Radio frequency power supply equipment and radio frequency power supply system

Abstract

The invention provides radio frequency power supply equipment and a radio frequency power supply system. The radio frequency power supply equipment comprises an input end, a radio frequency power amplifier circuit, a power adjusting unit and an output end which are connected in sequence. The input end is used for inputting a radio frequency signal. And the radio frequency power amplifier circuit is used for performing power amplification according to the radio frequency signal to obtain target radio frequency electric energy. The power adjusting unit is used for allowing at least part of the target radio frequency electric energy to pass through, so that the at least part of the target radio frequency electric energy is transmitted to the output end and output through the output end. Wherein the power regulation unit has an equivalent impedance value, and the proportion of at least part of radio frequency electric energy, passing through the power regulation unit, in the target radio frequency electric energy is related to the equivalent impedance value. The power value of the radio frequency electric energy output by the radio frequency power supply equipment can be flexibly adjusted.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a radio frequency power supply device and a radio frequency power supply system. Background Art

[0002] At present, with the development of radio frequency technology, the application of radio frequency power supply equipment is becoming more and more extensive. When applied to the semiconductor field, new requirements are put forward for the radio frequency power output by the equipment power supply equipment. When the current radio frequency power supply equipment outputs radio frequency power to the plasma load, it is necessary to adjust the power value of the radio frequency power in a timely and rapid manner according to the needs of the plasma load to obtain a better film forming effect. Therefore, how to flexibly adjust the power value of the radio frequency power output by the radio frequency power supply equipment has become an issue that needs to be considered. Summary of the invention

[0003] The present application provides a radio frequency power supply device and a radio frequency power supply system, which can flexibly adjust the power value of the radio frequency electric energy output by the radio frequency power supply device.

[0004] In a first aspect, a radio frequency power supply device is provided, the radio frequency power supply device comprising an input end, a radio frequency power amplifier circuit, a power regulating unit and an output end connected in sequence. The input end is used to input a radio frequency signal. The radio frequency power amplifier circuit is used to perform power amplification according to the radio frequency signal to obtain target radio frequency electrical energy. The power regulating unit is used to allow at least part of the radio frequency electrical energy of the target radio frequency electrical energy to pass through, so that at least part of the radio frequency electrical energy of the target radio frequency electrical energy is transmitted to the output end and output through the output end. The power regulating unit has an equivalent impedance value, and the proportion of at least part of the radio frequency electrical energy in the target radio frequency electrical energy that passes through the power regulating unit is related to the equivalent impedance value.

[0005] In a possible implementation, the RF power supply device further includes an adjustment control unit, which is connected to the power adjustment unit. The equivalent impedance value of the power adjustment unit is adjustable, and the adjustment control unit is used to adjust the equivalent impedance value, so that the proportion of at least part of the target RF power that passes through the power adjustment unit changes with the change of the equivalent impedance value.

[0006] In a possible implementation, when the equivalent impedance value of the power regulating unit increases, the proportion of at least a portion of the RF power that the power regulating unit allows to pass through accounts for the target RF power increases; when the equivalent impedance value of the power regulating unit decreases, the proportion of at least a portion of the RF power that the power regulating unit allows to pass through accounts for the target RF power decreases.

[0007] In a possible implementation, the power adjustment unit includes a first inductor and a first capacitor, wherein the first inductor is connected between the RF power amplifier circuit and the output terminal, and the first capacitor is connected between a connection point between the first inductor and the output terminal and ground. The equivalent impedance value is the sum of the inductance value of the first inductor and the capacitance value of the first capacitor, and the first capacitor is an adjustable capacitor, the adjustment control unit is connected to the first capacitor, and the adjustment control unit adjusts the capacitance value of the first capacitor to change the equivalent impedance value.

[0008] In a possible implementation, the RF power supply device further includes a DC source, which is connected to the RF power amplifier circuit. The DC source is used to output DC power, and the RF power amplifier circuit is used to periodically charge and discharge according to the RF signal under the power supply of the DC power to convert the DC power into the target RF power.

[0009] In a possible implementation, the RF power amplifier circuit includes an electric energy modulation module, which is connected to the input end and is connected to a connection point between the DC source and the power adjustment unit. The electric energy modulation module is used to periodically charge and discharge under the control of the RF signal to convert the DC power into the target RF power.

[0010] In a possible implementation, the power modulation module is connected between the connection point between the DC source and the power adjustment unit and a first potential point, and the first potential point is used to provide a first potential. The power modulation module has an adjustable first capacitance value and multiple connection states corresponding to multiple different first capacitance values. The power modulation module is in a corresponding connection state at least according to the first capacitance value, so that the power value of the radio frequency power obtained by the power modulation module periodically charging and discharging is a corresponding power value.

[0011] In a possible implementation, there are multiple power modulation modules, each of which is connected to the connection point between the DC source and the power regulating unit, and each of which is selectively connected to a first potential point, wherein each power modulation module can be in an on state or an off state, each of which is connected to the first potential point when in an on state, and is disconnected from the first potential point when in an off state, and the first potential point is used to provide a first potential. Each of which is used to periodically charge and discharge under the control of the RF signal when in an on state, so as to convert the DC power into RF power, wherein when at least two of the power modulation modules are in an on state, the RF power obtained by the power modulation modules in the on state is mixed in the power regulating unit to obtain the target RF power, wherein the power value of the target RF power changes according to the number of power modulation modules in the on state.

[0012] In a possible implementation, the RF power amplifier circuit further includes a choke module and a resonance module. The choke module is connected between the DC source and the resonance module, and is also connected to the power modulation module, and is used to allow only the DC power output by the DC source to pass through. The resonance module is connected between the choke module and the power adjustment unit, and is also connected to the power modulation module, and is used to filter out harmonic components in the RF power.

[0013] In a second aspect, a radio frequency power supply system is also provided, and the radio frequency power supply system includes a radio frequency power supply device. The radio frequency power supply device includes an input end, a radio frequency power amplifier circuit, a power adjustment unit and an output end connected in sequence. The input end is used to input a radio frequency signal. The radio frequency power amplifier circuit is used to perform power amplification according to the radio frequency signal to obtain target radio frequency electrical energy. The power adjustment unit is used to allow at least part of the radio frequency electrical energy of the target radio frequency electrical energy to pass through, so that at least part of the radio frequency electrical energy of the target radio frequency electrical energy is transmitted to the output end and output through the output end. The power adjustment unit has an equivalent impedance value, and the proportion of at least part of the radio frequency electrical energy in the target radio frequency electrical energy that passes through the power adjustment unit is related to the equivalent impedance value.

[0014] The RF power supply device and RF power supply system of the present application can obtain target RF electric energy by setting an RF power amplifier circuit to perform power amplification according to the RF signal, and can allow at least part of the target RF electric energy to pass through by setting a power adjustment unit, and the proportion of at least part of the target RF electric energy that passes through the power adjustment unit is related to the equivalent impedance value, thereby being able to flexibly adjust the power value of the RF electric energy output by the RF power supply device according to specific needs. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 It is a block diagram of a radio frequency power supply device in some embodiments of the present application.

[0017] Figure 2 for Figure 1 The radio frequency power supply device shown also includes a block diagram of a control and regulation unit.

[0018] Figure 3 Schematic diagram of a circuit of a power regulation unit in some embodiments of the present application.

[0019] Figure 4 Another block diagram of a radio frequency power supply device in some embodiments of the present application.

[0020] Figure 5 It is a block diagram of the power modulation module in some embodiments of the present application.

[0021] Figure 6 Schematic diagram of a circuit of a power modulation module in some embodiments of the present application.

[0022] Figure 7 This is another block diagram of a radio frequency power supply device in some embodiments of the present application.

[0023] Figure 8 Another block diagram of the power modulation module in some embodiments of the present application.

[0024] Fig. 9 FIG. 4 is another circuit diagram of the power modulation module in some embodiments of the present application.

[0025] Fig.10 This is another block diagram of a radio frequency power supply device in some embodiments of the present application.

[0026] Fig.11 Schematic diagram of a circuit of a choke module in some embodiments of the present application.

[0027] Fig.12 Schematic diagram of a circuit of a resonance module in some embodiments of the present application.

[0028] Fig.13 It is a block diagram of a radio frequency power supply system in some embodiments of the present application.

[0029] Explanation of the accompanying drawings: 1000, RF power supply equipment, 10, RF power amplifier circuit, N1, connection point, 100, input end, RF1, RF signal, 200, RF power amplifier circuit, RF2, target RF power, 210, power modulation module, 211, selection component, 212, power modulation component, S1, RF switch, S2, selection switch, Cm, modulation capacitor, RF2, target RF power, 300, power adjustment unit, L1, first inductor, C1, first capacitor, 400, output end, GND, ground, E1, first potential point, 500, control and adjustment unit, 600, DC source, DC, DC power, 700, choke module, Lf, choke inductor, 800, resonance module, Lr, resonant inductor, Cr, resonant capacitor. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0031] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0032] In the following, the terms "first", "second", etc. are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "plurality" means two or more.

[0033] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0034] See also Figure 1 , Figure 1FIG. 1 is a block diagram of a radio frequency power supply device in some embodiments of the present application. Figure 1 As shown, the present application provides a radio frequency power supply device 10, which includes an input terminal 100, a radio frequency power amplifier circuit 200, a power adjustment unit 300, and an output terminal 400 connected in sequence. The input terminal 100 is used to input a radio frequency signal RF1. The radio frequency power amplifier circuit 200 is used to perform power amplification according to the radio frequency signal RF1 to obtain a target radio frequency power RF2. The power adjustment unit 300 is used to allow at least part of the radio frequency power of the target radio frequency power RF2 to pass through, so that at least part of the radio frequency power of the target radio frequency power RF2 is transmitted to the output terminal 400 and output through the output terminal 400. Among them, the power adjustment unit 300 has an equivalent impedance value, and the proportion of at least part of the radio frequency power in the target radio frequency power RF2 that passes through the power adjustment unit 300 is related to the equivalent impedance value.

[0035] Thus, the above-mentioned RF power supply device 10 in the present application can obtain the target RF power RF2 by setting the RF power amplifier circuit 200 to perform power amplification according to the RF signal RF1, and can allow at least part of the target RF power RF2 to pass through by setting the power adjustment unit 300, and the proportion of at least part of the RF power in the target RF power RF2 that passes through the power adjustment unit 300 is related to the equivalent impedance value, so that the power value of the RF power output by the RF power supply device 10 can be flexibly adjusted according to specific needs.

[0036] The proportion of at least part of the target RF power RF2 that passes through the power adjustment unit 300 is also the proportion of at least part of the RF power transmitted to the output end 400 to the target RF power RF2.

[0037] See also Figure 2 , Figure 2 for Figure 1 The RF power supply device shown in the figure also includes a block diagram of a control and regulation unit. Figure 2 As shown, the RF power supply device 10 further includes an adjustment control unit, which is connected to the power adjustment unit 300. The equivalent impedance value of the power adjustment unit 300 is adjustable, and the adjustment control unit is used to adjust the equivalent impedance value, so that the proportion of at least part of the RF power in the target RF power RF2 that passes through the power adjustment unit 300 changes with the change of the equivalent impedance value.

[0038] Therefore, the above-mentioned RF power supply device 10 in the present application, by setting a control and adjustment unit 500, can realize the adjustment of the equivalent impedance value of the power adjustment unit 300, and can adjust the proportion of at least part of the RF power in the target RF power RF2 passing through the power adjustment unit 300 by adjusting the equivalent impedance value.

[0039] In some embodiments, when the equivalent impedance value of the power regulating unit 300 increases, the proportion of at least part of the RF power energy allowed to pass through by the power regulating unit 300 to the target RF power RF2 increases; when the equivalent impedance value of the power regulating unit 300 decreases, the proportion of at least part of the RF power energy allowed to pass through by the power regulating unit 300 to the target RF power RF2 decreases.

[0040] Therefore, the above-mentioned RF power supply device 10 in the present application can increase or decrease the proportion of at least part of the RF power allowed to pass by the power regulating unit 300 to the target RF power RF2 according to the increase or decrease of the equivalent impedance value of the power regulating unit 300.

[0041] Please also read Figure 3 , Figure 3 FIG. 1 is a circuit diagram of a power regulation unit in some embodiments of the present application. Figure 2 , Figure 3 As shown, the power adjustment unit 300 includes a first inductor L1 and a first capacitor C1, the first inductor L1 is connected between the RF power amplifier circuit 200 and the output terminal 400, and the first capacitor C1 is connected between the connection point between the first inductor L1 and the output terminal 400 and the ground GND. The equivalent impedance value is the sum of the inductance value of the first inductor L1 and the capacitance value of the first capacitor C1, and the first capacitor C1 is an adjustable capacitor. The adjustment control unit is connected to the first capacitor C1, and the adjustment control unit adjusts the capacitance value of the first capacitor C1 to change the equivalent impedance value.

[0042] Therefore, the above-mentioned RF power supply device 10 in the present application, by setting the power adjustment unit 300 to include the first inductor L1 and the first capacitor C1, can change the equivalent impedance value by adjusting the capacitance value of the first capacitor C1.

[0043] Specifically, when the capacitance value of the first capacitor C1 increases, the equivalent impedance value may increase; and when the capacitance value of the first capacitor C1 decreases, the equivalent impedance value may decrease.

[0044] Among them, the equivalent impedance value of the power regulation unit 300 is the equivalent reactance value.

[0045] See also Figure 4 , Figure 4 FIG. 1 is another block diagram of a radio frequency power supply device in some embodiments of the present application. Figure 4 As shown, the RF power supply device 10 further includes a DC source 600, which is connected to the RF power amplifier circuit 200. The DC source 600 is used to output DC power DC, and the RF power amplifier circuit 200 is used to periodically charge and discharge according to the RF signal RF1 under the power supply of the DC power DC, so as to convert the DC power DC into the target RF power RF2.

[0046] like Figure 4 As shown, the RF power amplifier circuit 200 includes a power modulation module 210, which is connected to the input terminal 100 and is connected to the connection point N1 between the DC source 600 and the power adjustment unit 300. The power modulation module 210 is used to periodically charge and discharge under the control of the RF signal RF1 to convert the DC power DC into the target RF power RF2.

[0047] Therefore, the above-mentioned RF power supply device 10 in the present application converts the direct current power DC into the target RF power RF2 by setting the power modulation module 210 to charge and discharge periodically.

[0048] In some embodiments, the output terminal 400 may be connected to a load to output the target radio frequency power RF2 to the load, wherein the load may be a plasma load.

[0049] In some embodiments, the connection point N1 between the DC source 600 and the power conditioning unit 300 may be any position point on the connection path between the DC source 600 and the power conditioning unit 300 .

[0050] like Figure 4 As shown, the power modulation module 210 is connected between the connection point N1 between the DC source 600 and the power adjustment unit 300 and the first potential point E1, and the first potential point E1 is used to provide a first potential. The power modulation module 210 has an adjustable first capacitance value and multiple connection states corresponding to multiple different first capacitance values. The power modulation module 210 is in a corresponding connection state at least according to the first capacitance value, so that the power value of the RF power obtained by the power modulation module 210 periodically charging and discharging is the corresponding power value.

[0051] Thus, the above-mentioned RF power supply device 10 in the present application is in a corresponding connection state by configuring the power modulation module 210 according to the adjustable first capacitance value, so that the power value of the target RF power RF2 obtained by periodically charging and discharging the power modulation module 210 is the corresponding power value, thereby flexibly adjusting the power value of the target RF power RF2 output by the RF power amplifier circuit 200.

[0052] In some embodiments, the first potential provided by the first potential point E1 may be the same as the potential provided by the ground point, or may be different from the potential provided by the ground point. Figure 3 The ground shown is GND.

[0053] Please also read Figure 5 , Figure 5 FIG. 1 is a block diagram of an electric energy modulation module in some embodiments of the present application. Figure 4 , Figure 5 As shown, the electric energy modulation module 210 includes multiple selection components 211 and an electric energy modulation component 212. Each selection component 211 is connected to the connection point N1 between the DC source 600 and the power regulation unit 300, and is selectively connected to the first potential point E1. The electric energy modulation component 212 is connected between the connection point N1 between the DC source 600 and the power regulation unit 300 and the first potential point E1. Among them, the power modulation component 212 has an adjustable first capacitance value, and the power modulation component 212 is used to cooperate with at least one selection component 211 to periodically charge and discharge to convert direct current power DC into target radio frequency power RF2. Each selection component 211 is used to connect to the first potential point E1 when it is in the on state, and to disconnect from the first potential point E1 when it is in the off state. Among them, at least according to the different first capacitance values, the number of selection components 211 in the on state is different, so that the power modulation module 210 is in different connection states, so that the power value of the target radio frequency power RF2 converted by the power modulation module 210 is different.

[0054] Among them, Figure 5 The multiple connection points N1 shown may be a common point, that is, the voltage value of each connection point N1 is the voltage value of the direct current power DC.

[0055] In some embodiments, Figure 2 The control and adjustment unit 500 shown can also be connected to each selection component 211 and the electric energy modulation component 212. The control and adjustment unit 500 is used to adjust the first capacitance value of the electric energy modulation component 212, and determine the number of selection components 211 in the on state at least based on the first capacitance value, and control the corresponding number of selection components 211 to be in the on state, so that the electric energy modulation module 210 is in a corresponding connection state.

[0056] Furthermore, the control and adjustment unit 500 is used to determine the target number of the gating components 211 in the on state according to the relationship between the first capacitance value and the preset capacitance value, and control the target number of the gating components 211 to be in the connected state, so that the power modulation module 210 is in the corresponding connected state.

[0057] Furthermore, the preset capacitance value is related to the angular frequency of the target radio frequency power RF2 and the resistance value of the load. For example, the preset capacitance value may be equal to 8 / [π×(π 2 +4)×ω×R], where π is pi, ω is the angular frequency of the target RF power RF2, and R is the resistance value of the load.

[0058] In some embodiments, when the ratio of the first capacitance value to the preset capacitance value is greater than or equal to N-1 and less than N, the control and adjustment unit 500 determines that the number of the gating components 211 in the on state is N, where N≥1 and N is an integer.

[0059] Please also read Figure 6 , Figure 6 FIG. 1 is a circuit diagram of an electric energy modulation module in some embodiments of the present application. Figure 4 , Figure 5 , Figure 6 As shown, the gating component 211 includes a radio frequency switch S1 and a gating switch S2, the radio frequency switch S1 and the gating switch S2 are connected in series between the connection point N1 between the DC source 600 and the power adjustment unit 300 and the first potential point E1, and the radio frequency switch S1 is connected to the input terminal 100. Each radio frequency switch S1 is used to periodically turn on and off under the control of the radio frequency signal RF1, and each radio frequency switch S1 is turned on or off synchronously. When the gating switch S2 is turned on or off, the corresponding gating component 211 is in the on state or the off state accordingly.

[0060] like Figure 4 , Figure 5 , Figure 6 As shown, the power modulation component 212 includes a modulation capacitor Cm, and the modulation capacitor Cm is used to discharge when at least one gating component 211 is in the on state and when each RF switch S1 of at least one gating component 211 in the on state is turned on, and to charge when each RF switch S1 of at least one gating component 211 in the on state is turned off, so that the power modulation component 212 is periodically charged and discharged to obtain the target RF power RF2. Among them, the modulation capacitor Cm has an adjustable capacitance value, and the adjustable capacitance value of the modulation capacitor Cm is the adjustable first capacitance value of the power modulation module 210.

[0061] See also Figure 7 , Figure 7 FIG. 1 is another block diagram of a radio frequency power supply device in some embodiments of the present application. Figure 7As shown, there are multiple electric energy modulation modules 210, each of which is connected to the connection point N1 between the DC source 600 and the power regulation unit 300, and each of which is selectively connected to the first potential point E1, wherein each of the electric energy modulation modules 210 can be in an on state or an off state, each of which is connected to the first potential point E1 when in the on state, and is disconnected from the first potential point E1 when in the off state, and the first potential point E1 is used to provide a first potential. In which, each power modulation module 210 is used to periodically charge and discharge under the control of the radio frequency signal RF1 when it is in the on state, so as to convert direct current power DC into radio frequency power. In which, when at least two power modulation modules 210 are in the on state, the radio frequency power obtained by the power modulation modules 210 in the on state is mixed in the power adjustment unit 300 to obtain the target radio frequency power RF2, wherein the power value of the target radio frequency power RF2 changes according to the number of power modulation modules 210 in the on state.

[0062] Thus, the above-mentioned RF power supply device 10 in the present application, by setting up multiple power modulation modules 210, and each power modulation module 210 is selectively connected to the first potential point E1, and each power modulation module 210 is configured to be connected to the first potential point E1 when in the on state, and disconnected from the first potential point E1 when in the off state. By adjusting the number of power modulation modules 210 in the on state, the power value of the target RF power RF2 output by the RF power amplifier circuit 200 can be flexibly adjusted.

[0063] When at least two power modulation modules 210 are in the on state, each power modulation module 210 is charged and discharged synchronously.

[0064] In some embodiments, when one of the power modulation modules 210 is in the on state, the radio frequency power obtained by the power modulation module 210 in the on state is the target radio frequency power RF2.

[0065] In particular, when at least two power modulation modules 210 are in the on state, each power modulation module 210 is charged and discharged synchronously, so that the phase angle and power value of the RF power obtained by each power modulation module 210 are the same, so that the power value of the target RF power RF2 mixed in the power adjustment unit 300 is the sum of the power values ​​of the RF power obtained by each power modulation module 210.

[0066] Please also read Figure 8 , Figure 8 FIG. 2 is another block diagram of the power modulation module in some embodiments of the present application. Figure 7 , Figure 8As shown, each power modulation module 210 includes a power modulation component 212 and a gating component 211. The power modulation component 212 is connected between the connection point N1 between the DC source 600 and the power adjustment unit 300 and the gating component 211. The power modulation component 212 is connected to the input terminal 100, and the gating component 211 is selectively connected to the first potential point E1. The gating component 211 is used to selectively be in an on state or an off state. When the gating component 211 of a certain power modulation module 210 is in an on state, the power modulation module 210 is in an on state, and the corresponding power modulation component 212 is periodically charged and discharged under the control of the radio frequency signal RF1 to convert the direct current power DC into radio frequency power.

[0067] Among them, Figure 7 The RF3 shown is the radio frequency power obtained when the corresponding power modulation module 210 is in the on state.

[0068] Among them, Figure 7 and Figure 8 The direct current power DC in the power modulation module 210, the radio frequency power RF3 obtained when the corresponding power modulation module 210 is in the on state, and the target radio frequency power RF2 are all represented by voltages. Figure 7 For the convenience of explanation, the multiple radio frequency electric energies RF3 are generated by multiple power modulation modules 210, and after being combined, the target radio frequency electric energy RF3 can be obtained. Figure 8 The power modulation module 210 shown in FIG. 2 modulates the direct current power DC at one side of the connection point N1 to be modulated into radio frequency power RF3 and outputted at the other side of the corresponding connection point N1.

[0069] Please also read Fig. 9 , Fig. 9 FIG. 1 is another circuit diagram of the power modulation module in some embodiments of the present application. Figure 7 , Figure 8 , Fig. 9 As shown, the power modulation component 212 includes a radio frequency switch S1 and a modulation capacitor Cm, and the radio frequency switch S1 and the modulation capacitor Cm are connected in parallel between the connection point N1 between the DC source 600 and the power adjustment unit 300 and the gating component 211. The radio frequency switch S1 is used to periodically turn on and off under the control of the radio frequency signal RF1, and when the gating component 211 of a certain power modulation module 210 is in the on state, the modulation capacitor Cm in the power modulation module 210 is used to discharge when the corresponding gating component 211 is in the on state and the radio frequency switch S1 is turned on, and to charge when the radio frequency switch S1 is turned off, so that the corresponding power modulation component 212 is periodically charged and discharged to obtain radio frequency power.

[0070] In some embodiments, the capacitance value of each modulation capacitor Cm is the same, so that the power value of the radio frequency power obtained by each power modulation component 212 when in the on state is the same.

[0071] Furthermore, the capacitance value of each modulation capacitor Cm may satisfy a first preset relationship, wherein the first preset relationship may be related to the angular frequency of the RF power and the resistance value of the load.

[0072] Further, the capacitance value of the modulation capacitor Cm is less than the threshold value of the first capacitance C1, so that the power value of the RF power obtained by each power modulation module 210 is less than the first power threshold value, and the number of corresponding power modulation modules 210 is greater than the first number threshold value. Among them, the first power threshold value can be 10 watts, 100 watts, etc., and the corresponding first number threshold value can be 100, 10, etc., so that the power value requirement of the target RF power RF2 can be met according to specific needs, and the adjustment accuracy is high.

[0073] In some embodiments, each RF switch S1 is turned on or off synchronously, so that when at least two power modulation modules 210 are in the on state, each modulation capacitor Cm is charged and discharged synchronously.

[0074] like Figure 7 , Figure 8 , Fig. 9 As shown, the gating component 211 includes a gating switch S2, which is turned on or off so that the corresponding gating component 211 is in an on state or an off state respectively, wherein the number of the electric energy modulation modules 210 in the on state changes according to the number of the gating switches S2 that are turned on.

[0075] The number of the power modulation modules 210 in the on state is positively correlated with the power value of the target radio frequency power RF2.

[0076] See also Fig.10 , Fig.10 FIG. 1 is another block diagram of a radio frequency power supply device in some embodiments of the present application. Fig.10 As shown, the RF power amplifier circuit 200 also includes a choke module 700 and a resonance module 800. The choke module 700 is connected between the DC source 600 and the resonance module 800, and the choke module 700 is also connected to the power modulation module 210. The choke module 700 is used to allow only the DC power DC output by the DC source 600 to pass through. The resonance module 800 is connected between the choke module 700 and the power adjustment unit 300, and the resonance module 800 is also connected to the power modulation module 210. The resonance module 800 is used to filter out the harmonic components in the RF power.

[0077] Please also read Fig.11 , Fig.11FIG. 1 is a circuit diagram of a choke module in some embodiments of the present application. Fig.10 , Fig.11 As shown, the choke module 700 may include a choke inductor Lf, one end of the choke inductor Lf is connected to the DC source 600, and the other end of the choke inductor Lf is connected to both the resonance module 800 and the power modulation module 210; wherein the DC power DC output from the DC source 600 is allowed to be transmitted to the power modulation module 210 through the choke inductor Lf, and the target radio frequency power RF2 obtained by the power modulation module 210 based on the DC power DC is prohibited from being transmitted to the DC source 600 through the choke inductor Lf.

[0078] Therefore, the above-mentioned RF power amplifier circuit 200 in the present application, by setting a choke module 700 including a choke inductor Lf, utilizes the characteristics of the choke inductor Lf that passes DC and blocks AC, and can prevent the target RF power RF2 from being transmitted to the DC source 600 through the choke inductor Lf.

[0079] Please also read Fig.12 , Fig.12 FIG. 1 is a circuit diagram of a resonance module in some embodiments of the present application. Fig.10 , Fig.12 As shown, the resonance module 800 may include a resonance inductor Lr and a resonance capacitor Cr, the resonance inductor Lr and the resonance capacitor Cr are connected in series between the choke module 700 and the power adjustment unit 300, and the resonance inductor Lr or the resonance capacitor Cr is connected to the power modulation module 210; wherein, the resonance inductor Lr and the resonance capacitor Cr have a resonance frequency, and the resonance inductor Lr and the resonance capacitor Cr are used to filter out the harmonic components in the target radio frequency power RF2 according to the resonance frequency.

[0080] Therefore, the above-mentioned RF power amplifier circuit 200 in the present application can filter out the harmonic components in the target RF power RF2 according to the resonant frequency by setting an LC series resonant circuit composed of a resonant inductor Lr and a resonant capacitor Cr.

[0081] In some embodiments, Figure 2 The control and adjustment unit 500 shown may include a controller and at least one rotating motor. The control unit is mainly used to control the on or off of the switch and control the rotating motor to adjust the capacitance value of the capacitor. The rotating motor is mainly used to adjust the capacitance value of the capacitor.

[0082] In some embodiments, the controller can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0083] The RF power supply device 10 of the present application, through the above structure, can flexibly adjust the power value of the RF electric energy output by the RF power supply device 10 according to the needs of the plasma load at different stages, so as to achieve a better film forming effect.

[0084] See also Fig.13 , Fig.13 FIG. 1 is a block diagram of a radio frequency power supply system in some embodiments of the present application. Fig.13 As shown, the present application further provides a radio frequency power supply system 1000, and the radio frequency power supply system 1000 includes the radio frequency power supply device 10 in any of the aforementioned embodiments.

[0085] Please refer again Figure 1 .like Figure 1 As shown, the RF power supply device 10 includes an input terminal 100, an RF power amplifier circuit 200, a power regulating unit 300 and an output terminal 400 which are connected in sequence. The input terminal 100 is used to input the RF signal RF1. The RF power amplifier circuit 200 is used to perform power amplification according to the RF signal RF1 to obtain the target RF power RF2. The power regulating unit 300 is used to allow at least part of the RF power of the target RF power RF2 to pass through, so that at least part of the RF power of the target RF power RF2 is transmitted to the output terminal 400 and output through the output terminal 400. Among them, the power regulating unit 300 has an equivalent impedance value, and the proportion of at least part of the RF power in the target RF power RF2 that passes through the power regulating unit 300 is related to the equivalent impedance value.

[0086] The more specific structure of the RF power supply device 10 may refer to the relevant content of the RF power supply device 10 in any of the aforementioned embodiments, which will not be described in detail here.

[0087] In some embodiments, the RF power supply device 10 may further include a crystal oscillator source connected to the input terminal 100 , and the crystal oscillator source is used to generate the RF signal RF1 .

[0088] The RF power supply device 10 and the RF power supply system 1000 of the present application, through the above structure, can flexibly adjust the power value of the RF electric energy output by the RF power supply device 10 according to the needs of the plasma load at different stages to achieve a better film forming effect.

[0089] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A radio frequency power supply device, characterized in that: It includes an input terminal, a radio frequency power amplifier circuit, a power adjustment unit and an output terminal which are connected in sequence; The input end is used to input a radio frequency signal; The radio frequency power amplifier circuit is used to perform power amplification according to the radio frequency signal to obtain target radio frequency electrical energy; The power regulating unit is used to allow at least part of the target radio frequency power to pass through, so that at least part of the target radio frequency power is transmitted to the output end and output through the output end; The power regulating unit has an equivalent impedance value, and the proportion of at least part of the target radio frequency electric energy that passes through the power regulating unit is related to the equivalent impedance value.

2. The radio frequency power supply device according to claim 1, characterized in that: The radio frequency power supply device further comprises an adjustment control unit, wherein the adjustment control unit is connected to the power adjustment unit; Among them, the equivalent impedance value of the power adjustment unit is adjustable, and the adjustment control unit is used to adjust the equivalent impedance value, so that the proportion of at least part of the target RF power that passes through the power adjustment unit changes with the change of the equivalent impedance value.

3. The radio frequency power supply device according to claim 2, characterized in that: When the equivalent impedance value of the power regulating unit increases, the proportion of at least part of the RF power that the power regulating unit allows to pass through to the target RF power increases; when the equivalent impedance value of the power regulating unit decreases, the proportion of at least part of the RF power that the power regulating unit allows to pass through to the target RF power decreases.

4. The radio frequency power supply device according to claim 2, characterized in that: The power adjustment unit includes a first inductor and a first capacitor, wherein the first inductor is connected between the radio frequency power amplifier circuit and the output end, and the first capacitor is connected between a connection point between the first inductor and the output end and ground; Among them, the equivalent impedance value is the sum of the inductance value of the first inductor and the capacitance value of the first capacitor, and the first capacitor is an adjustable capacitor. The adjustment control unit is connected to the first capacitor, and the adjustment control unit adjusts the capacitance value of the first capacitor to change the equivalent impedance value.

5. The radio frequency power supply device according to claim 1, characterized in that: The radio frequency power supply device further comprises a direct current source, which is connected to the radio frequency power amplifier circuit; The DC source is used to output DC power, and the RF power amplifier circuit is used to periodically charge and discharge according to the RF signal under the supply of the DC power, so as to convert the DC power into the target RF power.

6. The radio frequency power supply device according to claim 5, characterized in that: The radio frequency power amplifier circuit includes an electric energy modulation module, which is connected to the input end and connected to a connection point between the DC source and the power adjustment unit; The power modulation module is used for periodically charging and discharging under the control of the radio frequency signal to convert the direct current power into the target radio frequency power.

7. The radio frequency power supply device according to claim 6, characterized in that: The electric energy modulation module is connected between the connection point between the DC source and the power adjustment unit and a first potential point, and the first potential point is used to provide a first potential; Among them, the electric energy modulation module has an adjustable first capacitance value and multiple connection states corresponding to multiple different first capacitance values. The electric energy modulation module is in a corresponding connection state at least according to the first capacitance value, so that the power value of the radio frequency electric energy obtained by periodically charging and discharging the electric energy modulation module is a corresponding power value.

8. The radio frequency power supply device according to claim 6, characterized in that: There are multiple electric energy modulation modules, each of which is connected to a connection point between the DC source and the power regulation unit, and each of which is selectively connected to a first potential point, wherein each of the electric energy modulation modules can be in an on state or an off state, each of which is connected to the first potential point when in the on state, and is disconnected from the first potential point when in the off state, and the first potential point is used to provide a first potential; Wherein, each power modulation module is used to periodically charge and discharge under the control of the radio frequency signal when in the on state so as to convert the DC power into radio frequency power. Wherein, when at least two power modulation modules are in the on state, the radio frequency power obtained by the power modulation modules in the on state is mixed in the power adjustment unit to obtain the target radio frequency power. Wherein, the power value of the target radio frequency power changes according to the number of power modulation modules in the on state.

9. The radio frequency power supply device according to claim 6, characterized in that: The radio frequency power amplifier circuit also includes a choke module and a resonance module; The choke module is connected between the DC source and the resonance module, and is also connected to the power modulation module. The choke module is used to allow only the DC power output by the DC source to pass through; The resonance module is connected between the choke module and the power adjustment unit, and the resonance module is connected to the power modulation module. The resonance module is used to filter out the harmonic components in the radio frequency power.

10. A radio frequency power supply system, characterized in that: Comprising the radio frequency power supply device as described in any one of claims 1-9.

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