Mould and process for manufacturing ultrahigh vacuum chamber made of high polymer material

Abstract

The invention relates to the technical field of manufacturing of vacuum chambers of particle accelerators, in particular to a manufacturing mold and a manufacturing process of a high polymer material ultrahigh vacuum chamber. The manufacturing mold comprises an injection molding assembly which is provided with a mold core used for fixing a vacuum chamber main body and a mold cavity used for performing injection molding on a flange on the vacuum chamber main body; the pressing block assembly is mounted at the top of the injection molding assembly and is provided with a material injection pipe which is communicated to the cavity from the top surface; the supporting assembly is mounted at the bottom of the injection molding assembly; the injection molding assembly comprises a second heating module with a guide groove formed in the top, a first heating module covering the guide groove and a sliding block embedded in the guide groove. The mold core is located at the groove bottom of the guide groove, and the two sliding blocks are symmetrically arranged on the two sides of the mold core, so that the vacuum chamber body can be placed in a mold cavity, a flange is directly arranged at the end of the vacuum chamber body in an injection molding mode, and the structural strength and the vacuum sealing performance of the vacuum chamber are improved.

Description

Technical Field

[0001] The invention relates to the technical field of particle accelerator vacuum chamber manufacturing, and in particular to a manufacturing mold and manufacturing process for a polymer material ultra-high vacuum chamber. Background Art

[0002] With the continuous efforts of scientific researchers, particle accelerators are developing towards high energy, high current and high bunch power. In order to avoid beam loss caused by dynamic vacuum effect and space charge effect, the dipole magnet in the synchronous ring of the particle accelerator will adopt an ultra-high repetition rate mode, so that the magnetic field rise rate of the magnet will reach 200T / s.

[0003] Because the traditional metal thin-walled vacuum chamber will have serious eddy current effect in ultra-high repetition rate mode, and the all-ceramic vacuum chamber has the disadvantages of low yield, high processing difficulty, and low structural reliability. Therefore, polymer vacuum chambers are generally used.

[0004] Currently, it can reach 10 -8 There are two main processing technologies for Pa-level ultra-high vacuum polymer vacuum chambers: one is to form the pipe and flange separately by extrusion process, and then weld the flange and pipe into one by hot melt welding process. The vacuum chamber made in this way has the disadvantages of low structural strength at the welding position and unstable sealing performance; the other is to first obtain a thick blank pipe by extrusion process, and then make the final product by machining. The vacuum chamber made in this way has 3 to 5 times the material of the final product, high cost, long processing cycle, and thick blank pipe is easy to cause bubbles to form inside the pipe, which makes the pipe strength have problems.

[0005] Therefore, a mold and a manufacturing process for a polymer material ultra-high vacuum chamber that can reduce the processing cycle and improve the structural strength and sealing performance are needed to solve the problems existing in the existing processing technology. Summary of the invention

[0006] The present invention aims to solve the technical problems existing in the related art. To this end, the present invention proposes a manufacturing mold and manufacturing process of a polymer material ultra-high vacuum chamber to solve the problems that the existing manufacturing process easily causes the vacuum chamber to have low structural strength, poor sealing performance, and possible bubbles inside, and high material costs.

[0007] In a first aspect, the present invention provides a mold for making a polymer material ultra-high vacuum chamber, the mold comprising: An injection molding assembly is provided with a core for fixing a vacuum chamber body and a cavity for injection molding a flange on the vacuum chamber body; A pressing block assembly is mounted on the top of the injection molding assembly and is provided with an injection pipe connected from the top surface to the mold cavity; A support assembly mounted on the bottom of the injection molding assembly; The injection molding assembly includes: a second heating module with a guide groove on the top, a first heating module covering the guide groove, a slider embedded in the guide groove, and a driving assembly connected to the slider; The core is located at the bottom of the guide groove, and the two sliders are symmetrically arranged on both sides of the core.

[0008] According to a mold for manufacturing a polymer material ultra-high vacuum chamber provided by the present invention, the slider is provided with a semicircular notch having a partition, and a notch having a contour adapted to the core is provided on the partition, for accommodating the vacuum chamber body and dividing the cavity into a first cavity and a second cavity; The injection pipe is communicated with the first cavity and is used for injection molding the flange at the upper end of the vacuum chamber body.

[0009] According to a mold for manufacturing a polymer material ultra-high vacuum chamber provided by the present invention, both the first heating module and the second heating module are provided with heating channels for embedding heating carbon rods.

[0010] According to a mold for manufacturing a polymer material ultra-high vacuum chamber provided by the present invention, the two driving components are respectively arranged at two ends of the guide groove to drive the slider to move along the guide groove.

[0011] According to a mold for manufacturing a polymer material ultra-high vacuum chamber provided by the present invention, the support assembly comprises: a first support block, a second support block, a third support block, a fourth support block and an adjustment rod; The first support block is installed on the bottom surface of the second heating module, and the fourth support block is installed on the bottom surface of the first support block; The second support block and the third support block are movably arranged between the fourth support block and the second heating module; The second heating module is provided with a through hole extending from its bottom surface to the bottom of the guide groove, and the adjusting rod is movably arranged in the through hole. One end of the adjusting rod is installed on the second supporting block, and the other end of the adjusting rod extends into the cavity for adjusting the position of the vacuum chamber body in the cavity.

[0012] According to a mold for manufacturing a polymer material ultra-high vacuum chamber provided by the present invention, the support assembly further includes: A fixing stud, one end of which is connected to the second heating module, and the other end of which is connected to the fourth supporting block; A movable sleeve, sleeved on the fixed stud; The second support block and the third support block are sleeved on the fixing stud via the movable sleeve.

[0013] According to a mold for manufacturing a polymer material ultra-high vacuum chamber provided by the present invention, the pressing block assembly further comprises: a first pressing block, mounted on the top surface of the first heating module; a second pressing block, mounted on the bottom surface of the first heating module; The injection tube passes through the first pressing block and the first heating module; the second pressing block is provided with an inclined surface inclined from the end of the guide groove to the middle of the guide groove, and is abutted against the slider through the inclined surface to ensure that the two sliders are in close contact.

[0014] In a second aspect, the present invention provides a process for manufacturing a polymer material ultra-high vacuum chamber, wherein the polymer material ultra-high vacuum chamber is manufactured using any one of the above-described manufacturing molds. The process steps include: S1, placing the prefabricated vacuum chamber body into the manufacturing mold; S2, heating and heat preservation treatment of the production mold; S3, injecting the molten polymer material into the manufacturing mold at an injection pressure between 100 MPa and 150 MPa, and performing a pressure-maintaining treatment to form a flange at one end of the vacuum chamber body; S4, after the mold is naturally cooled, demoulding the vacuum chamber body with a flange injection-molded at one end, and machining the flange to remove the middle part of the flange; S5, after rotating the vacuum chamber body by 180 degrees, the vacuum chamber body is again loaded into the manufacturing mold, and steps S2 to S4 are repeated to form a flange at the other end of the vacuum chamber body.

[0015] According to a manufacturing process of a polymer material ultra-high vacuum chamber provided by the present invention, the vacuum chamber that has been injection molded as one is finely processed, and the sealing surface roughness of the flange is set to be less than 0.8 microns.

[0016] According to a manufacturing process of a polymer material ultra-high vacuum chamber provided by the present invention, the vacuum chamber after fine processing is cleaned and dried; During the cleaning process, first use a detergent solution to clean, then use ultrapure water or deionized water for ultrasonic cleaning; During the drying process, the drying temperature is maintained between 100°C and 130°C.

[0017] The above one or more technical solutions in the present invention have at least one of the following technical effects: 1. By optimizing the mold structure, the vacuum chamber body can be placed in the mold cavity and the flange can be directly injection molded at its end, so that the process of extruding the vacuum chamber body and injection molding the flange on the vacuum chamber body is combined by using the mold, which effectively solves the problems of unstable sealing and low strength of welding points in batch processing of hot melt welding process, and greatly improves the structural strength and vacuum sealing of the vacuum chamber.

[0018] 2. The vacuum chamber manufactured by the manufacturing mold and manufacturing process of the present invention has the advantages of good sealing performance, high structural strength, short processing cycle, good economic benefits, high reliability, low eddy current effect, etc.

[0019] 3. The vacuum chamber made by the mold and process of the present invention can withstand vacuum baking below 250°C. After high-temperature baking, an ultra-high vacuum with a vacuum degree better than 10E-8Pa can be achieved, which is suitable for the synchronous storage ring in the particle accelerator.

[0020] In addition to the technical problems solved by the present invention, the technical features of the technical solutions constituted, and the advantages brought about by the technical features of these technical solutions described above, other technical features of the present invention and the advantages brought about by these technical features will be further explained in conjunction with the accompanying drawings or will be understood through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or related technologies, the drawings required for use in the embodiments or related technical descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a schematic diagram of the three-dimensional structure of the manufacturing mold in an embodiment of the present invention.

[0023] Figure 2 It is a quarter cross-sectional view of a manufacturing mold in an embodiment of the present invention.

[0024] Figure 3 It is an assembly structure diagram of the driving component and the slider in an embodiment of the present invention.

[0025] Figure 4 Schematic diagram of the three-dimensional structure of the second heating module in an embodiment of the present invention.

[0026] Figure 5 It is a schematic diagram of the three-dimensional structure of the vacuum chamber body in an embodiment of the present invention.

[0027] Figure 6It is a schematic cross-sectional structure diagram of the injection molding component in an embodiment of the present invention.

[0028] Figure 7 It is a schematic diagram of the three-dimensional structure of the vacuum chamber body after a flange is injection-molded at one end in an embodiment of the present invention.

[0029] Figure 8 It is a schematic diagram of the vacuum chamber body in an embodiment of the present invention being installed into a manufacturing mold again after a flange is injection-molded at one end.

[0030] Fig. 9 It is a schematic diagram of the structure after flanges are injection-molded at both ends of the vacuum chamber body in an embodiment of the present invention.

[0031] Fig.10 FIG. 4 is a flow chart of a process for manufacturing a vacuum chamber in an embodiment of the present invention.

[0032] Reference numerals: 1. Vacuum chamber body; 2. First pressure block; 3. First heating module; 4. Driving assembly; 5. Second heating module; 6. Heating channel; 7. First support block; 8. Support column; 9. Adjustment rod; 10. Second support block; 11. Fixing stud; 12. Third support block; 13. Fourth support block; 14. Adjustment bolt; 15. Injection pipe; 16. Slider; 17. Fifth support block; 18. Movable sleeve; 19. Second pressure block; 20. Core; 21. Flange; 22. Injection molding joint surface. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] like Fig. 9 As shown, the polymer material ultra-high vacuum chamber comprises a vacuum chamber body 1 and a flange 21, both of which are made of polymer materials. Preferably, the polymer material is PEEK and its composite material, or VESPEL material, or other polymer engineering plastics.

[0035] In an embodiment of the present invention, a mold for manufacturing an ultra-high vacuum chamber of a polymer material is introduced.

[0036] The mold making process mainly includes injection molding components, pressing block components and supporting components.

[0037] like Figures 1 to 9As shown, the injection molding assembly is provided with a core 20 for fixing the vacuum chamber body 1, and a cavity for injection molding a flange 21 on the vacuum chamber body 1. Specifically, the injection molding assembly includes at least a first heating module 3, a second heating module 5 and a slider 16. A guide groove running through both ends of the second heating module 5 is provided on the top. Two sliders 16 are symmetrically arranged in the guide groove of the second heating module 5.

[0038] The pressing block assembly is installed on the top of the injection molding assembly. In addition, the pressing block assembly is provided with an injection pipe 15 connected to the cavity from the top surface. The support assembly is installed at the bottom of the injection molding assembly.

[0039] The injection molding assembly includes: a second heating module 5 with a guide groove on the top, a first heating module 3 covering the guide groove, a slider 16 embedded in the guide groove, and a driving assembly 4 connected to the slider 16. The core 20 is located at the bottom of the guide groove. Two sliders 16 are symmetrically arranged on both sides of the core 20.

[0040] Specifically, the cavity is composed of a first heating module 3 and a second heating module 5 stacked up and down, and two sliders 16 symmetrically arranged in the guide groove of the second heating module 5. The core 20 is arranged at the bottom of the guide groove. In addition, the core 20 is located between the two sliders 16. The slider 16 is slidably connected to the guide groove of the second heating module 5.

[0041] When the flange 21 is manufactured on the vacuum chamber body 1 , the molten polymer material is introduced into the cavity through the injection pipe 15 .

[0042] After the flange 21 is formed, the driving assembly 4 drives the slider 16 to move along the extension direction of the guide groove, and the mold cavity can be opened by separating the two sliders 16. After that, the vacuum chamber body 1 can be removed from the core 20.

[0043] Furthermore, the pressing block assembly further comprises a first pressing block 2 and a second pressing block 19. The first pressing block 2 is mounted on the top surface of the first heating module 3. The second pressing block 19 is mounted on the bottom surface of the first heating module 3.

[0044] The injection pipe 15 passes through the first pressing block 2 and the first heating module 3. The second pressing block 19 is provided with an inclined surface inclined from the end of the guide groove to the middle of the guide groove, and is arranged to abut against the slider 16 through the inclined surface to ensure that the two sliders 16 are in close contact.

[0045] The first pressing block 2 is fixed together with the first heating module 3 by bolts. The first heating module 3 is fixed together with the second pressing block 19 by bolts.

[0046] The injection pipe 15 passes through the first pressing block 2 and the first heating module 3 and is located between the two.

[0047] Furthermore, the injection pipe 15 is fixed to the first pressing block 2 by bolts.

[0048] In this embodiment, by optimizing the mold structure, the vacuum chamber body 1 can be placed in the mold cavity and the flange 21 can be directly injection molded at its end, thereby combining the processes of extruding the vacuum chamber body 1 and injection molding the flange 21 on the vacuum chamber body 1 using the mold, effectively solving the problems of unstable sealing and low strength of the welds in batch processing of the hot melt welding process, and greatly improving the structural strength and vacuum sealing of the vacuum chamber.

[0049] On the basis of the above-mentioned embodiment, in another embodiment of the present invention, a mold for manufacturing an ultra-high vacuum chamber of a polymer material is introduced.

[0050] like Figure 6 As shown, the injection molding assembly includes a first heating module 3 , a slider 16 , a second heating module 5 and an injection tube 15 .

[0051] The slider 16 is provided with a semicircular notch having a partition. A notch having a profile adapted to the core 20 is provided on the partition for accommodating the vacuum chamber body 1 and dividing the cavity into a first cavity and a second cavity.

[0052] The first cavity is disposed close to the first heating module 3. The injection pipe 15 is connected to the first cavity and is used for injection molding the flange 21 at the upper end of the vacuum chamber body 1.

[0053] The second cavity is arranged close to the second heating module 5 to facilitate the second injection molding.

[0054] like Figure 8 As shown, after the flange 21 is injection molded at one end of the vacuum chamber body 1 , the vacuum chamber body 1 is turned over, the end with the flange 21 is embedded in the second cavity, and then the flange 21 is injection molded at the other end of the vacuum chamber body 1 .

[0055] Furthermore, the first heating module 3 and the second heating module 5 are both provided with a heating channel 6 for embedding the heating carbon rod. Figure 4 The second heating module 5 has a heating channel 6 and a core 20. The heating channel 6 is used to install the heating carbon rod. The core 20 is used to cover the vacuum chamber body 1 and form the cavity of the injection molding flange 21.

[0056] Furthermore, two driving components 4 are respectively arranged at the two ends of the guide groove. The driving components 4 are connected to the slider 16 and are used to drive the slider 16 to move along the guide groove.

[0057] like Figure 3As shown, a screw is provided on the driving assembly 4 and connected to the slider 16. There are two groups of sliders 16 and driving assembly 4 respectively, and their main function is that after the injection molding is completed, the driving assembly 4 pulls the slider 16 outward away from the core 20 to facilitate the demoulding process.

[0058] On the basis of the above-mentioned embodiment, in another embodiment of the present invention, a mold for manufacturing an ultra-high vacuum chamber of a polymer material is introduced.

[0059] The support assembly includes a first support block 7 , a second support block 10 , a third support block 12 , a fourth support block 13 , a fifth support block 17 and an adjusting rod 9 .

[0060] The first support block 7 is mounted on the bottom surface of the second heating module 5 . The fourth support block 13 is mounted on the bottom surface of the first support block 7 .

[0061] The second support block 10 and the third support block 12 are movably disposed between the fourth support block 13 and the second heating module 5 .

[0062] The second heating module 5 is provided with a through hole extending from its bottom surface to the bottom of the guide groove, and the adjusting rod 9 is movably arranged in the through hole.

[0063] One end of the adjusting rod 9 is mounted on the second supporting block 10 , and the other end of the adjusting rod 9 extends into the cavity to adjust the position of the vacuum chamber body 1 in the cavity.

[0064] Furthermore, a plurality of adjusting rods 9 are provided, evenly distributed on the periphery of the core 20. The adjusting rods 9 can be used to adjust the position of the vacuum chamber body 1, thereby adjusting the area of ​​the injection molding joint surface 22 between the vacuum chamber body 1 and the flange 21 during the injection molding process.

[0065] like Figure 2 As shown, the adjusting rod 9 can change its position along the rod direction by adjusting the bolt 14. The adjusting bolt 14 is fixed to the fourth support block 13 by bolts. The fourth support block 13 and the first support block 7 are fixed to the second heating module 5 by long screws.

[0066] The adjusting rod 9 is fixed on the second supporting block 10 and the third supporting block 12. At the same time, the second supporting block 10 and the third supporting block 12 and the movable sleeve 18 are sleeved on the fixing stud 11 and the supporting column 8 through a mechanical structure.

[0067] Furthermore, the second support block 10 and the third support block 12 can be moved up and down synchronously by adjusting the bolt 14, thereby adjusting the position of the adjustment rod 9 along the rod direction.

[0068] Furthermore, the support assembly also includes a fixed stud 11 and a movable sleeve 18 .

[0069] One end of the fixing stud 11 is connected to the second heating module 5 . The other end of the fixing stud 11 is connected to the fourth support block 13 . The movable sleeve 18 is sleeved on the fixing stud 11 .

[0070] The second support block 10 and the third support block 12 are sleeved on the fixing stud 11 through a movable sleeve 18 .

[0071] In addition, in another embodiment of the present invention, a process for manufacturing a polymer material ultra-high vacuum chamber is introduced. The manufacturing process uses the manufacturing mold in any of the above embodiments to manufacture the polymer material ultra-high vacuum chamber.

[0072] The process steps mainly include: before the flanges 21 are injection molded at both ends of the vacuum chamber body 1, the vacuum chamber body 1 is first manufactured by an extrusion molding process, and the vacuum chamber body 1 is heat treated. Then, the following processes are performed in sequence: S1. Place the heat-treated vacuum chamber body 1 into a manufacturing mold.

[0073] S2, heating and heat preservation treatment is performed on the production mold.

[0074] S3 , injecting the molten polymer material into the manufacturing mold at an injection pressure between 100 MPa and 150 MPa, and performing a pressure-maintaining treatment to form a flange 21 at one end of the vacuum chamber body 1 .

[0075] S4. After the mold is naturally cooled, the vacuum chamber body 1 with the flange 21 injected at one end is demoulded, and the flange 21 is machined to remove the middle part of the flange 21.

[0076] S5 , turning the vacuum chamber body 1 by 180° and placing it into the manufacturing mold again, and repeating steps S2 to S4 to form a flange 21 at the other end of the vacuum chamber body 1 .

[0077] Furthermore, the vacuum chamber that has been injection molded as one is finely processed, and the roughness of the sealing surface of the flange 21 is set to be less than 0.8 microns.

[0078] Furthermore, the vacuum chamber is cleaned and dried after finishing.

[0079] Preferably, during the cleaning process, the cleaning is first performed with a washing solution, and then ultrasonic cleaning is performed with ultrapure water or deionized water. During the drying process, the drying temperature is maintained between 100°C and 130°C.

[0080] like Fig.10 As shown, the specific steps of using the mold in the above embodiment to make a polymer material ultra-high vacuum chamber include: (1) The vacuum chamber body 1 is extruded in an extrusion die through an extrusion molding process.

[0081] (2) The formed vacuum chamber body 1 is placed in an oven for heat treatment at a temperature of 250°C to 300°C and a holding time of more than 72 hours to reduce the residual stress as much as possible.

[0082] (3) If Figure 2 As shown, the vacuum chamber body 1 after heat treatment is assembled into one with the manufacturing mold.

[0083] (4) The mold is heated and insulated, and a heated carbon rod is placed in the heating channel 6 to heat the mold.

[0084] For example, 8 heating channels 6 are provided, and 8 heating carbon rods are provided accordingly. In order to ensure sufficient heating and maintain the stability of the vacuum chamber body 1, the heating and heat preservation method is: maintaining the temperature in the range of 150° C. to 180° C. for 5 hours.

[0085] Preferably, the temperature is maintained at 160°C for 5 h.

[0086] (5) After the mold is kept warm for 5 hours, continue to maintain the temperature and start injecting materials into the mold: inject the molten polymer material into the mold cavity through the injection pipe 15 at an injection pressure between 100 MPa and 150 MPa.

[0087] The injection time is determined according to the product size and mold structure. It is generally between 5 seconds and 30 seconds. The holding time should be long enough to ensure the dimensional stability and density uniformity of the product. For example, it is between 10 seconds and 60 seconds.

[0088] Preferably, for this production mold, the injection time is 20 seconds, the holding time is 50 seconds, and the holding pressure is 60% to 80% of the injection pressure to compensate for cooling shrinkage.

[0089] (6) After the injection molding of the flange 21 is completed, the heating of the mold is stopped, and the vacuum chamber body 1 and the flange 21 are cooled naturally at the same time. After the cooling is completed, the mold is demolded, and the vacuum chamber body 1 and the flange 21 that have been formed into one body are taken out. Figure 7 shown.

[0090] (7) Machining to remove the middle portion of the flange 21 so as to form a through hole in the middle portion of the flange 21. The through hole is consistent with the inner hole of the vacuum chamber body 1.

[0091] (8) Figure 8 As shown, the flange 21 and the vacuum chamber body 1 that have been formed into one piece are reassembled into the manufacturing mold. After the assembly is completed, the operations of step (4) and step (5) are repeated to injection mold the flange 21 at the other end of the vacuum chamber body 1.

[0092] (9) After the injection molding of the flange 21 at the other end is completed, the heating of the mold is stopped to allow the vacuum chamber body 1 and the flange 21 to cool naturally at the same time. After cooling, the mold is demolded and the operation of step (7) is repeated to remove the middle part of the flange 21.

[0093] (10) The vacuum chamber that has been formed into one piece is further fine-machined. The sealing surface and bolt holes of the flange 21 are machined.

[0094] Furthermore, the sealing surface roughness of the flange 21 is less than 0.8 micrometers to better ensure vacuum sealing performance.

[0095] like Fig. 9 As shown, during the polymer material injection molding process, the injection molding joint surface 22 between the vacuum chamber body 1 and the flange 21 must ensure that the end surface of the vacuum chamber body 1 and the outer wall surface of the vacuum chamber body 1 are fully in contact with the injection molding material to ensure the sealing performance and the structural strength of the sealing position. In other words, the end of the vacuum chamber body 1 needs to be embedded in the middle of the flange 21, and the specific embedding depth can be half the thickness of the flange 21.

[0096] (11) Cleaning and drying the vacuum chamber of the finely processed polymer material. Preferably, the cleaning needs to be first cleaned with a washing solution, and then ultrasonically cleaned with ultrapure water or deionized water. Furthermore, the drying temperature can be selected to be 100°C-130°C, and the drying process temperature can be lower than the glass transition temperature.

[0097] At this point, the processing of the polymer material ultra-high vacuum chamber made of polymer material is completed.

[0098] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limitations on the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0099] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0100] In the embodiments of the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0101] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the present invention. In this specification, the schematic representations of the above terms are not limited to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0102] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A mold for making a polymer material ultra-high vacuum chamber, characterized in that: include: An injection molding component, provided with a core (20) for fixing a vacuum chamber body (1), and a cavity for injection molding a flange (21) on the vacuum chamber body (1); A pressing block assembly is mounted on the top of the injection molding assembly and is provided with an injection pipe (15) connected from the top surface to the mold cavity; A support assembly mounted on the bottom of the injection molding assembly; The injection molding component comprises: a second heating module (5) with a guide groove arranged on the top, a first heating module (3) covering the guide groove, a slider (16) embedded in the guide groove, and a driving component (4) connected to the slider (16); The core (20) is located at the bottom of the guide groove, and the two sliders (16) are symmetrically arranged on both sides of the core (20).

2. The mold for making a polymer material ultra-high vacuum chamber according to claim 1, characterized in that: The slider (16) is provided with a semicircular notch having a partition, and a notch having a profile adapted to the core (20) is provided on the partition, for accommodating the vacuum chamber body (1) and dividing the cavity into a first cavity and a second cavity; The injection pipe (15) is in communication with the first cavity and is used for injection molding the flange (21) at the upper end of the vacuum chamber body (1).

3. The mold for making a polymer material ultra-high vacuum chamber according to claim 2, characterized in that: The first heating module (3) and the second heating module (5) are both provided with heating channels (6) for embedding heating carbon rods.

4. The mold for making a polymer material ultra-high vacuum chamber according to claim 3, characterized in that: The two driving components (4) are respectively arranged at two ends of the guide groove, and are used to drive the sliding block (16) to move along the guide groove.

5. The mold for making a polymer material ultra-high vacuum chamber according to any one of claims 1 to 4, characterized in that: The support assembly comprises: a first support block (7), a second support block (10), a third support block (12), a fourth support block (13) and an adjustment rod (9); The first support block (7) is mounted on the bottom surface of the second heating module (5), and the fourth support block (13) is mounted on the bottom surface of the first support block (7); The second support block (10) and the third support block (12) are movably arranged between the fourth support block (13) and the second heating module (5); The second heating module (5) is provided with a through hole extending from its bottom surface to the bottom of the guide groove, the adjustment rod (9) is movably arranged in the through hole, one end of the adjustment rod (9) is mounted on the second support block (10), and the other end of the adjustment rod (9) extends into the cavity, so as to adjust the position of the vacuum chamber body (1) in the cavity.

6. The mold for making a polymer material ultra-high vacuum chamber according to claim 5, characterized in that: The support assembly also includes: a fixing stud (11), one end of the fixing stud (11) being connected to the second heating module (5), and the other end of the fixing stud (11) being connected to the fourth supporting block (13); A movable sleeve (18) sleeved on the fixed stud (11); The second support block (10) and the third support block (12) are sleeved on the fixing stud (11) via the movable sleeve (18).

7. The mold for making a polymer material ultra-high vacuum chamber according to claim 5, characterized in that: The pressing block assembly also includes: A first pressing block (2) mounted on the top surface of the first heating module (3); A second pressing block (19) mounted on the bottom surface of the first heating module (3); The injection tube (15) passes through the first pressing block (2) and the first heating module (3); the second pressing block (19) is provided with an inclined surface inclined from the end of the guide groove to the middle of the guide groove, and is arranged to abut against the slider (16) through the inclined surface to ensure that the two sliders (16) are in close contact.

8. A process for manufacturing a polymer material ultra-high vacuum chamber, characterized in that: The ultra-high vacuum chamber of polymer materials is manufactured by using the manufacturing mold as described in any one of claims 1 to 7. The process steps include: S1, placing the prefabricated vacuum chamber body (1) into the manufacturing mold; S2, heating and heat preservation treatment of the production mold; S3, injecting the molten polymer material into the manufacturing mold at an injection pressure between 100 MPa and 150 MPa, and performing a pressure-maintaining treatment to form a flange (21) at one end of the vacuum chamber body (1); S4, after the mold is naturally cooled, demoulding the vacuum chamber body (1) with the flange (21) injection-molded at one end, and machining the flange (21) to remove the middle portion of the flange (21); S5, rotating the vacuum chamber body (1) by 180° and then placing it into the manufacturing mold again, and repeating steps S2 to S4 to form a flange (21) at the other end of the vacuum chamber body (1).

9. The process for manufacturing a polymer material ultra-high vacuum chamber according to claim 8, characterized in that: The vacuum chamber that has been molded as one is finely processed, and the roughness of the sealing surface of the flange (21) is set to be less than 0.8 microns.

10. The process for manufacturing a polymer material ultra-high vacuum chamber according to claim 9, characterized in that: Cleaning and drying the vacuum chamber after finishing; During the cleaning process, first use a detergent solution to clean, then use ultrapure water or deionized water for ultrasonic cleaning; During the drying process, the drying temperature is maintained between 100°C and 130°C.

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