Machining equipment

Abstract

The embodiment of the invention relates to machining equipment. A processing apparatus includes: a work unit including a first end and a second end; the first operation unit comprises a first cover part, and the first cover part is used for being connected with the first end of the working unit; the second operation unit comprises a second cover part, the second cover part is used for being connected with the second end of the working unit, and the second operation unit can move in multiple directions so as to be coupled with or separated from the first operation unit. The processing equipment provided by the embodiment of the invention can effectively solve the problems encountered in the prior art.

Description

Technical Field

[0001] The present application relates to the field of machinery, and more specifically, to a processing device. Background Art

[0002] With the rapid development of science and technology, the demand for processing equipment in the fields of materials science, electronic engineering, optical manufacturing, etc. is increasing. At present, some processing equipment is not easy to move due to its large size and heavy weight. In addition, the objects to be processed are usually placed in the working unit of the processing equipment. The replacement or maintenance of the working unit or the objects to be processed will affect the work efficiency of the operator and even affect the performance of the processing equipment, thereby affecting the process effect. On the other hand, some related processes require repeated, fast and accurate positioning between parts.

[0003] Therefore, existing processing equipment needs to be further improved. Summary of the invention

[0004] One of the purposes of the present application is to provide a processing device to solve at least one problem existing in the prior art.

[0005] According to a first aspect of the present application, a processing device includes: a working unit, which includes a first end and a second end; a first operating unit, which includes a first cover component, and the first cover component is used to connect to the first end of the working unit; a second operating unit, which includes a second cover component, and the second cover component is used to connect to the second end of the working unit, wherein the second operating unit can be moved in multiple directions to couple or separate from the first operating unit.

[0006] In some embodiments, the working unit is a reaction chamber. The reaction chamber may include a quartz tube.

[0007] In some embodiments, the second operating unit further includes an air extraction device for adjusting the pressure inside the working unit.

[0008] In some embodiments, the first operating unit further comprises a first pipeline for conveying the first workpiece to the working unit through the first cover member. The first workpiece may comprise excited gas.

[0009] In some embodiments, the second operating unit further comprises a second pipe for outputting the second workpiece from the working unit through the second cover member. The second pipe may comprise a shock absorbing portion.

[0010] In some embodiments, the second operating unit further comprises a first support member, the lower end of which is located on the first plane P1, and the upper end of which is provided with a plurality of pillars for supporting the second cover member. The pillars may comprise a shaft core and a removable sleeve covering the outer periphery of the shaft core.

[0011] In some embodiments, the second operating unit is coupled to or separated from the working unit or the first operating unit through a lifting device. The lifting device includes a support member for fixing the position of the second operating unit.

[0012] In some embodiments, the first operating unit includes one or more plasma generating devices to provide the required working materials for the working unit.

[0013] In some embodiments, the second operating unit may be coupled to or separated from the first operating unit via a second sliding device.

[0014] In some embodiments, when the second operating unit is separated from the first operating unit, the second cover component of the second operating unit is separated from the second end of the working unit, and the first cover component of the first operating unit is sealed and connected to the first end of the working unit.

[0015] In some embodiments, when the second operating unit is separated from the first operating unit, the first cover component of the first operating unit is separated from the working unit, and the second cover component of the second operating unit is sealed and connected to the second end of the working unit.

[0016] According to a second aspect of the present application, a processing device includes: a working unit, which includes a first end and a second end; a first operating unit, which includes a first cover component, and the first cover component is used to connect to the first end of the reaction chamber; a second operating unit, which includes: a second cover component, and the second cover component is used to connect to the second end of the working unit; a first support member, whose lower end is located in a first plane, and a plurality of pillars for supporting the second cover member are installed on the upper end.

[0017] According to a third aspect of the present application, a processing device includes: a working unit, which includes a first end and a second end; a first operating unit, which includes a first cover component, and the first cover component is used to connect to the first end of the working unit; a second operating unit, which includes a second cover component, and the second cover component is used to connect to the second end of the working unit, wherein the first operating unit includes one or more plasma generating devices for providing excited gas to the working unit.

[0018] The processing equipment proposed in the present application realizes processing of the working unit by moving the operating unit, is simple to operate, easy to assemble, and convenient for maintenance or replacement of the working unit or the object to be processed. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figures 1A-1C This is a schematic diagram of processing equipment according to some embodiments of the present application.

[0020] Figure 2 Schematic diagram of processing equipment according to other embodiments of the present application.

[0021] Figure 3Schematic diagram of processing equipment according to other embodiments of the present application.

[0022] Figure 4A Schematic diagram of the support 240 according to some embodiments of the present application.

[0023] Figure 4B It is a cross-sectional view of the second cover member 210 and the support column 240 after being installed.

[0024] Figure 5 Schematic diagram of processing equipment according to some further embodiments of the present application. DETAILED DESCRIPTION

[0025] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0026] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.

[0027] Embodiments of the present application will be described in detail below. Throughout the present application specification, as used herein, the terms "roughly", "substantially", "substantially" and "approximately" are used to describe and illustrate small changes. When used in conjunction with an event or situation, the term may refer to an example in which an event or situation occurs precisely and an example in which an event or situation occurs very approximately. For example, when used in conjunction with a numerical value, the term may refer to a range of variation of less than or equal to ±10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. For example, two values ​​may be considered “substantially” the same if the difference between them is less than or equal to ±10% of the average of the values ​​(e.g., less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%).

[0028] In this specification, unless otherwise specified or limited, relative terms such as "central", "longitudinal", "lateral", "front", "rear", "right", "left", "inner", "outer", "lower", "higher", "horizontal", "vertical", "above", "below", "above", "below", "top", "bottom" and their derivative terms (such as "horizontally", "downwardly", "upwardly", etc.) should be interpreted as referring to the directions described in the discussion or depicted in the drawings. These relative terms are only used for convenience of description and do not require that the present application be constructed or operated in a specific direction.

[0029] In addition, sometimes amounts, ratios and other numerical values ​​are presented in range format herein. It should be understood that such range format is for convenience and brevity, and should be flexibly understood to include not only the numerical values ​​explicitly specified as range limits, but also all individual numerical values ​​or sub-ranges encompassed within the range, as if each numerical value and sub-range were explicitly specified.

[0030] Furthermore, for ease of description, “first”, “second”, “third”, etc. may be used herein to distinguish different components in one figure or a series of figures. “First”, “second”, “third”, etc. are not intended to describe the corresponding components.

[0031] In the embodiments of the present application, unless otherwise specified or limited, the terms "set", "connected", "coupled", "fixed" and similar terms are used broadly, and those skilled in the art may understand that the above terms may be, for example, fixed connection, detachable connection or integrated connection according to the specific circumstances; it may also be a mechanical connection or an electrical connection; it may also be a direct connection or an indirect connection through an intermediate structure; it may also be internal communication between two components.

[0032] Figures 1A-1C This is a schematic diagram of processing equipment according to some embodiments of the present application.

[0033] like Figures 1A-1C As shown, the processing equipment provided in some embodiments of the present application includes a working unit 301, which includes a first end 310 and a second end 320; a first operating unit 101, which includes a first cover part 110 for connecting to the first end 310 of the working unit 301; a second operating unit 201, which includes a second cover part 210 for connecting to the second end 320 of the working unit 301, wherein the second operating unit 201 can be moved in multiple directions to couple or separate from the first operating unit 101.

[0034] The term “coupled” in the present application may be understood as one element / component / unit being directly or indirectly connected to another element / component / unit, or the two being directly or indirectly connected.

[0035] The processing equipment may include vacuum or low-pressure processing equipment, such as semiconductor processing equipment used for coating, etching, etc. The working unit may be a reaction chamber, in which an object to be processed (not shown) may be placed.

[0036] The second operating unit 201 can move in multiple directions to couple or separate from the first operating unit 101, so as to facilitate processing of the working unit 301, such as replacing or maintaining the working unit, or processing of the object to be processed in the working unit, such as replacing or maintaining the object to be processed, and making replacement or maintenance more convenient.

[0037] According to some embodiments of the present application, the reaction chamber may include a quartz tube, in which a substrate to be processed may be placed, and multiple substrates may be loaded into the reaction chamber via a carrier to facilitate placing the substrates in the reaction chamber or taking them out of the reaction chamber.

[0038] like Figure 1B As shown, the second operating unit 201 can reciprocate in the first direction d1 to couple or separate with the first operating unit 101, and can also reciprocate in the second direction d2 to move away from the first operating unit 101, so that the object to be processed inside the working unit can be operated through the first end 310 of the working unit 301, such as replacement or maintenance.

[0039] like Figure 1C As shown, the second operating unit 201 can reciprocate in the first direction d1 to couple or separate with the first operating unit 101, and can also reciprocate in the second direction d2 to move away from the working unit 301, so as to operate the object to be processed inside the working unit through the second end 320 of the working unit 301, such as replacement or maintenance.

[0040] Both ends of the reaction chamber (such as Figure 1B and Figure 1C The first end 310 and the second end 320 in the substrate can be connected to the operating unit to input or discharge the workpiece acting on the substrate. According to the processing requirements, the working unit can be sealed and connected to the operating unit, for example, the two ends of the working unit can be sealed and connected to the operating unit through the cover component.

[0041] like Figure 1B and Figure 1C As shown, when the second operating unit 201 is separated from the first operating unit 101 , the first cover member 110 of the first operating unit 101 is separated from the working unit 301 , and the second cover member 210 of the second operating unit 201 is sealed and connected to the second end 320 of the working unit 301 .

[0042] When the second operating unit 201 is separated from the first operating unit 101 , the second cover member 210 of the second operating unit 201 is separated from the second end 320 of the working unit 301 , and the first cover member 110 of the first operating unit 101 is sealed and connected to the first end 310 of the working unit 301 .

[0043] Generally, the operating units connected to the working units in the processing equipment are all set to be fixed, and the inside of the working unit is processed by directly opening or closing the working unit. However, this operation increases the opening of the working unit, affecting the processing effect. In contrast, the processing equipment proposed in this application can couple or separate the second operating unit with the first operating unit by moving it, for example, by coupling or separating the working unit and the cover part of the operating unit, and then the object to be processed can be processed through at least one end of the working unit, or the working unit can be directly processed.

[0044] According to some embodiments of the present application, the second operating unit may further include a vacuum device for adjusting the pressure inside the working unit. For example, the working unit and / or the first operating unit may be evacuated. The vacuum device may include one or more vacuum pumps (or vacuum pump groups). Multiple vacuum pumps can promote rapid exhaust and can perform exhaust within a larger pressure range to cope with different pressure fluctuations in the reaction chamber.

[0045] The processing equipment proposed in this application may include vacuum coating equipment. As the cornerstone of high-end manufacturing, the vacuum coating equipment industry has ushered in rapid development with the rise of industries such as semiconductors, new energy, and electronic components. However, the vacuum pump group in traditional processing equipment is heavy and large in size, and cannot be moved, which is not convenient for the operation or maintenance of the processing equipment.

[0046] According to some embodiments of the present application, the reaction chamber can be used to generate a chemical reaction, and gas can be introduced into the reaction chamber to generate a desired chemical reaction, thereby acting on the object to be processed in the reaction chamber to achieve the processing purpose. When the object to be processed is a substrate, the reaction chamber can be configured as a cylindrical quartz tube to evenly distribute the gas in the reaction chamber.

[0047] Figure 2 Schematic diagram of processing equipment according to other embodiments of the present application.

[0048] like Figure 2 As shown, the first operating unit 101 may include a first pipe 120 for conveying a first workpiece to the working unit 301 through the first cover member 110. The first workpiece may include an excited gas, a carrier gas, etc., such as plasma. The second operating unit 201 also includes a second pipe 220 for outputting a second workpiece from the working unit 301 through the second cover member 210. The second workpiece can be discharged from the working unit through the second pipe.

[0049] To avoid vibration or prevent the working unit from being damaged or vacuum leaking, a shock absorber 221 may be provided in the second pipe 220 . The shock absorber may be a flexible pipe, such as a spring-shaped pipe, and may be provided between the air extraction device 500 and the second cover member 210 .

[0050] When the second operating unit is working, a certain vibration will be generated, thereby causing the vibration of the working unit. The vibration of the working unit can be further reduced by arranging a shock-absorbing component.

[0051] Figure 3 Schematic diagram of processing equipment according to other embodiments of the present application.

[0052] like Figure 3 As shown, the second operating unit 201 may further include a first support member 230, the lower end of which is located on the first substrate, the first substrate may be arranged on the first plane P1, and a plurality of pillars 240 for supporting the second cover member 210 are arranged on the upper end of the first support member 230. The second cover member may be positioned in the first direction d1 by the first support member, and the first direction d1 may be a vertical direction.

[0053] A second substrate may be disposed between the second cover member 210 and the first substrate to further position and fix the second pipe 220 . The second substrate may be located on a second plane P2 , and the second plane P2 may be substantially parallel to the first plane P1 .

[0054] According to some embodiments of the present application, the support 240 may include a shaft core 241 and a removable sleeve 242 covering the outer periphery of the shaft core 241. After the second cover component is fixedly installed with the first support member, the second cover component 210 and the shaft core 241 can be separated by moving or removing the sleeve 242, thereby preventing the second cover component from being affected by the vibration of the first support member.

[0055] Figure 4A Schematic diagram of the support 240 according to some embodiments of the present application.

[0056] Figure 4B It is a cross-sectional view of the second cover member 210 and the support column 240 after being installed.

[0057] Figure 4B The dotted line portion in FIG. 2 illustrates that the sleeve 242 is movable or removable, so that the shaft core 241 is separated from the second cover member 210 .

[0058] It should be understood that in addition to the effects of shock isolation and damping, the support 240 can also achieve the technical effects of heat insulation or insulation. Of course, other buffer materials can also be filled in the gap between the shaft core and the second cover component after the shaft sleeve is removed to achieve the effects of shock isolation, heat insulation and insulation.

[0059] Figure 5Schematic diagram of processing equipment according to some further embodiments of the present application.

[0060] According to some embodiments of the present application, Figure 5 As shown, the second operating unit 201 can be coupled or separated with the working unit 301 or the first operating unit 101 through the lifting device 400. The lifting device 400 may include a jack, a screw rod, etc. Figure 5 The two jacks 420.

[0061] According to some embodiments of the present application, the lifting device 400 may include a second support member 410 for further fixing the position of the second operating unit 201 and preventing the lifting device from descending. The second support member may be a stopper (angle brace, foot cup), or the angle brace may be placed on a base with a larger surface area to increase the force area between the second support member and the support surface P0.

[0062] According to some other embodiments of the present application, the first operating unit 101 may include one or more plasma generating devices to provide the required work materials for the working unit.

[0063] The plasma generator can be coupled to or separated from the first cover member through the first sliding device. The plasma generator can be coupled to the slide rail through the slidable member to achieve reciprocating movement in the target direction, and further achieve precise positioning with the target unit. Each plasma generator can be constrained to one degree of freedom, and multiple plasma generators can be arranged point-symmetrically and evenly arranged, which is convenient for rapid, reciprocating movement, precise positioning, and easy to control the time when the workpiece enters the work unit, thereby realizing various modes of processing technology, such as using multiple plasma generators simultaneously, in sequence, and cross-using.

[0064] In addition, when switching the processing technology, the plasma generating device may need to be replaced. Through the first sliding device, the precise positioning of the plasma generating device and the coupling with the target unit can be simply achieved, thereby facilitating the rapid switching of other plasma generating devices and improving work efficiency.

[0065] According to other embodiments of the present application, the second operating unit can be coupled or separated from the first operating unit by a second sliding device. For example, when the second operating unit is inconvenient to move because the vacuum device is too heavy, the second sliding device can be provided to facilitate the movement of the second operating unit.

[0066] For example, the second operating unit may be placed on a base (the base may be located on the first plane P1), a slidable component may be provided on the base to couple with a slide rail provided on the ground, and the direction and shape of the slide rail may be provided as required to facilitate the reciprocating sliding of the second operating unit in a required direction, thereby achieving accurate positioning of the second operating unit, for example Figure 1B and1C The second direction d2 shown in FIG. 1 may be a horizontal direction.

[0067] When the object to be processed in the working unit needs to be processed (for example, replaced or maintained), the second operating unit can be separated from the first operating unit in the first direction by the lifting device, so that one end of the working unit is separated from the corresponding cover component, and then moved in the second direction by the sliding device to a position away from the first operating unit, so that the operator can process the object to be processed through this end of the working unit.

[0068] When the processed working unit needs to be installed again, the second operating unit can be moved to the target position (for example, the cover component of the second operating unit is aligned with the corresponding end of the working unit in the first direction) by the sliding device to achieve fast and accurate positioning of the second operating unit, and the second cover component of the second operating unit is connected to the second end of the working unit by the lifting device.

[0069] The aforementioned processing equipment proposed in the present application realizes processing of the working unit by moving the operating unit, is simple to operate, easy to assemble, and convenient for maintenance or replacement of the working unit or the object to be processed.

[0070] Some other embodiments of the present application provide a processing equipment including: a working unit including a first end and a second end; a first operating unit including a first cover component, the first cover component is used to connect to the first end of the reaction chamber; a second operating unit including: a second cover component, the second cover component is used to connect to the second end of the working unit; a first support member, the lower end of which is located in the first plane, and the upper end is provided with a plurality of pillars for supporting the second cover member.

[0071] The first workpiece can enter the working unit from the first operating unit, and the second workpiece (such as residual gas) in the working unit can be discharged from the second operating unit. For example, the reaction gas can enter the working unit from the first operating unit to act on the object to be processed (such as a substrate), thereby realizing processes such as coating and etching on the object to be processed, and the residual gas can be discharged from the second operating unit.

[0072] The support member can be used to maintain the stability of the cover member. The second cover member can be placed horizontally with the first plane through the first support member, and can also be used to support the second cover member to achieve the positioning of the second cover member in the first direction, which can be a vertical direction.

[0073] According to some embodiments of the present application, the first operating unit may include a first pipeline for conveying a first workpiece to the working unit through a first cover member. The first workpiece may include an excited gas (such as plasma). The second operating unit also includes a second pipeline for outputting a second workpiece from the working unit through a second cover member. The second workpiece may be discharged from the working unit through the second pipeline.

[0074] To avoid vibration or prevent the reaction unit from being damaged, a shock absorbing part may be provided on the second pipe. The shock absorbing part may be a flexible pipe, such as a spring-shaped pipe, and may be provided between the air extraction device and the second cover member.

[0075] When the second operating unit is working, a certain vibration will be generated, thereby causing the vibration of the working unit. The vibration of the working unit can be further reduced by arranging a shock-absorbing component.

[0076] A second substrate may be arranged between the second cover component and the first substrate to further position and fix the second pipe. The second substrate may be located on a second plane, and the second plane may be substantially parallel to the first plane.

[0077] In some embodiments of the present application, the support may include an axis core and a removable sleeve covering the outer periphery of the axis core. After the second cover component is fixedly installed with the first support member, the second cover component and the axis core can be separated by moving or removing the sleeve, thereby preventing the second cover component from being affected by the vibration of the first support member.

[0078] It should be understood that in addition to the effects of shock isolation and damping, the support can also achieve the technical effects of heat insulation or insulation. Of course, other buffer materials can also be filled in the gap between the shaft core and the second cover component after the shaft sleeve is removed to achieve the effects of shock isolation, heat insulation and insulation.

[0079] Some further embodiments of the present application provide a processing equipment comprising: a working unit comprising a first end and a second end; a first operating unit comprising a first cover component, the first cover component being used to connect to the first end of the working unit; a second operating unit comprising a second cover component, the second cover component being used to connect to the second end of the working unit, wherein the first operating unit comprises one or more plasma generating devices for providing excited gas to the working unit.

[0080] The excited gas can enter the working unit from the first operating unit, and the residual gas in the working unit can be exhausted by the second operating unit. For example, the reaction gas can enter the working unit from the first operating unit to act on the object to be processed (such as a substrate), thereby realizing processes such as coating and etching on the object to be processed, and the residual gas can be exhausted by the second operating unit.

[0081] The plasma generator can be coupled to or separated from the first cover member through a sliding device. The plasma generator can be coupled to the slide rail through a slidable member to achieve reciprocating movement in the target direction, and further achieve precise positioning with the target unit. Each plasma generator can be constrained to one degree of freedom, and multiple plasma generators can be arranged point-symmetrically and evenly arranged, which is convenient for fast and precise positioning, and is easy to control the time when the workpiece enters the work unit, thereby realizing various modes of processing technology, such as using multiple plasma generators simultaneously, in sequence, and cross-using.

[0082] In addition, when switching the processing technology, the plasma generating device may need to be replaced. Through the sliding device, the precise positioning of the plasma generating device and the coupling with the target unit can be easily achieved, thereby facilitating the rapid switching of other plasma generating devices and improving work efficiency.

[0083] The technical content and technical features of this application have been disclosed as above, but those skilled in the art may still make various substitutions and modifications based on the teachings and disclosures of this application without departing from the spirit of this application. Therefore, the protection scope of this application should not be limited to the contents disclosed in the embodiments, but should include various substitutions and modifications without departing from this application, and be covered by the claims of this application.

Claims

1. A processing device comprising: a working unit including a first end and a second end; A first operating unit, comprising a first cover member, wherein the first cover member is used to be connected to the first end of the working unit; The second operating unit comprises a second cover member, wherein the second cover member is used to be connected to the second end of the working unit, wherein the second operating unit can be moved in multiple directions to be coupled with or separated from the first operating unit.

2. The processing equipment according to claim 1, wherein the working unit is a reaction chamber.

3. The processing equipment according to claim 2, wherein the reaction chamber comprises a quartz tube.

4. The processing equipment according to claim 1, wherein the second operating unit further comprises an exhaust device for adjusting the pressure inside the working unit. 5 . The processing equipment according to claim 1 , wherein the first operating unit further comprises a first pipe for conveying a first workpiece to the working unit through the first cover member. The processing equipment according to claim 5 , wherein the first workpiece comprises an excited gas. 7 . The processing equipment according to claim 1 , wherein the second operation unit further comprises a second pipe for outputting a second workpiece from the working unit through the second cover member. The processing equipment according to claim 7 , wherein the second conduit includes a shock absorbing portion.

9. The processing equipment according to claim 1, wherein the second operating unit further comprises a first supporting member, a lower end of which is located on the first plane p1, and an upper end of which is provided with a plurality of pillars for supporting the second cover member. 10 . The processing equipment according to claim 9 , wherein the support pillar comprises a shaft core and a removable shaft sleeve covering the outer periphery of the shaft core. 11 . The processing equipment according to claim 1 , wherein the second operating unit is coupled to or separated from the working unit or the first operating unit through a lifting device.

12. The processing equipment according to claim 11, wherein the lifting device includes a support member for fixing the position of the second operating unit.

13. The processing equipment according to claim 1, wherein the first operation unit comprises one or more plasma generating devices to provide the required workpiece for the working unit.

14. The processing equipment according to claim 13, wherein the plasma generating device can be coupled to and separated from the first cover member by a first sliding device.

15. The processing equipment according to the preceding claim 1, wherein the second operating unit can be coupled to or separated from the first operating unit by a second sliding device.

16. The processing equipment according to claim 15, wherein when the second operating unit is separated from the first operating unit, the second cover member of the second operating unit is separated from the second end of the working unit, and the first cover member of the first operating unit is sealed and connected to the first end of the working unit.

17. The processing equipment according to claim 15, wherein when the second operating unit is separated from the first operating unit, the first cover member of the first operating unit is separated from the working unit, and the second cover member of the second operating unit is sealed and connected to the second end of the working unit.

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