Workbench self-leveling method and system and semiconductor device processing equipment

Abstract

The invention discloses a workbench self-leveling method and system and semiconductor device processing equipment, and the workbench self-leveling method directly detects the heights of different points of a workbench surface through three workbench surface height detection sensors, can reflect the horizontal state of the workbench surface more directly and accurately, and improves the detection precision, so that the workbench self-leveling method and system can be applied to semiconductor device processing equipment. According to the linear movement driving device, leveling can be carried out more timely and accurately, meanwhile, when it is determined that leveling is needed, the height, needing to move upwards, of a driving shaft of the linear movement driving device needing to be adjusted can be effectively determined by combining data, detected by the three top face height detection sensors, of the top face of the installation base, and therefore leveling can be achieved more accurately and rapidly.

Description

Technical Field

[0001] The invention relates to the field of semiconductor device processing, in particular to a workbench self-leveling method and system and semiconductor device processing equipment. Background Art

[0002] When processing wafers, it is usually necessary to place the wafer on a workbench and fix it by vacuum adsorption.

[0003] However, due to installation errors, processing errors, long-term vibration and other reasons, the workbench may be skewed during use, which will seriously affect the processing quality. Therefore, it is desirable to detect and adjust the horizontal state of the workbench in real time.

[0004] The utility model patent with authorization announcement number CN218004812U discloses a dynamic leveling device for a wafer carrier, which uses a displacement sensor at each leveling component to detect the movement distance of the screw nut on the screw shaft to determine whether the wafer carrier is horizontal, and realizes dynamic leveling through the leveling component.

[0005] This structure ignores the impact of other factors such as equipment processing errors and installation errors on the horizontality of the wafer stage's table top. Therefore, detecting the movement distance of the lead screw nut cannot accurately reflect the true horizontal state of the top surface of the wafer stage. At the same time, when there are more structures between the wafer stage and the leveling assembly, this error will further increase. Summary of the invention

[0006] The purpose of the present invention is to solve the above problems existing in the prior art and to provide a workbench self-leveling method, system and semiconductor device processing equipment.

[0007] The purpose of the present invention is achieved through the following technical solutions: The workbench self-leveling method comprises the following steps: S1, obtaining the first Z-axis direction height values ​​of three points on the workbench measured by three triangularly distributed table height detection sensors, and defining the extension direction of the axis of the workbench as the Z-axis direction when the workbench is horizontal; S2, determining whether the horizontality of the table surface of the workbench meets the requirements according to the three first Z-axis direction height values; S3, when it is determined that the horizontality of the table surface of the workbench does not meet the requirement, obtaining second Z-axis direction height values ​​of three points on the top surface of the mounting seat measured by three top surface height detection sensors distributed in a triangle, on which the workbench is arranged; S4, determining the angle between the table top of the workbench and the top surface of the mounting seat according to the data measured by the table top height detection sensor and the top surface height detection sensor and their position coordinates; S5, determining the height to be moved upward of the driving shaft of the linear motion driving device that needs to be adjusted according to the determined angle between the table surface of the workbench and the top surface of the mounting seat and the set parameters, wherein there are three linear motion driving devices, their driving shafts are parallel and the axes of their driving shafts are connected to the bottom of the mounting seat in a triangular distribution, and when the top surface of the mounting seat and the table surface of the workbench are in a horizontal state, the circumscribed circle of the triangle is concentric with the workbench; S6, controlling the driving shaft of the linear motion driving device to be adjusted to move upward to the height to be moved upward; S7, after the driving shaft of the linear motion drive device that needs to be adjusted moves upward to the height that needs to be moved upward, obtain the detection signal of the table height detection sensor and determine whether the horizontality of the table surface of the workbench meets the requirements; if it meets the requirements, stop the linear motion drive device; if it does not meet the requirements, execute S6 again.

[0008] Preferably, when it is determined that the difference between the maximum value and the minimum value of the three first Z-axis direction height values ​​is greater than a threshold value, it is determined that the horizontality of the table surface of the workbench does not meet the requirements.

[0009] Preferably, the threshold is between 5-10 microns.

[0010] Preferably, the three linear motion drive devices are distributed in an equilateral triangle, and the detection points of the three top surface height detection sensors correspond one-to-one to the positions of the drive shafts of the three linear motion drive devices.

[0011] Preferably, the workbench is arranged on a rotation drive assembly that drives its rotation, the rotation drive assembly is arranged on the mounting seat, the linear motion drive device is fixed on the base plate and their drive shafts are movably connected to the mounting seat above the base plate, and the top surface height detection sensor is arranged on the base plate.

[0012] Preferably, the setting parameters include: When the table top of the workbench is kept horizontal, the diameter or radius of the first circle where three detection points of the three table top height detection sensors on the table top are located; When the top surface of the mounting seat is kept horizontal, the diameter or radius of the second circle where three detection points of the three top surface height detection sensors on the top surface are located; The height difference between the table top and the top surface when the table top and the top surface are kept horizontal; and an angle between a generatrix of an inverted frustum with the first circle as the top surface and the second circle as the bottom surface and the top surface or the bottom surface of the inverted frustum.

[0013] Preferably, in S5, it is determined that when the minimum value among the three first Z-axis direction height values ​​is adjusted to an intermediate value, the height to which the driving shaft of the linear motion driving device corresponding to the minimum value needs to be moved upward.

[0014] Preferably, the height to be moved upward is determined according to the following formula: h=2sin(a / 2)×H / sinβ×sin[180°-arctan2H / (Dd)-(180°-a) / 2] (1); h=2sin(a / 2)×H / sinβ×sin[180°-arctanH / (Rr)-(180°-a) / 2] (2); Among them, h is the height to be moved up, a is the angle between the table top of the workbench and the top surface of the mounting seat determined in S4; H is the height difference between the table top and the top surface when the table top of the workbench and the top surface of the mounting seat are kept horizontal; β is the angle between the generatrix of the inverted frustum and the top surface or bottom surface of the inverted frustum, with the first circle where the three detection points of the three table top height detection sensors on the table top are located as the top surface and the second circle where the three detection points of the three top surface height detection sensors on the top surface are located as the bottom surface when the table top of the workbench and the top surface of the mounting seat are kept horizontal; D is the diameter of the first circle; d is the diameter of the second circle; R is the radius of the second circle; r is the radius of the second circle.

[0015] Preferably, in S7, when determining whether the levelness of the table surface of the workbench meets the requirements, it is determined whether the number of adjustments reaches a predetermined number. If so, the adjustment is stopped and S1 is executed; if not, S6 is executed again.

[0016] Table self-leveling system, including: A first data acquisition unit is used to acquire first Z-axis direction height values ​​of three points on the table surface of the workbench measured by three table surface height detection sensors distributed in a triangle, and when the workbench is horizontal, the extension direction of its axis is defined as the Z-axis direction; A levelness judgment unit, used to determine whether the levelness of the table surface of the workbench meets the requirements according to the three first Z-axis direction height values; A second data acquisition unit is used to acquire second Z-axis direction height values ​​of three points on the top surface of the mounting seat measured by three top surface height detection sensors distributed in a triangle when it is determined that the horizontality of the table surface of the workbench does not meet the requirements, and the workbench is arranged on the mounting seat; Angle calculation unit is used to determine the angle between the table top of the workbench and the top surface of the mounting seat according to the data measured by the table top height detection sensor and the top surface height detection sensor and their position coordinates; A single adjustment height determination unit is used to determine the height to which the driving shaft of the linear motion driving device that needs to be adjusted needs to be moved upward according to the determined angle between the table surface of the workbench and the top surface of the mounting seat and the set parameters, wherein the linear motion driving devices are three, their driving shafts are parallel and the axes of their driving shafts are connected to the bottom of the mounting seat in a triangular distribution, and when the top surface of the mounting seat and the table surface of the workbench are in a horizontal state, the circumscribed circle of the triangle is concentric with the workbench; An adjustment unit, used for controlling the driving shaft of the linear motion driving device to be adjusted to move upward to the height to be moved upward; The checking unit is used to obtain the detection signal of the table height detection sensor and determine whether the horizontality of the table surface of the workbench meets the requirements after the driving shaft of the linear motion drive device that needs to be adjusted moves upward to the height that needs to be moved upward; if it meets the requirements, stop the linear motion drive device; if it does not meet the requirements, send a signal to the adjustment unit to make adjustments again.

[0017] A semiconductor device processing device comprises a processor and a memory, wherein the memory stores a program executable by the processor, and when the program is executed, any of the above-mentioned workbench self-leveling methods is implemented.

[0018] The advantages of the technical solution of the present invention are mainly reflected in: The method of the present invention directly detects the heights of different points on the workbench surface through three table surface height detection sensors, which can more directly and accurately reflect the horizontal state of the workbench surface, improve the detection accuracy, and therefore can perform leveling more timely and accurately. At the same time, when it is determined that leveling is required, the data of the top surface of the mounting seat detected by the three top surface height detection sensors can be combined to effectively determine the height to which the driving shaft of the linear motion driving device that needs to be adjusted needs to be moved upward, thereby achieving leveling more accurately and quickly.

[0019] The present invention can reduce the triggering of leveling as much as possible while ensuring the processing accuracy by selecting the threshold value, which is beneficial to reducing energy consumption and extending the service life of the linear motion drive device.

[0020] The formula for calculating the height to which the driving shaft needs to move upward is simple and can be realized by only a small amount of basic data and data measured by a top surface height detection sensor and a table surface height detection sensor, so it is easy to use and promote.

[0021] During adjustment, the present invention only adjusts the minimum value of the three first Z-axis direction height values ​​to an intermediate value, which can ensure that the horizontality of the table surface of the workbench after leveling meets the requirements, while reducing the number of adjustments as much as possible to achieve rapid leveling. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a three-dimensional diagram of the carrier structure of the present invention; Figure 2 It is a bottom view of the linear motion driver of the support structure of the present invention arranged on the bottom plate; Figure 3 is a bottom view of the mounting seat of the sheet support structure of the present invention; Figure 4 Is a schematic diagram of the process of the workbench self-leveling method of the present invention; Figure 5 It is a schematic diagram of a circle where the detection point of the table height detection sensor on the table surface is located and a circle where the detection point of the top surface height detection sensor on the top surface is located when the workbench and the base of the present invention are kept horizontal; Figure 6 It is a schematic diagram of the derivation of the calculation formula of the present invention; Figure 7 It is a schematic diagram of the workbench self-leveling method of the present invention having an adjustment times judgment process. DETAILED DESCRIPTION

[0023] The purpose, advantages and features of the present invention will be illustrated and explained by the non-limiting description of the following preferred embodiments. These embodiments are only typical examples of the application of the technical solution of the present invention, and any technical solution formed by equivalent replacement or equivalent transformation falls within the scope of protection claimed by the present invention.

[0024] In the description of the scheme, it should be noted that the terms "center", "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience and simplification of description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0025] The following is an explanation of the self-leveling method of the workbench disclosed by the present invention in conjunction with the accompanying drawings. Figure 1 -Attached Figure 3As shown, the workbench self-leveling method is based on a new support structure, which includes a circular workbench 100, the workbench 100 has a vacuum adsorption structure to fix the workpiece, the workbench 100 is arranged on a connecting component 200, the connecting component 200 can be a transfer block, preferably, the connecting component 200 can be a self-rotation drive component capable of driving the workbench 100 to rotate, the self-rotation drive component is concentric with the workbench 100, the self-rotation drive component is arranged on a mounting seat 300, and the bottom of the mounting seat 300 is movably connected with three linear motion drive devices 4 00, three linear motion drive devices 400 are arranged on the base plate 500, and the linear motion drive devices 400 can be feasible devices such as hydraulic cylinders, electric push rods, etc., preferably digital hydraulic cylinders, and the driving shafts of the three linear motion drive devices 400 are movably connected in the limiting groove 310 at the bottom of the mounting seat 300, and the driving shafts of the three linear motion drive devices 400 are distributed in an equilateral triangle. When the table surface of the workbench 100 and the top surface of the mounting seat 300 are both in a horizontal state, the circumscribed circle of the equilateral triangle is concentric with the workbench 100 and the diameter of the circumscribed circle is smaller than the diameter of the workbench.

[0026] As attached Figure 1 As shown, the support structure also includes three table height detection sensors 600 distributed in a triangular shape, which are, for example, known photoelectric displacement sensors and distance measuring sensors. When the table top of the workbench is kept horizontal, the first circle where the three detection points of the three table height detection sensors on the table top are located is slightly smaller than the diameter of the workbench and larger than the diameter of the circumscribed circle. They are arranged at a fixed height above the workbench 100. Their specific installation height can be designed according to actual needs and is not limited here. The three table height detection sensors 600 can detect the distance from them to the table top of the workbench 100. When the table top of the workbench 100 is kept horizontal, the distance values ​​measured by the three table height detection sensors 600 are the same. When the table top of the workbench 100 is inclined, the distance values ​​measured by the three table height detection sensors 600 are different. Preferably, as shown in the attached figure, Figure 1 As shown, the three table height detection sensors 600 are distributed in an equilateral triangle and each of the table height detection sensors 600 corresponds to a linear motion drive device 400. For example, when the first Z-axis direction height value of a point on the table measured by the rightmost table height detection sensor 600 is the minimum value, the linear motion drive device that needs to be adjusted is the rightmost linear motion drive device.

[0027] As attached Figure 1As shown, three top surface height detection sensors 700 are also arranged on the base plate 500, and the detection points of the three top surface height detection sensors 700 correspond one by one to the positions of the driving shafts of the three linear motion drive devices 400. Preferably, when the mounting table is kept horizontal, the three detection points of the three top surface height detection sensors on the top surface of the mounting table are respectively on the axis of the driving shaft of a linear motion drive device. Like the table surface height detection sensor 600, they are known photoelectric displacement sensors or ranging sensors. The three top surface height detection sensors 700 can detect the distance between them and the top surface of the mounting seat 300.

[0028] The top surface height detection sensor 700, the table surface height detection sensor 600, the linear motion driving device 400, and the rotation driving assembly are all connected to the control device.

[0029] When the workbench 100 is horizontal, the extension direction of its axis is defined as the Z-axis direction, and a three-dimensional coordinate system is constructed with the Z-axis direction as the Z-axis. The position coordinates of each top surface height detection sensor 700 and table height detection sensor 600 in the three-dimensional coordinate system are determined.

[0030] As attached Figure 4 As shown, the workbench self-leveling method based on the above-mentioned sheet-carrying structure includes the following steps: S1, obtaining the first Z-axis direction height values ​​of three points on the table surface of the workbench 100 measured by three table surface height detection sensors 600.

[0031] S2, determining whether the levelness of the table surface of the workbench 100 meets the requirement according to the three first Z-axis direction height values; when it is determined that the difference between the maximum value and the minimum value of the three first Z-axis direction height values ​​is greater than a threshold, it is determined that the levelness of the table surface of the workbench 100 does not meet the requirement, otherwise it is determined that the levelness of the table surface of the workbench 100 meets the requirement. The threshold is preferably between 5 and 10 microns, and more preferably between 7 and 9 microns.

[0032] S3, when it is determined that the levelness of the table surface of the workbench 100 does not meet the requirement, obtain the second Z-axis direction height values ​​of three points on the top surface of the mounting base 300 measured by three top surface height detection sensors 700.

[0033] S4, determine the angle a between the table top of the workbench 100 and the top surface of the mounting seat 300 according to the data measured by the table top height detection sensor 600 and the top surface height detection sensor 700 and their position coordinates; in specific calculation, the coordinates of three points on the table top can be determined according to the first Z-axis direction height value measured by the table top height detection sensor 600 and their position coordinates, and the first plane can be determined accordingly, and the coordinates of three points on the top surface can be determined according to the second Z-axis direction height value measured by the top surface height detection sensor 700 and their position coordinates, and the second plane can be determined accordingly, and the angle between the second plane and the first plane can be obtained according to the coordinates of the determined 6 points. The corresponding calculation method is a known technology and will not be repeated here.

[0034] S5, determine the height to which the driving axis of the linear motion drive device 400 needs to be adjusted according to the determined angle between the table top of the workbench 100 and the top surface of the mounting seat 300 and the setting parameters, the setting parameters include: when the table top of the workbench is kept horizontal, the diameter or radius of the first circle where the three detection points of the three table top height detection sensors on the table top are located; when the top surface of the mounting seat is kept horizontal, the diameter or radius of the second circle where the three detection points of the three top surface height detection sensors on the top surface are located; when the table top and the top surface are kept horizontal, the height difference between the table top and the top surface; and the angle between the generatrix of the inverted frustum with the first circle as the top surface and the second circle as the bottom surface and the top surface or the bottom surface of the inverted frustum, which are pre-stored in the memory and the corresponding data can be directly read during calculation.

[0035] Furthermore, in S5, it is determined that when the minimum value of the three first Z-axis direction height values ​​is adjusted to an intermediate value (a first Z-axis direction height value between the maximum value and the minimum value of the three first Z-axis direction height values), the height to which the driving shaft of the linear motion driving device 400 corresponding to the minimum value needs to be moved upward.

[0036] As attached Figure 5 As shown, when the table top of the workbench and the top surface of the mounting seat are kept horizontal, the first circle where the three detection points of the three table top height detection sensors on the table top are located and the second circle where the three detection points of the three top surface height detection sensors on the top surface are located are the top and bottom surfaces of an inverted frustum, point A is a detection point of a table top height detection sensor on the table top, point C is a detection point on the top surface of the mounting table corresponding to the table top height detection sensor with the detection point A as the detection point, and their connecting line is a busbar of the inverted frustum.

[0037] As attached Figure 6As shown, sinθ=h / s, therefore, h=sinθ×s, and θ=180°-β-γ, where tanβ=H / (D / 2-d / 2), therefore β=arctan2H / (Dd); we assume that point B is the minimum of the three first Z-axis height values ​​and is the position to which point A moves after the first circle is tilted. We assume that AC=BC=L, and set ∠ACB=a, then γ=(180°-a) / 2, and sin(a / 2)=s / 2 / L, and L=H / sinβ, therefore, we get s=2×sin(a / 2)×L=2×sin(a / 2)×L=2sin(a / 2)×H / sinβ.

[0038] Therefore, the height to be moved upward is determined according to the following formula (1) or (2): h=2sin(a / 2)×H / sinβ×sin[180°-arctan2H / (Dd)-(180°-a) / 2] (1); h=2sin(a / 2)×H / sinβ×sin[180°-arctanH / (Rr)-(180°-a) / 2] (2); Among them, h is the height to be moved up, a is the angle between the table top of the workbench and the top surface of the mounting seat determined in S4; H is the height difference between the table top and the top surface when the table top of the workbench and the top surface of the mounting seat are kept horizontal; β is the angle between the generatrix of the inverted frustum and the top surface or bottom surface of the inverted frustum, with the first circle where the three detection points of the three table top height detection sensors on the table top are located as the top surface and the second circle where the three detection points of the three top surface height detection sensors on the top surface are located as the bottom surface when the table top of the workbench and the top surface of the mounting seat are kept horizontal; D is the diameter of the first circle; d is the diameter of the second circle; R is the radius of the second circle; r is the radius of the second circle.

[0039] S6, controlling the driving shaft of the linear motion driving device 400 that needs to be adjusted to move upward to the required height; that is, controlling the driving shaft of the linear motion driving device 400 corresponding to the minimum value to move upward to the required height.

[0040] S7, after the driving shaft of the linear motion drive device 400 that needs to be adjusted moves upward to the height that needs to be moved upward, obtain the detection signal of the table height detection sensor 600 and determine whether the horizontality of the table surface of the workbench 100 meets the requirements; if it meets the requirements, stop the linear motion drive device 400; if it does not meet the requirements, execute S6 again.

[0041] Normally, after several adjustments, the levelness of the table top of the workbench will meet the requirements. However, in some extreme cases, after several adjustments according to the height to be moved up, the levelness of the table top of the workbench still does not meet the requirements. At this time, it is necessary to re-determine the height to be moved up and adjust it, as shown in the attached figure. Figure 7 As shown, in S7, when determining whether the levelness of the table surface of the workbench meets the requirements, it is determined whether the number of adjustments reaches a predetermined number. If so, the adjustment is stopped and S1 is executed. If not, S6 is executed again. The predetermined number can be set as needed, for example, it can be set to 1-3 times, which is not limited here.

[0042] In addition, in S2, if it is determined that the levelness of the table surface of the workbench does not meet the requirements, the processing mechanism can be controlled to stop processing; and when it is determined in S7 that the levelness of the table surface of the workbench meets the requirements, the processing of the processing mechanism is resumed, and after resuming processing, step S1 is continued.

[0043] Example 2 This embodiment discloses a workbench self-leveling system, comprising: A first data acquisition unit is used to acquire first Z-axis direction height values ​​of three points on the table surface of the workbench 100 measured by three table surface height detection sensors 600 distributed in a triangle, and when the workbench 100 is horizontal, the extension direction of its axis is defined as the Z-axis direction; A levelness judgment unit, used to determine whether the levelness of the table surface of the workbench 100 meets the requirements according to the three first Z-axis direction height values; A second data acquisition unit is used to acquire second Z-axis direction height values ​​of three points on the top surface of the mounting seat 300 measured by three top surface height detection sensors 700 distributed in a triangle when it is determined that the horizontality of the table surface of the workbench 100 does not meet the requirements, and the workbench 100 is arranged on the mounting seat 300; Angle calculation is used alone to determine the angle between the table top of the workbench 100 and the top surface of the mounting seat 300 according to the data measured by the table top height detection sensor 600 and the top surface height detection sensor 700 and their position coordinates; A single adjustment height determination unit is used to determine the height to be moved upward of the driving shaft of the linear motion driving device 400 that needs to be adjusted according to the determined angle between the table surface of the workbench 100 and the top surface of the mounting seat 300 and the set parameters. There are three linear motion driving devices 400, and their driving shafts are parallel and the axes of their driving shafts are connected to the bottom of the mounting seat 300 in a triangular distribution. When the table surface of the workbench 100 is in a horizontal state, the circumscribed circle of the triangle is concentric with the workbench 100; An adjustment unit, used for controlling the driving shaft of the linear motion driving device 400 that needs to be adjusted to move upward to the height that needs to be moved upward; The checking unit is used to obtain the detection signal of the table height detection sensor 600 and determine whether the horizontality of the table surface of the workbench 100 meets the requirements after the driving shaft of the linear motion driving device 400 that needs to be adjusted moves upward to the height that needs to be moved upward; if it meets the requirements, stop the linear motion driving device 400; if it does not meet the requirements, send a signal to the adjustment unit to make adjustments again.

[0044] Example 3 This embodiment discloses a semiconductor device processing equipment, including a processor and a memory, wherein the memory stores a program executable by the processor, and when the program is executed, the workbench self-leveling method as described above is implemented.

[0045] There are many implementation methods of the present invention, and all technical solutions formed by equivalent transformation or equivalent transformation fall within the protection scope of the present invention.

Claims

1. Workbench self-leveling method, It is characterized in that The steps include: S1, obtaining the first Z-axis direction height values ​​of three points on the workbench measured by three triangularly distributed table height detection sensors, and defining the extension direction of the axis of the workbench as the Z-axis direction when the workbench is horizontal; S2, determining whether the horizontality of the table surface of the workbench meets the requirements according to the three first Z-axis direction height values; S3, when it is determined that the horizontality of the table surface of the workbench does not meet the requirement, obtaining second Z-axis direction height values ​​of three points on the top surface of the mounting seat measured by three top surface height detection sensors distributed in a triangle, on which the workbench is arranged; S4, determining the angle between the table top of the workbench and the top surface of the mounting seat according to the data measured by the table top height detection sensor and the top surface height detection sensor and their position coordinates; S5, determining the height to which the driving shaft of the linear motion driving device to be adjusted needs to be moved upward according to the angle between the table surface of the workbench and the top surface of the mounting seat determined in S4 and the set parameters, wherein there are three linear motion driving devices, their driving shafts are parallel and the axes of their driving shafts are connected to the bottom of the mounting seat in a triangular distribution, and when the top surface of the mounting seat and the table surface of the workbench are in a horizontal state, the circumscribed circle of the triangle is concentric with the workbench; S6, controlling the driving shaft of the linear motion driving device to be adjusted to move upward to the height to be moved upward; S7, after the driving shaft of the linear motion drive device that needs to be adjusted moves upward to the height that needs to be moved upward, obtain the detection signal of the table height detection sensor and determine whether the horizontality of the table surface of the workbench meets the requirements; if it meets the requirements, stop the linear motion drive device; if it does not meet the requirements, execute S6 again.

2. The workbench self-leveling method according to claim 1, Features: When it is determined that the difference between the maximum and minimum values ​​of the three first Z-axis direction height values ​​is greater than a threshold, it is determined that the levelness of the table surface of the workbench does not meet the requirement, and the threshold is between 5-10 microns.

3. The workbench self-leveling method according to claim 1, Features: The three linear motion drive devices are distributed in an equilateral triangle. When the top surface of the mounting seat is in a horizontal state, the detection points of the three top surface height detection sensors on the top surface correspond one-to-one to the positions of the drive shafts of the three linear motion drive devices.

4. The workbench self-leveling method according to claim 3, Features: The workbench is arranged on a rotation drive assembly that drives its rotation, and the rotation drive assembly is arranged on the mounting seat. The linear motion drive device is fixed on the base plate and their drive shafts are movably connected to the mounting seat above the base plate. The top surface height detection sensor is arranged on the base plate.

5. The workbench self-leveling method according to claim 1, Features: The setting parameters include: When the table top of the workbench is kept horizontal, the diameter or radius of the first circle where three detection points of the three table top height detection sensors on the table top are located; When the top surface of the mounting seat is kept horizontal, the diameter or radius of the second circle where three detection points of the three top surface height detection sensors on the top surface are located; The height difference between the table top and the top surface when the table top and the top surface are kept horizontal; and an angle between a generatrix of an inverted frustum with the first circle as the top surface and the second circle as the bottom surface and the top surface or the bottom surface of the inverted frustum.

6. The workbench self-leveling method according to claim 5, Features: In S5, it is determined that when the minimum value among the three first Z-axis direction height values ​​is adjusted to an intermediate value, the height to which the driving shaft of the linear motion driving device corresponding to the minimum value needs to be moved upward.

7. The workbench self-leveling method according to claim 6, Features: In S5, the height to be moved upward is determined according to the following formula (1) or (2): h=2sin(a / 2)×H / sinβ×sin[180°-arctan2H / (Dd)-(180°-a) / 2] (1); h=2sin(a / 2)×H / sinβ×sin[180°-arctanH / (Rr)-(180°-a) / 2] (2); Among them, h is the height to be moved up, a is the angle between the table top of the workbench and the top surface of the mounting seat determined in S4; H is the height difference between the table top and the top surface when the table top of the workbench and the top surface of the mounting seat are kept horizontal; β is the angle between the generatrix of the inverted frustum and the top surface or bottom surface of the inverted frustum, with the first circle where the three detection points of the three table top height detection sensors on the table top are located as the top surface and the second circle where the three detection points of the three top surface height detection sensors on the top surface are located as the bottom surface when the table top of the workbench and the top surface of the mounting seat are kept horizontal; D is the diameter of the first circle; d is the diameter of the second circle; R is the radius of the second circle; r is the radius of the second circle.

8. The workbench self-leveling method according to any one of claims 1 to 7, Features: In S7, when determining whether the levelness of the table surface of the workbench meets the requirements, it is determined whether the number of adjustments reaches a predetermined number. If so, the adjustment is stopped and S1 is executed. If not, S6 is executed again.

9. Workbench self-leveling system, It is characterized in that include: A first data acquisition unit is used to acquire first Z-axis direction height values ​​of three points on the table surface of the workbench measured by three table surface height detection sensors distributed in a triangle, and when the workbench is horizontal, the extension direction of its axis is defined as the Z-axis direction; A levelness judgment unit, used to determine whether the levelness of the table surface of the workbench meets the requirements according to the three first Z-axis direction height values; A second data acquisition unit is used to acquire second Z-axis direction height values ​​of three points on the top surface of the mounting seat measured by three top surface height detection sensors distributed in a triangle when it is determined that the horizontality of the table surface of the workbench does not meet the requirements, and the workbench is arranged on the mounting seat; Angle calculation unit is used to determine the angle between the table top of the workbench and the top surface of the mounting seat according to the data measured by the table top height detection sensor and the top surface height detection sensor and their position coordinates; A single adjustment height determination unit is used to determine the height to which the driving shaft of the linear motion driving device that needs to be adjusted needs to be moved upward according to the determined angle between the table surface of the workbench and the top surface of the mounting seat and the set parameters, wherein the linear motion driving devices are three, their driving shafts are parallel and the axes of their driving shafts are connected to the bottom of the mounting seat in a triangular distribution, and when the top surface of the mounting seat and the table surface of the workbench are in a horizontal state, the circumscribed circle of the triangle is concentric with the workbench; An adjustment unit, used for controlling the driving shaft of the linear motion driving device to be adjusted to move upward to the height to be moved upward; The checking unit is used to obtain the detection signal of the table height detection sensor and determine whether the horizontality of the table surface of the workbench meets the requirements after the driving shaft of the linear motion drive device that needs to be adjusted moves upward to the height that needs to be moved upward; if it meets the requirements, stop the linear motion drive device; if it does not meet the requirements, send a signal to the adjustment unit to make adjustments again.

10. A semiconductor device processing apparatus comprising a processor and a memory, wherein the memory stores a program executable by the processor. Features: When the program is executed, the workbench self-leveling method as described in any one of claims 1-7 is implemented.

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