Microphone and electronic equipment

Abstract

The invention provides a microphone and electronic equipment. The microphone comprises a substrate, a first back plate and a first vibrating diaphragm, and the substrate is provided with a first sound hole; an accommodating cavity is formed between the first back plate and the substrate; the first back plate comprises a first weakening part and a first reinforcing part, the first weakening part is provided with a second sound hole, and the first weakening part and the first reinforcing part are arranged in a staggered manner; the first vibrating diaphragm is arranged in the accommodating cavity, and the first vibrating diaphragm can divide the accommodating cavity into a first cavity communicated with the first sound hole and a second cavity communicated with the second sound hole. According to the invention, fracture failure at a stress concentration position due to excessive deformation of the vibrating diaphragm can be avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of microphones, and more specifically, to a microphone and an electronic device. Background Art

[0002] The diaphragm of the microphone will bend and deform when the airflow is large and contact the back plate. However, the strength of the back plate in the prior art is weak. When the diaphragm is bent and deformed greatly, the back plate cannot resist the diaphragm, causing the diaphragm to be over-deformed and break at the stress concentration point.

[0003] Therefore, it is necessary to provide a new technical solution to solve the above technical problems. Summary of the invention

[0004] An object of the present invention is to provide a new technical solution for a microphone and an electronic device.

[0005] According to a first aspect of the present invention, a microphone is provided, wherein the microphone comprises:

[0006] A substrate, wherein the substrate is provided with a first sound hole;

[0007] a first back plate, wherein a receiving cavity is formed between the first back plate and the base; the first back plate comprises a first weakened portion and a first strengthened portion, the first weakened portion is provided with a second sound hole, and the first weakened portion and the first strengthened portion are alternately arranged;

[0008] A first diaphragm is disposed in the accommodating cavity, and the first diaphragm can separate the accommodating cavity into a first chamber communicating with the first sound hole and a second chamber communicating with the second sound hole.

[0009] Optionally, the first reinforcement portion is provided with a third sound hole, and the aperture of the second sound hole is larger than the aperture of the third sound hole.

[0010] Optionally, the second sound hole is at least one of a hexagonal sound hole and a circular sound hole;

[0011] The third sound hole is at least one of a hexagonal sound hole and a circular sound hole.

[0012] Optionally, the first reinforcement portion is a straight line extending radially from the center of the first back plate.

[0013] Optionally, the first reinforcement portion is a curve surrounding the center of the first back plate.

[0014] Optionally, the first reinforcement portion includes a first sub-reinforcement portion and a second sub-reinforcement portion, the first sub-reinforcement portion is a straight line radiating from the center of the first back plate, and the second sub-reinforcement portion is a curve surrounding the center of the first back plate.

[0015] Optionally, the first backplane includes a first insulating layer, a first conductive layer and a second insulating layer, and the first conductive layer is disposed between the first insulating layer and the second insulating layer;

[0016] Alternatively, the first back plate includes a second conductive layer close to the first diaphragm and a third insulating layer far from the first diaphragm;

[0017] Alternatively, the first back plate includes a fourth insulating layer close to the first diaphragm and a third conductive layer far from the first diaphragm.

[0018] Optionally, it further includes a second back plate, which is arranged in the first cavity; the second back plate includes a second weakened portion and a second strengthened portion, the second weakened portion is provided with a fourth sound hole, and the second weakened portion and the second strengthened portion are staggered.

[0019] Optionally, a second diaphragm is further included, and the second diaphragm is arranged on a side of the first back plate away from the substrate through a second insulating portion.

[0020] According to a second aspect of the present invention, there is provided an electronic device, comprising a microphone as described in any one of the first aspects.

[0021] The microphone in the embodiment of the present application is provided with a first reinforcement part on the first back plate, so that the first reinforcement part can reinforce the structure of the first back plate, thereby effectively improving the reliability of the first back plate. Furthermore, when the bending deformation of the first diaphragm is large, the first back plate with higher reliability can better resist the first diaphragm, so as to avoid the first diaphragm from excessively deforming and breaking and failing at the stress concentration point.

[0022] Other features and advantages of the present invention will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

[0024] Figure 1 Schematic diagram of the structure of the microphone in the first embodiment of the present invention.

[0025] Figure 2 It is a structural schematic diagram of the first backplane in the prior art.

[0026] Figure 3 It is a schematic structural diagram of the first backplane in the first embodiment of the present invention.

[0027] Figure 4It is a schematic structural diagram of the first backplane in the second embodiment of the present invention.

[0028] Figure 5 It is a schematic structural diagram of the first backplane in the third embodiment of the present invention.

[0029] Figure 6 It is a schematic structural diagram of the first backplane in the fourth embodiment of the present invention.

[0030] Figure 7 It is a schematic structural diagram of the first backplane in the fifth embodiment of the present invention.

[0031] Figure 8 It is a schematic structural diagram of the first backplane in the sixth embodiment of the present invention.

[0032] Fig. 9 It is a schematic structural diagram of the first backplane in the seventh embodiment of the present invention.

[0033] Fig.10 It is a schematic structural diagram of the first backplane in the eighth embodiment of the present invention.

[0034] Fig.11 It is a schematic structural diagram of the first backplane in the ninth embodiment of the present invention.

[0035] Fig.12 is a cross-sectional view of a first back plate in one embodiment of the present invention.

[0036] Fig.13 is a cross-sectional view of a first back plate in one embodiment of the present invention.

[0037] Fig.14 is a cross-sectional view of a first back plate in one embodiment of the present invention.

[0038] Fig.15 Schematic diagram of the structure of the microphone in the second embodiment of the present invention.

[0039] Fig.16 Schematic diagram of the structure of a microphone in the third embodiment of the present invention.

[0040] Description of reference numerals:

[0041] 1. base; 11. first sound hole;

[0042] 2. first backplane; 201. first insulating layer; 202. first conductive layer; 203. second insulating layer; 204. second conductive layer; 205. third insulating layer; 206. fourth insulating layer; 207. third conductive layer; 21. first weakened portion; 211. second acoustic hole; 22. first reinforcement portion; 220. third acoustic hole; 221. first sub-reinforcement portion; 222. second sub-reinforcement portion;

[0043] 3. first insulating portion; 31. first sub-insulating portion; 32. second sub-insulating portion;

[0044] 4. first diaphragm; 41. fixing part; 42. vibration part;

[0045] 5. Accommodating chamber; 51. First chamber; 52. Second chamber;

[0046] 6. Second back plate; 61. Fourth sound hole;

[0047] 7. Second diaphragm;

[0048] 8. A second insulating portion. DETAILED DESCRIPTION

[0049] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangement of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention unless otherwise specifically stated.

[0050] The embodiments of the present application will be described in detail below, and examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and should not be understood as limiting the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0051] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0052] According to one embodiment of the present application, a microphone is provided, which includes a substrate 1, a first back plate 2 and a first diaphragm 4, the substrate 1 is provided with a first sound hole 11; an accommodating cavity 5 is formed between the first back plate 2 and the substrate 1; the first back plate 2 includes a first weakened portion 21 and a first reinforced portion 22, the first weakened portion 21 is provided with a second sound hole 211, and the first weakened portion 21 and the first reinforced portion 22 are alternately arranged; the first diaphragm 4 is arranged in the accommodating cavity 5, and the first diaphragm 4 can separate the accommodating cavity 5 into a first chamber 51 connected to the first sound hole 11 and a second chamber 52 connected to the second sound hole 211.

[0053] Specifically, Figure 1As shown, the microphone of the embodiment of the present application includes a substrate 1, and the substrate 1 is provided with a first sound hole 11 penetrating the substrate 1, and the first sound hole 11 is used for airflow to pass through. The first back plate 2 is provided on one side of the substrate 1, and the first back plate 2 and the substrate 1 are connected together through the first insulating portion 3, and the accommodating cavity 5 is formed between the first back plate 2 and the substrate 1. The microphone also includes a first diaphragm 4, and the first diaphragm 4 includes a fixed portion 41 and a vibrating portion 42, and the fixed portion 41 is fixed to the accommodating cavity 5 through the first insulating portion 3; the vibrating portion 42 can bend and deform under the impact of airflow, and when the airflow passing through the first sound hole 11 is large, the vibrating portion 42 can bend and deform more and contact the first back plate 2, at this time, the first back plate 2 can resist the deformation of the vibrating portion 42, so as to avoid excessive deformation of the vibrating portion 42 and fracture failure at the stress concentration point.

[0054] The first back plate 2 includes a first weakened portion 21 and a first reinforced portion 22. The first weakened portion 21 is provided with a second sound hole 211 penetrating the first weakened portion 21. The second sound hole 211 is used for the airflow passing through the first sound hole 11 to pass through. The first reinforced portion 22 is a strip structure with no sound hole, or a strip structure with a third sound hole 220 penetrating the first reinforced portion 22 and having a smaller aperture than the second sound hole 211. The first reinforced portion 22 can reinforce the structure of the first back plate 2. In this article, "weakened portion" and "reinforced portion" are a pair of relative concepts. The strength of the weakened portion is weaker than that of the reinforced portion, and the strength of the reinforced portion is stronger than that of the weakened portion.

[0055] Thus, if Figures 3 to 11 As shown, compared to Figure 2 The first back plate 2 in the prior art shown in the present application can effectively improve the structural strength of the first back plate 2 by providing the first reinforcement part 22, so that the reliability of the first back plate 2 is higher. Furthermore, when the airflow passing through the first sound hole 11 is large so that the bending deformation of the vibration part 42 of the first diaphragm 4 is large, the first back plate 2 with higher reliability can better resist the first diaphragm 4, and prevent the first diaphragm 4 from breaking and failing at the stress concentration due to excessive deformation.

[0056] In addition, the first weakened portion 21 and the first strengthened portion 22 are arranged alternately in the present application to further improve the structural strength of the first back plate 2. Figure 3 , Figure 4 , Figure 7 and Figure 8As shown in FIG. 1 , when the first reinforcing portion 22 is a straight line formed on the first back plate 2 and extending radially from the center of the first back plate 2, the staggered arrangement of the first weakened portion 21 and the first reinforcing portion 22 means that a strip-shaped first reinforcing portion 22 is sandwiched between two adjacent fan-shaped first weakened portions 21; or Figure 5 and Fig. 9 As shown, when the first reinforcing portion 22 is a curve formed on the first back plate 2 around the center of the first back plate 2, the staggered arrangement of the first weakened portion 21 and the first reinforcing portion 22 means that one of the two adjacent first weakened portions 21 is located at the center of the first back plate 2, and the other is arranged away from the center of the first back plate 2, and the first reinforcing portion 22 is arranged between the two first weakened portions 21 and completely separates the two first weakened portions 21.

[0057] Furthermore, the strip structure of the first reinforcement part 22 in the present application is only an exemplary description. For example, the strip structure can be a straight line or a curve. Those skilled in the art can choose according to actual needs, and the present application does not make any specific restrictions here.

[0058] In addition, in the present application, the first insulating portion 3 may completely wrap the fixed portion 41, that is, the side of the fixed portion 41 away from the vibrating portion 42 is completely wrapped by the first insulating portion 3; or Figure 1 As shown, the first insulating part 3 may also include a first sub-insulating part 31 and a second sub-insulating part 32, the first sub-insulating part 31 is used to connect the fixed part 41 and the substrate 1, and the second sub-insulating part 32 is used to connect the fixed part 41 and the first backplane 2. At this time, the side of the fixed part 41 away from the vibration part 42 is not completely wrapped by the first insulating part 3.

[0059] In one embodiment, the first reinforcement portion 22 is provided with a third sound hole 220 , and the aperture of the second sound hole 211 is larger than the aperture of the third sound hole 220 .

[0060] Specifically, Figures 3 to 6 As shown, although the first reinforcement portion 22 without a sound hole in the embodiment of the present application can achieve reinforcement of the structure of the first back plate 2, the first reinforcement portion 22 without a sound hole will block part of the airflow, that is, the contact area between the first back plate 2 and the airflow passing through the first sound hole 11 is larger, causing the microphone to generate excessive noise and affecting the use effect of the microphone.

[0061] Therefore, in order to solve the above problems, Figures 7 to 11As shown, in the embodiment of the present application, a third sound hole 220 is provided on the first reinforcement part 22, and the aperture of the second sound hole 211 is made larger than the aperture of the third sound hole 220. Therefore, on the one hand, the structure of the first back plate 2 is reinforced by the first reinforcement part 22, thereby preventing the first diaphragm 4 from breaking and failing at the stress concentration point due to excessive deformation, thereby improving the reliability of the first diaphragm 4; on the other hand, the third sound hole 220 is used for the airflow passing through the first sound hole 11 to pass through, thereby preventing the second back plate 6 from having too large a contact area with the airflow passing through the first sound hole 11, thereby effectively reducing the noise generated by the microphone and improving the use effect of the microphone. In this article, the aperture of the second sound hole 211 is larger than the aperture of the third sound hole 220, which means that under the condition of the same hole density, that is, under the condition of the same number of holes per unit area, the aperture of the second sound hole 211 is larger than the aperture of the third sound hole 220. Therefore, although the third sound hole 220 is also provided on the first reinforcement part 22, the strength of the first reinforcement part 22 is still higher than the strength of the first weakened part 21.

[0062] In addition, this application also tests Figure 2 , Figure 4 and Figure 8 The maximum displacement of the first diaphragm 4 of the first back plate 2 in the blowing test is obtained in Table 1:

[0063]

[0064] Table 1

[0065] It can be seen from Table 1 that when there is no sound hole on the first reinforcement part 22, the maximum displacement percentage of the first diaphragm 4 is 94.7%, that is, the first back plate 2 can reduce the maximum displacement of the first diaphragm 4 by 5.3% during the blowing test. When the third sound hole 220 is provided on the first reinforcement part 22, the maximum displacement percentage of the first diaphragm 4 is 97.5%, that is, the first back plate 2 can reduce the maximum displacement of the first diaphragm 4 by 2.5% during the blowing test.

[0066] Thus, when the microphone requires a better sound effect, the first back plate 2 can be provided with a first reinforcement portion 22 having the third sound hole 220; and when the microphone requires the first diaphragm 4 to have a longer service life, the first back plate 2 can be provided with a first reinforcement portion 22 without a sound hole.

[0067] In one embodiment, the second sound hole 211 is at least one of a hexagonal sound hole and a circular sound hole; the third sound hole 220 is at least one of a hexagonal sound hole and a circular sound hole.

[0068] Specifically, Figures 7 to 11 As shown, on the one hand, since the hexagonal sound holes can form a honeycomb structure on the first back plate 2, and the honeycomb structure not only has excellent firmness and stability, but also has good bearing capacity, the first back plate 2 can better resist the first diaphragm 4, so as to avoid the first diaphragm 4 from breaking and failing at the stress concentration point due to excessive deformation; on the other hand, since the hexagonal sound holes also have excellent sound wave dispersion and absorption characteristics, especially the absorption of noise in a specific frequency range, the noise generated by the microphone can be further reduced, thereby improving the use effect of the microphone.

[0069] In addition, the second sound hole 211 and the third sound hole 220 of the present application can also be circular sound holes. In this way, the circular geometric shape can make the sound propagate more evenly in all directions, and the focusing or deviation of the sound can be effectively reduced. Moreover, since the edge of the circular sound hole is relatively smooth, compared with sound holes of other shapes, the reflection and diffraction of sound waves at the edge of the hole can be more effectively reduced, so it also significantly avoids the microphone from generating excessive interference waves, thereby improving the clarity and purity of the microphone.

[0070] In addition, the second sound hole 211 and the third sound hole 220 of the present application can also be other closely spaced shapes, such as triangles and squares. Those skilled in the art can make a choice according to actual needs, and the present application does not make any specific restrictions here.

[0071] In one embodiment, the first reinforcement portion 22 is a straight line radially extending from the center of the first back plate 2 .

[0072] Specifically, Figure 3 , Figure 4 , Figure 7 and Figure 8As shown, the embodiment of the present application sets the first reinforcement part 22 as a straight line radiating from the center of the first back plate 2. On the one hand, when the first back plate 2 resists the bending deformation of the first diaphragm 4, the stress exerted on the first back plate 2 can be evenly dispersed to various parts of the first back plate 2, thereby avoiding stress concentration on the first back plate 2 caused by the bending deformation of the first diaphragm 4, thereby effectively improving the stability and anti-destruction ability of the first back plate 2; on the other hand, the first reinforcement part 22 which is a straight line radiating from the center of the first back plate 2, that is, the first reinforcement part 22 diverging from the center of the first back plate 2, can make the various parts support each other and form a whole, so that when the first back plate 2 is subjected to a large external force, the first back plate 2 can also maintain a relatively stable shape, thereby effectively reducing the deformation and displacement of the first back plate 2, and improving the effect of the first back plate 2 resisting the bending deformation of the first diaphragm 4.

[0073] Among them, Figure 3 and Figure 7 As shown, in the embodiment of the present application, the first reinforcement portion 22 may be provided with three strip structures, which radiate radially from the center of the first back plate 2 to improve the stability of the first back plate 2 and resist the bending deformation of the first diaphragm 4 .

[0074] Of course, in order to further improve the stability of the first back plate 2 and resist the bending deformation effect of the first diaphragm 4, as Figure 4 and Figure 8 As shown, in the embodiment of the present application, the first reinforcement part 22 may also be provided with six strip structures, and the six strip structures are radially divergent from the center of the first back plate 2. In addition, in the embodiment of the present application, the first reinforcement part 22 may also be provided with four, five, seven or eight strip structures, and those skilled in the art may select according to actual needs, and the present application does not make any specific restrictions here.

[0075] In one embodiment, the first reinforcement portion 22 is a curve surrounding the center of the first back plate 2 .

[0076] Specifically, Figure 5 and Fig. 9As shown, the embodiment of the present application sets the first reinforcement portion 22 as a curve around the center of the first back plate 2. On the one hand, when the first back plate 2 resists the bending deformation of the first diaphragm 4, the stress exerted on the first back plate 2 can be evenly dispersed on the entire curve, thereby avoiding stress concentration on the first back plate 2 caused by the bending deformation of the first diaphragm 4, thereby effectively improving the stability and anti-destruction ability of the first back plate 2; on the other hand, the first reinforcement portion 22 of the curve around the center of the first back plate 2 can form a whole, so that the first back plate 2 has stronger structural rigidity and anti-deformation ability.

[0077] Among them, Figure 5 and Fig. 9 As shown, the first reinforcement part 22 of the embodiment of the present application can be provided with six strip structures, and the six strip structures are connected end to end to form a hexagon. Of course, the first reinforcement part 22 of the embodiment of the present application can also be provided with one, three, four or five strip structures to form a circle, triangle, square or pentagon, etc., and those skilled in the art can choose according to actual needs, and the present application does not make specific restrictions here.

[0078] In one embodiment, the first reinforcement portion 22 includes a first sub-reinforcement portion 221 and a second sub-reinforcement portion 222 , wherein the first sub-reinforcement portion 221 is a straight line radiating from the center of the first back plate 2 , and the second sub-reinforcement portion 222 is a curve surrounding the center of the first back plate 2 .

[0079] Specifically, Figure 6 , Fig.10 and Fig.11 As shown, in the embodiment of the present application, the first reinforcement portion 22 may include a first sub-reinforcement portion 221 and a second sub-reinforcement portion 222. The first sub-reinforcement portion 221 and the second sub-reinforcement portion 222 may be respectively set to different reinforcement structures to make the first back panel 2 more adaptable, so that the first back panel 2 can better adapt to microphones with various different requirements, and because different reinforcement structures can interact with each other, the stability and reliability of the first back panel 2 can be further improved, so that the first back panel 2 has a higher resistance effect.

[0080] Among them, Figure 6 , Fig.10 and Fig.11As shown, in the present application, the first sub-reinforcement portion 221 can be a straight line radiating from the center of the first back plate 2, and the second sub-reinforcement portion 222 can be a curve around the center of the first back plate 2. At this time, the third sound hole 220 may not be provided on the first sub-reinforcement portion 221 and the second sub-reinforcement portion 222, or the third sound hole 220 may be provided on both the first sub-reinforcement portion 221 and the second sub-reinforcement portion 222, or the third sound hole 220 may be provided on either the first sub-reinforcement portion 221 or the second sub-reinforcement portion 222. Those skilled in the art can make a selection based on actual needs, and the present application does not make any specific restrictions here.

[0081] In one embodiment, the first back plate 2 includes a first insulating layer 201, a first conductive layer 202 and a second insulating layer 203, and the first conductive layer 202 is arranged between the first insulating layer 201 and the second insulating layer 203; or, the first back plate 2 includes a second conductive layer 204 close to the first diaphragm 4 and a third insulating layer 205 away from the first diaphragm 4; or, the first back plate 2 includes a fourth insulating layer 206 close to the first diaphragm 4 and a third conductive layer 207 away from the first diaphragm 4.

[0082] Specifically, Fig.12 As shown, the embodiment of the present application can avoid short circuit failure caused by contact between the first conductive layer 202 and the external environment by configuring the first backplane 2 to have a three-layer structure including a first insulating layer 201, a first conductive layer 202 and a second insulating layer 203, thereby effectively improving the reliability of the first backplane 2.

[0083] Of course, if Fig.13 and Fig.14 As shown, on the basis of satisfying the reliability of the first back plate 2, the first back plate 2 can also be set to a double-layer structure having a second conductive layer 204 close to the first diaphragm 4 and a third insulating layer 205 far away from the first diaphragm 4, or the first back plate 2 can also be set to a double-layer structure having a fourth insulating layer 206 close to the first diaphragm 4 and a third conductive layer 207 far away from the first diaphragm 4, so as to further reduce the manufacturing cost of the microphone.

[0084] In one embodiment, the microphone also includes a second back plate 6, which is arranged in the first chamber 51; the second back plate 6 includes a second weakened portion (not shown in the figure) and a second reinforced portion (not shown in the figure), the second weakened portion is provided with a fourth sound hole 61, and the second weakened portion and the second reinforced portion are staggered.

[0085] Specifically, Fig.15As shown, in the embodiment of the present application, the second back plate 6 is disposed in the first chamber 51 , so that the first back plate 2 and the second back plate 6 can be disposed on both sides of the first diaphragm 4 respectively, thereby forming a double back plate structure in the microphone.

[0086] Therefore, since the dual backplate structure can form a differential capacitance in the microphone, and the design of this differential capacitance can make the amplitude of the first diaphragm 4 larger, the sensitivity and signal-to-noise ratio of the microphone can be further improved. In addition, the microphone with a dual backplate structure has better linearity in the process of reaching the acoustic overload point. Compared with the traditional single backplate microphone, the sound pressure level at which the audio begins to distort is increased by nearly 10dB, which can further reduce the distortion of the microphone and make the use of the microphone better. Furthermore, the microphone with a dual backplate structure can also optimize the frequency response of the microphone, so that the microphone has a flatter response characteristic in a wider frequency range.

[0087] In addition, the structure of the second back plate 6 of the present application may be the same as or different from that of the first back plate 2. For example, the second back plate 6 may include a second weakened portion and a second strengthened portion, the second weakened portion is provided with a fourth sound hole 61, and the second weakened portion and the second strengthened portion are arranged alternately, so that the reliability of the second back plate 6 is improved by the second strengthened portion, so that the second back plate 6 can also better resist the bending deformation of the first diaphragm 4; or Figure 2 As shown, the second back plate 6 may also be a back plate only provided with the second sound hole 211 , and those skilled in the art may make a selection according to actual needs, and the present application does not make any specific limitation here.

[0088] In one embodiment, the microphone further includes a second diaphragm 7 , and the second diaphragm 7 is disposed on a side of the first back plate 2 facing away from the substrate 1 through a second insulating portion 8 .

[0089] Specifically, Fig.16 As shown, the present application arranges the second diaphragm 7 on the side of the first back plate 2 away from the substrate 1 through the second insulating portion 8, so that a dual diaphragm structure can be formed in the microphone. The dual diaphragm structure can not only capture sound details more accurately through two independent diaphragms, making the microphone more sensitive, but also enable the microphone to capture a wider frequency range, so that the microphone has a richer and more comprehensive sound performance.

[0090] Among them, the material of the second insulating part 8 of the present application can be the same as the material of the first insulating part 3, or can be different from the material of the first insulating part 3. Technical personnel in this field can choose according to actual needs, and the present application does not make any specific restrictions here.

[0091] According to another embodiment of the present application, an electronic device is provided, wherein the electronic device includes the microphone described in the embodiment of the present application.

[0092] Specifically, the microphone described in the embodiment of the present application can be applied to wearable electronic devices such as smart watches, smart glasses or smart bracelets, as well as other electronic devices such as mobile phones, tablet computers, virtual reality terminal devices, augmented reality terminal devices, drones, radars and vehicle-mounted devices. Technical personnel in this field can make a choice according to actual needs, and this application does not make any specific restrictions here.

[0093] The above embodiments focus on the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. Considering the simplicity of the text, they will not be repeated here.

[0094] Although some specific embodiments of the present invention have been described in detail by way of example, it will be appreciated by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It will be appreciated by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A microphone, characterized in that: include: A substrate (1), wherein the substrate (1) is provided with a first sound hole (11); A first back plate (2), wherein a receiving cavity (5) is formed between the first back plate (2) and the base (1); the first back plate (2) comprises a first weakened portion (21) and a first reinforced portion (22), the first weakened portion (21) being provided with a second sound hole (211), and the first weakened portion (21) and the first reinforced portion (22) being arranged in an alternating manner; A first diaphragm (4), wherein the first diaphragm (4) is arranged in the accommodating cavity (5), and the first diaphragm (4) is capable of dividing the accommodating cavity (5) into a first chamber (51) communicating with the first sound hole (11) and a second chamber (52) communicating with the second sound hole (211).

2. The microphone according to claim 1, characterized in that The first reinforcement portion (22) is provided with a third sound hole (220), and the aperture of the second sound hole (211) is larger than the aperture of the third sound hole (220).

3. The microphone according to claim 2, characterized in that The second sound hole (211) is at least one of a hexagonal sound hole and a circular sound hole; The third sound hole (220) is at least one of a hexagonal sound hole and a circular sound hole.

4. The microphone according to claim 1, characterized in that The first reinforcement portion (22) is a straight line extending radially from the center of the first back plate (2).

5. The microphone according to claim 1, characterized in that The first reinforcement portion (22) is a curve surrounding the center of the first back plate (2).

6. The microphone according to claim 1, characterized in that The first reinforcement portion (22) comprises a first sub-reinforcement portion (221) and a second sub-reinforcement portion (222); the first sub-reinforcement portion (221) is a straight line radiating from the center of the first back plate (2); and the second sub-reinforcement portion (222) is a curve surrounding the center of the first back plate (2).

7. The microphone according to claim 1, characterized in that The first backplane (2) comprises a first insulating layer (201), a first conductive layer (202) and a second insulating layer (203), wherein the first conductive layer (202) is arranged between the first insulating layer (201) and the second insulating layer (203); Alternatively, the first back plate (2) comprises a second conductive layer (204) close to the first diaphragm (4) and a third insulating layer (205) far from the first diaphragm (4); Alternatively, the first back plate (2) comprises a fourth insulating layer (206) close to the first diaphragm (4) and a third conductive layer (207) far from the first diaphragm (4).

8. The microphone according to claim 1, characterized in that The invention also comprises a second back plate (6), wherein the second back plate (6) is arranged in the first chamber (51); the second back plate (6) comprises a second weakened portion and a second strengthened portion, the second weakened portion is provided with a fourth sound hole (61), and the second weakened portion and the second strengthened portion are arranged alternately.

9. The microphone according to claim 1, characterized in that It also comprises a second diaphragm (7), wherein the second diaphragm (7) is arranged on a side of the first back plate (2) facing away from the substrate (1) through a second insulating portion (8).

10. An electronic device, characterized in that: Comprising a microphone as described in any one of claims 1-9.

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