A vacuum magnetic levitation voice coil motor and a magnetic buoyancy compensation method

Abstract

The present application provides a vacuum magnetic levitation voice coil motor and a magnetic buoyancy compensation method, which relates to the technical field of voice coil motors. The vacuum magnetic levitation voice coil motor provided by the present application includes: a stator module and a mover module. The stator module includes: a stator housing and a stator coil disposed inside the accommodation space of the stator housing. The stator coil has a coil side surface and a coil outer circumference. Among them, a first flow channel for the cooling medium to flow is formed between the stator coil and the inner wall of the stator housing. The first flow channel covers at least a part of the coil side surface and / or at least a part of the coil outer circumference of the stator coil. A coil mounting shoulder extends upward from the bottom of the accommodation space, and the stator coil is disposed on the coil mounting shoulder. The coil mounting shoulder divides a part of the accommodation space to form a C-shaped part in the first flow channel. The coil mounting shoulder of the present application makes a part of the first flow channel form a C shape, enabling the cooling medium to fully exchange heat with the stator coil.

Description

Technical Field

[0001] This specification relates to the technical field of voice coil motors, and particularly relates to a vacuum magnetic levitation voice coil motor and its magnetic buoyancy compensation method. Background Art

[0002] In related usage scenarios in the semiconductor manufacturing and detection fields, some processes need to be completed in a vacuum environment. Since the air is thin in a vacuum environment, the main heat dissipation path of a heating body depends on heat conduction. As the coil assembly is the heat source of a vacuum moving mechanism, active cooling needs to be implemented on it. In some related embodiments, the coil assembly can adopt air cooling or cooling plate cooling. However, the cooling media involved in air cooling and cooling plate cooling do not directly contact the coil assembly. The heat generated by the coil assembly needs to be first conducted to the cooling component through heat conduction, and then the cooling component takes away the heat to achieve heat dissipation. In the cooling solutions using air cooling or cooling plate cooling, since the heat generated by the coil assembly needs to pass through multiple media such as the housing filling medium and the housing for heat transfer, the heat transfer path is long, resulting in limited heat dissipation capacity. Summary of the Invention

[0003] One or more embodiments of this specification provide a vacuum magnetic levitation voice coil motor, including: a stator module and a mover module. The mover module includes: two mover back irons located on both sides of the stator module, mover magnets provided on the mover back irons, and a mover bracket connecting the two mover back irons; the stator module includes: a stator housing and a stator coil provided inside the accommodation space of the stator housing. The stator coil has a coil side and a coil outer circumference; wherein, a first flow channel for the cooling medium to flow is formed between the stator coil and the inner wall of the stator housing, and the first flow channel covers at least a part of the coil side and / or at least a part of the coil outer circumference of the stator coil; a coil installation shoulder extends upward from the bottom of the accommodation space, and the stator coil is provided on the coil installation shoulder; the coil installation shoulder separates a part of the accommodation space to form a C-shaped part in the first flow channel.

[0004] In some embodiments, the stator housing is formed with a second flow channel for the cooling medium to flow, and the second flow channel surrounds the accommodation space.

[0005] In some embodiments, the stator housing includes: a stator bottom plate, a stator frame provided on the stator bottom plate, and a sealing cover plate covering the stator frame. Among them, the stator frame and the sealing cover plate enclose the accommodation space; a cooling medium inlet and a cooling medium outlet communicating with the accommodation space are opened on the stator bottom plate.

[0006] In some embodiments, the coil mounting shoulder is located between the cooling medium inlet and the cooling medium outlet.

[0007] In some embodiments, the stator module further includes: a magnetic buoyancy adjustment mechanism; the magnetic buoyancy adjustment mechanism includes a magnetic buoyancy magnet, and the magnetic buoyancy magnet is configured to provide magnetic buoyancy to the rotor module based on the rotor magnet, and at least a partial component force of the magnetic buoyancy is opposite to the load of the rotor module.

[0008] In some embodiments, the magnetic buoyancy adjustment mechanism further includes: a magnetic buoyancy coil that surrounds the magnetic buoyancy magnet; the overall of the magnetic buoyancy coil and the magnetic buoyancy magnet is configured to provide dynamic magnetic buoyancy to the rotor module based on the rotor magnet, and at least a partial component force of the dynamic magnetic buoyancy is opposite to the load of the rotor module; in the dynamic magnetic buoyancy, the magnetic buoyancy provided by the magnetic buoyancy coil is adjusted based on the position of the rotor module relative to the stator module.

[0009] In some embodiments, the vacuum magnetic levitation voice coil motor further includes: a force sensor and a drive output unit; the force sensor is configured to obtain the acting force between the rotor module and the driven component driven by the rotor module; the drive output unit is configured to provide a control signal corresponding to the amplitude change of the acting force to the magnetic buoyancy coil based on the amplitude change of the acting force, so that the magnetic buoyancy coil and the magnetic buoyancy magnet provide the dynamic magnetic buoyancy.

[0010] In some embodiments, the magnetic buoyancy adjustment mechanism further includes: a coil bracket, the coil bracket is provided with a magnetic buoyancy magnet groove, the magnetic buoyancy magnet is disposed inside the magnetic buoyancy magnet groove, and the magnetic buoyancy coil surrounds the coil bracket.

[0011] In some embodiments, one or more coil bracket positioning pins are fixedly provided inside the stator housing, the coil bracket is provided with coil bracket positioning pin holes that match the coil bracket positioning pins, and the coil bracket is relatively fixed to the stator housing through the coil bracket positioning pins.

[0012] In some embodiments, the stator coil surrounds the magnetic buoyancy adjustment mechanism, and an insulating and heat-conducting filler is provided between the stator coil and the magnetic buoyancy adjustment mechanism; there is a gap between the insulating and heat-conducting filler and the inner wall of the accommodating space.

[0013] In some embodiments, the rotor magnet includes a T-shaped magnet and a central magnet: the T-shaped magnet is mirror-symmetrical with respect to a first plane, and the central magnet is disposed between the two T-shaped magnets; the first plane is perpendicular to the movement direction of the rotor module.

[0014] In some embodiments, a lead wire module for leading out the wire harness inside the stator housing is further provided on the stator base plate.

[0015] In some embodiments, sealing grooves are provided at both the cooling medium inlet and the cooling medium outlet; the sealing grooves are dovetail grooves or rectangular grooves, and a sealing structure is arranged in the sealing grooves; the stator frame is integrally formed by a non-magnetic material.

[0016] One or more embodiments of this specification provide a vacuum magnetic levitation voice coil motor, including: a stator module and a mover module, the mover module includes: two mover back irons provided on both sides of the stator module, a mover magnet provided on the mover back iron, and a mover bracket connecting the two mover back irons; the stator module includes: a stator housing, a stator coil provided inside the accommodation space of the stator housing, and a magnetic buoyancy adjustment mechanism provided inside the accommodation space of the stator housing; the magnetic buoyancy adjustment mechanism includes: the magnetic buoyancy magnet and the magnetic buoyancy coil, the magnetic buoyancy coil surrounds the magnetic buoyancy magnet; the magnetic buoyancy coil and the magnetic buoyancy magnet are used to provide dynamic magnetic buoyancy to the mover module based on the mover magnet, and at least a part of the component force of the dynamic magnetic buoyancy is opposite to the load of the mover module; in the dynamic magnetic buoyancy, the magnetic buoyancy provided by the magnetic buoyancy coil is adjusted based on the position of the mover module relative to the stator module.

[0017] One or more embodiments of this specification provide a magnetic buoyancy compensation method for a vacuum magnetic levitation voice coil motor, the vacuum magnetic levitation voice coil motor includes a stator module and a mover module, the stator module includes a magnetic buoyancy magnet and a magnetic buoyancy coil surrounding the magnetic buoyancy magnet; the magnetic buoyancy compensation method includes: obtaining the acting force between the mover module of the vacuum magnetic levitation voice coil motor and the driven component driven by the mover module; providing a control signal corresponding to the amplitude change of the acting force to the magnetic buoyancy coil based on the amplitude change of the acting force, so that the magnetic buoyancy coil and the magnetic buoyancy magnet provide dynamic magnetic buoyancy to the mover module.

[0018] The beneficial effects that may be brought about by the embodiments of this specification include, but are not limited to: (1) The cooling medium in the first flow channel is in direct contact with the stator coil, with a short cooling path and high cooling efficiency; (2) The first flow channel can be compatible with both liquid cooling media and gas cooling media; (3) The first flow channel and the second flow channel can respectively cool the interior of the accommodation space and the outer wall of the stator housing, which can improve the cooling efficiency of the cooling system; (4) The coil mounting shoulder provides the mounting structure of the stator coil and at the same time separates the accommodation space, making a part of the first flow channel form a C shape, enabling the cooling medium to fully exchange heat with the stator coil; (5) Provide magnetic buoyancy through the magnetic buoyancy magnet to compensate for the gravity of the mover module; (6) Provide dynamic magnetic buoyancy jointly through the magnetic buoyancy coil and the magnetic buoyancy magnet to compensate for the gravity of the mover module, and the compensation force can be adjusted according to requirements; (7) Adjust the dynamic magnetic buoyancy through the magnetic buoyancy coil and the magnetic buoyancy magnet to avoid the problem that the magnetic buoyancy acting on the mover module decreases due to the separation of the mover module; (8) Obtain the acting force between the mover module and the driven component through the force sensor, and adjust the dynamic magnetic buoyancy through the drive output unit based on this acting force to achieve dynamic real-time adjustment of magnetic buoyancy compensation; (9) Position the coil bracket through the coil bracket positioning pin, and fix the magnetic buoyancy magnet and the magnetic buoyancy coil through the arrangement of the coil bracket; (10) Evenly distribute the heat generated by the stator coil and the magnetic buoyancy adjustment mechanism by arranging insulating and heat-conducting fillers; (11) The gap between the insulating and heat-conducting filler and the inner wall of the accommodation space allows the cooling medium to pass through, thereby allowing the cooling medium to contact the magnetic buoyancy adjustment mechanism and take away the heat that the magnetic buoyancy adjustment mechanism may generate; (12) Strengthen the magnetic field of the T-shaped magnet by arranging the central magnet; (13) Realize the wiring harness extraction of the stator coil and / or the magnetic buoyancy coil through the lead-out wire module; (14) Reduce the outgassing rate of the motor in a vacuum environment through the design of the sealing groove, the material selection of the stator frame, and the processing design. It should be noted that the beneficial effects that may be produced by different embodiments are different. In different embodiments, the beneficial effects that may be produced can be any one or several combinations of the above, or any other beneficial effects that may be obtained. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] This specification will be further described by way of exemplary embodiments, and these exemplary embodiments will be described in detail through the drawings. The same numbers in the drawings represent the same structures or steps.

[0020] Figure 1 is a schematic diagram of a vacuum magnetic levitation voice coil motor according to some embodiments of this specification.

[0021] Figure 2 is a side cross-sectional view schematic diagram of a vacuum magnetic levitation voice coil motor according to some embodiments of this specification.

[0022] Figure 3Schematic diagram of an exploded view of a stator module of a vacuum magnetic levitation voice coil motor according to some embodiments of the present specification.

[0023] Figure 4 It is an exploded schematic diagram of a mover module of a vacuum magnetic levitation voice coil motor according to some embodiments of this specification.

[0024] Figure 5 , Figure 6 It is a schematic diagram of the stator base plate and stator frame of the vacuum magnetic levitation voice coil motor shown in some embodiments of this specification.

[0025] Figure 7 It is a schematic cross-sectional view of a stator base plate and a stator frame of a vacuum magnetic levitation voice coil motor according to some embodiments of the present specification.

[0026] Figure 8 It is a schematic diagram of the first flow channel of the vacuum magnetic levitation voice coil motor shown in some embodiments of the present specification.

[0027] Figure 9 It is a schematic diagram of the second flow channel of the vacuum magnetic levitation voice coil motor shown in some embodiments of the present specification.

[0028] Figure 10 It is a schematic diagram of the first flow channel and the second flow channel of the vacuum magnetic levitation voice coil motor shown in some embodiments of the present specification.

[0029] Figure 11 It is a curve diagram showing the relationship between the dynamic magnetic levitation force and the input current of the vacuum magnetic levitation voice coil motor shown in some embodiments of this specification.

[0030] Figure 12 It is a schematic diagram of the magnetization direction of each magnet of the vacuum magnetic levitation voice coil motor shown in some embodiments of this specification.

[0031] Figure 13 yes Figure 12 Schematic diagram of the forces acting on the corresponding magnets and magnetic buoyancy adjustment mechanism.

[0032] Figure 14 It is a schematic diagram of the magnetization direction of each magnet of the vacuum magnetic levitation voice coil motor shown in other embodiments of this specification.

[0033] Figure 15 yes Figure 14 Schematic diagram of the forces acting on the corresponding magnets and magnetic buoyancy adjustment mechanism.

[0034] Markings in the figure: 1 stator module; 11 stator housing; 111 first flow channel; 112 second flow channel; 113 stator bottom plate; 114 stator frame; 115 sealing cover plate; 116 cooling medium inlet; 117 cooling medium outlet; 118 coil mounting shoulder; 119 lead-out wire module; 12 stator coil; 13 magnetic buoyancy adjustment mechanism; 131 magnetic buoyancy magnet; 132 magnetic buoyancy coil; 133 coil bracket; 1331 coil bracket positioning pin; 1332 coil bracket positioning pin hole; 14 insulating and heat-conducting filler; 2 rotor module; 21 rotor back iron; 22 rotor magnet; 221 T-shaped magnet; 222 central magnet; 23 rotor bracket; 3 force sensor. Detailed implementation mode

[0035] In order to more clearly illustrate the technical solutions of the embodiments of this specification, the embodiments will be introduced in detail below with reference to the accompanying drawings. Obviously, the content described below is some examples or embodiments of this specification. For those of ordinary skill in the art, without creative efforts, the technical solutions or means disclosed in this specification can also be applied to other scenarios according to these technical contents.

[0036] It should be understood that the "system", "device", "equipment", "part" and / or "component", "unit" and / or "module" used in this specification are a method for distinguishing different components, elements, parts, portions or assemblies at different levels. However, if other words can achieve the same purpose, the said words can be replaced by other expressions.

[0037] Unless otherwise specified, the technical terms describing components, elements, etc. in this specification do not specifically refer to the singular number, but may also include the plural. Generally speaking, terms such as "including" and "comprising" only indicate the inclusion of the clearly identified steps, elements or components, and these steps, elements and components do not constitute an exclusive list. For example, the described method or device may also include other steps or components.

[0038] In the description of this specification, it should be understood that for the orientation description, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc., is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, so it cannot be understood as a limitation to this application. In the description of this specification, unless otherwise clearly defined, words such as setting, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in this specification in combination with the specific content of the technical solution.

[0039] In related usage scenarios of semiconductor manufacturing and detection, some processes need to be completed in a vacuum environment. Since the air in the vacuum environment is thin, the heat dissipation path of the heating element mainly relies on heat conduction. As the coil assembly is the heat source of the vacuum motion mechanism, active cooling needs to be implemented on it. In some related embodiments, the coil assembly can adopt air cooling or cooling plate cooling, but the cooling media involved in air cooling and cooling plate cooling do not directly contact the coil assembly. The heat generated by the coil assembly needs to be first conducted to the cooling component through heat conduction, and then the cooling component takes away the heat to achieve heat dissipation.

[0040] In some related embodiments, a vacuum motion mechanism (such as a vacuum magnetic levitation voice coil motor) may include a stator module and a mover module that moves relative to the stator module. The mover module can be levitated relative to the stator module based on magnetic force to achieve contactless support and eliminate mechanical friction. In some related embodiments, the stator module may include a coil assembly, a housing provided outside the coil assembly, and a housing filling medium provided between the coil assembly and the housing. In the above cooling solutions using air cooling or cooling plate cooling, since the heat generated by the coil assembly needs to be transferred through multiple media such as the housing filling medium and the housing, the heat transfer path is long, resulting in limited heat dissipation capacity.

[0041] Therefore, it is very crucial to effectively and reasonably maximize the cooling efficiency of the motor cooling system, and then effectively control the overall temperature rise of the motor and the platform. In one or more embodiments of this specification, a vacuum magnetic levitation voice coil motor is provided, which can directly cool the coil assembly without heat transfer through media such as the housing filling medium and the housing, and has a short heat transfer path and high cooling efficiency.

[0042] Figure 1 is a schematic diagram of a vacuum magnetic levitation voice coil motor shown in some embodiments of this specification, Figure 2 is a side cross-sectional schematic diagram of a vacuum magnetic levitation voice coil motor shown in some embodiments of this specification, Figure 3 is an exploded schematic diagram of the stator module of a vacuum magnetic levitation voice coil motor shown in some embodiments of this specification, Figure 4 is an exploded schematic diagram of the mover module of a vacuum magnetic levitation voice coil motor shown in some embodiments of this specification. Refer to Figures 1 to 4 As shown, in one or more embodiments of this specification, the vacuum magnetic levitation voice coil motor may include: a stator module 1 and a mover module 2. The mover module 2 can move relative to the stator module 1 to drive an external mechanism to move. In some embodiments, the mover module 2 can be levitated relative to the stator module 1 based on magnetic force to achieve contactless support and eliminate mechanical friction. In some embodiments, the mover module 2 moves relative to the stator module 1 in Figure 3There are gaps in the X-axis direction, Y-axis direction, and Z-axis direction. In some embodiments, the mover module 2 can generate relative displacement with the stator module 1 under electromagnetic action. In some embodiments, the mover module 2 may include: two mover back irons 21 located on both sides of the stator module 1, mover magnets 22 disposed on the mover back irons 21, and a mover bracket 23 connecting the two mover back irons 21. In some embodiments, corresponding mover magnets 22 are arranged on each mover back iron 21.

[0043] In some embodiments, the outer side of the mover back iron 21 has mounting holes that are mechanically fixed to the mover bracket 23. In some embodiments, the mover back iron 21 and the mover bracket 23 can be made of a magnetic material with high magnetic permeability. In some embodiments, the surface of the mover back iron 21 is plated with a single-layer or multi-layer high-vacuum applicability thin film. In some embodiments, the mover magnets 22 can be bonded to the mover back iron 21. In some embodiments, the mover back iron 21 is a magnetic material and forms part of the magnet magnetic circuit. In some embodiments, the mover back iron 21 also serves to enhance the magnetic field strength at the coil inside the vacuum magnetic levitation voice coil motor.

[0044] In some embodiments, the upper end of the mover back iron 21 is flush with the upper surface of the mover bracket 23 to form a C-shaped structure. In some embodiments, the upper end of the mover back iron 21 can protrude from the upper surface of the mover bracket 23 to form an H-shaped structure.

[0045] In some embodiments, to reduce the magnitude of magnetic leakage density of the vacuum motor, the mover bracket 23 can be made of a magnetic material with high magnetic permeability. In some embodiments, the surface of the mover bracket 23 is plated with a single-layer or multi-layer high-vacuum applicability thin film. In some embodiments, the upper surface of the mover bracket 23 is provided with mover module positioning pin holes for positioning the driven object. In some embodiments, the upper surface of the mover bracket 23 is provided with mover module fixed mounting holes for mounting the driven object.

[0046] In some embodiments, the stator module 1 includes: a stator housing 11 and a stator coil 12 disposed inside the accommodation space of the stator housing 11, and the stator coil 12 has a coil side surface and a coil outer periphery. In some embodiments, referring to Figure 3 as shown, the coil side surface of the stator coil 12 may include Figure 3 the left side surface and / or the right side surface of the stator coil 12 in Figure 3 as shown. In some embodiments, referring to Figure 3 as shown, the outer periphery of the stator coil 12 may include Figure 3The lower surface of the stator coil 12 therein. In some embodiments, the stator coil 12 is at least used to cooperate with the rotor magnet 22 to provide a driving force to the rotor module 2.

[0047] In some embodiments, a first flow channel 111 for the flow of a cooling medium is formed between the stator coil 12 and the inner wall of the stator housing 11, and the first flow channel 111 covers at least a part of the side surface of the coil of the stator coil 12 and / or at least a part of the outer periphery of the coil.

[0048] In some embodiments, the first flow channel 111 may cover at least a part of the side surface of the coil of the stator coil 12. For example, the first flow channel 111 is located on the left side surface and / or the right side surface of the stator coil 12 and is used to cool the left side surface and / or the right side surface of the stator coil 12.

[0049] In some embodiments, the first flow channel 111 may cover a part or all of the outer periphery of the coil of the stator coil 12. For example, the first flow channel 111 surrounds the upper surface, the front side surface, and the rear side surface of the stator coil 12, or for example, the first flow channel 111 surrounds the upper surface, the lower surface, the front side surface, and the rear side surface of the stator coil 12 and is used to cool a part of the outer peripheral surface or the entire outer peripheral surface of the stator coil 12.

[0050] In some embodiments, the first flow channel 111 may also cover both the side surface of the coil and the outer periphery of the stator coil 12 at the same time. For example, the first flow channel 111 integrally surrounds the outer surface of the stator coil 12 and is used to cool all the surfaces involved in the stator coil 12.

[0051] In some embodiments, the parts of the first flow channel 111 covering the left side surface and the right side surface of the stator coil 12 are symmetrically distributed, and their flow resistances are equal. In some embodiments, the parts of the first flow channel 111 covering the upper surface and the lower surface of the stator coil 12 are symmetrically distributed, and their flow resistances are equal.

[0052] In one or more embodiments of the present specification, a stator housing 11 is formed with a second flow channel 112 for the flow of a cooling medium, and the second flow channel 112 surrounds the accommodation space. In some embodiments, the first flow channel 111 and the second flow channel 112 are arranged in parallel. In some embodiments, the second flow channel 112 and the first flow channel 111 may be two relatively independent flow channels. In this embodiment, the cooling medium in the second flow channel 112 and the cooling medium in the first flow channel 111 may not exchange. In some other embodiments, the second flow channel 112 and the first flow channel 111 may also communicate with each other through one or more branches. In this embodiment, the cooling medium in the second flow channel 112 and the cooling medium in the first flow channel 111 may exchange. In some embodiments, the cooling medium in the second flow channel 112 and the cooling medium in the first flow channel 111 may be provided by the same cooling medium source or by different cooling medium sources.

[0053] In some embodiments, the cooling medium in the first flow channel 111 may directly cool the stator coil 12, while the cooling medium in the second flow channel 112 may cool the structure outside the stator coil 12 that is in direct or indirect contact with the stator coil 12 (such as the housing filling medium located between the stator housing 11 and the stator coil 12, or for example, the stator housing 11 itself).

[0054] In some embodiments, referring to Figure 8 As shown, the vacuum magnetic levitation voice coil motor may only include the first flow channel 111 to reduce the volume of the vacuum magnetic levitation voice coil motor and reduce the difficulty of processing and sealing. In some embodiments, referring to Figure 10 As shown, the vacuum magnetic levitation voice coil motor may also include both the first flow channel 111 and the second flow channel 112 to improve the cooling efficiency. In some other embodiments, referring to Figure 9 As shown, the vacuum magnetic levitation voice coil motor may only include the second flow channel 112.

[0055] In some embodiments, the first flow channel 111 and / or the second flow channel 112 are connected to a circulating cooling system through an external flow path. In some embodiments, the cooling medium in the first flow channel 111 and / or the second flow channel 112 circulates unidirectionally.

[0056] In one or more embodiments of the present specification, according to the different application scenarios of the vacuum magnetic levitation voice coil motor and the required cooling efficiency of the cooling system of the vacuum magnetic levitation voice coil motor, the cooling medium may be a gas cooling medium or a liquid cooling medium. In some embodiments, the gas cooling medium may be a gas such as high-pressure air or nitrogen that is safe, recyclable, and harmless to the surrounding environment. In some embodiments, the liquid cooling medium may be a liquid such as pure water or ethylene glycol with a relatively high specific heat capacity and recyclable.

[0057] In one or more embodiments of this specification, the stator housing 11 includes: a stator base plate 113, a stator frame 114 disposed on the stator base plate 113, and a sealing cover plate 115 covering the stator frame 114. Among them, the stator frame 114 and the sealing cover plate 115 enclose a containing space.

[0058] In some embodiments, the second flow channel 112 can be formed inside the outer wall of the stator frame 114. In some embodiments, the second flow channel 112 can be sealed by a vacuum welding solution.

[0059] In some embodiments, the stator base plate 113 and the stator frame 114 can be integrally processed and formed from a non-magnetic material suitable for high vacuum. In some embodiments, the integral processing of the non-magnetic material can ensure the processing accuracy of each internal feature of the stator base plate 113 and the stator frame 114 without affecting the normal operation of the internal electromagnetic components. In some embodiments, using a material suitable for high vacuum can reduce the outgassing rate of the stator base plate 113 and the stator frame 114 and improve the vacuum applicability of the motor. In some embodiments, the non-magnetic material can be 316L stainless steel, titanium alloy, and other alloy or synthetic materials.

[0060] In some embodiments, the sealing cover plate 115 can be a thin plate structure for cooperating with the stator frame 114 to seal other components inside the containing space. In some embodiments, the material of the sealing cover plate 115 can be the same as that of the stator base plate 113 and the stator frame 114.

[0061] In some embodiments, the stator base plate 113 can be perpendicular to the stator frame 114 and the sealing cover plate 115. In some embodiments, the stator base plate 113 and the stator frame 114 are integrally connected. In some embodiments, the stator base plate 113 and the stator frame 114 can be in Figure 3 an inverted T shape in the ZoY plane. In some embodiments, as shown in Figure 3 , the stator base plate 113 can be arranged on the Figure 3 lower side in, and the mover bracket 23 can be arranged on the Figure 3 upper side in. In this embodiment, the vacuum magnetic levitation voice coil motor can provide a driving force in the Figure 3 vertical direction in. In some other embodiments, the vacuum magnetic levitation voice coil motor can also be arranged in an overall horizontal direction in some usage scenarios to provide a driving force in the horizontal direction.

[0062] In some embodiments, stator mounting holes are formed on the stator base plate 113. In some embodiments, the stator mounting holes are distributed at the four corners of the stator base plate 113. In some embodiments, the stator mounting holes can be countersunk threaded holes. In some embodiments, both sides of the stator base plate 113 protrude from the stator frame 114, and the stator mounting holes are provided at the positions where the stator base plate 113 protrudes from the stator frame 114 to be compatible with the mechanical fixing method from top to bottom or from bottom to top.

[0063] In some embodiments, stator frame positioning pin holes are also formed on the bottom surface of the stator base plate 113, and the stator frame positioning pin holes can be used as the mechanical installation positioning of the stator module 1 to improve the installation accuracy of the stator module 1.

[0064] In some embodiments, referring to Figure 2 , Figure 3 as shown, two mover back irons 21 can be respectively arranged on the left and right sides of the stator frame 114 and the sealing cover plate 115 in Figure 3 to form a symmetric or substantially symmetric structure with respect to the stator frame 114 and the sealing cover plate 115 (such as the vertical plane in Figure 2 , Figure 3 ), so that the horizontal component forces of the mover magnets 22 on the mover back iron 21 can cancel each other out in Figure 3 the horizontal direction.

[0065] In some embodiments, a cooling medium inlet 116 and a cooling medium outlet 117 communicating with the accommodation space are formed on the stator base plate 113. In some embodiments, the cooling medium inlet 116 is used to supply cooling medium to the first flow channel 111 and / or the second flow channel 112. In some embodiments, the cooling medium outlet 117 is used to obtain the heat-exchanged cooling medium from the first flow channel 111 and / or the second flow channel 112. In some embodiments, the cooling medium inlet 116 and the cooling medium outlet 117 can be formed on the bottom surface of the stator base plate 113. In some embodiments, the cooling medium inlet 116 and the cooling medium outlet 117 can be respectively located on both sides of the stator base plate 113, such as the front and back sides in Figure 3 .

[0066] In some embodiments, sealing grooves are provided at both the cooling medium inlet 116 and the cooling medium outlet 117 to seal the pipelines connected to the cooling medium inlet 116 or the cooling medium outlet 117. In some embodiments, the sealing grooves can be dovetail grooves or rectangular grooves, and sealing structures are arranged in the sealing grooves. In some embodiments, the sealing grooves in the form of dovetail grooves or rectangular grooves can increase the reliability of the sealing structure and the vacuum applicability of the vacuum motor. In some embodiments, the sealing structure can be made of materials such as rubber and polyurethane.

[0067] In one or more embodiments of the present specification, the stator coil 12 is disposed between the stator frame 114 and the sealing cover plate 115. In some embodiments, there is a gap between the stator coil 12 and the side wall of the stator frame 114, and this gap forms a part of the first flow channel 111 to allow the cooling medium to pass between the stator coil 12 and the side wall of the stator frame 114, so that the cooling medium exchanges heat with the left side surface of the stator coil 12 in Figure 3 In some embodiments, there is a gap between the stator coil 12 and the sealing cover plate 115, and this gap forms a part of the first flow channel 111 to allow the cooling medium to pass between the stator coil 12 and the sealing cover plate 115, so that the cooling medium exchanges heat with the right side surface of the stator coil 12 in Figure 3 In some other embodiments, there are gaps both between the stator coil 12 and the side wall of the stator frame 114 and between the stator coil 12 and the sealing cover plate 115.

[0068] In one or more embodiments of the present specification, the stator frame 114 extends upward from the bottom of the accommodating space to form a coil mounting shoulder 118. In some embodiments, the stator coil 12 is disposed on the coil mounting shoulder 118.

[0069] In some embodiments, referring to Figure 3 、 Figure 5 、 Figure 7 As shown, the coil mounting shoulder 118 can be a boss extending upward from the bottom of the accommodating space of the stator frame 114. It can serve as an installation and positioning structure for the stator coil 12, and at the same time can separate the cooling medium in the accommodating space, increasing the cooling path to improve the cooling efficiency. In some embodiments, the coil mounting shoulder 118 has a platform surface for supporting the stator coil 12, such as Figure 7 the upper surface of the coil mounting shoulder 118 shown in Figure 7 In some embodiments, the length of the platform surface of the coil mounting shoulder 118 in the left-right direction in Figure 7 is less than the length of the stator coil 12 in the left-right direction in Figure 7 In some other embodiments, the length of the platform surface of the coil mounting shoulder 118 in the left-right direction in Figure 7 matches the length of the stator coil 12 in the left-right direction in

[0070] In some embodiments, the shape of the coil mounting shoulder 118 can be rectangular. In some embodiments, there is an arc transition between the coil mounting shoulder 118 and the bottom of the accommodating space of the stator frame 114 to guide the flow of the cooling medium and prevent the cooling medium from forming eddy currents at the corners, resulting in heat accumulation.In some embodiments, the coil mounting shoulder 118 is located between the cooling medium inlet 116 and the cooling medium outlet 117. In some embodiments, the cooling medium enters from one side of the coil mounting shoulder 118 and flows out from the other side of the coil mounting shoulder 118.

[0071] In some embodiments, the coil mounting shoulder 118 divides a part of the accommodation space to form a C-shaped part in the first flow channel 111. In some embodiments, the C-shaped part in the first flow channel 111 means that the first flow channel 111 forms a C-shape in the thickness direction of the coil (e.g., Figure 7 the front-back direction in Figure 7 . As shown by the dashed line in

[0072] In some embodiments, a part or all of the lower surface of the stator coil 12 abuts against the coil mounting shoulder 118, thereby dividing the accommodation space, so that the cooling medium entering from the cooling medium inlet 116 cannot leave from below the stator coil 12 along a shorter path to the cooling medium outlet 117, but makes the cooling medium entering from the cooling medium inlet 116 follow the Figure 7 direction shown by the dashed line in

[0073] In some embodiments, the stator coil 12 can be wound with a vacuum-applicable enameled wire. In some embodiments, the stator coil 12 can be a single-layer or multi-layer structure of a runway type. In some embodiments, an adjustable-amplitude drive current can be applied to the stator coil 12. Under the excitation of the drive current, the stator coil 12 can have an electromagnetic interaction with the mover module 2, and then generate a driving force corresponding to the degree of freedom.

[0074] In one or more embodiments of this specification, as shown in Figure 4 , the mover magnet 22 includes a T-shaped magnet 221 and a central magnet 222. In some embodiments, a T-shaped magnet 221 and a central magnet 222 are provided on each of the two mover back irons 21.

[0075] In some embodiments, the T-shaped magnet 221 can be made of neodymium iron boron or samarium cobalt material with a high magnetic energy product, and will undergo multi-layer surface treatment to improve its vacuum applicability under different working conditions. In some embodiments, the central magnet 222 is an H-shaped magnet steel. In some embodiments, after the magnetic field generated by the central magnet 222 is coupled with the magnetic field of the T-shaped magnet 221, the magnetic induction intensity of the main magnetic field will increase, and the magnetic leakage density in the outer region of the mover back iron 21 will decrease. In some embodiments, the central magnet 222 can be made of neodymium iron boron or samarium cobalt material with a high magnetic energy product, and will undergo multi-layer surface treatment. In some embodiments, the surface treatment method of the central magnet 222 is the same as that of the T-shaped magnet 221.

[0076] In some embodiments, on the same mover back iron 21, the T-shaped magnet 221 is mirror symmetric with respect to the first plane, for example, mirror symmetric with respect to Figure 4 the first plane A in. In some embodiments, the central magnet 222 is disposed between two T-shaped magnets 221. In some embodiments, the first plane is perpendicular to the movement direction of the mover module 2 (i.e., the movement direction of the mover back iron 21).

[0077] In some embodiments, the magnetization direction of the T-shaped magnet 221 is perpendicular to the plane of the mover back iron 21. In some embodiments, the magnetization direction of the central magnet 222 is parallel to the mover back iron 21.

[0078] Figure 12 is a schematic diagram of the magnetization directions of the magnets of the vacuum magnetic levitation voice coil motor according to some embodiments of this specification. In some embodiments, referring to Figure 12 as shown, a pair of T-shaped magnets are provided on the left mover back iron 21, such as the first T-shaped magnet 911 and the second T-shaped magnet 912. In some embodiments, the distances from the first T-shaped magnet 911 and the second T-shaped magnet 912 to the stator coil 12 are equal. In some embodiments, another pair of T-shaped magnets are provided on the right mover back iron 21, such as the third T-shaped magnet 913 and the fourth T-shaped magnet 914. In some embodiments, the distances from the third T-shaped magnet 913 and the fourth T-shaped magnet 914 to the stator coil 12 are equal. The first T-shaped magnet 911 and the second T-shaped magnet 912 on the left are symmetric with respect to the third T-shaped magnet 913 and the fourth T-shaped magnet 914 on the right with respect to the stator coil plane B where the stator coil 12 is located.

[0079] In some embodiments, referring to Figure 12 as shown, a left central magnet 915 is provided between the first T-shaped magnet 911 and the second T-shaped magnet 912, and a right central magnet 916 is provided between the third T-shaped magnet 913 and the fourth T-shaped magnet 914.

[0080] In some embodiments, the magnetization directions of two T-shaped magnets that are symmetric with respect to the stator coil plane B in the two mover back irons 21 are the same. For example, the magnetization directions of the first T-shaped magnet 911 and the third T-shaped magnet 913 are the same. For example, the magnetization directions of the second T-shaped magnet 912 and the fourth T-shaped magnet 914 are the same. Exemplarily, the magnetization directions of both the first T-shaped magnet 911 and the third T-shaped magnet 913 are Figure 12 the negative Y-axis direction in Figure 12 , and the magnetization directions of both the second T-shaped magnet 912 and the fourth T-shaped magnet 914 are

[0081] the positive Y-axis direction in

[0082] In the above embodiments, as shown in Figure 12 , the stator coil 12 is arranged in the vertical direction (e.g., the Z-axis direction in Figure 12 ). The two T-shaped magnets on the same mover back iron 21 are arranged in the vertical direction (e.g., the Z-axis direction in Figure 12 ). Exemplarily, the first T-shaped magnet 911 and the second T-shaped magnet 912 are arranged in the vertical direction, and the third T-shaped magnet 913 and the fourth T-shaped magnet 914 are arranged in the vertical direction.

[0083] Figure 14 is a schematic diagram of the magnetization directions of the magnets of the vacuum magnetic levitation voice coil motor according to some other embodiments of this specification. As shown in Figure 14 , a pair of T-shaped magnets are provided on the upper mover back iron 21, such as the fifth T-shaped magnet 921 and the sixth T-shaped magnet 922. In some embodiments, the distances of the fifth T-shaped magnet 921 and the sixth T-shaped magnet 922 from the stator coil 12 are equal. In some embodiments, another pair of T-shaped magnets are provided on the lower mover back iron 21, such as the seventh T-shaped magnet 923 and the eighth T-shaped magnet 924. In some embodiments, the distances of the seventh T-shaped magnet 923 and the eighth T-shaped magnet 924 from the stator coil 12 are equal. The upper fifth T-shaped magnet 921 and sixth T-shaped magnet 922 are symmetric with respect to the stator coil plane C where the stator coil 12 is located with the lower seventh T-shaped magnet 923 and eighth T-shaped magnet 924.

[0084] In some embodiments, as shown in Figure 14 , an upper center magnet 925 is provided between the fifth T-shaped magnet 921 and the sixth T-shaped magnet 922, and a lower center magnet 926 is provided between the seventh T-shaped magnet 923 and the eighth T-shaped magnet 924.

[0085] In some embodiments, the magnetization directions of two T-shaped magnets that are symmetric with respect to the stator coil plane C in the two mover back irons 21 are the same. For example, the magnetization directions of the fifth T-shaped magnet 921 and the seventh T-shaped magnet 923 are the same. For example, the magnetization directions of the sixth T-shaped magnet 922 and the eighth T-shaped magnet 924 are the same. Exemplarily, the magnetization directions of both the fifth T-shaped magnet 921 and the seventh T-shaped magnet 923 are Figure 14 the negative Y-axis direction in Figure 14 and the magnetization directions of both the sixth T-shaped magnet 922 and the eighth T-shaped magnet 924 are

[0086] the positive Y-axis direction in

[0087] In the above embodiments, referring to Figure 14 shown, the stator coil 12 is arranged in the horizontal direction (e.g., Figure 14 the Z-axis direction in Figure 14 ). The two T-shaped magnets on the same mover back iron 21 are arranged in the horizontal direction (e.g.,

[0088] the Z-axis direction in

[0089] Exemplarily, the fifth T-shaped magnet 921 and the sixth T-shaped magnet 922 are arranged in the horizontal direction, and the seventh T-shaped magnet 923 and the eighth T-shaped magnet 924 are arranged in the horizontal direction.

[0090] In one or more embodiments of the present specification, the stator module 1 further includes: a magnetic buoyancy adjustment mechanism 13. In some embodiments, the magnetic buoyancy adjustment mechanism 13 includes a magnetic buoyancy magnet 131, and the magnetic buoyancy magnet 131 has a constant magnetic field. In some embodiments, the magnetic buoyancy magnet 131 is used to provide magnetic buoyancy to the mover module 2 (and the object carried by the mover module 2 or the mechanism fixedly connected to the mover module 2) based on the mover magnet 22, and at least a partial component force of the magnetic buoyancy is opposite to the load of the mover module 2. In some embodiments, the load of the mover module 2 may include the self-gravity of the mover module 2. In some embodiments, the load of the mover module 2 may include the self-gravity of the mover module 2 and the gravity of the object carried by the mover module 2. In some embodiments, the load of the mover module 2 may include the self-gravity of the mover module 2 and the force applied to the mover module 2 by other mechanisms.In some embodiments, the direction of the magnetic buoyancy force provided by the magnetic buoyancy magnet 131 is opposite to the load direction of the mover module 2. In some embodiments, there is an included angle between the direction of the magnetic buoyancy force provided by the magnetic buoyancy magnet 131 and the load direction of the mover module 2, and at the same time, a component force of the direction of the magnetic buoyancy force provided by the magnetic buoyancy magnet 131 is opposite to the load direction of the mover module 2.

[0091] Figure 13 is Figure 12 the force diagram of the corresponding magnets and the magnetic buoyancy adjustment mechanism. Continuing with the previous example, refer to Figure 12 、 Figure 13 As shown, the magnetic buoyancy adjustment mechanism 13 (such as the magnetic buoyancy magnet 131) is located in the middle of the two mover back irons 21, and the two mover back irons 21 are arranged symmetrically with respect to the plane where the magnetic buoyancy adjustment mechanism 13 is located (such as the stator coil plane B).

[0092] In some embodiments, as shown in Figure 13 , the magnetic field direction provided by the magnetic buoyancy adjustment mechanism 13 (such as the magnetization direction of the magnetic buoyancy magnet 131) is opposite to the magnetization direction of the two T-shaped magnets located above it, so as to provide an upward repulsive force to the two T-shaped magnets located above it. In some embodiments, the magnetic field direction provided by the magnetic buoyancy adjustment mechanism (such as the magnetization direction of the magnetic buoyancy magnet 131) is the same as the magnetization direction of the two T-shaped magnets located below it, so as to provide an upward attractive force to the two T-shaped magnets located below it. Based on the upward repulsive force and the upward attractive force, an upward magnetic buoyancy force is provided to the entire mover module 2.

[0093] Exemplarily, as shown in Figure 13 , the magnetic buoyancy adjustment mechanism 13 provides a repulsive force F 911 to the left and upward to the first T-shaped magnet 911, and at the same time provides a repulsive force F 913 to the right and upward to the third T-shaped magnet 913. The repulsive force F 911 and the repulsive force F 913 have the same magnitude and opposite directions of the component forces in the Y-axis direction, so they cancel each other out; the repulsive force F 911 and the repulsive force F 913 have the same direction of the component forces in the Z-axis direction, so they are superimposed on each other, thereby providing an upward first resultant force (F 第一合力 = F 911 + F 913 ) to the mover module 2.

[0094] The magnetic buoyancy adjustment mechanism 13 provides an attractive force F 912 to the right and upward to the second T-shaped magnet 912, and at the same time provides an attractive force F 914 to the left and upward to the fourth T-shaped magnet 914. The attractive force F 912 and the attractive force F 914The magnitudes of the component forces in the Y-axis direction are the same and their directions are opposite, so they cancel each other out; the gravitational force F 912 and the gravitational force F 914 have the same direction in the Z-axis direction, so they are superimposed on each other, thus providing an upward second resultant force (F 第二合力 = F 912 + F 914 ) to the mover module 2.

[0095] The mover module 2 obtains an upward movement tendency based on the total resultant force (F 总合力 = F 第一合力 + F 第二合力 ) of the first resultant force and the second resultant force, so that the mover module 2 realizes magnetic levitation under the action of the magnetic levitation force provided by the magnetic levitation adjustment mechanism 13.

[0096] Figure 15 is Figure 14 the force diagram of the corresponding magnets and the magnetic levitation adjustment mechanism. Continuing with the previous example, see Figure 14 , Figure 15 As shown, the magnetic levitation adjustment mechanism 13 (such as the magnetic levitation magnet 131) is located in the middle of the two mover back irons 21, and the two mover back irons 21 are arranged symmetrically with respect to the plane where the magnetic levitation adjustment mechanism 13 is located (such as the stator coil plane C) in a mirror image manner.

[0097] In some embodiments, as shown in Figure 15 , the magnetic field direction provided by the magnetic levitation adjustment mechanism 13 (such as the magnetization direction of the magnetic levitation magnet 131) provides an upward repulsive force to the two T-shaped magnets located above it. In some embodiments, the magnetic field direction provided by the magnetic levitation adjustment mechanism (such as the magnetization direction of the magnetic levitation magnet 131) provides an upward attractive force to the two T-shaped magnets located below it. Based on the upward repulsive force and the upward attractive force, an upward magnetic levitation force is provided to the whole of the mover module 2.

[0098] Exemplarily, as shown in Figure 15 , the magnetic levitation adjustment mechanism 13 provides a repulsive force F 921 towards the fifth T-shaped magnet 921 in the upper right direction, and at the same time provides a repulsive force F 922 towards the sixth T-shaped magnet 922 in the upper left direction. The repulsive force F 921 and the repulsive force F 922 have the same magnitude and opposite directions in the Z-axis direction, so they cancel each other out; the repulsive force F 921 and the repulsive force F 922 have the same direction in the Y-axis direction, so they are superimposed on each other, thus providing an upward third resultant force (F 第三合力 = F 921 + F 922 ) to the mover module 2.

[0099] The magnetic buoyancy adjustment mechanism 13 provides an upward-left gravitational force F to the seventh T-shaped magnet 923 923 and simultaneously provides an upward-right gravitational force F to the eighth T-shaped magnet 924 924 . The gravitational force F 923 and the gravitational force F 924 have the same magnitude and opposite directions of the component forces in the Z-axis direction, so they cancel each other out; the gravitational force F 923 and the gravitational force F 924 have the same direction of the component forces in the Y-axis direction, so they are superimposed on each other, thereby providing an upward fourth resultant force (F 第四合力 = F 923 + F 924 ) to the mover module 2

[0100] The mover module 2 obtains an upward movement tendency based on the total resultant force (F 总合力 = F 第三合力 + F 第四合力 ) of the third resultant force and the fourth resultant force, so that the mover module 2 realizes magnetic levitation under the action of the magnetic buoyancy provided by the magnetic buoyancy adjustment mechanism 13

[0101] In vacuum manufacturing and testing equipment, the motion platform (such as a vertical displacement platform) needs to ensure that the actuator achieves nanometer-level accuracy and ultra-high-speed positioning in a vacuum environment. In some related embodiments, the motion platform of the equipment can adopt a combined structure of coarse and fine motion (such as the motion coupling of a motor with a large stroke and low accuracy and a motor with a small stroke and high accuracy). In some related embodiments, a high-precision motor (such as a vacuum magnetic levitation voice coil motor) needs to complete the high-precision positioning of the vertical drive module of the motion platform (such as a vertical displacement platform) on the premise of compensating for the vertical driving mass

[0102] In some related usage scenarios, since the motor is relatively close to the object to be processed, the thermal deformation and thermal drift of the motion platform have a more obvious impact on the overall accuracy of the equipment, and the influence of the motor's heat generation on the overall thermal deformation and accuracy of the equipment cannot be compensated by algorithms. Therefore, in some related embodiments, a high-precision motor (such as a vertical drive motor or a lateral drive motor) can be used in combination with a gravity compensation device to provide gravity compensation for the driven object. The vertical drive motor or the lateral drive motor mainly provides the driving force for driving the vertical motion mechanism to perform vertical displacement or driving the lateral motion mechanism to perform lateral displacement, without providing or providing less force for offsetting the gravity of the driven object (such as platform components and objects to be processed, etc.). In some other related embodiments, a high-precision motor and a gravity compensation device can also be combined together to form an integrated structure

[0103] However, the compensation force provided by the gravity compensation device changes with the vertical displacement or lateral displacement. In addition, in vertical driving, it is also difficult for the compensation force provided by the gravity compensation device to be fully and real-time matched with the vertical driving mass. Based on this, in one or more embodiments of this specification, a vacuum magnetic levitation voice coil motor capable of providing an adjustable compensation force is provided based on the design of the magnetic buoyancy adjustment mechanism 13. In some embodiments, a vacuum magnetic levitation voice coil motor that can be fully and real-time matched with the vertical driving mass is further provided based on the magnetic buoyancy adjustment mechanism 13 and the force sensor 3.

[0104] Based on this, in one or more embodiments of this specification, the vacuum magnetic levitation voice coil motor includes a magnetic buoyancy adjustment mechanism 13 with adjustable compensation force, which can dynamically and real-time adjust gravity compensation (for example, realize the dynamic and real-time adjustment of the vertical compensation force of the vertical driving motor). In some embodiments, the magnetic buoyancy adjustment mechanism 13 includes: a magnetic buoyancy magnet 131 and a magnetic buoyancy coil 132, and the magnetic buoyancy coil 132 surrounds the magnetic buoyancy magnet 131. In some embodiments, the magnetic field of the magnetic buoyancy coil 132 is superimposed on the magnetic field of the magnetic buoyancy magnet 131. In some embodiments, the whole of the magnetic buoyancy coil 132 and the magnetic buoyancy magnet 131 is used to provide a dynamic magnetic buoyancy to the mover module 2 based on the mover magnet 22, and at least a part of the component force of the dynamic magnetic buoyancy is opposite to the load of the mover module 2.

[0105] In some embodiments, the load of the mover module 2 may include the self-gravity of the mover module 2. In some embodiments, the load of the mover module 2 may include the self-gravity of the mover module 2 and the gravity of the object carried by the mover module 2. In some embodiments, the load of the mover module 2 may include the self-gravity of the mover module 2 and the acting force applied to the mover module 2 by other mechanisms.

[0106] In some embodiments, the direction of the dynamic magnetic buoyancy provided by the whole of the magnetic buoyancy coil 132 and the magnetic buoyancy magnet 131 is opposite to the load direction of the mover module 2. In some embodiments, there is an included angle between the direction of the dynamic magnetic buoyancy provided by the whole of the magnetic buoyancy coil 132 and the magnetic buoyancy magnet 131 and the load direction of the mover module 2, and at the same time, a certain component force of the direction of the dynamic magnetic buoyancy provided by the whole of the magnetic buoyancy coil 132 and the magnetic buoyancy magnet 131 is opposite to the load direction of the mover module 2.

[0107] In some embodiments, the magnetic buoyancy magnet 131 provides a first magnetic buoyancy force to the mover module 2 based on the mover magnet 22, and the magnetic buoyancy coil 132 provides a second magnetic buoyancy force to the mover module 2 based on the mover magnet 22. In some embodiments, the first magnetic buoyancy force and the second magnetic buoyancy force are superimposed to form the aforementioned dynamic magnetic buoyancy force. In some embodiments, the magnitude of the second magnetic buoyancy force provided by the magnetic buoyancy coil 132 to the mover module 2 based on the mover magnet 22 is variable, adjustable, and controllable, thereby achieving dynamic adjustment. In some embodiments, the magnitude of the second magnetic buoyancy force acting on the mover module 2 is adjusted by adjusting the current intensity of the magnetic buoyancy coil 132.

[0108] In some embodiments, among the dynamic magnetic buoyancy forces provided by the magnetic buoyancy coil 132 and the magnetic buoyancy magnet 131 as a whole to the mover module 2, the second magnetic buoyancy force provided by the magnetic buoyancy coil 132 is adjusted based on the position of the mover module 2 relative to the stator module 1 (for example, active adjustment).

[0109] In some embodiments, when the mover module 2 moves away from the magnetic buoyancy magnet 131, since the position and magnetic field of the magnetic buoyancy magnet 131 are relatively constant, the first magnetic buoyancy force provided by the magnetic buoyancy magnet 131 to the mover module 2 decreases. At this time, the second magnetic buoyancy force provided by the magnetic buoyancy coil 132 is adjusted so that the second magnetic buoyancy force increases based on the change in the position of the mover module 2 relative to the stator module 1 (for example, the mover module 2 moves away from the stator module 1), so that the dynamic magnetic buoyancy force is equal to or matches the designed compensation force.

[0110] In some embodiments, when the mover module 2 approaches the magnetic buoyancy magnet 131, since the position and magnetic field of the magnetic buoyancy magnet 131 are relatively constant, the first magnetic buoyancy force provided by the magnetic buoyancy magnet 131 to the mover module 2 increases. At this time, the second magnetic buoyancy force provided by the magnetic buoyancy coil 132 is adjusted so that the second magnetic buoyancy force decreases based on the change in the position of the mover module 2 relative to the stator module 1 (for example, the mover module 2 approaches the stator module 1), so that the dynamic magnetic buoyancy force is equal to or matches the designed compensation force.

[0111] In some embodiments, matching the dynamic magnetic buoyancy force with the designed compensation force may include: keeping the magnitude of the dynamic magnetic buoyancy force acting on the mover module 2 constant.

[0112] In some embodiments, matching the dynamic magnetic buoyancy force with the designed compensation force may include: making the magnitude of the dynamic magnetic buoyancy force equal to or maintaining a constant ratio to the magnitude of the gravity of the mover module 2, and making the direction of the dynamic magnetic buoyancy force opposite to the direction of the gravity of the mover module 2.

[0113] In some embodiments, matching the dynamic magnetic buoyancy force with the design compensation force may include: making the magnitude of the dynamic magnetic buoyancy force equal to or maintaining a constant ratio to the magnitude of the gravity of the mover module 2 and the components thereon, and making the direction of the dynamic magnetic buoyancy force opposite to the direction of the gravity of the mover module 2 and the components thereon, etc.

[0114] In some embodiments, matching the dynamic magnetic buoyancy force with the design compensation force may include: adjusting the magnitude of the dynamic magnetic buoyancy force based on the design usage requirements, such as increasing or decreasing the dynamic magnetic buoyancy force.

[0115] In some embodiments, the direction of the second magnetic buoyancy force provided by the magnetic buoyancy coil 132 may be opposite to or the same as the direction of the gravity of the mover module 2 or the direction of the gravity of the mover module 2 and the components thereon.

[0116] Exemplarily, the first magnetic buoyancy force provided by the magnetic buoyancy magnet 131 to the mover module 2 is greater than the gravity of the mover module 2 or the gravity of the mover module 2 and the components thereon, and the direction of the second magnetic buoyancy force provided by the magnetic buoyancy coil 132 is set to be the same as the direction of the gravity of the mover module 2 or the direction of the gravity of the mover module 2 and the components thereon, so that the resultant force of the first magnetic buoyancy force, the second magnetic buoyancy force and the load is zero.

[0117] Exemplarily, the first magnetic buoyancy force provided by the magnetic buoyancy magnet 131 to the mover module 2 is less than the gravity of the mover module 2 or the gravity of the mover module 2 and the components thereon, and the direction of the second magnetic buoyancy force provided by the magnetic buoyancy coil 132 is set to be opposite to the direction of the gravity of the mover module 2 or the direction of the gravity of the mover module 2 and the components thereon, so that the resultant force of the first magnetic buoyancy force, the second magnetic buoyancy force and the load is zero.

[0118] In some embodiments, the direction of the second magnetic buoyancy force provided to the mover module 2 is adjusted based on the current direction of the magnetic buoyancy coil 132.

[0119] Exemplarily, refer to Figure 12As shown, the current direction of the upper part of the magnetic buoyancy coil 132 is perpendicular to the paper surface and outward. Since the magnetic induction line direction of the magnetic field where the upper part of the magnetic buoyancy coil 132 is located (i.e., the magnetic induction line direction of the first T-shaped magnet 911 and the third T-shaped magnet 913) is to the left, based on the Ampere force principle, the upper part of the magnetic buoyancy coil 132 is subjected to a downward Ampere force, thereby providing an upward second magnetic buoyancy to the mover module 2 when the stator module 1 is fixed. At the same time, the current direction of the lower part of the magnetic buoyancy coil 132 is perpendicular to the paper surface and inward. Since the magnetic induction line direction of the magnetic field where the lower part of the magnetic buoyancy coil 132 is located (i.e., the magnetic induction line direction of the second T-shaped magnet 912 and the fourth T-shaped magnet 914) is to the right, based on the Ampere force principle, the lower part of the magnetic buoyancy coil 132 is also subjected to a downward Ampere force, thereby providing an upward second magnetic buoyancy to the mover module 2 when the stator module 1 is fixed. Conversely, in some other embodiments, the current direction of the upper part of the magnetic buoyancy coil 132 can be perpendicular to the paper surface and inward, and at the same time, the current direction of the lower part of the magnetic buoyancy coil 132 is perpendicular to the paper surface and outward, thereby providing a downward second magnetic buoyancy to the mover module 2 based on a similar principle.

[0120] Exemplarily, referring to Figure 14 As shown, the current direction of the right side of the magnetic buoyancy coil 132 is perpendicular to the paper surface and outward. Since the magnetic induction line direction of the magnetic field where the right side of the magnetic buoyancy coil 132 is located (i.e., the magnetic induction line direction of the fifth T-shaped magnet 921 and the seventh T-shaped magnet 923) is upward, based on the Ampere force principle, the right side of the magnetic buoyancy coil 132 is subjected to a leftward Ampere force, thereby providing a rightward second magnetic buoyancy to the mover module 2 when the stator module 1 is fixed. At the same time, the current direction of the left side of the magnetic buoyancy coil 132 is perpendicular to the paper surface and inward. Since the magnetic induction line direction of the magnetic field where the left side of the magnetic buoyancy coil 132 is located (i.e., the magnetic induction line direction of the sixth T-shaped magnet 922 and the eighth T-shaped magnet 924) is downward, based on the Ampere force principle, the left side of the magnetic buoyancy coil 132 is also subjected to a leftward Ampere force, thereby providing a rightward second magnetic buoyancy to the mover module 2 when the stator module 1 is fixed. Conversely, in some other embodiments, the current direction of the right side of the magnetic buoyancy coil 132 can be perpendicular to the paper surface and inward, and at the same time, the current direction of the left side of the magnetic buoyancy coil 132 is perpendicular to the paper surface and outward, thereby providing a leftward second magnetic buoyancy to the mover module 2 based on a similar principle.

[0121] In some embodiments, the principle by which the stator coil 12 provides a driving force to the mover module 2 is similar to the principle by which the magnetic buoyancy coil 132 provides a second magnetic buoyancy to the mover module 2, so it will not be elaborated here.

[0122] In some embodiments, the magnetic buoyancy magnet 131 and the magnetic buoyancy coil 132 can be used to provide gravity compensation for part of the mover module 2 or the mover module 2 and its components thereon, and the stator coil 12 provides the other part of the gravity compensation and the driving force. In some embodiments, the magnetic buoyancy magnet 131 and the magnetic buoyancy coil 132 can be used to provide complete gravity compensation for the mover module 2 or the mover module 2 and its components thereon, and the stator coil 12 only needs to provide its driving force.

[0123] In some embodiments, the magnetic buoyancy coil 132 can be wound with vacuum-applicable enameled wire. In some embodiments, there is a gap between the magnetic buoyancy coil 132 and the inner walls on both sides of the accommodating space. In some embodiments, the magnetic buoyancy coil 132 can be of a racetrack-shaped single-layer or multi-layer structure. In some embodiments, a drive current with an adjustable amplitude can be applied to the magnetic buoyancy coil 132. After the dynamic magnetic field of the magnetic buoyancy coil 132 is superimposed with the magnetic field of the magnetic buoyancy magnet 131, it interacts with the magnetic field of the mover module 2 to generate a dynamically adjustable dynamic magnetic buoyancy in real time.

[0124] In some embodiments, taking the vacuum magnetic levitation voice coil motor for vertical drive as an example, a vertical magnetic levitation compensation force (such as the first magnetic buoyancy) can be generated under the interaction between the magnetic buoyancy magnet 131 and the mover magnet 22 of the mover module 2. In an ideal case, this magnetic levitation compensation force is equal in magnitude and opposite in direction to the gravity of the vertically driven mass. However, within the vertical stroke range, the output curve of the first magnetic buoyancy is a parabola, and the resultant force of the first magnetic buoyancy and the gravity changes with the stroke. In some embodiments, introducing the magnetic buoyancy coil 132 can dynamically and real-time adjust the amplitude of the magnetic levitation compensation force (such as the amplitude of the resultant force of the first magnetic buoyancy and the second magnetic buoyancy) of the vacuum magnetic levitation voice coil motor for vertical drive, so that the dynamic magnetic buoyancy within the stroke range can completely compensate for the gravity of the vertically driven mass, thereby improving the control accuracy of the vertical drive module (such as the vacuum magnetic levitation voice coil motor for vertical drive).

[0125] In some embodiments, the magnetic buoyancy magnet 131 can be a magnetic buoyancy magnetic steel. In some embodiments, the magnetic buoyancy magnetic steel can be made of neodymium iron boron or samarium cobalt with a high magnetic energy product, and will be subjected to multi-layer surface treatment to improve its vacuum applicability under different working conditions.

[0126] In one or more embodiments of the present specification, the vacuum magnetic levitation voice coil motor further includes: a force sensor 3 and a drive output unit. In some embodiments, the force sensor 3 is configured to obtain the acting force between the mover module 2 and the driven member driven by the passive mover module 2, and this acting force reflects the force that needs to be compensated in real time additionally, that is, the dynamic magnetic buoyancy force that the magnetic buoyancy coil 132 and the magnetic buoyancy magnet 131 need to provide. In some embodiments, the force sensor 3 feeds back the dynamic magnetic buoyancy force that needs to be compensated in real time additionally to the drive output unit. In some embodiments, the drive output unit is configured to provide a control signal corresponding to the amplitude change of the acting force to the magnetic buoyancy coil 132 based on the amplitude change of the acting force between the mover module 2 and the driven member driven by the passive mover module 2, so as to change the magnitude of the second magnetic buoyancy force, and thus change the magnitude of the dynamic magnetic buoyancy force provided by the magnetic buoyancy coil 132 and the magnetic buoyancy magnet 131 to the mover module 2 and the driven member.

[0127] In some embodiments, the drive output unit inputs a current with a dynamically changing amplitude to the magnetic buoyancy coil 132 in real time based on the amplitude change of the dynamic magnetic buoyancy force that needs to be compensated in real time additionally provided by the force sensor 3 (for example, based on the amplitude change of the second magnetic buoyancy force provided by the magnetic buoyancy coil 132 in the dynamic magnetic buoyancy force). The output magnetic field of the magnetic buoyancy coil 132 is linearly related to the amplitude of its current. Exemplarily, referring to Figure 11 As shown, from F = BIL (where F is the Ampere force, B is the magnetic induction intensity, I is the current intensity of the magnetic buoyancy coil 132, and L is the effective length of the magnetic buoyancy coil 132 in the magnetic field), it can be seen that the second magnetic buoyancy force provided by the magnetic buoyancy coil 132 has a linear relationship with the amplitude of its current.

[0128] In some embodiments, referring to Figure 2 As shown, the force sensor 3 can be installed on the top of the mover module 2. In some embodiments, the force sensor 3 can be specifically installed on the mover bracket 23. In some embodiments, the mover bracket 23 provides a mounting surface for the driven object, and the force sensor 3 is disposed above the mounting surface and is closely attached to the mounting surface.

[0129] In some embodiments, the force sensor 3 can adopt a patch type structure or a pin column type structure, which has advantages such as small volume and convenient installation.

[0130] In one or more embodiments of this specification, the magnetic buoyancy adjustment mechanism 13 further includes: a coil bracket 133. The coil bracket 133 is provided with a magnetic buoyancy magnet groove. The magnetic buoyancy magnet 131 is disposed inside the magnetic buoyancy magnet groove, and the magnetic buoyancy coil 132 surrounds the coil bracket 133. In some embodiments, the coil bracket 133 has a strip-like structure. In some embodiments, the magnetic buoyancy magnet groove is opened in the middle of the coil bracket 133, and the size of the magnetic buoyancy magnet groove is slightly larger than the size of the magnetic buoyancy magnet 131. In some embodiments, the magnetic buoyancy magnet groove can penetrate through the coil bracket 133. In some embodiments, the thickness of the coil bracket 133 is greater than the thickness of the magnetic buoyancy magnet 131. For example Figure 2 the thickness of the coil bracket 133 in the Y-axis direction is greater than the thickness of the magnetic buoyancy magnet 131 in the Y-axis direction, so as to allow the position of the magnetic buoyancy magnet 131 in the coil bracket 133 to be adjusted during assembly, so that the magnetic buoyancy magnet 131 can be in the middle position between the stator frame 114 and the sealing cover plate 115. In some embodiments, the length of the magnetic buoyancy magnet groove is greater than the length of the magnetic buoyancy magnet 131.

[0131] In some embodiments, one or more coil bracket positioning pins 1331 are fixedly provided inside the stator housing 11. The coil bracket 133 is provided with coil bracket positioning pin holes 1332 that match the coil bracket positioning pins 1331. The coil bracket 133 is relatively fixed to the stator housing 11 through the coil bracket positioning pins 1331. In some embodiments, two coil bracket positioning pins 1331 are fixedly provided inside the stator housing 11. In some embodiments, the coil bracket 133 is provided with two coil bracket positioning pin holes 1332. In some embodiments, the two coil bracket positioning pin holes 1332 are located on both sides of the magnetic buoyancy magnet groove.

[0132] In some embodiments, the coil bracket 133 is made of an insulating material with low electrical conductivity and low thermal conductivity. In some embodiments, the coil bracket 133 is made of polymers suitable for vacuum such as ceramics, polytetrafluoroethylene, polyimide, and polyetheretherketone.

[0133] In some embodiments, the stator coil 12 surrounds the magnetic buoyancy adjustment mechanism 13, and an insulating and heat-conducting filler 14 is provided between the stator coil 12 and the magnetic buoyancy adjustment mechanism 13. In some embodiments, there is a gap between the insulating and heat-conducting filler 14 and the inner wall of the accommodation space (such as Figure 3 the inner wall of the stator frame 114 in the Y-axis direction and the inner wall of the sealing cover plate 115 in the Y-axis direction in the example). In some embodiments, the gap between the insulating and heat-conducting filler 14 and the inner wall of the accommodation space allows the cooling medium to pass through and allows the cooling medium to contact the magnetic buoyancy coil 132.

[0134] In some embodiments, the insulating and heat-conducting filler 14 is made of a material with extremely low electrical conductivity, extremely high thermal conductivity, and strong reshaping ability. In some embodiments, the insulating and heat-conducting filler 14 can be used as a component for balancing the heat distribution inside the motor. Ideally, it can make the temperature gradient between the stator coil 12 and the magnetic buoyancy coil 132 extremely low. In some embodiments, after the stator coil 12 and the magnetic buoyancy coil 132 are positioned and fixed, the insulating and heat-conducting filler 14 can be filled between them.

[0135] In some embodiments, as shown in Figure 3 In the ZoX plane, the stator coil 12, the insulating and heat-conducting filler 14, the magnetic buoyancy coil 132, the coil bracket 133, and the magnetic buoyancy magnet 131 are sequentially sleeved inside the cavity of the stator frame 114 from outside to inside. In some embodiments, the sealing cover plate 115 is arranged on the top surface of the cavity of the stator frame 114 by means of mechanical fixing or vacuum welding to form a sealed accommodation space.

[0136] In some embodiments, a lead-out wire module 119 for leading out the wire harness inside the stator housing 11 is further provided on the stator bottom plate 113. In some embodiments, the lead-out wire module 119 can be located on the side of the bottom of the stator module 1. In some embodiments, the lead-out wire module 119 is used to lead out the wire harness of the stator coil 12 and / or the wire harness of the magnetic buoyancy coil 132 inside the stator housing 11. In some embodiments, the wire outlet of the lead-out wire module 119 can extend along Figure 2 the Y-axis direction in Figure 3 In some embodiments, there can be a certain distance between the cooling medium inlet 116 and the wire outlet of the lead-out wire module 119, and between the cooling medium outlet 117 and the wire outlet of the lead-out wire module 119 in the X-axis direction. In some embodiments, the cooling medium inlet 116 and the cooling medium outlet 117 can be mirror-symmetrical with respect to

[0137] the YoZ plane in

[0138] In one or more embodiments of this specification, a method for compensating the magnetic buoyancy force of a vacuum magnetic levitation voice coil motor is provided. The vacuum magnetic levitation voice coil motor includes a stator module 1 and a mover module 2. The stator module 1 includes a magnetic buoyancy force magnet 131 and a magnetic buoyancy force coil 132 surrounding the magnetic buoyancy force magnet 131. In some embodiments, the method for compensating the magnetic buoyancy force includes: obtaining the acting force between the mover module 2 of the vacuum magnetic levitation voice coil motor and the driven component driven by the mover module 2; based on the amplitude change of the acting force, providing a control signal corresponding to the amplitude change of the acting force to the magnetic buoyancy force coil 132, so that the magnetic buoyancy force coil 132 and the magnetic buoyancy force magnet 131 provide a dynamic magnetic buoyancy force to the mover module 2. In this embodiment, the method for obtaining the acting force is similar to the foregoing, and the method for providing the dynamic magnetic buoyancy force is also similar to the foregoing, so details will not be repeated here.

[0139] In one or more embodiments of this specification, a displacement platform is provided, which is applicable to a high-vacuum environment or an ultra-high-vacuum environment. It includes a base part, a platform part capable of displacing relative to the base, and a vacuum magnetic levitation voice coil motor for driving the platform part to displace relative to the base part. In some embodiments, since the displacement platform operates in a high-vacuum environment or an ultra-high-vacuum environment, the outgassing rate and gas composition of the displacement platform in the vacuum environment are particularly critical. An excessively high outgassing rate and unfriendly gas composition will not only disrupt the overall vacuum condition of the equipment, but also cause product defects. The vacuum magnetic levitation voice coil motor in one or more embodiments of this specification has greatly reduced the outgassing rate of the vacuum motor in the vacuum environment and effectively controlled the gas composition of the outgassing by selecting a reasonable process path and sealing scheme, as well as raw materials and surface treatment methods with high vacuum applicability.

[0140] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only an example and does not constitute a limitation to this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements, and corrections to this specification. Such modifications, improvements, and corrections are taught in this specification, so such modifications, improvements, and corrections still fall within the spirit and scope of the exemplary embodiments of this specification.

Claims

1. A vacuum magnetic levitation voice coil motor, characterized in that: include: A stator module and a mover module, wherein the mover module comprises: two mover back irons located on both sides of the stator module, a mover magnet disposed on the mover back irons, and a mover bracket connecting the two mover back irons; The stator module includes: a stator housing and a stator coil disposed inside a housing space of the stator housing, wherein the stator coil has a coil side surface and a coil outer periphery; Wherein, a first flow channel for cooling medium to flow is formed between the stator coil and the inner wall of the stator housing, and the first flow channel covers at least a portion of the coil side surface of the stator coil and / or at least a portion of the outer periphery of the coil; The stator module further includes: a magnetic buoyancy force regulating mechanism, and the stator coil surrounds the magnetic buoyancy force regulating mechanism; The magnetic buoyancy adjustment mechanism comprises: a magnetic buoyancy magnet and a magnetic buoyancy coil, wherein the magnetic buoyancy coil surrounds the magnetic buoyancy magnet; The magnetic levitation coil and the magnetic levitation magnet are integrally used to provide a dynamic magnetic levitation force to the mover module based on the mover magnet, and at least a part of the component force of the dynamic magnetic levitation force is opposite to the load of the mover module; In the dynamic magnetic levitation force, the magnetic levitation force provided by the magnetic levitation coil is adjusted based on the position of the mover module relative to the stator module; The mover magnet comprises a T-shaped magnet and a central magnet, the T-shaped magnet is mirror-symmetrical with respect to a first plane, the central magnet is arranged between two T-shaped magnets, and the first plane is perpendicular to the movement direction of the mover module; The magnetic buoyancy force regulating mechanism provides a repulsive force to the two T-shaped magnets located above it, and the magnetic buoyancy force regulating mechanism provides an attractive force to the two T-shaped magnets located below it.

2. The vacuum magnetic levitation voice coil motor according to claim 1, characterized in that: The stator housing is formed with a second flow channel for cooling medium to flow, and the second flow channel surrounds the accommodating space.

3. The vacuum magnetic levitation voice coil motor according to claim 1 or 2, characterized in that: The stator housing comprises: a stator bottom plate, a stator frame arranged on the stator bottom plate, and a sealing cover plate covering the stator frame, wherein the stator frame and the sealing cover plate together form the accommodating space; The stator bottom plate is provided with a cooling medium inlet and a cooling medium outlet which are connected to the accommodating space.

4. The vacuum magnetic levitation voice coil motor according to claim 3, characterized in that: The stator frame extends upward from the bottom of the accommodating space to form a coil mounting shoulder, and the stator coil is arranged on the coil mounting shoulder; The coil mounting shoulder is located between the cooling medium inlet and the cooling medium outlet, and the coil mounting shoulder divides a portion of the accommodating space to form the C-shaped first flow channel.

5. The vacuum magnetic levitation voice coil motor according to claim 1, characterized in that: Also includes: Force sensor and drive output unit; The force sensor is used to obtain the acting force between the mover module and the driven component driven by the mover module; The drive output unit is used to provide a control signal corresponding to the amplitude change of the force to the magnetic levitation coil based on the amplitude change of the force, so that the magnetic levitation coil and the magnetic levitation magnet provide the dynamic magnetic levitation force.

6. The vacuum magnetic levitation voice coil motor according to claim 1, characterized in that: The magnetic levitation force regulating mechanism further includes: a coil bracket, the coil bracket is provided with a magnetic levitation force magnet groove, the magnetic levitation force magnet is arranged inside the magnetic levitation force magnet groove, and the magnetic levitation force coil surrounds the coil bracket.

7. The vacuum magnetic levitation voice coil motor according to claim 6, characterized in that: One or more coil support positioning pins are fixedly disposed inside the stator housing. The coil support is provided with coil support positioning pin holes matching the coil support positioning pins. The coil support is relatively fixed to the stator housing via the coil support positioning pins.

8. The vacuum magnetic levitation voice coil motor according to claim 1, characterized in that: An insulating heat-conducting filler is provided between the stator coil and the magnetic buoyancy force adjustment mechanism; A gap is formed between the insulating heat-conducting filler and the inner wall of the accommodating space.

9. The vacuum magnetic levitation voice coil motor according to claim 3, characterized in that: The stator bottom plate is also provided with a lead-out wire module for leading out a wire harness inside the stator housing.

10. The vacuum magnetic levitation voice coil motor according to claim 3, characterized in that: The cooling medium inlet and the cooling medium outlet are both provided with sealing grooves; The sealing groove is a dovetail groove or a rectangular groove, and a sealing structure is arranged in the sealing groove; The stator frame is integrally formed by using non-magnetic material.

11. A vacuum magnetic levitation voice coil motor, characterized in that: include: A stator module and a mover module, wherein the mover module comprises: two mover back irons arranged on both sides of the stator module, a mover magnet arranged on the mover back iron, and a mover bracket connecting the two mover back irons; The stator module comprises: a stator housing, a stator coil disposed inside a containing space of the stator housing, and a magnetic buoyancy adjustment mechanism disposed inside the containing space of the stator housing, wherein the stator coil surrounds the magnetic buoyancy adjustment mechanism; The magnetic buoyancy adjustment mechanism comprises: a magnetic buoyancy magnet and a magnetic buoyancy coil, wherein the magnetic buoyancy coil surrounds the magnetic buoyancy magnet; The magnetic levitation coil and the magnetic levitation magnet are used to provide a dynamic magnetic levitation force to the mover module based on the mover magnet, and at least a part of the component force of the dynamic magnetic levitation force is opposite to the load of the mover module; In the dynamic magnetic levitation force, the magnetic levitation force provided by the magnetic levitation coil is adjusted based on the position of the mover module relative to the stator module; The mover magnet comprises a T-shaped magnet and a central magnet, the T-shaped magnet is mirror-symmetrical with respect to a first plane, the central magnet is arranged between two T-shaped magnets, and the first plane is perpendicular to the movement direction of the mover module; The magnetic buoyancy force regulating mechanism provides a repulsive force to the two T-shaped magnets located above it, and the magnetic buoyancy force regulating mechanism provides an attractive force to the two T-shaped magnets located below it.

12. A method for compensating the magnetic buoyancy of a vacuum magnetic levitation voice coil motor, characterized in that: Applicable to the vacuum magnetic levitation voice coil motor according to any one of claims 1 to 10; The vacuum magnetic levitation voice coil motor further includes: a force sensor and a drive output unit; The force sensor is used to obtain the acting force between the mover module and the driven component driven by the mover module; The drive output unit is used to provide a control signal corresponding to the amplitude change of the force to the magnetic levitation coil based on the amplitude change of the force, so that the magnetic levitation coil and the magnetic levitation magnet provide the dynamic magnetic levitation force; The magnetic buoyancy compensation method comprises: Acquiring the acting force between the mover module of the vacuum magnetic levitation voice coil motor and a driven component driven by the mover module; Based on the change in the amplitude of the force, a control signal corresponding to the change in the amplitude of the force is provided to the magnetic levitation coil, so that the magnetic levitation coil and the magnetic levitation magnet provide dynamic magnetic levitation force to the mover module; The magnetic levitation coil and the magnetic levitation magnet provide repulsive force to the two T-shaped magnets located above them, and the magnetic levitation coil and the magnetic levitation magnet provide attractive force to the two T-shaped magnets located below them.

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