A fast pre-alignment device and method for a photomask

Abstract

The present application relates to the technical field of lithography equipment, and specifically relates to a fast pre-alignment device and method for a mask. The device includes a host computer, a logic controller, a sensor, and an actuator; the sensor obtains a digital input signal by detecting the mask, and uploads the digital input signal to the logic controller and the host computer respectively; the logic controller enables the actuator to perform an action on the mask according to the received digital input signal; the logic controller receives the verification digital signal sent by the host computer, and compares the digital output signal with the verification digital signal. When the comparison result is inconsistent, the logic controller interrupts the control of the next action of the actuator and feeds back an interrupt signal to the host computer. The present application can achieve fast response to control the actuator through the logic controller in the delay state of the host computer, thereby improving the pre-alignment processing efficiency of the mask.

Description

Technical Field

[0001] This application relates to the technical field of lithography equipment. Specifically, it relates to a fast pre-alignment device and method for a mask. Background Technique

[0002] The existing pre-alignment process of the mask of a lithography machine includes structures such as a host computer, a sensor, and an actuator. The action process executed by the existing structure is mainly divided into several steps such as air-floating suspension, scanning and clamping alignment, releasing, and adsorption. After receiving the digital signal sent by the sensor, the host computer makes a logical judgment and then sends a digital signal to the actuator, thereby realizing the digital signal interaction between the sensor, the actuator, and the host computer.

[0003] Since the signal transmission of the host computer in the prior art must pass through modules such as a fieldbus adapter, a coupler, and a transfer board in the prior art, the signal transmission time is relatively long. In addition, the logical judgment time of the host computer is also relatively long. The signal transmission time-consuming plus the logical judgment time-consuming ultimately result in the control delay of the host computer. Therefore, it is difficult for the pre-alignment device to realize the fast pre-alignment process of the mask of the lithography machine, thereby affecting the production output of the lithography machine. Summary of the Invention

[0004] The purpose of this application is to provide a fast pre-alignment device and method for a mask, which can achieve fast response and complete the control of the actuator through a logic controller in the delay state of the host computer, thereby improving the pre-alignment processing efficiency of the mask.

[0005] The embodiments of this application are implemented as follows:

[0006] In a first aspect, an embodiment of this application provides a fast pre-alignment device for a mask, including a host computer, a logic controller, a sensor, and an actuator; the sensor is electrically connected to the host computer and the logic controller respectively; the logic controller is electrically connected to the actuator and the host computer respectively.

[0007] The sensor obtains a digital input signal by detecting the position information and barcode information of the mask, and uploads the digital input signal to the logic controller and the host computer respectively;

[0008] The host computer determines that the sensor is working properly according to the received digital input signal, and sends a verification digital signal to the logic controller;

[0009] The logic controller sends a digital output signal to the actuator according to the received digital input signal, so that the actuator performs an action on the reticle; and, the logic controller receives the verification digital signal sent by the host computer, and compares the digital output signal with the verification digital signal. When the comparison result is inconsistent, the logic controller interrupts the control of the next action of the actuator and feeds back an interrupt signal to the host computer.

[0010] As an optional implementation manner, the sensor includes a first sensing module, which is used to sense the air pressure information satisfied by performing air floating and adsorption actions on the reticle and obtain a first digital input signal;

[0011] The logic controller responds to the received first digital input signal and controls the actuator to perform an air floating or adsorption action on the reticle;

[0012] The actuator includes a pneumatic unit arranged below the reticle, and the pneumatic unit provides positive pressure blowing to the lower surface of the reticle to complete the air floating action or provides negative pressure suction to the lower surface of the reticle to complete the adsorption action.

[0013] As an optional implementation manner, the sensor further includes a second sensing module, which is used to sense the position information of the reticle and obtain a second digital input signal;

[0014] The sensor further includes a barcode scanning module, which is used to obtain the barcode information on the reticle and obtain a third digital input signal;

[0015] The sensor further includes a pressure switch, which is used to detect the air pressure value of the clamping unit and obtain a fourth digital input signal;

[0016] The logic controller responds to the received second digital input signal, third digital input signal and fourth digital input signal, and controls the actuator to perform a clamping or releasing action on the reticle;

[0017] The actuator includes a clamping unit arranged on the side of the reticle, and the clamping unit abuts against the side of the reticle for clamping or the clamping unit separates from the side of the reticle for releasing.

[0018] As an optional implementation manner, the clamping unit includes a pneumatic telescopic rod, and the pneumatic telescopic rod performs clamping or releasing actions through expansion and contraction.

[0019] As an optional implementation manner, the logic controller includes any one of a programmable logic device, a digital signal processor, and a microcontroller.

[0020] In a second aspect, an embodiment of the present application provides a fast pre-alignment method for a reticle, and the method includes:

[0021] Receives the digital input signal of the mask template obtained by the receiving sensor, and the digital input signal includes gas path pressure information, position information of the mask template, and bar code information;

[0022] Sends a digital output signal to the actuator according to the digital input signal, so that the actuator performs corresponding actions on the mask template according to the digital output signal;

[0023] Receives the verification digital signal sent by the host computer, and the verification digital signal is the verification request information sent by the host computer after receiving the digital input signal and determining that the sensor is in a normal working state;

[0024] Performs a logical comparison between the digital output signal and the verification digital signal, and sends a corresponding execution signal to the actuator according to the result of the logical comparison.

[0025] As an optional implementation manner, the performing a logical comparison between the digital output signal and the verification digital signal, and sending a corresponding execution signal to the actuator according to the result of the logical comparison includes:

[0026] Performs a logical AND judgment on the digital output signal and the verification digital signal issued by the host computer;

[0027] When the digital output signal is consistent with the verification digital signal, the logic controller continues to control the actuator to perform the next action;

[0028] When the digital output signal is inconsistent with the verification digital signal, the logic controller controls the actuator to stop performing the next action and feeds back an interrupt signal to the host computer.

[0029] As an optional implementation manner, the sensor includes a first induction module; the actuator includes a pneumatic unit;

[0030] The sending a digital output signal to the actuator according to the digital input signal, so that the actuator performs corresponding actions on the mask template according to the digital output signal includes:

[0031] The logic controller receives the first digital input signal generated by the first induction module, and controls the pneumatic unit to perform a gas floating or adsorption action on the mask template.

[0032] As an optional implementation manner, the sensor includes a second induction module, a code scanning module, and a pressure switch; the actuator includes a clamping unit;

[0033] The sending a digital output signal to the actuator according to the digital input signal, so that the actuator performs corresponding actions on the mask template according to the digital output signal includes:

[0034] The logic controller receives the second digital input signal generated by the second sensing module, the third digital input signal generated by the scanning module, and the fourth digital input signal obtained by the pressure switch detecting the air pressure value of the clamping unit, and controls the clamping unit to perform a clamping or releasing action on the reticle.

[0035] As an alternative embodiment, the sending a digital output signal to the actuator according to the digital input signal so that the actuator performs a corresponding action on the reticle according to the digital output signal includes:

[0036] The logic controller controls the actuator to perform air floating, clamping, releasing, and adsorption actions on the reticle in sequence.

[0037] As an alternative embodiment, when the digital output signal is inconsistent with the verification digital signal, after the logic controller controls the actuator to stop performing the next action and feeds back an interrupt signal to the host computer, the method further includes:

[0038] The logic controller receives a host computer instruction, and the logic controller controls the actuator to continue performing the action.

[0039] The beneficial effects of the embodiments of the present application include:

[0040] By adding a logic controller between the actuator and the sensor in the embodiments of the present application, the logic controller can simply latch the state of the sensor signal and directly control the actuator, thereby reducing the signal transmission time and the logic judgment time. Therefore, the embodiments of the present application can significantly reduce the signal transmission and logic judgment time, and improve the speed and efficiency of the pre-alignment process of the lithography machine reticle. At the same time, through the instruction synchronization and verification mechanism, the accuracy of the operation is ensured, and potential operation errors are avoided. The improvement of the embodiments of the present application not only improves the response speed of the system, but also enhances the reliability and stability of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0042] Figure 1 It is a module schematic diagram of the fast pre-alignment device of the embodiments of the present application;

[0043] Figure 2 It is one of the flow schematic diagrams of the fast pre-alignment device of the embodiments of the present application;

[0044] Figure 3 It is the second schematic flowchart of the fast pre-alignment device according to the embodiment of the present application;

[0045] Figure 4 It is the logic block diagram of the fast pre-alignment device according to the embodiment of the present application;

[0046] Figure 5 It is the schematic diagram of the logic OR gate trigger according to the embodiment of the present application. Specific embodiments

[0047] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. Usually, the components of the embodiments of the present application described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0048] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application claimed, but merely represents the selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without making creative efforts fall within the scope of protection of the present application.

[0049] It should be noted that: similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be understood as indicating or implying relative importance.

[0050] In the description of the present application, it should also be noted that unless otherwise clearly defined and limited, the terms "set", "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0051] The pre-alignment process of the existing lithography machine mask plate includes structures such as a host computer, a sensor, and an actuator. The action process executed by the existing structure is mainly divided into several steps such as air floating, clamping, releasing, and adsorbing. After receiving the digital signal sent by the sensor, the host computer makes a logical judgment and then sends a digital signal to the actuator, thereby realizing the digital signal interaction between the sensor and the actuator and the host computer.

[0052] Since the signal transmission of the host computer in the prior art must pass through modules such as a fieldbus adapter, a coupler, and an adapter board, the signal transmission time is relatively long. In addition, the logic judgment time of the host computer is also relatively long. The signal transmission time plus the logic judgment time ultimately results in the control delay of the host computer. Therefore, it is difficult for the pre-alignment device to implement the fast pre-alignment process of the mask of the lithography machine, thereby affecting the production output of the lithography machine.

[0053] To solve the above technical problems, the embodiments of the present application provide a fast pre-alignment device and method for a mask.

[0054] Refer to Figure 1 As shown, a fast pre-alignment device for a mask provided by an embodiment of the present application includes a host computer, a logic controller, a sensor, and an actuator; the sensor is electrically connected to the host computer and the logic controller respectively; the logic controller is electrically connected to the actuator and the host computer respectively.

[0055] The sensor detects the digital input signal by detecting the air pressure information, the position information, and the barcode information of the mask that satisfy the air flotation and adsorption actions of the mask, and uploads the digital input signal to the logic controller and the host computer respectively;

[0056] The host computer determines that the sensor is working properly according to the received digital input signal, and sends a verification digital signal to the logic controller;

[0057] The logic controller sends a digital output signal to the actuator according to the received digital input signal, so that the actuator performs an action on the mask; and, the logic controller receives the verification digital signal sent by the host computer, and compares the digital output signal with the verification digital signal. When the comparison result is inconsistent, the logic controller interrupts the control of the next action of the actuator and feeds back an interrupt signal to the host computer.

[0058] It should be noted that the host computer and the logic controller respectively receive the digital input signals obtained by the sensor. The logic controller directly outputs signals according to the digital input signals to control the actuator to act. The host computer makes complex logical judgments based on the digital input signals, aiming to determine whether there are abnormalities in the signals given by the sensor, to eliminate the safety risks caused by abnormal sensor failures, and to be able to eliminate the action conflicts with other modules and avoid motion interference. Since the actuator has been controlled by the logic controller to act, the host computer issues a verification digital signal to the logic controller after completing the complex logical judgment, and then the logic controller makes a simple logical comparison judgment. When the verification digital signal is consistent with the digital output signal issued by the logic controller, it indicates that the sensor is fault-free and there is no action conflict with other modules, effectively avoiding motion interference. The digital output signal of the logic controller controls correctly without interruption, and the logic controller completes the fast action control. When the verification digital signal is inconsistent with the digital output signal issued by the logic controller, it proves that the sensor has a fault (or there is a conflict with other modules or there is a motion interference phenomenon), and the logic controller interrupts the next action control and feedbacks to the host computer. The staff can troubleshoot the fault according to the fault report and then restart the action command issued by the host computer.

[0059] In addition, it should be noted that the control command can also be directly issued by the host computer to the actuator in the embodiment of the present application. That is to say, the embodiment of the present application has two control modes. One is the direct control of the host computer, and the other is the access control mode of the logic controller which is the key protection of the present application. In specific applications, those skilled in the art can select according to specific needs.

[0060] It should be noted that the fast pre-alignment device provided by the embodiment of the present application includes a host computer, a logic controller, a sensor, and an actuator. By adding a logic controller between the sensor and the actuator in the embodiment of the present application, the sensor signals can be directly processed and the actuator can be controlled without passing through multiple intermediate modules such as a fieldbus adapter, a coupler, etc., thus greatly reducing the signal transmission time.

[0061] It should be noted that in the embodiment of the present application, the logic controller can quickly make simple logical judgments locally without waiting for the response of the host computer, further reducing the overall delay time.

[0062] Among them, a logical AND operation is performed on the signals issued by the host computer and the signals issued by the logic controller to ensure the consistency of the instructions. If the instructions are inconsistent, the logic controller will interrupt the next process to avoid incorrect operations. At the same time, the logic controller will upload the error status to the host computer to prompt the interruption of the process. This helps to detect and correct problems in a timely manner and avoid further operation errors.

[0063] In the embodiment of the present application, a logic controller is added between the actuator and the sensor. The logic controller can perform simple state latching on the sensor signal and directly control the actuator, thereby reducing the signal transmission time and the logic judgment time.

[0064] Therefore, the embodiment of the present application can significantly reduce the time of signal transmission and logic judgment, improving the speed and efficiency of the pre-alignment process of the mask plate of the lithography machine. At the same time, through the verification mechanism of the host computer for detecting faults in the sensor signal, the accuracy of the operation is ensured, and operation errors caused by sensor faults are avoided. The improvement of the embodiment of the present application not only improves the response speed of the system, but also enhances the reliability and stability of the system.

[0065] Referring to Figure 2 、 Figure 3 As shown, in the embodiment of the present application, the method corresponding to the logic controller is as follows:

[0066] Receive the digital input signal of the mask plate obtained by the sensor. The digital input signal includes the position information and barcode information of the mask plate, and the information on whether the air pressure in the air circuit reaches the threshold range of air flotation or adsorption;

[0067] Send a digital output signal to the actuator according to the digital input signal, so that the actuator performs corresponding actions on the mask plate according to the digital output signal;

[0068] Receive the verification digital signal sent by the host computer. The verification digital signal is the verification request information sent by the host computer after determining that the sensor is in a normal working state according to the received digital input signal;

[0069] Perform a logical comparison between the digital output signal and the verification digital signal, and send a corresponding execution signal to the actuator according to the result of the logical comparison.

[0070] Specifically, performing a logical comparison between the digital output signal and the verification digital signal, and sending a corresponding execution signal to the actuator according to the result of the logical comparison includes:

[0071] Perform a logical AND judgment on the digital output signal and the verification digital signal sent by the host computer;

[0072] When the digital output signal is consistent with the verification digital signal, the logic controller continues to control the actuator to perform the next action;

[0073] When the digital output signal is inconsistent with the verification digital signal, the logic controller controls the actuator to stop performing the next action and feedback an interrupt signal to the host computer.

[0074] As an optional implementation manner, the sensor includes a first sensing module for sensing the air circuit pressure information satisfied for performing the air flotation and adsorption actions on the mask plate and obtaining a first digital input signal;

[0075] The logic controller responds to the received first digital input signal and controls the actuator to perform an air-floating or adsorption action on the mask plate.

[0076] The actuator includes a pneumatic unit arranged below the mask plate. The pneumatic unit provides positive-pressure blowing to the lower surface of the mask plate to enable the mask plate to complete the air-floating action or provides negative-pressure suction to the lower surface of the mask plate to complete the adsorption action.

[0077] In the embodiment of the present application, the pneumatic unit performs an air-floating action on the mask plate so that the mask plate can achieve the purpose of suspension, or the mask plate can achieve the purpose of adsorption and fixation through the adsorption action.

[0078] It should be noted that before starting the action, the host computer issues a start signal to select the control mode, that is, it is directly controlled by the host computer or controlled by the logic controller. Before starting the action, the host computer needs to first issue a "pre-alignment process start signal"; during the validity period of the "process start signal", whether it is the signal issued in the "host computer direct control mode" or the signal issued in the "logic controller control mode", any one signal is issued, and the instruction can be sent to the actuator. See Figure 5 , the logic trigger OR gate; when the A signal, that is, the process start signal is valid; the B and C signals, that is, the signals in the two control modes are subjected to an "OR" logic operation, and any one of the B and C signals in the two control modes is valid, and an effective control instruction can be sent. The direct control of the host computer in this solution is mainly used for control during debugging and when manual intervention occurs due to a fault; during the normal operation of the device, after the host computer issues a control signal, the logic controller automatically controls according to the preset program.

[0079] Specifically, referring to Figure 1 as shown, the first sensing module includes an air-floating pressure switch and an adsorption pressure switch. The logic controller uses a CPLD. The pneumatic unit includes an air-floating solenoid valve and an adsorption solenoid valve.

[0080] Referring to Figure 2 , Figure 3 and Figure 4 as shown, in the control mode of the logic controller, when performing the air-floating action, the air-floating pressure switch uploads the first digital input signal to the host computer and the CPLD respectively. While the host computer performs signal transmission and logic judgment, the CPLD issues an open signal to the air-floating solenoid valve according to the first digital input signal, so that the air-floating solenoid valve performs the air-floating action on the mask plate.

[0081] In the control mode of the logic controller, when the adsorption action is executed, the adsorption pressure switch uploads the first digital input signal to the host computer and the CPLD respectively. While the host computer performs signal transmission and logical judgment, the CPLD issues an open signal to the adsorption solenoid valve according to the first digital input signal, so that the adsorption solenoid valve executes the adsorption action on the mask plate.

[0082] It should be noted that continuous monitoring can be carried out. Specifically, the CPLD issues an air floatation instruction and continuously monitors the signal of the air floatation pressure (positive pressure) switch to ensure that the air floatation state is maintained. Similarly, the CPLD issues an adsorption instruction and continuously monitors the signal of the adsorption pressure (negative pressure) switch to ensure that the adsorption state is maintained.

[0083] After a certain signal transmission time, the host computer issues a verification digital signal to the CPLD, and the CPLD performs a logical AND operation on the verification digital signal and the digital output signal generated by itself.

[0084] If the logical verification result is "1", it means that the actuator signals are consistent and the next action process is allowed to continue.

[0085] If they are inconsistent, the CPLD will interrupt the signal of the next action process and upload the inconsistent state as an interrupt signal to the host computer to indicate that the process is interrupted.

[0086] As an alternative implementation, the sensor includes a second sensing module for sensing the position information of the mask plate and converting it into a second digital input signal; wherein, the position information can be interpreted as the height position information and the horizontal position information of the mask plate.

[0087] The sensor includes a barcode scanning module for obtaining the barcode information on the mask plate and converting it into a third digital input signal;

[0088] The actuator includes a clamping unit for performing clamping or releasing actions on the mask plate; the sensor also includes a clamping release pressure switch for detecting the air pressure value in the clamping unit and obtaining a fourth digital input signal;

[0089] After the logic controller receives the second digital input signal, the third digital input signal, and the fourth digital input signal, it controls the clamping unit to perform clamping or releasing actions on the mask plate.

[0090] Furthermore, the clamping unit includes a pneumatic telescopic rod for serving as a power source for clamping or releasing; wherein the clamping unit is arranged on the side of the mask plate, that is, it surrounds the circumference of the mask plate. The clamping unit abuts against the side of the mask plate for clamping or the clamping unit separates from the side of the mask plate for releasing.

[0091] Specifically, the second sensing module includes an optical fiber sensor. The scanning module specifically uses a barcode scanner. Herein, the host computer can identify the QR code on the mask template through the barcode scanner and compare it with the information in the database.

[0092] Referring to Figure 2 、 Figure 3 As shown, the optical fiber sensor performs alignment detection on the mask template and uploads second digital input signals to the CPLD and the host computer respectively. The barcode scanner scans the barcode information on the mask template and uploads third digital input signals to the CPLD and the host computer respectively. The clamping release pressure switch is used to detect the air pressure threshold signal of the clamping unit and upload fourth digital input signals to the CPLD and the host computer respectively.

[0093] If the previous action step, that is, the air floating action is correctly completed, the CPLD directly issues a digital output signal to the clamping unit, causing the pneumatic telescopic rod of the clamping unit to act and perform the clamping action. After a certain signal transmission time, the host computer completes the logical judgment and issues a verification digital signal to the CPLD. The CPLD performs logical verification on the verification digital signal and its own digital output signal. After the verification is correct, the next action continues. If the verification is inconsistent, the CPLD will interrupt the signal of the next action and upload the verification result as an interrupt signal to the host computer, indicating that the process is interrupted. The staff will troubleshoot the problem and then start the action.

[0094] Referring to Figure 2 、 Figure 3 As shown, after the clamping action is completed, the release action is performed. When performing the release action, the optical fiber sensor performs alignment detection on the mask template and uploads second digital input signals to the CPLD and the host computer respectively. The clamping release pressure switch is used to detect the air pressure threshold signal of the clamping unit and upload fourth digital input signals to the CPLD and the host computer respectively.

[0095] If the previous action step, that is, the clamping is correctly completed, the CPLD issues a signal to the clamping unit to perform the release operation. After a certain signal transmission time, the host computer completes the logical judgment and issues a verification digital signal to the CPLD. The CPLD performs logical verification on this signal and its own control signal. After the verification is correct, the next action continues. If the verification is inconsistent, the CPLD will interrupt the signal of the next action and upload the verification result as an interrupt signal to the host computer, indicating that the process is interrupted.

[0096] When the release action is correctly completed, the CPLD issues a signal to start the adsorption action process, causing the actuator to perform the adsorption action, so that the mask template is adsorbed and fixed.

[0097] It should be noted that in addition to the above-mentioned CPLD, other types of programmable logic devices can also be used for the logic controller. According to requirements, controllers such as digital signal processors, microcontrollers, and PLCs can also be used. In addition, according to requirements, other types of sensors can also be used for the above-mentioned first sensing module and second sensing module.

[0098] The fast pre-alignment method for a mask provided by an embodiment of the present application includes:

[0099] Receiving a digital input signal of the mask acquired by a sensor, where the digital input signal includes air path pressure information, position information of the mask, and barcode information that satisfy the air flotation and adsorption actions performed on the mask;

[0100] Sending a digital output signal to an actuator according to the digital input signal, so that the actuator performs corresponding actions on the mask according to the digital output signal;

[0101] Receiving a verification digital signal sent by a host computer, where the verification digital signal is a verification request message sent by the host computer after determining that the sensor is in a normal working state according to the received digital input signal;

[0102] Performing a logical comparison on the digital output signal and the verification digital signal, and sending a corresponding execution signal to the actuator according to the result of the logical comparison.

[0103] Among them, performing a logical comparison on the digital output signal and the verification digital signal, and sending a corresponding execution signal to the actuator according to the result of the logical comparison includes:

[0104] Performing a logical AND judgment on the digital output signal and the verification digital signal sent by the host computer;

[0105] When the digital output signal is consistent with the verification digital signal, the logic controller continues to control the actuator to perform the next action;

[0106] When the digital output signal is inconsistent with the verification digital signal, the logic controller controls the actuator to stop performing the next action and feedbacks an interruption signal to the host computer.

[0107] Further, the sensor includes a first sensing module; the actuator includes a pneumatic unit;

[0108] Sending a digital output signal to an actuator according to the digital input signal, so that the actuator performs corresponding actions on the mask according to the digital output signal includes:

[0109] The logic controller receives a first digital input signal generated by the first sensing module and controls the pneumatic unit to perform an air flotation or adsorption action on the mask. Among them, the air path pressure information specifically refers to whether the positive pressure or negative pressure at the air nozzle of the pneumatic unit meets the pressure requirements for air flotation or adsorption and whether it is within the pressure threshold range.

[0110] Further, the sensor includes a second sensing module, a code scanning module, and a pressure switch; the actuator includes a clamping unit;

[0111] Sending a digital output signal to the actuator according to the digital input signal so that the actuator performs corresponding actions on the mask according to the digital output signal includes:

[0112] The logic controller receives the second digital input signal generated by the second sensing module, the third digital input signal generated by the scanning module, and the fourth digital input signal obtained by the pressure switch detecting the air pressure value of the clamping unit, and controls the clamping unit to perform clamping or releasing actions on the mask.

[0113] Further, sending a digital output signal to the actuator according to the digital input signal so that the actuator performs corresponding actions on the mask according to the digital output signal includes:

[0114] The logic controller controls the actuator to perform air floating, clamping, releasing, and adsorption actions on the mask in sequence.

[0115] It should be noted that when the digital output signal is inconsistent with the verification digital signal, after the logic controller controls the actuator to stop executing the next action and feeds back an interrupt signal to the host computer, the method further includes:

[0116] The logic controller receives the host computer instruction, and the logic controller controls the actuator to continue to execute the action.

[0117] In the technical solution of the embodiment of the present application, a logic controller is added between the actuator and the sensor. The logic controller can perform simple state latching on the sensor signal and directly control the actuator through signal output. The pre-alignment process of the mask temporarily skips the control of the host computer. The actuator can receive the next digital output signal without waiting for the host computer to feedback the digital input signal sent by the previous sensor, reducing the transmission time of input and output signals and the logic judgment time. At the same time, the logical AND judgment is made on the signals sent by the host computer and the signals sent by the logic controller in the current structure to ensure the correct execution of the instruction and reduce the signal transmission time in the existing structure, accelerating the pre-alignment process of the mask of the lithography machine.

[0118] As an optional implementation manner, the sensor includes a first sensing module; the actuator includes a pneumatic unit;

[0119] Converting the digital input signal into a digital output signal and sending the digital output signal to the actuator so that the actuator performs actions on the mask according to the digital output signal includes:

[0120] The logic controller receives the first digital input signal detected by the first sensing module for the pneumatic unit, and controls the pneumatic unit to perform air floating or adsorption actions on the mask.

[0121] Among them, the sensor includes a second sensing module and a code scanning module; the actuator includes a clamping unit;

[0122] Converting the digital input signal into a digital output signal and sending the digital output signal to the actuator, so that the actuator performs an action on the mask plate according to the digital output signal includes:

[0123] The logic controller receives the second digital input signal generated by the second sensing module, the third digital input signal generated by the scanning module, and the fourth digital input signal obtained by the pressure switch detecting the air pressure value of the clamping unit, and controls the clamping unit to perform clamping alignment or release actions on the mask plate.

[0124] It should be noted that with reference to Figure 2 、 Figure 3 As shown, in the case of no interruption signal, the logic controller controls the sensor and the actuator to perform air floating, in-situ code scanning, clamping alignment, release, and adsorption actions on the mask plate in sequence.

[0125] As an optional implementation manner, when the digital output signal is inconsistent with the verification digital signal, the logic controller controls the actuator to stop executing the next action, uploads an interruption signal to the host computer, and then the method further includes:

[0126] The logic controller receives the host computer instruction, and the logic controller controls the actuator to continue to execute the action.

[0127] The purpose of the present application is to provide a fast pre-alignment device and method for a mask plate, aiming to be able to achieve fast response and complete the control of the actuator through the logic controller in the delay state of the host computer, thereby improving the pre-alignment processing efficiency of the mask plate.

[0128] The above are only the preferred embodiments of the present application and are not used to limit the present application. For those skilled in the art, the present application can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A fast pre-alignment device for a photomask, characterized in that, It includes a host computer, a logic controller capable of latching the status of sensor signals, sensors, and actuators; the sensors are electrically connected to the host computer and the logic controller respectively; the logic controller is electrically connected to the actuator and the host computer respectively; The sensor detects digital input signals by detecting the air circuit pressure information, the position information of the mask plate, and the bar code information satisfied by performing air flotation and adsorption actions on the mask plate, and uploads the digital input signals to the logic controller and the host computer respectively; The host computer determines that the sensor is working properly according to the received digital input signal, and sends a verification digital signal to the logic controller; The logic controller sends a digital output signal to the actuator according to the received digital input signal, so that the actuator performs an action on the mask plate; and, the logic controller receives the verification digital signal sent by the host computer, and compares the digital output signal with the verification digital signal. When the comparison result is inconsistent, the logic controller interrupts the control of the next action of the actuator and feeds back an interrupt signal to the host computer.

2. The rapid pre-alignment device for a mask according to claim 1, wherein, The sensor includes a first sensing module for sensing the air circuit pressure information satisfied by performing air flotation and adsorption actions on the mask plate and obtaining a first digital input signal; The logic controller responds to the received first digital input signal and controls the actuator to perform an air flotation or adsorption action on the mask plate; The actuator includes a pneumatic unit arranged under the mask plate, and the pneumatic unit provides positive pressure blowing to the lower surface of the mask plate to complete the air flotation action or provides negative pressure suction to the lower surface of the mask plate to complete the adsorption action.

3. The fast pre-alignment device for a photomask according to claim 2, characterized in that, The sensor further includes a second sensing module for sensing the position information of the mask plate to obtain a second digital input signal; The sensor further includes a bar code scanning module for obtaining the bar code information on the mask plate to obtain a third digital input signal; The actuator includes a clamping unit arranged on the side of the mask plate, and the sensor further includes a pressure switch for detecting the air pressure value of the clamping unit and obtaining a fourth digital input signal; The logic controller responds to the received second digital input signal, third digital input signal, and fourth digital input signal, and controls the actuator to perform an action on the mask plate; the clamping unit abuts against the side of the mask plate for clamping or the clamping unit separates from the side of the mask plate for releasing.

4. The fast pre-alignment device for a mask according to claim 3, characterized in that, The clamping unit includes a pneumatic telescopic rod, and the pneumatic telescopic rod performs clamping or releasing actions through telescoping.

5. The fast pre-alignment device for a mask according to claim 1, wherein The logic controller includes any one of a programmable logic device, a digital signal processor, and a microcontroller.

6. A fast pre-alignment method for a mask, characterized in that, The method includes: Adopting a logic controller capable of latching the status of sensor signals, the logic controller receives the digital input signals of the mask plate acquired by the sensor, and the digital input signals include air circuit pressure information, the position information of the mask plate, and bar code information; The logic controller sends a digital output signal to the actuator according to the digital input signal, so that the actuator performs corresponding actions on the mask plate according to the digital output signal; The logic controller receives the verification digital signal sent by the host computer, and the verification digital signal is the verification request information sent by the host computer after receiving the digital input signal and determining that the sensor is in a normal working state; The logic controller performs a logical comparison between the digital output signal and the received verification digital signal, and sends a corresponding execution signal to the actuator according to the result of the logical comparison.

7. The rapid pre-alignment method for a mask according to claim 6, characterized in that The performing a logical comparison between the digital output signal and the verification digital signal, and sending a corresponding execution signal to the actuator according to the result of the logical comparison includes: Performing a logical AND judgment on the digital output signal and the verification digital signal sent by the host computer; When the digital output signal is consistent with the verification digital signal, the logic controller continues to control the actuator to perform the next action; When the digital output signal is inconsistent with the verification digital signal, the logic controller controls the actuator to stop performing the next action and feedbacks an interruption signal to the host computer.

8. The rapid pre-alignment method for a photomask according to claim 7, wherein The sensor includes a first sensing module; the actuator includes a pneumatic unit; The sending a digital output signal to the actuator according to the digital input signal so that the actuator performs corresponding actions on the mask according to the digital output signal includes: The logic controller receives the first digital input signal generated by the first sensing module and controls the pneumatic unit to perform a pneumatic floating or adsorption action on the mask.

9. The rapid pre-alignment method for a mask according to claim 7, characterized in that, The sensor includes a second sensing module, a code scanning module, and a pressure switch; the actuator includes a clamping unit; The sending a digital output signal to the actuator according to the digital input signal so that the actuator performs corresponding actions on the mask according to the digital output signal includes: The logic controller receives the second digital input signal generated by the second sensing module, the third digital input signal generated by the scanning module, and the fourth digital input signal obtained by the pressure switch detecting the air pressure value of the clamping unit, and controls the clamping unit to perform a clamping or releasing action on the mask.

10. The rapid pre-alignment method for a photomask according to claim 7, characterized in that The sending a digital output signal to the actuator according to the digital input signal so that the actuator performs corresponding actions on the mask according to the digital output signal includes: The logic controller controls the actuator to perform pneumatic floating, clamping, releasing, and adsorption actions on the mask in sequence.

11. The rapid pre-alignment method for a mask according to claim 7, characterized in that, After the logic controller controls the actuator to stop performing the next action and feedbacks an interruption signal to the host computer when the digital output signal is inconsistent with the verification digital signal, the method further includes: The logic controller receives a host computer instruction, and the logic controller controls the actuator to continue to perform actions.

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