Silicon nitride ceramic electrostatic chuck suitable for semiconductor

Abstract

The invention relates to the technical field of electrostatic chucks, and discloses a silicon nitride ceramic electrostatic chuck suitable for semiconductors, which comprises an adsorption layer, an electrode layer and a substrate layer, the adsorption layer is arranged at the lower part of the electrode layer, and the substrate layer is arranged at the upper part of the electrode layer; the top shell is arranged at the upper end of the exterior of the substrate layer, and a sealing ring is arranged at the upper end of the exterior of the top shell; the number of the steering engines is two, the two steering engines are installed on the two sides of the upper end of the top shell, strip shells are installed at the output ends of the steering engines, driving motors are arranged at the lower ends of the exteriors of the strip shells, driving screw rods are installed at the output ends of the driving motors, and L-shaped inner frames are installed at the positions, located in the strip shells, of the exteriors of the driving screw rods in a threaded fit mode; a second side shell and a first side shell are arranged on the left side and the right side of the exterior of the top shell and located at the lower end of the L-shaped inner frame correspondingly. The driving screw is used for controlling the first side shell and the second side shell to be closed, so that the ceramic electrostatic chuck is protected.

Description

Technical Field

[0001] The invention relates to the technical field of electrostatic chucks, in particular to a silicon nitride ceramic electrostatic chuck suitable for semiconductors. Background Art

[0002] Silicon nitride ceramic is an advanced ceramic material with excellent comprehensive performance. It has the characteristics of high hardness, high strength, high wear resistance, high corrosion resistance and good insulation performance. In addition, silicon nitride ceramic also has good thermal shock resistance and high thermal stability, and can maintain excellent performance in extreme environments. These characteristics make silicon nitride ceramic an ideal material for manufacturing electrostatic chucks. Electrostatic chucks apply an electric field to generate electrostatic attraction between the adsorbed object and the chuck, thereby achieving precise adsorption and positioning. As an important component of the electrostatic chuck, the performance of ceramic materials directly affects the adsorption effect and stability of the electrostatic chuck. As one of the ceramic materials of the electrostatic chuck, silicon nitride ceramic can ensure that the electrostatic chuck can maintain stable performance under harsh conditions such as high temperature and high pressure.

[0003] In the semiconductor manufacturing process, silicon nitride ceramic electrostatic chucks can be used for wafer adsorption and positioning. Its high hardness and high wear resistance can ensure that the wafer will not be damaged during the processing. At the same time, its good insulation performance can also prevent the transfer of charge between the wafer and the electrostatic chuck, thereby ensuring the processing accuracy and stability of the wafer.

[0004] In the semiconductor production industry, the size of silicon nitride ceramic electrostatic chucks is usually selected according to specific production requirements and equipment specifications. Therefore, electrostatic chucks of different sizes need to be replaced to adapt to different production tasks or equipment upgrades. For the storage of ceramic electrostatic chucks, it is necessary to prevent dust, moisture, etc. from having adverse effects on their performance. If the ceramic electrostatic chuck is taken out of the vacuum environment and packaged for storage, the ceramic electrostatic chuck is exposed to the external environment and is likely to be contaminated by pollutants such as dust and water vapor. These pollutants will affect the performance of the silicon nitride ceramic electrostatic chuck, such as adsorption capacity, thermal conductivity, etc., and thus affect subsequent use. For this reason, a silicon nitride ceramic electrostatic chuck suitable for semiconductors is proposed. Summary of the invention

[0005] 1. Technical issues to be solved

[0006] In view of the deficiencies of the prior art, the present invention provides a silicon nitride ceramic electrostatic chuck suitable for semiconductors to solve the problems raised in the above background technology.

[0007] (II) Technical solution

[0008] To achieve the above object, the present invention provides the following technical solution: a silicon nitride ceramic electrostatic chuck suitable for semiconductors, comprising:

[0009] An adsorption layer, an electrode layer and a substrate layer, wherein the adsorption layer is arranged at the lower part of the electrode layer, and the substrate layer is arranged at the upper part of the electrode layer;

[0010] A top shell is arranged on the outer upper end of the base layer, and a sealing ring is arranged on the outer upper end of the top shell;

[0011] There are two servos, and the two servos are installed on both sides of the upper end of the top shell, the output end of the servos is installed with a bar shell, the lower end of the outer side of the bar shell is provided with a driving motor, the output end of the driving motor is installed with a driving screw, the outer side of the driving screw is located inside the bar shell and is provided with an L-shaped inner frame through threaded cooperation, the L-shaped inner frame is slidably connected with the bar shell, and the left and right sides of the outer side of the top shell are respectively provided with a second side shell and a first side shell at the lower end of the L-shaped inner frame;

[0012] The sealing strip is arranged at the lower right end and the front and rear sides of the second side shell.

[0013] Preferably, the sealing strip is connected to the second side shell, and the sealing ring is connected to the top shell. The sealing strip is used to improve the sealing performance of the lower ends and front and rear sides of the first and second side shells, and the sealing ring is used to improve the sealing performance between the first and second side shells and the top shell.

[0014] Preferably, the steering gear is connected to the top shell, and the strip shell is connected to the output end of the steering gear, and the steering gear is used to control the flipping of the strip shell.

[0015] Preferably, T-shaped frames are provided on both the front and rear sides of the exterior of the first side shell and the second side shell, and the T-shaped frames are connected to the first side shell and the second side shell, and top plates are provided on both the upper and lower ends of the exterior of the T-shaped frames, and the top plates are used to fix the rubber damping block and the return spring.

[0016] Preferably, a rubber damping block is provided on the outside of the top plate and is connected to the top plate. A polypropylene ring is provided on the outside of the rubber damping block. Polypropylene itself has certain impact resistance and mechanical strength. The polypropylene ring plays a role in protecting the first side shell and the second side shell.

[0017] Preferably, the polypropylene ring is connected to the rubber damping block, and a return spring is arranged outside the rubber damping block between the polypropylene ring and the top plate, and the return spring and the rubber damping block play the role of shock absorption and energy absorption.

[0018] (III) Beneficial effects

[0019] Compared with the prior art, the present invention provides a silicon nitride ceramic electrostatic chuck suitable for semiconductors, which has the following beneficial effects:

[0020] The present invention uses a servo to control the flipping of the bar shell, and cooperates with a drive motor to control the drive screw to move the first side shell and the second side shell to close, thereby wrapping and sealing the ceramic electrostatic suction cup inside it, so that it is protected in a vacuum environment, and then it is not contaminated by dust and water vapor when it is moved from the vacuum environment to the outside for storage. During transportation and storage, the first side shell and the second side shell can play a protective role to prevent the ceramic electrostatic suction cup from mechanical damage or collision, thereby ensuring its structural integrity. In summary, the problems raised in the background technology are solved. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a three-dimensional diagram of the overall structure of the present invention;

[0022] Figure 2 This is a three-dimensional diagram of the side shell of the present invention in an open state;

[0023] Figure 3 For the present invention Figure 2 A partial enlarged view of the middle A area;

[0024] Figure 4 It is a cross-sectional view of the top plate structure of the present invention.

[0025] In the figure: 1. adsorption layer; 2. electrode layer; 3. base layer; 4. top shell; 5. sealing ring; 6. drive motor; 7. drive screw; 8. L-shaped inner frame; 9. first side shell; 10. sealing strip; 11. T-shaped frame; 12. top plate; 13. reset spring; 14. rubber damping block; 15. polypropylene ring; 16. strip shell; 17. servo; 18. second side shell. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] The present invention provides a technical solution, a silicon nitride ceramic electrostatic chuck suitable for semiconductors, see Figure 1 , Figure 2 , Figure 3 and Figure 4 ,include:

[0028] An adsorption layer 1, an electrode layer 2 and a base layer 3, wherein the adsorption layer 1 is arranged at the lower part of the electrode layer 2, and the base layer 3 is arranged at the upper part of the electrode layer 2;

[0029] A top shell 4 is arranged on the outer upper end of the base layer 3, and a sealing ring 5 is arranged on the outer upper end of the top shell 4;

[0030] There are two servos 17, and the two servos 17 are installed on both sides of the upper end of the top shell 4. The output end of the servos 17 is installed with a bar shell 16, and the outer lower end of the bar shell 16 is provided with a driving motor 6, and the output end of the driving motor 6 is installed with a driving screw 7. The outer part of the driving screw 7 is located inside the bar shell 16 and is installed with an L-shaped inner frame 8 through threaded cooperation. The L-shaped inner frame 8 is slidably connected with the bar shell 16. The left and right sides of the outer side of the top shell 4 are located at the lower end of the L-shaped inner frame 8, respectively. A second side shell 18 and a first side shell 9 are provided;

[0031] The sealing strip 10 is disposed at the lower right end and the front and rear sides of the second side shell 18 .

[0032] See also Figure 1 and Figure 2 The sealing strip 10 is connected to the second side shell 18, and the sealing ring 5 is connected to the top shell 4. The sealing strip 10 is used to improve the sealing performance of the lower ends and front and rear sides of the first side shell 9 and the second side shell 18, and the sealing ring 5 is used to improve the sealing performance between the first side shell 9 and the second side shell 18 and the top shell 4.

[0033] See also Figure 1 and Figure 2 The steering gear 17 is connected to the top shell 4 , and the strip shell 16 is connected to the output end of the steering gear 17 . The steering gear 17 is used to control the flipping of the strip shell 16 .

[0034] See also Figure 1 and Figure 2 T-shaped frames 11 are provided on both the front and rear sides of the first side shell 9 and the second side shell 18, and the T-shaped frame 11 is connected to the first side shell 9 and the second side shell 18. Top plates 12 are provided on both the upper and lower ends of the outside of the T-shaped frame 11, and the top plates 12 are used to fix the rubber damping block 14 and the return spring 13.

[0035] See also Figure 1 and Figure 2 A rubber damping block 14 is arranged on the outside of the top plate 12, and the rubber damping block 14 is connected to the top plate 12. A polypropylene ring 15 is arranged on the outside of the rubber damping block 14. Polypropylene itself has certain impact resistance and mechanical strength. The polypropylene ring 15 plays a role in protecting the first side shell 9 and the second side shell 18.

[0036] See also Figure 1 and Figure 2 The polypropylene ring 15 is connected to the rubber damping block 14. A return spring 13 is arranged outside the rubber damping block 14 and between the polypropylene ring 15 and the top plate 12. The return spring 13 and the rubber damping block 14 play the role of shock absorption and energy absorption.

[0037] This solution: When the protective structure needs to be closed, the steering gear 17 is controlled to make the bar shell 16 flip downward, and the driving motor 6 is started to rotate the driving screw 7. The L-shaped inner frame 8 and the driving screw 7 are threadedly matched and the sliding connection with the bar shell 16 convert the rotational motion of the driving screw 7 into the linear motion of the L-shaped inner frame 8, thereby driving the first side shell 9 and the second side shell 18 to move. The sealing strips 10 on one side of the first side shell 9 and the second side shell 18 are combined and squeezed to achieve sealing. When the first side shell 9 and the second side shell 18 are closed, the upper part of the inner part squeezes the sealing ring 5 to achieve sealing, and then the suction cup is It can be taken out from the vacuum environment. The polypropylene ring 15 can protect the first side shell 9 and the second side shell 18. When the suction cup falls, the polypropylene ring 15 contacts the ground, and the force is transmitted to the return spring 13 and the rubber damping block 14. The shock-absorbing structure composed of the rubber damping block 14 and the return spring 13 is an energy conversion and dissipation system. They jointly convert the kinetic energy of the polypropylene ring 15 when it falls into heat energy through the viscoelasticity of the rubber, and into elastic potential energy through the spring, and finally reduce the energy transmitted to the polypropylene ring 15 body, thereby achieving the purpose of shock absorption.

[0038] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0039] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A silicon nitride ceramic electrostatic chuck suitable for semiconductors, characterized in that: include: An adsorption layer (1), an electrode layer (2) and a base layer (3), wherein the adsorption layer (1) is arranged at the bottom of the electrode layer (2), and the base layer (3) is arranged at the top of the electrode layer (2); A top shell (4) is arranged at the outer upper end of the base layer (3), and a sealing ring (5) is arranged at the outer upper end of the top shell (4); Two steering gears (17) are provided, and the two steering gears (17) are installed on both sides of the upper end of the top shell (4); a bar shell (16) is installed at the output end of the steering gear (17); a driving motor (6) is provided at the lower end of the outer portion of the bar shell (16); a driving screw (7) is installed at the output end of the driving motor (6); an L-shaped inner frame (8) is installed on the outer portion of the driving screw (7) inside the bar shell (16) through threaded matching; the L-shaped inner frame (8) is slidably connected to the bar shell (16); a second side shell (18) and a first side shell (9) are respectively provided on the left and right sides of the outer portion of the top shell (4) at the lower end of the L-shaped inner frame (8); The sealing strip (10) is arranged at the lower right end and the front and rear sides of the second side shell (18).

2. A silicon nitride ceramic electrostatic chuck suitable for semiconductors according to claim 1, characterized in that: The sealing strip (10) is connected to the second side shell (18), and the sealing ring (5) is connected to the top shell (4).

3. The silicon nitride ceramic electrostatic chuck suitable for semiconductors according to claim 1, characterized in that: The steering gear (17) is connected to the top shell (4), and the strip shell (16) is connected to the output end of the steering gear (17).

4. The silicon nitride ceramic electrostatic chuck suitable for semiconductors according to claim 1, characterized in that: T-shaped frames (11) are provided on both the front and rear sides of the first side shell (9) and the second side shell (18), and the T-shaped frames (11) are connected to the first side shell (9) and the second side shell (18), and top plates (12) are provided on both the upper and lower ends of the T-shaped frames (11).

5. The silicon nitride ceramic electrostatic chuck suitable for semiconductors according to claim 4, characterized in that: A rubber damping block (14) is arranged outside the top plate (12), and the rubber damping block (14) is connected to the top plate (12). A polypropylene ring (15) is arranged outside the rubber damping block (14).

6. The silicon nitride ceramic electrostatic chuck suitable for semiconductors according to claim 5, characterized in that: The polypropylene ring (15) is connected to the rubber damping block (14), and a return spring (13) is arranged outside the rubber damping block (14) between the polypropylene ring (15) and the top plate (12).

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