Radio frequency power supply equipment and radio frequency power supply system

Abstract

The invention provides a radio frequency power supply device and a radio frequency power supply system.The radio frequency power supply device comprises an input end, a radio frequency power amplifier circuit, a first direct current source, an energy consumption unit and an output end, and the radio frequency power amplifier circuit is connected between the input end and the output end and connected with the first direct current source; and the energy consumption unit is connected with a connection point between the radio frequency power amplifier circuit and the output end, and is selectively connected or disconnected with the ground. The first direct current source is used for providing first direct current electric energy for the radio frequency power amplifier circuit. The radio frequency power amplifier circuit is at least used for obtaining radio frequency electric energy according to the first radio frequency signal under the power supply of the first direct current electric energy, and the power values of the radio frequency electric energy are different at least according to the different voltage values of the first direct current electric energy. And the energy consumption unit is used for consuming part of the radio frequency electric energy when being connected with the ground, so that only the remaining part of the radio frequency electric energy is transmitted to the load through the output end. The power value of the radio frequency electric energy output by the radio frequency power supply equipment can be flexibly adjusted.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a radio frequency power supply device and a radio frequency power supply system. Background Art

[0002] At present, with the development of radio frequency technology, the application of radio frequency power supply equipment is becoming more and more extensive. When applied to the semiconductor field, new requirements are put forward for the radio frequency power output by the equipment power supply equipment. When the current radio frequency power supply equipment outputs radio frequency power to the plasma load, it is necessary to adjust the power value of the radio frequency power in a timely and rapid manner according to the needs of the plasma load to obtain a better film forming effect. Therefore, how to flexibly adjust the power value of the radio frequency power output by the radio frequency power supply equipment has become an issue that needs to be considered. Summary of the invention

[0003] The present application provides a radio frequency power supply device and a radio frequency power supply system, which can flexibly adjust the power value of the radio frequency electric energy output by the radio frequency power supply device.

[0004] In a first aspect, a radio frequency power supply device is provided, the radio frequency power supply device comprising an input end, a radio frequency power amplifier circuit, a first direct current source, an energy consumption unit and an output end, the radio frequency power amplifier circuit is connected between the input end and the output end, the radio frequency power amplifier circuit is connected to the first direct current source, the energy consumption unit is connected to the connection point between the radio frequency power amplifier circuit and the output end, and is selectively connected to or disconnected from the ground, wherein the input end is used to input a first radio frequency signal, and the output end is used to connect to the load. The first direct current source is used to provide a first direct current power to the radio frequency power amplifier circuit. The radio frequency power amplifier circuit is at least used to obtain radio frequency power according to the first radio frequency signal under the supply of the first direct current power, wherein the power value of the radio frequency power is different at least according to the different voltage values ​​of the first direct current power. The energy consumption unit is used to consume part of the radio frequency power when connected to the ground, so that only the remaining part of the radio frequency power is transmitted to the load through the output end.

[0005] In a possible implementation, the RF power supply device further includes a control unit, which is connected to the first DC source and the energy consumption unit, and is used to control and adjust the voltage value of the first DC power, and / or control the energy consumption unit to be connected to the ground, so as to adjust the power value of the RF power transmitted to the load through the output end.

[0006] In a possible implementation, the RF power supply device further includes a second DC source, the RF power amplifier circuit includes an RF power amplifier unit and a driving unit, the driving unit is connected between the input end and the RF power amplifier unit, and the driving unit is connected to the second DC source. The second DC source is used to provide a second DC power to the driving unit. The driving unit is used to power on and operate under the power supply of the second DC power to convert the first RF signal into a second RF signal. The RF power amplifier unit is used to periodically charge and discharge according to the second RF signal under the power supply of the first DC power to convert the first DC power into the RF power. The control unit is also connected to the second DC source, and the control unit is also used to control and adjust the voltage value of the second DC power to adjust the power value of the RF power transmitted to the load through the output end.

[0007] In a possible implementation, the driving unit includes an adjustable amplifier and a driver, and the adjustable amplifier and the driver are connected in sequence between the input end and the RF power amplifier unit. The adjustable amplifier has an adjustable first amplification factor, and the adjustable amplifier is used to amplify the first RF signal by the first amplification factor to obtain an intermediate RF signal. The driver is used to increase the voltage value of the intermediate RF signal under the power supply of the second DC power to obtain the second RF signal. The control unit is also connected to the adjustable amplifier, and the control unit is also used to control and adjust the first amplification factor to adjust the power value of the RF power transmitted to the load through the output end.

[0008] In a possible implementation, the RF power supply device further includes an acquisition unit, the acquisition unit is connected to the RF power amplifier unit, and the acquisition unit is used to acquire a first power value of the RF power output by the RF power amplifier unit. The control unit is used to control and adjust one or more of the voltage value of the first DC power, the voltage value of the second DC power, and the first amplification factor according to at least the first power value, and / or control the energy consumption unit to be connected to the ground, so that the power value of the RF power transmitted to the load through the output end is the target power value.

[0009] In a possible implementation, the control unit is used to determine a power difference value based on the difference between the target power value and the first power value, and control and adjust one or more of the voltage value of the first DC power, the voltage value of the second DC power, and the first amplification factor based on the relationship between the power difference value and the first group of power thresholds, and / or control the energy consumption unit to be connected to the ground, so as to adjust the power value of the RF power transmitted to the load to the target power value within a preset time period.

[0010] In a possible implementation manner, the first group of power thresholds includes a first power threshold, a second power threshold, and a third power threshold, and the values ​​of the first power threshold, the second power threshold, and the third power threshold increase in sequence.

[0011] In a possible implementation, the control unit controls the energy consumption unit to be connected to the ground, controls the adjustment of the voltage value of the first DC power, controls the adjustment of the voltage value of the second DC power, and controls the adjustment of the first amplification factor so that the power value of the RF power transmitted to the load is the target power value, and the adjustment speed is reduced successively.

[0012] In a possible implementation, the energy consumption unit includes a first resistor and a first switch, one end of the first resistor is connected to a connection point between the RF power amplifier circuit and the output end, and the other end of the first resistor is selectively connected to or disconnected from the ground through the first switch. The first switch is used to connect or disconnect the energy consumption unit to the ground when it is turned on or off.

[0013] In a second aspect, a radio frequency power supply system is also provided, the radio frequency power supply system comprising a radio frequency power supply device. The radio frequency power supply device comprises an input end, a radio frequency power amplifier circuit, a first direct current source, an energy consumption unit and an output end, the radio frequency power amplifier circuit is connected between the input end and the output end, the radio frequency power amplifier circuit is connected to the first direct current source, the energy consumption unit is connected to the connection point between the radio frequency power amplifier circuit and the output end, and is selectively connected to or disconnected from the ground, wherein the input end is used to input a first radio frequency signal, and the output end is used to connect to the load. The first direct current source is used to provide a first direct current power to the radio frequency power amplifier circuit. The radio frequency power amplifier circuit is at least used to obtain radio frequency power according to the first radio frequency signal under the supply of the first direct current power, wherein the power value of the radio frequency power is different at least according to the different voltage values ​​of the first direct current power. The energy consumption unit is used to consume part of the radio frequency power when connected to the ground, so that only the remaining part of the radio frequency power is transmitted to the load through the output end.

[0014] The RF power supply device and RF power supply system of the present application can, by configuring an RF power amplifier circuit, obtain RF electrical energy from a first RF signal at least under the power supply of a first DC electrical energy, realize power amplification of the first RF signal to obtain RF electrical energy, and at least according to different voltage values of the first DC electrical energy, the power value of the RF electrical energy is different, and the power value of the RF electrical energy can be adjusted. And by setting an energy-consuming unit to be selectively connected or disconnected from the ground, part of the electrical energy of the RF electrical energy can be consumed when the energy-consuming unit is connected to the ground, so that only the remaining part of the electrical energy in the RF electrical energy is transmitted to the load through the output terminal, and the power value of the RF electrical energy can be further adjusted. Therefore, there are multiple adjustment methods, and the power value of the RF electrical energy output by the RF power supply device can be flexibly adjusted. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background art, the drawings required to be used in the embodiments of the present application or the background art will be described below.

[0016] Figure 1 It is a block diagram of an RF power supply device in some embodiments of the present application.

[0017] Figure 2 It is another block diagram of the RF power supply device in some embodiments of the present application.

[0018] Figure 3 It is a circuit diagram of an energy-consuming unit in some embodiments of the present application.

[0019] Figure 4 It is a block diagram of an RF power supply system in some embodiments of the present application.

[0020] Description of reference numerals: 1000, RF power supply system; 10, RF power supply device; 100, input terminal; RF1, first RF signal; 200, RF power amplifier circuit; 210, RF power amplifier unit; RFP, RF electrical energy; 220, driving unit; 221, driver; RF2, second RF signal; 222, adjustable amplifier; RFm, intermediate RF signal; 300, first DC source; DC1, first DC electrical energy; 400, energy-consuming unit; R1, first resistor; S1, first switch; 500, output terminal; 500, control unit; 700, second DC source; DC2, second DC electrical energy; 800, acquisition unit; P1, first power value; GND, ground; RL, load. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0021] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0022] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0023] In the following, the terms "first", "second", etc. are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "plurality" means two or more.

[0024] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0025] See also Figure 1 , Figure 1 FIG. 1 is a block diagram of a radio frequency power supply device in some embodiments of the present application. Figure 1As shown, the present application provides a radio frequency power supply device 10, which includes an input terminal 100, a radio frequency power amplifier circuit 200, a first direct current source 300, an energy consumption unit 400 and an output terminal 500. The radio frequency power amplifier circuit 200 is connected between the input terminal 100 and the output terminal 500, and the radio frequency power amplifier circuit 200 is also connected to the first direct current source 300. The energy consumption unit 400 is connected to the connection point between the radio frequency power amplifier circuit 200 and the output terminal 500, and is selectively connected to or disconnected from the ground GND, wherein the input terminal 100 is used to input a first radio frequency signal RF1, and the output terminal 500 is used to connect to a load RL. The first direct current source 300 is used to provide a first direct current power DC1 to the radio frequency power amplifier circuit 200. The radio frequency power amplifier circuit 200 is at least used to obtain radio frequency power RFP according to the first radio frequency signal RF1 under the energy supply of the first direct current power DC1, wherein the power value of the radio frequency power RFP is different at least according to the different voltage values ​​of the first direct current power DC1. The energy consumption unit 400 is used to consume part of the radio frequency power RFP when connected to the ground GND, so that only the remaining part of the radio frequency power RFP is transmitted to the load RL through the output terminal 500 .

[0026] Thus, the above-mentioned RF power supply device 10 in the present application, by configuring the RF power amplifier circuit 200, can obtain RF power RFP according to the first RF signal RF1 under the power supply of at least the first DC power DC1, and can realize power amplification of the first RF signal RF1 to obtain RF power RFP, and at least according to the different voltage values ​​of the first DC power DC1, the power value of the RF power RFP is different, and the power value of the RF power RFP can be adjusted, and by setting the energy consumption unit 400 to be selectively connected or disconnected with the ground GND, part of the electric energy of the RF power RFP can be consumed when the energy consumption unit 400 is connected to the ground GND, so that only the remaining part of the electric energy in the RF power RFP is transmitted to the load RL through the output terminal 500, and the power value of the RF power RFP can be further adjusted, so that it has multiple adjustment methods, and can flexibly adjust the power value of the RF power RFP output by the RF power supply device 10.

[0027] The load RL may be a plasma load RL.

[0028] like Figure 1 As shown, the RF power supply device 10 also includes a control unit 600, which is connected to the first DC source 300 and the energy consumption unit 400. The control unit 600 is used to control and adjust the voltage value of the first DC power DC1, and / or control the energy consumption unit 400 to be connected to the ground GND to adjust the power value of the RF power RFP transmitted to the load RL through the output terminal 500.

[0029] Therefore, the above-mentioned RF power supply device 10 in the present application, by setting a control unit 600, can control and adjust the voltage value of the first DC power DC1 according to the specific needs of the load RL for the power value of the RF power RFP, and / or control the energy consumption unit 400 to be connected to the ground GND to adjust the power value of the RF power RFP transmitted to the load RL.

[0030] Please also read Figure 2 , Figure 2 FIG. 1 is another block diagram of a radio frequency power supply device in some embodiments of the present application. Figure 1 , Figure 2 As shown, the RF power supply device 10 also includes a second DC source 700, and the RF power amplifier circuit 200 includes an RF power amplifier unit 210 and a driving unit 220, wherein the driving unit 220 is connected between the input terminal 100 and the RF power amplifier unit 210, and the driving unit 220 is also connected to the second DC source 700. The second DC source 700 is used to provide the driving unit 220 with a second DC power DC2. The driving unit 220 is used to power on and work under the energy supply of the second DC power DC2, and convert the first RF signal RF1 into a second RF signal RF2. The RF power amplifier unit 210 is used to periodically charge and discharge according to the second RF signal RF2 under the energy supply of the first DC power DC1, so as to convert the first DC power DC1 into RF power RFP. Among them, the control unit 600 is also connected to the second DC source 700, and the control unit 600 is also used to control and adjust the voltage value of the second DC power DC2 to adjust the power value of the RF power RFP transmitted to the load RL through the output terminal 500.

[0031] Therefore, the above-mentioned RF power supply device 10 in the present application first powers on and operates under the power supply of the second DC power DC2 by configuring the driving unit 220 to convert the first RF signal RF1 into the second RF signal RF2, and then configures the RF power amplifier unit 210 to periodically charge and discharge according to the second RF signal RF2 under the power supply of the first DC power DC1 to convert the first DC power DC1 into RF power RFP, so as to meet the power value requirement of the load RL for the RF power RFP.

[0032] In some embodiments, the RF power amplifier unit 210 may include one or more of various types of power amplifiers such as a class D power amplifier and a class E power amplifier.

[0033] In some embodiments, the RF power amplifier unit 210 may also be connected to the ground GND.

[0034] like Figure 1 , Figure 2As shown, the driving unit 220 includes an adjustable amplifier 222 and a driver 221, and the adjustable amplifier 222 and the driver 221 are connected between the input terminal 100 and the RF power amplifier unit 210 in sequence. The adjustable amplifier 222 has an adjustable first gain, and the adjustable amplifier 222 is used to amplify the first RF signal RF1 by the first gain to obtain an intermediate RF signal RFm. The driver 221 is used to increase the voltage value of the intermediate RF signal RFm under the energy supply of the second DC power DC2 to obtain the second RF signal RF2. Among them, the control unit 600 is also connected to the adjustable amplifier 222, and the control unit 600 is also used to control and adjust the first gain to adjust the power value of the RF power RFP transmitted to the load RL through the output terminal 500.

[0035] Thus, the above-mentioned RF power supply device 10 in the present application, by setting an adjustable amplifier 222 and a driver 221 connected in sequence between the input terminal 100 and the RF power amplifier unit 210, and the adjustable amplifier 222 has an adjustable first amplification factor, can firstly amplify the first RF signal RF1 by the first amplification factor through the adjustable amplifier 222 to obtain the intermediate RF signal RFm, and then, under the energy supply of the second DC power DC2, the voltage value of the intermediate RF signal RFm is increased through the driver 221 to obtain the second RF signal RF2, so that the second RF signal RF2 can have a corresponding power value, that is, the second RF signal RF2 has sufficient driving capability, so that the RF power amplifier unit 210 can convert the first DC power DC1 into RF power RFP.

[0036] Furthermore, the first amplification factor can be controlled and adjusted by the control unit 600 to adjust the power value of the radio frequency power RFP transmitted to the load RL through the output terminal 500. Thus, more ways are provided to adjust the power value of the radio frequency power RFP transmitted to the load RL.

[0037] In some embodiments, the adjustable amplifier 222 may include a variable gain amplifier (VGA), and the driver 221 may include various types of inverters.

[0038] In some embodiments, the adjustable amplifier 222 and the driver 221 may also be connected to the ground GND.

[0039] like Figure 1 , Figure 2As shown, the RF power supply device 10 further includes an acquisition unit 800, which is connected to the RF power amplifier unit 210, and is used to acquire a first power value P1 of the RF power RFP output by the RF power amplifier unit 210. The control unit 600 is used to control and adjust one or more of the voltage value of the first DC power DC1, the voltage value of the second DC power DC2, and the first amplification factor according to at least the first power value P1, and / or control the energy consumption unit 400 to be connected to the ground GND, so that the power value of the RF power RFP transmitted to the load RL through the output terminal 500 is the target power value.

[0040] Thus, the above-mentioned RF power supply device 10 in the present application obtains the first power value P1 of the RF power RFP output by the RF power amplifier unit 210 by setting the acquisition unit 800, and the control unit 600 can control and adjust the voltage value of the first DC power DC1, the voltage value of the second DC power DC2 and one or more of the first amplification factor according to at least the first power value P1, and / or control the energy consumption unit 400 to be connected to the ground GND, so that the power value of the RF power RFP transmitted to the load RL through the output terminal 500 is the target power value.

[0041] In some embodiments, the acquisition unit 800 may include a power sensor, which may be connected between the RF power amplifier unit 210 and the output terminal 500 to acquire a first power value P1 of the RF power RFP output by the RF power amplifier unit 210 .

[0042] In some embodiments, the control unit 600 is used to determine a power difference value based on the difference between the target power value and the first power value P1, and control and adjust one or more of the voltage value of the first DC power DC1, the voltage value of the second DC power DC2, and the first amplification factor based on the relationship between the power difference value and the first group of power thresholds, and / or control the energy consumption unit 400 to be connected to the ground GND, so as to adjust the power value of the radio frequency power RFP transmitted to the load RL to the target power value within a preset time period.

[0043] Therefore, the above-mentioned RF power supply device 10 in the present application can determine the specific power adjustment method by determining the power difference and according to the relationship between the power difference and the first group of power thresholds, that is, control and adjust the voltage value of the first DC power DC1, the voltage value of the second DC power DC2 and one or more of the first amplification factor, and / or control the energy consumption unit 400 to be connected to the ground GND, so as to adjust the power value of the RF power RFP transmitted to the load RL to the target power value within a preset time period.

[0044] The first group of power thresholds includes a first power threshold, a second power threshold and a third power threshold, and the values ​​of the first power threshold, the second power threshold and the third power threshold increase in sequence.

[0045] Therefore, the above-mentioned radio frequency power supply device 10 in the present application can select different adjustment modes according to different situations by configuring the first group of power thresholds including sequentially increasing the first power threshold, the second power threshold and the third power threshold.

[0046] Furthermore, the control unit 600 controls the energy consumption unit 400 to be connected to the ground GND, controls the adjustment of the voltage value of the first DC power DC1, controls the adjustment of the voltage value of the second DC power DC2, and controls the adjustment of the first amplification factor so that the power value of the radio frequency power RFP transmitted to the load RL is the target power value, and the adjustment speed is reduced successively.

[0047] Thus, in practice, the above-mentioned RF power supply device 10 in the present application controls the energy consumption unit 400 to be connected to the ground GND, controls and adjusts the voltage value of the first DC power DC1, controls and adjusts the voltage value of the second DC power DC2, and controls and adjusts the first amplification factor, and the corresponding speed of the RF power RFP transmitted to the load RL is reduced successively, so the adjustment speed of the power value of the RF power RFP transmitted to the load RL to the target power value will also be reduced successively, and then, according to the relationship between the power difference and the first group of power thresholds, a suitable adjustment method can be selected so that the power value of the RF power RFP transmitted to the load RL is the target power value within a preset time.

[0048] In some embodiments, when the absolute value of the power difference is greater than or equal to the third power threshold, the control unit 600 controls the adjustment of the voltage value of the first DC power DC1, the voltage value of the second DC power DC2, and the first amplification factor, and controls the energy consumption unit 400 to be connected to the ground GND; when the absolute value of the power difference is greater than or equal to the second power threshold and less than the third power threshold, the control unit 600 controls the adjustment of the voltage value of the first DC power DC1, the voltage value of the second DC power DC2, and the first amplification factor, or controls the energy consumption unit 400 to be connected to the ground GND; when the absolute value of the power difference is greater than or equal to the first power threshold and less than the second power threshold, the control unit 600 controls the adjustment of the voltage value of the first DC power DC1, the voltage value of the second DC power DC2, and the first amplification factor, or controls the energy consumption unit 400 to be connected to the ground GND. The control unit 600 controls the voltage value of the first direct current power DC1, the voltage value of the second direct current power DC2 and one of the first amplification factors, and controls the energy consumption unit 400 to be disconnected from the ground GND; when the absolute value of the power difference is less than the first power threshold and greater than zero, the control unit 600 controls the voltage value of the first direct current power DC1, the voltage value of the second direct current power DC2 and one of the first amplification factors, and controls the energy consumption unit 400 to be disconnected from the ground GND; when the absolute value of the power difference is equal to zero, the control unit 600 stops controlling the voltage value of the first direct current power DC1, the voltage value of the second direct current power DC2 and any one of the first amplification factors, and controls the energy consumption unit 400 to be disconnected from the ground GND.

[0049] Further, when the control unit 600 controls and adjusts the voltage value of the first direct current power DC1, the voltage value of the second direct current power DC2, and multiple first amplification factors, it can simultaneously control and adjust the voltage value of the first direct current power DC1, the voltage value of the second direct current power DC2, and multiple first amplification factors, or it can control and adjust the voltage value of the first direct current power DC1, the voltage value of the second direct current power DC2, and multiple first amplification factors in sequence. For example, it can control and adjust the voltage value of the first direct current power DC1, control and adjust the voltage value of the second direct current power DC2, and control and adjust the first amplification factor in sequence to increase the adjustment speed.

[0050] It should be noted that the above control and adjustment method is only exemplary, and other control and adjustment methods can be performed according to specific needs, as long as the power value of the radio frequency power RFP transmitted to the load RL can be adjusted to the target power value within a preset time.

[0051] In some embodiments, the control unit 600 can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0052] Please also read Figure 3 , Figure 3 Schematic diagram of a circuit of an energy consumption unit in some embodiments of the present application. Figure 1 , Figure 3 As shown, the energy consumption unit 400 includes a first resistor R1 and a first switch S1, one end of the first resistor R1 is connected to the connection point between the RF power amplifier circuit 200 and the output terminal 500, and the other end of the first resistor R1 is selectively connected to or disconnected from the ground GND through the first switch S1. The first switch S1 is used to connect or disconnect the energy consumption unit 400 to or from the ground GND when it is turned on or off.

[0053] The control unit 600 may be connected to the first switch S1 to control the on or off of the first switch S1.

[0054] Therefore, the above-mentioned RF power supply device 10 in the present application, by setting the first switch S1, can connect or disconnect the energy consumption unit 400 to or from the ground GND when the first switch S1 is turned on or off, and by setting the first resistor R1, can consume part of the RF power RFP when the first switch S1 is turned on, so that only the remaining part of the RF power RFP is transmitted to the load RL through the output terminal 500.

[0055] In some embodiments, a terminal of the load RL that is not connected to the output terminal 500 may also be connected to the ground GND.

[0056] The resistance value of the first resistor R1 is less than a preset resistance threshold value. Furthermore, the preset resistance threshold value is related to the resistance value of the load RL.

[0057] In some embodiments, the first resistor R1 may also be an adjustable resistor. The control unit may be connected to the first resistor R1 to adjust the resistance value of the first resistor R1 so that the power value of the RF power RFP transmitted to the load RL is the target power value.

[0058] The RF power supply device 10 of the present application, through the above structure, can provide a variety of different power adjustment methods of the RF power RFP according to the specific needs of the plasma load RL, and can flexibly and quickly realize the power adjustment of the RF power supply device 10, thereby achieving better film forming effect.

[0059] See also Figure 4 , Figure 4 FIG. 1 is a block diagram of a radio frequency power supply system in some embodiments of the present application. Figure 4 As shown, the present application further provides a radio frequency power supply system 1000, and the radio frequency power supply system 1000 includes the radio frequency power supply device 10 in any of the aforementioned embodiments.

[0060] Please refer again Figure 1 .like Figure 1 As shown, the RF power supply device 10 includes an input terminal 100, an RF power amplifier circuit 200, a first DC source 300, an energy consumption unit 400 and an output terminal 500. The RF power amplifier circuit 200 is connected between the input terminal 100 and the output terminal 500, and the RF power amplifier circuit 200 is also connected to the first DC source 300. The energy consumption unit 400 is connected to the connection point between the RF power amplifier circuit 200 and the output terminal 500, and is selectively connected to or disconnected from the ground GND, wherein the input terminal 100 is used to input a first RF signal RF1, and the output terminal 500 is used to connect to a load RL. The first DC source 300 is used to provide the first DC power DC1 to the RF power amplifier circuit 200. The RF power amplifier circuit 200 is at least used to obtain RF power RFP according to the first RF signal RF1 under the energy supply of the first DC power DC1, wherein the power value of the RF power RFP is different at least according to the different voltage values ​​of the first DC power DC1. The energy consumption unit 400 is used to consume part of the radio frequency power RFP when connected to the ground GND, so that only the remaining part of the radio frequency power RFP is transmitted to the load RL through the output terminal 500 .

[0061] The more specific structure of the RF power supply device 10 may refer to the relevant content of the RF power supply device 10 in any of the aforementioned embodiments, which will not be described in detail here.

[0062] In some embodiments, the RF power supply device 10 may further include a crystal oscillator source connected to the input terminal 100 , and the crystal oscillator source is used to generate the first RF signal RF1 .

[0063] The RF power supply device 10 and RF power supply system 1000 of the present application can provide a variety of different power adjustment methods of RF power RFP according to the specific needs of the plasma load RL, and can flexibly and quickly implement power adjustment of the RF power supply device 10, thereby achieving better film forming effects.

[0064] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A radio frequency power supply device, characterized in that: The RF power supply device includes an input end, a RF power amplifier circuit, a first DC source, an energy consumption unit and an output end, wherein the RF power amplifier circuit is connected between the input end and the output end, and the RF power amplifier circuit is connected to the first DC source, and the energy consumption unit is connected to a connection point between the RF power amplifier circuit and the output end, and is selectively connected to or disconnected from the ground, wherein the input end is used to input a first RF signal, and the output end is used to connect to the load; The first DC source is used to provide first DC power to the radio frequency power amplifier circuit; The RF power amplifier circuit is at least used to obtain RF power according to the first RF signal under the supply of the first DC power, wherein the power value of the RF power is different at least according to the difference in voltage value of the first DC power; The energy consumption unit is used to consume part of the radio frequency power when connected to the ground, so that only the remaining part of the radio frequency power is transmitted to the load through the output end.

2. The radio frequency power supply device according to claim 1, characterized in that: The RF power supply device also includes a control unit, which is connected to the first DC source and the energy consumption unit. The control unit is used to control and adjust the voltage value of the first DC power and / or control the energy consumption unit to be connected to the ground to adjust the power value of the RF power transmitted to the load through the output end.

3. The radio frequency power supply device according to claim 2, characterized in that: The RF power supply device further includes a second DC source, the RF power amplifier circuit includes a RF power amplifier unit and a driving unit, the driving unit is connected between the input end and the RF power amplifier unit, and the driving unit is connected to the second DC source; The second DC source is used to provide second DC power to the driving unit; The driving unit is used to be powered on and work under the supply of the second DC power to convert the first radio frequency signal into a second radio frequency signal; The RF power amplifier unit is used to periodically charge and discharge according to the second RF signal under the supply of the first DC power, so as to convert the first DC power into the RF power; The control unit is also connected to the second DC source, and is further used to control and adjust the voltage value of the second DC power to adjust the power value of the radio frequency power transmitted to the load through the output end.

4. The radio frequency power supply device according to claim 3, characterized in that: The driving unit comprises an adjustable amplifier and a driver, wherein the adjustable amplifier and the driver are sequentially connected between the input end and the RF power amplifier unit; The adjustable amplifier has an adjustable first amplification factor, and the adjustable amplifier is used to amplify the first radio frequency signal by the first amplification factor to obtain an intermediate radio frequency signal; The driver is used to increase the voltage value of the intermediate radio frequency signal under the energy supply of the second direct current power to obtain the second radio frequency signal; The control unit is also connected to the adjustable amplifier, and is further used to control and adjust the first amplification factor to adjust the power value of the radio frequency electric energy transmitted to the load through the output end.

5. The radio frequency power supply device according to claim 4, characterized in that: The RF power supply device further includes an acquisition unit, the acquisition unit is connected to the RF power amplifier unit, and the acquisition unit is used to acquire a first power value of the RF power output by the RF power amplifier unit; The control unit is used to control and adjust the voltage value of the first DC power, the voltage value of the second DC power and one or more of the first amplification factor according to at least the first power value, and / or control the energy consumption unit to be connected to the ground so that the power value of the radio frequency power transmitted to the load through the output end is the target power value.

6. The radio frequency power supply device according to claim 5, characterized in that: The control unit is used to determine a power difference value according to the difference between the target power value and the first power value, and control and adjust one or more of the voltage value of the first DC power, the voltage value of the second DC power, and the first amplification factor according to the relationship between the power difference value and the first group of power thresholds, and / or control the energy consumption unit to be connected to the ground, so as to adjust the power value of the radio frequency power transmitted to the load to the target power value within a preset time period.

7. The radio frequency power supply device according to claim 6, characterized in that: The first group of power thresholds includes a first power threshold, a second power threshold and a third power threshold, and the values ​​of the first power threshold, the second power threshold and the third power threshold increase in sequence.

8. The radio frequency power supply device according to claim 5, characterized in that: The control unit controls the energy consumption unit to be connected to the ground, controls and adjusts the voltage value of the first DC power, controls and adjusts the voltage value of the second DC power, and controls and adjusts the first amplification factor so that the power value of the RF power transmitted to the load is the target power value, and the adjustment speed is reduced in sequence.

9. The radio frequency power supply device according to claim 1, characterized in that: The energy consumption unit includes a first resistor and a first switch, one end of the first resistor is connected to a connection point between the RF power amplifier circuit and the output end, and the other end of the first resistor is selectively connected to or disconnected from the ground through the first switch; The first switch is used to connect or disconnect the energy consumption unit to the ground when it is turned on or off.

10. A radio frequency power supply system, characterized in that: Comprising the radio frequency power supply device as described in any one of claims 1-9.

Images