Automatic detection method for performance of optical lens group

Abstract

The invention discloses an automatic detection method for the performance of an optical lens group, the optical lens group is composed of all optical lenses or part of optical lenses of an optical system, and the detection method comprises the following steps: 1) optimizing a wavefront aperture; 2) acquiring a zero wavefront; 3) establishing a mapping model; (4) rough installation and adjustment; 5) carrying out iterative installation and adjustment; and 6) performance detection. The automatic detection method does not depend on model parameters of the optical system, and is high in detection precision and efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of optical lens group assembly and performance detection, and in particular to an automatic detection method for the performance of an optical lens group. Background Art

[0002] Optical systems composed of mirror groups have been widely used in the fields of lens imaging, industrial measurement, semiconductors, etc., showing a strong influence. Among them, system design, optical mirror group component manufacturing and optical mirror group assembly will affect the final quality of the optical system and the performance measurement results of the optical system. There are few parts related to automated performance measurement in existing optical system research, which leads to limitations in the application of optical systems.

[0003] Optical system performance testing is usually achieved by manually adjusting the optical system with the help of optical system measurement equipment such as laser interferometers and transducers. The measurement results are extremely dependent on manual adjustment, and the measurement results are highly subjective. The entire measurement process has problems such as extremely low automation, low efficiency, and poor robustness.

[0004] The premise of realizing the automated performance measurement of optical systems is to realize the automated adjustment of optical mirror groups. In addition to realizing the optimal performance adjustment of complete imaging systems, it is also possible to realize the automated adjustment of incomplete imaging systems. According to different adjustment methods, optical mirror group adjustment technology can be divided into: manual adjustment and computer-aided adjustment. Manual adjustment uses theodolites, laser interferometers, etc., combined with manual adjustment experience to adjust the optical mirror group. This adjustment method has the problems of low efficiency, poor robustness, large environmental disturbance influence, and inconsistent evaluation standards. The computer-aided adjustment (CAA) method analyzes the system wavefront, calculates the system misalignment, and realizes the automatic adjustment of the optical mirror group by adjusting the control motion mechanism. According to different methods of calculating the misalignment, it can be divided into: sensitivity matrix model, inverse optimization method, global optimization algorithm and artificial neural network method. The principles of the sensitivity matrix method and the artificial neural network method are to establish a wavefront and misalignment mapping model, and calculate the system misalignment corresponding to the current wavefront based on the model. This method requires a large amount of wavefront and misalignment mapping data to ensure the correct establishment of the model, so it is mostly used for the adjustment of optical mirror groups with known design model parameters. The inverse optimization method imports the wavefront into commercial software such as ZEMAX and CodeV, and calculates the system misalignment in combination with the design model parameters of the optical system. The global optimization algorithm is a random global search algorithm that solves the system misalignment by simulating biological evolution. The adjustment accuracy of this method is proportional to the time, and the efficiency of optical system adjustment is generally low.

[0005] In summary, there is an urgent need for an automated performance detection method for optical mirror groups that is independent of model parameters and has higher detection accuracy and efficiency. Summary of the invention

[0006] In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide an automated detection method for the performance of an optical lens group that is independent of the model parameters of the optical system and has high detection accuracy and efficiency.

[0007] The present invention provides an automated detection method for the performance of an optical lens group, wherein the optical lens group is composed of all or part of the optical lenses of an optical system, and the detection method comprises the following steps:

[0008] 1) Wavefront aperture optimization;

[0009] Fixing the optical mirror group on the motion mechanism, obtaining the position parameters of the motion mechanism when the wavefront aperture of the optical mirror group is the largest, and completing the wavefront aperture adjustment of the optical mirror group according to the position parameters;

[0010] 2) Obtaining the zero-position wavefront;

[0011] The wavefront of the optical mirror group is obtained by a wavefront measuring device as the zero-position wavefront RMS1;

[0012] 3) Establish a mapping model;

[0013] According to the movement amount a of the motion mechanism when the zero-position wavefront RMS1 changes to 2 times, a mapping model M1 between the movement amount of the optical mirror group and the polynomial fitting coefficient of the wavefront change amount is established;

[0014] 4) Rough installation and adjustment;

[0015] 41) Optimize function E based on zero wavefront RMS1 Z An optimization problem is established, and the quasi-Newton method is used in combination with M1 to solve the optimization problem, and the position parameter b1 of the motion mechanism corresponding to the local optimum of the zero-position wavefront RMS1 is obtained; after the motion mechanism drives the optical mirror group to move according to the position parameter b1, the wavefront RMS2 of the optical mirror group is obtained;

[0016]

[0017] Among them, S W is the area of ​​the minimum enclosing polyhedron of the wavefront projection on the xoy plane;

[0018] Z is the wavefront height;

[0019] n is the number of discrete points that make up the wavefront;

[0020] 42) Setting the movement amount of the motion mechanism to 0.5a, obtaining a mapping model M2 between the movement amount of the updated optical mirror group and the polynomial fitting coefficient of the wavefront variation;

[0021] 43) Optimize function E based on wavefront RMS2 ZAn optimization problem is established, and the quasi-Newton method is used in combination with M2 to solve the optimization problem, and the position parameter b2 of the motion mechanism corresponding to the local optimum of the wavefront RMS2 is obtained; after the motion mechanism drives the optical mirror group to move according to the position parameter b2, the wavefront RMS3 of the optical mirror group is obtained;

[0022] 44) Calculate the wavefront change c1 of wavefront RMS3 relative to the zero-position wavefront RMS1; when c1≥25nm, take wavefront RMS3 as the new zero-position wavefront RMS1 and repeat steps 41)-43); when c1<25nm, complete the rough adjustment of the optical mirror group and proceed to the next step;

[0023] 5) Iterative adjustment;

[0024] After the rough adjustment is completed, the optical mirror group is in the local optimal position; according to the wavefront RMS3 optimization function E after the rough adjustment is completed G Formulate optimization problems;

[0025]

[0026] Among them, S W is the area of ​​the minimum enclosing polyhedron of the wavefront projection on the xoy plane;

[0027] Z is the wavefront height;

[0028] n is the number of discrete points that make up the wavefront;

[0029] The above problem is searched near the local optimum to assist the optical mirror group to escape from the local optimum position and obtain the position parameter b3 of the corresponding motion mechanism; after the motion mechanism drives the optical mirror group to move according to the position parameter b3, the wavefront RMS of the optical mirror group is obtained. x , calculate the wavefront RMS x The wavefront change c2 relative to the zero-position wavefront RMS1;

[0030] When c2 ≥ 50nm, the wavefront RMS x As the new zero wavefront RMS1, repeat steps 4)-5); when c1<50nm, the iterative adjustment is completed and proceed to the next step;

[0031] 6) Performance testing;

[0032] After completing the iterative adjustment, the performance of the optical mirror group is measured using a wavefront measurement device.

[0033] Furthermore, in step 1), the wavefront aperture optimization function E S Establish an optimization problem, solve the optimization problem, and obtain the position parameters of the motion mechanism when the wavefront aperture of the optical mirror group is the largest;

[0034]

[0035] Among them, S W is the area of ​​the minimum enclosing polyhedron of the wavefront projection on the xoy plane;

[0036] Z is the wavefront height;

[0037] n is the number of discrete points that make up the wavefront.

[0038] Furthermore, in step 3), establishing the mapping model includes the following steps:

[0039] 31) According to the movement amount a of the motion mechanism when the zero-position wavefront RMS1 changes to 2 times, the motion mechanism is controlled to move quantitatively along the directions of its various degrees of freedom, and the wavefronts corresponding to the number of the optical lens group and the number of degrees of freedom are obtained as the motion wavefront;

[0040] 32) Find the adjacent points of the moving wavefront in the zero-position wavefront RMS1 and make a difference to obtain the moving change wavefront;

[0041] 33) fitting the motion change wavefront using a polynomial to obtain polynomial fitting coefficients corresponding to the motion change wavefront;

[0042] 34) Based on the approximate linear characteristics between the polynomial fitting coefficients and the motion of the optical mirror group, a mapping model M1 between the motion of the optical mirror group and the fitting coefficients of the wavefront change is established.

[0043] Furthermore, the motion mechanism is a six-degree-of-freedom motion platform.

[0044] Furthermore, in step 6), the performance test includes the following steps:

[0045] 61) Obtaining multiple groups of measurement results of the output wavefront of the optical mirror group after iterative fine adjustment through a wavefront measurement device;

[0046] 62) Eliminate outliers from multiple groups of measurement results of the optical mirror group, and then perform weighted processing on the remaining measurement results; complete the performance test of the optical mirror group.

[0047] Furthermore, the wavefront measurement device is a laser interferometer.

[0048] Compared with the prior art, the beneficial effects of the present invention are:

[0049] The automatic detection method of the present invention proposes an adjustment method that does not rely on the design model parameters of the optical system on the basis of the CAA adjustment theory, establishes a mapping model of the motion amount and the wavefront change amount of the optical mirror group by controlling the motion of the motion mechanism, and then adjusts the wavefront aperture and wavefront of the optical mirror group respectively; adopts an optimization algorithm for rough adjustment, and after the rough adjustment falls into a local optimum, gradually improves the adjustment accuracy of the optical mirror group by using an iterative fine adjustment method, while ensuring the adjustment accuracy, greatly improving the adjustment efficiency. Finally, the robustness of the optical mirror group performance detection is improved by eliminating outliers and weighting methods.

[0050] The present application combines the optimization algorithm with the iterative optimization strategy to realize the automated adjustment of the optical mirror group, and then realizes the automated performance detection of the optical mirror group, which is independent of the model parameters of the optical system and has high detection accuracy and efficiency.

[0051] It should be understood that the contents described in the summary of the invention are not intended to limit the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] Other features, objects and advantages of the present invention will become more apparent from the detailed description of non-limiting embodiments made with reference to the following drawings:

[0053] Figure 1 The process intention of the automated detection method for the performance of optical mirror groups;

[0054] Figure 2 It is a schematic diagram of the structure of the optical mirror group installed in the detection system;

[0055] Figure 3 Schematic diagram of the output wavefront during the adjustment process.

[0056] Numbers in the figure: 1, optical system; 2, detection system;

[0057] 11. Primary mirror; 12. Secondary mirror; 13. Reflector;

[0058] 21. Laser interferometer; 22. Six-degree-of-freedom motion platform; 23. Bracket. DETAILED DESCRIPTION

[0059] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the relevant invention, rather than to limit the invention. It should also be noted that, for ease of description, only the parts related to the invention are shown in the accompanying drawings.

[0060] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0061] Please refer to Figure 1 to Figure 3 The embodiment of the present invention provides an automated detection method for the performance of an optical mirror group, wherein the optical mirror group is composed of all or part of the optical mirrors of an optical system, and the detection method comprises the following steps:

[0062] 1) Wavefront aperture optimization;

[0063] The optical mirror group is fixed on a six-degree-of-freedom motion platform, and the function E is optimized according to the wavefront aperture. S Establish an optimization problem, solve the optimization problem (including but not limited to using a deep learning algorithm, a genetic algorithm, etc.), obtain the position parameters of the motion mechanism when the wavefront aperture of the optical mirror group is maximum; complete the wavefront aperture adjustment of the optical mirror group according to the position parameters;

[0064]

[0065] Among them, S W is the area of ​​the minimum enclosing polyhedron of the wavefront projection on the xoy plane;

[0066] Z is the wavefront height;

[0067] n is the number of discrete points that make up the wavefront;

[0068] 2) Obtaining the zero-position wavefront;

[0069] The wavefront of the optical mirror group is obtained by a laser interferometer as the zero-position wavefront RMS1;

[0070] 3) Establish a mapping model;

[0071] 31) According to the movement amount a of the six-degree-of-freedom motion platform when the zero-position wavefront RMS1 changes to 2 times, the six-degree-of-freedom motion platform is controlled to move quantitatively along the directions of each degree of freedom of motion, and the wavefronts corresponding to the number of the optical mirror group and the number of degrees of freedom of motion are obtained as the motion wavefront;

[0072] 32) Find the adjacent points of the moving wavefront in the zero-position wavefront RMS1 (including but not limited to the divide-and-conquer method, KD tree search method, approximate point gradient method, etc.) and make a difference to obtain the moving change wavefront;

[0073] 33) fitting the motion change wavefront using a polynomial to obtain polynomial fitting coefficients corresponding to the motion change wavefront;

[0074] 34) According to the approximate linear characteristics between the polynomial fitting coefficient and the motion of the optical mirror group, a mapping model M1 between the motion of the optical mirror group and the fitting coefficient of the wavefront change is established;

[0075] 4) Rough installation and adjustment;

[0076] 41) Optimize function E based on zero wavefront RMS1 Z An optimization problem is established, and the quasi-Newton method is used in combination with M1 to solve the optimization problem, and the position parameter b1 of the six-degree-of-freedom motion platform corresponding to the local optimum of the zero-position wavefront RMS1 is obtained; after the six-degree-of-freedom motion platform drives the optical mirror group to move according to the position parameter b1, the wavefront RMS2 of the optical mirror group is obtained;

[0077]

[0078] Among them, S W is the area of ​​the minimum enclosing polyhedron of the wavefront projection on the xoy plane;

[0079] Z is the wavefront height;

[0080] n is the number of discrete points that make up the wavefront;

[0081] 42) Setting the motion of the six-degree-of-freedom motion platform to 0.5a, obtaining a mapping model M2 between the motion of the updated optical mirror group and the polynomial fitting coefficient of the wavefront variation;

[0082] 43) Optimize function E based on wavefront RMS2 Z An optimization problem is established, and the quasi-Newton method is used in combination with M2 to solve the optimization problem, and the position parameter b2 of the six-degree-of-freedom motion platform corresponding to the local optimum of the wavefront RMS2 is obtained; after the six-degree-of-freedom motion platform drives the optical mirror group to move according to the position parameter b2, the wavefront RMS3 of the optical mirror group is obtained;

[0083] 44) Calculate the wavefront change c1 of wavefront RMS3 relative to the zero-position wavefront RMS1; when c1≥25nm, take wavefront RMS3 as the new zero-position wavefront RMS1 and repeat steps 41)-43); when c1<25nm, complete the rough adjustment of the optical mirror group and proceed to the next step;

[0084] 5) Iterative adjustment;

[0085] After the rough adjustment is completed, the optical mirror group is in the local optimal position; according to the wavefront RMS3 optimization function E after the rough adjustment is completed G Formulate optimization problems;

[0086]

[0087] Among them, S Wis the area of ​​the minimum enclosing polyhedron of the wavefront projection on the xoy plane;

[0088] Z is the wavefront height;

[0089] n is the number of discrete points that make up the wavefront;

[0090] The GA genetic algorithm is used to search for the above problem near the local optimum, assisting the optical mirror group to escape from the local optimal position, and obtaining the position parameter b3 of the corresponding six-degree-of-freedom motion platform; after the six-degree-of-freedom motion platform drives the optical mirror group to move according to the position parameter b3, the wavefront RMS of the optical mirror group is obtained. x , calculate the wavefront RMS x The wavefront change c2 relative to the zero-position wavefront RMS1;

[0091] When c2 ≥ 50nm, the wavefront RMS x As the new zero wavefront RMS1, repeat steps 4)-5); when c1<50nm, the iterative adjustment is completed and proceed to the next step;

[0092] 6) Performance testing;

[0093] 61) Obtain multiple groups of measurement results of the output wavefront of the optical mirror group after iterative fine adjustment by laser interferometer;

[0094] 62) Eliminate abnormal values ​​from multiple groups of measurement results of the optical mirror group (including but not limited to using filtering, interpolation, threshold segmentation method, etc.), and then perform weighted processing on the remaining measurement results; complete the performance detection of the optical mirror group.

[0095] In this embodiment, when the optical lens group is composed of all the optical lenses of the optical system, the performance of the optical lens group is the performance of the optical system. When the optical lens group is composed of part of the optical lenses of the optical system, the detection method of the present application can also detect the performance of the optical lens group.

[0096] As Figure 2 Taking the optical system 1 shown as an example, the optical system 1 is composed of three optical elements, namely the primary mirror 11, the secondary mirror 12 and the reflector 13. When the performance is tested, it is installed on the detection system 2, which is composed of a laser interferometer 21, a six-degree-of-freedom motion platform 22 and a bracket 23. The wavefront of the optical system 1 is obtained by the laser interferometer 21, the primary mirror 11 and the secondary mirror 12 are each installed on a set of six-degree-of-freedom motion platforms 22, and the reflector 13 is fixed by the bracket 23.

[0097] By real-time monitoring of the wavefront distribution captured by the laser interferometer 21, the six-degree-of-freedom motion platform 22 is adjusted to drive the primary mirror 11 or the secondary mirror 12 to move, thereby achieving the optimal adjustment of the wavefront of the optical mirror group;

[0098] The adjustment process is as follows Figure 3 As shown, the rough adjustment is first performed by setting the wavefront aperture optimization function E S The wavefront aperture of the optical mirror group is adjusted so that the wavefront aperture of the adjusted optical mirror group is roughly the same as the theoretical value.

[0099] When the wavefront aperture is complete, the quasi-Newton method is combined with the optimization function E Z The wavefront of the optical mirror group is adjusted by a mapping model between the movement amount of the optical mirror group and the polynomial fitting coefficient of the wavefront change amount. At this time, the wavefront of the optical mirror group falls into a local minimum.

[0100] Search near the local minimum to help the optical mirror group escape the local minimum, and then use the quasi-Newton method combined with the loss function E Z The wavefront of the optical mirror group is adjusted by using the mapping model of motion and wavefront change, and the above process is repeated until the wavefront change is less than 50nm, completing the adjustment of the optical mirror group. Finally, the abnormal values ​​in the multiple measurement results of the optical mirror group are eliminated to realize the automated performance detection of the optical mirror group.

[0101] The automated detection method of the present application proposes an adjustment method that is independent of the design model parameters of the optical system on the basis of the CAA adjustment theory. The mapping model of the motion amount and the wavefront change amount of the optical mirror group is established by controlling the motion of the motion mechanism, and then the wavefront aperture and wavefront of the optical mirror group are adjusted respectively; the optimization algorithm is used for rough adjustment, and after the rough adjustment falls into the local optimum, the adjustment accuracy of the optical mirror group is gradually improved by using the iterative fine adjustment method, while ensuring the adjustment accuracy, the adjustment efficiency is greatly improved. Finally, the robustness of the performance detection of the optical mirror group is improved by the outlier elimination and weighted method. Combining the optimization algorithm with the iterative optimization strategy, the automated adjustment of the optical mirror group is realized, and then the automated performance detection of the optical mirror group is realized, which is independent of the model parameters of the optical system and has high detection accuracy and efficiency.

[0102] In the description of this specification, the description of the terms "one embodiment", "some embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0103] The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An automated detection method for the performance of an optical lens group, characterized in that: The optical mirror group is composed of all or part of the optical mirrors of the optical system, and the detection method comprises the following steps: 1) Wavefront aperture optimization; Fixing the optical mirror group on the motion mechanism, obtaining the position parameters of the motion mechanism when the wavefront aperture of the optical mirror group is the largest, and completing the wavefront aperture adjustment of the optical mirror group according to the position parameters; 2) Obtaining the zero-position wavefront; The wavefront of the optical mirror group is obtained by a wavefront measuring device as the zero-position wavefront RMS1; 3) Establish a mapping model; According to the movement amount a of the motion mechanism when the zero-position wavefront RMS1 changes to 2 times, a mapping model M1 between the movement amount of the optical mirror group and the polynomial fitting coefficient of the wavefront change amount is established; 4) Rough installation and adjustment; 41) Optimize function E based on zero wavefront RMS1 Z An optimization problem is established, and the quasi-Newton method is used in combination with M1 to solve the optimization problem, and the position parameter b1 of the motion mechanism corresponding to the local optimum of the zero-position wavefront RMS1 is obtained; after the motion mechanism drives the optical mirror group to move according to the position parameter b1, the wavefront RMS2 of the optical mirror group is obtained; Among them, S W is the area of ​​the minimum enclosing polyhedron of the wavefront projection on the xoy plane; Z is the wavefront height; n is the number of discrete points that make up the wavefront; 42) Setting the movement amount of the motion mechanism to 0.5a, obtaining a mapping model M2 between the movement amount of the updated optical mirror group and the polynomial fitting coefficient of the wavefront variation; 43) Optimize function E based on wavefront RMS2 Z An optimization problem is established, and the quasi-Newton method is used in combination with M2 to solve the optimization problem, and the position parameter b2 of the motion mechanism corresponding to the local optimum of the wavefront RMS2 is obtained; after the motion mechanism drives the optical mirror group to move according to the position parameter b2, the wavefront RMS3 of the optical mirror group is obtained; 44) Calculate the wavefront change c1 of wavefront RMS3 relative to the zero-position wavefront RMS1; when c1≥25nm, take wavefront RMS3 as the new zero-position wavefront RMS1 and repeat steps 41)-43); when c1<25nm, complete the rough adjustment of the optical mirror group and proceed to the next step; 5) Iterative adjustment; After the rough adjustment is completed, the optical mirror group is in the local optimal position; according to the wavefront RMS3 optimization function E after the rough adjustment is completed G Formulate optimization problems; Among them, S W is the area of ​​the minimum enclosing polyhedron of the wavefront projection on the xoy plane; Z is the wavefront height; n is the number of discrete points that make up the wavefront; The above problem is searched near the local optimum to assist the optical mirror group to escape from the local optimum position and obtain the position parameter b3 of the corresponding motion mechanism; after the motion mechanism drives the optical mirror group to move according to the position parameter b3, the wavefront RMS of the optical mirror group is obtained. x , calculate the wavefront RMS x The wavefront change c2 relative to the zero-position wavefront RMS1; When c2 ≥ 50nm, the wavefront RMS x As the new zero wavefront RMS1, repeat steps 4)-5); when c1<50nm, the iterative adjustment is completed and proceed to the next step; 6) Performance testing; After completing the iterative adjustment, the performance of the optical mirror group is measured using a wavefront measurement device.

2. The method for automatically detecting the performance of an optical lens group according to claim 1, characterized in that: In step 1), according to the wavefront aperture optimization function E S Establish an optimization problem, solve the optimization problem, and obtain the position parameters of the motion mechanism when the wavefront aperture of the optical mirror group is the largest; Among them, S W is the area of ​​the minimum enclosing polyhedron of the wavefront projection on the xoy plane; Z is the wavefront height; n is the number of discrete points that make up the wavefront.

3. The method for automatically detecting the performance of an optical lens group according to claim 1, characterized in that: In the step 3), establishing the mapping model includes the following steps: 31) According to the movement amount a of the motion mechanism when the zero-position wavefront RMS1 changes to 2 times, the motion mechanism is controlled to move quantitatively along the directions of its various degrees of freedom, and the wavefronts corresponding to the number of the optical lens group and the number of degrees of freedom are obtained as the motion wavefront; 32) Find the adjacent points of the moving wavefront in the zero-position wavefront RMS1 and make a difference to obtain the moving change wavefront; 33) fitting the motion change wavefront using a polynomial to obtain polynomial fitting coefficients corresponding to the motion change wavefront; 34) Based on the approximate linear characteristics between the polynomial fitting coefficients and the motion of the optical mirror group, a mapping model M1 between the motion of the optical mirror group and the fitting coefficients of the wavefront change is established.

4. The method for automatically detecting the performance of an optical lens group according to claim 3, characterized in that: The motion mechanism is a six-degree-of-freedom motion platform.

5. The method for automatically detecting the performance of an optical lens group according to claim 1, characterized in that: In step 6), the performance test includes the following steps: 61) Obtaining multiple groups of measurement results of the output wavefront of the optical mirror group after iterative fine adjustment through a wavefront measurement device; 62) Eliminate outliers from multiple groups of measurement results of the optical mirror group, and then perform weighted processing on the remaining measurement results; complete the performance test of the optical mirror group.

6. The method for automatically detecting the performance of an optical lens group according to claim 5, characterized in that: The wavefront measuring device is a laser interferometer.

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