Design method of tool for plasma physical vapor deposition and tool

Abstract

The invention discloses a tool design method and tool for plasma physical vapor deposition, flow behavior characteristics of plasma flame flow on the surface of a workpiece are obtained through a finite element simulation method, targeted design is carried out, and the flow state of the flame flow is actively controlled by introducing a flow guide piece. The spraying process can be more accurate and controllable, the coating thickness uniformity and the microstructure controllability are improved, the early-stage trial and error cost can be saved, and the product quality and stability are improved. The tool is novel and reasonable in structure, the flow guide piece is arranged, the flowing direction of plasma flame flow can be changed during spraying, then the flowing state of the flame flow is actively controlled, the spraying process is more accurate and controllable, and therefore the thickness uniformity of a coating on the surface of a workpiece can be improved, the microstructure of the coating is improved, and the spraying quality of the workpiece is improved. The method is suitable for improving the thickness uniformity of the plasma physical vapor deposition coating of the aero-engine multi-union blade test piece and optimizing the microstructure of the coating.

Description

Technical Field

[0001] The present invention relates to the technical field of tool design, and in particular to a tool design method and tool for plasma physical vapor deposition, which can be used for plasma physical vapor deposition processing of workpieces such as multi-blade test pieces of aircraft engines. Background Art

[0002] Plasma physical vapor deposition (PS-PVD) is an advanced thermal barrier coating preparation technology that combines the high-energy characteristics of plasma spraying and the precision control advantages of physical vapor deposition. The coating material is heated, evaporated and transported to the substrate surface through a high-energy plasma jet, thereby achieving coating deposition. However, since the flow state of the plasma flame on the workpiece surface is difficult to accurately control, changes in parameters such as the flame flow velocity, temperature and composition distribution will affect the uniformity of the coating deposition thickness on the workpiece surface. However, the current regulation of process parameters such as spraying current and powder feeding amount relies on trial and error, which leads to insufficient process stability and it is still difficult to ensure the uniformity of coating thickness.

[0003] The inventor is aware of a multi-station rotary tooling device for plasma physical vapor deposition, which achieves uniform rotation of the workpiece during the spraying process through the combination of revolution and rotation systems, and is expected to improve the uniformity of the workpiece coating thickness. However, this method is easily limited by factors such as the shape, size and spraying angle of the workpiece, and cannot accurately control the flow state of the plasma flame on the workpiece surface. Therefore, it is unable to fundamentally solve the problem of uneven coating thickness.

[0004] By increasing the spray thickness and extending the spray time, although the plasma flame flow state can be optimized and the uniformity of the coating can be improved, it brings additional costs and time consumption.

[0005] In view of the main shortcoming that the flow state of the current plasma flame flow on the workpiece surface is difficult to control, the present invention provides a novel tooling design method and tooling for plasma physical vapor deposition. Summary of the invention

[0006] The purpose of the present invention is to provide a novel tooling design method and tooling for plasma physical vapor deposition. Through the finite element simulation method, the flow behavior characteristics of the plasma flame flow on the workpiece surface can be accurately predicted, and the selection of optimal process parameters can be completed, which is conducive to actively and accurately controlling the flow state of the plasma flame flow and ensuring the thickness uniformity of the workpiece coating, so as to solve the problems existing in the above-mentioned prior art that the flow state of the plasma flame flow cannot be accurately controlled, the processing cost is high, the time is long, the work efficiency is low, etc.

[0007] To achieve the above object, the present invention provides the following solutions:

[0008] The present invention provides a method for designing tooling for plasma physical vapor deposition, comprising the steps of:

[0009] S1. Establish a finite element geometric model of the workpiece;

[0010] S2, performing finite element flow field numerical simulation on the finite element geometric model of the workpiece to analyze the flow on the workpiece surface;

[0011] S3. According to the fluid mechanics simulation results obtained by finite element simulation analysis, the area with low plasma flame velocity and the shadow area in the workpiece are obtained, and for the area with low plasma flame velocity and the shadow area in the workpiece, a guide piece is added to the tooling and finite element simulation analysis is performed again until the tooling is initially finalized;

[0012] S4. After the tooling is initially finalized, the workpiece is sprayed with plasma physical vapor deposition;

[0013] S5, measuring the uniformity of the thickness of the deposited coating on the surface of the workpiece, and optimizing the tooling geometry and spraying parameters according to the measured coating thickness and coating microstructure. If the coating thickness and microstructure on the surface of the workpiece meet the preset requirements, execute step S6. If at least one of the coating thickness and microstructure on the surface of the workpiece does not meet the preset requirements, repeat steps S3 to S5.

[0014] S6. Finalize the tooling and complete the design.

[0015] Preferably, in step S1, while establishing the finite element geometric model of the workpiece, an external flow field is simulated and established at the periphery of the workpiece.

[0016] Preferably, in step S1, the finite element geometric model of the workpiece and the external flow field is also imported into the finite element meshing software ICEM to perform structured meshing.

[0017] Preferably, in step S2, the finite element simulation software fluent is used to analyze the flow on the workpiece surface.

[0018] Preferably, the spraying parameters in step S5 include at least one of spraying distance, powder feeding amount, substrate rotation speed and spraying current.

[0019] Preferably, the workpiece is a multi-blade test piece.

[0020] The present invention further provides a tool for plasma physical vapor deposition, which is designed using any of the above-mentioned tool design methods for plasma physical vapor deposition, and comprises:

[0021] An upper housing, configured to be arranged in close contact with the first end of the workpiece;

[0022] A lower housing, used for being arranged in close contact with the second end of the workpiece;

[0023] The guide piece is detachably connected between the upper shell and the lower shell so that the upper shell and the lower shell clamp the workpiece, and the guide piece can change the flow state of the plasma flame flow on the surface of the workpiece to make the coating on the surface of the workpiece uniform.

[0024] Preferably, both side edges of the upper shell and the lower shell are provided with mounting grooves, and the guide member can move along the mounting grooves and is connected to the mounting grooves by screws.

[0025] Preferably, the upper shell and the lower shell are both flat plate structures; or, the upper shell and the lower shell are both shell cover structures with a concave cavity.

[0026] Preferably, the guide member is a guide column or a guide plate.

[0027] Compared with the prior art, the present invention has achieved the following technical effects:

[0028] The tooling design method for plasma physical vapor deposition proposed in the present invention obtains the flow behavior characteristics of the plasma flame flow on the workpiece surface through the finite element simulation method and performs targeted design. The flow state of the flame flow is actively controlled by introducing a guide piece, which can make the spraying process more precise and controllable, improve the uniformity of coating thickness and the controllability of microstructure, save the initial trial and error cost, and improve product quality and stability.

[0029] The tooling for plasma physical vapor deposition proposed in the present invention is designed by the above-mentioned tooling design method for plasma physical vapor deposition. The tooling structure is novel and reasonable. By setting a guide piece, the flow direction of the plasma flame flow can be changed during spraying, and the flow state of the flame flow can be actively controlled, making the spraying process more precise and controllable, thereby improving the thickness uniformity of the coating on the surface of the workpiece, improving the coating microstructure, and improving the workpiece spraying quality. It is suitable for improving the thickness uniformity of the plasma physical vapor deposition coating of the multi-blade test piece of the aircraft engine and optimizing the coating microstructure. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0031] Figure 1 A flow chart of a method for designing a tool for plasma physical vapor deposition disclosed in an embodiment of the present invention;

[0032] Figure 2The finite element geometric model and external flow field of the double-blade test piece disclosed in the embodiment of the present invention;

[0033] Figure 3 A finite element mesh division structure diagram of a geometric model of a double-blade test piece disclosed in an embodiment of the present invention;

[0034] Figure 4 The turbulence distribution diagram of the surface of the sprayed workpiece disclosed in the embodiment of the present invention;

[0035] Figure 5 The finite element calculation results of the double-blade test piece after the guide piece is installed disclosed in the embodiment of the present invention;

[0036] Figure 6 It is a schematic diagram of the preliminary shaping tooling structure disclosed in an embodiment of the present invention;

[0037] Figure 7 It is a schematic diagram of the thickness measurement points disclosed in the embodiment of the present invention;

[0038] Figure 8 It is a schematic diagram of the overall structure of the tooling for plasma physical vapor deposition disclosed in an embodiment of the present invention;

[0039] Fig. 9 It is a schematic structural diagram of an upper shell in a tooling for plasma physical vapor deposition disclosed in an embodiment of the present invention;

[0040] Fig.10 It is a schematic structural diagram of a lower shell in a tool for plasma physical vapor deposition disclosed in an embodiment of the present invention;

[0041] Fig.11 It is a schematic structural diagram of a flow guide member in a tooling for plasma physical vapor deposition disclosed in an embodiment of the present invention.

[0042] In the figure, the reference numerals are:

[0043] 1-Double blade test piece;

[0044] 2-plasma flow field space;

[0045] 3- Plasma flame flow inlet;

[0046] 4- plasma flame outlet;

[0047] 5-tooling for plasma physical vapor deposition; 51-upper shell; 511-upper shell cavity; 52, lower shell; 521-lower shell cavity; 53, guide piece; 54-installation slide groove; 55-screw. DETAILED DESCRIPTION

[0048] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0049] One of the purposes of the present invention is to provide a novel tooling design method for plasma physical vapor deposition, which can accurately predict the flow behavior characteristics of a plasma flame on a workpiece surface through a finite element simulation method, and complete the selection of optimal process parameters, thereby facilitating active and precise control of the flow state of the plasma flame, ensuring the thickness uniformity of the workpiece coating, and solving the problems existing in the prior art that the flow state of the plasma flame cannot be precisely controlled, the processing cost is high, the time consumption is long, and the work efficiency is low.

[0050] Another object of the present invention is to provide a tool for plasma physical vapor deposition formed based on the above-mentioned tool design method for plasma physical vapor deposition.

[0051] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0052] Example 1

[0053] like Figure 1 As shown, this embodiment proposes a tool design method for plasma physical vapor deposition, the main purpose of which is to accurately grasp the flow of plasma flame (also known as "plasma jet") on the surface of the workpiece during the deposition process, thereby achieving thickness uniformity of plasma physical vapor deposition of the workpiece. The specific design method includes the following steps:

[0054] S1. First, establish a finite element geometric model of the workpiece;

[0055] S2. The flame flow on the workpiece surface at different spraying angles is obtained through finite element simulation calculation, and then the flow on the workpiece surface is analyzed;

[0056] S3. According to the results of fluid mechanics simulation CFD (Computational Fluid Dynamics), the areas with low plasma flame velocity and shadow areas are obtained. According to these areas, optimization compensation is performed when designing the tooling and finite element simulation is performed again until the tooling is initially finalized;

[0057] S4. After the tooling is initially finalized, the workpiece is sprayed;

[0058] S5, measuring the uniformity of the coating thickness on the workpiece surface, and further optimizing the tooling geometry and spraying parameters (including but not limited to spraying distance, powder feeding amount, substrate rotation speed, spraying current, etc.) according to the measured coating thickness and coating microstructure distribution. If the coating thickness and microstructure on the workpiece surface meet the requirements, execute step S6. If the coating thickness and microstructure on the workpiece surface do not meet the requirements, repeat steps S3 to S5.

[0059] S6. Finalize the tooling and complete the design.

[0060] It should be noted that plasma physical vapor deposition technology is mature, and its specific spraying method and working principle will not be described here.

[0061] In the existing technology, the flow state of the plasma flame on the workpiece surface is difficult to control during the spraying process. In order to ensure the uniformity of the coating, a larger spraying thickness and a longer spraying time are required, which leads to high material costs and insufficient product stability. This solution obtains the flow behavior characteristics of the plasma flame on the workpiece surface through finite element simulation and conducts targeted design. By introducing a guide piece to actively control the flow state of the flame, the spraying process can be made more precise and controllable, the uniformity of the coating thickness and the controllability of the microstructure can be improved, the initial trial and error costs can be saved, and the product quality and stability can be improved.

[0062] The above-mentioned tool design method for plasma physical vapor deposition can be used to improve the uniformity of the plasma physical vapor deposition coating thickness of the multi-blade test piece of an aircraft engine and optimize the coating microstructure. The following is a specific description of the tool design method for plasma physical vapor deposition in this embodiment, taking the workpiece as a double-blade test piece as an example. The tool design method for plasma physical vapor deposition of a double-blade test piece is as follows:

[0063] Step S1, establishing a finite element geometric model of the double blade test piece 1:

[0064] like Figure 2 As shown in FIG. 1 , the geometric model of the double blade test piece 1 and the external flow field is shown. The front and rear sides of the double blade test piece 1 are the plasma flow field space 2. A plasma flame inlet 3 is arranged at one end of the plasma flow field space 2, and a plasma flame outlet 4 is arranged at the other end. Figure 2 The geometric model shown in the figure is imported into the finite element meshing software ICEM. All surfaces of the geometric model are set as walls. After the setting is completed, the model is structured meshed and the results are as follows Figure 3 shown.

[0065] Step S2: Surface flow analysis of the double blade test piece 1:

[0066] Will Figure 3The model grid structure shown in the figure is imported into the finite element simulation software fluent, and the flow field numerical simulation of the plasma flame flow on the surface of the double blade test piece 1 is carried out. The solver is set to pressure basis and transient method, and the results are as follows Figure 4 As shown, turbulence intensity is used to characterize the flow state of the plasma flame on the surface of the double-blade test piece 1. The results show that when the flow direction is from the leading edge of the blade to the trailing edge, the leading edge arc of the step plane of the double-blade test piece 1 has a higher turbulence intensity and speed, indicating that the deposition microstructure of ceramic particles in these areas (which can be defined as "area one") is different from that in other areas of the step plane, and the deposition rate is higher. Therefore, a guide member 53 can be added in front of the double-blade test piece 1 to make the turbulence intensity of the step plane uniform.

[0067] Step S3: tooling optimization:

[0068] This step is mainly to design and optimize the structure and orientation of the guide member 53. Specifically, after adding the guide member 53 to the tooling, the finite element simulation software FLUENT is used to perform finite element simulation analysis on the model again. The results are as follows: Figure 5 As shown, it can be seen that the turbulence intensity of each area on the step plane of the double-blade test piece 1 has become more uniform than before the guide 53 was added. Subsequently, a detachable plasma physical vapor deposition tool 5 was designed based on the geometric model. The upper and lower shells of the plasma physical vapor deposition tool 5 fit the top and bottom of the double-blade test piece 1 respectively. The relative position of the guide 53 and the double-blade test piece 1 is determined by the simulation results, and the whole is 3D printed with nylon material. The preliminary finalized structure of the plasma physical vapor deposition tool 5 is shown in FIG. Figure 6 As shown, the guide 53 is fixed to the upper and lower shells by screws, the relative position of the guide 53 and the double blade test piece 1 can be freely adjusted, the shape of the guide 53 can be prism (such as regular triangular prism, regular quadrangular prism, regular hexagonal prism, etc.) or cylindrical, and the cylindrical shape is preferred. The geometric shape of the guide 53 can also be replaced with other shapes. The orientation of the guide 53 relative to the blade can be adjusted continuously to perform finite element simulation until the flow state on the surface of the double blade test piece 1 is uniform, and the positioning of the guide 53 is obtained.

[0069] The working principle of the flow guide 53 is:

[0070] The deposition thickness of the plasma physical vapor deposition (PS-PVD) coating is affected by the flow of the jet on the workpiece surface. The thickness is smaller during laminar flow and larger during turbulent flow. When the double-blade test piece 1 is sprayed, the blade basin and the back of the blade are generally laminar flows, lacking the velocity component perpendicular to the surface. Therefore, the thickness of these areas is smaller than that of the leading edge and the trailing edge of the blade. The turbulence intensity is uniformed by setting a guide 53 in front of these laminar areas of the double-blade test piece 1 so that the jet flows turbulently when it reaches the workpiece surface. Compared with laminar flow, turbulence causes more coating particles in the jet to generate velocity components in the direction perpendicular to the blade surface, thereby increasing the particle deposition rate in these "laminar" areas, and thus reducing the thickness difference with other parts of the blade, thereby achieving the effect of thickness uniformity.

[0071] Step S4, spraying of the double blade test piece 1:

[0072] After the double blade test piece 1 is sprayed, the double blade test piece 1 is transversely dissected to analyze the spraying quality.

[0073] Step S5: Thickness uniformity measurement:

[0074] The double blade test piece 1 after spraying was cut open transversely, and then the cross section of each blade was measured according to Figure 7 The thickness and microstructure of each point are examined, and the differences between the thickness and microstructure of each point are compared. If the thickness uniformity and microstructure meet the requirements, the tooling is finalized and enters step S6, otherwise, steps S3 to S5 are repeated until the thickness uniformity and microstructure meet the requirements.

[0075] like Figure 7 As shown in FIG. 1 , each blade in the double blade test piece 1 has 10 points a to j arranged at intervals throughout the outer circumference, with points A and C on both sides of the two blades, and point B between the two blades. Figure 7 As shown, a total of 23 points need to be inspected and compared.

[0076] Step S6: Tooling finalization:

[0077] After analyzing the double blade test piece 1 and adjusting and optimizing the geometric shape and relative installation position of the guide member 53, the final shape of the tooling is determined, and then it can be put into production and mass processing.

[0078] It should be noted that, for different workpieces, the corresponding tooling structures may be different. For example, the shape and number of the guide members 53 may be flexibly adjusted according to actual production requirements.

[0079] It can be seen that the beneficial effects of the tooling design method for plasma physical vapor deposition proposed in this scheme are as follows:

[0080] (I) The finite element method is used to simulate the flow state of the plasma flame on the workpiece surface during the spraying process to optimize the geometric shape of the tooling, which can improve the thickness uniformity of the coating on the workpiece surface, improve the coating microstructure, and enhance the workpiece spraying quality.

[0081] (ii) By introducing a guide piece into the tooling, the flow direction of the plasma flame can be changed during spraying, thereby actively controlling the flow state of the flame, making the spraying process more precise and controllable.

[0082] Example 2

[0083] like Figure 8 to Figure 11 As shown, this embodiment proposes a tool 5 for plasma physical vapor deposition, which is designed by the tool design method for plasma physical vapor deposition disclosed in Example 1. The tool 5 for plasma physical vapor deposition includes an upper shell 51, a lower shell 52 and a guide 53. The upper shell 51 and the lower shell 52 are respectively used to clamp at both ends of the workpiece, and then the upper shell 51 and the lower shell 52 are connected by the guide 53. While the upper shell 51 and the lower shell 52 are connected and fixed, the upper shell 51 and the lower shell 52 are also clamped so that the upper shell 51 and the lower shell 52 clamp the two ends of the workpiece. Take the double-blade test piece 1 as an example, the two ends of the double-blade test piece 1 are respectively fitted with the upper shell 51 and the lower shell 52, and the double-blade test piece 1 can be clamped and fixed by the upper shell 51 and the lower shell 52. At the same time, the upper shell 51 and the lower shell 52 can be used to cover the assembly surfaces at both ends of the double-blade test piece 1, respectively, to protect the assembly surfaces here from deposition of coatings.

[0084] In some embodiments, the upper shell 51 and the lower shell 52 are preferably welded from high-temperature alloy plates. Specifically, the upper shell 51 and the lower shell 52 can be both set as flat plate structures, and the upper shell 51 and the lower shell 52 can be directly contacted and assembled with the two ends of the workpiece; the upper shell 51 and the lower shell 52 can also be set as a shell cover structure with a concave cavity of a certain depth, such as Fig. 9 and Fig.10 As shown, the upper shell 51 and the lower shell 52 have an upper shell cavity 511 and a lower shell cavity 521 respectively. When installed and used, the two ends of the workpiece extend into the upper shell cavity 511 and the lower shell cavity 521 respectively, which can improve the reliability of the clamping structure.

[0085] In some embodiments, in order to further improve the clamping strength of the workpiece, a workpiece clamping slot can be configured in the tooling. Specifically, a clamping slot adapted to the end face shape of the workpiece can be configured in the upper shell cavity 511 and the lower shell cavity 521 respectively for the workpiece to be inserted and clamped.

[0086] In some embodiments, the shape of the guide member 53 includes but is not limited to a prism, a cylinder, or a sheet (such as a blade), etc. Preferably, the guide member 53 is a cylindrical guide column machined from a high-temperature alloy bar.

[0087] In some embodiments, in order to improve the flexibility of the use of the tooling, installation slots 54 arranged along the length direction of the shells can be provided on both side edges of the upper shell 51 and the lower shell 52, and internal threaded holes are provided at both ends of the guide member 53. During installation, the two ends of the guide member 53 are aligned with the installation slots 54 of the upper shell 51 and the lower shell 52, respectively, and then the screws 55 are passed through the installation slots 54 and threadedly connected to the ends of the guide member 53 to achieve the fastening installation of the installation slots 54 and the guide member 53. When the position of the guide member 53 needs to be adjusted, the screws 55 can be loosened, and the guide member 53 can be moved along the installation slots 54 to adjust the position of the guide member 53 relative to the upper shell 51 and the lower shell 52. After the adjustment is in place, the guide member 53 can be fastened with the screws 55. The operation is flexible and convenient, and the use modes are diverse, which can adapt to the plasma flame flow control of different workpieces.

[0088] From the above, it can be seen that the functions of the tooling 5 for plasma physical vapor deposition of the present scheme are as follows: ① The upper shell 51 of the tooling fits tightly with the upper end of the workpiece, thereby protecting the assembly surface here from the deposition of coating; ② The lower shell 52 of the tooling fits tightly with the lower end of the workpiece, thereby protecting the assembly surface here from the deposition of coating, and the lower part of the lower shell 52 can also be provided with a boss connected to the spraying station as needed; ③ The guide member 53 is used to guide the plasma flame flow to ensure uniform coating deposition; ④ The design of the mounting slide 54 allows the installation position of the guide member 53 to be diverse and adjustable to meet the requirements of uniform coating deposition on different workpieces.

[0089] When the plasma physical vapor deposition tooling 5 of this scheme is used: first, fit the upper shell 51 and the lower shell 52 to the upper and lower ends of the double blade test piece 1 respectively, and then lightly tighten the guide 53 with screws 55 so that the guide 53 can slide in the installation slots 54 of the upper shell 51 and the lower shell 52; adjust the orientation of the guide 53 to correspond to the laminar flow area of ​​the double blade test piece 1 and be located in front of the laminar flow area, tighten the screws 55 to complete the fastening and installation of the upper shell 51, the lower shell 52 and the guide 53, and the upper and lower clamping of the double blade test piece 1. Fix the tooling to the spraying station and start spraying.

[0090] Positional relationship between the guide 53 and the blades in the double-blade test piece 1: The guide 53 is mainly arranged in the front part of the area where the "laminar flow" is formed when the plasma jet impacts the workpiece. The "laminar flow" area can be obtained through finite element analysis. Figures 4 to 8As shown, the guide member 53 should be located in the double-blade test piece 1 (the area enclosed by the blade pot of the first blade, the blade back of the second blade and the upper and lower shells) or the two side areas (the area enclosed by the blade back of the first blade, the blade pot of the second blade and the upper and lower shells respectively).

[0091] The above-mentioned tooling 5 for plasma physical vapor deposition has a reasonable structural design. By setting the guide member 53, the flow direction of the plasma flame flow can be changed during spraying, and then the flow state of the flame flow can be actively controlled, making the spraying process more precise and controllable, thereby improving the thickness uniformity of the coating on the workpiece surface, improving the coating microstructure, and improving the workpiece spraying quality.

[0092] It should be noted that the structures, proportions, sizes, etc. drawn in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present invention, so they have no substantial technical significance. Any modification of the structure, change of the proportional relationship or adjustment of the size should still fall within the scope of the technical content disclosed by the present invention without affecting the effects and purposes that can be achieved by the present invention. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of the present invention. The change or adjustment of their relative relationship should also be regarded as the scope of the implementation of the present invention without substantially changing the technical content.

[0093] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A method for designing tooling for plasma physical vapor deposition, characterized in that: Includes steps: S1. Establish a finite element geometric model of the workpiece; S2, performing finite element flow field numerical simulation on the finite element geometric model of the workpiece to analyze the flow on the workpiece surface; S3. According to the fluid mechanics simulation results obtained by finite element simulation analysis, the area with low plasma flame velocity and the shadow area in the workpiece are obtained, and for the area with low plasma flame velocity and the shadow area in the workpiece, a guide piece is added to the tooling and finite element simulation analysis is performed again until the tooling is initially finalized; S4. After the tooling is initially finalized, the workpiece is sprayed with plasma physical vapor deposition; S5, measuring the uniformity of the thickness of the deposited coating on the surface of the workpiece, and optimizing the tooling geometry and spraying parameters according to the measured coating thickness and coating microstructure. If the coating thickness and microstructure on the surface of the workpiece meet the preset requirements, execute step S6. If at least one of the coating thickness and microstructure on the surface of the workpiece does not meet the preset requirements, repeat steps S3 to S5. S6. Finalize the tooling and complete the design.

2. The method for designing tooling for plasma physical vapor deposition according to claim 1, characterized in that: In step S1, while establishing a finite element geometric model of the workpiece, an external flow field is simulated and established around the workpiece.

3. The method for designing tooling for plasma physical vapor deposition according to claim 2, characterized in that: In step S1, the finite element geometric model of the workpiece and the external flow field is also imported into the finite element meshing software ICEM to perform structured meshing.

4. The method for designing tooling for plasma physical vapor deposition according to claim 3, characterized in that: In step S2, the finite element simulation software fluent is used to analyze the flow on the workpiece surface.

5. The method for designing tooling for plasma physical vapor deposition according to claim 1, characterized in that: The spraying parameters in step S5 include at least one of spraying distance, powder feeding amount, substrate rotation speed and spraying current.

6. The method for designing tooling for plasma physical vapor deposition according to any one of claims 1 to 5, characterized in that: The workpiece is a multi-blade test piece.

7. A tool for plasma physical vapor deposition, designed by the tool design method for plasma physical vapor deposition according to any one of claims 1 to 6, characterized in that: include: An upper housing, configured to be arranged in close contact with the first end of the workpiece; A lower housing, used for being arranged in close contact with the second end of the workpiece; The guide piece is detachably connected between the upper shell and the lower shell so that the upper shell and the lower shell clamp the workpiece, and the guide piece can change the flow state of the plasma flame flow on the surface of the workpiece to make the coating on the surface of the workpiece uniform.

8. The tooling for plasma physical vapor deposition according to claim 7, characterized in that: Both side edges of the upper shell and the lower shell are provided with mounting slide grooves, and the guide member can move along the mounting slide grooves and is connected to the mounting slide grooves by screws.

9. The tooling for plasma physical vapor deposition according to claim 7 or 8, characterized in that: The upper shell and the lower shell are both flat plate structures; or, the upper shell and the lower shell are both shell cover structures with a concave cavity.

10. The tooling for plasma physical vapor deposition according to claim 7 or 8, characterized in that: The guide member is a guide column or a guide plate.

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