Ultra-high Vacuum Isolation Transfer Valve for Semiconductor CVD Equipment

Abstract

The present invention discloses an ultra-high vacuum isolation transfer valve for semiconductor CVD equipment, which relates to the technical field of vacuum isolation transfer valves. It includes a valve body and a valve plate assembly. A valve port is provided on the surface of the valve body, and the valve plate assembly is arranged at the bottom of the valve body. The valve plate assembly includes a cylinder block, an air inlet port, a hollow piston rod, an electronic valve, a valve plate body, an airbag and a translation sub-plate. The air inlet port is arranged at the bottom of the cylinder block, the electronic valve is embedded at the bottom of the hollow piston rod, and the airbag is embedded inside the side surface of the valve plate body. This ultra-high vacuum isolation transfer valve for semiconductor CVD equipment does not require complex transmission components, can effectively save installation space, is particularly suitable for occasions with compact space, reduces the influence of factors such as gaps and wear in the mechanical transmission process on the movement accuracy, and the overall structure is relatively simple, reducing the friction and wear between mechanical components and lowering the frequency of replacement due to component damage.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum isolation transfer valves, and more specifically to an ultra-high vacuum isolation transfer valve for semiconductor CVD equipment. Background Art

[0002] An ultra-high vacuum isolation transfer valve for semiconductor CVD equipment is a key component used in the semiconductor manufacturing process to achieve chamber pressure conversion and isolation sealing during wafer transfer between adjacent chambers. It mainly consists of a valve body, a driving mechanism, and a valve plate. The movement of the valve plate is controlled by the driving mechanism to open and close the channel between the chambers.

[0003] In the actual use of existing ultra-high vacuum isolation transfer valves, in order to prevent friction between the moving valve plate and the inner wall of the valve body, the movement of the valve plate needs to be connected to the driving mechanism through transmission components such as connecting rods, cams, and gears, so that the valve plate performs an L-shaped movement of first rising and then translating. This ensures that the channel is completely closed while preventing friction between the valve plate and the inner wall of the valve body. However, since the L-shaped movement of the valve plate requires the cooperation of transmission components such as connecting rods, cams, and gears to achieve driving, it requires a certain installation space, and the maintenance process is relatively long, and the maintenance cost is also relatively high. Summary of the Invention

[0004] In view of the deficiencies of the prior art, the present invention provides an ultra-high vacuum isolation transfer valve for semiconductor CVD equipment, which solves the problems raised in the above background art.

[0005] To achieve the above objectives, the present invention is realized through the following technical solutions: An ultra-high vacuum isolation transfer valve for semiconductor CVD equipment includes a valve body and a valve plate assembly. A valve port is provided on the surface of the valve body. The valve plate assembly is arranged at the bottom of the valve body. The valve plate assembly includes a cylinder block, an intake port, a hollow piston rod, an electronic valve, a valve plate body, an airbag, and a translation auxiliary plate. The intake port is provided at the bottom of the cylinder block, and the hollow piston rod passes through the top of the cylinder block. The electronic valve is embedded at the bottom of the hollow piston rod, and the valve plate body is fixed to the top of the hollow piston rod. An airbag is embedded inside the side surface of the valve plate body, and the translation auxiliary plate is connected to the side surface of the airbag.

[0006] Further, the translation auxiliary plate is slidably connected to the valve plate body, and a vulcanized seal is provided on the outer side surface of the translation auxiliary plate.

[0007] Further, the interior of the valve plate body is of a hollow structure, and the airbag is communicated with the hollow piston rod through the valve plate body.

[0008] Further, an exhaust hose is provided on the bottom of the hollow piston rod on one side of the electronic valve, and a three-way valve is connected to the end of the exhaust hose.

[0009] Further, the top of the three-way valve is a first port which is connected to the exhaust hose, the side of the three-way valve is a second port, and the bottom of the three-way valve is a third port.

[0010] Further, an exhaust port is provided on one side of the intake port at the bottom of the cylinder block, and the exhaust port is connected to the third port of the three-way valve.

[0011] Further, a rubber buffer rod is fixed to the bottom inner wall of the cylinder block, and the bottom height of the rubber buffer rod is higher than the top height of the three-way valve.

[0012] Further, the ultra-high vacuum isolation transfer valve includes the following usage steps:

[0013] Step 1: Inject gas into the cylinder block through the intake port, so that the hollow piston rod drives the valve plate body and the translation sub-plate to move upward to the channel closing position. Then, continue to inject gas into the cylinder block, and at the same time, the electronic valve is opened, so that the excess gas passes through the hollow piston rod and the valve plate body and then enters the airbag. The airbag bulges accordingly and pushes the translation sub-plate to translate and closely adhere to the inner wall of the valve body. At this time, the translation sub-plate closes the valve port, and the channel between the chambers is closed.

[0014] Step 2: When it is necessary to open the channel between the chambers, at this time, the first port and the third port of the three-way valve are preferentially opened, while the second port is temporarily closed, so that the gas in the airbag passes through the valve plate body, the hollow piston rod, the exhaust hose, the first port, the third port and then is discharged outward from the exhaust port. At this time, the translation sub-plate contracts and moves back, and then the second port is opened, so that the gas inside the cylinder block passes through the third port and is discharged outward from the exhaust port, thereby realizing that the translation sub-plate first retracts and then the valve plate body drives it to descend.

[0015] The present invention provides an ultra-high vacuum isolation transfer valve for semiconductor CVD equipment, which has the following beneficial effects:

[0016] 1. Compared with the existing method that requires multiple cylinders or complex mechanisms such as connecting rods and cams to realize the L-shaped movement of the valve plate, the ultra-high vacuum isolation transfer valve for semiconductor CVD equipment of the present invention does not require complex transmission components, can effectively save installation space, is particularly suitable for occasions with compact space, and compared with some existing methods relying on mechanical transmission, it reduces the influence of factors such as gaps and wear in the mechanical transmission process on the movement accuracy. Moreover, the overall structure is relatively simple. Due to the absence of complex mechanical transmission mechanisms, the friction and wear between mechanical components are reduced, and the frequency of replacement due to component damage is lowered.

[0017] 2. When the ultra-high vacuum isolation transfer valve for the semiconductor CVD equipment needs to open the channel between the chambers, it controls the three-way valve to first open its first port and third port, so that the gas inside the airbag is preferentially discharged and shrinks, thereby driving the translation sub-plate to shrink and move back. Then, it opens the second port to make the hollow piston rod carry the valve plate body and the translation sub-plate to descend, thus avoiding friction between the translation sub-plate and the inner wall of the valve body when the translation sub-plate remains in the extended state and descends. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 FIG. is a schematic structural diagram of the valve body of the ultra-high vacuum isolation transfer valve for the semiconductor CVD equipment of the present invention;

[0019] Figure 2 FIG. is a schematic structural diagram of the assembled valve plate body - translation sub-plate of the ultra-high vacuum isolation transfer valve for the semiconductor CVD equipment of the present invention;

[0020] Figure 3 FIG. is a schematic structural diagram of the separated valve plate body - translation sub-plate of the ultra-high vacuum isolation transfer valve for the semiconductor CVD equipment of the present invention;

[0021] Figure 4 FIG. is a schematic structural diagram of the back of the translation sub-plate of the ultra-high vacuum isolation transfer valve for the semiconductor CVD equipment of the present invention;

[0022] Figure 5 FIG. is a schematic structural diagram of the internal structure of the cylinder block of the ultra-high vacuum isolation transfer valve for the semiconductor CVD equipment of the present invention;

[0023] Figure 6 FIG. is a schematic structural diagram of the bottom of the cylinder block of the ultra-high vacuum isolation transfer valve for the semiconductor CVD equipment of the present invention.

[0024] In the figure: 1, valve body; 2, valve port; 3, valve plate assembly; 301, cylinder block; 302, intake port; 303, hollow piston rod; 304, solenoid valve; 305, valve plate body; 306, airbag; 307, translation sub-plate; 4, exhaust hose; 5, three-way valve; 6, exhaust port; 7, rubber buffer rod. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0025] The following further describes in detail the embodiments of the present invention in conjunction with the drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0026] As Figures 1 - 6As shown in the figure, the present invention provides a technical solution: an ultra-high vacuum isolation transfer valve for a semiconductor CVD device, which includes a valve body 1 and a valve plate assembly 3. A valve port 2 is provided on the surface of the valve body 1. The valve plate assembly 3 is arranged at the bottom of the valve body 1. The valve plate assembly 3 includes a cylinder block 301, an air inlet port 302, a hollow piston rod 303, an electronic valve 304, a valve plate body 305, an airbag 306 and a translation sub-plate 307. The bottom of the cylinder block 301 is provided with an air inlet port 302, and a hollow piston rod 303 penetrates through the top of the cylinder block 301. An electronic valve 304 is embedded at the bottom of the hollow piston rod 303, and a valve plate body 305 is fixed to the top of the hollow piston rod 303. An airbag 306 is embedded inside the side surface of the valve plate body 305, and a translation sub-plate 307 is connected to the side surface of the airbag 306. The translation sub-plate 307 is slidably connected to the valve plate body 305, and a vulcanized seal is provided on the outer side surface of the translation sub-plate 307. The inside of the valve plate body 305 is of a hollow structure, and the airbag 306 is communicated with the hollow piston rod 303 through the valve plate body 305;

[0027] The specific operation is as follows: Inject gas into the cylinder block 301 through the air inlet port 302. At this time, the electronic valve 304 is closed, so that the hollow piston rod 303 drives the valve plate body 305 and the translation sub-plate 307 to move upward to the channel closing position. Then, continue to inject gas into the cylinder block 301, and at the same time, the electronic valve 304 is opened, so that the excess gas passes through the hollow piston rod 303 and the valve plate body 305 and then enters the airbag 306. The airbag 306 bulges accordingly and pushes the translation sub-plate 307 to translate and closely adhere to the inner wall of the valve body 1. At this time, the translation sub-plate 307 closes the valve port 2, so that the channel between the chambers is closed. A pressure sensor is provided inside the cylinder block 301. When the electronic valve 304 is opened, the injection power is adjusted based on the real-time air pressure inside the cylinder block 301 to ensure that the valve plate body 305 is always in the closed position, preventing the height of the valve plate body 305 from decreasing due to insufficient air pressure inside the cylinder block 301 caused by the gas flowing into the airbag 306. And a vulcanized seal is provided on the side surface of the translation sub-plate 307 to reduce the generation and formation of particles;

[0028] Based on the above description, the present invention integrates the driving for the vertical lifting of the valve plate main body 305 and the translation of the translation sub-plate 307 into a cylinder system. By injecting gas into the interior of the cylinder block 301, the valve plate main body 305 rises vertically. Then, by opening the solenoid valve 304, the excess gas injected subsequently enters the interior of the airbag 306 to make it bulge, thereby pushing the translation sub-plate 307 to close the valve port 2 and closing the channel between the chambers. Compared with the existing method that requires multiple cylinders or complex mechanisms such as connecting rods and cams to achieve the L-shaped movement of the valve plate, this method does not require complex transmission components, can effectively save the installation space, is particularly suitable for occasions with compact space, and compared with some existing methods relying on mechanical transmission, it reduces the influence of factors such as gaps and wear in the mechanical transmission process on the movement accuracy. Moreover, the overall structure is relatively simple. Since there is no complex mechanical transmission mechanism, the friction and wear between mechanical components are reduced, and the frequency of replacement due to component damage is lowered.

[0029] As Figures 1 - 6 shown, at the bottom of the hollow piston rod 303 on one side of the solenoid valve 304, an exhaust hose 4 is provided, and the end of the exhaust hose 4 is connected to a three-way valve 5. The top of the three-way valve 5 is the first port which is connected to the exhaust hose 4, and the side of the three-way valve 5 is the second port, and the bottom of the three-way valve 5 is the third port. At the bottom of the cylinder block 301 on one side of the intake port 302, an exhaust port 6 is provided, and the exhaust port 6 is connected to the third port of the three-way valve 5. At the bottom of the inner wall of the cylinder block 301, a rubber buffer rod 7 is fixed, and the bottom height of the rubber buffer rod 7 is higher than the top height of the three-way valve 5;

[0030] The specific operation is as follows. When the valve plate main body 305 and the translation sub-plate 307 need to descend to open the channel between the chambers, at this time, the first port and the third port of the three-way valve 5 are preferentially opened, while the second port is temporarily closed, and the solenoid valve 304 is closed, so that the gas in the airbag 306 passes through the valve plate main body 305, the hollow piston rod 303, the exhaust hose 4, the first port, the third port and then is discharged outward from the exhaust port 6. At this time, the translation sub-plate 307 retracts;

[0031] Then the second port is opened, so that the gas inside the cylinder block 301 passes through the third port and is discharged outward from the exhaust port 6. Therefore, when the valve plate main body 305 and the translation sub-plate 307 need to descend, the translation sub-plate 307 retracts first and then the valve plate main body 305 carries it down, thereby avoiding friction between the translation sub-plate 307 and the inner wall of the valve body 1 when the translation sub-plate 307 remains extended and descends;

[0032] When the gas inside the cylinder block 301 is discharged, the hollow piston rod 303 descends accordingly, and the rubber buffer rod 7 can limit the descending height of the hollow piston rod 303 to prevent the hollow piston rod 303 from descending excessively and pressing on the three-way valve 5;

[0033] Based on the above description, when the present invention needs to open the passage between the chambers, the three-way valve 5 is controlled to first open its first port and third port, so that the gas inside the airbag 306 is preferentially discharged and contracted, thereby driving the translation sub-plate 307 to contract and move back, and then the second port is opened to make the hollow piston rod 303 carry the valve plate body 305 and the translation sub-plate 307 to descend, thus avoiding friction between the translation sub-plate 307 and the inner wall of the valve body 1 when the translation sub-plate 307 remains in the extended state and descends.

[0034] In summary, for the ultra-high vacuum isolation transfer valve used in the semiconductor CVD equipment, during use, first, gas is injected into the cylinder block 301 through the air inlet port 302. At this time, the solenoid valve 304 is closed, so that the hollow piston rod 303 carries the valve plate body 305 and the translation sub-plate 307 to move upward to the channel closing position. Then, gas is continuously injected into the cylinder block 301, and at the same time, the solenoid valve 304 is opened, so that the excess gas passes through the hollow piston rod 303 and the valve plate body 305 and then enters the airbag 306. The airbag 306 bulges accordingly and pushes the translation sub-plate 307 to translate and closely adhere to the inner wall of the valve body 1. At this time, the translation sub-plate 307 closes the valve port 2, so that the passage between the chambers is closed. A pressure sensor is provided inside the cylinder block 301. When the solenoid valve 304 is opened, the gas injection power is adjusted based on the real-time pressure inside the cylinder block 301 to ensure that the valve plate body 305 is always located at the closing position, preventing the height of the valve plate body 305 from decreasing due to insufficient air pressure inside the cylinder block 301 caused by the gas flowing into the airbag 306.

[0035] When the valve plate body 305 and the translation sub-plate 307 need to descend to open the passage between the chambers, at this time, the first port and the third port of the three-way valve 5 are preferentially opened, while the second port is temporarily closed, and the solenoid valve 304 is closed, so that the gas in the airbag 306 passes through the valve plate body 305, the hollow piston rod 303, the exhaust hose 4, the first port, and the third port and is discharged outward from the exhaust port 6. At this time, the translation sub-plate 307 contracts and moves back.

[0036] Then the second port is opened, so that the gas inside the cylinder block 301 passes through the third port and is discharged outward from the exhaust port 6. Therefore, when the valve plate body 305 and the translation sub-plate 307 need to descend, the translation sub-plate 307 first retracts and then the valve plate body 305 carries it to descend, thus avoiding friction between the translation sub-plate 307 and the inner wall of the valve body 1 when the translation sub-plate 307 remains in the extended state and descends.

[0037] The embodiments of the present invention are given for purposes of illustration and description, and are not exhaustive or limit the invention to the disclosed forms. Many modifications and variations are obvious to those of ordinary skill in the art. The embodiments are chosen and described in order to best explain the principles of the invention and its practical application, and to enable those of ordinary skill in the art to understand the invention so as to design various embodiments with various modifications suitable for a particular purpose.

Claims

1. An ultra-high vacuum isolation transfer valve for semiconductor CVD equipment, comprising a valve body (1) and a valve plate assembly (3), characterized in that: The valve body (1) has a valve port (2) formed on its surface. The valve plate assembly (3) is arranged at the bottom of the valve body (1). The valve plate assembly (3) comprises a cylinder body (301), an air inlet port (302), a hollow piston rod (303), an electronic valve (304), a valve plate body (305), an air bag (306) and a translation sub-plate (307). The bottom of the cylinder body (301) is provided with an air inlet port (302), and the top of the cylinder body (301) is provided with a hollow piston rod (303). The bottom of the hollow piston rod (303) is embedded with an electronic valve (304), and the top of the hollow piston rod (303) is fixed with a valve plate body (305). The side of the valve plate body (305) is embedded with an air bag (306), and the air bag (306) is provided with a plurality of air bags. ) is connected to a translation sub-plate (307) on the side thereof, the interior of the valve plate body (305) is a hollow structure, and the airbag (306) is connected to the hollow piston rod (303) through the valve plate body (305), an exhaust hose (4) is arranged at the bottom of the hollow piston rod (303) on one side of the electronic valve (304), and a three-way valve (5) is connected to the end of the exhaust hose (4), the top of the three-way valve (5) is a first port connected to the exhaust hose (4), the side of the three-way valve (5) is a second port, the bottom of the three-way valve (5) is a third port, the bottom of the cylinder body (301) is provided with an exhaust port (6) on one side of the air inlet port (302), and the exhaust port (6) is connected to the third port of the three-way valve (5), and the following use steps are included: Step 1: injecting gas into the cylinder body (301) through the air inlet port (302), so that the hollow piston rod (303) carries the valve plate body (305) and the translation sub-plate (307) to move upward to the channel closing position, and then continuously injecting gas into the cylinder body (301), while the electronic valve (304) is opened, so that excess gas passes through the hollow piston rod (303) and the valve plate body (305) and enters the airbag (306), and the airbag (306) swells and pushes the translation sub-plate (307) to translate so as to be in close contact with the inner wall of the valve body (1). At this time, the translation sub-plate (307) closes the valve port (2) so that the channel between the chambers is closed; Step 2: When it is necessary to open the passage between the chambers, the first port and the third port of the three-way valve (5) are opened first, while the second port is temporarily closed, so that the gas in the airbag (306) passes through the valve plate body (305), the hollow piston rod (303), the exhaust hose (4), the first port, the third port, and is discharged outward from the exhaust port (6). At this time, the translation sub-plate (307) shrinks and moves back, and then the second port is opened, so that the inside of the cylinder body (301) passes through the third port and is discharged outward from the exhaust port (6), thereby achieving the translation sub-plate (307) first retracting and then the valve plate body (305) carrying it down.

2. The ultra-high vacuum isolation transfer valve for semiconductor CVD equipment according to claim 1, characterized in that: The translation sub-plate (307) is slidably connected to the valve plate main body (305), and a vulcanized sealing member is provided on the outer side surface of the translation sub-plate (307).

3. The ultra-high vacuum isolation transfer valve for semiconductor CVD equipment according to claim 1, characterized in that: A rubber buffer rod (7) is fixed to the bottom of the inner wall of the cylinder body (301), and the bottom height of the rubber buffer rod (7) is higher than the top height of the three-way valve (5).

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