Independent double-chamber electron gun evaporation coating equipment

Abstract

The invention discloses independent double-chamber electron gun evaporation coating equipment, and relates to the technical field of coating equipment. Comprising an equipment bottom plate, an upper cavity and a lower cavity are fixedly installed on the equipment bottom plate, a vacuum pump is fixedly installed on the side end face of the equipment bottom plate, the input end of the vacuum pump fixedly communicates with a discharge pipe, and the end, away from the vacuum pump, of the discharge pipe fixedly communicates with a two-way pipe; the two ends of each two-way pipe are communicated with the upper cavity and the lower cavity respectively, and valves are arranged on pipelines of the two-way pipes; the internal structures of the upper chamber and the lower chamber are the same, a driving assembly is arranged in the upper chamber, and a crucible and an electronic gun are arranged on the driving assembly; and a rotating assembly is arranged in the upper chamber. Through cooperative use of the driving assembly, the rotating assembly and the auxiliary assembly, the process of material heating, evaporation and substrate coating is optimized, and the coating effect and the overall working efficiency of the equipment are effectively improved.

Description

Technical Field

[0001] The invention relates to the technical field of film coating equipment, in particular to an independent double-chamber electron gun evaporation coating equipment. Background Art

[0002] Independent dual-chamber electron gun evaporation coating equipment is a device used for thin film deposition, which is widely used in optics, electronics, solar energy and other fields. Its core principle is to use an electron gun to heat the evaporation source material to form a gas phase substance, and then let these substances deposit on the substrate to form a thin film.

[0003] In the prior art, a Chinese patent with publication number "CN117127152A" discloses an electron beam evaporation coating device and an evaporation coating method. By adopting an optimized electron beam evaporation mechanism, the crucible volume as the coating raw material is large, which can hold more evaporation materials and is suitable for a continuous evaporation process. The assembly base + fixed structure method is adopted to improve the structural stability, improve the efficiency of the evaporation process, realize the optimization of the electron beam evaporation mechanism, and solve the problem that the existing crucible volume is small and the entire coating equipment is not stable enough.

[0004] At present, in the process of coating the substrate, electron gun evaporation coating equipment is usually used for coating. As in the scheme described above, the electron gun is used to dissolve the coating raw material in the crucible to achieve the coating function. However, when the electron gun dissolves the coating raw material in the crucible, since the position of the electron gun is fixed, the electron beam irradiated by the electron gun on the coating raw material will always be in the same position. The coating raw material in the crucible may be locally overheated or evaporate unevenly due to long-term heating. In addition, some existing coating equipment cannot automatically adjust the front and back sides of the substrate during the coating process, resulting in inconsistent evaporated substances in contact with the front and back sides of the substrate, and ultimately resulting in inconsistent coating effects, which seriously affects the coating effect of the substrate. Summary of the invention

[0005] In view of the deficiencies in the prior art, the present invention provides an independent dual-chamber electron gun evaporation coating device, which solves the problems mentioned in the above background technology.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: An independent double-chamber electron gun evaporation coating device comprises a device bottom plate, an upper chamber and a lower chamber are fixedly mounted on the device bottom plate, a vacuum pump is fixedly mounted on the side end surface of the device bottom plate, an input end of the vacuum pump is fixedly connected to a discharge pipe, an end of the discharge pipe away from the vacuum pump is fixedly connected to a double-way pipe, both ends of the double-way pipe are respectively connected to the upper chamber and the lower chamber, and valves are arranged on the pipeline of the double-way pipe; The upper chamber has the same internal structure as the lower chamber, a driving assembly is provided inside the upper chamber, and a crucible and an electron gun are provided on the driving assembly; A rotating assembly is disposed inside the upper chamber, and the substrate is turned over on the front and back sides by the rotating assembly.

[0007] Preferably, the driving assembly includes a driving motor fixedly mounted on the bottom of the upper chamber, a driving shaft fixedly mounted on the output end of the driving motor, a placement plate fixedly mounted on the end of the driving shaft away from the driving motor, a driving gear fixedly mounted on the driving shaft, and two symmetrically arranged auxiliary shafts are rotatably mounted on the inner bottom of the upper chamber.

[0008] Preferably, a left gear and a right gear are fixedly mounted on the two auxiliary shafts respectively, a lower annular groove is provided on the inner side surface of the upper chamber, an annular plate is rotatably mounted inside the lower annular groove, an annular block is fixedly mounted on the lower end surface of the annular plate, a first gear set is fixedly mounted on the inner side surface of the annular block, a symmetrically arranged L-shaped frame plate is fixedly mounted on the annular plate, an auxiliary component is provided on the auxiliary component, and a mounting ring is provided on the auxiliary component.

[0009] Preferably, the placement plate is located inside the annular plate, the driving gear meshes with the left gear and the right gear, the first gear set meshes with the left gear and the right gear, the crucible is mounted on the placement plate, and the electron gun is fixedly mounted inside the mounting ring.

[0010] Preferably, the rotating assembly includes a connecting plate fixedly mounted on an L-shaped frame plate, a mounting block is fixedly mounted on the top end of the connecting plate, a bearing is fixedly mounted on the side end surface of the mounting block, an electric push rod is fixedly mounted on the bearing, and a clamping plate is fixedly mounted on the output shaft of the electric push rod.

[0011] Preferably, an auxiliary gear is fixedly mounted on the electric push rod, an auxiliary ring is fixedly mounted on the inner top of the upper chamber, two sets of second gear sets are fixedly mounted on the auxiliary ring, an upper annular groove is opened on the inner side surface of the upper chamber, and an arc block is fixedly mounted on the outer side surface of the mounting block.

[0012] Preferably, the auxiliary gear is meshed with the second gear set, and the arc block is movably mounted inside the upper annular groove.

[0013] Preferably, the auxiliary component comprises a positioning groove provided on the L-shaped frame plate, a rotation groove is provided on the inner side of the positioning groove, a rotation shaft is fixedly installed on the mounting ring, a torsion spring is fixedly connected to the mounting ring, and a round head is fixedly installed on the tail end of the electron gun.

[0014] Preferably, an arc-shaped protrusion is fixedly installed on the inner side surface of the upper chamber, a push rod is slidably installed on the connecting plate, a compressed arc block is fixedly installed on one end of the push rod, a push plate is fixedly installed on the other end of the push rod, a positioning ring is fixedly installed on the push rod, and a spring is fixedly connected to the positioning ring.

[0015] Preferably, one end of the rotating shaft away from the mounting ring is rotatably connected to the inside of the rotating groove, one end of the torsion spring away from the mounting ring is fixedly connected to the inside of the rotating groove, the torsion spring is positioned on the outside of the rotating shaft, one end of the spring away from the positioning ring is fixedly connected to the connecting plate, and the spring is on the outside of the push rod.

[0016] The present invention provides an independent dual-chamber electron gun evaporation coating device. Compared with the prior art, it has the following beneficial effects: 1. The present invention drives the placement plate on the driving shaft to rotate by a driving motor, and the crucible on the placement plate will rotate. When the driving shaft rotates, the driving gear will be driven to rotate. The cooperation between the driving gear and the left gear and the right gear, and the cooperation between the first gear set on the annular block and the left gear and the right gear, are utilized, so that the annular plate passes through the limit of the lower annular groove and rotates in the opposite direction to the placement plate with the driving shaft as the center. The electron gun on the annular plate will move synchronously. The use of the rotation in the opposite direction not only helps to evenly dissolve the coating raw materials in the crucible, but also can continuously change the contact angle between the electron gun and the crucible, so that the coating raw materials are heated more evenly under heating conditions in different directions. 2. In the present invention, when the annular plate rotates, it drives the mounting block on the connecting plate to rotate. The mounting block rotates around the driving shaft through the limit of the upper annular groove. The electric push rod on the mounting block cooperates with the two sets of second gear sets on the auxiliary ring through the auxiliary gear, and the electric push rod cooperates with the bearing, thereby adjusting the front and back sides of the substrate on the clamping plate, ensuring that the coating quality on the front and back sides of the substrate is consistent, and effectively improving the coating effect of the coating equipment; 3. In the present invention, when the electron gun rotates with the L-shaped frame plate, the push rod on the connecting plate will repeatedly push the circular head on the electron gun through the cooperation of the compressed arc block and the arc-shaped protrusion and the reaction force of the spring on the positioning ring. At the same time, the electron gun will change its angle around the rotating shaft as the center through the action of the rotating shaft on the mounting ring and the torsion spring. By changing the angle of the electron gun, the electron beam emitted by the electron gun can irradiate different areas of the coating raw material, ensuring uniform evaporation of the coating raw material in the crucible; 4. The present invention optimizes the process of material heating, evaporation and substrate coating by using the driving component, the rotating component and the auxiliary component in coordination, and effectively improves the coating effect and the overall working efficiency of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the internal structure of the present invention; Figure 3 is a cross-sectional view of the present invention; Figure 4 It is a schematic diagram of the structure of the rotating assembly in the present invention; Figure 5 It is a schematic diagram of the structure of the driving component in the present invention; Figure 6 It is a structural schematic diagram of the installation block in the present invention; Figure 7 is a cross-sectional view of the connecting plate in the present invention; Figure 8 It is a cross-sectional view of the L-shaped frame plate in the present invention.

[0018] In the figure: 1, equipment bottom plate; 2, upper chamber; 3, lower chamber; 4, vacuum pump; 5, discharge pipe; 6, through pipe; 7, valve; 8, crucible; 9, electron gun; 10, drive motor; 11, drive shaft; 12, placement plate; 13, drive gear; 14, auxiliary shaft; 15, left gear; 16, right gear; 17, lower annular groove; 18, annular plate; 19, annular block; 20, first gear set; 21, L-shaped frame plate; 22, mounting ring ; 23. Connecting plate; 24. Mounting block; 25. Bearing; 26. Electric push rod; 27. Clamping plate; 28. Auxiliary gear; 29. ​​Auxiliary ring; 30. Second gear set; 31. Upper annular groove; 32. Arc block; 33. Positioning groove; 34. Rotating groove; 35. Rotating shaft; 36. Torsion spring; 37. Round head; 38. Arc-shaped protrusion; 39. Push rod; 40. Pressurized arc block; 41. Push plate; 42. Positioning ring; 43. Spring. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] See also Figure 1-8The present invention is an independent double-chamber electron gun 9 evaporation coating device, comprising a device bottom plate 1, an upper chamber 2 and a lower chamber 3 are fixedly installed on the device bottom plate 1, a vacuum pump 4 is fixedly installed on the side end surface of the device bottom plate 1, an input end of the vacuum pump 4 is fixedly connected with a discharge pipe 5, and an end of the discharge pipe 5 away from the vacuum pump 4 is fixedly connected with a double-way pipe 6, both ends of the double-way pipe 6 are respectively connected with the upper chamber 2 and the lower chamber 3, and valves 7 are arranged on the pipelines of the double-way pipe 6, the upper chamber 2 and the lower chamber 3 have the same internal structure, a driving component is arranged inside the upper chamber 2, and a crucible 8 and an electron gun 9 are arranged on the driving component, wherein the upper chamber 2 and the lower chamber 3 are both provided with chamber doors, and the upper chamber 2 and the lower chamber 3 are conveniently used by opening the valve 7 at the same time or individually, and the crucible 8 is used to place the coating raw materials, and the coating raw materials in the crucible 8 are dissolved by the electron light emitted by the electron gun 9, because the technology is well known to the personnel in the field, it will not be described in detail here; The driving assembly includes a driving motor 10 fixedly mounted on the inner bottom of the upper chamber 2, a driving shaft 11 fixedly mounted on the output end of the driving motor 10, a placement plate 12 fixedly mounted on the end of the driving shaft 11 away from the driving motor 10, a driving gear 13 fixedly mounted on the driving shaft 11, two symmetrically arranged auxiliary shafts 14 are rotatably mounted on the inner bottom of the upper chamber 2, a left gear 15 and a right gear 16 are fixedly mounted on the two auxiliary shafts 14, a lower annular groove 17 is provided on the inner side surface of the upper chamber 2, an annular plate 18 is rotatably mounted inside the lower annular groove 17, an annular block 19 is fixedly mounted on the lower end surface of the annular plate 18, a first gear set 20 is fixedly mounted on the inner side surface of the annular block 19, and the annular plate 18 is A symmetrically arranged L-shaped frame plate 21 is fixedly installed on the upper surface, an auxiliary component is arranged on the L-shaped frame plate 21, and a mounting ring 22 is arranged on the auxiliary component. The placement plate 12 is located on the inner side of the annular plate 18, the driving gear 13 is meshed with the left gear 15 and the right gear 16, the first gear set 20 is meshed with the left gear 15 and the right gear 16, the crucible 8 is installed on the placement plate 12, and the electron gun 9 is fixedly installed inside the mounting ring 22, wherein the annular plate 18 can be stably rotated in the upper chamber 2 by limiting the lower annular groove 17, and a top column can be arranged under the annular plate 18 according to the needs of personnel, and the end of the top column is a ball, and the normal rotation of the annular plate 18 is ensured by the cooperation between the top column and the ball.

[0021] In this embodiment, the placing plate 12 on the driving shaft 11 is driven to rotate by the driving motor 10, and the crucible 8 on the placing plate 12 will rotate. When the driving shaft 11 rotates, the driving gear 13 is driven to rotate. By utilizing the cooperation between the driving gear 13 and the left gear 15 and the right gear 16, and the cooperation between the first gear group 20 on the annular block 19 and the left gear 15 and the right gear 16, the annular plate 18 is limited by the lower annular groove 17 and rotates in the opposite direction to the placing plate 12 with the driving shaft 11 as the center. The electron gun 9 on the annular plate 18 will move synchronously. The rotation in the opposite direction not only helps to evenly dissolve the coating raw materials in the crucible 8, but also enables the contact angle between the electron gun 9 and the crucible 8 to continuously change, so that the coating raw materials are heated more evenly under heating conditions in different directions.

[0022] A rotating assembly is provided inside the upper chamber 2, and the substrate is turned over on the front and back sides by the rotating assembly. The rotating assembly includes a connecting plate 23 fixedly mounted on the L-shaped frame plate 21, a mounting block 24 is fixedly mounted on the top of the connecting plate 23, a bearing 25 is fixedly mounted on the side end face of the mounting block 24, an electric push rod 26 is fixedly mounted on the bearing 25, a clamping plate 27 is fixedly mounted on the output shaft of the electric push rod 26, an auxiliary gear 28 is fixedly mounted on the electric push rod 26, an auxiliary ring 29 is fixedly mounted on the inner top of the upper chamber 2, two sets of second gear sets 30 are fixedly mounted on the auxiliary ring 29, an upper annular groove 31 is provided on the inner side surface of the upper chamber 2, an arc block 32 is fixedly mounted on the outer side surface of the mounting block 24, the auxiliary gear 28 is meshed with the second gear set 30, and the arc block 32 is movably mounted inside the upper annular groove 31, wherein a round groove is provided on the mounting block 24, and the electric push rod 26 is rotatably mounted with the mounting block 24 through the round groove to ensure that the substrate clamped by the clamping plate 27 can rotate normally.

[0023] In this embodiment, when the annular plate 18 rotates, it will drive the mounting block 24 on the connecting plate 23 to rotate. The mounting block 24 will rotate around the drive shaft 11 through the limit of the upper annular groove 31. The electric push rod 26 on the mounting block 24 will cooperate with the two sets of second gear sets 30 on the auxiliary ring 29 through the auxiliary gear 28, as well as the cooperation between the electric push rod 26 and the bearing 25, so as to adjust the front and back sides of the substrate on the clamping plate 27, thereby ensuring that the coating quality on the front and back sides of the substrate is consistent, thereby effectively improving the coating effect of the coating equipment.

[0024] The auxiliary component includes a positioning groove 33 provided on the L-shaped frame plate 21, a rotation groove 34 provided on the inner side of the positioning groove 33, a rotation shaft 35 fixedly installed on the mounting ring 22, a torsion spring 36 fixedly connected to the mounting ring 22, a round head 37 fixedly installed on the tail end of the electron gun 9, an arc-shaped protrusion 38 fixedly installed on the inner side of the upper chamber 2, a push rod 39 slidably installed on the connecting plate 23, a compressed arc block 40 fixedly installed on one end of the push rod 39, a push plate 41 fixedly installed on the other end of the push rod 39, a positioning ring 42 fixedly installed on the push rod 39, and a Spring 43, one end of the rotating shaft 35 away from the mounting ring 22 is rotatably connected to the inside of the rotating groove 34, one end of the torsion spring 36 away from the mounting ring 22 is fixedly connected to the inside of the rotating groove 34, the torsion spring 36 is located on the outside of the rotating shaft 35, and one end of the spring 43 away from the positioning ring 42 is fixedly connected to the connecting plate 23, the spring 43 is located on the outside of the push rod 39, wherein the pressure protrusion is located on the outside of the connecting plate 23, and the push plate 41 is located on the inside of the connecting plate 23, the friction between the push plate 41 and the round head 37 is small, which effectively improves the service life of the push plate 41 and the round head 37.

[0025] In this embodiment, when the electron gun 9 rotates following the L-shaped frame plate 21, the push rod 39 on the connecting plate 23 will cooperate with the compressed arc block 40 and the arc-shaped protrusion 38, as well as the reaction force of the spring 43 on the positioning ring 42, so that the push plate 41 on the push rod 39 will repeatedly push the circular head 37 on the electron gun 9. At the same time, the electron gun 9 will change its angle around the rotating shaft 35 as the center through the action of the rotating shaft 35 on the mounting ring 22 and the torsion spring 36. By changing the angle of the electron gun 9, the electron beam emitted by the electron gun 9 can irradiate different areas of the coating raw material, thereby ensuring uniform evaporation of the coating raw material in the crucible 8.

[0026] Working principle: When in use, the chamber door is opened, and the substrate to be coated is fixed in position by the clamping plate 27, and then the coating raw material is placed in the crucible 8, and then the chamber door is closed, and the upper chamber 2 or the lower chamber 3 is placed in a coating environment by the action of the vacuum pump 4; Then, the placing plate 12 on the driving shaft 11 is driven to rotate by the driving motor 10, and the crucible 8 on the placing plate 12 will rotate. When the driving shaft 11 rotates, the driving gear 13 will be driven to rotate. By utilizing the cooperation between the driving gear 13 and the left gear 15 and the right gear 16, and the cooperation between the first gear group 20 on the annular block 19 and the left gear 15 and the right gear 16, the annular plate 18 is limited by the lower annular groove 17 and rotates in the opposite direction to the placing plate 12 with the driving shaft 11 as the center. The electron gun 9 on the annular plate 18 will move synchronously. The use of the rotation in the opposite direction not only helps to evenly dissolve the coating raw materials in the crucible 8, but also enables the contact angle between the electron gun 9 and the crucible 8 to continuously change, so that the coating raw materials are heated more evenly under heating conditions in different directions. When the electron gun 9 rotates following the L-shaped frame plate 21, the push rod 39 on the connecting plate 23 will make the push plate 41 on the push rod 39 repeatedly push the circular head 37 on the electron gun 9 through the cooperation of the compressed arc block 40 and the arc-shaped protrusion 38, and the reaction force of the spring 43 on the positioning ring 42. At the same time, the electron gun 9 will change its angle around the rotating shaft 35 as the center through the action of the rotating shaft 35 on the mounting ring 22 and the torsion spring 36. By changing the angle of the electron gun 9, the electron beam emitted by the electron gun 9 can irradiate different areas of the coating raw material, ensuring uniform evaporation of the coating raw material in the crucible 8. When the annular plate 18 rotates, it will drive the mounting block 24 on the connecting plate 23 to rotate. The mounting block 24 will be limited by the upper annular groove 31 and rotate around the drive shaft 11. The electric push rod 26 on the mounting block 24 will cooperate with the two sets of second gear sets 30 on the auxiliary ring 29 through the auxiliary gear 28, as well as the cooperation between the electric push rod 26 and the bearing 25, so as to adjust the front and back sides of the substrate on the clamping plate 27, ensuring that the coating quality on the front and back sides of the substrate is consistent, thereby effectively improving the coating effect of the coating equipment.

[0027] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0028] While the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that many changes, modifications, substitutions and variations can be made to the embodiments without departing from the principles and spirit of the invention.

Claims

1. An independent dual-chamber electron gun (9) evaporation coating device, comprising a device base plate (1), characterized in that: An upper chamber (2) and a lower chamber (3) are fixedly mounted on the bottom plate (1) of the device, a vacuum pump (4) is fixedly mounted on the side end surface of the bottom plate (1), an input end of the vacuum pump (4) is fixedly connected to a discharge pipe (5), an end of the discharge pipe (5) away from the vacuum pump (4) is fixedly connected to a double-way pipe (6), two ends of the double-way pipe (6) are respectively connected to the upper chamber (2) and the lower chamber (3), and valves (7) are provided on the pipeline of the double-way pipe (6); The upper chamber (2) and the lower chamber (3) have the same internal structure. A driving component is provided inside the upper chamber (2), and a crucible (8) and an electron gun (9) are provided on the driving component. A rotating assembly is arranged inside the upper chamber (2), and the substrate is turned over on its front and back sides by means of the rotating assembly.

2. The independent dual-chamber electron gun (9) evaporation coating device according to claim 1, characterized in that: The driving assembly comprises a driving motor (10) fixedly mounted on the inner bottom of the upper chamber (2); a driving shaft (11) fixedly mounted on the output end of the driving motor (10); a placement plate (12) fixedly mounted on one end of the driving shaft (11) away from the driving motor (10); a driving gear (13) fixedly mounted on the driving shaft (11); and two symmetrically arranged auxiliary shafts (14) rotatably mounted on the inner bottom of the upper chamber (2).

3. The independent dual-chamber electron gun (9) evaporation coating device according to claim 2, characterized in that: A left gear (15) and a right gear (16) are fixedly mounted on the two auxiliary shafts (14), respectively; a lower annular groove (17) is provided on the inner side surface of the upper chamber (2); an annular plate (18) is rotatably mounted inside the lower annular groove (17); an annular block (19) is fixedly mounted on the lower end surface of the annular plate (18); a first gear set (20) is fixedly mounted on the inner side surface of the annular block (19); a symmetrically arranged L-shaped frame plate (21) is fixedly mounted on the annular plate (18); an auxiliary component is arranged on the L-shaped frame plate (21); and a mounting ring (22) is arranged on the auxiliary component.

4. The independent dual-chamber electron gun (9) evaporation coating device according to claim 3, characterized in that: The placement plate (12) is located inside the annular plate (18); the driving gear (13) meshes with the left gear (15) and the right gear (16); the first gear set (20) meshes with the left gear (15) and the right gear (16); the crucible (8) is mounted on the placement plate (12); and the electron gun (9) is fixedly mounted inside the mounting ring (22).

5. The independent dual-chamber electron gun (9) evaporation coating device according to claim 3, characterized in that: The rotating assembly comprises a connecting plate (23) fixedly mounted on an L-shaped frame plate (21), a mounting block (24) fixedly mounted on the top end of the connecting plate (23), a bearing (25) fixedly mounted on the side end surface of the mounting block (24), an electric push rod (26) fixedly mounted on the bearing (25), and a clamping plate (27) fixedly mounted on the output shaft of the electric push rod (26).

6. The independent dual-chamber electron gun (9) evaporation coating device according to claim 5, characterized in that: An auxiliary gear (28) is fixedly mounted on the electric push rod (26); an auxiliary ring (29) is fixedly mounted on the inner top of the upper chamber (2); two sets of second gear sets (30) are fixedly mounted on the auxiliary ring (29); an upper annular groove (31) is formed on the inner side surface of the upper chamber (2); and an arc block (32) is fixedly mounted on the outer side surface of the mounting block (24).

7. The independent dual-chamber electron gun (9) evaporation coating device according to claim 6, characterized in that: The auxiliary gear (28) is meshed with the second gear set (30), and the arc block (32) is movably mounted inside the upper annular groove (31).

8. The independent dual-chamber electron gun (9) evaporation coating device according to claim 5, characterized in that: The auxiliary component comprises a positioning groove (33) formed on the L-shaped frame plate (21), a rotation groove (34) formed on the inner side of the positioning groove (33), a rotation shaft (35) fixedly mounted on the mounting ring (22), a torsion spring (36) fixedly connected to the mounting ring (22), and a round head (37) fixedly mounted on the tail end of the electron gun (9).

9. The independent dual-chamber electron gun (9) evaporation coating device according to claim 8, characterized in that: An arc-shaped protrusion (38) is fixedly mounted on the inner side surface of the upper chamber (2); a push rod (39) is slidably mounted on the connecting plate (23); a pressure arc block (40) is fixedly mounted on one end of the push rod (39); a push plate (41) is fixedly mounted on the other end of the push rod (39); a positioning ring (42) is fixedly mounted on the push rod (39); and a spring (43) is fixedly connected to the positioning ring (42).

10. The independent dual-chamber electron gun (9) evaporation coating device according to claim 9, characterized in that: One end of the rotating shaft (35) away from the mounting ring (22) is rotatably connected to the inside of the rotating groove (34); one end of the torsion spring (36) away from the mounting ring (22) is fixedly connected to the inside of the rotating groove (34); the torsion spring (36) is located outside the rotating shaft (35); one end of the spring (43) away from the positioning ring (42) is fixedly connected to the connecting plate (23); the spring (43) is located outside the push rod (39).

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