Online dotting missing detection device of wafer dotting device

Abstract

An online dotting missing detection device of a wafer dotting device mainly comprises a control panel, the dotting device, a probe station interface, an optical fiber driver and a probe station stop button, the control panel carries out online dotting missing detection on the dotting device, and the dotting device dispenses printing ink on a defective chip. The probe station interface transmits a dotting device driving signal sent by the probe station to the control panel so that the control panel can drive the dotting device to act, and the optical fiber driver transmits a dotting device in-place signal indicating whether the dotting device acts in place or not to the control panel. The probe station stop button transmits a pause signal generated by the control board to the probe station so that the probe station stops acting. According to the invention, omission of dotting is found through closed-loop control of the dotting device, and the dotting device has the functions of alarming and pausing a probe station, so that an operator can carry out dotting supplement operation on a chip omission of dotting in time, thereby effectively solving the problem of omission of dotting and improving the working efficiency. And the problem that the dotting device driving plate of the probe station is damaged due to abnormal working of the dotting device is solved by adopting photoelectric isolation.

Description

Technical Field

[0001] The invention relates to the field of semiconductor automation, and in particular to an online missing dotting detection device for a wafer dotting machine. Background Art

[0002] In semiconductor production, wafer probers are used to test the electrical parameters and functions of each chip to ensure that the electrical characteristics and performance of the chip meet the design specifications. If a defective chip is found during the wafer testing process, it needs to be marked so that the defective chip can be removed during subsequent packaging. The defective chip is generally marked on the prober by applying ink dots on the defective chip. The device that applies ink to the chip is called a dot dot. Although the dot dot of probers on probers from different manufacturers are different in appearance and driving voltage, they have the same function, which is to apply ink dots on defective chips. The dot dot interface provided on the prober is a high-level pulse signal, as shown below. Figure 1 , the dot signal is a 50ms high pulse of 24V or 48V. It can be seen that the probe station is an open-loop control of the dot.

[0003] The core part of the driver of a traditional dotting device is composed of a coil. When the probe station sends out a pulse signal, it will drive the dotting device coil to produce a striking action, and then drive the ink guide wire to hit the ink in the ink bag onto the defective chip on the wafer. When the dotting device works abnormally, such as when the ink is viscous, the ink guide wire is bent, the coil drives the ink, or the coil is burned out, the dotting device will not have a striking action. At this time, the probe station cannot detect it and is still performing the dotting operation. Although the dotting abnormality can be found through QC inspection, more working hours will be wasted, which will cause dotting failure. What's more, the dotting device occasionally fails or the striking action is stuck, which will cause missed dots. It is difficult for QC inspection to detect a few missing ink dots. Therefore, missed dots of the dotting device has always been a problem that plagues semiconductor production lines. Currently, all dotting devices on probe stations do not have the function of missed dotting detection.

[0004] In summary, the traditional dotting device has the following disadvantages:

[0005] (1) There is no missed dot detection device, and it is an open-loop control method. The probe station only sends out pulses to drive the dot dot device. When the dot dot device works abnormally, the probe station does not know it, and it cannot be discovered in time during production, especially when missed dot dot occurs;

[0006] (2) Abnormal operation will burn out the probe station's dot driver board. Since the core part of the dot driver is composed of a coil, there will be long-term continuous dotting at the edge of the wafer, especially the upper and lower edges. At this time, the dot coil will heat up and burn out the probe station's dot driver board over time. Sometimes the two wires connecting the coil are worn out and cause a short circuit, which will also burn out the probe station's dot driver board.

[0007] Therefore, it is necessary to implement closed-loop control of the dot dot machine by designing an online missed dot detection device, so as to detect missed dot dot in the first place and avoid affecting the dot dot machine driver board of the probe station when the dot dot machine works abnormally. Summary of the invention

[0008] In order to overcome the shortcomings of the prior art, the purpose of the present invention is to provide an online missed dot detection device for a wafer dotter, which mainly includes a control board, a dotter, a probe station interface, an optical fiber driver, and a probe station stop button. By realizing closed-loop control of the dotter, missed dots can be discovered in time, and the device has the functions of alarming and pausing the probe station, so that the operator can make up for the missed dot on the chip, thereby effectively solving the missed dot problem. In addition, the use of photoelectric isolation solves the problem of abnormal operation of the dotter damaging the dotter driver board of the probe station.

[0009] In order to achieve the above-mentioned purpose, the technical scheme adopted by the present invention is: an online missing dot detection device of a wafer dotter, characterized in that the online missing dot detection device is used to find and mark defective chips during the wafer testing process, and the online missing dot detection device mainly includes a control board, a dotter, a probe station interface, an optical fiber driver, a probe station stop button, and a 24V power supply; the control board is used to perform online missing dot detection on the dotter, the dotter is used to apply ink dots on defective chips, the probe station interface is used to transmit the dotter drive signal emitted by the probe station to the control board so that the control board drives the dotter to move, the optical fiber driver is used to transmit the dotter in place signal to the control board to indicate whether the action of the dotter is in place, the probe station stop button is used to transmit the pause signal generated by the control board to the probe station so that the probe station stops moving, and the 24V power supply is used to provide working power for the control board, the dotter and the optical fiber driver;

[0010] The control board is connected to the probe station interface via the P1 port to receive the dotting device driving signal from the probe station interface, the control board is connected to the dotting device via the P2 port to drive the dotting device to operate, the control board is connected to the 24V power supply via the P3 interface, the control board is connected to the optical fiber driver via the P4 port to receive the dotting device in place signal from the optical fiber driver, and the control board is connected to the probe station stop button via the P5 port to stop the probe station from operating;

[0011] The control board mainly includes MCU, digital tube, buzzer and photoelectric isolator; the MCU is used to realize the control function, the digital tube is used to display the number of errors when the MCU fails to sense the action of the dot dot device, the buzzer is used to alarm when the MCU fails to sense the action of the dot dot device, and the photoelectric isolator is used to isolate the dot dot device and the dot dot device driving circuit of the probe station to avoid the short circuit of the coil of the dot dot device affecting the dot dot device driving circuit of the probe station.

[0012] Furthermore, the dotting device mainly includes a dotting device fixing adjustment seat 101, a dotting device driver assembly 102, a driver fixing frame 103, an ink bag 104, an ink bag fixing frame 105, an ink guide wire 106, a guide pin 107, an adjustment screw 108, and a flat optical fiber device 109; the dotting device fixing adjustment seat 101 is used to fix the dotting device to the probe station and fix the ink bag fixing frame 105 to the front; the dotting device driver 102 is a DC round tube push-pull electromagnet, which is mainly composed of a coil frame 201, coil 202, spring 203, and striker 204. The striker 204 is provided with a through hole in the center for installing the ink guide wire 106. The top of the striker 204 is provided with a top screw hole 206 for fixing the ink guide wire 106 and the striker 204 together. The top side of the striker 204 is also provided with a fixing hole 205 for installing the guide pin 107. The driver fixing frame 103 is used to fix the inking device driver assembly 102 and dissipate heat for the coil 202. The driver fixing frame 103 is installed on the ink bag fixing frame 1 05; the ink bag 104 is used to load ink, and the ink bag 104 is installed on the ink bag fixing frame 105, which is located below the driver fixing frame 103, and the ink guide wire 106 passes through the ink bag 104; the ink bag fixing frame 105 is installed in front of the inking device fixed adjustment seat 101, and is mainly used to fix the ink bag 104, the driver fixing frame 103, the adjustment screw 108, and the flat optical fiber device 109, and provide a guide groove 301 for the guide pin 107 and a transmission hole for the flat optical fiber device 109 302; the ink guide wire 106 is fixed on the striker 206 of the inker driver assembly 102, and can move with the striker 206 to penetrate the needle tube of the ink bag 104, and push the ink in the needle tube onto the wafer chip; the adjusting screw 108 is fixed on the ink bag fixing frame 105, located above the inker driver assembly 102, and is used to limit the movement height of the inker driver assembly 102; the flat-type opposing optical fiber device 109 is used to detect missed dots and transmit the generated inker in place signal to the optical fiber driver.

[0013] Furthermore, the coil 202 can generate a Lorentz force after receiving the inking device driving signal to generate a downward pulling force on the striker 204, thereby causing the striker 204 to move downward; the spring 203 can drive the striker 204 to move upward after the inking device driving signal disappears; and the striker 204 can drive the ink guide wire 106 to move together when moving up and down.

[0014] Furthermore, the ink pocket 104 is open, so that the syringe can directly add ink into the ink pocket 104 to achieve online ink addition during the wafer testing process.

[0015] Furthermore, the inking device driver assembly 102 can drive the guide pin 107 to move in the guide groove 301, and the guide groove 301 is used to provide an upper limit and a lower limit for the movement of the guide pin 107, so that when the guide pin 107 moves to the lower limit, it can block the transmission hole 302, so that the optical fiber light path of the flat-type opposing optical fiber device 109 is blocked; when the guide pin 107 moves to the upper limit, the transmission hole 302 is not blocked, and the optical fiber light path of the flat-type opposing optical fiber device 109 is open.

[0016] Furthermore, the model of the flat-type optical fiber device 109 is DST-52-10, the light beam emission direction is the flat direction, and the optical axis diameter is Minimum detection object diameter Detection distance>80mm, can be installed in a small space.

[0017] Furthermore, the model of the MCU is 89C51.

[0018] Compared with the prior art, the present invention provides an online missed dot detection device for a wafer dotter, which mainly includes a control board, a dotter, a probe station interface, an optical fiber driver, and a probe station stop button. The control board performs online missed dot detection on the dotter, the dotter applies ink dots on defective chips, the probe station interface transmits a dotter driving signal issued by the probe station to the control board so that the control board drives the dotter to operate, the optical fiber driver transmits a dotter in place signal to the control board indicating whether the dotter has operated in place, and the probe station stop button transmits a pause signal generated by the control board to the probe station so that the probe station stops operating. The present invention detects missed dots by realizing closed-loop control of the dotter, and has the functions of alarming and pausing the probe station, so that the operator can make up the dots on the missed chips in time, which not only effectively solves the problem of missed dots, but also solves the problem of abnormal operation of the dotter damaging the dotter driver board of the probe station by adopting photoelectric isolation. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the background technology and the drawings required for use in the embodiments are briefly introduced below. Obviously, the drawings used for the embodiments described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 It is a schematic diagram of the driving signal of the dotting device of the background technology of the present invention.

[0021] Figure 2 The present invention is a schematic diagram of the system composition of an online missed dotting detection device for a wafer dotting machine provided in an embodiment of the present invention.

[0022] Figure 3 The invention discloses a control board circuit schematic diagram of an online missed dotting detection device for a wafer dotting machine provided in an embodiment of the invention.

[0023] Figure 4 The invention is a schematic diagram of a wafer dotting device of an online missed dotting detection device provided by an embodiment of the present invention.

[0024] Figure 5 The present invention is a schematic diagram of a dotting device driver of an online missed dotting detection device for a wafer dotting device provided by an embodiment of the present invention.

[0025] Figure 6 It is a schematic diagram of the position of an ink bag fixing frame of an online missed dotting detection device of a wafer dotting device provided by an embodiment of the present invention.

[0026] Figure 7 The present invention provides an MCU control flow chart of an online missing dot detection device for a wafer dotter.

[0027] The markings in the above figure are 1, control board; 2, inker; 3, probe station interface; 4, optical fiber driver; 5, probe station stop button; 6, 24V power supply; 101, inker fixing adjustment seat; 102, inker driver assembly; 103, driver fixing frame; 104, ink bag; 105, ink bag fixing frame; 106, ink guide wire; 107, guide pin; 108, adjustment screw; 109, flat optical fiber device; 201, coil frame; 202, coil; 203, spring; 204, striker; 205, fixing hole; 206, top screw hole; 301, guide groove; 302, transmission hole. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0029] The same or similar numbers in the drawings of this embodiment correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right" and the like indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, it is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and cannot be understood as limitations on the present invention. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0030] The technical solution of the present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0031] Reference Figure 2 , the present invention provides an online missing dot detection device for a wafer dotter, which is characterized in that the online missing dot detection device is used to find and mark defective chips during the wafer testing process, and the online missing dot detection device mainly includes a control board 1, a dotter 2, a probe station interface 3, an optical fiber driver 4, a probe station stop button 5, and a 24V power supply 6; the control board 1 is used to perform online missing dot detection on the dotter 2, the dotter 2 is used to apply ink dots on defective chips, the probe station interface 3 is used to transmit a dotter drive signal emitted by the probe station to the control board 1 so that the control board 1 drives the dotter 2 to move, the optical fiber driver 4 is used to transmit a dotter in place signal to the control board 1 indicating whether the action of the dotter 2 is in place, the probe station stop button 5 is used to transmit a pause signal generated by the control board 1 to the probe station so that the probe station stops moving, and the 24V power supply 6 is used to provide working power for the control board 1, the dotter 2 and the optical fiber driver 4;

[0032] The control board 1 is connected to the probe station interface 3 through the P1 port to receive the marker drive signal from the probe station interface 3, the control board 1 is connected to the marker 2 through the P2 port to drive the marker 2 to operate, the control board 1 is connected to the 24V power supply 6 through the P3 interface, the control board 1 is connected to the optical fiber driver 4 through the P4 port to receive the marker in place signal from the optical fiber driver 4, and the control board 1 is connected to the probe station stop button 5 through the P5 port to stop the probe station from operating.

[0033] The control board 1 mainly includes MCU, digital tube, buzzer and photoelectric isolator; MCU is used to realize the control function, digital tube is used to display the number of errors when MCU does not sense the action of dotting device 2, buzzer is used to alarm when MCU does not sense the action of dotting device 2, photoelectric isolator is used to isolate dotting device 2 and dotting device 2 driving circuit of probe station to avoid short circuit of coil of dotting device 2 affecting dotting device driving circuit of probe station.

[0034] The online missed dot detection device provided by the above technical scheme mainly includes a control board 1, a dot dot device 2, a probe station interface 3, an optical fiber driver 4, and a probe station stop button 5. The control board 1 performs online missed dot detection on the dot dot device 2, the dot dot device 2 applies ink dots on the defective chip, the probe station interface 3 transmits the dot dot device driving signal issued by the probe station to the control board 1 so that the control board 1 drives the dot dot device 2 to act, the optical fiber driver 4 transmits the dot dot device in place signal to the control board 1 indicating whether the action of the dot dot device 2 is in place, and the probe station stop button 5 transmits the pause signal generated by the control board 1 to the probe station so that the probe station stops acting. The present invention detects missed dots by realizing closed-loop control of the dot dot device 2, and has the functions of alarming and pausing the probe station, so that the operator can make up the dots for the missed dot chips in time, which not only effectively solves the problem of missed dots, but also solves the problem of abnormal operation of the dot dot device 2 damaging the dot dot device 2 driving board of the probe station by adopting photoelectric isolation.

[0035] The circuit diagram of the control board 1 is as follows: Figure 3 As shown, MCU is a control chip U1, model 89C51; the control chip U1 is connected to the digital tube DS1 through the resistor R1, the control chip U1 is connected to the digital tube DS2 through the resistor R2, the control chip U1 is connected to the buzzer LS1 through the resistor R10 and the transistor Q3, the control chip U1 is electrically connected to the P1 port through the photoelectric isolator U2, the control chip U1 is electrically connected to the P2 port through the photoelectric isolator U3 and the MOS tube Q1, the control chip U1 is electrically connected to the P4 port through the photoelectric isolator U4, the control chip U1 is connected to the P3 port through the power converter DC1, and the control chip U1 is connected to the P5 port through the relay K1;

[0036] The P1 port is connected to an external probe station interface 3, the P2 port is connected to an external marker 2, the P3 port is connected to an external 24V power supply 6, the P4 port is connected to an external optical fiber driver 4, and the P5 port is connected to an external probe station stop button 5;

[0037] The dot-marker driving signal received at the P1 port is transmitted to the control chip U1 through the photoelectric isolator U2. The control chip U1 drives the dot-marker 2 at the P2 port through the photoelectric isolator U3 and the MOS tube Q1. That is, the dot-marker driving signal output by the P2 port is synchronized with the dot-marker driving signal received at the P1 port and has the same pulse width; the dot-marker arrival signal received by the optical fiber driver 4 is transmitted to the control chip U1 through the P4 port; the probe station stop button 5 is normally open, and the control chip U1 controls the action of the relay K1 according to the dot-marker arrival signal transmitted from the P4 port. If the control chip U1 does not receive the dot-marker arrival signal, that is, does not sense the action of the dot-marker 2, the control chip U1 controls the relay K1. The action of K1 generates a pause signal so that the two signal lines of the P5 port are turned on for a short time, so that the stop button 5 of the probe station is closed, thereby stopping the action of the probe station. At the same time, the control chip U1 accumulates the number of errors in which the dotting device 2 does not act and displays it on the digital tube DS1 and the digital tube DS2. The control chip U1 also generates an alarm signal to control the buzzer LS1 to alarm, so as to alert the operator. After receiving the alarm, the operator can make up for the operation in time; a reset button SW1 and a reset button SW2 are also set on the control board 1. The reset button SW1 is used to reset the buzzer DS1 to stop the buzzer DS1 from alarming, and the reset button SW2 is used to reset the displayed numbers of the digital tube DS1 and the digital tube DS2 to zero.

[0038] Reference Figure 4 , Figure 5 , Figure 6The dotting device 2 mainly includes a dotting device 2 fixed adjustment seat 101, a dotting device 2 driver assembly 102, a driver fixing frame 103, an ink bag 104, an ink bag fixing frame 105, an ink guide wire 106, a guide pin 107, an adjustment screw 108, and a flat optical fiber device 109; the dotting device 2 fixed adjustment seat 101 is used to fix the dotting device 2 to the probe station and fix the ink bag fixing frame 105 to the front; the dotting device 2 driver 102 is a DC round tube push-pull electromagnet, which is mainly composed of a coil frame 201 , coil 202, spring 203, and striker 204. The striker 204 is provided with a through hole in the center for installing the ink guide wire 106. The top of the striker 204 is provided with a top screw hole 206 for fixing the ink guide wire 106 and the striker 204 together. The top side of the striker 204 is also provided with a fixing hole 205 for installing the guide pin 107. The driver fixing frame 103 is used to fix the driver assembly 102 of the inking device 2 and to dissipate heat for the coil 202. The driver fixing frame 103 is installed on the ink bag fixing frame 105 The ink bag 104 is used to load ink. The ink bag 104 is installed on the ink bag fixing frame 105 and is located below the driver fixing frame 103. The ink guide wire 106 passes through the ink bag 104. The ink bag fixing frame 105 is installed in front of the fixed adjustment seat 101 of the inking device 2, and is mainly used to fix the ink bag 104, the driver fixing frame 103, the adjustment screw 108, and the flat optical fiber device 109, and provides a guide groove 301 for the guide pin 107 and a transmission hole 302 for the flat optical fiber device 109. The ink guide wire 106 is fixed on the striker 206 of the driver assembly 102 of the dotting device 2, and can move with the striker 206 to penetrate the needle tube of the ink bag 104 and push the ink in the needle tube onto the wafer chip; the adjustment screw 108 is fixed on the ink bag fixing frame 105, located above the driver assembly 102 of the dotting device 2, and is used to limit the movement height of the driver assembly 102 of the dotting device 2; the flat-type optical fiber device 109 is used to detect missed dots and transmit the generated dotting device in place signal to the optical fiber driver 4;

[0039] Specifically, the coil 202 can generate a Lorentz force after receiving the driving signal of the inking device, so as to generate a downward pulling force on the striker 204, so that the striker 204 moves downward; the spring 203 can drive the striker 204 to move upward after the driving signal of the inking device disappears; the striker 204 can drive the ink guide wire 106 to move together when moving up and down;

[0040] Specifically, the ink pocket 104 is open, so that the syringe can directly add ink into the ink pocket 104, so as to achieve online ink addition during the wafer testing process;

[0041] Specifically, the driver assembly 102 of the dotting device 2 can drive the guide pin 107 to move in the guide groove 301, and the guide groove 301 is used to provide an upper limit and a lower limit for the movement of the guide pin 107, so that when the guide pin 107 moves to the lower limit, it can block the transmission hole 302, so that the optical fiber light path of the flat-type optical fiber device 109 is blocked; when the guide pin 107 moves to the upper limit, the transmission hole 302 is not blocked, and the optical fiber light path of the flat-type optical fiber device 109 is open;

[0042] Specifically, the model of the flat-type optical fiber device 109 is DST-52-10, the light beam emission direction is the flat plate direction, and the optical axis diameter is Minimum detection object diameter Detection distance>80mm, can be installed in a small space.

[0043] Reference Figure 7 , the control flow of MCU is as follows:

[0044] Step S1: Start; MCU starts the control process;

[0045] Step S2: MCU refreshes the digital tube display to restart counting the number of missed dot errors;

[0046] Step S3: MCU detects whether the reset button SW1 is pressed; if the reset button SW1 is pressed, execute step S31 to turn off the buzzer; if the reset button SW1 is not pressed, execute step S4;

[0047] Step S4: MCU detects whether the reset button SW2 is pressed; if the reset button SW2 is pressed, execute step S41 to clear the cumulative number of missed dot errors displayed by the digital tube; if the reset button SW2 is not pressed, execute step S5;

[0048] Step S5: Check whether the MCU receives the driving signal of the dotting device; if the MCU receives the driving signal of the dotting device, execute step S6; if the MCU does not receive the driving signal of the dotting device, execute step S1;

[0049] Step S6: Whether the MCU detects the dotting device arrival signal transmitted by the optical fiber driver 4 within 100ms; if the MCU detects the dotting device arrival signal, execute step S1; if the MCU does not detect the dotting device arrival signal, execute step S7;

[0050] Step S7: MCU controls the buzzer to alarm, the number of missed point errors is accumulated and added by 1 and displayed on the digital tube; at the same time, the relay is controlled to generate a pause signal and output it to the probe station stop button 5 to stop the probe station.

[0051] In summary, compared with the prior art, the present invention has the following advantages:

[0052] (1) The problem of missed dotting is effectively solved; the present invention can detect whether the dotting device 2 is in action online, and the pulse width of the dotting device driving signal emitted by the probe station is about 50ms, and the dotting device 2 will complete the dotting action within 100ms; if the dotting device 2 is not detected to be in action within 100ms, the probe station is still at the dotting position and has not yet moved to the next chip position. The control board 1 can timely pause the probe station at the missed dotting position and alarm, and the operator can make up the dot at the current chip position, and then let the probe station perform automatic dotting operation, thus effectively solving the problem of missed dotting;

[0053] (2) The problem of burning the driving circuit of the probe station when the coil of the doser 2 is short-circuited is effectively solved; the control board 1 of the present invention adopts a photoelectric isolator to receive and transmit the doser driving signal, so it is isolated from the driving circuit of the probe station; in this way, even if the coil of the doser 2 is short-circuited, only the MOS driving circuit on the control board 1 will be burned, and the driving circuit of the probe station will not be damaged, which greatly reduces the maintenance cost;

[0054] (3) The driving capability of the dotting device 2 is improved; the voltage input of the present invention has a wide voltage range, which can be applied to 24V to 48V. The larger the coil driving current of the dotting device 2 is, the stronger the driving capability is. When the dotting device 2 remains unchanged, the driving capability of the dotting device 2 is improved by increasing the external power supply voltage of the present invention;

[0055] (4) It can record the number of missed dots in real time, providing a basis for evaluating the performance of the dotting device 2.

[0056] The above is a detailed description of the embodiments of the present invention, but the invention is not limited to this embodiment. Those skilled in the art may make many equivalent modifications or substitutions without violating the spirit of the present invention. These equivalent modifications or substitutions are all included in the protection scope defined by the claims of this application.

Claims

1. An online missing dot detection device for a wafer dotter, characterized in that: The online missed dot detection device is used to find and mark defective chips during the wafer testing process, and the online missed dot detection device mainly includes a control board, a dot dot machine, a probe station interface, an optical fiber driver, a probe station stop button, and a 24V power supply; the control board is used to perform online missed dot detection on the dot dot machine, the dot dot machine is used to apply ink dots on defective chips, the probe station interface is used to transmit a dot dot machine driving signal issued by the probe station to the control board so that the control board drives the dot dot machine to move, the optical fiber driver is used to transmit a dot dot machine in place signal to the control board indicating whether the dot dot machine has moved in place, the probe station stop button is used to transmit a pause signal generated by the control board to the probe station so that the probe station stops moving, and the 24V power supply is used to provide working power for the control board, the dot dot machine and the optical fiber driver; The control board is connected to the probe station interface via the P1 port to receive the dotting device driving signal from the probe station interface, the control board is connected to the dotting device via the P2 port to drive the dotting device to operate, the control board is connected to the 24V power supply via the P3 interface, the control board is connected to the optical fiber driver via the P4 port to receive the dotting device in place signal from the optical fiber driver, and the control board is connected to the probe station stop button via the P5 port to stop the probe station from operating; The control board mainly includes MCU, digital tube, buzzer and photoelectric isolator; the MCU is used to realize the control function, the digital tube is used to display the number of errors when the MCU fails to sense the action of the dot dot device, the buzzer is used to alarm when the MCU fails to sense the action of the dot dot device, and the photoelectric isolator is used to isolate the dot dot device and the dot dot device driving circuit of the probe station to avoid the short circuit of the coil of the dot dot device affecting the dot dot device driving circuit of the probe station.

2. The on-line missing dot detection device of a wafer dotter according to claim 1, characterized in that: The dotting device mainly includes a dotting device fixing adjustment seat 101, a dotting device driver assembly 102, a driver fixing frame 103, an ink bag 104, an ink bag fixing frame 105, an ink guide wire 106, a guide pin 107, an adjustment screw 108, and a flat optical fiber device 109; the dotting device fixing adjustment seat 101 is used to fix the dotting device to the probe station and fix the ink bag fixing frame 105 to the front; the dotting device driver 102 is a DC round tube push-pull electromagnet, which is mainly composed of a coil frame 201 , coil 202, spring 203, and striker 204. The striker 204 is provided with a through hole in the center for installing the ink guide wire 106. The top of the striker 204 is provided with a top screw hole 206 for fixing the ink guide wire 106 and the striker 204 together. The top side of the striker 204 is also provided with a fixing hole 205 for installing the guide pin 107. The driver fixing frame 103 is used to fix the inking device driver assembly 102 and dissipate heat for the coil 202. The driver fixing frame 103 is installed on the ink bag fixing frame 105. The ink bag 104 is used to load ink, and the ink bag 104 is installed on the ink bag fixing frame 105, which is located below the driver fixing frame 103, and the ink guide wire 106 passes through the ink bag 104; the ink bag fixing frame 105 is installed in front of the inking device fixed adjustment seat 101, and is mainly used to fix the ink bag 104, the driver fixing frame 103, the adjustment screw 108, and the flat optical fiber device 109, and provide a guide groove 301 for the guide pin 107, and provide a transmission hole 301 for the flat optical fiber device 109. 02; the ink guide wire 106 is fixed on the striker 206 of the inker driver assembly 102, and can move with the striker 206 to penetrate the needle tube of the ink bag 104, and push the ink in the needle tube onto the wafer chip; the adjusting screw 108 is fixed on the ink bag fixing frame 105, located above the inker driver assembly 102, and is used to limit the movement height of the inker driver assembly 102; the flat-type opposing optical fiber device 109 is used to detect missed dots and transmit the generated inker in place signal to the optical fiber driver.

3. The on-line missed dotting detection device of a wafer dotting machine according to claim 2, characterized in that: The coil 202 can generate a Lorentz force after receiving the driving signal of the inking device to generate a downward pulling force on the striker 204, thereby causing the striker 204 to move downward; the spring 203 can drive the striker 204 to move upward after the driving signal of the inking device disappears; the striker 204 can drive the ink guide wire 106 to move together when moving up and down.

4. The on-line missing dot detection device of a wafer dotter according to claim 3, characterized in that: The ink pocket 104 is open, so that a syringe can directly add ink into the ink pocket 104 to achieve online ink addition during wafer testing.

5. The on-line missing dot detection device of a wafer dotter according to claim 4, characterized in that: The dotting device driver assembly 102 can drive the guide pin 107 to move in the guide groove 301, and the guide groove 301 is used to provide an upper limit and a lower limit for the movement of the guide pin 107, so that when the guide pin 107 moves to the lower limit, it can block the transmission hole 302, so that the optical fiber light path of the flat-type opposing optical fiber device 109 is blocked; when the guide pin 107 moves to the upper limit, the transmission hole 302 is not blocked, and the optical fiber light path of the flat-type opposing optical fiber device 109 is open.

6. The on-line missing dot detection device of a wafer dotter according to claim 2, characterized in that: The model of the flat-type optical fiber device 109 is DST-52-10. The light beam emission direction is the flat direction. The optical axis diameter is Minimum detection object diameter Detection distance>80mm, can be installed in a small space.

7. The on-line missing dot detection device of a wafer dotter according to claim 1, characterized in that: The model of the MCU is 89C51.

Images