Operation method of digital zero-intervention intelligent vacuum magnetron sputtering coating machine

Abstract

The invention discloses an operation method of a digital zero-intervention intelligent vacuum magnetron sputtering coating machine. The coating machine comprises a vertical vacuum chamber, a workpiece frame, a receiving sleeve, a planetary transmission device, a computer, software and the like. And the planetary transmission device realizes the functions of automatic spacing adjustment and rotation and revolution of the receiving sleeve. The computer-aided design software simulates the placing form of the workpieces in the vacuum chamber and determines the number and spacing of the workpiece frames. During spacing adjustment, the receiving sleeve enters the adjusting section, and the shared power device drives the spacing adjustment transmission gear ring to rotate to complete spacing adjustment; the positioning gear ring and the distance adjusting transmission gear ring are meshed and switched through the adjusting and positioning assembly. The whole coating process realizes digital zero intervention, and the efficiency is greatly improved. Compared with traditional manual operation, manual calculation and setting of the workpiece position are not needed, manual adjustment of the distance between the receiving sleeves is not needed, automation and intelligentization are achieved, and the system has the remarkable advantages and progress of digitization, zero intervention, high efficiency, accuracy, reliability and the like.

Description

[0001] This application is a divisional application of the Chinese patent application filed on July 26, 2023, with application number 202310922250X, and invention name “Digital zero-intervention intelligent vacuum magnetron sputtering coating machine and its operating method”. Technical Field

[0002] The present invention belongs to the technical field of vacuum coating of products, and in particular relates to a digital zero-intervention intelligent vacuum magnetron sputtering coating machine. Background Art

[0003] Vacuum coating machine is a common industrial equipment. It uses vacuum environment and a variety of physical and chemical methods to sputter a film with a certain composition and structure onto the surface of the product to form a protective layer.

[0004] The vacuum coating machine usually consists of a vacuum coating chamber, a loading pump for extracting the indoor air to form a vacuum environment, an inert gas pipeline system, a metal target, a sputtering target and an evaporation mechanism for heating and vaporizing the metal target, multiple workpiece racks, a transmission system, a power system, and a control system. The transmission system drives the workpiece rack to rotate and revolve at the same time. In the past technology, multiple workpiece racks were fixed in position and the distance between them could not be adjusted. This made it necessary to replace different workpiece racks when coating different products in order to make the spatial arrangement of the products in the vacuum coating chamber as reasonable as possible. However, even so, the reserve of workpiece racks is limited by cost and storage conditions, and its specifications and types are also limited. On the other hand, the manpower and time cost of replacing workpiece racks is not small. Therefore, some products that are not often coated may not have very matching workpiece racks, and some small batch products may use inappropriate workpiece racks for processing even if they have matching workpiece racks because of concerns about the time and cost of replacement. These situations will affect production efficiency, energy utilization, and the quality of coating.

[0005] It is precisely because the workpiece racks are fixed and the distance between them cannot be adjusted, and the specifications and types cannot be limited, that the heavy work of placing workpieces is difficult to automate. The Chinese invention patent application with application number CN202211695902.2 filed by the applicant discloses a plastic tableware manufacturing process control system based on Internet of Things technology, in which the vacuum coating machine is the aforementioned structure.

[0006] However, in actual production, the structures of the products and the vacuum coating chamber are known. Assuming that the position of each workpiece rack can be adjusted, different products can be adapted by activating an appropriate number of workpiece racks and adjusting the distance between each workpiece rack. On this basis, the computer can be further used for pre-simulation and arrangement. The operators can visually observe the layout from the display device and know in advance whether the space in operation is always reasonable. Therefore, the types of prepared workpiece racks can be greatly reduced, which makes it easy to set up special lifting and placement devices, thereby achieving zero manual intervention in the coating work. Summary of the invention

[0007] In view of the defects of the above-mentioned prior art, a technical problem to be solved by the present invention is to provide a machine that can arrange and place products in advance through digital simulation, so that the products can obtain correct and reasonable spatial layout in the vacuum coating room, and on this basis, remote control can be carried out to achieve an intelligent vacuum magnetron sputtering coating machine with zero human intervention.

[0008] The invention object of the present invention is achieved through the following technical scheme: a digital zero-intervention intelligent vacuum magnetron sputtering coating machine, comprising: Vertical vacuum chamber for coating; Workpiece rack, which can carry workpieces into or out of the vacuum chamber when the vacuum chamber is open; The receiving sleeve is connected to the workpiece frame and the spacing is adjustable; The planetary transmission device is used to adjust the spacing between the receiving sleeves and realize the rotation and revolution of the receiving sleeves; Computer and auxiliary software, used to simulate the placement of workpieces in the vacuum chamber and determine the number and spacing of workpiece racks; The planetary transmission device comprises: a fixed base fixedly mounted at the bottom of the vacuum chamber, and a planetary carrier rotatably connected to the fixed base; the planetary carrier comprises an inner ring, an outer ring, and a connecting entity located at the bottom to fix the inner ring and the outer ring part, the unconnected area of ​​the inner ring and the outer ring is used to arrange the receiving sleeve, the interior of the inner ring is a rotating cavity, which is open upward and outward; a self-rotating transmission gear ring tightly and rotatably mounted inside the rotating cavity, the self-rotating transmission gear ring has meshing teeth on the side facing upward and outward, and after being installed in place, the two meshing teeth are respectively located at the openings facing upward and outward of the rotating cavity, wherein the upward meshing teeth are cylindrical and are higher than the opening by a section; a sliding seat that can slide tightly along the inner ring, and is tightly and rotatably sleeved on the outer peripheral surface of the sliding seat The turbine, the inner ring of the turbine is provided with helical teeth matching with the upward meshing teeth of the self-rotating transmission gear ring, and the outer ring is provided with meshing teeth matching with the worm gear teeth; a worm gear arranged vertically and meshing with the turbine, one end of which is fixedly connected to the sliding seat, the other end is a free end, and a bearing seat in the middle is provided with a mounting cavity for mounting the worm gear, a spacing adjustment transmission gear ring tightly and rotatably mounted on the outer ring, a positioning gear ring coaxially abutting against the top of the spacing adjustment transmission gear ring and having the same size and tooth shape and fixedly connected to the outer ring, a guiding and resetting component and an adjusting and positioning component arranged on the bearing seat, wherein the adjusting and positioning component realizes the meshing switching between the positioning gear ring and the spacing adjustment transmission gear ring to adjust the spacing of the receiving sleeve; and an adjusting section fixed to the inner side wall of the fixed base and protruding outward.

[0009] Preferably, the overall length of the adjustment section is equal to the length of the preset adjustable range of a single receiving sleeve, and its protruding height and size match the size and position of the inclined step of the trigger switch. The design of the adjustment section matches the parameters of the trigger switch, making the adjustment action accurate and controllable.

[0010] As a preferred embodiment, the connection parts of the inner ring, the outer ring and the connection entity are divided into three sections. The inner and outer rings are connected in sections, so that the layout area of ​​all receiving sleeves is unified, which is convenient for designing automatic adjustment and also enhances the structural strength.

[0011] As a preferred embodiment, the outer peripheral surface of the slide is a cylindrical surface with an opening upward, and the cylindrical meshing teeth of the self-rotating transmission gear ring exceed the opening. The opening of the slide is matched with the self-rotating transmission gear ring to realize the slide-driven self-rotation transmission.

[0012] As a preferred embodiment, both ends of the slide are provided with limit stops, which ensure that the slide has a reasonable range of motion and avoids malfunctions.

[0013] As a preference, the turbine can be symmetrically divided into two halves, which are fastened together by bolts during installation. The turbine can be split for easy maintenance. Preferably, the guide and reset assembly includes two vertically arranged guide posts and a reset spring installed at the lower section of the guide posts. The guide posts and the reset spring are provided to make the adjustment and positioning actions more stable and controllable.

[0014] Preferably, the adjustment and positioning assembly is a rectangular frame structure as a whole, including an upper frame having guide holes for sliding with two guide pillars, two side frames for connection and guidance, a trigger switch member having an inclined step as a lower frame and close to the inner side wall of the fixed base, and a tooth segment fixedly mounted on the bottom surface of the upper frame, the teeth of the tooth segment being the same as the meshing teeth of the spacing adjustment transmission gear ring and the positioning gear ring. The adjustment and positioning assembly of the rectangular frame structure has precise movement and reliable positioning.

[0015] As a preferred embodiment, a protective shell and a pressure cover are also included to cover the transmission components. The protective shell and the pressure cover are provided to ensure the safe operation of the transmission components.

[0016] As a preferred embodiment, the meshing tooth height of the spacing adjustment transmission gear ring is consistent with the meshing tooth height of the outer side of the self-rotation transmission gear ring. The meshing height of the gear rings is consistent, which avoids gaps and improves transmission accuracy.

[0017] As a preference, it also includes a common power device and a stopper assembly; the common power device includes a power motor with a reduction gear box, a mounting platform for fixing the power motor, a screw assembly for driving the mounting platform to slide, a transmission motor for providing power to the screw assembly, and a supporting connecting plate for providing support for the entire device and for fixing the planetary carrier, and a common meshing gear that is transmission-connected to the power shaft of the power motor; The stop assembly includes a stopper pivoted on the planetary frame through a torsion spring, the middle position of the stopper is used as a pivot point, the pivot position is close to the spacing adjustment transmission gear ring, one end of the stopper points to the spacing adjustment transmission gear ring, and the end has a snap-in tooth, and the other end of the stopper is a trigger section facing the power shaft, and when the receiving sleeve is not adjusted, the torsion of the torsion spring causes the snap-in tooth to fall into the spacing adjustment transmission gear ring. A common power device is provided, which can facilitate linkage and drive the adjustment of multiple receiving sleeves. The stop assembly can fix the spacing adjustment transmission gear ring.

[0018] In view of the defects of the prior art, a technical problem to be solved by the present invention is to provide an operating method of a digital zero-intervention intelligent vacuum magnetron sputtering coating machine, comprising the following steps: a. According to the product size, use computer-aided design software to simulate the placement of the workpiece in the vacuum coating chamber and determine the number and spacing of the workpiece racks; b. Adjust the spacing between the receiving sleeves by adjusting the transmission ring gear in the planetary transmission device to adapt to workpiece racks and workpieces of different sizes; c. Use automated mechanical devices to quickly lift the workpiece rack onto the receiving sleeve in the vacuum coating chamber; d. After the workpiece rack enters the vacuum coating chamber, the magnetron sputtering coating is started to carry out the automatic coating operation of the workpiece; e. After the vacuum coating operation is completed, open the door or cover of the vacuum coating chamber and use an automated mechanical device to remove the workpiece rack from the receiving sleeve; f. Ensure that the equipment stops running, start the driving source and make the receiving sleeve that needs to be adjusted enter the adjustment section; g. Start the power motor in the common power device to drive the spacing adjustment transmission ring to rotate and complete the spacing adjustment; h. After the adjustment is completed, turn off the power motor, drive the receiving sleeve to leave the adjustment section, and lock the spacing; i. The self-rotating transmission ring gear, turbine and worm gear are used to make the receiving sleeve and workpiece frame produce self-rotation and revolution motion; j. Set up protective shells, pressure covers and other devices to cover the transmission parts to prevent collision.

[0019] Preferably, the receiving sleeve and the components driving the receiving sleeve to move are arranged as many as possible.

[0020] In summary, the present invention has the following advantages compared with the prior art: In general, the present invention uses computer-aided design software to accurately calculate the placement of workpieces, combined with the automatic spacing adjustment function of the planetary transmission device, to achieve a fully digital, zero-intervention automated intelligent coating process, greatly improving the efficiency of the coating operation.

[0021] The self-rotating transmission mechanism in the planetary transmission device enables the receiving sleeve to drive the workpiece frame to rotate and revolve, ensuring uniform coating; the transmission methods such as slide, turbine, worm, etc. are accurate and reliable; the rectangular frame-type adjustment and positioning components have accurate movement and reliable positioning; the shared power device can quickly adjust the spacing of multiple receiving sleeves. The reasonable and sophisticated design of these transmission mechanisms and actuators enables the entire equipment to achieve automated, intelligent and efficient coating operations.

[0022] Compared with traditional manual operation, the present invention does not require manual calculation and setting of the workpiece placement position, nor does it require manual adjustment of the receiving sleeve spacing. The entire coating process achieves zero intervention, greatly improving production efficiency and reducing labor intensity.

[0023] At the same time, the present invention is also provided with a complete protective device, such as a protective shell, a pressure cover, etc., to ensure the safety of the transmission parts; it is also equipped with a reset spring, a limit stop, etc., to improve the accuracy of the action and the stability and reliability of the system.

[0024] In summary, the present invention realizes an automated, intelligent, and efficient vacuum magnetron sputtering coating process, and has significant advantages and improvements such as digitization, zero intervention, high efficiency, precision and reliability, etc., achieves the purpose of automated production, and enables the vacuum coating technology to develop to a higher level, which has important technological progress significance and economic benefits. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of the present invention (the vertical vacuum chamber is partially cut away and the workpiece holder is partially hidden); Figure 2 It is a schematic diagram of the structure of a planetary transmission; Figure 3 It is a structural diagram of the planetary transmission device from another angle; Figure 4 It is an exploded view of the components of a planetary transmission; Figure 5 It is an exploded view of the components of the planetary transmission device hiding the fixed base, protective shell, and gland; Figure 6 It is a schematic diagram of the structure of the planetary transmission device hiding the fixed base, protective shell and gland from another angle; Figure 7 It is a schematic diagram of the structure of the planetary transmission device hiding the fixed base, protective shell and gland from another angle; Figure 8 It is an exploded view of some components of the planetary transmission; Fig. 9 It is a structural schematic diagram of the working state of the stop assembly; Fig.10 It is a schematic diagram of the structure after the stop assembly is connected to the common power device.

[0026] Markings in the figure: Vertical vacuum chamber 01, workpiece rack 02, rotary axis 03, receiving sleeve 04, 5. Computer 10, planetary transmission device 20, fixed base 21, adjustment section 211, planet carrier 22, inner ring 23, outer ring 24, connecting entity 25, rotating cavity 26, self-rotating transmission ring gear 27, slide seat 28, turbine 29, worm 30, installation cavity 31, bearing seat 32, spacing adjustment transmission ring gear 33, positioning ring gear 34, guiding and resetting assembly 35, guide column 351, adjustment and positioning assembly 36, upper frame 361, side frame 362, trigger switching member 363, tooth segment 364, common power device 40, power motor 41, installation platform 42, screw assembly 43, transmission motor 44, support connecting plate 45, power shaft 46, common meshing gear 47, stop assembly 50, torsion spring 51, stop member 52, engaging tooth 53, trigger segment 54, protective shell 60, closing cylinder 61, pressure cover 70, slide plate 71. DETAILED DESCRIPTION

[0027] The present invention will be further described below with reference to the embodiments shown in the accompanying drawings: Example 1 The present disclosure provides a digital zero-intervention intelligent vacuum magnetron sputtering coating machine, referring to all the accompanying drawings, including: 1. Vertical vacuum chamber 01, the core space for coating; 2. The workpiece rack 02 can be moved out as a whole when the door or cover of the vacuum chamber is opened. The workpiece to be coated is hung or placed on the workpiece rack through an automatic mechanical device, and then quickly hoisted into the vacuum chamber; Figure 1 The workpiece holder 02 shown in FIG. 1 hides the outward support portion for placing the workpiece, so as to highlight the rotary axis 03 of the workpiece holder 02 ; 3. The receiving sleeve 04 is connected to the rotary shaft 03 of the workpiece rack 02, and the distance between them can be adjusted to accommodate workpiece racks 02 of different sizes and workpieces of different sizes; 4. Planetary transmission device 20, used to adjust the spacing between the receiving sleeves 04 and simultaneously realize the rotation and revolution of the receiving sleeves 04; 5. Computer 10 and auxiliary software, using a PLC system, are used to simulate the placement of workpieces in the vacuum coating chamber, and determine the reasonable number and spacing of workpiece racks based on the simulation results; When using this coating machine, the placement of the workpiece is simulated in advance with the help of computers and auxiliary software according to the size characteristics of the product. According to the simulation results, the reasonable number and spacing of the workpiece racks are determined. Then the spacing is adjusted through the planetary transmission device, and a special lifting and external placement device is used to achieve zero manual intervention operation.

[0028] The planetary transmission device 20 comprises: ① Fixed base 21: It is fixedly installed at the bottom of the vacuum chamber; ② Planet carrier 22: It is a rotating body as a whole and is rotatably connected to the fixed base 21. The planet carrier 22 includes an inner ring 23, an outer ring 24 and a connecting entity 25 located at the bottom to fix the inner ring and outer ring parts. The area where the inner ring and the outer ring are not connected is used to arrange the receiving sleeve 04. The inside of the inner ring 23 is a rotating cavity 26, which is open upward and outward. Preferably, the connection parts of the inner ring, the outer ring and the connecting entity 25 are divided into three sections, so that the arrangement area of ​​all the receiving sleeves 04 is unified, which is convenient for designing automatic adjustment. The relative movement between the planet carrier 22 and the fixed base 21 is achieved by fixing the ring gear on the planet carrier 22 and arranging the driving source 05 on the fixed base 21 to realize the revolution of the receiving sleeve 04; ③ The self-rotating transmission gear ring 27 is tightly and rotatably mounted inside the rotating cavity 26. It has meshing teeth on the upward and outward sides. After being installed in place, the two meshing teeth are respectively located at the upward and outward openings of the rotating cavity 26. The upward meshing teeth are cylindrical and higher than the opening by a certain length, and the ends are chamfered. ④ Sliding seat 28: It can slide closely along the inner ring 23. The outer peripheral surface of the sliding seat 28 is a cylindrical surface with an opening 281 upward. The cylindrical meshing teeth of the self-rotating transmission gear ring 27 exceed the opening 281. Preferably, both ends of the sliding seat 28 are provided with limit stops; ⑤ Turbine 29: It is tightly and rotatably sleeved on the outer peripheral surface of the slide seat 28. The inner ring of the turbine 29 is provided with helical teeth that match the upward meshing teeth of the self-rotating transmission gear ring 27, and the outer ring is provided with meshing teeth that match the worm teeth. Preferably, the turbine 29 can be symmetrically divided into two halves, which are fastened into one by bolts during installation; ⑥ Worm 30: meshes with the turbine 29 and is vertically arranged. The upward end of the worm 30 is coaxially fixedly connected to the receiving sleeve 04; ⑦ Bearing seat 32: one end is fixedly connected to the slide seat 28, the other end is a free end, and a mounting cavity 31 is provided in the middle to mount the worm 30. When the self-rotating transmission gear ring 27 is driven to rotate, the upward meshing teeth of the self-rotating transmission gear ring 27 drive the turbine 29 to rotate, the turbine 29 drives the worm 30 to rotate, and the worm 30 drives the receiving sleeve 04 to rotate; ⑧ Spacing adjustment transmission gear ring 33: tightly and rotatably mounted on the outer ring 24. Preferably, the meshing tooth height of the spacing adjustment transmission gear ring 33 is consistent with the meshing tooth height of the outer side of the self-rotation transmission gear ring 27. The purpose of such design is to construct a slidable power device between the two, and the power device is meshed with one of the gear rings through sliding to provide power; ⑨ A positioning gear ring 34 coaxially abutting against the spacing adjustment transmission gear ring 33 and having the same size and tooth shape and fixedly connected to the outer ring 24, the positioning gear ring 34 is used to lock the bearing seat 32; ⑩ The guide and reset assembly 35 and the adjustment and positioning assembly 36 are arranged on the bearing seat 32, and the guide and reset assembly 35 is used to help the adjustment and positioning assembly 36 to achieve the meshing switching of sliding up and down between the positioning gear ring 34 and the spacing adjustment transmission gear ring 33; The guide and reset assembly 35 includes two vertically arranged guide posts 351 and a reset spring installed at the lower section of the guide posts 351; The adjustment and positioning assembly 36 is a rectangular frame structure as a whole, including an upper frame 361 with guide holes that slide and cooperate with the two guide pillars 351, two side frames 362 that play a connecting and guiding role, a trigger switch 363 that serves as a lower frame and has an inclined step on one side of the inner wall of the fixed base 21, and a tooth segment 364 fixedly installed on the bottom surface of the upper frame 361. The teeth of the tooth segment 364 are the same as the meshing teeth of the spacing adjustment transmission gear ring 33 and the positioning gear ring 34. Under normal conditions, the reset spring pushes the tooth segment 364 upward, and the tooth segment 364 meshes with the positioning gear ring 34. ⑪ An adjustment section 211 fixed to the inner wall of the fixed base 21 and protruding outward, the overall length of the adjustment section 211 is equal to the length of the preset adjustable range of the single receiving sleeve 04, and its protruding height and size match the size and position of the inclined step of the trigger switching member 363; after the step surface of the inclined step of the trigger switching member 363 is subjected to the resistance pressure, it will overcome the reset spring, so that the adjustment and positioning assembly 36 moves downward as a whole, and the tooth segment 364 will disengage from the positioning gear ring 34 and enter into the spacing adjustment transmission gear ring 33 to complete the meshing.

[0029] During normal operation, the driving source 05 drives the planet carrier 22 to rotate so that the receiving sleeve 04 revolves. When the trigger switch 363 passes through the adjustment section 211, the adjustment and positioning assembly 36 is triggered by the chamfer of the switching member 363 and the adjustment section 211, and the teeth of the tooth segment 364 switch back and forth between the positioning gear ring 34 and the spacing adjustment transmission gear ring 33. Since they rotate synchronously, and since the spacing adjustment transmission gear ring 33 is not in a free state, but has a gear meshing transmission connection power source as a lock, the receiving sleeve 04 will not move in position, that is, this design will not affect normal operation. When it is necessary to adjust the position of the receiving sleeve 04, first ensure that the machine stops working, start the driving source 05 to make the adjustment and positioning assembly 36 corresponding to the single receiving sleeve 04 whose position needs to be adjusted enter the adjustment section 211, and shut down the driving source 05. In this way, the tooth segment 364 moves down and also enters the meshing state with the spacing adjustment transmission ring gear 33. At this time, by setting a power source to give power to the spacing adjustment transmission ring gear 33, the tooth segment 364 will rotate and displace accordingly, and at the same time drive the adjustment and positioning assembly 36 to rotate and displace, and the corresponding slide 28, bearing seat 32, turbine and worm, and receiving sleeve 04 rotate and displace together to achieve the purpose of adjusting the spacing. When the receiving sleeve 04 is adjusted to the required position, shut down the power source to lock the spacing adjustment transmission ring gear 33, start the driving source 05 again to make it leave the adjustment section 211, and then adjust all the receiving sleeves 04 one by one in the above manner.

[0030] It is mentioned above that "preferably, the meshing tooth height of the spacing adjustment transmission gear ring 33 is consistent with the meshing tooth height of the outer side of the self-rotation transmission gear ring 27, so as to construct a slidable power device between the two, and the power device is meshed with one of the gear rings by sliding to provide power"; for the specific design of this preferred solution, refer to Figure 9-10 , a common power device 40 is designed. In addition, a stop assembly 50 is added to the common power device 40 to further ensure that the spacing adjustment transmission gear ring 33 has the locking performance when it is not in the adjustment state.

[0031] The common power device 40 includes a power motor 41 with a reduction gear box, a mounting platform 42 for fixing the power motor 41, a screw assembly 43 for driving the mounting platform 42 to slide, a transmission motor 44 for providing power to the screw assembly 43, and a supporting connecting plate 45 for providing support for the entire device and for fixing the planet carrier 22, and a common meshing gear 47 that is transmission-connected to a power shaft 46 of the power motor 41; The stop assembly 50 includes a stopper 52 pivotally connected to the planet carrier 22 through a torsion spring 51, the middle position of the stopper 52 is used as a pivot point, the pivot position is close to the spacing adjustment transmission gear ring 33, one end of the stopper 52 points to the spacing adjustment transmission gear ring 33, and the end has a snap-fit ​​tooth 53, and the other end of the stopper 52 is a trigger section 54 facing the power shaft 46. When the receiving sleeve 04 is not adjusted, the torsion of the torsion spring 51 causes the snap-fit ​​tooth 53 to fall into the spacing adjustment transmission gear ring 33 to limit its movement. When the receiving sleeve 04 is to be adjusted, The meshing gear 47 needs to be moved to mesh with the spacing adjustment transmission gear ring 33, the transmission motor 44 is started, and the common meshing gear 47 moves under the movement of the screw assembly 43. During the movement, the power shaft 46 will first contact the trigger section 54, and the trigger section 54 rotates around the pivot point under the contact, and the engaging tooth 53 will disengage from the spacing adjustment transmission gear ring 33, until the common meshing gear 47 and the spacing adjustment transmission gear ring 33 are completely engaged, then the power motor 41 can be started to drive the spacing adjustment transmission gear ring 33 to rotate to adjust the position of the receiving sleeve 04.

[0032] Preferably, the receiving sleeve 04 and the components driving the receiving sleeve to move are arranged as much as possible, so that the number of workpiece racks can be selectively increased or decreased as needed.

[0033] As a preference, it is necessary to cover and protect the exposed transmission parts, see Figure 4, a protective shell 60 is provided to cover transmission parts such as the drive spacing adjustment transmission gear ring 33 and the turbine 29. It should be pointed out that the upper opening of the protective shell 60 needs to be open, that is, at the installation position and adjustment range of the receiving sleeve 04, a space needs to be reserved for its movement. In view of this, a gland 70 is further designed at the open part of the protective shell 60, and a slide plate 71 is provided in the gland 70. A hole matching the diameter of the receiving sleeve 04 is provided in the slide plate 71. The receiving sleeve 04 is sleeved in this hole. When the receiving sleeve 04 moves, the slide plate 71 is driven to move at the same time. In order to enhance the sealing of the connection, a closing cylinder 61 is provided on the bottom surface of the protective shell 60. The telescopic end of the closing cylinder 61 passes through the protective shell 60 and is fixedly connected to the gland 70. When the receiving sleeve 04 is not adjusted, the telescopic end of the closing cylinder 61 is in a retracted state. At this time, the gland 70 is pressed tightly on the top of the protective shell 60 to compress the gap reserved for the action, and rubber strips are attached around these gaps to enhance the airtightness during compression.

[0034] Working method of the coating machine: 1. Workpiece rack placement (1) Based on the product size, computer-aided design (CAD) software is used to simulate the placement of the workpiece in the vacuum coating chamber 01, and the reasonable number and spacing of the workpiece racks 02 are determined.

[0035] (2) By adjusting the spacing between the receiving sleeves 04 through the spacing adjustment transmission ring gear 33 in the planetary transmission device 20, the spacing between the receiving sleeves 04 can be adjusted to accommodate workpiece racks 02 and workpieces of different sizes; (3) Using an automated mechanical device, the workpiece rack 02 is quickly lifted and placed on the receiving sleeve 04 in the vacuum coating chamber 01.

[0036] 2. Coating operation After the workpiece rack 02 enters the vacuum coating chamber 01, the magnetron sputtering coating is started to perform the automated coating operation of the workpiece.

[0037] 3. Remove the workpiece rack After the vacuum coating operation is completed, the door or cover of the vacuum coating chamber 01 is opened, and the workpiece rack 02 is taken out from the receiving sleeve 04 by an automated mechanical device.

[0038] 4. Spacing adjustment (1) Ensure that the equipment stops running, start the driving source 05 to make the receiving sleeve 04 that needs to be adjusted enter the adjustment section 211; (2) Starting the power motor 41 in the common power device 40 to drive the spacing adjustment transmission gear ring 33 to rotate, thereby completing the spacing adjustment; (3) After the adjustment is completed, the power motor 41 is turned off to drive the receiving sleeve 04 to leave the adjustment section 211 and lock the spacing.

[0039] 5. Motion transmission The self-rotating transmission ring gear 27, the turbine 29 and the worm 30 form a transmission, which makes the receiving sleeve 04 and the workpiece frame 02 produce self-rotation and revolution motion.

[0040] 6. Protective devices Devices such as a protective shell 60 and a pressure cover 70 are provided to cover the transmission components to prevent collision.

[0041] The specific embodiments described herein are merely examples of the spirit of the present invention. Those skilled in the art may make various modifications or additions to the specific embodiments described or replace them in similar ways, but they will not deviate from the spirit of the present invention or exceed the scope defined by the appended claims.

Claims

1. An operating method of a digital zero-intervention intelligent vacuum magnetron sputtering coating machine, Features , coating machine includes: A vertical vacuum chamber (01) for coating; A workpiece rack (02) can carry the workpiece into or out of the vacuum chamber when the vacuum chamber is opened; The receiving sleeve (04) is connected to the workpiece frame (02) and the spacing is adjustable; A planetary transmission device (20) for adjusting the spacing between the receiving sleeves (04) and realizing the rotation and revolution of the receiving sleeves; Computer and auxiliary software, used to simulate the placement of workpieces in the vacuum chamber and determine the number and spacing of workpiece racks; The planetary transmission device (20) comprises: a fixed base (21) fixedly mounted at the bottom of the vacuum chamber, and a planet carrier (22) rotatably connected to the fixed base (21); the planet carrier (22) comprises an inner ring (23), an outer ring (24), and a connecting entity (25) located below and fixedly connecting the inner ring and the outer ring; the area where the inner ring and the outer ring are not connected is used to arrange the receiving sleeve 04; the interior of the inner ring (23) is a rotating cavity (26) that is open upward and outward; the planet carrier (22) is tightly ... is tightly rotatably connected to the fixed base (21); the planet carrier (22) is tightly rotatably connected to the fixed base (21); the planet carrier (22) is tightly rotatably connected to the fixed base (21); the planet carrier (22) is tightly rotatably connected to the fixed base (21); the planet carrier (22) is tightly rotatably connected to the fixed base (21); the planet carrier (22) is tightly rotatably connected to the fixed base (21); the planet carrier (22) is tightly rotatably connected to the fixed base (21); the planet carrier (22) is tightly rotatably connected to the fixed base (21); the planet carrier (22) is tightly rotatably connected to the fixed base (21); the planet carrier (22) is tightly rotatably connected to the fixed base (21); the planet carrier (22) is tightly A self-rotating transmission gear ring (27) is installed inside a rotating cavity (26), wherein the self-rotating transmission gear ring (27) has meshing teeth on the side facing upward and outward, and after being installed in place, the two meshing teeth are respectively located at the openings facing upward and outward of the rotating cavity (26), wherein the meshing teeth facing upward are cylindrical and are higher than the opening by a certain distance; a sliding seat (28) that can slide tightly along the inner ring (23), a turbine (29) that is tightly and rotatably sleeved on the outer peripheral surface of the sliding seat (28), and a turbine (29) that is The inner ring of the self-rotating transmission gear ring (27) is provided with helical teeth matching with the upward meshing teeth of the self-rotating transmission gear ring (9), and the outer ring is provided with meshing teeth matching with the worm gear teeth; a worm (30) vertically arranged and meshing with the turbine (29), one end of which is fixedly connected to the slide seat (28), the other end is a free end, and a mounting cavity (31) is provided in the middle to mount a bearing seat (32) of the worm (30), a spacing adjustment transmission gear ring (33) tightly and rotatably mounted on the outer ring (24), and a coaxially abutting against the spacing adjustment transmission gear ring ( 33) and having the same size and tooth shape and fixedly connected to the outer ring (24), a guiding and resetting assembly (35) and an adjusting and positioning assembly (36) provided on the bearing seat (32), wherein the adjusting and positioning assembly (36) realizes meshing switching between the positioning gear ring (34) and the spacing adjustment transmission gear ring (33) to adjust the spacing of the receiving sleeve (04); and an adjusting section (211) fixed to the inner side wall of the fixed base (21) and protruding outward; Working method The following steps are involved: a. According to the product size, the placement of the workpiece in the vacuum coating chamber (01) is simulated by computer-aided design software, and the number and spacing of the workpiece racks (02) are determined; b. By adjusting the spacing between the receiving sleeves (04) through the spacing adjustment drive ring gear (33) in the planetary transmission device (20), the spacing between the receiving sleeves (04) is adjusted to accommodate workpiece racks (02) and workpieces of different sizes; c. Using an automated mechanical device, the workpiece rack (02) is quickly hoisted onto a receiving sleeve (04) in the vacuum coating chamber (01); d. After the workpiece rack (02) enters the vacuum coating chamber (01), the magnetron sputtering coating is started to perform an automated coating operation on the workpiece; e. After the vacuum coating operation is completed, the door or cover of the vacuum coating chamber (01) is opened, and the workpiece rack (02) is removed from the receiving sleeve (04) by an automated mechanical device; f. Ensure that the equipment stops running, start the driving source (05) so that the receiving sleeve (04) that needs to be adjusted enters the adjustment section (211); g. Starting the power motor (41) in the common power device (40) to drive the spacing adjustment drive ring gear (33) to rotate and complete the spacing adjustment; h. After the adjustment is completed, the power motor (41) is turned off, and the receiving sleeve (04) is driven to leave the adjustment section (211) to lock the spacing; i. The self-rotating transmission ring gear (27), the turbine (29), and the worm (30) form a transmission, so that the receiving sleeve (04) and the workpiece frame (02) produce self-rotation and revolution motion; j. A protective shell (60) and a pressure cover (70) are provided to cover the transmission components to prevent collision.

2. The operation method according to claim 1, Features , the receiving sleeve (04) and the component arrangement that drives the receiving sleeve to move.

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