A wafer cassette clamping device, a clamping method and an overhead crane system

Abstract

The present invention discloses a wafer cassette clamping device, a clamping method and an overhead crane system. The wafer cassette clamping device includes a jaw assembly, a connecting rod assembly and a locking member. Two jaw assemblies are arranged at intervals along a first direction in a horizontal plane, and both of the two jaw assemblies can move synchronously relative to or away from each other along the first direction to switch between an initial position and a clamping position. The connecting rod assembly is located between the two jaw assemblies. The connecting rod assembly includes a rotating shaft extending along a second direction in the horizontal plane. The rotating shaft can rotate along its own axis. A vertically arranged rotating plate is fixed on the rotating shaft. Two first rod bodies that are centrosymmetric with respect to the center of the rotating shaft are hinged on the rotating plate. The two first rod bodies are respectively hinged to the two jaw assemblies. The locking member is connected to the rotating shaft. When in the clamping position, the locking member provides a locking torque for the rotating shaft. The clamping device has a short response time, low noise and a large clamping force, and provides a stable clamping force for the wafer cassette without occupying additional space.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer processing equipment, and particularly to a wafer cassette clamping device, a clamping method, and an overhead crane system. Background Art

[0002] In the semiconductor manufacturing process, a wafer cassette is usually transported by an overhead crane. The method of transporting wafers using a wafer cassette can efficiently complete the transfer, processing, and handling of wafers. The overhead crane includes a clamping device. When the overhead crane reaches a station where a wafer cassette is placed, the clamping device can clamp the wafer cassette at this station, and then the overhead crane moves along the track to the next station. During this process, the stability of the clamping of the wafer cassette by the clamping device will greatly affect the quality of the wafers in the wafer cassette. Therefore, it is necessary to improve the clamping force of the clamping device in the existing space without affecting the response time of the clamping device. Summary of the Invention

[0003] To overcome the above disadvantages, the purpose of the present invention is to provide a wafer cassette clamping device, a clamping method, and an overhead crane system, which have a short response time, low noise, and a large clamping force, and can provide a stable clamping force for the wafer cassette without occupying additional space.

[0004] To achieve the above object, the technical solution adopted by the present invention is: a wafer cassette clamping device, comprising:

[0005] A jaw assembly, two of which are arranged at intervals in a first direction on a horizontal plane, and both of the jaw assemblies can move synchronously relative to or away from each other in the first direction to switch between an initial position and a clamping position;

[0006] A connecting rod assembly, which is located between the two jaw assemblies. The connecting rod assembly includes a rotating shaft extending in a second direction on a horizontal plane. The rotating shaft can rotate along its own axis. A vertically arranged rotating plate is fixed on the rotating shaft. Two first rod bodies that are centrosymmetric with respect to the center of the rotating shaft are hinged on the rotating plate, and the two first rod bodies are respectively hinged to the two jaw assemblies;

[0007] A locking member, which is connected to the rotating shaft. When in the clamping position, the locking member provides a locking torque for the rotating shaft.

[0008] The beneficial effects of the present invention are as follows:

[0009] When the rotating shaft rotates, the rotating plate rotates synchronously, and then drives the first rod bodies to swing. Since the jaw assembly can only move linearly in the first direction, the first rod bodies hinged to the jaw assembly will pull the jaw assembly to make a linear reciprocating movement during the swinging process. Through the connecting rod assembly, the rotation of the rotating shaft is converted into the linear movement of the jaw assembly through the rotating plate and the first rod bodies, realizing the clamping of the wafer cassette by the jaw assembly.

[0010] The connecting rod assembly formed by the rotating shaft, the rotating plate and the first rod drives the jaw assembly to move. This connecting rod assembly adopts the principle of a crank connecting rod mechanism, with a fast clamping action response. While achieving linear drive, it can increase the clamping force at the clamping position, maximizing the clamping efficiency. At the same time, the noise is low and can meet the low-noise standard.

[0011] Cooperate with the locking member to lock the rotating shaft at the clamping position. Even if the connecting rod assembly does not reach the dead center position, it can provide a clamping force not less than that at the dead center position for the wafer cassette, improving the stability and safety of clamping the wafer cassette, and the jaw assembly is not easy to loosen when clamping the wafer cassette.

[0012] Furthermore, a notch for the rotating shaft to give way is provided on the first rod. At the clamping position, a part of the rotating shaft is embedded in the notch. The notch gives way to the rotating shaft, so as not to additionally increase the height of the first rod in the vertical direction.

[0013] At the clamping position, the axis 1 of the hinge shaft connecting the first rod and the rotating plate, the axis 2 of the hinge shaft connecting the first rod and the jaw assembly, and the axis 3 of the rotating shaft are not coplanar. Due to space limitations, the connecting rod assembly cannot reach the dead center.

[0014] Because the connecting rod assembly cannot reach the dead center, a locking torque is set to compensate for the rotating shaft to increase the clamping force, and the required locking torque must be greater than the set threshold.

[0015] Furthermore, the rotating shaft is rotatably connected to the substrate. The substrate extends along the horizontal plane and a bearing seat rotatably connected to the rotating shaft is fixed thereon. The perpendicular distance L from the axis 3 to the substrate B >R2 + L A -R1*cosθ1, where L A is the minimum distance from the first rod to the substrate in the vertical direction at the clamping position, R1 is the radius of the rotating shaft, θ1 is the angle between the perpendicular connection line between the axis 3 and the axis 1 and the horizontal plane at the clamping position, and R2 is the distance from the axis 1 to the axis 3.

[0016] The perpendicular distance L from the axis 3 to the substrate B In a limited space, the swinging requirement of the first rod needs to be satisfied.

[0017] Furthermore, the side wall of the notch is an inclined surface. In a limited space, the setting of the inclined surface relative to the vertical surface allows the rotating plate to rotate more angles, that is, makes the connecting rod assembly closer to the dead center.

[0018] Furthermore, the wafer cassette clamping device further includes a detection component for detecting the position of the link assembly. The detection component includes a positioning frame, a light shielding sheet, and a photoelectric sensor. The photoelectric sensor is fixed on the positioning frame and there are two of them. The two photoelectric sensors respectively correspond to the initial position and the clamping position. The light shielding sheet is fixed to the end of the rotating shaft extending out of the rotating plate.

[0019] Furthermore, the positioning frame is provided with adjustment holes corresponding to the photoelectric sensors. The photoelectric sensors can slide within the adjustment holes, and the adjustment holes are arc-shaped holes coaxial with the rotating shaft. Adjust the position of the photoelectric sensors within the arc-shaped holes to adjust the positions of the photoelectric sensors, thereby adjusting the initial position and the clamping position through the extreme positions of the rotation of the rotating shaft, and the clamping degree can be adjusted by adjusting the clamping position.

[0020] Furthermore, the wafer cassette clamping device further includes a driving member. The driving member is fixedly connected to the end of the rotating shaft away from the light shielding sheet, and the driving member is communicatively connected to the photoelectric sensors. When any one of the two photoelectric sensors is blocked by the light shielding sheet to generate a signal, this signal is transmitted to the driving member. When the driving member receives this signal, it will stop rotating, and then the jaw assembly will stop at the initial position or the clamping position.

[0021] Furthermore, the jaw assembly includes a connecting block and a clamping block fixedly connected to the connecting block. The connecting block passes through the substrate in the vertical direction. The link assembly and the clamping block are respectively located on the upper and lower sides of the substrate. Clamping grooves are formed on the opposite surfaces of the two clamping blocks.

[0022] Furthermore, the connecting block of one jaw assembly is hinged to one first rod body. The other jaw assembly further includes a second rod body extending in a first direction. One end of the second rod body is fixed to the connecting block, and the other end is hinged to the other first rod body.

[0023] Due to space limitations, the first rod body cannot be set to be too long. The second rod body is equivalent to a connecting arm, which extends the jaw assembly in the first direction and facilitates the connection with the first rod body.

[0024] Furthermore, a guide rail on the same side as the link assembly is also fixed on the substrate. The guide rail extends in the first direction, and the connecting block slides along the guide rail. The guide rail guides the movement of the jaw assembly, allowing the jaw assembly to move only along the set direction and providing movement stability at the same time.

[0025] The present invention also discloses a wafer cassette clamping method, which uses the above-mentioned wafer cassette clamping device. The clamping method includes:

[0026] Drive the rotating shaft to rotate along its own axis according to the clamping instruction;

[0027] During the rotation of the rotating shaft, the two jaw assemblies are pulled to move synchronously relative to each other through the first rod body until the jaw assemblies move to the clamping position;

[0028] The locking member is activated, and the locking member applies a locking torque not less than a set threshold value to the rotating shaft.

[0029] The present invention also discloses a crane system, including the above-mentioned wafer cassette clamping device. Description of the Drawings

[0030] Figure 1 It is a three-dimensional structural schematic diagram of the clamping device in an embodiment of the present invention;

[0031] Figure 2 It is a three-dimensional structural schematic diagram of the clamping device from another angle in an embodiment of the present invention;

[0032] Figure 3 It is a three-dimensional structural schematic diagram of the link assembly in the initial position in an embodiment of the present invention;

[0033] Figure 4 It is a structural schematic diagram of the link assembly in the clamping position in an embodiment of the present invention;

[0034] Figure 5 It is a structural schematic diagram of the clamping device after removing the substrate in an embodiment of the present invention;

[0035] Figure 6 It is a connection schematic diagram of the photoelectric sensor and the positioning bracket in an embodiment of the present invention;

[0036] Figure 7 It is a schematic diagram of the clamping block in an embodiment of the present invention.

[0037] In the figure:

[0038] 1. Jaw assembly; 1a. First jaw assembly; 1b. Second jaw assembly; 11. Connection block; 12. Clamping block; 121. Clamping groove; 122. V-shaped convex block; 13. Second rod body;

[0039] 2. Link assembly; 21. Rotating shaft; 22. Rotating plate; 23. First rod body; 231. Notch; 2311. Inclined surface; 23a. First rod body one; 23b. First rod body two; 232. Hinge shaft one; 233. Hinge shaft two;

[0040] 3. Locking member;

[0041] 4. Driving member; 41. Coupling;

[0042] 5. Substrate; 51. Bearing seat; 52. Guide rail;

[0043] 6. Detection assembly; 61. Positioning frame; 611. Adjustment hole; 62. Light-shielding sheet; 63. Photoelectric sensor. Specific embodiments

[0044] The following describes in detail the preferred embodiments of the present invention with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

[0045] In the following figures, the first direction is the X direction, the second direction is the Y direction, the first direction and the second direction are two mutually perpendicular directions in the horizontal plane, and the vertical direction is the Z direction.

[0046] A wafer cassette clamping device of the present invention is used to clamp a wafer cassette.

[0047] Refer to the attached Figure 1 As shown, the wafer cassette clamping device includes a jaw assembly 1 and a link assembly 2. Two jaw assemblies 1 are arranged at intervals along the first direction, and the two jaw assemblies 1 can grasp the wafer cassette from both sides. The link assembly 2 is used to drive the two jaw assemblies 1 to move synchronously to perform the grasping and releasing of the wafer cassette.

[0048] The two jaw assemblies 1 can move synchronously relative to or away from each other along the first direction under the drive of the link assembly 2 to switch between the initial position and the clamping position. When in the initial position, the two jaw assemblies 1 are located at positions far from each other and cannot clamp the wafer cassette. When in the clamping position, the two jaw assemblies 1 are located at positions close to each other and can clamp the wafer cassette.

[0049] The link assembly 2 is located between the two jaw assemblies 1. Refer to the attached Figure 2 and the attached Figure 3 As shown, the link assembly 2 includes a rotating shaft 21 extending along the second direction, and the rotating shaft 21 can rotate along its own axis. A vertically arranged rotating plate 22 is fixed on the rotating shaft 21, and the rotating plate 22 rotates synchronously with the rotating shaft 21. Two first rod bodies 23 that are centrosymmetric with respect to the center of the rotating shaft 21 are hinged on the rotating plate 22. The two first rod bodies 23 are respectively hinged to the two jaw assemblies 1, and the hinged positions of the two first rod bodies 23 with the jaw assemblies 1 are the same. Exemplarily, the ends of the two first rod bodies 23 that are far from the rotating plate 22 are hinged to the corresponding jaw assemblies 1.

[0050] When the rotating shaft 21 rotates, the rotating plate 22 rotates synchronously, thereby driving the first rod 23 to swing. Since the clamping jaw assembly 1 can only move linearly in the first direction, the first rod 23 hinged to the clamping jaw assembly 1 will pull the clamping jaw assembly 1 to move linearly back and forth during the swinging process. In this embodiment, through the link assembly 2, the rotation of the rotating shaft 21 is converted into the linear motion of the clamping jaw assembly 1 through the rotating plate 22 and the first rod 23, so as to realize the clamping of the wafer cassette by the clamping jaw assembly 1.

[0051] In the prior art, the driving mode of the clamping jaw assembly 1 usually adopts a linear module, such as screw drive, rack and pinion drive or cylinder drive, etc. However, in the case of the same driving member 4 (motor), the clamping time of the screw drive mode is slower, that is, the response time to the grasping command is slow, which affects the subsequent handling efficiency of the wafer cassette. For the rack and pinion drive mode, in the case of equipped with the same driving member 4 (motor), the clamping force is insufficient, the clamping of the wafer cassette is not stable enough, and the wafer cassette may shake during the movement, causing wafer damage. For the cylinder drive mode, the impact force on the wafer cassette is relatively large, which is easy to damage the wafer cassette while the clamping force is insufficient.

[0052] In this embodiment, the link assembly 2 formed by the rotating shaft 21, the rotating plate 22 and the first rod 23 is used to drive the clamping jaw assembly 1 to move. This link assembly 2 adopts the principle of a crank and connecting rod mechanism, with a fast response of the clamping action. While realizing linear drive, it can improve the clamping force at the clamping position, so that the clamping efficiency reaches the maximum value. At the same time, the link assembly 2 has low noise. Compared with other linear modules, the noise of the link assembly 2 during the action process is less than 40 dB, meeting the low-noise standard.

[0053] In one embodiment, when at the clamping position, the axis one of the hinge axis one 232 where the first rod 23 is connected to the rotating plate 22, the axis two of the hinge axis two 233 where the first rod 23 is connected to the clamping jaw assembly 1 and the axis three of the rotating shaft 21 are coplanar. The intersections of the axis one, the axis two and the axis three with the same vertical plane are points A, point B and point C respectively. At this time, points A, B and C are collinear and this line extends along the first direction. At this time, the link assembly 2 reaches a dead center position. At this position, the first rod 23 will not continue to swing. Even if there are some abnormal external forces, such as vibration or other various factors, the first rod 23 will not move. At this time, the clamping force applied by the clamping jaw assembly 1 to the wafer cassette is the largest.

[0054] The overhead crane moves in the air. Due to space limitations, there are other devices above the substrate 5. When the clamping jaw assembly 1 is at the clamping position, the distance in the first direction is fixed. However, if you want to reach the dead center position at this time, during the swinging process of the first rod 23, it occupies a large space in the vertical direction. But in actual use, there is not so much space to make way for the first rod 23, that is, in the case of limited space, there is no way to move the link assembly 2 to the dead center position.

[0055] Thus, in one embodiment, when in the clamping position, the first axis of the hinge shaft 232, the second axis of the hinge shaft 233, and the third axis of the rotating shaft 21 are not coplanar, that is, in the attached Figure 4 figure, points A, B, and C are not collinear, and the link assembly 2 does not reach the dead center. At this time, although the link assembly 2 does not reach the dead center, compared with the existing drive structure, this link structure can still provide a relatively large clamping force.

[0056] Since the link assembly 2 cannot reach the dead center position, the wafer cassette clamping device further includes a locking member 3. The locking member 3 is connected to the rotating shaft 21. When in the clamping position, the locking member 3 provides a locking torque for the rotating shaft 21.

[0057] When in the clamping position, the link assembly 2 does not reach the dead center position. At this time, a relatively small acting force F in a first direction is applied to the first rod body 23 x , this acting force F x is the acting force for resetting the first rod body 23 applied to the first rod body 23. Under the action of this acting force, the link assembly 2 will reset and leave the clamping position. During the walking process of the overhead crane, due to vibration or other reasons, this acting force F may be generated on the first rod body 23 after the motor stops x , and this locking torque of the locking member 3 can compensate for this acting force F x , even if the link assembly 2 does not reach the dead center position, it can provide a clamping force not less than that at the dead center position for the wafer cassette, so as to improve the stability and safety of clamping the wafer cassette, and the jaw assembly 1 is not easy to loosen when clamping the wafer cassette.

[0058] In one embodiment, the locking member 3 is an electromagnetic brake. When the electromagnetic brake is energized, a locking torque can be generated on the rotating shaft 21. When the electromagnetic brake is de-energized, the locking torque is cancelled, and the rotating shaft 21 can rotate normally.

[0059] In one embodiment, in order to increase the clamping force and reduce the locking torque of the electromagnetic brake, within a limited space, although points A, B, and C are not collinear, they are as close to being collinear as possible, that is, when in the clamping position, the link assembly 2 infinitely approaches the dead center position. In this way, the clamping force of the link assembly 2 is large while the locking torque of the locking member 3 can be reduced.

[0060] Refer to the attached Figure 4 figure. When in the clamping position, the included angle θ1 between the vertical connection line between the third axis and the first axis and the horizontal plane, that is, the included angle between the connection line of points A and C and the horizontal plane is θ1. The included angle θ1 is the complementary angle of the pressure angle. When in the dead center position, the pressure angle is 90°. Therefore, within a limited space, the included angle θ1 needs to be as close to 0° as possible.

[0061] To enable the first rod body 23 to swing to the dead point position as much as possible within a limited space without interfering with the rotating shaft 21, refer to the appendix Figure 3 As shown, a notch 231 for making way for the rotating shaft 21 is provided on the first rod body 23. When in the clamping position, refer to the appendix Figure 4 As shown, a part of the rotating shaft 21 is embedded in the notch 231, and the side wall of the notch 231 can abut against the rotating shaft 21. Since the rotating shaft 21 needs to pass through the rotating plate 22 and be connected to other components (such as the detection component 6), the projection of the rotating shaft 21 in the vertical direction of the first rod body 23 will coincide, and the rotating shaft 21 will pass through between the two first rod bodies 23. However, to ensure the swing range of the first rod body 23 and enable it to swing to the dead point position as much as possible, a notch 231 is provided on the first rod body 23 to make way for the first rod body 23.

[0062] In one embodiment, the side wall of the notch 231 is an inclined surface 2311, and the cross-section of the notch 231 is trapezoidal. In a limited space, the setting of the inclined surface 2311 relative to the vertical plane allows the rotating plate 22 to rotate more angles, that is, to make the link assembly 2 closer to the dead point. The inclined surface 2311 slopes downward and away from the bottom of the notch 231. When in the clamping position, the inclined surfaces 2311 of the two first rod bodies 23 are parallel to each other, and the rotating shaft 21 is limited between the two inclined surfaces 2311.

[0063] The first rod body 23 includes a convex portion in the middle, the convex portion protrudes in the vertical direction, and the notch 231 is provided on the convex portion. At this time, within the available space, the notch 231 can be made as large as possible in the vertical direction without affecting the connection between the two ends of the first rod body 23 and the rotating plate 22 and the jaw assembly 1.

[0064] The locking torque provided by the locking member 3 is related to the included angle θ1 at the locking position. The locking torque is T, and F x is the acting force applied to the first rod body 23 to reset the first rod body 23. F is the tangential force applied to the rotating shaft 21. When the tangential force F is applied to the rotating shaft 21, an acting force F can be generated on the first rod body 23 x . Since the included angle θ1 in this embodiment will not be equal to 0, the locking torque will not be equal to 0. F X can be obtained. For example, at the clamping position, the first rod body 23 is pulled by a tensiometer to move the first rod body 23 to obtain it. R2 is the distance from axis one to axis three, that is, the length of the line segment between points A and C. With point C as the center and R2 as the radius, a Figure 4 circle as shown by the dotted line in the figure is formed. In this embodiment, since the two first rod bodies 23 are centrosymmetric with respect to the center of the relative rotating shaft 21, that is, the hinge axes of the two first rod bodies 23 and the rotating plate 22 all move along the trajectory of this circle.

[0065] The smaller the included angle θ1, the smaller the locking torque T.

[0066] In this embodiment, the axis two of the hinge shaft two 233 between the first rod body 23 and the jaw assembly 1 is at the same height as the axis three of the rotating shaft 21, which facilitates the setting and saves space at this time.

[0067] See the appendix Figure 2 As shown, the clamping device further includes a driving member 4, and the driving member 4 is used to drive the rotating shaft 21 to rotate. Exemplarily, the driving member 4 is a motor, and the output shaft of the motor is connected to the end of the rotating shaft 21 through a coupling 41. When the motor rotates, it drives the rotating shaft 21 to rotate forward and backward, so as to drive the jaw assembly 1 to reciprocate through the link assembly 2.

[0068] See the appendix Figure 1 As shown, the clamping device further includes a substrate 5, the substrate 5 is horizontally arranged, and the substrate 5 is used to connect the clamping device and other components of the overhead crane. At the same time, the substrate 5 provides support for the link assembly 2, and the driving member 4 is fixed on the substrate 5. A bearing seat 51 rotatably connected to the rotating shaft 21 is fixed on the substrate 5, and the bearing seat 51 provides support for the rotating shaft 21. A plurality of bearing seats 51 are arranged along the axial direction of the rotating shaft 21, so that the rotating shaft 21 can rotate smoothly even if it is relatively long.

[0069] The first rod body 23 needs to occupy space in the vertical direction during the swinging process. However, since the first rod body 23 rotates around the rotating shaft 21, the distance from the rotating shaft 21 to the substrate 5 needs to meet the swinging requirements of the first rod body 23. Otherwise, the first rod body 23 will abut against the substrate during the swinging process and cannot reach the clamping position, that is, the wafer cassette cannot be clamped. Therefore, see the appendix Figure 4 As shown, the vertical distance L from the axis three to the substrate 5 B >R2 + L A -R1 * cosθ1, where L A is the minimum distance from the first rod body 23 to the substrate 5 in the vertical direction at the clamping position, and R1 is the radius at the connection between the rotating shaft 21 and the rotating plate 22. The vertical distance L from the axis three to the substrate 5 B is related to the size of the rotating shaft 21, the structure of the first rod body 23, and the included angle θ1. The vertical distance L from the axis three to the substrate 5 B Only when the above height requirements are met can the first rod body 23 swing to the clamping position to meet the clamping requirements. At this time, the substrate 5 will not interfere with the swinging of the first rod body 23.

[0070] In one embodiment, the wafer cassette clamping device further includes a detection component 6, and the detection component 6 is used to detect the position of the link assembly 2, that is, the position of the jaw assembly 1.

[0071] See the appendix Figure 2 and the appendix Figure 5As shown in the figure, the detection component 6 includes a positioning frame 61, a light-shielding sheet 62, and a photoelectric sensor 63. The positioning frame is fixed on the substrate 5. A bearing rotatably connected to the rotating shaft 21 is provided on the positioning frame 61, that is, the positioning frame 61 also serves as a bearing seat 51. The photoelectric sensor 63 is fixed on the positioning frame 61 and there are two of them. The two photoelectric sensors 63 respectively correspond to the initial position and the clamping position. The light-shielding sheet 62 is fixed to the end of the rotating shaft 21 extending out of the rotating plate 22 and away from the driving member 4.

[0072] The light-shielding sheet 62 and the rotating shaft 21 rotate synchronously. When the light-shielding sheet 62 blocks the photoelectric sensor 63 corresponding to the initial position, it indicates that the jaw assembly 1 reaches the initial position; when the light-shielding sheet 62 blocks the photoelectric sensor 63 corresponding to the clamping position, it indicates that the jaw assembly 1 reaches the clamping position.

[0073] The photoelectric sensor 63 is communicatively connected to the driving member 4. When any one of the photoelectric sensors 63 is blocked by the light-shielding sheet 62 to generate a signal, this signal is transmitted to the driving member 4. When the driving member 4 receives this signal, it will stop rotating, thereby stopping the jaw assembly 1 at the initial position or the clamping position.

[0074] See the appendix Figure 6 As shown in the figure, an adjustment hole 611 corresponding to the photoelectric sensor 63 is provided on the positioning frame 61. The photoelectric sensor 63 can slide in the adjustment hole 611. The adjustment hole 611 is an arc-shaped hole coaxial with the rotating shaft 21. Adjust the position of the photoelectric sensor 63 in the arc-shaped hole to adjust the position of the photoelectric sensor 63, so as to adjust the initial position and the clamping position through the limit position of the rotation of the rotating shaft 21, and the clamping degree can be adjusted by adjusting the clamping position. At the clamping position, the closer the link assembly 2 is to the dead point, the greater the clamping force, and at this time, the locking torque applied by the locking member 3 is smaller.

[0075] The photoelectric sensor 63 is fixed in the adjustment hole 611 through a fixing member, and the fixing member can be a bolt.

[0076] See the appendix Figure 5 As shown in the figure, the jaw assembly 1 includes a connecting block 11 and a clamping block 12 fixedly connected to the connecting block 11. The connecting block 11 passes through the substrate 5 in the vertical direction. A guiding hole for the connecting block 11 to pass through and slide is provided on the substrate 5. The link assembly 2 and the clamping block 12 are respectively located on the upper and lower sides of the substrate 5. The link assembly 2 is located above the substrate 5, and the clamping block 12 is located below the substrate 5. Such an arrangement ensures that the link assembly 2 does not interfere with the clamping block 12, and the clamping block 12 can clamp the wafer cassette below.

[0077] See the appendix Figure 7As shown, clamping grooves 121 are formed on the opposite faces of the two clamping blocks 12. A part of the wafer cassette is embedded in the clamping grooves 121. The bottom of the clamping grooves 121 can carry the wafer cassette, and the position of the wafer cassette is defined by the two clamping blocks 12.

[0078] In one embodiment, V-shaped protrusions 122 are further provided in the clamping grooves 121, and grooves corresponding to the V-shaped protrusions 122 are provided on the wafer cassette. During the process of the clamping block 12 clamping the wafer cassette, the bevel edges of the V-shaped protrusions 122 can cooperate with the grooves to align the wafer cassette and define the position of the wafer cassette, improving the clamping accuracy and stability of the clamping block 12 for the wafer cassette.

[0079] A guide rail 52 on the same side as the link assembly 2 is also fixed on the substrate 5. The guide rail 52 and the connecting block 11 are correspondingly arranged and extend along the first direction. The connecting block 11 slides along the guide rail 52. The guide rail 52 guides the movement of the jaw assembly 1, enabling the jaw assembly 1 to perform only linear reciprocating movement along the first direction.

[0080] In one embodiment, the guide rail 52 can also be arranged on the connecting block 11, and a slider sliding along the guide rail 52 is arranged on the substrate 5.

[0081] Because the first rod body 23 cannot be set to be too long due to space limitations, but there are spacing requirements for the two jaw assemblies 1 in the initial position. Therefore, one jaw assembly 1 further includes a second rod body 13. The second rod body 13 extends along the first direction and is fixed to the connecting block 11. At this time, one first rod body 23 is hinged to the connecting block 11 of one jaw assembly 1, and the other first rod body 23 is hinged to the end of the second rod body 13 of the first jaw assembly 1. The second rod body 13 is equivalent to a connecting arm, extending the jaw assembly 1 in the first direction.

[0082] In this embodiment, the two first rod bodies 23 are respectively the first rod body one 23a and the first rod body two 23b, and the two jaw assemblies 1 are respectively the jaw assembly one 1a and the jaw assembly two 1b.

[0083] When the wafer cassette clamping device clamps the wafer cassette, the driving member 4 drives the rotating shaft 21 to rotate clockwise, the rotating plate 22 rotates synchronously, the hinge shafts of the first rod body one 23a and the first rod body two 23b with the rotating plate 22 rotate synchronously, and the first rod body one 23a and the first rod body two 23b respectively pull the jaw assembly one 1a and the jaw assembly two 1b to move in opposite directions and approach each other. Until the light shielding piece 62 blocks the photoelectric sensor 63 corresponding to the clamping position, it indicates that the jaw assembly one 1a and the jaw assembly two 1b reach the attachment Figure 4At the clamping position shown, the driving member 4 stops operating. At this time, the inclined surface 2311 of the notch 231 abuts against the rotating shaft 21. The axes of the hinge shafts of the first rod body one 23a and the first rod body two 23b and the rotating plate 22 are respectively located at the upper and lower ends of the axis of the rotating shaft 21. At this time, points A, B, and C are not coplanar. The locking member 3 is activated, and the locking member 3 applies a locking torque to the rotating shaft 21 to increase the clamping force of the jaw assembly one 1a and the jaw assembly two 1b.

[0084] When the wafer cassette clamping device releases the wafer cassette, the locking member 3 is closed and no longer applies a locking torque to the rotating shaft 21. The driving member 4 drives the rotating shaft 21 to rotate counterclockwise, and the rotating plate 22 rotates synchronously. The hinge shafts of the first rod body one 23a and the second rod body 13 two and the rotating plate 22 rotate synchronously. The first rod body one 23a and the first rod body two 23b respectively push the jaw assembly one 1a and the jaw assembly two 1b to move in opposite directions to move away from each other. Until the light shielding piece 62 blocks the photoelectric sensor 63 corresponding to the initial position, it indicates that the jaw assembly one 1a and the jaw assembly two 1b reach the Figure 3 initial position shown, and the driving member 4 stops operating, waiting for the next clamping command.

[0085] In one embodiment, a wafer cassette clamping method is also disclosed. Using the above wafer cassette clamping device, the clamping method includes:

[0086] S100. Drive the rotating shaft 21 to rotate along its own axis according to the clamping instruction. In this embodiment, the rotating shaft 21 rotates clockwise.

[0087] S200. During the rotation of the rotating shaft 21, the two jaw assemblies 1 are pulled to move relatively synchronously through the first rod body 23 until the jaw assemblies 1 move to the clamping position.

[0088] At this clamping position, the structure of the link assembly 2 can apply a clamping force to the jaw assembly 1.

[0089] S300. The locking member 3 is activated, and the locking member 3 applies a locking torque to the rotating shaft 21 that is not less than a set threshold value.

[0090] Due to space limitations, the link assembly 2 cannot reach the dead point position, so the locking member 3 is used for compensation. When the included angle θ1 is smaller, the locking torque of the locking member 3 is smaller.

[0091] In one embodiment, the present invention also discloses a crane system. The crane system includes a traveling device (not shown in the figure), a lifting device (not shown in the figure), and a wafer cassette clamping device, wherein the wafer cassette clamping device adopts the above clamping structure. The traveling device drives the lifting device and the wafer cassette clamping device to walk synchronously along the track to move between different workstations, and the lifting device drives the wafer cassette clamping device to lift to approach or move away from the wafer cassette in the vertical direction.

[0092] The above embodiments are only used to illustrate the technical concept and characteristics of the present invention. The purpose is to enable those who are familiar with this technology to understand the content of the present invention and implement it, and it cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit and essence of the present invention should be covered within the protection scope of the present invention.

Claims

1. A wafer box clamping device, characterized in that: include: A clamping jaw assembly, wherein two clamping jaw assemblies are arranged at intervals along a first direction of a horizontal plane, and the two clamping jaw assemblies can move synchronously relative to or opposite to each other along the first direction to switch between an initial position and a clamping position; A connecting rod assembly, the connecting rod assembly is located between the two clamping jaw assemblies, the connecting rod assembly includes a rotating shaft extending in a second direction along a horizontal plane, the rotating shaft can rotate along its own axis, a vertically arranged rotating plate is fixed on the rotating shaft, two first rod bodies are hingedly connected to the rotating plate and are symmetrical with respect to the center of the rotating shaft, and the two first rod bodies are respectively hinged to the two clamping jaw assemblies; A locking member, the locking member is connected to the rotating shaft, and when in the clamping position, the locking member provides a locking torque for the rotating shaft; The wafer box clamping device also includes a detection component for detecting the position of the connecting rod component, the detection component includes a positioning frame, a light shielding sheet and a photoelectric sensor, the photoelectric sensor is fixed on the positioning frame and is provided with two, the two photoelectric sensors correspond to the initial position and the clamping position respectively, and the light shielding sheet is fixed to the end of the rotating shaft extending from the rotating plate; The wafer box clamping device also includes a driving member, the driving member is fixedly connected to an end of the rotating shaft away from the light shielding sheet, and the driving member is communicatively connected to the photoelectric sensor; A notch is provided on the first rod body to make way for the rotating shaft. When in the clamping position, part of the rotating shaft is embedded in the notch. At this time, the axis 1 of the hinge shaft connecting the first rod body and the rotating plate, the axis 2 of the hinge shaft connecting the first rod body and the clamping claw assembly, and the axis 3 of the rotating shaft are not coplanar.

2. The wafer box clamping device according to claim 1, characterized in that: The rotating shaft is rotatably connected to a base plate, the base plate extends along a horizontal plane and a bearing seat rotatably connected to the rotating shaft is fixed thereon, and a vertical distance L from the axis line to the base plate is B >R2+L A -R1*cosθ1, where L A is the minimum distance from the first rod to the substrate in the vertical direction when in the clamping position, R1 is the radius of the rotating shaft, θ1 is the angle between the vertical connecting line between the axis three and the axis one and the horizontal plane when in the clamping position, and R2 is the distance from the axis one to the axis three.

3. The wafer box clamping device according to claim 1, characterized in that: The side wall of the notch is an inclined surface.

4. The wafer box clamping device according to claim 1, characterized in that: The positioning frame is provided with an adjustment hole corresponding to the photoelectric sensor, the photoelectric sensor can slide in the adjustment hole, and the adjustment hole is an arc hole coaxial with the rotating shaft.

5. The wafer box clamping device according to claim 2, characterized in that: The clamping jaw assembly includes a connecting block and a clamping block fixedly connected to the connecting block, the connecting block passes through the base plate in the vertical direction, the connecting rod assembly and the clamping block are respectively located on the upper and lower sides of the base plate, and clamping grooves are provided on the opposite surfaces of the two clamping blocks.

6. The wafer box clamping device according to claim 5, characterized in that: The connecting block of one of the clamping jaw assemblies is hinged to one of the first rods, and the other clamping jaw assembly further comprises a second rod extending along the first direction, one end of the second rod is fixed to the connecting block, and the other end is hinged to the other of the first rods.

7. The wafer box clamping device according to claim 5, characterized in that: A guide rail located on the same side as the connecting rod assembly is also fixed on the base plate. The guide rail extends along a first direction, and the connecting block slides along the guide rail.

8. A wafer box clamping method, characterized in that: Using the wafer box clamping device according to any one of claims 1 to 7, the clamping method comprises: Driving the rotating shaft to rotate along its own axis according to the clamping instruction; During the rotation of the rotating shaft, the first rod body pulls the two clamping jaw assemblies to move synchronously relative to each other until the clamping jaw assemblies move to a clamping position; The locking member is activated and applies a locking torque not less than a set threshold to the rotating shaft.

9. An overhead travelling crane system, characterized in that: A wafer box clamping device comprising the wafer box clamping device according to any one of claims 1 to 7.

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