A high-frequency single-photon tilted wavefront detection method and device

By performing high-speed encoding and modulation of the incident light wavefront, combined with signal processing and data correction of the single-photon detector, the problem of insufficient preprocessing in single-photon tilted wavefront detection is solved, achieving efficient, accurate and clear imaging of high-frequency detection.

CN119958706BActive Publication Date: 2026-05-29UESTC (SHENZHEN) ADVANCED RES INST

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
UESTC (SHENZHEN) ADVANCED RES INST
Filing Date
2025-02-14
Publication Date
2026-05-29

AI Technical Summary

Technical Problem

Existing single-photon tilted wavefront detection methods lack sufficient preprocessing of single-photon signals and data, affecting the accuracy of the detection results.

Method used

Wavefront modulation technology is used to encode and modulate the incident light wavefront at high speed. Combined with a single-photon detector, signal acquisition and processing are performed, including signal amplification, filtering preprocessing, system delay and pixel responsivity error correction, and data accuracy is improved through data correction technology.

Benefits of technology

It improves detection efficiency, enhances temporal resolution and dynamic measurement accuracy, improves the resolution and contrast of the imaging system, reduces noise interference, and improves the accuracy and reliability of data.

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Abstract

The application discloses a kind of high-frequency single-photon tilt wavefront detection method and device, comprising the following steps: using wavefront modulation technique, high-speed coding and modulation are carried out to incident light wavefront;Single-photon signal acquisition, using single-photon detector, the single-photon signal focused after being focused by light signal guiding focusing device is collected, and the received photon signal is converted into electrical signal and is output by detector;Single-photon signal processing, single-photon signal wavefront reconstruction, according to the extracted wavefront tilt information, wavefront is reconstructed using wavefront reconstruction algorithm;Data correction;Data result analysis.The application uses wavefront modulation technique to carry out high-speed coding and modulation to incident light wavefront, can improve the performance of light signal guiding focusing device, enhance system flexibility, wavefront modulation technique allows the amplitude, phase, polarization state and wave vector direction parameter of light wave to be independently or simultaneously regulated, which greatly enhances the flexibility and functionality of light signal guiding focusing device, and can optimize imaging quality.
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Description

Technical Field

[0001] This invention relates to the field of single-photon detection technology, and in particular to a high-frequency single-photon tilted wavefront detection method and apparatus. Background Technology

[0002] Single-photon detection is a technique for capturing and converting light energy at the level of a single photon. It requires detectors capable of operating at extremely low light intensities and accurately detecting each arriving photon. This technology is typically used in scenarios requiring ultra-sensitive detection, such as quantum communication, lidar, and fluorescence lifetime imaging. Commonly used detectors in single-photon detection include single-photon avalanche diodes (SPADs) and superconducting nanowire single-photon detectors (SNSPDs). These detectors feature high sensitivity, low noise, and low dark count rates, enabling accurate detection of weak light signals.

[0003] A wavefront refers to the spatial distribution of the amplitude and phase of a light wave during its propagation. Wavefront measurement technology is the technique for accurately measuring this distribution. In optical systems, wavefront distortion affects image quality and beam quality; therefore, wavefront measurement is of great significance for the design and optimization of optical systems. There are various wavefront measurement techniques, such as interferometry, shearing interferometry, and Hartmann-Shack wavefront sensors. All of these methods can achieve accurate wavefront measurement, but the specific method chosen depends on the application scenario and measurement requirements.

[0004] Single-photon tilted wavefront detection is a high-precision detection method that combines single-photon detection technology with wavefront measurement technology. It utilizes the high sensitivity of single-photon detectors to accurately detect weak light signals and uses wavefront measurement technology to precisely measure the amplitude and phase distribution of the light wave.

[0005] Existing single-photon tilted wavefront detection methods lack sufficient preprocessing for single-photon signals and data, which can easily affect the accuracy of the detection results.

[0006] A high-frequency single-photon tilted wavefront detection device and method are disclosed in Chinese patent document CN117516729A. This device and method include a beam splitter, an optical mask, a single-photon detector, a counter, and a data processing computer. The beam splitter divides the beam to be tested into multiple beams; the optical mask has different transmittance at different positions; the single-photon detector collects the light energy transmitted through the mask; the counter counts the output of the single-photon detector; and the data processing computer processes the output value of the counter. By superimposing a mask with transmittance varying with position on the photosensitive surface of the single-photon detector, the light intensity transmitted through the mask varies at different centroid positions. By establishing a mathematical model between the output light intensity of the single-photon counter and the position of the light spot, the centroid position of the light spot can be directly calculated from the light intensity data transmitted through the mask. This method can detect tilted wavefront information of extremely dark and weak targets, greatly improve the frame rate of wavefront detection, and reduce the requirement for target light intensity. However, the high-frequency single-photon tilted wavefront detection device and method did not perform the expected correction processing before analyzing the detection results. System delay error, pixel responsivity error and other factors may affect the accuracy of data analysis results.

[0007] A single-photon detection device and method are disclosed in Chinese patent document CN112393810A. This device and method include: an anti-phase reflection branch, a single-photon sensor, and a normal-phase reflection branch. The input signal is split into two paths, one leading to the anti-phase reflection branch and the other to the single-photon sensor. The anti-phase reflection branch processes the received input signal through anti-phase reflection to obtain an anti-phase signal. The single-photon sensor sends the received input signal to the normal-phase reflection branch, senses photons, generates photon information, and outputs a first branch signal, which includes photon information and an anti-phase signal. The normal-phase reflection branch processes the input signal passing through the single-photon sensor through normal-phase reflection to obtain a second branch signal. The first branch signal and the second branch signal are superimposed to obtain the photon information. While this embodiment can be used for single-photon detection, the device and method do not sufficiently acquire photoelectric signals, resulting in weak signals susceptible to background noise interference.

[0008] To address the shortcomings of the existing technologies, providing a high-frequency single-photon tilted wavefront detection method and device is a problem worthy of study. Summary of the Invention

[0009] The purpose of this invention is to overcome the shortcomings of existing single-photon tilted wavefront detection methods, which are insufficient in the preprocessing of single-photon signals and data and easily affect the accuracy of detection results. This invention provides a high-frequency single-photon tilted wavefront detection method and device, which achieves the technical effects of improving detection efficiency, enhancing time resolution, and enabling dynamic measurement in high-frequency single-photon tilted wavefront detection.

[0010] The objective of this invention is achieved through the following technical solution:

[0011] A method and apparatus for high-frequency single-photon tilted wavefront detection, comprising the following steps:

[0012] Step 1: Use wavefront modulation technology to encode and modulate the incident light wavefront at high speed;

[0013] Step 2: Single-photon signal acquisition. The single-photon signal is acquired by using a single-photon detector after being focused by the optical signal guiding focusing device. The detector converts the received photon signal into an electrical signal for output.

[0014] Step 3: Single-photon signal processing, which involves amplifying and filtering the acquired electrical signal to improve the signal-to-noise ratio;

[0015] Step 4: Extract the wavefront tilt information of the single-photon signal;

[0016] Step 5: Single-photon signal wavefront reconstruction. Based on the extracted wavefront tilt information, the wavefront is reconstructed using a wavefront reconstruction algorithm.

[0017] Step 6: Data correction. Before data processing, the system delay error and pixel responsivity error are corrected, and the wavefront tilt is visualized in the form of an image or chart.

[0018] Step 7: Data results analysis. Analyze the reconstructed wavefront to evaluate the performance of the optical signal guiding and focusing device and optimize the optical design.

[0019] Before high-speed encoding and modulation of the incident light wavefront in step one, the optical signal guiding and focusing device and the DMD are precisely calibrated according to the required optical performance DMD digital micromirror device model;

[0020] DMD flips each micromirror in its micromirror array at a high rate, thereby changing the reflection direction and phase of the incident light. By precisely controlling the flipping angle and time of the micromirrors, it can generate outgoing light with a specific wavefront shape. This wavefront shape can be a precise copy of a tilted wavefront or a wavefront shape processed by a specific algorithm.

[0021] In step one, the high-speed encoding and modulation of the incident light wavefront requires designing an appropriate encoding algorithm based on the required wavefront shape and modulation speed. This generates a series of binary holograms to control the flipping state of the micromirrors on the DMD. Each hologram corresponds to a specific wavefront shape. The generated holograms are loaded into the DMD's memory for use during modulation, meeting the requirements of high-speed modulation and avoiding interference with the DMD's modulation of light.

[0022] In step one, during the high-speed encoding and modulation of the incident light wavefront, as the micromirrors on the DMD flip, the incident light wavefront will be modulated into the desired shape. The modulated light wavefront will be projected onto the target area or detector for subsequent analysis and processing. Wavefront modulation technology can control the spatial bandwidth product of optical information, providing a new approach for optical information processing. It can be used for optical information encryption to improve the security of the key space. Wavefront modulation technology can optimize the recording density and reading speed of optical storage, improving storage efficiency and data security.

[0023] In the single-photon signal processing of step three, the signal quality and signal-to-noise ratio are monitored in real time, and adjustments and optimizations are made as needed. The impact of environmental noise on signal processing is considered, and corresponding measures are taken to reduce noise interference, thereby effectively improving the signal-to-noise ratio and detection accuracy.

[0024] In step three, the layout of the power supply and ground wires is optimized in the single-photon signal processing. During the signal amplification and filtering process, a stable power supply is provided to the amplifier and filter, and decoupling capacitors are used to reduce the impact of power supply noise on the signal. Optimizing the layout of the power supply and ground wires can reduce the introduction of electromagnetic interference and noise, thereby improving the signal-to-noise ratio in high-frequency single-photon tilted wavefront detection.

[0025] In step six, the system delay error and pixel responsivity error are corrected, and the extracted wavefront tilt is visualized in the form of images and charts. The expected correction of the error in the collected data can improve the accuracy and reliability of the data. Displaying the collected data in the form of charts and images helps to intuitively understand the distribution and changes of the wavefront tilt. System delay error correction and pixel responsivity error correction are essential steps in high-frequency single-photon tilt wavefront detection. These corrections can significantly improve the accuracy of the collected data and provide a reliable foundation for subsequent wavefront analysis and processing.

[0026] A high-frequency single-photon tilted wavefront detection device includes a single-photon source, a wavefront modulation device, an optical signal guiding and focusing device, a single-photon detector, and a signal acquisition and processing device. The wavefront modulation device uses a DMD (Digital Micromirror Device) to modulate the laser beam, and the optical signal guiding and focusing device is used to adjust the polarization state and direction of the laser beam.

[0027] The DMD digital micromirror device is a TI DLP series digital micromirror device or a DMD digital micromirror device optimized for a specific band. The outside of the DMD digital micromirror device is equipped with a shield. Both the DMD digital micromirror device and the shield are connected to the ground through a grounding line. The shield blocks or weakens the influence of electromagnetic fields on the device, so as to reduce the interference of external electromagnetic fields and improve the modulation accuracy of the DMD digital micromirror device. The material of the shield is selected with high conductivity and high magnetic permeability, such as copper, aluminum, steel, etc.

[0028] The optical signal guiding and focusing device includes a laser collimator, a half-wave plate, a polarizing beam splitter, and a quarter-wave plate installed in sequence. The center wavelength of the half-wave plate matches the output wavelength of the laser collimator, and the center wavelength of the quarter-wave plate matches the output wavelength of the polarizing beam splitter.

[0029] Positive and beneficial effects: 1. This high-frequency single-photon tilted wavefront detection method and device utilizes wavefront modulation technology to encode and modulate the incident light wavefront at high speed, which can improve the performance of the optical signal guiding and focusing device and enhance the system flexibility. Wavefront modulation technology allows for independent or simultaneous control of parameters such as the amplitude, phase, polarization state, and wave vector direction of the light wave, which greatly enhances the flexibility and functionality of the optical signal guiding and focusing device and can optimize the imaging quality.

[0030] 2. This high-frequency single-photon tilted wavefront detection method and device can significantly improve the resolution and contrast of the imaging system by precisely controlling the light wavefront, making the imaging clearer and more accurate. As an application of wavefront modulation, wavefront coding technology can greatly expand the depth of field of the system without reducing the system's light throughput, obtain more object-space information, and reduce aberrations caused by defocus.

[0031] 3. This high-frequency single-photon tilted wavefront detection method and device can perform expected correction of the error of the acquired data, thereby improving the accuracy and reliability of the data. Displaying the acquired data in the form of charts and images helps to intuitively understand the distribution and changes of the wavefront tilt. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the method steps of the present invention;

[0033] Figure 2 This is a schematic diagram of the device of the present invention. Detailed Implementation

[0034] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0035] Example 1

[0036] like Figures 1 to 2 As shown, a high-frequency single-photon tilted wavefront detection method and apparatus includes the following steps:

[0037] Step 1: Use wavefront modulation technology to encode and modulate the incident light wavefront at high speed;

[0038] Step 2: Single-photon signal acquisition. The single-photon signal is acquired by using a single-photon detector after being focused by the optical signal guiding focusing device. The detector converts the received photon signal into an electrical signal for output.

[0039] Step 3: Single-photon signal processing, which involves amplifying and filtering the acquired electrical signal to improve the signal-to-noise ratio;

[0040] Step 4: Extract the wavefront tilt information of the single-photon signal;

[0041] Step 5: Single-photon signal wavefront reconstruction. Based on the extracted wavefront tilt information, the wavefront is reconstructed using a wavefront reconstruction algorithm.

[0042] Step 6: Data correction. Before data processing, the system delay error and pixel responsivity error are corrected, and the wavefront tilt is visualized in the form of an image or chart.

[0043] Step 7: Data results analysis. Analyze the reconstructed wavefront to evaluate the performance of the optical signal guiding and focusing device and optimize the optical design.

[0044] like Figure 1 As shown, before high-speed encoding and modulation of the incident light wavefront in step one, the optical signal guiding and focusing device and the DMD are precisely calibrated according to the required optical performance DMD digital micromirror device model. During the DMD model selection process, it is ensured that the array size of the DMD matches the incident light spot size to fully utilize the modulation capability of the DMD. By combining with the encoding algorithm, the complex amplitude information is encoded onto the binary hologram, realizing dynamic and precise wavefront control of the amplitude and phase distribution of the light field. In wavefront modulation, the DMD can be used as a key optical element for high-speed encoding and modulation of the incident light wavefront.

[0045] Furthermore, high-speed encoding and modulation of the incident light wavefront can be achieved using TI's DLP series of digital micromirror devices (DMDs). This series features a high-resolution micromirror array, providing fine wavefront control, supporting high data clock rates, enabling fast response and high-speed modulation. Suitable for high-frequency detection needs, it can modulate the amplitude, direction, and / or phase of light, offering multiple operating modes to meet diverse application requirements, and exhibiting reliability and stability. Alternatively, DMDs optimized for specific wavelength bands (such as visible light and ultraviolet light) can be employed. DMDs optimized for specific wavelength bands (such as visible light and ultraviolet light) can provide higher detection efficiency and accuracy. Through optimized design and material selection, background noise and dark counts can be reduced, improving the signal-to-noise ratio, thereby enhancing the resolution and contrast of the imaging system, resulting in clearer and more accurate imaging, and enabling control over the spatial phase and amplitude of light.

[0046] DMD flips each micromirror in its micromirror array at a high rate, thereby changing the reflection direction and phase of the incident light. By precisely controlling the flipping angle and time of the micromirrors, it can generate outgoing light with a specific wavefront shape. This wavefront shape can be a precise copy of a tilted wavefront or a wavefront shape processed by a specific algorithm.

[0047] like Figure 1 As shown, in step one, the high-speed encoding and modulation of the incident light wavefront requires designing an appropriate encoding algorithm based on the desired wavefront shape and modulation speed. This generates a series of binary holograms used to control the flipping state of the micromirrors on the DMD. Each hologram corresponds to a specific wavefront shape. The generated holograms are loaded into the DMD's memory for use during modulation. Generating a series of holograms ensures that the resolution and size of the holograms match the array size of the DMD and that the hologram loading speed is fast enough to meet the requirements of high-speed modulation and avoid affecting the DMD's modulation of the light.

[0048] like Figure 1As shown, during the high-speed encoding and modulation of the incident light wavefront in step one, the incident light wavefront is modulated into the desired shape as the micromirrors on the DMD flip. The modulated wavefront is then projected onto the target area or detector for subsequent analysis and processing. High-speed encoding and modulation of the incident light wavefront using wavefront modulation technology can improve the performance of optical signal guiding and focusing devices and enhance system flexibility. Wavefront modulation technology allows for independent or simultaneous control of parameters such as the amplitude, phase, polarization state, and wave vector direction of the light wave. This greatly enhances the flexibility and functionality of optical signal guiding and focusing devices and optimizes imaging quality. By precisely controlling the light wavefront, the resolution and contrast of the imaging system can be significantly improved, resulting in clearer and more accurate imaging. Wavefront encoding technology, as an application of wavefront modulation, can significantly expand the depth of field of the system without reducing the system's light throughput. This is of great significance for large depth-of-field optical imaging systems, enabling the acquisition of more object-space information and reducing aberrations caused by defocusing. In optical communication, wavefront modulation technology can optimize the light transmission path, reduce signal attenuation, and thus improve the information transmission rate. This is crucial for high-speed data transmission and long-distance communication applications, enhancing communication stability. By precisely controlling the optical wavefront, interference and noise during communication can be reduced, thus improving communication stability.

[0049] Furthermore, wavefront modulation technology can control the spatial bandwidth product of optical information, providing a new approach for optical information processing. It can be used for optical information encryption, improving the security of the key space. Wavefront modulation technology can also optimize the recording density and reading speed of optical storage, improving storage efficiency and data security.

[0050] Example 2

[0051] like Figure 1 As shown, in the single-photon signal processing in step three, the signal quality and signal-to-noise ratio are monitored in real time and adjusted and optimized as needed. The impact of environmental noise on signal processing is considered, and corresponding measures are taken to reduce noise interference. When performing preprocessing operations such as amplification and filtering on the acquired electrical signal, attention should be paid to selecting appropriate amplifier and filter types, designing reasonable parameters, considering factors such as impedance matching and phase response, and ensuring that no additional noise or distortion is introduced during the processing. This can effectively improve the signal-to-noise ratio and detection accuracy.

[0052] like Figure 1 As shown, in step three, the layout of the power supply and ground wires is optimized in the single-photon signal processing. During the signal amplification and filtering process, a stable power supply is provided for the amplifier and filter, and decoupling capacitors are used to reduce the impact of power supply noise on the signal. By optimizing the layout of the power supply and ground wires, electromagnetic interference and noise can be reduced, thereby improving the signal-to-noise ratio in high-frequency single-photon tilted wavefront detection.

[0053] like Figure 1 As shown, step six corrects for system delay error and pixel responsivity error, and visualizes the extracted wavefront tilt in the form of images and charts. System delay error mainly stems from the difference in synchronous signal transmission between the signal generator, pulsed laser, and SPAD (single-photon avalanche diode) camera in the detection system, as well as the time delay in signal generation and processing within these components. These delays cause systematic biases in the recorded photon flight time. Pixel responsivity error mainly stems from the differences in light intensity responsivity and timing delay among individual pixels in the SPAD detector array. These differences may be caused by variations in sensitive elements, readout circuits, and manufacturing processes. Correcting the errors in the acquired data can improve the accuracy and reliability of the data. Displaying the acquired data in the form of charts and images helps to intuitively understand the distribution and changes in wavefront tilt. System delay error correction and pixel responsivity error correction are essential steps in high-frequency single-photon tilt wavefront detection. These corrections can significantly improve the accuracy of the acquired data, providing a reliable foundation for subsequent wavefront analysis and processing.

[0054] A high-frequency single-photon tilted wavefront detection device includes a single-photon source, a wavefront modulation device, an optical signal guiding and focusing device, a single-photon detector, and a signal acquisition and processing device. The wavefront modulation device uses a DMD digital micromirror device to modulate the laser beam, and the optical signal guiding and focusing device is used to adjust the polarization state and direction of the laser beam.

[0055] like Figure 2 As shown, the DMD digital micromirror device is a TI DLP series digital micromirror device or a DMD digital micromirror device optimized for a specific wavelength band. A shield is installed on the outside of the DMD digital micromirror device. Both the DMD digital micromirror device and the shield are connected to the ground via a grounding line. By installing a shield on the outside of the DMD digital micromirror device, the influence of electromagnetic fields on the device is blocked or weakened, thereby reducing external electromagnetic interference and improving the modulation accuracy of the DMD digital micromirror device. The shield is made of materials with high conductivity and high magnetic permeability, such as copper, aluminum, and steel. By connecting the metal casing of the device to the ground, or by connecting the internal metal components of the device to the grounding terminal via a grounding wire, an equipotential body is formed, thereby eliminating or weakening the influence of electromagnetic interference. The grounding resistance also needs to be controlled within a certain range to ensure the effectiveness of the grounding.

[0056] Example 3

[0057] like Figure 2As shown, the optical signal guiding and focusing device includes a laser collimator, a half-wave plate, a polarizing beam splitter, and a quarter-wave plate installed sequentially. The center wavelength of the half-wave plate matches the output wavelength of the laser collimator, and the center wavelength of the quarter-wave plate matches the output wavelength of the polarizing beam splitter. The laser collimator can generate a high-quality parallel beam, ensuring that the laser beam remains linear during transmission and reducing positioning errors caused by beam divergence. The half-wave plate can change the polarization state of the laser beam by adjusting the fast axis direction, achieving flexible adjustment of the polarization state. This is crucial for certain optical experiments or applications that require a specific polarization state. The quarter-wave plate can convert linearly polarized light into circularly polarized or elliptically polarized light, further enriching the selection of the laser beam's polarization state. The polarizing beam splitter utilizes the reflection and transmission characteristics of light in a multilayer film structure to separate the horizontal and vertical polarization components of the laser beam. This not only enables the separation of optical signals but also improves the utilization rate of optical signals and reduces optical loss. The synergistic effect between various optical components can enhance the stability and reliability of the entire optical signal guiding and focusing device. Through reasonable optical design and component selection, the influence of external electromagnetic interference and vibration interference on the optical signal guiding and focusing device can be reduced, thereby improving the stability and measurement accuracy of the system. The combination of optical components such as laser collimator, half-wave plate, polarization beam splitter prism and quarter-wave plate enables this high-frequency single-photon tilted wavefront detection device to have advantages such as high-precision positioning and focusing, flexible polarization state adjustment, efficient optical signal separation and utilization, improved system stability and reliability, and expanded application fields.

Claims

1. A high-frequency single-photon tilted wavefront detection method, characterized in that, Includes the following steps: Step 1: Use wavefront modulation technology to encode and modulate the incident light wavefront at high speed; Step 2: Single-photon signal acquisition. The single-photon signal is acquired by using a single-photon detector after being focused by the optical signal guiding focusing device. The detector converts the received photon signal into an electrical signal for output. Step 3: Single-photon signal processing, which involves amplifying and filtering the acquired electrical signal to improve the signal-to-noise ratio; Step 4: Extract the wavefront tilt information of the single-photon signal; Step 5: Single-photon signal wavefront reconstruction. Based on the extracted wavefront tilt information, the wavefront is reconstructed using a wavefront reconstruction algorithm. Step 6: Data correction. Before data processing, the system delay error and pixel responsivity error are corrected, and the wavefront tilt is visualized in the form of an image or chart. Step 7: Data results analysis. Analyze the reconstructed wavefront to evaluate the performance of the optical signal guiding and focusing device and optimize the optical design.

2. The high-frequency single-photon tilted wavefront detection method according to claim 1, characterized in that: Before high-speed encoding and modulation of the incident light wavefront in step one, the optical signal guiding and focusing device and the DMD are precisely calibrated according to the required optical performance and the model of the DMD digital micromirror device.

3. The high-frequency single-photon tilted wavefront detection method according to claim 1, characterized in that: In step one, the high-speed encoding and modulation of the incident light wavefront requires designing an appropriate encoding algorithm based on the desired wavefront shape and modulation speed. This generates a series of binary holograms to control the flipping state of the micromirrors on the DMD. Each hologram corresponds to a specific wavefront shape. The generated holograms are then loaded into the DMD's memory for use during modulation.

4. The high-frequency single-photon tilted wavefront detection method according to claim 1, characterized in that: In step one, during the high-speed encoding and modulation of the incident light wavefront, as the micromirrors on the DMD flip, the incident light wavefront will be modulated into the desired shape. The modulated light wavefront will then be projected onto the target area or detector for subsequent analysis and processing.

5. The high-frequency single-photon tilted wavefront detection method according to claim 1, characterized in that: In the single-photon signal processing of step three, the signal quality and signal-to-noise ratio are monitored in real time, and adjustments and optimizations are made as needed. The impact of environmental noise on signal processing is considered, and corresponding measures are taken to reduce noise interference.

6. The high-frequency single-photon tilted wavefront detection method according to claim 1, characterized in that: In the single-photon signal processing of step three, the layout of the power supply and ground lines is optimized. During the signal amplification and filtering process, a stable power supply is provided to the amplifier and filter, and decoupling capacitors are used to reduce the impact of power supply noise on the signal.

7. A high-frequency single-photon tilted wavefront detection device for performing the high-frequency single-photon tilted wavefront detection method according to any one of claims 1-6, comprising a single-photon source, a wavefront modulation device, an optical signal guiding and focusing device, a single-photon detector, and a signal acquisition and processing device, characterized in that: The wavefront modulation device uses a DMD digital micromirror device to modulate the laser beam, and the optical signal guiding and focusing device is used to adjust the polarization state and direction of the laser beam.

8. A high-frequency single-photon tilted wavefront detection device according to claim 7, characterized in that: The DMD digital micromirror device is a TI DLP series digital micromirror device or a DMD digital micromirror device optimized for a specific band. The outside of the DMD digital micromirror device is equipped with a shield, and both the DMD digital micromirror device and the shield are connected to the ground through a grounding line.

9. A high-frequency single-photon tilted wavefront detection device according to claim 7, characterized in that: The optical signal guiding and focusing device includes a laser collimator, a half-wave plate, a polarizing beam splitter, and a quarter-wave plate installed in sequence. The center wavelength of the half-wave plate matches the output wavelength of the laser collimator, and the center wavelength of the quarter-wave plate matches the output wavelength of the polarizing beam splitter.