Crystal growth lifting device suitable for crystal growth furnace

Abstract

The invention belongs to the technical field of crystal growth equipment, and particularly relates to a crystal growth lifting device suitable for a crystal growth furnace, which comprises a furnace body, a stand column, a platform, a lifting rod and a seed crystal clamp, the lifting component is assembled on the top surface of the furnace body and is used for driving the platform to lift; the rotating assembly is assembled on the platform and used for driving the lifting rod to rotate; the cooling assembly is arranged on the lifting rod and used for cooling the lifting rod; the mixing mechanism is arranged at the lower end of the lifting rod; the fixing assembly is arranged on the seed crystal clamp; the protection assembly is arranged on the outer side of the lifting rod; wherein the mixing mechanism comprises a stirring part, a lifting rod is sleeved with the stirring part, a winding part is further arranged on the lifting rod, and a limiting part is arranged on the stirring part. According to the invention, the purity, stability and efficiency of crystal growth can be effectively improved, and the service life of equipment is prolonged.

Description

Technical Field

[0001] The invention belongs to the technical field of crystal growth equipment, and in particular relates to a crystal growth pulling device suitable for a crystal growth furnace. Background Art

[0002] The Czochralski method is an important crystal growth technology, which usually involves heating the polycrystalline raw material to above the melting point to form a melt, then using a seed crystal rod to insert the seed crystal into the melt, and rotating and pulling the seed crystal rod under appropriate conditions so that the melt gradually solidifies on the surface of the seed crystal to form a single crystal.

[0003] For example, a crystal growth pulling device with application number: CN202321865453.1 includes a substrate, an electric heater is fixedly connected to the upper end of the substrate, a furnace body is arranged on the upper end of the electric heater, a pulling mechanism for crystal growth is arranged on the upper end of the substrate, and a constant temperature mechanism is arranged on the furnace body for facilitating crystal growth during the crystal pulling process; the pulling device drives the rotating shaft to rotate to one side through the output end of the servo motor, the rotating shaft drives the ball screw to rotate, the ball screw drives the screw nut to move upward, and the screw nut drives the seed rod on one side to stably pull the crystal in the furnace body to ensure the safety of the crystal.

[0004] Although the pulling device in the above-mentioned comparative case can stably pull the crystal, it still has some shortcomings in actual use: 1. There is a lack of sealing structure between the seed crystal rod and the furnace body, which makes it easy for the gas in the furnace to leak out, and external impurities are also easy to invade the furnace, which not only destroys the stability of the atmosphere in the furnace, but also may have an adverse effect on the purity and quality of crystal growth; Second, the fixing effect of the seed crystal is poor. When the seed crystal is rotated and raised by the lifting rod, there is a risk of the seed crystal falling. Once the seed crystal falls into the melt, the splashing melt may damage other parts in the furnace and affect the normal growth of the crystal, resulting in the failure of the entire lifting process, increasing production and time costs. 3. There is no cooling function for the lifting rod. When working in a high-temperature environment for a long time, if the lifting rod is not cooled, the heat may be transferred to other components through the lifting rod, affecting the performance of the equipment or causing deformation of the mechanical structure. Summary of the invention

[0005] The purpose of the present invention is to provide a crystal growth pulling device suitable for a crystal growth furnace, which can effectively improve the purity, stability and efficiency of crystal growth and prolong the service life of the equipment.

[0006] The technical solution adopted by the present invention is as follows: A crystal growth lifting device suitable for a crystal growth furnace comprises a furnace body, a column is fixedly connected to the top surface of the furnace body, a platform is slidably connected to the column, a lifting rod is rotatably connected to the platform, and a seed crystal clamp is fixedly installed at the lower end of the lifting rod; A lifting assembly, which is mounted on the top surface of the furnace body and is used to drive the platform to rise and fall; A rotating assembly, which is mounted on the platform and is used to drive the lifting rod to rotate; A cooling assembly, the cooling assembly being arranged on the lifting rod and used for cooling the lifting rod; A mixing mechanism, wherein the mixing mechanism is arranged at the lower end of the lifting rod; A fixing component, wherein the fixing component is arranged on the seed crystal clamp; A protection component, wherein the protection component is arranged on the outside of the lifting rod; Wherein, the mixing mechanism comprises a stirring portion, the stirring portion is sleeved on a lifting rod, a winding portion is further provided on the lifting rod, and a limiting portion is provided on the stirring portion.

[0007] In a preferred embodiment, the outer wall of the lifting rod is rotatably connected to a dynamic sealing ring via a sealing bearing, a static sealing ring is arranged at the upper end of the furnace body, a sealing cover is arranged on the outer wall fixed sleeve of the dynamic sealing ring, and a seed crystal is mounted on the seed crystal clamp.

[0008] In a preferred embodiment, the lifting assembly includes an n-type frame, which is fixedly connected to the top surface of the furnace body, the upper end of the n-type frame is rotatably connected to a screw rod, and the lower end of the screw rod is rotatably connected to the furnace body, a lifting motor is fixedly installed on the n-type frame, and the output shaft of the lifting motor is fixedly connected to the screw rod, a wire block is threadedly connected to the screw rod, and the wire block is fixedly connected to the platform.

[0009] In a preferred embodiment, the rotating assembly includes a large gear, which is fixedly mounted on the upper end of the lifting rod, a rotating motor is fixedly mounted on the platform, and a small gear is mounted on the upper end of the output shaft of the rotating motor.

[0010] In a preferred embodiment, the cooling assembly includes a first annular water storage pipe and a second annular water storage pipe, and the first annular water storage pipe and the second annular water storage pipe are both rotatably connected to the lifting rod through a sealed bearing, and the first annular water storage pipe and the second annular water storage pipe are respectively connected to a water inlet pipe and a water outlet pipe, and a water inlet channel is opened at the center of the lifting rod, and a water outlet channel is also opened on the lifting rod in a ring-shaped distribution around the water inlet channel, and the water inlet channel and the water outlet channel are respectively connected to the first annular water storage pipe and the second annular water storage pipe.

[0011] In a preferred embodiment, the stirring part includes a circular ring, which is sleeved on the outside of the lifting rod, the inner ring of the circular ring is connected to a slider in a circular shape, the outer surface of the lifting rod is connected to a guide rail in a circular shape, and the slider and the guide rail constitute a sliding structure, and the bottom surface of the circular ring is connected to the stirring rod in a circular shape.

[0012] In a preferred embodiment, the winding part includes a rotating rod, two of which are rotatably connected in two of the water outlet channels through sealed bearings, and one end of the rotating rod extends to the outside of the lifting rod, and a water wheel is fixedly installed on one end of the rotating rod located in the water outlet channel, and a winding roller is fixedly installed on the other end of the rotating rod, and a traction rope is fixedly connected to the winding roller.

[0013] In a preferred embodiment, the limiting portion includes a movable groove, two movable grooves are symmetrically arranged on the circular ring, a guide block is slidably connected in the movable groove, a movable rod is fixedly connected to one side of the guide block, and the other end of the movable rod passes through the outside of the circular ring, a locking rod is fixedly connected to the other side of the guide block, and the locking rod also extends to the outside of the circular ring, a spring is sleeved on the outer side of the movable rod, and the two ends of the spring are respectively fixedly connected to the guide block and the inner wall of the movable groove, the outer surface of the lifting rod is fixedly connected to two trapezoidal blocks, and locking holes are opened on the trapezoidal blocks.

[0014] In a preferred embodiment, the fixed component includes an active cavity, which is opened at the lower end of the lifting rod. A piston plate is slidably connected in the active cavity. The lower end of the piston plate is connected to a piston rod, and the piston rod is piston-type inserted into the cavity of the seed crystal clamp. The bottom surface of the piston plate is fixedly connected to a compression spring, and the other end of the compression spring is fixedly connected to the inner wall of the active cavity. A push rod is connected to the piston rod in an annular manner, and the push rod is slidably connected to the seed crystal clamp. The bottom surface of the seed crystal clamp is rotatably provided with clamping jaws in an annular manner.

[0015] In a preferred embodiment, the protective component includes an annular sleeve, which is sleeved on the outside of the lifting rod, and annular plug plates are slidably inserted at both ends of the annular sleeve. Guide rods are fixedly connected to the annular plug plates in an annular distribution, and the guide rods are slidably connected to the annular sleeve, and a return spring is fixedly connected between the annular plug plate and the annular sleeve.

[0016] The technical effects achieved by the present invention are: The present invention effectively prevents gas leakage in the furnace and foreign impurities from entering the furnace by providing a tight fit between the dynamic seal ring and the static seal and using wear-resistant and high-temperature-resistant flexible materials to make the dynamic seal ring. This ensures the purity of the environment during the crystal growth process, thereby improving the quality of the crystal; The present invention forms a complete water circulation flow path through the cooling assembly, and its main purpose is to effectively cool the lifting rod. Through such a cooling mechanism, the lifting rod and the structure thereon can be prevented from being deformed due to long-term exposure to high temperature environment, thereby achieving the effect of extending its service life.

[0017] The design of the fixing assembly of the present invention utilizes the impact force generated by the water source in the cooling assembly on the piston plate to cause the clamping jaws to rotate and firmly clamp the seed crystal. The torsion spring on each clamping jaw's rotating shaft ensures that the clamping jaws automatically return to their initial position without any resistance. This mechanism significantly enhances the stability of the seed crystal during the pulling process and reduces the risk of the seed crystal falling off due to instability. In addition, the action of the fixing assembly driven by the cooling assembly not only ensures the safety of crystal growth, but also simplifies the operation process and improves the operation efficiency. The cooling assembly of the present invention not only effectively cools the lifting rod to prevent it from deformation or damage due to long-term exposure to high temperature environment, but also controls the lifting and lowering of the stirring part by driving the winding part (including water wheel, rotating rod and winding roller) through water flow. This design enables the stirring rod to be inserted into and out of the molten solution. When inserted into the solution, the temperature distribution of the melt is improved by rotating and stirring, which helps to reduce the occurrence of component supercooling, and is crucial for the quality control of the entire smelting process. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 The present invention Figure 1 An oblique upward view of Figure 3 It is a schematic diagram of the connection between the static sealing ring and the furnace body of the present invention; Figure 4 It is a schematic diagram of the structure of the lifting rod and the components thereon of the present invention; Figure 5 The present invention Figure 4 An oblique upward view of Figure 6 The present invention Figure 4 A cross-sectional view of Figure 7 The present invention Figure 6 An enlarged schematic diagram of part A shown in FIG. Figure 8 The present invention Figure 4 A top sectional view of Fig. 9 The present invention Figure 6 An enlarged schematic diagram of part B shown in; Fig.10 The present invention Figure 6 An enlarged schematic diagram of part C shown in; Fig.11 It is a schematic diagram of the connection between the stirring part and the winding part of the present invention; Fig.12 is a schematic diagram of the change in the use state of the fixing assembly of the present invention; Fig.13 It is a schematic diagram of the structure of the protection component of the present invention; Fig.14 The present invention Fig.13 A cross-sectional view of Fig.15 It is a schematic diagram of the structure of the present invention acting on a furnace body.

[0019] In the accompanying drawings, the components represented by the reference numerals are listed as follows: 1. Furnace body; 11. Static sealing ring; 2. Column; 3. Platform; 4. Lifting assembly; 5. Rotating assembly; 6. Lifting rod; 7. Cooling assembly; 8. Mixing mechanism; 9. Fixed assembly; 10. Protective assembly; 61. Dynamic sealing ring; 62. Sealing cover; 63. Seed crystal clamp; 64. Seed crystal; 401, n-type frame; 402, lead screw; 403, lifting motor; 404, wire block; 501, large gear; 502, rotating motor; 503, small gear; 701, first annular water storage pipe; 702, second annular water storage pipe; 703, water inlet pipe; 704, water outlet pipe; 705, water inlet channel; 706, water outlet channel; 81. stirring part; 82. winding part; 83. limiting part; 811, ring; 812, slider; 813, guide rail; 814, stirring rod; 821, rotating rod; 822, water wheel; 823, winding roller; 824, traction rope; 831, movable groove; 832, guide block; 833, moving rod; 834, spring; 835, locking rod; 836, trapezoidal block; 901, movable chamber; 902, piston plate; 903, piston rod; 904, compression spring; 905, push rod; 906, clamping claw; 101, annular sleeve; 102, annular insert plate; 103, guide rod; 104, return spring. DETAILED DESCRIPTION

[0020] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below in conjunction with the accompanying drawings.

[0021] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0022] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure or characteristic that may be included in at least one implementation of the present invention. The phrase "in a preferred embodiment" that appears in different places in this specification does not refer to the same embodiment, nor is it a separate or selective embodiment that is mutually exclusive with other embodiments.

[0023] Secondly, the present invention is described in detail with reference to the schematic diagram. When describing the embodiments of the present invention in detail, for the sake of convenience, the cross-sectional diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0024] Please refer to the attached Figures 1 to 5 As shown, this embodiment provides a crystal growth pulling device suitable for a crystal growth furnace, comprising a furnace body 1, a column 2 is fixedly connected to the top surface of the furnace body 1, a platform 3 is slidably connected to the column 2, a pulling rod 6 is rotatably connected to the platform 3, and a seed crystal clamp 63 is fixedly installed at the lower end of the pulling rod 6; A lifting assembly 4, which is mounted on the top surface of the furnace body 1 and is used to drive the platform 3 to move up and down; The rotating assembly 5 is mounted on the platform 3 and is used to drive the lifting rod 6 to rotate; A cooling assembly 7, the cooling assembly 7 is arranged on the lifting rod 6, and is used to cool the lifting rod 6; A mixing mechanism 8, which is arranged at the lower end of the lifting rod 6; A fixing component 9, the fixing component 9 is arranged on the seed crystal clamp 63; A protection component 10, which is arranged on the outer side of the lifting rod 6; The mixing mechanism 8 includes a stirring portion 81 , which is sleeved on the lifting rod 6 . The lifting rod 6 is also provided with a winding portion 82 . The stirring portion 81 is provided with a limiting portion 83 .

[0025] In this embodiment, the stirring part 81 can move along the axial direction of the lifting rod 6, and the winding part 82 is used to wind up the rope connected to the stirring part 81 to realize the axial movement of the stirring part 81 on the lifting rod 6. The limiting part 83 is used to limit the movement of the stirring part 81 under certain circumstances to ensure that the stirring part 81 remains stationary at a specific position. The lifting component 4 drives the platform 3 to rise and fall, thereby driving the lifting rod 6 and the seed crystal 64 on the seed crystal clamp 63 to perform a lifting operation. The rotating component 5 drives the lifting rod 6 to rotate. The cooling component 7 cools the lifting rod 6 to prevent the lifting rod 6 from being deformed or damaged due to high temperature. The fixing component 9 is used to fix the seed crystal 64 to ensure that the seed crystal 64 does not fall off or shake during the lifting process. The protective component 10 is used to reduce the risk of gas leakage in the furnace body 1. The entire device has a compact structure and is easy to operate, and can effectively improve the quality and efficiency of crystal growth.

[0026] The accompanying drawings only show the shell portion of the furnace body 1 , and the specific structure of the furnace body 1 is common knowledge. The structure of the furnace body 1 is briefly supplemented below for reference.

[0027] 1. Heating system The heating system is the core part of the crystal growth furnace and is responsible for providing and maintaining the required high temperature environment.

[0028] Heating element: usually use resistance wire (such as molybdenum wire, tungsten wire), graphite heater or induction coil as the heating source.

[0029] Insulation layer: Use high-efficiency insulation materials (such as alumina fiber, carbon felt) to reduce heat loss and maintain temperature uniformity.

[0030] Temperature sensor: including thermocouples, infrared thermometers, etc., to monitor and feedback the temperature inside the furnace in real time to ensure temperature control accuracy.

[0031] 2. Furnace The furnace is the main space for crystal growth, which contains various components for supporting and controlling crystal growth.

[0032] Crucible: Placed in the center of the furnace, used to hold molten raw materials. Common materials include quartz, graphite, platinum, etc.

[0033] Insulation cover: Set around the crucible to further improve temperature uniformity and stability.

[0034] Gas inlet and outlet: used to introduce inert gas (such as argon) or other specific atmosphere, exhaust waste gas, and maintain a pure environment in the furnace.

[0035] 3. Crystal pulling device Crystal pulling devices are used to extract and grow single crystals from molten liquids.

[0036] Cooling system: including water cooling jacket, heat sink, etc., to help control the temperature gradient during crystal growth and promote the improvement of crystal quality.

[0037] 4. Atmosphere Control System The atmosphere control system is used to adjust the gas composition and pressure in the furnace to ensure the purity and stability of the crystal growth environment.

[0038] Gas supply system: Provide inert gas, reducing gas or other special gases to prevent oxidation or contamination.

[0039] Vacuum pump: used to evacuate and remove oxygen, moisture and other impurities in the air to ensure the purity of the atmosphere in the furnace.

[0040] Flow meters and pressure sensors: monitor and regulate gas flow and furnace pressure to ensure consistent growing conditions.

[0041] 5. Control system The control system is the brain of the entire crystal growth furnace and is responsible for coordinating the operation of various subsystems.

[0042] PLC / computer control system: integrated temperature control, pulling speed adjustment, atmosphere management and other functions, with a high degree of automation and programmable setting of different growth processes.

[0043] Human-machine interface (HMI): Provides an intuitive operating interface to facilitate operators to monitor and adjust various parameters.

[0044] Data recording and analysis module: records key data during the growth process to facilitate subsequent analysis and process optimization.

[0045] VI. Safety protection measures In order to ensure the safety of equipment and personnel, the crystal growth furnace is also equipped with a series of safety protection measures.

[0046] Over-temperature protection: When the temperature is detected to exceed the set value, the power supply is automatically cut off to prevent equipment damage.

[0047] Leak detection: monitor the tightness of the furnace to avoid leakage of harmful gases.

[0048] Emergency stop button: In case of abnormal situation, stop all operations immediately to ensure safety.

[0049] Next, please refer to Figure 4 , Figure 5 and Fig.12 The outer wall of the lifting rod 6 is also rotatably connected to a dynamic sealing ring 61 through a sealing bearing. A static sealing ring 11 is provided at the upper end of the furnace body 1. A sealing cover 62 is fixedly sleeved on the outer wall of the dynamic sealing ring 61. A seed crystal 64 is installed on the seed crystal clamp 63.

[0050] In this embodiment, the static sealing ring 11 is fixed on the furnace body 1, and the dynamic sealing ring 61 is installed on the lifting rod 6 and closely matches the static sealing ring 11. The dynamic sealing ring 61 is made of a wear-resistant and high-temperature resistant flexible material, and can maintain good sealing performance when the lifting rod 6 moves up and down, preventing gas leakage in the furnace and external impurities from entering the furnace, thereby ensuring the purity of the crystal growth environment.

[0051] It should be noted that the dynamic sealing ring 61 can rotate relative to the lifting rod 6 , and the dynamic sealing ring 61 is restricted from moving up and down along the lifting rod 6 .

[0052] Secondly, please refer to Figure 1 The lifting assembly 4 includes an n-type frame 401, which is fixedly connected to the top surface of the furnace body 1, and the upper end of the n-type frame 401 is rotatably connected to a screw rod 402, and the lower end of the screw rod 402 is rotatably connected to the furnace body 1, and a lifting motor 403 is fixedly installed on the n-type frame 401, and the output shaft of the lifting motor 403 is fixedly connected to the screw rod 402, and a wire block 404 is threadedly connected to the screw rod 402, and the wire block 404 is fixedly connected to the platform 3; the pitch of the screw rod 402 can be selected according to actual conditions, such as selecting a pitch of 0.1 mm or less to achieve high-precision adjustment.

[0053] In this embodiment, by activating the lifting motor 403, the motor starts to operate and drives the screw rod 402 to rotate. As the screw rod 402 rotates, it causes the wire block 404 connected thereto to move along its length direction. The movement of the wire block 404 in turn drives the entire platform 3 to move in the vertical direction. This displacement enables the lifting rod 6 on the platform 3 to perform a vertical lifting movement, thereby achieving precise vertical displacement control.

[0054] Next, please refer to Figure 1 and Figure 2 The rotating assembly 5 includes a large gear 501, which is fixedly mounted on the upper end of the lifting rod 6. A rotating motor 502 is fixedly mounted on the platform 3, and a small gear 503 is mounted on the upper end of the output shaft of the rotating motor 502.

[0055] In this embodiment, the rotating motor 502 is started to drive the small gear 503 to rotate. The small gear 503 is closely connected to the large gear 501 through a toothed belt transmission mechanism. When the small gear 503 rotates, this transmission mechanism ensures the transmission of power, so that the large gear 501 also starts to rotate. As the large gear 501 rotates, it further drives the lifting rod 6 connected thereto to rotate.

[0056] After the melt is processed, the seed crystal 64 is fixed on the seed crystal clamp 63, and the seed crystal 64 is slowly lowered by the pulling component 4 so that the tip of the seed crystal lightly contacts the surface of the melt.

[0057] The pulling speed and the rotation speed are controlled by the pulling component 4 and the rotating component 5 respectively to achieve the growth of the crystal: Initial growth: The lifting rod 6 is slowly lifted so that the tip of the seed crystal 64 gradually leads a small section of the crystal out of the melt. This process is called “necking”, and its purpose is to eliminate dislocation defects in the seed crystal 64 .

[0058] Main body growth: When the necking part reaches a certain length, the pulling speed is gradually increased to start the growth of the main body crystal.

[0059] Diameter control: Keep the crystal diameter stable by adjusting the pulling speed and rotation speed.

[0060] It should be noted that both the lifting motor 403 and the rotating motor 502 use servo motors, and both are products currently available on the market. When selecting, you should try to choose one that meets the requirements of this application under the premise of suitable specifications and usage scenarios. The specific model specifications are not limited here.

[0061] Please refer again Figure 4 , Figure 5 , Figure 7 and Figure 8 The cooling assembly 7 includes a first annular water storage pipe 701 and a second annular water storage pipe 702, which are both rotatably connected to the lifting rod 6 through a sealed bearing, and the first annular water storage pipe 701 and the second annular water storage pipe 702 are respectively connected to a water inlet pipe 703 and a water outlet pipe 704, a water inlet channel 705 is opened at the center of the lifting rod 6, and a water outlet channel 706 is also opened on the lifting rod 6 in a ring-shaped distribution around the water inlet channel 705, and the water inlet channel 705 and the water outlet channel 706 are respectively connected to the first annular water storage pipe 701 and the second annular water storage pipe 702.

[0062] In this embodiment, the water inlet pipe 703 and the water outlet pipe 704 are both connected to the external pipeline. In this way, the external water source can be introduced along the water inlet pipe 703 and pumped into the first annular water storage pipe 701 through the action of the external water pump. Subsequently, the water source flows from the first annular water storage pipe 701 into the water inlet channel 705 and continues to move along the designed path. Then, the water flows from the water inlet channel 705 into the water outlet channel 706 and is finally discharged from the water outlet pipe 704. This process forms a complete water circulation flow path, the main purpose of which is to effectively cool the lifting rod 6. Through such a cooling mechanism, the lifting rod 6 and the structure thereon can be prevented from being deformed due to long-term exposure to high temperature environment, thereby achieving the effect of extending its service life.

[0063] It needs to be further explained that: since the dynamic sealing ring 61, the first annular water storage pipe 701 and the second annular water storage pipe 702 are all connected to the lifting rod 6 by a rotational connection. In this design, the dynamic sealing ring 61 is constrained and limited by the static sealing ring 11, so when the lifting rod 6 is rotated, the dynamic sealing ring 61 will not rotate therewith. At the same time, the first annular water storage pipe 701 and the second annular water storage pipe 702 are fixedly connected to the sealing cover 62 connected to the dynamic sealing ring 61 through a support rod. Such a structural design ensures that during the rotation of the lifting rod 6, the first annular water storage pipe 701 and the second annular water storage pipe 702 will not rotate either. The purpose of this design is to ensure that during the operation of the lifting rod 6, the stability of water source transportation can be maintained, and to avoid water flow instability or interruption caused by rotation, thereby ensuring the normal operation and efficiency of the entire system.

[0064] Please refer again Figure 5 and Fig.11 The stirring portion 81 includes a circular ring 811, which is sleeved on the outer side of the lifting rod 6. The inner ring of the circular ring 811 is connected to a slider 812 in a circular shape. The outer surface of the lifting rod 6 is connected to a guide rail 813 in a circular shape. The slider 812 and the guide rail 813 form a sliding structure. The bottom surface of the circular ring 811 is connected to a stirring rod 814 in a circular shape.

[0065] In this embodiment, at the initial stage, the powdered raw material needs to be placed inside the crucible in the furnace body 1. Then, the heating device in the furnace body 1 is started to heat the powdered raw material in the crucible. When the raw material melts to a predetermined degree, the operator needs to start the lifting assembly 4, and by accurately controlling the descending action of the lifting rod 6, the stirring rod 814 can be inserted into the crucible and contact the molten solution therein. In this process, it is particularly noted that the seed crystal 64 does not directly contact the solution in the crucible at this stage (the position of the stirring rod 814 is lower than the seed crystal 64). Subsequently, the operator will start the rotating assembly 5, which drives the lifting rod 6 to rotate. The rotation of the lifting rod 6 will further drive the rotation of the ring 811, and the rotation of the ring 811 will be transmitted to the stirring rod 814, causing it to rotate slowly. The rotation of the stirring rod 814 acts on the solution in the crucible, effectively improving the temperature distribution of the melt, and also helps to reduce the occurrence of component supercooling, which is crucial for the quality control of the entire smelting process.

[0066] Please refer again Fig. 9 and Fig.11The winding portion 82 includes a rotating rod 821, and the two rotating rods 821 are rotatably connected to two of the water outlet channels 706 through sealed bearings, and one end of the rotating rod 821 extends to the outside of the pulling rod 6. A water wheel 822 is fixedly installed on one end of the rotating rod 821 located in the water outlet channel 706, and a winding roller 823 is fixedly installed on the other end of the rotating rod 821. A traction rope 824 is fixedly connected to the winding roller 823, and the traction rope 824 is a tungsten wire rope formed by twisting multiple strands of anti-sagging tungsten wires.

[0067] Please refer again Figure 4 and Fig.10 The limiting portion 83 includes a movable groove 831, and the two movable grooves 831 are symmetrically arranged on the ring 811. A guide block 832 is slidably connected in the movable groove 831. A moving rod 833 is fixedly connected to one side of the guide block 832, and the other end of the moving rod 833 passes through the outside of the ring 811. A locking rod 835 is fixedly connected to the other side of the guide block 832, and the locking rod 835 also extends to the outside of the ring 811. A spring 834 is sleeved on the outer side of the moving rod 833, and the two ends of the spring 834 are respectively fixedly connected to the guide block 832 and the inner wall of the movable groove 831. The outer surface of the lifting rod 6 is fixedly connected to two trapezoidal blocks 836, and a locking hole is opened on the trapezoidal block 836.

[0068] In this embodiment, when the water source flows along the water outlet channel 706, it triggers a series of mechanical actions. First, the kinetic energy of the water flow is used to drive the rotation of the water wheel 822. As the water wheel 822 rotates, it drives the rotating rod 821 connected thereto to rotate. The rotation of the rotating rod 821 is transmitted to the winding roller 823, causing the winding roller 823 to start rotating. The rotation of the winding roller 823 is to perform the winding work, which causes the ring 811 and the stirring rod 814 to move upward in the vertical direction. As the ring 811 and the stirring rod 814 rise, the stirring rod 814 will gradually break away from the solution in the crucible, thereby stopping the stirring action. During the rising process of the ring 811, the slider 812 will slide smoothly along the guide rail 813, which ensures the stability of the ring 811 during the movement. When the ring 811 reaches a certain height, the locking rod 835 will move to the position of the trapezoidal block 836, and will be resisted by the trapezoidal block 836, and then slide into the movable groove 831 to shrink. The movement of the locking rod 835 will drive the guide block 832 and apply pressure to the spring 834. When the ring 811 moves to the end of its maximum stroke (at this time, the position of the seed crystal 64 is lower than the stirring rod 814), the locking rod 835 will be exactly located at the locking groove on the trapezoidal block 836. At this time, since there is no resistance from the trapezoidal block 836, the locking rod 835 will be reset under the reset force of the spring 834 and inserted into the locking groove on the trapezoidal block 836, thereby fixing the ring 811 in the current position to prevent it from moving further. After the processing process is completed, if it is necessary to release the fixed state of the ring 811, the user can pull the moving rod 833, which will drive the guide block 832 to move, so that the locking rod 835 slides out of the locking groove. Once the locking rod 835 is removed from the locking groove, the ring 811 loses its limit position, so it can start to move downward, thereby allowing subsequent operations or adjustments.

[0069] Please refer again Fig.12 The fixed component 9 includes an active cavity 901, which is opened at the lower end of the lifting rod 6. A piston plate 902 is slidably connected in the active cavity 901. The lower end of the piston plate 902 is connected to a piston rod 903, and the piston rod 903 is piston-type inserted into the cavity of the seed crystal clamp 63. A compression spring 904 is fixedly connected to the bottom surface of the piston plate 902, and the other end of the compression spring 904 is fixedly connected to the inner wall of the active cavity 901. A push rod 905 is connected to the piston rod 903 in an annular manner, and the push rod 905 is slidably connected to the seed crystal clamp 63. The bottom surface of the seed crystal clamp 63 is rotatably provided with a clamping jaw 906 in an annular manner.

[0070] In this embodiment, when the water source flows in along the water inlet channel 705, it will generate an impact force on the piston plate 902, causing the piston plate 902 and the piston rod 903 to move downward together, thereby applying pressure to the compression spring 904. As the piston plate 902 moves downward, the water source is able to enter the water outlet channel 706 through the movable cavity 901 and be discharged along this path. At the same time, the downward movement of the piston rod 903 will drive the push rod 905 to move downward together. The downward movement of the push rod 905 will resist the clamping jaws 906, which can cause the clamping jaws 906 to rotate. These clamping jaws 906 are distributed around the seed crystal 64 to ensure that the seed crystal 64 is firmly clamped. This clamping mechanism significantly improves the stability of the seed crystal 64 during the crystal growth process and effectively prevents the problem of the seed crystal 64 falling off due to instability.

[0071] In addition, it is worth noting that a torsion spring (not shown) is provided on the rotating shaft of each clamping jaw 906. The function of these torsion springs is to ensure that the clamping jaw 906 can automatically return to its initial position after completing the rotation action and without resistance, so as to prepare for the next clamping operation and ensure the continuous and stable operation of the entire mechanical device.

[0072] Please refer again Fig.13 and Fig.14 The protection component 10 includes an annular sleeve 101, which is sleeved on the outside of the lifting rod 6. An annular plug plate 102 is slidably inserted at both ends of the annular sleeve 101. A guide rod 103 is fixedly connected to the annular plug plate 102 in an annular shape, and the guide rod 103 is slidably connected to the annular sleeve 101. A return spring 104 is fixedly connected between the annular plug plate 102 and the annular sleeve 101.

[0073] In this embodiment, the lower end portion of the lower annular plug plate 102 is fixedly connected to the bottom surface of the furnace body 1. The upper end portion of the upper annular plug plate 102 is firmly fixedly connected to the sealing cover 62 by bolts. This structural design enables the annular plug plate 102 and the annular sleeve plate 101 to form a protective cover structure. Such a design can not only effectively seal, but also greatly improve the sealing performance. Through such a structure, air leakage can be effectively avoided, thereby further reducing the risk of gas leakage in the furnace body 1 and external impurities entering the furnace. In the process of lifting the lifting rod 6, the two annular plug plates 102 can move upward and telescopically along the annular sleeve plate 101 in the vertical direction. At the same time, in conjunction with the design of the guide rod 103, they can play a guiding and limiting role. Such a design ensures the stability of the lifting rod 6 during the lifting process and ensures the safety and reliability of the entire system.

[0074] The working principle of the present invention is: Lift and Rotation Control: Lifting assembly 4: The lifting motor 403 drives the screw rod 402 to rotate, and the wire block 404 on the screw rod 402 moves accordingly, driving the platform 3 and the lifting rod 6 installed thereon to perform vertical lifting movement. This design realizes high-precision vertical displacement control.

[0075] Rotating assembly 5: The small gear 503 is driven to rotate by the rotating motor 502, and then the large gear 501 and the lifting rod 6 are driven to rotate by the toothed belt transmission mechanism. This ensures that the lifting rod 6 can accurately control the rotation speed during the crystal growth process.

[0076] Cooling mechanism: Cooling assembly 7: includes a first annular water storage pipe 701 and a second annular water storage pipe 702, which are connected to the lifting rod 6 through a sealed bearing and are respectively connected to a water inlet pipe 703 and a water outlet pipe 704. Water enters from the water inlet pipe 703 and flows along the water inlet channel 705, and then is discharged through the water outlet channel 706, forming a complete water circulation path, effectively cooling the lifting rod 6 and its related structures to prevent them from being deformed or damaged due to high temperature.

[0077] Stirring and fixing mechanism: Mixing mechanism 8: includes a stirring part 81, a winding part 82 and a limiting part 83. The stirring part 81 is sleeved on the lifting rod 6, and a sliding structure is formed by a slider 812 and a guide rail 813, so that the stirring part 81 can move axially on the lifting rod 6. The winding part 82 drives the water wheel 822 to rotate through the water flow, thereby driving the rotating rod 821 and the winding roller 823 to realize the lifting and lowering of the stirring part 81. The limiting part 83 is used to limit the stirring part 81 to remain stationary at a specific position to ensure the accuracy of the operation.

[0078] Fixed component 9: When water flows in along the water inlet channel 705 , it will generate impact force on the piston plate 902 , causing the piston plate 902 and the piston rod 903 to move downward, thereby pushing the push rod 905 to contact the clamping claw 906 , causing it to rotate and firmly clamp the seed crystal 64 .

[0079] Protection and sealing mechanism: Protection assembly 10: It is composed of an annular sleeve plate 101 and an annular insert plate 102. The annular insert plate 102 is connected to the annular sleeve plate 101 through a guide rod 103 to form a protective cover structure. This design not only improves the sealing performance, but also avoids the risk of gas leakage in the furnace body 1 and the entry of external impurities. The return spring 104 between the annular insert plate 102 and the annular sleeve plate 101 ensures the stability of the lifting rod 6 during the lifting process.

[0080] The above is only a preferred embodiment of the present invention. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principles of the present invention, and these improvements and modifications should also be considered as the protection scope of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to the conventional means in the art unless otherwise specified and limited.

Claims

1. A crystal growth pulling device suitable for a crystal growth furnace, characterized in that: It comprises a furnace body (1), the top surface of the furnace body (1) is fixedly connected to a column (2), a platform (3) is slidably connected to the column (2), a lifting rod (6) is rotatably connected to the platform (3), and a seed crystal clamp (63) is fixedly mounted on the lower end of the lifting rod (6); A lifting assembly (4), the lifting assembly (4) being mounted on the top surface of the furnace body (1) and used for driving the platform (3) to move up and down; A rotating assembly (5), the rotating assembly (5) being mounted on the platform (3) and used for driving the lifting rod (6) to rotate; A cooling component (7), wherein the cooling component (7) is arranged on the lifting rod (6) and is used to cool the lifting rod (6); A mixing mechanism (8), wherein the mixing mechanism (8) is arranged at the lower end of the lifting rod (6); A fixing component (9), wherein the fixing component (9) is arranged on the seed crystal clamp (63); A protection component (10), wherein the protection component (10) is arranged on the outside of the lifting rod (6); The mixing mechanism (8) comprises a stirring portion (81), wherein the stirring portion (81) is sleeved on a lifting rod (6), a winding portion (82) is further provided on the lifting rod (6), and a limiting portion (83) is provided on the stirring portion (81).

2. A crystal growth pulling device suitable for a crystal growth furnace according to claim 1, characterized in that: The outer wall of the lifting rod (6) is rotatably connected to a dynamic sealing ring (61) via a sealing bearing, a static sealing ring (11) is provided at the upper end of the furnace body (1), a sealing cover (62) is fixedly sleeved on the outer wall of the dynamic sealing ring (61), and a seed crystal (64) is mounted on the seed crystal clamp (63).

3. The crystal growth pulling device suitable for a crystal growth furnace according to claim 1, characterized in that: The lifting assembly (4) comprises an n-shaped frame (401), wherein the n-shaped frame (401) is fixedly connected to the top surface of the furnace body (1), the upper end of the n-shaped frame (401) is rotatably connected to a screw rod (402), and the lower end of the screw rod (402) is rotatably connected to the furnace body (1), a lifting motor (403) is fixedly mounted on the n-shaped frame (401), and the output shaft of the lifting motor (403) is fixedly connected to the screw rod (402), a wire block (404) is threadedly connected to the screw rod (402), and the wire block (404) is fixedly connected to the platform (3).

4. The crystal growth pulling device suitable for a crystal growth furnace according to claim 1, characterized in that: The rotating assembly (5) comprises a large gear (501), the large gear (501) being fixedly mounted on the upper end of the lifting rod (6), a rotating motor (502) being fixedly mounted on the platform (3), and a small gear (503) being mounted on the upper end of the output shaft of the rotating motor (502).

5. The crystal growth pulling device suitable for a crystal growth furnace according to claim 1, characterized in that: The cooling assembly (7) comprises a first annular water storage pipe (701) and a second annular water storage pipe (702), the first annular water storage pipe (701) and the second annular water storage pipe (702) being rotatably connected to the lifting rod (6) via a sealing bearing, the first annular water storage pipe (701) and the second annular water storage pipe (702) being respectively connected to a water inlet pipe (703) and a water outlet pipe (704), a water inlet channel (705) being provided at the center of the lifting rod (6), and a water outlet channel (706) being provided on the lifting rod (6) in an annular distribution around the water inlet channel (705), the water inlet channel (705) and the water outlet channel (706) being respectively connected to the first annular water storage pipe (701) and the second annular water storage pipe (702).

6. The crystal growth pulling device suitable for a crystal growth furnace according to claim 1, characterized in that: The stirring portion (81) comprises a circular ring (811), wherein the circular ring (811) is sleeved on the outer side of the lifting rod (6), the inner ring of the circular ring (811) is connected to a slider (812) in a circular shape, the outer surface of the lifting rod (6) is connected to a guide rail (813) in a circular shape, and the slider (812) and the guide rail (813) form a sliding structure, and the bottom surface of the circular ring (811) is connected to a stirring rod (814) in a circular shape.

7. The crystal growth pulling device suitable for a crystal growth furnace according to claim 5, characterized in that: The winding portion (82) comprises a rotating rod (821), wherein the two rotating rods (821) are respectively rotatably connected to two of the water outlet channels (706) via sealed bearings, and one end of the rotating rod (821) extends to the outside of the lifting rod (6), and a water wheel (822) is fixedly mounted on one end of the rotating rod (821) located in the water outlet channel (706), and a winding roller (823) is fixedly mounted on the other end of the rotating rod (821), and a traction rope (824) is fixedly connected to the winding roller (823).

8. The crystal growth pulling device suitable for a crystal growth furnace according to claim 6, characterized in that: The limiting portion (83) includes a movable groove (831), and the two movable grooves (831) are symmetrically arranged on the circular ring (811). A guide block (832) is slidably connected in the movable groove (831), and a moving rod (833) is fixedly connected to one side of the guide block (832), and the other end of the moving rod (833) passes through the outside of the circular ring (811). A locking rod (835) is fixedly connected to the other side of the guide block (832), and the locking rod (835) also extends to the outside of the circular ring (811). A spring (834) is sleeved on the outer side of the movable rod (833), and the two ends of the spring (834) are respectively fixedly connected to the inner wall of the guide block (832) and the movable groove (831). Two trapezoidal blocks (836) are fixedly connected to the outer surface of the lifting rod (6), and a locking hole is opened on the trapezoidal block (836).

9. The crystal growth pulling device suitable for a crystal growth furnace according to claim 1, characterized in that: The fixed component (9) includes an active cavity (901), the active cavity (901) is opened at the lower end of the lifting rod (6), a piston plate (902) is slidably connected in the active cavity (901), the lower end of the piston plate (902) is connected to a piston rod (903), and the piston rod (903) is piston-type inserted into the cavity of the seed crystal clamp (63), the bottom surface of the piston plate (902) is fixedly connected to a compression spring (904), and the other end of the compression spring (904) is fixedly connected to the inner wall of the active cavity (901), a push rod (905) is connected to the piston rod (903) in an annular manner, and the push rod (905) is slidably connected to the seed crystal clamp (63), and the bottom surface of the seed crystal clamp (63) is rotatably provided with a clamping claw (906) in an annular manner.

10. The crystal growth pulling device suitable for a crystal growth furnace according to claim 1, characterized in that: The protection component (10) comprises an annular sleeve (101), wherein the annular sleeve (101) is sleeved on the outside of the lifting rod (6), and annular plug plates (102) are slidably inserted at both ends of the annular sleeve (101), and guide rods (103) are fixedly connected to the annular plug plates (102) in an annular distribution, and the guide rods (103) are slidably connected to the annular sleeve (101), and a return spring (104) is fixedly connected between the annular plug plates (102) and the annular sleeve (101).

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