A crystal growth pulling apparatus suitable for use in a crystal growth furnace

Abstract

The application belongs to the technical field of crystal growth equipment, and particularly relates to a crystal growth lifting device suitable for a crystal growth furnace, which comprises a furnace body, a stand, a platform, a lifting rod and a seed crystal clamp; a lifting assembly is assembled on the top surface of the furnace body and used for driving the platform to lift; a rotating assembly is assembled on the platform and used for driving the lifting rod to rotate; a cooling assembly is arranged on the lifting rod and used for cooling the lifting rod; a mixing mechanism is arranged on the lower end of the lifting rod; a fixing assembly is arranged on the seed crystal clamp; and a protection assembly is arranged on the outer side of the lifting rod; wherein the mixing mechanism comprises a stirring part, the stirring part is sleeved on the lifting rod, a winding part is further arranged on the lifting rod, and a limiting part is arranged on the stirring part. The application can effectively improve the purity, stability and efficiency of crystal growth, and prolong the service life of the equipment.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of crystal growth equipment, and particularly relates to a crystal growth pulling device suitable for a crystal growth furnace. BACKGROUND

[0002] The pulling method is an important crystal growth technology, which usually involves heating polycrystalline raw materials to above the melting point to form a melt, then inserting a seed crystal into the melt using a seed crystal rod, and rotating and pulling the seed crystal rod under suitable conditions, so that the melt gradually solidifies on the surface of the seed crystal to form a single crystal.

[0003] For example, the crystal growth pulling device in the above-mentioned comparative case can stably pull the crystal, but still has some deficiencies in actual use.

[0004] For example, the crystal growth pulling device in the above-mentioned comparative case can stably pull the crystal, but still has some deficiencies in actual use.

[0005] Firstly, there is a lack of sealing structure between the seed crystal rod and the furnace body, which leads to easy leakage of furnace gas and easy invasion of external impurities into the furnace, which not only destroys the stability of the furnace atmosphere, but also may adversely affect the purity and quality of crystal growth.

[0006] Secondly, the fixing effect of the seed crystal is poor, and the seed crystal has the risk of falling off during the rotation and upward movement of the pulling rod. Once the seed crystal falls into the solution, the splashing solution may damage other parts in the furnace, and also affect the normal growth of the crystal, leading to the failure of the whole pulling process and increasing the production and time cost.

[0007] Thirdly, the pulling rod does not have a cooling function. When working in a high-temperature environment for a long time, if the pulling rod is not cooled, the heat may be conducted to other parts through the pulling rod, affecting the performance of the equipment or causing deformation of the mechanical structure. SUMMARY

[0008] The purpose of the present application is to provide a crystal growth pulling device suitable for a crystal growth furnace, which can effectively improve the purity, stability and efficiency of crystal growth, and prolong the service life of the equipment.

[0009] The technical solutions adopted by the present application are as follows:

[0010] A crystal growth pulling device suitable for a crystal growth furnace, comprising a furnace body, a stand column fixedly connected to the top surface of the furnace body, a platform slidingly connected to the stand column, a pulling rod rotatably connected to the platform, and a seed crystal clamp fixedly installed at the lower end of the pulling rod.

[0011] A pulling assembly assembled on the top surface of the furnace body and used for driving the platform to ascend and descend;

[0012] A rotating assembly assembled on the platform and used for driving the pulling rod to rotate;

[0013] A cooling assembly arranged on the pulling rod and used for cooling the pulling rod;

[0014] A mixing mechanism arranged at the lower end of the pulling rod;

[0015] A fixing assembly arranged on the seed crystal clamp;

[0016] A protection assembly arranged on the outer side of the pulling rod;

[0017] The mixing mechanism comprises a stirring part sleeved on the pulling rod, a winding part arranged on the pulling rod, and a limiting part arranged on the stirring part.

[0018] In a preferred embodiment, the outer wall of the pulling rod is rotatably connected to a dynamic sealing ring through a sealing bearing, the upper end of the furnace body is provided with a static sealing ring, the outer wall of the dynamic sealing ring is fixedly sleeved with a sealing cover, and the seed crystal clamp is installed with a seed crystal.

[0019] In a preferred embodiment, the pulling assembly comprises an n-shaped frame fixedly connected to the top surface of the furnace body, a lead screw rotatably connected to the upper end of the n-shaped frame and rotatably connected to the furnace body at the lower end, a lifting motor fixedly installed on the n-shaped frame and fixedly connected to the lead screw at the output shaft, a silk block threadedly connected to the lead screw and fixedly connected to the platform.

[0020] In a preferred embodiment, the rotating assembly comprises a large gear fixedly installed at the upper end of the pulling rod, a rotating motor fixedly installed on the platform, and a small gear installed at the output shaft of the rotating motor.

[0021] In a preferred scheme, the cooling assembly comprises a first annular water storage pipe and a second annular water storage pipe, both of which are rotatably connected to the lifting rod through sealing bearings, and the first annular water storage pipe and the second annular water storage pipe are respectively connected with a water inlet pipe and a water outlet pipe; the center of the lifting rod is provided with a water inlet channel, and the lifting rod is also provided with water outlet channels in a ring shape around the water inlet channel; and the water inlet channel and the water outlet channels are respectively communicated with the first annular water storage pipe and the second annular water storage pipe.

[0022] In a preferred scheme, the stirring part comprises a circular ring, which is sleeved on the outer side of the lifting rod; the inner circle of the circular ring is connected with sliding blocks in a ring shape; the outer surface of the lifting rod is connected with guide rails in a ring shape; the sliding block and the guide rail form a sliding structure; and the bottom surface of the circular ring is connected with stirring rods in a ring shape.

[0023] In a preferred scheme, the winding part comprises rotating rods, both of which are rotatably connected in two water outlet channels through sealing bearings, and one end of the rotating rod extends to the outer side of the lifting rod; a water wheel is fixedly installed at one end of the rotating rod in the water outlet channel; a winding roller is fixedly installed at the other end of the rotating rod; and a traction rope is fixedly connected to the winding roller.

[0024] In a preferred scheme, the limiting part comprises movable grooves, both of which are symmetrically arranged on the circular ring; a guide block is slidably connected in the movable groove; one side of the guide block is fixedly connected with a moving rod, and the other end of the moving rod penetrates to the outside of the circular ring; the other side of the guide block is fixedly connected with a locking rod, and the locking rod also extends to the outside of the circular ring; a spring is sleeved on the outer side of the moving rod, and both ends of the spring are fixedly connected with the guide block and the inner wall of the movable groove; and two trapezoidal blocks are fixedly connected to the outer surface of the lifting rod, and a locking hole is formed in the trapezoidal block.

[0025] In a preferred scheme, the fixing assembly comprises a movable cavity, which is formed in the lower end of the lifting rod; a piston plate is slidably connected in the movable cavity; the lower end of the piston plate is connected with a piston rod, which is inserted into the cavity of the seed crystal clamp in a piston type; the bottom surface of the piston plate is fixedly connected with a compression spring, and the other end of the compression spring is fixedly connected with the inner wall of the movable cavity; push rods are connected in a ring shape on the piston rod, and the push rods are slidably connected to the seed crystal clamp; and clamping jaws are rotatably arranged in a ring shape on the bottom surface of the seed crystal clamp.

[0026] In a preferred scheme, the protection assembly comprises an annular sleeve plate, which is sleeved on the outer side of the lifting rod; annular insertion plates are slidably inserted at both ends of the annular sleeve plate; guide rods are fixedly connected in a ring shape on the annular insertion plates, and the guide rods are slidably connected to the annular sleeve plate; and a reset spring is fixedly connected between the annular insertion plate and the annular sleeve plate.

[0027] The technical effects achieved by the present application are as follows:

[0028] The present application effectively prevents the leakage of furnace gas and the entry of external impurities into the furnace by setting a close fit between the dynamic sealing ring and the static sealing ring and using a flexible material resistant to wear and high temperature to make the dynamic sealing ring. This ensures the purity of the environment during crystal growth, thereby improving the quality of the crystal.

[0029] The present application forms a complete water circulation flow path through the cooling assembly, and the main purpose is to effectively cool the pulling rod. Through such a cooling mechanism, the pulling rod and the structure thereon can be prevented from deforming due to long-term exposure to a high-temperature environment, thereby prolonging the service life thereof.

[0030] The design of the fixing assembly of the present application utilizes the impact force of the water source in the cooling assembly on the piston plate to rotate the clamping jaws and firmly clamp the seed crystal. The torsional spring on the rotating shaft of each clamping jaw ensures that the clamping jaw automatically returns to the initial position without resistance, which significantly enhances the stability of the seed crystal during the pulling process and reduces the risk of seed crystal falling off due to instability. In addition, the action of the fixing assembly is driven by the cooling assembly, which not only ensures the safety of crystal growth, but also simplifies the operation process and improves the operation efficiency.

[0031] The cooling assembly of the present application not only effectively cools the pulling rod to prevent it from deforming or being damaged due to long-term exposure to a high-temperature environment, but also controls the lifting of the stirring part by driving the winding part (including the water wheel, rotating rod and winding roller) with water flow. This design allows the stirring rod to be inserted into and separated from the molten solution, and when inserted into the solution, the temperature distribution of the molten solution is improved by rotating the stirring, which helps to reduce the occurrence of component supercooling phenomenon and is crucial for the quality control of the entire melting process. BRIEF DESCRIPTION OF DRAWINGS

[0032] Figure 1 is a structural schematic diagram of the present application as a whole;

[0033] Figure 2 is an oblique view of the present application; Figure 1

[0034] Figure 3 is a connection schematic diagram of the static sealing ring and the furnace body of the present application;

[0035] Figure 4 is a structural schematic diagram of the pulling rod and the components thereon of the present application;

[0036] Figure 5 is an oblique view of the present application; Figure 4

[0037] ​​Figure 6 is a sectional view of the present application Figure 4 ;

[0038] Figure 7 is an enlarged schematic view of part A shown in the present application Figure 6 ;

[0039] Figure 8 is a bottom sectional view of the present application Figure 4 ;

[0040] Figure 9 is an enlarged schematic view of part B shown in the present application Figure 6 ;

[0041] Figure 10 is an enlarged schematic view of part C shown in the present application Figure 6 ;

[0042] Figure 11 is a schematic view of the connection between the stirring part and the winding part of the present application

[0043] Figure 12 is a schematic view of the change in the use state of the fixing assembly of the present application

[0044] Figure 13 is a schematic view of the structure of the protection assembly of the present application

[0045] Figure 14 is a sectional view of the present application Figure 13 ;

[0046] Figure 15 is a schematic view of the structure acting on the furnace body of the present application

[0047] In the drawings, the components represented by the respective reference numerals are listed as follows:

[0048] 1, furnace body; 11, static sealing ring; 2, stand column; 3, platform; 4, lifting assembly; 5, rotating assembly; 6, lifting rod; 7, cooling assembly; 8, mixing mechanism; 9, fixing assembly; 10, protection assembly;

[0049] 61, dynamic sealing ring; 62, sealing cover; 63, seed crystal clamp; 64, seed crystal;

[0050] 401, n-type frame; 402, screw rod; 403, lifting motor; 404, screw block;

[0051] 501, large gear; 502, rotating motor; 503, small gear;

[0052] 701, first annular water storage pipe; 702, second annular water storage pipe; 703, water inlet pipe; 704, water outlet pipe; 705, water inlet passage; 706, water outlet passage;

[0053] 81, stirring part; 82, winding part; 83, limiting part;

[0054] 811, circular ring; 812, sliding block; 813, guide rail; 814, stirring rod;

[0055] 821, rotating rod; 822, water wheel; 823, winding roller; 824, traction rope;

[0056] 831, movable groove; 832, guide block; 833, moving rod; 834, spring; 835, locking rod; 836, trapezoidal block;

[0057] 901, movable cavity; 902, piston plate; 903, piston rod; 904, compression spring; 905, push rod; 906, clamping jaw;

[0058] 101, annular sleeve plate; 102, annular plug-in plate; 103, guide rod; 104, reset spring. DETAILED DESCRIPTION

[0059] In order to make the above objectives, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0060] In the following description, a lot of specific details are set forth in order to provide a thorough understanding of the present application, but the present application can also be implemented in other ways different from those described herein, and those skilled in the art can make similar generalizations without departing from the concept of the present application, therefore the present application is not limited to the specific embodiments disclosed below.

[0061] Secondly, "one embodiment" or "embodiment" referred to herein means that a specific feature, structure or characteristic can be included in at least one implementation of the present application. "In a preferred embodiment" appearing in different places in the specification does not mean the same embodiment, nor is it an embodiment that is separate or alternative to other embodiments.

[0062] Thirdly, the present application is described in detail in conjunction with the schematic diagram, and in the detailed description of the embodiments of the present application, the cross-sectional view of the device structure is partially enlarged without general proportion for the convenience of description, and the schematic diagram is only an example, which should not limit the scope of protection of the present application. In addition, three-dimensional spatial dimensions including length, width and depth should be included in actual manufacture.

[0063] Please refer to the accompanying Figures 1 to 5 As shown in the accompanying drawings, the embodiment provides a crystal growth pulling device suitable for a crystal growth furnace, which comprises a furnace body 1, a stand 2 fixedly connected to the top surface of the furnace body 1, a platform 3 slidingly connected to the stand 2, a pulling rod 6 rotatably connected to the platform 3, and a seed crystal clamp 63 fixedly installed at the lower end of the pulling rod 6;

[0064] A pulling assembly 4 is assembled on the top surface of the furnace body 1, used to drive the platform 3 to lift up and down;

[0065] A rotating assembly 5 is assembled on the platform 3, used to drive the pulling rod 6 to rotate;

[0066] A cooling assembly 7 is arranged on the pulling rod 6, used to cool the pulling rod 6;

[0067] A mixing mechanism 8 is arranged on the lower end of the pulling rod 6;

[0068] A fixing assembly 9 is arranged on the seed crystal clamp 63;

[0069] A protection assembly 10 is arranged on the outer side of the pulling rod 6;

[0070] The mixing mechanism 8 comprises a stirring part 81, which is sleeved on the pulling rod 6, and a winding part 82 is arranged on the pulling rod 6, and a limiting part 83 is arranged on the stirring part 81.

[0071] In this embodiment, the stirring part 81 can move axially along the pulling rod 6, and the winding part 82 is used to wind the rope connected to the stirring part 81, so as to realize the axial movement of the stirring part 81 on the pulling rod 6. The limiting part 83 is used to limit the movement of the stirring part 81 in certain cases, so as to ensure that the stirring part 81 remains stationary at a certain position. The pulling assembly 4 drives the platform 3 to lift up and down, thereby driving the pulling rod 6 and the seed crystal 64 on the seed crystal clamp 63 to perform the pulling operation. The rotating assembly 5 drives the pulling rod 6 to rotate. The cooling assembly 7 cools the pulling rod 6 to prevent the pulling rod 6 from deforming or being damaged due to high temperature. The fixing assembly 9 is used to fix the seed crystal 64, so as to ensure that the seed crystal 64 does not fall off or shake during the pulling process. The protection assembly 10 is used to reduce the risk of gas leakage in the furnace body 1. The whole device has compact structure and simple operation, and can effectively improve the quality and efficiency of crystal growth.

[0072] Only the shell part of the furnace body 1 is shown in the drawings, and the specific structure of the furnace body 1 is well known. The following is a brief supplement to the structure of the furnace body 1 for reference.

[0073] I. Heating system

[0074] The heating system is the core part of the crystal growth furnace, which is responsible for providing and maintaining the required high temperature environment.

[0075] Heating element: usually uses resistance wire (such as molybdenum wire, tungsten wire), graphite heater or induction coil as heating source.

[0076] Thermal insulation layer: high-efficiency thermal insulation materials (such as alumina fiber, carbon felt) are used to reduce heat loss and maintain temperature uniformity.

[0077] Temperature Sensor: Includes thermocouples, infrared thermometers, etc., to monitor and feedback the temperature inside the furnace in real time, ensuring the accuracy of temperature control.

[0078] II. Furnace

[0079] The furnace is the main space for crystal growth, which contains various components for supporting and controlling crystal growth.

[0080] Crucible: Placed in the center of the furnace, used to hold the molten raw materials. Common materials include quartz, graphite, platinum, etc.

[0081] Heat Shield: Surrounds the crucible to further improve temperature uniformity and stability.

[0082] Gas Inlet and Outlet: Used to introduce inert gas (such as argon) or other specific atmosphere, and to exhaust waste gas, maintaining a pure environment inside the furnace.

[0083] III. Crystal Pulling Device

[0084] The crystal pulling device is used to extract and grow single crystals from molten liquid.

[0085] Cooling System: Includes water cooling jacket, heat sink, etc., to help control the temperature gradient during crystal growth, promoting the improvement of crystal quality.

[0086] IV. Atmosphere Control System

[0087] The atmosphere control system is used to adjust the gas composition and pressure inside the furnace, ensuring the purity and stability of the crystal growth environment.

[0088] Gas Supply System: Provides inert gas, reducing gas or other special gas to prevent oxidation or contamination.

[0089] Vacuum Pump: Used for vacuum pumping, to remove oxygen, moisture and other impurities in the air, ensuring the purity of the atmosphere inside the furnace.

[0090] Flow Meter and Pressure Sensor: Monitor and adjust the gas flow and pressure inside the furnace, ensuring the consistency of growth conditions.

[0091] V. Control System

[0092] The control system is the brain of the entire crystal growth furnace, responsible for coordinating the operation of each subsystem.

[0093] PLC / Computer Control System: Integrates temperature control, pulling speed adjustment, atmosphere management, etc., with high automation, programmable to set different growth processes.

[0094] Human Machine Interface (HMI): Provides an intuitive operation interface, making it easy for operators to monitor and adjust various parameters.

[0095] Data recording and analysis module: records key data during growth process for subsequent analysis and process optimization.

[0096] Six, safety precautions

[0097] In order to protect the safety of equipment and personnel, the crystal growth furnace is also equipped with a series of safety precautions.

[0098] Over-temperature protection: automatically cut off power when temperature exceeds set value to prevent equipment damage.

[0099] Leakage detection: monitor furnace body tightness to avoid harmful gas leakage.

[0100] Emergency stop button: stop all operations immediately in case of abnormal conditions to ensure safety.

[0101] Secondly, please refer to Figure 4 , Figure 5 and Figure 12 , the outer wall of the pulling rod 6 is also rotatably connected with a dynamic sealing ring 61 through a sealing bearing, the upper end of the furnace body 1 is provided with a static sealing ring 11, the outer wall of the dynamic sealing ring 61 is fixedly sleeved with a sealing cover 62, and the seed crystal holder 63 is installed with a seed crystal 64.

[0102] In this embodiment, the static sealing ring 11 is fixed on the furnace body 1, and the dynamic sealing ring 61 is installed on the pulling rod 6 and tightly cooperates with the static sealing ring 11. The dynamic sealing ring 61 is made of flexible material resistant to wear and high temperature, which can maintain good sealing performance when the pulling rod 6 moves up and down, prevent gas leakage in the furnace and foreign matter from entering the furnace, and ensure the purity of the crystal growth environment.

[0103] It should be noted that: the dynamic sealing ring 61 can rotate relative to the pulling rod 6, and the dynamic sealing ring 61 is limited not to move up and down along the pulling rod 6.

[0104] Thirdly, please refer to Figure 1 , the pulling assembly 4 includes an n-shaped frame 401 fixedly connected to the top surface of the furnace body 1, the upper end of the n-shaped frame 401 is rotatably connected with a lead screw 402, and the lower end of the lead screw 402 is rotatably connected with the furnace body 1, the n-shaped frame 401 is fixedly installed with a lifting motor 403, and the output shaft of the lifting motor 403 is fixedly connected with the lead screw 402, the lead screw 402 is threadedly connected with a lead block 404, and the lead block 404 is fixedly connected with the platform 3; the pitch of the lead screw 402 can be selected according to actual conditions, such as 0.1mm or smaller pitch, to realize high-precision adjustment.

[0105] In this embodiment, by activating the lifting motor 403, the motor starts to operate and drives the lead screw 402 to rotate. With the rotation of the lead screw 402, it will cause the wire block 404 connected thereto to move along its length direction. The movement of the wire block 404 in turn drives the entire platform 3 to displace along the vertical direction. This displacement enables the pulling rod 6 on the platform 3 to perform vertical lifting movement, thereby realizing precise vertical displacement control.

[0106] Secondly, please refer again to Figure 1 and Figure 2 , the rotating assembly 5 includes a large gear 501 fixedly installed at the upper end of the pulling rod 6, and a rotating motor 502 fixedly installed on the platform 3, and a small gear 503 installed at the output shaft of the rotating motor 502.

[0107] In this embodiment, the rotating motor 502 is started to drive the small gear 503 to rotate. The small gear 503 and the large gear 501 are tightly connected through a gear belt transmission mechanism. When the small gear 503 rotates, this transmission mechanism ensures the transmission of power, so that the large gear 501 also starts to rotate. With the rotation of the large gear 501, it will further drive the pulling rod 6 connected thereto to rotate.

[0108] After the melt is processed, the seed crystal 64 is fixed on the seed crystal clamp 63, and the seed crystal 64 is slowly lowered by the pulling assembly 4, so that the tip end thereof lightly contacts the surface of the melt.

[0109] The pulling speed and the rotating speed are respectively controlled by the pulling assembly 4 and the rotating assembly 5 to realize the growth of the crystal:

[0110] Initial growth: slowly lift the pulling rod 6 to make the tip end of the seed crystal 64 gradually draw out a small crystal from the melt. This process is called “necking”, and the purpose is to eliminate dislocation defects in the seed crystal 64.

[0111] Main body growth: when the necking part reaches a certain length, gradually increase the pulling speed to start the growth of the main body crystal.

[0112] Diameter control: by adjusting the pulling speed and the rotating speed, the stability of the crystal diameter is maintained.

[0113] It should be noted that the lifting motor 403 and the rotating motor 502 are both servo motors, and both are currently publicly available products. When selecting, the specifications and use scenarios should be suitable, and the specific model specifications are not limited here.

[0114] Please refer again to Figure 4 , Figure 5 , Figure 7 andFigure 8 The cooling assembly 7 comprises a first annular water storage pipe 701 and a second annular water storage pipe 702, both of which are rotatably connected to the lifting rod 6 through a sealing bearing, and the first annular water storage pipe 701 and the second annular water storage pipe 702 are respectively connected with a water inlet pipe 703 and a water outlet pipe 704. The center of the lifting rod 6 is provided with a water inlet channel 705, and the outer surface of the lifting rod 6 is annularly distributed around the water inlet channel 705 and is provided with a water outlet channel 706, and the water inlet channel 705 and the water outlet channel 706 are respectively communicated with the first annular water storage pipe 701 and the second annular water storage pipe 702.

[0115] In this embodiment, the water inlet pipe 703 and the water outlet pipe 704 are both communicated with external pipelines. In this way, the external water source can be introduced along the water inlet pipe 703 and pumped into the first annular water storage pipe 701 by the action of an external water pump. Then, the water source flows from the first annular water storage pipe 701 into the water inlet channel 705 and continues to flow along the designed path. Then, the water flows from the water inlet channel 705 into the water outlet channel 706 and is finally discharged from the water outlet pipe 704. This process forms a complete water circulation flow path, and the main purpose is to effectively cool the lifting rod 6. Through such a cooling mechanism, the deformation of the lifting rod 6 and the structure thereon due to long-term exposure to high temperature environment can be prevented, thereby achieving the effect of prolonging the service life.

[0116] It needs to be further explained that: since the dynamic sealing ring 61, the first annular water storage pipe 701 and the second annular water storage pipe 702 are all connected to the lifting rod 6 by a rotating connection. In this design, the dynamic sealing ring 61 is constrained and limited by the static sealing ring 11, so when the lifting rod 6 rotates, the dynamic sealing ring 61 will not rotate with it. At the same time, the first annular water storage pipe 701 and the second annular water storage pipe 702 are fixedly connected with the sealing cover 62 connected to the dynamic sealing ring 61 through a support rod. Such a structural design ensures that the first annular water storage pipe 701 and the second annular water storage pipe 702 will not rotate during the rotation of the lifting rod 6. The purpose of this design is to ensure the stability of water delivery during the operation of the lifting rod 6, to avoid water flow instability or interruption caused by rotation, and to ensure the normal operation and efficiency of the entire system.

[0117] Please refer to Figure 5 and Figure 11 again, the stirring part 81 comprises a circular ring 811 which is sleeved on the outside of the lifting rod 6, the inner circle of the circular ring 811 is annularly distributed and connected with a sliding block 812, the outer surface of the lifting rod 6 is annularly distributed and connected with a guide rail 813, and the sliding block 812 and the guide rail 813 form a sliding structure, and the bottom surface of the circular ring 811 is annularly distributed and connected with a stirring rod 814.

[0118] In this embodiment, in the initial stage, firstly, the powder raw material is placed in the crucible inside the furnace body 1. Then, the heating device in the furnace body 1 is started to heat the powder raw material in the crucible. When the raw material is melted to a predetermined degree, the operator needs to start the lifting assembly 4 to control the lowering action of the lifting rod 6 accurately so that the stirring rod 814 can be inserted into the crucible and contact the molten solution therein. In this process, it is particularly noted that the seed crystal 64 does not directly contact the solution in the crucible at this stage (at this time, the position of the stirring rod 814 is lower than that of the seed crystal 64). Subsequently, the operator will start the rotating assembly 5 to drive the lifting rod 6 to rotate. The rotation of the lifting rod 6 will further drive the rotation of the circular ring 811, and the rotation of the circular ring 811 will further drive the stirring rod 814 to rotate slowly. The rotation of the stirring rod 814 acts on the solution in the crucible, effectively improving the temperature distribution of the melt, and also helping to reduce the occurrence of component supercooling, which is crucial for the quality control of the entire melting process.

[0119] Please refer to Figure 9 and Figure 11 again, the winding part 82 includes a rotating rod 821, two rotating rods 821 are respectively rotatably connected in the two water outlet channels 706 through sealing bearings, and one end of the rotating rod 821 extends to the outside of the lifting rod 6, a water wheel 822 is fixedly installed at the end of the rotating rod 821 in the water outlet channel 706, and a winding roller 823 is fixedly installed at the other end of the rotating rod 821, the winding roller 823 is fixedly connected with a traction rope 824, and the traction rope 824 is a tungsten wire rope twisted by multiple anti-sag tungsten wires.

[0120] Please refer to Figure 4 and Figure 10 again, the limiting part 83 includes a movable groove 831, two movable grooves 831 are symmetrically arranged on the circular ring 811, a guide block 832 is slidably connected in the movable groove 831, a moving rod 833 is fixedly connected to one side of the guide block 832, the other end of the moving rod 833 penetrates to the outside of the circular ring 811, a lock rod 835 is fixedly connected to the other side of the guide block 832, and the lock rod 835 also extends to the outside of the circular ring 811, a spring 834 is sleeved outside the moving rod 833, and the two ends of the spring 834 are fixedly connected with the guide block 832 and the inner wall of the movable groove 831 respectively, two trapezoidal blocks 836 are fixedly connected to the outer surface of the lifting rod 6, and a lock hole is formed in the trapezoidal block 836.

[0121] In this embodiment, when the water source flows along the water outlet channel 706, it will trigger a series of mechanical actions. First, the kinetic energy of the water flow is used to drive the rotation of the water wheel 822. With the rotation of the water wheel 822, it will drive the rotating rod 821 connected thereto to rotate. The rotation of the rotating rod 821 is transmitted to the winding roller 823, causing the winding roller 823 to start rotating. The rotation of the winding roller 823 is to perform the winding work, which will make the circular ring 811 and the stirring rod 814 move upward along the vertical direction. With the rising of the circular ring 811 and the stirring rod 814, the stirring rod 814 will gradually separate from the melt in the crucible, thereby stopping the stirring action. In the process of the circular ring 811 rising, the sliding block 812 will slide smoothly along the guide rail 813, which ensures the stability of the circular ring 811 during movement. When the circular ring 811 reaches a certain height, the locking rod 835 will move to the position of the trapezoidal block 836 and be resisted by the trapezoidal block 836, and then slide into the movable groove 831 for contraction. The movement of the locking rod 835 will drive the guide block 832 and exert pressure on the spring 834. When the circular ring 811 moves to the end of its maximum stroke (at this time the position of the seed crystal 64 is lower than the stirring rod 814), the locking rod 835 will be located at the lock slot on the trapezoidal block 836. At this time, due to the resistance of the trapezoidal block 836, the locking rod 835 will reset under the resetting force of the spring 834 and insert into the lock slot on the trapezoidal block 836, thereby fixing the circular ring 811 at the current position and preventing it from continuing to move. After the processing process is completed, if it is necessary to release the fixed state of the circular ring 811, the user can pull the moving rod 833, which will drive the guide block 832 to move, so that the locking rod 835 slides out of the lock slot. Once the locking rod 835 moves out of the lock slot, the circular ring 811 loses the limit, so it can start to move downward, thereby subsequent operations or adjustments can be performed.

[0122] Please refer again to Figure 12 , the fixing assembly 9 comprises a movable cavity 901 which is arranged at the lower end of the pulling rod 6, a piston plate 902 is slidably connected in the movable cavity 901, the lower end of the piston plate 902 is connected with a piston rod 903, the piston rod 903 is inserted into the cavity of the seed crystal clamp 63 in a piston type, the bottom surface of the piston plate 902 is fixedly connected with a compression spring 904, the other end of the compression spring 904 is fixedly connected with the inner wall of the movable cavity 901, a push rod 905 is annularly arranged on the piston rod 903 and is slidably connected on the seed crystal clamp 63, and the bottom surface of the seed crystal clamp 63 is annularly provided with a clamping jaw 906 which is rotatably arranged.

[0123] In this embodiment, when the water source flows along the water inlet channel 705, it will impact the piston plate 902, causing the piston plate 902 and the piston rod 903 to move downward together, thereby exerting pressure on the compression spring 904. As the piston plate 902 moves downward, the water source enters the water outlet channel 706 through the movable cavity 901 and is discharged along this path. At the same time, the downward movement of the piston rod 903 will cause the push rod 905 to move downward together. The downward movement of the push rod 905 will contact the clamping jaws 906, causing the clamping jaws 906 to rotate. These clamping jaws 906 are distributed around the seed crystal 64, ensuring firm clamping of the seed crystal 64. This clamping mechanism significantly improves the stability of the seed crystal 64 during crystal growth, effectively preventing the problem of seed crystal 64 falling off due to instability.

[0124] In addition, it is worth noting that each clamping jaw 906 is equipped with a torsional spring (not shown in the figure) on its rotation shaft. The function of these torsional springs is to ensure that the clamping jaws 906 can automatically return to their initial position after completing the rotation action and without being contacted, thereby preparing for the next clamping operation and ensuring the continuous and stable operation of the entire mechanical device.

[0125] Please refer to Figure 13 and Figure 14 , the protection assembly 10 includes a ring-shaped sleeve plate 101, which is sleeved on the outer side of the pulling rod 6, both ends of the ring-shaped sleeve plate 101 are slidingly inserted with ring-shaped insertion plates 102, the ring-shaped insertion plates 102 are fixedly connected with guide rods 103 which are distributed in a ring shape, and the guide rods 103 are slidingly connected on the ring-shaped sleeve plate 101, and the ring-shaped insertion plates 102 and the ring-shaped sleeve plate 101 are fixedly connected with reset springs 104.

[0126] In this embodiment, the lower end part of the lower ring-shaped insertion plate 102 is combined with the bottom surface of the furnace body 1 by fixed connection. The upper end part of the upper ring-shaped insertion plate 102 is fixedly connected with the sealing cover 62 by bolts. This structure design makes the ring-shaped insertion plate 102 and the ring-shaped sleeve plate 101 jointly form a protection cover structure, which not only can effectively seal, but also greatly improves the sealing performance. Through this structure, the air leakage phenomenon can be effectively avoided, thereby further reducing the risk of gas leakage in the furnace body 1 and impurities entering the furnace. During the lifting process of the pulling rod 6, the two ring-shaped insertion plates 102 can move up and down along the ring-shaped sleeve plate 101 in the vertical direction. At the same time, cooperating with the design of the guide rods 103, they can play the role of guiding and limiting, which guarantees the stability of the pulling rod 6 during lifting and ensures the safety and reliability of the whole system.

[0127] The working principle of the present application is:

[0128] Pulling and rotating control:

[0129] Pulling assembly 4: The lead screw 402 is driven to rotate by the lifting motor 403, and the nut 404 on the lead screw 402 moves accordingly, driving the platform 3 and the pulling rod 6 mounted thereon to move vertically. This design achieves high-precision vertical displacement control.

[0130] Rotating assembly 5: The pinion 503 is driven to rotate by the rotating motor 502, which in turn drives the large gear 501 and the pulling rod 6 to rotate through a gear belt transmission mechanism. This ensures that the pulling rod 6 can accurately control the rotation speed during crystal growth.

[0131] Cooling mechanism:

[0132] Cooling assembly 7: It includes a first annular water storage pipe 701 and a second annular water storage pipe 702, which are connected to the pulling rod 6 through sealed bearings and are respectively connected to the water inlet pipe 703 and the water outlet pipe 704. The water source enters from the water inlet pipe 703 and flows along the water inlet channel 705, and then is discharged through the water outlet channel 706, forming a complete water circulation path to effectively cool the pulling rod 6 and its related structures, preventing them from deforming or being damaged due to high temperature.

[0133] Stirring and fixing mechanism:

[0134] Mixing mechanism 8: It includes a stirring part 81, a winding part 82, and a limiting part 83. The stirring part 81 is sleeved on the pulling rod 6 and forms a sliding structure with the sliding block 812 and the guide rail 813, so that the stirring part 81 can move axially on the pulling rod 6. The winding part 82 drives the water wheel 822 to rotate through water flow, thereby driving the rotating rod 821 and the winding roller 823 to realize the lifting of the stirring part 81. The limiting part 83 is used to limit the stirring part 81 to remain stationary at a certain position, ensuring the accuracy of operation.

[0135] Fixing assembly 9: When the water source flows along the water inlet channel 705, it will generate an impact force on the piston plate 902, causing the piston plate 902 and the piston rod 903 to move downward, thereby pushing the push rod 905 to contact the clamping jaw 906, causing it to rotate and firmly hold the seed crystal 64.

[0136] Protection and sealing mechanism:

[0137] Protection assembly 10: It is composed of an annular sleeve plate 101 and an annular insert plate 102, which are connected by a guide rod 103 to form a protective cover structure. This design not only improves the sealing performance, but also avoids the risk of gas leakage in the furnace body 1 and the entry of external impurities. The reset spring 104 between the annular insert plate 102 and the annular sleeve plate 101 ensures the stability of the pulling rod 6 during lifting.

[0138] The above merely describes the preferred embodiments of the present application, and it should be pointed out that those skilled in the art can make several improvements and refinements without departing from the principles of the present application, and these improvements and refinements should also be considered as the protection scope of the present application. The structures, devices and operation methods not specifically described and explained in the present application are implemented according to the conventional means in the art, unless specifically described and limited.

Claims

1. A crystal growth pulling device suitable for a crystal growth furnace, characterized in that: The furnace body (1) comprises a furnace body (1), the top surface of the furnace body (1) is fixedly connected to a column (2), a platform (3) is slidably connected to the column (2), a lifting rod (6) is rotatably connected to the platform (3), and a seed crystal clamp (63) is fixedly installed at the lower end of the lifting rod (6); A lifting assembly (4), the lifting assembly (4) being assembled on the top surface of the furnace body (1) and used for driving the platform (3) to move up and down; A rotating assembly (5), the rotating assembly (5) being mounted on the platform (3) and used for driving the lifting rod (6) to rotate; A cooling assembly (7), the cooling assembly (7) being arranged on the lifting rod (6) and being used for cooling the lifting rod (6); A mixing mechanism (8), the mixing mechanism (8) being arranged at the lower end of the lifting rod (6); A fixing assembly (9), wherein the fixing assembly (9) is arranged on the seed crystal clamp (63); A protective component (10), wherein the protective component (10) is arranged on the outside of the lifting rod (6); The mixing mechanism (8) includes a stirring portion (81), the stirring portion (81) is sleeved on the lifting rod (6), the lifting rod (6) is further provided with a winding portion (82), and the stirring portion (81) is provided with a limiting portion (83); The cooling assembly (7) includes a first annular water storage pipe (701) and a second annular water storage pipe (702), the first annular water storage pipe (701) and the second annular water storage pipe (702) are both rotatably connected to the lifting rod (6) through a sealed bearing, the first annular water storage pipe (701) and the second annular water storage pipe (702) are respectively connected to a water inlet pipe (703) and a water outlet pipe (704), a water inlet channel (705) is provided at the center of the lifting rod (6), and a water outlet channel (706) is also provided on the lifting rod (6) in an annular distribution around the water inlet channel (705), and the water inlet channel (705) and the water outlet channel (706) are respectively communicated with the first annular water storage pipe (701) and the second annular water storage pipe (702); The stirring portion (81) includes a ring (811), the ring (811) is sleeved on the outside of the lifting rod (6), the inner ring of the ring (811) is connected to a slider (812) in an annular distribution, the outer surface of the lifting rod (6) is connected to a guide rail (813) in an annular distribution, and the slider (812) and the guide rail (813) form a sliding structure, and the bottom surface of the ring (811) is connected to a stirring rod (814) in an annular distribution; The winding portion (82) includes a rotating rod (821), and the two rotating rods (821) are respectively rotatably connected to two of the water outlet channels (706) through sealed bearings, and one end of the rotating rod (821) extends to the outside of the lifting rod (6), and one end of the rotating rod (821) located in the water outlet channel (706) is fixedly installed with a water wheel (822), and the other end of the rotating rod (821) is fixedly installed with a winding roller (823), and the winding roller (823) is fixedly connected with a traction rope (824); The limiting portion (83) includes a movable groove (831), two movable grooves (831) are symmetrically arranged on the ring (811), and a guide block (832) is slidably connected in the movable groove (831), one side of the guide block (832) is fixedly connected to a moving rod (833), and the other end of the moving rod (833) passes through the outside of the ring (811), the other side of the guide block (832) is fixedly connected to a locking rod (835), and the locking rod (835) also extends to the outside of the ring (811), the outer side of the movable rod (833) is provided with a spring (834), and the two ends of the spring (834) are respectively fixedly connected to the inner wall of the guide block (832) and the movable groove (831), and the outer surface of the lifting rod (6) is fixedly connected to two trapezoidal blocks (836), and a locking hole is opened on the trapezoidal block (836).

2. The crystal growth pulling device suitable for a crystal growth furnace according to claim 1, characterized in that: The outer wall of the lifting rod (6) is also rotatably connected to a dynamic sealing ring (61) through a sealing bearing. The upper end of the furnace body (1) is provided with a static sealing ring (11). The outer wall fixed sleeve of the dynamic sealing ring (61) is provided with a sealing cover (62). The seed crystal clamp (63) is mounted with a seed crystal (64).

3. The crystal growth pulling device suitable for a crystal growth furnace according to claim 1, characterized in that: The lifting assembly (4) includes an n-shaped frame (401), the n-shaped frame (401) is fixedly connected to the top surface of the furnace body (1), the upper end of the n-shaped frame (401) is rotatably connected to a screw rod (402), and the lower end of the screw rod (402) is rotatably connected to the furnace body (1), a lifting motor (403) is fixedly installed on the n-shaped frame (401), and the output shaft of the lifting motor (403) is fixedly connected to the screw rod (402), a wire block (404) is threadedly connected to the screw rod (402), and the wire block (404) is fixedly connected to the platform (3).

4. The crystal growth pulling device suitable for a crystal growth furnace according to claim 1, characterized in that: The rotating assembly (5) includes a large gear (501), which is fixedly mounted on the upper end of the lifting rod (6). A rotating motor (502) is fixedly mounted on the platform (3), and a small gear (503) is mounted on the upper end of the output shaft of the rotating motor (502).

5. The crystal growth pulling device suitable for a crystal growth furnace according to claim 1, characterized in that: The fixed component (9) includes a movable chamber (901), which is opened at the lower end of the lifting rod (6), and a piston plate (902) is slidably connected in the movable chamber (901), and the lower end of the piston plate (902) is connected to a piston rod (903), and the piston rod (903) is piston-type inserted into the cavity of the seed crystal clamp (63), and the bottom surface of the piston plate (902) is fixedly connected to a compression spring (904), and the other end of the compression spring (904) is fixedly connected to the inner wall of the movable chamber (901), and a push rod (905) is connected to the piston rod (903) in an annular distribution, and the push rod (905) is slidably connected to the seed crystal clamp (63), and the bottom surface of the seed crystal clamp (63) is rotatably provided with a clamping claw (906) in an annular distribution.

6. The crystal growth pulling device suitable for a crystal growth furnace according to claim 1, characterized in that: The protective component (10) includes an annular sleeve (101), which is sleeved on the outside of the lifting rod (6), and an annular plug plate (102) is slidably inserted at both ends of the annular sleeve (101), and a guide rod (103) is fixedly connected to the annular plug plate (102) in an annular distribution, and the guide rod (103) is slidably connected to the annular sleeve (101), and a return spring (104) is fixedly connected between the annular plug plate (102) and the annular sleeve (101).

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