Resonator

Abstract

The invention provides a resonator which comprises a vibration plate, a first electrode and a second electrode. The vibration plate is provided with a first surface and a second surface which are opposite to each other, the first electrode is arranged on the first surface, and the second electrode is arranged on the second surface. At least one of the first electrode and the second electrode is provided with a plurality of openings, the openings are distributed in pairs, each pair of openings is symmetrically distributed relative to the geometric center of the corresponding electrode, and all the openings are not in contact with the edge of the corresponding electrode.

Description

Technical Field

[0001] The present invention relates to an electronic component, and in particular to a resonator. Background Art

[0002] A resonator is an electronic component that utilizes the piezoelectric properties of a material and the natural resonant frequency of the material, and quartz crystal is a common piezoelectric material used for resonators. In existing resonators, electrodes are provided on both sides of the piezoelectric material. When a voltage difference is applied between the two electrodes, the piezoelectric material deforms due to the inverse piezoelectric effect. When the voltage difference is removed, the piezoelectric material continues to vibrate, and due to the piezoelectric effect, a voltage change is generated between the two electrodes as the vibration occurs, so that the two electrodes can output a voltage signal.

[0003] Due to physical limitations, the adjacent frequencies of the main wave of piezoelectric material vibration (such as thickness shear vibration mode) are often accompanied by side waves such as bending vibration and surface shear vibration, i.e., unwanted modes. If the difference between the frequency of the side wave and the frequency of the main wave is too small, the side wave will couple with the main wave, thus affecting the product characteristics, especially in applications with a wide operating temperature range such as automotive applications or even miniaturized automotive applications, where side waves are a thorny problem. Summary of the invention

[0004] The present invention is directed to a resonator which can effectively suppress side waves.

[0005] One embodiment of the present invention provides a resonator, including a vibration plate, a first electrode and a second electrode. The vibration plate has a first surface and a second surface opposite to each other, the first electrode is disposed on the first surface, and the second electrode is disposed on the second surface. At least one of the first electrode and the second electrode has a plurality of openings, the openings are distributed in pairs, each pair of openings is symmetrically distributed relative to the geometric center of the corresponding electrode, and all the openings do not contact the edge of the corresponding electrode.

[0006] In the resonator of the embodiment of the present invention, at least one of the first electrode and the second electrode has a plurality of openings, the openings are distributed in pairs, each pair of openings is symmetrically distributed relative to the geometric center of the corresponding electrode, and all the openings do not contact the edge of the corresponding electrode. Therefore, the resonator of the embodiment of the present invention can effectively suppress the side wave. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] Figure 1A FIG. 4 is a cross-sectional schematic diagram of a resonator according to an embodiment of the present invention.

[0008] Figure 1B for Figure 1A A three-dimensional schematic diagram of the vibration plate, the first electrode and the adhesive.

[0009] FIG. 2A to FIG. 2D Schematic top views of the vibration plates and the first electrodes according to another fourth embodiment of the present invention.

[0010] FIG. 3A to FIG. 3E Schematic top view of a vibration plate and a first electrode according to another fifth embodiment of the present invention.

[0011] Figure 4 It is a three-dimensional schematic diagram of a vibration plate, a first electrode and an adhesive according to another embodiment of the present invention. DETAILED DESCRIPTION

[0012] Reference will now be made in detail to exemplary embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Whenever possible, the same reference numerals are used in the drawings and the description to refer to the same or like parts.

[0013] Figure 1A is a cross-sectional schematic diagram of a resonator according to an embodiment of the present invention, and Figure 1B for Figure 1A A three-dimensional schematic diagram of a vibration plate, a first electrode and an adhesive, wherein Figure 1A The cross section of the vibration plate, the first electrode and the second electrode is along Figure 1B Please refer to the section cut along line II. Figure 1A and Figure 1B The resonator 100 of the present embodiment includes a vibration plate 110, a first electrode 120, and a second electrode 130. The vibration plate 110 has a first surface 112 and a second surface 114 opposite to each other, the first electrode 120 is disposed on the first surface 112, and the second electrode 130 is disposed on the second surface 114. In the present embodiment, the material of the vibration plate 110 is a piezoelectric material. For example, the vibration plate 110 is a quartz plate. In addition, the first electrode 120 and the second electrode 130 are each an electrode layer.

[0014] The first electrode 120 and the second electrode 130 are suitable for being applied with a voltage difference. When there is a voltage difference between the first electrode 120 and the second electrode 130, the vibration plate 110 will be deformed due to the inverse piezoelectric effect. Then, when the voltage difference is removed, the vibration plate 110 will continue to vibrate, and due to the piezoelectric effect, a voltage change will be generated between the first electrode 120 and the second electrode 130 along with the vibration, so that the first electrode 120 and the second electrode 130 can output a voltage signal.

[0015] In the resonator 100 of the present embodiment, at least one of the first electrode 120 and the second electrode 130 has a plurality of openings 140 ( Figure 1ATake the example that both the first electrode 120 and the second electrode 130 have a plurality of openings 140, the openings 140 of the first electrode 120 expose a portion of the first surface 112 of the vibration plate 110, and the openings 140 of the second electrode 130 expose the second surface 114 of the vibration plate 110. These openings 140 are distributed in pairs, each pair of openings 140 is symmetrically distributed relative to the geometric center C1 of the electrode to which they belong, and all these openings 140 do not contact the edge of the electrode to which they belong. In this embodiment, the area of ​​these openings 140 accounts for less than or equal to 30% of the area of ​​the electrode to which they belong, the distance D1 between the geometric center C2 of each opening 140 and the geometric center C1 of the electrode to which they belong is greater than or equal to the spacing I1 between the first electrode 120 and the second electrode 130 (that is, the thickness of the main vibration area of ​​the vibration plate 110), and the distance D2 between each opening 140 and the edge of the electrode to which they belong is greater than or equal to the spacing I1 between the first electrode 120 and the second electrode 130. Therefore, the resonator 100 of this embodiment can effectively suppress side waves. When the area of ​​these openings 140 accounts for less than or equal to 30% of the area of ​​the electrode to which they belong, the side wave vibration (such as bending vibration, surface shear vibration and other unwanted vibration modes) can be effectively suppressed without destroying the vibration of the main wave (i.e., the thickness shear vibration mode). In addition, the electrode of the resonator 100 of this embodiment has an even number of openings 140 that penetrate the electrode and are not connected to each other, so the side wave can be effectively suppressed. In addition, when the distance D1 between the geometric center C2 of each opening 140 and the geometric center C1 of the electrode to which it belongs is greater than or equal to the spacing I1 between the first electrode 120 and the second electrode 130 (i.e., the thickness of the main vibration area of ​​the vibration plate 110), and the distance D2 between each opening 140 and the edge of the electrode to which it belongs is greater than or equal to the spacing I1 between the first electrode 120 and the second electrode 130, the main vibration area of ​​the vibration plate 110 can be reduced by the influence of the opening, thereby increasing the vibration intensity of the thickness shear vibration mode, and effectively suppressing the side wave. In one embodiment, the distance D1 between the geometric center C2 of each opening 140 and the geometric center C1 of the corresponding electrode is greater than or equal to 5 times the distance I1 between the first electrode 120 and the second electrode 130 (ie, the thickness of the main vibration area of ​​the vibration plate 110 ).

[0016] In this embodiment, the distances D1 from the geometric centers C2 of the two openings 140 in each pair of openings 140 or the geometric centers C2 of all the openings 140 to the geometric centers C1 of the electrodes to which they belong are the same, so that the vibration intensity of the thickness shear vibration mode can be increased. In addition, in this embodiment, the openings 140 are not connected to each other.

[0017] In this embodiment, both the first electrode 120 and the second electrode 130 have the openings 140, and the shape and position of the openings 140 of the first electrode 120 correspond to the shape and position of the openings 140 of the second electrode 130. However, in other embodiments, one of the first electrode 120 and the second electrode 130 may have the openings 140, while the other of the first electrode 120 and the second electrode 130 may not have the openings 140.

[0018] In this embodiment, the resonator 100 further includes a base 150 and at least one adhesive 160 ( Figure 1B The vibration plate 110 is disposed on the base 150, for example, by fixing the base 150 with the adhesive 160. In the present embodiment, the base 150 has a recess 152, and the vibration plate 110 is disposed in the recess 152. In addition, in the present embodiment, the resonator 100 further includes an upper cover 170, which is disposed on the base 150 and covers the vibration plate 110. In the present embodiment, the upper cover 170 can be disposed on the base 150 by a seal ring 180.

[0019] In this embodiment, the resonator 100 further includes a plurality of pads 190 disposed below the base 150, wherein the pads 190 can be electrically connected to the first electrode 120 and the second electrode 130 respectively through the conductive adhesive 160 and the conductive trace 195. In this way, an external voltage can be applied to the pads 190, and the output voltage changes of the pads 190 can be sensed.

[0020] In this embodiment, each opening 140 has at least one linear long side S1 ( Figure 1B Taking a linear long side S1 as an example), it can make the vibration boundary flat to improve the vibration intensity of the thickness shear vibration mode. In this embodiment, these openings 140 are symmetrically distributed with the geometric center C1 of the electrode to which they belong as the symmetry point. At least two linear long sides S1 ( Figure 1B Taking two linearly opposite long sides S1 as an example), any two symmetrical openings 140 are parallel to each other and their linear long sides S1 are opposite to each other. Such a design can further suppress the side wave. In this embodiment, each opening 140 does not contact the edge of the electrode to which it belongs, that is, the opening 140 is at a distance D2 from the edge of the electrode to which it belongs. Such a design can reduce the loss of vibration energy and maintain the vibration intensity of the thickness shear vibration mode.

[0021] In this embodiment, any two symmetrical openings 140 are located at two opposite sides of the corresponding electrode. Figure 1B The example is that four openings 140 are located at four sides of the corresponding electrode. In addition, in this embodiment, each opening 140 is a quadrilateral opening. Figure 1B The trapezoidal opening is taken as an example, but in other embodiments, it may also be a rectangle or other shapes.

[0022] FIG. 2A to FIG. 2D This is a top view schematic diagram of the vibration plate and the first electrode of another fourth embodiment of the present invention. Figure 2A and Figure 2B In these two embodiments, the opening 140a and the opening 140b are rectangular, but the opening 140a and the opening 140b are arranged on two opposite sides of the corresponding electrode (the first electrode 120 is taken as an example in the figure). Figure 2C In this embodiment, any two symmetrical openings 140c are respectively located at two opposite corners of the corresponding electrode (the first electrode 120 is taken as an example in the figure), and Figure 2C Take the example that the four openings 140c are located at the four corners of the corresponding electrode. Figure 2A Each opening 140a has two linear long sides S1, and the two ends of the two linear long sides S1 are respectively connected by a straight line side S2. Figure 2D In this embodiment, each opening 140i has two linear long sides S1, and two ends of the two linear long sides S1 are respectively connected by an arc side S3.

[0023] FIG. 3A to FIG. 3E FIG. 1 is a top view schematic diagram of a vibration plate and a first electrode according to another fifth embodiment of the present invention. FIG. 3A to FIG. 3D In this embodiment, the other side of each opening 140d, 140e, 140f, 140g relative to the linear long side S1 has at least one rounded corner R1 (two rounded corners R1 are used as an example in the figure), wherein Figure 3A In the embodiment, the four openings 140d are respectively located at the four sides of the corresponding electrode (such as the first electrode 120). Figure 3B and Figure 3C In the embodiment, the opening 140e and the opening 140f are arranged on two opposite sides of the corresponding electrode (the first electrode 120 is taken as an example in the figure). Figure 3D In the figure, the four openings 140g are located at the four corners of the corresponding electrode. Figure 3E In the present embodiment, each opening 140 j has a linear long side S1 and an arc side S4 , and the linear long side S1 and the arc side S4 are respectively located at two opposite sides of the opening 140 j .

[0024] Figure 4 This is a three-dimensional schematic diagram of a vibration plate, a first electrode and an adhesive according to another embodiment of the present invention. Figure 4 , the resonator of this embodiment is Figure 1A and Figure 1BThe resonator 100 of the present embodiment is similar to the resonator 100 of the present embodiment, but the difference between the two is that the vibration plate 110h of the resonator of the present embodiment has a depression 111 on each of the upper and lower sides (while Figure 4 The depression 111 located on the upper side is shown as an example), and the first electrode 120 and the second electrode (located on the lower side blocked by the vibration plate 110h) are respectively located in the two depressions. The present invention does not limit the form of the vibration plate, and the vibration plate can be as follows Figure 1B Tablets, such as Figure 4 The vibration plate 110h or a vibration plate of other shapes.

[0025] In summary, in the resonator of the embodiment of the present invention, at least one of the first electrode and the second electrode has a plurality of openings, the openings are distributed in pairs, each pair of openings is symmetrically distributed relative to the geometric center of the corresponding electrode, and all the openings do not contact the edge of the corresponding electrode. Therefore, the resonator of the embodiment of the present invention can effectively suppress the side wave.

[0026] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A resonator, characterized in that: include: A vibration plate having a first surface and a second surface opposite to each other; A first electrode, disposed on the first surface; as well as The second electrode is configured on the second surface, wherein at least one of the first electrode and the second electrode has a plurality of openings, the plurality of openings are distributed in pairs, each pair of openings is symmetrically distributed relative to the geometric center of the electrode to which they belong, and all of the plurality of openings do not contact the edge of the electrode to which they belong.

2. The resonator according to claim 1, characterized in that The distances from the geometric centers of the two openings in each pair of openings or the geometric centers of all the openings to the geometric centers of the electrodes to which they belong are the same.

3. The resonator according to claim 1, characterized in that The plurality of openings are not connected to each other.

4. The resonator according to claim 1, characterized in that The distance between the geometric center of each opening and the geometric center of the corresponding electrode is greater than or equal to the distance between the first electrode and the second electrode.

5. The resonator according to claim 1, characterized in that Each opening has at least one linear long side.

6. The resonator according to claim 5, characterized in that Each opening has two linear long sides, and two ends of the two linear long sides are respectively connected by arc sides or straight sides.

7. The resonator according to claim 5, characterized in that Each opening has a linear long side and an arc side, and the linear long side and the arc side are respectively located at two opposite sides of the opening.

8. The resonator according to claim 1, characterized in that The ratio of the area of ​​the plurality of openings to the area of ​​the corresponding electrodes is less than or equal to 30%.

9. The resonator according to claim 5, characterized in that The plurality of openings are symmetrically distributed with the geometric center of the corresponding electrode as a symmetrical point, at least two linear long sides of any two symmetrical openings are parallel to each other, and the linear long sides of any two symmetrical openings are opposite to each other.

10. The resonator according to claim 9, characterized in that Any two symmetrical openings are located at two opposite sides of the electrode.

11. The resonator according to claim 9, characterized in that Any two symmetrical openings are respectively located beside two opposite corners of the electrode.

12. The resonator according to claim 5, characterized in that The other side of each opening opposite to the linear long side has at least one rounded corner.

13. The resonator according to claim 5, characterized in that Each opening is a quadrilateral opening.

14. The resonator according to claim 1, characterized in that The distance between each opening and the geometric center of the electrode to which it belongs is greater than or equal to 5 times the distance between the first electrode and the second electrode.

15. The resonator according to claim 1, characterized in that The first electrode and the second electrode both have the plurality of openings, and the shapes and positions of the plurality of openings of the first electrode correspond to the shapes and positions of the plurality of openings of the second electrode respectively.

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