Swing arm elastic piece adjusting method and device

Abstract

The invention discloses a swing arm elastic piece adjusting method and device, and relates to the technical field of distance measurement, and the swing arm elastic piece adjusting method comprises the following steps: S1, measuring a swing arm standard block to define a swing arm standard symmetric position # imgabs0 #; s2, installing a to-be-adjusted swing arm, and measuring and recording effective movement distances of a plurality of motors and corresponding elastic sheet deformation amounts to obtain an adjustment deformation table; s3, a next swing arm to be adjusted is installed, and the position # imgabs 1 # of the swing arm is measured; s4, if the # imgabs2 # is not in the range of # imgabs3 #, searching a corresponding elastic sheet deformation interval in the adjustment deformation table, and calculating the movement distance # imgabs4 # required by motor adjustment and the movement distance # imgabs5 # required by motor adjustment so as to adjust the elastic sheet; and S5, measuring the position # imgabs6 # of the swing arm, and if the # imgabs7 # is not in the range of the # imgabs8 #, repeating the step S4 until the # imgabs9 # is in the range of the # imgabs10 #. According to the swing arm elastic piece adjusting method, the elastic piece can be adjusted.

Description

Technical Field

[0001] The present invention relates to the technical field of distance measurement, and in particular to a swing arm spring piece adjustment method and device. Background Art

[0002] In the wafer sorting of semiconductor equipment, the sorting machine will use a swing arm nozzle mechanism to transfer the core particles during the sorting process. In order to increase the core particle transfer speed, a swing arm nozzle mechanism with a double swing arm structure will be used for operation.

[0003] Specifically, the swing arm suction nozzle mechanism of the double swing arm structure includes a base, two swing arm assemblies symmetrically arranged on the base, the swing arm assembly includes a swing arm, a suction nozzle and a spring, the swing arm is arranged upright, the spring is used to connect the bottom end of the swing arm and the base, the suction nozzle is arranged at the top end of the swing arm, a spring is arranged between the swing arm and the base, the spring is used to drive the swing arm to swing away from the base, a first screw and a first nut are also arranged on the base, the first screw and the first nut cooperate to adjust the elastic force of the spring, a second screw and a second nut are also arranged between the swing arm and the base, the second screw and the second nut are located above the spring, the second screw is used to limit the position of the swing arm, and the second nut is used to adjust the limiting position of the swing arm by the second screw.

[0004] When the nozzle is sucking up the wafer core, the core exerts a force on the nozzle, which also drives the nozzle to move in the opposite direction, thereby separating the swing arm and the second screw. This force is the resultant force of the combined action of the shrapnel and the spring.

[0005] In order to obtain the consistency of adjustment on both sides of the double swing arm, that is, when the spring compression on both sides is adjusted consistently, the separation force of the nozzles on both sides is the same when separating. It can be understood that when the spring compression on both sides is adjusted the same, when the nozzles on both sides are at the same symmetrical distance from the central axis when separating, the nozzle forces on both sides are the same.

[0006] However, in the actual assembly process, due to factors such as processing tolerance and spring deformation, the position of the nozzle is not symmetrical when the spring and the second screw are not installed. When the second screw and the second nut cooperate to adjust the nozzle on the swing arm to the symmetrical position of the two nozzles, the spring compression amount is different when the separation force of the two nozzles is required to be the same. As a result, the consistency of the force applied by the two nozzles when sucking the wafer core particles cannot be guaranteed. Summary of the invention

[0007] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a swing arm spring adjustment method, which can adjust the spring to compensate for the problem of processing tolerance or spring deformation, ensure that the spring compression amount is the same when the two suction nozzles are in symmetrical positions and the separation force of the two suction nozzles is the same, and ensure the consistency of the force when the two suction nozzles suck the wafer core particles.

[0008] The present invention also provides a swing arm spring piece adjustment device for implementing the above-mentioned swing arm spring piece adjustment method.

[0009] According to a first aspect of an embodiment of the present invention, a swing arm spring piece adjustment method includes the following steps: S1: Install the swing arm standard block on the measuring station and measure the swing arm standard block to define the standard symmetrical position of the swing arm , and set the swing arm position qualified range to ; S2: Install the swing arm to be adjusted on the measuring station and set the single step spacing of the motor , measure and record the effective movement distance of multiple motors And the corresponding deformation of the spring , get the adjustment deformation table; S3: Install the next swing arm to be adjusted on the measuring station and measure the swing arm position of the swing arm to be adjusted first. ,judge Is it in within the scope; S4: If Not Available If the range is within the range, the deformation of the spring that needs to be adjusted is calculated. , find the corresponding spring deformation range in the adjustment deformation table and calculate the distance the motor needs to move , motor movement To adjust the shrapnel; S5: Re-measure the swing arm position of the swing arm to be adjusted after adjusting the spring piece ,judge Is it in Within the range, if Not Available Repeat step S4 until exist Within the range, adjust the next swing arm.

[0010] A swing arm spring piece adjustment method according to the first aspect of the embodiments of the present invention has at least the following beneficial effects: 1. The present invention installs the swing arm standard block on the measuring station and measures the swing arm standard block to define the standard symmetrical position of the swing arm. , and set the swing arm position qualified range to It can be understood that the structural design of the swing arm standard block and the swing arm installation method are the same as the swing arm to be adjusted. It is a metal block as a whole and is not easy to deform. In addition, the swing arm standard block is processed with high precision to ensure the accuracy of the measuring surface, which is conducive to collecting the accurate standard symmetrical position of the swing arm. , thereby making the standard for subsequent swing arm adjustments more accurate.

[0011] 2. The present invention sets the single step spacing of the motor by installing the swing arm to be adjusted on the measuring station , measure and record the effective movement distance of multiple motors And the corresponding shrapnel deformation , it can be understood that the adjustment deformation table is obtained by using the swing arm to be adjusted to measure the effective movement distances of multiple motors and the corresponding deformation amounts of the springs, and summarizing the adjustment deformation table, so that the data in the adjustment deformation table can provide accurate theoretical adjustment data for the subsequent adjustment of the swing arm to be adjusted, thereby facilitating accurate adjustment of the springs, and further reducing the probability of adjustment errors.

[0012] 3. The present invention installs the next swing arm to be adjusted on the measuring station, and first measures the swing arm position of the swing arm to be adjusted. ,judge Is it in within the range; if Not Available If the range is within the range, the deformation of the spring that needs to be adjusted is calculated. , find the corresponding spring deformation range in the adjustment deformation table and calculate the distance the motor needs to move , motor movement To adjust the spring, it is understood that the swing arm position of the swing arm to be adjusted is measured After calculating the deformation of the spring that needs to be adjusted, the corresponding spring deformation range can be found in the adjustment deformation table more accurately, and then the distance the motor needs to move is calculated based on the two end points of the corresponding spring deformation range in the adjustment deformation table. , thereby, the spring piece can be accurately adjusted, thereby helping to improve the adjustment efficiency.

[0013] 4. The present invention remeasures the swing arm position of the swing arm to be adjusted after adjusting the spring piece ,judge Is it in Within the range, if Not Available Repeat step S4 until exist The next swing arm is adjusted within the range. It can be understood that the swing arm position of the swing arm to be adjusted after re-measuring and adjusting the spring piece is , which is helpful to confirm the adjustment effect and make the adjustment quality better. If it is still unqualified after adjustment, repeat step S4 to adjust, thereby ensuring that the adjustment is qualified. Furthermore, the present invention can adjust the spring piece to compensate for the processing tolerance or deformation of the spring piece, ensure that the two suction nozzles are in symmetrical positions and the separation forces of the two suction nozzles are the same, and the spring compression amount is also the same, thereby ensuring the consistency of the force when the two suction nozzles suck the wafer core particles.

[0014] According to some embodiments of the present invention, the effective movement distances of the plurality of motors are measured and recorded. And the corresponding deformation of the spring , and obtain the adjustment deformation table, including the following steps: set up The number of steps that the motor drives the adjustment block to push the swing arm; is the effective movement distance of the motor, ; To adjust the position of the block when the block does not contact the swing arm; The position of the adjusting block when the motor drives the adjusting block to move to the position contacting the swing arm; To adjust the block from The effective movement distance from the position to the adjustment block pushing the swing arm The displacement of The displacement of the step is ; For passing After that, the adjustment block returns The position of the swing arm; For passing The deformation of the shrapnel after ; The motor drives the adjustment block to push the swing arm, and the measurement steps are from 0 to Swing arm position to , and calculate the deformation of the spring corresponding to each different step number , and obtain the adjustment deformation table.

[0015] According to some embodiments of the present invention, when the swing arm moves in an outward direction, the number of steps is , No. The displacement of the adjustment block is ; When the swing arm moves inward, the number of steps is , No. The displacement of the step is ; The motor drives the adjustment block to push the swing arm outwards, and the measurement steps are from 0 to Swing arm position to , and calculate the deformation of the spring corresponding to each different step number , get the positive adjustment deformation table; The motor drives the adjustment block to push the swing arm inward, and the measurement steps are 0 to Swing arm position to , and calculate the deformation of the spring corresponding to each different step number , and obtain the reverse adjustment deformation table.

[0016] According to some embodiments of the present invention, the number of steps, the effective movement distance and the deformation amount of the spring piece in the forward adjustment deformation table and the reverse adjustment deformation table are combined to obtain and save the adjustment deformation table.

[0017] According to some embodiments of the present invention, the step of searching the corresponding spring deformation interval in the adjustment deformation table and calculating the distance required for the motor to move is as follows: , including the following steps: Find it from the adjustment deformation table and ,in, , ; According to the formula , the solution can be obtained .

[0018] According to some embodiments of the present invention, in step S5, The distance that the motor needs to move for the second adjustment is , the swing arm position is , deformation of the spring , .

[0019] According to some embodiments of the present invention, in step S3, when it is determined that exist If it is within the range, the next swing arm will be adjusted directly.

[0020] According to some embodiments of the present invention, in step S1, It is the distance between the displacement measuring head and the measuring area above the suction nozzle of the swing arm standard block.

[0021] A swing arm spring piece adjustment device according to a second aspect of an embodiment of the present invention is used to implement a swing arm spring piece adjustment method according to the first aspect of an embodiment of the present invention, comprising: The frame has an X direction, a Y direction and a Z direction which are perpendicular to each other; A mounting seat, arranged on the frame, having a measuring station, wherein the measuring station is used to install the swing arm to be adjusted so that the positioning swing arm swings along the Y direction; A displacement measuring head is arranged on the frame and located on one side of the mounting seat along the Y direction, and is used to measure the position of the swing arm; An adjustment component is arranged on the frame, comprising an adjustment block and a motor driving the adjustment block to move along the Y direction, wherein the adjustment block pushes the swing arm to adjust the deformation amount of the spring piece; A data processing module, used for collecting measurement data of the displacement measuring head, determining the deformation amount of the spring piece and calculating the adjustment movement distance of the motor; The control module is used to receive the information of the data processing module and control the motor to adjust the spring.

[0022] A swing arm spring piece adjustment device according to the second aspect of the embodiments of the present invention has at least the following beneficial effects: The present invention can automatically collect data to construct an adjustment deformation table by setting a mounting frame, a displacement measuring head, an adjustment component, a data processing module and a control module, and then automatically calculate the adjustment movement distance of the motor during adjustment based on the adjustment deformation table, so that the swing arm spring piece adjustment device can automatically adjust the spring piece to compensate for the processing tolerance or the spring piece deformation problem, ensure that the spring compression amount is the same when the two suction nozzles are in symmetrical positions and the separation forces of the two suction nozzles are the same, and ensure the consistency of the force when the two suction nozzles suck the wafer core particles.

[0023] According to some embodiments of the present invention, the adjustment block has a first opening on one side along the X direction, and two side walls of the first opening along the Y direction respectively abut against the swing arm to be adjusted to push the swing arm to be adjusted in the positive and negative directions of the Y direction.

[0024] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 It is a structural schematic diagram of a swing arm nozzle mechanism according to an embodiment of the present invention; Figure 2 It is a structural schematic diagram of the swing arm to be adjusted according to an embodiment of the present invention; Figure 3 A flow chart of a swing arm spring piece adjustment method according to an embodiment of the present invention; Figure 4 It is a structural schematic diagram of a swing arm spring piece adjustment device according to an embodiment of the present invention; Figure 5 for Figure 4 A top view is shown; Figure 6 for Figure 4 Front view shown.

[0027] Figure markings: 100-base, 110-swing arm assembly, 120-swing arm, 130-nozzle, 140-shrapnel, 150-spring, 160-first screw, 170-first nut, 180-second screw, 190-second nut, 200-swing arm to be adjusted, 210-frame, 220-mounting seat, 230-displacement measuring head, 240-adjustment assembly, 250-adjustment block, 260-motor, 270-first opening, 280-lifting frame, 290-translation frame, 300-mounting frame, 310-Z fine-tuning knob, 320-X fine-tuning knob. DETAILED DESCRIPTION

[0028] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0029] In the description of the present invention, it is necessary to understand that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0030] In the description of the present invention, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of first and second, this is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0031] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation, connection and connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] Combine the following Figure 1-Figure 6 A swing arm spring piece adjustment method and device according to an embodiment of the present invention are described.

[0033] The present invention aims to provide an embodiment of a swing arm spring piece adjustment method and device.

[0034] Reference Figure 1 and Figure 2 , for the swing arm suction nozzle mechanism of the double swing arm structure, the swing arm suction nozzle mechanism of the double swing arm structure includes a base 100, two swing arm assemblies 110 symmetrically arranged on the base 100, the swing arm assembly 110 includes a swing arm 120, a suction nozzle 130 and a spring 140, the swing arm 120 is arranged upright, the spring 140 is used to connect the bottom end of the swing arm 120 and the base 100, the suction nozzle 130 is arranged at the top end of the swing arm 120, and a spring 150 is arranged between the swing arm 120 and the base 100, and the spring 150 is used to drive the swing arm 120 to move away The swing arm 120 swings in the direction away from the base 100. A first screw 160 and a first nut 170 are also provided on the base 100. The first screw 160 and the first nut 170 cooperate to adjust the elastic force of the spring 150. A second screw 180 and a second nut 190 are also provided between the swing arm 120 and the base 100. The second screw 180 and the second nut 190 are located above the spring 150. The second screw 180 is used to limit the position of the swing arm 120, and the second nut 190 is used to adjust the limiting position of the swing arm 120 by the second screw 180.

[0035] When the suction nozzle 130 is sucking the wafer core, the core exerts a force on the suction nozzle 130 , and the force also drives the suction nozzle 130 to move in the opposite direction, thereby separating the swing arm 120 and the second screw 180 . This force is the resultant force of the combined action of the spring 140 and the spring 150 .

[0036] In order to obtain the consistency of adjustment on both sides of the double swing arm, that is, when the compression amount of the springs 150 on both sides is adjusted to be consistent, the separation force of the suction nozzles 130 on both sides is the same when separating. It can be understood that when the compression amount of the springs 150 on both sides is adjusted to be the same, when the suction nozzles 130 on both sides are at the same symmetrical distance from the central axis when separating, the force of the suction nozzles 130 on both sides is the same.

[0037] In the actual assembly process, due to factors such as processing tolerance and deformation of the spring 140, the position of the suction nozzle 130 is not at a symmetrical position of the two suction nozzles 130 when the spring 150 and the second screw 180 are not installed. When the second screw 180 and the second nut 190 cooperate to adjust the suction nozzle 130 on the swing arm 120 to a symmetrical position of the two suction nozzles 130, the compression amount of the spring 150 is different when the separation force of the two suction nozzles 130 is required to be the same. Therefore, the consistency of the force when the two suction nozzles 130 suck the wafer core particles cannot be guaranteed.

[0038] In order to ensure the consistency of the force applied by the two suction nozzles 130 of the swing arm suction nozzle mechanism of the double swing arm structure when sucking wafer core particles, it is necessary to adjust the spring 140 to compensate for the processing tolerance or deformation of the spring 140, ensure that when the two suction nozzles 130 are in symmetrical positions and the separation forces of the two suction nozzles 130 are the same, the compression amount of the spring 150 is also the same, thereby ensuring the consistency of the force applied by the two suction nozzles 130 when sucking wafer core particles.

[0039] It should be explained that the swing arm 200 to be adjusted is in a state where the swing arm suction nozzle mechanism is not assembled with the spring 150 , the second screw 180 and the second nut 190 .

[0040] Example 1 This embodiment provides a swing arm spring piece adjustment method.

[0041] Reference Figure 3 A swing arm spring piece adjustment method according to a first aspect of an embodiment of the present invention comprises the following steps: S1: Install the swing arm standard block on the measuring station and measure the swing arm standard block to define the swing arm 120 standard symmetrical position , and set the swing arm 120 position qualified range to .

[0042] It can be understood that the structural design of the swing arm standard block and the installation method of the swing arm 120 are the same as those of the swing arm 200 to be adjusted. The swing arm standard block is a metal block as a whole, which is not easy to deform. The swing arm standard block is processed with high precision to ensure the accuracy of the measuring surface, thereby facilitating the acquisition of the accurate standard symmetrical position of the swing arm. , thereby making the standard for subsequent adjustment of the swing arm 120 more accurate.

[0043] S2: Install the swing arm 200 to be adjusted on the measuring station and set the single step spacing of the motor 260 , measure and record the effective movement distance of multiple motors 260 And the corresponding deformation of the spring , and obtain the adjustment deformation table.

[0044] It can be understood that the swing arm 200 to be adjusted is used to measure the effective movement distances of multiple motors 260 and the corresponding deformation amounts of the springs, and an adjustment deformation table is summarized, so that the data in the adjustment deformation table can provide accurate theoretical adjustment data for subsequent adjustment of the swing arm 200 to be adjusted, thereby facilitating accurate adjustment of the springs 140 and, further, reducing the probability of adjustment errors.

[0045] S3: Install the next swing arm 200 to be adjusted on the measuring station, and first measure the position of the swing arm 120 of the swing arm 200 to be adjusted ,judge Is it in within the range.

[0046] S4: If Not Available If the range is within the range, the deformation of the spring that needs to be adjusted is calculated. , find the corresponding spring deformation range in the adjustment deformation table and calculate the distance that the motor 260 needs to move for adjustment , motor 260 movement To adjust the spring piece 140 .

[0047] It is understood that the position of the swing arm 120 of the swing arm 200 to be adjusted is measured. After calculating the deformation of the spring 140 to be adjusted, the corresponding spring deformation interval can be found in the adjustment deformation table more accurately, and then the distance that the motor 260 needs to move is calculated according to the two end points of the corresponding spring deformation interval in the adjustment deformation table. Therefore, the spring piece 140 can be accurately adjusted, which is beneficial to improve the adjustment efficiency.

[0048] S5: Re-measure the position of the swing arm 120 of the swing arm 200 to be adjusted after adjusting the spring piece 140 ,judge Is it in Within the range, if Not Available Repeat step S4 until exist Within the range, the next swing arm 120 is adjusted.

[0049] It is understandable that the position of the swing arm 120 of the swing arm 200 to be adjusted after re-measuring the adjustment of the spring piece 140 , which is helpful to confirm the adjustment effect and make the adjustment quality better. If it is still unqualified after adjustment, repeat step S4 to adjust, thereby ensuring that the adjustment is qualified. Furthermore, the present invention can adjust the spring 140 to compensate for the processing tolerance or deformation of the spring 140, ensure that when the two suction nozzles 130 are in symmetrical positions and the separation forces of the two suction nozzles 130 are the same, the compression amount of the spring 150 is also the same, and ensure the consistency of the force when the two suction nozzles 130 suck the wafer core particles.

[0050] In some specific embodiments, the effective movement distance of the plurality of motors 260 is measured and recorded. And the corresponding shrapnel deformation , and obtain the adjustment deformation table, including the following steps: set up The number of steps that the motor 260 drives the adjusting block 250 to push the swing arm 120; is the effective movement distance of the motor 260, ; The position of the adjusting block 250 when the adjusting block 250 does not contact the swing arm 120; The position of the adjusting block 250 when the motor 260 drives the adjusting block 250 to move to the position of contacting the swing arm 120; To adjust the block 250 from The effective movement distance of the swing arm 120 pushed by the adjustment block 250 The displacement of The displacement of the step is ; For passing After that, the adjustment block 250 returns The position of the swing arm 120; For passing The deformation of the shrapnel after ; The motor 260 drives the adjustment block 250 to push the swing arm 120, and the measurement steps are 0 to Swing arm 120 position to , and calculate the deformation of the spring corresponding to each different step number , and obtain the adjustment deformation table.

[0051] It is understandable that the motor 260 drives the adjustment block 250 to push the swing arm 120 to move the effective movement distance of different steps, and each time the swing arm 120 moves the effective movement distance, it returns to the state where the swing arm 120 moves. The position can measure and collect the deformation of the spring after the swing arm 120 is pushed to an effective movement distance of different steps, thereby facilitating the collection of a large amount of spring deformation data as reference data for adjusting the spring 140, thereby making the adjustment of the spring 140 more accurate.

[0052] Further, when the swing arm 120 moves outward, the number of steps is , No. The displacement of the adjusting block 250 is ; When the swing arm 120 moves inward, the number of steps is , No. The displacement of the step is ; The motor 260 drives the adjustment block 250 to push the swing arm 120 outward, and the measurement steps are 0 to Swing arm 120 position to , and calculate the deformation of the spring corresponding to each different step number , and obtain the positive adjustment deformation table shown in Table 1 below; The motor 260 drives the adjustment block 250 to push the swing arm 120 inward, and the measurement steps are 0 to Swing arm 120 position to , and calculate the deformation of the spring corresponding to each different step number , and obtain the reverse adjustment deformation table shown in Table 2 below.

[0053] It can be understood that this embodiment collects positive adjustment data to create a positive adjustment deformation table and collects negative adjustment data to create a negative adjustment deformation table, thereby helping to improve the accuracy of the collected data.

[0054] Table 1 Forward adjustment deformation table

[0055] Table 2 Reverse adjustment deformation table

[0056] Furthermore, the number of steps, effective movement distance and deformation amount of the spring piece in the positive adjustment deformation table and the reverse adjustment deformation table are combined to obtain and save the adjustment deformation table shown in Table 3 below.

[0057] Table 3 Adjustment deformation table

[0058] It can be understood that merging the number of steps, effective movement distance and spring deformation in the forward adjustment deformation table and the reverse adjustment deformation table to obtain and save the adjustment deformation table is conducive to screening important data and making the data type of the adjustment deformation table more concise, thereby facilitating the table lookup operation when adjusting the spring 140.

[0059] In some specific embodiments, the corresponding spring deformation interval is found in the adjustment deformation table and the distance that the motor 260 needs to move is calculated. , including the following steps: Find it from the adjustment deformation table and ,in, , ; According to the formula , the solution can be obtained .

[0060] It can be understood that, assuming that the minimum spacing of the adjustment deformation table is a geometric linear relationship, the formula is obtained using the geometric linear method , and then solve for , thus, the distance that the motor 260 needs to move can be more accurately calculated. , thereby making the adjustment of the spring piece 140 of the present invention more accurate.

[0061] In some specific embodiments, in step S5, The distance that the motor 260 needs to move for the adjustment is , the swing arm 120 position is , deformation of the spring , .

[0062] It is understandable that each time the adjustment steps are repeated, the adjustment deformation table is checked again and the distance that the motor 260 needs to move for adjustment is recalculated, thereby facilitating the accuracy of each adjustment.

[0063] In some specific embodiments, in step S3, when it is determined that exist If the adjustment range is within the range, the next swing arm 120 is adjusted directly, which is helpful to speed up the adjustment efficiency and avoid invalid adjustment operations.

[0064] In some specific embodiments, in step S1, It is the distance between the displacement measuring head 230 and the measuring area above the suction nozzle 130 of the swing arm standard block, so that the measuring position of the displacement measuring head 230 on the swing arm standard block is flat, which is beneficial to improve the measurement accuracy of the displacement measuring head 230.

[0065] The present invention provides a swing arm spring piece adjustment method, which adjusts the two swing arm spring pieces of the swing arm to be measured, and can meet the symmetry of the swing arm 120 when the spring 150, the second screw 180 and the second nut 190 are not installed. The spring 150, the second screw 180 and the second nut 190 can be installed in the later process to obtain good force control and symmetry, and make up for the assembly difference caused by the tolerance of the spring piece 140 in assembly and machining, thereby improving the adjustment quality of the swing arm suction nozzle mechanism. Secondly, because the program is used for automatic measurement and adjustment, it can be quickly calculated and adjusted according to the algorithm, which improves the efficiency of adjustment.

[0066] Example 2 Reference Figure 4 , Figure 5 and Figure 6 A swing arm spring piece adjustment device according to an embodiment of the present invention is used to implement a swing arm spring piece adjustment method according to an embodiment of the present invention. The swing arm spring piece adjustment device includes: The frame 210 has an X direction, a Y direction and a Z direction which are perpendicular to each other; The mounting seat 220 is arranged on the frame 210 and has a measuring station, and the measuring station is used to install the swing arm 200 to be adjusted so that the positioning swing arm 120 swings along the Y direction; The displacement measuring head 230 is arranged on the frame 210 and is located on one side of the mounting seat 220 along the Y direction, and is used to measure the position of the swing arm 120; The adjustment assembly 240 is disposed on the frame 210 and includes an adjustment block 250 and a motor 260 that drives the adjustment block 250 to move along the Y direction. The adjustment block 250 pushes the swing arm 120 to adjust the deformation of the spring piece. A data processing module, used to collect measurement data of the displacement measuring head 230, determine the deformation amount of the spring piece and calculate the adjustment movement distance of the motor 260; The control module is used to receive information from the data processing module and control the motor 260 to adjust the spring piece 140 .

[0067] This embodiment can automatically collect data to construct an adjustment deformation table by setting up a mounting frame 300, a displacement measuring head 230, an adjustment component 240, a data processing module and a control module, and then automatically calculate the adjustment movement distance of the motor 260 during adjustment based on the adjustment deformation table, so that the swing arm spring clip adjustment device can automatically adjust the spring clip 140 to compensate for the processing tolerance or deformation of the spring clip 140, ensure that when the two suction nozzles 130 are in symmetrical positions and the separation forces of the two suction nozzles 130 are the same, the compression amount of the spring 150 is also the same, and the consistency of the force when the two suction nozzles 130 suck the wafer core particles is ensured.

[0068] In some specific embodiments, the adjustment block 250 has a first opening 270 on one side along the X direction, and the two side walls of the first opening 270 along the Y direction respectively abut against the swing arm 200 to be adjusted to push the swing arm 200 to be adjusted in the positive and negative directions of the Y direction, so that the adjustment block 250 can push the swing arm 200 to be adjusted in the positive and negative directions of the X direction to adjust the spring piece 140.

[0069] In some specific embodiments, a position adjustment component is provided on the frame 210, and the position adjustment component includes a lifting frame 280, a translation frame 290 and a mounting frame 300. The lifting frame 280 is connected to the frame 210 in an up-and-down sliding manner. A Z fine-tuning knob 310 is provided between the frame 210 and the lifting frame 280. The Z fine-tuning knob 310 is used to fine-tune the height of the lifting frame 280. The translation frame 290 is slidably provided on the lifting frame 280 along the X direction. An X fine-tuning knob 320 is provided between the translation frame 290 and the lifting frame 280. The X fine-tuning knob 320 is used to fine-tune the height of the lifting frame 280. The knob 320 is used to fine-tune the position of the translation frame 290 along the X direction. The mounting frame 300 is slidably arranged on the translation frame 290 along the Y direction. The adjustment block 250 is arranged on the mounting frame 300. The motor 260 is arranged on the translation frame 290. The motor 260 drives the mounting frame 300 to move so as to drive the adjustment block 250 to move. Thus, the X-direction position and the Z-direction position of the adjustment block 250 can be fine-tuned by using the X-fine-tuning knob 320 and the Z-fine-tuning knob 310, so that the adjustment block 250 can accurately align the swing arm 120.

[0070] Furthermore, a screw rod is rotatably provided on the translation frame 290 , and the screw rod is threadedly connected to the mounting frame 300 . The motor 260 drives the screw rod to rotate, thereby facilitating transmission between the motor 260 and the mounting frame 300 .

[0071] In the description of this specification, the description with reference to the terms "one embodiment, some embodiments, illustrative embodiments, examples, specific examples or some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0072] The terms "first, second, third, fourth", etc. (if any) in the specification and claims of this application and the above drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments described herein can be implemented in an order other than that shown or described herein.

[0073] It should also be noted that in the description of this specification, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

[0074] In addition, the terms "comprises" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or apparatus that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may also include other steps or units not explicitly listed or inherent to these processes, methods, products or apparatuses.

[0075] Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes the element.

[0076] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A swing arm spring piece adjustment method, characterized in that: The steps include: S1: Install the swing arm standard block on the measuring station and measure the swing arm standard block to define the standard symmetrical position of the swing arm , and set the swing arm position qualified range to ; S2: Install the swing arm to be adjusted on the measuring station and set the single step spacing of the motor , measure and record the effective movement distance of multiple motors And the corresponding deformation of the spring , get the adjustment deformation table; S3: Install the next swing arm to be adjusted on the measuring station and measure the swing arm position of the swing arm to be adjusted first. ,judge Is it in within the scope; S4: If Not Available If the range is within the range, the deformation of the spring that needs to be adjusted is calculated. , find the corresponding spring deformation range in the adjustment deformation table and calculate the distance the motor needs to move , motor movement To adjust the shrapnel; S5: Re-measure the swing arm position of the swing arm to be adjusted after adjusting the spring piece ,judge Is it in Within the range, if Not Available Repeat step S4 until exist Within the range, adjust the next swing arm.

2. A swing arm spring piece adjustment method according to claim 1, characterized in that: The effective movement distance of multiple motors is measured and recorded And the corresponding deformation of the spring , and obtain the adjustment deformation table, including the following steps: set up The number of steps that the motor drives the adjustment block to push the swing arm; is the effective movement distance of the motor, ; To adjust the position of the block when the block does not contact the swing arm; The position of the adjusting block when the motor drives the adjusting block to move to the position contacting the swing arm; To adjust the block from The effective movement distance from the position to the adjustment block pushing the swing arm The displacement of The displacement of the step is ; For passing After that, the adjustment block returns The position of the swing arm; For passing The deformation of the shrapnel after ; The motor drives the adjustment block to push the swing arm, and the measurement steps are from 0 to Swing arm position to , and calculate the deformation of the spring corresponding to each different step number , and obtain the adjustment deformation table.

3. A swing arm spring piece adjustment method according to claim 1, characterized in that: When the swing arm moves outward, the number of steps is , No. The displacement of the adjustment block is ; When the swing arm moves inward, the number of steps is , No. The displacement of the step is ; The motor drives the adjustment block to push the swing arm outwards, and the measurement steps are from 0 to Swing arm position to , and calculate the deformation of the spring corresponding to each different step number , get the positive adjustment deformation table; The motor drives the adjustment block to push the swing arm inward, and the measurement steps are 0 to Swing arm position to , and calculate the deformation of the spring corresponding to each different step number , and obtain the reverse adjustment deformation table.

4. A swing arm spring piece adjustment method according to claim 3, characterized in that: The number of steps, effective movement distance and deformation amount of the spring piece in the positive adjustment deformation table and the reverse adjustment deformation table are combined to obtain and save the adjustment deformation table.

5. A swing arm spring piece adjustment method according to claim 1, characterized in that: The method of finding the corresponding spring deformation interval in the adjustment deformation table and calculating the distance the motor needs to move , including the following steps: Find it from the adjustment deformation table and ,in, , ; According to the formula , the solution can be obtained .

6. A swing arm spring piece adjustment method according to claim 5, characterized in that: In step S5, The distance that the motor needs to move for the second adjustment is , the swing arm position is , deformation of the spring , .

7. A swing arm spring piece adjustment method according to claim 1, characterized in that: In step S3, when it is determined that exist If it is within the range, the next swing arm will be adjusted directly.

8. A swing arm spring piece adjustment method according to claim 1, characterized in that: In the step S1, It is the distance between the displacement measuring head and the measuring area above the suction nozzle of the swing arm standard block.

9. A swing arm spring piece adjustment device, used for implementing a swing arm spring piece adjustment method according to any one of claims 1 to 8, characterized in that: include: The frame has an X direction, a Y direction and a Z direction which are perpendicular to each other; A mounting seat, arranged on the frame, having a measuring station, wherein the measuring station is used to install the swing arm to be adjusted so that the positioning swing arm swings along the Y direction; A displacement measuring head is arranged on the frame and located on one side of the mounting seat along the Y direction, and is used to measure the position of the swing arm; An adjustment component is arranged on the frame, comprising an adjustment block and a motor driving the adjustment block to move along the Y direction, wherein the adjustment block pushes the swing arm to adjust the deformation amount of the spring piece; A data processing module, used for collecting measurement data of the displacement measuring head, determining the deformation amount of the spring piece and calculating the adjustment movement distance of the motor; The control module is used to receive the information of the data processing module and control the motor to adjust the spring.

10. The swing arm spring piece adjustment device according to claim 9, characterized in that: The adjusting block has a first opening on one side along the X direction, and two side walls of the first opening along the Y direction respectively abut against the swing arm to be adjusted to push the swing arm to be adjusted in the positive and negative directions of the Y direction.

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