A full-band anti-shake device, system and method

Abstract

The present invention discloses a full-frequency anti-vibration device, system and method, belonging to the technical field of electromechanical servo systems. The device mainly includes a multi-stage vibration damping transmission shaft system and an electromagnetic-thermal coupling field regulation module. The multi-stage vibration damping transmission shaft system includes a magnetorheological fluid layer, a piezoelectric anti-vibration power generation layer and an eddy current damping layer stacked on the rotating shaft in sequence. The magnetorheological fluid layer is used for low-frequency suppression, the piezoelectric anti-vibration power generation layer is used for intermediate-frequency absorption, and the eddy current damping layer is used for high-frequency braking. The electromagnetic-thermal coupling field regulation module realizes dual-magnetic-circuit decoupling through the magnetic resistance network analysis method, and provides different types of currents for the magnetic field array according to the high or low frequency of the vibration signal. The system captures the electric energy generated in the multi-stage vibration damping transmission shaft system and uses it for low-temperature self-heating and power supply for the electromagnetic-thermal coupling field regulation module. The present invention realizes full-frequency vibration suppression and energy closed-loop utilization through a multi-stage energy-consuming structure and an electromagnetic-thermal cooperation mechanism.

Description

Technical Field

[0001] The present invention relates to the technical field of electromechanical servo systems, and particularly to a full-band anti-vibration device, system and method, which are applicable to high-precision motion control fields such as industrial robots, numerical control machine tools, aerospace equipment, precision instruments, etc. Background Technique

[0002] For high-performance electromechanical servo systems in fields such as robots and machine tools, full-band vibration suppression has become a common problem restricting the improvement of equipment performance. For example, the spindle system of a numerical control machine tool faces dual interferences of rotational vibration from 20 Hz to 300 Hz and tool chatter from 800 Hz to 1500 Hz. The attenuation rate of traditional hydraulic dampers in the frequency band greater than 800 Hz is less than 50%, resulting in a relatively large surface roughness of finish machining. Insufficient full-band vibration suppression ability of the system will lead to deviation of the motion trajectory and lag in the dynamic response of the servo drive unit, thus causing problems such as instability of pose control and degradation of the system robustness under multi-physical field coupling interference, seriously restricting the strict requirements for sub-millimeter-level motion accuracy in the high-end equipment manufacturing field.

[0003] The main factors causing jitter in electromechanical servo systems are as follows:

[0004] 1) The dynamic response characteristics of the servo drive unit are mismatched with the load inertia.

[0005] 2) The problem of mechanical impedance mismatch in the transmission chain: For example, although the planetary roller screw drive system has high rigidity characteristics, its periodic transmission error (single-turn cumulative error > 40 μm) and broadband vibration caused by meshing impact (the energy ratio in the frequency band of 200 Hz - 2 KHz exceeds 30%) will form multi-modal resonance through mechanical structure transmission.

[0006] 3) Existing magnetorheological fluids and eddy current damping do not consider the large amount of heat generated during operation. If these heats cannot be effectively controlled and utilized, it will not only cause energy waste, but also affect the performance and lifespan of the system in high and low temperature environments.

[0007] Currently, magnetorheological fluid, piezoelectric, and eddy current hierarchical vibration control structures have been widely studied and applied, with relatively high maturity. However, the existing technologies have the following areas to be improved in terms of multi-physical field coupling, frequency band coverage, and energy recycling:

[0008] 1) Although the traditional mechanical limit scheme can improve the low-frequency stiffness, it will cause a sudden change in the stiffness distribution of the transmission chain, triggering a resonance amplification effect in the medium and high frequencies. Especially for high-dynamic robots under sinusoidal excitation, the amplitude of the end significantly increases and the positioning accuracy deteriorates;

[0009] 2) Separate damping technologies such as passive rubber shock absorbers and hydraulic buffers, and active magnetorheological fluids, eddy current damping, etc. can only cover a narrow frequency band, and the damping coefficient will decay due to thermal conditions and other problems under high-speed commutation conditions;

[0010] 3) Existing active electromagnetic damping technologies have the problem of high cost of high-frequency magnetic field modulation, such as excessive EMI radiation, sharp increase in iron loss, eddy current heat accumulation, and heavy heat dissipation burden, resulting in an increase in the volume of the joint module and a decrease in power density. At the same time, existing energy recovery solutions have contradictions such as narrow frequency band coverage, low conversion efficiency, and thermal management conflicts. For example, piezoelectric power generation technology cannot capture high-frequency vibration energy, and electromagnetic energy recovery technology is limited by the skin effect in energy conversion efficiency.

[0011] 4) Under high-dynamic working conditions, the strong coupling effect of mechanical vibration - electromagnetic field - thermal field leads to a decrease in system performance. Mechanical vibration causes time-varying stiffness of the transmission chain, resulting in an increase in servo current harmonics, which further aggravates copper loss and iron loss, causes temperature rise, and material expansion changes the meshing clearance, further increasing the vibration amplitude. For example, 90% of the vibration kinetic energy of a robot joint is dissipated as waste heat through damping. The existing thermal management solutions are inefficient, resulting in a fast temperature rise rate, and the active cooling system will consume a large amount of energy, exacerbating energy waste.

[0012] From the above analysis, it can be seen that the existing technologies cannot meet the core requirements of high-precision, high-dynamic, and high-energy-efficiency robot servo systems. Summary of the Invention

[0013] The present invention aims to systematically solve technical bottlenecks such as continuous stiffness regulation for full-frequency vibration suppression, collaborative management of electromagnetic-thermal coupling fields, systematic recovery and storage of vibration energy for standby electric energy to provide heating under low-temperature conditions. By establishing a full-frequency stiffness dynamic compensation mechanism, breaking through electromagnetic damping technology, and developing a broadband composite energy capture structure, high-precision, high-dynamic, and high-energy-efficiency servo control is achieved, promoting the performance leap of high-end equipment such as high-end machine tools, in-orbit aerospace machinery, and robots.

[0014] The object of the present invention is achieved through the following technical solutions:

[0015] In the first aspect, a full-frequency anti-shake device is provided, including:

[0016] A multi-stage vibration damping transmission shaft system, including a magnetorheological fluid layer, a piezoelectric anti-vibration power generation layer, and an eddy current damping layer sequentially stacked on the rotating shaft; the magnetorheological fluid layer is used for low-frequency suppression, the piezoelectric anti-vibration power generation layer is used for intermediate-frequency absorption, and the eddy current damping layer is used for high-frequency braking;

[0017] The electromagnetic-thermal coupling field regulation module is connected to the multi-stage vibration damping transmission shaft system through a magnetic field array; the electromagnetic-thermal coupling field regulation module is used to detect vibration signals and provide different types of currents for the magnetic field array according to the frequency of the vibration signals; the providing different types of currents for the magnetic field array according to the frequency of the vibration signals includes:

[0018] Realize dual magnetic circuit decoupling through magnetoresistance network analysis method. When the vibration signal is low frequency, provide stable direct current for the magnetic field array, and the main magnetic circuit generates a steady magnetic field penetrating the magnetorheological fluid layer; when the vibration signal is high frequency, provide alternating current for the magnetic field array, and the auxiliary magnetic circuit generates an alternating magnetic field penetrating into the eddy current vibration damping layer.

[0019] In some embodiments, the magnetorheological fluid layer sequentially includes a protective film, a magnetorheological fluid working cavity, and a magnetic conductive ring from inside to outside. The magnetorheological fluid working cavity is spiral, and the magnetic conductive ring adopts a pole tooth structure.

[0020] In some embodiments, the material of the magnetic conductive ring is 1J22 permalloy.

[0021] In some embodiments, the piezoelectric vibration prevention and power generation layer includes a piezoelectric fiber layer, an electrode layer, a magnetic shielding layer, and a thermoelectric module layer connected in sequence. The thermoelectric module layer is connected to the eddy current vibration damping layer.

[0022] In some embodiments, the material of the piezoelectric fiber layer is PZT-5H piezoelectric fiber, the electrode layer adopts a three-dimensional interdigital electrode, and the magnetic shielding layer adopts a multi-layer composite structure; the thermoelectric module layer is a double-layer structure, where the first layer structure is a heat conduction layer, the heat conduction layer is connected to the eddy current vibration damping layer, and the second layer structure is a power generation layer.

[0023] In some embodiments, the heat conduction layer adopts aluminum nitride ceramic material, and the power generation layer adopts superlattice thermocouple.

[0024] In some embodiments, the eddy current vibration damping layer includes a brake disc. The brake disc adopts a light metal material and is provided with wavy stripe grooves axially.

[0025] In a second aspect, a full-frequency anti-jitter system composed of the first aspect is provided, further including a composite energy recovery module. The composite energy recovery module is used to capture the electric energy generated in the multi-stage vibration damping transmission shaft system. The electric energy captured by the composite energy recovery module is used for low-temperature self-heating and powering the electromagnetic-thermal coupling field regulation module.

[0026] In some embodiments, the heat energy generated by the electromagnetic-thermal coupling field regulation module is transmitted to the piezoelectric vibration prevention and power generation layer.

[0027] Thirdly, a full-band anti-vibration method based on the first aspect is provided, and the method includes:

[0028] S1. The electromagnetic-thermal coupling field regulation module detects the vibration of the load;

[0029] S2. The electromagnetic-thermal coupling field regulation module provides a stable direct current for the magnetic field array, and the main magnetic circuit generates a steady magnetic field penetrating the magnetorheological fluid layer, and suppresses the low-frequency vibration signal through the magnetorheological fluid layer;

[0030] S3. Absorb the residual medium and high-frequency vibration signals through the piezoelectric vibration-proof power generation layer;

[0031] S4. The electromagnetic-thermal coupling field regulation module provides an alternating current for the magnetic field array, and the auxiliary magnetic circuit generates an alternating magnetic field penetrating into the eddy current vibration damping layer, and absorbs the high-frequency vibration signal through the eddy current vibration damping layer.

[0032] It should be further noted that the technical features corresponding to the above embodiments can be combined or replaced with each other without conflict to form a new technical solution.

[0033] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0034] 1. Full-band vibration suppression ability

[0035] The device of the present invention realizes the full-band coverage suppression from low-frequency vibration to high-frequency resonance and transient impact through a multi-stage vibration damping structure and an electromagnetic-thermal collaborative mechanism, significantly reduces the vibration amplitude of high-precision equipment (such as robot joints), and improves the motion accuracy and stability.

[0036] 2. Energy recovery and self-sustaining power supply

[0037] The system of the present invention converts the vibration mechanical energy and heat energy into electric energy, forms an energy closed-loop utilization system, reduces the dependence on external power supplies, and simultaneously alleviates the energy burden of the heat dissipation system in the traditional solution.

[0038] 3. Electromagnetic-thermal coupling field collaborative optimization

[0039] Through the dynamic modulation of the magnetic field and the directional management of heat, the coupling contradiction between electromagnetic braking and temperature rise is solved, both high-frequency resonance is suppressed, and the mechanical performance degradation caused by heat accumulation is avoided.

[0040] 4. Compact and lightweight design

[0041] Integrate the functions of vibration resistance, energy storage, and thermal management into one, realize the collaboration of multiple physical fields in a limited space, and significantly improve the power density and modular integration degree of robot joints.

[0042] 5. Extreme environment adaptability

[0043] Under extreme working conditions such as wide temperature range, high impact, and vacuum, it can still maintain stable vibration suppression performance and energy recovery ability, meeting the requirements of low-temperature scenarios such as aerospace. Description of the Drawings

[0044] Figure 1 Schematic structural diagram of the multi-stage vibration damping drive shaft system shown in the embodiments of the present invention;

[0045] Figure 2 Schematic structural diagram of the magnetorheological fluid layer shown in the embodiments of the present invention;

[0046] Figure 3 Schematic structural diagram of the piezoelectric vibration suppression and power generation layer shown in the embodiments of the present invention;

[0047] Figure 4 Schematic structural diagram of the eddy current vibration damping layer shown in the embodiments of the present invention;

[0048] In the figure: 1 - housing; 2 - magnetic field array; 3 - rotating shaft; 4 - magnetorheological fluid layer; 5 - piezoelectric vibration suppression and power generation layer; 6 - eddy current vibration damping layer; 41 - protective film; 42 - magnetorheological fluid working cavity; 43 - magnetic conduction ring; 51 - piezoelectric fiber layer; 52 - electrode layer; 53 - magnetic shielding layer; 54 - thermoelectric module layer; 61 - brake disc; 62 - wavy stripe groove. Detailed Embodiments

[0049] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. The components of the embodiments of the present application described and illustrated herein can be arranged and designed in various different configurations. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0050] It should be noted that all the defects existing in the above prior art solutions are the results obtained by the inventor through practice and careful research. Therefore, the discovery process of the above problems and the solutions proposed by the embodiments of the present application below for the above problems should be the contributions made by the inventor to the present application during the invention creation process, and should not be understood as the technical content known to those skilled in the art.

[0051] In an exemplary embodiment, a full-frequency anti-jitter device is provided. For the reducer of the electro-mechanical servo system, the working logic of vibration suppression is: load jitter → low-frequency attenuation → residual medium and high frequencies → piezoelectric absorption and dissipation → remaining impact → eddy current damping absorption → stable output. Figure 1It is a schematic diagram of an output shaft structure. As can be seen from the figure, the multi-stage vibration damping transmission shaft system includes a stationary housing 1, in which a multi-stage magnetic field array 2 is provided. On the dynamic rotating shaft 3, there are three layers of anti-vibration structures, including a magnetorheological fluid layer 4, a piezoelectric anti-vibration power generation layer 5, and an eddy current damping layer 6, which are successively stacked on the rotating shaft. Among them, the magnetorheological fluid layer 4 is used for low-frequency suppression, the piezoelectric anti-vibration power generation layer 5 is used for intermediate-frequency absorption, and the eddy current damping layer 6 is used for high-frequency braking.

[0052] According to the mechanical impedance matching theory, the dynamic transfer equation of the multi-stage vibration damping unit is established:

[0053] , where Z MR describes the low-frequency damping characteristics of the magnetorheological fluid layer 4, and Z PZT represents the intermediate-frequency impedance matching in the piezoelectric anti-vibration power generation layer 5, and Z Eddy represents the high-frequency braking torque for constructing the eddy current damping layer 6. The 0Hz - 2000Hz full-band stiffness continuous compensation is realized through a third-order Butterworth filter network.

[0054] The design of each hierarchical structure is described in detail below.

[0055] Referring to Figure 2 , the magnetorheological fluid layer 4 includes a protective film 41 (inner layer), a spiral magnetorheological fluid working chamber 42 (middle layer), and a magnetic conduction ring 43 (outer layer). The protective film 41 plays a role of protection and buffering between the spiral magnetorheological fluid working chamber 42 and the rotating shaft 3, and the magnetic conduction ring 43 can transmit a stable magnetic field to the spiral magnetorheological fluid working chamber 42.

[0056] Furthermore, the protective film 41 is coated on the rotating shaft 3, and a material such as a nano-aluminum oxide ceramic coating can be used, which plays a role of mechanical isolation, avoiding direct contact between the magnetorheological fluid and the rotating shaft 3, and preventing wear of the magnetorheological fluid pipeline caused by friction; another is to play a role of thermal buffering, slowing down the temperature conduction between the rotating shaft 3 and the magnetorheological fluid layer 4.

[0057] The spiral magnetorheological fluid working chamber 42 can extend the flow path. Compared with the straight groove structure, its spiral path increases the effective shear area by several times, improving the low-frequency damping force; in addition, it improves the magnetic field strengthening efficiency: the spiral direction is orthogonally arranged with the direction of the array magnetic field, increasing the cutting length of the magnetic induction lines, and significantly improving the magnetic energy utilization rate; it improves the response sensitivity, and the spiral flow path shortens the formation time of the magnetorheological fluid particle magnetization chain, with a higher dynamic response bandwidth.

[0058] The magnetic ring 43 can be made of, for example, 1J22 Permalloy formed by powder metallurgy sintering, and a plurality of groups (for example, 12 groups) of radial magnetic poles are provided on the inner wall to make the magnetic field uniform. The pole tooth structure is adopted to make the magnetic field strength at the center of the magnetorheological fluid working chamber 42 reach several times higher than that of the traditional annular magnetic conductor; in addition, the magnetic thermal decoupling can be optimized, the hysteresis loss can be reduced, and the viscosity attenuation of the magnetorheological fluid caused by temperature rise can be avoided.

[0059] The effects brought by the magnetorheological fluid layer 4 design are as follows:

[0060] 1. Low frequency vibration suppression mechanism

[0061] For example, when low-frequency vibration of 0 Hz-200 Hz is transmitted, the magnetorheological fluid forms a solid-state chain structure under the magnetic field of the magnetic ring 43, and dissipates energy through viscoplastic deformation. The magnetorheological fluid layer 4 generates a damping force (i.e., a force that suppresses vibration) F during the vibration process. 阻尼 =τ y A, where τ y is the dynamic yield stress of the magnetorheological fluid, A is the effective shear area, and since the magnetorheological fluid working chamber 42 is spiral, the effective shear area A is greatly increased, making the damping force F 阻尼 Increase, effectively improving the vibration attenuation rate.

[0062] 2. Magnetic field-flow field coupling optimization

[0063] The spiral flow channel and the array magnetic field work together to make the magnetic flux lines distributed in a gradient on the flow channel cross section, generating a directional shear stress gradient and avoiding energy feedback caused by local eddy currents.

[0064] 3. Structural protection and long life

[0065] The protective film 41 effectively reduces the wear of the magnetorheological fluid working chamber and increases the overall lifespan.

[0066] Reference Figure 3 The piezoelectric anti-vibration power generation layer 5 is designed for medium frequency, and converts vibration energy into electrical energy by absorbing it. It is mainly composed of a piezoelectric fiber layer 51, an electrode layer 52, a magnetic shielding layer 53, and a thermoelectric module layer 54. The magnetic shielding layer 53 is used between the magnetorheological fluid layer 4 and the eddy current vibration reduction layer 6 for magnetic protection. The thermoelectric module layer 54 and the copper disk of the eddy current vibration reduction layer 6 are in direct contact with each other for heat conduction, and the heat is converted into electrical energy. The piezoelectric power generation and thermal power generation are stored, and the heater can be powered in a low temperature state to ensure that the system can work reliably in a low temperature environment.

[0067] Furthermore, the piezoelectric fiber layer 51 converts mechanical vibration energy into electrical energy through the inverse piezoelectric effect, and at the same time applies a reverse electric field to suppress residual vibration. For example, PZT-5H piezoelectric fibers can be used and wound around the surface of the magnetic conductive ring 43 to form a strain acquisition network. The electrode layer adopts a three-dimensional interdigital electrode, covering the surface of the piezoelectric fiber, maximizing the charge collection area, integrating a high-frequency rectification circuit, converting the alternating current output by the piezoelectric fiber into direct current, and converging the electrical energy with the thermoelectric module layer 54 to the controller for storage. The magnetic shielding layer 53 adopts a multi-layer composite structure, such as stainless steel on the outer layer and alloy foil filled on the inner layer, forming a double-stage magnetic isolation. Effectively blocking the magnetic interference between the magnetorheological fluid layer 4 and the eddy current damping layer 6. The thermoelectric module layer 54 is a double-layer structure, the first layer structure is a heat conduction layer, and the second layer structure is a power generation layer. Among them, the first layer is in direct contact with the copper disk of the eddy current damping layer 6 through an aluminum nitride ceramic substrate, and the second layer is an additional power generation unit such as superlattice thermocouples.

[0068] In order to improve the heat conduction ability of the heat conduction layer, it is necessary to reduce the thermal resistance of the heat conduction layer. The ways to reduce the thermal resistance include increasing the effective contact area, reducing the air thermal resistance in the contact gap, and optimizing the heat flow path. In this embodiment, a micro bump array structure is provided on the contact interface between the aluminum nitride ceramic substrate and the copper disk of the eddy current damping layer 6. The micro bump array structure is integrally processed with the aluminum nitride ceramic substrate and is composed of periodically arranged small protrusions (micro bumps), and the size is usually in the micron level, such as a diameter of 10μm - 100μm and a height of 1μm - 10μm. The protrusion shape can be optimized and selected according to the specific process and can be hemispherical, cylindrical or conical. Through the protrusion structure, the effective contact area between the eddy current damping layer 6 and the aluminum nitride ceramic substrate is increased, achieving a reduction in thermal resistance and an improvement in the heat conduction effect of the heat conduction layer.

[0069] Referring to Figure 4 , the eddy current damping layer 6 is designed for high frequencies, and its brake disc 61 uses a light metal such as a shape memory alloy (conductivity 58 MS / m, density 4.5 g / cm³). In order to increase the magnetic induction or the area of cutting the magnetic field, wavy stripe grooves 62 are designed along the axial direction of the brake disc 61. On the one hand, it increases the magnetic conduction area; on the other hand, it increases the heat absorption area, which is beneficial to the thermoelectric module layer in contact with it for heat-sensing power generation.

[0070] Furthermore, compared with the traditional flat disc, the wavy stripe grooves 62 increase the length of the magnetic field cutting path and improve the effective heat dissipation area. The first layer structure of the thermoelectric module layer 54 adopts an aluminum nitride ceramic layer (thermal conductivity 180 W / mK), attached between the shape memory alloy brake disc 61 and the power generation unit of the thermoelectric module layer 54, realizing the directional conduction of the Joule heat generated by the eddy current braking of the heat flow, and conducting it to the power generation layer of the thermoelectric module layer 54 through the aluminum nitride ceramic layer, which is beneficial to the eddy current heat guidance and utilization for power generation.

[0071] Based on the structure of the above multi-stage vibration damping drive shaft system, the vibration transmission path is as follows:

[0072] The vibration energy sequentially passes through the magnetorheological fluid layer 4 (low-frequency suppression), the piezoelectric vibration suppression and power generation layer 5 (medium-frequency absorption), and the eddy current vibration damping layer 6 (high-frequency braking), achieving full-frequency band coverage. And a progressive energy conversion logic of mechanical energy attenuation → electrical energy conversion → heat energy dissipation is formed.

[0073] Furthermore, the electromagnetic-thermal coupling field regulation module is connected to the multi-stage vibration damping drive shaft system through a magnetic field array (such as a Halbach array); the electromagnetic-thermal coupling field regulation module is used to detect vibration signals and provide different types of currents for the magnetic field array according to the frequency of the vibration signals, realizing dual magnetic circuit multiplexing; providing different types of currents for the magnetic field array according to the frequency of the vibration signals to realize dual magnetic circuit multiplexing.

[0074] Specifically, dual magnetic circuit decoupling is achieved through the magnetic resistance network analysis method. Based on the Maxwell stress tensor theory, the magnetic circuit distribution of the Halbach permanent magnet array is designed:

[0075] In the formula, represents the magnetic field strength at a radius of r and an angle of θ in the polar coordinate system, is the reference magnetic field strength, r is the radial distance from a certain point in space to the center, R represents the radius of the magnetic conduction ring, n is the number of pole pairs. In this embodiment, n = 6 corresponds to a 12-pole circumferential arrangement (the value of n can be selected according to the actual situation). Dual magnetic circuit decoupling is achieved through the magnetic resistance network analysis method: the steady magnetic field of the main magnetic circuit penetrates the magnetorheological fluid layer 4, and the alternating magnetic field of the auxiliary magnetic circuit penetrates to the eddy current vibration damping layer 6, improving the magnetic field utilization rate.

[0076] The vibration signal is detected by sensors such as accelerometers and the frequency is judged in the control system, and energy saving is achieved through frequency division control; when it is judged that the vibration signal is low-frequency (such as < 200 Hz), the electromagnetic-thermal coupling field regulation module provides a stable direct current for the magnetic field array 2, so that the magnetic field generates a steady magnetic field acting on the magnetorheological fluid; when it is judged that the vibration signal is high-frequency (such as > 1000 Hz), the electromagnetic-thermal coupling field regulation module provides an alternating current for the magnetic field array 2, so that the magnetic field alternates and further increases the magnetic conduction area in combination with the special wavy stripe grooves 62 on the brake disc 61, cutting the change of the magnetic field and driving eddy current braking.

[0077] In another exemplary embodiment, a full-band anti-shake system is provided, including a multi-stage vibration reduction transmission shaft system, an electromagnetic-thermal coupling field control module and a composite energy recovery module, to construct a three-level collaborative control architecture of "frequency domain decoupling-field collaborative control-energy closed loop", forming a theoretical closed loop from vibration suppression to energy circulation. Specifically, the electromagnetic-thermal coupling field control module realizes the joint control of magnetic and thermal fields through the Halbach magnetic field multiplexing technology. First, the vibration signal is collected by the sensor and the frequency is determined. When the vibration signal is judged to be low frequency (such as <200Hz), the electromagnetic-thermal coupling field control module provides a stable direct current for the magnetic field array 2, so that the magnetic field generates a steady magnetic field, and the steady magnetic field acts on the magnetorheological fluid layer 4 through the magnetic conductive ring 43; the medium frequency signal (200Hz-1000 Hz) enters the piezoelectric anti-vibration power generation layer 5 for piezoelectric power generation; when it is judged that the vibration signal is high frequency (such as> 1000Hz), the electromagnetic-thermal coupling field control module provides alternating current to the magnetic field array 2 to generate an alternating magnetic field, and the alternating magnetic field acts on the eddy current vibration reduction layer 6. The heat energy generated by the eddy current vibration reduction layer 6 is transmitted to the thermoelectric module layer 54 of the piezoelectric anti-vibration power generation layer 5 for power generation. At this point, the multi-stage vibration reduction transmission shaft system converts mechanical vibration and heat energy into electrical energy, and the output electrical energy is recovered by the composite energy recovery module and stored by energy storage capacitors, etc.; the electrical energy stored in the composite energy recovery module is used for self-heating (such as PTC heating) at low temperatures (such as below -20°C), and the excess electrical energy is used to power the electromagnetic-thermal coupling field control module or other systems. In addition, the heat energy generated by the electromagnetic-thermal coupling field control module can also be transmitted to the piezoelectric anti-vibration power generation layer 5 for temperature difference power generation. In this way, by integrating the energy path of vibration mechanical energy → piezoelectric energy + eddy current thermal energy → temperature difference electric energy → energy storage and self-heating functional system, a closed-loop utilization of energy is formed, and an energy redistribution logic chain based on temperature feedback is constructed, reducing dependence on external power supplies and alleviating the energy burden of traditional cooling systems.

[0078] In another exemplary embodiment, based on the same inventive concept as the device, a full-band anti-jitter method is provided, the method comprising:

[0079] S1, electromagnetic-thermal coupling field control module detects load vibration;

[0080] S2, electromagnetic-thermal coupling field control module provides stable DC for the magnetic field array, and the main magnetic circuit generates a steady magnetic field that penetrates the magnetorheological fluid layer, suppressing low-frequency vibration signals through the magnetorheological fluid layer;

[0081] S3, absorbing residual medium and high frequency vibration signals through the piezoelectric anti-vibration power generation layer;

[0082] S4, the electromagnetic-thermal coupling field control module provides alternating current for the magnetic field array, and the auxiliary magnetic circuit generates an alternating magnetic field that penetrates into the eddy current vibration reduction layer, and absorbs high-frequency vibration signals through the eddy current vibration reduction layer.

[0083] Through the multi-level vibration energy dissipation structure and electromagnetic-thermal synergistic mechanism, full-band coverage suppression from low-frequency vibration to high-frequency resonance and transient impact is achieved, which significantly reduces the vibration amplitude and improves motion accuracy and stability.

[0084] The above specific implementation methods are detailed descriptions of the present invention. It cannot be determined that the specific implementation methods of the present invention are limited to these descriptions. For ordinary technicians in the technical field to which the present invention belongs, several simple deductions and substitutions can be made without departing from the concept of the present invention, which should be regarded as belonging to the protection scope of the present invention.

Claims

1. A full-band anti-shake device, characterized in that: include: A multi-stage vibration-damping transmission shaft system, comprising a magnetorheological fluid layer, a piezoelectric vibration-proof power generation layer and an eddy current vibration-damping layer sequentially superimposed on a rotating shaft; the magnetorheological fluid layer is used for low-frequency suppression, the piezoelectric vibration-proof power generation layer is used for medium-frequency absorption, and the eddy current vibration-damping layer is used for high-frequency braking; the magnetorheological fluid layer comprises a protective film, a magnetorheological fluid working chamber and a magnetic conductive ring from the inside to the outside, and the magnetic conductive ring is used to transfer the magnetic field to the magnetorheological fluid working chamber; the piezoelectric vibration-proof power generation layer is used to absorb medium-frequency vibration energy and convert it into electrical energy, and comprises a piezoelectric fiber layer, an electrode layer, a magnetic shielding layer and a thermoelectric module layer sequentially connected, the thermoelectric module layer is connected to the eddy current vibration-damping layer, and the magnetic shielding layer is arranged between the magnetorheological fluid layer and the eddy current vibration-damping layer for magnetic protection; the eddy current vibration-damping layer comprises a brake disc; The electromagnetic-thermal coupling field control module is connected to the multi-stage vibration reduction transmission shaft system through a magnetic field array; the electromagnetic-thermal coupling field control module is used to detect the vibration signal and provide different types of currents to the magnetic field array according to the frequency of the vibration signal; the different types of currents provided to the magnetic field array according to the frequency of the vibration signal include: The dual magnetic circuit decoupling is achieved through the magnetoresistive network analysis method. When the vibration signal is low frequency, a stable direct current is provided to the magnetic field array, and the main magnetic circuit generates a steady magnetic field to penetrate the magnetorheological fluid layer. When the vibration signal is high frequency, an alternating current is provided to the magnetic field array, and the auxiliary magnetic circuit generates an alternating magnetic field to penetrate into the eddy current vibration reduction layer.

2. A full-band anti-shake device according to claim 1, characterized in that: The magnetorheological fluid working chamber is spiral-shaped, and the magnetic conductive ring adopts a pole tooth structure.

3. A full-band anti-shake device according to claim 2, characterized in that: The material of the magnetic conductive ring is 1J22 Permalloy.

4. The full-band anti-shake device according to claim 1, characterized in that: The material of the piezoelectric fiber layer is PZT-5H piezoelectric fiber, the electrode layer adopts a three-dimensional interdigitated electrode, and the magnetic shielding layer adopts a multi-layer composite structure; the thermoelectric module layer is a double-layer structure, wherein the first layer structure is a heat-conducting layer, the heat-conducting layer is connected to the eddy current vibration reduction layer, and the second layer structure is a power generation layer.

5. A full-band anti-shake device according to claim 4, characterized in that: The heat conducting layer is made of aluminum nitride ceramic material, and the power generation layer is made of Superlattice thermocouple.

6. The full-band anti-shake device according to claim 1, characterized in that: The brake disc is made of light metal material and is provided with wave-shaped stripe grooves in the axial direction.

7. A full-band anti-shake system, comprising a full-band anti-shake device according to any one of claims 1 to 6, characterized in that: It also includes a composite energy recovery module, which is used to capture the electrical energy generated in the multi-stage vibration reduction transmission shaft system. The electrical energy captured by the composite energy recovery module is used for low-temperature self-heating and for powering the electromagnetic-thermal coupling field control module.

8. The full-band anti-shake system according to claim 7, characterized in that: The heat energy generated by the electromagnetic-thermal coupling field control module is transmitted to the piezoelectric anti-vibration power generation layer.

9. A full-band anti-shake method, based on a full-band anti-shake device according to any one of claims 1 to 6, characterized in that: The method comprises: S1, electromagnetic-thermal coupling field control module detects load vibration; S2, electromagnetic-thermal coupling field control module provides stable DC for the magnetic field array, and the main magnetic circuit generates a steady magnetic field to penetrate the magnetorheological fluid layer, and suppresses low-frequency vibration signals through the magnetorheological fluid layer; S3, absorbing residual medium and high frequency vibration signals through the piezoelectric anti-vibration power generation layer; S4, the electromagnetic-thermal coupling field control module provides alternating current for the magnetic field array, and the auxiliary magnetic circuit generates an alternating magnetic field that penetrates into the eddy current vibration reduction layer, and absorbs high-frequency vibration signals through the eddy current vibration reduction layer.

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