Data processing method, device, testing equipment and storage medium

Abstract

This application relates to a data processing method, apparatus, test equipment, and storage medium. The method includes: collecting initial spectral data of a target chip including basic parameter data and spectral parameter data corresponding to the basic parameter data, determining the maximum value in the spectral parameter data to obtain the maximum spectral parameter value of the target chip, determining the reference spectral parameter value of the target chip according to the maximum spectral parameter value of the target chip, where the reference spectral parameter value of the target chip is between the maximum spectral parameter value and the minimum spectral parameter value of the target chip, determining the basic parameter range according to the reference spectral parameter value and the basic parameter data of the target chip, and selecting the basic parameter data and the corresponding spectral parameter data from the initial spectral data according to the basic parameter range to obtain the target spectral data of the target chip. Using this method can ensure that the selected spectral data is part of the collected spectral data and can reduce the amount of spectral data.

Description

Technical Field

[0001] This application relates to the technical field of chip testing, and particularly to a data processing method, apparatus, testing equipment, and storage medium. Background Art

[0002] Spectral testing of a chip is an important test for it. The spectrum of a chip can be tested using an integrating sphere and a spectral device. Since the accuracy of a high-precision spectral device is generally about 0.01 nanometer (nm) to 0.1 nm, and a wafer includes many chips, the spectral data measured through the integrating sphere is relatively large, resulting in a large amount of data. Summary of the Invention

[0003] Based on this, to address the above technical problems, it is necessary to provide a data processing method, apparatus, testing equipment, and storage medium that can reduce the amount of data.

[0004] In a first aspect, this application provides a data processing method, including:

[0005] Collect initial spectral data of a target chip, where the target chip is any optoelectronic chip on a to-be-tested wafer, and the initial spectral data includes basic parameter data and spectral parameter data corresponding to the basic parameter data;

[0006] Determine the maximum value in the spectral parameter data to obtain the maximum spectral parameter of the target chip;

[0007] According to the maximum spectral parameter, determine a spectral parameter reference value of the target chip, where the spectral parameter reference value is between the maximum spectral parameter and the minimum spectral parameter of the target chip;

[0008] According to the spectral parameter reference value and the basic parameter data, determine a basic parameter range;

[0009] Select basic parameter data and corresponding spectral parameter data from the initial spectral data according to the basic parameter range to obtain the target spectral data of the target chip.

[0010] In one embodiment, the method further includes:

[0011] Store the target spectral data of the target chip.

[0012] In one embodiment, the determining the spectral parameter reference value of the target chip according to the maximum spectral parameter includes:

[0013] Determine the spectral parameter reference value of the target chip according to the maximum spectral parameter and a first threshold.

[0014] In one embodiment, the method further includes:

[0015] Determine the minimum value in the spectral parameter data to obtain the minimum spectral parameter of the target chip;

[0016] The determining the spectral parameter reference value of the target chip according to the maximum spectral parameter includes:

[0017] Determine the spectral parameter reference value of the target chip according to the maximum spectral parameter and the minimum spectral parameter.

[0018] In one embodiment, the determining the spectral parameter reference value of the target chip according to the maximum spectral parameter and the minimum spectral parameter includes:

[0019] Determine the spectral parameter reference value of the target chip according to the maximum spectral parameter, the minimum spectral parameter and a second threshold.

[0020] In one embodiment, the determining the basic parameter range according to the spectral parameter reference value and the basic parameter data includes:

[0021] Determine a spectral curve according to the initial spectral data, where the abscissa of the spectral curve is the basic parameter and the ordinate of the spectral curve is the spectral parameter;

[0022] Determine the value of the abscissa corresponding to the spectral parameter reference value in the spectral curve to obtain multiple basic parameter values;

[0023] Determine the basic parameter range according to the maximum value and the minimum value in the multiple basic parameter values;

[0024] The selecting the basic parameter data and the corresponding spectral parameter data from the initial spectral data according to the basic parameter range to obtain the target spectral data of the target chip includes:

[0025] Determine the data of the points on the spectral curve whose abscissa values are within the basic parameter range as the target spectral data of the target chip.

[0026] In one embodiment, the determining the basic parameter range according to the maximum value and the minimum value in the multiple basic parameter values includes:

[0027] Determine the range between the maximum value and the minimum value in the multiple basic parameter values as the basic parameter range.

[0028] In one embodiment, the determining the basic parameter range according to the maximum value and the minimum value in the multiple basic parameter values includes:

[0029] Determine the difference between the minimum value of the multiple basic parameters and the third threshold to obtain the first basic parameter value;

[0030] Determine the sum of the maximum value of the multiple basic parameters and the third threshold to obtain the second basic parameter value;

[0031] Determine the range between the first basic parameter value and the second basic parameter value as the basic parameter range.

[0032] In a second aspect, the present application further provides a data processing device, and the device includes:

[0033] An acquisition unit, configured to acquire initial spectral data of a target chip, where the target chip is any optoelectronic chip on a to-be-tested wafer, and the initial spectral data includes basic parameter data and spectral parameter data corresponding to the basic parameter data;

[0034] A first determination unit, configured to determine the maximum value in the spectral parameter data to obtain the spectral parameter maximum value of the target chip;

[0035] A second determination unit, configured to determine a spectral parameter reference value of the target chip according to the spectral parameter maximum value, where the spectral parameter reference value is between the spectral parameter maximum value and the spectral parameter minimum value of the target chip;

[0036] A third determination unit, configured to determine a basic parameter range according to the spectral parameter reference value and the basic parameter data;

[0037] A selection unit, configured to select basic parameter data and corresponding spectral parameter data from the initial spectral data according to the basic parameter range to obtain target spectral data of the target chip.

[0038] In a third aspect, the present application further provides a testing device

[0039] The spectral device is configured to acquire initial spectral data of a target chip, where the target chip is any optoelectronic chip on a to-be-tested wafer, and the initial spectral data includes basic parameter data and spectral parameter data corresponding to the basic parameter data;

[0040] The processor is configured to determine the maximum value in the spectral parameter data to obtain the spectral parameter maximum value of the target chip;

[0041] The processor is further configured to determine a spectral parameter reference value of the target chip according to the spectral parameter maximum value, where the spectral parameter reference value is between the spectral parameter maximum value and the spectral parameter minimum value of the target chip;

[0042] The processor is further configured to determine a basic parameter range according to the spectral parameter reference value and the basic parameter data;

[0043] The processor is further configured to select basic parameter data and corresponding spectral parameter data from the initial spectral data according to the basic parameter range, so as to obtain the target spectral data of the target chip.

[0044] In a fourth aspect, the present application further provides a test device, which includes a memory and a processor. The memory stores a computer program, and when the processor executes the computer program, the steps of the method provided in the first aspect or any embodiment of the first aspect are implemented.

[0045] In a fifth aspect, the present application further provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of the above-mentioned various methods are implemented.

[0046] In a sixth aspect, the present application further provides a computer program product, including a computer program. When the computer program is executed by a processor, the steps of the above-mentioned various methods are implemented.

[0047] In the present application, the initial spectral data of the target chip including the basic parameter data and the spectral parameter data corresponding to the basic parameter data is collected, the maximum value in the spectral parameter data is determined to obtain the maximum spectral parameter value of the target chip, the spectral parameter reference value of the target chip is determined, and the spectral parameter reference value of the target chip is between the maximum spectral parameter value and the minimum spectral parameter value of the target chip. According to the spectral parameter reference value and the basic parameter data of the target chip, the basic parameter range is determined, and the basic parameter data and the corresponding spectral parameter data are selected from the initial spectral data according to the basic parameter range, so as to obtain the target spectral data of the target chip. It can be seen that according to the basic parameter range, spectral data is selected from the initial spectral data of the chip, and the basic parameter range is determined based on the spectral parameter reference value and the basic parameter data of the chip. The spectral parameter reference value of the chip is based on the maximum value in the spectral parameter data of the chip and is between the maximum spectral parameter value and the minimum spectral parameter value of the chip. Therefore, it can be ensured that the selected spectral data is part of the collected spectral data, and the data volume of the spectral data can be reduced. In addition, the basic parameter range used in the selection process of the spectral data is determined based on the spectral parameter reference value and the basic parameter data of the chip, the spectral parameter reference value of the chip is determined based on the maximum value in the spectral parameter data, and the maximum spectral parameter value of the chip is determined based on the collected spectral data, that is, the values used in the selection process of the spectral data are determined based on the collected spectral data, which can avoid the situation that needs to be specified by the user, thereby ensuring the automation of data processing and improving the effectiveness, universality and flexibility of the selected data. Description of the Drawings

[0048] To more clearly illustrate the technical solutions in the embodiments of the present application or related technologies, the following will briefly introduce the drawings required for use in the description of the embodiments of the present application or related technologies. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0049] Figure 1 is a schematic flowchart of a data processing method provided by an embodiment of the present application;

[0050] Figure 2 is a schematic diagram of the waveform of wavelength spectral intensity data provided by an embodiment of the present application;

[0051] Figure 3 is a schematic flowchart of another data processing method provided by an embodiment of the present application;

[0052] Figure 4 is a schematic structural diagram of a data processing device provided by an embodiment of the present application;

[0053] Figure 5 is a schematic structural diagram of a test device provided by an embodiment of the present application;

[0054] Figure 6 is a schematic structural diagram of another test device provided by an embodiment of the present application. Detailed implementation manners

[0055] In order to make the purpose, technical solutions and advantages of the present application clearer, the following further details the present application in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0056] It should be noted that the terms "first", "second", etc. in the specification and claims of the present disclosure and the above drawings are used to distinguish similar objects and do not necessarily need to describe a specific order or sequence. It should be understood that such used data can be interchanged under appropriate circumstances so that the embodiments of the present disclosure described here can be implemented in an order other than those illustrated or described here.

[0057] The present application provides a data processing method, device, test device and storage medium that can reduce the amount of data.

[0058] To better understand the embodiments of the present application, the related technologies will be described first.

[0059] The spectral test is based on the scattering and integration characteristics of light, which can evenly distribute the light emitted by the chip after being lit at various positions inside the integrating sphere, and collect spectral data through the spectral device at the outlet of the integrating sphere.

[0060] The resolution of the high-precision spectral device is between 0.01 nm and 0.1 nm. That is, for every 1 nm increase in wavelength, the data increases by 10 to 100. A wafer may include many chips, such as hundreds of thousands, so that the spectral test file of a wafer is very large, which will bring great pressure to subsequent data analysis and processing, data storage and backup, etc.

[0061] The spectral data collected by the spectral device is relatively large, but the useful interval is relatively narrow. Therefore, in order to reduce the amount of spectral data, the spectral data with a certain wavelength value can be selected from the collected spectral data centered on the theoretical wavelength of the chip. Exemplarily, assuming that the theoretical wavelength of the chip is 850 nm and the value range of the wavelength is ±10 nm, then the spectral data with wavelengths between 840 nm and 860 nm needs to be selected from the collected spectral data. When the accuracy of the spectral device is 0.01 nm, the selected spectral data includes 2,000 data.

[0062] Due to process limitations and differences in actual production, there will be certain differences in the theoretical wavelengths of different chips. Therefore, the center of the actual wavelength of the chip is different from the theoretical wavelength. In the above method, in order to ensure that the selected spectral data can cover the spectral data of the effective wavelength to the greatest extent, the value range of the wavelength needs to be set relatively large, resulting in a relatively large amount of selected spectral data and a large amount of data.

[0063] In addition, a semiconductor workshop may have multiple production lines, and the design wavelengths of different production lines may be different. Wafers produced by different production lines need to be tested using different theoretical wavelengths. Therefore, multiple test menus need to be established on the test equipment. Before testing, the user needs to select the corresponding test menu from the test equipment, and automated testing cannot be achieved, resulting in increased difficulty in monitoring and management. Once forgetting to modify the test menu or selecting incorrect menu parameters, it may cause the spectral data in the effective spectral interval not to be selected or only partially selected, and the effectiveness of the selected data cannot be guaranteed.

[0064] Figure 1 It is a schematic flowchart of a data processing method provided by an embodiment of the present application. Among them, this data processing method can be applied to a test device. As Figure 1 shown, this data processing method may include the following steps.

[0065] 101. Collect the initial spectral data of the target chip.

[0066] The target chip is any optoelectronic chip on the wafer to be tested. The wafer to be tested is the wafer currently being tested by the testing device.

[0067] When testing the target chip, the initial spectral data of the target chip can be collected. The initial spectral data of the target chip is all the spectral data of the collected target chip.

[0068] In some embodiments, the initial spectral data of the target chip can be collected by a spectral device. The spectral device can be a spectrometer, a spectroradiometer, or other devices with spectral acquisition functions.

[0069] In some embodiments, the first thread can be used to collect the initial spectral data of the target chip, that is, call the first thread to collect the initial spectral data of the target chip.

[0070] In some embodiments, the first thread can be used to collect the initial spectral data of the target chip through a spectral device, that is, call the first thread to drive the spectral device to collect the initial spectral data of the target chip.

[0071] The spectral data of the target chip can include the basic parameter data of the target chip and the spectral parameter data corresponding to the basic parameter data. The basic parameter data is the data of the basic parameters. The basic parameters can be the wavelength of light or the frequency of light. The spectral parameter data is the data of the spectral parameters. The spectral parameters can be the optical power, the spectral intensity, or the luminous flux.

[0072] The spectral data can be wavelength-optical power data, the basic parameter data can be wavelength data, and the spectral parameter data can be optical power data. The spectral data can also be frequency-optical power data, the basic parameter data can be frequency data, and the spectral parameter data can be optical power data. The spectral data can also be wavelength-spectral intensity data, the basic parameter data can be wavelength data, and the spectral parameter data can be spectral intensity data. The initial spectral data can also be frequency-spectral intensity data, the basic parameter data can be frequency data, and the spectral parameter data can be spectral intensity data. The initial spectral data can also be wavelength-luminous flux data, the basic parameter data can be wavelength data, and the spectral parameter data can be luminous flux data. The initial spectral data can also be frequency-luminous flux data, the basic parameter data can be frequency data, and the spectral parameter data can be luminous flux data.

[0073] 102. Determine the maximum value among the spectral parameter data included in the initial spectral data of the target chip to obtain the maximum spectral parameter of the target chip.

[0074] The maximum spectral parameter of the target chip can be determined according to the initial spectral data of the target chip. The maximum spectral parameter is the maximum value of the spectral parameters.

[0075] The maximum value among the spectral parameter data included in the initial spectral data of the target chip can be determined, that is, the maximum value is selected from the spectral parameter data included in the initial spectral data of the target chip to obtain the maximum spectral parameter of the target chip.

[0076] Exemplarily, in the case where the spectral data is wavelength spectral intensity data or frequency spectral intensity data, the maximum spectral intensity value can be selected from the initial spectral data of the target chip, that is, the maximum value is selected from the spectral intensity data included in the initial spectral data of the target chip to obtain the maximum spectral intensity of the target chip.

[0077] In some embodiments, the minimum value among the included spectral parameter data can be determined to obtain the minimum spectral parameter of the target chip.

[0078] The minimum value of the spectral parameters of the target chip can be selected from the initial spectral data of the target chip, that is, the minimum value is selected from the spectral parameter data included in the initial spectral data of the target chip to obtain the minimum spectral parameter of the target chip. The minimum spectral parameter is the minimum value of the spectral parameters.

[0079] In some embodiments, the second thread can be used to determine the maximum value among the spectral parameter data included in the initial spectral data of the target chip to obtain the maximum spectral parameter of the target chip.

[0080] The first thread is different from the second thread. It can be seen that the acquisition and processing of spectral data can be performed by different threads. Therefore, the processing of spectral data does not affect the acquisition of spectral data, and parallel execution of the acquisition and processing of spectral data can be achieved, which can improve the test efficiency of the chip and the processing efficiency of data. Exemplarily, the first thread can be used to acquire the spectral data of the first chip, and the second thread can be used to process the spectral data of the second chip.

[0081] Exemplarily, the first thread can be a Data Acquisition (DAQ) thread, and the second thread can be a Data Analytics (DA) thread.

[0082] 103. Determine the spectral parameter reference value of the target chip according to the maximum spectral parameter of the target chip.

[0083] The spectral parameter reference value of the target chip can be determined according to the maximum spectral parameter of the target chip. The spectral parameter reference value of the target chip is between the maximum spectral parameter and the minimum spectral parameter of the target chip, that is, the spectral parameter reference value of the target chip is greater than the minimum spectral parameter of the target chip and less than the maximum spectral parameter of the target chip. The spectral parameter reference value is the reference value of the spectral parameters.

[0084] In some embodiments, a second thread may be used to determine a spectral parameter reference value of the target chip according to the maximum value of the spectral parameters of the target chip.

[0085] It can be seen that the acquisition and processing of spectral data can be performed by different threads. Therefore, the test efficiency of the chip and the processing efficiency of the data can be improved.

[0086] In some embodiments, a spectral parameter reference value of the target chip may be determined according to the maximum value of the spectral parameters of the target chip and a first threshold.

[0087] The first threshold is a predetermined value and can be determined according to the number of required peaks. Since the first threshold is predetermined according to the number of required peaks, the validity of the determined spectral parameter reference value of the chip can be ensured.

[0088] It can be seen that the spectral parameter reference value of the chip can be determined according to the maximum value of the spectral parameters of the chip and the first threshold, and the required numerical values are few, which can improve the determination efficiency.

[0089] Exemplarily, assuming that the spectral data is wavelength spectral intensity data, the relationship between the first threshold and the maximum spectral intensity value and the spectral intensity reference value of the chip can be expressed as follows:

[0090] M = 10 * lg(A / C) (1)

[0091] A is the maximum spectral intensity value of the chip. C is the spectral intensity reference value of the chip. M is the first threshold and is between 1 and 35. The value of M is predetermined according to the number of required peaks. The value of M is positively correlated with the number of required peaks, that is, the more the number of required peaks, the larger the value of M, and the fewer the number of required peaks, the smaller the value of M.

[0092] By transforming formula (1), we can get:

[0093] C = A / 10^ (M / 10) (2) 0.1*M (2)

[0094] It can be seen that when A and M are known, the spectral intensity reference value C of the chip can be quickly determined through the above formula (2).

[0095] It should be understood that the above is an exemplary description of determining the spectral intensity reference value of the target chip according to the maximum value of the spectral intensity of the target chip and the first threshold, and it is not limited thereto. The spectral intensity reference value of the target chip can also be determined according to the maximum value of the spectral intensity of the target chip and the first threshold by using a transformation of formula (1) or formula (2) or other formulas.

[0096] In some embodiments, a spectral parameter reference value of the target chip may be determined according to the maximum value and the minimum value of the spectral parameters of the target chip.

[0097] When determining the spectral parameter reference value of a chip, not only the maximum value of the spectral parameters of the chip is considered, but also the minimum value of the spectral parameters of the chip is considered, which can improve the effectiveness and accuracy of the determined spectral parameter reference value of the chip.

[0098] In some embodiments, the spectral parameter reference value of the target chip can be determined according to the maximum value of the spectral parameters of the target chip, the minimum value of the spectral parameters of the target chip, and the second threshold.

[0099] The second threshold is a pre-determined value and can be determined according to the number of required peaks. Since the second threshold is pre-determined according to the number of required peaks, the effectiveness of the determined spectral parameter reference value of the chip can be ensured.

[0100] It can be seen that the spectral parameter reference value of the chip can be determined according to the maximum value, minimum value and the first threshold of the spectral parameters of the chip. Not only the maximum value of the spectral parameters of the chip is considered, but also the minimum value of the spectral parameters of the chip is considered, and the number of required peaks is also considered, which can improve the effectiveness and accuracy of the determined spectral parameter reference value of the chip.

[0101] Exemplarily, assuming that the spectral data is wavelength-spectral intensity data, the relationship between the second threshold and the maximum spectral intensity, minimum spectral intensity and spectral intensity reference value of the chip can be expressed as follows:

[0102] C = (A - B) * N% + B (3)

[0103] B is the minimum spectral intensity of the chip. N is the second threshold and is between 0.01 and 10. The value of N is pre-determined according to the number of required peaks. The value of N is inversely correlated with the number of required peaks, that is, the more the number of required peaks, the smaller the value of N, and the fewer the number of required peaks, the larger the value of N.

[0104] It should be understood that the above is an exemplary description of determining the spectral intensity reference value of the target chip according to the maximum spectral intensity, minimum spectral intensity of the target chip and the second threshold, and does not limit it. The spectral intensity reference value of the target chip can also be determined according to the maximum spectral intensity, minimum spectral intensity of the target chip and the second threshold by using a deformation formula of formula (3) or other formulas.

[0105] In some embodiments, the maximum and minimum spectral parameters of the target chip can be weighted and summed to obtain the spectral parameter reference value of the target chip. The weighting coefficient of the minimum spectral parameter of the target chip is much larger than the weighting coefficient of the maximum spectral parameter of the target chip to ensure that the spectral parameter reference value of the target chip is between the maximum and minimum spectral parameters of the target chip.

[0106] The weighting coefficients of the maximum spectral parameter and the minimum spectral parameter of the target chip are determined in advance according to the number of required peaks. Therefore, the effectiveness of the determined reference value of the spectral parameter of the chip can be ensured.

[0107] 104. Determine the basic parameter range according to the reference value of the spectral parameter and the basic parameter data of the target chip.

[0108] 105. Select the basic parameter data and the corresponding spectral parameter data from the initial spectral data of the target chip according to the basic parameter range, and obtain the target spectral data of the target chip.

[0109] First, the basic parameter range can be determined according to the reference value of the spectral parameter and the basic parameter data of the target chip. Then, according to the basic parameter range, the basic parameter data and the corresponding spectral parameter data can be selected from the initial spectral data of the target chip. The selected basic parameter data and the corresponding spectral parameter data can be determined as the target spectral data of the target chip.

[0110] In some embodiments, a second thread can be used to determine the basic parameter range according to the reference value of the spectral parameter and the basic parameter data of the target chip. A second thread can be used to select the basic parameter data and the corresponding spectral parameter data from the initial spectral data of the target chip according to the basic parameter range, and obtain the target spectral data of the target chip.

[0111] It can be seen that the acquisition and processing of spectral data can be executed by different threads. Therefore, the test efficiency of the chip and the processing efficiency of the data can be improved.

[0112] In some embodiments, the spectral curve can be determined according to the initial spectral data of the target chip. Determine the value of the abscissa corresponding to the reference value of the spectral parameter among the values of the ordinate in the spectral curve, and obtain multiple basic parameter values. According to the maximum and minimum values among the multiple basic parameter values, determine the basic parameter range. Determine the data of the points whose abscissa values in the spectral curve are within the basic parameter range as the target spectral data of the target chip. The abscissa of the spectral curve is the basic parameter, and the ordinate of the spectral curve is the spectral parameter.

[0113] First, a spectral curve with the abscissa as the basic parameter and the ordinate as the spectral parameter can be determined according to the initial spectral data of the target chip. Then, the value of the abscissa corresponding to the spectral parameter reference value in the spectral curve can be determined, that is, the value of the abscissa corresponding to the intersection point of the line with the ordinate value being the spectral parameter reference value and the spectral curve, obtaining multiple basic parameter values. Then, according to the maximum and minimum values among the multiple basic parameter values, the basic parameter range can be determined, and the data of the points in the spectral curve whose abscissa values are within the basic parameter range can be determined as the target spectral data of the target chip. The target spectral data of the target chip can include the data of the points with the basic parameter values being the maximum and minimum values.

[0114] It can be seen that first, the spectral parameter reference value of the target chip is determined according to the initial spectral data of the target chip. Then, according to the spectral parameter reference value of the target chip and the basic parameter data, the basic parameter range is determined. Then, the spectral data is selected according to the basic parameter range, which can ensure that the selected spectral data includes the spectral data of the effective basic parameters, that is, the data on both sides of the maximum peak, and can ensure the effectiveness of the selected data while reducing the data volume.

[0115] In some embodiments, the range between the maximum and minimum values among the multiple basic parameter values can be determined as the basic parameter range.

[0116] It can be seen that the range between the maximum and minimum values among the multiple basic parameter values can be directly determined as the basic parameter range, which can ensure that the selected spectral data includes the data with the spectral parameter value greater than or equal to the spectral parameter reference value, and can ensure the effectiveness of the selected data while reducing the data volume.

[0117] In some embodiments, the difference between the minimum value of the multiple basic parameters and the third threshold can be determined to obtain the first basic parameter value, the sum of the maximum value of the multiple basic parameters and the third threshold can be determined to obtain the second basic parameter value, and the range between the first basic parameter value and the second basic parameter value can be determined as the basic parameter range.

[0118] It can be seen that first, a certain threshold can be extended on both sides based on the minimum and maximum values of the multiple basic parameters, and then the spectral data with the basic parameter values in between can be selected, which can avoid the situation that some spectral data selected cannot ensure all effective spectral intervals due to differences between different chips, can ensure the effectiveness of the selected data, and can improve compatibility.

[0119] The third threshold is a relatively small value. Exemplarily, when the basic parameter is the wavelength of light, the third threshold can be 1nm.

[0120] Exemplarily, Figure 2 [[ID=Figure 2 As shown, the selected spectral data can be the spectral data with wavelength values between E and D, or the spectral data with wavelength values between K and L. The difference between L and D, and the difference between E and K are the third threshold.

[0121] In Figure 1 In the data processing method shown, according to the basic parameter range, spectral data is selected from the initial spectral data of the chip, and the basic parameter range is determined based on the spectral parameter reference value and basic parameter data of the chip. The spectral parameter reference value of the chip is based on the maximum value in the spectral parameter data of the chip, which is located between the maximum and minimum spectral parameters of the chip. Therefore, it can be ensured that the selected spectral data is part of the collected spectral data, and the amount of spectral data can be reduced. In addition, the basic parameter range used in the selection process of the spectral data is determined based on the spectral parameter reference value and basic parameter data of the chip. The spectral parameter reference value of the chip is determined based on the maximum value in the spectral parameter data, and the maximum spectral parameter of the chip is determined based on the collected spectral data. That is, the values used in the selection process of the spectral data are determined based on the collected spectral data, which can avoid the need for user specification, thereby ensuring the automation of data processing and improving the effectiveness, universality and flexibility of the selected data. Further, since the spectral data has been collected, the center of the actual wavelength of the chip can be accurately determined based on the collected spectral data, so that the selection interval can be accurately determined, and the situation of requiring a very wide value range to cover the effective spectral data can be avoided. Therefore, the amount of data can be reduced.

[0122] Figure 3 is a schematic flowchart of another data processing method provided by an embodiment of the present application. Among them, this data processing method can be applied to a test device. As Figure 3 shown, this data processing method may include the following steps.

[0123] 301. Collect the initial spectral data of the target chip.

[0124] 302. Determine the maximum value in the spectral parameter data included in the initial spectral data of the target chip to obtain the maximum spectral parameter of the target chip.

[0125] 303. Determine the spectral parameter reference value of the target chip according to the maximum spectral parameter of the target chip.

[0126] 304. Determine the basic parameter range according to the spectral parameter reference value and basic parameter data of the target chip.

[0127] 305. Select the basic parameter data and the corresponding spectral parameter data from the initial spectral data of the target chip according to the basic parameter range to obtain the target spectral data of the target chip.

[0128] Among them, steps 301 - 305 are the same as steps 101 - 105, and for a detailed description, reference can be made to the description of steps 101 - 105.

[0129] 306. Store the target spectral data of the target chip.

[0130] After obtaining the target spectral data of the target chip, the target spectral data of the target chip can be stored for subsequent invocation.

[0131] The target spectral data of the target chip can be sent to other devices so that the other devices can analyze and process the target spectral data of the target chip.

[0132] The partial spectral data selected within the basic parameter range can be sent to other devices, which can save the storage resources and processing resources of other devices while ensuring that the spectral data includes valid spectral data.

[0133] In Figure 3 In the data processing method shown, only the partial spectral data selected according to the basic parameter range is stored, which can save storage space while ensuring that the spectral data includes valid spectral data.

[0134] It should be understood that the same or corresponding information between different embodiments can be referred to each other, and the content and / or steps in different embodiments can be combined with each other.

[0135] It should be understood that in the above embodiments, some steps may not exist and some steps may be combined.

[0136] Based on the same inventive concept, the embodiments of the present application also provide a data processing device for implementing the above-mentioned data processing method. The solution provided by the data processing device to solve the problem is similar to the solution described in the above method. Therefore, the specific limitations in one or more embodiments of the data processing device provided below can be referred to the limitations on the data processing method in the above text, and will not be repeated here.

[0137] Figure 4 It is a schematic structural diagram of a data processing device provided by an embodiment of the present application. Among them, the data processing device can be applied to a test device. The data processing device can include:

[0138] An acquisition unit 401, configured to acquire the initial spectral data of the target chip. The target chip is any optoelectronic chip on the to-be-tested wafer, and the initial spectral data includes basic parameter data and spectral parameter data corresponding to the basic parameter data;

[0139] A first determination unit 402, configured to determine the maximum value in the spectral parameter data to obtain the maximum spectral parameter of the target chip;

[0140] A second determination unit 403, configured to determine a spectral parameter reference value of the target chip according to the maximum value of the spectral parameters of the target chip, where the spectral parameter reference value of the target chip is between the maximum value and the minimum value of the spectral parameters of the target chip;

[0141] A third determination unit 404, configured to determine a basic parameter range according to the spectral parameter reference value and the basic parameter data;

[0142] A selection unit 405, configured to select basic parameter data and corresponding spectral parameter data from the initial spectral data of the target chip according to the basic parameter range, so as to obtain the target spectral data of the target chip.

[0143] In some embodiments, the data processing device may further include:

[0144] A storage unit, configured to store the target spectral data of the target chip.

[0145] In some embodiments, the second determination unit 403 is specifically configured to determine the spectral parameter reference value of the target chip according to the maximum value of the spectral parameters of the target chip and a first threshold.

[0146] In some embodiments, the first determination unit 402 is further configured to determine the minimum value in the spectral parameter data, so as to obtain the minimum value of the spectral parameters of the target chip;

[0147] The second determination unit 403 is specifically configured to determine the spectral parameter reference value of the target chip according to the maximum value and the minimum value of the spectral parameters of the target chip.

[0148] In some embodiments, the second determination unit 403 determines the spectral parameter reference value of the target chip according to the maximum value and the minimum value of the spectral parameters of the target chip, including:

[0149] Determining the spectral parameter reference value of the target chip according to the maximum value of the spectral parameters of the target chip, the minimum value of the spectral parameters of the target chip, and a second threshold.

[0150] In some embodiments, the third determination unit 404 is specifically configured to:

[0151] Determine a spectral curve according to the initial spectral data, where the abscissa of the spectral curve is the basic parameter and the ordinate of the spectral curve is the spectral parameter;

[0152] Determine the value of the abscissa corresponding to the spectral parameter reference value in the spectral curve, so as to obtain multiple basic parameter values;

[0153] Determine the basic parameter range according to the maximum value and the minimum value of the multiple basic parameter values;

[0154] The selection unit 405 is specifically configured to determine the data of the points whose abscissa values in the spectral curve are within the basic parameter range as the target spectral data of the target chip.

[0155] In some embodiments, the third determination unit 404 determines the basic parameter range according to the maximum value and the minimum value among multiple basic parameter values, including:

[0156] Determine the range between the maximum value and the minimum value among the multiple basic parameter values as the basic parameter range.

[0157] In some embodiments, the third determination unit 404 determines the basic parameter range according to the maximum value and the minimum value among multiple basic parameter values, including:

[0158] Determine the difference between the minimum value among the multiple basic parameters and the third threshold value to obtain the first basic parameter value;

[0159] Determine the sum of the maximum value among the multiple basic parameters and the third threshold value to obtain the second basic parameter value;

[0160] Determine the range between the first basic parameter value and the second basic parameter value as the basic parameter range.

[0161] Each unit in the above data processing device can be implemented in whole or in part by software, hardware, and their combination. Each of the above units can be embedded in the processor of the data processing device in hardware form or independent of it, or stored in the memory of the data processing device in software form, so that the processor can call and execute the operations corresponding to each of the above units.

[0162] In an exemplary embodiment, Figure 5 is a schematic structural diagram of a test device provided by an embodiment of the present application. The test device includes a processor and a memory. Among them, the processor and the memory are connected through a system bus. Among them, the processor of the test device is used to provide computing and control capabilities. The memory of the test device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, a computer program, and a database. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The database of the test device is used to store the selected spectral data. When the computer program is executed by the processor, it realizes a data processing method.

[0163] Those skilled in the art can understand that Figure 5 the structure shown in

[0164] In an exemplary embodiment, Figure 6 is a schematic structural diagram of another testing device provided by an embodiment of the present application. As Figure 6 shown, the testing device may include a spectral device 601 and a processor 602, and the spectral device 601 is connected to the processor 602.

[0165] The spectral device 601 is configured to collect initial spectral data of a target chip, and the target chip is any chip on a wafer to be tested;

[0166] The processor 602 is configured to determine the maximum value of the spectral parameters of the target chip according to the initial spectral data of the target chip;

[0167] The processor 602 is further configured to determine a reference value of the spectral parameters of the target chip according to the maximum value of the spectral parameters of the target chip, and the reference value of the spectral parameters of the target chip is between the maximum value and the minimum value of the spectral parameters of the target chip;

[0168] The processor 602 is further configured to select spectral data from the initial spectral data of the target chip according to the reference value of the spectral parameters of the target chip, so as to obtain the target spectral data of the target chip.

[0169] Wherein, the detailed description of the processor 602 may refer to the above relevant description.

[0170] In some embodiments, the testing device may further include an integrating sphere 603 and a control device 604. The spectral device 601 is respectively connected to the integrating sphere 603 and the control device 604. The processor 602 is further connected to the control device 604.

[0171] The control device 604 can control the state of the spectral device 601.

[0172] Light enters the spectral device 601 through the integrating sphere 603 for spectral testing.

[0173] In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored, and when the computer program is executed by a processor, the steps in the above method embodiments are implemented.

[0174] In one embodiment, a computer program product is provided, including a computer program, and when the computer program is executed by a processor, the steps in the above method embodiments are implemented.

[0175] It should be noted that the spectral data involved in the present application are all data authorized by users or fully authorized by all parties, and the collection, use and processing of the relevant data need to comply with the relevant regulations.

[0176] Those of ordinary skill in the art can understand that all or part of the processes in the above-described method embodiments can be completed by instructing relevant hardware through a computer program. The computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the method embodiments as described above. Among them, any reference to a memory, database, or other medium used in the embodiments provided in this application can include at least one of non-volatile memory and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetoresistive random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM), etc. The databases involved in the embodiments provided in this application can include at least one of relational databases and non-relational databases. Non-relational databases can include distributed databases based on blockchain, etc., without limitation. The processors involved in the embodiments provided in this application can be general-purpose processors, central processing units, graphics processing units, digital signal processors, programmable logic devices, data processing logics based on quantum computing, artificial intelligence (AI) processors, etc., without limitation.

[0177] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as falling within the scope recorded in this application.

[0178] The above-described embodiments merely represent several implementation manners of the present application. The description thereof is relatively specific and detailed, but it should not be construed as a limitation on the patent scope of the present application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all fall within the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the appended claims.

Claims

1. A data processing method, characterized in that: include: Collecting initial spectral data of a target chip, wherein the target chip is any optoelectronic chip on a wafer to be tested, the initial spectral data including basic parameter data and spectral parameter data corresponding to the basic parameter data, the initial spectral data being wavelength spectral intensity data, the basic parameter data being wavelength data, and the spectral parameter data being spectral intensity data; Determining a maximum value in the spectral parameter data to obtain a maximum spectral intensity value of the target chip; Determining a minimum value in the spectral parameter data to obtain a minimum spectral intensity value of the target chip; According to the maximum spectral intensity, a spectral intensity reference value of the target chip is determined, wherein the spectral intensity reference value is between the maximum spectral intensity and the minimum spectral intensity of the target chip; the spectral intensity reference value is determined according to the following formula: C= A / 10 0.1*M ,or C=(AB)*N%+B Wherein, C is the spectrum intensity reference value, A is the spectrum intensity maximum value, B is the spectrum intensity minimum value, M is the first threshold value, and N is the second threshold value; Determining a basic parameter range according to the spectral intensity reference value and the basic parameter data; Basic parameter data and corresponding spectral parameter data are selected from the initial spectral data according to the basic parameter range to obtain target spectral data of the target chip.

2. The method according to claim 1, characterized in that The method further comprises: The target spectrum data of the target chip is stored.

3. The method according to claim 1, characterized in that Determining the basic parameter range according to the spectral intensity reference value and the basic parameter data includes: Determine a spectrum curve according to the initial spectrum data, wherein the abscissa of the spectrum curve is a basic parameter and the ordinate of the spectrum curve is a spectrum parameter; Determining the value of the ordinate in the spectrum curve as the value of the abscissa corresponding to the spectrum intensity reference value to obtain a plurality of basic parameter values; Determining a basic parameter range according to a maximum value and a minimum value among the multiple basic parameter values; The step of selecting basic parameter data and corresponding spectral parameter data from the initial spectral data according to the basic parameter range to obtain target spectral data of the target chip includes: The data of the point in the spectrum curve whose abscissa value is within the basic parameter range is determined as the target spectrum data of the target chip.

4. The method according to claim 3, characterized in that Determining the basic parameter range according to the maximum value and the minimum value of the multiple basic parameter values includes: A range between a maximum value and a minimum value among the plurality of basic parameter values is determined as a basic parameter range.

5. The method according to claim 3, characterized in that Determining the basic parameter range according to the maximum value and the minimum value of the multiple basic parameter values includes: Determine a difference between a minimum value among the plurality of basic parameters and a third threshold value to obtain a first basic parameter value; Determine the sum of a maximum value among the multiple basic parameters and the third threshold to obtain a second basic parameter value; A range between the first basic parameter value and the second basic parameter value is determined as a basic parameter range.

6. A data processing device, characterized in that: The device comprises: An acquisition unit is configured to acquire initial spectral data of a target chip, wherein the target chip is any optoelectronic chip on a wafer to be tested, the initial spectral data including basic parameter data and spectral parameter data corresponding to the basic parameter data, the initial spectral data being wavelength spectral intensity data, the basic parameter data being wavelength data, and the spectral parameter data being spectral intensity data; a first determining unit, configured to determine a maximum value in the spectral parameter data to obtain a maximum spectral intensity value of the target chip; The first determining unit is further configured to determine a minimum value in the spectral parameter data to obtain a minimum spectral intensity value of the target chip; a second determining unit, configured to determine a spectrum intensity reference value of the target chip according to the maximum spectrum intensity value, wherein the spectrum intensity reference value is between the maximum spectrum intensity value and the minimum spectrum intensity value of the target chip; The spectral intensity reference value is determined according to the following formula: C= A / 10 0.1*M ,or C=(AB)*N%+B Wherein, C is the spectrum intensity reference value, A is the spectrum intensity maximum value, B is the spectrum intensity minimum value, M is the first threshold value, and N is the second threshold value; a third determining unit, configured to determine a basic parameter range according to the spectral intensity reference value and the basic parameter data; A selection unit is used to select basic parameter data and corresponding spectral parameter data from the initial spectral data according to the basic parameter range to obtain target spectral data of the target chip.

7. A testing device, characterized in that: including a spectral device and a processor; The spectral device is used to collect initial spectral data of a target chip, wherein the target chip is any optoelectronic chip on a wafer to be tested, the initial spectral data includes basic parameter data and spectral parameter data corresponding to the basic parameter data, the initial spectral data is wavelength spectral intensity data, the basic parameter data is wavelength data, and the spectral parameter data is spectral intensity data; The processor is configured to determine a maximum value in the spectral parameter data to obtain a maximum spectral intensity value of the target chip; The processor is further configured to determine a minimum value in the spectral parameter data to obtain a minimum spectral intensity value of the target chip; The processor is further configured to determine a spectrum intensity reference value of the target chip based on the maximum spectrum intensity, wherein the spectrum intensity reference value is between the maximum spectrum intensity and the minimum spectrum intensity of the target chip; the spectrum intensity reference value is determined according to the following formula: C= A / 10 0.1*M ,or C=(AB)*N%+B Wherein, C is the spectrum intensity reference value, A is the spectrum intensity maximum value, B is the spectrum intensity minimum value, M is the first threshold value, and N is the second threshold value; The processor is further configured to determine a basic parameter range based on the spectral intensity reference value and the basic parameter data; The processor is further configured to select basic parameter data and corresponding spectral parameter data from the initial spectral data according to the basic parameter range to obtain target spectral data of the target chip.

8. A test device comprising a memory and a processor, wherein the memory stores a computer program, wherein: When the processor executes the computer program, the steps of the method according to any one of claims 1 to 5 are implemented.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the method according to any one of claims 1 to 5 are implemented.

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