Cleaning device and cleaning method for auxiliary furnace chamber of single crystal furnace

Abstract

The invention provides a cleaning device for an auxiliary furnace chamber of a single crystal furnace, belongs to the technical field of single crystal furnace cleaning, and solves the problem of poor cleaning effect of the auxiliary furnace chamber of the single crystal furnace in the prior art. The robot comprises a base body, a climbing assembly and a cleaning assembly, the base body has the rotational freedom degree, the climbing assembly acts on the base body so that the base body can have the upward or downward movement freedom degree, the cleaning assembly comprises a first base plate, a cleaning brush and a first pneumatic part, the first base plate is arranged on the base body, and the cleaning brush is arranged on the first base plate. The first base plate has the moving freedom degree of unfolding or folding in the peripheral direction of the base body, the cleaning brush is arranged on the side, away from the base body, of the first base plate and used for cleaning the inner wall of the auxiliary furnace chamber, an elastic layer is arranged between the cleaning brush and the first base plate, and at least part of the elastic layer and the first base plate have the moving freedom degree of attaching or separating. The first pneumatic part penetrates through the first base plate to be communicated with the elastic layer, and the first pneumatic part is externally connected with an air source to adjust the flatness of the elastic layer relative to the first base plate.

Description

Technical Field

[0001] The present application belongs to the technical field of single crystal furnace cleaning, and specifically, relates to a single crystal furnace auxiliary chamber cleaning device and a cleaning method. Background Art

[0002] The single crystal furnace used in the photovoltaic and semiconductor industries will have some oxide powders on the inner wall of the auxiliary furnace chamber during the crystal pulling process. After pulling the crystal for a period of time, the generated oxide powders need to be cleaned.

[0003] At present, the auxiliary furnace chamber is mainly cleaned manually. Manual cleaning mainly has problems such as difficult cleaning, incomplete cleaning, and oxide dust posing a health threat to cleaning personnel. Based on the above problems, the prior art has developed some cleaning robots for the inner wall of the auxiliary furnace chamber of the single crystal furnace. The robots automatically climb upward and drive the cleaning device to rise and rotate to clean the inner wall of the auxiliary furnace chamber. However, due to the uneven surface of the inner wall of the auxiliary furnace chamber due to machining accuracy errors and long-term use, when the cleaning device is used for cleaning, there are easy to be cleaning dead corners, resulting in incomplete cleaning of the inner wall of the auxiliary furnace chamber, affecting the subsequent crystal growth environment.

[0004] According to the above content, the technical problem to be solved by this application is: the cleaning effect of the auxiliary furnace chamber of the single crystal furnace is poor. Summary of the invention

[0005] The purpose of this application is to address the above-mentioned problems existing in the prior art and to propose a single crystal furnace auxiliary furnace chamber cleaning device and cleaning method, which solves the problem of poor cleaning effect of the inner wall of the auxiliary furnace chamber in the prior art and improves the cleaning effect of the inner wall of the auxiliary furnace chamber.

[0006] The object of the present application can be achieved through the following technical solutions: A cleaning device for a single crystal furnace auxiliary furnace chamber, comprising: a base, the base having a rotational degree of freedom; a climbing assembly, the climbing assembly acting on the base so that the base has a degree of freedom of movement to move upward or downward; a cleaning assembly, the cleaning assembly comprising: a first substrate, the first substrate is arranged on the base, the first substrate has a degree of freedom of movement to expand or retract toward the outer peripheral direction of the base; a cleaning brush, the cleaning brush is arranged on the side of the first substrate away from the base, and is used to clean the inner wall of the auxiliary furnace chamber; an elastic layer, the elastic layer is arranged between the cleaning brush and the first substrate, the elastic layer at least partially has a degree of freedom of movement to fit or separate from the first substrate, the elastic layer comprises: a fixed part, the two sides of the fixed part are fixedly connected to the first substrate and the cleaning brush respectively; a movable part, one side of the movable part is fixedly connected to the cleaning brush, and an movable cavity is formed between the other side of the movable part and the first substrate; and a first pneumatic part, the first pneumatic part passes through the first substrate and communicates with the movable cavity, and the first pneumatic part is externally connected to an air source to adjust the flatness of the elastic layer.

[0007] Exemplarily, the climbing assembly includes a plurality of gears, tracks arranged on the gears, and a driving motor connected to the gears. The gears are driven to rotate by the output end of the driving motor, and the gear rotation drives the tracks to transport. The tracks can move up and down along the inner wall of the auxiliary furnace chamber, thereby driving the base to move up and down. The cleaning assembly mainly includes a first substrate and a cleaning brush. The cleaning brush can rotate synchronously with the rotation of the base, thereby cleaning the inner wall of the auxiliary furnace chamber. In addition, the cleaning brush and the first substrate are multiple and have an expanded state and a folded state. In the folded state, multiple cleaning brushes are enclosed and spliced ​​together to form a ring. In the expanded state, each cleaning brush is expanded toward the outer periphery of the substrate, and each cleaning brush is evenly spaced in the circumferential direction. It can be understood that, by arranging an elastic layer between the first substrate and the cleaning brush, and configuring a corresponding first pneumatic part for the elastic layer, when there is a concave / convex area on the inner wall of the auxiliary furnace chamber, the air intake / extraction amount can be increased by setting a certain / certain first pneumatic parts, so that the corresponding elastic layer is forced to expand / contract, driving the cleaning brush of this part to deform synchronously to adapt to the shape of the inner wall of the auxiliary furnace chamber, avoiding cleaning dead corners, thereby improving the cleaning effect of the inner wall of the auxiliary furnace chamber. Exemplarily, the fixed part is configured as a continuous circle on the elastic layer, the fixed part is bonded to the first substrate by an adhesive or fixed to the first substrate by a fastener, the movable part is configured as a movable part between the fixed parts, the movable part and the first substrate can be abutted or separated, when the first pneumatic part injects gas into the active cavity, the movable part is separated from the first substrate under the action of the gas, so that the cleaning brush corresponding to the part is convex, when the first pneumatic part extracts gas from the active cavity, the movable part is in close contact with the first substrate under the action of negative pressure, and the cleaning brush corresponding to the part is flat or concave.

[0008] In the above-mentioned single crystal furnace auxiliary chamber cleaning device, there are multiple movable parts, and each of the movable parts forms an active cavity in one-to-one correspondence. The first substrate is provided with a first through hole corresponding to the active cavity, and the first through hole is connected to the first pneumatic part. It can be understood that by configuring multiple movable parts and active cavities, any one or more active cavities can be selectively adjusted to indirectly improve the controllability of the concave and convex shape of the cleaning brush. Specifically, the multiple first through holes can be connected to two to three ventilation pipes respectively, and then a corresponding valve is configured for each ventilation pipe to control the opening and closing of the valve, so as to adjust the size of each part of the active cavity.

[0009] In the above-mentioned cleaning device for the auxiliary furnace chamber of the single crystal furnace, the cleaning assembly further includes: a second substrate, the second substrate is connected to the first substrate and is located below the first substrate, and a fixing member is provided on the second substrate, and the fixing member surrounds to form a fixing area, and the fixing area is used to accommodate the cleaning cloth. It can be understood that by arranging the second substrate below the first substrate, after the cleaning brush cleans the inner wall of the auxiliary furnace chamber, the cleaning cloth accommodated in the fixing area can be used to perform a secondary cleaning on the inner wall of the auxiliary furnace chamber, thereby further improving the cleaning effect.

[0010] In the above-mentioned single crystal furnace auxiliary chamber cleaning device, a plurality of second through holes are provided in the fixed area, and the second through holes are connected to a second pneumatic member, and the second pneumatic member is used to connect to an external gas source. Similarly, by providing a plurality of second through holes in the fixed area, when a cleaning cloth is fixed on the fixed area, the arrangement form of the cleaning cloth can be adjusted, such as convex, concave or flat, by utilizing the gap formed between the cleaning cloth and the second substrate, and the air intake / exhaust volume control of the second through holes.

[0011] In the above-mentioned cleaning device for the auxiliary furnace chamber of the single crystal furnace, a visual inspection unit is provided on the top of the substrate, and the visual inspection unit faces the outer periphery of the substrate and is used to scan the inner wall of the auxiliary furnace chamber. It can be understood that the visual inspection unit is configured as a CCD camera and can be set in the top area of ​​the substrate. When the substrate climbs up under the action of the climbing component, the visual inspection unit synchronously scans the inner wall of the auxiliary furnace chamber. When the subsequent cleaning brush reaches the corresponding height position in the auxiliary furnace chamber, the corresponding adjustment operation can be performed according to the scanning information of the visual inspection unit.

[0012] In the above-mentioned single crystal furnace auxiliary chamber cleaning device, a detection component is provided in the movable cavity, and the detection component includes: a detection wire, which is arranged in the movable cavity and arranged along the length direction of the first substrate, and the two ends of the detection wire are respectively connected to the movable part; a detection module, which is arranged between the first substrate and the detection wire, and the detection module can be connected to the detection wire to form a conductive circuit; wherein, the detection wire can enter a contact state or a separation state as the movable part moves, and in the contact state, the detection wire is connected to the detection module, and in the separation state, the detection wire is separated from the detection module.

[0013] It is understandable that the two ends of the detection wire can be connected to the movable part respectively. When the active cavity is not injected with gas, the movable part is concave or flat. The detection wire and the detection module are attached to form a closed conductive loop. When the gas in the active cavity gradually increases, the movable part can be movable and protruded to drive the detection wire to move synchronously, and the moving direction of the detection wire deviates from the detection module until the two are completely separated. The communication component can be used to transmit signals between the detection module and the gas injection mechanism, so that the gas injection can be stopped. Therefore, by using the detection wire in conjunction with the detection module, the protruding state of the movable part can be detected, the situation of insufficient gas injection can be avoided, and the effective cleaning area of ​​the cleaning brush can be increased. Exemplarily, the detection module can be set in multiple groups below the length direction of the detection wire, preferably three groups, such as a group below the middle area of ​​the detection wire, and a group below each end of the detection wire.

[0014] In the above-mentioned single crystal furnace auxiliary chamber cleaning device, the detection module also includes a heating unit. It is understandable that when the movable part droops, the detection wire contacts the detection module, thereby conducting the circuit, so that the heating unit in the detection module is energized to heat the air near it, and then the gas expands to drive the movable part to bulge, and finally increases the effective cleaning area of ​​the cleaning brush, and after the movable part bulges, the detection wire can be automatically disconnected from the detection module, avoiding excessive heat accumulation due to continuous heating and preventing the movable part from rupture. In some embodiments, the detection module is set to multiple groups, thereby increasing the range of the heating area, that is, compensating for multiple areas where gas injection is insufficient. Exemplarily, the heating unit can be a resistance wire.

[0015] In the above-mentioned single crystal furnace auxiliary chamber cleaning device, the base body includes: a first support plate; a second support plate, the second support plate is arranged on the first support plate, and a telescopic rod is arranged between the second support plate and the first support plate, and the telescopic rod acts on the first substrate to drive the first substrate to expand or retract. It can be understood that by arranging the telescopic rod between the first support plate and the second support plate, the first substrate is driven to expand or retract, and the expansion of the first substrate can drive the cleaning brush to expand synchronously, and the retraction of the first substrate can drive the cleaning brush to retract synchronously.

[0016] In the above-mentioned single crystal furnace auxiliary chamber cleaning device, the first support plate is rotatably arranged relative to the second support plate, and a plurality of arc-shaped guide grooves are arranged on the first support plate, and the guide grooves extend from the center close to the substrate to the periphery, and a guide portion is arranged on the telescopic rod, and the guide portion is arranged in the guide groove and can move along the guide groove. It can be understood that the movement and extension of the telescopic rod are guided by setting the arc-shaped guide groove, especially when there are multiple telescopic rods and they are distributed in the annular direction around the center of the substrate, by using a plurality of set guide grooves, it can be ensured that the telescopic distances of each telescopic rod are the same and synchronous, and only one driving mechanism is required to drive the first support plate or the second support plate to rotate, so as to drive the telescopic rod to move and extend along the guide groove.

[0017] In the above-mentioned single crystal furnace auxiliary chamber cleaning device, a first driving mechanism is provided between the first support plate and the second support plate, and the first driving mechanism acts on one of the first support plate and the second support plate to make the first support plate and the second support plate rotate relative to each other.

[0018] Another object of the present application is to provide a method for cleaning a secondary furnace chamber of a single crystal furnace, comprising the following steps:

[0019] Scan and obtain the image of the inner wall of the auxiliary furnace chamber, and fit it into a virtual model based on the image;

[0020] Based on the virtual model, the required unfolded length of the cleaning brush and the flatness of the elastic layer are determined;

[0021] The cleaning brush is controlled to unfold, and the pneumatic part is controlled to introduce / extract corresponding gas from the surface of the corresponding elastic layer.

[0022] It is understandable that by visually scanning the inner wall of the auxiliary furnace chamber while the base body climbs up, a series of scanned images can be obtained. These scanned images can be spliced ​​to obtain the complete shape of the inner wall of the auxiliary furnace chamber, that is, to form a virtual model by fitting. Then, the distance from each point of the outer surface of the base body to the inner wall of the auxiliary furnace chamber is calculated through the virtual model to determine the length that the cleaning brush needs to be unfolded and the corresponding flatness of the elastic layer. For example, when there is a partial depression in the virtual model, the elastic layer will be configured as a convex shape when entering the position to adapt to the partial depression area. Finally, the cleaning brush is controlled to unfold to the set length, and the required amount of gas is introduced / extracted by the pneumatic parts to complete the docking with the inner wall of the auxiliary furnace chamber. The subsequent rotation of the base body can drive the cleaning brush to rotate and clean the inner wall of the auxiliary furnace chamber.

[0023] Compared with the prior art, this application has the following beneficial effects:

[0024] 1. The present application arranges an elastic layer between the first substrate and the cleaning brush, and configures a corresponding first pneumatic part for the elastic layer. When there is a concave / convex area on the inner wall of the auxiliary furnace chamber, the air intake / exhaust volume can be increased by setting a certain / certain first pneumatic parts, so that the corresponding elastic layer is forced to expand / contract, driving the part of the cleaning brush to deform synchronously to adapt to the shape of the inner wall of the auxiliary furnace chamber, avoiding cleaning dead corners, thereby improving the cleaning effect of the inner wall of the auxiliary furnace chamber;

[0025] 2. The present application configures a plurality of movable parts and movable cavities, so that any one or more movable cavities can be selectively adjusted to indirectly improve the controllability of the concave-convex shape of the cleaning brush;

[0026] 3. By arranging the second substrate below the first substrate, the present application can perform secondary cleaning of the inner wall of the auxiliary furnace chamber by using the cleaning cloth accommodated in the fixed area after the cleaning brush cleans the inner wall of the auxiliary furnace chamber, thereby further improving the cleaning effect;

[0027] 4. The present application can detect the convex state of the movable part by cooperating with the detection wire and the detection module, so as to avoid the situation of insufficient gas injection and ensure that the cleaning brush can fit the inner wall of the auxiliary furnace chamber in the fullest posture, thereby increasing the effective cleaning area of ​​the cleaning brush;

[0028] 5. The present application drives the first substrate to expand or collapse by setting a telescopic rod between the first support plate and the second support plate. The expansion of the first substrate can drive the cleaning brush to expand synchronously, and the collapse of the first substrate can drive the cleaning brush to collapse synchronously. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a three-dimensional structural schematic diagram of the first state of the auxiliary furnace chamber cleaning device of the single crystal furnace of the present application;

[0030] Figure 2It is a schematic diagram of the three-dimensional structure of the auxiliary furnace chamber cleaning device of the single crystal furnace of the present application in the second state;

[0031] Figure 3 This is a schematic diagram of the structure of the cleaning device of this application. Figure 1 ;

[0032] Figure 4 yes Figure 3 Schematic diagram of part of the structure after the cleaning brush is hidden;

[0033] Figure 5 This is a schematic diagram of the structure of the cleaning device of this application. Figure 2 ;

[0034] Figure 6 This is a simplified structural diagram of the active chamber and detection components of this application. Figure 1 ;

[0035] Figure 7 This is a simplified structural diagram of the active chamber and detection components of this application. Figure 2 ;

[0036] Figure 8 It is a schematic diagram of the circuit inside the power-on module of the present application;

[0037] Fig. 9 It is a schematic diagram of the top view of the auxiliary chamber cleaning device of the single crystal furnace of the present application after hiding part of the structure in the first state;

[0038] Fig.10 yes Fig. 9 A schematic diagram of the structure after hiding the first support plate;

[0039] Fig.11 It is a schematic diagram of the top view of the auxiliary chamber cleaning device of the single crystal furnace of the present application after hiding part of the structure in the second state;

[0040] Fig.12 yes Fig.11 A schematic diagram of the structure after hiding the first support plate;

[0041] Fig.13 It is a schematic diagram of the process of cleaning the auxiliary furnace chamber of the single crystal furnace of the present application;

[0042] In the figure, 100, base; 110, first support plate; 111, guide groove; 120, second support plate; 130, telescopic rod; 131, guide part; 140, first driving mechanism; 200, climbing component; 210, gear; 220, crawler; 230, driving motor; 300, cleaning component; 310, first substrate; 311, first through hole; 320, cleaning brush; 330, elastic layer; 331, fixed part; 332, movable part; 340, first pneumatic part; 350, second substrate; 351, fixed part; 352, fixed area; 353, second through hole; 350, second pneumatic part; 400, visual detection unit; Q, movable cavity; 500, detection component; 510, detection wire; 520, detection module; 521, power supply; 522, wire; 523, switch; 524, heating unit. Specific embodiments

[0043] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0044] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred components or elements must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present application.

[0045] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0046] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0047] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0048] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only embodiment.

[0049] Please refer to the attached drawings in the instruction manual. Figure 1-Figure 3The cleaning device of the auxiliary furnace chamber of the single crystal furnace of the present application comprises: a base 100, a climbing assembly 200 and a cleaning assembly 300. The base 100 has a rotational freedom, and the climbing assembly 200 acts on the base 100 so that the base 100 has a degree of freedom to move upward or downward; the cleaning assembly 300 comprises: a first substrate 310, a cleaning brush 320, an elastic layer 330 and a first pneumatic part 340. The first substrate 310 is arranged on the base 100, and the first substrate 310 has a degree of freedom to expand or retract toward the outer peripheral direction of the base 100. The cleaning brush 320 is arranged on the side of the first substrate 310 away from the base 100, and is used to clean the inner wall of the auxiliary furnace chamber. The elastic layer 330 is arranged on the cleaning brush 320. 0 and the first substrate 310, the elastic layer 330 at least partially has the freedom of movement to fit or separate with the first substrate 310, the elastic layer 330 includes: a fixed portion 331 and a movable portion 332, both sides of the fixed portion 331 are fixedly connected to the first substrate 310 and the cleaning brush 320 respectively, one side of the movable portion 332 is fixedly connected to the cleaning brush 320, an active cavity is formed between the other side of the movable portion 332 and the first substrate 310, the first pneumatic member 340 passes through the first substrate 310 and communicates with the active cavity, and the first pneumatic member 340 is externally connected to an air source to adjust the flatness of the elastic layer 330.

[0050] Exemplarily, the climbing assembly 200 includes a plurality of gears 210, a crawler 220 arranged on the gears 210, and a driving motor 230 connected to the gears 210. The gears 210 are driven to rotate by the output end of the driving motor 230. The rotation of the gears 210 drives the crawler 220 to transport. The crawler 220 can move up and down along the inner wall of the auxiliary furnace chamber, thereby driving the base 100 to move up and down. The cleaning assembly 300 mainly includes a first base plate 310 and a cleaning brush 320. The cleaning brush 320 can rotate synchronously with the rotation of the base 100, thereby cleaning the inner wall of the auxiliary furnace chamber. In addition, the cleaning brush 320 and the first base plate 310 are both multiple and have an unfolded state and a folded state. In the folded state, the multiple cleaning brushes 320 are enclosed and spliced ​​together to form a ring. In the unfolded state, each cleaning brush 320 is unfolded toward the outer peripheral direction of the base 100, and each cleaning brush 320 is evenly spaced in the circumferential direction. It can be understood that by setting the elastic layer 330 between the first substrate 310 and the cleaning brush 320, and configuring the corresponding first pneumatic parts 340 for the elastic layer 330, when there is a concave / convex area on the inner wall of the auxiliary furnace chamber, the air intake / exhaust volume can be increased by setting a certain / certain first pneumatic parts 340, so that the corresponding elastic layer 330 is forced to expand / contract, driving the part of the cleaning brush 320 to deform synchronously to adapt to the shape of the inner wall of the auxiliary furnace chamber, avoiding cleaning dead corners, thereby improving the cleaning effect of the inner wall of the auxiliary furnace chamber. For example, see Figure 4The fixed portion 331 is configured as a continuous circle on the elastic layer 330, and the fixed portion 331 is bonded to the first substrate 310 by an adhesive or fixed to the first substrate 310 by a fastener. The movable portion 332 is configured as a movable portion between the fixed portions 331, and the movable portion 332 can be in contact with or separated from the first substrate 310. When the first pneumatic part 340 injects gas into the active cavity, the movable portion 332 is separated from the first substrate 310 under the action of the gas, so that the cleaning brush 320 corresponding to the portion is convex. When the first pneumatic part 340 draws gas into the active cavity, the movable portion 332 is tightly attached to the first substrate 310 under the action of negative pressure, and the cleaning brush 320 corresponding to the portion is planar or concave.

[0051] See also Figure 1 and Figure 2 In some embodiments, a visual inspection unit 400 is provided on the top of the base 100, and the visual inspection unit 400 faces the periphery of the base 100 and is used to scan the inner wall of the auxiliary furnace chamber. It can be understood that the visual inspection unit 400 is configured as a CCD camera and can be set in the top area of ​​the base 100. When the base 100 climbs up under the action of the climbing assembly 200, the visual inspection unit 400 synchronously scans the inner wall of the auxiliary furnace chamber. When the cleaning brush 320 reaches the corresponding height position in the auxiliary furnace chamber, the corresponding adjustment operation can be performed according to the scanning information of the visual inspection unit 400.

[0052] Reference Figure 3 and Figure 4 In some embodiments, there are multiple movable parts 332, and each movable part 332 forms an active cavity (not shown) in one-to-one correspondence. The first substrate 310 is provided with a first through hole 311 corresponding to the active cavity, and the first through hole 311 is connected to the first pneumatic part 340. It can be understood that by configuring multiple movable parts 332 and active cavities, any one or more active cavities can be selectively adjusted to indirectly improve the controllability of the concave and convex shape of the cleaning brush 320. Specifically, the multiple first through holes 311 can be connected to two to three ventilation pipes respectively, and then a corresponding valve is configured for each ventilation pipe to control the on and off of the valve, so as to adjust the size of each part of the active cavity.

[0053] See also Figures 3 to 5In some embodiments, the cleaning assembly 300 further includes: a second substrate 350, the second substrate 350 is connected to the first substrate 310 and is located below the first substrate 310, and a fixing member 351 is provided on the second substrate 350, and the fixing member 351 surrounds and forms a fixing area 352, and the fixing area 352 is used to accommodate a cleaning cloth. It can be understood that by arranging the second substrate 350 below the first substrate 310, after the cleaning brush 320 cleans the inner wall of the auxiliary furnace chamber, the cleaning cloth accommodated in the fixing area 352 can be used to perform a secondary cleaning on the inner wall of the auxiliary furnace chamber, thereby further improving the cleaning effect.

[0054] See also Figure 4 and Figure 5 In some embodiments, a plurality of second through holes 353 are provided in the fixed area 352, and the second through holes 353 are connected to the second pneumatic member 360, and the second pneumatic member 360 is used to connect to an external air source. Similarly, by providing a plurality of second through holes 353 in the fixed area 352, when the cleaning cloth is fixed on the fixed area 352, the arrangement form of the cleaning cloth can be adjusted, such as convex, concave or flat, by utilizing the gap formed between the cleaning cloth and the second substrate 350, and the air intake / exhaust volume control of the second through holes 353.

[0055] See also Figure 6 and Figure 7 In some embodiments, a detection component 500 is provided in the active cavity Q, and the detection component 500 includes: a detection wire 510 and a detection module 520. The detection wire 510 is provided in the active cavity Q and arranged along the length direction of the first substrate 310. Both ends of the detection wire 510 are respectively connected to the active part 332. The detection module 520 is provided between the first substrate 310 and the detection wire 510, and the detection module 520 can be connected with the detection wire 510 to form a conductive circuit; wherein, the detection wire 510 can enter a contact state or a separation state as the active part 332 moves. In the contact state, the detection wire 510 is connected to the detection module 520, and in the separation state, the detection wire 510 is separated from the detection module 520. It can be understood that the detection wire can be an optical fiber or other linear conductor, see Figure 8The detection module includes a power supply, a wire and a switch. The detection wire can contact the switch of the detection module to close the switch and form a conductive loop with the power supply and the wire, or the detection wire can be separated from the switch of the detection module to disconnect the switch, so that the conductive loop is disconnected. The two ends of the detection wire 510 can be connected to the movable part 332 respectively. When the active cavity Q is not injected with gas, the movable part 332 is concave or flat, that is, the detection wire 510 and the detection module 520 are attached to form a closed conductive loop. When the gas in the active cavity Q gradually increases, the movable part 332 can be raised to drive the detection wire 510 to move synchronously, and the moving direction of the detection wire 510 deviates from the detection module 520 until the two are completely separated. The detection module 520 and the gas injection mechanism can use the communication element to transmit signals, so that the gas injection mechanism can be controlled to stop gas injection. Therefore, by using the detection wire 510 to cooperate with the detection module 520, the raised state of the movable part 332 can be detected, avoiding the situation of insufficient gas injection, and increasing the effective cleaning area of ​​the cleaning brush 320. Exemplarily, the detection modules 520 may be arranged in multiple groups below the length direction of the detection wire 510, preferably three groups, such as one group below the middle area of ​​the detection wire 510, and one group below each end of the detection wire 510. Figure 8 , the detection module 520 also includes a heating unit. It is understandable that when the movable part sags, the detection wire contacts the detection module 520, thereby conducting the circuit, so that the heating unit in the detection module 520 is energized to heat the air near it, and then the gas expands to drive the movable part to bulge, and finally increases the effective cleaning area of ​​the cleaning brush 320, and after the movable part bulges, the detection wire can be automatically disconnected from the detection module 520, avoiding excessive heat accumulation due to continuous heating and preventing the movable part from rupturing. In some embodiments, the detection module 520 is set to multiple groups, thereby increasing the range of the heating area, that is, compensating for multiple areas where gas injection is insufficient. Exemplarily, the thermal unit can be a resistance wire.

[0056] See also Figures 9 to 12 In some embodiments, the base 100 includes a first support plate 110 and a second support plate 120, the second support plate 120 is disposed on the first support plate 110, and a telescopic rod 130 is disposed between the second support plate 120 and the first support plate 110, and the telescopic rod 130 acts on the first substrate 310 to drive the first substrate 310 to expand or retract. It can be understood that by disposing the telescopic rod 130 between the first support plate 110 and the second support plate 120, the first substrate 310 is driven to expand or retract, and the expansion of the first substrate 310 can drive the cleaning brush 320 to expand synchronously, and the retraction of the first substrate 310 can drive the cleaning brush 320 to retract synchronously.

[0057] Continue to refer to Figures 9 to 12The first support plate 110 is rotatably arranged relative to the second support plate 120. The first support plate 110 is provided with a plurality of arc-shaped guide grooves 111, which extend from the center close to the base 100 to the periphery. The telescopic rod 130 is provided with a guide portion 131, which is arranged in the guide groove 111 and can move along the guide groove 111. It can be understood that the movement and extension of the telescopic rod 130 are guided by setting the arc-shaped guide groove 111. In particular, when there are a plurality of telescopic rods 130 and they are distributed in a circumferential direction around the center of the base 100, the telescopic distances of each telescopic rod 130 can be ensured to be the same and synchronous by using a plurality of set guide grooves 111. Only one driving mechanism is required to drive the first support plate 110 or the second support plate 120 to rotate, so as to drive the telescopic rod 130 to move and extend along the guide groove 111.

[0058] like Figures 9 to 12 As shown, in some embodiments, a first driving mechanism 140 is further provided between the first support plate 110 and the second support plate 120, and the first driving mechanism 140 acts on one of the first support plate 110 and the second support plate 120 to make the first support plate 110 and the second support plate 120 rotate relative to each other.

[0059] See also Fig.13 The single crystal furnace auxiliary chamber cleaning method of the present application comprises the following steps:

[0060] Scan and obtain the image of the inner wall of the auxiliary furnace chamber, and fit it into a virtual model based on the image;

[0061] Based on the virtual model, determining the required unfolded length of the cleaning brush 320 and the flatness of the elastic layer 330;

[0062] The cleaning brush 320 is controlled to unfold, and the pneumatic parts are controlled to pass / extract the corresponding gas on the surface of the elastic layer 330. It can be understood that by visually scanning the inner wall of the auxiliary furnace chamber while the base 100 climbs up, a series of scanned images can be obtained, and the complete shape of the inner wall of the auxiliary furnace chamber can be obtained by splicing these scanned images, that is, fitting to form a virtual model. Then, through the virtual model, the distance from each point of the outer surface of the base 100 to the inner wall of the auxiliary furnace chamber is calculated to determine the length of the cleaning brush 320 that needs to be unfolded, and the corresponding flatness of the elastic layer 330. For example, when there is a partial depression in the virtual model, the elastic layer 330 will be configured as a convex shape to adapt to the partial depression area when entering the position. Finally, the cleaning brush 320 is controlled to unfold to a set length, and the required amount of gas is passed / extracted by the pneumatic parts, so as to complete the docking with the inner wall of the auxiliary furnace chamber. The base 100 is subsequently rotated to drive the cleaning brush 320 to rotate and clean the inner wall of the auxiliary furnace chamber.

[0063] Beneficial effects:

[0064] The present application sets an elastic layer 330 between the first substrate 310 and the cleaning brush 320, and configures a corresponding first pneumatic part 340 for the elastic layer 330. When there is a concave / convex area on the inner wall of the auxiliary furnace chamber, the air intake / exhaust volume can be increased by setting a certain / certain first pneumatic parts 340, so that the corresponding elastic layer 330 is forced to expand / contract, driving the part of the cleaning brush 320 to deform synchronously to adapt to the shape of the inner wall of the auxiliary furnace chamber, avoiding cleaning dead corners, thereby improving the cleaning effect of the inner wall of the auxiliary furnace chamber; by configuring a plurality of movable parts 332 and movable cavities, any one or more movable parts can be selectively adjusted. A plurality of movable cavities are provided to indirectly improve the controllability of the concave-convex shape of the cleaning brush 320; by arranging the second substrate 350 below the first substrate 310, after the cleaning brush 320 cleans the inner wall of the auxiliary furnace chamber, the cleaning cloth accommodated in the fixed area 352 can be used to perform secondary cleaning on the inner wall of the auxiliary furnace chamber, thereby further improving the cleaning effect; by arranging the telescopic rod 130 between the first support plate 110 and the second support plate 120, the first substrate 310 can be driven to expand or retract, and the expansion of the first substrate 310 can drive the cleaning brush 320 to expand synchronously, and the retraction of the first substrate 310 can drive the cleaning brush 320 to retract synchronously.

[0065] The specific embodiments described herein are merely examples of the spirit of the present application. A person skilled in the art of the present application may make various modifications or additions to the specific embodiments described or replace them in a similar manner, but this will not deviate from the spirit of the present application or exceed the scope defined by the attached claims.

Claims

1. A cleaning device for a secondary furnace chamber of a single crystal furnace, characterized in that: include: A base (100), wherein the base (100) has a rotational degree of freedom; A climbing assembly (200), the climbing assembly (200) acting on the base (100) so as to allow the base (100) to have the freedom of movement to move upward or downward; A cleaning assembly (300), the cleaning assembly (300) comprising: A first substrate (310), the first substrate (310) being arranged on the base (100), the first substrate (310) having the freedom of movement to expand or retract toward the outer periphery of the base (100); a cleaning brush (320), the cleaning brush (320) being arranged on a side of the first substrate (310) away from the base body (100) and being used for cleaning an inner wall of the auxiliary furnace chamber; An elastic layer (330), the elastic layer (330) being disposed between the cleaning brush (320) and the first substrate (310), the elastic layer (330) at least partially having the freedom of movement to fit in or separate from the first substrate (310), the elastic layer (330) comprising: A fixing portion (331), two sides of the fixing portion (331) being fixedly connected to the first substrate (310) and the cleaning brush (320) respectively; a movable part (332), one side of the movable part (332) being fixedly connected to the cleaning brush (320), and a movable cavity (Q) being formed between the other side of the movable part (332) and the first substrate (310); and A first pneumatic component (340), the first pneumatic component (340) passes through the first substrate (310) and communicates with the active cavity (Q), and the first pneumatic component (340) is externally connected to an air source to adjust the flatness of the elastic layer (330).

2. The single crystal furnace auxiliary chamber cleaning device according to claim 1 is characterized in that: There are a plurality of movable parts (332), and each movable part (332) forms an active cavity (Q) in one-to-one correspondence. The first substrate (310) is provided with a first through hole (311) in one-to-one correspondence with the active cavity (Q), and the first through hole (311) is connected to the first pneumatic part (340).

3. The single crystal furnace auxiliary chamber cleaning device according to claim 1 is characterized in that: The cleaning assembly (300) further comprises: A second substrate (350), the second substrate (350) is connected to the first substrate (310) and is located below the first substrate (310), a fixing member (351) is provided on the second substrate (350), the fixing member (351) surrounds to form a fixing area (352), and the fixing area (352) is used to accommodate a cleaning cloth.

4. The single crystal furnace auxiliary chamber cleaning device according to claim 3 is characterized in that: A plurality of second through holes (353) are provided in the fixing area (352), and the second through holes (353) are connected to a second pneumatic component (360), and the second pneumatic component (360) is used to connect to an external air source.

5. The single crystal furnace auxiliary chamber cleaning device according to claim 1, characterized in that: A visual inspection unit (400) is provided on the top of the base (100), and the visual inspection unit (400) faces the outer periphery of the base (100) and is used to scan the inner wall of the auxiliary furnace chamber.

6. The single crystal furnace auxiliary chamber cleaning device according to claim 1, characterized in that: A detection component (500) is provided in the active cavity (Q), and the detection component (500) comprises: A detection wire (510), the detection wire (510) being disposed in the movable cavity (Q) and arranged along the length direction of the first substrate (310), and two ends of the detection wire (510) being respectively connected to the movable portion (332); A detection module (520), the detection module (520) being disposed between the first substrate (310) and the detection wire (510), and the detection module (520) can be connected to the detection wire (510) to form a conductive circuit; The detection wire (510) can enter a contact state or a separation state as the movable part (332) moves. In the contact state, the detection wire (510) is connected to the detection module (520), and in the separation state, the detection wire (510) is separated from the detection module (520).

7. The single crystal furnace auxiliary chamber cleaning device according to claim 1, characterized in that: The substrate (100) comprises: A first support plate (110); A second support plate (120), wherein the second support plate (120) is arranged on the first support plate (110), and a telescopic rod (130) is arranged between the second support plate (120) and the first support plate (110), and the telescopic rod (130) acts on the first substrate (310) to drive the first substrate (310) to expand or retract.

8. The single crystal furnace auxiliary chamber cleaning device according to claim 7, characterized in that: The first support plate (110) is rotatably arranged relative to the second support plate (120); a plurality of arc-shaped guide grooves (111) are arranged on the first support plate (110); the guide grooves (111) extend obliquely from the center close to the base (100) toward the periphery; the telescopic rod (130) is provided with a guide portion (131); the guide portion (131) is arranged in the guide groove (111) and can move along the guide groove (111).

9. The single crystal furnace auxiliary chamber cleaning device according to claim 8, characterized in that: A first driving mechanism (140) is provided between the first supporting plate (110) and the second supporting plate (120), and the first driving mechanism (140) acts on one of the first supporting plate (110) and the second supporting plate (120) to make the first supporting plate (110) and the second supporting plate (120) rotate relative to each other.

10. A method for cleaning a secondary chamber of a single crystal furnace using the cleaning device for a secondary chamber of a single crystal furnace as claimed in any one of claims 1 to 9, characterized in that: The following steps are involved: Scan and obtain the image of the inner wall of the auxiliary furnace chamber, and fit it into a virtual model based on the image; Based on the virtual model, determining the required unfolded length of the cleaning brush (320) and the flatness of the elastic layer (330); The cleaning brush (320) is controlled to be unfolded, and the pneumatic part is controlled to introduce / extract corresponding gas into / from the surface of the corresponding elastic layer (330).

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