Double-stator inertia piezoelectric motor

Abstract

The invention relates to a double-stator inertia piezoelectric motor which comprises a base, a sliding table arranged on the base and a stator, the sliding table is arranged in the length direction of the base, and a friction strip is fixed to the side face, close to the stator, of the sliding table; the two sets of stators are arranged in a mirror symmetry mode in the left-right direction, and each stator comprises a flexible hinge mechanism, a piezoelectric stack arranged in the flexible hinge mechanism and a friction foot fixed to the flexible hinge mechanism and making contact with the friction strip. According to the technical scheme, the two symmetrical stators are arranged, and asynchronous stretching and retracting of the two piezoelectric stacks are utilized, so that movement of the sliding table in the two directions has the same speed, thrust and stepping precision, the stepping precision of the sliding table can be kept consistent when the sliding table moves in the two directions, and the stability of the output performance is good.

Description

Technical Field

[0001] The invention relates to the technical field of piezoelectric motors, and in particular to a double-stator inertia piezoelectric motor. Background Art

[0002] Piezoelectric inertia motor is a type of piezoelectric motor. The inertia principle can be divided into friction inertia principle and impact inertia principle, both of which have simple structures. Due to its driving characteristics, the inertia principle needs to overcome sliding friction, so its speed will be affected to a certain extent.

[0003] For example, Chinese invention CN116345948A discloses a piezoelectric inertial motor based on lateral movement of parallel leaf springs, including a slide, a flexible hinge mechanism, a piezoelectric stack, a friction element, a base, a fixing screw and a preload adjustment screw; the flexible hinge mechanism is composed of a pair of parallel leaf springs and two beams to form an integral structure, and the piezoelectric inertial motor based on lateral movement of parallel leaf springs has a relatively high operating speed and extremely low step displacement, achieving complete decoupling of displacement in two directions. However, the piezoelectric stack is asymmetric when extending and contracting, and the stator structure is also an asymmetric structure, so the inertial motor with a single stator structure has inconsistent speed, thrust and step accuracy in the two directions of the driving guide rail, which affects the consistency of the step accuracy when the slide moves in two directions, and the stability of the output performance is poor. Summary of the invention

[0004] The purpose of the present invention is to overcome the above-mentioned drawbacks and provide a dual-stator inertia piezoelectric motor. The piezoelectric motor is provided with two symmetrical stators. By utilizing the asynchronous expansion and contraction of two piezoelectric stacks, the movement of the slide in two directions has the same speed, thrust and stepping accuracy, so that the stepping accuracy of the slide can be kept consistent when it moves in two directions, and the stability of the output performance is good.

[0005] To achieve the above-mentioned purpose, the present invention adopts the following technical scheme: comprising a base, a slide and a stator arranged on the base, wherein the slide is arranged along the length direction of the base, and a friction strip is fixed on a side surface of the slide close to the stator; the stators are arranged in two groups in a mirror-symmetrical manner along the left and right directions, and the two groups of stators respectively include a flexible hinge mechanism, a piezoelectric stack arranged in the flexible hinge mechanism, and a friction foot fixed on the flexible hinge mechanism and in contact with the friction strip; The flexible hinge mechanism includes a cross beam, which is parallel to the sliding direction of the slide, and a mounting block is vertically provided at one end of the bottom surface of the cross beam downward, and the bottom of the mounting block is connected to the stator plate through a first flexible hinge, and a second flexible hinge is vertically provided at the other end of the bottom surface of the cross beam downward, and the bottom end of the second flexible hinge is abutted against a first adjusting screw arranged on the base through an elastic member, and a friction foot is provided at the top surface of the cross beam at the end away from the mounting block; a first elastic sheet is provided on the outer side surface of the mounting block, and the first elastic sheet is cantilevered from the connection between the mounting block and the first flexible hinge toward the direction of the cross beam, and the first elastic sheet is abutted against the second adjusting screw arranged on the base; the piezoelectric stack is located below the cross beam and parallel to the cross beam, and the two ends of the piezoelectric stack are respectively abutted against the mounting block and the stator plate.

[0006] The stator plate includes a first plate body and a second plate body, wherein: the first plate body is a square plate, and the first plate body is located below the piezoelectric stack, the second plate body is a right-angle plate, and the inner right angle of the second plate body is attached to the upper right right angle of the first plate body, the second plate body is located as a whole between the piezoelectric stack and the second flexible hinge, and there is a gap between the second plate body and the beam and the second flexible hinge.

[0007] A first arc-shaped protrusion is provided at the end of the first elastic sheet toward the mounting block, and a recess matching the first arc-shaped protrusion is provided at a corresponding position of the mounting block. A second arc-shaped protrusion is provided on the outer side of the first elastic sheet, and the second arc-shaped protrusion abuts against a second adjusting screw provided on the base.

[0008] The first flexible hinge is in the shape of a long strip as a whole, and its upper end is connected to the mounting block as a whole, and the inner side surface of its lower end is connected to the lower left side of the first plate body as a whole, and a gap is left between the upper left side of the first plate body and the first flexible hinge, and the mounting block is provided with a groove for matching and positioning with the piezoelectric stack; The second flexible hinge comprises a first strip-shaped portion arranged perpendicular to the crossbeam, the other end of the first strip-shaped portion is provided with a second strip-shaped portion arranged perpendicular to the first strip-shaped portion, and the second strip-shaped portion abuts against the first adjusting screw through an elastic member.

[0009] The elastic member is an elastic column or a compression spring, and an elastic column seat body or a spring seat is provided at the end of the elastic member abutting against the first adjusting screw.

[0010] The base is in a step shape, the slide is arranged on the low step surface of the base, and a first sink is arranged on the high step surface of the base, the first sink forms a groove bottom which is parallel to the rear side wall of the slide, perpendicular to the left and right walls of the slide, and flush with the low step surface of the base, and the two groups of stators are symmetrically installed on the left and right sides of the first sink respectively; The left side wall and the right side wall are respectively provided with second threaded through holes matching with the second adjusting screw, the bottom of the groove is provided with a support plate for installing the stator plate, the first plate body of the stator plate is fixed on the support plate by screws, the rear side wall is provided with a second recessed groove for installing the elastic member, and the rear side wall of the second recessed groove is provided with a first threaded through hole matching with the first adjusting screw.

[0011] A second elastic sheet is provided on the outer side surface of the first flexible hinge, and the second elastic sheet is cantilevered from the connection between the first flexible hinge and the stator plate in the direction of the cross beam. A third arc-shaped protrusion is provided on the outer side surface of the end of the second elastic sheet, and the third arc-shaped protrusions in the two groups of stators are respectively abutted against the left and right walls of the first sink groove, and the bottoms of the stator plates in the two groups of stators are abutted against the rear side walls of the first sink groove.

[0012] The slide is fixed on the base through a slide base, the slide is clamped on the slide base in an inverted U shape and forms a sliding fit with the slide base, and the slide base is fixedly connected to the base through screws.

[0013] The flexible hinge mechanism is an integrated structure made of spring steel. The friction strip and the slide table, the friction foot and the crossbeam are all bonded and fixed, and the friction surface of the friction foot in contact with the friction strip protrudes from the top surface of the crossbeam. The friction foot and the friction strip are both made of aluminum oxide.

[0014] The signals received by the piezoelectric stacks in the two groups of stators are sawtooth wave excitation signals with opposite directions and the same frequency.

[0015] The beneficial technical effects of the present invention are: 1. The present invention is provided with two symmetrical stators, and the piezoelectric stack of the stator and the crossbeam connecting the friction foot are arranged parallel to the sliding direction of the slide. By stimulating the two piezoelectric stacks to perform asynchronous expansion and contraction, the forward and reverse motion of the slide is realized, and the movement in the two directions has the same speed, thrust and step accuracy, which effectively ensures the stability of the output performance.

[0016] 2. The two stators of the present invention work simultaneously, which also increases the friction force and provides a greater thrust for the slide. This also greatly reduces the retreat phenomenon of each step driven by the motor, and the output force of the motor is greatly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The three-dimensional structure of the present invention is shown in FIG. Figure 1 ; Figure 2 The three-dimensional structure of the present invention is shown in FIG. Figure 2 ; Figure 3 is a top view of the present invention; Figure 4 It is a structural schematic diagram of the stator in the present invention; Figure 5 The three-dimensional structure diagram of the flexible hinge mechanism in the present invention is shown in FIG. Figure 1 ; Figure 6 The three-dimensional structure diagram of the flexible hinge mechanism in the present invention is shown in FIG. Figure 2 ; Figure 7 It is a schematic diagram of the three-dimensional structure of the base in the present invention Figure 1 ; Figure 8 It is a schematic diagram of the three-dimensional structure of the base in the present invention Figure 2 ; Fig. 9 It is a schematic diagram of the excitation signal and the displacement of the slide; Fig.10 This is the motion simulation diagram of the stator when the slide moves to the left; Fig.11 This is a motion simulation diagram of the stator when the slide moves to the right.

[0018] The marks in the above drawings are: base 1, first groove 11, rear side wall 111, left side wall 112, right side wall 113, groove bottom 114, second threaded through hole 12, support plate 13, second groove 14, first threaded through hole 15, slide 2, slide base 21, stator 3, friction strip 4, flexible hinge mechanism 5, beam 51, mounting block 52, groove 521, first flexible hinge 53, stator plate 54, first plate body 541, second plate body 542, second flexible hinge 55, first strip portion 551, second strip portion 552, first elastic sheet 56, first arc-shaped protrusion 561, second arc-shaped protrusion 562, second elastic sheet 57, third arc-shaped protrusion 571, piezoelectric stack 6, friction foot 7, elastic member 8, elastic column seat body 81, first adjusting screw 91, second adjusting screw 92. DETAILED DESCRIPTION

[0019] The present invention will be further described below in conjunction with the accompanying drawings: like Figure 1 , Figure 2 , Figure 3 The double-stator inertia piezoelectric motor shown in the figure comprises a base 1, a slide 2 arranged on the base 1 and a stator 3, the slide 2 is arranged along the length direction of the base 1, and a friction strip 4 is fixed on one side of the slide 2 close to the stator 3. The stators 3 are arranged in two groups in a mirror-symmetrical manner along the left and right directions, and the two groups of stators 3 respectively comprise a flexible hinge mechanism 5, a piezoelectric stack 6 arranged in the flexible hinge mechanism 5, and a friction foot 7 fixed on the flexible hinge mechanism 5 and in contact with the friction strip 4, as shown in FIG. Figure 4 shown.

[0020] Furthermore, the slide 2 is fixed to the base 1 via a slide base 21 . The slide 2 is clamped on the slide base 21 in an inverted U shape and forms a sliding fit with the slide base 21 . The slide base 21 is fixed to the base 1 via screws.

[0021] The two sets of stators in this embodiment are mirror images. Figure 1 , Figure 2 , Figure 3 The structure is described by taking the stator on the left side of the middle as an example. At the same time, in order to facilitate the description of the structure of the flexible hinge mechanism 5, Figure 6 The dashed lines are used to indicate the boundaries of the various components, and in practice the flexible hinge mechanism 5 is an integrally formed structure.

[0022] Further, such as Figure 5 , Figure 6 As shown, the flexible hinge mechanism 5 is an integrated structure made of spring steel, including a crossbeam 51, which is parallel to the sliding direction of the slide 2. A mounting block 52 is vertically provided downward at one end of the bottom surface of the crossbeam 51, and the bottom of the mounting block 52 is connected to the stator plate 54 through a first flexible hinge 53. A second flexible hinge 55 is vertically provided downward at the other end of the bottom surface of the crossbeam 51, and the bottom end of the second flexible hinge 55 is abutted against a first adjusting screw 91 provided on the base 1 through an elastic member 8. By rotating the first adjusting screw 91, the axial movement of the first adjusting screw 91 is used to adjust the pre-pressure of the elastic member 8 on the second flexible hinge 53 to ensure good contact between the friction foot 7 and the friction strip 4. The friction foot 7 is provided on the top surface of the crossbeam 51 at the end away from the mounting block 52.

[0023] The outer side surface of the mounting block 52 is provided with a first elastic sheet 56, which is cantilevered from the connection between the mounting block 52 and the first flexible hinge 53 toward the cross beam 51, and the first elastic sheet 56 abuts against the second adjustment screw 92 provided on the base 1. Specifically, the end of the first elastic sheet 56 is provided with a first arc-shaped protrusion 561 toward the mounting block 52, and the mounting block 52 is provided with a concave portion matched with the first arc-shaped protrusion 561 at a corresponding position, and the outer side surface of the first elastic sheet 56 is provided with a second arc-shaped protrusion 562, and the second arc-shaped protrusion 562 abuts against the second adjustment screw 92 provided on the base 1, and the piezoelectric stack 6 is located below the cross beam 51 and parallel to the cross beam 51, and the two ends of the piezoelectric stack 6 abut against the mounting block 52 and the stator plate 54 respectively.

[0024] During operation, an excitation signal is applied to the piezoelectric stack 6, the crossbeam 51 is driven to move by the extension and contraction of the piezoelectric stack 6, and the slide 2 is driven to slide by the friction foot 7; by adjusting the axial position of the second adjusting screw 92, the pre-pressure of the first elastic sheet 56 can be adjusted, so that the piezoelectric stack 6 is stably stuck between the mounting block 52 and the stator plate 54.

[0025] In this embodiment, the cross beam 51 and the piezoelectric stack 6 are arranged parallel to the sliding direction of the slide table 2 , so as to ensure that the block-shaped friction feet 7 and the block-shaped friction strips 4 have sufficient contact conditions.

[0026] Furthermore, the stator plate 54 includes a first plate body 541 and a second plate body 542, wherein: the first plate body 541 is a square plate, and the first plate body 541 is located below the piezoelectric stack 6, the second plate body 542 is a right-angle plate, and the inner right angle of the second plate body 542 is fitted at the upper right right angle of the first plate body 541, the second plate body 542 is located as a whole between the piezoelectric stack 6 and the second flexible hinge 55, and there are gaps between the second plate body 542 and the beam 51 and the second flexible hinge 55, and the mounting block 52 is provided with a groove 521 that cooperates with the piezoelectric stack 6 for positioning.

[0027] Furthermore, the first flexible hinge 53 is in the shape of a long strip as a whole, with its upper end connected to the mounting block 52 as a whole, and the inner side surface of its lower end connected to the lower left side of the first plate body 541 as a whole, and a gap is left between the upper left side of the first plate body 541 and the first flexible hinge 53. The gap is left because the width of the gap directly affects the rigidity of the first flexible hinge 53, thereby affecting the motion form of the motor-driven foot.

[0028] Furthermore, the second flexible hinge 55 includes a first strip portion 551 disposed perpendicularly to the cross beam 51, and the other end of the first strip portion 551 is provided with a second strip portion 552 disposed perpendicularly to the first strip portion 551, and the second strip portion 552 abuts against the first adjustment screw 91 through the elastic member 8. In this embodiment, the first strip portion 551 is used to transmit the pre-pressure, and the middle part of the first strip portion 551 protrudes to both sides respectively, so that the strength of the first strip portion 551 can be greater, which is conducive to the transmission of the pre-pressure.

[0029] Furthermore, the elastic member 8 is an elastic column or a compression spring, and an elastic column seat body 81 or a spring seat is provided at the end of the elastic member 8 abutting against the first adjusting screw 91 .

[0030] Further, such as Figure 7 , Figure 8 As shown, the base 1 is stepped, the slide 2 is arranged on the low step surface of the base 1, and a first sink 11 is arranged on the high step surface of the base 1. The first sink 11 forms a groove bottom 114 which is parallel to the rear side wall 111 of the slide 2, perpendicular to the left side wall 112 and the right side wall 113 of the slide 2, and flush with the low step surface of the base 1. The two groups of stators 3 are symmetrically installed on the left and right sides of the first sink 11 respectively.

[0031] The left side wall 112 and the right side wall 113 are respectively provided with a second threaded through hole 12 that cooperates with the second adjusting screw 92, the groove bottom 114 is provided with a support plate 13 for mounting the stator plate 54, the first plate body 541 of the stator plate 54 is fixed to the support plate 13 by screws, the rear side wall 111 is provided with a second recessed groove 14 for mounting the elastic member 8, and the rear side wall of the second recessed groove 14 is provided with a first threaded through hole 15 that cooperates with the first adjusting screw 91.

[0032] Furthermore, a second elastic sheet 57 is provided on the outer side of the first flexible hinge 53, and the second elastic sheet 57 is cantilevered from the connection between the first flexible hinge 53 and the stator plate 54 toward the crossbeam 51. A third arc-shaped protrusion 571 is provided on the outer side of the end of the second elastic sheet 57. The third arc-shaped protrusions 571 in the two groups of stators 3 are respectively against the left side wall 112 and the right side wall 113 of the first sink 11, and the bottoms of the stator plates 54 in the two groups of stators 3 are against the rear side wall 111 of the first sink 11. The second elastic sheet 57 is provided to support the stator 3 during assembly and improve assembly accuracy.

[0033] Furthermore, the friction strip 4 and the slide 2, and the friction foot 7 and the cross beam 51 are all bonded and fixed, and the friction surface of the friction foot 7 in contact with the friction strip 4 protrudes from the top surface of the cross beam 51, and the friction foot 7 and the friction strip 4 are both made of aluminum oxide. In this embodiment, the friction strip 4 and the friction foot 7 are both block structures.

[0034] Furthermore, the signals received by the piezoelectric stacks 6 in the two groups of stators 3 are sawtooth wave excitation signals with opposite directions and the same frequency.

[0035] The working principle and working process of the present invention are as follows: During operation, a sawtooth wave excitation signal is applied to the piezoelectric stack 6 of one stator 3, and a reverse sawtooth wave excitation signal is applied to the piezoelectric stack 6 of the other stator 3, and the sawtooth wave excitation signals applied to the two piezoelectric stacks 6 have the same frequency.

[0036] like Fig. 9 , Fig.10 As shown, a dashed sawtooth wave excitation signal is applied to the piezoelectric stack 6 of the left stator 3, so that the piezoelectric stack 6 on the left slowly extends. At the same time, a dashed sawtooth wave signal is applied to the piezoelectric stack 6 of the right stator 3, so that the piezoelectric stack 6 on the right slowly shortens. At this time, the two friction feet 7 will make the slide 2 move linearly to the left under the action of static friction.

[0037] When the sawtooth wave excitation signal changes suddenly, the piezoelectric stack 6 of the left stator 3 shortens rapidly, and the piezoelectric stack 6 of the right stator 3 lengthens rapidly. Under the influence of inertia, the displacement of the slide 2 remains basically unchanged, or the reverse displacement is very small, and the friction foot 7 changes synchronously with the motion state of the piezoelectric stack 6. With the continuous advancement of multiple cycles of the sawtooth wave excitation signal, the expansion and contraction states of the two piezoelectric stacks 6 are opposite, respectively driving the two beams 51 to move, and the friction foot 7 drives the slide 2 to one side to produce continuous and stable linear movement.

[0038] Among them, Fig.11 As shown, when the sawtooth wave excitation signals applied by the two piezoelectric stacks 6 are swapped, the slide 2 is driven to move in the opposite direction to the other side. Specifically, at the beginning, the piezoelectric stack 6 of the left stator 3 is slowly shortened. At the same time, the piezoelectric stack 6 of the right stator 3 is slowly extended. At this time, the two friction feet 7 will make the slide 2 move linearly to the right side under the action of static friction.

[0039] As the cycle of the sawtooth wave signal continues to advance, the piezoelectric stack 6 of the left stator 3 quickly extends, and the piezoelectric stack 6 of the right stator quickly shortens. Under the influence of inertia, the displacement of the slide 2 remains basically unchanged, or the reverse displacement is very small. The friction foot 7 changes synchronously with the movement state of the piezoelectric stack 6, thereby causing the slide 2 to continue to move to the right.

[0040] The embodiments described above are merely descriptions of preferred implementation modes of the present invention and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should all fall within the protection scope determined by the claims of the present invention.

[0041] In the description of the present invention, it should be understood that the terms "opening", "upper", "lower", "thickness", "top", "middle", "length", "inside", "all around" and the like indicating orientation or positional relationship are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

Claims

1. A dual-stator inertia piezoelectric motor, comprising a base (1), a slide (2) and a stator (3) arranged on the base (1), characterized in that: The slide (2) is arranged along the length direction of the base (1), and a friction strip (4) is fixed on a side surface of the slide (2) close to the stator (3); the stator (3) is arranged in two groups in a mirror-symmetrical manner along the left-right direction, and the two groups of stators (3) respectively include a flexible hinge mechanism (5), a piezoelectric stack (6) arranged in the flexible hinge mechanism (5), and a friction foot (7) fixed on the flexible hinge mechanism (5) and in contact with the friction strip (4); The flexible hinge mechanism (5) comprises a crossbeam (51), wherein the crossbeam (51) is parallel to the sliding direction of the slide table (2), a mounting block (52) is vertically provided downwardly at one end of the bottom surface of the crossbeam (51), the bottom of the mounting block (52) is connected to the stator plate (54) via a first flexible hinge (53), a second flexible hinge (55) is vertically provided downwardly at the other end of the bottom surface of the crossbeam (51), the bottom end of the second flexible hinge (55) is abutted against a first adjusting screw (91) provided on the base (1) via an elastic member (8), and the top surface of the crossbeam (51) is A friction foot (7) is provided at the end away from the mounting block (52); a first elastic sheet (56) is provided on the outer side surface of the mounting block (52), the first elastic sheet (56) is cantilevered from the connection between the mounting block (52) and the first flexible hinge (53) in the direction of the cross beam (51), and the first elastic sheet (56) abuts against a second adjustment screw (92) provided on the base (1); the piezoelectric stack (6) is located below the cross beam (51) and parallel to the cross beam (51), and two ends of the piezoelectric stack (6) abut against the mounting block (52) and the stator plate (54) respectively.

2. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: The stator plate (54) comprises a first plate body (541) and a second plate body (542), wherein: the first plate body (541) is a square plate, and the first plate body (541) is located below the piezoelectric stack (6); the second plate body (542) is a right-angle plate, and the inner right angle of the second plate body (542) fits the upper right right angle of the first plate body (541); the second plate body (542) is located as a whole between the piezoelectric stack (6) and the second flexible hinge (55), and there are gaps between the second plate body (542) and the crossbeam (51) and the second flexible hinge (55); and the mounting block (52) is provided with a groove (521) that matches and positions the piezoelectric stack (6).

3. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: A first arc-shaped protrusion (561) is provided at the end of the first elastic sheet (56) in the direction of the mounting block (52); a recess matching the first arc-shaped protrusion (561) is provided at a corresponding position of the mounting block (52); a second arc-shaped protrusion (562) is provided on the outer side surface of the first elastic sheet (56); the second arc-shaped protrusion (562) abuts against a second adjustment screw (92) provided on the base (1).

4. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: The first flexible hinge (53) is in the shape of a long strip as a whole, with its upper end being integrally connected to the mounting block (52), and the inner side surface of its lower end being integrally connected to the lower left side of the first plate body (541), and a gap being left between the upper left side of the first plate body (541) and the first flexible hinge (53); The second flexible hinge (55) comprises a first strip-shaped portion (551) arranged perpendicular to the crossbeam (51); the other end of the first strip-shaped portion (551) is provided with a second strip-shaped portion (552) arranged perpendicular to the first strip-shaped portion (551); the second strip-shaped portion (552) abuts against the first adjustment screw (91) via an elastic member (8).

5. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: The elastic member (8) is an elastic column or a compression spring, and an elastic column seat body (81) or a spring seat is provided at the end of the elastic member (8) abutting against the first adjustment screw (91).

6. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: The base (1) is in a step shape, the slide (2) is arranged on the low step surface of the base (1), and a first sink groove (11) is arranged on the high step surface of the base (1). The first sink groove (11) forms a groove bottom (114) which is parallel to the rear side wall (111) of the slide (2), perpendicular to the left side wall (112) and the right side wall (113) of the slide (2), and is flush with the low step surface of the base (1). The two groups of stators (3) are symmetrically mounted on the left and right sides of the first sink groove (11). The left side wall (112) and the right side wall (113) are respectively provided with a second threaded through hole (12) matching with the second adjusting screw (92); the groove bottom (114) is provided with a support plate (13) for mounting the stator plate (54); the first plate body (541) of the stator plate (54) is fixed to the support plate (13) by screws; the rear side wall (111) is provided with a second recessed groove (14) for mounting the elastic member (8); and the rear side wall of the second recessed groove (14) is provided with a first threaded through hole (15) matching with the first adjusting screw (91).

7. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: A second elastic sheet (57) is provided on the outer side surface of the first flexible hinge (53). The second elastic sheet (57) is cantilevered from the connection point between the first flexible hinge (53) and the stator plate (54) in the direction of the crossbeam (51). A third arc-shaped protrusion (571) is provided on the outer side surface of the end of the second elastic sheet (57). The third arc-shaped protrusion (571) in the two groups of stators (3) respectively abuts against the left side wall (112) and the right side wall (113) of the first sink groove (11). The bottoms of the stator plates (54) in the two groups of stators (3) abut against the rear side wall (111) of the first sink groove (11).

8. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: The slide (2) is fixed on the base (1) via a slide base (21); the slide (2) is clamped on the slide base (21) in an inverted U shape and forms a sliding fit with the slide base (21); the slide base (21) is fixedly connected to the base (1) via screws.

9. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: The flexible hinge mechanism (5) is an integrated structure made of spring steel. The friction strip (4) and the slide table (2), and the friction foot (7) and the cross beam (51) are all bonded and fixed, and the friction surface of the friction foot (7) in contact with the friction strip (4) protrudes from the top surface of the cross beam (51). The friction foot (7) and the friction strip (4) are both made of aluminum oxide.

10. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: The signals received by the piezoelectric stacks (6) in the two groups of stators (3) are sawtooth wave excitation signals with opposite directions and the same frequency.

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