MEMS scanning mirror

Abstract

The invention discloses an MEMS scanning mirror, and relates to the technical field of MEMS scanning mirror manufacturing, the MEMS scanning mirror comprises a reflector, a plurality of first piezoelectric driving structures, a support frame, a plurality of first elastic members, a plurality of second piezoelectric driving structures and a plurality of second elastic members, the plurality of first piezoelectric driving structures are arranged around the reflector at intervals along the circumferential direction of the reflector, and the plurality of second piezoelectric driving structures are arranged around the reflector at intervals along the circumferential direction of the reflector. One end of each first piezoelectric driving structure is fixed to the supporting frame, the other end of each first piezoelectric driving structure is connected with the reflecting mirror through the corresponding first elastic piece, and the multiple second piezoelectric driving structures are arranged around the supporting frame at intervals in the circumferential direction of the supporting frame. The other end of each second piezoelectric driving structure is connected with the supporting frame through a corresponding second elastic piece. According to the MEMS scanning mirror, the deflection angle of the reflector can be increased, the range of reflected light of the reflector can be increased, and the scanning range of the MEMS scanning mirror can be increased.

Description

Technical Field

[0001] The invention relates to the technical field of MEMS scanning mirror manufacturing, in particular to a MEMS scanning mirror. Background Art

[0002] In the related art, the deflection angle of the reflected light of the existing MEMS scanning mirror is small, which will limit the scanning range of the MEMS scanning mirror and bring inconvenience to the use of the MEMS scanning mirror. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the present invention is to provide a MEMS scanning mirror, which can deflect the reflector in different directions, increase the deflection angle of the reflector, and help increase the range of light reflected by the reflector, which helps to improve the scanning range of the MEMS scanning mirror.

[0004] According to an embodiment of the present invention, the MEMS scanning mirror includes: a reflector, a plurality of first piezoelectric drive structures, a support frame, a plurality of first elastic members, a plurality of second piezoelectric drive structures and a plurality of second elastic members, wherein the plurality of first piezoelectric drive structures are arranged around the reflector at intervals along the circumference of the reflector, the support frame is arranged around the reflector along the circumference of the reflector and is spaced apart from the reflector, the plurality of first piezoelectric drive structures are located between the support frame and the reflector, one end of each of the first piezoelectric drive structures is fixed to the support frame, and the other end of each of the first piezoelectric drive structures is connected to the reflector through the corresponding first elastic member, and the plurality of second piezoelectric drive structures are arranged around the support frame at intervals along the circumference of the support frame, one end of each of the second piezoelectric drive structures is fixed, and the other end of each of the second piezoelectric drive structures is connected to the support frame through the corresponding second elastic member.

[0005] According to the MEMS scanning mirror of the embodiment of the present application, by setting up multiple first piezoelectric drive structures and multiple second piezoelectric drive structures, the reflector can be deflected in different directions, and by setting up multiple first elastic members and multiple second elastic members, the deflection angle of the reflector can be increased, which is beneficial to increasing the range of light reflected by the reflector and improving the scanning range of the MEMS scanning mirror.

[0006] According to some embodiments of the present invention, one end of the first elastic member is connected to the corresponding first piezoelectric drive structure, and the other end of the first elastic member is connected to the reflector; and / or one end of the second elastic member is connected to the corresponding second piezoelectric drive structure, and the other end of the second elastic member is connected to the support frame.

[0007] According to some embodiments of the present invention, there are four first piezoelectric drive structures along a first direction, and the four first piezoelectric drive structures are respectively arranged on opposite sides of the reflector, and two first piezoelectric drive structures are provided on each side of the reflector. The two first piezoelectric drive structures located on the same side of the reflector are arranged along a second direction, and the first direction is perpendicular to the second direction.

[0008] According to some embodiments of the present invention, the support frame includes: two first connecting beams, the two first connecting beams are arranged at intervals along the second direction and both extend along the first direction, and a plurality of first piezoelectric driving structures are located between the two first connecting beams, and one end of each first piezoelectric driving structure is fixed to the first connecting beam on the corresponding side.

[0009] According to some embodiments of the present invention, the support frame also includes: two second connecting beams, the two second connecting beams are arranged at intervals along the first direction and both extend along the second direction, and a plurality of the first piezoelectric driving structures are located between the two second connecting beams, and each of the second connecting beams is fixedly connected to the two first connecting beams.

[0010] According to some embodiments of the present invention, along the second direction, a plurality of the second piezoelectric driving structures are respectively located on two opposite sides of the supporting frame, and a plurality of the second piezoelectric driving structures are provided on each side of the supporting frame.

[0011] According to some embodiments of the present invention, two second piezoelectric driving structures are provided on each side of the supporting frame, and the two second piezoelectric driving structures located on the same side of the supporting frame are arranged along the first direction.

[0012] According to some embodiments of the present invention, the structure of the first elastic member is the same as the structure of the second elastic member.

[0013] According to some embodiments of the present invention, the first elastic member and the second elastic member both include: a plurality of sections of first connecting beam bodies, and the plurality of sections of the first connecting beam bodies are bent and connected in sequence.

[0014] According to some embodiments of the present invention, the first elastic member and the second elastic member each further include: a second connecting beam, any two adjacent first connecting beams are connected by the second connecting beam, and the second connecting beam is an arc-shaped structure.

[0015] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0017] Figure 1 is an angled schematic diagram of a MEMS scanning mirror according to an embodiment of the present application;

[0018] Figure 2 is a top view of a MEMS scanning mirror according to an embodiment of the present application;

[0019] Figure 3 yes Figure 2 A partial enlarged schematic diagram of the middle A area;

[0020] Figure 4 is a cross-sectional view of a first piezoelectric driving structure or a second piezoelectric driving structure according to an embodiment of the present application;

[0021] Figure 5 is a schematic diagram of a MEMS scanning mirror deflected about a first direction according to an embodiment of the present application;

[0022] Figure 6 It is a schematic diagram of the deflection of the MEMS scanning mirror around the second direction according to an embodiment of the present application.

[0023] Reference numerals:

[0024] MEMS scanning mirror 1,

[0025] Reflector 10,

[0026] a first piezoelectric driving structure 20, a first driving structure 21, a second driving structure 22, a third driving structure 23, a fourth driving structure 24,

[0027] Support frame 30, first connecting beam 31, second connecting beam 32,

[0028] A first elastic member 41, a second elastic member 42, a first connecting beam body 43, a second connecting beam body 44, a first beam 45, a second beam 46,

[0029] a second piezoelectric driving structure 50, a fifth driving structure 51, a sixth driving structure 52, a seventh driving structure 53, an eighth driving structure 54,

[0030] A first electrode layer 61 , a second electrode layer 62 , a piezoelectric material layer 63 , a base layer 64 , and an adhesive layer 65 . DETAILED DESCRIPTION

[0031] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0032] Reference below Figure 1-Figure 6 A MEMS scanning mirror 1 according to an embodiment of the present invention is described.

[0033] According to the MEMS scanning mirror 1 of the embodiment of the present invention, Figure 1-Figure 6 As shown, the MEMS scanning mirror 1 may include: a reflector 10, a plurality of first piezoelectric drive structures 20, a support frame 30, a plurality of first elastic members 41, a plurality of second piezoelectric drive structures 50 and a plurality of second elastic members 42, wherein the plurality of first piezoelectric drive structures 20 are arranged around the reflector 10 at intervals along the circumference of the reflector 10, the support frame 30 is arranged around the reflector 10 along the circumference of the reflector 10 and is spaced apart from the reflector 10, the plurality of first piezoelectric drive structures 20 are located between the support frame 30 and the reflector 10, one end of each first piezoelectric drive structure 20 is fixed to the support frame 30, and the other end of each first piezoelectric drive structure 20 is connected to the reflector 10 through a corresponding first elastic member 41, and the plurality of second piezoelectric drive structures 50 are arranged around the support frame 30 at intervals along the circumference of the support frame 30, one end of each second piezoelectric drive structure 50 is fixed, and the other end of each second piezoelectric drive structure 50 is connected to the support frame 30 through a corresponding second elastic member 42.

[0034] It should be noted that in the related art, the deflection angle of the light reflected by the existing MEMS scanning mirror is small, which will limit the scanning range of the MEMS scanning mirror and bring inconvenience to the use of the MEMS scanning mirror.

[0035] Based on this, the embodiment of the present application proposes a MEMS scanning mirror 1, wherein the reflector 10 can be constructed as a plate-like structure with a rectangular cross-section, and the surface of the reflector 10 can be plated with a nano-scale gold film by a magnetron sputtering process, thereby increasing the reflection efficiency of the incident light, which is beneficial to improving the reflection efficiency of the reflector 10. There can be multiple first piezoelectric drive structures 20, and the multiple first piezoelectric drive structures 20 can be arranged around the reflector 10 along the circumference of the reflector 10, and the multiple first piezoelectric drive structures 20 are arranged at intervals from each other, and the multiple first piezoelectric drive structures 20 can be connected to the reflector 10. The support frame 30 can be made of silicon, and the support frame 30 is arranged around the reflector 10 along the circumference of the reflector 10, and the support frame 30 can be spaced apart from the reflector 10, and the multiple first piezoelectric drive structures 20 can be located between the support frame 30 and the reflector 10, and the multiple first piezoelectric drive structures 20 can be connected between the support frame 30 and the reflector 10. The first piezoelectric driving structure 20 may be fixedly connected to the support frame 30 by bonding, clamping, or the like, and one end of each first piezoelectric driving structure 20 may be fixedly connected to the support frame 30 .

[0036] The first elastic member 41 can be used to connect the first piezoelectric drive structure 20 and the reflector 10. The first elastic member 41 can be made of silicon. The first elastic member 41 can be used to amplify the deformation displacement of the first piezoelectric drive structure 20. There can be multiple first elastic members 41, and the multiple first elastic members 41 can be arranged in a one-to-one correspondence with the multiple first piezoelectric drive structures 20. Each first piezoelectric drive structure 20 has a first elastic member 41 arranged correspondingly thereto, and each first piezoelectric drive structure 20 can be connected to the corresponding first elastic member 41. The other end of each first piezoelectric drive structure 20 can be connected to the reflector 10 through the corresponding first elastic member 41, thereby achieving the effect that the multiple first piezoelectric drive structures 20 are connected to the reflector 10.

[0037] The second elastic member 42 can be used to connect the second piezoelectric drive structure 50 and the support frame 30. The second elastic member 42 can be made of silicon. The second elastic member 42 can be used to amplify the deformation displacement of the second piezoelectric drive structure 50. There can be multiple second piezoelectric drive structures 50. The multiple second piezoelectric drive structures 50 can be arranged around the support frame 30 along the circumference of the support frame 30. The multiple second piezoelectric drive structures 50 are arranged at intervals from each other, and the multiple second piezoelectric drive structures 50 are all connected to the support frame 30. There can be multiple second elastic members 42. The multiple second elastic members 42 can be arranged one-to-one with the multiple second piezoelectric drive structures 50. Each second piezoelectric drive structure 50 has a second elastic member 42 correspondingly arranged thereto, and each second piezoelectric drive structure 50 can be connected to the corresponding second elastic member 42. One end of each second piezoelectric drive structure 50 is fixed, and the other end of each second piezoelectric drive structure 50 can be connected to the support frame 30 through the corresponding second elastic member 42, thereby achieving the effect that the multiple second piezoelectric drive structures 50 are all connected to the support frame 30.

[0038] As an example, the structures of the first piezoelectric driving structure 20 and the second piezoelectric driving structure 50 may be the same. The embodiment of the present application is described by taking the specific structure of the first piezoelectric driving structure 20 as an example. The first piezoelectric driving structure 20 may include a first electrode layer 61, a second electrode layer 62, a piezoelectric material layer 63 and a base layer 64. The first electrode layer 61, the piezoelectric material layer 63, the second electrode layer 62 and the base layer 64 may be stacked along the thickness direction of the first piezoelectric driving structure 20. The first electrode layer 61 and the second electrode layer 62 may be arranged on both sides of the piezoelectric material layer 63 along the thickness direction of the first piezoelectric driving structure 20, respectively. The base layer 64 may be arranged on the side of the second electrode layer 62 away from the piezoelectric material layer 63. The first electrode layer 61 may be a gold material layer, the second electrode layer 62 may be a platinum material layer, the piezoelectric material layer 63 may use a magnetron sputtered PZT thin film as a piezoelectric driving material, and the base layer 64 may be a silicon material layer. An adhesive layer 65 may be formed between the first electrode layer 61 and the piezoelectric material layer 63 , and an adhesive layer 65 may be formed between the second electrode layer 62 and the base layer 64 . The adhesive layer 65 may use titanium as an adhesive material, thereby connecting the first electrode layer 61 and the piezoelectric material layer 63 , and connecting the second electrode layer 62 and the base layer 64 .

[0039] A potential difference may be formed between the first electrode layer 61 and the second electrode layer 62. When the first electrode layer 61 and the second electrode layer 62 are energized, the second electrode layer 62 may be used for grounding. The potential difference between the first electrode layer 61 and the second electrode layer 62 may form an inverse piezoelectric effect on the corresponding piezoelectric material layer 63, thereby causing the corresponding piezoelectric material layer 63 to deform, the piezoelectric material layer 63 may be warped, and the piezoelectric material layer 63 may drive the base layer 64 to deform. As an example, when the piezoelectric material layer 63 of the first piezoelectric driving structure 20 drives the base layer 64 to deform, one end of the first piezoelectric driving structure 20 is fixed to the support frame 30, and the other end of the first piezoelectric driving structure 20 may be displaced. The displacement generated by the first piezoelectric driving structure 20 may be amplified and transmitted via the first elastic member 41, and finally transmitted to the reflector 10 to deflect the reflector 10. As another example, when the piezoelectric material layer 63 of the second piezoelectric driving structure 50 drives the base layer 64 to deform, one end of the second piezoelectric driving structure 50 is fixed, and the other end of the second piezoelectric driving structure 50 can generate displacement. The displacement generated by the second piezoelectric driving structure 50 can be amplified and transmitted via the second elastic member 42, and finally transmitted to the support frame 30 to cause the support frame 30 to deflect. The support frame 30 can drive the reflector 10 to deflect together.

[0040] By applying voltage to multiple first piezoelectric drive structures 20 and multiple second piezoelectric drive structures 50, the reflector 10 can be deflected, and by changing the direction of the applied voltage to the multiple first piezoelectric drive structures 20 and the multiple second piezoelectric drive structures 50, the deformation direction of the piezoelectric material layer 63 in the corresponding first piezoelectric drive structures 20 and the corresponding second piezoelectric drive structures 50 can be changed, thereby changing the deflection direction of the reflector 10.

[0041] In the embodiment of the present application, by setting up multiple first piezoelectric drive structures 20 and multiple second piezoelectric drive structures 50, the reflector 10 can be deflected in different directions, and by setting up multiple first elastic members 41 and multiple second elastic members 42, the deflection angle of the reflector 10 can also be increased, which is beneficial to increase the range of light reflected by the reflector 10 and to improve the scanning range of the MEMS scanning mirror 1.

[0042] In some embodiments of the present invention, Figure 1 As shown, one end of the first elastic member 41 is connected to the corresponding first piezoelectric drive structure 20, and the other end of the first elastic member 41 is connected to the reflector 10; and / or one end of the second elastic member 42 is connected to the corresponding second piezoelectric drive structure 50, and the other end of the second elastic member 42 is connected to the support frame 30.

[0043] The two ends of the first elastic member 41 can be respectively connected to the corresponding first piezoelectric drive structure 20 and the reflector 10, or the two ends of the second elastic member 42 can be respectively connected to the corresponding second piezoelectric drive structure 50 and the support frame 30, or the two ends of the first elastic member 41 can be respectively connected to the corresponding first piezoelectric drive structure 20 and the reflector 10, and the two ends of the second elastic member 42 can be respectively connected to the corresponding second piezoelectric drive structure 50 and the support frame 30. The embodiment of the present application is described by taking the example that the two ends of the first elastic member 41 are respectively connected to the corresponding first piezoelectric drive structure 20 and the reflector 10, and the two ends of the second elastic member 42 are respectively connected to the corresponding second piezoelectric drive structure 50 and the support frame 30.

[0044] One end of the first elastic member 41 is connected to the corresponding first piezoelectric drive structure 20, and one end of the first elastic member 41 can be connected to the corresponding first piezoelectric drive structure 20 by bonding. The other end of the first elastic member 41 is connected to the reflector 10. When the first piezoelectric drive structure 20 is deformed and displaced, the first elastic member 41 can amplify the displacement of the first piezoelectric drive structure 20 and transmit it to the reflector 10. The first elastic member 41 can drive the reflector 10 to deflect, and by setting the two ends of the first elastic member 41 to be respectively connected to the corresponding first piezoelectric drive structure 20 and the reflector 10, the transmission distance of the deformation displacement of the corresponding first piezoelectric drive structure 20 can be increased, so that the deformation displacement of the first piezoelectric drive structure 20 can be amplified to the maximum extent, and the deflection angle of the reflector 10 can be further increased, which is conducive to further increasing the range of light reflected by the reflector 10.

[0045] One end of the second elastic member 42 is connected to the corresponding second piezoelectric drive structure 50, and one end of the second elastic member 42 can be connected to the corresponding second piezoelectric drive structure 50 by bonding. The other end of the second elastic member 42 is connected to the support frame 30. When the second piezoelectric drive structure 50 is deformed and displaced, the second elastic member 42 can amplify the displacement of the second piezoelectric drive structure 50 and transmit it to the support frame 30. The second elastic member 42 can drive the support frame 30 to deflect. The support frame 30 is connected to multiple first elastic members 41, and multiple first elastic members 41 are connected to the reflector 10. When the support frame 30 deflects, the support frame 30 can drive the reflector 10 to deflect together. In addition, by setting one end of the second elastic member 42 to be connected to the corresponding second piezoelectric drive structure 50, and the other end of the second elastic member 42 to be connected to the support frame 30, the two ends of the second elastic member 42 are respectively connected to the corresponding second piezoelectric drive structure 50 and the support frame 30, so that the transmission distance of the deformation displacement of the corresponding second piezoelectric drive structure 50 can be increased, so that the deformation displacement of the second piezoelectric drive structure 50 can be amplified to the greatest extent, and the deflection angle of the reflector 10 can be further increased, which is conducive to further increasing the range of light reflected by the reflector 10.

[0046] In some embodiments of the present invention, Figure 1 , Figure 2 and Figure 5 As shown, along the first direction, there are four first piezoelectric drive structures 20, and the four first piezoelectric drive structures 20 are respectively arranged on the opposite sides of the reflector 10, and two first piezoelectric drive structures 20 are arranged on each side of the reflector 10. The two first piezoelectric drive structures 20 located on the same side of the reflector 10 are arranged along the second direction, and the first direction is perpendicular to the second direction.

[0047] There may be four first piezoelectric drive structures 20, and the four first piezoelectric drive structures 20 may be respectively arranged on two opposite sides of the reflector 10 along the first direction. Figure 1 When setting the direction, the first direction is Figure 1 The two first piezoelectric drive structures 20 may be respectively arranged on both sides of the reflector 10 along the first direction, and the two first piezoelectric drive structures 20 may be connected to the reflector 10 via the corresponding first elastic member 41. Along the first direction, the two first piezoelectric drive structures 20 located on the same side of the reflector 10 may be arranged along the second direction, and the two first piezoelectric drive structures 20 are arranged spaced apart. Figure 1 When setting the direction, the second direction is Figure 1 In the X direction, the first direction is perpendicular to the second direction.

[0048] When it is necessary to drive the reflector 10 to deflect, voltages in different directions can be applied to the two first piezoelectric drive structures 20 located on the same side of the reflector 10 along the first direction, and voltages in the same direction can be applied to the two first piezoelectric drive structures 20 located on the same side of the reflector 10 along the second direction, so that the reflector 10 can deflect clockwise or counterclockwise around the axis of the reflector 10 parallel to the first direction, thereby further increasing the deflection range of the reflector 10, which is conducive to further increasing the range of light reflected by the reflector 10, and is more conducive to improving the scanning range of the MEMS scanning mirror 1. As an example, four first piezoelectric drive structures 20 can be symmetrically arranged about the first direction, and four first piezoelectric drive structures 20 can be symmetrically arranged about the second direction. When voltages are applied to the multiple first piezoelectric drive structures 20 to drive the reflector 10 to deflect, the forces on both sides of the reflector 10 along the first direction can be the same, and the forces on both sides of the reflector 10 along the second direction can be the same, so that the reflector 10 can deflect around the central axis of the reflector 10.

[0049] As an example, Figure 1 and Figure 5As shown, the four first piezoelectric drive structures 20 can be respectively recorded as the first drive structure 21, the second drive structure 22, the third drive structure 23 and the fourth drive structure 24, the first drive structure 21 and the second drive structure 22 can be respectively located on the same side of the reflector 10 along the first direction, the first drive structure 21 and the second drive structure 22 can be arranged along the second direction, the third drive structure 23 and the fourth drive structure 24 can be respectively located on the same side of the reflector 10 along the first direction, and the third drive structure 23 and the fourth drive structure 24 can be arranged along the second direction. The first drive structure 21 and the third drive structure 23 can be respectively located on both sides of the reflector 10 along the first direction, the first drive structure 21 and the third drive structure 23 can be arranged relative to each other, the second drive structure 22 and the fourth drive structure 24 can be respectively located on both sides of the reflector 10 along the first direction, and the second drive structure 22 and the fourth drive structure 24 can be arranged relative to each other. When a positive voltage is applied to the first driving structure 21 and the third driving structure 23, and a negative voltage is applied to the second driving structure 22 and the fourth driving structure 24, the reflector 10 can be deflected counterclockwise around the axis of the reflector 10 parallel to the first direction. When a negative voltage is applied to the first driving structure 21 and the third driving structure 23, and a positive voltage is applied to the second driving structure 22 and the fourth driving structure 24, the reflector 10 can be deflected clockwise around the axis of the reflector 10 parallel to the first direction.

[0050] In some embodiments of the present invention, Figure 1 and Figure 2 As shown, the support frame 30 may include: two first connecting beams 31, the two first connecting beams 31 are arranged at intervals along the second direction and both extend along the first direction, and a plurality of first piezoelectric driving structures 20 are located between the two first connecting beams 31, and one end of each first piezoelectric driving structure 20 is fixed to the first connecting beam 31 on the corresponding side.

[0051] The two first connecting beams 31 can be arranged opposite to each other and spaced apart along the second direction, and the two first connecting beams 31 can both extend along the first direction. The plurality of first piezoelectric drive structures 20 are located between the support frame 30 and the reflector 10, and the plurality of first piezoelectric drive structures 20 can be located between the two first connecting beams 31, so that the structure of the MEMS scanning mirror 1 is compact, which is conducive to miniaturization of the MEMS scanning mirror 1 and reduces the space occupied by the MEMS scanning mirror 1.

[0052] One end of each first piezoelectric drive structure 20 is fixed to the first connecting beam 31 on the corresponding side, and multiple first piezoelectric drive structures 20 located on the same side of the reflector 10 along the second direction can be fixed to the same first connecting beam 31, and multiple first piezoelectric drive structures 20 located on the same side of the reflector 10 along the second direction can be connected through the first connecting beam 31, thereby providing reliable support for the multiple first piezoelectric drive structures 20, so that the multiple first piezoelectric drive structures 20 located on the same side of the reflector 10 along the second direction are constructed as an integral structure. When voltage is applied to the multiple first piezoelectric drive structures 20, the multiple first piezoelectric drive structures 20 drive the reflector 10 to deflect around the axis of the reflector 10 parallel to the first direction, and the multiple first piezoelectric drive structures 20 located on the same side of the reflector 10 along the second direction can rotate synchronously, which is beneficial to improving the reliability of the MEMS scanning mirror 1.

[0053] As an example, when there are four first piezoelectric driving structures 20, the length dimension of the first connecting beam 31 can be greater than the spacing distance between two first piezoelectric driving structures 20 opposite to each other along the first direction, and the two first piezoelectric driving structures 20 opposite to each other along the first direction are fixed to the same first connecting beam 31, that is, the first driving structure 21 and the third driving structure 23 can be fixed to the same first connecting beam 31, and the second driving structure 22 and the fourth driving structure 24 can be fixed to the same first connecting beam 31.

[0054] In some embodiments of the present invention, Figure 1 and Figure 2 As shown, the support frame 30 may also include: two second connecting beams 32, the two second connecting beams 32 are arranged at intervals along the first direction and both extend along the second direction, and the multiple first piezoelectric driving structures 20 are located between the two second connecting beams 32, and each second connecting beam 32 is fixedly connected to the two first connecting beams 31.

[0055] The two second connecting beams 32 can be arranged opposite to each other and spaced apart along the first direction, and the two second connecting beams 32 can both extend along the second direction. The plurality of first piezoelectric drive structures 20 are located between the support frame 30 and the reflector 10, and the plurality of first piezoelectric drive structures 20 can be located between the two second connecting beams 32, so that the structure of the MEMS scanning mirror 1 is compact, which is conducive to miniaturization of the MEMS scanning mirror 1 and reduces the space occupied by the MEMS scanning mirror 1.

[0056] Each second connecting beam 32 is fixedly connected to the two first connecting beams 31, and each second connecting beam 32 can be fixedly connected to the two first connecting beams 31 by bonding, clamping, etc. Each second connecting beam 32 is connected between the two first connecting beams 31, and the support frame 30 is constructed as an integral structure. Each second connecting beam 32 can form an angle with the corresponding first connecting beam 31, and the angle can be a right angle. The support frame 30 can be constructed as an annular structure with a rectangular cross section, so that the support frame 30 can effectively resist forces in all directions and reduce the deformation and shaking of the support frame 30. When the multiple first piezoelectric drive structures 20 are deformed, the multiple first piezoelectric drive structures 20 generate forces, and the support frame 30 can provide more stable support for the first piezoelectric drive structure 20. The force generated by the first piezoelectric drive structure 20 can be transmitted to the first connecting beam 31, and then transmitted to the second connecting beam 32. The force generated by the first piezoelectric drive structure 20 can be evenly dispersed to the entire support frame 30, which can reduce the problem of local stress concentration and improve the bearing capacity of the support frame 30.

[0057] In some embodiments of the present invention, Figure 1 and Figure 2 As shown, along the second direction, the plurality of second piezoelectric driving structures 50 are respectively located on two opposite sides of the support frame 30 , and each side of the support frame 30 is provided with a plurality of second piezoelectric driving structures 50 .

[0058] The plurality of second piezoelectric drive structures 50 may be respectively located on opposite sides of the support frame 30 along the second direction, and the plurality of second piezoelectric drive structures 50 may be connected to the support frame 30 through corresponding second elastic members 42. Along the second direction, a plurality of second piezoelectric drive structures 50 are provided on each side of the support frame 30. When voltage is applied to the plurality of second piezoelectric drive structures 50 to drive the reflector 10 to rotate, both sides of the reflector 10 along the second direction are subjected to force, and the reflector 10 may deflect around the axis of the reflector 10. As an example, the plurality of second piezoelectric drive structures 50 located on both sides of the support frame 30 along the second direction are symmetrically arranged with respect to the second direction. When voltage is applied to the plurality of second piezoelectric drive structures 50 to drive the reflector 10 to rotate, the forces on both sides of the reflector 10 along the second direction may be the same, so that the reflector 10 may deflect around the central axis of the reflector 10, and the stability of the reflector 10 during deflection may be improved.

[0059] In some embodiments of the present invention, Figure 1 , Figure 2 and Figure 6 As shown, two second piezoelectric driving structures 50 are disposed on each side of the supporting frame 30 , and the two second piezoelectric driving structures 50 located on the same side of the supporting frame 30 are arranged along the first direction.

[0060] Two second piezoelectric drive structures 50 are provided on each side of the support frame 30 along the second direction. The two second piezoelectric drive structures 50 located on the same side of the support frame 30 along the second direction can be arranged along the first direction, and the two second piezoelectric drive structures 50 can be arranged spaced apart along the first direction, that is, there can be four second piezoelectric drive structures 50. When it is necessary to drive the reflector 10 to deflect, voltages in the same direction can be applied to the two second piezoelectric drive structures 50 located on the same side of the support frame 30 along the first direction, and voltages in different directions can be applied to the two second piezoelectric drive structures 50 located on the same side of the reflector 10 along the second direction, so that the reflector 10 can deflect clockwise or counterclockwise around the axis of the reflector 10 parallel to the second direction, thereby further increasing the deflection range of the reflector 10, which is conducive to further increasing the range of light reflected by the reflector 10, and is more conducive to improving the scanning range of the MEMS scanning mirror 1.

[0061] As an example, four second piezoelectric drive structures 50 can be symmetrically arranged about the first direction, and four second piezoelectric drive structures 50 can be symmetrically arranged about the second direction. The four second piezoelectric drive structures 50 are all connected to the support frame 30 through the corresponding second elastic members 42. When voltage is applied to the multiple second piezoelectric drive structures 50 to drive the support frame 30 to deflect, the forces received by the support frame 30 on both sides along the first direction can be the same, and the forces received by the support frame 30 on both sides along the second direction can be the same, so that the support frame 30 can deflect around the central axis of the support frame 30. The four first piezoelectric drive structures 20 are all connected to the second connecting beam 32, and the four first piezoelectric drive structures 20 are also all connected to the reflector 10, so that when the support frame 30 deflects, the reflector 10 can be driven to deflect together, and the central axis of the reflector 10 can be colinear with the central axis of the support frame 30, so that the effect of deflecting the reflector 10 around the central axis of the reflector 10 can be achieved.

[0062] As an example, Figure 1 and Figure 6As shown, the four second piezoelectric drive structures 50 can be respectively recorded as the fifth drive structure 51, the sixth drive structure 52, the seventh drive structure 53 and the eighth drive structure 54, the fifth drive structure 51 and the seventh drive structure 53 can be respectively located on the same side of the support frame 30 along the second direction, the fifth drive structure 51 and the seventh drive structure 53 can be arranged along the first direction, the sixth drive structure 52 and the eighth drive structure 54 can be respectively located on the same side of the support frame 30 along the second direction, and the sixth drive structure 52 and the eighth drive structure 54 can be arranged along the first direction. The fifth drive structure 51 and the sixth drive structure 52 can be respectively located on both sides of the support frame 30 along the second direction, the fifth drive structure 51 and the sixth drive structure 52 can be arranged relative to each other, the seventh drive structure 53 and the eighth drive structure 54 can be respectively located on both sides of the support frame 30 along the second direction, and the seventh drive structure 53 and the eighth drive structure 54 can be arranged relative to each other. When a positive voltage is applied to the fifth driving structure 51 and the sixth driving structure 52, and a negative voltage is applied to the seventh driving structure 53 and the eighth driving structure 54, the support frame 30 can be deflected counterclockwise around the axis of the support frame 30 parallel to the second direction. When a negative voltage is applied to the fifth driving structure 51 and the sixth driving structure 52, and a positive voltage is applied to the seventh driving structure 53 and the eighth driving structure 54, the support frame 30 can be deflected clockwise around the axis of the support frame 30 parallel to the second direction. When the support frame 30 deflects, the reflector 10 can be driven to deflect together, thereby achieving the effect of the reflector 10 deflecting clockwise or counterclockwise around the axis of the reflector 10 parallel to the second direction.

[0063] In some embodiments of the present invention, Figure 1-Figure 3 As shown, the structure of the first elastic member 41 is the same as the structure of the second elastic member 42 .

[0064] The multiple first piezoelectric drive structures 20 are connected to the reflector 10 through the corresponding first elastic member 41, and the first elastic member 41 can amplify and transmit the deformation of the corresponding first piezoelectric drive structure 20. The multiple second piezoelectric drive structures 50 are connected to the support frame 30 through the corresponding second elastic member 42, and the second elastic member 42 can amplify and transmit the deformation of the corresponding second piezoelectric drive structure 50. By setting the structure of the first elastic member 41 and the structure of the second elastic member 42 to be the same, the effect of the multiple first piezoelectric drive structures 20 driving the deflection of the reflector 10 and the effect of the multiple second piezoelectric drive structures 50 driving the deflection of the support frame 30 can be consistent and coordinated. The first elastic member 41 and the second elastic member 42 can use similar deformation laws and amplification ratios to respond to the action of the corresponding piezoelectric drive structure, which can reduce the probability of unstable deflection of the MEMS scanning mirror 1 caused by differences in the performance of the elastic members.

[0065] In some embodiments of the present invention, Figure 2 and Figure 3As shown, the first elastic member 41 and the second elastic member 42 may include: a plurality of sections of first connecting beams 43, and the plurality of sections of first connecting beams 43 are bent and connected in sequence.

[0066] like Figure 3 As shown, taking the first elastic member 41 as an example, one end of the first elastic member 41 is connected to the corresponding first piezoelectric drive structure 20, and the other end of the first elastic member 41 is connected to the reflector 10. The first elastic member 41 may include multiple sections of first connecting beams 43, and the multiple sections of the first connecting beams 43 are bent and connected in sequence. The first elastic member 41 can be constructed in an S-shape, a curve shape similar to a sine curve, etc. When the first piezoelectric drive structure 20 is deformed and the first elastic member 41 is subjected to force, the first connecting beams 43 of different sections can rotate and deform relatively through the corresponding bends, thereby effectively absorbing and dispersing energy, achieving a larger deformation amount, and being able to more fully amplify and transmit the small deformation of the corresponding first piezoelectric drive structure 20. In addition, the multiple sections of the first connecting beams 43 that are bent and connected in sequence can evenly distribute the force on the entire first elastic member 41. When the first piezoelectric driving structure 20 is deformed, the force generated by the first piezoelectric driving structure 20 is transmitted in sequence through the multiple sections of the first connecting beam 43, which can reduce the probability of stress concentration at a certain point or a certain section, thereby making the force transmission more uniform, which is beneficial to improving the working efficiency and stability of the first elastic member 41.

[0067] In some embodiments of the present invention, Figure 2 and Figure 3 As shown, the first elastic member 41 and the second elastic member 42 may further include: a second connecting beam 44, any two adjacent first connecting beams 43 are connected by the second connecting beam 44, and the second connecting beam 44 is an arc-shaped structure.

[0068] like Figure 3As shown, taking the first elastic member 41 as an example, the first elastic member 41 may include a second connecting beam 44, the second connecting beam 44 may be multiple sections, any two adjacent first connecting beams 43 may be connected by the second connecting beam 44, both ends of each section of the first connecting beam 43 along the first direction may be connected to the second connecting beam 44, the second connecting beam 44 may be an arc-shaped structure, so that the multiple sections of the first connecting beam 43 are bent and connected in sequence, and the multiple sections of the second connecting beam 44 connect the multiple sections of the first connecting beam 43 to form a whole. The multiple sections of the first connecting beam 43 may be arranged in parallel and at intervals, and along the arrangement direction of the multiple sections of the first connecting beam 43 (i.e., the second direction), the two first connecting beams 43 located on both sides of the first elastic member 41 may be a first beam 45 and a second beam 46, respectively, the first beam 45 may be connected to the corresponding first piezoelectric drive structure 20, and the second beam 46 may be connected to the reflector 10. The first beam 45 can receive the deformation displacement of the first piezoelectric driving structure 20, and the second connecting beam body 44 can transmit the deformation displacement of the first piezoelectric driving structure 20 to the first connecting beam body 43 in the middle position. The multiple sections of the first connecting beam body 43 located in the middle position amplify the deformation displacement received by the first beam 45, and the second beam 46 receives the amplified deformation displacement and drives the reflector 10 to deflect, thereby bringing a larger angle of deflection to the reflector 10.

[0069] In some embodiments of the present invention, Figure 5 and Figure 6 As shown, when the reflector 10 needs to be deflected around the axis of the reflector 10 parallel to the first direction, voltage can be applied to the multiple first piezoelectric drive structures 20. When a positive voltage is applied to the first drive structure 21 and the third drive structure 23, and a negative voltage is applied to the second drive structure 22 and the fourth drive structure 24, the reflector 10 can be deflected counterclockwise around the axis of the reflector 10 parallel to the first direction. When a negative voltage is applied to the first drive structure 21 and the third drive structure 23, and a positive voltage is applied to the second drive structure 22 and the fourth drive structure 24, the reflector 10 can be deflected clockwise around the axis of the reflector 10 parallel to the first direction.

[0070] When the reflector 10 is required to deflect around the axis of the reflector 10 parallel to the second direction, a voltage can be applied to the multiple second piezoelectric drive structures 50. When a positive voltage is applied to the fifth drive structure 51 and the sixth drive structure 52, and a negative voltage is applied to the seventh drive structure 53 and the eighth drive structure 54, the support frame 30 can deflect counterclockwise around the axis of the support frame 30 parallel to the second direction. When a negative voltage is applied to the fifth drive structure 51 and the sixth drive structure 52, and a positive voltage is applied to the seventh drive structure 53 and the eighth drive structure 54, the support frame 30 can deflect clockwise around the axis of the support frame 30 parallel to the second direction. When the support frame 30 deflects, it can drive the reflector 10 to deflect together, thereby achieving the effect of the reflector 10 deflecting clockwise or counterclockwise around the axis of the reflector 10 parallel to the second direction.

[0071] Other structures and operations of the MEMS scanning mirror 1 according to the embodiment of the present invention are known to those skilled in the art and will not be described in detail here.

[0072] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0073] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A MEMS scanning mirror, characterized in that: include: Reflector (10); A plurality of first piezoelectric drive structures (20), wherein the plurality of first piezoelectric drive structures (20) are arranged at intervals around the reflector (10) along the circumference of the reflector (10); A support frame (30) and a plurality of first elastic members (41), wherein the support frame (30) is arranged around the reflector (10) along the circumference of the reflector (10) and is spaced apart from the reflector (10), and a plurality of first piezoelectric drive structures (20) are located between the support frame (30) and the reflector (10), one end of each of the first piezoelectric drive structures (20) is fixed to the support frame (30), and the other end of each of the first piezoelectric drive structures (20) is connected to the reflector (10) via a corresponding first elastic member (41); A plurality of second piezoelectric drive structures (50) and a plurality of second elastic members (42), wherein the plurality of second piezoelectric drive structures (50) are arranged at intervals around the support frame (30) along the circumference of the support frame (30), one end of each of the second piezoelectric drive structures (50) is fixed, and the other end of each of the second piezoelectric drive structures (50) is connected to the support frame (30) via the corresponding second elastic member (42).

2. The MEMS scanning mirror according to claim 1, characterized in that: One end of the first elastic member (41) is connected to the corresponding first piezoelectric drive structure (20), and the other end of the first elastic member (41) is connected to the reflector (10); and / or One end of the second elastic member (42) is connected to the corresponding second piezoelectric drive structure (50), and the other end of the second elastic member (42) is connected to the supporting frame (30).

3. The MEMS scanning mirror according to claim 1, characterized in that: Along a first direction, there are four first piezoelectric drive structures (20), the four first piezoelectric drive structures (20) are respectively arranged on two opposite sides of the reflector (10), and two first piezoelectric drive structures (20) are arranged on each side of the reflector (10), and the two first piezoelectric drive structures (20) located on the same side of the reflector (10) are arranged along a second direction, and the first direction is perpendicular to the second direction.

4. The MEMS scanning mirror according to claim 3, characterized in that: The support frame (30) comprises: two first connecting beams (31), the two first connecting beams (31) are arranged at intervals along the second direction and both extend along the first direction, and a plurality of the first piezoelectric driving structures (20) are located between the two first connecting beams (31), and one end of each of the first piezoelectric driving structures (20) is fixed to the first connecting beam (31) on the corresponding side.

5. The MEMS scanning mirror according to claim 4, characterized in that: The support frame (30) further comprises: two second connecting beams (32), the two second connecting beams (32) are arranged at intervals along the first direction and both extend along the second direction, and a plurality of the first piezoelectric drive structures (20) are located between the two second connecting beams (32), and each of the second connecting beams (32) is fixedly connected to the two first connecting beams (31).

6. The MEMS scanning mirror according to any one of claims 3 to 5, characterized in that: Along the second direction, a plurality of the second piezoelectric driving structures (50) are respectively located on two opposite sides of the support frame (30), and a plurality of the second piezoelectric driving structures (50) are provided on each side of the support frame (30).

7. The MEMS scanning mirror according to claim 6, characterized in that: Two second piezoelectric drive structures (50) are provided on each side of the support frame (30), and the two second piezoelectric drive structures (50) located on the same side of the support frame (30) are arranged along the first direction.

8. The MEMS scanning mirror according to any one of claims 1 to 5, characterized in that: The structure of the first elastic member (41) is the same as the structure of the second elastic member (42).

9. The MEMS scanning mirror according to claim 8, characterized in that: The first elastic member (41) and the second elastic member (42) both comprise: a plurality of sections of first connecting beam bodies (43), wherein the plurality of sections of the first connecting beam bodies (43) are bent and connected in sequence.

10. The MEMS scanning mirror according to claim 9, characterized in that: The first elastic member (41) and the second elastic member (42) also include a second connecting beam (44), any two adjacent first connecting beams (43) are connected via the second connecting beam (44), and the second connecting beam (44) is an arc-shaped structure.

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