Method and apparatus for constructing a rounded device structure model

Abstract

The application discloses a kind of device structure model construction method and device with rounded corner, its method includes establishing sample geometric figure and chamber figure according to the geometric structure parameter of pre-setting, wherein, sample geometric figure is the geometric structure with rounded corner;Sample geometric figure and chamber figure are carried out finite element division, obtain first grid information and second grid information, wherein, first grid information is the grid information of sample geometric figure, and second grid information is the grid information of chamber figure;According to the geometric structure parameter of pre-setting, the electron probe parameter of pre-setting, first grid information, second grid information and the device structure material parameter of pre-setting, input Nebula simulator constructs device structure model with rounded corner.The method of the application can realize completely automated Nebula simulator and realize the construction of device structure model with rounded corner, and since the whole process does not need manual intervention, batch simulation function can be realized, so as to improve the precision and efficiency of CD SEM measurement.

Description

Technical Field

[0001] This invention relates to the field of scanning electron microscopy, and in particular to a method and apparatus for constructing a structural model of a device with rounded corners. Background Technology

[0002] Monte Carlo-based SEM (Scanning Electron Microscopy) simulators are important tools for studying and improving SEM performance. The simulation and analysis of the interaction between the scanning electron beam and the sample performed by SEM simulators is an effective method to improve the measurement accuracy and precision of advanced electron beam critical dimension measurement equipment (CD SEM) required by the semiconductor industry. The main purpose of an SEM simulator is to simulate the process of SEM image acquisition and obtain simulated image signals. An SEM simulator generally includes an electron probe module, a sample geometry module, an electron-sample interaction module (physical model), and a signal detection module. The simulator defines the spatial distribution of the scanned sample through the sample geometry module.

[0003] Nebula is a commonly used SEM simulator. Nebula categorizes physical processes into three basic types: inelastic scattering, elastic scattering, and material boundary crossing. The first two occur within the bulk of the material; the latter represents the interaction at the interface between two materials. Various models exist in the literature to describe the mean free path between scattering events, as well as the detailed scattering behavior (e.g., energy loss, deflection) during the events. By default, Nebula uses the Penn dielectric constant algorithm to describe inelastic scattering. The deflection of secondary and primary electrons generated from the valence band is handled using the method of Mao et al. Secondary electrons from the inner shell are handled according to the method of Kieft & Bosch and Verduin. The binding energy and ionization cross section of the inner shell are taken from the LLNL evaluation electron database. Theoretically, the Nebula simulator can build complex geometric models; however, Nebula does not provide a convenient and quick function to create more realistic geometries with rounded corners. Furthermore, Nebula does not offer batch simulation capabilities, which hinders simulation efficiency. Summary of the Invention

[0004] This invention provides a method and apparatus for constructing structural models of devices with rounded corners, which solves the problem that the Nebula simulator in the prior art is difficult to quickly build geometric models with rounded corners, realizes batch simulation to improve simulation efficiency, and is conducive to the application of new methods such as model library and deep learning in high-precision, high-resolution CDSEM measurement, thereby improving the accuracy and efficiency of CDSEM measurement.

[0005] According to one aspect of the present invention, a method for constructing a structural model of a device with rounded corners is provided, comprising:

[0006] The sample geometry and chamber geometry are established based on pre-set geometric parameters, wherein the sample geometry is a geometric structure with rounded corners;

[0007] Finite element analysis is performed on the sample geometry and the chamber geometry to obtain first mesh information and second mesh information, wherein the first mesh information is the mesh information of the sample geometry and the second mesh information is the mesh information of the chamber geometry.

[0008] Based on the pre-set geometric parameters, pre-set electron probe parameters, first mesh information, second mesh information, and pre-set device structure material parameters, input the Nebula simulator to construct a device structure model with rounded corners.

[0009] This invention first constructs the geometric structure and cavity pattern, and then performs finite element analysis to obtain corresponding first and second mesh information. Based on this first and second mesh information, it inputs them into the Nebula simulator to utilize the simulator's basic functions to build a device structure model with rounded corners. This method achieves fully automated construction of a device structure model with rounded corners using the Nebula simulator. Only the geometric parameters, electron probe parameters, and device material parameters need to be pre-set to quickly complete the model building. Furthermore, since the entire model building process requires no manual intervention, it enables batch simulation, which is beneficial for the application of new methods such as model libraries and deep learning in high-precision, high-resolution CD SEM measurements, thereby improving the accuracy and efficiency of CD SEM measurements.

[0010] In some embodiments, the geometric parameters include the bottom width of the structure, sidewall angle, height, fillet radius, spacing between adjacent structures, line structure length, and substrate size. The bottom width of the structure, sidewall angle, height, fillet radius, and spacing between adjacent structures all include a parameter start point, a parameter end point, and a step size.

[0011] The process of establishing the sample geometry and chamber geometry based on pre-set geometric parameters includes:

[0012] The cavity pattern is created based on the line structure length and substrate size in the pre-set geometric parameters;

[0013] Several parameter combinations are formed by nested loops based on the pre-set geometric parameters, such as the bottom width of the structure, side wall angles, height, corner radius, and spacing between adjacent structures.

[0014] Set the mesh size at the rounded corners corresponding to each set of parameter combinations;

[0015] The sample geometry is established based on the parameter combinations and the corresponding grid dimensions at the rounded corners.

[0016] Therefore, through this design, several sets of parameter combinations can be formed based on pre-set geometric parameters to construct structural models of devices with rounded corners.

[0017] In some implementations, the size of the grid division at the rounded corner is set to 1 / 6 of the rounded corner radius.

[0018] Therefore, this design ensures the accuracy of the rounded corners in the final constructed model of the device structure.

[0019] In some embodiments, establishing the sample geometry based on the formed parameter combination includes:

[0020] The key point coordinates of each rounded corner at the top of the sample geometry are determined based on the parameter combination. The key point coordinates include the center coordinates of the rounded corner, the starting point coordinates of the arc, and the ending point coordinates of the arc.

[0021] Determine whether the rounded corner located at the top of the sample geometry is valid based on the key point coordinates and parameter combination of the rounded corner at the top of the sample geometry.

[0022] When it is determined that the fillet located at the top of the sample geometry holds true at the top of the sample geometry, the key point coordinates of the fillets of adjacent structures on the sample geometry are determined.

[0023] Construct the rounded corner arcs based on the key point coordinates of each rounded corner and the mesh size at the rounded corner;

[0024] The other parts of each structure in the sample geometry are constructed based on the parameter combination to form the sample geometry.

[0025] Therefore, this design enables the automated construction of sample geometry and allows for the determination of whether the current parameter combination can construct the sample geometry.

[0026] In some embodiments, determining the key point coordinates of the fillets of adjacent structures on the sample geometry includes:

[0027] Based on the bottom width of the structure and the spacing between adjacent structures, the coordinates of the key points of each rounded corner on the sample geometry are determined.

[0028] Therefore, this design can reduce the process of automating the construction of sample geometry and improve efficiency.

[0029] In some implementations, when it is determined that the fillet located at the top of the sample geometry does not hold true at the top of the sample geometry, the creation of the sample geometry corresponding to the current parameter combination is terminated, and the sample geometry is created using the next set of parameter combinations and the mesh size at the fillet.

[0030] Therefore, this design enables the system to automatically switch to the next set of parameters when it is determined that the current parameter combination cannot construct the sample geometry, thereby achieving automated batch simulation.

[0031] In some implementations, when performing finite element analysis on the sample geometry and chamber pattern to obtain first mesh information and second mesh information, the mesh size of the planar portion of the sample geometry and chamber pattern is set to be larger than the mesh size of the rounded portion of the sample geometry and chamber pattern.

[0032] Therefore, this design reduces the consumption of computing resources and improves the efficiency of simulation operations.

[0033] In some embodiments, the pre-set electron probe parameters include beam spot scanning spacing and electron beam parameters;

[0034] The process of constructing a device structure model with rounded corners by inputting pre-set geometric parameters, pre-set electron probe parameters, first mesh information, second mesh information, and pre-set device structure material parameters into the Nebula simulator includes:

[0035] The first mesh information is converted into a format file required by the Nebula simulator, and the material properties inside and outside the mesh are specified when the mesh is used as the boundary, thus forming the first mesh property information file;

[0036] The second grid information is saved to the first grid attribute information file, and the chamber environment attribute is specified as the detector, thus forming the second grid attribute information file;

[0037] Modify the scanning path in the electron beam file according to the bottom width of the structure corresponding to the current first grid information, the spacing between adjacent structures, and the beam spot scanning spacing, and compile it into the format file required by the Nebula simulator to form an electron beam information file;

[0038] A material information file is generated based on the pre-set device structure and material parameters;

[0039] Input the second mesh attribute information file, electron beam information file, and material information file into the Nebula simulator, output the simulation result file, and obtain the structural model of the device with rounded corners.

[0040] Therefore, this design allows the Nebula simulator to be used to construct a structural model of a device with rounded corners.

[0041] In some implementations, the method further includes: analyzing the obtained structural model of the device with rounded corners, reading the simulation results, and saving the simulation results and their corresponding parameter combinations in a database.

[0042] In some implementations, it also includes:

[0043] After constructing the structural model of the device with rounded corners, the geometric shape of the sample is established using the next set of parameter combinations to construct the structural model of the device with rounded corners corresponding to the next set of parameter combinations. This process is repeated for all parameter combinations to construct the structural model of the device with rounded corners corresponding to each parameter combination.

[0044] Therefore, this design enables automated batch simulation.

[0045] According to a second aspect of the present invention, a device for constructing a structural model of a device with rounded corners is also provided, comprising:

[0046] The graphics construction module is used to create sample geometry and chamber geometry based on pre-set geometric parameters, wherein the sample geometry is a geometric structure with rounded corners;

[0047] The finite element meshing module is used to perform finite element meshing on the sample geometry and the chamber geometry to obtain first mesh information and second mesh information, wherein the first mesh information is the mesh information of the sample geometry and the second mesh information is the mesh information of the chamber geometry.

[0048] The model building module constructs a device structure model with rounded corners by inputting it into the Nebula simulator based on pre-set geometric parameters, pre-set electron probe parameters, first mesh information, second mesh information, and pre-set device structure material parameters. Attached Figure Description

[0049] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0050] Figure 1 This is an overall structural diagram of the device structure constructed in the method for constructing a device structure model with rounded corners according to an embodiment of the present invention.

[0051] Figure 2 This is a cross-sectional view of the device structure constructed in the method for constructing a device structure model with rounded corners according to an embodiment of the present invention.

[0052] Figure 3 This is a flowchart of a method for constructing a structural model of a device with rounded corners according to an embodiment of the present invention;

[0053] Figure 4 This is a flowchart of step S11 in the method for constructing a structural model of a device with rounded corners according to an embodiment of the present invention.

[0054] Figure 5 This is a flowchart of step S24 in the method for constructing a structural model of a device with rounded corners according to an embodiment of the present invention.

[0055] Figure 6 This is a flowchart of step S13 in the method for constructing a structural model of a device with rounded corners according to an embodiment of the present invention.

[0056] Figure 7 This is a schematic diagram of a device for constructing a structural model of a device with rounded corners according to an embodiment of the present invention;

[0057] Figure 8 This is a schematic diagram of the structure of an embodiment of the electronic device of the present invention. Detailed Implementation

[0058] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0059] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other.

[0060] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising" or "including" include not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0061] The present invention will now be described in further detail with reference to the accompanying drawings.

[0062] In this invention, the pre-set geometric parameters are set by the user based on the parameters of the structural model of the device with rounded corners that they need to construct, referring to... Figure 1 and Figure 2 As shown, geometric parameters can include the bottom width (bcd), sidewall angle (swa), height (h), fillet radius (r), spacing between adjacent structures (d), line structure length, and substrate size. Typically, the line structure length and substrate size remain constant and are parameters used to construct the chamber pattern. The bottom width, sidewall angle, height, fillet radius, and spacing between adjacent structures are parameters used to construct the sample geometry. These parameters vary depending on the device structure model with rounded corners to be constructed. Therefore, when performing batch simulations to construct device structure models with rounded corners, multiple different values ​​need to be set for these parameters to create different device structure models with rounded corners. In this case, the values ​​of the corresponding parameters can be represented by the parameter start point, parameter end point, and step size. For example, the bottom width bcd can be set to parameter start point = 20, parameter end point = 30.1, and step size = 0.5, meaning that the bottom width can be set to values ​​of 20, 20.5...29.5, 30.

[0063] In this invention, the preset electron probe parameters include the beam spot scanning spacing (pixel_size) and electron beam parameters.

[0064] In this invention, the pre-set device structure material parameters include wire structure materials, substrate materials, etc.

[0065] Figure 3 The flowchart of a method for constructing a structural model of a device with rounded corners according to an embodiment of the present invention is illustrated schematically. (Refer to...) Figure 3 As shown, the process of constructing a structural model of a device with rounded corners according to the present invention includes the following steps:

[0066] Step S11: Establish the sample geometry and chamber geometry according to the preset geometric parameters, wherein the sample geometry is a geometric structure with rounded corners;

[0067] Step S12: Perform finite element analysis on the sample geometry and chamber geometry to obtain first mesh information and second mesh information, wherein the first mesh information is the mesh information of the sample geometry and the second mesh information is the mesh information of the chamber geometry;

[0068] Step S13: Based on the pre-set geometric parameters, pre-set electron probe parameters, first mesh information, second mesh information, and pre-set device structure material parameters, input the Nebula simulator to construct a device structure model with rounded corners.

[0069] In the present invention, it should be noted that steps S11 and S12 do not necessarily have a fixed order. It is understood that step S11 requires establishing the sample geometry and chamber geometry, while step S12 requires obtaining the first and second grid information based on the sample geometry and chamber geometry. Therefore, steps S11 and S12 can also be implemented as follows: first establishing the sample geometry and obtaining the first grid information, then establishing the chamber geometry and obtaining the second grid information, and so on. These execution orders can be set according to actual circumstances, and the embodiments of the present invention do not impose any limitations on this.

[0070] Step S11 is the step of constructing the sample geometry and chamber geometry. Figure 4 The flowchart of step S11 in the method for constructing a structural model of a device with rounded corners according to an embodiment of the present invention is illustrated schematically. (Refer to...) Figure 4 As shown, this process can be implemented by including the following steps:

[0071] Step S21: Establish the cavity pattern according to the line structure length and substrate size in the preset geometric structure parameters;

[0072] Step S22: Based on the pre-set geometric parameters, such as the bottom width of the structure, side wall angle, height, corner radius, and spacing between adjacent structures, several parameter combinations are formed through nested loops;

[0073] Step S23: Establish the sample geometry based on the parameter combination.

[0074] Step S21 is the step of constructing the chamber pattern, and steps S22 to S24 are the steps of constructing the sample geometry. Similarly, the execution of step S21 and steps S22 to S24 do not need to have a fixed order.

[0075] In step S21, when creating the chamber pattern according to the preset geometric parameters, functions from the pygmsh library based on Gmsh can be used. For example, a rectangular two-dimensional plane can be created first based on the line structure length and substrate size in the geometric parameters, and then the extrude function in the library can be called to stretch the plane into a three-dimensional shape.

[0076] In steps S22 to S24, step S22 is the step of forming a parameter combination for constructing the sample geometry based on the values ​​of each parameter in the pre-set geometric structure parameters. Since the bottom width, sidewall angle, height, corner radius, and spacing between adjacent structures in the pre-set geometric structure parameters are all represented by the parameter start point, parameter end point, and step size, an array of these parameter values ​​can be formed first when forming the parameter combination. Specifically, this can be done using an automated script, such as the `arange` function in the NumPy library of Python. By taking the parameter start point, parameter end point, and step size as input, an array of corresponding parameter values ​​can be obtained. For example, if the bottom width `bcd` is set to parameter start point = 20, parameter end point = 30.1, and step size = 0.5, the resulting array is [20, 20.5, 21........29, 29.5, 30]. After obtaining the arrays corresponding to each parameter, nested loops can be used to obtain several sets of parameter combinations corresponding to different values ​​of each parameter.

[0077] After obtaining several sets of parameter combinations in step S22, step S23 can be executed to construct the sample geometry one by one according to the formed parameter combinations. In some possible implementations, after forming each set of parameter combinations, the mesh size at the rounded corners can be further set accordingly to obtain the parameters at the rounded corners used to construct the sample geometry. When setting the mesh size at the rounded corners, it can be set to 1 / 6 of the rounded corner radius to ensure the accuracy of the rounded corner portion of the final constructed device structure model. Finally, each set of parameter combinations and the mesh size at the rounded corners can be numbered and stored.

[0078] Figure 5 The flowchart of step S23 in the method for constructing a structural model of a device with rounded corners according to an embodiment of the present invention is illustrated schematically. (Refer to...) Figure 5 As shown, this process can be implemented by including the following steps:

[0079] Step S31: Determine the coordinates of key points of each rounded corner in the sample geometry according to the parameter combination. The key point coordinates include the center coordinates of the rounded corner, the starting point coordinates of the arc, and the ending point coordinates of the arc.

[0080] Step S32: Determine whether the rounded corner located at the top of the sample geometry is valid at the top of the sample geometry based on the key point coordinates and parameter combination of the rounded corner located at the top of the sample geometry.

[0081] Step S33: When it is determined that the fillet located at the top of the sample geometry is valid at the top of the sample geometry, determine the key point coordinates of the fillets of the adjacent structures on the sample geometry.

[0082] Step S34: Construct the rounded corner arcs based on the coordinates of the key points of each rounded corner;

[0083] Step S35: Construct the other parts of each structure in the sample geometry according to the parameter combination to form the sample geometry.

[0084] In step S31, it is necessary to determine the coordinates of the key points of each rounded corner in the sample geometry. These key point coordinates include the coordinates of the corner's center, the starting point of the arc, and the ending point of the arc. Specifically, the rounded corner can be defined as tangent to the top, bottom, and side walls. A coordinate system is constructed, and based on the set values ​​bcd, swa, h, and r, a unique rounded corner arc can be found using the mathematical relationships of the geometric structure, thus determining the coordinates of the three key points of the rounded corner.

[0085] Step S32 determines whether the rounded corner at the top of the sample geometry constructed by the current parameter combination is valid within the sample geometry. It is understood that a single structure in the sample geometry has four rounded corners: the upper left, upper right, lower left, and lower right corners. Since the radius of the rounded corners is fixed, if some values ​​in the parameter combination used to construct the sample geometry are inappropriate, the rounded corners at the upper left and upper right of the structure will interfere and thus cannot be valid within the sample geometry. Specifically, step S32 can be determined using conditional statements. For example, it can be determined based on the relationship between the coordinates of the three key points of the rounded corner at the top of the sample geometry and the axis of symmetry of the structure in the sample geometry. When the key point coordinates of the upper left rounded corner are all located to the left of the axis of symmetry, and the key point coordinates of the upper right rounded corner are all located to the right of the axis of symmetry, then the rounded corner constructed by the current parameter combination is determined to be valid within the sample geometry; otherwise, the rounded corner constructed by the current parameter combination is determined to be invalid within the sample geometry. Alternatively, a coordinate system can be established with the x-axis origin located at the axis of symmetry of the structure in the sample geometry. It can then be determined whether the x-axis coordinates of the key points of the top left rounded corner are all less than 0, and whether the x-axis coordinates of the key points of the right rounded corner are all greater than 0. If it is determined that the rounded corner constructed by the current parameter combination does not hold true in the sample geometry, the creation of the sample geometry corresponding to the current parameter combination ends, and the next set of parameter combinations is used to create the sample geometry.

[0086] Step S33 is the step performed when determining whether the fillet constructed by the current parameter combination is valid in the sample geometry. Since multiple structures may exist side-by-side in a device structure, step S33 requires determining the key point coordinates of the fillets of adjacent structures on the sample geometry. Specifically, this can be achieved by repeatedly executing step S31. In some other possible implementations, step S33 can also be implemented as determining the key point coordinates of the fillets of adjacent structures on the sample geometry based on the bottom width of the structure and the spacing between adjacent structures. Since the distance between adjacent structures can be calculated using the bottom width of the structure and the spacing between adjacent structures, it is only necessary to offset the key point coordinates of the fillets of the currently obtained structures in either a positive or negative direction.

[0087] Next, step S34 is executed to construct rounded corner arcs based on the coordinates of the key points of each rounded corner, and step S35 is executed to construct the other parts of each structure in the sample geometry based on the parameter combination, thus forming the sample geometry. When constructing the rounded corner arcs and other parts of each structure in the sample geometry, the mesh size of the corresponding parts in the subsequent finite element meshing steps can be controlled by adding points in the corresponding geometric space of the rounded corner arcs, the top, bottom, and sidewalls of the structure. Specifically, when constructing the rounded corner arcs, the add_point function of the pygmsh library can be called to add points in the geometric space based on the coordinates of the key points of each rounded corner, and the mesh size of the two ends of the arc can be controlled. Then, the add_circle_arc function is used to connect the key points of the rounded corners to obtain the arc. When constructing other parts of the grid structure in the sample geometry, such as the top, bottom, and sidewalls, points can be created at the center of the top, bottom, and sidewalls of the structure, and the mesh size of the surrounding area can be controlled. Then, the add_curve_loop function of the pygmsh library is called to connect the points sequentially to form a closed curve. When controlling the mesh size of the constructed rounded corner arcs, it can be set according to the mesh size at the rounded corners set in the previous steps. When controlling the mesh size of other parts of the lattice structure in the constructed sample geometry, such as the top, bottom, and sidewalls, the controlled mesh size can be set to be larger than the mesh size at the rounded corners to reduce the computational load. After controlling the mesh size of the corresponding parts formed in the subsequent finite element meshing steps, the sample geometry can be formed by extruding based on the constructed rounded corner arcs and other parts of the lattice structure in the sample geometry, namely the top, bottom, and sidewalls. Specifically, the `add_plane_surface` function can be used to convert the curves of each part into surfaces, the `extrude` function can be used to extrude the obtained surfaces according to the set structural length, and the `add_rectangle` and `extrude` functions can be used to create a two-dimensional plane of the substrate according to the set substrate size, and the structure can be extruded to obtain the substrate.

[0088] Step S12 involves performing finite element analysis (FEM) meshing on the sample geometry and chamber geometry to obtain first and second mesh information. When performing FEM meshing on the chamber geometry, the `generate_mesh` function from the `pygmsh` library can be called, specifying the mesh dimension as two-dimensional, to obtain the FEM meshing result for the chamber geometry. Similarly, when performing FEM meshing on the sample geometry, the `generate_mesh` function from the `pygmsh` library can be called, specifying the mesh dimension as two-dimensional. FEM meshing is performed based on the points controlling the mesh size when constructing the sample geometry, resulting in the FEM meshing result for the sample geometry. Both the chamber geometry FEM meshing result and the sample geometry FEM meshing result can be saved in STL file format. In some possible implementations, when performing step S12, the mesh size of the planar portions of the sample geometry and chamber geometry can be set to be larger than the mesh size of the rounded corner portions. This is because a larger mesh not only requires more computational resources during meshing but also during simulation. Therefore, by limiting the mesh size when calling the function, the mesh can be made as large as possible on a flat surface, so that fewer meshes can be used to form a flat surface. At rounded corners, i.e. on curved surfaces, in order to ensure that the rounded corners are realistically reproduced to a certain extent, the mesh size can be made smaller, so that more meshes can be used to form a curved surface.

[0089] After obtaining the first grid information and the second grid information, step S13 can be executed to simulate the structural model of the device with rounded corners. Figure 6 The flowchart of step S13 in the method for constructing a structural model of a device with rounded corners according to an embodiment of the present invention is illustrated schematically. (Refer to...) Figure 6 As shown, this process can be implemented by including the following steps:

[0090] Step S41: Convert the first mesh information into a format file required by the Nebula simulator, and specify the material properties inside and outside the mesh when the mesh is used as the boundary, to form the first mesh property information file;

[0091] Step S42: Save the second grid information to the first grid attribute information file, and specify the chamber environment attribute as the detector to form the second grid attribute information file;

[0092] Step S43: Modify the scanning path in the electron beam file according to the bottom width of the structure corresponding to the current first grid information, the spacing between adjacent structures, and the beam spot scanning spacing, and compile it into the format file required by the Nebula simulator to form an electron beam information file;

[0093] Step S44: Generate a material information file based on the pre-set device structure and material parameters;

[0094] Step S45: Input the second mesh attribute information file, electron beam information file, and material information file into the Nebula simulator, output the simulation result file, and obtain the structural model of the device with rounded corners.

[0095] Specifically, steps S41 and S42 are steps for forming a mesh attribute information file for input into the Nebula simulator, step S43 is a step for forming an electron beam information file for input into the Nebula simulator, and step S44 is a step for forming a material information file for input into the Nebula simulator. It is understood that the steps for generating the various information files for input into the Nebula simulator do not need to have a fixed order.

[0096] In step S41, the first mesh information needs to be converted into a format file required by the Nebula simulator. Specifically, step S41 can be implemented by calling a custom `specimen_convert` function to read the mesh information from the STL file containing the first mesh information corresponding to the sample geometry, and converting it into a format file required by the Nebula simulator, such as a .tri file, forming the first mesh attribute information file. It is also necessary to specify the material properties inside and outside the mesh when it is used as a boundary. The material properties are specified according to Nebula's rules. In the first mesh attribute information file obtained after the first mesh information conversion, each line defines one triangular element. For example, the material property inside and outside the mesh is specified as silicon, represented by the number 0, and then the coordinates of the three vertices of the triangular element are specified.

[0097] In step S42, the relevant information corresponding to the second grid information needs to be saved to the first grid attribute information file to form a second grid attribute information file that simultaneously contains the first grid information corresponding to the sample geometry and the second grid information corresponding to the chamber geometry. Specifically, step S42 can be implemented by calling a custom `detector_convert` function to read the grid information from the STL file containing the second grid information corresponding to the chamber geometry and save it to the first grid attribute information file that has already saved the first grid information corresponding to the sample geometry in step S41, thus forming the second grid attribute information file. It is also necessary to specify the chamber environment attribute as the detector. Specifically, the chamber environment attribute can be specified as a secondary electron detector, i.e., its attribute is known to be the number -125. Specifying its attribute as a secondary electron detector allows electrons passing through the triangular element to be calculated as secondary electrons.

[0098] In step S43, an electron beam information file needs to be generated for input into the Nebula simulator. Specifically, this can be achieved by calling a custom `create_batch_simulation` function, modifying the scan path parameters in the electron beam file according to the set bottom width of the structure, the spacing between adjacent structures, and the beam spot scanning spacing, and then calling a shell command to compile the electron beam file to obtain the `pri` file, which is the electron beam information file.

[0099] In step S44, a material information file needs to be generated for input into the Nebula simulator. Specifically, this can be done using the cstool component in the Nebula simulator to generate a mat file, i.e., a material information file, based on pre-set device structure material parameters.

[0100] In step S45, the second mesh attribute information file, electron beam information file, and material information file generated in the previous steps need to be input into the Nebula simulator to simulate and construct the structural model of the device with rounded corners. After constructing the structural model of the device with rounded corners, the analysis result program can be used to analyze the result file, read the simulation results, and save the simulation results and their corresponding parameter combinations in the database by calling pymysql to connect to the MySQL database.

[0101] In some possible implementations, due to the large number of possible values ​​for each parameter in the pre-set geometric structure parameters, a large number of parameter combinations are formed, thus enabling batch simulation to construct structural models of devices with rounded corners. Specifically, in this implementation, after constructing the structural model of the device with rounded corners, redundant files from the above process can be removed, such as the mesh attribute information file, electron beam information file, and material information file in the Nebula simulator after construction. Then, the sample geometry for the next set of parameter combinations is constructed, and steps S12 and S13 are executed to construct the structural model of the device with rounded corners corresponding to the next set of parameter combinations. After traversing all parameter combinations, the structural model of the device with rounded corners corresponding to each parameter combination can be constructed, and the total simulation time and the number of results are recorded.

[0102] This invention first constructs the geometric structure and cavity pattern, and then performs finite element analysis to obtain corresponding first and second mesh information. Based on this first and second mesh information, it inputs them into the Nebula simulator to utilize the simulator's basic functions to build a device structure model with rounded corners. This method achieves fully automated construction of a device structure model with rounded corners using the Nebula simulator. Only the geometric parameters, electron probe parameters, and device material parameters need to be pre-set to quickly complete the model building. Furthermore, since the entire model building process requires no manual intervention, it enables batch simulation, which is beneficial for the application of new methods such as model libraries and deep learning in high-precision, high-resolution CD SEM measurements, thereby improving the accuracy and efficiency of CD SEM measurements.

[0103] Figure 7 The schematic diagram illustrates the principle block diagram of a structural model building device with rounded corners according to an embodiment of the present invention, with reference to... Figure 7 As shown, the device for constructing the structural model of the device with rounded corners specifically includes the following modules:

[0104] The graphic construction module 1 is used to create sample geometry and chamber geometry based on pre-set geometric parameters, wherein the sample geometry is a geometric structure with rounded corners;

[0105] Finite element meshing module 2 is used to perform finite element meshing on the sample geometry and the chamber geometry to obtain first mesh information and second mesh information, wherein the first mesh information is the mesh information of the sample geometry and the second mesh information is the mesh information of the chamber geometry;

[0106] Model building module 3, based on pre-set geometric parameters, pre-set electron probe parameters, first mesh information, second mesh information, and pre-set device structure material parameters, inputs the Nebula simulator to build a device structure model with rounded corners.

[0107] It should be noted that the implementation process and principle of the device for constructing a structure model of a device with rounded corners in this embodiment of the invention can be specifically referred to in the corresponding descriptions of the above method embodiments, such as the descriptions of the construction of sample geometry and chamber geometry, and the acquisition of mesh information in the method embodiments. Therefore, they will not be repeated here. Exemplarily, the device for constructing a structure model of a device with rounded corners in this embodiment of the invention can be any intelligent device with a processor, including but not limited to computers, smartphones, personal computers, robots, cloud servers, etc.

[0108] In some embodiments, the present invention provides a non-volatile computer-readable storage medium storing one or more programs including execution instructions, which can be read and executed by electronic devices (including but not limited to computers, servers, or network devices, etc.) to perform the method for constructing a structure model of a rounded-corner device according to any of the above embodiments of the present invention.

[0109] In some embodiments, the present invention also provides a computer program product, the computer program product including a computer program stored on a non-volatile computer-readable storage medium, the computer program including program instructions, which, when executed by a computer, cause the computer to perform the method for constructing a structure model of a device with rounded corners according to any of the above embodiments.

[0110] In some embodiments, the present invention also provides an electronic device, comprising: at least one processor, and a memory communicatively connected to the at least one processor, wherein the memory stores instructions executable by the at least one processor, the instructions being executed by the at least one processor to enable the at least one processor to perform the method for constructing a structure model of a device with rounded corners according to any of the above embodiments.

[0111] In some embodiments, the present invention also provides a storage medium storing a computer program, characterized in that the program, when executed by a processor, implements the method for constructing a structure model of a device with rounded corners according to any of the above embodiments.

[0112] Figure 8 This is a schematic diagram of the hardware structure of an electronic device that performs a method for constructing a structural model of a component with rounded corners, according to another embodiment of this application. Figure 8 As shown, the device includes:

[0113] One or more processors 610 and memory 620, Figure 8 Take the 610 processor as an example.

[0114] The device for performing the method of constructing a structural model of a device with rounded corners may also include an input device 630 and an output device 640.

[0115] The processor 610, memory 620, input device 630, and output device 640 can be connected via a bus or other means. Figure 8 Taking the example of a connection between China and Israel via a bus.

[0116] The memory 620, as a non-volatile computer-readable storage medium, can be used to store non-volatile software programs, non-volatile computer-executable programs, and modules, such as the program instructions / modules corresponding to the method for constructing a structure model of a rounded-corner device in the embodiments of this application. The processor 610 executes various functional applications and data processing of the server by running the non-volatile software programs, instructions, and modules stored in the memory 620, thereby implementing the method for constructing a structure model of a rounded-corner device in the above embodiments.

[0117] The memory 620 may include a program storage area and a data storage area. The program storage area may store the operating system and applications required for at least one function; the data storage area may store data created using the method of constructing a model with rounded corner components. Furthermore, the memory 620 may include high-speed random access memory and may also include non-volatile memory, such as at least one disk storage device, flash memory device, or other non-volatile solid-state storage device. In some embodiments, the memory 620 may optionally include memory remotely located relative to the processor 610, and these remote memories may be connected to the electronic device via a network. Examples of such networks include, but are not limited to, the Internet, intranets, local area networks, mobile communication networks, and combinations thereof.

[0118] Input device 630 can receive input digital or character information and generate signals related to user settings and function control of the image processing device. Output device 640 may include a display device such as a display screen.

[0119] The one or more modules are stored in the memory 620, and when executed by the one or more processors 610, the method for constructing a structure model of a device with rounded corners in any of the above method embodiments is executed.

[0120] The above-described product can perform the methods provided in the embodiments of this application, and has the corresponding functional modules and beneficial effects for performing the methods. Technical details not described in detail in this embodiment can be found in the methods provided in the embodiments of this application.

[0121] The electronic devices in this application embodiments exist in various forms, including but not limited to:

[0122] (1) Mobile communication devices: These devices are characterized by their mobile communication capabilities and primarily aim to provide voice and data communication. These terminals include: smartphones (e.g., iPhones), multimedia phones, feature phones, and low-end phones, etc.

[0123] (2) Ultra-mobile personal computer devices: These devices fall under the category of personal computers, possessing computing and processing capabilities, and generally also have mobile internet access features. These terminals include PDAs, MIDs, and UMPCs, such as the iPad.

[0124] (3) Portable entertainment devices: These devices can display and play multimedia content. This category includes audio and video players (such as iPods), handheld game consoles, e-book readers, as well as smart toys and portable car navigation devices.

[0125] (4) Server: A device that provides computing services. The components of a server include a processor, hard disk, memory, system bus, etc. Servers are similar to general computer architectures, but because they need to provide highly reliable services, they have higher requirements in terms of processing power, stability, reliability, security, scalability, and manageability.

[0126] (5) Other electronic devices with data interaction functions.

[0127] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs.

[0128] Through the above description of the embodiments, those skilled in the art can clearly understand that each embodiment can be implemented using software plus a general-purpose hardware platform, or of course, using hardware. Based on this understanding, the above technical solutions, in essence or the parts that contribute to the related technology, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute the methods described in the various embodiments or some parts of the embodiments.

[0129] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. A method for constructing a structural model of a device with rounded corners, characterized in that, include: The sample geometry and chamber geometry are established based on the preset geometric parameters. The sample geometry is a geometric structure with rounded corners. The geometric parameters include the bottom width, side wall angle, height, rounded corner radius, spacing between adjacent structures, line structure length, and substrate size. The bottom width, side wall angle, height, rounded corner radius, and spacing between adjacent structures all include the parameter start point, parameter end point, and step size. Finite element analysis is performed on the sample geometry and the chamber geometry to obtain first mesh information and second mesh information, wherein the first mesh information is the mesh information of the sample geometry and the second mesh information is the mesh information of the chamber geometry. Based on the pre-set geometric parameters, pre-set electron probe parameters, first mesh information, second mesh information, and pre-set device structure material parameters, input the Nebula simulator to construct a device structure model with rounded corners; The process of establishing the sample geometry and chamber geometry based on pre-set geometric parameters includes: The cavity pattern is created based on the line structure length and substrate size in the pre-set geometric parameters; Several parameter combinations are formed by nesting and looping the pre-set geometric parameters, such as the bottom width of the structure, side wall angles, height, corner radius, and spacing between adjacent structures. The key point coordinates of each rounded corner in the sample geometry are determined based on the parameter combination. The key point coordinates include the center coordinates of the rounded corner, the starting point coordinates of the arc, and the ending point coordinates of the arc. Determine whether the rounded corner located at the top of the sample geometry is valid based on the key point coordinates and parameter combination of the rounded corner at the top of the sample geometry. When it is determined that the fillet located at the top of the sample geometry holds true at the top of the sample geometry, the key point coordinates of the fillets of adjacent structures on the sample geometry are determined. Construct the rounded corner arcs based on the coordinates of the key points of each rounded corner; The other parts of each structure in the sample geometry are constructed based on the parameter combination to form the sample geometry.

2. The method for constructing a structural model of a device with rounded corners according to claim 1, characterized in that, The size of the grid division at the rounded corner is set to 1 / 6 of the rounded corner radius.

3. The method for constructing a structural model of a device with rounded corners according to claim 1, characterized in that, The determination of the key point coordinates for the fillet radius of adjacent structures on the sample geometry includes: Based on the bottom width of the structure and the spacing between adjacent structures, the coordinates of the key points of each rounded corner on the sample geometry are determined.

4. The method for constructing a structural model of a device with rounded corners according to claim 1, characterized in that, When it is determined that the fillet located at the top of the sample geometry does not hold true at the top of the sample geometry, the creation of the sample geometry corresponding to the current parameter combination ends, and the next set of parameter combinations and its corresponding fillet mesh size are used to create the sample geometry.

5. The method for constructing a structural model of a device with rounded corners according to claim 1, characterized in that, When performing finite element analysis on the sample geometry and chamber geometry to obtain the first mesh information and the second mesh information, the mesh size of the planar portion of the sample geometry and chamber geometry is set to be larger than the mesh size of the rounded portion of the sample geometry and chamber geometry.

6. The method for constructing a structural model of a device with rounded corners according to claim 1, characterized in that, The pre-set electron probe parameters include beam spot scanning spacing and electron beam parameters; The process of constructing a device structure model with rounded corners by inputting pre-set geometric parameters, pre-set electron probe parameters, first mesh information, second mesh information, and pre-set device structure material parameters into the Nebula simulator includes: The first mesh information is converted into a format file required by the Nebula simulator, and the material properties inside and outside the mesh are specified when the mesh is used as the boundary, thus forming the first mesh property information file; The second grid information is saved to the first grid attribute information file, and the chamber environment attribute is specified as the detector, thus forming the second grid attribute information file; Modify the scanning path in the electron beam file according to the bottom width of the structure corresponding to the current first grid information, the spacing between adjacent structures, and the beam spot scanning spacing, and compile it into the format file required by the Nebula simulator to form an electron beam information file; A material information file is generated based on the pre-set device structure and material parameters; Input the second mesh attribute information file, electron beam information file, and material information file into the Nebula simulator, output the simulation result file, and obtain the structural model of the device with rounded corners.

7. The method for constructing a structural model of a device with rounded corners according to claim 1, characterized in that, Also includes: After constructing the structural model of the device with rounded corners, the geometric shape of the sample is established using the next set of parameter combinations to construct the structural model of the device with rounded corners corresponding to the next set of parameter combinations. This process is repeated for all parameter combinations to construct the structural model of the device with rounded corners corresponding to each parameter combination.

8. A device for constructing structural models of components with rounded corners, characterized in that, include: The pattern construction module is used to build sample geometry and chamber geometry according to pre-set geometric structure parameters. The sample geometry is a geometric structure with rounded corners. The geometric structure parameters include bottom width, side wall angle, height, rounded corner radius, spacing between adjacent structures, line structure length, and substrate size. The bottom width, side wall angle, height, rounded corner radius, and spacing between adjacent structures all include parameter start point, parameter end point, and step size. The finite element meshing module is used to perform finite element meshing on the sample geometry and the chamber geometry to obtain first mesh information and second mesh information, wherein the first mesh information is the mesh information of the sample geometry and the second mesh information is the mesh information of the chamber geometry; The model building module, based on pre-set geometric parameters, pre-set electron probe parameters, first mesh information, second mesh information, and pre-set device structure material parameters, inputs the Nebula simulator to build a device structure model with rounded corners; The graphics construction module, when creating the sample geometry and chamber geometry, includes: The cavity pattern is created based on the line structure length and substrate size in the pre-set geometric parameters; Several parameter combinations are formed by nesting and looping the pre-set geometric parameters, such as the bottom width of the structure, side wall angles, height, corner radius, and spacing between adjacent structures. The key point coordinates of each rounded corner in the sample geometry are determined based on the parameter combination. The key point coordinates include the center coordinates of the rounded corner, the starting point coordinates of the arc, and the ending point coordinates of the arc. Determine whether the rounded corner located at the top of the sample geometry is valid based on the key point coordinates and parameter combination of the rounded corner at the top of the sample geometry. When it is determined that the fillet located at the top of the sample geometry holds true at the top of the sample geometry, the key point coordinates of the fillets of adjacent structures on the sample geometry are determined. Construct the rounded corner arcs based on the coordinates of the key points of each rounded corner; The other parts of each structure in the sample geometry are constructed based on the parameter combination to form the sample geometry.

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