A probe camera module and method for compensating the optical axis offset in a very low temperature environment

Abstract

The present invention provides a probe camera module and method for compensating the optical axis offset in a very low temperature environment, which relates to the technical field of semiconductor detection. The camera module includes an overall framework, a light source, a CCD camera, a first linear expansion unit, a second linear expansion unit, a third linear expansion unit, a first pitch dimension, a first sphere, a second sphere and a third sphere. The probe camera module causes the linear expansion ends of the first linear expansion unit and the second linear expansion unit to increase in size while the temperature changes, so that the first sphere enters the first pitch angle adjustment port, and the third sphere enters the second pitch angle adjustment port, changing the pitch angle of the first pitch dimension to compensate for the optical axis offset amount. Even if there are working condition differences under different machine platforms, it can ensure that the change amount of the position coordinates of the optical axis object plane of the camera module in the three-dimensional space is reduced to about 3#imgabs0#, completing high-precision measurement and solving the problem that the three-dimensional space position of the object plane of the existing probe camera changes greatly under extreme temperature conditions.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor detection, and particularly relates to a probe camera module and method for compensating the optical axis offset in a non-ambient temperature environment. Background Art

[0002] At present, under extreme temperature conditions, the three-dimensional spatial position change of the object surface of a probe camera is usually about 30 or so. For high-precision measurement, this deviation is relatively large and has a great impact on the measurement result. In addition, the slight working condition differences between different inspection machines will also result in poor consistency of the camera module in this index. This means that in practical applications, how to improve the stability and consistency of the probe camera in a non-ambient temperature environment is a problem to be solved. Summary of the Invention

[0003] Therefore, the technical problem to be solved by the present invention is to overcome the defects in the prior art, so as to provide a probe camera module and method for compensating the optical axis offset in a non-ambient temperature environment.

[0004] A probe camera module for compensating the optical axis offset in a non-ambient temperature environment includes: an overall frame, a light source, and a CCD camera. The light source and the CCD camera are both arranged on the overall frame. A lens barrel and a first linear expansion and pitching stage are further arranged inside the overall frame. The first linear expansion and pitching stage is arranged below the lens barrel. The first linear expansion and pitching stage includes a main frame, a first linear expansion unit, a second linear expansion unit, a third linear expansion unit, and a first pitching dimension. The first pitching dimension is provided with a first pitching angle adjustment port and a second pitching angle adjustment port. The linear expansion end of the first linear expansion unit is arranged on the main frame, and the other end of the first linear expansion unit is provided with a first sphere. The first sphere is slidably arranged on the first pitching angle adjustment port, and the diameter of the first sphere is larger than the height of the first pitching angle adjustment port. The linear expansion end of the second linear expansion unit is arranged on the main frame, and the other end of the second linear expansion unit is provided with a second sphere. The second sphere is slidably connected to one end of the third linear expansion unit. The other end of the third linear expansion unit is provided with a third sphere. The third sphere is slidably arranged on the second pitching angle adjustment port, and the diameter of the third sphere is larger than the height of the second pitching angle adjustment port. A first spring is arranged on the first linear expansion unit, a second spring is arranged on the second linear expansion unit, a third spring is arranged on the third linear expansion unit, and a reflector is arranged on the first pitching dimension.

[0005] Further, the first linear expansion unit includes a first linear expansion block and a first telescopic rod. The first linear expansion block is arranged on the main frame, one end of the first telescopic rod is connected to the first linear expansion block, and the first sphere is arranged at the other end of the first telescopic rod.

[0006] Further, the second line expansion unit includes a second line expansion block and a second telescopic rod. The second telescopic rod is parallel to the first telescopic rod. The second line expansion block is arranged on the main frame. One end of the second telescopic rod is connected to the second line expansion block, and the second sphere is arranged at the other end of the second telescopic rod.

[0007] Further, the third line expansion unit includes a third telescopic rod. The third telescopic rod is perpendicular to the second telescopic rod. One end of the third telescopic rod is slidably connected to the second sphere, and the third sphere is arranged at the other end of the third telescopic rod.

[0008] Further, the lens barrel is a low-power lens barrel. The low-power lens barrel is arranged above the first line expansion pitching platform. A high-power lens barrel is also arranged inside the overall frame. The high-power lens barrel is parallel to the low-power lens barrel. A second line expansion pitching platform is arranged below the high-power lens barrel, and a first beam splitter is arranged on the second line expansion pitching platform.

[0009] Further, the camera module further includes a magnification switching device. The magnification switching device is slidably arranged on the overall frame. The magnification switching device is located between the high-power lens barrel and the first beam splitter. The magnification switching device is connected to the driving end of the driving unit. A high-power light transmission port corresponding to the high-power lens barrel and a low-power light transmission port corresponding to the low-power lens barrel are opened on the magnification switching device. The interval distance between the high-power light transmission port and the low-power light transmission port is less than the interval distance between the high-power lens barrel and the low-power lens barrel.

[0010] Further, the driving unit is a pneumatic structure. The driving end of the pneumatic structure is connected to the magnification switching device.

[0011] Further, the camera module further includes a lower cover and an upper cover. The lower cover is connected to one side of the overall frame, and the upper cover is connected to the other side of the overall frame.

[0012] Further, the first beam splitter is a semi-transmissive and semi-reflective mirror.

[0013] The present invention further includes a method for compensating the optical axis offset in a non-constant temperature environment. This method is implemented based on the probe camera module for compensating the optical axis offset in a non-constant temperature environment described in any one of the above. The line expansion ends of the first line expansion unit and the second line expansion unit increase in size while the temperature changes, causing the first sphere to enter the first pitching angle adjustment port. The second sphere moves towards the direction close to the third line expansion unit. The third line expansion unit drives the third sphere to move towards the direction close to the first pitching dimension. The third sphere enters the second pitching angle adjustment port, changing the pitching angle of the first pitching dimension and compensating for the optical axis offset amount.

[0014] The technical solution of the present invention has the following advantages:

[0015] A probe camera module and method for compensating the optical axis offset in a non-constant temperature environment provided by the present invention, while meeting the high-precision technical indicators of the probe camera, ensure that the relative position of the optical axis of the camera module remains consistent under non-constant temperature working conditions, so that the relative position change of the camera module under non-constant temperature working conditions is extremely small. This design not only reduces the design difficulty but also enables the camera module to maintain its accuracy under non-constant temperature. The probe camera module makes the linear expansion ends of the first linear expansion unit and the second linear expansion unit increase in size while the temperature changes, so that the first sphere enters the first pitch angle adjustment port and the third sphere enters the second pitch angle adjustment port, changing the pitch angle of the first pitch dimension and compensating for the optical axis offset. At the same time, taking the spatial position of the optical axis at room temperature as the standard, even if there are differences in working conditions under different machine platforms, the change amount of the position coordinates of the optical axis object plane of the camera module in the three-dimensional space can be reduced to 3 or so to complete high-precision measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0017] Figure 1 It is a schematic plan view of the overall structure of the present invention;

[0018] Figure 2 It is a side view of the overall structure of the present invention;

[0019] Figure 3 It is a schematic plan view of the structure of the first linear expansion pitch platform of the present invention;

[0020] Figure 4 It is a side view of the structure of the first linear expansion pitch platform of the present invention;

[0021] Figure 5 It is a schematic diagram of the structure of the magnification switching device of the present invention;

[0022] Figure 6 It is a schematic diagram of the structure of the first pitch dimension and the main frame of the present invention.

[0023] Description of the reference numerals:

[0024] 1 - Overall framework; 2 - High - power lens barrel; 3 - Light source; 4 - CCD camera; 5 - Magnification switching device; 6 - First linear expansion pitching platform; 7 - Second linear expansion pitching platform; 8 - Lower cover; 9 - Upper cover; 10 - Pneumatic structure; 11 - Reflecting mirror; 12 - First beam splitter; 13 - Second beam splitter; 14 - Third beam splitter; 15 - First light outlet; 16 - Second light outlet; 17 - Third light outlet; 18 - Fourth light outlet; 19 - High - power light - transmitting port; 20 - Low - power light - transmitting port; 21 - Light source incident port; 22 - Light source exit port; 23 - Low - power lens barrel; 24 - First linear expansion block; 25 - Second linear expansion block; 26 - First spring; 27 - First telescopic rod; 28 - First pitching dimension; 29 - Second telescopic rod; 30 - Second spring; 31 - Third telescopic rod; 32 - Third spring; 33 - Main frame. Detailed implementation manners

[0025] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0026] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0027] In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0028] In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0029] Such as Figure 1 、 Figure 3 Figure 4 andFigure 6 A probe camera module for compensating the optical axis offset in a non-constant temperature environment as shown, comprising: an overall frame 1, a light source 3 and a CCD camera 4. The light source 3 and the CCD camera 4 are both arranged on the overall frame 1. A lens barrel and a first linear expansion and pitching platform 6 are further arranged inside the overall frame 1. The first linear expansion and pitching platform 6 is arranged below the lens barrel. The first linear expansion and pitching platform 6 includes a main frame 33, a first linear expansion unit, a second linear expansion unit, a third linear expansion unit and a first pitching dimension 28. A first pitching angle adjustment opening and a second pitching angle adjustment opening are formed on the first pitching dimension 28. The linear expansion end of the first linear expansion unit is arranged on the main frame 33. The other end of the first linear expansion unit is provided with a first sphere. The first sphere is slidably arranged on the first pitching angle adjustment opening. The diameter of the first sphere is greater than the height of the first pitching angle adjustment opening. The linear expansion end of the second linear expansion unit is arranged on the main frame 33. The other end of the second linear expansion unit is provided with a second sphere. The second sphere is slidably connected to one end of the third linear expansion unit. The other end of the third linear expansion unit is provided with a third sphere. The third sphere is slidably arranged on the second pitching angle adjustment opening. The diameter of the third sphere is greater than the height of the second pitching angle adjustment opening. A first spring 26 is arranged on the first linear expansion unit. A second spring 30 is arranged on the second linear expansion unit. A third spring 32 is arranged on the third linear expansion unit. A reflecting mirror 11 is arranged on the first pitching dimension 28.

[0030] The above-mentioned probe camera module for compensating the optical axis offset in a non-constant temperature environment, while meeting the high-precision technical indicators of the probe camera, ensures that the relative position of the optical axis of the camera module is consistent under non-constant temperature working conditions, and makes the relative position change of the camera module extremely small under non-constant temperature working conditions. This design not only reduces the design difficulty but also enables the camera module to maintain its accuracy under non-constant temperature. The probe camera module makes the linear expansion ends of the first linear expansion unit and the second linear expansion unit increase in size simultaneously when the temperature changes, so that the first sphere enters into the first pitching angle adjustment opening, and the third sphere enters into the second pitching angle adjustment opening, changing the pitching angle of the first pitching dimension 28 to compensate for the optical axis offset amount. At the same time, taking the optical axis spatial position at normal temperature as the standard, even if there are differences in working conditions under different machine platforms, it can ensure that the change amount of the position coordinates of the optical axis object plane of the camera module in the three-dimensional space is reduced to 3 or so to complete high-precision measurement.

[0031] Such as Figure 3 and Figure 6As shown, in this embodiment, the first pitch dimension 28 is composed of a base and a pitch platform, wherein the base is mounted on the main frame 33, and the pitch platform is mounted on the base, and the base and the pitch platform are connected by a plurality of seventh springs, so the opening between the base and the pitch platform located on the first sphere movement trajectory is a first pitch angle adjustment opening, and the opening between the base and the pitch platform located on the third sphere movement trajectory is a second pitch angle adjustment opening; the purpose of using the seventh spring to connect the base and the pitch platform is that when the first sphere and the third sphere enter the first pitch dimension 28, the pitch platform has space for pitch angle adjustment, and at the same time, after the first sphere and the third sphere leave the first pitch dimension 28, the pitch platform can also be automatically reset; the first linear expansion unit includes a first linear expansion block 24 and The first telescopic rod 27 and the first linear expansion block 24 are arranged on the main frame 33, one end of the first telescopic rod 27 is connected to the first linear expansion block 24, the first sphere is arranged at the other end of the first telescopic rod 27, the main frame 33 is also provided with a first transverse partition, the first telescopic rod 27 is provided with a first spring 26, the first spring 26 is located between the first linear expansion block 24 and the first transverse partition, when the temperature rises, the size of the first linear expansion block 24 increases, the first telescopic rod 27 causes the first sphere to enter the first pitch angle adjustment port under the effect of the increase in the size of the first linear expansion block 24, at this time the first spring 26 is compressed, when the temperature drops, the size of the first linear expansion block 24 returns to its original state, the first spring 26 releases the pressure and automatically rebounds to drive the first telescopic rod 27 and the first sphere to reset;The second linear expansion unit includes a second linear expansion block 25 and a second telescopic rod 29, the second telescopic rod 29 is parallel to the first telescopic rod 27, the second linear expansion block 25 is arranged on the main frame 33, one end of the second telescopic rod 29 is connected to the second linear expansion block 25, and the second sphere is arranged at the other end of the second telescopic rod 29. The third linear expansion unit includes a third telescopic rod 31, the third telescopic rod 31 is perpendicular to the second telescopic rod 29, one end of the third telescopic rod 31 is slidably connected to the second sphere, and the third sphere is arranged at the other end of the third telescopic rod 31. A second spring 30 is arranged on the second telescopic rod 29, and a third spring 32 is arranged on the third telescopic rod 31. A second transverse partition and a first vertical partition are also arranged on the main frame 33. The first transverse partition is parallel to the second transverse partition, and the first vertical partition is perpendicular to the first transverse partition. The second spring 30 is located between the first transverse partition and the second transverse partition, and the third spring 32 is located at the first transverse partition. Between a vertical partition and the limiting boss on the third telescopic rod 31, when the temperature rises, the size of the second linear expansion block 25 increases, and the second telescopic rod 29 moves the second sphere toward the third telescopic rod 31 under the action of the increase in the size of the second linear expansion block 25, and the second spring 30 is compressed. Since the distances at various locations on the second sphere are not equal, during the movement of the second sphere, the third telescopic rod 31 will gradually drive the third sphere into the second pitch angle adjustment port, and the third spring 32 is compressed to achieve the purpose of adjusting the pitch angle of the pitch platform. When the temperature drops, the size of the second linear expansion block 25 is restored, the second spring 30 releases pressure, the second telescopic rod 29 and the second sphere move away from the third telescopic rod 31 to achieve reset, and at the same time, the third spring 32 also releases pressure, the third telescopic rod 31 drives the third sphere out of the second pitch angle adjustment port, and the third telescopic rod 31 also returns to its original position. ;

[0032] like Figure 1 and Figure 4 As shown, in the present embodiment, the lens barrel is a low-power lens barrel 23, which is arranged above the first linear expansion and pitching platform 6. A high-power lens barrel 2 is also arranged in the overall frame 1, and the high-power lens barrel 2 is parallel to the low-power lens barrel 23. A second linear expansion and pitching platform 7 is arranged below the high-power lens barrel 2. The structural composition and working principle of the second linear expansion and pitching platform 7 are consistent with those of the first linear expansion and pitching platform 6, so they are not described in detail here. A first beam splitter 12 is arranged on the pitch dimension of the second linear expansion and pitching platform 7, and the first beam splitter 12 is a semi-transparent and semi-reflective mirror. The semi-transparent and semi-reflective mirror is the prior art and is also not described in detail here. A second beam splitter 13 is arranged in the high-power lens barrel 2, and a third beam splitter 14 is arranged in the low-power lens barrel 23. The second beam splitter 13 and the third beam splitter 14 are also semi-transparent and semi-reflective mirrors.

[0033] like Figure 1 and Figure 5As shown in the figure, in this embodiment, the camera module further includes a magnification switching device 5. The magnification switching device 5 is slidably disposed on the overall frame 1. The magnification switching device 5 is located between the high-power lens barrel 2 and the first beam splitter 12. The magnification switching device 5 is connected to the driving end of the driving unit. The driving unit is a pneumatic structure 10. The driving end of the pneumatic structure 10 is connected to the magnification switching device 5. The magnification switching device 5 is provided with a high-power light transmissive opening 19 corresponding to the high-power lens barrel 2 and a low-power light transmissive opening 20 corresponding to the low-power lens barrel 23. The spacing distance between the high-power light transmissive opening 19 and the low-power light transmissive opening 20 is smaller than the spacing distance between the high-power lens barrel 2 and the low-power lens barrel 23, ensuring that when the magnification switching device 5 is used, only the optical path of one of the high-power lens barrel 2 or the low-power lens barrel 23 is unobstructed, and the other lens barrel is blocked by the magnification switching device 5, thereby realizing high and low magnification switching.

[0034] As Figures 1 to 3 shown in the figure, in this embodiment, the camera module further includes a lower cover 8 and an upper cover 9. The lower cover 8 is connected to one side of the overall frame 1, and the upper cover 9 is connected to the other side of the overall frame 1. The lower cover 8 and the upper cover 9 protect the interior of the camera module. As Figure 2 shown by the arrow A direction in the figure, which is the heat radiation direction of the camera module, that is, the upper cover 9 is the first heat radiation direction of the camera module. Therefore, the first line expansion block 24 and the second line expansion block 25 are installed on the upper cover 9, facilitating the first line expansion block 24 and the second line expansion block 25 to sense the temperature change in a timely manner, so that the first line expansion block 24 and the second line expansion block 25 change their dimensions in a timely manner.

[0035] As Figure 1 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 6 shown in the figure, the present invention further includes a method for compensating the optical axis offset in a non-constant temperature environment. This method is implemented based on the probe camera module for compensating the optical axis offset in a non-constant temperature environment described in any one of the above. The line expansion ends of the first line expansion unit and the second line expansion unit increase in size while the temperature changes, causing the first sphere to enter the first pitch angle adjustment opening. The second sphere moves towards the direction close to the third line expansion unit. The third line expansion unit drives the third sphere to move towards the direction close to the first pitch dimension 28. The third sphere enters the second pitch angle adjustment opening, changing the pitch angle of the first pitch dimension 28 and compensating the optical axis offset amount;

[0036] Specifically, when the temperature rises, the size of the first linear expansion block 24 increases, and the first telescopic rod 27 causes the first sphere to enter the first pitch angle adjustment port under the effect of the increase in the size of the first linear expansion block 24, thereby changing the pitch angle of the first pitch dimension 28 and compensating for the optical axis offset. At this time, the first spring 26 is compressed, and when the temperature drops, the size of the first linear expansion block 24 returns to its original state, and the first spring 26 releases the pressure and automatically rebounds to drive the first telescopic rod 27 and the first sphere to reset; similarly, when the temperature rises, the size of the second linear expansion block 25 increases, and the second telescopic rod 29 causes the second sphere to move toward the third telescopic rod 31 under the effect of the increase in the size of the second linear expansion block 25, and the second spring 30 is compressed. Since the distances at various locations on the second sphere are not equal, at the first During the movement of the two balls, the third telescopic rod 31 will gradually drive the third ball into the second pitch angle adjustment port, and the third spring 32 will be compressed to achieve the purpose of adjusting the pitch angle of the pitch platform. When the temperature drops, the size of the second linear expansion block 25 is restored, and the second spring 30 releases the pressure. The second telescopic rod 29 and the second ball move away from the third telescopic rod 31 to achieve reset. At the same time, the third spring 32 also releases the pressure, and the third telescopic rod 31 drives the third ball out of the second pitch angle adjustment port, and the third telescopic rod 31 also returns to its original position. Since the structural composition and working principle of the second linear expansion pitch platform 7 are consistent with those of the first linear expansion pitch platform 6, the second linear expansion pitch platform 7 also realizes compensation of the optical axis offset according to the above working process.

[0037] In addition, in the technical solution provided by the present invention, when the camera module is in high-magnification mode, the light path direction is as follows: the light source 3 emits light, which is incident on the second beam splitter 13 through the light source incident port 21, wherein part of the light is horizontally incident on the third beam splitter 14 through the light source exit port 22, and the remaining part of the light is vertically emitted to the first light exit port 15, and the light emitted from the first light exit port 15 is irradiated to the detection target and then reflected back to the second beam splitter 13 through the first light exit port 15, wherein part of the light is vertically reflected to the light source 3, and the remaining part of the light is directly incident on the first beam splitter 12 through the third light exit port 17 and the high-magnification light transmission port 19, and then incident on the CCD camera 4 after being reflected by the first beam splitter 12;

[0038] When the camera mode is in the low magnification mode, the optical path is as follows: The light source 3 emits light, which is incident on the second beam splitter 13 through the light source inlet 21. Part of the light is horizontally incident on the third beam splitter 14 through the light source outlet 22, and the rest of the light is vertically emitted to the first light outlet 15 and then incident on the third beam splitter 14. The light incident on the third beam splitter 14 is emitted to the detection target through the second light outlet 16. After being reflected by the detection target, the light source is incident on the third beam splitter 14 through the second light outlet 16, and then passes through the fourth light outlet 18 and the low magnification light transmission port 20 and is incident on the mirror 11. The mirror 11 reflects the light to the first beam splitter 12, and then the light is horizontally incident on the CCD camera 4 through the first beam splitter 12; The amount of optical axis offset is compensated by the first linear elevation stage 6 and the second linear elevation stage 7. The amounts of change of the first linear elevation block 24 and the second linear elevation block 25 are just equal after being fused with the variables between components, and the compensation range of the optical axis error is ±3 。

[0039] Obviously, the above embodiments are only examples for clear illustration and not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or variations can be made based on the above description. It is not necessary and impossible to list all the implementation manners here. And the obvious changes or variations derived therefrom are still within the protection scope of the present invention.

Claims

1. A probe camera module for compensating the optical axis offset in a cryogenic environment, comprising: Overall framework (1), light source (3) and CCD camera (4), characterized in that the light source (3) and the CCD camera (4) are both arranged on the overall framework (1), and a lens barrel and a first linear expansion and pitching stage (6) are also arranged inside the overall framework (1). The first linear expansion and pitching stage (6) is arranged below the lens barrel. The first linear expansion and pitching stage (6) includes a main framework (33), a first linear expansion unit, a second linear expansion unit, a third linear expansion unit and a first pitching dimension (28). A first pitching angle adjustment opening and a second pitching angle adjustment opening are provided on the first pitching dimension (28). The linear expansion end of the first linear expansion unit is arranged on the main framework (33), and a first sphere is arranged at the other end of the first linear expansion unit. The first sphere is slidably arranged on the first pitching angle adjustment opening, and the diameter of the first sphere is greater than the height of the first pitching angle adjustment opening. The linear expansion end of the second linear expansion unit is arranged on the main framework (33), and a second sphere is arranged at the other end of the second linear expansion unit. The second sphere is slidably connected to one end of the third linear expansion unit. A third sphere is arranged at the other end of the third linear expansion unit. The third sphere is slidably arranged on the second pitching angle adjustment opening, and the diameter of the third sphere is greater than the height of the second pitching angle adjustment opening. A first spring (26) is arranged on the first linear expansion unit, a second spring (30) is arranged on the second linear expansion unit, and a third spring (32) is arranged on the third linear expansion unit. A reflecting mirror (11) is arranged on the first pitching dimension (28).

2. The probe camera module for compensating the optical axis offset in a very low temperature environment according to claim 1, characterized in that, The first linear expansion unit includes a first linear expansion block (24) and a first telescopic rod (27). The first linear expansion block (24) is arranged on the main framework (33), and one end of the first telescopic rod (27) is connected to the first linear expansion block (24). The first sphere is arranged at the other end of the first telescopic rod (27).

3. The probe camera module for compensating the optical axis offset in a very low temperature environment according to claim 2, wherein, The second linear expansion unit includes a second linear expansion block (25) and a second telescopic rod (29). The second telescopic rod (29) is parallel to the first telescopic rod (27). The second linear expansion block (25) is arranged on the main framework (33), and one end of the second telescopic rod (29) is connected to the second linear expansion block (25). The second sphere is arranged at the other end of the second telescopic rod (29).

4. The probe camera module for compensating the optical axis offset in a very low temperature environment according to claim 3, characterized in that, The third linear expansion unit includes a third telescopic rod (31). The third telescopic rod (31) is perpendicular to the second telescopic rod (29). One end of the third telescopic rod (31) is slidably connected to the second sphere, and the third sphere is arranged at the other end of the third telescopic rod (31).

5. The probe camera module for compensating the optical axis offset in a very low temperature environment according to claim 1, characterized in that, The lens barrel is a low-power lens barrel (23). The low-power lens barrel (23) is arranged above the first linear expansion and pitching stage (6). A high-power lens barrel (2) is also arranged inside the overall framework (1). The high-power lens barrel (2) is parallel to the low-power lens barrel (23). A second linear expansion and pitching stage (7) is arranged below the high-power lens barrel (2). A first beam splitter (12) is arranged on the second linear expansion and pitching stage (7).

6. The probe camera module for compensating the optical axis offset in a non-ambient temperature environment according to claim 5, characterized in that, The camera module further includes a magnification switching device (5). The magnification switching device (5) is slidably arranged on the overall frame (1). The magnification switching device (5) is located between the high-power lens barrel (2) and the first beam splitter (12). The magnification switching device (5) is connected to the driving end of the driving unit. A high-power light-transmitting opening (19) corresponding to the high-power lens barrel (2) and a low-power light-transmitting opening (20) corresponding to the low-power lens barrel (23) are formed on the magnification switching device (5). The spacing distance between the high-power light-transmitting opening (19) and the low-power light-transmitting opening (20) is smaller than the spacing distance between the high-power lens barrel (2) and the low-power lens barrel (23).

7. A probe camera module for compensating for the optical axis offset under a very low temperature environment according to claim 6, characterized in that, The driving unit is a pneumatic structure (10). The driving end of the pneumatic structure (10) is connected to the magnification switching device (5).

8. The probe camera module for compensating the optical axis offset in a cryogenic environment according to claim 1, wherein, The camera module further includes a lower cover (8) and an upper cover (9). The lower cover (8) is connected to one side of the overall frame (1), and the upper cover (9) is connected to the other side of the overall frame (1).

9. The probe camera module for compensating the optical axis offset in a very low temperature environment according to claim 5, characterized in that, The first beam splitter (12) is a semi-transmissive and semi-reflective mirror.

10. A method for compensating the optical axis offset of a very low temperature environment compensation system, which is implemented based on the probe camera module for compensating the optical axis offset of a very low temperature environment according to any one of claims 1 to 9, characterized in that, The linear expansion ends of the first linear expansion unit and the second linear expansion unit increase in size while the temperature changes, causing the first sphere to enter the first pitch angle adjustment opening. The second sphere moves towards the direction close to the third linear expansion unit. The third linear expansion unit drives the third sphere to move towards the direction close to the first pitch dimension (28). The third sphere enters the second pitch angle adjustment opening, changing the pitch angle of the first pitch dimension (28) to compensate for the optical axis offset.

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