SICM scanning control method based on feedback quantization and related device

Through the SICM scanning control method based on feedback quantization, the probe probe decompression speed is dynamically adjusted, which solves the problems of low scanning time resolution and poor security in the existing SICM scanning technology, and achieves a more efficient and safe scanning process.

CN119986053AActive Publication Date: 2025-05-13XI AN JIAOTONG UNIV
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Patent Information

Application Number
CN202510190674.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-02-20
Publication Date
2025-05-13
Estimated Expiration
2045-02-20

AI Technical Summary

Technical Problem

In the existing SICM scanning technology, the scanning time resolution is low and the safety is poor. The probe is prone to collision with the sample during the scanning process, resulting in sample damage or probe wear.

Method used

The SICM scanning control method based on feedback quantization is adopted. By obtaining the test height and initial scanning speed of the test point, the probe down speed is dynamically adjusted, and the ratio is calculated in real time based on the probe height, and the probe speed is adjusted until the probe stops falling when the probe detects a sudden change in ion current.

Benefits of technology

It improves the speed and safety of SICM scanning, reduces scanning instability caused by speed mutation, enhances the interaction control between the probe and the sample, avoids sample damage or probe wear, and improves the accuracy and efficiency of the scan.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention relates to the technical field of microscope application, in particular to an SICM scanning control method and related device based on feedback quantization, and the method comprises the steps: obtaining the test height and the initial scanning speed of a test point, the initial safety height and the first speed of the test point, and the second speed of the test point, and starting to adjust the point; controlling the scanning probe to go down to the first speed of the test point from the initial safe height of the test point at the initial scanning speed of the test point, starting to adjust the point, intervening in the first dynamic speed adjustment, continuing to go down to the second speed of the test point, starting to adjust the point, intervening in the second dynamic speed adjustment, continuing to go down, and continuing to go down; according to the control method, the speed is correspondingly and dynamically adjusted in a targeted mode according to the downward probing position of the probe by setting the speed initial adjusting point position, and the problems that in the prior art, the scanning time resolution of the scanning ion conductance microscope is low, and safety is poor are solved.
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Description

Technical Field

[0001] The present invention relates to the field of microscope application technology, in particular to a SICM scanning control method based on feedback quantization and a related device. Background Art

[0002] Living cell observation is an important technology in biological and medical research. It allows researchers to directly observe the morphology, structure and function of cells while the cells maintain their physiological activity. Living cell observation includes microscopy and imaging techniques; among them, microscopy techniques include phase contrast microscopy, differential interference microscopy, Hoffman modulation contrast microscopy, relief phase contrast microscopy, fluorescence microscopy and scanning ion conductivity microscopy (SICM); among them, scanning ion conductivity microscopy can observe living cells under physiological conditions due to its high-resolution imaging, non-contact scanning, and diverse imaging modes. There is no need to fix or stain the samples, so that scanning ion conductivity microscopy can more realistically reflect the morphology and functional characteristics of living cells under physiological conditions. At the same time, it can monitor the volume changes, movement states and dynamic changes of cell surfaces of living cells in real time, and realize the study of cell behavior, cell-to-cell interactions and cell responses to environmental stimuli. It has become the best observation tool for living cells and gradually plays an important role in the fields of life sciences, medical pharmacology, etc.

[0003] The scanning ion conductivity microscope uses a microprobe as a detection sensor to detect changes in ion current in the circuit. The piezoelectric motion controller controls the microprobe to move downward from a certain height in equal steps. When the tip of the microprobe is less than the diameter of the probe from the topographic surface, the ion current in the circuit changes dramatically. Based on the current change, the current topographic height is calculated, and the probe returns to scan the next point. Due to the lack of probe control and precise positioning technology in early equipment, the extremely fine probe can easily accidentally contact the sample during scanning and cause damage to the sample. After continuous development, the scanning height detection method of the scanning ion conductivity microscope has changed from the original scanning method to the jump scanning method. According to the set safety height, the probe's downward path is shortened, and the probe scanning time is reduced, which can achieve non-destructive, high-resolution imaging in a liquid environment, and can provide simple, efficient and low-cell damage biological / chemical stimulation. However, the scanning method returns to the same safety height between different points. In actual scanning, it is limited by different sample morphologies, which can easily cause scanning path redundancy, resulting in a low scanning time resolution of the scanning ion conductivity microscope. In addition, the probe under the control of the piezoelectric controller has inertia and is prone to collision with the sample, which poses new challenges to the probe's limit control and path return. Therefore, it is urgent to develop a scanning ion conductivity microscope fast scanning method that can improve the scanning speed of the scanning ion conductivity microscope and ensure that the scanning has a high degree of safety. Summary of the invention

[0004] In view of the problems of low scanning time resolution and poor safety of scanning ion conductivity microscope in the prior art, the present invention provides a SICM scanning control method based on feedback quantization and related devices.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions: The present invention provides a SICM scanning control method based on feedback quantization, comprising: Get the test height and initial scanning speed of the test point; According to the test height of the test point, the initial safety height of the test point is obtained; According to the initial safety height of the test point, a first speed start adjustment point of the test point and a second speed start adjustment point of the test point are obtained; Control the scanning probe from the initial safety height of the test point, and move down to the first speed of the test point with the initial scanning speed of the test point to start adjusting the point, obtain the first quantitative calculation ratio of the test point, and adjust the probe speed according to the first quantitative calculation ratio of the test point, continue to move down to the second speed of the test point to start adjusting the point, obtain the second quantitative calculation ratio of the test point, and adjust the probe speed according to the second quantitative calculation ratio of the test point, and continue to move down until the probe detects a sudden change in ion current and stops moving down.

[0006] Optionally, the method for obtaining the initial safety height of the test point according to the test height of the test point is:

[0007] in, It is the initial safety height of the test point; is the test height of the test point, Minimum height to prevent probe collision.

[0008] Optionally, the height of the first speed starting adjustment point is 40% to 60% of the initial safety height; the height of the second speed starting adjustment point is 15% to 30% of the initial safety height.

[0009] Optionally, the method of obtaining the first quantized calculation ratio of the test point and adjusting the probe speed according to the first quantized calculation ratio of the test point is: Get the probe height at the current moment; According to the probe height at the current moment, a first quantitative calculation ratio of the test point is obtained; According to the first quantized calculation ratio of the test point, a first speed change ratio of the test point is obtained; According to the first speed change ratio of the test point, the probe speed at the current moment is obtained, and the probe is controlled to move downward according to the probe speed at the current moment to complete the probe speed adjustment.

[0010] Optionally, the method for obtaining the first quantitative calculation ratio of the test point according to the probe height at the current moment is:

[0011] The method for obtaining the first speed change ratio of the test point according to the first quantized calculation ratio of the test point is:

[0012] The method for obtaining the probe speed at the current moment according to the first speed change ratio of the test point is:

[0013] in, calculating a ratio for the first quantification; is the current probe height; is the maximum height of the probe in the Z-axis movement direction; is the first speed change ratio; is the current speed of the probe downward, at which the probe downward position is between the first speed start adjustment point and the second speed start adjustment point of the test point; is the initial scan speed.

[0014] Optionally, the method of obtaining the second quantized calculation ratio of the test point and adjusting the probe speed according to the second quantized calculation ratio of the test point is: Get the probe height at the current moment; According to the probe height at the current moment, a second quantitative calculation ratio of the test point is obtained; According to the second quantized calculation ratio of the test point, a second speed change ratio of the test point is obtained; According to the second speed change ratio of the test point, the probe speed at the current moment is obtained, and the probe is controlled to move downward according to the probe speed at the current moment to complete the probe speed adjustment.

[0015] Optionally, the method for obtaining the second quantitative calculation ratio of the test point according to the probe height at the current moment is:

[0016] The method for obtaining the second speed change ratio of the test point according to the second quantized calculation ratio of the test point is:

[0017] The method for obtaining the probe speed at the current moment according to the second speed change ratio of the test point is:

[0018] in, calculating a ratio for the second quantization; is the current probe height; is the maximum height of the probe in the Z-axis movement direction; is the second speed change ratio; is the current speed of the probe downward, at which the probe downward position is below the second speed start adjustment point; The scanning speed when the probe reaches the second speed and starts to adjust the point.

[0019] The present invention also provides a SICM scanning control system based on feedback quantization, comprising: Test point scanning data acquisition module: used to obtain the test height and initial scanning speed of the test point; Initial safety height acquisition module: used to obtain the initial safety height of the test point according to the test height of the test point; Adjustment point acquisition module: used to obtain the first speed start adjustment point of the test point and the second speed start adjustment point of the test point according to the initial safety height of the test point; Scanning probe control module: used to control the scanning probe to move from the initial safety height of the test point to the first speed of the test point with the initial scanning speed of the test point, start adjusting the point, obtain the first quantitative calculation ratio of the test point, and adjust the probe speed according to the first quantitative calculation ratio of the test point, continue to move down to the second speed of the test point, start adjusting the point, obtain the second quantitative calculation ratio of the test point, and adjust the probe speed according to the second quantitative calculation ratio of the test point, and continue to move down until the probe detects a sudden change in ion current and stops moving down.

[0020] A terminal device comprises a memory, a processor and a computer program stored in the memory and executable on the processor, wherein the processor implements the steps of the above method when executing the computer program.

[0021] A computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the above method are implemented.

[0022] Compared with the prior art, the present invention has the following beneficial effects: The present invention discloses a SICM scanning control method based on feedback quantization. The method obtains a test height and an initial scanning speed of a test point; according to the test height of the test point, the initial safety height, a first speed start adjustment point and a second speed start adjustment point of the test point are obtained in sequence; the scanning probe is controlled to move from the initial safety height of the test point to the first speed start adjustment point of the test point at the initial scanning speed of the test point, obtain a first quantized calculation ratio of the test point, adjust the probe speed according to the first quantized calculation ratio of the test point, continue to move down to the second speed start adjustment point of the test point, obtain a second quantized calculation ratio of the test point, adjust the probe speed according to the second quantized calculation ratio of the test point, and continue to move down until the probe detects a sudden change in ion current and stops moving down. , realizing SICM scanning control. This control method dynamically adjusts the speed according to the probe's downward position by setting the initial speed adjustment point. While controlling the probe to quickly descend, it can switch to an extremely slow speed close to the sample to detect ion current changes. The probe's downward movement is realized with high flexibility control, which not only reduces the scanning instability caused by sudden changes in speed, but also better controls the interaction force between the probe and the sample, avoiding sample damage or probe wear caused by excessive force. It not only improves the SICM probe scanning speed, but also ensures the safety of the probe and sample during the scanning process, enhancing the accuracy and scanning efficiency of SICM scanning. The method is simple and can better adapt to the complex morphology of different sample surfaces, thereby obtaining more comprehensive scanning information, providing possibilities for the wide application of SICM in different fields.

[0023] The present invention also provides a SICM scanning control system based on feedback quantization. By setting a highly integrated test point scanning data acquisition module, an initial safety height acquisition module, an adjustment point acquisition module and a scanning probe control module, the acquisition of the test height, initial safety height, the first speed starting adjustment point and the second speed starting adjustment point of the test point is realized, and the scanning probe is controlled to move from the initial safety height of the test point to the first speed starting adjustment point of the test point at the initial scanning speed of the test point, obtain the first quantized calculation ratio of the test point, and adjust the probe speed according to the first quantized calculation ratio of the test point, continue to move down to the second speed starting adjustment point of the test point, obtain the second quantized calculation ratio of the test point, and adjust the probe speed according to the second quantized calculation ratio of the test point, and continue to move down until the probe detects a sudden change in ion current and stops the entire moving down process. Among them, the test point scanning data acquisition module is responsible for acquiring the test height and initial scanning speed of the test point, laying the foundation for subsequent quantitative calculation and probe speed adjustment; the initial safety height acquisition module is responsible for acquiring the initial safety height, providing guarantee for the subsequent safe descent of the probe; the adjustment point acquisition module is responsible for obtaining the first speed of the test point and the second speed of the test point according to the initial safety height of the test point, providing the point basis for the subsequent probe speed adjustment; the scanning probe control module is responsible for accurately controlling the probe's descent speed according to the instructions, realizing rapid scanning while improving the accuracy and safety of the scanning. The structure is simple and responsive, and can be applied to the acquisition of sample morphology in different fields.

[0024] The present invention also provides a terminal device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements the steps of the above method when executing the computer program. The device has a simple structure, low modification cost, and small resource occupation.

[0025] A computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the above method are implemented. The storage medium has good portability and strong versatility. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 The figure is a flow chart of a SICM scanning control method based on feedback quantization of the present invention.

[0027] Figure 2 The figure is a SICM scanning control process diagram based on feedback quantization in an embodiment of the present invention.

[0028] Figure 3 This is a structural diagram of a SICM scanning control system based on feedback quantization of the present invention. DETAILED DESCRIPTION

[0029] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0030] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0031] The present invention is further described in detail below in conjunction with specific embodiments, which are intended to explain the present invention rather than to limit it.

[0032] See also Figure 1 The present invention discloses a SICM scanning control method based on feedback quantization, comprising: S1: Obtain the test height and initial scanning speed of the test point; the test height of the test point is the height value obtained by searching the substrate during the preliminary preparation process; the initial scanning speed is the initial downward speed of the probe, which is set according to the characteristics of the scanned sample and the specific conditions during scanning.

[0033] S2: According to the test height of the test point, the initial safety height of the test point is obtained, which is:

[0034] in, It is the initial safety height of the test point; is the test height of the test point, Minimum height to prevent probe collision.

[0035] S3: According to the initial safety height of the test point, the first speed of the test point and the second speed of the test point are obtained to start adjusting the point, specifically: The height of the first speed adjustment point is 40% to 60% of the initial safety height, preferably 50%; the height of the second speed adjustment point is 30% of the initial safety height. Both the first speed adjustment point and the second speed adjustment point are the intervention points of the speed feedback calculation program, and the speed change is precisely controlled from this point.

[0036] S4: Control the scanning probe to move from the initial safety height of the test point to the first speed of the test point at the initial scanning speed of the test point, start adjusting the point, obtain the first quantitative calculation ratio of the test point, and adjust the probe speed according to the first quantitative calculation ratio of the test point, continue to move down to the second speed of the test point to start adjusting the point, obtain the second quantitative calculation ratio of the test point, and adjust the probe speed according to the second quantitative calculation ratio of the test point, and continue to move down until the probe detects a sudden change in ion current and stops moving down; The method of obtaining the first quantized calculation ratio of the test point and adjusting the probe speed according to the first quantized calculation ratio of the test point is: S4101: Get the probe height at the current moment; S4102: According to the probe height at the current moment, a first quantitative calculation ratio of the test point is obtained, which is specifically:

[0037] in, calculating a ratio for the first quantification; is the current probe height; is the maximum height of the probe in the Z-axis movement direction; S4103: Obtain a first speed change ratio of the test point according to the first quantized calculation ratio of the test point, specifically:

[0038] in, is the first speed change ratio; S4104: According to the first speed change ratio of the test point, the current probe speed is obtained, and the probe is controlled to go down according to the current probe speed to complete the probe speed adjustment, specifically:

[0039] in, is the current speed of the probe downward, at which the probe downward position is between the first speed start adjustment point and the second speed start adjustment point of the test point; is the initial scan speed.

[0040] The method of obtaining the second quantized calculation ratio of the test point and adjusting the probe speed according to the second quantized calculation ratio of the test point is: S4201: Obtain the probe height at the current moment; S4202: According to the probe height at the current moment, a second quantitative calculation ratio of the test point is obtained, which is specifically:

[0041] in, calculating a ratio for the second quantization; is the current probe height; is the maximum height of the probe in the Z-axis movement direction; S4203: Obtain a second speed change ratio of the test point according to the second quantized calculation ratio of the test point, specifically:

[0042] in, is the second speed change ratio; S4204: According to the second speed change ratio of the test point, the current probe speed is obtained, and the probe is controlled to move downward according to the current probe speed to complete the probe speed adjustment, specifically:

[0043] in, is the current speed of the probe downward, at which the probe downward position is below the second speed start adjustment point; The scanning speed when the probe reaches the second speed and starts to adjust the point.

[0044] Taking a living cell observation as an example, the above method is further explained: See also Figure 2 The preliminary preparation process has been completed, and the test height of the test point obtained in the preliminary preparation process has been obtained through preliminary detection. , according to the test height , calculate the initial safety height , set the initial speed to , set the scanning probe to start probing from the initial safe height of the test point to initialize the height information. When the probe reaches the first speed, start adjusting the point position At the beginning, the first speed adjustment begins to intervene, and the probe height is set to , calculate the first quantization calculation ratio according to formula (2) , according to formula (3), the first speed change ratio is calculated as , then the probe's downward speed at the current moment is calculated according to formula (4): , the probe is controlled according to the probe descending speed obtained at each moment. When the probe descends to the second speed adjustment point When the second speed adjustment begins to intervene, the probe height is set to , calculate the second quantization calculation ratio according to formula (5) According to formula (6), the second speed change ratio is calculated as , according to formula (7), calculate the probe's downward speed at the current moment The probe is controlled to descend according to the probe descending speed obtained at each moment. When the probe detects a sudden change in ion current, it stops descending, records the current height and current information, and moves to the next measurement point to repeat the above process until the scanning of all measurement points is completed.

[0045] See also Figure 3 The present invention provides a SICM scanning control system based on feedback quantization, comprising: Test point scanning data acquisition module: used to obtain the test height and initial scanning speed of the test point; Initial safety height acquisition module: used to obtain the initial safety height of the test point according to the test height of the test point; Adjustment point acquisition module: used to obtain the first speed start adjustment point of the test point and the second speed start adjustment point of the test point according to the initial safety height of the test point; Scanning probe control module: used to control the scanning probe to move from the initial safety height of the test point to the first speed of the test point with the initial scanning speed of the test point, start adjusting the point, obtain the first quantitative calculation ratio of the test point, and adjust the probe speed according to the first quantitative calculation ratio of the test point, continue to move down to the second speed of the test point, start adjusting the point, obtain the second quantitative calculation ratio of the test point, and adjust the probe speed according to the second quantitative calculation ratio of the test point, and continue to move down until the probe detects a sudden change in ion current and stops moving down.

[0046] The present invention provides a terminal device including: a processor, a memory, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, the steps in the above-mentioned method embodiments are implemented. Alternatively, when the processor executes the computer program, the functions of the modules / units in the above-mentioned device embodiments are implemented.

[0047] The computer program may be divided into one or more modules / units, and the one or more modules / units are stored in the memory and executed by the processor to accomplish the present invention.

[0048] The terminal device may be a computing device such as a desktop computer, a notebook, a PDA, a cloud server, etc. The terminal device may include, but is not limited to, a processor and a memory.

[0049] The processor may be a central processing unit (CPU), or other general-purpose processors, digital signal processors (DSP), application-specific integrated circuits (ASIC), field-programmable gate arrays (FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc.

[0050] The memory may be used to store the computer programs and / or modules, and the processor implements various functions of the terminal device by running or executing the computer programs and / or modules stored in the memory and calling the data stored in the memory.

[0051] If the module / unit integrated in the terminal device is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the present invention implements all or part of the processes in the above-mentioned embodiment method, and can also be completed by instructing the relevant hardware through a computer program. The computer program can be stored in a computer-readable storage medium. When the computer program is executed by the processor, the steps of the above-mentioned various method embodiments can be implemented. Among them, the computer program includes computer program code, and the computer program code can be in source code form, object code form, executable file or some intermediate form. The computer-readable medium may include: any entity or device capable of carrying the computer program code, recording medium, U disk, mobile hard disk, magnetic disk, optical disk, computer memory, read-only memory (ROM), random access memory (RAM), electric carrier signal, telecommunication signal and software distribution medium. It should be noted that the content contained in the computer-readable medium can be appropriately increased or decreased according to the requirements of legislation and patent practice in the jurisdiction. For example, in some jurisdictions, according to legislation and patent practice, computer-readable media do not include electric carrier signals and telecommunication signals.

[0052] In summary, the present invention provides a SICM scanning control method and related devices based on feedback quantization. The present invention calculates the corresponding speed according to the different positions of the probe during the downward detection process, and controls the probe to quickly detect downward. This method can switch to an extremely slow speed close to the sample to detect ion current changes, and realize the downward detection of the probe with high flexibility control, thereby improving the SICM fast probe scanning, ensuring the safety of the probe and sample during the scanning process, enhancing the accuracy and scanning efficiency of the SICM scanning, and providing possibilities for the wide application of SICM in different fields.

[0053] The above description is only a preferred embodiment of the present invention and is not intended to impose any limitation on the technical solution of the present invention. Those skilled in the art should understand that, without departing from the spirit and principles of the present invention, the technical solution can also be subjected to several simple modifications and substitutions, and these modifications and substitutions are also within the scope of protection covered by the claims.

Claims

1. A SICM scanning control method based on feedback quantization, characterized in that: include: Get the test height and initial scanning speed of the test point; According to the test height of the test point, the initial safety height of the test point is obtained; According to the initial safety height of the test point, a first speed start adjustment point of the test point and a second speed start adjustment point of the test point are obtained; Control the scanning probe from the initial safety height of the test point, and move down to the first speed of the test point with the initial scanning speed of the test point to start adjusting the point, obtain the first quantitative calculation ratio of the test point, and adjust the probe speed according to the first quantitative calculation ratio of the test point, continue to move down to the second speed of the test point to start adjusting the point, obtain the second quantitative calculation ratio of the test point, and adjust the probe speed according to the second quantitative calculation ratio of the test point, and continue to move down until the probe detects a sudden change in ion current and stops moving down.

2. The SICM scanning control method based on feedback quantization according to claim 1, characterized in that: The method for obtaining the initial safety height of the test point according to the test height of the test point is: in, It is the initial safety height of the test point; is the test height of the test point, Minimum height to prevent probe collision.

3. The SICM scanning control method based on feedback quantization according to claim 1, characterized in that: The height of the adjustment point starting at the first speed is 40% to 60% of the initial safety height; the height of the adjustment point starting at the second speed is 15% to 30% of the initial safety height.

4. The SICM scanning control method based on feedback quantization according to claim 1, characterized in that: The method of obtaining the first quantized calculation ratio of the test point and adjusting the probe speed according to the first quantized calculation ratio of the test point is: Get the probe height at the current moment; According to the probe height at the current moment, a first quantitative calculation ratio of the test point is obtained; According to the first quantized calculation ratio of the test point, a first speed change ratio of the test point is obtained; According to the first speed change ratio of the test point, the probe speed at the current moment is obtained, and the probe is controlled to move downward according to the probe speed at the current moment to complete the probe speed adjustment.

5. The SICM scanning control method based on feedback quantization according to claim 4, characterized in that: The method for obtaining the first quantitative calculation ratio of the test point according to the probe height at the current moment is: The method for obtaining the first speed change ratio of the test point according to the first quantized calculation ratio of the test point is: The method for obtaining the probe speed at the current moment according to the first speed change ratio of the test point is: in, calculating a ratio for the first quantification; is the current probe height; is the maximum height of the probe in the Z-axis movement direction; is the first speed change ratio; is the current speed of the probe downward, at which the probe downward position is between the first speed start adjustment point and the second speed start adjustment point of the test point; is the initial scanning speed.

6. The SICM scanning control method based on feedback quantization according to claim 1, characterized in that: The method of obtaining the second quantized calculation ratio of the test point and adjusting the probe speed according to the second quantized calculation ratio of the test point is: Get the probe height at the current moment; According to the probe height at the current moment, a second quantitative calculation ratio of the test point is obtained; According to the second quantized calculation ratio of the test point, a second speed change ratio of the test point is obtained; According to the second speed change ratio of the test point, the probe speed at the current moment is obtained, and the probe is controlled to move downward according to the probe speed at the current moment to complete the probe speed adjustment.

7. The SICM scanning control method based on feedback quantization according to claim 6, characterized in that: The method for obtaining the second quantitative calculation ratio of the test point according to the probe height at the current moment is: The method for obtaining the second speed change ratio of the test point according to the second quantized calculation ratio of the test point is: The method for obtaining the probe speed at the current moment according to the second speed change ratio of the test point is: in, calculating a ratio for the second quantization; is the current probe height; is the maximum height of the probe in the Z-axis movement direction; is the second speed change ratio; is the current speed of the probe downward, at which the probe downward position is below the second speed start adjustment point; The scanning speed when the probe reaches the second speed and starts to adjust the point.

8. A SICM scanning control system based on feedback quantization, characterized in that: include: Test point scanning data acquisition module: used to obtain the test height and initial scanning speed of the test point; Initial safety height acquisition module: used to obtain the initial safety height of the test point according to the test height of the test point; Adjustment point acquisition module: used to obtain the first speed start adjustment point of the test point and the second speed start adjustment point of the test point according to the initial safety height of the test point; Scanning probe control module: used to control the scanning probe to move from the initial safety height of the test point to the first speed of the test point with the initial scanning speed of the test point, start adjusting the point, obtain the first quantitative calculation ratio of the test point, and adjust the probe speed according to the first quantitative calculation ratio of the test point, continue to move down to the second speed of the test point, start adjusting the point, obtain the second quantitative calculation ratio of the test point, and adjust the probe speed according to the second quantitative calculation ratio of the test point, and continue to move down until the probe detects a sudden change in ion current and stops moving down.

9. A terminal device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that: When the processor executes the computer program, the steps of the method according to any one of claims 1 to 7 are implemented.

10. A computer-readable storage medium storing a computer program, characterized in that: When the computer program is executed by a processor, the steps of the method according to any one of claims 1 to 7 are implemented.

Citation Information

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