is created as a first time point to the log file; Sending the log file to the management server according to a first time interval; as well as sending the time measured in the control device as a second time to the management server according to a second time interval shorter than the first time interval, The management server receives the moving image from the photographing device, The management server assigns the latest second time received from the control device at the time when the reception of the moving image is completed to the moving image, The display device simultaneously displays the substrate processing information of the log file managed by the management server and a moving image assigned the second time closest to the first time assigned to the log file.

2. The display method according to claim 1, wherein: The processing state information includes at least information indicating the pressure inside the processing container. The process flow chart includes at least information indicating the type of one or more gases supplied to the processing container and information indicating the flow rate of the gases, information indicating one or two high-frequency powers supplied to the processing container, and information indicating a DC voltage applied to an electrostatic holding disk that holds the substrate inside the processing container.

3. The display method according to claim 1, wherein: The moving image received by the management server from the imaging device is a moving image file created by the imaging device through imaging from the start to the end of the process.

4. The display method according to claim 3, wherein: The photographing device is composed of at least a first camera for photographing the interior of the processing container and a second camera for photographing the interior of the processing container from an angle different from that of the first camera, and the first camera and the second camera respectively create the moving image file.

5. The display method according to claim 1, wherein: The display device displays at least a portion of the data included in the log file together with the moving image in the form of a time series graph, and an indicator indicating time is provided in the time series graph.

6. The display method according to claim 5, wherein: The display device displays a time selection unit for selecting an arbitrary time within a range of execution times of the process included in the log file.

7. The display method according to claim 6, wherein: The time selection unit is an index indicating the time.

8. The display method according to claim 6, wherein: The process recipe is composed of a plurality of steps, and the timing selection unit is a step specifying unit that specifies any one of the plurality of steps.

9. The display method according to claim 6, wherein: The time selection unit can specify any range of execution time. In the display device, the movement of the pointer within the range of the designated arbitrary execution time is repeatedly displayed in conjunction with the moving image.

10. The display method according to claim 1, wherein: The substrate processing information further includes an identification code of the substrate. The display device simultaneously displays the substrate processing information and the motion image, wherein the substrate processing information is information in a log file managed by the management server and includes an identification code of a substrate specified by a user, and the motion image is assigned the second time closest to the first time assigned to the log file including the substrate processing information.

11. The display method according to claim 1, wherein: The management server is composed of a first server that stores the moving image and a second server that manages information indicating a storage location of the moving image.

12. A substrate processing system that simultaneously displays information recorded accompanying processing of a substrate and a moving image obtained by photographing the processing from the start to the end of the processing, the substrate processing system comprising: A substrate processing device including a control device and a processing container for performing the processing on the substrate; A photographing device for photographing the interior of the processing container from an observation window of the processing container; a management server that manages the moving image captured and transmitted by the imaging device and the information transmitted from the substrate processing device; and display device, The control device performs the following processing: To time the moments; performing the processing on the substrate based on a predetermined process recipe, and acquiring processing state information inside the processing container along with the progress of the processing along the timed moments; Creating a log file including substrate processing information including at least the process recipe and the processing status information at a time point when the processing is finished, and assigning a time counted at the time point when the log file is created as a first time point to the log file; sending the log file to the management server according to a first time interval; and sending the time measured in the control device as a second time to the management server according to a second time interval shorter than the first time interval, The management server receives the moving image from the photographing device, The management server assigns the latest second time received from the control device at the time when the reception of the moving image is completed to the moving image, The display device simultaneously displays the substrate processing information of the log file managed by the management server and a moving image to which the second time closest to the first time assigned to the log file is assigned.

13. The substrate processing system according to claim 12, wherein: The display device displays a time selection unit for selecting an arbitrary time within a range of execution times of the process included in the log file.

Images