Flow rate proportional control method, device and semiconductor processing equipment

Abstract

The application provides a flow ratio control method, device and semiconductor processing equipment, which comprises the following steps: determining the maximum value of the ventilation cross-sectional area of all the air inlet pipelines in each air inlet pipeline group according to the pre-configured hardware parameters; determining the region with the maximum flow ratio among multiple regions, and setting the target ventilation area corresponding to the region as the maximum value; calculating the target ventilation area corresponding to each region according to the maximum value and the flow ratio corresponding to each region; obtaining the optimal combination of on-off valves that need to be turned on in the air inlet pipeline group corresponding to each region according to the target ventilation area corresponding to each region by using a preset algorithm; and controlling the on-off valves on the air inlet pipeline with the maximum ventilation cross-sectional area in the air inlet pipeline group corresponding to the region with the maximum flow ratio to be turned on, and controlling each on-off valve in the optimal combination to be turned on. The scheme can be applied to various hardware parameters, and the method for obtaining the combination of on-off valves that need to be turned on is simpler.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor manufacturing, and in particular, to a flow ratio control method and device, and a semiconductor processing apparatus and a computer readable medium. BACKGROUND

[0002] Plasma etching is one of the important processes to ensure the product quality and technical advancement of integrated circuit manufacturing, and its main application is to transfer the pattern exposed and developed on the photoresist layer to the target material, so as to form the designed pattern and three-dimensional structure. The essential process of plasma etching is that the plasma and the target material react physically and chemically to generate volatile by-products, thereby realizing pattern transfer. Therefore, it is crucial to provide active plasma that can react, and the gas source with strong activity becomes a necessary material source for the process steps of ultra-large-scale integrated circuit manufacturing. And as the size of semiconductor devices is getting closer to the physical limit, the etching result is more and more sensitive to gas delivery.

[0003] In order to improve the etching uniformity, it is usually necessary to divide the process chamber of the etching machine into zones for gas input, for example, the interior of the process chamber is divided into a center region, a middle region and an edge region, and the gas flow ratio of each region is controlled. Specifically, a mass flow controller (MFC) is arranged on the gas inlet pipeline corresponding to each region, and the flow of each MFC is controlled according to the preset total gas flow and the target value of the gas flow ratio of multiple regions, so that the gas flow ratio of multiple regions reaches the target value. However, the accuracy of the above-mentioned flow ratio control method depends on the internal hardware PID parameter setting of the MFC, and the control accuracy is not high, and stable control cannot be realized for small flow ratios.

[0004] Another flow ratio control method is to set a gas inlet pipeline group corresponding to each region, each gas inlet pipeline group includes multiple gas inlet pipelines, and a on-off valve is arranged on each gas inlet pipeline. By selectively controlling the on-off valves to be turned on or turned off, the gas flow ratio distributed to multiple regions is controlled. This control method has a fast response speed, and stable control can be realized for small flow ratios, but the method cannot be applied to multiple different hardware parameters at present, and the method of selecting the combination of on-off valves to be turned on to achieve the required gas flow ratio is complex. SUMMARY

[0005] The present application aims to at least solve one of the technical problems existing in the prior art, and proposes a flow ratio control method and device, and a semiconductor processing apparatus, which can be applied to multiple different hardware parameters, and the method of obtaining the combination of on-off valves to be turned on is simpler.

[0006] The application discloses a flow proportion control method applied to a semiconductor processing equipment, and is used for selectively controlling on-off valves on each gas inlet pipeline in a plurality of gas inlet pipeline groups corresponding to a plurality of different regions in a process chamber to be connected or disconnected, so that the gas flow proportion distributed to the plurality of regions is controlled.

[0007] According to a pre-configured hardware parameter, a maximum value of the gas inlet area of all the gas inlet pipelines in each of the gas inlet pipeline groups is determined.

[0008] A region with the maximum flow ratio among the plurality of regions is determined, and a target gas inlet area corresponding to the region is set as the maximum value; the flow ratio corresponding to each of the regions is equal to a ratio of a preset target flow value to a sum of the target flow values of all the regions.

[0009] According to the maximum value and the flow ratio corresponding to each region, a target gas inlet area corresponding to each of the other regions is calculated.

[0010] According to the target gas inlet area corresponding to each of the other regions, an optimal combination of the on-off valves needed to be connected in the gas inlet pipeline group corresponding to each of the other regions is obtained by using a preset algorithm.

[0011] The on-off valve on the gas inlet pipeline with the maximum gas inlet area in the gas inlet pipeline group corresponding to the region with the maximum flow ratio is connected, each of the on-off valves in the optimal combination is connected, and the other on-off valves not in the optimal combination are disconnected, so that the gas flow proportion distributed to the plurality of regions reaches a target gas flow proportion.

[0012] Optionally, the hardware parameters include the number of on-off valves of each of the gas inlet pipeline groups and the gas inlet area of each of the gas inlet pipelines when the on-off valves are in a connected state.

[0013] The maximum value is greater than the sum of the gas inlet areas of the gas inlet pipelines other than the gas inlet pipeline with the maximum gas inlet area in the gas inlet pipeline group.

[0014] Optionally, the calculation of the target gas inlet area corresponding to each of the other regions according to the maximum value and the flow ratio corresponding to each region comprises the following steps.

[0015] The ratio of the maximum value to the maximum flow ratio is calculated as a total target gas inlet area.

[0016] The product of the flow ratio corresponding to each of the other regions other than the region with the maximum flow ratio and the total target gas inlet area is calculated as the target gas inlet area corresponding to each of the other regions.

[0017] Optionally, the method for obtaining the target flow value corresponding to each of the regions comprises the following steps.

[0018] determining a sub-target flow value of an air inlet passage corresponding to each of the regions in the gas distribution device according to a current process recipe;

[0019] calculating the target flow value corresponding to each of the regions according to a pre-configured number of air inlet passages corresponding to each of the regions in the gas distribution device and the sub-target flow value corresponding to each of the regions.

[0020] Optionally, for each of the other regions, the preset algorithm comprises:

[0021] performing n times of calculation processes to obtain n minimum difference values, and taking a valve combination corresponding to a minimum one of the n minimum difference values as the optimal combination; n is the number of on-off valves of the corresponding air inlet pipeline group;

[0022] wherein the kth calculation process, k = 1, 2, …, n, comprises:

[0023] arranging and combining n on-off valves of the corresponding air inlet pipeline group to obtain a valve combination containing k on-off valves needed to be turned on;

[0024] calculating a sum of air passage cross-sectional areas corresponding to the k on-off valves contained in each of the valve combinations;

[0025] calculating a difference value between the target air passage area and the sum of the air passage cross-sectional areas corresponding to each of the valve combinations;

[0026] taking a minimum one of the difference values corresponding to each of the valve combinations as the minimum difference value.

[0027] Optionally, for each of the other regions, the preset algorithm comprises:

[0028] performing n times of calculation processes to obtain n minimum difference values, and taking a valve combination corresponding to a minimum one of the n minimum difference values as the optimal combination; n is the number of on-off valves of the corresponding air inlet pipeline group;

[0029] wherein the kth calculation process, k = 1, 2, …, n, comprises:

[0030] arranging and combining n on-off valves of the corresponding air inlet pipeline group to obtain a valve combination containing k on-off valves;

[0031] calculating a sum of air passage cross-sectional areas corresponding to the k on-off valves contained in each of the valve combinations;

[0032] sorting the sum of the air passage cross-sectional areas corresponding to each of the valve combinations in ascending order;

[0033] The difference between each sum of the ventilation section area and the target ventilation area is calculated in sequence according to the sum of the ventilation section area, and when the difference obtained in this calculation is greater than the difference obtained in the last calculation, the difference obtained in the last calculation is taken as the minimum difference, and the next calculation is stopped; when the difference obtained in this calculation is less than or equal to the difference obtained in the last calculation, the next calculation is continued until the difference obtained at present is greater than the difference obtained in the last calculation, and the difference obtained in the last calculation is taken as the minimum difference.

[0034] Optionally, in the case that there are multiple minimum differences in the n minimum differences, the valve combination containing the least number of on-off valves corresponding to all the minimum differences is selected as the optimal combination.

[0035] Optionally, for each of the other regions, the preset algorithm comprises:

[0036] res[j] = 0, j is the target ventilation area, and j = 0, 1, 2,..., target, target is the target ventilation area corresponding to the region; res[j] is the sum of the ventilation section areas of the valve combination closest to j; res[0] indicates that all the on-off valves of the corresponding air inlet pipeline group are in the off state;

[0037] The following calculation process is performed on each on-off valve of the air inlet pipeline group to obtain the optimal combination:

[0038] The ith on-off valve is selected; i = 1, 2,..., n, n is the number of on-off valves of the corresponding air inlet pipeline group;

[0039] The sum is calculated, wherein sum = res[j-s[i]]+s[i], s[i] is the ventilation section area of the ith on-off valve when it is turned on; res[j-s[i]] is the sum of the ventilation section areas of the valve combination closest to j-s[i]; j = target;

[0040] When sum is greater than res[j], res[j] = sum, and it is recorded that the ith on-off valve needs to be turned on when j = target, and target-1 in the case that j is greater than 1, and the ith on-off valve is selected again; in the case that j is less than or equal to 1, i+1, and the ith on-off valve is selected again;

[0041] When sum is less than or equal to res[j], i+1, and the ith on-off valve is selected again.

[0042] Optionally, after the on-off valves in the optimal combination are turned on and the other on-off valves not in the optimal combination are turned off, the on-off valve on the intake pipeline with the largest cross-sectional area in the intake pipeline group corresponding to the region where the control flow ratio is the largest is turned on.

[0043] Obtaining actual flow values corresponding to each of the regions corresponding to the current process step;

[0044] Calculating flow adjustment values corresponding to each of the regions, the flow adjustment value being equal to the difference between the actual flow value and the target flow value multiplied by a preset fine tuning coefficient;

[0045] Replacing the target flow value corresponding to the next process step with the flow adjustment value.

[0046] As another technical solution, the present application further provides a flow ratio control device, comprising:

[0047] At least one processor;

[0048] A memory having at least one program stored thereon;

[0049] When the at least one program is executed by the at least one processor, the at least one processor implements the above-mentioned flow ratio control method provided by the present application.

[0050] As another technical solution, the present application further provides a semiconductor processing equipment, comprising a process chamber, a plurality of intake pipeline groups, a gas distribution device and a controller, wherein the process chamber is divided into a plurality of different regions; the gas distribution device is provided with a plurality of intake passages corresponding to each of the regions; the plurality of intake pipeline groups correspond to the plurality of regions one by one, and each of the intake pipeline groups supplies gas to the region corresponding thereto through each of the intake passages corresponding to the region; each of the intake pipeline groups comprises a plurality of intake pipelines connected in parallel, and each of the intake pipelines is provided with an on-off valve and a throttle valve, and the throttle valve is used to set the cross-sectional area of the intake pipeline where the on-off valve is turned on;

[0051] The controller selectively controls the on-off valves on each of the intake pipelines in each of the intake pipeline groups to be turned on or turned off to control the flow ratio of the gas distributed to the plurality of regions by using the above-mentioned flow ratio control method provided by the present application.

[0052] As another technical solution, the present application further provides a computer readable medium having a computer program stored thereon, wherein the program is executed by a processor to implement the above-mentioned flow ratio control method provided by the present application.

[0053] The present application has the following advantages:

[0054] The technical scheme of the flow ratio control method and device provided by the application can pre-configure new hardware parameters when the hardware parameters change, can be adapted to various different hardware parameters, and thus can improve the configuration flexibility and universality. On this basis, by determining the maximum value of the ventilation cross-sectional areas of all intake pipelines in the intake pipeline group and determining the region with the maximum flow ratio in the multiple regions, and setting the target ventilation area corresponding to the region as the maximum value, the target ventilation area of the region with the maximum flow ratio can be obtained, and according to the maximum value and the flow ratio corresponding to each region, the target ventilation areas corresponding to other regions can be calculated, and according to the target ventilation areas corresponding to other regions, the optimal combination of the on-off valves in the intake pipeline group corresponding to other regions that need to be connected can be obtained by using a preset algorithm. The application does not need to obtain the valve combination corresponding to the region with the maximum flow ratio, but directly controls the on-off valve on the intake pipeline with the maximum ventilation cross-sectional area in the intake pipeline group corresponding to the region to be connected, so that the calculation of the valve combination of a region can be omitted, and because the target ventilation area corresponding to the region with the maximum flow ratio is known, the calculation method of the target ventilation areas corresponding to other regions is simpler, so that complex calculation is not needed and the algorithm is simpler.

[0055] The semiconductor processing equipment provided by the application can be applied to various different hardware parameters, and the method for obtaining the valve combination that needs to be connected is simpler. BRIEF DESCRIPTION OF DRAWINGS

[0056] Figure 1 The structure diagram of the intake pipeline group in the semiconductor processing equipment provided by the embodiment of the application;

[0057] Figure 2 The flowchart of the flow ratio control method provided by the embodiment of the application;

[0058] Figure 3 The flowchart of the first algorithm used by the embodiment of the application;

[0059] Figure 4 The flowchart of the kth calculation process in the first algorithm used by the embodiment of the application;

[0060] Figure 5 The combination diagram of the five valve combinations obtained in the first calculation process;

[0061] Figure 6 The combination diagram of the ten valve combinations obtained in the second calculation process;

[0062] Figure 7A combination chart for 10 valve combinations obtained in the 3rd calculation process;

[0063] Figure 8 A combination chart for 5 valve combinations obtained in the 4th calculation process;

[0064] Figure 9 A combination chart for 1 valve combination obtained in the 5th calculation process;

[0065] Figure 10 A flow chart of another kth calculation process in the first algorithm used in the embodiment of the present application;

[0066] Figure 11 A trend chart of the difference obtained in the 5th calculation process;

[0067] Figure 12 Another trend chart of the difference obtained in the 5th calculation process;

[0068] Figure 13 A flow chart of the second algorithm used in the embodiment of the present application;

[0069] Figure 14 A flow chart of the calculation process of each on-off valve in the second algorithm used in the embodiment of the present application;

[0070] Figure 15 A structure block diagram of the flow proportion control device provided in the embodiment of the present application. DETAILED DESCRIPTION

[0071] In order to make the skilled in the art better understand the technical solutions of the present application, the flow proportion control method, device and semiconductor processing equipment provided by the present application are described in detail below in combination with the drawings.

[0072] The flow proportion control method provided by the embodiment of the present application is applied to a semiconductor processing equipment, and is used to selectively control the on-off valves on each gas inlet pipeline in a plurality of gas inlet pipeline groups corresponding to a plurality of different regions in a process chamber to be connected or disconnected, so as to control the gas flow proportion distributed to the plurality of regions. Specifically, referring to Figure 1 , the semiconductor processing equipment comprises a process chamber (not shown in the figure), a plurality of gas inlet pipeline groups, a gas distribution device (not shown in the figure) and a controller, wherein the process chamber is divided into a plurality of different regions, for example, three regions, i.e., a center region (center), a middle region (middle) and an edge region (edge), but the embodiment of the present application is not limited thereto, and in actual application, two regions, four regions or more regions can also be divided.

[0073] The gas distribution device is provided with a plurality of gas inlet channels corresponding to each region, for example, the gas distribution device includes a shower plate arranged on the top of the process chamber, and the gas inlet channels are, for example, gas inlet holes arranged in the shower plate, and the gas outlet ends of the gas inlet holes are communicated with the corresponding regions. A plurality of gas inlet pipe groups correspond to the plurality of regions one by one, and each gas inlet pipe group passes gas to the corresponding region through each gas inlet channel corresponding to the region; each gas inlet pipe group includes a plurality of gas inlet pipes 1 connected in parallel, and each gas inlet pipe 1 is provided with an on-off valve 2. When the on-off valve 2 is turned on, the corresponding region can pass gas through the gas inlet pipe 1 where the on-off valve 2 is located, and when the on-off valve 2 is turned off, the gas inlet pipe 1 where the on-off valve 2 is located does not pass gas. In some embodiments of the present application, each gas inlet pipe 1 in each gas inlet pipe group is usually provided with a throttle valve 3 for setting the gas passing cross-sectional area of each gas inlet pipe 1 when the on-off valve 2 is turned on. The larger the gas passing cross-sectional area, the greater the gas flow through the gas inlet pipe 1.

[0074] In a specific embodiment of the present application, as shown in Figure 1 The process chamber is divided into three regions, namely the center region (center), the middle region (middle) and the edge region (edge), and correspondingly, there are three groups of gas inlet pipes, each group of gas inlet pipes includes seven gas inlet pipes 1 connected in parallel, and each gas inlet pipe 1 is provided with an on-off valve 2 and a throttle valve 3. Among them, the seven gas inlet pipes 1 corresponding to the center region (center) are respectively provided with seven on-off valves (V11-V17), the seven gas inlet pipes corresponding to the middle region (middle) are respectively provided with seven on-off valves (V21-V27), and the seven gas inlet pipes corresponding to the edge region (edge) are respectively provided with seven on-off valves (V31-V37).

[0075] The controller selectively controls the on-off valves 2 on each gas inlet pipe 1 in each gas inlet pipe group to be turned on or turned off by using the flow rate proportional control method provided by the embodiments of the present application, so as to control the gas flow rate proportion distributed to the plurality of regions. The gas flow rate proportion can be set according to specific needs, for example, the improvement of the uniformity of the gas distribution of the plurality of regions can be realized by controlling the gas flow rate proportion distributed to the plurality of regions.

[0076] Please refer to Figure 2 The flow rate proportional control method provided by the embodiments of the present application includes:

[0077] S1, determining the maximum value of the gas passing cross-sectional area of all gas inlet pipes in each gas inlet pipe group according to the pre-configured hardware parameters;

[0078] The throttle parameters of the plurality of gas inlets in the same gas inlet group are not the same, and the maximum value exists in the gas passage cross-sectional area, which can be determined according to the pre-configured hardware parameters. The hardware parameters of different gas inlet groups are the same.

[0079] In some embodiments of the present application, the above-mentioned hardware parameters include the number of on-off valves of each gas inlet group and the gas passage cross-sectional area of each gas inlet when the on-off valve is in the on state. In this case, the above-mentioned maximum value is greater than the sum of the gas passage cross-sectional areas of the gas inlets other than the gas inlet with the largest gas passage cross-sectional area. In this way, the target gas passage area of the region with the largest flow ratio can be set to the above-mentioned maximum value in the subsequent step without the need for complex calculation of the target gas passage area of the region, such as selecting the appropriate combination from a plurality of different valve combinations that need to be turned on and calculating the sum of the gas passage cross-sectional areas of the combination as the target gas passage area of the region with the largest flow ratio. Since there are many valve combination methods, the calculation method is very cumbersome.

[0080] Through the above-mentioned step S1, the new hardware parameters can be pre-configured when the hardware parameters change, and the maximum value of the gas passage area suitable for the hardware parameters can be determined, so that it can be adapted to a variety of different hardware parameters, thereby improving the configuration flexibility and versatility.

[0081] S2, determining the region with the largest flow ratio among the plurality of regions, and setting the target gas passage area corresponding to the region to the above-mentioned maximum value; the flow ratio corresponding to each region is equal to the ratio of the preset target flow value to the sum of the target flow values of all regions;

[0082] For example, taking the division of the process chamber into a center region, a middle region and an edge region as an example, the target flow values of the three regions are c1, m1 and e1 respectively, the sum of the target flow values of all regions is sum=c1+m1+e1, the flow ratio corresponding to the center region is rc=c1 / sum, the flow ratio corresponding to the middle region is rm=m1 / sum, and the flow ratio corresponding to the edge region is re=e1 / sum. Thus, the flow ratios of the plurality of regions can be calculated according to the target flow values of the three regions, and the region with the largest flow ratio can be determined therefrom.

[0083] The target flow value corresponding to each region is pre-acquired, and in some embodiments of the present application, the method for acquiring the target flow value corresponding to each region in the above-mentioned step S2 includes:

[0084] S21, determining the sub-target flow value of the gas inlet corresponding to each region in the gas distribution device according to the current process recipe;

[0085] S22, according to the number of the gas inlet channels corresponding to each region in the pre-configured gas distribution device and the sub-target flow value corresponding to each region, a target flow value corresponding to each region is obtained.

[0086] The hardware parameters also include the number of the gas inlet channels corresponding to each region in the gas distribution device, so that the number of new gas inlet channels can be pre-configured when changed, thereby enabling the flow ratio control method of the embodiment to be adapted to a plurality of different numbers of gas inlet channels.

[0087] For example, taking the division of the process chamber into a center region, a middle region and an edge region as an example, the sub-target flow values corresponding to the three regions are c, m and e respectively, which can be obtained from the process recipe. The number of the gas inlet channels corresponding to the three regions are h1, h2 and h3 respectively, so that the target flow value corresponding to the center region c1 = c x h1, the target flow value corresponding to the middle region m1 = m x h2, and the target flow value corresponding to the edge region e1 = e x h3 can be calculated.

[0088] S3, according to the maximum value and the flow ratio value corresponding to each region, a target ventilation area corresponding to each region is obtained;

[0089] The ventilation area is defined as the sum of the ventilation cross-sectional areas of the gas inlet pipelines in the on state in the gas inlet pipeline group corresponding to the region, and the target ventilation area is the target value of the required ventilation area of the process.

[0090] Based on the fact that the larger the ventilation cross-sectional area of the gas inlet pipeline is, the larger the gas flow through the gas inlet pipeline is, the flow ratio value can be equivalent to the ventilation area ratio value, so that the target ventilation area corresponding to each region can be obtained according to the maximum value and the flow ratio value corresponding to each region.

[0091] In some embodiments of the present application, the step S3 comprises:

[0092] S31, calculating the ratio of the maximum value to the maximum flow ratio value as a total target ventilation area;

[0093] S32, calculating the product of the flow ratio value corresponding to each region except the region with the maximum flow ratio value and the total target ventilation area as the target ventilation area corresponding to each region.

[0094] For example, if the flow ratio of the middle region is the largest, the largest value is Amid, the flow ratio of the middle region is rm, and the total target ventilation area Asum = Amid / rm; the flow ratio of the center region is rc, the target ventilation area Acenter of the center region = Asum x rc; the flow ratio of the edge region is re, and the target ventilation area Aedge of the edge region = Asum x re. If the flow ratio of the edge region is the largest, the largest value is Aedge, the flow ratio of the edge region is re, the total target ventilation area Asum = Aedge / re; the flow ratio of the center region is rc, the target ventilation area Acenter of the center region = Asum x rc; the flow ratio of the middle region is rm, and the target ventilation area Amid of the middle region = Asum x rm.

[0095] S4, obtaining the optimal combination of on-off valves in the gas inlet pipeline group corresponding to each region according to the target ventilation area of each region by using a preset algorithm;

[0096] The optimal combination satisfies that the sum of the ventilation cross-sectional areas of the gas inlet pipelines in the combination is close to or equal to the target ventilation area of the corresponding region.

[0097] S5, controlling the on-off valves in the gas inlet pipeline group corresponding to the region with the largest flow ratio to be on, controlling the on-off valves in the optimal combination to be on, and controlling the other on-off valves not in the optimal combination to be off, so that the gas flow ratio allocated to the multiple regions reaches the target gas flow ratio.

[0098] In the gas inlet pipeline group corresponding to the region with the largest flow ratio, only the on-off valves in the gas inlet pipeline with the largest ventilation cross-sectional area are turned on, and the on-off valves in other gas inlet pipelines are turned off. In the gas inlet pipeline group corresponding to each region, only the on-off valves in the optimal combination are turned on, and the other on-off valves not in the optimal combination are turned off.

[0099] In the above step S4, there are multiple algorithms for obtaining the optimal combination. In some embodiments of the present application, for the other regions (regions other than the region with the largest flow ratio), please refer to Figure 3 The preset algorithm includes:

[0100] S41a, performing n times of calculation processes to obtain n minimum differences;

[0101] S42a, taking the minimum difference corresponding valve combination as the optimal combination; n is the number of on-off valves corresponding to the intake pipe group;

[0102] Wherein, please refer to Figure 4 , the kth calculation process, k = 1, 2,..., n, including:

[0103] S411, arranging and combining n on-off valves corresponding to the intake pipe group to obtain C n k valve combinations containing k on-off valves;

[0104] S412, calculating the sum of the ventilation cross-sectional areas corresponding to the k on-off valves contained in each valve combination;

[0105] S413, calculating the difference between the target ventilation area and the sum of the ventilation cross-sectional areas corresponding to C n k valve combinations;

[0106] S414, taking the minimum one of the differences corresponding to C n k valve combinations as the minimum difference.

[0107] For example, taking the target flow area corresponding to each of the above other regions as 3 (omitting units), the number of on-off valves n = 5 corresponding to the intake pipe group, and the ventilation cross-sectional area s[i] = {1, 2, 3, 4, 5} of the intake pipe where the 5 on-off valves are located as an example, the 1st calculation process (k = 1) includes: arranging and combining n on-off valves corresponding to the intake pipe group to obtain C n 1 valve combinations containing 1 on-off valve that needs to be turned on, i.e. 5 valve combinations, as shown in Figure 5 , the 5 valve combinations respectively contain the 5 on-off valves represented by the 5 gray boxes that need to be turned on, i.e. valves 1 to 5. In this case, the sum of the ventilation cross-sectional areas of each valve combination is the ventilation cross-sectional area of the intake pipe where the 1 on-off valve contained is located. Then, the difference between the target ventilation area and the ventilation cross-sectional area of the intake pipe where the 1 on-off valve contained in the 5 valve combinations is calculated, i.e. the difference between 3 and s[i], after traversing 5 times, 5 differences can be obtained, from which the minimum value is determined as the above minimum difference, i.e. 3-3 = 0, at this time the minimum difference diff1 obtained by the 1st calculation process is 0. In the above step S42a, the valve combination {3} corresponding to the minimum difference diff1 is taken as the optimal combination.

[0108] The 2nd calculation process (k = 2) includes:

[0109] Arrange and combine the n on / off valves of the corresponding intake manifold group to obtain C. n 2 A valve combination containing two on / off valves that need to be switched on, i.e., 10 valve combinations, such as... Figure 6 As shown, valve 1, represented by the gray box in the first row, can form four valve combinations with each of the four gray boxes in the second row representing valves 2 to 5; valve 2, represented by the gray box in the first row, can form three valve combinations with each of the three gray boxes in the second row representing valves 3 to 5; valve 3, represented by the gray box in the first row, can form two valve combinations with each of the two gray boxes in the second row representing valves 4 to 5; and valve 4, represented by the gray box in the first row, can form one valve combination with each of the one gray box in the second row representing valve 5, for a total of 10 valve combinations. In this case, the sum of the ventilation cross-sectional areas of each valve combination is the sum of the ventilation cross-sectional areas of the intake pipes containing the two on / off valves it contains. Then, calculate the difference between the sum of the target ventilation areas and the sum of the ventilation cross-sectional areas of the intake pipes containing the two on / off valves in each of the 10 valve combinations, i.e., the difference between 3 and (s[i]+s[j]), where i=1,2,3,4,5, j=i+1, j=2,3,4,5. After traversing 10 times, 10 differences can be obtained. The smallest value among them is determined as the minimum difference, i.e., 3-(1+2)=0. At this time, the minimum difference obtained in the second calculation process is diff2=0. In the above step S42a, the valve combination {1,2} corresponding to the minimum difference diff2 is taken as the optimal combination.

[0110] The third calculation process (k=3) includes:

[0111] Arrange and combine the n on / off valves of the corresponding intake manifold group to obtain C. n 3 A valve combination containing 3 on / off valves that need to be turned on, i.e., 10 valve combinations, such as... Figure 7As shown, the valve 1 represented by the gray block in the first row and the valve 2 represented by the gray block in the second row can form three valve combinations with the valve 3 to the valve 5 represented by the three gray blocks in the third row respectively; the valve 2 represented by the gray block in the first row and the valve 3 represented by the gray block in the second row can form two valve combinations with the valve 4 to the valve 5 represented by the two gray blocks in the third row respectively; the valve 2 represented by the gray block in the first row and the valve 4 represented by the gray block in the second row can form one valve combination with the valve 5 represented by the gray block in the third row; the valve 3 represented by the gray block in the first row and the valve 4 represented by the gray block in the second row can form one valve combination with the valve 5 represented by the gray block in the third row, and the total number of valve combinations is ten. In this case, the sum of the venting cross-sectional areas of each valve combination is the sum of the venting cross-sectional areas of the intake pipelines in which the three on-off valves are located. Then, the difference between the target venting area sum and the sum of the venting cross-sectional areas of the intake pipelines in which the three on-off valves are located in the ten valve combinations is calculated, that is, the difference between 3 and (s[i]+s[j]+s[m]), where i=1, 2, 3, 4, 5, j=i+1, j=2, 3, 4, 5, m=j+1, m=3, 4, 5. After ten iterations, ten difference values can be obtained, and the minimum value is determined as the minimum difference value, that is, 3-(1+2+3)=-3, and the minimum difference value diff3 obtained in the third calculation process is 3 (taking the absolute value). In the step S42a, the valve combination {1, 2, 3} corresponding to the minimum difference value diff3 is taken as the optimal combination.

[0112] Similarly, the valve combinations corresponding to the fourth calculation process (k=4) and the fifth calculation process (k=5) are as shown in Figure 8 and Figure 9 The minimum difference value diff4 and the minimum difference value diff5 can be obtained by calculation respectively, and in the step S42a, the valve combinations corresponding to the minimum difference value diff4 and the minimum difference value diff5 respectively are taken as the optimal combination.

[0113] In some embodiments of the present application, in the case where there are multiple minimum values in the n minimum difference values, the valve combination in which the number of on-off valves is the least among the valve combinations corresponding to all the minimum values is selected as the optimal combination. For example, the valve combinations corresponding to the minimum difference value diff5 obtained in the fifth calculation process are {3} and {1, 2}, and in this case, the valve combination in which the number of on-off valves is the least among the valve combinations is selected as the optimal combination, that is, the valve combination {3}.

[0114] In some other embodiments of the present application, in order to reduce the unnecessary iteration times in each calculation process, the preset algorithm can be improved, specifically, the improved preset algorithm improves the step S413 and the step S414, and the other steps are the same as the above embodiments, specifically, please refer toFigure 10 After the execution of the above step S412, further comprising:

[0115] S413', sorting the sum of the ventilation cross-sectional areas corresponding to the C n k valve combinations in ascending order;

[0116] S414', according to the sorting of the sum of the ventilation cross-sectional areas, calculating the difference between the sum of the ventilation cross-sectional areas and the target ventilation area in turn, and when the difference obtained in this calculation is greater than the difference obtained in the last calculation, taking the difference obtained in the last calculation as the minimum difference and stopping the next calculation; when the difference obtained in this calculation is less than or equal to the difference obtained in the last calculation, continuing the next calculation until the difference obtained in the current calculation is greater than the difference obtained in the last calculation, and taking the difference obtained in the last calculation as the minimum difference.

[0117] Through sorting, the sum of the ventilation cross-sectional areas corresponding to the C n k valve combinations is increasing with the increase of the number of calculations, based on which the trend of the difference can be judged by comparing the difference obtained in this calculation with the difference obtained in the last calculation, specifically, if the difference obtained in this calculation is greater than the difference obtained in the last calculation, it indicates that the difference is monotonically increasing, at this time the minimum difference is obtained and the next calculation is not needed; if the difference obtained in this calculation is less than the difference obtained in the last calculation, it indicates that the difference is monotonically decreasing, at this time the next calculation is needed to continue until the difference increases, i.e. the minimum difference is obtained.

[0118] For example, taking the target flow area corresponding to each of the above other regions as 3 (omitting units), the number of on-off valves n = 5 of the intake pipeline group, and the ventilation cross-sectional area s[i] = {1, 2, 3, 4, 5} of the intake pipeline where the 5 on-off valves are located as an example, as shown in Figure 11 , the 5 triangular points are respectively the ventilation cross-sectional areas of the intake pipelines where the 5 on-off valves are located, and the 5 circular points are respectively the differences obtained in the 5 calculation processes. Among them, the difference obtained in the first calculation is 2, the difference obtained in the second calculation is 1, the difference is decreasing, at this time the third calculation is needed to continue, the difference obtained in the third calculation is 0, the difference is decreasing, at this time the fourth calculation is needed to continue, the difference obtained in the fourth calculation is 1, the difference is increasing, then the difference obtained in the third calculation is taken as the minimum difference. And the fifth calculation is not needed.

[0119] For another example, as shown in Figure 12 , the difference obtained in the first calculation is 1, the difference obtained in the second calculation is 2, the difference is increasing, then the difference obtained in the first calculation is taken as the minimum difference. And the second calculation is not needed.

[0120] In some other embodiments of the present application, in order to reduce the number of valve actions and further improve the response speed, especially for the case where the number n of on-off valves in the intake pipe group is large (for example, n is greater than 10), please refer to Figure 13 For each of the above other regions (except for the region with the largest flow ratio), the preset algorithm that can be used includes:

[0121] S41b, res[j] = 0, j is the target ventilation area, and j = 0, 1, 2,..., target, target is the target ventilation area corresponding to the region; res[j] is the sum of the ventilation cross-sectional area of the valve combination closest to i; res[0] represents that all on-off valves of the corresponding intake pipe group are in the off state;

[0122] The above step S41b is used to initialize res[j] corresponding to the value of all j.

[0123] S42b, the following calculation process is performed on each on-off valve of the intake pipe group to obtain the optimal combination, that is, each on-off valve performs the following calculation process to determine whether to turn on the on-off valve, and after all on-off valves complete the calculation process, the on-off valves that are turned on constitute the optimal combination.

[0124] Specifically, please refer to Figure 14 The calculation process includes:

[0125] S421, select the ith on-off valve, i = 1, 2,..., n, n is the number of on-off valves corresponding to the intake pipe group;

[0126] S422, calculate sum, where sum = res[j-s[i]]+s[i], s[i] is the ventilation cross-sectional area of the ith on-off valve when turned on; res[j-s[i]] is the sum of the ventilation cross-sectional area of the valve combination closest to j-s[i]; j = target;

[0127] S423, compare sum with res[j], if sum is greater than res[j], execute step S424; if sum is less than or equal to res[j], execute step S425;

[0128] S424, res[j] = sum, and record that the ith on-off valve needs to be opened when j = target, and determine whether j is less than or equal to 1, if j is less than or equal to 1, execute step S425; if j is greater than 1, target-1, and return to execute the above step S421;

[0129] S425, i+1, and return to execute the above step S421.

[0130] For example, the target flow area corresponding to the other regions described above is 3 (omitting units), the number of on-off valves n = 3 of the intake pipe group, and the air passage cross-sectional area s[i] = {1, 2, 5} of the three on-off valves in the on state. In the above step S41b, res[j] = 0 is obtained, so that all on-off valves of the corresponding intake pipe group are in the off state; wherein j = 0, 1, 2,..., target, target = 3. In the above step S42b, the following calculation process is performed on the three on-off valves of the intake pipe group:

[0131] In the above step S421, the first on-off valve is selected, i.e. i = 1;

[0132] In the above step S422, sum is calculated, wherein sum = res[j-s[i]]+s[i], s[1] is the air passage cross-sectional area of the first on-off valve in the on state, s[1] = 1; j = target = 3, so that:

[0133] sum = res[j-s[i]]+s[i] = res[3-s[1]]+s[1] = res[3-1]+1 = res[2]+1 = 1, wherein the initial value of res[2] is 0.

[0134] In the above step S423, sum is compared with res[j], wherein res[j] = res[3] = 0, and the initial value of res[3] is 0. Since sum = 1 > 0, the above step S424 is executed.

[0135] In the above step S424, res[j] = sum = 1 is obtained, and it is recorded that the first on-off valve needs to be opened when j = target (i.e. = 3), and it is judged whether j is less than or equal to 1. Since j = 3 > 1, target - 1 is obtained, and the above step S421 is returned to be executed.

[0136] Then, the above step S422 is executed again for the first on-off valve (target = 2 at this time), and sum is calculated, wherein j = target = 2; so that:

[0137] sum = res[j-s[i]]+s[i] = res[2-s[1]]+s[1] = res[2-1]+1 = res[1]+1 = 1, wherein the initial value of res[1] is 0.

[0138] Again, step S423 is performed to compare sum with res[j], where res[j] = res[target] = res[2] = 0, and the initial value of res[2] is 0. Since sum = 1 > 0, step S424 is performed again to make res[j] = sum = 1, and record that the first on-off valve needs to be opened when j = target (i.e., = 2), and determine whether j is less than or equal to 1. Since j = 2 > 1, target is made to be 1, and step S421 is performed again.

[0139] Then, step S422 is performed for the first time for the first on-off valve (at this time, target = 1), and sum is calculated, where since j = target = 1, it can be deduced that:

[0140] sum = res[j-s[i]]+s[i] = res[1-s[1]]+s[1] = res[1-1]+1 = res[0]+1 = 1, where the initial value of res[0] is 0.

[0141] Again, step S423 is performed to compare sum with res[j], where res[j] = res[target] = res[2] = 0, and the initial value of res[2] is 0. Since sum = 1 > 0, step S424 is performed again to make res[j] = sum = 1, and record that the first on-off valve needs to be opened when j = target (i.e., = 2), and determine whether j is less than or equal to 1. Since j = 2 > 1, target is made to be 1, and step S421 is performed again.

[0142] In step S425, i is made to be i + 1, and step S421 is performed again. At this time, i = 2, and the calculation process is started for the second on-off valve. After the calculation process for the third on-off valve is completed, the optimal combination {1, 2} is finally obtained. It should be noted that, in the calculation process for the third on-off valve, the case of res[3] = res[-2] - 2 occurs, and since res[-2] is meaningless, the process is exited abnormally, and the state of the third on-off valve is still off.

[0143] In some embodiments of the present application, when multiple valve combinations are obtained, the valve combination with the least number of on-off valves is selected as the optimal combination.

[0144] The above calculation process can effectively simplify the calculation process without full permutation of the number n of on-off valves of the corresponding intake pipeline group. The above preset algorithm (including steps S41b and S42b) can effectively reduce the valve action and further improve the response speed, and is particularly suitable for the case where the number n of on-off valves of the intake pipeline group is large (for example, n is greater than 10). However, the calculation process is only applicable to the case where target and s[i] are integers. Therefore, in the case where target and s[i] are decimals, target and s[i] can be simultaneously enlarged by an integer multiple at the same scale until target and s[i] are integers. In addition, after the integer multiple at the same scale is enlarged, if the obtained integer is too large, the order of magnitude of the calculation will increase. Therefore, an offset offset (<0) can be added to target and s[i] at the same time to make target and s[i] offset downward at the same time to reduce the order of magnitude, so as to further reduce the calculation amount. For example, if s[i] = {0.0125, 0.0234, 0.0412} and target = 0.051, s[i] = {125, 234, 412} and target = 510 can be obtained by enlarging 10000 times at the same scale. In addition, if downward offset is required, an offset offset = -100 can be added to target and s[i] at the same time to obtain s[i] = {25, 134, 312} and target = 410.

[0145] The above two preset algorithms are a first algorithm including steps S41b and S42b, and a second algorithm including steps S41b and S42b. In some embodiments of the present application, whether the first algorithm or the second algorithm is used can be selected according to the number n of on-off valves of the intake pipeline group in practice. For example, before step S4 is performed, the following step is further included:

[0146] It is judged whether the number n of on-off valves of the intake pipeline group is less than a preset number (for example, 10). If yes, the first algorithm is used. If no, the second algorithm is used.

[0147] In some embodiments of the present application, after step S5, the following steps are further included:

[0148] S6, obtaining actual flow values corresponding to each region corresponding to the current process step;

[0149] S7, calculating flow adjustment values corresponding to each region, the flow adjustment value being equal to the difference between the actual flow value and the target flow value multiplied by a preset fine adjustment coefficient;

[0150] S8, replacing the target flow value corresponding to the next process step with the flow adjustment value.

[0151] By means of the steps S6 to S8, the target flow value corresponding to the next process step can be fine-tuned, so that the error introduced by the hardware can be avoided, and the matching of the chamber before or the adjustment between processes can be beneficial.

[0152] To sum up, the technical scheme of the flow ratio control method and device provided by the embodiment of the present application can pre-configure new hardware parameters when the hardware parameters change, can be adapted to a variety of different hardware parameters, and thus can improve the configuration flexibility and have universality. On this basis, by determining the maximum value of the ventilation cross-sectional area of all intake pipelines in the intake pipeline group and determining the region with the maximum flow ratio in the multiple regions, and setting the target ventilation area corresponding to the region as the maximum value, the target ventilation area of the region with the maximum flow ratio can be obtained, and according to the maximum value and the flow ratio corresponding to each region, the target ventilation area corresponding to each region can be calculated. According to the target ventilation area corresponding to each region, the optimal combination of on-off valves that need to be connected in the intake pipeline group corresponding to each region is obtained by using a preset algorithm. The present application does not need to obtain the valve combination corresponding to the region with the maximum flow ratio, but directly controls the on-off valve connected to the intake pipeline with the maximum ventilation cross-sectional area in the intake pipeline group corresponding to the region, so that the calculation of the valve combination of a region can be omitted. Since the target ventilation area corresponding to the region with the maximum flow ratio is known, the calculation method of the target ventilation area corresponding to each region is simpler, so that complex calculation is not needed and the algorithm is simpler.

[0153] As another technical scheme, the embodiment of the present application also provides a semiconductor processing equipment, please refer to Figure 1 The semiconductor processing equipment includes a process chamber, multiple intake pipeline groups, a gas distribution device and a controller, wherein the process chamber is divided into multiple different regions, for example, three regions, namely a center region (center), a middle region (middle) and an edge region (edge), but the embodiment of the present application is not limited thereto, and in actual application, two regions, four regions or more regions can also be divided.

[0154] The gas distribution device is provided with a plurality of gas inlets corresponding to each region, for example, the gas distribution device includes a shower plate arranged on the top of the process chamber, and the gas inlets are, for example, gas inlets arranged in the shower plate, and the gas outlet ends of the gas inlets are communicated with the corresponding regions. A plurality of gas inlet pipe groups correspond to the plurality of regions one by one, and each gas inlet pipe group is communicated with the corresponding region through each gas inlet corresponding to the region; each gas inlet pipe group includes a plurality of gas inlet pipes 1 connected in parallel, and each gas inlet pipe 1 is provided with an on-off valve 2. When the on-off valve 2 is turned on, the corresponding region can be communicated with gas through the gas inlet pipe 1 where the on-off valve 2 is located, and when the on-off valve is turned off, the gas inlet pipe 1 where the on-off valve 2 is located is not communicated with gas. In some embodiments of the present application, each gas inlet pipe 1 in each gas inlet pipe group is usually provided with a throttle valve 3 for setting the gas passage cross-sectional area of each gas inlet pipe 1 when the on-off valve 2 is turned on. The larger the gas passage cross-sectional area, the greater the gas flow through the gas inlet pipe 1.

[0155] In a specific embodiment of the present application, as shown in Figure 2 The process chamber is divided into three regions, namely a center region (center), a middle region (middle) and an edge region (edge), and correspondingly, there are three groups of gas inlet pipes, each group of gas inlet pipes includes seven gas inlet pipes 1 connected in parallel, and each gas inlet pipe 1 is provided with an on-off valve 2 and a throttle valve 3. Among them, seven on-off valves (V11-V17) are arranged on the seven gas inlet pipes corresponding to the center region (center), seven on-off valves (V21-V27) are arranged on the seven gas inlet pipes corresponding to the middle region (middle), and seven on-off valves (V31-V37) are arranged on the seven gas inlet pipes corresponding to the edge region (edge).

[0156] The controller selectively controls the on-off valves on each gas inlet pipe in each gas inlet pipe group to be turned on or turned off by using the flow ratio control method provided by the embodiments of the present application, so as to control the gas flow ratio distributed to the plurality of regions. The gas flow ratio can be set according to specific needs, for example, the improvement of the uniformity of the gas distribution of the plurality of regions can be realized by controlling the gas flow ratio distributed to the plurality of regions.

[0157] The semiconductor processing equipment provided by the embodiments of the present application can be applied to a plurality of different hardware parameters by using the above-mentioned flow ratio control device provided by the embodiments of the present application, and the method adopted by the valve combination required to be turned on is simpler.

[0158] Figure 15 The structural block diagram of the flow ratio control device provided in the embodiments of the present application is as shown in Figure 15As shown, the flow proportion control device includes at least one processor 301, a memory 302, and at least one I / O interface 303. The memory 302 stores at least one program, and when the at least one program is executed by the at least one processor 301, the at least one processor implements the steps in the flow proportion control method described above in any of the embodiments of the present application. The at least one I / O interface 303 is connected between the processor and the memory, and is configured to realize the information interaction between the processor and the memory.

[0159] The processor 301 is a device with data processing capability, including but not limited to a central processing unit (CPU) and the like; the memory 302 is a device with data storage capability, including but not limited to a random access memory (RAM, more specifically SDRAM, DDR, etc.), a read-only memory (ROM), an electrically erasable programmable read-only memory (EEPROM), and a flash memory (FLASH); and the I / O interface (read-write interface) 303 is connected between the processor 301 and the memory 302, and can realize the information interaction between the processor 301 and the memory 302, including but not limited to a data bus (Bus) and the like.

[0160] In some embodiments, the processor 301, the memory 302, and the I / O interface 303 are connected to each other and to other components of the computing device through a bus 304.

[0161] In some embodiments, the processor 301 includes an FPGA.

[0162] According to embodiments of the present disclosure, a computer readable medium is also provided. The computer readable medium stores a computer program, and when the program is executed by a processor, the steps in any of the flow proportion control methods described above are implemented.

[0163] In particular, according to embodiments of the present disclosure, the processes described above with reference to the flowcharts can be implemented as a computer software program. For example, embodiments of the present disclosure include a computer program product comprising a computer program carried on a machine readable medium, the computer program comprising program code for executing the methods shown in the flowcharts. In such embodiments, the computer program can be downloaded and installed from a network by a communication part, and / or installed from a detachable medium. When the computer program is executed by a central processing unit (CPU), the above-described functions defined in the system of the present disclosure are executed.

[0164] It should be noted that the computer-readable medium shown in the disclosure can be a computer-readable signal medium or a computer-readable storage medium or any combination thereof. The computer-readable storage medium may, for example, but is not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, device or apparatus, or any combination thereof. More specific examples of the computer-readable storage medium can include, but are not limited to, an electrical connection having at least one conductive wire, a portable computer diskette, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In the disclosure, the computer-readable storage medium can be any tangible medium containing or storing a program that can be used by or in conjunction with an instruction execution system, device or apparatus. In the disclosure, the computer-readable signal medium can include a data signal carried in a baseband or as a part of a carrier wave, which carries computer-readable program code. Such a propagated data signal can take many forms, including but not limited to an electromagnetic signal, an optical signal, or any suitable combination thereof. The computer-readable signal medium can also be any computer-readable medium other than the computer-readable storage medium, which can send, propagate or transmit a program for use by or in conjunction with an instruction execution system, device or apparatus. The program code contained on the computer-readable medium can be transmitted by any suitable medium, including but not limited to wireless, wire, optical cable, RF, etc., or any suitable combination thereof.

[0165] The flowcharts and block diagrams in the drawings illustrate the possible implementation architectures, functions and operations of the systems, methods and computer program products according to various embodiments of the disclosure. In this regard, each block in the flowcharts or block diagrams can represent a module, a program segment, or a part of code, which contains at least one executable instruction for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions noted in the blocks can occur in different orders than that shown in the drawings. For example, two blocks that are shown in succession can actually be executed substantially in parallel, and sometimes in reverse order, depending on the involved functions. It should also be noted that each block in the block diagrams and / or flowcharts, and the combination of blocks in the block diagrams and / or flowcharts, can be implemented by a dedicated hardware-based system that performs the specified functions or operations, or can be implemented by a combination of dedicated hardware and computer instructions.

[0166] It is understood that the above embodiments are only exemplary for illustrating the principles of the present application, and the present application is not limited thereto. Various modifications and improvements can be made by those skilled in the art without departing from the spirit and scope of the present application, and these modifications and improvements are also considered as the protection scope of the present application.

Claims

1. A flow ratio control method applied to a semiconductor processing apparatus, for selectively controlling on or off of a shut-off valve on each gas inlet line in a plurality of gas inlet line groups respectively corresponding to a plurality of different zones in a process chamber, to control a gas flow ratio distributed to the plurality of zones, characterized in that, The method comprises the following steps: determining the maximum value of the ventilation cross-sectional area of all the intake pipes in each of the intake pipe groups according to the pre-configured hardware parameters; determining the region with the maximum flow ratio among the multiple regions, and setting the target ventilation area corresponding to the region as the maximum value; the flow ratio corresponding to each of the regions is equal to the ratio of the preset target flow value to the sum of the target flow values of all the regions; calculating the target ventilation areas corresponding to the other regions according to the maximum value and the flow ratio corresponding to each region; obtaining the optimal combination of on-off valves in the intake pipe group corresponding to the other regions according to the target ventilation areas corresponding to the other regions by using a preset algorithm; controlling the on-off valve on the intake pipe with the maximum ventilation cross-sectional area in the intake pipe group corresponding to the region with the maximum flow ratio to be turned on, controlling each of the on-off valves in the optimal combination to be turned on, and controlling the other on-off valves not in the optimal combination to be turned off, so that the gas flow ratio allocated to the multiple regions reaches the target gas flow ratio; wherein, for the other regions, the preset algorithm comprises: performing n times of calculation process to obtain n minimum differences, and taking the valve combination corresponding to the minimum one of the n minimum differences as the optimal combination; n is the number of on-off valves corresponding to the intake pipe group; wherein, the kth calculation process, k = 1, 2,..., n, comprises: Arranging combinations of the n on-off valves of the corresponding intake pipeline group to obtain a valve combination comprising k on-off valves that need to be turned on; calculating the sum of the ventilation cross-sectional areas corresponding to the k on-off valves included in each valve combination; determining the minimum one of the differences corresponding to the valve combinations as the minimum difference according to the differences between the sum of the ventilation cross-sectional areas and the target ventilation area; or setting res[j] = 0, j is the target ventilation area, and j = 0, 1, 2,..., target, target is the target ventilation area corresponding to the region; res[j] is the sum of the ventilation cross-sectional areas of the valve combination closest to j; res[0] represents that all the on-off valves of the corresponding intake pipe group are in the off state; performing the following calculation process on each on-off valve of the intake pipe group to obtain the optimal combination: selecting the ith on-off valve; i = 1, 2,..., n, n is the number of on-off valves corresponding to the intake pipe group; calculating sum, wherein sum = res[j-s[i]]+s[i], s[i] is the ventilation cross-sectional area of the ith on-off valve when it is turned on; res[j-s[i]] is the sum of the ventilation cross-sectional areas of the valve combination closest to j-s[i]; j = target; when sum is greater than res[j], setting res[j] = sum, and recording that the ith on-off valve needs to be opened when j = target, and in the case that j is greater than 1, setting target-1, and returning to the selection of the ith on-off valve; in the case that j is less than or equal to 1, setting i+1, and returning to the selection of the ith on-off valve; when sum is less than or equal to res[j], setting i+1, and returning to the selection of the ith on-off valve.

2. The flow ratio control method according to claim 1, characterized by, The hardware parameters include the number of on-off valves of each of the intake pipe groups and the air passage cross-sectional areas of each of the intake pipes when the on-off valves are in the on state; The maximum value is greater than the sum of the air passage cross-sectional areas of the intake pipes other than the intake pipe with the largest air passage cross-sectional area in the intake pipe group.

3. The flow ratio control method according to claim 1, characterized by, The calculation of the target air passage areas corresponding to each of the other regions according to the maximum value and the flow rate ratio corresponding to each region comprises: The ratio of the maximum value to the largest flow rate ratio is calculated as the total target air passage area; The product of the flow rate ratio corresponding to each of the regions other than the region with the largest flow rate ratio and the total target air passage area is calculated as the target air passage area corresponding to each of the other regions.

4. The flow ratio control method according to claim 1, characterized by, The method for obtaining the target flow rate value corresponding to each of the regions comprises: According to the current process recipe, the sub-target flow rate values of the intake passages corresponding to each of the regions in the gas distribution device are determined; According to the number of the intake passages corresponding to each of the regions in the gas distribution device configured in advance and the sub-target flow rate values corresponding to each of the regions, the target flow rate value corresponding to each of the regions is calculated.

5. The flow ratio control method according to any one of claims 1 to 4, characterized by, For each of the other regions, the determination of the minimum one of the differences corresponding to the valve combinations as the minimum difference according to the difference between the sum of the air passage cross-sectional areas and the target air passage area comprises: a difference between the target ventilation area and a sum of the ventilation cross-sectional areas corresponding to the valve combinations, respectively the valve combinations, respectively Will The smallest of the differences corresponding to each valve combination is taken as the minimum difference.

6. The flow ratio control method according to any one of claims 1 to 4, characterized by, For each of the other regions, the determination of the minimum one of the differences corresponding to the valve combinations as the minimum difference according to the difference between the sum of the air passage cross-sectional areas and the target air passage area comprises: ordering the sum of the ventilation cross-sectional areas corresponding to the valve combinations in ascending order ordering the sum of the ventilation cross-sectional areas corresponding to the valve combinations in ascending order According to the ordering of the sum of the air passage cross-sectional areas, the difference between the sum of the air passage cross-sectional areas and the target air passage area is calculated in turn, and when the difference obtained in this calculation is greater than the difference obtained in the last calculation, the difference obtained in the last calculation is taken as the minimum difference, and the next calculation is stopped; when the difference obtained in this calculation is less than or equal to the difference obtained in the last calculation, the next calculation is continued until the difference obtained in the current calculation is greater than the difference obtained in the last calculation, and the difference obtained in the last calculation is taken as the minimum difference.

7. The flow ratio control method according to claim 5, characterized by, In the case where the minimum one of the n minimum differences has multiple, the valve combination containing the least number of on-off valves among the valve combinations corresponding to all the minimum differences is selected as the optimal combination.

8. The flow ratio control method according to any one of claims 1 to 4, characterized by, After the on-off valve of the intake pipe with the largest air passage cross-sectional area in the intake pipe group corresponding to the region with the largest control flow rate ratio is turned on, each of the on-off valves in the optimal combination is turned on, and the other on-off valves not in the optimal combination are turned off, the method further comprises: Obtaining the actual flow rate values corresponding to each of the regions corresponding to the current process step; Calculating the flow rate adjustment values corresponding to each of the regions, which are equal to the product of the difference between the actual flow rate value and the target flow rate value and a preset fine adjustment coefficient; Replacing the target flow rate values corresponding to the next process step with the flow rate adjustment values.

9. A flow rate ratio control device, comprising: at least one processor; a memory having at least one program stored thereon; The at least one program, when executed by the at least one processor, causes the at least one processor to implement the flow ratio control method as claimed in any one of claims 1-8.

10. A semiconductor processing apparatus comprising a process chamber, a plurality of gas inlet line sets, a gas distribution device, and a controller, wherein, The process chamber is divided into a plurality of different zones; the gas distribution device is provided with a plurality of gas inlet channels corresponding to each of the zones; a plurality of the gas inlet line groups correspond to a plurality of the zones one by one, and each of the gas inlet line groups passes gas to the corresponding zone through each of the gas inlet channels corresponding to the zone; each of the gas inlet line groups comprises a plurality of gas inlet lines connected in parallel, and each of the gas inlet lines is provided with an on-off valve and a throttle valve, and the throttle valve is used to set the gas passage cross-sectional area of the gas inlet line when the on-off valve is turned on; The controller uses the flow ratio control method as claimed in any one of claims 1-8 to selectively control the on-off valves on each of the gas inlet lines of each of the gas inlet line groups to be turned on or turned off, so as to control the gas flow ratio distributed to a plurality of the zones.

11. A computer readable medium having stored thereon a computer program, wherein, The program is executed by the processor to implement the flow ratio control method as claimed in any one of claims 1-8.

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