A high-stability, ultra-fast switching, lifting white light shutter device

Abstract

This invention discloses a highly stable, ultra-fast switching white light shutter device. The invention includes a motion mechanism, a vacuum chamber, an adjustable base, and a support. The adjustable base is used for elevation adjustment and leveling of the motion mechanism and the vacuum chamber. The motion mechanism includes a drive assembly, a shutter switching assembly, and multiple spring-loaded fine-tuning assemblies. The shutter switching assembly is mounted directly above the drive assembly, and the spring-loaded fine-tuning assemblies are symmetrically arranged on both sides of the drive assembly. The upper end of each spring-loaded fine-tuning assembly is connected to the drive assembly, and the lower end is connected to the adjustable base. The shutter switching assembly is sealed to the vacuum chamber, and the absorber of the shutter switching assembly is located inside the vacuum chamber. The drive assembly drives the absorber to reciprocate vertically within the vacuum chamber, controlling the switching between on and off light. The spring-loaded fine-tuning assemblies are used to balance the vacuum suction force generated by the vacuum chamber on the drive assembly, thereby reducing the load on the drive assembly. This invention significantly improves the stability of equipment operating on the beamline.

Description

Technical Field

[0001] This invention belongs to the field of synchrotron radiation beamline technology and relates to a highly stable lifting white light shutter device with ultra-fast switching. Background Technology

[0002] Synchrotron radiation facilities are comprehensive platforms for conducting multidisciplinary and multi-field scientific research, and have evolved from the first generation to the fourth generation. The High Energy Photon Source (HEPS), currently under construction, is the brightest fourth-generation synchrotron radiation facility in the world to date, with a capacity of more than 80 beamlines. Once completed, it will provide strong scientific support for the development of various disciplines.

[0003] With the continuous development of synchrotron radiation source technology, most high-energy light source beamlines employ insert technology. Different types of insert sources produce significantly different total synchrotron radiation power and peak power density. A complete beamline consists of a front-end region (located in the storage ring tunnel), an optical house (located outside the storage ring tunnel), and an experimental house (located downstream of the optical house). To meet different experimental needs, especially in fields such as materials science and life sciences, it may be necessary for experimental samples to receive only brief synchrotron radiation. This necessitates the use of a white light shutter within the optical house as a switch for the synchrotron radiation. The white light shutter switches the synchrotron radiation on and off by opening and closing, thus determining whether the synchrotron radiation can pass through and be led to the downstream experimental house for experimental purposes.

[0004] Most white light shutters used in existing high-energy synchrotron radiation sources employ cylinders as their actuation devices. They mainly consist of a motion mechanism 1, a vacuum chamber 2, an adjustable base 3, and a support 4. The motion mechanism 1 comprises a drive assembly 11 and a shutter switching assembly 12. The drive assembly 11 consists of a cylinder 11b and a guide mechanism 11a. The drive assembly 11 is located above the vacuum chamber 2. The cylinder 11b connects to and moves the white light shutter switching assembly 12 via the guide mechanism 11a, feeding in a vacuum environment within the vacuum chamber. The entire device is positioned along the XYZ axes via the adjustable base 3 and is positioned on the synchrotron radiation beamline via the support 4. Figure 1 The image shows a white light shutter commonly used in synchrotron radiation devices.

[0005] The cylinder-driven photonic shutter has a driving component 11 connected to the shutter switching component 12 via its guiding mechanism 11a. The lower half of the switching component 12 is placed inside the vacuum chamber 2, which is placed on an adjustable base 3, which is mounted above the bracket 4. This type of white light shutter driving device uses a cylinder 11b, and the switching time is generally on the order of seconds, making it almost impossible to perform millisecond-level motion switching within a stroke range of tens of millimeters. The motion mechanism 1 and the vacuum chamber 2 share an adjustable base 3, increasing the difficulty of collimation measurement. Furthermore, the motion mechanism 1 and the vacuum chamber 2 share a bracket 4, and this cylinder-driven white light shutter lacks any vibration damping measures, making it impossible to avoid the vibration impact on other equipment on the beamline during the movement of the motion mechanism 1.

[0006] In existing technologies, white light shutters typically use cylinders as driving devices. The cylinders are connected to the shutter switching components via a guide mechanism, and the switching components are turned on and off by controlling the movement of the cylinders. Fourth-generation synchrotron radiation devices have numerous inserts and extremely high thermal loads. Some scientific experiments require brief (millisecond-level) synchrotron radiation exposure, necessitating switching between synchrotron radiation beams within this timeframe. However, the response time of cylinder-driven switching is on the order of seconds, making cylinder-driven switching insufficient for rapid beam switching. Furthermore, the guide mechanism is complex; the absorber of the switching component typically requires welded water pipes, and the absorber and water pipes reciprocate within the vacuum chamber. The large mass of the moving parts and the heavy cylinder load further impact speed. Typical white light shutters lack springs to balance the vacuum suction load, further increasing the cylinder load and severely affecting movement speed. Finally, typical white light shutters share a support frame with the vacuum chamber, and there is no vibration isolation between them. This allows vibrations generated during movement to propagate to adjacent equipment on the beamline, affecting the operation of other devices. Summary of the Invention

[0007] To address the problems existing in the prior art, this invention aims to provide an ultra-fast, highly stable, lifting-type white light shutter device. This invention is applied in the field of synchrotron radiation beamlines and used in high vacuum environments. The invention uses a drive component to drive the shutter switching component, causing the absorber to reciprocate vertically within the vacuum cavity, thereby effectively controlling the switching between on and off states. The motor of the drive component features high speed and high acceleration, achieving millisecond-level speeds for vertical reciprocating motion within a stroke range of tens of millimeters. The spring fine-tuning component effectively balances the vacuum suction force generated by the vacuum cavity on the drive component, greatly reducing the motor load and further improving the movement speed. The adjustable base of this invention includes an adjustable base for the motion mechanism and an adjustable base for the vacuum cavity. The two bases are decoupled, allowing independent adjustment of their positional relationship in three-dimensional space. This enables precise positioning of the motion mechanism and the vacuum cavity without interference, significantly improving the efficiency of positioning and collimation. The support of this invention includes a motion mechanism support and a vacuum chamber support. The two supports are decoupled, and the independent support structure greatly extends the transmission path of vibrations generated by the motion mechanism during movement, significantly reducing the impact of vibrations on the vacuum chamber and other equipment on the beamline, thereby improving the stability of the equipment running on the beamline. The adjustable base of the motion mechanism of this invention adds a shock-absorbing plate between the adjustment plate and the base plate, which can effectively reduce the vibration caused by the impact load during the motor return process, further reducing the impact of vibrations on the support and other equipment.

[0008] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0009] A highly stable, ultra-fast switching white light shutter device mainly consists of a motion mechanism, a vacuum chamber, an adjustable base, and a support. The vacuum chamber, motion mechanism, adjustable base, and support are arranged from top to bottom.

[0010] Furthermore, the motion mechanism consists of a drive assembly, a shutter switching assembly, and a spring fine-tuning assembly.

[0011] Furthermore, the adjustable base includes an adjustable base for the motion mechanism and an adjustable base for the vacuum chamber, and the bracket includes a motion mechanism bracket and a vacuum chamber bracket. The adjustable base for the motion mechanism is installed below the motion mechanism, and the motion mechanism bracket is installed below the adjustable base for the motion mechanism; the adjustable base for the vacuum chamber is installed below the vacuum chamber, and the vacuum chamber bracket is installed below the adjustable base for the vacuum chamber.

[0012] Furthermore, the drive assembly consists of a high-speed motor, a motor motion connection plate, a motor base plate, a motor vertical plate, a grating ruler, an encoder, a linear guide rail, a linear guide rail sliding plate, and a hard limit assembly.

[0013] The high-speed motor is characterized by its small size, high speed, and high acceleration, and can be either a voice coil motor or a linear motor. The high-speed motor is mounted on the motor base plate. The motor vertical plate is perpendicular to the motor base plate and is fixedly connected by screws to form a stable motor mounting base.

[0014] The linear guide sliding plate and the motor vertical plate are connected by two sets of linear guides, which are arranged symmetrically, thereby increasing the accuracy and stability of the vertical movement of the high-speed motor.

[0015] The grating ruler is mounted on the side of the linear guide sliding plate.

[0016] The encoder is mounted on the vertical plate of the motor.

[0017] The encoder is used in conjunction with the grating ruler to measure and provide feedback on the position movement of the high-speed motor.

[0018] The motor motion connecting plate is fixedly connected to the motor by screws. The motor motion connecting plate reciprocates vertically as the motor rises and falls.

[0019] The hard limit assembly has four hard limit blocks. Two of the hard limit blocks are installed on the side of the linear guide sliding plate, and the other two hard limit blocks are installed on the motor vertical plate. They are arranged alternately in pairs to enable the high-speed motor to move within its stroke range and play a safety protection role.

[0020] Furthermore, the optical shutter switching assembly consists of a connector, a bellows, and an absorber.

[0021] The absorber is a part integrally formed with the flange and is installed directly above the bellows via a sealing flange connection. The bellows is installed directly above the connecting seat via bolt connection.

[0022] The shutter switching component is mounted directly above the motor motion connecting plate of the drive component via the connecting seat to achieve reciprocating motion in the vertical direction.

[0023] Furthermore, the spring fine-tuning assembly includes an upper spring fixing assembly, a spring, a lower spring fixing assembly, a universal rotating ring, and a spring stiffness adjustment assembly.

[0024] Furthermore, the upper end fixing assembly of the spring consists of an upper end fixing block, screws, nuts, and anti-loosening washers.

[0025] The upper end fixing block of the spring is fixed below the motor motion connecting plate by screws. One end of the spring's closed loop is placed in the middle position of the upper end fixing block of the spring. The screw passes through the upper end fixing block of the spring and one end of the spring's closed loop. The other end of the screw is fastened by the nut and the anti-loosening washer to prevent the spring from coming off during the up-and-down reciprocating motion of the high-speed motor.

[0026] Furthermore, the lower end fixing assembly of the spring consists of a lower end fixing block, screws, nuts, and anti-loosening washers.

[0027] The circular portion of the universal rotating ring is placed in the middle of the lower end fixing block of the spring. The screw passes through the lower end fixing block of the spring and the circular portion of the universal rotating ring. The other end of the screw is fastened by the nut and the anti-loosening washer to prevent the spring from coming off during the up-and-down reciprocating motion of the high-speed motor.

[0028] Furthermore, the spring stiffness adjustment assembly consists of a screw, a pressure plate, a lock nut, a flat washer, and a spring washer.

[0029] The screw is threaded to the universal rotating part of the universal rotating ring at its end. The purpose of the universal rotating ring is to prevent the spring from twisting when the screw rotates to adjust the vertical position of the tension spring, thus achieving decoupling. The pressure plate, the flat washer, the spring washer, and the locking nut pass through the screw in sequence from bottom to top, locking the screw below the adjustable base of the motion mechanism to fix the position of the tension spring assembly for balancing the load.

[0030] Furthermore, the two sets of spring fine-tuning components are symmetrically arranged on both sides of the high-speed motor, with the upper end connected to the motor motion connection plate and the lower end connected to the adjustable base of the motion mechanism, thereby achieving the effect of balancing the vacuum suction force, which greatly reduces the load on the high-speed motor and further improves the motion speed of the motion mechanism.

[0031] Furthermore, the vacuum chamber is a welded component made of stainless steel, mainly including the vacuum chamber body, the main vacuum chamber pipe, the supporting stiffener, the supporting stiffener base plate, the branch pipe, and the flange blind plate.

[0032] The vacuum chamber is a welded assembly of stainless steel. The main body of the vacuum chamber is a vertically arranged circular seamless steel pipe. Two horizontally arranged circular seamless steel pipes are welded to either side of the middle of the main body, forming a main vacuum chamber pipe consisting of an upstream main pipe and a downstream main pipe. The vacuum chamber as a whole is symmetrically arranged in a cross shape and internally interconnected. The outer end of the upstream main pipe is welded with a loose-fitting knife-edge flange, and the outer end of the downstream main pipe is welded with an internally welded knife-edge flange. Both ends of the vacuum chamber main body are welded with loose-fitting knife-edge flanges, and a blind flange is installed at the top of the vacuum chamber main body. The internal condition of the vacuum chamber can be observed by disassembling and assembling the blind flange.

[0033] A branch pipe for installing related auxiliary equipment is provided on one side of the main body of the vacuum chamber, and a loose-fitting knife-edge flange is welded to its end.

[0034] The main pipe of the vacuum chamber is welded with supporting ribs with base plates at the lower middle part. The two sets of supporting ribs support the entire vacuum chamber.

[0035] The vacuum chamber is mounted on the adjustable base of the vacuum chamber via the supporting rib plate.

[0036] The lower end of the vacuum chamber body is bolted to the bellows blade flange of the light shutter switching assembly, thereby sealing the entire vacuum chamber and connecting the vacuum chamber to the motion mechanism.

[0037] Furthermore, the adjustable base of the motion mechanism includes a base plate, a translation plate, a translation adjustment component, a motion mechanism elevation adjustment component, a locking pressure plate component, and a shock-absorbing plate.

[0038] The damping plate is placed between the translational plate and the base plate. The translational plate and the damping plate are fixed to the base plate by the elevation adjustment assembly and the locking pressure plate assembly. The radial (horizontal, perpendicular to the beam line direction, the same below) and axial (parallel to the beam line direction, the same below) positions are adjusted by the translational adjustment assembly. The elevation adjustment assembly is uniformly arranged relative to the center of the entire vacuum cavity. Multiple sets of translational adjustment assemblies are symmetrically arranged on both radial and axial sides of the translational plate.

[0039] The elevation adjustment component of the motion mechanism is adjusted to ensure its horizontal position. The elevation adjustment component is locked below the base plate using a locking pressure plate assembly to fix the horizontal position of the entire vacuum chamber. The horizontal radial and axial adjustments of the translation plate are achieved by adjusting the translation adjustment component.

[0040] Furthermore, the motion mechanism support includes a basic frame of the motion mechanism, feet, and an adjustable base mounting slot for the motion mechanism.

[0041] The bottom of the basic frame of the motion mechanism is welded to the base, which has mounting holes to fix the entire frame to the ground. Two adjustable base mounting slots are welded to the top of the basic frame. The adjustable base is mounted on the adjustable base mounting slots using studs to connect the adjustable base to the motion mechanism support.

[0042] Furthermore, the adjustable base of the vacuum chamber includes a vacuum chamber elevation adjustment component. Adjusting this component allows for elevation adjustment of the entire vacuum chamber and ensures it remains level.

[0043] Furthermore, the vacuum chamber support includes a basic vacuum chamber frame, feet, an adjustable vacuum chamber base mounting slot, and a steel plate.

[0044] The bottom of the basic frame of the vacuum chamber is welded to the base, which has mounting holes to fix the entire frame to the ground. Two crossbeams are welded to the upper horizontal plane of the basic frame of the vacuum chamber, perpendicular to the optical path, to increase the support strength of the adjustable base mounting slot. Two steel plates are installed below the basic frame of the vacuum chamber, parallel to the optical path, to reinforce the basic frame and increase its strength. The adjustable base of the vacuum chamber is mounted on the adjustable base mounting slot via screws to connect the adjustable base to the vacuum chamber support.

[0045] The advantages of this invention are as follows:

[0046] First, the key component of the drive assembly is a high-speed motor, characterized by high speed and high acceleration. It performs vertical reciprocating motion within a stroke range of tens of millimeters, and the switching time of the light switch can reach the millisecond level. This enables the light shutter switching assembly to switch on and off at high speed.

[0047] Secondly, the spring fine-tuning component can effectively balance the vacuum suction force, thereby greatly reducing the motor load and further improving the motor speed.

[0048] Third, the adjustable base includes an adjustable base for the motion mechanism and an adjustable base for the vacuum chamber. The two bases adopt a decoupled design, which can achieve precise positioning of the motion mechanism and the vacuum chamber without interference, greatly improving the efficiency of positioning and alignment.

[0049] Fourth, the support includes a motion mechanism support and a vacuum chamber support. The two supports adopt a decoupled design. This structure greatly extends the transmission path of vibrations generated by the motion mechanism during movement, significantly reduces the impact of vibrations on the vacuum chamber and other equipment on the beamline, thereby improving the stability of the equipment running on the beamline.

[0050] Fifth, adding a damping plate between the adjusting plate and the base plate of the adjustable base of the motion mechanism can effectively reduce the vibration caused by the impact load during the motor return process, further reduce the impact of vibration on the support and other equipment, and improve the stability of the beamline equipment operation. Attached Figure Description

[0051] Figure 1 It is a type of white light shutter commonly used in synchrotron radiation devices;

[0052] (a) Overall structure diagram of the white light shutter, (b) Structure diagram of the motion mechanism.

[0053] Figure 2 This is a schematic diagram of a specific embodiment of the present invention.

[0054] Figure 3 This is a front view of a specific embodiment of the present invention.

[0055] Figure 4 This is a schematic diagram of the motion mechanism in a specific embodiment of the present invention.

[0056] Figure 5 for Figure 4 A schematic diagram of the structure of the driving component.

[0057] Figure 6 for Figure 4 A schematic diagram of the structure of the optical shutter switching component.

[0058] Figure 7 for Figure 4 A schematic diagram of the structure of the middle spring fine-tuning component.

[0059] Figure 8 This is a schematic diagram of the structure of a vacuum cavity in a specific embodiment of the present invention.

[0060] Figure 9 This is a schematic diagram of the adjustable base of the motion mechanism in a specific embodiment of the present invention.

[0061] Figure 10 This is a partial structural cross-sectional view of the adjustable base of the motion mechanism in a specific embodiment of the present invention.

[0062] Figure 11 This is a schematic diagram of the adjustable base of the vacuum cavity in a specific embodiment of the present invention.

[0063] Figure 12 This is a schematic diagram of the structure of the motion mechanism support in a specific embodiment of the present invention.

[0064] Figure 13 This is a schematic diagram of the structure of a vacuum cavity support in a specific embodiment of the present invention.

[0065] Wherein: 1-Motion mechanism; 2-Vacuum cavity; 3-Adjustable base; 4-Bracket; 11-Drive assembly; 12-Light shutter switching assembly; 13-Spring fine-tuning assembly; 11a-Guide mechanism; 11b-Cylinder; 111-Voice coil motor; 112-Motor motion connecting plate; 113-Motor base plate; 114-Motor vertical plate; 115-Light grating ruler; 116-Encoder; 117-Linear guide rail; 118-Linear guide rail sliding plate; 119-Hard limit assembly; 119a-First hard limit block; 119b-Second hard limit block Limiting block; 119c - Third hard limiting block; 119d - Fourth hard limiting block; 121 - Connecting seat; 122 - Bellows; 123 - Absorber; 131 - Upper end fixing assembly of spring; 132 - Spring; 133 - Lower end fixing assembly of spring; 134 - Universal rotating ring; 135 - Spring stiffness adjustment assembly; 135a - Screw; 135b - First pressure plate; 135c - First flat washer; 135d - First spring washer; 135e - First locking nut; 21 - Vacuum chamber body; 22 - Main pipe of vacuum chamber ; 23-Support stiffener; 24-Support stiffener base plate; 25-Branch pipe; 26-Blind flange; 31-Adjustable base for motion mechanism; 32-Adjustable base for vacuum chamber; 311-Base plate; 312-Translation plate; 313-Translation adjustment assembly; 313a-Fixing block; 313b-Ball head screw; 313c-Nut; 314-Elevation adjustment assembly for motion mechanism; 314a-Stud; 314b-Second locking nut; 314c-Spherical washer; 314d-Conical washer; 315-Locking pressure plate assembly; 315 a-Locking screw; 315b-Second pressure plate; 315c-Second flat washer; 315d-Second spring washer; 315e-Third locking nut; 316-Damping plate; 321-Vacuum cavity elevation adjustment assembly; 41-Motion mechanism bracket; 42-Vacuum cavity bracket; 411-Motion mechanism basic frame; 412-First foot; 413-Motion mechanism adjustable base mounting slot plate; 421-Vacuum cavity basic frame; 422-Second foot; 423-Steel plate; 424-Vacuum cavity adjustable base mounting slot plate. Detailed Implementation

[0066] The present invention will now be described in further detail with reference to the accompanying drawings. The examples given are only for explaining the present invention and are not intended to limit the scope of the present invention.

[0067] In the description of this invention, it should be understood that the terms "upper", "lower", "horizontal", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the purpose of simplifying the description of this invention and do not indicate that the device or element referred to must have a specific orientation. Therefore, they should not be construed as limiting this invention.

[0068] like Figure 2 The image shows a specific embodiment of a high-stability, ultra-fast switching, lifting-type white light shutter device according to the present invention. It includes a motion mechanism 1, a vacuum chamber 2, an adjustable base 3, and a support 4. (See image below.) Figure 3 The image shown is a front view of this white light shutter device. The adjustable base 3 includes a motion mechanism adjustable base 31 and a vacuum chamber adjustable base 32, and the bracket 4 includes a motion mechanism bracket 41 and a vacuum chamber bracket 42. The motion mechanism 1 is mounted on the motion mechanism adjustable base 31, and the motion mechanism adjustable base 31 is mounted on the motion mechanism bracket 41. The vacuum chamber 2 is mounted on the vacuum chamber adjustable base 32, and the vacuum chamber adjustable base 32 is mounted on the vacuum chamber bracket 42.

[0069] like Figure 4 The diagram shows a schematic representation of the motion mechanism 1 in a specific embodiment of the present invention. The motion mechanism 1 consists of a drive assembly 11, a shutter switching assembly 12, and a spring fine-tuning assembly 13. The drive assembly 11 is located at the bottom of the entire motion mechanism 1; the shutter switching assembly 12 is mounted directly above the drive assembly 11; the spring fine-tuning assembly 13 is symmetrically arranged on both sides of the drive assembly 11; the upper end of the spring fine-tuning assembly 13 is connected to the drive assembly 11, and the lower end is connected to the adjustable base 31 of the motion mechanism.

[0070] like Figure 5 As shown Figure 4 A schematic diagram of the structure of the drive assembly 11. The drive assembly 11 consists of a voice coil motor 111, a motor motion connecting plate 112, a motor base plate 113, a motor vertical plate 114, a grating ruler 115, an encoder 116, a linear guide rail 117, a linear guide rail sliding plate 118, and a hard limit assembly 119.

[0071] The voice coil motor 111 is mounted on the motor base plate 113. The motor vertical plate 114 is perpendicular to the motor base plate 113 and fixedly connected by screws, forming a stable motor mounting base. The linear guide sliding plate 118 is connected to the motor vertical plate 114 by two sets of linear guides 117. The two sets of linear guides 117 are symmetrically arranged, thereby increasing the accuracy and stability of the motor's vertical movement. The motor motion connecting plate 112 is perpendicular to the linear guide sliding plate 118 and is integrally formed from aluminum alloy. The integrated structure gives its connection point high strength. The motor motion connecting plate 112 is fixedly connected to the voice coil motor 111 by screws. The motor motion connecting plate 112 and the linear guide sliding plate 118 are guided by the two sets of linear guides 117. As the voice coil motor 111 rises and falls, it performs a vertical reciprocating up-and-down movement, thereby driving the optical shutter switching component 12 to reciprocate up and down, realizing the on / off function. The grating ruler 115 is mounted on the side of the linear guide sliding plate 118. Encoder 116 is mounted on the motor vertical plate 114. Encoder 116 works in conjunction with linear encoder 115 to measure the actual movement distance of the voice coil motor 111. This measurement is fed back to the motor control system of the voice coil motor 111 to determine whether the target movement direction and distance have been achieved. This allows the system to adjust the movement direction and distance of the voice coil motor 111 at the next moment, ensuring correct motor movement direction and accurate movement distance. Figure 4 As shown, the hard limit assembly 119 includes four hard limit blocks. The second hard limit block 119b and the fourth hard limit block 119d are mounted on the side of the linear guide sliding plate 118. The first hard limit block 119a and the third hard limit block 119c are mounted on the motor vertical plate 114. The second hard limit block 119b and the first hard limit block 119a are arranged perpendicularly and alternately. The fourth hard limit block 119d and the third hard limit block 119c are also arranged perpendicularly and alternately. The distance between the second hard limit block 119b and the first hard limit block 119a is equal to the distance between the fourth hard limit block 119d and the third hard limit block 119c. All of these are equal to the target moving distance of the voice coil motor 111. The initial position of the voice coil motor 111 is on the motor base plate 113. The safe range for upward movement is ensured by the first hard limit block 119a and the third hard limit block 119c. When the voice coil motor 111 moves beyond the target displacement, the first hard limit block 119a blocks the second hard limit block 119b, and the third hard limit block 119c blocks the fourth hard limit block 119d to stop the upward movement of the voice coil motor 111, thereby preventing the voice coil motor 111 from moving to a position outside the safe range, and thus ensuring the safety of the entire white light shutter device.

[0072] like Figure 6 As shown Figure 4A schematic diagram of the structure of the light shutter switching assembly 12. The light shutter switching assembly 12 consists of a connecting seat 121, a bellows 122, and an absorber 123. The absorber 123 is an integrally formed part of the absorber and flange, and is installed directly above the bellows 122 via a sealing flange. The bellows 122 is bolted directly above the connecting seat 121. The light shutter switching assembly 12 is installed directly above the motor motion connecting plate 112 of the drive assembly 11 via the connecting seat 121 to achieve reciprocating motion in the vertical direction.

[0073] like Figure 7 As shown Figure 4 A schematic diagram of the structure of the spring fine-tuning assembly 13. The spring fine-tuning assembly 13 includes an upper spring fixing assembly 131, a spring 132, a lower spring fixing assembly 133, a universal rotating ring 134, and a spring stiffness adjustment assembly 135.

[0074] The upper spring fixing assembly 131 consists of an upper spring fixing block, a screw, a nut, and a lock washer. The upper spring fixing block is fixed to the underside of the motor motion connecting plate 112 by the screw. One end of the spring 132's closed loop is placed in the middle of the upper spring fixing block of the upper spring fixing assembly 131. The screw passes through the upper spring fixing block of the upper spring fixing assembly 131 and one end of the closed loop of the tension spring 132. The other end of the screw is tightened by the nut and the lock washer to prevent the spring 132 from disengaging during the reciprocating motion of the voice coil motor 111. The lower spring fixing assembly 133 consists of a lower spring fixing block, a screw, a nut, and a lock washer. The circular part of the universal rotating ring 134 is placed in the middle of the lower spring fixing block of the lower spring fixing assembly 133. The screw passes through the lower spring fixing block of the lower spring fixing assembly 133 and the circular part of the universal rotating ring 134. The other end of the screw is fastened by a nut and a lock washer to prevent the spring 132 from coming off during the reciprocating motion of the voice coil motor 111.

[0075] The spring stiffness adjustment assembly 135 consists of a screw 135a, a first pressure plate 135b, a first flat washer 135c, a first spring washer 135d, and a first locking nut 135e. The screw 135a is threaded to the universal rotating part of the universal rotating ring 134. The purpose of the universal rotating ring 134 is to prevent the spring 132 from twisting when the screw 135a rotates to adjust the vertical position, thus playing a decoupling role. The first pressure plate 135b, the first flat washer 135c, the first spring washer 135d, and the first locking nut 135e pass through the screw 135a sequentially from bottom to top, locking the screw 135a below the adjustable base 31 of the motion mechanism to fix the position of the spring fine-tuning assembly 13.

[0076] Two sets of spring fine-tuning components 13 for balancing loads are symmetrically arranged on both sides of the voice coil motor 111. The upper end is connected to the motor motion connecting plate 112, and the lower end is connected to the adjustable base 31 of the motion mechanism. This balances the vacuum suction force generated by the vacuum chamber 2 on the drive component 11, thereby greatly reducing the load on the voice coil motor 111 and further improving the motion speed of the motion mechanism 1.

[0077] like Figure 8 The diagram shows a schematic representation of the vacuum chamber 2 in a specific embodiment of the present invention. The vacuum chamber 2 is a welded component made of stainless steel, mainly comprising a vacuum chamber body 21, a main vacuum chamber pipe 22, supporting stiffeners 23, a supporting stiffener base plate 24, branch pipes 25, and a blind flange 26. The vacuum chamber body 21 is a vertically arranged circular seamless steel pipe. A horizontally arranged circular seamless steel pipe is welded to each side of the middle of the vacuum chamber body 21. The two horizontally arranged circular seamless steel pipes are coaxially symmetrically arranged, forming the main vacuum chamber pipe 22, which consists of an upstream main pipe and a downstream main pipe. The vacuum chamber 2 is symmetrically arranged in a cross shape and is internally interconnected. A loose-fitting knife-edge flange is welded to the outer end of the upstream main pipe, and an internally welded knife-edge flange is welded to the outer end of the downstream main pipe. Loose-fitting knife-edge flanges are welded to both ends of the vacuum chamber body 21. A blind flange 26 is installed on the upper end of the vacuum chamber body 21, allowing for observation of the internal condition of the vacuum chamber 2 by disassembling and assembling the blind flange 26. The branch pipe 25, used for installing related auxiliary equipment, is welded to one side of the vacuum chamber body 21, and its end is welded with a loose-fitting knife-edge flange.

[0078] Supporting ribs 23 are welded to the lower middle section of the main pipe 22 of the vacuum chamber, and a supporting rib base plate 24 is welded to the lower end of each supporting rib 23. The two sets of supporting ribs 23 support the entire vacuum chamber 2. The main body 21 of the vacuum chamber is connected to the adjustable base 32 of the vacuum chamber via the supporting rib base plate 24. The lower end of the loose-fitting knife-edge flange of the vacuum chamber main body 21 is bolted to the bellows 122 knife-edge flange of the light shutter switching assembly 12, thereby achieving the sealing of the entire vacuum chamber 2 and connecting the vacuum chamber 2 with the motion mechanism 1.

[0079] like Figure 9 , Figure 10 The diagram shown is a schematic representation of the adjustable base 31 of the motion mechanism in a specific embodiment of the present invention. The adjustable base 31 of the motion mechanism includes a base plate 311, a translation plate 312, a translation adjustment component 313, a motion mechanism elevation adjustment component 314, a locking pressure plate component 315, and a shock-absorbing plate 316.

[0080] A damping plate 316 is placed between a translational plate 312 and a base plate 311. The translational plate 312 and the damping plate 316 are fixed to the base plate 311 via an elevation adjustment assembly 314 and a locking pressure plate assembly 315. The radial (horizontal perpendicular to the beam line direction, the same below) and axial (parallel to the beam line direction, the same below) positions of the translational plate 312 are adjusted by the translational adjustment assembly 313. The translational adjustment assembly 313 includes a fixing block 313a, a ball head screw 313b, and a nut 313c. The position of the fixing block 313a is adjusted by the ball head screw 313b and the nut 313c, thereby adjusting the position of the translational plate 312. The motion mechanism elevation adjustment assembly 314 includes a stud 314a, a second locking nut 314b, a spherical washer 314c, and a conical washer 314d. The position of the motion mechanism 1 is adjusted by the second locking nut 314b and the stud 314a. 314 is symmetrically arranged at the center of the entire motion mechanism 1; wherein the locking pressure plate assembly 315 includes a locking screw 315a, a second pressure plate 315b, a second flat washer 315c, a second spring washer 315d and a third locking nut 315e. The motion mechanism elevation adjustment assembly 314 is locked by adjusting the second pressure plate 315b, the second flat washer 315c, the second spring washer 315d and the third locking nut 315e of the locking pressure plate assembly 315 below the base plate 311, so as to fix the height position of the entire motion mechanism 1.

[0081] like Figure 11 The diagram shows a schematic representation of the adjustable vacuum chamber base 32 in a specific embodiment of the present invention. The adjustable vacuum chamber base 32 has four sets of vacuum chamber elevation adjustment components 321 evenly distributed above the vacuum chamber support 42. The elevation adjustment and leveling of the entire vacuum chamber 2 can be achieved by adjusting the vacuum chamber elevation adjustment components 321.

[0082] like Figure 12 The diagram shows a schematic representation of the motion mechanism support 41 in a specific embodiment of the present invention. The motion mechanism support 41 includes a basic motion mechanism frame 411, a first base 412, and an adjustable base mounting plate 413. The bottom end of the basic motion mechanism frame 411 is welded to the first base 412, which has mounting holes to fix the entire frame to the ground. Two adjustable base mounting plates 413 are welded to the top of the basic motion mechanism frame 411. The adjustable base 31 is mounted on the adjustable base mounting plate 413 using studs, thus connecting the adjustable base 31 to the motion mechanism support 41.

[0083] like Figure 13The diagram shown is a structural schematic of a vacuum chamber support 42 in a specific embodiment of the present invention. The vacuum chamber support 42 includes a basic vacuum chamber frame 421, a second foot 422, an adjustable vacuum chamber base mounting groove 423, and a steel plate 424.

[0084] The bottom of the basic vacuum chamber frame 421 is welded to the second base 422, which has mounting holes to fix the entire frame to the ground. Two crossbeams are welded to the upper horizontal plane of the basic vacuum chamber frame 421 in a direction perpendicular to the optical path to increase the support strength of the adjustable base mounting plate 423. Two steel plates 424 are installed in the lower horizontal plane of the basic vacuum chamber frame 421 in a direction parallel to the optical path to reinforce the basic vacuum chamber frame 421 and increase its strength. The adjustable vacuum chamber base 32 is mounted on the adjustable base mounting plate 423 via screws to connect the adjustable vacuum chamber base 32 to the vacuum chamber support 42.

[0085] Although specific embodiments of the invention have been disclosed for illustrative purposes to aid in understanding and implementing the invention, those skilled in the art will understand that various substitutions, variations, and modifications are possible without departing from the spirit and scope of the invention and the appended claims. Therefore, the invention should not be limited to the content disclosed in the preferred embodiments, and the scope of protection claimed by the invention is defined by the claims.

Claims

1. A high-stability, ultra-fast switching, lifting-type white light shutter device, characterized in that, The system includes a motion mechanism (1), a vacuum chamber (2), an adjustable base (3), and a support (4); the adjustable base (3) includes an adjustable base (31) for the motion mechanism and an adjustable base (32) for the vacuum chamber, and the support (4) includes a support (41) for the motion mechanism and a support (42) for the vacuum chamber; wherein, the motion mechanism (1) is mounted on the adjustable base (31) for the motion mechanism, and the adjustable base (31) for the motion mechanism is mounted on the support (41) for the motion mechanism; the vacuum chamber (2) is mounted on the adjustable base (32) for the vacuum chamber, and the adjustable base (32) for the vacuum chamber is mounted on the support (42) for the vacuum chamber; The adjustable base (31) of the motion mechanism is used to adjust the elevation and level the motion mechanism (1); The adjustable base (32) of the vacuum cavity is used to adjust the elevation and level the vacuum cavity (2); The motion mechanism (1) includes a drive assembly (11), a shutter switching assembly (12), and multiple spring fine-tuning assemblies (13); wherein, the shutter switching assembly (12) is installed directly above the drive assembly (11); each of the spring fine-tuning assemblies (13) is symmetrically arranged on both sides of the drive assembly (11), and the upper end of the spring fine-tuning assembly (13) is connected to the drive assembly (11), and the lower end is connected to the adjustable base (31) of the motion mechanism; The shutter switching assembly (12) is sealed to the vacuum cavity (2), and the absorber (123) of the shutter switching assembly (12) is located inside the vacuum cavity (2). The drive assembly (11) is used to drive the absorber (123) to reciprocate vertically inside the vacuum cavity (2), thereby controlling the switching of the vacuum cavity (2) on and off. The spring fine-tuning assembly (13) is used to balance the vacuum suction force generated by the vacuum cavity (2) on the drive assembly (11), thereby reducing the load on the drive assembly (11).

2. The high-stability lifting white light shutter device according to claim 1, characterized in that, The drive assembly (11) includes a voice coil motor (111), a motor motion connecting plate (112), a motor base plate (113), a motor vertical plate (114), a grating ruler (115), an encoder (116), a linear guide rail (117), a linear guide rail sliding plate (118), and a hard limit assembly (119); wherein, the voice coil motor (111) is mounted on the motor base plate (113), the motor vertical plate (114) is perpendicular to and fixedly connected to the motor base plate (113), and two sets of the linear guide rails (117) are provided on the motor vertical plate (114). The linear guide sliding plate (118) is connected to the motor vertical plate (114) via the linear guide (117), and the motor motion connecting plate (112) is connected to the linear guide sliding plate (118); the grating ruler (115) is installed on the side of the linear guide sliding plate (118), and the encoder (116) is installed on the motor vertical plate (114); the encoder (116) works in conjunction with the grating ruler (115) to measure and control the position movement of the voice coil motor (111); the motor motion connecting plate (117) is connected to the linear guide sliding plate (118). 2) Connected and fixed to the voice coil motor (111), the motor motion connecting plate (112) and the linear guide sliding plate (118) move vertically up and down with the voice coil motor (111) guided by two sets of linear guides (117). The hard limit assembly (119) includes four hard limit blocks. Two of the hard limit blocks are installed on the side of the linear guide sliding plate (118), and the other two hard limit blocks are installed on the motor vertical plate (114), arranged alternately in pairs, so as to realize that the voice coil motor (111) moves within the target stroke. The light shutter switching assembly (12) moves within a certain range to provide safety protection. It includes a connecting seat (121), a bellows (122), and an absorber (123). The absorber (123) is connected and installed above the bellows (122) via a sealing flange. The bellows (122) is connected and installed above the connecting seat (121). The light shutter switching assembly (12) is installed above the motor motion connecting plate (112) via the connecting seat (121) and is used to reciprocate in the vertical direction to realize the functions of turning the light on and off.

3. The high-stability lifting white light shutter device according to claim 2, characterized in that, The spring fine-tuning assembly (13) includes an upper spring fixing assembly (131), a spring (132), a lower spring fixing assembly (133), a universal rotating ring (134), and a spring stiffness adjustment assembly (135). The upper spring fixing assembly (131) is connected below the motor motion connecting plate (112). One end of the spring (132) is connected to the upper spring fixing assembly (131), and the other end is connected to the lower spring fixing assembly (133). The circular part of the universal rotating ring (134) is connected to the lower spring fixing assembly (133), and the universal rotating part of the universal rotating ring (134) is connected to the spring stiffness adjustment assembly (135).

4. The high-stability lifting white light shutter device according to claim 3, characterized in that, The spring stiffness adjustment assembly (135) includes a screw (135a), a first pressure plate (135b), a first flat washer (135c), a first spring washer (135d), and a first locking nut (135e). One end of the screw (135a) is connected to the universal rotating part of the universal rotating ring (134), and the other end passes through the first pressure plate (135b), the first flat washer (135c), the first spring washer (135d), and the first locking nut (135e) in sequence. The screw (135a) is locked below the adjustable base (31) of the motion mechanism to fix the position of the spring fine-tuning assembly (13).

5. The high-stability lifting white light shutter device according to claim 4, characterized in that, Two sets of load-balancing spring fine-tuning components (13) are symmetrically arranged on both sides of the voice coil motor (111). The upper end of the components is connected to the drive component (11), and the lower end is connected to the adjustable base (31) of the motion mechanism. They are used to balance the vacuum suction force generated by the vacuum chamber (2) on the drive component (11), thereby reducing the load on the voice coil motor (111) and further improving the motion speed of the motion mechanism (1).

6. The high-stability lifting white light shutter device according to claim 1, characterized in that, The vacuum cavity (2) includes a vacuum cavity body (21), a vacuum cavity main pipe (22), a supporting stiffener (23), a supporting stiffener base plate (24), a branch pipe (25), and a blind flange (26). The vacuum cavity body (21) is a vertically arranged circular seamless steel pipe. A horizontally arranged circular seamless steel pipe is welded to each side of the middle part of the vacuum cavity body (21). The two horizontally arranged circular seamless steel pipes are arranged coaxially and symmetrically, serving as the upstream main pipe and the downstream main pipe of the vacuum cavity main pipe (22), respectively. The outer end of the upstream main pipe is welded with a loose-fitting knife-edge flange, and the outer end of the downstream main pipe is welded with an internally welded knife-edge flange. Both ends of the vacuum cavity body (21) are welded with... A loose-fitting knife-edge flange is provided; the blind flange (26) is installed at the upper end of the vacuum chamber body (21) for observing the internal condition of the vacuum chamber (2) by disassembling and assembling the blind flange (26); a branch pipe (25) for installing related auxiliary equipment is welded to one side of the vacuum chamber body (21); the supporting stiffeners (23) are welded to the lower part of the middle of the vacuum chamber main pipe (22), and the supporting stiffener base plate (24) is welded to the lower end of the supporting stiffener (23), and the supporting stiffener (23) is used to support the vacuum chamber (2); the vacuum chamber body (21) is connected to the adjustable base (32) of the vacuum chamber through the supporting stiffener base plate (24).

7. The high-stability lifting white light shutter device according to claim 6, characterized in that, The lower loose-fitting knife-edge flange of the vacuum chamber body (21) is sealed to the bellows (122) knife-edge flange of the light shutter switching assembly (12), thereby achieving the sealing of the vacuum chamber body (2) and the connection between the vacuum chamber body (2) and the motion mechanism (1).

8. The high-stability lifting white light shutter device according to claim 1, characterized in that, The adjustable base (31) of the motion mechanism includes a base plate (311), a translation plate (312), a translation adjustment assembly (313), a motion mechanism elevation adjustment assembly (314), a locking pressure plate assembly (315), and a shock-absorbing plate (316). The shock-absorbing plate (316) is placed between the translation plate (312) and the base plate (311). The translation plate (312) and the shock-absorbing plate (316) are fixed to the base plate (311) through the motion mechanism elevation adjustment assembly (314) and the locking pressure plate assembly (315). Each of the translation adjustment assemblies (313) is symmetrically arranged on both radial and axial sides of the translation plate (312). The radial and axial positions of the translation plate (312) are adjusted; the motion mechanism elevation adjustment component (314) is symmetrically arranged around the motion mechanism (1) and is used to adjust the elevation position and level of the motion mechanism (1); the horizontal position of the motion mechanism (1) is fixed by locking the motion mechanism elevation adjustment component (314) through the locking pressure plate component (315); the adjustable base (32) of the vacuum cavity includes multiple sets of vacuum cavity elevation adjustment components (321), each of which is set on the vacuum cavity support (42) and is used to adjust the height and level of the vacuum cavity (2).

9. The high-stability lifting white light shutter device according to claim 1, characterized in that, The motion mechanism support (41) includes a basic motion mechanism frame (411), a first foot (412), and a motion mechanism adjustable base mounting slot (413). The bottom end of the basic motion mechanism frame (411) is welded to the first foot (412), and the first foot (412) has mounting holes. Two motion mechanism adjustable base mounting slots (413) are welded on the top of the basic motion mechanism frame (411). The motion mechanism adjustable base (31) is mounted on the motion mechanism adjustable base mounting slot (413) by studs to realize the connection between the motion mechanism adjustable base (31) and the motion mechanism support (41).

10. The high-stability lifting white light shutter device according to claim 1, characterized in that, The vacuum chamber support (42) includes a basic vacuum chamber frame (421), a second foot (422), a vacuum chamber adjustable base mounting slot (423), and a steel plate (424). The bottom of the basic vacuum chamber frame (421) is welded to the second foot (422), and the second foot (422) has mounting holes. Two crossbeams are welded on the upper horizontal plane of the basic vacuum chamber frame (421) in a direction perpendicular to the optical path to improve the support strength of the vacuum chamber adjustable base mounting slot (423). Two steel plates (424) are installed on the lower horizontal plane of the basic vacuum chamber frame (421) in a direction parallel to the optical path to reinforce the basic vacuum chamber frame (421). The vacuum chamber adjustable base (32) is installed on the vacuum chamber adjustable base mounting slot (423) by screws to realize the connection between the vacuum chamber adjustable base (32) and the vacuum chamber support (42).

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