Semiconductor integrated special gas pipeline configuration method and device

Abstract

The present application discloses a semiconductor integrated special gas pipeline configuration method and device. The method includes: obtaining a pipeline schematic diagram; the pipeline schematic diagram includes a plurality of pipeline components and the connection sequence of the plurality of pipeline components; based on the pipeline schematic diagram and the connection rules corresponding to each pipeline component, configuring at least one initial layout plan diagram corresponding to the pipeline schematic diagram; sorting the at least one initial layout plan diagram according to a preset priority to obtain a recommended layout diagram sequence, which can automatically configure a gas pipeline layout diagram based on the pipeline schematic diagram, effectively improving the integrated gas pipeline configuration efficiency and configuration quality.

Description

Technical Field

[0001] The present disclosure generally relates to the field of semiconductor manufacturing technologies, and particularly to a method and device for configuring a semiconductor integrated special gas pipeline layout. Background Art

[0002] Semiconductor integrated special gas pipeline supply equipment such as special gas cabinets needs to be produced and configured according to the pipeline layout diagrams provided by engineers. In related technologies, usually the original pipeline schematic diagram is provided by the demand side, and the engineer draws the corresponding pipeline layout diagram based on the pipeline schematic diagram. However, in the manual drawing process, problems such as an increase in production costs such as the number of welds caused by insufficient engineer capabilities and an increase in product volume, or problems such as an increase in labor costs due to improving engineer capabilities are likely to occur. Summary of the Invention

[0003] In view of the above defects or deficiencies in the prior art, it is desirable to provide a method and device for configuring a semiconductor integrated special gas pipeline layout, which can automatically configure the pipeline layout diagram based on the pipeline schematic diagram, and effectively improve the integrated pipeline configuration efficiency and configuration quality.

[0004] In a first aspect, an embodiment of the present application provides a method for configuring a semiconductor integrated special gas pipeline layout, including:

[0005] Obtain a pipeline schematic diagram; the pipeline schematic diagram includes a plurality of pipeline components and the connection sequence of the plurality of pipeline components;

[0006] Based on the pipeline schematic diagram and the connection rules corresponding to each pipeline component, configure at least one initial layout diagram corresponding to the pipeline schematic diagram;

[0007] Sort the at least one initial layout diagram according to a preset priority to obtain a recommended layout diagram sequence.

[0008] In some embodiments, the sorting of the at least one initial layout diagram according to the preset priority includes:

[0009] For each initial layout diagram, obtain the number of welds and the minimum interface distance corresponding to the initial layout diagram;

[0010] Based on the number of welds and the minimum interface distance, determine the weighted modulus corresponding to the initial layout diagram;

[0011] Sort the at least one initial layout diagram in descending order based on the weighted modulus.

[0012] In some embodiments, the determining the weighted modulus corresponding to the initial layout diagram based on the number of welds and the minimum interface distance includes:

[0013] Normalize the weld number and the minimum interface distance respectively to obtain a normalized weld number and a normalized minimum interface distance;

[0014] Calculate a weld weighting value corresponding to the normalized weld number and an interface minimum distance weighting value corresponding to the normalized minimum interface distance respectively based on the corrected weights;

[0015] Determine a weighted norm corresponding to the initial layout plan diagram based on the weld weighting value and the interface minimum distance weighting value.

[0016] In some embodiments, it further includes:

[0017] Use the vector norms of the weld weighting value and the interface minimum distance weighting value as the weighted norm corresponding to the initial layout plan diagram.

[0018] In some embodiments, the configuring of at least one initial layout plan diagram corresponding to the gas path schematic diagram based on the gas path schematic diagram and the connection rules corresponding to each gas path component includes:

[0019] Input the gas path schematic diagram and the connection rules corresponding to each gas path component into a trained convolutional neural network model to obtain the at least one initial layout plan diagram; or

[0020] Use the enumeration method to obtain the at least one initial layout plan diagram according to the gas path schematic diagram and the connection rules corresponding to each gas path component.

[0021] In some embodiments, before sorting the at least one initial layout plan diagram according to a preset priority to obtain a recommended layout diagram sequence, it further includes:

[0022] Obtain a preset space rule;

[0023] Screen at least one initial layout plan diagram that meets the preset space from the at least one initial layout plan diagram;

[0024] Sort the at least one initial layout plan diagram screened out according to the preset priority.

[0025] In some embodiments, the connection rules corresponding to the gas path components include at least one of the gas port type, the air flow direction, and the valve state.

[0026] In a second aspect, an embodiment of the present application provides a semiconductor integrated special gas gas path configuration device, including:

[0027] An acquisition module, configured to acquire a gas path schematic diagram; the gas path schematic diagram includes a plurality of gas path components and the connection sequence of the plurality of gas path components;

[0028] A generation module, configured to generate at least one initial layout plan diagram corresponding to the gas circuit schematic diagram based on the gas circuit schematic diagram and the connection rules corresponding to each gas circuit component;

[0029] A sorting module, configured to sort the at least one initial layout plan diagram according to a preset priority to obtain a recommended layout diagram sequence.

[0030] In a third aspect, an embodiment of the present application provides an electronic device, including a memory, a processor, and a computer program stored on the memory and executable on the processor. When the processor executes the program, the method described in the embodiment of the present application is implemented.

[0031] In a fourth aspect, an embodiment of the present application provides a computer-readable storage medium, on which a computer program is stored. When the program is executed by a processor, the method described in the embodiment of the present application is implemented.

[0032] In a fifth aspect, an embodiment of the present application provides a computer program product, including a computer program, characterized in that when the computer program is executed by a processor, the method described in the embodiment of the present application is implemented.

[0033] The semiconductor integrated special gas circuit configuration method proposed in the embodiment of the present application can automatically configure at least one initial layout plan diagram corresponding to the gas circuit schematic diagram according to the gas circuit schematic diagram and the connection rules corresponding to each gas circuit component. Without the need for manual participation by engineers, the initial layout plan diagram can be configured according to the connection rules corresponding to the gas circuit components. Engineers only need to conduct post-review on the initial layout plan diagram. While meeting the user's gas circuit principle requirements, it greatly reduces the work difficulty and workload of engineers, improves the efficiency and reliability of gas circuit configuration, and reduces the cost of gas circuit configuration. At the same time, by sorting through a preset priority to provide a recommended layout diagram sequence, it can provide an orderly recommendation based on at least one initial layout plan diagram, providing a reliable data basis and selection basis for subsequent engineering design for users and engineers, and improving the overall design efficiency of the special gas cabinet and the user experience.

[0034] Additional aspects and advantages of the present invention will be given in part in the following description, become apparent in part from the following description, or be understood through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] By reading the detailed description of the non-limiting embodiments with reference to the following drawings, other features, objects, and advantages of the present application will become more apparent:

[0036] Figure 1 A flowchart showing the semiconductor integrated special gas circuit configuration method provided by an embodiment of the present application;

[0037] Figure 2Shows the connection rule diagram of the gas path component provided by an embodiment of the present application;

[0038] Figure 3 Shows the schematic diagram of the weld seam provided by an embodiment of the present application;

[0039] Figure 4 Shows the schematic flow diagram of the semiconductor integrated special gas path configuration method provided by another embodiment of the present application;

[0040] Figure 5 Shows the gas path schematic diagram provided by an embodiment of the present application;

[0041] Figure 6 Shows the candidate layout scheme diagram provided by an embodiment of the prior art of the present application;

[0042] Figure 7 Shows the candidate layout scheme diagram provided by an embodiment of the present application;

[0043] Figure 8 Shows the present application Figure 5 Schematic diagram of some gas path components in;

[0044] Figure 9 Shows the present application Figure 8 Schematic diagram of the connection mode of a corresponding gas path component;

[0045] Figure 10 Shows the present application Figure 9 Schematic diagram of another connection mode of the corresponding gas path component;

[0046] Figure 11 Shows the structural schematic diagram of the semiconductor integrated special gas path configuration device provided by an embodiment of the present application;

[0047] Figure 12 Shows the structural schematic diagram of the computer system of the electronic device or server suitable for implementing the embodiments of the present application. Detailed implementation manners

[0048] The present application will be further described in detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the related invention, rather than limiting the invention. In addition, it should be noted that for the convenience of description, only the parts related to the invention are shown in the drawings.

[0049] It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present application will be described in detail below with reference to the drawings and embodiments.

[0050] To further illustrate the technical solutions provided by the embodiments of the present application, the following will provide a detailed description in conjunction with the accompanying drawings and specific implementation manners. Although the embodiments of the present application provide the method operation instruction steps as shown in the following embodiments or drawings, more or fewer operation instruction steps may be included in the method based on routine or non-creative labor. In steps where there is no necessary causal relationship logically, the execution order of these steps is not limited to the execution order provided by the embodiments of the present application. When the method is actually processed or executed by the device, it can be executed in the method order shown in the embodiments or drawings or executed in parallel.

[0051] Please refer to Figure 1 , Figure 1 which shows a schematic flow diagram of a semiconductor integrated special gas pipeline configuration method provided by an embodiment of the present application. As Figure 1 shown, the method includes:

[0052] Step 101, obtain a pipeline schematic diagram; the pipeline schematic diagram includes a plurality of pipeline components and the connection sequence of the plurality of pipeline components.

[0053] It should be noted that the pipeline schematic diagram is the pipeline schematic diagram corresponding to the special gas cabinet. The pipeline schematic diagram can be the original pipeline schematic diagram or an equivalent pipeline diagram. When the pipeline schematic diagram is the original pipeline schematic diagram, the embodiments of the present application further include the step of decomposing the original pipeline schematic diagram into an equivalent pipeline diagram.

[0054] That is to say, the semiconductor integrated special gas pipeline configuration method proposed by the embodiments of the present application is a special gas pipeline configuration implemented based on an equivalent pipeline diagram. Among them, the equivalent pipeline diagram removes unnecessary relevant information compared with the original pipeline schematic diagram. Specifically, the equivalent pipeline diagram can be decomposed based on the original pipeline schematic diagram and the intake and outlet information in a manner similar to configuring an equivalent circuit.

[0055] It should also be noted that the special gas cabinet is a special gas storage cabinet or gas safety cabinet, which is a safety device for storing special gases (such as flammable, toxic, corrosive gases, etc.). The main purpose of the special gas cabinet is to ensure the safety of these gases during storage and use and reduce potential risks. The semiconductor special gas cabinet can also be used for gas supply and control in the chip manufacturing process. The pipeline components can include necessary elements in the semiconductor integrated special gas pipeline, including but not limited to valves, pressure transmitters (PT), and gas sources.

[0056] Step 102, based on the pipeline schematic diagram and the connection rules corresponding to each pipeline component, configure at least one initial layout plan diagram corresponding to the pipeline schematic diagram.

[0057] It should be noted that in the embodiments of the present application, the corresponding connection rules of the gas path components include at least one of the gas port type, the gas flow direction, and the valve state.

[0058] Exemplarily, as Figure 2 shown, where I, JL, JR, and BI are two-way valve bases, T, L, R, TT, TL, and TR are three-way valve bases, HH and FS are four-way valve bases, and BY and BV are two-way three-way diaphragm valve bases. The black-filled arrows are the air inlets, the unfilled arrows are the air outlets, and the air flow direction is formed between the air inlets and the air outlets.

[0059] Furthermore, the valve state includes open and closed. When the valve is in the open state, it usually means that gas is allowed to flow from the air inlet to the air outlet. When the valve is closed, it usually means that gas is prohibited from flowing out of the air outlet.

[0060] Exemplarily, taking the four-way valve base HH as an example, when the valve is closed, the upper, lower, and left air inlets are not connected to the right air outlet, and the upper, lower, and left air inlets are not connected to each other either; when the valve is open, the upper, lower, and left air inlets are connected to the right air outlet, and the upper, lower, and left air inlets are also connected to each other. For example, it can achieve upper and lower air intake, left and right air outlet, or upper, lower, and left three-side air intake, and right air outlet.

[0061] In a feasible embodiment, the gas path schematic diagram and the corresponding connection rules of each gas path component are input into a trained convolutional neural network model to obtain at least one initial layout plan diagram.

[0062] Specifically, an initial convolutional neural network model is constructed, and the corresponding connection rules of each gas path component, a large number of historical gas path schematic diagrams, the layout plan diagrams configured by engineers for them, and the finally selected layout plan diagrams are obtained. The large number of historical gas path schematic diagrams, the layout plan diagrams configured by engineers for them, and the finally selected layout plan diagrams are divided into multiple training sets, and the cross-validation method is used to sequentially use each training set as a validation set to train and validate the initial convolutional neural network model until the convolutional neural network model reaches the training accuracy, and a trained convolutional neural network model is obtained.

[0063] When configuring at least one initial layout plan diagram corresponding to the gas path schematic diagram based on the gas path schematic diagram, the gas path schematic diagram and the corresponding connection rules of each gas path component can be directly input into the trained convolutional neural network model, so that the trained convolutional neural network model uses each gas path component to configure at least one initial layout plan corresponding to the gas path schematic diagram.

[0064] In some embodiments, the initial layout scheme output by the trained convolutional neural network model may be a sequence of initial layout schemes corresponding to the pneumatic circuit schematic diagram, that is, the connection order of multiple pneumatic components. Then, an engineer or other graphic drawing tool can draw the initial layout scheme diagram based on the initial layout scheme.

[0065] Optionally, if the trained convolutional neural network model can output an initial layout scheme diagram each time, the pneumatic circuit schematic diagram and each pneumatic component can be input into the trained convolutional neural network model multiple times to obtain multiple initial layout scheme diagrams.

[0066] Optionally, if the trained convolutional neural network model can output multiple initial layout scheme diagrams each time, the pneumatic circuit schematic diagram and each pneumatic component can be input into the trained convolutional neural network model once to obtain multiple initial layout scheme diagrams.

[0067] Thus, the present application can automatically generate an initial layout scheme diagram based on the trained convolutional neural network model, greatly reducing the basic workload of engineers. Moreover, the present application trains the convolutional neural network using the connection rules corresponding to each pneumatic component, which can effectively improve the reliability of generating the initial layout scheme diagram using the trained convolutional neural network model and avoid problems such as incorrect air port types as much as possible.

[0068] In another feasible embodiment, at least one initial layout scheme diagram is obtained by using the enumeration method according to the pneumatic circuit schematic diagram and the connection rules corresponding to each pneumatic component.

[0069] It should be understood that in the embodiments of the present application, the number of initial layout scheme diagrams can be determined according to the number and connection order of the pneumatic components in the pneumatic circuit schematic diagram. For example, when the number of pneumatic components is small, the initial layout scheme diagram can be on the order of ten; when the number of pneumatic components is large, the initial layout scheme diagram can be on the order of one hundred; when the number of pneumatic components is very large, the initial layout scheme diagram can be on the order of one thousand or more. The present application does not make specific limitations. It should also be understood that when the number of pneumatic components is large or very large, it is preferably to use the trained convolutional neural network model to generate the initial layout scheme diagram, which can greatly reduce the workload of engineers and improve the efficiency of special gas pipeline configuration.

[0070] Step 103: Sort at least one initial layout scheme diagram according to a preset priority to obtain a recommended layout diagram sequence.

[0071] It should be noted that before sorting at least one initial layout scheme diagram according to a preset priority, it is also necessary to further verify the feasibility of the initial layout scheme diagram, that is, to determine whether at least one pneumatic component in the initial layout scheme diagram matches the provided pneumatic components. In other words, the pneumatic components in the initial layout scheme diagram are existing pneumatic components. Exemplarily,Figure 2 There is no four-way valve base with one inlet and three outlets provided. If there is a four-way valve base with one inlet and three outlets in the initial layout plan, the initial layout plan needs to be deleted, that is, the provider of the gas path components of the initial layout plan cannot implement it. Therefore, the initial layout plan does not participate in the sorting and recommendation.

[0072] Optionally, the preset priorities include but are not limited to at least one of customer preferences, the number of welds, the minimum distance between interfaces, etc., and the present application does not make specific limitations.

[0073] It should be noted that the weld is the welding gap between two adjacent valve bases. Exemplarily, as Figure 3 shown, a three-way valve base and a four-way valve base are connected by a weld.

[0074] It should be understood that an increase in the number of welds will have a certain impact on the stability and air pressure of the special gas path, thereby affecting the stability of the special gas cabinet.

[0075] It also needs to be noted that each gas path component used in the embodiments of the present application is obtained by machining. Specifically, the gas path component formed by machining includes a UCR joint with a thread. Among them, the UCR joint with a thread is a metal gasket surface seal joint with ultra-high sealing performance and ultra-low leakage in the range from vacuum to positive pressure. This sealing method is to install a metal gasket between the flange airtight parts of two joints (joint bodies), and realize an ultra-precise sealed connection method through threaded connection. After testing, the gas leakage rate of the UCR connection mode provided by the embodiments of the present application is ≤ 1×10-10Pa.m3 / sec.He, which is much lower than the weld connection method.

[0076] Exemplarily, when configuring the structure as Figure 3 shown, the configuration method of the present application is as Figure 3 shown: valve, machined three-way base, UCR joint, weld, UCR joint, machined four-way base, valve. It can be seen that there is only one weld between the three-way base and the four-way base as Figure 3 shown in the present application, and the three-way base, four-way base and valve are connected by machined threads. The existing technology configuration is the connection method of valve, UCR joint, weld, UCR joint, three-way pipe, UCR joint, weld, UCR joint, four-way pipe, UCR joint, weld, UCR joint, valve, with three welds. It can be seen that the gas path components provided by the embodiments of the present application can effectively reduce the number of welds in the gas path configuration and improve the sealing performance through the UCR joint with a thread.

[0077] Therefore, the semiconductor integrated special gas pipeline configuration method proposed in the embodiments of this application can automatically configure at least one initial layout plan diagram corresponding to the gas pipeline schematic diagram according to the gas pipeline schematic diagram and the connection rules corresponding to each gas pipeline component. Without the manual participation of engineers, the initial layout plan diagram can be configured according to the connection rules corresponding to the gas pipeline components. Engineers only need to conduct post-review on the initial layout plan diagram, which can meet the user's gas pipeline principle requirements while greatly reducing the work difficulty and workload of engineers, improving the efficiency and reliability of gas pipeline configuration, and reducing the cost of gas pipeline configuration. At the same time, by sorting through the preset priority to provide a recommended layout diagram sequence, it can provide an orderly recommendation based on at least one initial layout plan diagram, providing a reliable data basis and selection basis for the user and engineers in the subsequent engineering design, and improving the overall design efficiency of the special gas cabinet and the user experience.

[0078] In a feasible embodiment, sorting at least one initial layout plan diagram according to the preset priority includes: obtaining the preset space rule, screening at least one initial layout plan diagram that meets the preset space from at least one initial layout plan diagram, and sorting the at least one screened initial layout plan diagram according to the preset priority.

[0079] Among them, the preset space rule can be the space rule provided by the user, that is, to meet the space requirements for the placement of the special gas cabinet or the process, etc. Optionally, the preset space rule includes but is not limited to the coordinate distance between the inlet and outlet, the maximum layout space, etc., which can be defined by the user according to actual needs or process capabilities, and this application does not make specific limitations.

[0080] Exemplarily, when a gas pipeline schematic diagram contains 9 gas pipeline components, the three initial layout plan diagrams respectively provide layout plan diagrams with three space specifications of 1×9, 9×1, and 3×3. At this time, based on the coordinate distance between the inlet and outlet provided by the user, the 1×9 layout plan can be selected from them to improve the space compactness and thus reduce the welds; or, based on the maximum layout space provided by the user, the 3×3 layout plan can be selected from them to improve the structural strength.

[0081] That is to say, before sorting the layout plan diagrams, first screen at least one initial layout plan diagram that meets the space rule according to the preset space rule, and then sort the at least one initial layout plan diagram according to the preset priority.

[0082] Therefore, the embodiments of this application first screen at least one initial layout plan diagram based on the space rule to ensure that at least one initial layout plan diagram used for subsequent priority sorting meets the space rule provided by the user, avoiding recommending layout plan diagrams that cannot meet the space rule to the user, causing the expectation gap between the user and the engineer, improving the reliability and accuracy of the subsequent recommendation sequence, and improving the user experience.

[0083] In a feasible embodiment, as Figure 4 shown, at least one initial layout plan diagram is sorted according to a preset priority, including:

[0084] Step 401, for each initial layout plan diagram, obtain the number of welds and the minimum interface distance corresponding to the initial layout plan diagram.

[0085] It should be noted that the number of welds affects the stability and installation complexity of the special gas cabinet. The minimum interface distance is related to the convenience of installation. The larger the minimum interface distance, the more convenient the installation. Based on this, the present application selects the number of welds and the minimum interface distance as the evaluation conditions for the initial layout plan diagram to improve the evaluation reliability of the initial layout plan diagram.

[0086] Step 402, based on the number of welds and the minimum interface distance, determine the weighted modulus corresponding to the initial layout plan diagram.

[0087] In a feasible embodiment, the number of welds and the minimum interface distance are respectively normalized to obtain the normalized number of welds and the normalized minimum interface distance; based on the correction weights, the weld weighted value corresponding to the normalized number of welds and the interface minimum distance weighted value corresponding to the normalized minimum interface distance are respectively calculated; based on the weld weighted value and the interface minimum distance weighted value, the weighted modulus of the initial layout plan diagram is determined.

[0088] It should be understood that by normalizing the number of welds and the minimum interface distance respectively, the influence of the dimension of the number of welds and the minimum interface distance can be eliminated, and the stability and generalization ability of the subsequent fusion algorithm can be improved.

[0089] Optionally, the number of welds is normalized by using reverse normalization. Exemplarily, the following formula is used to normalize the welds:

[0090]

[0091] where X1 is the number of welds, is the normalized number of welds.

[0092] Optionally, the following formula is used to normalize the minimum interface distance:

[0093]

[0094] where X2 is the minimum interface distance, is the normalized minimum interface distance.

[0095] Further, the present application calculates weighted values for the normalized weld number and the normalized minimum interface distance respectively using correction weights, so as to obtain the weighted modulus corresponding to the weld number and the minimum interface distance, such that the layout distribution recommendation is only affected by the degrees of influence of the weld number and the minimum interface distance.

[0096] Preferably, the correction weights corresponding to the weld number and the minimum interface distance are 5:1. That is to say, the weight ratio of the weld number to the minimum interface distance is 5:1. In other words, in the embodiments of the present application, more attention is paid to the influence of the weld number on the layout distribution diagram.

[0097] Exemplarily, the following formulas are used to calculate the weighted values of the weld number and the minimum interface distance respectively:

[0098] Weld weighted value = ω1 ×

[0099] Minimum interface distance weighted value = ω2 ×

[0100] where ω1 is the weight corresponding to the weld number, ω2 is the weight corresponding to the minimum interface distance, is the normalized weld number, is the normalized minimum interface distance.

[0101] Furthermore, in the embodiments of the present application, the vector modulus of the weld weighted value and the minimum interface distance weighted value is used as the weighted modulus corresponding to the initial layout plan diagram. Specifically, the weighted modulus is obtained by calculating the modulus of the sum of the squares of the weld weighted value and the minimum interface distance weighted value. Exemplarily, the following formula is used to calculate the weighted modulus:

[0102]

[0103] Step 403, perform a descending order sorting on at least one initial layout plan diagram based on the weighted modulus.

[0104] Thus, in the embodiments of the present application, by selecting the weld number and the minimum interface distance as evaluation conditions, calculating the weighted modulus corresponding to each initial layout plan, and sorting the initial layout plans according to the weighted modulus, it is possible to make the initial layout plan diagrams with smaller weld numbers and larger minimum interface distances have smaller arrangement serial numbers. Furthermore, a sequence of initial layout plan diagrams with smaller weld numbers and larger minimum interface distances is recommended for users or engineers. On the basis of ensuring the drawing requirements of users and projects, the stability and convenience of the initially recommended layout plan diagrams are improved through the sorting method of the recommended sequence.

[0105] In a specific embodiment, the user provides, for example, Figure 5For the shown gas circuit schematic diagram, input the gas circuit schematic diagram into a trained convolutional neural network model or use the enumeration method to obtain the following six initial layout schemes as shown in the following table. Then, perform a weighted modulus calculation on the six initial layout schemes, as shown in Table 1, to obtain the adjusted serial numbers.

[0106] Table 1

[0107]

[0108] Thus, by using the semiconductor integrated special gas circuit configuration method provided in the embodiments of the present application, six initial layout schemes (diagrams) can be obtained for the shown gas circuit schematic diagram, and priority sorting can be performed based on the number of welds and the minimum interface distance as evaluation conditions to obtain a recommended layout scheme (diagram) sequence, achieving the purpose of preferentially recommending the layout scheme (diagram) with fewer welds and a larger minimum interface distance to users or engineers. Figure 5 For the shown gas circuit schematic diagram, six initial layout schemes (diagrams) can be obtained, and priority sorting can be performed based on the number of welds and the minimum interface distance as evaluation conditions to obtain a recommended layout scheme (diagram) sequence, achieving the purpose of preferentially recommending the layout scheme (diagram) with fewer welds and a larger minimum interface distance to users or engineers.

[0109] Exemplarily, Figure 6 and Figure 7 respectively provide layout scheme diagrams for configuring Figure 5 . Among them, Figure 6 is a configuration scheme of 6 rows and 8 columns generated by using some of the gas circuit components machined and formed in the present application, Figure 7 is a configuration scheme generated by using the gas circuit components machined and formed in the present application, 5 rows and 6 columns. It can be seen that in the case of realizing the same gas circuit principle, Figure 7 has fewer welds and fewer UCR interfaces compared to Figure 6 .

[0110] In a specific embodiment, as shown in Figures 8 - 10 , Figure 8 is the configuration scheme of some gas circuit components in Figure 5 , that is, the connection sequence of gas circuit components Q15, Q10, and the filter. Figure 9 is a connection method corresponding to a group of gas circuit components provided by the prior art, Figure 10 is a connection method corresponding to a group of gas circuit components obtained by machining and forming as described above in the present application. Among them, when using the gas circuit components and their connection methods shown in Figure 9 , there are 5 welds and 3 UCR joints, L1 = 2Row, L2 = 204mm; when using the gas circuit components and their connection methods shown in Figure 10 , there are only 4 welds and 3 UCR joints, L1 = 3Row, L2 = 179.5mm. Among them, Row is the number of rows, 2Row is 2 rows, and 3Row is 3 rows.

[0111] In summary, the semiconductor integrated special gas pipeline configuration method proposed in the embodiments of the present application can automatically configure at least one initial layout plan diagram corresponding to the gas pipeline schematic diagram according to the gas pipeline schematic diagram and the connection rules corresponding to each gas pipeline component. Without the need for manual participation by engineers, the initial layout plan diagram can be configured according to the connection rules corresponding to the gas pipeline components. Engineers only need to perform post-review on the initial layout plan diagram, which can meet the user's gas pipeline principle requirements while greatly reducing the work difficulty and workload of engineers, improving the efficiency and reliability of gas pipeline configuration, and reducing the cost of gas pipeline configuration. At the same time, by presetting priorities for sorting to provide a recommended layout diagram sequence, it is possible to provide an orderly recommendation based on at least one initial layout plan diagram, providing a reliable data basis and selection basis for post-engineering design for users and engineers, and improving the overall design efficiency of the special gas cabinet and the user experience.

[0112] It should be noted that although the operations of the method of the present invention are described in a specific order in the drawings, this does not require or imply that these operations must be performed in that specific order, or that all the operations shown must be performed to achieve the desired result.

[0113] Figure 11 The structural schematic diagram of a semiconductor integrated special gas pipeline configuration device provided by an embodiment of the present application is shown.

[0114] As Figure 11 shown, the semiconductor integrated special gas pipeline configuration device 10 proposed in the embodiments of the present application includes:

[0115] An acquisition module 11, configured to acquire a gas pipeline schematic diagram; the gas pipeline schematic diagram includes a plurality of gas pipeline components and the connection sequence of the plurality of gas pipeline components;

[0116] A generation module 12, configured to generate at least one initial layout plan diagram corresponding to the gas pipeline schematic diagram based on the gas pipeline schematic diagram and the connection rules corresponding to each gas pipeline component;

[0117] A sorting module 13, configured to sort the at least one initial layout plan diagram according to a preset priority to obtain a recommended layout diagram sequence.

[0118] In some embodiments, the sorting module 13 is further configured to:

[0119] For each initial layout plan diagram, obtain the number of welds and the minimum interface distance corresponding to the initial layout plan diagram;

[0120] Based on the number of welds and the minimum interface distance, determine the weighted modulus corresponding to the initial layout plan diagram;

[0121] Sort the at least one initial layout plan diagram in descending order based on the weighted modulus.

[0122] In some embodiments, the sorting module 13 is further configured to:

[0123] Normalize the number of welds and the minimum interface distance respectively to obtain a normalized number of welds and a normalized minimum interface distance;

[0124] Calculate a weld weighted value corresponding to the normalized number of welds and an interface minimum distance weighted value corresponding to the normalized minimum interface distance respectively based on the correction weights;

[0125] Determine the weighted modulus corresponding to the initial layout plan diagram based on the weld weighted value and the interface minimum distance weighted value.

[0126] In some embodiments, the sorting module 13 is further configured to:

[0127] Take the vector modulus of the weld weighted value and the interface minimum distance weighted value as the weighted modulus corresponding to the initial layout plan diagram.

[0128] In some embodiments, the generating module 12 is further configured to:

[0129] Input the gas circuit schematic diagram and the connection rules corresponding to each gas circuit component into a trained convolutional neural network model to obtain the at least one initial layout plan diagram; or

[0130] Use the enumeration method to obtain the at least one initial layout plan diagram according to the gas circuit schematic diagram and the connection rules corresponding to each gas circuit component.

[0131] In some embodiments, the sorting module 13 is further configured to:

[0132] Obtain a preset space rule;

[0133] Screen at least one initial layout plan diagram that meets the preset space from the at least one initial layout plan diagram;

[0134] Sort the at least one initial layout plan diagram screened out according to the preset priority.

[0135] In some embodiments, the connection rules corresponding to the gas circuit components include at least one of the gas port type, the air flow direction, and the valve state.

[0136] It should be understood that the various modules or the modules and references described in the semiconductor integrated special gas gas circuit configuration device 10 Figure 1Correspond to the respective steps in the described method. Thus, the operations and features described above for the method also apply to the semiconductor integrated special gas pipeline configuration device 10 and the modules included therein, which will not be elaborated here. The semiconductor integrated special gas pipeline configuration device 10 can be pre-implemented in the browser or other security applications of an electronic device, or can be loaded into the browser or its security applications of the electronic device by means of downloading, etc. The corresponding modules in the semiconductor integrated special gas pipeline configuration device 10 can cooperate with the modules in the electronic device to implement the solutions of the embodiments of the present application.

[0137] Among the several modules or units mentioned in the above detailed description, such a division is not mandatory. In fact, according to the embodiments of the present disclosure, the features and functions of the two or more modules or units described above can be embodied in one module or unit. Conversely, the features and functions of one module or unit described above can be further divided and embodied by multiple modules or units.

[0138] The following references Figure 12 , Figure 12 shows a schematic structural diagram of a computer system of an electronic device or a server suitable for implementing the embodiments of the present application,

[0139] As Figure 12 shown, the computer system includes a central processing unit (CPU) 901, which can perform various appropriate actions and processes according to the program stored in the read-only memory (ROM) 902 or the program loaded from the storage section 908 into the random access memory (RAM) 903. In the RAM 903, various programs and data required for the operation instructions of the system are also stored. The CPU 901, ROM 902, and RAM 903 are connected to each other via a bus 904. The input / output (I / O) interface 905 is also connected to the bus 904.

[0140] The following components are connected to the I / O interface 905; an input section 906 including a keyboard, a mouse, etc.; an output section 907 including such as a cathode ray tube (CRT), a liquid crystal display (LCD), etc. and a speaker, etc.; a storage section 908 including a hard disk, etc.; and a communication section 909 including a network interface card such as a LAN card, a modem, etc. The communication section 909 performs communication processing via a network such as the Internet. The drive 910 is also connected to the I / O interface 905 as required. A removable medium 911, such as a magnetic disk, an optical disk, a magneto-optical disk, a semiconductor memory, etc., is installed on the drive 910 as required, so that the computer program read from it can be installed into the storage section 908 as required.

[0141] In particular, according to the embodiments of the present application, the above reference to the flowchart Figure 2The described process may be implemented as a computer software program. For example, an embodiment of the present application includes a computer program product, which includes a computer program carried on a computer-readable medium. The computer program contains program code for performing the method shown in the flowchart. In such an embodiment, the computer program contains program code for performing the method shown in the flowchart. In such an embodiment, the computer program may be downloaded and installed from a network through a communication section 909, and / or installed from a removable medium 911. When the computer program is executed by a central processing unit (CPU) 901, the above functions defined in the system of the present application are executed.

[0142] It should be noted that the computer-readable medium shown in the present application may be a computer-readable signal medium, a computer-readable storage medium, or any combination of the two. A computer-readable storage medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any combination of the above. More specific examples of the computer-readable storage medium may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In the present application, a computer-readable storage medium may be any tangible medium that contains or stores a program that can be used by or in conjunction with an instruction execution system, apparatus, or device. And in the present application, a computer-readable signal medium may include a data signal propagated in a baseband or as part of a carrier wave, which carries computer-readable program code. Such a propagated data signal may take various forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the above. A computer-readable signal medium may also be any computer-readable medium other than a computer-readable storage medium, which can send, propagate, or transmit a program for use by or in conjunction with an instruction execution system, apparatus, or device. The program code contained on the computer-readable medium may be transmitted by any appropriate medium, including but not limited to: wireless, wire, optical cable, RF, etc., or any suitable combination of the above.

[0143] The flowcharts and block diagrams in the accompanying drawings illustrate the possible architectures, functions, and operation instructions of systems, methods, and computer program products according to various embodiments of the present application. In this regard, each block in the flowchart or block diagram may represent a module, a program segment, or a part of code that contains one or more executable instructions for implementing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the blocks may occur in a different order than that marked in the accompanying drawings. For example, two connected blocks may actually be executed substantially in parallel, and they may sometimes be executed in the reverse order, depending on the functions involved. It should also be noted that each block in the block diagram and / or flowchart, as well as the combination of blocks in the block diagram and / or flowchart, may be implemented by a dedicated hardware-based system that executes the specified functions or operation instructions, or may be implemented by a combination of dedicated hardware and computer instructions.

[0144] The units or modules involved in the embodiments described in the present application can be implemented in software or in hardware. The described units or modules can also be provided in a processor. For example, it can be described as: a processor includes an acquisition module, a generation module, and a sorting module. Among them, the names of these units or modules do not constitute a limitation to the units or modules themselves in some cases. For example, the acquisition module can also be described as "acquiring a gas circuit schematic diagram; the gas circuit schematic diagram includes a plurality of gas circuit components and the connection sequence of the plurality of gas circuit components".

[0145] On the other hand, the present application also provides a computer-readable storage medium, which may be included in the electronic device described in the above embodiments, or may exist alone without being assembled into the electronic device. The above computer-readable storage medium stores one or more programs, and when the above programs are executed by one or more processors, they are used to implement the semiconductor integrated special gas circuit configuration method described in the present application.

[0146] The above description is only for the preferred embodiments of the present application and the explanation of the applied technical principles. Those skilled in the art should understand that the scope of disclosure involved in the present application is not limited to the technical solutions formed by the specific combination of the above technical features, and should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the foregoing disclosure concept. For example, the technical solutions formed by mutually replacing the above features with the (but not limited to) technical features with similar functions disclosed in the present application.

Claims

1. A semiconductor integrated special gas pipeline configuration method, characterized in that Including: Obtain a pneumatic circuit schematic diagram; the pneumatic circuit schematic diagram includes a plurality of pneumatic circuit components and the connection sequence of the plurality of pneumatic circuit components; Based on the pneumatic circuit schematic diagram and the connection rules corresponding to each pneumatic circuit component, configure at least one initial layout plan diagram corresponding to the pneumatic circuit schematic diagram; Sort the at least one initial layout plan diagram according to a preset priority to obtain a recommended layout diagram sequence; Among them, the step of sorting the at least one initial layout plan diagram according to a preset priority to obtain a recommended layout diagram sequence includes: For each initial layout plan diagram, obtain the number of welds and the minimum interface distance corresponding to the initial layout plan diagram; Based on the number of welds and the minimum interface distance, determine the weighted modulus corresponding to the initial layout plan diagram; Sort the at least one initial layout plan diagram in descending order based on the weighted modulus.

2. The semiconductor integrated special gas pipeline configuration method according to claim 1, wherein The step of determining the weighted modulus corresponding to the initial layout plan diagram based on the number of welds and the minimum interface distance includes: Normalize the number of welds and the minimum interface distance respectively to obtain a normalized number of welds and a normalized minimum interface distance; Based on the correction weights, calculate the weld weighted value corresponding to the normalized number of welds and the interface minimum distance weighted value corresponding to the normalized minimum interface distance respectively; Based on the weld weighted value and the interface minimum distance weighted value, determine the weighted modulus corresponding to the initial layout plan diagram.

3. The semiconductor integrated special gas pipeline configuration method according to claim 2, characterized in that, Also including: Take the vector modulus of the weld weighted value and the interface minimum distance weighted value as the weighted modulus corresponding to the initial layout plan diagram.

4. The semiconductor integrated special gas pipeline configuration method according to claim 1, wherein The step of configuring at least one initial layout plan diagram corresponding to the pneumatic circuit schematic diagram based on the pneumatic circuit schematic diagram and the connection rules corresponding to each pneumatic circuit component includes: Input the pneumatic circuit schematic diagram and the connection rules corresponding to each pneumatic circuit component into a trained convolutional neural network model to obtain the at least one initial layout plan diagram; or Use the enumeration method to obtain the at least one initial layout plan diagram according to the pneumatic circuit schematic diagram and the connection rules corresponding to each pneumatic circuit component.

5. The semiconductor integrated special gas pipeline configuration method according to claim 1, wherein Before sorting the at least one initial layout plan diagram according to a preset priority to obtain a recommended layout diagram sequence, it also includes: Obtain a preset space rule; Screen at least one initial layout plan diagram that meets the preset space from the at least one initial layout plan diagram; Sort the at least one initial layout plan diagram selected according to the preset priority.

6. The semiconductor integrated special gas pipeline configuration method according to claim 1, wherein The connection rules corresponding to the pneumatic circuit components include at least one of the air port type, air flow direction, and valve state.

7. A semiconductor integrated special gas pipeline configuration device, characterized in that, Including: An acquisition module, used to acquire a pneumatic circuit schematic diagram; The pneumatic circuit schematic diagram includes a plurality of pneumatic circuit components and the connection sequence of the plurality of pneumatic circuit components; A generation module, used to generate at least one initial layout plan diagram corresponding to the pneumatic circuit schematic diagram based on the pneumatic circuit schematic diagram and the connection rules corresponding to each pneumatic circuit component; A sorting module, used to sort the at least one initial layout plan diagram according to a preset priority to obtain a recommended layout diagram sequence; Among them, sorting the at least one initial layout plan diagram according to a preset priority to obtain a recommended layout diagram sequence includes: for each of the initial layout plan diagrams, obtaining the number of welds and the minimum interface distance corresponding to the initial layout plan diagram; determining a weighted modulus corresponding to the initial layout plan diagram based on the number of welds and the minimum interface distance; and sorting the at least one initial layout plan diagram in descending order based on the weighted modulus.

8. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the program is executed by a processor, it implements the semiconductor integrated special gas pipeline configuration method according to any one of claims 1-6.

9. A computer program product, comprising a computer program, characterized in that, When the computer program is executed by a processor, it implements the semiconductor integrated special gas pipeline configuration method according to any one of claims 1-6.

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