Green body structure of coil bearing ceramic support and forming and sintering method of green body structure

Abstract

The invention discloses a green body structure of a coil bearing ceramic support and a forming and sintering method thereof.The green body structure comprises a substrate and a support body arranged on the substrate, the support body comprises a cross-shaped plate, a center hole is formed in the center of the cross-shaped plate, the two sides of the four ends of the cross-shaped plate extend to form arc-shaped plates, and the arc-shaped plates are arranged in the center of the cross-shaped plate. The cross-shaped plate and the arc-shaped plate are respectively provided with a supporting column protruding upwards, and the support body and the substrate are homogeneous and integrated to form a green body structure of the coil bearing ceramic support. Through the rough machining structure design of the green body material, raw material waste is reduced, the annular segment difference support is additionally arranged in the middle, sintering cracking or deformation caused by the thin wall of the middle is prevented, the subsequent finish machining time is shortened, and the machining cost is saved.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor etching equipment, and in particular to a green body structure of a coil-bearing ceramic bracket used in semiconductor etching equipment and a molding and sintering method thereof. Background Art

[0002] With the development of semiconductor process technology, wet etching can no longer meet the micron and even nanometer-level fine line processing requirements of ultra-large-scale integrated circuits due to its inherent limitations, and dry etching has gradually developed. In dry etching, the inductively coupled plasma ICP (Inductive Coupled Plasma Emission Spectrometer) etching method has been widely used in semiconductor process technology due to its high ion density, good etching uniformity, high verticality of the etching side wall and good finish. In the ICP plasma etcher, the radio frequency generated by the ICP radio frequency power supply is output to the ring coupling coil, and a certain proportion of mixed etching gas is coupled to glow discharge to generate high-density plasma. Under the action of the RF radio frequency of the lower electrode, the plasma bombards the surface of the substrate, and the chemical bonds of the semiconductor material in the substrate pattern area are broken, and volatile substances are generated with the etching gas and are pumped away by the vacuum pipeline. The coupling coil has a great influence on the generation of plasma, so it needs to be fixed with a special bracket. In recent years, with the rapid development of the semiconductor industry, the market demand for ICP etching equipment has continued to grow. ICP etching technology has the advantages of fast etching rate, high selectivity, high anisotropy, small etching damage, good uniformity over a large area, high controllability of etching cross-sectional profile, and smooth etching surface. ICP etching equipment has a simple structure, small appearance, easy operation, easy automatic control, and is suitable for etching of large-area substrates, with a high market share. The ceramic bracket that supports the coupling coil needs to consider its thermal conductivity, is large in size, and has many structural features. The traditional production process uses green body sintering. Since the ceramic bracket of the coupling coil is a cross structure, the existing sintering method will cause large-area cracking after it comes out of the furnace, and the qualified rate is very low, wasting a lot of manpower and material resources. Summary of the invention

[0003] The purpose of the present invention is to solve the problem that coil-supported ceramic brackets for semiconductor etching equipment in the prior art are prone to large-scale cracking after green body sintering, and to provide a green body structure of a coil-supported ceramic bracket that can greatly improve the pass rate after green body sintering.

[0004] Another object of the present invention is to provide a green body forming and sintering method for a coil-carrying ceramic bracket.

[0005] The specific technical solution adopted by the present invention to solve the above technical problems is a green body structure of a coil-carrying ceramic bracket, including a substrate and a bracket body arranged on the substrate, the bracket body including a cross-shaped plate, a center hole is arranged in the center of the cross-shaped plate, arc-shaped plates extend on both sides of the four ends of the cross-shaped plate, the cross-shaped plate and the arc-shaped plate are both provided with pillars protruding upward, and the bracket body and the substrate are homogeneous and integral to form the green body structure of the coil-carrying ceramic bracket. The bracket body of the present invention is arranged on the substrate and is homogeneous and integral with the substrate, so that the bracket body and the substrate are an integral component during sintering. This structure greatly reduces the stress concentration of each turning part of the bracket body, can greatly reduce the cracking of the bracket body during sintering, greatly improves the sintering yield of the bracket body, and reduces production costs.

[0006] Preferably, the cross-shaped plate includes a transverse plate and a longitudinal plate integrally connected on the same plane, wherein the transverse plate and the longitudinal plate are perpendicular to each other, the width of the transverse plate is the same as the width of the longitudinal plate, and the thickness of the transverse plate is the same as the thickness of the longitudinal plate.

[0007] Preferably, transition arcs are provided at the connection between the transverse plate and the longitudinal plate, and at the connection between the transverse plate, the longitudinal plate and the arc-shaped plate.

[0008] Preferably, the base plate is a flat plate structure, the cross-shaped plate divides the base plate into four connection areas, the connection areas are of the same size, and the connection area inside the arc-shaped plate is fan-shaped.

[0009] Preferably, the thickness of the base plate is 40 to 60 percent of the thickness of the cross-shaped plate body.

[0010] Preferably, the arc length of the arc plates at both ends of the horizontal plate is greater than that of the arc plates at both ends of the vertical plate; a waist-shaped hole with a length direction consistent with that of the horizontal plate is provided between the arc plates at both ends of the horizontal plate.

[0011] Preferably, the cross-shaped plate is a symmetrical structure, and the four ends of the cross-shaped plate are provided with end blocks protruding upwards, and the arc-shaped plate is concentric with the central hole and is located on the inner side of the end block.

[0012] Preferably, a cylinder is protruding upward from the center of the substrate, the cylinder is concentric with the center hole and its outer diameter is smaller than the diameter of the center hole, an annular groove is formed between the cylinder and the center hole, the wall thickness of the cylinder is equivalent to the thickness of the substrate, and the height of the cylinder protruding from the substrate is greater than the thickness of the cross-shaped plate.

[0013] Preferably, a closed structured edge is protruded along the connection area on the substrate and the outer edge of the substrate, a transition groove is formed between the edge and the outer edge of the connection area, the height of the edge is greater than the thickness of the cross-shaped plate, a connecting strip is provided between the edge close to the center hole and the edge of the outer edge of the substrate, and a hollow structure is formed between the edge and the connecting strip.

[0014] Preferably, a plurality of transition holes are provided in the connection area on the base plate, the transition holes comprising an inner hole near the center of the cross-shaped plate and an outer hole near the end of the arc-shaped plate, the diameter of the inner hole being greater than the diameter of the outer hole.

[0015] A molding and sintering method for the green structure of the coil-carrying ceramic bracket, wherein the molding method for the green structure of the coil-carrying ceramic bracket comprises the following steps: Alumina ceramic granulation powder with a purity greater than 99.7% is selected, the bulk density of the granulation powder is 1.2±0.1 g / ml, and the particle size D50 of the granulation powder is 90 um. The green body of the coil-bearing ceramic bracket is formed by cold isostatic pressing.

[0016] The sintering method of the green body of the coil-carrying ceramic support comprises the following steps: The roughly processed green body of the coil-carrying ceramic bracket is placed on a sintering table, separated by sintering sand in the middle, and pushed into a sintering gas furnace for sintering. The sintering sand is diamond sintering sand with a purity higher than 99% and a particle size range of 90-140um; the sintering temperature is 1570℃ to 1650℃, and the insulation time is 2.5-3.5 hours.

[0017] The present invention has the following beneficial effects: (1) Through the rough processing structure design of green material, the waste of raw materials is reduced, and the circular ring segment difference support is added in the middle to prevent sintering cracking or deformation caused by thin wall in the middle, reduce the subsequent finishing time, and save processing costs.

[0018] (2) Through the design of the sintering structure, the flatness of the console plate and the laying of sintering sand can be prevented from shrinking and cracking due to uneven sintering process.

[0019] (3) The processing method is simple, convenient and practical; the product processing process is simple to operate, convenient and efficient. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a three-dimensional structural schematic diagram of Example 1 of the ceramic bracket green body structure of the present invention.

[0021] Figure 2 It is a front view of Example 1 of the ceramic bracket green body structure of the present invention.

[0022] Figure 3 yes Figure 2 Top view of the .

[0023] Figure 4 It is a three-dimensional structural schematic diagram of Example 2 of the ceramic bracket green body structure of the present invention.

[0024] Figure 5 It is a three-dimensional structural schematic diagram of Example 3 of the ceramic bracket green body structure of the present invention.

[0025] Figure 6 It is a front view of Example 2 of the ceramic bracket green body structure of the present invention.

[0026] Figure 7 yes Figure 6 Top view of the .

[0027] Figure 8 It is a front view of Example 3 of the ceramic bracket green body structure of the present invention.

[0028] Fig. 9 yes Figure 8 Top view of the .

[0029] Fig.10 It is a three-dimensional structural schematic diagram of the coil-carrying ceramic bracket of the present invention.

[0030] In the figure: 1. base plate, 2. bracket body, 3. center hole, 4. arc plate, 5. pillar, 6. horizontal plate, 7. longitudinal plate, 8. connection area, 9. waist-shaped hole, 10. end block, 11. cylinder, 12. annular groove, 13. surrounding edge, 14. transition groove, 15. connecting strip, 16. hollow structure, 17. inner hole, 18. outer hole, 19. middle hole. DETAILED DESCRIPTION

[0031] The specific implementation of the present invention is further described below through examples and in conjunction with the accompanying drawings.

[0032] Example 1 In such Figure 1 Figure 2 Figure 3In the embodiment 1 shown, a green body structure of a coil-carrying ceramic bracket includes a substrate 1 and a bracket body 2 arranged on the substrate 1, the bracket body 2 is the main body of the coil ceramic bracket after green body forming and sintering, the bracket body 2 includes a cross-shaped plate, a center hole 3 is provided in the center of the cross-shaped plate, and arc-shaped plates 4 extend outward on both sides of the four ends of the cross-shaped plate, and the cross-shaped plate and the arc-shaped plate 4 are both provided with upwardly protruding pillars 5, and the bracket body 2 and the substrate 1 are homogeneous and integral to form the green body structure of the coil-carrying ceramic bracket. The support body is arranged on the substrate, and the substrate serves as a bearing platform for the entire cross-shaped support body structure, so that the support body and the substrate in the green stage are homogeneous to form an integral structure. The existence of the substrate can strengthen the structural strength of the support body, weaken the stress concentration of the support body, and reduce the probability of the support body breaking during molding and sintering; the support body includes a cross-shaped plate, a center hole is provided in the center of the cross-shaped plate, and the cross-shaped plate is radially arranged outward from the center hole. The cross-shaped plate is the main structure of the ceramic support, and arc plates are extended on both sides of the four ends of the cross-shaped plate. The arc plates are used as support plates for fixing the coupling coil. Such a structure can provide sufficient fixing points for the coupling coil, and arc plates are extended on both sides of the four ends of the cross-shaped plate. Such a design increases the symmetry of the support, which is beneficial to eliminate stress concentration and reduce rupture during sintering; a plurality of raised pillars 5 are arranged on the cross-shaped plate and the arc plate for setting fasteners to fix the coupling coil. The green structure of the coil-bearing ceramic support of the present invention, through the integral molding of the substrate and the support body, not only meets the mechanical requirements and spatial layout requirements of the coupling coil for the support body, but also can greatly reduce the probability of the support body breaking during sintering.

[0033] The cross-shaped plate includes a horizontal plate 6 and a vertical plate 7 connected in one piece on the same plane. The horizontal plate 6 and the vertical plate 7 are perpendicular to each other, the width of the horizontal plate 6 is the same as the width of the vertical plate 7, and the thickness of the horizontal plate 6 is the same as the thickness of the vertical plate 7. The horizontal plate and the vertical plate of the cross-shaped plate are on the same plane. Such a structure can not only reduce the difficulty of making the green blank, but also avoid the stress concentration part on the bracket body and reduce the possibility of cracking of the coil bracket. The width of the horizontal plate is the same as the width of the vertical plate. This symmetrical design helps to maintain the balance of the structure and evenly distribute the load; the width of the horizontal plate and the vertical plate of this embodiment are both 53.5 mm; the thickness of the horizontal plate is the same as the thickness of the vertical plate, such a design helps to maintain the consistency and stability of the entire cross-shaped plate, and is also convenient for manufacturing and processing. The thickness of the horizontal plate and the vertical plate of this embodiment is both 9.5 mm; the horizontal plate and the vertical plate are perpendicular to each other, which provides symmetry and stability in the structure, and can improve the uniformity and reliability of the entire structure. The horizontal plate and the vertical plate of the present invention are on the same plane and are radially arranged from the center hole of the cross-shaped plate to the outside.

[0034] The connection between the transverse plate 6 and the longitudinal plate 7 and the connection between the transverse plate 6 and the longitudinal plate 7 and the arc plate 4 are all provided with transition arcs. The transition arc can smoothly transition between two straight lines or between a straight line and an arc, reduce stress concentration in the structure, and thus reduce the possibility of cracks in the bracket body. On the other hand, the use of transition arcs makes the connection of the structure more smooth and beautiful, and enhances the harmony of the overall design. Through reasonable transition arc design, cracks caused by stress concentration can be avoided and the bracket body structure can be protected from damage; in addition, the application of transition arcs at the connection between the transverse plate and the longitudinal plate and at the connection between the transverse plate and the longitudinal plate and the arc plate is also of great significance for improving the structural strength of the bracket body structure. In this embodiment, a transition arc with a radius of 76 mm is used at the cross intersection of the transverse plate and the longitudinal plate, and a transition arc with a radius of 25 mm is used at the connection between the two ends of the transverse plate and the longitudinal plate and the arc plate.

[0035] The substrate 1 is a flat plate structure, and the cross-shaped plate divides the substrate 1 into four connection areas 8, and the connection areas 8 are of the same size. The connection area 8 on the inner side of the arc plate 4 is fan-shaped. The flat plate structure substrate can simplify the manufacturing process and provide a uniform support surface; the cross-shaped plate is convexly arranged on the substrate, dividing the substrate into four connection areas, and the fan-shaped connection areas connect the horizontal plates and the vertical plates on both sides. This layout helps to disperse the stress on the bracket body over the entire substrate, reduce the stress concentration on the bracket body, and help to improve the structural stability of the bracket body during the sintering stage.

[0036] The thickness of the substrate 1 is 40% to 60% of the thickness of the main body of the cross-shaped plate. Although a thicker substrate helps to improve the stress concentration of the bracket body, it will increase the workload of the subsequent processing steps and increase the material cost. Experiments have shown that the thickness of the substrate between 40% and 60% of the thickness of the main body of the cross-shaped plate can well improve the stress concentration of the bracket body and greatly reduce the cracking of the bracket body. The thickness of the substrate in this embodiment is 5 mm. The main body of the cross-shaped plate includes a horizontal plate and a vertical plate, both of which are 9.5 mm thick. The thickness of the substrate is about 53% of the thickness of the main body of the cross-shaped plate.

[0037] The arc length of the arc plate 4 at both ends of the horizontal plate 6 is greater than that of the arc plate 4 at both ends of the longitudinal plate 7; a waist-shaped hole 9 is provided between the arc plates 4 at both ends of the horizontal plate 6, and the length direction is consistent with the length direction of the horizontal plate 6. The arc length of the arc plates at both ends of the horizontal plate is greater than that of the arc plates at both ends of the longitudinal plate. This structure can provide coupling coil fixing points at different positions to meet the fixing needs of the coupling coil. A waist-shaped hole is provided between the arc plates at both ends of the horizontal plate, and the length direction is consistent with the length direction of the horizontal plate. The waist-shaped hole is used to fix the terminal bracket of the coupling coil, and the terminal bracket of the coupling coil can be adjusted within a certain range in the length direction of the horizontal plate. The width of the arc plate in this embodiment is 45 mm, and the thickness is the same as that of the horizontal plate and the longitudinal plate, which is 9.5 mm; the center angle corresponding to the two arc plates at both ends of the horizontal plate is 75 degrees, and the center angle corresponding to the two arc plates at both ends of the longitudinal plate is 50 degrees; the waist-shaped hole in this embodiment is 45 mm long and 15 mm wide, and is symmetrically arranged at the center line of the two ends of the horizontal plate.

[0038] The cross-shaped plate is a symmetrical structure. The four ends of the cross-shaped plate are provided with an upwardly protruding end block 10. The end block 10 is a rectangular block. The arc plate is concentric with the center hole 3 and is located on the inner side of the end block 10. The cross-shaped plate is a symmetrical structure and is evenly distributed geometrically, providing balanced support and beautiful appearance. The arc plate is concentric with the center hole and is located on the inner side of the end block. Usually, the coupling coil is divided into an outer coil and an inner coil. The arc plate is used to fix the outer coil. The arc plate on the inner side of the end block helps to maintain the symmetry of the structure and uniform load distribution.

[0039] A cylinder 11 is protruded upward from the center of the substrate 1. The cylinder 11 is concentric with the center hole 3 and its outer diameter is smaller than the diameter of the center hole 3. An annular groove 12 is formed between the cylinder 11 and the center hole 3. The wall thickness of the cylinder 11 is equivalent to the thickness of the substrate 1. The height of the cylinder 11 protruding from the substrate 1 is greater than the thickness of the cross plate. A cylinder is protruded upward from the center of the substrate. The cylinder is concentric with the center hole of the substrate and its outer diameter is smaller than the diameter of the center hole. An annular groove is formed between the outer wall of the cylinder and the center hole. Such a structural layout can disperse the stress near the center hole of the bracket body and avoid cracking caused by stress concentration. At the same time, the annular groove between the center hole and the cylinder facilitates the subsequent fine machining to remove the cylinder part, reducing the difficulty of machining and reducing the machining cost.

[0040] The pillars 5 are distributed around the center hole 3 of the cross-shaped plate and in the arc circumference of the arc plate 4. The pillars 5 located around the center hole 3 of the cross-shaped plate are used to fix the internal coupling coil, and the pillars 5 located in the arc circumference of the arc plate 4 are used to fix the external coupling coil. The height of the pillars 5 protruding from the cross-shaped plate is the same as the height of the end block 10 protruding from the cross-shaped plate, which is approximately 6.5 mm in this embodiment. A fixing hole is provided in the center of the pillar 5 for installing fasteners. In this embodiment, there are 7 pillars on the circumference of the arc plate at both ends of the horizontal plate, 3 pillars on the circumference of the arc plate at both ends of the longitudinal plate, 4 pillars on the horizontal plates on both sides of the center hole, and 3 pillars on the longitudinal plates on both sides of the center hole. The pillars are arranged in a centrally symmetrical manner with the center hole as the center; in addition, three U-shaped notches are provided on the center hole (see Fig.10 ), which is also commonly used to fix the internal coupling coil.

[0041] Example 2 In such Figure 4 Figure 6 Figure 7 In the embodiment 2 shown, a green structure of a coil-carrying ceramic bracket includes a substrate 1 and a bracket body 2 arranged on the substrate 1. The bracket body 2 is the main body of the coil ceramic bracket after green molding and sintering. The bracket body 2 includes a cross-shaped plate, a center hole 3 is provided in the center of the cross-shaped plate, and arc plates 4 are extended outward on both sides of the four ends of the cross-shaped plate. The cross-shaped plate and the arc plate 4 are both provided with pillars 5 protruding upward. The bracket body 2 and the substrate 1 are homogeneous and integral to form the green structure of the coil-carrying ceramic bracket. The cross-shaped plate includes a horizontal plate 6 and a vertical plate 7 connected integrally on the same plane. The horizontal plate 6 and the vertical plate 7 are perpendicular to each other, the width of the horizontal plate 6 is the same as the width of the vertical plate 7, and the thickness of the horizontal plate 6 is the same as the thickness of the vertical plate 7. The width of the horizontal plate and the vertical plate in this embodiment are both 53.5 mm; the thickness of the horizontal plate is the same as the thickness of the vertical plate, and the thickness of the horizontal plate and the vertical plate in this embodiment are both 9.5 mm. The horizontal plate and the vertical plate of the present invention are on the same plane and are radially arranged outward from the center hole of the cross-shaped plate.

[0042] The connection between the horizontal plate 6 and the vertical plate 7 and the connection between the horizontal plate 6 and the vertical plate 7 and the curved plate 4 are all provided with transition arcs. In this embodiment, the cross intersection of the horizontal plate and the vertical plate adopts a transition arc with a radius of 76 mm, and the connection between the two ends of the horizontal plate and the vertical plate and the curved plate adopts a transition arc with a radius of 25 mm. The substrate 1 is a flat plate structure, and the cross-shaped plate divides the substrate 1 into four connection areas 8, the connection areas 8 are the same size, and the connection area 8 on the inner side of the curved plate 4 is fan-shaped. The thickness of the substrate 1 is 40% to 60% of the thickness of the main body of the cross-shaped plate. Experiments have shown that the thickness of the substrate between 40% and 60% of the thickness of the main body of the cross-shaped plate can well improve the stress concentration of the bracket body and greatly reduce the cracking of the bracket body. The thickness of the substrate in this embodiment is 5 mm, and the main body of the cross-shaped plate includes a horizontal plate and a vertical plate, both of which are 9.5 mm thick. The thickness of the substrate is about 53% of the thickness of the main body of the cross-shaped plate.

[0043] The arc length of the arc plate 4 at both ends of the horizontal plate 6 is greater than that of the arc plate 4 at both ends of the longitudinal plate 7; a waist-shaped hole 9 is provided between the arc plates 4 at both ends of the horizontal plate 6, and the arc length of the arc plates at both ends of the horizontal plate is greater than that of the arc plates at both ends of the longitudinal plate. The width of the arc plate in this embodiment is 45 mm, and the thickness is the same as that of the horizontal plate and the longitudinal plate, which is 9.5 mm; the central angle of the two arc plates at both ends of the horizontal plate is 75 degrees, and the central angle of the two arc plates at both ends of the longitudinal plate is 50 degrees; the waist-shaped hole in this embodiment is 45 mm long and 15 mm wide, and is symmetrically arranged at the center line of both ends of the horizontal plate. The cross-shaped plate is a symmetrical structure, and the four ends of the cross-shaped plate are provided with an upwardly protruding end block 10, and the end block 10 is a rectangular block. The arc plate is concentric with the center hole 3 and is located on the inner side of the end block 10. A cylinder 11 is protruded upward from the center of the substrate 1. The cylinder 11 is concentric with the center hole 3 and its outer diameter is smaller than the diameter of the center hole 3. An annular groove 12 is formed between the cylinder 11 and the center hole 3. The wall thickness of the cylinder 11 is equivalent to the thickness of the substrate 1. The height of the cylinder 11 protruding from the substrate 1 is greater than the thickness of the cross-shaped plate.

[0044] The pillars 5 are distributed around the central hole 3 of the cross-shaped plate and on the arc circumference of the arc plate 4. The pillars 5 located around the central hole 3 of the cross-shaped plate are used to fix the inner coupling coil, and the pillars 5 located on the arc circumference of the arc plate 4 are used to fix the outer coupling coil. The height of the pillars 5 protruding from the cross-shaped plate is the same as the height of the end block 10 protruding from the cross-shaped plate, which is about 6.5 mm in this embodiment. A fixing hole is provided in the center of the pillar 5 for installing fasteners. In this embodiment, there are 7 pillars on the arc plate circumference at both ends of the horizontal plate, 3 pillars on the arc plate circumference at both ends of the vertical plate, 4 pillars on the horizontal plates on both sides of the center hole, and 3 pillars on the vertical plates on both sides of the center hole. The pillars are arranged in a centrally symmetrical manner with the center hole as the center; in addition, there are three U-shaped notches on the center hole, which are usually also used to fix the inner coupling coil.

[0045] In this embodiment, a closed structure surrounding edge 13 is protruded along the inner edge of the connection area and the outer edge of the substrate on the connection area on the substrate, and a transition groove 14 is formed between the surrounding edge and the outer edge of the connection area. The height of the surrounding edge is greater than the thickness of the cross-shaped plate. A connecting strip 15 is provided between the surrounding edge close to the center hole and the surrounding edge of the substrate outer edge, and a hollow structure 16 is formed between the surrounding edge and the connecting strip. The surrounding edge structure can disperse the stress of the bracket body and avoid stress concentration and cracking. At the same time, the transition groove formed between the surrounding edge and the outer edge of the connection area can facilitate the subsequent fine processing to remove the connection area part, reduce the processing difficulty, and reduce the processing cost.

[0046] Example 3 In such Figure 5 Figure 8 Fig. 9In the embodiment 3 shown, a green body structure of a coil-carrying ceramic bracket includes a substrate 1 and a bracket body 2 arranged on the substrate 1. The bracket body 2 is the main body of the coil ceramic bracket after green body forming and sintering. The bracket body 2 includes a cross-shaped plate, a center hole 3 is provided in the center of the cross-shaped plate, and arc-shaped plates 4 are extended outward on both sides of the four ends of the cross-shaped plate. The cross-shaped plate and the arc-shaped plate 4 are both provided with pillars 5 protruding upward. The bracket body 2 and the substrate 1 are homogeneous and integral to form the green body structure of the coil-carrying ceramic bracket. The cross-shaped plate includes a horizontal plate 6 and a vertical plate 7 connected in one piece on the same plane. The horizontal plate 6 and the vertical plate 7 are perpendicular to each other. The width of the horizontal plate 6 is the same as the width of the vertical plate 7, and the thickness of the horizontal plate 6 is the same as the thickness of the vertical plate 7. The width of the horizontal plate and the vertical plate in this embodiment are both 53.5 mm; the thickness of the horizontal plate is the same as the thickness of the vertical plate, and the thickness of the horizontal plate and the vertical plate in this embodiment are both 9.5 mm. The horizontal plate and the vertical plate of the present invention are on the same plane and are radially arranged outward from the center hole of the cross-shaped plate. The connection between the horizontal plate 6 and the vertical plate 7 and the connection between the horizontal plate 6 and the vertical plate 7 and the curved plate 4 are all provided with transition arcs. In this embodiment, the cross intersection of the horizontal plate and the vertical plate adopts a transition arc with a radius of 76 mm, and the connection between the two ends of the horizontal plate and the vertical plate and the curved plate adopts a transition arc with a radius of 25 mm. The substrate 1 is a flat plate structure, and the cross-shaped plate divides the substrate 1 into four connection areas 8, and the connection areas 8 are the same size. The connection area 8 on the inner side of the curved plate 4 is fan-shaped. The thickness of the substrate 1 is 40% to 60% of the thickness of the main body of the cross-shaped plate. The thickness of the substrate in this embodiment is 5 mm. The main body of the cross-shaped plate includes a horizontal plate and a vertical plate, and the thickness is 9.5 mm. The thickness of the substrate is about 53% of the thickness of the main body of the cross-shaped plate. The arc length of the arc plate 4 at both ends of the horizontal plate 6 is greater than that of the arc plate 4 at both ends of the vertical plate 7; a waist-shaped hole 9 is provided between the arc plates 4 at both ends of the horizontal plate 6, and the arc length of the arc plate at both ends of the horizontal plate is greater than that of the arc plate at both ends of the vertical plate. The width of the arc plate in this embodiment is 45 mm, and the thickness is the same as that of the horizontal plate and the vertical plate, which is 9.5 mm; the central angle of the two arc plates at both ends of the horizontal plate is 75 degrees, and the central angle of the two arc plates at both ends of the vertical plate is 50 degrees; the waist-shaped holes in this embodiment are 45 mm long and 15 mm wide, and are symmetrically arranged at the center line of both ends of the horizontal plate.

[0047] The cross-shaped plate is a symmetrical structure. The four ends of the cross-shaped plate are provided with an end block 10 protruding upward. The end block 10 is a rectangular block. The arc-shaped plate is concentric with the center hole 3 and is located inside the end block 10. A cylinder 11 is protruding upward from the center of the substrate 1. The cylinder 11 is concentric with the center hole 3 and its outer diameter is smaller than the diameter of the center hole 3. A circular groove 12 is formed between the cylinder 11 and the center hole 3. The wall thickness of the cylinder 11 is equivalent to the thickness of the substrate 1. The height of the cylinder 11 protruding from the substrate 1 is greater than the thickness of the cross-shaped plate. The pillars 5 are distributed around the center hole 3 of the cross-shaped plate and in the arc circumference of the arc-shaped plate 4. The pillars 5 located around the center hole 3 of the cross-shaped plate are used to fix the inner coupling coil, and the pillars 5 located in the arc circumference of the arc plate 4 are used to fix the outer coupling coil. The height of the pillars 5 protruding from the cross-shaped plate is the same as the height of the end block 10 protruding from the cross-shaped plate, which is about 6.5 mm in this embodiment. A fixing hole is provided in the center of the pillar 5 for installing fasteners. In this embodiment, there are 7 pillars on the circumferential direction of the arc-shaped plates at both ends of the horizontal plate, 3 pillars on the circumferential direction of the arc-shaped plates at both ends of the vertical plate, 4 pillars on the horizontal plates on both sides of the center hole, and 3 pillars on the vertical plates on both sides of the center hole. The pillars are arranged symmetrically with the center hole as the center; in addition, three U-shaped notches are provided on the center hole, which are usually also used to fix the internal coupling coil.

[0048] In the connection area on the substrate of this embodiment, a plurality of transition holes are provided. The transition holes of this embodiment include three inner holes 17 near the center of the cross-shaped plate and three outer holes 18 near the end of the arc-shaped plate. The diameter of the inner hole 17 is larger than the diameter of the outer hole 18. A middle hole 19 is provided between the inner hole 17 and the outer hole 18. The diameter of the middle hole 19 is between the diameter of the inner hole 17 and the diameter of the outer hole 18. In the connection area on the substrate, a plurality of transition holes are provided. These transition holes include an inner hole near the center of the cross-shaped plate and an outer hole near the end of the arc-shaped plate. This design helps to reduce the risk of cracking of the ceramic bracket during production and use, especially under the action of thermal expansion or mechanical stress.

[0049] A molding and sintering method for the green structure of the coil-carrying ceramic bracket, wherein the molding method for the green structure of the coil-carrying ceramic bracket comprises the following steps: Ceramic granulation powder is cold isostatically pressed into a shaped material with a diameter of 610mm and a thickness of 30mm, and rough processing is performed; the ceramic granulation powder selects alumina ceramic granulation powder with a purity greater than 99.7%, the bulk density of the granulation powder is 1.2±0.1g / ml, and the particle size D50 of the granulation powder is 90um, and the green body of the coil-bearing ceramic bracket is formed by cold isostatic pressing. Alumina ceramic granulation powder with a purity greater than 99.7% is selected as the raw material. This high-purity alumina ceramic granulation powder can ensure the quality and performance of the final product. 99.7% high-purity alumina ceramics have high purity, high strength, heat resistance, corrosion resistance, wear resistance, good thermal conductivity and thermal shock resistance, and low production cost, and are widely used in semiconductor equipment components. The ceramic granulation powder within the above range has good fluidity and is easy to fill the inside of the mold during molding. The green body has high density after molding and the density of sintered porcelain is high. Before sintering, the excess parts on both sides of the bracket are roughly processed and a step difference is added in the middle of the bracket to prevent cracking of the green body after sintering into porcelain, reduce subsequent finishing time, and improve processing efficiency.

[0050] The sintering method of the green body of the coil-carrying ceramic bracket comprises the following steps: The roughly processed green body of the coil-carrying ceramic bracket is placed on a sintering table, separated by sintering sand in the middle, and pushed into a sintering gas furnace for sintering. The sintering sand is diamond sintering sand with a purity higher than 99% and a particle size range of 90-140um; the sintering temperature is 1570℃ to 1650℃, and the insulation time is 2.5-3.5 hours.

[0051] After sintering, the green body needs to be cooled and subsequently processed to ensure that it reaches the required size. The coil-bearing ceramic bracket of the present invention after processing is as follows: Fig.10 shown.

[0052] In the above three embodiments, the development of coil-bearing ceramic bracket sintering technology is mainly about the rough processing structure design of the green body to prevent cracking due to uneven force during sintering, maximize the product qualification rate, reduce the deformation of the material during the sintering process, and ensure the dimensional accuracy requirements of the sintered product. The following are the specific experimental results of the three embodiments: 50 coil-bearing ceramic brackets of Example 1 were fired, of which 8 were cracked, and the qualification rate was 84%; 50 coil-bearing ceramic brackets of Example 2 were fired, of which 6 were cracked, and the qualification rate was 88%; 50 coil-bearing ceramic brackets of Example 3 were fired, of which 2 were cracked, and the qualification rate was 96%; It can be seen from the above experimental results that the green body structure of the coil-bearing ceramic bracket of the present invention and its forming and sintering method are significantly improved compared with the prior art.

[0053] The bracket body of the present invention is arranged on a substrate and is homogeneous with the substrate, so that the bracket body and the substrate are an integral component during sintering. This structure greatly reduces the stress concentration at each turning point of the bracket body, which can greatly reduce the cracking of the bracket body during sintering, greatly improve the sintering yield of the bracket body, and reduce production costs. The rough processing structure design of the green material can reduce the waste of raw materials, and the circular ring segment difference support is added in the middle to prevent the sintering cracking or deformation caused by the thin wall in the middle, reduce the subsequent fine processing time, and save processing costs. Through the design of the sintering structure, the flatness of the console plate and the laying of sintering sand can be controlled to prevent cracking caused by non-smooth shrinkage during the sintering process of the material. The processing method is simple, convenient and practical; the product processing process is simple to operate, convenient and efficient.

[0054] In addition to the above-mentioned embodiments, within the scope disclosed in the claims and the specification of the present invention, the technical features or technical data of the present invention can be reselected and combined to form new implementation modes. These implementation modes that are not described in detail in the present invention can be easily implemented by those skilled in the art without creative work. Therefore, these implementation modes that are not described in detail should also be regarded as specific embodiments of the present invention and are within the protection scope of the present invention.

Claims

1. A green structure of a coil-carrying ceramic support, characterized in that: It includes a substrate and a bracket body arranged on the substrate, the bracket body includes a cross-shaped plate, a center hole is provided in the center of the cross-shaped plate, arc-shaped plates extend on both sides of the four ends of the cross-shaped plate, the cross-shaped plate and the arc-shaped plate are both provided with upwardly protruding pillars, and the bracket body and the substrate are homogeneous and integrated to form the green body structure of the coil-carrying ceramic bracket.

2. The green structure of the coil-carrying ceramic bracket according to claim 1, characterized in that: The cross-shaped plate comprises a horizontal plate and a vertical plate integrally connected on the same plane, wherein the horizontal plate and the vertical plate are perpendicular to each other, the width of the horizontal plate is the same as the width of the vertical plate, and the thickness of the horizontal plate is the same as the thickness of the vertical plate.

3. The green structure of the coil-carrying ceramic bracket according to claim 2, characterized in that: The base plate is a flat plate structure, the cross-shaped plate divides the base plate into four connection areas, the connection areas are of the same size, and the connection area inside the arc-shaped plate is fan-shaped.

4. The green structure of the coil-carrying ceramic bracket according to claim 2, characterized in that: The arc length of the arc plates at both ends of the horizontal plate is greater than that of the arc plates at both ends of the vertical plate; a waist-shaped hole with a length direction consistent with that of the horizontal plate is provided between the arc plates at both ends of the horizontal plate.

5. The green structure of the coil-carrying ceramic bracket according to claim 1, characterized in that: The cross-shaped plate is a symmetrical structure, and the four ends of the cross-shaped plate are provided with end blocks protruding upwards. The arc-shaped plate is concentric with the central hole and is located on the inner side of the end block.

6. The green structure of the coil-carrying ceramic bracket according to claim 1, characterized in that: A cylinder is protruding upward from the center of the substrate. The cylinder is concentric with the center hole and its outer diameter is smaller than the diameter of the center hole. An annular groove is formed between the cylinder and the center hole. The wall thickness of the cylinder is equivalent to the thickness of the substrate. The height of the cylinder protruding from the substrate is greater than the thickness of the cross-shaped plate.

7. The green structure of the coil-carrying ceramic bracket according to claim 3, characterized in that: A closed structured peripheral edge is protruded in the connection area on the substrate along the connection area and the outer edge of the substrate, a transition groove is formed between the peripheral edge and the outer edge of the connection area, the height of the peripheral edge is greater than the thickness of the cross-shaped plate, a connecting strip is provided between the peripheral edge close to the center hole and the peripheral edge of the substrate, and a hollow structure is formed between the peripheral edge and the connecting strip.

8. The green structure of the coil-carrying ceramic bracket according to claim 3, characterized in that: A plurality of transition holes are arranged in the connection area on the base plate, and the transition holes include an inner hole near the center of the cross-shaped plate and an outer hole near the end of the arc-shaped plate, and the diameter of the inner hole is larger than the diameter of the outer hole.

9. A method for forming and sintering a green structure of a coil-carrying ceramic bracket according to claim 1, characterized in that: The method for forming a green structure of a coil-carrying ceramic support comprises the following steps: Alumina ceramic granulation powder with a purity greater than 99.7% is selected, the bulk density of the granulation powder is 1.2±0.1 g / ml, and the particle size D50 of the granulation powder is 90 um. The green body of the coil-bearing ceramic bracket is formed by cold isostatic pressing.

10. The method for forming and sintering the green structure of the coil-carrying ceramic bracket according to claim 9, characterized in that: The sintering method of the green body of the coil-carrying ceramic support comprises the following steps: The roughly processed green body of the coil-carrying ceramic bracket is placed on a sintering table, separated by sintering sand in the middle, and pushed into a sintering gas furnace for sintering. The sintering sand is diamond sintering sand with a purity higher than 99% and a particle size range of 90-140um; the sintering temperature is 1570℃ to 1650℃, and the insulation time is 2.5-3.5 hours.

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