Cleaning equipment, cleaning system and cleaning method

Abstract

The invention discloses cleaning equipment, a cleaning system and a cleaning method, and belongs to the technical field of cleaning equipment. The cleaning equipment comprises a box body (11), a movable carrier platform (12) and a cleaning pipeline group (13). The movable carrier platform (12) is installed on the box body (11) and comprises a carrier (121) and a driving module (122), the carrier (121) is located in the box body (11), and the driving module (122) is connected to the carrier (121) and used for driving the carrier (121) to linearly move in the vertical direction; the cleaning pipeline group (13) comprises a plurality of cleaning pipelines, each cleaning pipeline is arranged in the box body (11) and comprises a pipeline body (13a) and a spray head (13b), and the spray head (13b) is connected to the pipeline body (13a) and is arranged to face the carrier (121). The cleaning device can spray and clean the chip placed on the carrier (121), thereby reducing the damage to the chip and ensuring the service life of the chip.

Description

Cleaning equipment, cleaning system and cleaning method Technical Field

[0001] The present invention belongs to the technical field of cleaning equipment, and in particular to a cleaning equipment, a cleaning system and a cleaning method. Background Art

[0002] Chip cleaning in existing technologies is primarily done through tank cleaning. This method involves immersing the chip in a cleaning solution. The chip is coated with a metal film, and repeated immersion can lead to problems such as film shedding and oxidation, significantly impacting the chip's lifespan.

[0003] In view of this, the present invention is proposed.

[0004] Summary of the Invention

[0005] The present invention provides a cleaning device, a cleaning system and a cleaning method to solve the technical problem of immersing easily damaged chips in the prior art.

[0006] To solve the above problems, the present invention adopts the following solutions:

[0007] A cleaning device includes a box, a mobile carrier platform and a cleaning pipeline group; the mobile carrier platform is installed in the box and includes a carrier and a drive module, the carrier is located in the box, the drive module is connected to the carrier and is used to drive the carrier to move linearly in the up and down directions; the cleaning pipeline group includes multiple cleaning pipelines, each of the cleaning pipelines is arranged in the box and includes a pipeline body and a nozzle, the nozzle is connected to the pipeline body and is arranged to face the carrier.

[0008] In this cleaning device, a mobile carrier platform and a cleaning pipeline assembly are mounted on a housing. The mobile carrier platform includes a carrier for placing workpieces and a drive module for driving the carrier's movement. The drive module drives the carrier in vertical linear motion. The cleaning pipeline assembly includes multiple cleaning pipelines consisting of pipeline bodies and nozzles. The cleaning pipelines allow fluid to flow through the nozzles and spray toward the carrier, thereby cleaning the workpiece placed on the carrier.

[0009] In a further optional solution, the carrier includes a support frame and a cover assembly, wherein the support frame is provided with a plurality of loading stations; the cover assembly is pivotally connected to the support frame and positioned above the loading stations, and the cover assembly is used to limit the vertical position of the workpiece loaded in the loading stations. The cover assembly can pivot relative to the support frame to open and close the loading stations. When the cover assembly opens the loading stations, the workpiece can be placed into the loading stations from above, and then the cover assembly is rotated to close the loading stations, thereby limiting the vertical movement of the workpiece.

[0010] In a further optional solution, the support frame includes a carrier body, a base and connecting side panels, the base is arranged at the bottom of the carrier body; the connecting side panels are arranged at both ends of the base to clamp the carrier body and are pivotally connected to the cover assembly; wherein the loading station is located on the carrier body.

[0011] In a further optional solution, the support frame further includes a baffle, which is connected to the connecting side plate to limit the pivoting movement of the cover assembly. The baffle limits the pivoting angle of the cover assembly.

[0012] In a further alternative embodiment, the cover plate assembly includes a cover plate and a plurality of position limiting components, wherein the cover plate is pivotally connected to the support frame; the plurality of position limiting components are connected to the cover plate and are aligned with the plurality of loading stations. The position limiting components can be pressed against a workpiece loaded in the loading station to limit the workpiece in the vertical direction.

[0013] In a further optional solution, the carrier further includes a locking structure for maintaining the carrier in an open state. When the carrier is in the open state, the cover assembly opens the loading station. The locking structure maintains the cover assembly in the open state of the loading station, preventing the cover assembly from automatically pivoting and falling due to gravity.

[0014] In a further optional solution, one end of the pipeline body is an inlet end, and the other end is closed, so that the fluid in the pipeline can only be sprayed outward through the nozzle.

[0015] In a further optional solution, the pipeline body includes a main pipeline and multiple branch pipelines, and the multiple branch pipelines are spaced apart from the main pipeline along the extension direction of the pipeline body and connected to the main pipeline. Each branch pipeline is provided with a corresponding nozzle. In the case of multiple nozzles, the cleaning range that can be covered by the cleaning pipeline is wider.

[0016] In a further optional solution, the cleaning pipeline groups are relatively arranged on both sides of the carrier. The cleaning pipeline groups located on both sides of the carrier can clean two positions of the workpiece at the same time, ensuring the cleaning effect.

[0017] In a further optional solution, the multiple cleaning pipelines are arranged at intervals in the vertical direction.

[0018] In a further optional solution, the mobile carrier platform further includes a sliding mechanism, the sliding mechanism being mounted on the box, and the carrier being slidingly connected to the box via the sliding mechanism. The sliding mechanism enables the carrier to be slidably connected to the box, making it easier for the driving module to drive the carrier to move.

[0019] In a further optional solution, the driving module includes a power component and a transmission mechanism, the transmission mechanism is connected to the sliding mechanism, the power component is connected to the transmission mechanism, and the power component is used to drive the transmission mechanism so that the sliding mechanism drives the carrier.

[0020] In a further optional solution, the cleaning device further comprises a fan module, which is mounted on a side wall of the box and configured to draw air outward from the box. The fan module draws out volatile gases in the box, thereby improving safety.

[0021] In a further optional solution, the number of the cleaning pipelines is three, and they are respectively arranged from top to bottom: an air blowing pipeline, a first spray pipeline, and a second spray pipeline. The cleaning equipment has three cleaning workstations for cleaning workpieces placed on the carrier.

[0022] The present invention also provides a cleaning system, which includes the above-mentioned cleaning device.

[0023] In a further optional solution, the cleaning system further includes an operating table assembly and a liquid storage tank assembly, wherein the liquid storage tank assembly is connected to the cleaning pipeline assembly, and the operating table assembly is used to control the operation of the cleaning equipment. The liquid storage tank assembly can store cleaning fluid and spray it through the cleaning pipeline assembly, and the operating table assembly can control the operation of the cleaning equipment.

[0024] In a further optional solution, the operating table assembly includes a cabinet, a control module and a pump-valve assembly; the control module includes an input unit and a control unit, and the control unit is signal-connected to the input unit; the pump-valve assembly is arranged in the cabinet and connected to the liquid storage tank group; wherein the pump-valve assembly and the drive module are both signal-connected to the control unit.

[0025] In this solution, the operating table assembly mainly integrates a control module and a pump-valve assembly. The control module is used to control the drive module and the pump-valve assembly, thereby controlling the combined operation of the cleaning pipeline group and the mobile carrier platform.

[0026] In a further optional solution, a liquid level sensor is provided at the bottom of the liquid storage tank assembly to monitor the liquid level in the liquid storage tank assembly.

[0027] In a further optional solution, the number of the cleaning pipelines is three, and they are respectively an air blowing pipeline, a first spray pipeline, and a second spray pipeline arranged in a top-down direction;

[0028] The liquid storage tank assembly includes a first liquid storage tank and a second liquid storage tank. The first liquid storage tank is connected to the first spray pipeline and is used to store a first cleaning agent. The second liquid storage tank is connected to the second spray pipeline and is used to store a second cleaning agent. The first spray pipeline is used to spray the first cleaning agent, the second spray pipeline is used to spray the second cleaning agent, and the air blowing pipeline is used to dry the sprayed workpiece.

[0029] The present invention also provides a cleaning method, which is implemented using the above-mentioned cleaning system, wherein the first cleaning agent is water, and the cleaning method comprises:

[0030] Fixing the chip on the carrier;

[0031] applying a start signal to the input unit, and the input unit transmitting the start signal to the control unit;

[0032] The control unit controls the carrier to move the chip back and forth between the spray area corresponding to the first spray line and the spray area corresponding to the second spray line, and the control unit controls the pump valve assembly to alternately pump liquid from the first liquid storage tank and the second liquid storage tank, so that the first spray line and the second spray line alternately spray and clean the chip;

[0033] The control unit controls the carrier to move the chip again to the spray area corresponding to the first spray pipeline, and the control unit controls the pump valve assembly to pump liquid from the first liquid storage tank so that the first spray pipeline sprays water to clean the chip;

[0034] The control unit controls the carrier to move the chip into the purge area corresponding to the air blowing pipeline to complete the purge of the chip;

[0035] The control unit controls the carrier to move the cleaned chips out of the cleaning area of ​​the cleaning pipeline group.

[0036] In this solution, the cleaning method is applied in the cleaning system to realize the automated full-process chip cleaning operation.

[0037] Compared with the prior art, the present invention has the following beneficial effects:

[0038] In the cleaning equipment provided by the present invention, a mobile carrier platform and a cleaning pipeline group are installed in a box. The mobile carrier platform includes a carrier and a drive module for driving the carrier to move. The carrier is used to place the workpiece to be cleaned, and the drive module drives the carrier to move linearly in the up and down directions. The cleaning pipeline group includes multiple cleaning pipelines consisting of pipeline bodies and nozzles. The cleaning pipelines can allow fluid to flow and spray toward the carrier through the nozzles, thereby cleaning the workpiece to be cleaned placed on the carrier. In other words, the cleaning equipment can spray clean the chips placed on the carrier, reducing damage to the chips and ensuring the service life of the chips. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0040] FIG1 is a schematic diagram of a cleaning device according to one embodiment of the present invention;

[0041] FIG2 is a second schematic diagram of a cleaning device according to one embodiment of the present invention;

[0042] FIG3 is a third schematic diagram of a cleaning device according to one embodiment of the present invention;

[0043] FIG4 is a fourth schematic diagram of a cleaning device according to one embodiment of the present invention;

[0044] FIG5 is a partial enlarged view of point A in FIG4 ;

[0045] FIG6 is a schematic diagram of a mobile carrier platform according to one embodiment of the present invention;

[0046] FIG7 is a partial enlarged view of point B in FIG6;

[0047] FIG8 is a schematic diagram of a cleaning system according to one embodiment of the present invention;

[0048] FIG9 is a schematic diagram of an operating table assembly according to one embodiment of the present invention;

[0049] FIG. 10 is a flow chart of a cleaning method according to one embodiment of the present invention.

[0050] In the above drawings, the components represented by the reference numerals are as follows:

[0051] 1. Cleaning equipment; 11. Box body; 111. Cover; 112. Slide; 113. Liquid baffle; 114. Liquid outlet;

[0052] 12. Mobile carrier platform; 121. Carrier; 1211. Carrier body; 1212. Base; 1213. Connecting side panels; 1214. Cover; 1215. Limiting member; 1216. Baffle; 1217. Support member; 1218. Baffle; 1219. Magnetic buckle; 121a. Magnetic buckle hole; 121b. Connecting column;

[0053] 122, drive module; 1221, power component; 1222, lead screw; 1223, lead screw nut; 1224, second guide rail; 1225, second slider; 123, sliding mechanism; 1231, first guide rail; 1232, first slider; 124, first slider mounting plate; 125, second slider mounting plate; 126, slide rail connecting plate;

[0054] 13. Cleaning pipeline group; 13a. Pipeline body; 13b. Spray head; 131. Air blowing pipeline; 132. First spray pipeline; 133. Second spray pipeline;

[0055] 14. Fan module; 141. Fan mounting base; 142. Fan;

[0056] 2. Operation console assembly; 21. Cabinet; 22. Control module; 221. Input unit; 222. Control unit; 23. Pump and valve assembly

[0057] 3. Liquid storage tank group; 31. First liquid storage tank; 32. Second liquid storage tank; 33. Liquid level sensor;

[0058] 4. Workpiece. DETAILED DESCRIPTION

[0059] In order to make the above and other features and advantages of the present invention more clear, the present invention is further described below with reference to the accompanying drawings. It should be understood that the specific embodiments given herein are for the purpose of explaining to those skilled in the art and are only exemplary and not restrictive.

[0060] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0061] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0062] In the present invention, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0063] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0064] In the description of this specification, the reference terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.

[0065] Please refer to Figures 1 to 4. A first aspect of the present invention provides a cleaning device, which includes a housing 11, a mobile carrier platform 12, and a cleaning pipeline group 13. The mobile carrier platform 12 is installed in the housing 11 and includes a carrier 121 and a drive module 122. The carrier 121 is located in the housing 11. The drive module 122 is connected to the carrier 121 and is used to drive the carrier 121 to move linearly in the up and down directions. The cleaning pipeline group 13 includes multiple cleaning pipelines, each of which is arranged in the housing 11 and includes a pipeline body 13a and a nozzle 13b. The nozzle 13b is connected to the pipeline body 13a and is arranged to face the carrier 121.

[0066] In this embodiment, the mobile carrier platform 12 and the cleaning pipeline group 13 are installed on the box 11. The mobile carrier platform 12 includes a carrier 121 and a driving module 122 for driving the carrier 121 to move. The carrier 121 is used to place the workpiece 4, and the driving module 122 drives the carrier 121 to move linearly in the up and down directions.

[0067] The cleaning pipeline assembly 13 includes multiple cleaning pipelines consisting of pipeline bodies 13 a and nozzles 13 b . The cleaning pipelines allow fluid to flow and spray toward the carrier 121 through the nozzles 13 b to clean the workpiece placed on the carrier 121 .

[0068] It should be noted that the cleaning equipment is mainly used for cleaning semiconductor parts such as chips, but is not limited to this.

[0069] In an embodiment of the present invention, the carrier 121 includes a support frame and a cover assembly. The support frame is provided with a plurality of loading stations. The cover assembly is pivotally connected to the support frame and positioned above the loading stations. The cover assembly is used to limit the vertical position of the workpiece 4 loaded into the loading stations. The cover assembly can pivot relative to the support frame to open and close the loading stations. When the cover assembly opens the loading stations, the workpiece 4 can be placed into the loading stations from above. The cover assembly is then rotated to close the loading stations, thereby limiting the vertical movement of the workpiece.

[0070] Please refer to Figure 6. Furthermore, the support frame includes a carrier body 1211, a base 1212 and a connecting side panel 1213. The base 1212 is arranged at the bottom of the carrier body 1211, and the connecting side panels 1213 are arranged at both ends of the base 1212 to clamp the carrier body 1211 and are pivotally connected to the cover assembly. Among them, the loading station is located on the carrier body 1211. The support frame is a frame structure assembled by the carrier body 1211, the base 1212 and the connecting side panels 1213. The connecting side panels 1213 are located at both ends of the base 1212 to clamp and fix the carrier body 1211. The cover assembly is pivotally connected to the top of the connecting side panels 1213, thereby opening and closing the loading station located on the carrier body 1211.

[0071] Furthermore, the support frame includes a baffle 1216 connected to the connecting side plate 1213 to limit the pivotal movement of the cover assembly. The baffle 1216 is disposed on the connecting side plate 1213. When the cover assembly is rotated to open the loading station, the cover assembly rotates a certain angle and abuts against the connecting side plate 1213, thereby limiting the cover assembly's rotation and placing the carrier 121 in the open position. When the cover assembly is rotated to close the loading station, the cover assembly rotates a certain angle and abuts against the top of the connecting side plate 1213, thereby limiting the cover assembly's rotation and placing the carrier 121 in the closed position.

[0072] Referring to Figure 6 , in a specific application, the cover assembly is in a horizontal position, covering the loading station, and the carrier 121 is in a closed position. The cover assembly is pivoted upward to a vertical position, opening the loading station, and the carrier 121 is in an open position. Thus, it can be seen that the mating structure of the baffle 1216 and the connecting side plate 1213 allows the cover assembly to pivot 90°, thereby allowing the carrier 121 to switch between the open and closed positions. Of course, the mounting position of the connecting side plate 1213 can be adjusted to adjust the pivot angle of the cover assembly. This is not a specific limitation in this embodiment, as long as it does not affect normal workpiece loading.

[0073] In an embodiment of the present invention, the cover assembly includes a cover 1214 and a plurality of position-limiting components 1215. The cover 1214 is pivotally connected to the support frame, and the plurality of position-limiting components are connected to the cover 1214 and aligned with the plurality of loading stations. When the carrier 121 is in the closed state, the cover assembly covers the loading stations, and the position-limiting components 1215 can abut against the workpiece 4 loaded in the loading station, thereby limiting the workpiece 4 in the vertical direction.

[0074] Referring to FIG6 , in a specific application, the carrier body 1211 is provided with four loading stations, and the number of limiting components 1215 is also four and aligned with the four loading stations. Each loading station is provided with a support component 1217 and multiple sets of baffles 1218. When the carrier 121 is in the open state, a workpiece 4 is placed from above the loading station. The workpiece 4 is clamped between the multiple sets of baffles 1218. The support component 1217 supports the bottom of the workpiece to limit the horizontal movement of the workpiece 4. The cover assembly is pivoted to switch the carrier 121 to the closed state. The limiting component 1215 abuts against the top of the workpiece 4 to limit the vertical movement of the workpiece 4, thereby fixing the workpiece 4 in the loading station. In an optional embodiment, the limiting component 1215 and the support component 1217 are both screws, but are not limited to this. For example, a latch can also be included to ensure that the workpiece can be limited in the upper and lower positions.

[0075] In an embodiment of the present invention, the carrier 121 further includes a locking structure for maintaining the carrier 121 in an open state. The locking structure allows the cover assembly to maintain the open loading position, preventing the cover assembly from automatically pivoting and falling due to gravity, or even closing the loading position.

[0076] Referring to Figure 7 , in a specific application, the locking structure includes a magnetic buckle 1219 and a magnetic buckle hole 121a provided in the baffle 1216. When the carrier 121 is in the open state, the magnetic buckle 1219 is located in the magnetic buckle hole 121a and attracts the baffle 1216, thereby maintaining the cover assembly in the open loading position. Of course, the locking structure is not limited to this. In another specific application, the locking structure includes a spring latch and a latch hole. When the carrier 121 is in the open state, the spring latch can be extended into the latch hole to maintain the cover assembly in the open loading position.

[0077] In the embodiment of the present invention, one end of the pipe body 13a is an inlet end and the other end is a closed end. Fluid can enter from the inlet end, and because the other end is closed, the fluid in the pipe can only be sprayed outward through the nozzle 13b.

[0078] Please refer to Figure 3. In an embodiment of the present invention, the pipeline body 13a includes a main pipeline and multiple branch pipelines. The multiple branch pipelines are arranged at intervals along the extension direction of the pipeline body on the main pipeline and are connected to the main pipeline. Each branch pipeline is corresponding to a nozzle 13b. The pipeline body 13a is mainly composed of a main pipeline and multiple branch pipelines. The branch pipelines can play a diversion role and guide the fluid to different nozzles 13b. It can be understood that when multiple nozzles 13b are provided, the cleaning range that can be covered by the cleaning pipeline is wider. For example, when the carrier 121 includes multiple loading stations, each nozzle 13b corresponds to each loading station one by one, so as to achieve the purpose of cleaning multiple workpieces 4 at a time.

[0079] Referring to Figure 3 , in an embodiment of the present invention, cleaning pipe assemblies 13 are disposed on opposite sides of a carrier 121. In a specific application, there are two sets of cleaning pipe assemblies 13, with the carrier 121 positioned between the two sets. The carrier 121 can move within the spraying areas defined by the two sets of cleaning pipe assemblies 13, thereby simultaneously cleaning the workpiece 4 from two different positions. Of course, the number of cleaning pipe assemblies 13 is not limited to this; it is sufficient to ensure that the workpiece 4 can be sprayed simultaneously from two opposite positions.

[0080] Referring to Figure 4, in an embodiment of the present invention, multiple cleaning pipelines are arranged at intervals in the vertical direction. Different cleaning fluids can flow into each cleaning pipeline, and each cleaning pipeline has different cleaning effects.

[0081] In a specific application, there are three cleaning lines, arranged from top to bottom: an air blowing line 131, a first spraying line 132, and a second spraying line 133. The cleaning line assembly 13 includes the air blowing line 131, the first spraying line 132, and the second spraying line 133. As the carrier 121 moves vertically, it sequentially passes through the air blowing area of ​​the air blowing line 131, the spraying area of ​​the first spraying line 132, and the spraying area of ​​the second spraying line 133. In other words, the cleaning equipment has three cleaning stations for cleaning the workpiece 4 placed on the carrier 121.

[0082] Please refer to Figures 2, 4 and 5. In an embodiment of the present invention, the mobile carrier platform 12 further includes a sliding mechanism 123. The sliding mechanism 123 is installed on the box body 11, and the carrier 121 is slidingly connected to the box body 11 through the sliding mechanism 123. It should be noted that the sliding mechanism 123 has the function of reducing friction. The sliding mechanism 123 is used to achieve a sliding connection between the carrier 121 and the box body 11, which is beneficial for the driving module 122 to drive the carrier 121 to move up and down. In the present disclosure, the number of sliding mechanisms 123 is 2 and they are respectively installed on the opposite side walls of the box body 11 to ensure the stability of the carrier 121 during movement.

[0083] As shown in FIG5 , in the illustrated embodiment, the sliding mechanism 123 includes a first guide rail 1231 and a first slider 1232. The first guide rail 1231 is mounted on the housing 11, the first slider 1232 is slidably connected to the first guide rail 1231, and the carrier 121 is connected to the first slider 1232. The drive module 122 drives the first slider 1232 to slide on the first guide rail 1231, thereby driving the carrier 121 in the vertical direction. It can be seen that the sliding mechanism 123 in this embodiment is a first linear guide mechanism.

[0084] In another optional embodiment, the sliding mechanism 123 includes a sliding rod and a sleeve slidably connected to the sliding rod, and the carrier 121 is connected to the sleeve. The driving module 122 drives the sleeve to move on the sliding rod, thereby driving the carrier 121 to move in the up and down direction.

[0085] It can be seen that the sliding mechanism 123 is not limited to the illustrated embodiment, and it only needs to ensure that the mobile carrier platform 12 can move in the up and down directions on the box body 11, and no specific limitation is made here.

[0086] Furthermore, the driving module 122 includes a power component 1221 and a transmission mechanism. The transmission mechanism is connected to the sliding mechanism 123 . The power component 1221 is connected to the transmission mechanism. The power component 1221 is used to drive the transmission mechanism so that the sliding mechanism 123 drives the carrier 121 .

[0087] As shown in FIG5 , in the illustrated embodiment, the drive module 122 is a screw-type linear module and includes a motor, a ball screw mechanism, and a second linear guide mechanism. In the screw-type linear module, the power component 1221 is a motor, and the transmission mechanism is a combination of a ball screw mechanism and a second linear guide mechanism. The ball screw mechanism includes a screw 1222 and a screw nut 1223. The second linear guide mechanism includes a second guide rail 1224 and a second slider 1225. The screw nut 1223 is connected to the second slider 1225. The power component 1221 drives the screw 1222 to rotate, thereby causing the screw nut 1223 to move on the screw 1222, thereby driving the second slider 1225 to slide on the second guide rail 1224.

[0088] In a specific application, the mobile carrier platform 12 further includes a first slider mounting plate 124, a second slider mounting plate 125, and a slide rail connecting plate 126. The carrier 121 is connected to the first slider mounting plate 124, the first slider mounting plate 124 is mounted on the first slider 1232, the second slider mounting plate 125 is mounted on the second slider 1225, and the slide rail connecting plate 126 is connected between the first slider mounting plate 124 and the second slider mounting plate 125. When the second slider 1225 slides on the second guide rail 1224, it drives the second slider mounting plate 125 to move, which in turn drives the first slider mounting plate 124 mounted on the first slider 1232 to move through the slide rail connecting plate 126, thereby driving the carrier 121 connected to the first slider mounting plate 124 to move.

[0089] In addition, referring to Figures 3 and 5 , in the illustrated embodiment, the connecting side plate 1213 is provided with a connecting post 121b. The connecting post 121b passes through the side wall of the housing 11 and connects to the second slider mounting plate 125. Because the carrier 121 can move vertically, a chute 112 is formed on the side wall to accommodate the movement of the connecting post 121b. During the cleaning process, cleaning liquid can splash out of the chute 112. Therefore, to reduce the risk of liquid splashing, a liquid baffle 113 is provided on the side wall of the housing 11 to shield the chute 112.

[0090] In another optional embodiment, the driving module 122 is a linear motor module, and the mover seat of the linear motor is connected to the first slider 1232 via a connecting plate, thereby driving the first slider 1232 to move and drive the carrier 121 to move.

[0091] It should be noted that the driving module 122 is not limited thereto, and may also include, for example, an electric push rod, an electric cylinder, etc., which can drive the sliding mechanism 123 to drive the carrier 121 to move, and no specific limitation is made here.

[0092] In an embodiment of the present invention, the cleaning device 1 further includes a fan module 14, which is mounted on a side wall of the housing 11 and configured to draw air outward from the interior of the housing 11. It should be noted that the fluid ejected through the cleaning pipeline assembly 13 includes a volatile liquid. To improve safety, the fan module 14 is used to extract the volatile gas within the housing 11.

[0093] In a specific application, the fan module 14 is mounted on the top side wall of the housing 11 and includes a fan mounting base 141 and a plurality of fans 142. The plurality of fans 142 are mounted on the fan mounting base 141. As shown in FIG2 , in the illustrated embodiment, there are three fans 142. Of course, the mounting position of the fan module 14 and the number of fans 142 are not specifically limited herein, as long as the fan module 14 can draw air outward.

[0094] In an optional embodiment, the housing 11 is provided with a cover 111, which is connected to the side wall of the housing 11 and covers the drive module 122 and the sliding mechanism 123. The cover 111 seals the drive module 122 and the sliding mechanism 123 to prevent contamination of the transmission mechanism and the sliding mechanism 123, thereby extending the service life of the cleaning equipment. It is understandable that the cover 111 also covers the chute 112 and also serves to prevent liquid from splashing. In addition, referring to Figure 4, a liquid outlet 114 is provided at the bottom of the housing 11, and waste liquid after cleaning the workpiece 4 is discharged from the housing 11 through the liquid outlet 114.

[0095] In addition, the top of the box body 11 is open. When the carrier 121 is located at the top, the carrier 121 extends outward through the top opening of the box body 11, which makes it convenient for workers to load the workpiece 4 to be cleaned.

[0096] 8 , a second aspect of the present invention provides a cleaning system, which includes the above-mentioned cleaning device 1. Obviously, the cleaning system has all the beneficial effects brought by the above-mentioned cleaning device 1, and no further description will be given here.

[0097] The cleaning system further includes an operating console assembly 2 and a liquid storage tank assembly 3. The liquid storage tank assembly 3 is connected to the cleaning pipeline assembly 13. The operating console assembly 2 is used to control the operation of the cleaning equipment 1. The liquid storage tank assembly 3 can store cleaning liquid and spray it through the cleaning pipeline assembly 13. The operating console assembly 2 can control the operation of the cleaning equipment 1, for example, controlling the spraying time of the cleaning pipeline assembly 13 and controlling the movement speed and direction of the vehicle 121 on the mobile vehicle platform 12.

[0098] Furthermore, a liquid level sensor 33 is provided at the bottom of the liquid storage tank group 3. The liquid level sensor 33 is connected to the control unit 222 for signal communication, and the liquid level in the liquid storage tank group 3 can be monitored by the control unit.

[0099] Referring to Figure 7 , the console assembly 2 further comprises a cabinet 21, a control module 22, and a pump-valve assembly 23. The control module 22 comprises an input unit 221 and a control unit 222, which is signal-connected to the input unit 221. The pump-valve assembly 23 is disposed within the cabinet 21 and is connected to the liquid storage tank assembly 3. The pump-valve assembly 23 and the drive module 122 are both signal-connected to the control unit 222.

[0100] The operating table assembly 2 mainly integrates a control module 22 and a pump-valve assembly 23 . The control module 22 is used to control the driving module 122 and the pump-valve assembly 23 , thereby controlling the combined operation of the cleaning pipeline assembly 13 and the mobile carrier platform 12 .

[0101] It should be noted that the input unit 221 includes buttons, a touch screen, etc. The control unit 222 includes, but is not limited to, a general-purpose processor, a special-purpose processor, a conventional processor, a digital signal processor (DSP), multiple microprocessors, one or more microprocessors associated with a DSP core, a controller, a microcontroller, a single-chip microcomputer, an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) circuit, any other type of integrated circuit (IC), and a state machine, etc.

[0102] It should also be noted that the pump-valve assembly 23 includes a pump and an electrically controlled valve. The pump is used to pump liquid from the liquid reservoir assembly 3 into the cleaning pipeline assembly 13, and the electrically controlled valve is used to control the opening and closing of the pipeline. Of course, both the pump and the electrically controlled valve are controlled by the control unit 222. It is understandable that the number of pump-valve assemblies 23 is determined by the number of liquid reservoirs in the liquid reservoir assembly 3, and the number of liquid reservoirs in the liquid reservoir assembly 3 is determined by the number of cleaning pipelines in the cleaning pipeline assembly 13. The number of pump-valve assemblies 23 can be adaptively adjusted according to demand.

[0103] In a preferred embodiment, there are three cleaning pipelines, arranged from top to bottom: an air blowing pipeline 131, a first spraying pipeline 132, and a second spraying pipeline 133. The liquid reservoir assembly 3 includes a first liquid reservoir 31 and a second liquid reservoir 32. The first liquid reservoir 31 is connected to the first spraying pipeline 132 and is used to store a first cleaning agent. The second liquid reservoir 32 is connected to the second spraying pipeline 133 and is used to store a second cleaning agent. The first spraying pipeline 132 is used to spray the first cleaning agent, while the second spraying pipeline 133 is used to spray the second cleaning agent. Different cleaning agents are sprayed to achieve different cleaning effects. The air blowing pipeline 131 is used to dry the sprayed workpiece.

[0104] It should be noted that, in an optional embodiment, a filtering device, such as a filter net, may be provided on the pipeline between the liquid storage tank group 3 and the cleaning pipeline group 13 to ensure the cleanliness of the cleaning liquid and avoid secondary contamination of the workpiece 4.

[0105] In addition, it should be noted that the box body 11, the mobile carrier platform 12, the cleaning pipeline group 13, the liquid storage tank group 3, etc. are all made of stainless steel and chemical-resistant materials to avoid corrosion by cleaning agents.

[0106] Please refer to Figure 10. The third aspect of the present invention further provides a cleaning method, which is implemented using the above-mentioned cleaning system. Specifically, the cleaning system can be applied to chip cleaning. The first cleaning agent is water. The cleaning method includes the following steps.

[0107] Step S1, placing the chip on the carrier 121;

[0108] Step S2, applying a start signal to the input unit 221, and the input unit 221 transmits the start signal to the control unit 222;

[0109] Step S3: The control unit 222 controls the carrier 121 to move the chip back and forth between the spray area corresponding to the first spray line 132 and the spray area corresponding to the second spray line 133. The control unit 222 controls the pump valve assembly 23 to alternately pump liquid from the first liquid storage tank 31 and the second spray line 133, so that the first spray line 132 and the second spray line 133 alternately spray and clean the chip.

[0110] Step S4: The control unit 222 controls the carrier 121 to move the chip again into the spray area corresponding to the first spray pipe 132. The control unit 222 controls the pump valve assembly 23 to pump liquid from the first liquid storage tank 31 so that the first spray pipe 132 sprays the chip with water for cleaning.

[0111] Step S5: The control unit 222 controls the carrier 121 to move the chip to the purge area corresponding to the air blowing pipeline 131 to complete the purge of the chip;

[0112] In step S6 , the control unit 222 controls the carrier 121 to move the cleaned chips out of the cleaning area of ​​the cleaning pipeline assembly 13 .

[0113] In step S2, the start signal includes, for example, a signal generated by a start button and operation parameters inputted via a touch screen, such as the number of alternate spraying times and the operation time corresponding to each cleaning pipeline.

[0114] In steps S3 to S5, the control unit 222 can control the combined operation of the mobile carrier platform 12 and the corresponding pump-valve assembly 23 according to the parameters input by the input unit 221. For example, when the carrier 121 moves into the spraying area of ​​the first spray pipeline 132 or the spraying area of ​​the second spray pipeline 133, the spraying time and spraying pressure of the spray pipeline are controlled; or when the carrier 121 moves into the purge area of ​​the air blowing pipeline 131, the air blowing time of the air blowing pipeline 131 is controlled.

[0115] In step S4, the chip can be moved to the spray area corresponding to the first spray line 132 and then start alternate cleaning, or the chip can be moved to the spray area corresponding to the second spray line 133 and then start alternate cleaning. The order of alternate cleaning is not limited.

[0116] It is understood that in step S5, the air blowing pipeline 131 is connected to a gas source, which is connected to the air blowing pipeline 131 via a connecting air pipe. The connecting air pipe may be provided with a solenoid valve connected to a signal of the control unit 222. The solenoid valve is used to open and close the air pipe, thereby controlling the operation of the air blowing pipeline 131. It should be noted that the gas source is preferably an inert gas source, including, for example, nitrogen, helium, etc.

[0117] It should be noted that, in an optional embodiment, the start signal includes the number of alternating spraying times, and the number of cyclic spraying times refers to the number of alternating spraying times in step S4. The number of alternating spraying times can be adaptively adjusted according to actual conditions.

[0118] In addition, it should be noted that when the cleaning system is applied to chip cleaning, the last spray cleaning step is water spraying. The cleaning system is not limited to chip cleaning, and the type of cleaning agent and the spraying sequence can be adjusted according to the type of workpiece to be cleaned.

[0119] In an optional embodiment, a touch screen and buttons are provided on the operating table assembly 2. The first cleaning agent and the second cleaning agent are water and isopropyl alcohol, respectively. After placing the chip to be cleaned on the carrier 121, the cleaning program is selected on the touch screen and the start button is pressed. The cleaning system will automatically operate according to the cleaning program.

[0120] For example, carrier 121 automatically moves the chip to the spray area corresponding to the first spray line 132 and sprays it with water for 10 seconds. Next, carrier 121 moves the chip to the spray area corresponding to the second spray line 133 and sprays it with isopropyl alcohol solution for 10 seconds. After repeating the above alternating spraying process, carrier 121 moves to the spray area corresponding to the first spray line 132 again and sprays it with water for 10 seconds. Next, carrier 121 moves the chip to the purge area corresponding to the air blowing line 131 and purges it for 20 seconds. Finally, carrier 121 moves out of the cleaning area to complete the cleaning process.

[0121] In summary, the cleaning device 1 provided by the present invention can spray clean the chips placed on the carrier 121, reduce damage to the chips, and ensure the service life of the chips. In addition, the present invention also provides a cleaning system equipped with the above cleaning device 1, which can realize the automatic full-process chip cleaning operation.

[0122] Although the embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and are not to be construed as limitations on the present invention. A person skilled in the art may change, modify, replace and modify the above embodiments within the scope of the present invention.

Claims

1. A cleaning device, characterized in that: The cleaning equipment comprises: Box; A mobile carrier platform, installed in the box and comprising a carrier and a drive module, wherein the carrier is located in the box, and the drive module is connected to the carrier and is used to drive the carrier to move linearly in the up and down directions; and The cleaning pipeline group includes multiple cleaning pipelines, each of which is arranged in the box and includes a pipeline body and a nozzle. The nozzle is connected to the pipeline body and is arranged to face the carrier.

2. The cleaning device according to claim 1, characterized in that The carrier includes: a support frame having multiple loading stations; and A cover assembly is pivotally connected to the support frame and is located above the loading station. The cover assembly is used to limit the workpiece loaded in the loading station in the up and down directions.

3. The cleaning device according to claim 2, characterized in that The support frame comprises: Vehicle body; a base, disposed at the bottom of the carrier body; and Connecting side panels, disposed at both ends of the base to clamp the carrier body and pivotally connected to the cover assembly; Wherein, the loading station is located on the carrier body.

4. The cleaning device according to claim 3, characterized in that The support frame further includes a baffle connected to the connecting side plate to limit the pivotal movement of the cover assembly.

5. The cleaning device according to claim 2, characterized in that The cover plate assembly comprises: a cover plate pivotally connected to the support frame; and A plurality of limiting components are connected to the cover plate and are aligned with the plurality of loading stations.

6. The cleaning device according to claim 2, characterized in that The carrier further includes a locking structure, which is used to maintain the carrier in an open state. When the carrier 121 is in the open state, the cover assembly opens the loading station.

7. The cleaning device according to claim 1, characterized in that One end of the pipeline body is an inlet end, and the other end is a closed arrangement.

8. The cleaning device according to claim 1, characterized in that The pipeline body includes a main pipeline and multiple branch pipelines. The multiple branch pipelines are arranged at intervals on the main pipeline along the extension direction of the pipeline body and are connected to the main pipeline. Each branch pipeline is correspondingly provided with a nozzle.

9. The cleaning device according to claim 1, characterized in that The cleaning pipeline groups are relatively arranged on two sides of the carrier.

10. The cleaning device according to claim 1, characterized in that The multiple cleaning pipelines are arranged at intervals in the vertical direction.

11. The cleaning device according to claim 1, characterized in that The mobile carrier platform further includes a sliding mechanism, which is installed on the box body, and the carrier is slidingly connected to the box body through the sliding mechanism.

12. The cleaning device according to claim 11, characterized in that The driving module includes a power component and a transmission mechanism, the transmission mechanism is connected to the sliding mechanism, the power component is connected to the transmission mechanism, and the power component is used to drive the transmission mechanism so that the sliding mechanism drives the carrier.

13. The cleaning device according to claim 1, characterized in that The cleaning device further comprises a fan module, which is installed in the box and configured to draw air outward from the box.

14. The cleaning device according to claim 8, characterized in that The number of the cleaning pipelines is three, and they are an air blowing pipeline, a first spraying pipeline, and a second spraying pipeline arranged from top to bottom.

15. A cleaning system, characterized in that: The cleaning system comprises the cleaning device according to any one of claims 1 to 13.

16. The cleaning system according to claim 15, characterized in that The cleaning system further includes an operating table assembly and a liquid storage tank group. The liquid storage tank group is connected to the cleaning pipeline group. The operating table assembly is used to control the operation of the cleaning equipment.

17. The cleaning system according to claim 16, characterized in that The operating table assembly includes: Cabinets; a control module comprising an input unit and a control unit, wherein the control unit is signal-connected to the input unit; and A pump and valve assembly is arranged in the cabinet and connected to the liquid storage tank group; Wherein, the pump valve assembly and the drive module are both connected to the control unit signal.

18. The cleaning system according to claim 16, characterized in that A liquid level sensor is provided at the bottom of the liquid storage tank group.

19. The cleaning system according to claim 17, wherein: The number of the cleaning pipelines is 3, and they are respectively arranged from top to bottom: an air blowing pipeline, a first spraying pipeline, and a second spraying pipeline; The liquid storage tank group includes a first liquid storage tank and a second liquid storage tank. The first liquid storage tank is connected to the first spray pipeline and is used to store a first cleaning agent. The second liquid storage tank is connected to the second spray pipeline and is used to store a second cleaning agent.

20. A cleaning method, characterized in that: The cleaning method is implemented according to the cleaning system of claim 19, wherein the first cleaning agent is water, and the cleaning method comprises: Fixing the chip on the carrier; applying a start signal to the input unit, and the input unit transmitting the start signal to the control unit; The control unit controls the carrier to move the chip back and forth between the spray area corresponding to the first spray line and the spray area corresponding to the second spray line, and the control unit controls the pump valve assembly to alternately pump liquid from the first liquid storage tank and the second liquid storage tank, so that the first spray line and the second spray line alternately spray and clean the chip; The control unit controls the carrier to move the chip again to the spray area corresponding to the first spray pipeline, and the control unit controls the pump valve assembly to pump liquid from the first liquid storage tank so that the first spray pipeline sprays water to clean the chip; The control unit controls the carrier to move the chip into the purge area corresponding to the air blowing pipeline to complete the purge of the chip; The control unit controls the carrier to move the cleaned chips out of the cleaning area of ​​the cleaning pipeline group.

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