A high-precision thin-film sheet resistance tester and a testing method

Abstract

The present invention relates to the technical field of sheet resistance testing, and more specifically, it relates to a high-precision thin-film sheet resistance tester and a testing method, including a sheet resistance tester main body, and a testing probe electrically connected to the sheet resistance tester main body. A pedestal is integrally formed on the outer circle of the testing probe, and a flattening mechanism is rotatably installed on the pedestal. An elastic reset mechanism is arranged above the pedestal, and the elastic reset mechanism and the flattening mechanism are meshed with each other. The flattening mechanism includes a flattening pressure rod rotatably installed on the pedestal, and further includes a flattening assembly arranged on the flattening pressure rod, and an anti-rotation gear arranged on the flattening assembly. The present invention solves the problems that when the traditional thin-film sheet resistance tester tests an uneven thin film, the measured sheet resistance value has an error, affecting the accuracy and reliability of the test result, and also avoids the situation of damage to the thin film caused by excessive tearing when flattening the thin film.

Description

Technical Field

[0001] The present invention relates to the technical field of sheet resistance testing, and more specifically, it relates to a high-precision thin film sheet resistance tester and a testing method. Background Art

[0002] Sheet resistance (i.e., square resistance) is a crucial physical parameter that reflects the electrical conductivity of thin film materials. Sheet resistance testing is widely used in industries such as electronics, optoelectronics, and semiconductors. Especially in fields such as thin film solar cells, touchscreens, and conductive films, the accurate measurement of sheet resistance is crucial for ensuring product quality and performance.

[0003] During the testing process of traditional thin film sheet resistance testers, the surface of the thin film material is often uneven, such as bulging and wrinkling. When the thin film surface is uneven, the contact area and pressure between the test probe and the thin film will change, resulting in errors in the measured sheet resistance value, thereby affecting the accuracy and reliability of the test results.

[0004] In addition, when flattening the thin film, existing testing equipment usually uses fixed flattening mechanisms. These mechanisms are prone to over-tearing or scratching the thin film during the flattening process, especially for thinner thin film materials. This kind of damage is particularly obvious, which not only affects the accuracy of the test results but may also lead to the scrapping of the thin film material, increasing the production cost. Summary of the Invention

[0005] (I) Technical Problems to be Solved

[0006] Aiming at the problems existing in the prior art, the present invention provides a high-precision thin film sheet resistance tester and a testing method to solve the problem that when testing uneven thin films with traditional thin film sheet resistance testers, the measured sheet resistance value has errors, affecting the accuracy and reliability of the test results as mentioned in the background art.

[0007] (II) Technical Solutions

[0008] To achieve the above object, the present invention provides the following technical solution: A high-precision thin film sheet resistance tester includes a sheet resistance tester main body and a test probe electrically connected to the sheet resistance tester main body. An outer ring of the test probe is integrally formed with a pedestal, and a flattening mechanism is rotatably installed on the pedestal. An elastic reset mechanism is arranged above the pedestal, and the elastic reset mechanism and the flattening mechanism are meshed with each other;

[0009] The flattening mechanism includes a flattening pressure rod rotatably installed on the pedestal, a flattening component arranged on the flattening pressure rod, and a rotation prevention gear arranged on the flattening component;

[0010] An accommodating cavity is provided at one end of the stretching and pressing rod away from the pedestal, and a pressure unlocking mechanism is provided inside the accommodating cavity;

[0011] The anti-rotation gear is arranged in the accommodating cavity, and the anti-rotation gear is engaged with the pressure unlocking mechanism in an initial state.

[0012] The present invention is further configured such that the stretching assembly includes a stretching roller rotatably mounted on an end of the stretching pressure rod away from the pedestal, and a rubber pad provided on a circumferential side wall of the stretching roller;

[0013] The stretching roller is rotatably installed through the rotating shafts at both ends and the stretching pressure rod, and the anti-rotation gear is fixedly connected to the rotating shaft of the stretching roller.

[0014] The present invention is further configured such that the pressure unlocking mechanism includes a rotation-stop plate rotatably mounted in the accommodating cavity, and a resisting assembly provided on one side of the rotation-stop plate;

[0015] The abutment assembly abuts against and pushes the anti-rotation plate and the tooth groove of the anti-rotation gear to engage.

[0016] The present invention is further configured such that a guide groove is provided in the accommodating cavity, and the abutment component is slidably installed in the guide groove.

[0017] The present invention is further configured such that the resistance assembly includes a push spring and a slider arranged in the guide groove, and a push rod arranged on the slider and in resistance with the anti-rotation plate.

[0018] The present invention is further configured such that the elastic reset mechanism includes a reset spring and a drive ring sleeved on the outer circumference of the test probe, and a drive rack arranged on the drive ring.

[0019] The present invention is further configured such that a driving tooth block is provided at one end of the stretching and pressing rod close to the pedestal, and the driving tooth block and the driving rack are engaged for transmission.

[0020] The present invention is further configured such that the outer ring of the test probe is threadedly sleeved with a limiting sleeve, and the limiting sleeve and the drive ring are in conflict and matched.

[0021] The present invention is further configured such that a support frame is provided on the main body of the square resistance tester, and the support frame and the main body of the square resistance tester are rotatably mounted.

[0022] The present invention also provides the following technical solution: a high-precision thin film square resistance testing method, comprising the high-precision thin film square resistance tester, and,

[0023] S1. Place the film to be tested on the testing workbench;

[0024] S2. Press down the test probe, and flatten the thin film through the flattening component in the flattening mechanism;

[0025] S3. After the thin film is flattened, the probe of the test probe contacts the thin film for sheet resistance testing;

[0026] S4. After the test is completed, lift the test probe upward so that the flattening component retracts under the action of the elastic reset mechanism.

[0027] (III) Beneficial Effects

[0028] Compared with the prior art, the present invention provides a high-precision thin film sheet resistance tester and a testing method, having the following beneficial effects:

[0029] 1. Through the design of the pressure application and unlocking mechanism and the flattening component, the present invention can automatically adjust the state of the flattening component after flattening the thin film, changing from pressing and flattening to rolling and flattening. This method effectively avoids excessive tearing of the thin film by the flattening component when continuing to press down the test probe for sheet resistance testing, thereby protecting the integrity of the thin film and reducing the damage to the thin film caused by the testing process.

[0030] 2. The present invention abandons the commonly used torsion spring structure in the traditional design and instead adopts an elastic reset mechanism composed of a reset spring, a driving ring, a driving rack, etc. This design not only simplifies the structure of the device, making the assembly and maintenance of the device more convenient, but also avoids the problem that it is difficult to replace the torsion spring due to the decrease in torsion during long-term use. At the same time, the design without using the torsion spring also enables the flattening component to be closely attached in the initial state, protecting the test probe, improving the convenience and reliability of the device, and the flattening component that is closely attached in the initial state can have a larger flattening range and wider applicability. Description of the Drawings

[0031] Figure 1 It is a schematic diagram of the overall structure of the high-precision thin film sheet resistance tester.

[0032] Figure 2 It is a schematic diagram of the initial state structure of the flattening mechanism.

[0033] Figure 3 For Figure 2 The enlarged structure schematic diagram at position A in

[0034] Figure 4 It is a schematic diagram of the sectional structure at the guiding groove of the flattening pressure bar.

[0035] Figure 5 For Figure 4 The enlarged structure schematic diagram at position B in

[0036] Figure 6 It is an exploded structure schematic diagram between the elastic reset mechanism and the test probe.

[0037] In the figure: 1. Square resistance tester body; 101. Support frame; 2. Test probe; 201. Base; 202. Limit sleeve; 3. Stretching mechanism; 301. Stretching pressure rod; 302. Anti-rotation gear; 303. Accommodating chamber; 304. Guide groove; 305. Driving gear block; 4. Elastic reset mechanism; 401. Reset spring; 402. Driving ring; 403. Driving rack; 5. Stretching assembly; 501. Stretching roller; 502. Rubber pad; 6. Pressure unlocking mechanism; 601. Anti-rotation plate; 7. Resistance assembly; 701. Push spring; 702. Slider; 703. Push rod. DETAILED DESCRIPTION

[0038] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0039] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0040] In the present invention, unless otherwise specified, directions such as "up" and "down" are generally used with respect to the directions shown in the drawings, or with respect to the vertical, perpendicular or gravity directions; similarly, for ease of understanding and description, "left" and "right" are generally used with respect to the left and right shown in the drawings; "inside" and "outside" refer to the inside and outside relative to the outline of each component itself, but the above-mentioned directions are not used to limit the present invention.

[0041] For examples, see Figure 1 - Figure 6 A high-precision thin-film square resistance tester and a testing method thereof include a square resistance tester body 1 and a test probe 2 electrically connected to the square resistance tester body 1. The outer ring of the test probe 2 is integrally formed with a base 201, and a flattening mechanism 3 is rotatably mounted on the base 201. An elastic reset mechanism 4 is provided above the base 201, and the elastic reset mechanism 4 and the flattening mechanism 3 are engaged with each other.

[0042] The stretching mechanism 3 includes a stretching pressure rod 301 rotatably mounted on the base 201, a stretching assembly 5 provided on the stretching pressure rod 301, and a stop gear 302 provided on the stretching assembly 5;

[0043] An accommodating cavity 303 is formed at one end of the stretching and pressing rod 301 away from the base 201, and a pressure-applying unlocking mechanism 6 is provided inside the accommodating cavity 303;

[0044] The stop gear 302 is disposed in the accommodating cavity 303 , and the stop gear 302 is initially engaged with the pressure unlocking mechanism 6 .

[0045] The test probe 2 is pressed down to fit the thin film, so that the probe on the test probe 2 tests the sheet resistance of the thin film. However, when the thin film is in an uneven state such as bulging or wrinkling, when the current test probe 2 moves down for testing, the thickness of the thin film will be different due to folding of the wrinkles of the thin film, resulting in errors in the measured sheet resistance. In order to improve the test result of the sheet resistance, the present invention rotatably installs a flattening mechanism 3 on both sides of the pedestal 201. The flattening pressure rods 301 of the flattening mechanism 3 are provided with two groups, which are symmetrically rotatably installed on the side wall of the pedestal 201. The flattening assembly 5 is rotatably installed at one end of the flattening pressure rod 301 away from the pedestal 201. In addition, under the action of the elastic reset mechanism 4, the two groups of flattening pressure rods 301 approach each other, so that the flattening assemblies 5 on the flattening pressure rods 301 are in contact with each other in the initial state and are located below the probe of the test probe 2, so that the probe can be protected. At the same time, when the flattening assemblies 5 in contact with each other flatten the thin film, the flattening range is wider.

[0046] The rotational connection relationship between the flattening assembly 5 and the flattening pressure rod 301 needs to be additionally described here. Specifically, as follows, when there is not enough external force acting on the flattening assembly 5, the anti-rotation gear 302 on the flattening assembly 5 meshes with the pressure application unlocking mechanism 6, so that the flattening assembly 5 and the flattening pressure rod 301 cannot rotate in the expanding direction, but can rotate in the direction of the axis of the test probe 2, that is, when there is not enough external force acting on the flattening assembly 5, it is set to be unidirectionally rotatable.

[0047] In this state, when the elastic reset mechanism 4 and the test probe 2 are pressed down, so as to push the two groups of flattening pressure rods 301 to expand outwards, the force required for the flattening assembly 5 to flatten the thin film is extremely small, and it is impossible to drive the anti-rotation gear 302 to push away the meshing and clamping of the pressure application unlocking mechanism 6 through the reaction force. Therefore, when the flattening pressure rod 301 expands outwards, the flattening assembly 5 and the flattening pressure rod 301 cannot rotate. Therefore, the flattening assembly 5 presses the thin film and pulls the thin film in two opposite directions as the two groups of flattening pressure rods 301 expand outwards to flatten the thin film.

[0048] However, due to the different degrees of unevenness of the thin film, after the non-rotating flattening assembly 5 flattens the thin film, the probe of the test probe 2 may not touch the thin film, and thus the sheet resistance of the thin film cannot be tested. At this time, it is necessary to continue to move the test probe 2 downwards, so that the two groups of flattening pressure rods 301 continue to expand until the probe of the test probe 2 touches the thin film and the sheet resistance can be tested. However, continuous downward movement will cause the flattening assembly 5 to excessively tear the thin film through the frictional force of pressing, and slide on the thin film based on the frictional force. At this time, for some thin films, the tearing force and the sliding frictional force will cause damage to the thin film.

[0049] To solve such problems, the pressure-applying unlocking mechanism 6 designed in the present invention, under the application of an external force, pushes the anti-rotation gear 302 to separate from the pressure-applying unlocking mechanism 6, so that the flattening assembly 5 and the flattening pressure rod 301 can rotate. Then, after the flattening assembly 5 initially flattens the thin film, the continued downward movement of the test probe 2 causes the two groups of flattening pressure rods 301 to continue to expand. At this time, the tearing force generated by the flattening assembly 5 on the thin film is converted into a reaction force, and the reaction force is greater than the external force required to unlock the pressure-applying unlocking mechanism 6, thereby pushing the anti-rotation gear 302 and separating the pressure-applying unlocking mechanism 6 from the anti-rotation gear 302, so that the flattening assembly 5 and the flattening pressure rod 301 can rotate. As a result, when the flattening assembly 5 is flattened by downward expansion in the subsequent process, it is in a rolling state, thereby reducing the damage to the thin film. It should be noted that the external force that separates the pressure-applying unlocking mechanism 6 from the anti-rotation gear 302 is less than the tearing force that damages the thin film.

[0050] It should be further explained that the one-way rotation of the flattening assembly 5 without sufficient external force is for the test probe 2 to move upward and retract after the sheet resistance test of the thin film. At this time, if the flattening assembly 5 cannot rotate, then as the two groups of eight-shaped flattening pressure rods 301 rotate and approach each other, the thin film will be driven by the flattening assembly 5 to move synchronously towards the central position, resulting in more wrinkles in the flattened thin film. Especially if the test thin film is flat, after the test is completed, it will also cause the thin film to be folded and damaged. Therefore, when the two groups of eight-shaped flattening pressure rods 301 rotate and approach each other, through the one-way rotation setting, the flattening assembly 5 can roll forward, thus avoiding the folding damage of the thin film.

[0051] Specifically, when performing a square resistance test on an uneven film, the two flattening components 5 that are bonded together are pressed onto the film. At this time, the elastic reset mechanism 4 is pressed down first, so that the flattening pressure rods 301 that are close to each other rotate and expand to an eight-shaped shape on both sides, and then the two groups of flattening pressure rods 301 can be driven to expand to both sides by pressing down the test probe 2, so that the uneven film can be flattened by the flattening component 5 pressed on the film. Whether it is the elastic reset mechanism 4 or the downward pressure of the test probe 2, the two groups of flattening pressure rods 301 can be driven to expand to both sides, and then the film can be flattened by the flattening component 5. After the film is stretched flat, if the probe of the test probe 2 can also be properly Regular testing is sufficient. When the film is stretched flat, the probe of the test probe 2 cannot perform normal testing. The test probe 2 is continuously moved downward, so that the stretching pressure rod 301 continues to expand, thereby driving the stretching assembly 5 to move on the film. However, after the film is stretched flat, the stretching assembly 5 will generate a tearing force on the film when it moves again. The reaction force of the tearing force drives the stop gear 302 on the stretching assembly 5 to push the pressure unlocking mechanism 6, thereby separating the stop gear 302 and the pressure unlocking mechanism 6 from each other, thereby realizing the rotation and advancement of the stretching assembly 5, thereby avoiding damage to the film caused by the tearing force, thereby realizing that the test probe 2 can perform high-precision square resistance testing on the film. The stretching assembly 5 includes a stretching roller 501 rotatably mounted on the end of the stretching pressure rod 301 away from the base 201, and a rubber pad 502 provided on the circumferential side wall of the stretching roller 501;

[0052] The stretching roller 501 is rotatably mounted via the rotating shafts at both ends and the stretching pressure rod 301 , and the anti-rotation gear 302 is fixedly connected to the rotating shaft of the stretching roller 501 .

[0053] By setting the rubber pad 502, the stretching roller 501 can drive the film to be stretched in the opposite direction after pressing the film and as the stretching pressure rod 301 expands and moves. At the same time, the friction force of the rubber pad 502 can prevent the film from shrinking after being stretched, causing bulging and affecting the stretching effect of the film, resulting in inaccurate square resistance test data.

[0054] The pressure unlocking mechanism 6 includes a stop plate 601 rotatably mounted in the accommodating cavity 303 , and a resisting component 7 disposed on one side of the stop plate 601 ;

[0055] The abutting assembly 7 abuts against the anti-rotation plate 601 and the tooth groove of the anti-rotation gear 302 to engage with each other.

[0056] The resistance component 7 is arranged on the side of the forward direction of the anti-rotation plate 601, and its forward direction refers to the direction in which the flattening component 5 is stretched and moved forward. It is mainly used to resist the anti-rotation plate 601 when the flattening component 5 is stretched and moved forward, so that the anti-rotation plate 601 cannot rotate in the forward direction, so that when the flattening component 5 initially stretches the film, the flattening roller 501 does not rotate, and the wrinkled film is pulled in two directions through the rubber pad 502 to achieve stretching.

[0057] After flattening, and when the probe of the test probe 2 cannot perform a square resistance test on the film, as the flattening pressure rod 301 continues to move downward and expand, the reaction force of the friction between the rubber pad 502 on the flattening roller 501 and the film drives the stop gear 302 to push the stop plate 601. The stop plate 601 rotates and pushes the interference component 7 to move. When the stop plate 601 rotates and disengages from the stop gear 302, the flattening roller 501 rotates to the distance of one tooth groove ahead, avoiding excessive tearing of the film and causing damage to the film. A guide groove 304 is defined in the accommodating chamber 303, and the interference component 7 is slidably mounted in the guide groove 304.

[0058] The abutting assembly 7 includes a push spring 701 and a slider 702 disposed in the guide groove 304 , and a push rod 703 disposed on the slider 702 and abutting against the anti-rotation plate 601 .

[0059] The guide groove 304 is opened at the bottom of the accommodating cavity 303, and is an arc-shaped groove opened with the rotation axis of the anti-rotation plate 601 as the center. In the initial state, the push spring 701 pushes the slider 702 to move to one end of the guide groove 304, thereby driving the push rod 703 to push the anti-rotation plate 601 and the tooth groove of the anti-rotation gear 302 to engage.

[0060] The elastic reset mechanism 4 includes a reset spring 401 and a drive ring 402 sleeved on the outer circumference of the test probe 2 , and a drive rack 403 provided on the drive ring 402 .

[0061] A driving gear block 305 is provided at one end of the stretching and pressing rod 301 close to the base 201 , and the driving gear block 305 is meshed with the driving rack 403 for transmission.

[0062] One end of the return spring 401 abuts the top of the pedestal 201, and the other end abuts the drive ring 402. Two symmetrical drive racks 403 are welded to the edge of the drive ring 402. These symmetrical drive racks 403 mesh with the stretching and pressure rods 301 for transmission. The drive racks 403 are double-sided, and a gap exists between the two stretching and pressure rods 301. This gap allows for the insertion of the drive racks 403, which achieves synchronized expansion and contraction of the two stretching and pressure rods 301. The outer ring of the test probe 2 is threadedly connected to the limit sleeve 202, and the limit sleeve 202 and the drive ring 402 are in contact and mating.

[0063] The limit sleeve 202 and the test probe 2 are connected by a threaded connection, so that when the elastic reset ability of the reset spring 401 is insufficient after long-term use, the limit sleeve 202 can be disassembled, and then the drive ring 402 and the reset spring 401 can be removed in turn and then quickly replaced.

[0064] There are three reasons why a torsion spring is not used directly for the stretching and pressing rod 301:

[0065] 1. Disassembly is inconvenient. The torsion spring is generally arranged inside its rotating shaft and has a small structure. When the torsion spring's torque decreases, it is difficult for non-professional maintenance personnel to replace the torsion spring. However, the present invention sleeves the reset spring 401 on the test probe 2, and then drives the two stretching and pressing rods 301 to rotate and reset through the drive ring 402 and the drive rack 403. Its structure is simple and convenient, and the assembly is also relatively simple. During later maintenance, it can be replaced without the need for professional maintenance personnel.

[0066] Second, the setting of the torsion spring prevents the two stretching components 5 from fitting together to protect the test probe 2. If a torsion spring is used and the two stretching components 5 fit together to protect the test probe 2, then when in use, it is necessary to manually pry apart the two fitted stretching components 5, and then press down to make the stretching component 5 stretch the film. However, in this case, the operation becomes meaningless, because manually prying apart the two fitted stretching components 5 is not as good as manually stretching the film. If the stretching components 5 do not need to be manually pried apart, the two stretching components 5 cannot fit together. In summary, the design of the torsion spring either makes the equipment difficult to use, or the stretching component 5 cannot protect the test probe 2.

[0067] 3. The wrinkle degree of the stretched film has a low applicable range. Through the design of the torsion spring, in order to facilitate the use of the equipment, the protection of the test probe 2 will be abandoned. That is, the initial state of the stretching pressure rod 301 is an eight-shaped shape, and the expansion of the eight-shaped stretching pressure rod 301 and the expansion of the flattening pressure rod 301 that are bonded together can be seen. The expansion range of the flattening pressure rod 301 that is bonded together is wider, so that it can be used for films with large wrinkles. The use of a torsion spring to make the stretching pressure rod 301 in an eight-shaped design has a small expansion range. When the wrinkle degree of the film is large, the film may still not be flat after expanding to the bottom.

[0068] A support frame 101 is provided on the main body 1 of the square resistance tester, and the support frame 101 and the main body 1 of the square resistance tester are rotatably installed.

[0069] The support frame 101 is mounted on the main body 1 of the square resistance tester by rotation, so that the device can be supported at different angles when in use, thereby making it more convenient to measure and view data.

[0070] S1. Place the thin film to be measured on the detection workbench;

[0071] S2. Press down the test probe 2, and flatten the thin film through the flattening component 5 in the flattening mechanism 3;

[0072] S3. After the thin film is flat, the probe of the test probe 2 contacts the thin film for sheet resistance measurement;

[0073] S4. After the test is completed, move the test probe 2 upward to retract the flattening component 5 under the action of the elastic reset mechanism 4.

[0074] In all the solutions mentioned above, for the connection between two components, welding, connection with bolts and nuts, bolt or screw connection, or other well-known connection methods can be selected according to the actual situation, which will not be elaborated one by one here. In the above text, whenever it involves a fixed connection, welding is preferably considered. Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and deformations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high-precision thin-film sheet resistance tester, comprising a sheet resistance tester main body (1) and a test probe (2) electrically connected to the sheet resistance tester main body (1), characterized in that: The test probe (2) is provided with a pedestal (201), and a flattening mechanism (3) is rotatably mounted on the pedestal (201); the test probe (2) is provided with an elastic reset mechanism (4) above the pedestal (201), and the elastic reset mechanism (4) and the flattening mechanism (3) are engaged with each other; The stretching mechanism (3) includes a stretching pressure rod (301) rotatably mounted on the pedestal (201), a stretching assembly (5) disposed on the stretching pressure rod (301), and a stop gear (302) disposed on the stretching assembly (5); An accommodating cavity (303) is provided at one end of the stretching and pressing rod (301) away from the pedestal (201), and a pressure-applying unlocking mechanism (6) is provided inside the accommodating cavity (303); The stop gear (302) is disposed in the accommodating cavity (303), and the stop gear (302) is in meshing engagement with the pressure unlocking mechanism (6) in an initial state; The elastic reset mechanism (4) comprises a reset spring (401) sleeved on the outer circumference of the test probe (2) and a drive ring (402), and a drive rack (403) arranged on the drive ring (402); A driving tooth block (305) is provided at one end of the stretching and pressing rod (301) close to the pedestal (201), and the driving tooth block (305) and the driving rack (403) are meshed for transmission; A limiting sleeve (202) is threadedly mounted on the upper end of the circumferential side wall of the test probe (2), and the limiting sleeve (202) and the driving ring (402) are in contact and matched.

2. The high-precision thin-film sheet resistance tester according to claim 1, wherein: The stretching assembly (5) comprises a stretching roller (501) rotatably mounted on one end of the stretching pressure rod (301) away from the pedestal (201), and a rubber pad (502) arranged on the circumferential side wall of the stretching roller (501); The stretching roller (501) is rotatably mounted via the rotating shafts at both ends and the stretching pressure rod (301), and the anti-rotation gear (302) is fixedly connected to the rotating shaft of the stretching roller (501).

3. The high-precision thin-film sheet resistance tester according to claim 2, characterized in that: The pressure unlocking mechanism (6) comprises a rotation-stopping plate (601) rotatably mounted in the accommodating cavity (303), and a resisting component (7) arranged on one side of the rotation-stopping plate (601); The abutting assembly (7) abuts against and pushes the anti-rotation plate (601) and the tooth groove of the anti-rotation gear (302) to engage.

4. The high-precision thin-film sheet resistance tester according to claim 3, wherein: A guide groove (304) is provided in the accommodating cavity (303), and the abutting component (7) is slidably installed in the guide groove (304).

5. The high-precision thin-film sheet resistance tester according to claim 4, wherein: The abutting assembly (7) comprises a pushing spring (701) and a slider (702) arranged in the guide groove (304), and a push rod (703) arranged on the slider (702) and abutting against the anti-rotation plate (601).

6. The high-precision thin-film sheet resistance tester according to claim 5, characterized in that: A support frame (101) is provided on the main body (1) of the square resistance tester, and the support frame (101) and the main body (1) of the square resistance tester are rotatably mounted.

7. A high-precision thin-film sheet resistance testing method, characterized in that: A high-precision thin film square resistance tester comprising any one of claims 1 to 6, and S1. Place the film to be tested on the testing workbench; S2. Press down the test probe (2) to flatten the thin film through the flattening component (5) in the flattening mechanism (3); S3. After the thin film is flattened, the probe of the test probe (2) contacts the thin film for sheet resistance testing; S4. After the test is completed, move the test probe (2) upward to retract the flattening component (5) under the action of the elastic reset mechanism (4).

Images