Process mechanical arm gas supply system and gas supply method thereof

Abstract

The invention discloses a process mechanical arm gas supply system, and relates to the field of gas supply systems of gluing and developing equipment, a process mechanical arm is arranged in a process cavity, the process mechanical arm gas supply system comprises an external fan filter, and the external fan filter feeds gas into the process cavity connected with the external fan filter; the filtering device and the drainage device are arranged in the process cavities, the process cavities are sequentially communicated, and gas sequentially flows through the process cavities through the drainage device. According to the scheme, the number of gas pipelines in the process cavities is reduced, the fans and the filters are arranged between the layers, air used by the upper-layer process cavity is fed into the filters through the fans to become clean air, the clean air is sequentially fed into the layers of process cavities, and on the premise that the cleaning effect is guaranteed, the cleaning efficiency is improved. The gas in the upper-layer process cavity is recycled in the lower-layer process cavity, so that the cost is reduced; and the occupied volume of the intake and exhaust pipeline is reduced, and the space utilization rate of equipment is increased.

Description

Technical Field

[0001] The invention relates to the field of gas supply systems for glue coating and developing equipment, and more specifically to a gas supply system for a process robot arm and a gas supply method thereof. Background Art

[0002] Coating and developing equipment is commonly used in semiconductor manufacturing, microelectronics manufacturing, photolithography and other high-precision manufacturing processes. It is mainly used for coating and developing photoresist, film or other similar materials. This process is very critical in the manufacture of microchips, optical components, display screens and other products.

[0003] The existing coating and developing equipment is equipped with a filter above the process chamber, and the external fan sends fresh air into each process chamber through the air duct, and uses fresh air to send impurities into the exhaust pipe to discharge the impurities from the inside of the equipment. However, the same amount of air is introduced into each process chamber through the pipeline, resulting in a large amount of air required and low utilization rate. In addition, an additional exhaust pipe needs to be set up, which has low space utilization rate. Summary of the invention

[0004] The object of the present invention is to provide a process robot arm gas supply system to solve the technical problems existing in the above-mentioned background technology.

[0005] The technical solution of the present invention provides a process robot arm gas supply system, which is arranged in a process chamber and includes an external fan filter, which delivers gas into the process chamber connected to it; it also includes a filtering device and a drainage device arranged in the process chamber, several process chambers are connected in sequence, and the gas flows through each process chamber in sequence through the drainage device, the drainage device in the previous process chamber is arranged corresponding to the filtering device in the next process chamber, and the gas in the previous process chamber enters the next process chamber after being filtered by the filtering device in the next process chamber.

[0006] In a preferred embodiment, the filtering device is arranged at the air inlet of each process chamber.

[0007] In a preferred embodiment, the filtering device comprises a filter.

[0008] In a preferred embodiment, the filter is detachably arranged in the process chamber.

[0009] In a preferred embodiment, the flow guiding device is arranged at the gas outlet of each process chamber.

[0010] In a preferred embodiment, the drainage device comprises a fan.

[0011] In a preferred embodiment, the rotation speed of the fan is adjustable.

[0012] In a preferred embodiment, the waste gas in the last process chamber is discharged through the drainage device.

[0013] In a preferred embodiment, the external fan filter is arranged on the top of the machine, the air inlet is arranged on the upper side of each process chamber, and the air outlet is arranged on the lower side of each process chamber.

[0014] The beneficial effects of the technical solution of the present invention are:

[0015] This solution reduces the gas pipelines in the process chamber, sets fans and filters between each layer, and uses the fan to send the used air in the upper process chamber into the filter to become clean air, and then sends the clean gas into each layer of the process chamber in turn. Under the premise of ensuring the cleaning effect, the gas in the upper process chamber can be reused in the lower process chamber, thereby reducing costs; and reducing the volume occupied by the intake and exhaust pipelines, thereby increasing the space utilization rate of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is an overall schematic diagram of the gas supply system in the prior art.

[0017] Figure 2 It is the gas path diagram of the gas supply system in the prior art.

[0018] Figure 3 is an overall schematic diagram of the gas supply system of the present invention,

[0019] Figure 4 This is a gas path diagram of the gas supply system of the present invention.

[0020] Explanation of the reference numerals: 1 external fan filter, 2 fresh air duct, 3 exhaust air duct, 4 rotating unit, 5 hot plate unit, 6 process robot arm, 7 process chamber, 8 filter, 9 fan. DETAILED DESCRIPTION

[0021] The present invention is further described in detail below. The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and design various embodiments with various modifications suitable for specific uses.

[0022] like Figure 1-2 As shown, in the prior art, the coating and developing machine includes a rotating unit 4, a hot plate unit 5, a process robot arm 6, etc. The process robot arm 6 is arranged in a process chamber 7, and a fresh air duct 2 and an exhaust gas duct 3 are arranged in the process chamber 7. The fresh air duct 2 is used for clean air transportation, and the exhaust gas duct 3 discharges the exhaust gas containing impurities in the process chamber 7.

[0023] Specifically, the external fan filter 1 (FFU) transports the clean air from the top to the bottom of the coating and developing machine in layers, and the clean air reaches the top of each process chamber 7 (such as Figure 2 The clean gas is then filtered again by the filter 8 and enters the corresponding process chamber 7, thereby sending the clean gas into each process chamber 7. The impurity-containing gas in each corresponding process chamber 7 enters the exhaust pipe under the action of the airflow. The exhaust pipe 3 collects the exhaust gas in each process chamber 7 (as shown in FIG. Figure 2 The final product is sent out to the coating and developing equipment.

[0024] The existing solution realizes the introduction of air and the discharge of waste gas by setting pipelines in the process chamber 7, which cannot realize the effective utilization of space; and the required air flow rate is large when adopting the above-mentioned pipeline arrangement scheme, and the gas cannot be reused, resulting in high energy consumption.

[0025] like Figure 3 As shown, the technical solution of the present invention provides a gas supply system for a process robot arm 6, the process robot arm 6 is arranged in a process chamber 7, and includes an external fan filter, the external fan filter sends gas into the process chamber connected thereto; includes a filtering device and a drainage device arranged in the process chamber 7, a plurality of process chambers 7 are connected in sequence, and the gas flows through each process chamber in sequence through the drainage device, the drainage device in the previous process chamber 7 is arranged correspondingly to the filtering device in the next process chamber 7, the gas in the previous process chamber 7 is filtered by the filtering device in the next process chamber 7 and then enters the next process chamber 7, and the gas flows as shown in FIG. Figure 4 As indicated by the arrow.

[0026] Compared with the prior art, this solution cancels the pipeline structure in the process chamber 7, and the upper and lower process chambers 7 are connected in sequence. Each process chamber 7 is provided with a filtering device and a drainage device. The external fan filter 1 (FFU) sends the clean gas from the filtering device of the first layer into the process chamber 7 of the first layer. After being filtered by the filtering device of the first layer, the clean gas enters the next process chamber 7 downward under the action of the drainage device. In this process, the impurities in the first layer of the process chamber 7 also flow to the next process chamber 7 together. After entering the next process chamber 7, the steps of the first layer of the process chamber 7 are repeated to filter and drain. The gas continues to be transported to the next process chamber 7 until it reaches the last process chamber 7. The impurities are filtered and removed during the gas flow. The waste gas in the last process chamber 7 is discharged to the waste gas pipeline or in the clean room through the drainage device, and directly discharged downward from the machine.

[0027] The filtering device is arranged at the air inlet of each process chamber 7, and the filtering device includes a filter 8. The gas containing impurities is filtered through the filter 8 before entering the corresponding process chamber 7, so as to ensure that the gas entering the next process chamber 7 is clean gas. The filter 8 is detachably arranged in the process chamber 7 and can be regularly disassembled for cleaning.

[0028] The drainage device is arranged at the air outlet of each process chamber 7, and the drainage device includes a fan 9. The fan 9 drains the impurity-containing gas in the previous process chamber 7 to the filter 8 of the next chamber for filtering. The speed of the fan 9 is adjustable, and is adjusted based on the air volume of the chambers of the process robot arms 6 of each layer, so that the air volume of the chambers of each process robot arm 6 is basically the same.

[0029] The external fan filter is installed on the top of the machine, the air inlet is installed on the upper side of the process chamber, and the air outlet is installed on the lower side of the process chamber, ensuring that the gas flows from top to bottom and impurities can flow downward along with the gas.

[0030] This solution reduces the gas pipelines in the process chamber 7, sets fans 8 and filters between each layer, and sends the used air in the upper process chamber 7 to the filter 8 through the fan 9 to be converted into clean air, and then sends the clean gas to each layer of the process chamber 7 in turn. Under the premise of ensuring the cleaning effect, the gas in the upper process chamber 7 can be reused in the lower process chamber, thereby reducing costs; and reducing the volume occupied by the intake and exhaust pipelines, thereby increasing the space utilization rate of the equipment.

[0031] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without creative work should fall within the scope of protection of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention are implemented according to the conventional means in the field unless otherwise specified and limited.

Claims

1. A gas supply system for a process robot arm, wherein the process robot arm is arranged in a process chamber, and is characterized in that: It includes an external fan filter, which delivers gas into a process chamber connected to it; it also includes a filtering device and a drainage device arranged in the process chamber, several process chambers are connected in sequence, and the gas flows through each process chamber in sequence through the drainage device, the drainage device in the previous process chamber is arranged correspondingly to the filtering device in the next process chamber, and the gas in the previous process chamber enters the next process chamber after being filtered by the filtering device in the next process chamber.

2. A process robot arm gas supply system according to claim 1, characterized in that: The filtering device is arranged at the air inlet of each process chamber.

3. The process robot arm gas supply system according to claim 1, characterized in that: The filtering device comprises a filter.

4. A process robot arm gas supply system according to claim 3, characterized in that: The filter is detachably arranged in the process chamber.

5. The process robot arm gas supply system according to claim 1, characterized in that: The drainage device is arranged at the gas outlet of each process cavity.

6. The process robot arm gas supply system according to claim 1, characterized in that: The drainage device comprises a fan.

7. A process robot arm gas supply system according to claim 6, characterized in that: The speed of the fan is adjustable.

8. The process robot arm gas supply system according to claim 1, characterized in that: The waste gas in the last process chamber is discharged through the drainage device.

9. The process robot arm gas supply system according to claim 1, characterized in that: The external fan filter is arranged on the top of the machine, the air inlet is arranged on the upper side of each process cavity, and the air outlet is arranged on the lower side of each process cavity.

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