Adjusting device based on temperature consistency of ceramic heater

Abstract

The invention discloses an adjusting device based on temperature consistency of a ceramic heater, and relates to the technical field of wafer production. The adjusting device based on the temperature consistency of the ceramic heater comprises a ceramic heater body arranged at the top of a shell, an infrared sensor is arranged at the bottom of the shell, the adjusting device based on the temperature consistency of the ceramic heater further comprises a moving mechanism which is arranged in the shell, a moving frame is connected to the moving mechanism, and the moving frame is arranged on the shell. The moving frame is used for moving the moving frame; and the turnover mechanism is arranged on the side wall of the movable frame. According to the adjusting device based on the temperature consistency of the ceramic heater, the local part of the ceramic heater body can be independently heated and cooled, so that the temperature consistency of the ceramic heater body can be adjusted more conveniently and quickly; high-temperature oil and cooling liquid used in the heating and cooling process can be recycled, waste is avoided, and more energy conservation and environmental protection are achieved.

Description

Technical Field

[0001] The invention relates to the technical field of wafer production, and in particular to an adjustment device based on the temperature consistency of a ceramic heater. Background Art

[0002] In the cleaning equipment used in the semiconductor industry's wafer processing and other front-end manufacturing processes, the wafer will be processed through the equipment's process flow to complete a series of processes such as viscosity enhancement, gluing, baking, cooling, and exposure, and then undergo a series of processes such as development, etching, and degumming. This process is repeated several times, and the required complex circuit structure is finally transferred to the substrate, and then it is operated to the subsequent process to complete the processing of each chip. During the gluing process, a photosensitive substance (photoresist) is required to be coated on the wafer substrate. This photosensitive substance contains a large amount of liquids such as organic solvents. In the next process, a heating unit is required to bake the above-mentioned organic solvents to volatilize them, and then discharge them from the designated location through special treatment. Ceramic heaters are a type of heating unit.

[0003] However, when using existing ceramic heaters, since the ceramic heaters are usually provided with multiple heating zones, and there is a coupling relationship between the heating zones, the heating effect on the wafer surface is completely controlled by the multiple heating zones, which can easily cause inconsistent temperatures of the ceramic heaters, affect the heating quality of the wafer, and further affect the production quality of the wafer. Summary of the invention

[0004] The object of the present invention is to provide a device for adjusting the temperature consistency of a ceramic heater to solve the problems mentioned in the above background technology.

[0005] To achieve the above object, the present invention provides the following technical solution: an adjustment device based on the temperature consistency of a ceramic heater, comprising a ceramic heater body arranged on the top of a shell, and an infrared sensor is arranged on the bottom of the shell, and the adjustment device based on the temperature consistency of the ceramic heater also includes:

[0006] A moving mechanism is disposed in the housing, and a moving frame is connected to the moving mechanism for moving the moving frame;

[0007] A turning mechanism is arranged on the side wall of the mobile frame, and a turning block is connected to the turning mechanism for turning the turning block;

[0008] A first lifting assembly is disposed on the top of the rotating block, and a heating box is connected to the first lifting assembly for lifting and moving the heating box;

[0009] A second lifting assembly is disposed at the bottom of the rotating block, and a cooling box is connected to the second lifting assembly for lifting and moving the cooling box;

[0010] A first moving assembly is arranged on a side wall of the heating box, and a first moving block is connected to the first moving assembly, and is used to drive the first moving block to move in the heating box;

[0011] A second moving assembly is disposed on a side wall of the cooling box, and a second moving block is connected to the second moving assembly to drive the second moving block to move in the cooling box;

[0012] A first liquid supply mechanism, disposed above the housing, for supplying high-temperature oil into the heating box;

[0013] The second liquid supply mechanism is arranged above the shell and is used for supplying cooling liquid into the cooling box.

[0014] Preferably, the first liquid supply mechanism comprises:

[0015] The first heat preservation box is fixed on the upper part of the shell through a bracket. The first heat preservation box is provided with an electric heating module, and the first heat preservation box is connected with the heating box through a first telescopic tube.

[0016] Preferably, the second liquid supply mechanism comprises:

[0017] The second heat preservation box is fixed to the side wall of the bracket. A refrigeration module is arranged in the second heat preservation box, and the second heat preservation box is connected with the cooling box through a second hose.

[0018] Preferably, the first moving component comprises:

[0019] A first inclined plate, fixed to the inner wall of the housing through a first connecting plate;

[0020] The first reset mechanism is arranged on the side wall of the heating box, and the first reset mechanism is connected to the first moving rod for resetting the movement of the first moving rod, so that one end of the first moving rod can slide on the first inclined plate, and the other end of the first moving rod is fixed to the side wall of the first moving block.

[0021] Preferably, the second moving component comprises:

[0022] A second inclined plate, disposed below the first inclined plate and fixed to the inner wall of the housing through a second connecting plate;

[0023] The second reset mechanism is arranged on the side wall of the cooling box, and the second reset mechanism is connected to a second moving rod for resetting the movement of the second moving rod, so that one end of the second moving rod can slide on the second inclined plate, and the other end of the second moving rod is fixed to the side wall of the second moving block.

[0024] Preferably, the first reset mechanism comprises:

[0025] A first fixing ring, fixedly sleeved on a side wall of the first moving rod;

[0026] The first elastic member is sleeved on the side wall of the first moving rod and is located between the first fixing ring and the heating box. The first elastic member can be a spring, and the two ends of the first elastic member are respectively fixed to the first fixing ring and the heating box.

[0027] Preferably, the second reset mechanism comprises:

[0028] A second fixing ring, fixedly sleeved on a side wall of the second moving rod;

[0029] The second elastic member is sleeved on the side wall of the second moving rod and is located between the second fixing ring and the cooling box. The second elastic member can be a spring, and two ends of the second elastic member are respectively fixed to the second fixing ring and the cooling box.

[0030] Preferably, the first lifting assembly comprises:

[0031] Two first set of rods, fixed to the top of the rotating block;

[0032] Two first sleeves are sleeved on the side walls of the two first sleeve rods, and the upper ends of the first sleeve rods are fixed to the bottom of the heating box;

[0033] A third elastic member is sleeved on the side wall of each of the first sleeves, and the third elastic member is located between the rotating block and the heating box. The third elastic member can be a spring, and two ends of the third elastic member are respectively fixed to the rotating block and the heating box;

[0034] A first electromagnet is fixed to the top of the rotating block;

[0035] The first iron block is fixed below the heating box and is arranged opposite to the first electromagnet.

[0036] Preferably, the second lifting assembly comprises:

[0037] Two second sets of rods, fixed to the bottom of the rotating block;

[0038] Two second sleeves are sleeved on the side walls of the two second sleeve rods, and the lower ends of the second sleeves are fixed to the top of the cooling box;

[0039] A fourth elastic member, sleeved on the side wall of each of the second sleeves, and the fourth elastic member is located between the rotating block and the cooling box, the fourth elastic member may be a spring, and two ends of the fourth elastic member are respectively fixed to the rotating block and the cooling box;

[0040] a second electromagnet, fixed to the bottom of the rotating block;

[0041] The second iron block is fixed above the cooling box and is arranged opposite to the second electromagnet.

[0042] Preferably, the moving mechanism comprises:

[0043] A first moving module is arranged on the inner wall of the housing, and a third moving block is connected to the first moving module;

[0044] The second moving module is arranged on the side wall of the third moving block, and the moving frame is connected to the second moving module.

[0045] Preferably, the rotating mechanism comprises:

[0046] A rotating rod, which rotates on the side wall of the movable frame and is fixedly inserted on the side wall of the rotating block;

[0047] The motor is fixed to the side wall of the moving frame, and the output end of the motor is fixed to one end of the rotating rod.

[0048] Compared with the prior art, the present invention has the following beneficial effects:

[0049] (1) This adjustment device based on the temperature consistency of the ceramic heater is provided with a first lifting component and a second lifting component, etc., so that before heating the wafer, the ceramic heater body is first heated, and when it is heated to a suitable temperature, a heat preservation operation is performed. At the same time, the temperature consistency of the ceramic heater body is detected by an infrared sensor. When it is detected that the temperature of a certain part is low, the first electromagnet and the second electromagnet are first energized. After the first electromagnet is energized, it attracts the first iron block, so that the heating box moves downward. At the same time, the third elastic member is compressed. After the second electromagnet is energized, it attracts the second iron block, so that the cooling box moves upward. At the same time, the fourth elastic member is compressed. Then, the third moving block is driven to move by the first moving module, and at the same time, the moving frame is driven to move by the second moving module, so as to adjust the position of the moving frame and align the heating box with the lower temperature part. Then, the first electromagnet is de-energized. At this time, the heating box can move upward under the action of the third elastic member and fit with the lower temperature part, and heat it separately to a suitable temperature, thereby ensuring the ceramic heater. The consistency of the temperature of the main body, then, the first electromagnet is energized again, so that the heating box moves downward and moves to other parts with lower temperatures, and so on and so forth, all parts with lower temperatures can be heated and heated to ensure temperature consistency. When the infrared sensor detects that the temperature of a certain part of the ceramic heater body is higher, the motor is started. When the motor rotates, the rotating block is driven to flip through the rotating rod, and then the heating box and the cooling box are driven to flip, so that the cooling box rotates to a vertically upward state. Then, the second electromagnet is powered off, and the cooling box can move upward under the action of the fourth elastic member and fit with the part with higher temperature, so that the part can be cooled separately and cooled to a suitable temperature to ensure temperature consistency. Then, the second electromagnet is energized again, so that the cooling box moves downward and moves to other parts with higher temperatures, and so on and so forth, all parts with higher temperatures can be cooled and cooled to ensure temperature consistency of the ceramic heater body, making it more convenient and quick to adjust the temperature consistency of the ceramic heater body, thereby ensuring the quality of wafer production.

[0050] (2) This adjustment device based on the temperature consistency of the ceramic heater is provided with a first liquid supply mechanism and a second liquid supply mechanism. When the temperature consistency of the ceramic heater body is adjusted, the first moving module and the second moving module drive the moving frame to move. After the end of the first moving rod is separated from the first inclined plate, the first moving block can be moved by the first moving rod under the action of the first elastic member, so that negative pressure is generated in the heating box. At this time, the high-temperature oil in the first insulation box can enter the heating box through the first telescopic tube. At the same time, when the end of the second moving rod is separated from the second inclined plate, the second moving block can be moved by the second moving rod under the action of the second elastic member, so that negative pressure is generated in the cooling box. At this time, the coolant in the second insulation box can enter the cooling box through the second hose. Then, the local part of the ceramic heater body can be heated by the heating box, and the cooling box is used to cool the ceramic heater body. The box cools down the local part of the ceramic heater body. After the adjustment is completed, the moving frame is driven to move and reset by the first moving module and the second moving module. When the end of the first moving rod slides along the first inclined plate to the side wall of the first connecting plate, the first moving block can be pushed to move and reset. At the same time, the first elastic member is compressed. At this time, the high-temperature oil in the heating box can be squeezed back into the first insulation box through the first telescopic tube for temporary insulation storage. At the same time, the electric heating module can be used to continue heating. At the same time, when the end of the second moving rod slides along the second inclined plate to the side wall of the second connecting plate, the second moving block can be pushed to move. At the same time, the second elastic member is compressed. At this time, the coolant in the cooling box can be squeezed back into the second insulation box through the second hose for temporary insulation storage. The refrigeration module can be used for further cooling. In this way, the high-temperature oil and coolant can be recycled to avoid waste and be more energy-saving and environmentally friendly. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0052] Figure 2 It is a partial cross-sectional structural schematic diagram of the housing in the present invention;

[0053] Figure 3 It is a structural schematic diagram of the moving mechanism in the present invention;

[0054] Figure 4 It is a structural schematic diagram of the turning mechanism in the present invention;

[0055] Figure 5 It is a partial cross-sectional structural schematic diagram of the heating box and the cooling box in the present invention;

[0056] Figure 6 for Figure 1 A schematic diagram of the enlarged structure at A in the middle;

[0057] Figure 7 for Figure 2 A schematic diagram of the enlarged structure at B in the middle;

[0058] Figure 8 for Figure 3 Schematic diagram of the enlarged structure at C in the middle;

[0059] Fig. 9 for Figure 5 Schematic diagram of the enlarged structure at D in the middle;

[0060] Fig.10 for Figure 8 Schematic diagram of the enlarged structure at E in the middle.

[0061] In the figure: 1, shell; 201, bracket; 202, first heat preservation box; 203, electric heating module; 204, first telescopic tube; 301, second heat preservation box; 302, refrigeration module; 303, second hose; 401, first moving rod; 402, first inclined plate; 403, first connecting plate; 501, second moving rod; 502, second inclined plate; 503, second connecting plate; 601, first fixing ring; 602, first elastic member; 701, second fixing ring; 702, second elastic member; 801, first sleeve rod; 802, first sleeve tube; 80 3. The third elastic member; 804. The first electromagnet; 805. The first iron block; 901. The second set of rods; 902. The second sleeve; 903. The fourth elastic member; 904. The second electromagnet; 905. The second iron block; 1001. The first moving module; 1002. The second moving module; 1003. The third moving block; 11. The ceramic heater body; 12. The infrared sensor; 13. The moving frame; 14. The rotating block; 15. The heating box; 16. The first moving block; 17. The cooling box; 18. The second moving block; 1901. The motor; 1902. The rotating rod. DETAILED DESCRIPTION

[0062] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0063] See also Figure 1-Figure 10 The present invention provides a device for adjusting the temperature consistency of a ceramic heater, comprising a ceramic heater body 11 disposed on the top of a housing 1, and an infrared sensor 12 disposed at the bottom of the housing 1. The infrared sensor 12 is a well-known technology in the technical field, and its structure and principle are not repeated here. The device for adjusting the temperature consistency of a ceramic heater further comprises:

[0064] The moving mechanism is disposed in the housing 1 , and the moving frame 13 is connected to the moving mechanism for moving the moving frame 13 .

[0065] The turning mechanism is arranged on the side wall of the moving frame 13 , and the turning mechanism is connected with the turning block 14 for turning the turning block 14 .

[0066] The first lifting assembly is disposed on the top of the rotating block 14 , and the heating box 15 is connected to the first lifting assembly for lifting and moving the heating box 15 .

[0067] The second lifting assembly is disposed at the bottom of the rotating block 14 , and the cooling box 17 is connected to the second lifting assembly for lifting and moving the cooling box 17 .

[0068] The first moving assembly is disposed on the side wall of the heating box 15 , and the first moving block 16 is connected to the first moving assembly for driving the first moving block 16 to move in the heating box 15 .

[0069] The second moving assembly is disposed on the side wall of the cooling box 17 , and the second moving block 18 is connected to the second moving assembly to drive the second moving block 18 to move in the cooling box 17 .

[0070] The first liquid supply mechanism is disposed above the shell 1 and is used to supply high-temperature oil into the heating box 15 .

[0071] The second liquid supply mechanism is arranged above the shell 1, and is used to supply coolant into the cooling box 17. It can heat and cool down local parts of the ceramic heater body 11 separately, so that it is more convenient and quick to adjust the temperature consistency of the ceramic heater body 11. In addition, the high-temperature oil and coolant used in the heating and cooling process can be recycled to avoid waste, which is more energy-saving and environmentally friendly.

[0072] See also Figure 6 , Figure 8 and Fig. 9 , the first liquid supply mechanism comprises:

[0073] The first insulation box 202 is fixed on the top of the shell 1 by a bracket 201. An electric heating module 203 is arranged in the first insulation box 202, and the first insulation box 202 is connected with the heating box 15 through a first telescopic tube 204, so as to supply high-temperature oil into the heating box 15. The electric heating module 203 is a well-known technology in the technical field, and its structure and principle are not repeated here.

[0074] See also Figure 6 , Figure 8 and Fig. 9 , the second liquid supply mechanism comprises:

[0075] The second thermal insulation box 301 is fixed to the side wall of the bracket 201. A refrigeration module 302 is arranged in the second thermal insulation box 301, and the second thermal insulation box 301 is connected to the cooling box 17 through a second hose 303, so as to supply coolant into the cooling box 17. The refrigeration module 302 is a well-known technology in the technical field, and its structure and principle are not repeated here.

[0076] See also Figure 8-Figure 10 , the first moving component comprises:

[0077] The first inclined plate 402 is fixed to the inner wall of the housing 1 through the first connecting plate 403 .

[0078] The first reset mechanism is arranged on the side wall of the heating box 15, and the first reset mechanism is connected to the first moving rod 401, which is used to reset the movement of the first moving rod 401, so that one end of the first moving rod 401 can slide on the first inclined plate 402, and the other end of the first moving rod 401 is fixed to the side wall of the first moving block 16. After the end of the first moving rod 401 is separated from the first inclined plate 402, under the action of the first reset mechanism, the first moving block 16 can be driven to move by the first moving rod 401, so that negative pressure is generated in the heating box 15.

[0079] See also Figure 8-Figure 10 , the second moving component comprises:

[0080] The second inclined plate 502 is disposed below the first inclined plate 402 and is fixed to the inner wall of the housing 1 through a second connecting plate 503 .

[0081] The second reset mechanism is arranged on the side wall of the cooling box 17, and the second reset mechanism is connected to a second moving rod 501, which is used to reset the movement of the second moving rod 501, so that one end of the second moving rod 501 can slide on the second inclined plate 502, and the other end of the second moving rod 501 is fixed to the side wall of the second moving block 18. When the end of the second moving rod 501 is disengaged from the second inclined plate 502, under the action of the second reset mechanism, the second moving block 18 can be driven to move by the second moving rod 501, so that negative pressure is generated in the cooling box 17.

[0082] See also Fig. 9 , the first reset mechanism comprises:

[0083] The first fixing ring 601 is fixedly sleeved on the side wall of the first moving rod 401 .

[0084] The first elastic member 602 is sleeved on the side wall of the first movable rod 401, and the first elastic member 602 is located between the first fixed ring 601 and the heating box 15. The first elastic member 602 can be a spring, and the two ends of the first elastic member 602 are respectively fixed to the first fixed ring 601 and the heating box 15, so as to guide and reset the movement of the first movable rod 401.

[0085] See also Fig. 9 , the second reset mechanism comprises:

[0086] The second fixing ring 701 is fixedly sleeved on the side wall of the second moving rod 501 .

[0087] The second elastic member 702 is sleeved on the side wall of the second movable rod 501, and the second elastic member 702 is located between the second fixed ring 701 and the cooling box 17. The second elastic member 702 can be a spring, and the two ends of the second elastic member 702 are respectively fixed to the second fixed ring 701 and the cooling box 17, so as to guide and reset the movement of the second movable rod 501.

[0088] See also Fig. 9 , the first lifting assembly comprises:

[0089] The two first set rods 801 are fixed to the top of the rotating block 14 .

[0090] The two first sleeves 802 are sleeved on the side walls of the two first sleeve rods 801 , and the upper ends of the first sleeve rods 801 are fixed to the bottom of the heating box 15 .

[0091] The third elastic member 803 is sleeved on the side wall of each first sleeve 802, and the third elastic member 803 is located between the rotating block 14 and the heating box 15. The third elastic member 803 can be a spring, and the two ends of the third elastic member 803 are respectively fixed to the rotating block 14 and the heating box 15.

[0092] The first electromagnet 804 is fixed on the top of the rotating block 14 .

[0093] The first iron block 805 is fixed under the heating box 15 and is arranged opposite to the first electromagnet 804. When the first electromagnet 804 is energized, the first electromagnet 804 attracts the first iron block 805, so that the heating box 15 moves downward. At the same time, the third elastic member 803 is compressed and the first electromagnet 804 is powered off. At this time, the heating box 15 can move upward under the action of the third elastic member 803, so that the heating box 15 can be raised and lowered.

[0094] See also Fig. 9 , the second lifting assembly comprises:

[0095] The two second sets of rods 901 are fixed to the bottom of the rotating block 14 .

[0096] The two second sleeves 902 are sleeved on the side walls of the two second sleeve rods 901 , and the lower ends of the second sleeves 902 are fixed to the top of the cooling box 17 .

[0097] The fourth elastic member 903 is sleeved on the side wall of each second sleeve 902 and is located between the rotating block 14 and the cooling box 17 . The fourth elastic member 903 can be a spring, and both ends of the fourth elastic member 903 are fixed to the rotating block 14 and the cooling box 17 respectively.

[0098] The second electromagnet 904 is fixed to the bottom of the rotating block 14 .

[0099] The second iron block 905 is fixed above the cooling box 17 and is arranged opposite to the second electromagnet 904. When the second electromagnet 904 is energized, the second electromagnet 904 attracts the second iron block 905, so that the cooling box 17 moves upward. At the same time, the fourth elastic member 903 is compressed, and the second electromagnet 904 is powered off. The cooling box 17 can be moved and reset under the action of the fourth elastic member 903, so that the cooling box 17 can be raised and lowered.

[0100] See also Figure 4 and Figure 8 , the mobile mechanism includes:

[0101] The first moving module 1001 is disposed on the inner wall of the housing 1 , and the third moving block 1003 is connected to the first moving module 1001 .

[0102] The second moving module 1002 is arranged on the side wall of the third moving block 1003, and the moving frame 13 is connected to the second moving module 1002. The third moving block 1003 is moved by the first moving module 1001, and at the same time, the moving frame 13 is moved by the second moving module 1002, so as to adjust the position of the moving frame 13, and then adjust the position of the heating box 15 and the cooling box 17. The first moving module 1001 and the second moving module 1002 are well-known technologies in the technical field, and their structures and principles are not repeated here. They can be driven by cylinders, etc.

[0103] See also Figure 4 and Fig. 9 , the rotating mechanism includes:

[0104] The rotating rod 1902 rotates on the side wall of the moving frame 13 and is fixedly inserted on the side wall of the rotating block 14 .

[0105] Motor 1901 is fixed to the side wall of the movable frame 13, and the output end of motor 1901 is fixed to one end of the rotating rod 1902. When the infrared sensor 12 detects that the temperature of a certain part of the ceramic heater body 11 is high, the motor 1901 is started. When the motor 1901 rotates, the rotating block 14 is driven to flip through the rotating rod 1902, and then the heating box 15 and the cooling box 17 are driven to flip, so that the cooling box 17 rotates to a vertically upward state.

[0106] Working principle: When in use, before heating the wafer, the ceramic heater body 11 is heated first. When it is heated to a suitable temperature, the heat preservation operation is performed. At the same time, the temperature consistency of the ceramic heater body 11 is detected by the infrared sensor 12. When it is detected that the temperature of a certain part is lower, the first electromagnet 804 and the second electromagnet 904 are energized first. After the first electromagnet 804 is energized, it attracts the first iron block 805, so that the heating box 15 moves downward. At the same time, the third elastic member 803 is compressed. After the second electromagnet 904 is energized, it attracts the second iron block 905, so that the cooling box 17 moves upward. At the same time, the fourth elastic member 903 is compressed. Then, the third moving block 1003 is moved by the first moving module 1001, and at the same time, the moving frame 13 is moved by the second moving module 1002, so as to adjust the position of the moving frame 13 and align the heating box 15 with the lower temperature part.

[0107] Then, the first electromagnet 804 is powered off. At this time, the heating box 15 can move upward under the action of the third elastic member 803 and fit with the lower temperature part, heat it separately, and heat it to a suitable temperature to ensure the temperature consistency of the ceramic heater body 11. Then, the first electromagnet 804 is powered on again to move the heating box 15 downward and move to other lower temperature parts. This reciprocating process can heat the lower temperature parts to ensure temperature consistency.

[0108] When the infrared sensor 12 detects that the temperature of a certain part of the ceramic heater body 11 is high, the motor 1901 is started. When the motor 1901 rotates, the rotating block 14 is turned over by the rotating rod 1902, and then the heating box 15 and the cooling box 17 are turned over, so that the cooling box 17 rotates to a vertically upward state. Then, the second electromagnet 904 is powered off, and the cooling box 17 can move upward under the action of the fourth elastic member 903 and fit with the part with higher temperature, so that the part can be cooled separately and cooled to a suitable temperature to ensure temperature consistency. Then, the second electromagnet 904 is powered on again, so that the cooling box 17 moves downward and moves to other parts with higher temperature. In this way, the parts with higher temperature can be cooled and cooled, and the temperature consistency of the ceramic heater body 11 is ensured, so that the adjustment of the temperature consistency of the ceramic heater body 11 is more convenient and quick, thereby ensuring the quality of wafer production.

[0109] Furthermore, when the temperature consistency of the ceramic heater body 11 is adjusted, the moving frame 13 is moved by the first moving module 1001 and the second moving module 1002. After the end of the first moving rod 401 is separated from the first inclined plate 402, the first moving block 16 can be moved by the first moving rod 401 under the action of the first elastic member 602, so that negative pressure is generated in the heating box 15. At this time, the high-temperature oil in the first insulation box 202 can enter the heating box 15 through the first telescopic tube 204. At the same time, when the end of the second moving rod 501 is separated from the second inclined plate 502, the second moving block 18 can be moved by the second moving rod 501 under the action of the second elastic member 702, so that negative pressure is generated in the cooling box 17. At this time, the coolant in the second insulation box 301 can enter the cooling box 17 through the second hose 303. Then, the local part of the ceramic heater body 11 can be heated by the heating box 15, and the local part of the ceramic heater body 11 can be cooled by the cooling box 17.

[0110] After the adjustment is completed, the mobile frame 13 is driven to move and reset by the first moving module 1001 and the second moving module 1002. When the end of the first moving rod 401 slides along the first inclined plate 402 to the side wall of the first connecting plate 403, the first moving block 16 can be pushed to move and reset. At the same time, the first elastic member 602 is compressed. At this time, the high-temperature oil in the heating box 15 can be squeezed back into the first insulation box 202 through the first telescopic tube 204 for temporary insulation. At the same time, the electric heating module 203 can be used to continue heating. At the same time, when the end of the second moving rod 501 slides along the second inclined plate 502 to the side wall of the second connecting plate 503, the second moving block 18 can be pushed to move. At the same time, the second elastic member 702 is compressed. At this time, the coolant in the cooling box 17 can be squeezed back into the second insulation box 301 through the second hose 303 for temporary insulation. And the refrigeration module 302 can be used for continued cooling. In this way, the high-temperature oil and the coolant can be recycled to avoid waste, which is more energy-saving and environmentally friendly.

Claims

1. A device for adjusting the temperature consistency of a ceramic heater, comprising a ceramic heater body (11) arranged on the top of a housing (1), and an infrared sensor (12) arranged on the bottom of the housing (1), characterized in that: The adjustment device based on the temperature consistency of the ceramic heater further includes: A moving mechanism is arranged in the housing (1), and a moving frame (13) is connected to the moving mechanism, and is used to move the moving frame (13); A turning mechanism is arranged on a side wall of the movable frame (13), and a turning block (14) is connected to the turning mechanism for turning the turning block (14); A first lifting component is arranged on the top of the rotating block (14), and a heating box (15) is connected to the first lifting component, and is used to lift and move the heating box (15); A second lifting assembly is arranged at the bottom of the rotating block (14), and a cooling box (17) is connected to the second lifting assembly for lifting and moving the cooling box (17); A first moving assembly is arranged on a side wall of the heating box (15), and a first moving block (16) is connected to the first moving assembly, and is used to drive the first moving block (16) to move in the heating box (15); A second moving assembly is arranged on a side wall of the cooling box (17), and a second moving block (18) is connected to the second moving assembly, and is used to drive the second moving block (18) to move in the cooling box (17); A first liquid supply mechanism, arranged above the housing (1), for supplying high-temperature oil into the heating box (15); The second liquid supply mechanism is arranged above the shell (1) and is used to supply cooling liquid into the cooling box (17).

2. The device for adjusting the temperature consistency of a ceramic heater according to claim 1, characterized in that: The first liquid supply mechanism comprises: A first heat preservation box (202) is fixed on the upper side of the shell (1) via a bracket (201), and the first heat preservation box (202) is connected to the heating box (15) via a first telescopic tube (204); The electric heating module (203) is arranged in the first heat preservation box (202).

3. The device for adjusting the temperature consistency of a ceramic heater according to claim 2, characterized in that: The second liquid supply mechanism comprises: A second heat preservation box (301) is fixed to a side wall of the bracket (201), and the second heat preservation box (301) is connected to the cooling box (17) via a second hose (303); A refrigeration module (302) is arranged in the second thermal insulation box (301).

4. The device for adjusting the temperature consistency of a ceramic heater according to claim 1, characterized in that: The first moving component comprises: A first inclined plate (402) is fixed to the inner wall of the housing (1) via a first connecting plate (403); A first reset mechanism is arranged on the side wall of the heating box (15), and a first moving rod (401) is connected to the first reset mechanism, and is used to reset the movement of the first moving rod (401), so that one end of the first moving rod (401) can slide on the first inclined plate (402), and the other end of the first moving rod (401) is fixed to the side wall of the first moving block (16).

5. The device for adjusting the temperature consistency of a ceramic heater according to claim 4, characterized in that: The first reset mechanism comprises: A first fixing ring (601) fixedly sleeved on the side wall of the first moving rod (401); The first elastic member (602) is sleeved on the side wall of the first moving rod (401), and the first elastic member (602) is located between the first fixing ring (601) and the heating box (15).

6. The device for adjusting the temperature consistency of a ceramic heater according to claim 4, characterized in that: The second moving component comprises: A second moving rod (501) fixed to a side wall of the second moving block (18); A second inclined plate (502) is disposed below the first inclined plate (402) and is fixed to the inner wall of the housing (1) via a second connecting plate (503); The second reset mechanism is arranged on the side wall of the cooling box (17) and connected to the second moving rod (501), and is used to reset the movement of the second moving rod (501) so that one end of the second moving rod (501) can slide on the second inclined plate (502).

7. The device for adjusting the temperature consistency of a ceramic heater according to claim 6, characterized in that: The second reset mechanism comprises: A second fixing ring (701), fixedly sleeved on the side wall of the second moving rod (501); The second elastic member (702) is sleeved on the side wall of the second moving rod (501), and the second elastic member (702) is located between the second fixing ring (701) and the cooling box (17).

8. The device for adjusting the temperature consistency of a ceramic heater according to claim 1, characterized in that: The first lifting assembly comprises: Two first set rods (801) fixed to the top of the rotating block (14); Two first sleeves (802) are sleeved on the side walls of the two first sleeve rods (801), and the upper ends of the first sleeve rods (801) are fixed to the bottom of the heating box (15); A third elastic member (803) is sleeved on the side wall of each of the first sleeves (802), and the third elastic member (803) is located between the rotating block (14) and the heating box (15); A first electromagnet (804) is fixed to the top of the rotating block (14); The first iron block (805) is fixed below the heating box (15) and is arranged opposite to the first electromagnet (804).

9. The device for adjusting the temperature consistency of a ceramic heater according to claim 1, characterized in that: The second lifting assembly comprises: Two second sets of rods (901) fixed to the bottom of the rotating block (14); Two second sleeves (902) are sleeved on the side walls of the two second sleeve rods (901), and the lower ends of the second sleeves (902) are fixed to the top of the cooling box (17); A fourth elastic member (903) is sleeved on the side wall of each of the second sleeves (902), and the fourth elastic member (903) is located between the rotating block (14) and the cooling box (17); A second electromagnet (904) is fixed to the bottom of the rotating block (14); The second iron block (905) is fixed above the cooling box (17) and is arranged opposite to the second electromagnet (904).

10. The device for adjusting the temperature consistency of a ceramic heater according to claim 1, characterized in that: The moving mechanism comprises: A first moving module (1001) is arranged on the inner wall of the housing (1), and a third moving block (1003) is connected to the first moving module (1001); The second moving module (1002) is arranged on the side wall of the third moving block (1003), and the moving frame (13) is connected to the second moving module (1002).

11. The device for adjusting the temperature consistency of a ceramic heater according to claim 1, characterized in that: The rotating mechanism comprises: A rotating rod (1902) is rotated on the side wall of the movable frame (13) and fixedly inserted on the side wall of the rotating block (14); The motor (1901) is fixed to the side wall of the moving frame (13), and the output end of the motor (1901) is fixed to one end of the rotating rod (1902).

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