Vacuum box of undulator and manufacturing method thereof

Abstract

The invention relates to the technical field of high-energy physical equipment, and discloses a vacuum box of an undulator and a manufacturing method of the vacuum box. A vacuum cartridge of an undulator includes a first half-shell and a second half-shell. The first half shell is provided with a first beam groove extending in the length direction of the first half shell. The second half shell is provided with a second beam groove extending in the length direction of the second half shell, and the first half shell and the second half shell are arranged independently. The first half shell is provided with a first welding structure, the second half shell is provided with a second welding structure, the first welding structure and the second welding structure are welded, and the second beam groove and the first beam groove form a beam channel. According to the undulator, the vacuum box of the undulator is arranged to be of the split type structure formed by welding and connecting the first half shell and the second half shell, so that the first half shell and the second half shell can be machined in the manufacturing process, and the machining precision is guaranteed. Moreover, by arranging the first welding structure and the second welding structure which are used for welding, the influence of welding heat and welding stress on the size and form and location tolerance of the vacuum box of the undulator in the welding process is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of high energy physics equipment, and in particular to a vacuum box of an undulator and a manufacturing method thereof. Background Art

[0002] An undulator is a periodic magnetic structure consisting of a series of dipole magnets. It is a key component in large-scale high-energy physics facilities such as synchrotron radiation sources and free electron lasers. After high-energy electrons from the accelerator enter the undulator, they are forced to oscillate under the action of the magnetic field, thereby generating radiation, which is guided to the laboratory through specific equipment for various scientific experiments.

[0003] High-energy electrons need to operate in an ultra-high vacuum environment with a vacuum degree better than 5E-10Torr. The structure of the undulator is generally divided into two types: one structure is that the undulator magnet is installed in the vacuum box, and the electron beam passes through the magnet parts. However, the vacuum box of this type of undulator is relatively large, and the overall design structure of the undulator is complex; the other structure is that the vacuum box is installed between the gaps of the undulator magnets, so that the electron beam passes through the inside of the vacuum box instead of directly through the gaps of the magnets. The vacuum box structure of this type of undulator is relatively simple. For the latter undulator structure, the material of its vacuum box can be steel, aluminum alloy, copper, etc. Aluminum alloy is more widely used due to its low cost, low density and good comprehensive performance.

[0004] Aluminum profiles are usually manufactured using a drawing process, but the drawing process is carried out at high temperatures, and will produce large deformations during the cooling process. It is also difficult to ensure processing accuracy through straightening, shaping and other processes, and it is difficult to meet the precision requirements of the vacuum box. In addition, the internal roughness of aluminum profiles manufactured using the drawing process is generally around Ra63. Due to the long overall length of the vacuum box, it is difficult to process the interior of the vacuum box through polishing processes such as abrasive flow. The final inner surface roughness of the vacuum box is far from the required inner surface roughness, and it is difficult to meet the requirements. Summary of the invention

[0005] The technical problem to be solved by the present invention is: in the related art, the manufacturing process of the vacuum box of the undulator is limited by its material and length, deformation is easy to occur, and the inside of the vacuum box of the undulator is difficult to process, resulting in low precision of the vacuum box of the undulator.

[0006] In order to solve the above technical problems, the present invention provides a vacuum box of an undulator, which is arranged in the gap between adjacent magnetic parts on the undulator, and includes: A first half shell, wherein the first half shell is provided with a first beam slot extending along a length direction thereof; A second half shell, wherein the second half shell is provided with a second beam slot extending along a length direction thereof, and the first half shell and the second half shell are independently arranged; A first welding structure is provided on an edge of the first half shell facing the second half shell, and the first welding structure extends along the circumferential direction of the first half shell; A second welding structure is provided on an edge of the second half shell facing the first half shell, and the second welding structure extends along the circumferential direction of the second half shell; The first welding structure is welded to the second welding structure to connect the first half shell and the second half shell, so that the second beam slot is opposite to the first beam slot and forms a beam channel.

[0007] According to one embodiment of the present invention, the first half shell is rectangular on one side facing the second half shell, and the distances between the first welding structure and the beam channel on the two long sides of the first half shell are L 11 and L 12 , L 11 ≥20mm, L 12 ≥20mm, to ensure a certain distance and reduce the influence of welding deformation on the beam channel; The second half shell is rectangular on one side facing the first half shell, and the distances between the second welding structure on the two long sides of the second half shell and the beam channel are L 21 and L 22 , L 21 ≥20mm, L 22 ≥20mm to ensure a certain distance and reduce the influence of welding deformation on the beam channel.

[0008] According to one embodiment of the present invention, the vacuum box of the undulator further comprises a connecting flange, and the connecting flange is used to connect with an external device; A first welding bump is provided on a side of the first half shell parallel to the length direction of the beam channel, and a groove opening toward the second half shell is provided on the first welding bump; a second welding bump is provided on a side of the second half shell parallel to the length direction of the beam channel, and a groove opening toward the first half shell is provided on the second welding bump; the first welding bump is connected to the second welding bump by welding. When the first half shell and the second half shell are assembled with each other, the groove on the first welding protrusion and the groove on the second welding protrusion form a connecting channel, the connecting channel is connected to the beam channel, the connecting flange is connected to both the first welding protrusion and the second welding protrusion, and the through hole of the connecting flange is connected to the connecting channel.

[0009] According to one embodiment of the present invention, when the first half shell and the second half shell are assembled with each other, an exhaust cavity is formed between the first half shell and the second half shell, the exhaust cavity extends along the length direction of the beam channel, the connecting channel, the exhaust cavity, and the beam channel are connected in sequence, the cross-section of the exhaust cavity is larger than the cross-section of the beam channel, and the connecting flange is connected to the air pump.

[0010] According to one embodiment of the present invention, a first half cavity is provided on a side of the first half shell facing the second half shell, a second half cavity is provided on a side of the second half shell facing the first half shell, and the first half cavity and the second half cavity together form the exhaust cavity.

[0011] According to one embodiment of the present invention, the first half shell forms a first transition plane between the first half cavity and the first beam slot, and the second half shell forms a second transition plane between the second half cavity and the second beam slot, and the first transition plane is opposite to the second transition plane. A support block is provided on the first transition plane, and / or a support block is provided on the second transition plane, and the support block is located between the first transition plane and the second transition plane and contacts both the first transition plane and the second transition plane.

[0012] According to an embodiment of the present invention, there are at least two support blocks, which are spaced apart along the length direction of the beam channel, and a connecting channel is formed between two adjacent support blocks, and the connecting channel is connected to both the beam channel and the exhaust chamber.

[0013] According to one embodiment of the present invention, a first air release groove is provided on the first half shell at a side of the first half cavity away from the first beam groove, the opening of the first air release groove faces the second half shell, and the first air release groove is communicated with the first half cavity; And / or, on a side of the second half cavity away from the second beam slot, the second half shell is provided with a second venting groove, the opening of the second venting groove faces the first half shell, and the second venting groove is communicated with the second half cavity.

[0014] According to one embodiment of the present invention, the vacuum box of the undulator further comprises a beam flange, and the beam flange is used to connect with the vacuum box of the adjacent undulator; The two ends of the first half shell are respectively provided with third welding protrusions, and the third welding protrusions extend around the first beam groove. The two ends of the second half shell are respectively provided with fourth welding protrusions, and the fourth welding protrusions extend around the second beam groove. The third welding protrusions and the fourth welding protrusions are welded and connected. When the first half shell and the second half shell are assembled with each other, the third welding protrusions and the fourth welding protrusions form a conveying channel, and the conveying channel is connected with the beam channel. The beam flange is welded to the third welding protrusion and the fourth welding protrusion, and the through hole of the beam flange is communicated with the conveying channel.

[0015] The present invention also provides a method for manufacturing a vacuum box of an undulator, which is used to manufacture the vacuum box of the undulator as described above, wherein the vacuum box of the undulator further comprises a connecting flange, and the connecting flange is used to connect with an external device; A first welding bump is provided on a side of the first half shell parallel to the length direction of the beam channel, and a groove opening toward the second half shell is provided on the first welding bump; a second welding bump is provided on a side of the second half shell parallel to the length direction of the beam channel, and a groove opening toward the first half shell is provided on the second welding bump; the first welding bump is connected to the second welding bump by welding. When the first half shell and the second half shell are assembled with each other, the groove on the first welding protrusion and the groove on the second welding protrusion form a connecting channel, the connecting channel is communicated with the beam channel, the connecting flange is connected to both the first welding protrusion and the second welding protrusion, and the through hole of the connecting flange is communicated with the connecting channel; The method for manufacturing a vacuum box of an undulator comprises: Processing the first half shell and the second half shell respectively; Confirming that both the first half shell and the second half shell meet the machining accuracy requirements, assembling the first half shell and the second half shell, and setting a process support block in the beam channel; detecting a gap width between the first half shell and the second half shell; Confirming that the gap width is within a set range, spot welding is performed along the circumferential direction of the first half shell and the second half shell; Performing sealing welding along the circumferential direction of the first half shell and the second half shell; Welding the connecting flange to the first welding protrusion and the second welding protrusion; Performing vacuum leak detection on the connected first half shell and the second half shell; Confirming that the first half shell and the second half shell after being connected meet the sealing requirements, and performing alignment measurement on the first half shell and the second half shell after being connected; Confirm that the first half shell and the second half shell after connection both meet the flatness requirement and the parallelism requirement, and remove the process support block.

[0016] A vacuum box of an undulator according to an embodiment of the present invention is provided as a split structure in which a first half shell and a second half shell are welded and connected, and a first beam slot is provided on the first half shell, and a second beam slot is provided on the second half shell, and the first beam slot and the second beam slot jointly form a beam channel, so that the size, surface roughness, etc. of the first half shell and the second half shell can be processed separately during the manufacturing process, thereby improving the accuracy of the vacuum box of the undulator. In addition, by providing a first welding structure and a second welding structure for welding, the influence of welding heat and welding stress on the size and form and position tolerance of the vacuum box of the undulator during welding is reduced, thereby improving the accuracy of the vacuum box of the undulator and the cleanliness of its interior. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a stereoscopic diagram of a vacuum box of an undulator provided in an embodiment of the present invention.

[0018] Figure 2 yes Figure 1 A partial enlarged view of point Ⅰ in the middle.

[0019] Figure 3 yes Figure 1 A partial enlarged view of point II in the middle.

[0020] Figure 4 is a top view of the vacuum box of the undulator provided in an embodiment of the present invention.

[0021] Figure 5 yes Figure 4 Cross-sectional view of the vacuum box of the medium undulator at AA.

[0022] Figure 6 yes Figure 4 Cross-sectional view of the vacuum box of the medium undulator at BB.

[0023] Figure 7 yes Figure 4 Cross-sectional view of the vacuum box of the medium undulator at CC.

[0024] Figure 8 It is a schematic structural diagram of the first half shell provided in an embodiment of the present invention.

[0025] Fig. 9 It is a schematic structural diagram of the second half shell provided by an embodiment of the present invention.

[0026] Fig.10It is a schematic diagram of the structural dimensions of the vacuum box of the undulator provided in an embodiment of the present invention.

[0027] Reference numerals: 110, first half shell; 111, first beam slot; 112, first welding structure; 113, first welding bump; 114, third welding bump; 115, first half cavity; 116, first transition plane; 117, first air release slot; 118, first positioning portion; 120, second half shell; 121, second beam slot; 122, second welding structure; 123, second welding bump; 124, fourth welding bump; 125, second half cavity; 126, second transition plane; 127, second air release slot; 128, second positioning portion; 130, beam channel; 131, connecting channel; 132, conveying channel; 133, exhaust cavity; 134, support block; 135, deflation cavity; 140. Connecting flange; 141. Beam flange. DETAILED DESCRIPTION

[0028] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0029] In the description of the embodiments of the present invention, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0030] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0031] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0032] like Figure 1 As shown, a vacuum box of an undulator according to an embodiment of the present invention is provided in a gap between adjacent magnetic components on the undulator, and the vacuum box of the undulator includes a first half shell 110 and a second half shell 120 .

[0033] Specifically, if Figure 8 and Fig. 9 As shown, the first half shell 110 is provided with Figure 8 The first beam slot 111 extends in the direction indicated by the arrow a in the middle, and the second half shell 120 is provided with a first beam slot 111 extending ... Fig. 9 The second half shell 120 is independent of the first half shell 110, and the second half shell 120 and the first half shell 110 can be spliced. When the second half shell 120 and the first half shell 110 are spliced, the second beam slot 121 is opposite to the first beam slot 111 and forms a beam channel 130. At this time, the length direction of the beam channel 130 is consistent with the length direction of the first half shell 110 and the length direction of the second half shell 120. By setting the vacuum box of the undulator as the first half shell 110 and the second half shell 120 that are independent of each other and can be spliced, and setting the first beam slot 111 on the first half shell 110, setting the second beam slot 121 on the second half shell 120, and the first beam slot 111 and the second beam slot 121 together form the beam channel 130, it is convenient to process the inside and outside of the vacuum box of the undulator. During the manufacturing process, the first half shell 110 and the second half shell 120 can be processed separately so that the processing accuracy and surface roughness of the first half shell 110 and the second half shell 120 meet the technical requirements, and then the first half shell 110 and the second half shell 120 are welded and connected to form the beam channel 130. This reduces the processing difficulty of the vacuum box of the undulator and improves the dimensional accuracy of the finished vacuum box of the undulator.

[0034] A first welding structure 112 is provided at the edge of the first half shell 110 on one side facing the second half shell 120, and the first welding structure 112 extends and is continuous along the circumferential direction of the first half shell 110; a second welding structure 122 is provided at the edge of the second half shell 120 on one side facing the first half shell 110, and the second welding structure 122 extends and is continuous along the circumferential direction of the second half shell 120. The first welding structure 112 and the second welding structure 122 are welded to connect the first half shell 110 and the second half shell 120, and the first welding structure 112 and the second welding structure 122 can be sealed and welded by argon arc welding. The welding heat transferred to the first beam slot 111 and the second beam slot 121 is reduced, the influence of high temperature and welding stress on the first half shell 110 and the second half shell 120 during the welding process is reduced, the deformation degree of the first half shell 110 and the second half shell 120 is reduced, and the accuracy of the vacuum box of the undulator and the cleanliness of its interior are improved.

[0035] According to the vacuum box of the undulator of the embodiment of the present invention, the vacuum box of the undulator is set as a split structure in which the first half shell 110 and the second half shell 120 are welded and connected, and the first beam slot 111 is set on the first half shell 110, and the second beam slot 121 is set on the second half shell 120, and the first beam slot 111 and the second beam slot 121 jointly form a beam channel 130, so that the size, surface roughness, etc. of the first half shell 110 and the second half shell 120 can be processed separately during the manufacturing process, thereby improving the precision of the vacuum box of the undulator. In addition, by setting the first welding structure 112 and the second welding structure 122 for welding, the influence of welding heat and welding stress on the first half shell 110 and the second half shell 120 during the welding process is reduced, thereby reducing the influence of welding heat and welding stress on the size and shape and position tolerance of the vacuum box of the undulator during the welding process, and improving the precision of the vacuum box of the undulator and the cleanliness of its interior.

[0036] like Figures 8 to 10 As shown, the first half shell 110 is rectangular on one side facing the second half shell 120, and the distances between the first welding structure 112 and the beam channel 130 on the two long sides of the first half shell 110 are L and L respectively. 11 and L 12 , L 11 ≥20mm, L 12 ≥20mm, to ensure a certain distance and reduce the influence of welding deformation on the beam channel 130. The second half shell 120 is rectangular on the side facing the first half shell 110, and the distances between the second welding structure 122 on the two long sides of the second half shell 120 and the beam channel 130 are L 21 and L 22 , L 21 ≥20mm, L 22≥20mm to ensure a certain distance and reduce the impact of welding deformation on the beam channel 130. It is understandable that there is a heat-affected zone during the welding process, that is, the area where the base material is heated but not melted. Because this area has undergone a complex thermal cycle process, its structure and performance will change significantly, and it is easy to produce structural coarsening, hardening, softening and other phenomena. At the same time, residual stress may also be generated, which has an adverse effect on the structure. By setting L 11 ≥20mm, L 12 ≥20mm,L 21 ≥20mm, L 22 ≥20mm, a buffer area is formed between the first welding structure 112 and the beam channel 130 and between the second welding structure 122 and the beam channel 130, which can further reduce the heat transferred to the beam channel 130 during the welding process and reduce the impact of welding stress on the beam channel 130.

[0037] According to some embodiments of the present invention, the first half shell 110 is provided with a first positioning portion 118, and the second half shell 120 is provided with a second positioning portion 128 corresponding to the first positioning portion 118. The first positioning portion 118 and the second positioning portion 128 are used to position the first half shell 110 and the second half shell 120 during the welding process, and the first positioning portion 118 and the second positioning portion 128 are detachably connected. Figure 1 and Figure 7 As shown, the first positioning portion 118 is a block structure with a through hole and is provided on the side of the first half shell 110, and the second positioning portion 128 is a block structure with a through hole and is provided on the side of the second half shell 120. The first positioning portion 118 and the second positioning portion 128 are connected by a positioning pin, and the positioning pin is inserted into the through hole on the first positioning portion 118 and the second positioning portion 128. Alternatively, in some embodiments, one of the first positioning portion 118 and the second positioning portion 128 can be a positioning hole, and the other can be a positioning column, and the positioning column is inserted into the positioning hole for positioning. During the welding process of the first half shell 110 and the second half shell 120, the first positioning portion 118 and the second positioning portion 128 can be used for positioning and fixing, which is convenient for welding.

[0038] like Figure 1 and Figure 2 As shown, according to some embodiments of the present invention, the vacuum box of the undulator further includes a connection flange 140, which is used to connect to an external device, for example, the connection flange 140 can be used to connect to an air pump or a detection device. The first half shell 110 is provided with a first welding bump 113 on the side parallel to the length direction of the beam channel 130, and the second half shell 120 is provided with a second welding bump 123 on the side parallel to the length direction of the beam channel 130. Figure 5 and Figure 6As shown, the “side of the first half shell 110 parallel to the length direction of the beam channel 130” is the upper and lower surfaces of the first half shell 110, and the “side of the second half shell 120 parallel to the length direction of the beam channel 130” is the upper and lower surfaces of the second half shell 120. The first welding protrusion 113 is welded to the second welding protrusion 123, and the first welding protrusion 113 is provided with a groove opening toward the second half shell 120, and the second welding protrusion 123 is provided with a groove opening toward the first half shell 110. When the first half shell 110 and the second half shell 120 are assembled with each other, the groove on the first welding protrusion 113 and the groove on the second welding protrusion 123 enclose a connection channel 131 connected to the beam channel 130. The connecting flange 140 is welded to the first welding protrusion 113 and the second welding protrusion 123 , and the through hole on the connecting flange 140 is connected to the connecting channel 131 , thereby reducing deformation caused by welding the connecting flange 140 to the first half shell 110 and the second half shell 120 .

[0039] According to some embodiments of the present invention, the vacuum box of the undulator further includes a beam flange 141, and the beam flange 141 is used to connect with the vacuum box of an adjacent undulator. A third welding bump 114 is provided at both ends of the first half shell 110, and the third welding bump 114 extends around the first beam slot 111; a fourth welding bump 124 is provided at both ends of the second half shell 120, and the fourth welding bump 124 extends around the second beam slot 121. The third welding bump 114 and the fourth welding bump 124 are correspondingly welded and connected, and a delivery channel 132 connected to the beam channel 130 is formed between the third welding bump 114 and the fourth welding bump 124. Figure 3 As shown, the third welding protrusion 114 is located on the end faces at both ends of the first half shell 110, and the third welding protrusion 114 extends around the first beam groove 111 and is arc-shaped, and the arc-shaped third welding protrusion 114 forms an arc-shaped groove opening toward the second half shell 120; the fourth welding protrusion 124 is located on the end faces at both ends of the second half shell 120, and the fourth welding protrusion 124 extends around the second beam groove 121 and is arc-shaped, and the arc-shaped fourth welding protrusion 124 forms an arc-shaped groove opening toward the first half shell 110. The beam flange 141 is welded to the third welding protrusion 114 and the fourth welding protrusion 124, and the through hole on the beam flange 141 is connected to the delivery channel 132.

[0040] like Figure 8 and Fig. 9As shown, there are two third welding bumps 114, one of which is located at one end of the first beam slot 111, and the other is located at the other end of the first beam slot 111; there are two fourth welding bumps 124, one of which is located at one end of the second beam slot 121, and the other is located at the other end of the second beam slot 121. The third welding bumps 114 and the fourth welding bumps 124 are welded one by one to form a conveying channel 132. Figure 1 As shown, the beam flange 141 is welded to the third welding protrusion 114 and the fourth welding protrusion 124 , and the internal channel of the beam flange 141 is connected to the beam channel 130 through the delivery channel 132 .

[0041] According to some embodiments of the present invention, when the first half shell 110 and the second half shell 120 are assembled with each other, an exhaust cavity 133 is formed between the first half shell 110 and the second half shell 120, and the exhaust cavity 133 extends along the length direction of the beam channel 130. The connecting channel 131, the exhaust cavity 133, and the beam channel 130 are connected in sequence. The cross section of the exhaust cavity 133 is larger than the cross section of the beam channel 130, and the connecting flange 140 is used to communicate with the air pump. The cross section of the exhaust cavity 133 and the cross section of the beam channel 130 are both cross sections in a direction perpendicular to the length direction of the first half shell 110 (the second half shell 120), such as Figure 4 and Figure 5 As shown, the cross-sectional area of ​​the exhaust cavity 133 is larger than the cross-sectional area of ​​the beam channel 130. When the vacuum box of the undulator is evacuated, the gas inside it flows to the exhaust cavity 133 and is evacuated. By providing the exhaust cavity 133 and the cross-sectional area of ​​the exhaust cavity 133 being larger than the cross-sectional area of ​​the beam channel 130, the gas flow resistance is reduced and the pumping speed loss during the vacuuming process is reduced.

[0042] like Figure 8 and Fig. 9 As shown, the first half shell 110 is provided with a first half cavity 115 on one side facing the second half shell 120, and the second half shell 120 is provided with a second half cavity 125 on one side facing the first half shell 110. The first half cavity 115 and the second half cavity 125 together form an exhaust cavity 133, so as to facilitate the processing and forming of the first half shell 110 and the second half shell 120. The exhaust cavity 133 can be symmetrical in shape, and the symmetrical plane is the plane where the first half shell 110 and the second half shell 120 are connected, as shown in FIG. Figure 7 As shown, the cross section of the exhaust cavity 133 is an axisymmetric shape. The exhaust cavity 133 is set to a symmetrical shape to simplify the processing process. Further, in order to simplify the processing process, the first half shell 110 and the second half shell 120 can be a symmetrical structure, and the symmetry plane is the plane where the first half shell 110 and the second half shell 120 are connected.

[0043] According to some embodiments of the present invention, the openings of the first half cavity 115 and the first beam slot 111 are both located on the side of the first half shell 110 facing the second half shell 120 and are spaced apart, and the first half shell 110 forms a first transition plane 116 between the first half cavity 115 and the first beam slot 111; the openings of the second half cavity 125 and the second beam slot 121 are both located on the side of the second half shell 120 facing the first half shell 110 and are spaced apart, and the second half shell 120 forms a second transition plane 126 between the second half cavity 125 and the second beam slot 121, and after the first half shell 110 and the second half shell 120 are assembled, the first transition plane 116 is opposite to the second transition plane. A connecting groove connecting the first beam slot 111 and the first half cavity 115 can be provided on the first transition plane 116, or a connecting groove connecting the second beam slot 121 and the second half cavity 125 can be provided on the second transition plane 126, so as to connect the beam channel 130 and the exhaust cavity 133.

[0044] A support block 134 is provided on the first transition plane 116, or a support block 134 is provided on the second transition plane 126. The support block 134 is located between the first transition plane 116 and the second transition plane 126, and the support block 134 contacts both the first transition plane 116 and the second transition plane 126 to improve the structural strength of the vacuum box of the undulator. Of course, support blocks 134 can also be provided on both the first transition plane 116 and the second transition plane 126. In some embodiments, there are at least two support blocks 134, which are spaced apart along the length direction of the beam channel 130, and a connecting channel is formed between two adjacent support blocks 134. The connecting channel is connected to both the beam channel 130 and the exhaust chamber 133, so that the beam channel 130 and the exhaust chamber 133 can be connected through the connecting channel between the support blocks 134. In this way, a structure specifically connecting the beam channel 130 and the exhaust chamber 133 may not be provided, so as to simplify the processing procedures of the first half shell 110 and the second half shell 120.

[0045] like Figures 7 to 9As shown, according to some embodiments of the present invention, on the side of the first half chamber 115 away from the first beam slot 111, the first half shell 110 is provided with a first degassing groove 117, the opening of the first degassing groove 117 faces the second half shell 120, and the first degassing groove 117 is connected to the first half chamber 115. In this way, the area of ​​the surface where the first half shell 110 and the second half shell 120 contact each other can be reduced, and residual gas can be avoided between the surfaces where the first half shell 110 and the second half shell 120 contact each other after the two are connected, thereby improving the vacuum degree of the vacuum box of the undulator after evacuation. Alternatively, in some embodiments, on the side of the second half chamber 125 away from the second beam slot 121, the second half shell 120 is provided with a second degassing groove 127, the opening of the second degassing groove 127 faces the first half shell 110, and the second degassing groove 127 is connected to the second half chamber 125, and its function is the same as that of the first degassing groove 117. In some embodiments, the first half shell 110 is provided with a first venting groove 117, and the second half shell 120 is provided with a second venting groove 127. After the first half shell 110 and the second half shell 120 are assembled, the first venting groove 117 and the second venting groove 127 are opposite to each other and form a venting cavity 135 connected to the exhaust cavity 133. Figure 7 As shown, the solid part of the first half shell 110 located on the upper side of the first half cavity 115 is fitted with the solid part of the second half shell 120 located on the upper side of the second half cavity 125. The solid part of the first half shell 110 located on the upper side of the first half cavity 115 is provided with a first venting groove 117, and the solid part of the second half shell 120 located on the upper side of the second half cavity 125 is provided with a second venting groove 127. The first venting groove 117 and the second venting groove 127 are opposite to each other, and form a venting cavity 135 connected to the exhaust cavity 133.

[0046] A method for manufacturing a vacuum box of an undulator according to an embodiment of the present invention is used to manufacture the vacuum box of the undulator as described above. The method for manufacturing the vacuum box of the undulator includes: Processing the first half shell 110 and the second half shell 120 respectively; Confirm that the first half shell 110 and the second half shell 120 both meet the machining accuracy requirements, assemble the first half shell 110 and the second half shell 120, and set a process support block in the beam channel 130; Detecting the gap width between the first half shell 110 and the second half shell 120; After confirming that the gap width is within the set range, spot welding is performed along the circumferential direction of the first half shell 110 and the second half shell 120; Symmetrical sealing welding is performed along the circumferential direction of the first half shell 110 and the second half shell 120; Welding the connecting flange 140 with the first welding protrusion 113 and the second welding protrusion 123; Performing vacuum leak detection on the connected first half shell 110 and the second half shell 120; Confirm that the connected first half shell 110 and the second half shell 120 meet the sealing requirements, and perform alignment measurement on the connected first half shell 110 and the second half shell 120; After confirming that the connected first half shell 110 and the second half shell 120 both meet the flatness requirement and the parallelism requirement, the process support block is removed.

[0047] For ease of understanding, an embodiment of the manufacturing and assembly process of the vacuum box of the undulator of the present invention is provided below: The manufacturing and assembly process mainly includes the processing, assembly and welding steps of the first half shell 110 and the second half shell 120. The processing of the first half shell 110 and the second half shell 120 includes: blanking, first rough machining, heat treatment annealing to relieve stress, second rough machining, third rough machining, semi-finishing, and finishing. Through blanking, the alloy sheet is processed to preliminarily form the structure of the first half shell 110 and the second half shell 120. The first rough machining process uses a CNC gantry milling machine to remove most of the processing amount of the embryo, leaving a 10mm margin on one side; the heating temperature of the heat treatment annealing stress relief process is 170℃~190℃, and the temperature is kept for 10h to eliminate the stress generated in the first rough machining process; the second rough machining process uses a CNC gantry milling machine to further remove the processing allowance, and it is clamped in a free state before machining, leaving a 5mm margin on one side; the third rough machining process uses a CNC gantry milling machine to further remove the processing allowance The semi-finishing process is carried out on a CNC gantry milling machine, and it is clamped in a free state before processing, with a 0.5mm margin on one side; in the finishing process, it is clamped in a free state before processing, and the outer shapes of the first half shell 110 and the second half shell 120 are first processed. After the outer shapes are processed in place, the inner surfaces of the first beam slot 111 and the first half cavity 115 or the second beam slot 121 and the second half cavity 125 are finely processed based on the outer shapes to ensure the accuracy and roughness of the beam channel 130 and the exhaust cavity 133.

[0048] The assembly welding process includes: positioning and fixing the first half shell 110 and the second half shell 120, detecting the gap between the first half shell 110 and the second half shell 120, symmetrical spot welding, symmetrical sealing welding, welding flange, vacuum leak detection, alignment measurement, and removing process blocks. In the positioning and fixing process of the first half shell 110 and the second half shell 120, the first positioning part 118 and the second positioning part 128 are used for positioning and fixing, and the process blocks are placed in the beam channel 130 and the exhaust cavity 133 for support; the gap detection process of the first half shell 110 and the second half shell 120 uses a feeler gauge to detect the gap between the first half shell 110 and the second half shell 120, controls the assembly gap, and reduces the influence of uneven gap on the vacuum shape accuracy of the undulator; controls welding deformation through symmetrical spot welding process and symmetrical sealing welding process, and then welds the beam flange 141, the connecting flange 140, etc.; ensures that the overall flatness and parallelism are better than 0.1mm through alignment measurement; finally, removes the process blocks to complete the manufacture and assembly of the vacuum box of the undulator.

[0049] In summary, an embodiment of the present invention provides a vacuum box of an undulator, which has at least the following advantages: the vacuum box of the undulator is set to a split structure in which a first half shell 110 and a second half shell 120 are welded and connected, which facilitates processing of the interior of the vacuum box of the undulator and improves the precision of the vacuum box of the undulator; the first half shell 110 and the second half shell 120 are connected by welding through a first welding structure 112 and a second welding structure 122, which reduces the influence of temperature and welding stress on the first half shell 110 and the second half shell 120 during the welding process and improves the precision of the vacuum box of the undulator.

[0050] Finally, it should be noted that the above embodiments are only used to illustrate the present invention, rather than to limit the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention, and these improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A vacuum box of an undulator, arranged in the gap between adjacent magnetic members on the undulator, characterized in that: include: A first half shell (110), wherein the first half shell (110) is provided with a first beam slot (111) extending along a length direction thereof; a second half shell (120), wherein the second half shell (120) is provided with a second beam slot (121) extending along its length direction, and the first half shell (110) and the second half shell (120) are arranged independently of each other; A first welding structure (112) is provided at an edge of the first half shell (110) on one side facing the second half shell (120), and the first welding structure (112) extends along the circumferential direction of the first half shell (110); A second welding structure (122) is provided at an edge of the second half shell (120) on one side facing the first half shell (110), and the second welding structure (122) extends along the circumferential direction of the second half shell (120); The first welding structure (112) and the second welding structure (122) are welded to connect the first half shell (110) and the second half shell (120), so that the second beam slot (121) is opposite to the first beam slot (111) and forms a beam channel (130).

2. The vacuum box of the undulator according to claim 1, characterized in that: The side of the first half shell (110) facing the second half shell (120) is rectangular, and the distances between the first welding structure (112) and the beam channel (130) on the two long sides of the first half shell (110) are L and L respectively. 11 and L 12 , L 11 ≥20mm, L 12 ≥20 mm, so as to ensure a certain distance and reduce the influence of welding deformation on the beam channel (130); The side of the second half shell (120) facing the first half shell (110) is rectangular, and the distances between the second welding structure (122) located on the two long sides of the second half shell (120) and the beam channel (130) are L and L respectively. 21 and L 22 , L 21 ≥20mm, L 22 ≥20 mm, so as to ensure a certain distance and reduce the influence of welding deformation on the beam channel (130).

3. The vacuum box of the undulator according to claim 1, characterized in that: The vacuum box of the undulator further comprises a connecting flange (140), wherein the connecting flange (140) is used for connecting to an external device; A first welding protrusion (113) is provided on a side surface of the first half shell (110) parallel to the length direction of the beam channel (130); the first welding protrusion (113) is provided with a groove opening toward the second half shell (120); a second welding protrusion (123) is provided on a side surface of the second half shell (120) parallel to the length direction of the beam channel (130); the second welding protrusion (123) is provided with a groove opening toward the first half shell (110); the first welding protrusion (113) and the second welding protrusion (123) are connected by welding. When the first half shell (110) and the second half shell (120) are assembled with each other, the groove on the first welding protrusion (113) and the groove on the second welding protrusion (123) form a connecting channel (131), and the connecting channel (131) is connected to the beam channel (130). The connecting flange (140) is connected to both the first welding protrusion (113) and the second welding protrusion (123), and the through hole of the connecting flange (140) is connected to the connecting channel (131).

4. The vacuum box of the undulator according to claim 3, characterized in that: When the first half shell (110) and the second half shell (120) are assembled with each other, an exhaust cavity (133) is formed between the first half shell (110) and the second half shell (120), and the exhaust cavity (133) extends along the length direction of the beam channel (130). The connecting channel (131), the exhaust cavity (133), and the beam channel (130) are connected in sequence. The cross-section of the exhaust cavity (133) is larger than the cross-section of the beam channel (130), and the connecting flange (140) is connected to an air pump.

5. The vacuum box of the undulator according to claim 4, characterized in that: A first half cavity (115) is provided on a side of the first half shell (110) facing the second half shell (120), and a second half cavity (125) is provided on a side of the second half shell (120) facing the first half shell (110); the first half cavity (115) and the second half cavity (125) together form the exhaust cavity (133).

6. The vacuum box of the undulator according to claim 5, characterized in that: The first half shell (110) forms a first transition plane (116) between the first half cavity (115) and the first beam slot (111), and the second half shell (120) forms a second transition plane (126) between the second half cavity (125) and the second beam slot (121), the first transition plane (116) being opposite to the second transition plane. A support block (134) is provided on the first transition plane (116), and / or a support block (134) is provided on the second transition plane (126), wherein the support block (134) is located between the first transition plane (116) and the second transition plane (126), and is in contact with both the first transition plane (116) and the second transition plane (126).

7. The vacuum box of the undulator according to claim 6, characterized in that: There are at least two support blocks (134) which are spaced apart along the length direction of the beam channel (130), and a communication channel is formed between two adjacent support blocks (134), wherein the communication channel is connected to both the beam channel (130) and the exhaust chamber (133).

8. The vacuum box of the undulator according to claim 5, characterized in that: The first half shell (110) is provided with a first degassing groove (117) on a side of the first half chamber (115) away from the first beam slot (111), the opening of the first degassing groove (117) faces the second half shell (120), and the first degassing groove (117) is communicated with the first half chamber (115); And / or, on a side of the second half cavity (125) away from the second beam groove (121), the second half shell (120) is provided with a second degassing groove (127), the opening of the second degassing groove (127) faces the first half shell (110), and the second degassing groove (127) is connected to the second half cavity (125).

9. The vacuum box of an undulator according to claim 1, characterized in that: The vacuum box of the undulator further comprises a beam flange (141), wherein the beam flange (141) is used to be connected to the vacuum box of an adjacent undulator; The first half shell (110) is provided with a third welding protrusion (114) at both ends, and the third welding protrusion (114) extends around the first beam groove (111); the second half shell (120) is provided with a fourth welding protrusion (124) at both ends, and the fourth welding protrusion (124) extends around the second beam groove (121); the third welding protrusion (114) and the fourth welding protrusion (124) are welded together; when the first half shell (110) and the second half shell (120) are assembled with each other, the third welding protrusion (114) and the fourth welding protrusion (124) form a conveying channel, and the conveying channel is connected to the beam channel (130); The beam flange (141) is welded to the third welding protrusion (114) and the fourth welding protrusion (124), and the through hole of the beam flange (141) is in communication with the delivery channel (132).

10. A method for manufacturing a vacuum box of an undulator, used for manufacturing the vacuum box of the undulator according to any one of claims 1 to 9, characterized in that: The vacuum box of the undulator further comprises a connecting flange (140), wherein the connecting flange (140) is used for connecting to an external device; A first welding protrusion (113) is provided on a side surface of the first half shell (110) parallel to the length direction of the beam channel (130); the first welding protrusion (113) is provided with a groove opening toward the second half shell (120); a second welding protrusion (123) is provided on a side surface of the second half shell (120) parallel to the length direction of the beam channel (130); the second welding protrusion (123) is provided with a groove opening toward the first half shell (110); the first welding protrusion (113) and the second welding protrusion (123) are connected by welding. When the first half shell (110) and the second half shell (120) are assembled with each other, the groove on the first welding protrusion (113) and the groove on the second welding protrusion (123) form a connecting channel (131), the connecting channel (131) is connected to the beam channel (130), the connecting flange (140) is connected to both the first welding protrusion (113) and the second welding protrusion (123), and the through hole of the connecting flange (140) is connected to the connecting channel (131); The method for manufacturing the vacuum box of the undulator comprises: Processing the first half shell (110) and the second half shell (120) respectively; Confirming that both the first half shell (110) and the second half shell (120) meet the machining accuracy requirements, assembling the first half shell (110) and the second half shell (120), and setting a process support block in the beam channel (130); detecting a gap width between the first half shell (110) and the second half shell (120); Confirming that the gap width is within a set range, spot welding is performed along the circumferential direction of the first half shell (110) and the second half shell (120); Performing sealing welding along the circumferential direction of the first half shell (110) and the second half shell (120); Welding the connection flange (140) to the first welding protrusion (113) and the second welding protrusion (123); Performing vacuum leak detection on the connected first half shell (110) and the second half shell (120); Confirming that the first half shell (110) and the second half shell (120) after being connected meet the sealing requirements, and performing alignment measurement on the first half shell (110) and the second half shell (120) after being connected; After confirming that the first half shell (110) and the second half shell (120) after connection both meet the flatness requirement and the parallelism requirement, the process support block is removed.

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