Semiconductor ultra-pure fluid integrated control module

Abstract

The invention relates to the technical field of valves, in particular to a semiconductor ultra-pure fluid integrated control module which comprises a valve body, a valve sleeve, a base, a valve, a supporting assembly, a supporting plate, an adjusting assembly, a lantern ring, a bolt and a spring, the valve sleeve and the base are arranged on the upper side and the lower side of the valve body in an array mode respectively, and the valve is connected to the lower side of the valve sleeve; the supporting assembly is connected to an inner cavity of the base, the supporting plate is connected to the upper side of the supporting assembly, the adjusting assembly is connected into the supporting assembly, the lantern ring is connected to the middle of the supporting assembly, the bolt penetrates through the valve body and the base to connect the valve sleeve with the supporting assembly, and the spring is connected to the upper side of the supporting assembly. By forming support at the bottom of the valve, the distance between the valve and the valve body is kept, the support on the valve is relieved when the bolts are installed in place, and then the valve is pushed by the spring to vertically move downwards for complete assembly, the effects of improving the valve installation efficiency and ensuring the valve installation quality are achieved.

Description

Technical Field

[0001] The present invention relates to the field of valve technology, and in particular to a semiconductor ultra-high purity fluid integrated control module. Background Art

[0002] Semiconductor chips, as the core of information technology, are widely used in smart phones, computers and other fields. In the manufacturing process of semiconductor chips, the precise control and transmission of high-purity chemicals, special gases and process fluids are key factors in ensuring the yield and performance of chip manufacturing. The fluid integrated control module is a fluid control equipment commonly used in semiconductor chip production. It can adapt to the corrosion resistance, high temperature resistance and sealing performance required in the transmission process of high-purity chemicals, special gases and process fluids.

[0003] The fluid integrated control module is an integrated valve that integrates multiple functional valves. It is composed of a valve body and multiple valves. The valve body is provided with a main channel and multiple branch channels. The valve is installed on the branch channel to control the connection between the branch channel and the main channel. In order to meet the different requirements of high-purity chemicals, special gases and process fluid transmission processes during production, the valve and the valve body are processed separately and spliced ​​according to the required functions. During the splicing process of the fluid integrated control module, a valve needs to be fixed by multiple bolts. However, due to the close fit between the valve and the valve body, when the valve is fixed to the valve body by bolts, the bolts on one valve need to be tightened diagonally, and the valve is installed in a gradually progressive manner, which leads to low valve installation efficiency. If a single bolt is tightened first, it is easy to cause the valve to tilt in the valve body, which in turn causes damage to the valve and affects the sealing of the valve.

[0004] In response to the above problems, some solutions have been proposed in the prior art, such as first clamping the valve into place on the valve body by pressure, and then fixing the valve and the valve body to ensure the stability of the valve. However, in order to ensure good sealing between the valve and the valve body, some manufacturers will set the connection between the valve and the valve body to an interference fit, so that the matching surfaces are tightly fitted through the interference fit, thereby ensuring the sealing effect. However, when the force is applied for splicing, after the pressure is released, the reset deformation of the material on the interference surface of the valve will cause the valve to reset and disengage from the installation vertex of the valve body, which will cause the valve to tilt during the tightening of a single bolt, affecting the installation effect of the valve.

[0005] To this end, a semiconductor ultra-high purity fluid integrated control module is proposed. Summary of the invention

[0006] The purpose of the present invention is to provide a semiconductor ultra-high purity fluid integrated control module, which solves the problem that when the valve is installed on the valve body, the interference fit between the valve and the valve body causes the bolts to need to be tightened diagonally step by step, causing inconvenience in valve installation. By forming a support at the bottom of the valve and keeping a certain distance between the valve and the valve body, the support for the valve is released when the bolts are all installed in place, and then the valve is pushed vertically downward by a spring to make the valve and the valve body fit tightly together, the valve installation efficiency is improved and the valve installation quality is ensured.

[0007] To achieve the above object, the present invention provides the following technical solutions:

[0008] A semiconductor ultra-high purity fluid integrated control module comprises a valve body, a valve sleeve, a base, a valve, a support assembly, a support plate, an adjusting assembly, a collar, a bolt and a spring, wherein the valve sleeve and the base are respectively arranged in an array on the upper and lower sides of the valve body, the valve is connected to the lower side of the valve sleeve, the support assembly is connected to the inner cavity of the base, the support plate is connected to the upper side of the support assembly, the adjusting assembly is connected in the support assembly, the collar is connected to the middle part of the support assembly, the bolt passes through the valve body and the base to connect the valve sleeve with the support assembly, the spring is connected to the upper side of the support assembly, the support plate passes through the base and is slidably connected in the valve body, the support assembly pushes the support plate to extend out of the top surface of the valve body, the support plate limits the valve sleeve when the valve sleeve is installed, the adjusting assembly drives the collar to move down a specified distance when a single bolt is installed, and when the collar moves down a cumulative distance reaching a specified value, the support assembly drives the support plate to move down to release the limit on the valve sleeve, and the spring pushes the valve sleeve to move vertically downward to fit the surface of the valve body through the bolt.

[0009] Through the above scheme, the support plate limits the valve sleeve so that a certain gap is maintained between the valve and the valve body. After installation, the spring will apply a vertical downward force to the valve sleeve through the support assembly, reducing the need for diagonal tightening in the process of fixing the bolts, thereby improving the installation efficiency of the bolts. At the same time, the vertical downward movement of the valve causes the valve circumference to be evenly stressed during the installation process, thereby ensuring the sealing effect of the valve.

[0010] Preferably, the interior of the valve body is provided with a main channel, a guide channel, a valve cavity and a branch channel, the main channel is located in the middle of the valve body, the guide channel array is arranged on both sides of the main channel, the valve cavity is located at the end of the guide channel away from the main channel, the branch channel is located on the lower side of the valve cavity, the branch channel is "L" shaped, and the outer arc side of the bend of the branch channel is chamfered with a circular arc, and the valve is arranged in the valve cavity.

[0011] Through the above solution, the outer arc side of the bend of the branch channel is chamfered to make the branch channel smooth without dead angles, ensuring that the fluid can stably pass through the valve body.

[0012] Preferably, the longitudinal cross-section of the valve cavity is step-shaped, and an annular groove is provided on the outer edge of the step surface of the valve cavity.

[0013] Through the above solution, the valve cavity is stepped, and the valve cavity is divided into an outer sealing part and an inner sealing part.

[0014] Preferably, the valve comprises an inner sealing block, a connecting flap, a connecting block and an outer sealing block, the inner sealing block is connected to the lower end of the valve sleeve, the connecting flap is connected to the outer side of the top of the inner sealing block, the connecting block is connected to the end of the connecting flap away from the inner sealing block, the outer sealing block is connected to the lower end of the connecting block, the outer diameter of the lower end face of the inner sealing block is larger than the diameter of the branch channel, the outer sealing block is in a circular ring shape, the ring width of the outer sealing block is larger than the ring width of the annular groove, and the outer diameter of the outer sealing block is the same as the outer diameter of the annular groove.

[0015] Through the above scheme, the ring width of the outer sealing block is larger than the ring width of the annular groove, so that the outer sealing block and the annular groove have an interference fit, which effectively reduces the use of sealing rings, thereby achieving the goal of reducing the use of required components while ensuring the reliability of the valve. The outer diameter value of the lower end face of the inner sealing block is larger than the diameter value of the bypass channel, and the bypass channel can be effectively sealed by pushing the inner sealing block downward.

[0016] Preferably, the support assembly includes a bottom plate, an elastic membrane, a top plate, a fixed plate, a connecting plate, a lower baffle, an elastic membrane, an upper baffle and a flow member, the bottom plate is connected to the bottom of the inner cavity of the base, the elastic membrane is connected to the outer edge of the top of the bottom plate, the top plate is connected to the upper side of the elastic membrane, the fixed plate is connected to the four corners of the top plate, and the fixed plate is threadedly connected to the bolts, the connecting plate is connected to the middle part of the top plate, the lower baffle is connected to the top of the connecting plate, the elastic membrane is connected to the outer edge of the top of the lower baffle, the upper baffle is connected to the top of the elastic membrane, and the flow member is connected to the middle part of the lower baffle, thereby supporting the support plate.

[0017] Preferably, the flow component includes an upper sealing plate, a lower sealing plate and guide holes, the upper sealing plate is connected to the lower side of the lower baffle plate, the lower sealing plate is connected to the upper side of the bottom plate, the guide hole array is opened on the surface of the lower sealing plate, and initially the lower end face of the sleeve is located at the lower side of the guide holes.

[0018] Through the above solution, the lower end surface of the collar is located at the lower side of the guide hole, and then the collar can block the guide hole to ensure the supporting effect of the top plate.

[0019] Preferably, a supporting cavity is formed between the bottom plate, elastic membrane, top plate, connecting plate, lower baffle plate, upper sealing plate, lower sealing plate and the sleeve ring; a fixed cavity is formed between the upper baffle plate, elastic membrane, lower baffle plate, upper sealing plate, sleeve ring, lower sealing plate and bottom plate, and the opened volume value of the supporting cavity is greater than the opened volume value of the fixed cavity.

[0020] Through the above solution, the volume value of the support cavity is larger than the volume value of the fixed cavity, so when the fixed cavity is subjected to high-pressure gas, the internal pressure is greater, thereby effectively improving the fixing effect of the lower baffle on the fixed plate.

[0021] Preferably, a sleeve plate is connected to the outer edge of the sleeve ring, and air holes are opened on the surface of the sleeve ring. When the air holes move down to a specified position, the air holes are connected with the guide holes.

[0022] Through the above solution, after the ring moves multiple times, the air hole is connected with the guide hole, so that the gas in the supporting cavity flows into the fixed cavity.

[0023] Preferably, the adjustment assembly includes a sealing membrane, a pressure plate and one-way teeth, the sealing membrane is connected to the surface of the top plate, and the sealing membrane is located directly below the bolt, the pressure plate is "L" shaped, the long side of the pressure plate is connected to the lower side of the sealing membrane, the one-way tooth array is connected to the short side of the pressure plate, and the one-way teeth face the ring.

[0024] Through the above solution, when the bolt moves downward, it will push the pressure plate downward, thereby driving the one-way tooth to move downward.

[0025] Preferably, the one-way teeth are arc-shaped, and come into contact with the sleeve plate when the one-way teeth move downward, and the bottom surface of the bolt is lower than the bottom surface of the fixing plate when the bolt is in place.

[0026] Through the above scheme, the one-way tooth contacts the sleeve plate when it moves downward, and then the movement of the one-way tooth can drive the sleeve plate to move. The sleeve plate is arc-shaped. When the sleeve plate moves, the sleeve plate contacts the arc surface of the one-way tooth, and the compressed one-way tooth can maintain its position by deformation.

[0027] Compared with the prior art, the present invention has the following beneficial effects:

[0028] 1. The present invention solves the problem that when the valve is installed on the valve body, the interference fit between the valve and the valve body causes the bolts to be tightened diagonally step by step, which makes the valve installation inconvenient. The support assembly pushes the support plate to form a support on the bottom surface of the valve sleeve, and then after a single bolt is tightened, a gap is maintained between the outer sealing block and the annular groove, which makes it easier to tighten and fix the bolts one by one, effectively improving the tightening efficiency of the bolts and achieving the purpose of improving the fixing efficiency of the valve.

[0029] 2. By setting the adjustment component, when a single bolt is fixed, the bolt will push the pressure plate downward, and the pressure plate drives the sleeve plate downward through the one-way teeth. When multiple bolts are installed in place, the sleeve plate moves down to the position where the air hole is connected to the guide hole, and the gas in the support cavity flows into the fixed cavity, so that the top plate loses support, and the spring connected to the upper side of the top plate begins to open. The downward force of multiple springs acts on the bolt at the same time, and the bolt drives the valve to move vertically downward through the valve sleeve, so that the outer sealing block is vertically stuck in the annular groove, thereby achieving the purpose of ensuring the installation quality of the valve.

[0030] 3. By setting a supporting cavity and a fixed cavity, and filling the supporting cavity with high-pressure gas, when the air hole is connected with the guide hole, the gas in the supporting cavity flows to the fixed cavity, and the pressure brought by the high-pressure gas forces the lower baffle to fit tightly against the upper side of the fixed plate, thereby limiting the fixed plate, and the valve sleeve is connected to the fixed plate by bolts, thereby effectively improving the stability of the valve sleeve after installation, and achieving the purpose of ensuring the installation quality of the valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0032] Figure 2 For the present invention Figure 1 The enlarged schematic diagram of point A in the middle;

[0033] Figure 3 It is a structural schematic diagram of the valve body of the present invention;

[0034] Figure 4 It is a comparative schematic diagram of the valve of the present invention before and after installation;

[0035] Figure 5 It is a structural schematic diagram of the support component part of the present invention;

[0036] Figure 6 For the present invention Figure 5 The enlarged schematic diagram of point B in the middle;

[0037] Figure 7 It is a structural schematic diagram of the regulating component part of the present invention;

[0038] Figure 8 This is a schematic diagram of the state after the air hole and the guide hole of the present invention are connected;

[0039] Fig. 9 It is a schematic diagram of the state of the support assembly of the present invention after deformation.

[0040] In the figure: 1, valve body; 101, main flow channel; 102, flow guide channel; 103, valve cavity; 1031, annular groove; 104, flow channel; 2, valve sleeve; 3, base; 4, valve; 401, inner sealing block; 402, connecting flap; 403, connecting block; 404, outer sealing block; 5, supporting assembly; 501, bottom plate; 502, elastic membrane; 503, top plate; 504, fixing plate; 5 05. Connecting plate; 506. Lower baffle plate; 507. Elastic membrane; 508. Upper baffle plate; 509. Flow member; 5091. Upper sealing plate; 5092. Lower sealing plate; 5093. Guide hole; 6. Support plate; 7. Adjustment assembly; 701. Sealing membrane; 702. Pressure plate; 703. One-way tooth; 8. Ring; 801. Bushing; 802. Air hole; 9. Bolt; 10. Spring. DETAILED DESCRIPTION

[0041] The following is a clear and complete description of the technical solution of the embodiment of the present invention in conjunction with the drawings of the embodiment of the present invention, so that its working state and structural features are more detailed. Obviously, the described embodiment is only a partial embodiment of the present invention, not a complete embodiment. Based on the embodiment of the present invention, other embodiments obtained by ordinary technicians in this field without making any creativity belong to the protection scope of the present invention.

[0042] See also Figures 1 to 9 The present invention provides a semiconductor ultra-high purity fluid integrated control module, and the technical solution is as follows:

[0043] For details, please refer to Figures 1 to 9A semiconductor ultra-high purity fluid integrated control module comprises a valve body 1, a valve sleeve 2, a base 3, a valve 4, a support assembly 5, a support plate 6, an adjusting assembly 7, a collar 8, a bolt 9 and a spring 10. The valve sleeve 2 and the base 3 are arranged in an array on the upper and lower sides of the valve body 1, respectively. The valve 4 is connected to the lower side of the valve sleeve 2. The interior of the valve sleeve 2 is connected with a driving member powered by airflow and magnetic force, and the lower end of the driving member extends out of the lower end of the valve sleeve 2. The valve 4 is connected to the driving member. The support assembly 5 is connected to the inner cavity of the base 3. A cover body is arranged on the upper side of the base 3, and the cover body is fixed to the base 3 by bolts 9. The support plate 6 is connected to the upper side of the support assembly 5. The adjusting assembly 7 is connected to the support assembly 5. The collar 8 is connected In the middle of the support assembly 5, bolts 9 pass through the valve body 1 and the base 3 to connect the valve sleeve 2 to the support assembly 5, and a spring 10 is connected to the upper side of the support assembly 5. In the initial state, the support assembly 5 squeezes the spring 10 into a contracted state, and the support plate 6 passes through the base 3 and is slidably connected to the valve body 1. The support assembly 5 pushes the support plate 6 to extend out of the top surface of the valve body 1. When the valve sleeve 2 is installed, the support plate 6 limits the valve sleeve 2. When a single bolt 9 is installed, the adjusting assembly 7 drives the collar 8 to move down a specified distance. When the cumulative downward movement distance of the collar 8 reaches a specified value, the support assembly 5 drives the support plate 6 to move down to release the limitation on the valve sleeve 2, and the spring 10 pushes the valve sleeve 2 to move vertically downward and fit the surface of the valve body 1 through the bolt 9.

[0044] By providing a support plate 6, the support assembly 5 pushes the support plate 6 to extend out of the top of the valve body 1. When the valve sleeve 2 is installed, the support plate 6 forms a limit on the valve sleeve 2, and the valve 4 is connected to the lower end of the valve sleeve 2, so that a certain distance is left between the valve 4 and the valve body 1 during installation. After the bolts 9 are tightened, the spring 10 is used to apply a vertical downward force to the valve sleeve 2, so that the valve 4 moves vertically downward, and the circumference of the valve 4 is effectively uniformly in contact with the valve body 1 during installation, thereby avoiding stress concentration during installation of the valve 4, ensuring the quality of the valve 4, and then ensuring the sealing effect of the valve 4. At the same time, after the bolts 9 are tightened, a downward force is applied to the valve 4, which effectively reduces the operation steps of diagonally tightening the bolts 9 in order to keep the valve 4 balanced during the fixing of the bolts 9, thereby improving the installation efficiency of the valve 4.

[0045] As an embodiment of the present invention, refer to Figure 3 , Figure 4 , Figure 8 and Fig. 9The valve body 1 is made of PTFE. A main flow channel 101, a flow guide channel 102, a valve cavity 103 and a flow branch channel 104 are provided inside the valve body 1. The main flow channel 101 is located in the middle of the valve body 1. The flow guide channels 102 are arranged in an array on both sides of the main flow channel 101. The flow guide channels 102 are inclined. The main flow channel 101 is located at the lower end of the flow guide channel 102. The valve cavity 103 is located at one end of the flow guide channel 102 away from the main flow channel 101. The valve cavity 103 is located at the high end of the flow guide channel 102. The flow branch channel 104 is located at the lower side of the valve cavity 103. The flow branch channel 104 is "L" shaped. The other end of the flow branch channel 104 is connected to the side of the valve body 1, and the outer arc side of the bend of the flow branch channel 104 is made into a circular arc. The chamfer setting and arc tangent processing help optimize the design of the flow channel, so that the fluid can flow more evenly through the corner part of the branch channel 104, which not only helps to reduce the flow resistance, but also improves the overall performance and operating efficiency of the valve 4. When the fluid flows into the branch channel 104, the arc chamfer design can effectively improve the stability of the fluid flow, reduce the disturbance of the fluid at the turns or bends, and maintain the flow stability of the fluid. There are usually fine burrs on the processed arc chamfers that need to be further processed. The usual processing method is to use sandpaper above mesh to grind to ensure the flatness and smoothness of the surface of the parts. The branch channel 104 is connected to the mainstream through the valve cavity 103 and the guide channel 102. The valve body 102 is connected with the flow channel 101, and the valve 4 is arranged in the valve cavity 103. The valve sleeve 2 drives the valve 4 to move up and down, so as to realize the connection between the flow channel 104 and the valve cavity 103. The longitudinal section of the valve cavity 103 is stepped, and the outer edge of the step surface of the valve cavity 103 is provided with an annular groove 1031. The material of the valve 4 is PTFE, and the material of the valve 4 is higher in hardness than that of the valve body 1. Through the soft and hard cooperation of the valve body 1 and the valve 4, the sealing effect can be effectively improved. The valve 4 includes an inner sealing block 401, a connecting flap 402, a connecting block 403 and an outer sealing block 404. The inner sealing block 401 is connected to the lower end of the valve sleeve 2, and the inner sealing block 401 and the output of the valve sleeve 2 driving member are connected. The two ends are connected, the connecting flap 402 is connected to the outer side of the top of the inner sealing block 401, the connecting block 403 is connected to the end of the connecting flap 402 away from the inner sealing block 401, and the outer sealing block 404 is connected to the lower end of the connecting block 403. The outer diameter value of the lower end surface of the inner sealing block 401 is greater than the diameter value of the branch channel 104, and then when the inner sealing block 401 moves downward, the branch channel 104 can be closed, and the outer sealing block 404 is in a circular ring shape, and the ring width of the outer sealing block 404 is greater than the ring width of the annular groove 1031. The outer diameter value of the outer sealing block 404 is the same as the outer diameter value of the annular groove 1031, and then, the outer sealing block 404 and the annular groove 1031 are interference fit, which effectively improves the sealing effect of the valve 4.

[0046] Before processing PTFE, the raw materials need to be stress-relieved and annealed multiple times, and then left in a constant-temperature room for at least two weeks to ensure the accuracy of the product after processing. During the processing, cutting fluid cannot be used to cool the workpiece. When turning, attention should be paid to controlling the feed speed and cutting depth of the tool to avoid overheating of the material. The edge angle and cutting speed of the tool need to be adjusted according to the softness of the two PTFE materials of the valve body 1 and the valve 4 to avoid overheating or overly intense cutting.

[0047] By setting the valve body 1 and the valve 4, the valve 4 is connected to the output end of the driving member of the valve sleeve 2 and extends into the valve cavity 103. When the lower end surface of the valve sleeve 2 fits with the top surface of the valve body 1, the outer sealing block 404 of the valve 4 is clamped into the annular groove 1031 of the valve body 1. The outer diameter value of the outer sealing block 404 is the same as the outer diameter value driven by the annular groove 1031, and the two are coaxially arranged. At the same time, the ring width of the outer sealing block 404 is greater than the ring width of the annular groove 1031. Therefore, when the outer sealing block 404 is clamped into the annular groove 1031, it is an interference fit. While ensuring the sealing reliability of the valve 4, the demand for the sealing ring of the valve 4 is reduced, and thus the volume occupied by the valve 4 in the valve cavity 103 is reduced. Due to the reduction of the occupied volume, the flow characteristics inside the valve cavity 103 are changed, enabling the fluid to pass through the valve cavity 103 with less resistance, thereby improving the flow capacity of the valve cavity 103.

[0048] As an implementation manner of the present invention, refer to Figure 5 、 Figure 6 、 Figure 7 、 Figure 8 and Fig. 9The support assembly 5 includes a bottom plate 501, an elastic membrane 502, a top plate 503, a fixed plate 504, a connecting plate 505, a lower baffle 506, an elastic membrane 507, an upper baffle 508 and a flow member 509. The bottom plate 501 is fixedly connected to the bottom of the inner cavity of the base 3, the elastic membrane 502 is fixedly connected to the outer edge of the top of the bottom plate 501, the top plate 503 is fixedly connected to the upper side of the elastic membrane 502, the fixed plate 504 is fixedly connected to the four corners of the top plate 503, and the fixed plate 504 is threadedly connected to the bolt 9. When the bolt 9 is tightened, the bottom surface of the bolt 9 extends out of the bottom surface of the fixing plate 504, the connecting plate 505 is connected to the middle of the top plate 503, the lower baffle plate 506 is connected to the top of the connecting plate 505, the inner wall of the lower baffle plate 506 is located on the inner side of the inner wall of the connecting plate 505, the elastic film 507 is connected to the outer edge of the top of the lower baffle plate 506, the upper baffle plate 508 is connected to the top of the elastic film 507, and the flow member 509 is connected to the middle of the lower baffle plate 506. The flow member 509 includes an upper sealing plate 5091, a lower sealing plate 5092, and a lower sealing plate 5093. The sealing plate 5092 and the guide holes 5093, the upper sealing plate 5091 is connected to the lower side of the lower baffle plate 506, the upper sealing plate 5091 is located on the inner side of the connecting plate 505, and the lower sealing plate 5092 is connected to the upper side of the bottom plate 501. The upper sealing plate 5091 and the lower sealing plate 5092 are both annular, and the upper sealing plate 5091 and the lower sealing plate 5092 are coaxially arranged. The guide holes 5093 are arranged in an array on the surface of the lower sealing plate 5092. Initially, the lower end surface of the collar 8 is located at the guide holes 509 3, and then the ring 8 can block the guide hole 5093, the bottom plate 501, the elastic membrane 502, the top plate 503, the connecting plate 505, the lower baffle plate 506, the upper sealing plate 5091, the lower sealing plate 5092 and the ring 8 form a supporting cavity, the upper baffle plate 508, the elastic membrane 507, the lower baffle plate 506, the upper sealing plate 5091, the ring 8, the lower sealing plate 5092 and the bottom plate 501 form a fixed cavity, and the opened volume value of the supporting cavity is greater than the opened volume value of the fixed cavity.

[0049] By setting the support assembly 5, initially, high-pressure gas is injected into the support assembly 5, so that the support cavity is in a fully opened state, and then the top plate 503 moves up to push the support plate 6 to move up, so that the top of the support plate 6 extends out of the top of the valve body 1. When the valve sleeve 2 is installed, the valve sleeve 2 is acted upon by the support plate 6 and maintains a specified distance from the valve body 1. After the bolt 9 is installed, the support cavity and the fixed cavity are connected. At this time, the high-pressure airflow flows into the fixed cavity, the top plate 503 moves down and fits with the bottom plate 501, and the top plate 503 drives the support plate 6 to move down, releasing the limit on the valve body 1. At the same time, the high-pressure gas flows into the fixed cavity, so that the fixed cavity expands, and the volume value of the support cavity opening is greater than the volume value of the fixed cavity opening, thereby making the pressure inside the fixed cavity greater, effectively improving the fixing effect of the lower baffle 506 on the fixed plate 504, and at the same time, the upper baffle 508 expands and presses on the top of the base 3, and the lower baffle 506 moves down and presses on the fixed plate 504, effectively improving the stability of the fixed plate 504.

[0050] As an embodiment of the present invention, refer to Figure 5 , Figure 6 , Figure 7 , Figure 8 and Fig. 9 The collar 8 is arranged on the inner wall of the upper sealing plate 5091 and the lower sealing plate 5092, the outer edge of the collar 8 is connected with a collar 801, the collar 8 is arranged between the upper sealing plate 5091 and the lower sealing plate 5092, the surface array of the collar 8 is provided with air holes 802, when the air holes 802 move down to the specified position, the air holes 802 are connected with the guide holes 5093, and then the support cavity is connected with the fixed cavity, when the air holes 802 do not move to the specified position, the support cavity and the fixed cavity are closed, the adjustment component 7 includes a sealing film 701, a pressing plate 702 and a one-way tooth 703, the sealing film 701 is connected to the surface of the top plate 503, and the sealing film 701 can be elastic The sealing film 701 is deformed, and the sealing film 701 is located directly below the bolt 9. When the bolt 9 is tightened, the bottom of the bolt 9 will contact the sealing film 701. The pressure plate 702 is in an "L" shape, and the long side of the pressure plate 702 is connected to the lower side of the sealing film 701. The one-way tooth 703 array is connected to the short side of the pressure plate 702, and the one-way teeth 703 face the ring 8. The one-way teeth 703 are arc-shaped and elastic. When the one-way teeth 703 move downward, they contact with the sleeve plate 801. When the sleeve plate 801 moves downward, the one-way teeth 703 that have not moved are elastically deformed to avoid the sleeve plate 801. When the bolt 9 is connected in place, the bottom surface of the bolt 9 is lower than the bottom surface of the fixed plate 504.

[0051] By setting the adjustment component 7, in the process of tightening a single bolt 9, the lower end of the bolt 9 will push the pressure plate 702 downward through the sealing film 701, and the downward movement of the pressure plate 702 drives the sleeve plate 801 downward, so that the air hole 802 on the sleeve ring 8 is close to the guide hole 5093, and each bolt 9 will drive the sleeve ring 8 to move down a distance through the sleeve plate 801. When the bolts 9 required to be installed on the valve sleeve 2 are all installed in place, the air holes 802 are connected with the guide holes 5093, so that the top plate 503 releases the support for the support plate 6, and then the multiple springs 10 simultaneously exert a downward push on the fixing plate 504, thereby driving the bolt 9 to move downward, and the multiple bolts 9 move downward synchronously to drive the valve sleeve 2 to move vertically downward, so that the outer sealing block 404 is clamped into the annular groove 1031 to complete the fixation.

[0052] When installing the valve 4, in order to avoid damage to the valve 4, the four bolts 9 used to fix the valve 4 need to be tightened diagonally and progressively to avoid a large tilt of the valve 4. Switching between the bolts 9 one by one can easily cause low installation efficiency of the valve 4. In this solution, the support assembly 5 pushes the support plate 6 out of the top of the valve body 1 to form a support on the bottom surface of the valve sleeve 2, so that the valve 4 maintains a safe distance from the valve body 1. After the four bolts 9 are installed in place, the spring 10 simultaneously acts on the four bolts 9 with downward force, and the valve 4 is driven by the bolts 9 to move vertically downward, thereby ensuring the installation efficiency of the valve 4. At the same time, the bolts 9 are directly tightened, which effectively improves the installation efficiency of the valve 4.

[0053] Specifically, first, place a single valve sleeve 2 and a base 3 at the upper and lower sides of an installation position of the valve body 1 respectively, and pass the bolt 9 through the valve body 1 from the upper side of the valve sleeve 2 until the bolt 9 extends into the base 3 and is connected to the fixing plate 504, and then start to tighten the bolt 9. During the process of threaded connection between the bolt 9 and the fixing plate 504, the bottom surface of the bolt 9 continuously moves downward and begins to contact the sealing film 701. The sealing film 701 is deformed downward when subjected to pressure, and the pressure plate 702 is connected to the lower side of the sealing film 701. When the sealing film 701 is deformed, the pressure plate 702 moves downward synchronously, and the downward movement of the pressure plate 702 drives the one-way teeth 703 to move downward. Since the sleeve plate 801 extends between the one-way teeth 703, when the one-way teeth 703 move downward, it will drive the sleeve plate 801 to move downward, and the sleeve plate 801 drives the collar 8 and the air hole 802 to move downward. When the single bolt 9 After tightening, the sleeve plate 801 moves down one tooth position, and in the process of moving down, the sleeve plate 801 contacts the unmoved one-way teeth 703, and the unmoved one-way teeth 703 are deformed under pressure and remain motionless. When each bolt 9 is tightened, it will drive the corresponding pressure plate 702 to move down. When the bolts 9 are all installed in place, the sleeve plate 801 moves down to the limit position. At this time, the air hole 802 is connected with the guide hole 5093, and the gas in the support cavity flows into the fixed cavity. The top plate 503 loses support and drives the support plate 6 to move down. The spring 10 begins to open. The downward force of multiple springs 10 acts on the bolt 9 through the fixed plate 504 at the same time. The bolt 9 drives the valve 4 to move down through the valve sleeve 2. Under the action of the spring 10, the outer sealing block 404 is vertically stuck in the annular groove 1031, and the valve sleeve 2 is fixed.

[0054] In order to further improve the fixing effect, the present solution guides the airflow of the supporting cavity into the fixed cavity, and makes the volume of the fixed cavity smaller than that of the supporting cavity, so that the fixed cavity expands and presses on the upper side of the fixed plate 504. Specifically, the air hole 802 is connected with the guide hole 5093, so that the gas in the supporting cavity flows to the fixed cavity, and the fixed cavity expands. When the fixed cavity expands, the upper baffle plate 508 moves up and causes the elastic membrane 507 to open. When the high-pressure gas flows into the fixed cavity, the air pressure forces the lower baffle plate 506 to fit tightly against the upper side of the fixed plate 504, and the bolts 9 are connected to the fixed plate 504, thereby effectively ensuring the stability of the valve sleeve 2.

[0055] Although the embodiments of the present invention have been described, it will be apparent to those skilled in the art that changes and modifications may be made to the embodiments to obtain other effects with an understanding of the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor ultra-high purity fluid integrated control module, characterized in that: The valve body (1) comprises a valve sleeve (2), a base (3), a valve (4), a support assembly (5), a support plate (6), an adjusting assembly (7), a collar (8), a bolt (9) and a spring (10), wherein the valve sleeve (2) and the base (3) are arranged in an array on the upper and lower sides of the valve body (1), respectively; the valve (4) is connected to the lower side of the valve sleeve (2); the support assembly (5) is connected to the inner cavity of the base (3); the support plate (6) is connected to the upper side of the support assembly (5); the adjusting assembly (7) is connected inside the support assembly (5); the collar (8) is connected to the middle part of the support assembly (5); and the bolt (9) passes through the valve body (1) and the base (3) to connect the valve sleeve (2) with the support plate (6); The support assembly (5) is connected to the valve body (1), the spring (10) is connected to the upper side of the support assembly (5), the support plate (6) passes through the base (3) and is slidably connected to the valve body (1), the support assembly (5) pushes the support plate (6) to extend out of the top surface of the valve body (1), when the valve sleeve (2) is installed, the support plate (6) limits the valve sleeve (2), when a single bolt (9) is installed, the adjustment assembly (7) drives the collar (8) to move down a specified distance, when the collar (8) moves down a cumulative distance reaching a specified value, the support assembly (5) drives the support plate (6) to move down to release the limit on the valve sleeve (2), and the spring (10) pushes the valve sleeve (2) to move vertically downward through the bolt (9) to fit the surface of the valve body (1).

2. A semiconductor ultra-high purity fluid integrated control module according to claim 1, characterized in that: The valve body (1) is provided with a main flow channel (101), a flow guide channel (102), a valve cavity (103) and a flow branch channel (104) inside. The main flow channel (101) is located in the middle of the valve body (1). The flow guide channels (102) are arranged in an array on both sides of the main flow channel (101). The valve cavity (103) is located at one end of the flow guide channel (102) away from the main flow channel (101). The flow branch channel (104) is located at the lower side of the valve cavity (103). The flow branch channel (104) is in an "L" shape, and the outer arc side of the bend of the flow branch channel (104) is provided with a circular arc chamfer. The valve (4) is arranged in the valve cavity (103).

3. A semiconductor ultra-high purity fluid integrated control module according to claim 2, characterized in that: The longitudinal cross-section of the valve cavity (103) is in the shape of a step, and an annular groove (1031) is provided on the outer edge of the step surface of the valve cavity (103).

4. A semiconductor ultra-high purity fluid integrated control module according to claim 3, characterized in that: The valve (4) comprises an inner sealing block (401), a connecting flap (402), a connecting block (403) and an outer sealing block (404); the inner sealing block (401) is connected to the lower end of the valve sleeve (2); the connecting flap (402) is connected to the outer side of the top of the inner sealing block (401); the connecting block (403) is connected to the end of the connecting flap (402) away from the inner sealing block (401); the outer sealing block (404) is connected to the lower end of the connecting block (403); the outer diameter of the lower end surface of the inner sealing block (401) is greater than the diameter of the flow branch (104); the outer sealing block (404) is in a circular ring shape; the ring width of the outer sealing block (404) is greater than the ring width of the annular groove (1031); and the outer diameter of the outer sealing block (404) is the same as the outer diameter of the annular groove (1031).

5. A semiconductor ultra-high purity fluid integrated control module according to claim 4, characterized in that: The support assembly (5) comprises a bottom plate (501), an elastic membrane (502), a top plate (503), a fixed plate (504), a connecting plate (505), a lower baffle plate (506), an elastic membrane (507), an upper baffle plate (508) and a flow member (509), wherein the bottom plate (501) is connected to the bottom of the inner cavity of the base (3), the elastic membrane (502) is connected to the outer edge of the top of the bottom plate (501), the top plate (503) is connected to the upper side of the elastic membrane (502), and the fixed plate (504) is connected to the upper side of the elastic membrane (502). The fixed plate (504) is connected to the four corners of the top plate (503), and the fixed plate (504) is threadedly connected to the bolts (9), the connecting plate (505) is connected to the middle of the top plate (503), the lower baffle (506) is connected to the top of the connecting plate (505), the elastic membrane (507) is connected to the outer edge of the top of the lower baffle (506), the upper baffle (508) is connected to the top of the elastic membrane (507), and the flow member (509) is connected to the middle of the lower baffle (506).

6. A semiconductor ultra-high purity fluid integrated control module according to claim 5, characterized in that: The flow member (509) comprises an upper sealing plate (5091), a lower sealing plate (5092) and guide holes (5093); the upper sealing plate (5091) is connected to the lower side of the lower baffle plate (506); the lower sealing plate (5092) is connected to the upper side of the bottom plate (501); an array of guide holes (5093) is provided on the surface of the lower sealing plate (5092); and initially, the lower end surface of the collar (8) is located at the lower side of the guide holes (5093).

7. A semiconductor ultra-high purity fluid integrated control module according to claim 6, characterized in that: A supporting cavity is formed between the bottom plate (501), the elastic membrane (502), the top plate (503), the connecting plate (505), the lower baffle plate (506), the upper sealing plate (5091), the lower sealing plate (5092) and the sleeve ring (8); a fixed cavity is formed between the upper baffle plate (508), the elastic membrane (507), the lower baffle plate (506), the upper sealing plate (5091), the sleeve ring (8), the lower sealing plate (5092) and the bottom plate (501); and the volume value of the supporting cavity when opened is greater than the volume value of the fixed cavity when opened.

8. The semiconductor ultra-high purity fluid integrated control module according to claim 6, characterized in that: The outer edge of the collar (8) is connected to a collar plate (801), and the surface of the collar (8) is provided with an air hole (802). When the air hole (802) moves downward to a specified position, the air hole (802) is connected to the guide hole (5093).

9. The semiconductor ultra-high purity fluid integrated control module according to claim 8, characterized in that: The adjustment assembly (7) comprises a sealing membrane (701), a pressure plate (702) and one-way teeth (703); the sealing membrane (701) is connected to the surface of the top plate (503), and the sealing membrane (701) is located directly below the bolt (9); the pressure plate (702) is in an "L" shape, and the long side of the pressure plate (702) is connected to the lower side of the sealing membrane (701); the one-way teeth (703) array is connected to the short side of the pressure plate (702), and the one-way teeth (703) face the collar (8).

10. The semiconductor ultra-high purity fluid integrated control module according to claim 9, characterized in that: The one-way teeth (703) are arc-shaped, and when the one-way teeth (703) move downward, they contact the sleeve plate (801). When the bolts (9) are connected in place, the bottom surface of the bolts (9) is lower than the bottom surface of the fixing plate (504).

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