Substrate processing apparatus

Abstract

The invention discloses a substrate processing device, which comprises a substrate holding mechanism, a plurality of protective covers, a plurality of lifting mechanisms and a plurality of sealing elements, and is characterized in that the substrate holding mechanism is used for holding a substrate; the plurality of protection covers are sequentially and radially arranged around the base plate holding mechanism in a surrounding manner and are used for independently receiving the liquid medicine thrown out from the base plate; the plurality of lifting mechanisms are used for respectively driving the plurality of protective covers to lift to a lifting position or a descending position; the plurality of sealing pieces are respectively arranged between the adjacent protective covers; the substrate processing device is configured in the mode that when the two adjacent protection covers are located at the ascending position or the descending position at the same time, the two adjacent protection covers make contact with the corresponding sealing pieces, so that the two adjacent protection covers are in a closed state. According to the application, the purity of the liquid medicine received by the plurality of protection covers is not influenced by liquid channeling.

Description

[0001] This application claims the priority of a Chinese patent with an application number of 202311568819.3 and an invention title of "Substrate Processing Apparatus" filed on November 22, 2023, and the above-mentioned Chinese patent is incorporated herein by reference in its entirety. Technical Field

[0002] This application relates to the field of semiconductor manufacturing technology, and particularly relates to a substrate processing apparatus. Background Art

[0003] With the continuous improvement of process requirements, the requirements for cleaning semiconductor substrates are also getting higher and higher. When the substrate processing apparatus processes a single substrate, a variety of chemical solutions are used. The substrate holding mechanism of the substrate processing apparatus supports the substrate and can rotate with the substrate. The chemical solution on the substrate will be thrown to the surroundings under the action of centrifugal force and is received by the protective cover and then recycled.

[0004] Currently, the substrate processing apparatus includes multiple protective covers. For example, taking the case where multiple protective covers at least include a first protective cover and a second protective cover, the first protective cover and the second protective cover are radially arranged around the substrate holding mechanism in sequence from the inside to the outside, and are used to independently receive the chemical solution thrown from the substrate respectively. However, there is a situation like this: when the first protective cover collects the corresponding chemical solution, the splashing chemical solution is likely to enter the gap between the first protective cover and the second protective cover, which will reduce the purity of the chemical solution collected by the second protective cover in the subsequent process. This will not only affect the recycling rate of the chemical solution, but also have an adverse impact on the substrate during substrate processing. Summary of the Invention

[0005] The purpose of this application is to provide a substrate processing apparatus to solve the problem that the purity of the chemical solution received by multiple protective covers in the prior art is affected by liquid leakage.

[0006] To solve the above problems, this application proposes a substrate processing apparatus, including:

[0007] A substrate holding mechanism for holding the substrate;

[0008] Multiple protective covers, which are sequentially arranged around the substrate holding mechanism radially and are used to independently receive the chemical solution thrown from the substrate respectively;

[0009] Multiple lifting mechanisms for driving the multiple protective covers to rise to a rising position or fall to a falling position respectively;

[0010] Multiple seals, which are respectively arranged between adjacent protective covers;

[0011] The substrate processing device is configured such that when two adjacent protective covers are in the same ascending position or descending position, the two adjacent protective covers are in contact with corresponding sealing members, so that the two adjacent protective covers are in a closed state.

[0012] The present application provides a substrate processing device, comprising:

[0013] A substrate holding mechanism, used for holding the substrate;

[0014] A plurality of protective covers, including a first protective cover and a second protective cover, the first protective cover and the second protective cover are radially arranged around the substrate holding mechanism in sequence from the inside to the outside, and are used to independently receive the liquid medicine thrown out from the substrate, the first protective cover includes a first barb, and the first barb extends upward from the front end of the top wall of the first protective cover;

[0015] The substrate processing apparatus is further configured to:

[0016] When the first protective cover and the second protective cover are both moved to the ascending position or the descending position, in the vertical direction, the upper edge of the first barb is not lower than the upper edge of the top wall of the second protective cover.

[0017] In the substrate processing device proposed in the present application, a seal is configured so that two adjacent protective covers that are in the same ascending position or descending position are in a closed state, thereby preventing external chemical liquid from entering between the two adjacent protective covers. When the two adjacent protective covers are subsequently in an open state to collect chemical liquid, the purity of the chemical liquid will not be affected by the splashing chemical liquid, thereby improving the recovery rate of the corresponding chemical liquid and preventing adverse effects on the substrate during substrate processing.

[0018] In the substrate processing device proposed in the present application, the first protective cover includes a first barb, which extends upward from the front end of the top wall of the first protective cover. When the adjacent first protective cover and the second protective cover are both in the ascending position or the descending position, the first barb can block the splashing liquid, and to a certain extent prevent the splashing liquid from entering between the first protective cover and the second protective cover, which is beneficial to ensuring the purity of the liquid collected by the subsequent second protective cover, thereby improving the recovery rate of the liquid and preventing adverse effects on the substrate during substrate processing.

[0019] Other features and corresponding beneficial effects of the present application are described in the latter part of the specification, and it should be understood that at least some of the beneficial effects become obvious from the records in the specification of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figures 1 to 3 This is a schematic structural diagram of a substrate processing device according to Embodiment 1 of the present application;

[0021] Figures 4a to 4dIt is a partial structural schematic diagram of various configurations of multiple protective covers in Example 1 of the present application;

[0022] Figure 5a and Figure 5b This is a schematic structural diagram of a protective cover according to Embodiment 1 of the present application;

[0023] Figure 6 It is a schematic diagram of the partial structure of multiple protective covers in Example 1 of the present application;

[0024] Figures 7 to 9 This is a schematic structural diagram of a substrate processing device according to Embodiment 2 of the present application;

[0025] Fig.10 A partial structural schematic diagram of a configuration method of multiple protective covers in Example 2 of the present application;

[0026] Fig.11a and Fig.11b A schematic diagram of the structure of a protective cover according to Embodiment 2 of the present application; and

[0027] Fig.12 This is a partial structural schematic diagram of a configuration method of multiple protective covers in Example 2 of the present application. DETAILED DESCRIPTION

[0028] The following specific embodiments illustrate the implementation of the present application, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Although the description of the present application will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this invention are limited to this implementation. On the contrary, the purpose of introducing the invention in conjunction with the implementation is to cover other options or modifications that may extend based on the claims of the present application. In order to provide a deep understanding of the present application, the following description will include many specific details. The present application can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present application, some specific details will be omitted in the description. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict.

[0029] It should be noted that in this specification, similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0030] The technical solution of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present application.

[0031] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0032] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0033] In order to make the objectives, technical solutions and advantages of the present application clearer, the implementation methods of the present application will be further described in detail below in conjunction with the accompanying drawings.

[0034] Embodiment 1:

[0035] Figures 1 to 3 Schematic diagram of the structure of a substrate processing device according to an embodiment of the present application. Figure 1 In the embodiment, the first protective cover 21, the second protective cover 22 and the third protective cover 23 are all in the raised position, and the first protective cover 21 is used to receive the liquid medicine thrown out from the substrate 10; Figure 2 In the embodiment, the first protective cover 21 is located in the descending position, the second protective cover 22 and the third protective cover 23 are located in the ascending position, and the second protective cover 22 is used to receive the liquid medicine thrown out from the substrate 10; Figure 3 In the embodiment, the first protective cover 21 and the second protective cover 22 are both located at the lowered position, and the third protective cover 23 is located at the raised position, and the third protective cover 23 is used to receive the liquid medicine thrown off the substrate 10. When the first protective cover 21, the second protective cover 22 and the third protective cover 23 are all located at the lowered position, the substrate processing apparatus is in a standby state.

[0036] refer to Figures 1 to 3The present application proposes a substrate processing device, including a substrate holding mechanism 1, a plurality of protective covers 2, a plurality of lifting mechanisms 3 and a plurality of seals 4. The substrate holding mechanism 1 includes a chuck 11, a rotating shaft 12 and a base 13. The chuck 11 is used to clamp a substrate 10. The chuck 11 is connected to the rotating shaft 12. The rotating shaft 12 is assembled on the base 13 and is used to drive the chuck 11 to rotate. The substrate 10 rotates with the chuck 11, and the liquid medicine on the substrate 10 is thrown out under the action of centrifugal force. The plurality of protective covers 2 are radially arranged around the substrate holding mechanism 1 in sequence, and are used to independently receive the liquid medicine thrown out from the substrate 10. The plurality of lifting mechanisms 3 are used to drive the plurality of protective covers 2 to rise and fall to an ascending position or a descending position respectively. The plurality of seals 4 are respectively arranged between adjacent protective covers 2. The substrate processing device is configured as follows: when two adjacent protective covers 2 are in the ascending position or the descending position, the two adjacent protective covers 2 are close to each other. At this time, the two adjacent protective covers 2 are in contact with the corresponding seals 4, so that the two adjacent protective covers 2 are in a closed state, thereby preventing the intrusion of liquid medicine and water vapor, and ensuring that the purity of the recovered liquid medicine is not affected by the intrusion of liquid.

[0037] In some embodiments, the plurality of protective covers 2 include a first protective cover 21 and a second protective cover 22, and the first protective cover 21 and the second protective cover 22 are radially arranged around the substrate holding mechanism 1 in sequence from the inside to the outside. The plurality of lifting mechanisms 3 include a first lifting mechanism 31 and a second lifting mechanism 32, which are used to drive the first protective cover 21 and the second protective cover 22 to move to the raised position or the lowered position respectively. Figure 1 In the example shown, the first lifting mechanism 31 and the second lifting mechanism 32 are respectively provided with two. The plurality of seals 4 include a first seal 41, and the first seal 41 is arranged between the first protective cover 21 and the second protective cover 22. When the first protective cover 21 and the second protective cover 22 are both in the raised position (such as Figure 1 ) or descending position (such as Figure 3 ), the first protective cover 21 and the second protective cover 22 are close to each other. At this time, the first protective cover 21 and the second protective cover 22 are in contact with the first sealing member 41, so that the first protective cover 21 and the second protective cover 22 are in a closed state, thereby preventing the intrusion of liquid medicine and water vapor, and ensuring that the purity of the recovered liquid medicine when the first protective cover 21 and the second protective cover 22 are in the open state is not affected by the intrusion of liquid.

[0038] In some embodiments, Figure 1 The plurality of protective covers 2 further include a third protective cover 23, which is arranged around the outer periphery of the second protective cover 22, and the plurality of lifting mechanisms 3 further include a third lifting mechanism 33, which is used to drive the third protective cover 23 to move to an ascending position or a descending position. Figure 1In the example shown, the third lifting mechanism 33 has two. The plurality of seals 4 also includes a second seal 42, when the second protective cover 22 and the third protective cover 23 are both in the raised position (such as Figure 1 ) or the lowered position (not shown), the second protective cover 22 and the third protective cover 23 are close to each other. At this time, the second protective cover 22 and the third protective cover 23 are in contact with the second sealing member 42, so that the second protective cover 22 and the third protective cover 23 are in a closed state, thereby preventing the intrusion of liquid medicine and water vapor, and ensuring that the purity of the recovered liquid medicine when the second protective cover 22 and the third protective cover 23 are in the open state is not affected by the intrusion of liquid.

[0039] Specifically, the first sealing member 41 is fixed to the front end of the outer side of the top wall 211 of the first protective cover 21, wherein the outer side of the top wall 211 is the side of the top wall 211 facing the second protective cover 22, and the front end of the outer side of the top wall 211 is the end of the outer side of the top wall 211 close to the axis of the rotating shaft 12. Alternatively, the first sealing member 41 is fixed to the front end of the inner side of the top wall 221 of the second protective cover 22, wherein the inner side of the top wall 221 is the side of the top wall 221 facing the first protective cover 21, and the front end of the inner side of the top wall 221 is the end of the inner side of the top wall 221 close to the axis of the rotating shaft 12.

[0040] The second seal 42 is fixed to the front end of the outer side of the top wall 221 of the second protective cover 22, wherein the outer side of the top wall 221 is the side of the top wall 221 facing the third protective cover 23, and the front end of the outer side of the top wall 221 is the end of the outer side of the top wall 221 close to the axis of the rotating shaft 12. Alternatively, the second seal 42 is fixed to the front end of the inner side of the top wall 231 of the third protective cover 23, wherein the inner side of the top wall 231 is the side of the top wall 231 facing the second protective cover 22, and the front end of the inner side of the top wall 231 is the end of the inner side of the top wall 231 close to the axis of the rotating shaft 12. In some embodiments, the first seal 41 and the second seal 42 are, for example, sealing rings.

[0041] exist Figures 1 to 3 In the example shown, the first protective cover 21 is located at the innermost circle of the plurality of protective covers 2, the second protective cover 22 is located at the middle circle of the plurality of protective covers 2, and the third protective cover 23 is located at the outermost circle of the plurality of protective covers 2. In other embodiments, at least two protective covers 2 may be provided between the first protective cover 21 and the third protective cover 23, such as a fourth protective cover, a fifth protective cover, and a sixth protective cover. In this case, a sealing member 4 is provided between any two adjacent protective covers 2, respectively, and the number of sealing members 4 between any two adjacent protective covers 2 is not limited and may be one or more.

[0042] In some embodiments, reference Figures 1 to 3Each protective cover 2 is respectively provided with a collecting tank 214, 224, 234 and also includes a top wall 211, 221, 231 and a side wall 212, 222, 232 connected to each other. The side walls 212, 222, 232 are generally vertically arranged, and the top walls 211, 221, 231 are inclinedly arranged. Specifically, the first protective cover 21 is provided with a first collecting groove 214, which is formed on the outer periphery of the base 13, and the side wall 212 of the first protective cover 21 extends downward from the lower end of the top wall 211 to the first collecting groove 214; the second protective cover 22 is provided with a second collecting groove 224, which is formed on the outer periphery of the first protective cover 21, and the side wall 222 of the second protective cover 22 extends downward from the lower end of the top wall 221 to the second collecting groove 224; the third protective cover 23 is provided with a third collecting groove 234, which is formed on the outer periphery of the second protective cover 22, and the side wall 232 of the third protective cover 23 extends downward from the lower end of the top wall 231 to the third collecting groove 234. The first collecting groove 214, the second collecting groove 224 and the third collecting groove 234 are annular.

[0043] refer to Figure 1 During the substrate processing, if the innermost first protective cover 21 is used to receive the liquid medicine thrown off the substrate 10, the first lifting mechanism 31 drives the first protective cover 21 to move to the raised position, and at the same time, the second lifting mechanism 32 and the third lifting mechanism 33 also drive the second protective cover 22 and the third protective cover 23 to move to the raised position respectively. When the chuck 11 rotates while holding the substrate 10, the liquid medicine on the substrate 10 is thrown toward the first protective cover 21 under the action of centrifugal force, and the liquid medicine flows along the side wall 212 of the first protective cover 21 to the first collection tank 214, and is discharged from the first collection tank 214. In this process, the entrance of the gap between the first protective cover 21 and the second protective cover 22 is sealed by the first seal 41, and the entrance of the gap between the second protective cover 22 and the third protective cover 23 is sealed by the second seal 42, both of which can prevent the liquid medicine from entering. Figure 2 When the second protective cover 22 receives another liquid medicine thrown off the substrate 10, the purity of the other liquid medicine collected by the second collecting tank 224 of the second protective cover 22 is not affected by the liquid leakage, and the purity of the liquid medicine is kept high, thereby increasing the number of recycling times. Figure 3 The purity of the liquid medicine collected by the third collecting groove 234 of the third protective cover 23 will not be affected by the liquid leakage, and the purity of the liquid medicine can be kept at a high level.

[0044] In addition, the present application can also prevent the top walls 211, 221, 231 of two adjacent protective covers 2 from contacting each other and colliding with each other by configuring the sealing member 4, thereby preventing the residual liquid on the two top walls 211, 221, 231 from splashing due to the collision. Figure 1In the process that the first lifting mechanism 31 drives the first protective cover 21 to rise, so that the first protective cover 21 is in the same rising position as the second protective cover 22 and the third protective cover 23, because of the existence of the first sealing member 41, the outer side of the top wall 211 of the first protective cover 21 and the inner side of the top wall 221 of the second protective cover 22 will not contact each other to cause collision, and thus the liquid medicine will not splash due to the collision. Similarly, because of the existence of the second sealing member 42, the outer side of the top wall 221 of the second protective cover 22 and the inner side of the top wall 231 of the third protective cover 23 will not contact each other to cause collision, and thus the liquid medicine will not splash due to the collision.

[0045] Figures 4a to 4d It is a partial structural schematic diagram of various configuration methods of multiple protective covers in Example 1 of the present application.

[0046] In some embodiments, reference Figure 4a When the plurality of protective covers 2 include a first protective cover 21 and a second protective cover 22, a first sealing member 41 is disposed between the first protective cover 21 and the second protective cover 22. The second protective cover 22 includes a second barb 226, and the second barb 226 extends downward from the front end of the top wall 221 of the second protective cover 22. Figure 4a In the example shown, the substrate processing device is configured as follows: when the first protective cover 21 and the second protective cover 22 are both moved to the raised position or the lowered position, in the vertical direction, the lower edge of the second barb 226 is not higher than the upper edge of the top wall 211 of the first protective cover 21, so as to prevent the chemical solution from entering the gap between the first protective cover 21 and the second protective cover 22.

[0047] In some embodiments, reference Figure 4b When the plurality of protective covers 2 include a first protective cover 21, a second protective cover 22 and a third protective cover 23, a first sealing member 41 is provided between the first protective cover 21 and the second protective cover 22, and a second sealing member 42 is provided between the second protective cover 22 and the third protective cover 23. The second protective cover 22 includes a second barb 226, and the third protective cover 23 includes a third barb 236. The second barb 226 extends downward from the front end of the top wall 221 of the second protective cover 22, and the third barb 236 extends downward from the front end of the top wall 231 of the third protective cover 23. Figure 4bIn the example shown, the substrate processing device is configured as follows: when the first protective cover 21 and the second protective cover 22 are both moved to the ascending position or the descending position, in the vertical direction, the lower edge of the second barb 226 is not higher than the upper edge of the top wall 211 of the first protective cover 21, so as to prevent the chemical liquid from entering the gap between the first protective cover 21 and the second protective cover 22; and when the second protective cover 22 and the third protective cover 23 are both moved to the ascending position or the descending position, in the vertical direction, the lower edge of the third barb 236 is not higher than the upper edge of the top wall 221 of the second protective cover 22, so as to prevent the chemical liquid from entering the gap between the second protective cover 22 and the third protective cover 23. Figure 4c In the example shown, the second barb 226 further extends upward from the front end of the top wall 221 of the second protective cover 22, that is, the second barb 226 extends upward and downward from the front end of the top wall 221, respectively. Figure 4c The lower edge of the third barb 236 is not higher than the upper edge of the second barb 226, which can prevent the liquid from entering the gap between the second protective cover 22 and the third protective cover 23. It should be noted that during the lifting process of the protective cover 2, it should be ensured that Figure 4c The upper edge of the second barb 226 shown will not collide with the third protective cover 23. In other embodiments, when the second barb 226 extends upward and downward from the front end of the top wall 221, the second barb 226 can also prevent the liquid medicine from entering the gap between the second protective cover 22 and the third protective cover 23, so the third barb 236 can be omitted. Figure 4d .

[0048] In this embodiment, when the first protective cover 21 and the second protective cover 22 are close to each other, the second barb 226 can partially or completely block the entrance to the gap between the first protective cover 21 and the second protective cover 22. When the second protective cover 22 and the third protective cover 23 are close to each other, the third barb 236 can partially or completely block the entrance to the gap between the second protective cover 22 and the third protective cover 23. The basic idea of ​​this embodiment is to improve the problem of liquid leakage by providing a seal and a barb extending downward, wherein the barb and the barb design parameters can be designed as needed without changing the basic idea.

[0049] exist Figures 1 to 3 In the illustrated example, the second barb 226 and the third barb 236 extend vertically downward, and the angle between the extending direction of the second barb 226 and the third barb 236 and the vertical downward direction is zero.

[0050] Figure 5a and Figure 5b This is a schematic diagram of the structure of a protective cover according to Example 1 of the present application.

[0051] exist Figure 5aIn the example shown, the second barb 226 and the third barb 236 extend toward the axis of the substrate holding mechanism 1 , and the extension directions of the second barb 226 and the third barb 236 form a first predetermined angle with the vertical downward direction, and the range of the first predetermined angle α is 0°<α≤60°.

[0052] exist Figure 5b In the example shown, the second barb 226 and the third barb 236 extend away from the axis of the substrate holding mechanism 1 , and the extension directions of the second barb 226 and the third barb 236 form a first predetermined angle with the vertical downward direction, and the range of the first predetermined angle α is 0°<α≤45°.

[0053] The design parameters of the second barb 226 and the third barb 236 need to meet the requirements of preventing the intrusion of liquid medicine and avoiding interference when the protective covers 2 are raised or lowered.

[0054] In addition, refer to Figure 6 , Figure 6 It is a partial structural diagram of multiple protective covers of the present application embodiment 1. The aforementioned seal (such as the second seal 42) can also be arranged between the second barb 226 and the third barb 236, which also plays the role of preventing liquid from flowing out.

[0055] In some embodiments, reference Figures 1 to 3 The substrate processing device further includes a liquid receiving tray 5, which is fixed to the outer periphery of the substrate holding mechanism 1, and specifically, the liquid receiving tray 5 is fixed to the base 13. The liquid receiving tray 5 includes a liquid discharge port and a liquid discharge pipe 51, and the liquid discharge pipe 51 is connected to the liquid discharge port for draining the liquid in the liquid receiving tray 5.

[0056] In some embodiments, reference Figures 1 to 3 The substrate processing device further includes a barrier 60, which is disposed between the front end of the top wall 211 of the first protective cover 21 and the upper end of the liquid receiving tray 5. The substrate processing device is further configured such that when the first protective cover 21 is in the descending position, the front end of the top wall 211 of the first protective cover 21 and the upper end of the liquid receiving tray 5 are both in contact with the barrier 60, so as to prevent splashing liquid and water vapor from entering the gap between the first protective cover 21 and the liquid receiving tray 5. In this embodiment, the barrier 60 can be the same as the sealing member 4 described above, for example, a sealing ring.

[0057] In some embodiments, reference Figures 1 to 3The first protective cover 21 includes a first barb 216, and the first barb 216 extends downward from the front end of the top wall 211 of the first protective cover 21. The substrate processing device is further configured such that when the first protective cover 21 is in the descending position, the first barb 216 is tightly engaged with the upper end of the liquid receiving tray 5 to prevent the splashed liquid from entering the first collecting tank 214 when the second protective cover 22 or the third protective cover 23 receives the liquid, so that the purity of the liquid collected in the first collecting tank 214 meets the requirements of recycling, thereby reducing the cost of the liquid.

[0058] The design principle of the first barb 216 is similar to that of the second barb 226 and the third barb 236. The design parameters of the first barb 216 need to meet the requirements of preventing the intrusion of the liquid and avoiding the interference between the first protective cover 21 and the liquid receiving tray 5 when the first protective cover 21 is raised or lowered. Figure 6 As shown, the first sealing member 41 may also be disposed between the first barb 216 and the second barb 226 to also prevent liquid from leaking out.

[0059] For example, in a substrate processing process, the first protective cover 21 may be used to receive and recycle HF / HNO3 (a mixed solution of hydrofluoric acid and nitric acid), and the second protective cover 22 may be used to receive and recycle HF (hydrofluoric acid). Figure 1 When the first protective cover 21 receives the HF / HNO3 solution, if the HF / HNO3 solution splashes, the HF / HNO3 solution will be blocked on the outside of the hook 226 of the second protective cover 22 and the outside of the first seal 41, and will basically not penetrate into the gap between the first protective cover 21 and the second protective cover 22 to affect the purity of the subsequent HF solution. Otherwise, if the HF / HNO3 solution penetrates into the gap between the first protective cover 21 and the second protective cover 22, it will be mixed with the HF solution in the second collecting tank 224, resulting in a small amount of HNO3 solution in the recovered HF solution. After the HF solution finishes etching the oxide layer (Oxide) on the substrate 10, the HF / HNO3 solution will undergo unnecessary chemical reactions with the silicon substrate of the substrate 10, destroying the silicon substrate and causing a significant adverse effect on the subsequent process.

[0060] In some embodiments, reference Figures 1 to 3 The substrate processing device further includes a nozzle 7 and a recovery unit 8. The nozzle 7 is used to supply liquid medicine to the substrate 10. The recovery unit 8 connects the nozzle 7 and the collecting tanks 214, 224, and 234 of the plurality of protective covers 2, and is used to independently recover the liquid medicine discharged from each collecting tank 214, 224, and 234, and supply the corresponding liquid medicine to the nozzle 7. The nozzle 7 can supply different liquid medicines to the substrate 10, and the nozzle 7 can be implemented in a known manner, so the detailed description of the nozzle 7 is omitted.

[0061] The recovery unit 8 is, for example, a chemical distribution system (CDS). The first collecting tank 214, the second collecting tank 224, and the third collecting tank 234 are respectively connected to the recovery unit 8 to recover the liquid medicine. A first control valve 28 is provided between the three collecting tanks 214, 224, 234 and the recovery unit 8. The first control valve 28 can be an electric valve or a manual valve. The recovery unit 8 includes a plurality of liquid storage tanks (not shown) for independently recovering the liquid medicine discharged from each of the collecting tanks 214, 224, 234. When the three collecting tanks 214, 224, 234 respectively recover different liquid medicines, the different liquid medicines are recovered to different liquid storage tanks.

[0062] The first collecting tank 214, the second collecting tank 224 and the third collecting tank 234 are also connected to the plant system 9 respectively to directly discharge the received waste liquid. A second control valve 29 is provided between each collecting tank 214, 224, 234 and the plant system 9, and the second control valve 29 can be an electric valve or a manual valve. The liquid receiving tray 5 is connected to the plant system 9. When the first protective cover 21, the second protective cover 22 and the third protective cover 23 receive the corresponding liquid medicine respectively, part of the liquid medicine will flow into the liquid receiving tray 5. Therefore, the mixed liquid medicine in the liquid receiving tray 5 is treated as waste liquid, and the waste liquid is directly discharged to the plant system 9 through the drain port and the drain pipe 51. In the embodiment of the present application, each protective cover 2 can choose to recycle or directly discharge the received liquid medicine, which is specifically set according to the process requirements.

[0063] Embodiment 2:

[0064] Figures 7 to 9 This is a schematic diagram of the structure of the substrate processing device of Example 2 of the present application.

[0065] refer to Figures 7 to 9 Compared with the embodiment 1, the difference between the embodiment 2 and the embodiment 1 is that the plurality of protective covers 2 include a first protective cover 21, a second protective cover 22 and a third protective cover 23, the first protective cover 21 includes a first barb 216', and the first barb 216' extends upward from the front end of the top wall 211 of the first protective cover 21, and the second protective cover 22 includes a second barb 226', and the second barb 226' extends upward from the front end of the top wall 221 of the second protective cover 22. Figures 7 to 9 In the example shown, the substrate processing device is configured as follows: when the first protective cover 21 and the second protective cover 22 are both moved to an ascending position or a descending position, in the vertical direction, the upper edge of the first barb 216' is not lower than the upper edge of the top wall 221 of the second protective cover 22, and when the second protective cover 22 and the third protective cover 23 are both moved to the ascending position or the descending position, in the vertical direction, the upper edge of the second barb 226' is not lower than the upper edge of the top wall 231 of the third protective cover 23.

[0066] refer to Figure 7 When the first protective cover 21 is in the raised position to receive the liquid medicine thrown off the substrate 10, the first barb 216' can block the splashing liquid medicine to prevent the splashing liquid medicine from entering the gap between the first protective cover 21 and the second protective cover 22 and flowing into the second collecting tank 224. At the same time, the second barb 226' also blocks the splashing liquid medicine to prevent the splashing liquid medicine from entering the gap between the second protective cover 22 and the third protective cover 23 and flowing into the third collecting tank 234. Figure 8 When the second protective cover 22 is in the raised position to receive the liquid medicine thrown off the substrate 10 , the second barb 226 ′ blocks the splashing liquid medicine to prevent the splashing liquid medicine from entering the gap between the second protective cover 22 and the third protective cover 23 and flowing into the third collecting tank 234 .

[0067] In addition, in this embodiment, reference Figure 7 When the first protective cover 21 is in the ascending position, the first barb 216' only extends upward, and the structure of the first barb 216' itself will not reduce the maximum vertical distance h between the front end of the top wall 211 of the first protective cover 21 and the substrate 10. When the liquid medicine on the substrate 10 is thrown toward the first protective cover 21, the liquid medicine between the first protective cover 21 and the substrate 10 will not splash back onto the surface of the substrate 10 due to the first barb 216'. Similarly, Figure 8 The second barbs 226' shown only extend upward, and the liquid medicine between the second protective cover 22 and the substrate 10 may not splash back onto the surface of the substrate 10 due to the second barbs 226'. Therefore, the substrate processing device of this embodiment can prevent liquid from spilling out, and will not reduce the vertical distance between each protective cover 2 and the substrate 10, which is conducive to the protective cover 2 receiving liquid medicine. In this embodiment, because the third protective cover 23 of the outermost circle can prevent splashing liquid medicine from spilling into the second protective cover 22 through the second barbs 226', the third protective cover 23 of the outermost circle may not include the third barbs extending upward.

[0068] Fig.10 This is a partial structural schematic diagram of a configuration method of multiple protective covers in Example 2 of the present application.

[0069] In some embodiments, reference Fig.10 When the plurality of protective covers 2 include a first protective cover 21, a second protective cover 22 and a third protective cover 23, the first protective cover 21 includes a first barb 216', the second protective cover 22 includes a second barb 226', and the second barb 226' can extend upward and downward from the front end of the top wall 221 of the second protective cover 22, respectively. In this case, Fig.10 The upper edge of the first barb 216' is not lower than the lower edge of the second barb 226', and can at least prevent the liquid medicine from entering the gap between the first protective cover 21 and the second protective cover 22. It should be noted that during the lifting and lowering of the protective cover 2, it should be ensured that Fig.10 The lower edge of the second barb 226 ′ shown will not collide with the first protective cover 21 .

[0070] In some embodiments, reference Figures 7 to 9 The included angles between the extension directions of the first barb 216' and the second barb 226' and the vertical upward direction are zero.

[0071] Fig.11a and Fig.11b This is a schematic diagram of the structure of a protective cover according to Example 2 of the present application.

[0072] exist Fig.11a In the example shown, the first barb 216' and the second barb 226' extend toward the axis of the substrate holding mechanism 1, and the extension directions of the first barb 216' and the second barb 226' respectively form a second predetermined angle with the vertical upward direction, and the range of the second predetermined angle α' is 0°<α'≤60°.

[0073] exist Fig.11b In the example shown, the first barb 216' and the second barb 226' extend away from the axis of the substrate holding mechanism 1, and the extension directions of the first barb 216' and the second barb 226' respectively form a second predetermined angle with the vertical upward direction, and the range of the second predetermined angle α' is 0°<α'≤45°.

[0074] The design of the first barb 216 ′ and the second barb 226 ′ should not only meet the requirement of preventing the intrusion of liquid medicine, but also avoid interference when the protective covers 2 are raised or lowered.

[0075] In some embodiments, the substrate processing apparatus is further configured such that when the first protective cover 21 and the second protective cover 22 are both in the raised position or the lowered position, the upper edge of the first barb 216' is higher than the upper edge of the second barb 226'. Fig. 9As shown in the example, when the third protective cover 23 is in the ascending position to receive the liquid medicine thrown from the substrate 10, the first protective cover 21 and the second protective cover 22 are both in the descending position. Because the upper edge of the first barb 216' is higher than the upper edge of the second barb 226', when the liquid medicine on the substrate 10 is thrown toward the third protective cover 23, the height of the first barb 216' can block some liquid medicine from entering the gap between the first protective cover 21 and the second protective cover 22, thereby reducing the liquid medicine falling into the gap. It should be noted that when the substrate processing device is working, if there are more than two protective covers 2 in the descending position at the same time, then preferably, the upper edges of the barbs of the more than two protective covers 2 (including the upper edges of the first barb 216' and the second barb 226') are gradually lowered from the inside to the outside in the radial direction of the substrate 10. Compared with the upper edges of multiple barbs being flush, this is more in line with the landing path of the liquid medicine, thereby reducing the liquid medicine falling into the gap between adjacent protective covers 2. Therefore, in this embodiment, by providing the first barb 216' and the second barb 226' extending upward, it is possible to prevent liquid from leaking when the first protective cover 21 and the second protective cover 22 are in the same ascending position, and to reduce the amount of liquid that falls into the gap between the first protective cover 21 and the second protective cover 22 when the first protective cover 21 and the second protective cover 22 are in the same descending position.

[0076] In some embodiments, the sealing member 4 in embodiment 1 is disposed between each protective cover 2. In other embodiments, the sealing member 4 is not disposed between each protective cover 2.

[0077] In some embodiments, the plurality of protective covers 2 include two, namely, a first protective cover 21 and a second protective cover 22. The first protective cover 21 and the second protective cover 22 are radially arranged around the substrate holding mechanism in sequence from the inside to the outside, and are used to independently receive the liquid thrown off the substrate 10. The first protective cover 21 includes a first barb 216', and the first barb 216' extends upward from the front end of the top wall 211 of the first protective cover 21. Since the second protective cover 22 belongs to the outermost circle, the barb extending upward may not be provided. Fig.12 In the example shown, when the first protective cover 21 and the second protective cover 22 are moved to the raised position or the lowered position, in the vertical direction, the upper edge of the first barb 216' is not lower than the upper edge of the top wall 221 of the second protective cover 22, so as to block the entrance of the gap between the first protective cover 21 and the second protective cover 22 to prevent splashing liquid from entering.

[0078] In this embodiment, when the first protective cover 21 and the second protective cover 22 are close to each other, the first barb 216' can partially or completely block the entrance to the gap between the first protective cover 21 and the second protective cover 22. When the second protective cover 22 and the third protective cover 23 are close to each other, the second barb 226' can partially or completely block the entrance to the gap between the second protective cover 22 and the third protective cover 23. The basic idea of ​​this embodiment is to improve the problem of liquid leakage by providing a barb extending upward. Without changing this basic idea, the barb and the barb design parameters can be designed as needed.

[0079] In the present application, the number of protective covers 2 can be increased according to actual process requirements, and the types of chemical solutions can also be more, so as to adapt to more complex and advanced substrate processing processes.

[0080] As mentioned above, although the Example of this application was described, this application is not limited to the said Example, Unless it deviates from the summary, various changes can be made.

[0081] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A substrate processing device, characterized in that: include: A substrate holding mechanism, used for holding the substrate; A plurality of protective covers are radially arranged around the substrate holding mechanism in sequence and are used to independently receive the liquid medicine thrown off the substrate; A plurality of lifting mechanisms, used for driving the plurality of protective covers to rise and fall to a rising position or a falling position respectively; A plurality of sealing members are respectively arranged between adjacent protective covers; The substrate processing device is configured such that when two adjacent protective covers are in the ascending position or the descending position, the two adjacent protective covers are in contact with the corresponding sealing members, so that the two adjacent protective covers are in a closed state.

2. The substrate processing device according to claim 1, characterized in that: The plurality of protective covers include: A first protective cover and a second protective cover are radially arranged around the substrate holding mechanism in sequence from the inside to the outside; The plurality of seals includes a first seal disposed between the first protective cover and the second protective cover.

3. The substrate processing device according to claim 2, characterized in that: The second protective cover includes a second barb extending downward from a front end of a top wall of the second protective cover.

4. The substrate processing device according to claim 3, characterized in that: The plurality of protective covers also include: A third protective cover, arranged around the outer periphery of the second protective cover; The plurality of seals also includes a second seal disposed between the second protective cover and the third protective cover.

5. The substrate processing device according to claim 4, characterized in that: The third protective cover includes a third barb extending downward from a front end of a top wall of the third protective cover.

6. The substrate processing device according to claim 4 or 5, characterized in that: The second barb further extends upward from the front end of the top wall of the second protective cover.

7. The substrate processing apparatus according to claim 5, characterized in that: The included angle between the extension direction of the second barb and the third barb and the vertical downward direction is zero.

8. The substrate processing device according to claim 5, characterized in that: The second barb and the third barb extend toward the axis of the substrate holding mechanism, and the extension directions of the second barb and the third barb form a first predetermined angle with the vertical downward direction, and the range of the first predetermined angle α is 0°<α≤60°; or, The second barb and the third barb extend away from the axis of the substrate holding mechanism, and the extension directions of the second barb and the third barb form a first predetermined angle with the vertical downward direction, and the range of the first predetermined angle α is 0°<α≤45°.

9. The substrate processing apparatus according to claim 1, wherein: Also includes: The liquid receiving tray is fixed to the outer periphery of the substrate holding mechanism, and the liquid receiving tray comprises a liquid discharge port and a liquid discharge pipe, wherein the liquid discharge pipe is communicated with the liquid discharge port and is used for discharging the liquid in the liquid receiving tray.

10. The substrate processing apparatus according to claim 9, wherein: The plurality of protective covers include a first protective cover that is closest to the liquid receiving tray, and the substrate processing device further includes: A barrier member, disposed between the front end of the top wall of the first protective cover and the upper end of the liquid receiving tray; The substrate processing apparatus is further configured such that: when the first protective cover is located at the descending position, the top wall of the first protective cover and the upper end of the liquid receiving tray are both in contact with the blocking member.

11. The substrate processing apparatus according to claim 10, wherein: The first protective cover includes a first barb, and the first barb extends downward from the front end of the top wall of the first protective cover; The substrate processing device is further configured such that when the first protective cover is located at the descending position, the first barb is tightly engaged with the upper end of the liquid receiving tray.

12. The substrate processing apparatus according to claim 2, wherein: The first protective cover includes a first barb extending upward from a front end of a top wall of the first protective cover.

13. The substrate processing apparatus according to claim 12, wherein: The plurality of protective covers also include: A third protective cover, arranged around the outer periphery of the second protective cover; The plurality of seals also includes a second seal disposed between the second protective cover and the third protective cover.

14. The substrate processing apparatus according to claim 13, wherein: The second protective cover includes a second barb extending upward from a front end of a top wall of the second protective cover.

15. The substrate processing apparatus according to claim 14, wherein: The second barb further extends downward from the front end of the top wall of the second protective cover.

16. The substrate processing apparatus according to claim 14, wherein: The included angles between the extending directions of the first barb and the second barb and the vertical upward direction are zero angles.

17. The substrate processing apparatus according to claim 14, wherein: The first barb and the second barb extend toward the axis of the substrate holding mechanism, and the extension directions of the first barb and the second barb respectively form a second predetermined angle with the vertical upward direction, and the range of the second predetermined angle α' is 0°<α'≤60°; or, the first barb and the second barb extend away from the axis of the substrate holding mechanism, and the extension directions of the first barb and the second barb respectively form a second predetermined angle with the vertical upward direction, and the range of the second predetermined angle α' is 0°<α'≤45°.

18. The substrate processing apparatus according to claim 14, wherein: The substrate processing apparatus is configured such that when the first protective cover and the second protective cover are both located at the ascending position or the descending position, an upper edge of the first barb is higher than an upper edge of the second barb.

19. The substrate processing apparatus according to claim 1, wherein: The plurality of protective covers are respectively provided with a collection tank; The substrate processing device further comprises: A nozzle for supplying a liquid medicine to the substrate; A recovery unit is connected to the collecting tank of the nozzle and the plurality of protective covers, wherein the recovery unit includes a plurality of liquid storage tanks, and the plurality of liquid storage tanks are used to independently recover the liquid medicine discharged from each of the collecting tanks and supply the corresponding liquid medicine to the nozzle.

20. A substrate processing device, characterized in that: include: A substrate holding mechanism, used for holding the substrate; A plurality of protective covers, including a first protective cover and a second protective cover, wherein the first protective cover and the second protective cover are radially arranged around the substrate holding mechanism in sequence from the inside to the outside, and are used to independently receive the liquid thrown off the substrate, and the first protective cover includes a first barb, and the first barb extends upward from the front end of the top wall of the first protective cover.

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