Data processing method and device, test equipment and storage medium

Abstract

The invention relates to a data processing method and device, test equipment and a storage medium, and the method comprises the steps: collecting the initial spectrum data of a target chip comprising basic parameter data and spectrum parameter data corresponding to the basic parameter data, determining the maximum value in the spectrum parameter data, and obtaining the maximum value of the spectrum parameter of the target chip, determining a spectral parameter reference value of the target chip according to the spectral parameter maximum value of the target chip, the spectral parameter reference value of the target chip being located between the spectral parameter maximum value and the spectral parameter minimum value of the target chip, and determining a basic parameter range according to the spectral parameter reference value of the target chip and the basic parameter data, and selecting basic parameter data and corresponding spectral parameter data from the initial spectral data according to the basic parameter range to obtain target spectral data of the target chip. By adopting the method, the selected spectral data can be ensured to be part of the collected spectral data, and the data volume of the spectral data can be reduced.

Description

Technical Field

[0001] The present application relates to the field of chip testing technology, and in particular to a data processing method, device, testing equipment and storage medium. Background Art

[0002] The spectrum test of the chip is an important test of it. The spectrum of the chip can be tested using an integrating sphere and a spectral device. Since the accuracy of a high-precision spectral device is generally around 0.01 nanometers (Nanometer, nm) ~ 0.1 nm, and a wafer includes many chips, the spectral data measured by the integrating sphere is large, resulting in a large amount of data. Summary of the invention

[0003] Based on this, it is necessary to provide a data processing method, device, test equipment and storage medium that can reduce the amount of data in response to the above technical problems.

[0004] In a first aspect, the present application provides a data processing method, comprising:

[0005] Collecting initial spectral data of a target chip, wherein the target chip is any optoelectronic chip on a wafer to be tested, and the initial spectral data includes basic parameter data and spectral parameter data corresponding to the basic parameter data;

[0006] Determine the maximum value in the spectral parameter data to obtain the maximum value of the spectral parameter of the target chip;

[0007] Determine a spectral parameter reference value of the target chip according to the spectral parameter maximum value, wherein the spectral parameter reference value is between the spectral parameter maximum value and the spectral parameter minimum value of the target chip;

[0008] Determining a basic parameter range according to the spectral parameter reference value and the basic parameter data;

[0009] Basic parameter data and corresponding spectral parameter data are selected from the initial spectral data according to the basic parameter range to obtain target spectral data of the target chip.

[0010] In one embodiment, the method further comprises:

[0011] The target spectrum data of the target chip is stored.

[0012] In one embodiment, determining the spectral parameter reference value of the target chip according to the spectral parameter maximum value includes:

[0013] A spectral parameter reference value of the target chip is determined according to the spectral parameter maximum value and a first threshold value.

[0014] In one embodiment, the method further comprises:

[0015] Determine the minimum value in the spectral parameter data to obtain the minimum value of the spectral parameter of the target chip;

[0016] Determining the reference value of the spectral parameter of the target chip according to the maximum value of the spectral parameter includes:

[0017] A spectral parameter reference value of the target chip is determined according to the spectral parameter maximum value and the spectral parameter minimum value.

[0018] In one embodiment, determining the spectral parameter reference value of the target chip according to the spectral parameter maximum value and the spectral parameter minimum value comprises:

[0019] A spectral parameter reference value of the target chip is determined according to the spectral parameter maximum value, the spectral parameter minimum value and the second threshold value.

[0020] In one embodiment, determining the basic parameter range according to the spectral parameter reference value and the basic parameter data includes:

[0021] Determine a spectrum curve according to the initial spectrum data, wherein the abscissa of the spectrum curve is a basic parameter and the ordinate of the spectrum curve is a spectrum parameter;

[0022] Determine the value of the ordinate in the spectrum curve as the value of the abscissa corresponding to the spectrum parameter reference value, and obtain a plurality of basic parameter values;

[0023] Determining a basic parameter range according to a maximum value and a minimum value among the multiple basic parameter values;

[0024] The step of selecting basic parameter data and corresponding spectral parameter data from the initial spectral data according to the basic parameter range to obtain target spectral data of the target chip comprises:

[0025] The data of the point whose abscissa value in the spectrum curve is within the basic parameter range is determined as the target spectrum data of the target chip.

[0026] In one embodiment, determining the basic parameter range according to the maximum value and the minimum value of the multiple basic parameter values ​​includes:

[0027] A range between a maximum value and a minimum value among the plurality of basic parameter values ​​is determined as a basic parameter range.

[0028] In one embodiment, determining the basic parameter range according to the maximum value and the minimum value of the multiple basic parameter values ​​includes:

[0029] Determine a difference between a minimum value among the plurality of basic parameters and a third threshold value to obtain a first basic parameter value;

[0030] Determine the sum of the maximum value of the multiple basic parameters and the third threshold value to obtain a second basic parameter value;

[0031] A range between the first basic parameter value and the second basic parameter value is determined as a basic parameter range.

[0032] In a second aspect, the present application further provides a data processing device, the device comprising:

[0033] An acquisition unit is used to acquire initial spectral data of a target chip, wherein the target chip is any optoelectronic chip on a wafer to be tested, and the initial spectral data includes basic parameter data and spectral parameter data corresponding to the basic parameter data;

[0034] A first determining unit, configured to determine a maximum value in the spectral parameter data to obtain a maximum value of the spectral parameter of the target chip;

[0035] A second determining unit, configured to determine a spectral parameter reference value of the target chip according to the spectral parameter maximum value, wherein the spectral parameter reference value is between the spectral parameter maximum value and the spectral parameter minimum value of the target chip;

[0036] A third determining unit, configured to determine a basic parameter range according to the spectral parameter reference value and the basic parameter data;

[0037] A selection unit is used to select basic parameter data and corresponding spectral parameter data from the initial spectral data according to the basic parameter range to obtain target spectral data of the target chip.

[0038] In a third aspect, the present application also provides a testing device,

[0039] The spectral device is used to collect initial spectral data of a target chip, the target chip is any optoelectronic chip on a wafer to be tested, and the initial spectral data includes basic parameter data and spectral parameter data corresponding to the basic parameter data;

[0040] The processor is used to determine the maximum value in the spectral parameter data to obtain the maximum value of the spectral parameter of the target chip;

[0041] The processor is further configured to determine a spectral parameter reference value of the target chip according to the spectral parameter maximum value, wherein the spectral parameter reference value is between the spectral parameter maximum value and the spectral parameter minimum value of the target chip;

[0042] The processor is further used to determine a basic parameter range according to the spectral parameter reference value and the basic parameter data;

[0043] The processor is further configured to select basic parameter data and corresponding spectral parameter data from the initial spectral data according to the basic parameter range to obtain target spectral data of the target chip.

[0044] In a fourth aspect, the present application further provides a testing device, comprising a memory and a processor, wherein the memory stores a computer program, and the processor implements the steps of the method provided in the first aspect or any embodiment of the first aspect when executing the computer program.

[0045] In a fifth aspect, the present application also provides a computer-readable storage medium having a computer program stored thereon, and the computer program implements the steps of the above-mentioned methods when executed by a processor.

[0046] In a sixth aspect, the present application also provides a computer program product, including a computer program, which implements the steps of the above methods when executed by a processor.

[0047] In the present application, the initial spectral data of the target chip including the basic parameter data and the spectral parameter data corresponding to the basic parameter data are collected, the maximum value in the spectral parameter data is determined, the spectral parameter maximum value of the target chip is obtained, the spectral parameter reference value of the target chip is determined, the spectral parameter reference value of the target chip is between the spectral parameter maximum value and the spectral parameter minimum value of the target chip, the basic parameter range is determined according to the spectral parameter reference value and the basic parameter data of the target chip, the basic parameter data and the corresponding spectral parameter data are selected from the initial spectral data according to the basic parameter range, and the target spectral data of the target chip are obtained. It can be seen that according to the basic parameter range, the spectral data is selected from the initial spectral data of the chip, and the basic parameter range is determined based on the spectral parameter reference value and the basic parameter data of the chip, and the spectral parameter reference value of the chip is based on the maximum value in the spectral parameter data of the chip, and is between the spectral parameter maximum value and the spectral parameter minimum value of the chip, therefore, it can be ensured that the selected spectral data is part of the collected spectral data, and the amount of spectral data can be reduced. In addition, the basic parameter range used in the selection process of spectral data is determined based on the spectral parameter baseline value and basic parameter data of the chip, the spectral parameter baseline value of the chip is determined based on the maximum value in the spectral parameter data, and the spectral parameter maximum value of the chip is determined based on the collected spectral data, that is, the value used in the selection process of spectral data is determined based on the collected spectral data, which can avoid the need for user specification, thereby ensuring the automation of data processing, and improving the effectiveness, universality and flexibility of the selected data. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] In order to more clearly illustrate the technical solutions in the embodiments of the present application or related technologies, the drawings required for use in the embodiments of the present application or related technical descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0049] Figure 1 It is a flowchart of a data processing method provided in an embodiment of the present application;

[0050] Figure 2 is a schematic diagram of a waveform of wavelength spectrum intensity data provided by an embodiment of the present application;

[0051] Figure 3 It is a flowchart of another data processing method provided in an embodiment of the present application;

[0052] Figure 4 A schematic diagram of the structure of a data processing device provided in an embodiment of the present application;

[0053] Figure 5 It is a structural schematic diagram of a test device provided in an embodiment of the present application;

[0054] Figure 6 It is a structural schematic diagram of another testing device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0055] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0056] It should be noted that the terms "first", "second", etc. in the specification and claims of the present disclosure and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present disclosure described herein can be implemented in an order other than those illustrated or described herein.

[0057] The present application provides a data processing method, device, test equipment and storage medium capable of reducing the amount of data.

[0058] In order to better understand the embodiments of the present application, the relevant technology is first described below.

[0059] The spectral test is based on the scattering and integration characteristics of light. It can make the light emitted by the chip after it is lit be evenly distributed in various positions in the integrating sphere, and collect spectral data through the spectral device at the exit of the integrating sphere.

[0060] The resolution of high-precision spectroscopy equipment is between 0.01nm and 0.1nm, that is, for every 1nm increase in wavelength, the data increases by 10 to 100. A wafer may include many chips, such as hundreds of thousands, so the spectral test file of a wafer is very large, which will bring great pressure to subsequent data analysis and processing, data storage and backup, etc.

[0061] The spectrum device collects a lot of spectrum data, but the useful range is relatively narrow. Therefore, in order to reduce the amount of spectrum data, the spectrum data with a certain wavelength value can be selected from the collected spectrum data with the theoretical wavelength of the chip as the center. For example, assuming that the theoretical wavelength of the chip is 850nm and the wavelength value range is ±10nm, it is necessary to select spectrum data with a wavelength of 840nm~860nm from the collected spectrum data. When the accuracy of the spectrum device is 0.01nm, the selected spectrum data includes 2000 data.

[0062] Due to process limitations and differences in actual production, the theoretical wavelengths of different chips will vary to a certain extent. Therefore, the center of the actual wavelength of the chip is different from the theoretical wavelength. In the above method, in order to ensure that the selected spectral data can cover the spectral data of the effective wavelength to the maximum extent, the wavelength value range needs to be set relatively large, so that the selected spectral data is larger and the data volume is larger.

[0063] In addition, a semiconductor workshop may have multiple product lines, and the design wavelengths of different product lines may be different. Wafers produced by different product lines need to be tested using different theoretical wavelengths. Therefore, it is necessary to establish multiple test menus on the test equipment. Before testing, the user is required to select the corresponding test menu from the test equipment, and automated testing cannot be achieved, which increases the difficulty of monitoring and management. Once you forget to modify the test menu or select the wrong menu parameters, the spectral data in the valid spectral range may not be selected or only partially selected, and the validity of the selected data cannot be guaranteed.

[0064] Figure 1 is a flow chart of a data processing method provided in an embodiment of the present application. The data processing method can be applied to a test device. Figure 1 As shown, the data processing method may include the following steps.

[0065] 101. Collect initial spectrum data of the target chip.

[0066] The target chip is any optoelectronic chip on the wafer to be tested. The wafer to be tested is the wafer currently being tested by the test equipment.

[0067] When testing the target chip, initial spectrum data of the target chip may be collected. The initial spectrum data of the target chip is all spectrum data collected of the target chip.

[0068] In some embodiments, the initial spectrum data of the target chip can be collected by a spectrum device, which can be a spectrometer, a spectrum radiometer, or other devices with spectrum collection function.

[0069] In some embodiments, the first thread may be used to collect initial spectral data of the target chip, that is, the first thread may be called to collect initial spectral data of the target chip.

[0070] In some embodiments, the first thread may be used to collect initial spectral data of the target chip through the spectral device, that is, the first thread is called to drive the spectral device to collect initial spectral data of the target chip.

[0071] The spectral data of the target chip may include basic parameter data of the target chip and spectral parameter data corresponding to the basic parameter data. The basic parameter data is data of a basic parameter. The basic parameter may be a wavelength of light or a frequency of light. The spectral parameter data is data of a spectral parameter. The spectral parameter may be optical power, spectral intensity or luminous flux.

[0072] The spectral data may be wavelength optical power data, the basic parameter data may be wavelength data, and the spectral parameter data may be optical power data. The spectral data may also be frequency optical power data, the basic parameter data may be frequency data, and the spectral parameter data may be optical power data. The spectral data may also be wavelength spectral intensity data, the basic parameter data may be wavelength data, and the spectral parameter data may be spectral intensity data. The initial spectral data may also be frequency spectral intensity data, the basic parameter data may be frequency data, and the spectral parameter data may be spectral intensity data. The initial spectral data may also be wavelength light flux data, the basic parameter data may be wavelength data, and the spectral parameter data may be light flux data. The initial spectral data may also be frequency light flux data, the basic parameter data may be frequency data, and the spectral parameter data may be light flux data.

[0073] 102. Determine a maximum value of spectrum parameter data included in the initial spectrum data of the target chip, and obtain a maximum value of the spectrum parameter of the target chip.

[0074] The maximum value of the spectral parameter of the target chip can be determined according to the initial spectral data of the target chip. The maximum value of the spectral parameter is the maximum value of the spectral parameter.

[0075] The maximum value among the spectral parameter data included in the initial spectral data of the target chip may be determined, that is, the maximum value is selected from the spectral parameter data included in the initial spectral data of the target chip to obtain the maximum value of the spectral parameter of the target chip.

[0076] Exemplarily, when the spectral data is wavelength spectral intensity data or frequency spectral intensity data, the maximum spectral intensity value can be selected from the initial spectral data of the target chip, that is, the maximum value is selected from the spectral intensity data included in the initial spectral data of the target chip to obtain the maximum spectral intensity of the target chip.

[0077] In some embodiments, a minimum value among the included spectral parameter data may be determined to obtain a minimum value of the spectral parameter of the target chip.

[0078] The minimum value of the spectral parameter of the target chip can be selected from the initial spectral data of the target chip, that is, the minimum value is selected from the spectral parameter data included in the initial spectral data of the target chip to obtain the minimum value of the spectral parameter of the target chip. The minimum value of the spectral parameter is the minimum value of the spectral parameter.

[0079] In some embodiments, the second thread may be used to determine the maximum value of the spectral parameter data included in the initial spectral data of the target chip, so as to determine the maximum value of the spectral parameter of the target chip.

[0080] The first thread is different from the second thread. It can be seen that the collection and processing of spectral data can be performed by different threads. Therefore, the processing of spectral data does not affect the collection of spectral data, and the collection and processing of spectral data can be carried out in parallel, which can improve the chip testing efficiency and data processing efficiency. Exemplarily, the first thread can be used to collect spectral data of the first chip, and the second thread can be used to process the spectral data of the second chip.

[0081] Exemplarily, the first thread may be a data acquisition (DAQ) thread, and the second thread may be a data processing (DA) thread.

[0082] 103. Determine a reference value of the spectral parameter of the target chip according to a maximum value of the spectral parameter of the target chip.

[0083] The spectral parameter reference value of the target chip can be determined according to the spectral parameter maximum value of the target chip. The spectral parameter reference value of the target chip is between the spectral parameter maximum value and the spectral parameter minimum value of the target chip, that is, the spectral parameter reference value of the target chip is greater than the spectral parameter minimum value of the target chip and less than the spectral parameter maximum value of the target chip. The spectral parameter reference value is the reference value of the spectral parameter.

[0084] In some embodiments, a second thread may be used to determine a reference value of a spectral parameter of a target chip according to a maximum value of the spectral parameter of the target chip.

[0085] It can be seen that the collection and processing of spectral data can be performed by different threads, thereby improving the chip testing efficiency and data processing efficiency.

[0086] In some embodiments, a reference value of the spectral parameter of the target chip may be determined according to a maximum value of the spectral parameter of the target chip and a first threshold value.

[0087] The first threshold is a predetermined value, which can be determined according to the number of required peaks. Since the first threshold is predetermined according to the number of required peaks, the validity of the determined spectral parameter reference value of the chip can be guaranteed.

[0088] It can be seen that the spectral parameter reference value of the chip can be determined according to the spectral parameter maximum value of the chip and the first threshold value, and fewer numerical values ​​are required, which can improve the determination efficiency.

[0089] Exemplarily, assuming that the spectral data is wavelength spectral intensity data, the relationship between the first threshold and the maximum spectral intensity value and the spectral intensity reference value of the chip can be expressed as follows:

[0090] M=10*lg(A / C) (1)

[0091] A is the maximum spectral intensity of the chip. C is the spectral intensity reference value of the chip. M is the first threshold value, which is between 1 and 35. The value of M is determined in advance according to the number of required peaks. The value of M is positively correlated with the number of required peaks, that is, the more the number of required peaks, the larger the value of M, and the fewer the number of required peaks, the smaller the value of M.

[0092] By transforming formula (1), we can get:

[0093] C = A / 10 0.1*M (2)

[0094] It can be seen that when A and M are known, the spectral intensity reference value C of the chip can be quickly determined by the above formula (2).

[0095] It should be understood that the above is an exemplary description of determining the spectral intensity reference value of the target chip based on the spectral intensity maximum value and the first threshold value of the target chip, and is not intended to be limiting. The spectral intensity reference value of the target chip may also be determined based on the spectral intensity maximum value and the first threshold value of the target chip using a variation of formula (1) or formula (2) or other formulas.

[0096] In some embodiments, the spectral parameter reference value of the target chip may be determined according to the spectral parameter maximum value and the spectral parameter minimum value of the target chip.

[0097] When determining the spectral parameter reference value of the chip, not only the maximum value of the spectral parameter of the chip but also the minimum value of the spectral parameter of the chip is considered, which can improve the effectiveness and accuracy of the determined spectral parameter reference value of the chip.

[0098] In some embodiments, the spectral parameter reference value of the target chip may be determined according to the spectral parameter maximum value of the target chip, the spectral parameter minimum value of the target chip, and the second threshold value.

[0099] The second threshold is a predetermined value, which can be determined according to the number of required peaks. Since the second threshold is predetermined according to the number of required peaks, the validity of the determined chip spectrum parameter reference value can be guaranteed.

[0100] It can be seen that the spectral parameter baseline value of the chip can be determined based on the maximum value, minimum value and first threshold value of the spectral parameters of the chip, which not only takes into account the maximum value of the spectral parameters of the chip, but also takes into account the minimum value of the spectral parameters of the chip and the number of required peaks, which can improve the effectiveness and accuracy of the determined spectral parameter baseline value of the chip.

[0101] Exemplarily, assuming that the spectral data is wavelength spectral intensity data, the relationship between the second threshold and the maximum spectral intensity value, the minimum spectral intensity value and the spectral intensity reference value of the chip can be expressed as follows:

[0102] C=(AB)*N%+B (3)

[0103] B is the minimum spectral intensity of the chip. N is the second threshold value, which is between 0.01 and 10. The value of N is determined in advance according to the number of required peaks. The value of N is inversely correlated with the number of required peaks, that is, the more the number of required peaks, the smaller the value of N, and the fewer the number of required peaks, the larger the value of N.

[0104] It should be understood that the above is an exemplary description of determining the spectral intensity reference value of the target chip based on the maximum spectral intensity value of the target chip, the minimum spectral intensity value of the target chip and the second threshold value, and is not limiting thereof. The spectral intensity reference value of the target chip can also be determined based on the maximum spectral intensity value of the target chip, the minimum spectral intensity value of the target chip and the second threshold value using a modified formula of formula (3) or other formulas.

[0105] In some embodiments, the maximum value and the minimum value of the spectral parameter of the target chip may be weighted and summed to obtain the spectral parameter reference value of the target chip. The weighting coefficient of the minimum value of the spectral parameter of the target chip is much larger than the weighting coefficient of the maximum value of the spectral parameter of the target chip to ensure that the spectral parameter reference value of the target chip is between the maximum value and the minimum value of the spectral parameter of the target chip.

[0106] The weighting coefficients of the maximum and minimum values ​​of the spectral parameters of the target chip are determined in advance according to the number of required peaks, so the validity of the determined spectral parameter reference values ​​of the chip can be guaranteed.

[0107] 104. Determine the basic parameter range according to the spectral parameter reference value and basic parameter data of the target chip.

[0108] 105. Select basic parameter data and corresponding spectral parameter data from the initial spectral data of the target chip according to the basic parameter range to obtain target spectral data of the target chip.

[0109] The basic parameter range can be first determined based on the spectral parameter baseline value and basic parameter data of the target chip, and then the basic parameter data and the corresponding spectral parameter data can be selected from the initial spectral data of the target chip based on the basic parameter range. The selected basic parameter data and the corresponding spectral parameter data can be determined as the target spectral data of the target chip.

[0110] In some embodiments, the second thread may be used to determine the basic parameter range based on the spectral parameter reference value and basic parameter data of the target chip. The second thread may be used to select basic parameter data and corresponding spectral parameter data from the initial spectral data of the target chip based on the basic parameter range to obtain the target spectral data of the target chip.

[0111] It can be seen that the collection and processing of spectral data can be performed by different threads, thereby improving the chip testing efficiency and data processing efficiency.

[0112] In some embodiments, a spectrum curve can be determined based on the initial spectrum data of the target chip, and the value of the ordinate in the spectrum curve is determined to be the value of the abscissa corresponding to the spectrum parameter reference value, to obtain multiple basic parameter values, and the basic parameter range is determined based on the maximum and minimum values ​​of the multiple basic parameter values, and the data of the point whose abscissa value in the spectrum curve is within the basic parameter range is determined as the target spectrum data of the target chip. The abscissa of the spectrum curve is the basic parameter, and the ordinate of the spectrum curve is the spectrum parameter.

[0113] A spectrum curve with a basic parameter as the horizontal coordinate and a spectrum parameter as the vertical coordinate can be determined based on the initial spectrum data of the target chip, and then the value of the vertical coordinate in the spectrum curve can be determined to be the value of the horizontal coordinate corresponding to the spectrum parameter reference value, that is, the value of the horizontal coordinate corresponding to the intersection of the line with the spectrum parameter reference value and the spectrum curve can be determined to obtain multiple basic parameter values, and then the basic parameter range can be determined based on the maximum and minimum values ​​of the multiple basic parameter values, and the data of the point in the spectrum curve whose horizontal coordinate value is within the basic parameter range is determined as the target spectrum data of the target chip. The target spectrum data of the target chip may include the data of the point where the basic parameter value is the maximum and minimum.

[0114] It can be seen that the spectral parameter baseline value of the target chip is first determined according to the initial spectral data of the target chip, and then the basic parameter range is determined according to the spectral parameter baseline value and basic parameter data of the target chip. Finally, the spectral data is selected according to the basic parameter range. This ensures that the selected spectral data includes the spectral data of the effective basic parameters, that is, the maximum peak and the data on both sides. This can reduce the amount of data while ensuring the validity of the selected data.

[0115] In some embodiments, a range between a maximum value and a minimum value among a plurality of basic parameter values ​​may be determined as a basic parameter range.

[0116] It can be seen that the range between the maximum and minimum values ​​of multiple basic parameter values ​​can be directly determined as the basic parameter range, which can ensure that the selected spectral data includes data with spectral parameter values ​​greater than or equal to the spectral parameter reference value, thereby reducing the amount of data while ensuring the validity of the selected data.

[0117] In some embodiments, the difference between the minimum value of multiple basic parameters and the third threshold can be determined to obtain a first basic parameter value, the sum of the maximum value of multiple basic parameters and the third threshold can be determined to obtain a second basic parameter value, and the range between the first basic parameter value and the second basic parameter value can be determined as the basic parameter range.

[0118] It can be seen that we can first expand a certain threshold to both sides based on the minimum and maximum values ​​of multiple basic parameters, and then select spectral data with basic parameter values ​​in between. This can avoid the situation where some selected spectral data cannot guarantee the entire valid spectral range due to differences between different chips, ensure the validity of the selected data, and improve compatibility.

[0119] The third threshold value is a smaller value. Exemplarily, when the basic parameter is the wavelength of light, the third threshold value may be 1 nm.

[0120] For example, Figure 2 Schematic diagram of a waveform of wavelength spectrum intensity data disclosed in an embodiment of the present application. Figure 2 As shown, the selected spectral data may be spectral data with wavelength values ​​between E and D, or spectral data with wavelength values ​​between K and L. The difference between L and D, and the difference between E and K are the third threshold values.

[0121] exist Figure 1 In the data processing method shown, spectral data is selected from the initial spectral data of the chip according to the basic parameter range, and the basic parameter range is determined based on the spectral parameter reference value and basic parameter data of the chip, and the spectral parameter reference value of the chip is based on the maximum value in the spectral parameter data of the chip, and is located between the spectral parameter maximum value and the spectral parameter minimum value of the chip, so that the selected spectral data can be guaranteed to be part of the collected spectral data, and the data volume of the spectral data can be reduced. In addition, the basic parameter range used in the selection process of spectral data is determined based on the spectral parameter reference value and basic parameter data of the chip, the spectral parameter reference value of the chip is determined based on the maximum value in the spectral parameter data, and the spectral parameter maximum value of the chip is determined based on the collected spectral data, that is, the value used in the selection process of spectral data is determined based on the collected spectral data, which can avoid the need for user specification, thereby ensuring the automation of data processing, and improving the effectiveness, universality and flexibility of the selected data. Further, since the spectral data has been collected, the center of the actual wavelength of the chip can be accurately determined based on the collected spectral data, so that the selection interval can be accurately determined, and the situation where a wide value interval is required to cover the effective spectral data can be avoided, so the data volume can be reduced.

[0122] Figure 3 FIG. 1 is a flow chart of another data processing method provided in an embodiment of the present application. The data processing method can be applied to a test device. Figure 3 As shown, the data processing method may include the following steps.

[0123] 301. Collect initial spectrum data of the target chip.

[0124] 302. Determine a maximum value of spectrum parameter data included in the initial spectrum data of the target chip, and obtain a maximum value of the spectrum parameter of the target chip.

[0125] 303. Determine a reference value of the spectral parameter of the target chip according to a maximum value of the spectral parameter of the target chip.

[0126] 304. Determine a basic parameter range according to the spectral parameter reference value and basic parameter data of the target chip.

[0127] 305. Select basic parameter data and corresponding spectrum parameter data from the initial spectrum data of the target chip according to the basic parameter range to obtain target spectrum data of the target chip.

[0128] Among them, step 301 to step 305 are the same as step 101 to step 105, and the detailed description can refer to the description of step 101 to step 105.

[0129] 306. Store the target spectrum data of the target chip.

[0130] After the target spectrum data of the target chip is obtained, the target spectrum data of the target chip can be stored for subsequent call.

[0131] The target spectrum data of the target chip can be sent to other devices so that the other devices can analyze and process the target spectrum data of the target chip.

[0132] Part of the spectral data selected within the basic parameter range can be sent to other devices, which can save storage resources and processing resources of other devices while ensuring that the spectral data includes valid spectral data.

[0133] exist Figure 3 In the data processing method shown, only part of the spectral data selected according to the basic parameter range is stored, which can save storage space while ensuring that the spectral data includes valid spectral data.

[0134] It should be understood that the same or corresponding information in different embodiments may be referenced to each other, and the contents and / or steps in different embodiments may be combined with each other.

[0135] It should be understood that in the above embodiments, some steps may be omitted and some steps may be combined.

[0136] Based on the same inventive concept, the embodiment of the present application also provides a data processing device for implementing the data processing method involved above. The implementation scheme for solving the problem provided by the data processing device is similar to the implementation scheme recorded in the above method, so the specific limitations in one or more data processing device embodiments provided below can refer to the limitations on the data processing method above, and will not be repeated here.

[0137] Figure 4 A schematic diagram of the structure of a data processing device provided in an embodiment of the present application. The data processing device can be applied to a test device. The data processing device may include:

[0138] The acquisition unit 401 is used to acquire initial spectrum data of a target chip, where the target chip is any optoelectronic chip on a wafer to be tested, and the initial spectrum data includes basic parameter data and spectrum parameter data corresponding to the basic parameter data;

[0139] A first determining unit 402 is used to determine the maximum value in the spectral parameter data to obtain the maximum value of the spectral parameter of the target chip;

[0140] A second determining unit 403 is used to determine a spectral parameter reference value of the target chip according to the spectral parameter maximum value of the target chip, wherein the spectral parameter reference value of the target chip is between the spectral parameter maximum value and the spectral parameter minimum value of the target chip;

[0141] A third determining unit 404 is used to determine a basic parameter range according to the spectral parameter reference value and the basic parameter data;

[0142] The selection unit 405 is used to select basic parameter data and corresponding spectrum parameter data from the initial spectrum data of the target chip according to the basic parameter range to obtain the target spectrum data of the target chip.

[0143] In some embodiments, the data processing device may further include:

[0144] The storage unit is used to store the target spectrum data of the target chip.

[0145] In some embodiments, the second determining unit 403 is specifically configured to determine a reference value of the spectral parameter of the target chip according to a maximum value of the spectral parameter of the target chip and a first threshold value.

[0146] In some embodiments, the first determining unit 402 is further configured to determine a minimum value in the spectral parameter data to obtain a minimum value of the spectral parameter of the target chip;

[0147] The second determining unit 403 is specifically configured to determine a reference value of the spectrum parameter of the target chip according to a maximum value and a minimum value of the spectrum parameter of the target chip.

[0148] In some embodiments, the second determining unit 403 determines the spectral parameter reference value of the target chip according to the spectral parameter maximum value and the spectral parameter minimum value of the target chip, including:

[0149] A spectral parameter reference value of the target chip is determined according to a spectral parameter maximum value of the target chip, a spectral parameter minimum value of the target chip and a second threshold value.

[0150] In some embodiments, the third determining unit 404 is specifically configured to:

[0151] Determine a spectrum curve according to the initial spectrum data, wherein the abscissa of the spectrum curve is the basic parameter, and the ordinate of the spectrum curve is the spectrum parameter;

[0152] Determine the value of the ordinate in the spectrum curve as the value of the abscissa corresponding to the spectrum parameter reference value, and obtain a plurality of basic parameter values;

[0153] Determine a basic parameter range according to a maximum value and a minimum value among a plurality of basic parameter values;

[0154] The selection unit 405 is specifically configured to determine the data of the point whose abscissa value in the spectrum curve is within the basic parameter range as the target spectrum data of the target chip.

[0155] In some embodiments, the third determining unit 404 determines the basic parameter range according to the maximum value and the minimum value of the multiple basic parameter values, including:

[0156] A range between a maximum value and a minimum value among the plurality of basic parameter values ​​is determined as a basic parameter range.

[0157] In some embodiments, the third determining unit 404 determines the basic parameter range according to the maximum value and the minimum value of the multiple basic parameter values, including:

[0158] Determine a difference between a minimum value among the multiple basic parameters and a third threshold value to obtain a first basic parameter value;

[0159] Determine the sum of a maximum value among the multiple basic parameters and a third threshold value to obtain a second basic parameter value;

[0160] A range between the first basic parameter value and the second basic parameter value is determined as the basic parameter range.

[0161] Each unit in the above data processing device can be implemented in whole or in part by software, hardware, or a combination thereof. Each unit can be embedded in or independent of the processor in the data processing device in the form of hardware, or can be stored in the memory in the data processing device in the form of software, so that the processor can call and execute the corresponding operations of each unit.

[0162] In an exemplary embodiment, Figure 5 1 is a schematic diagram of the structure of a test device provided in an embodiment of the present application. The test device includes a processor and a memory. The processor and the memory are connected via a system bus. The processor of the test device is used to provide computing and control capabilities. The memory of the test device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, a computer program and a database. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The database of the test device is used to store selected spectral data. When the computer program is executed by the processor, a data processing method is implemented.

[0163] Those skilled in the art will understand that Figure 5 The structure shown in the figure is only a block diagram of a part of the structure related to the scheme of the present application, and does not constitute a limitation on the test equipment to which the scheme of the present application is applied. The specific test equipment may include more or fewer components than those shown in the figure, or combine certain components, or have a different arrangement of components.

[0164] In an exemplary embodiment, Figure 6 Schematic diagram of another test device provided in the embodiment of the present application. Figure 6 As shown, the testing device may include a spectral device 601 and a processor 602 , and the spectral device 601 is connected to the processor 602 .

[0165] The spectral device 601 is used to collect initial spectral data of a target chip, where the target chip is any chip on the wafer to be tested;

[0166] Processor 602, used to determine the maximum value of the spectral parameter of the target chip according to the initial spectral data of the target chip;

[0167] The processor 602 is further configured to determine a spectral parameter reference value of the target chip according to a spectral parameter maximum value of the target chip, wherein the spectral parameter reference value of the target chip is between a spectral parameter maximum value and a spectral parameter minimum value of the target chip;

[0168] The processor 602 is further configured to select spectral data from the initial spectral data of the target chip according to the spectral parameter reference value of the target chip to obtain target spectral data of the target chip.

[0169] For a detailed description of the processor 602, reference may be made to the above related description.

[0170] In some embodiments, the test device may further include an integrating sphere 603 and a control device 604. The spectral device 601 is respectively connected to the integrating sphere 603 and the control device 604. The processor 602 is also connected to the control device 604.

[0171] The control device 604 can control the state of the spectroscopy device 601 .

[0172] The light passes through the integrating sphere 603 and enters the spectrum device 601 for spectrum testing.

[0173] In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by a processor, the steps in the above-mentioned method embodiments are implemented.

[0174] In one embodiment, a computer program product is provided, including a computer program, which implements the steps in the above method embodiments when executed by a processor.

[0175] It should be noted that the spectral data involved in this application are all authorized by the user or fully authorized by all parties, and the collection, use and processing of relevant data must comply with relevant regulations.

[0176] A person of ordinary skill in the art can understand that all or part of the processes in the above-mentioned embodiment method can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to the memory, database or other medium used in the embodiments provided in the present application can include at least one of non-volatile memory and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. As an illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM). The database involved in each embodiment provided in this application may include at least one of a relational database and a non-relational database. Non-relational databases may include distributed databases based on blockchains, etc., but are not limited to this. The processor involved in each embodiment provided in this application may be a general-purpose processor, a central processing unit, a graphics processor, a digital signal processor, a programmable logic device, a data processing logic device based on quantum computing, an artificial intelligence (AI) processor, etc., but are not limited to this.

[0177] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this application.

[0178] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. A data processing method, characterized in that: include: Collecting initial spectral data of a target chip, wherein the target chip is any optoelectronic chip on a wafer to be tested, and the initial spectral data includes basic parameter data and spectral parameter data corresponding to the basic parameter data; Determine the maximum value in the spectral parameter data to obtain the maximum value of the spectral parameter of the target chip; Determine a spectral parameter reference value of the target chip according to the spectral parameter maximum value, wherein the spectral parameter reference value is between the spectral parameter maximum value and the spectral parameter minimum value of the target chip; Determining a basic parameter range according to the spectral parameter reference value and the basic parameter data; Basic parameter data and corresponding spectral parameter data are selected from the initial spectral data according to the basic parameter range to obtain target spectral data of the target chip.

2. The method according to claim 1, characterized in that The method further comprises: The target spectrum data of the target chip is stored.

3. The method according to claim 1, characterized in that Determining the reference value of the spectral parameter of the target chip according to the maximum value of the spectral parameter includes: A spectral parameter reference value of the target chip is determined according to the spectral parameter maximum value and a first threshold value.

4. The method according to claim 1, characterized in that: The method further comprises: Determine the minimum value in the spectral parameter data to obtain the minimum value of the spectral parameter of the target chip; Determining the reference value of the spectral parameter of the target chip according to the maximum value of the spectral parameter includes: A spectral parameter reference value of the target chip is determined according to the spectral parameter maximum value and the spectral parameter minimum value.

5. The method according to claim 4, characterized in that Determining the spectral parameter reference value of the target chip according to the spectral parameter maximum value and the spectral parameter minimum value includes: A spectral parameter reference value of the target chip is determined according to the spectral parameter maximum value, the spectral parameter minimum value and the second threshold value.

6. The method according to claim 1, characterized in that Determining the basic parameter range according to the spectral parameter reference value and the basic parameter data includes: Determine a spectrum curve according to the initial spectrum data, wherein the abscissa of the spectrum curve is a basic parameter and the ordinate of the spectrum curve is a spectrum parameter; Determine the value of the ordinate in the spectrum curve as the value of the abscissa corresponding to the spectrum parameter reference value, and obtain a plurality of basic parameter values; Determining a basic parameter range according to a maximum value and a minimum value among the multiple basic parameter values; The step of selecting basic parameter data and corresponding spectral parameter data from the initial spectral data according to the basic parameter range to obtain target spectral data of the target chip comprises: The data of the point whose abscissa value in the spectrum curve is within the basic parameter range is determined as the target spectrum data of the target chip.

7. The method according to claim 6, characterized in that Determining the basic parameter range according to the maximum value and the minimum value of the multiple basic parameter values ​​includes: A range between a maximum value and a minimum value among the plurality of basic parameter values ​​is determined as a basic parameter range.

8. The method according to claim 6, characterized in that Determining the basic parameter range according to the maximum value and the minimum value of the multiple basic parameter values ​​includes: Determine a difference between a minimum value among the plurality of basic parameters and a third threshold value to obtain a first basic parameter value; Determine the sum of the maximum value of the multiple basic parameters and the third threshold value to obtain a second basic parameter value; A range between the first basic parameter value and the second basic parameter value is determined as a basic parameter range.

9. A data processing device, characterized in that: The device comprises: An acquisition unit is used to acquire initial spectral data of a target chip, wherein the target chip is any optoelectronic chip on a wafer to be tested, and the initial spectral data includes basic parameter data and spectral parameter data corresponding to the basic parameter data; A first determining unit, configured to determine a maximum value in the spectral parameter data to obtain a maximum value of the spectral parameter of the target chip; A second determining unit, configured to determine a spectral parameter reference value of the target chip according to the spectral parameter maximum value, wherein the spectral parameter reference value is between the spectral parameter maximum value and the spectral parameter minimum value of the target chip; A third determining unit, configured to determine a basic parameter range according to the spectral parameter reference value and the basic parameter data; A selection unit is used to select basic parameter data and corresponding spectral parameter data from the initial spectral data according to the basic parameter range to obtain target spectral data of the target chip.

10. A testing device, characterized in that: including a spectral device and a processor; The spectral device is used to collect initial spectral data of a target chip, the target chip is any optoelectronic chip on a wafer to be tested, and the initial spectral data includes basic parameter data and spectral parameter data corresponding to the basic parameter data; The processor is used to determine the maximum value in the spectral parameter data to obtain the maximum value of the spectral parameter of the target chip; The processor is further configured to determine a spectral parameter reference value of the target chip according to the spectral parameter maximum value, wherein the spectral parameter reference value is between the spectral parameter maximum value and the spectral parameter minimum value of the target chip; The processor is further used to determine a basic parameter range according to the spectral parameter reference value and the basic parameter data; The processor is further configured to select basic parameter data and corresponding spectral parameter data from the initial spectral data according to the basic parameter range to obtain target spectral data of the target chip.

11. A test device, comprising a memory and a processor, wherein the memory stores a computer program, characterized in that: When the processor executes the computer program, the steps of the method according to any one of claims 1 to 8 are implemented.

12. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the method according to any one of claims 1 to 8 are implemented.

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