Multi-dimensional force sensor and processing method

Abstract

The invention is suitable for the technical field of sensors, and provides a multi-dimensional force sensor which comprises an outer body frame, an inner bearing platform, a strain beam and a strain gauge. A containing hole is formed in the outer body frame, the inner bearing platform is arranged in the containing hole, and a gap is kept between the outer body frame and the inner bearing platform. The strain beams are arranged in the intervals and connected between the outer body frame and the inner bearing platform. The side edges of the strain beams extend linearly, and the number of the strain beams is three. The strain gauges are respectively attached to the first patch surface and the second patch surface of at least one strain beam, and the total number of the strain gauges attached to all the first patch surfaces and the total number of the strain gauges attached to all the second patch surfaces are not less than six, so that the number of the strain gauges is increased, and the detection precision is improved. And meanwhile, the strain gauges on the same strain beam are concentrated on the upper patch surface and the lower patch surface, so that the convenience and the efficiency of pasting the strain gauges are improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of sensors, and in particular relates to a multi-dimensional force sensor and a processing method thereof. Background Art

[0002] A multi-dimensional force sensor is a sensor that can measure forces and torques in multiple directions at the same time. This type of sensor is widely used in robots, material testing, and machine servo control. Taking a six-dimensional force sensor as an example, referring to the Cartesian coordinate system, a six-dimensional force sensor can detect three forces (Fx, Fy, Fz) and three torques (Mx, My, Mz).

[0003] There are multiple measuring beams inside the six-dimensional force sensor, each of which includes four walls: upper, lower, left, and right. The upper wall is opposite to the lower wall, and the left wall is opposite to the right wall. Usually, strain gauges are attached to the upper, lower, left, and right walls of the measuring beam. The deformation of the measuring beam is sensed by each strain gauge, and the strain on the measuring beam is converted into an electrical signal output.

[0004] The force sensor in the related art is limited by the existing structural design, and the operation convenience of attaching the strain gauge to the wall is poor. At the same time, the strain gauge is attached on one side, which has the problem of low detection accuracy. Summary of the invention

[0005] In view of this, the present invention provides a multi-dimensional force sensor and a processing method to solve the problems of poor patch convenience, high difficulty and low detection accuracy.

[0006] To solve the above problems, the technical solution of the present invention is achieved as follows:

[0007] A multi-dimensional force sensor, comprising: an outer frame, with a mounting hole formed inside, the mounting hole passing through a first surface and a second surface of the outer frame, the first surface and the second surface being opposite to each other; an internal support platform, arranged in the mounting hole, the outer frame surrounding the outer side of the internal support platform, and having a gap between the outer frame and the internal support platform; a strain beam, arranged in the gap and connected between the outer frame and the internal support platform, the side of the strain beam extending in a straight line; three strain beams are arranged, each of the strain beams having at least one first patch surface facing the same direction as the first surface and one second patch surface facing the same direction as the second surface; a strain gauge for detecting the strain of the strain beam, each of the strain gauges The total number of strain gauges attached to the first patch surface and the total number of strain gauges attached to each of the second patch surfaces are not less than six; wherein, among the three strain beams; the first patch surface and the second patch surface on each of the strain beams are respectively attached with strain gauges; or the first patch surface and the second patch surface on one strain beam are respectively attached with strain gauges, and the first patch surface or the second patch surface on two strain beams are attached with strain gauges; or the first patch surface and the second patch surface on two strain beams are respectively attached with strain gauges, and the first patch surface or the second patch surface on one strain beam is attached with strain gauges.

[0008] The embodiment of the present invention further provides a processing method for processing the above-mentioned multi-dimensional force sensor, the processing method comprising:

[0009] 1) Selecting an outer frame, an inner support platform and a strain beam, setting the inner support platform in the receiving hole of the outer frame, and providing a gap between the outer frame and the inner support platform;

[0010] 2) The strain beam is arranged in the interval and connected between the outer frame and the inner support platform; three strain beams are arranged, and the first patch surface of each strain beam with a flat surface faces the same direction as the first surface, and the second patch surface of each strain beam with a flat surface faces the same direction as the second surface;

[0011] 3) Cleaning each of the first patch surfaces and each of the second patch surfaces, and then attaching strain gauges respectively, wherein the first patch surface and the second patch surface on at least one of the strain beams are both attached with the strain gauges, and the total number of the strain gauges attached on each of the first patch surfaces and the total number of the strain gauges attached on each of the second patch surfaces are not less than six; wherein the attached strain gauges are independent of each other; or the strain gauges are connected as a whole; or at least one of the strain gauges is independent, and at least two of the strain gauges are connected as a whole;

[0012] 4) Arranging a circuit board, wherein the circuit board is arranged coplanarly with each of the strain gauges, or is spaced a preset distance from the plane where each of the strain gauges is located, and fixing the circuit board on the outer frame and / or the internal support platform;

[0013] 5) Place the first patch surface on any one of the strain beams with the strain gauge attached thereon upward, perform lead welding on each of the strain gauges on the first patch surface, so that each of the strain gauges on the first patch surface is electrically connected to the circuit board through the lead wires; then perform lead welding on another strain beam on which the strain gauge is attached thereon, until all the strain gauges on the first patch surfaces of the three strain beams are electrically connected to the circuit board;

[0014] 6) Flip the multi-dimensional force sensor so that the second patch surface on any one of the strain beams faces upward, and perform lead welding on each of the strain gauges in the second patch surface so that each of the strain gauges in the second patch surface is electrically connected to the circuit board through a lead; then, perform lead welding on another strain beam having the strain gauges attached to the second patch surface, until all the strain gauges in the second patch surfaces of the three strain beams are electrically connected to the circuit board, thereby completing the processing of the multi-dimensional force sensor; wherein, the execution order of step 5 and step 6 can be interchanged.

[0015] A multi-dimensional force sensor and a processing method provided by an embodiment of the present invention include an outer body frame, an inner support platform, a strain beam and a strain gauge. A receiving hole is provided inside the outer body frame, and the receiving hole passes through the first surface and the second surface of the outer body frame, and the first surface and the second surface are two opposite surfaces. The inner support platform is arranged in the receiving hole, and a gap is maintained between the inner support platform. The strain beam is at least partially arranged in the gap and connected between the outer body frame and the inner support platform. The side of the strain beam extends straightly and is provided with three, and each strain beam has at least one first patch surface facing the same direction as the first surface and one second patch surface facing the same direction as the second surface. By adopting the method of respectively pasting strain gauges on the first patch surface and the second patch surface of at least one strain beam, the total number of strain gauges pasted on all the first patch surfaces and the total number of strain gauges pasted on all the second patch surfaces are not less than six, thereby increasing the number of strain gauges and improving the detection accuracy. At the same time, the strain gauges on the same strain beam are concentrated on the upper and lower patch surfaces, thereby improving the convenience and efficiency of pasting each strain gauge. The processing method can quickly realize the processing of the multi-dimensional force sensor, which is beneficial to improving the production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1It is a schematic diagram of a structure in which a first body, a second body and a strain beam are connected according to an embodiment of the present invention;

[0017] Figure 2 is a partial structural schematic diagram of a multi-dimensional force sensor provided by an embodiment of the present invention;

[0018] Figure 3 is a schematic diagram of the six detection channels on the force sensor;

[0019] Figure 4 This is the principle diagram of the Wheatstone bridge;

[0020] Figure 5 is a schematic diagram of a distribution method of strain gauges provided in an embodiment of the present invention on a first patch surface;

[0021] Figure 6 is a schematic diagram of another distribution method of the strain gauge on the first patch surface provided by an embodiment of the present invention;

[0022] Figure 7 is a schematic diagram of another distribution method of the strain gauges provided by an embodiment of the present invention on the first patch surface;

[0023] Figure 8 is a schematic diagram of another distribution method of the strain gauges provided by an embodiment of the present invention on the first patch surface;

[0024] Fig. 9 is a schematic diagram of another distribution method of the strain gauges provided by an embodiment of the present invention on the first patch surface;

[0025] Fig.10 is a schematic diagram of another distribution method of the strain gauges provided by an embodiment of the present invention on the first patch surface;

[0026] Fig.11 It is a schematic diagram of the positions of strain gauges of the multi-dimensional force sensor provided by an embodiment of the present invention in the first double-sided patch mode;

[0027] Fig.12 Schematic diagram of the bridges of each channel of the multi-dimensional force sensor provided by an embodiment of the present invention in the first double-sided patch mode;

[0028] Fig.13 is a schematic diagram of the positions of strain gauges of the multi-dimensional force sensor provided by an embodiment of the present invention in the second double-sided patch mode;

[0029] Fig.14 It is a schematic diagram of the bridges of each channel of the multi-dimensional force sensor provided by an embodiment of the present invention in the second double-sided patch mode.

[0030] Description of reference numerals:

[0031] 1. Multi-dimensional force sensor; 11. First body; 110. Accommodating hole; 111. First surface; 12. Second body; 13. Strain beam; 131. Patch plane; 14. Strain gauge; 140. Inclined strain gauge; 141. Base; 142. Strain unit; P(Q), symmetry axis. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0033] The various specific technical features described in the specific embodiments can be combined in any suitable manner without contradiction, for example, different embodiments and technical solutions can be formed by combining different specific technical features. In order to avoid unnecessary repetition, various possible combinations of the specific technical features in the present invention will not be described separately.

[0034] In the following description, the terms "first\second\..." are only used to distinguish different objects, and do not mean that the objects have the same or related points. It should be understood that the directions "above", "below", "outside" and "inside" are all directions in normal use, and the directions "left" and "right" refer to the left and right directions shown in the corresponding schematic diagrams, which may or may not be the left and right directions in normal use.

[0035] It should be noted that the terms "comprises", "includes" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device including the element. "Multiple" means greater than or equal to two.

[0036] like Figure 1 and Figure 2 As shown, a multi-dimensional force sensor 1 provided by an embodiment of the present invention can be mainly used to simultaneously measure forces and torques in multiple directions, specifically a force sensor that can simultaneously measure force and torque components in more than two directions. In a Cartesian coordinate system, force and torque can each be decomposed into three components. Therefore, the most complete form of multi-dimensional force is a six-dimensional force / torque sensor, that is, a sensor that can simultaneously measure three force components (Fx, Fy, Fz) and three torque components (Mx, My, Mz).

[0037] like Figure 2 As shown, the multi-dimensional force sensor 1 includes an outer frame 11, an inner support platform 12, a strain beam 13 and a strain gauge 14. A receiving hole 110 is provided inside the outer frame 11, and the inner support platform 12 is arranged in the receiving hole 110 and is spaced apart from the inner support platform 12. The strain beam 13 is connected between the outer frame 11 and the inner support platform 12, so that the outer frame 11 and the inner support platform 12 are connected as a whole. The strain gauge 14 is used to be attached to the strain beam 13 so as to detect the deformation of the strain beam 13.

[0038] Specifically, the shape of the receiving hole 110 can be any one of a circular, elliptical or polygonal shape, as long as it meets the spacing setting of the internal support platform 12. Of course, the shape of the receiving hole 110 can also match the contour shape of the internal support platform 12.

[0039] The receiving hole 110 passes through the first surface 111 and the second surface of the outer frame 11 , and the first surface 111 and the second surface are two opposite surfaces. That is, the receiving hole 110 is a straight hole that passes through the outer frame 11 in the thickness direction.

[0040] The internal support platform 12 is arranged in the accommodating hole 110, and a gap is maintained between the internal support platform 12. The strain beam 13 is arranged in the gap, and the edge of the strain beam 13 extends in a straight line, forming a straight beam structure, which is convenient for production and manufacturing. The opposite ends of the strain beam 13 are respectively connected between the outer frame 11 and the internal support platform 12. In this way, the outer frame 11 and the internal support platform 12 are connected as a whole through the strain beam 13. After the connection, the side of the internal support platform 12 facing the same direction as the first surface 111 can be kept flush with the first surface 111 or not. Similarly, the other side of the internal support platform 12 facing the same direction as the second surface can be kept flush with the first surface 111 or not. It is usually adopted to keep the opposite two sides of the internal support platform 12 flush with the first surface 111 and the second surface respectively to improve the consistency of the product shape.

[0041] Usually, the outer frame 11 is a fixed end, which is used to connect with the supporting components. The internal support platform 12 is a loading end, which is used to connect with the object to be detected, so as to sense the force carried by the object to be detected, and finally manifested in elastic deformation of the strain beam 13. Of course, the outer frame 11 can also be set as the loading end, and the internal support platform 12 can be set as the fixed end. The setting is flexible and can meet different usage requirements. When the internal support platform 12 is set as the loading end, the strain gauge 14 is usually close to the connection between the strain beam 13 and the internal support platform 12. When the outer frame 11 is set as the loading end, the strain gauge 14 is usually close to the connection between the strain beam 13 and the outer frame 11. In this way, because the connection is the part where the deformation is larger, the strain gauge 14 is set here to improve the sensitivity of the detection.

[0042] The strain beam 13 connected between the outer body frame 11 and the internal support 12 can be completely located in the interval, that is, the first patch surface 131 is lower than the plane where the first surface 111 is located, and the second patch surface is lower than the plane where the second surface is located. Of course, the first patch surface and / or the second patch surface can also protrude from the corresponding surface, as long as it can meet the detection requirements. Moreover, the number of strain beams 13 set can be set according to the detection requirements required by the product, at least not less than three. Moreover, when the number of strain beams 13 is set to be greater than three, it is not necessary to attach strain gauges 14 to all the strain beams 13 set, and corresponding settings can be made according to product design requirements. That is, in an embodiment of the present invention, when three strain beams 13 are set, all three strain beams 13 are used to attach strain gauges 14, and when four or more strain beams 13 are set, three of the strain beams 13 can be used for patching, and the remaining ones do not need to be patched, and the setting flexibility is better.

[0043] Specifically, the strain gauge 14 is usually made of metal or semiconductor material, has high sensitivity and good elastic properties, and can effectively sense the effects of external forces and torques. A strain gauge 14 is arranged on each strain beam 13, and the number of strain gauges 14 can be set according to the specific detection requirements to be achieved, so that the detection of six measurement channels can be achieved. Specifically, if Figure 3 As shown, according to the Cartesian coordinate system, the six measurement channels are three force components (Fx, Fy, Fz) and three torque components (Mx, My, Mz). The three force components correspond to the forces on the X, Y, and Z axes, respectively. The forces on each axis will cause the strain gauge 14 in the corresponding direction to deform, resulting in a change in resistance. The three torque components correspond to the torque on the X, Y, and Z axes, respectively. The torque will also cause the strain gauge 14 in a specific direction to deform, thereby causing a change in resistance.

[0044] The signal of each measurement channel is detected by the strain gauge 14 attached to the strain beam 13. These strain gauges 14 can sense the resistance change caused by the slight deformation and then convert it into an electrical signal output. Through the signals of these channels, combined with the corresponding mathematical model calculation, the magnitude and direction of the applied force and torque can be determined.

[0045] The "six measurement channels" mentioned above correspond to the six force components of the sensor in three-dimensional space. In this way, the strain gauges 14 on different strain beams 13 are combined according to the detection requirements to form a Wheatstone bridge to detect the change in resistance, and the magnitude of the applied force and torque and the direction of the force are finally determined by obtaining the detection signals on different channels.

[0046] like Figure 2 As shown, in the embodiment of the present invention, three strain beams are provided, and the three strain beams are evenly distributed around the circumference of the internal support platform, which at least better ensures the consistency of product detection performance and facilitates installation and use. Of course, in another embodiment, under the premise of meeting the detection requirements, they can also be unevenly distributed.

[0047] Each strain beam 13 has at least one first patch surface 131 facing the same direction as the first surface 111 and a second patch surface facing the same direction as the second surface. Both the first patch surface 131 and the second patch surface are planes, and strain gauges 14 are respectively attached to each first patch surface 131 and each second patch surface. The force or torque acting on the corresponding strain beam 13 is thus detected by the strain gauge 14. The "corresponding strain beam 13" refers to the strain beam 13 to which the strain gauge 14 that currently outputs the detection signal is attached. The principle of the strain gauge 14 outputting the detection signal is as follows: when an external force or torque acts on the strain beam 13, the strain beam 13 will undergo a slight deformation (such as a change in length or cross-sectional area), and this deformation will be transmitted to the strain gauge 14 attached to the strain beam 13. The resistance value of the strain gauge 14 changes with the generation of strain, and this resistance change is converted into a voltage or current signal through a specific circuit. A bridge circuit is constructed inside the sensor to connect multiple strain gauges 14 in a specific way to form a Wheatstone bridge (refer to Figure 4 ). When the resistance value of the strain gauge 14 changes, the equilibrium state of the bridge circuit will be broken, thereby generating an output signal proportional to the mechanical quantity. After being amplified, filtered and digitized by the signal processing circuit, this signal can be read and analyzed by a terminal device such as a computer, and the corresponding force condition can be obtained.

[0048] In the embodiment of the present invention, the surface on the strain beam 13 for contacting the strain gauge 14 is called a patch surface (such as the first patch surface 131 and the second patch surface), and each patch surface is set to be a plane, that is, the surface is a smooth flat surface, all points are on the same plane, and there are no ups and downs or curves. Therefore, when the strain gauge 14 is attached, all points on the side of the strain gauge 14 for bonding with the patch plane can basically keep in contact with the patch plane, not only the bonding firmness is good, but also when pasting, compared with the patch surface of the curved surface, there is no need to press for a long time, and the strain gauge 14 can be kept completely attached to the patch plane by relying on its own gravity, which improves the ease of operation of the patch. In addition, the strain gauge 14 is fully attached to the patch plane, and the strain beam 13 can be formed as a whole, so that the deformation of the strain beam 13 can be sensitively detected, and the sensitivity of the detection is improved.

[0049] Further, in the embodiment of the present invention, the method of attaching the strain gauges 14 on the three strain beams 13 is as follows: the strain gauges 14 are attached to the first patch surface 131 and the second patch surface of at least one strain beam 13, respectively, and the total number of strain gauges 14 attached to all the first patch surfaces 131 and the total number of strain gauges 14 attached to all the second patch surfaces are not less than six. With this arrangement, the strain gauges 14 are attached to the first patch surface 131 and the second patch surface of at least one strain beam 13. Compared with the strain gauge attached to one side, there are at least two strain gauges 14 on the strain beam 13 for detection, which improves the sensitivity of detection. Combined with the strain gauges 14 attached to other strain beams 13, each strain gauge 14 can be combined to realize the detection of different channels, and each detection channel can form a different type of Wheatstone bridge (full bridge, half bridge and 1 / 4 bridge) according to the detection requirements. The arrangement methods are diverse, which improves the flexibility of the detection function setting of the multi-dimensional force sensor 1 and can meet the use of different detection requirements.

[0050] Specifically, three strain beams 13 are patched, and at least one strain beam 13 has strain gauges 14 pasted on both the first patch surface 131 and the second patch surface. At the same time, the total number of strain gauges 14 pasted on the three first patch surfaces 131 and the total number of strain gauges 14 pasted on the three second patch surfaces are not less than six. Based on this, the distribution method can be as follows: in the three strain beams 13, strain gauges 14 are pasted on the first patch surface 131 and the second patch surface of each strain beam 13; or in the three strain beams 13, strain gauges 14 are pasted on the first patch surface 131 and the second patch surface of one strain beam 13, and strain gauges 14 are pasted on the first patch surface 131 or the second patch surface of two strain beams 13; or in the three strain beams 13, strain gauges 14 are pasted on the first patch surface 131 and the second patch surface of two strain beams 13, and strain gauges 14 are pasted on the first patch surface 131 or the second patch surface of one strain beam 13. The specific distribution method can be set according to maintenance requirements.

[0051] In the embodiment of the present invention, the strain gauges 14 to be attached to each strain beam 13 are centrally arranged on the first patch surface 131 and the second patch surface, and there is no shielding above the first patch surface 131 and the second patch surface, so that when attaching the strain gauges 14, the patching convenience is good and the patching efficiency is improved. At the same time, the lead welding operation can be performed on all the strain gauges 14 on the same patch surface in the same state without large position adjustment, thereby improving the convenience of lead welding.

[0052] A multi-dimensional force sensor provided by an embodiment of the present invention includes an outer frame 11, an internal support platform 12, a strain beam 13 and a strain gauge 14. A receiving hole 110 is provided inside the outer frame 11, and the receiving hole 110 passes through a first surface 111 and a second surface of the outer frame 11, and the first surface 111 and the second surface are opposite surfaces. The internal support platform 12 is arranged in the receiving hole 110, and a gap is maintained between the internal support platform 12. The strain beam 13 is at least partially arranged in the gap and connected between the outer frame 11 and the internal support platform 12. The side edges of the strain beam 13 extend in a straight line and are provided with three, and each strain beam 13 has at least one first patch surface 131 facing the same direction as the first surface 111 and one second patch surface facing the same direction as the second surface. By adopting that the strain gauges 14 are respectively attached to the first patch surface 131 and the second patch surface of at least one strain beam 13, the total number of strain gauges 14 attached to all first patch surfaces 131 and the total number of strain gauges 14 attached to all second patch surfaces are not less than six, thereby increasing the number of strain gauges 14 and improving the detection accuracy. At the same time, the strain gauges 14 on the same strain beam 13 are concentrated on the upper and lower patch surfaces, thereby improving the convenience and efficiency of attaching each strain gauge 14.

[0053] In the embodiment of the present invention, the principle of realizing the detection of six channels through three strain beams 13 is: referring to the Cartesian coordinate system, combined with the decomposition of force, each strain beam 13 can be used to sense the components on the three axes of X, Y, and Z, thereby forming three force components (Fx, Fy, Fz) and three torque components (Mx, My, Mz). Combined with the combination of strain gauges 14 on different strain beams 13 to form a Wheatstone bridge, the corresponding detection signal can be output to achieve the purpose of detection.

[0054] like Figure 4 As shown, the Wheatstone bridge is a circuit device composed of four resistors, which is used to measure the resistance of one of the resistors, provided that the resistance of the other three resistors is known. The basic principle is to determine the value of the unknown resistor by comparing the voltage difference between two circuit branches. When the bridge is in a balanced state, the voltage difference between the two relative joints is zero, at which time the resistance of the unknown resistor can be inferred from the three known resistance values. In the Wheatstone bridge, each resistor (or strain gauge 14) is usually called a bridge arm, so there are four bridge arms.

[0055] In specific applications, the main types of Wheatstone bridges include full bridge, half bridge and quarter bridge. In the full bridge configuration, strain gauges 14 are used in all four bridge arms, and each strain gauge 14 produces the same amplitude of resistance change for the same strain, but the change direction is opposite; in the half bridge configuration, only two bridge arms use strain gauges 14, and the other two are fixed resistors; in the quarter bridge configuration, only one bridge arm uses strain gauges 14, and the other three are fixed resistors. Among the three different types of bridges, the principles of strain detection of full bridge, half bridge and quarter bridge are different in their sensitivity to strain and measurement accuracy. The full bridge configuration provides the highest sensitivity and accuracy, while the quarter bridge configuration provides the lowest sensitivity and accuracy. Therefore, the type of bridge to be combined can be selected according to the actual use requirements, so as to meet different detection requirements and have good setting flexibility.

[0056] The strain gauge 14 is usually fixed on the strain beam 13 by pasting, and in order to achieve multi-channel detection, the strain gauge 14 needs to be pasted on the four wall surfaces of each strain beam 13, so that the position of the strain beam 13 or the direction of the patch needs to be adjusted continuously during patching, resulting in cumbersome patching steps and inconvenient patching, affecting the efficiency of patching and the operability of lead welding, and increasing the difficulty of manufacturing the multi-dimensional force sensor 1. Therefore, in the embodiment of the present invention, by concentrating the strain gauges 14 that need to be pasted on each strain beam 13 on the same patch surface, or setting them on two opposite patch surfaces of the same strain beam 13, not only can multi-channel detection be achieved, but also there is no need to frequently adjust the patch position, so that the convenience and efficiency of patching are improved, and at the same time, the convenience of lead welding is also improved.

[0057] Specifically, the arrangement position and quantity of each strain gauge 14 can be selected according to the needs of detection, so that it can be used to detect forces in three different directions and moments in three different directions. In this way, a plurality of strain gauges 14 are arranged on each strain beam 13, and the strain gauges 14 at corresponding positions can be selected for combination, thereby realizing a multi-channel detection function. The above "can be used to detect forces in three different directions and moments in three different directions" means that the position and quantity of the strain gauges 14 can be set according to the needs of detection, so as to meet the performance of being able to detect forces in three different directions and moments in three different directions. Not every strain gauge 14 can detect six channels, and in the actual detection process, it is not necessary for each strain gauge 14 to detect six channels at the same time. That is, the multi-dimensional force sensor 1 can have the performance of being able to detect forces in three different directions and moments in three different directions by integrating multiple strain gauges 14 and combining the distribution at different positions, thereby improving the detection function and having good practicality.

[0058] For the convenience of explanation, in some embodiments, the distribution of each strain gauge 14 on the first patch surface 131 and the second patch surface can be set to include any of the following according to different design methods. At the same time, the patches on the first patch surface 131 and the second patch surface are symmetrically distributed as an example, and the arrangement on the first patch surface 131 is used as a reference. Of course, the distribution of each strain gauge 14 can also be other types. The following is just an example for explanation, and does not limit the distribution method. The method that can be set is:

[0059] In the first distribution mode, in the first patch surface 131 and the second patch surface where a strain gauge 14 is attached, the strain gauge 14 is located at the side of the corresponding patch surface or on the symmetry axis in the width direction of the corresponding patch surface. Specifically, Figure 5 As shown, the strain gauge 14 is arranged on the side of the patch surface, and is usually used to detect the forces in the Fx and Fy directions and the moments in the Mz direction. Figure 6 As shown, the strain gauge 14 is set on the symmetric axis in the width direction of the patch surface, which is usually used to detect the torque in the Mx and My directions and the force in the Fz direction. In this way, it can be adjusted according to the detection needs, and the setting flexibility is good. Combined with the strain gauges 14 set on other patch surfaces, and the same distribution method is used on the other opposite surface, a Wheatstone bridge can be formed, and the detection sensitivity is good.

[0060] The "symmetric axis in the width direction of the patch surface" mentioned above means that the first patch surface 131 and the second patch surface are usually set as quadrilaterals with unequal length and width and regular shapes. Therefore, there is a symmetric axis in the width direction, which is called the symmetric axis in the width direction of the patch surface.

[0061] In the second distribution mode, in the two first patch surfaces 131 and the second patch surface respectively provided, the two strain gauges 14 are respectively located at two opposite sides of the corresponding patch surface, or are located side by side on the same side, or are relatively inclined, or are located side by side on the symmetry axis in the width direction of the corresponding patch surface. Specifically, Figure 6 As shown, two strain gauges 14 are respectively located on two opposite sides of the patch surface, or two strain gauges 14 are located side by side on the same side. Both types are usually used to detect forces in the Fx and Fy directions and moments in the Mz direction. Figure 7 As shown, by setting the two strain gauges 14 relatively tilted, the ability to detect forces or torques in different directions can be achieved. The two strain gauges 14 are set side by side on the symmetry axis corresponding to the width direction of the patch surface, which are usually used to detect the torques in the Mx and My directions and the force in the Fz direction. In this way, the achievable detection functions are further increased, and adjustments can be made according to detection needs, with good setting flexibility. Combined with the strain gauges 14 set on other patch surfaces, a Wheatstone 1 / 4 bridge circuit can be formed, which has good detection sensitivity. Moreover, the two strain gauges 14 can also be set in other ways, such as one on the side and the other on the symmetry axis corresponding to the width direction of the patch surface. The setting method is flexible and diverse.

[0062] In the third distribution mode, in the first patch surface 131 and the second patch surface where three strain gauges 14 are respectively attached, each strain gauge 14 is at least distributed in a T-shape or an L-shape on the corresponding patch surface, or is arranged at intervals on the same straight line; specifically, Figure 8 As shown, when the distribution becomes a T-type or an L-type, both types can be used to detect the forces in the Fx and Fy directions and the torque in the Mz direction, as well as the torque in the Mx and My directions and the force in the Fz direction. That is, it has the detection requirements of six channels and the setting is ingenious. When the intervals are set on the same straight line, when they are distributed along the length direction of the patch surface and located on the side of the patch surface, they are usually used to detect the forces in the Fx and Fy directions and the torque in the Mz direction. When the strain gauge 14 whose own axis of symmetry is colinear with the axis of symmetry in the width direction of the patch surface is usually used to detect the torque in the Mx and My directions and the force in the Fz direction. When it is distributed along the width direction of the patch surface and close to the connection between the strain gauge and the internal support 12, it is usually used to detect the forces in the Fx, Fy and Fz directions. The combination of each strain gauge 14 can form a Wheatstone half-bridge or 1 / 4 bridge circuit, which has good detection sensitivity.

[0063] In the fourth distribution mode, in the first patch surface 131 and the second patch surface where four strain gauges 14 are respectively attached, each strain gauge 14 is distributed in a T-shape on the corresponding patch surface, or is arranged at intervals on the same straight line, or is distributed in a quadrilateral. In this distribution mode, Fig. 9As shown, when forming a T-shaped or spaced shape on the same straight line, the same shape has basically the same detection performance as the third distribution method, which will not be described in detail here. When distributed in a quadrilateral, there are two strain gauges 14 on the two opposite sides of the patch surface. This distribution direction is usually used to detect the forces in the Fx and Fy directions and the torque in the Mz direction. The combination of strain gauges 14 can form a Wheatstone half-bridge or 1 / 4 bridge circuit, which has good detection sensitivity.

[0064] The fifth distribution mode is that on the first patch surface 131 and the second patch surface, each of which is provided with at least five strain gauges 14, each strain gauge 14 is distributed in a T-shape, an L-shape, an I-shape, a quadrilateral, or is arranged at intervals on the same straight line on the corresponding patch surface. In the arrangement where at least five strain gauges 14 are provided, as the number of strain gauges 14 increases, when forming a T-shape, an L-shape, an I-shape, a quadrilateral, or is arranged at intervals on the same straight line, the number of strain gauges 14 used as a whole in each shape is increased, and the number of detection channels that can be realized is increased. At the same time, the number of strain gauges 14 that can be combined with each detection channel is also increased, which not only improves the comprehensiveness of the detection performance, but also improves the sensitivity of the detection by combining multiple strain gauges 14 in the same channel.

[0065] It should be explained that the strain gauges 14 are usually selected to detect a certain channel according to their sensitivity to force, so as to improve the sensitivity and accuracy of the detection. For example, when the forces in the Fx and Fy directions and the moments in the Mz direction are applied to the strain beams 13, the sides of the strain beams 13 are the parts with the largest deformation, so the strain gauges 14 arranged on the sides of the patch surface are mainly used to detect the forces in the Fx and Fy directions and the moments in the Mz direction. When the moments in the Mx and My directions and the forces in the Fz direction are applied to the strain beams 13, the deformation at the axis of the strain beams 13 is the largest, so the strain gauges 14 arranged on the symmetry axis in the width direction of the patch surface are mainly used to detect the moments in the Mx and My directions and the forces in the Fz direction. Of course, it can be understood that when the force or moment is applied to the same strain beam 13, the strain gauges 14 at various positions on it can basically detect the deformation of the strain beam 13, but there is a difference in the strength of the detection signal. In consideration of detection accuracy, the strain gauge 14 that generates a stronger signal is usually selected for detection of the corresponding channel. Therefore, there are strain gauges 14 arranged at different positions in the same patch surface for detection of different channels.

[0066] It can be understood that each strain gauge 14 can be regarded as a point, so the strain gauge 14 has its own symmetry axis. Therefore, it can be understood that the specific setting method of setting the symmetry axis of the strain gauge 14 itself to be collinear with the symmetry axis in the width direction of the patch plane is described above.

[0067] In some embodiments, Fig.11 As shown, on the first patch surface 131 and the second patch surface, on which at least two strain gauges 14 are respectively attached, each strain gauge 14 is arranged in parallel along the length direction of the corresponding patch surface, and the symmetry axis P of each strain gauge 14 is collinear with the symmetry axis Q in the width direction of the corresponding patch surface. In this way, a plurality of strain gauges 14 are arranged at intervals on the symmetry axis in the width direction of the patch surface, thereby meeting the performance of being able to detect the moment in the Mx and My directions and the force in the Fz direction, and the sensitivity and accuracy of the detection can be improved by combining and detecting a plurality of strain gauges 14 together.

[0068] In some embodiments, Fig.11 As shown, among the strain gauges 14 arranged in parallel, at least one inclined strain gauge 140 is included, and the angle between the symmetry axis of the inclined strain gauge 140 and the symmetry axis in the width direction of the patch plane 131 is between 0-75 degrees. In this way, the inclined strain gauge 140 can more sensitively detect deformation that is substantially the same as its inclined direction. By adjusting the inclined direction and arrangement position of the inclined strain gauge 140, it can be used for multi-channel detection, thereby improving the flexibility of detection. Specifically, the inclined strain gauge 140 can not only be used for the detection of torque in the Mx or My direction and force in the Fz direction, but also, due to the inclined setting, the distance from the side of the corresponding strain beam 13 is relatively close, so it also has the detection performance of force in the Fx or Fy direction and torque in the Mz direction. Therefore, it can be combined to form a corresponding Wheatstone bridge according to the detection requirements, with ingenious design and good flexibility.

[0069] Specifically, for ease of understanding, Fig.11 As shown, the symmetry axis P of the tilted strain gauge 140 and the symmetry axis in the width direction of the patch surface are Q. The angle between the symmetry axis P and the symmetry axis Q is set between 0-75 degrees. Optionally, the angle between the two can be 15 degrees, or 45 degrees, or 60 degrees, or 75 degrees, and of course, it can also be any other value within the range of 0-75 degrees. Different angles correspond to different detection sensitivities under each channel, so the tilt angle of the tilted strain gauge 140 can be set according to the requirements of the detection channel, and the setting flexibility is good.

[0070] In some embodiments, Fig.11 As shown, two inclined strain gauges 140 are symmetrically arranged relative to the symmetry axis in the width direction of the patch surface. In this way, at least one inclined strain gauge 140 is arranged on both sides of the symmetry axis Q. Moreover, each inclined strain gauge 140 on both sides is inclined in two different directions, so that deformations in different directions can be detected respectively. In this way, with the mutual complementation of the detection functions of each inclined strain gauge 140 on both sides, deformations occurring on both sides in the same detection direction as the inclined strain gauge 140 can basically be detected, further improving the sensitivity and accuracy of the detection.

[0071] In some embodiments, Fig.12 As shown, the strain gauge 14 includes a substrate 141 and a strain unit, and the strain unit is solidified on one side of the substrate 141; wherein, on the first patch surface 131 and the second patch surface where at least two strain gauges 14 are respectively attached, each strain unit is independent, and each substrate 141 is not connected. In this arrangement, each strain gauge 14 is a single independent part, so that when attached, the attached position can be adjusted according to different detection requirements, and the arrangement flexibility is good, which can meet different arrangement requirements.

[0072] Specifically, the strain unit is used to change with the deformation of the strain beam 13, and then generate a corresponding detection signal. The strain unit is usually made of a thin wire made of a material such as constantan, nickel-chromium alloy, etc., and then wound into a grid or spiral shape so that it can effectively sense the deformation when subjected to force. The strain unit can be fixedly connected to the surface of the substrate 141 by an adhesive, and the shape of the strain unit supported by the substrate 141 remains basically stable.

[0073] The substrate 141 is usually made of a thin sheet of polyimide material, which has good insulation performance and the ability to transmit strain. In some special applications, ceramic materials are also used as the substrate 141 to provide higher stability and high temperature resistance.

[0074] In some embodiments, Fig.12 As shown, the strain gauge 14 includes a substrate 141 and a strain unit 142, and the strain unit 142 is cured on one side of the substrate 141; wherein, on the first patch surface 131 and the second patch surface where at least two strain gauges 14 are respectively attached, each strain unit 142 is independent and fixed on the same substrate 141. In this arrangement, each strain unit 142 is combined with the same substrate 141 to form an integrated strain gauge 14, so that by performing an operation of fixing the substrate 141 on the strain beam 13 once, multiple strain units 142 can be attached. That is, at least multiple strain units 142 can be attached at one time, without the need to attach them one by one, saving the attachment steps of the strain gauge 14, thereby improving the attachment efficiency of the strain gauge 14. Furthermore, the position and firmness of each strain unit 142 fixed on the base 141 have been completed in advance, so when pasting and fixing on the strain beam 13, it is only necessary to ensure the accuracy of the pasting position of the base 141 to achieve accurate pasting of each strain unit 142. At the same time, the consistency of pasting of each strain unit 142 can be ensured, so that each strain unit 142 has a more sensitive detection performance, thereby improving the sensitivity and accuracy of detection of each strain unit 142 pasted on the strain beam 13.

[0075] In some embodiments, Figure 1As shown, the strain gauge 14 includes a substrate 141 and a strain unit 142, and the strain unit 142 is solidified on one side of the substrate 141; wherein, on the first patch surface 131 and the second patch surface where at least three strain gauges 14 are respectively attached, at least one strain unit 142 is fixed on one substrate 141 alone, and at least two strain units 142 are fixed on another substrate 141 together. This arrangement constitutes a combination of a single strain gauge 14 and an integrated strain gauge 14, which has the advantages of both types and can also improve the flexibility of the arrangement of each strain gauge 14.

[0076] In some embodiments, Figure 1 As shown, the outline shape of the base 141 is set to be rectangular or T-shaped. In this way, when the shape of the base 141 at least satisfies the arrangement of each group of strain units 142. The base 141 of this shape can also be used to preliminarily know the position and shape type of each strain unit 142 when it is necessary to arrange each strain unit 142 into a rectangle or T shape according to the shape of the base 141 itself. At this time, the shape of the base 141 plays a role in guiding the arrangement, which improves the accuracy of the position of each strain unit 142 when arranging and the convenience of arrangement.

[0077] In order to facilitate understanding of the detection principle of the multi-dimensional force sensor 1 provided in the embodiment of the present invention, an example is given in which the same number of strain gauges 14 are symmetrically attached to the first patch surface 131 and the second patch surface of each strain beam 13. Fig.13 As shown, four strain gauges 14 are respectively attached to each patch, and are distributed in a T-shaped manner; each strain gauge 14 attached on the back is marked with RX'. In this way, R11 and R11' indicate that the strain gauges 14 respectively attached on the two opposite patch surfaces are numbered R11 and R11', and the others are not repeated. Under this distribution method, due to the design of the three strain beams 13, the structure cannot be decoupled, and the strain gauges 14 used to detect the six channels are mixed together. There are many solutions for selecting the corresponding strain gauges 14 for each channel to form a Wheatstone bridge, which can be randomly matched. There is no channel distinction between FX, FY, FZ, MX, MY and MZ before decoupling. It is necessary to combine the corresponding analysis method, and then analyze and process the detection signals of each channel through software decoupling to obtain the corresponding detection signals.

[0078] The bridge composed of each channel is as follows Fig.14 As shown, under this configuration, each detection channel can also constitute a full bridge, so that the multi-dimensional force sensor 1 has a higher detection sensitivity and can better meet the detection requirements.

[0079] In another embodiment, Fig.14As shown, four strain gauges 14 are respectively affixed to each patch, and are distributed in a quadrilateral; each strain gauge 14 affixed on the back is marked with RX'. In this way, R11 and R11' indicate that the strain gauges 14 respectively affixed on the two opposite patch surfaces are numbered R11 and R11', and the others are not repeated. Under this distribution method, due to the design of the three strain beams 13, the structure cannot be decoupled, and the strain gauges 14 used to detect the six channels are mixed together. There are many solutions for selecting the corresponding strain gauges 14 for each channel to form a Wheatstone bridge, which can be randomly matched. There is no channel distinction between FX, FY, FZ, MX, MY and MZ before decoupling. It is necessary to combine the corresponding analysis method, and then analyze and process the detection signals of each channel through software decoupling to obtain the corresponding detection signals.

[0080] The bridge composed of each channel is as follows Fig.14 As shown, under this configuration, each detection channel can also constitute a full bridge, so that the multi-dimensional force sensor 1 has a higher detection sensitivity and can better meet the detection requirements.

[0081] The embodiment of the present invention further provides a processing method for processing the multi-dimensional force sensor 1 described in any of the above embodiments. The processing method comprises:

[0082] 1) Select the outer frame 11, the inner support 12 and the strain beam 13, and set the inner support 12 in the receiving hole of the outer frame 11, and make a gap between the outer frame 11 and the inner support 12. The position where the inner support 12 is set in the receiving hole 110 can be circumferential, and the interval size of each position can be kept equal, or it can be unequal.

[0083] 2) The strain beam 13 is arranged in the interval and connected between the outer frame 11 and the inner support 12; three strain beams 13 are arranged, and the first patch surface 131 with a flat surface of each strain beam 13 faces the same direction as the first surface, and the second patch surface with a flat surface of each strain beam 13 faces the same direction as the second surface. In this way, there are no other parts blocking the first patch surface 131 and the second patch surface, which is conducive to the arrangement of the strain gauge 14.

[0084] 3) Clean each first patch surface 131 and each second patch surface to make sure that there is no dust, oil or other impurities on each patch surface. Then, respectively, apply strain gauges 14. Strain gauges 14 are applied to each first patch surface 131 and second patch surface on at least one strain beam 13, and the total number of strain gauges 14 applied to each first patch surface 131 and the total number of strain gauges 14 applied to each second patch surface are not less than six. The strain gauges 14 can be fixed by adhesive bonding with glue, or the silicon strain gauges 14 can be fixed by glass micro-melting process. Moreover, the applied strain gauges 14 are independent of each other; or the strain gauges 14 are connected as a whole; or at least one strain gauge 14 is independent, and at least two strain gauges 14 are connected as a whole. That is, the strain gauges 14 installed can be completely independent parts, or they can be integrated strain gauges 14 connected as a whole, or they can be a combination of independent strain gauges 14 and integrated strain gauges 14. The selection can be made according to the specific patch requirements, and the patch has good flexibility.

[0085] 4) Arrange the circuit board, the circuit board is arranged coplanarly with each strain gauge 14, or is separated from the plane where each strain gauge 14 is located by a preset distance, which is not greater than 10 mm. And fix the circuit board on the outer frame 11 and / or the internal support 12. Make the position of the circuit board 21 stable.

[0086] 5) Place the first patch surface 131 on any strain beam 13 with the strain gauge 14 facing upward, and perform wire welding on each strain gauge 14 in the first patch surface 131. The welding method can be manual welding or automatic welding using a wire welding machine, so that each strain gauge 14 in the first patch surface 131 is electrically connected to the circuit board through the wires; then perform wire welding on another strain beam 13 with the strain gauge 14 in the first patch surface 131, and do this until all the strain gauges 14 in each first patch surface 131 of the three strain beams 13 are electrically connected to the circuit board. Specifically, each strain gauge 14 has two independent pads, and each pad is electrically connected to the corresponding welding position on the circuit board through the wires to achieve the transmission of the detection signal.

[0087] 6) Flip the multi-dimensional force sensor so that the second patch surface on any strain beam 13 faces upward, and perform lead welding on each strain gauge 14 in the second patch surface. The welding method can be manual welding or automatic welding using a wire welding machine, so that each strain gauge 14 in the second patch surface is electrically connected to the circuit board through the lead wire; then, perform lead welding on another strain beam 13 with a strain gauge 14 on the second patch surface; this operation is performed until all the strain gauges 14 in the second patch surfaces of the three strain beams 13 are electrically connected to the circuit board, and the processing of the multi-dimensional force sensor is completed.

[0088] The execution order of step 5 and step 6 can be interchanged, that is, the order of wire welding the strain gauges 14 in each first patch surface 131 and wire welding the strain gauges 14 in each second patch surface can be interchanged, which is not limited here.

[0089] The processing method provided in the embodiment of the present invention is simple in patching operation because the strain gauges 14 to be attached to each strain beam 13 on the multi-dimensional force sensor 1 are attached to two opposite patch surfaces, and there is no need to change the patch position over a large range, which also improves the efficiency of patching. At the same time, since there is no obstruction above each patch surface, there is no other part obstructing the welding direction, which also improves the convenience of welding operation. The processing method can quickly realize the processing of the multi-dimensional force sensor 1, which is conducive to improving production efficiency.

[0090] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A multi-dimensional force sensor, characterized in that: include: An outer frame, with a mounting hole formed therein, the mounting hole passing through a first surface and a second surface of the outer frame, the first surface and the second surface being opposite to each other; An internal support platform is arranged in the mounting hole, and the external body frame surrounds the outer side of the internal support platform and has a gap between the internal support platform and the external body frame; A strain beam is arranged in the interval and connected between the outer frame and the inner support platform, and the side of the strain beam extends straightly; three strain beams are arranged, and each of the strain beams has at least one first patch surface facing the same direction as the first surface and one second patch surface facing the same direction as the second surface; A strain gauge, used for detecting the strain of the strain beam, wherein the total number of the strain gauges attached to each of the first patch surfaces and the total number of the strain gauges attached to each of the second patch surfaces are no less than six; Wherein, among the three strain beams; The strain gauges are respectively mounted on the first patch surface and the second patch surface of each of the strain beams; or, The strain gauge is attached to the first patch surface and the second patch surface of one of the strain beams, respectively, and the strain gauge is attached to the first patch surface or the second patch surface of two of the strain beams; or, The strain gauges are respectively attached to the first patch surface and the second patch surface on the two strain beams, and the strain gauges are attached to the first patch surface or the second patch surface on one strain beam.

2. The multi-dimensional force sensor according to claim 1, characterized in that: On the first patch surface and the second patch surface of the same strain beam, the strain gauges provided include any one of the following methods: The strain gauges are installed in equal numbers and at the same locations; or, The strain gauges are installed in equal numbers but at different locations; or The number and location of the strain gauges are different.

3. The multi-dimensional force sensor according to claim 1, characterized in that: The strain gauges are distributed on the first patch surface and the second patch surface in any one of the following ways: In the first patch surface and the second patch surface on which one strain gauge is attached, the strain gauge is located on the side of the corresponding patch surface or on the symmetry axis in the width direction of the corresponding patch surface; or, In the first patch surface and the second patch surface on which the two strain gauges are respectively attached, the two strain gauges are respectively located at two opposite sides of the corresponding patch surface, or are located side by side on the same side, or one strain gauge is located at the side of the corresponding patch surface, and the symmetry axis of the other strain gauge is collinear with the symmetry axis of the width direction of the corresponding patch surface; or, In the first patch surface and the second patch surface on which the three strain gauges are respectively attached, the strain gauges are at least distributed in a T-shape or an L-shape, or are arranged at intervals on the same straight line; or, In the first patch surface and the second patch surface on which four strain gauges are respectively attached, the strain gauges are distributed in a T-shape, or are arranged at intervals on the same straight line, or are distributed in a quadrilateral; or, In the first patch surface and the second patch surface on which at least five strain gauges are respectively attached, the strain gauges are distributed in a T-shape, an L-shape, an I-shape, or a quadrilateral.

4. The multi-dimensional force sensor according to claim 1, characterized in that: On the first patch surface and the second patch surface on which at least two strain gauges are respectively attached, each strain gauge is arranged in parallel along the length direction of the corresponding patch surface, and the symmetry axis of each strain gauge is collinear with the symmetry axis of the corresponding patch surface in the width direction.

5. The multi-dimensional force sensor according to claim 4, characterized in that: The strain gauges arranged in parallel include at least one inclined strain gauge, and the angle between the symmetry axis of the inclined strain gauge and the symmetry axis in the width direction of the patch surface is between 0 and 75 degrees.

6. The multi-dimensional force sensor according to claim 1, characterized in that: The strain gauge includes a substrate and a strain unit, and the strain unit is solidified on one side of the substrate; wherein, in the first patch surface and the second patch surface on which at least two strain gauges are respectively attached, the strain units are independent of each other, and the substrates are not connected.

7. The multi-dimensional force sensor according to claim 1, characterized in that: The strain gauge includes a substrate and a strain unit, and the strain unit is solidified on one side of the substrate; wherein, in the first patch surface and the second patch surface on which at least two strain gauges are respectively attached, the strain units are independent of each other and fixed on the same substrate.

8. The multi-dimensional force sensor according to claim 1, characterized in that: The strain gauge includes a substrate and a strain unit, and the strain unit is solidified on one side of the substrate; wherein, in the first patch surface and the second patch surface on which at least three strain gauges are respectively attached, at least one strain unit is individually fixed on one substrate, and at least two strain units are jointly fixed on another substrate.

9. The multi-dimensional force sensor according to claim 7 or 8, characterized in that: The outline shape of the base is set to be rectangular or T-shaped.

10. A processing method for processing a multi-dimensional force sensor as claimed in any one of claims 1 to 9, characterized in that: The processing method comprises: 1) Selecting an outer frame, an inner support platform and a strain beam, setting the inner support platform in the receiving hole of the outer frame, and providing a gap between the outer frame and the inner support platform; 2) The strain beam is arranged in the interval and connected between the outer frame and the inner support platform; three strain beams are arranged, and the first patch surface of each strain beam with a flat surface faces the same direction as the first surface, and the second patch surface of each strain beam with a flat surface faces the same direction as the second surface; 3) Cleaning each of the first patch surfaces and each of the second patch surfaces, and then attaching strain gauges respectively, wherein the first patch surface and the second patch surface on at least one of the strain beams are both attached with the strain gauges, and the total number of the strain gauges attached on each of the first patch surfaces and the total number of the strain gauges attached on each of the second patch surfaces are not less than six; wherein the attached strain gauges are independent of each other; or the strain gauges are connected as a whole; or at least one of the strain gauges is independent, and at least two of the strain gauges are connected as a whole; 4) Arranging a circuit board, wherein the circuit board is arranged coplanarly with each of the strain gauges, or is spaced a preset distance from the plane where each of the strain gauges is located, and fixing the circuit board on the outer frame and / or the internal support platform; 5) Place the first patch surface on any one of the strain beams with the strain gauge attached thereon upward, perform lead welding on each of the strain gauges on the first patch surface, so that each of the strain gauges on the first patch surface is electrically connected to the circuit board through the lead wires; then perform lead welding on another strain beam on which the strain gauge is attached thereon, until all the strain gauges on the first patch surfaces of the three strain beams are electrically connected to the circuit board; 6) Flip the multi-dimensional force sensor so that the second patch surface on any one of the strain beams faces upward, and perform lead welding on each of the strain gauges on the second patch surface so that each of the strain gauges on the second patch surface is electrically connected to the circuit board through a lead wire; then perform lead welding on another strain beam with the strain gauges on the second patch surface until all the strain gauges on the second patch surfaces of the three strain beams are electrically connected to the circuit board, thereby completing the processing of the multi-dimensional force sensor; The execution order of step 5 and step 6 can be interchanged.

Images